Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
GF100 Series
Brooks® GF100 Series
High Purity/Ultra-High Purity Digital Thermal
Mass Flow Devices
Model GF125 Analog I/O |
Model GF125 Digital I/O |
Model GF135 Analog I/O |
Model GF121 Analog I/O |
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Essential Instructions
Read before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
•To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed this warning can result in serious personal injury and / or damage to the equipment.
•If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
•Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING:Priortoinstallationensurethisinstrumenthastherequiredapprovalratingstomeetlocalandnationalcodes.Failuretoheedthiswarningcan
resultinseriouspersonalinjuryand/ordamagetotheequipment.
•Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.
•Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure.
•Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
•Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons.
WARNING:Forliquidflowdevices,iftheinletandoutletvalvesadjacenttothedevicesaretobeclosedforanyreason,thedevicesmustbecompletely
drained.Failuretodosomayresultinthermalexpansionoftheliquidthatcanrupturethedeviceandmaycausepersonalinjury.
European Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
•The Specifications Section of this manual contains instructions related to the PED directive.
•Products described in this manual are in compliance with EN directive 2014/34/EU.
•All Brooks Instrument Flowmeters fall under fluid group 1.
•Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
•Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
European Electromagnetic Compatibility (EMC)
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping. The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification. The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
ESD (Electrostatic Discharge)
CAUTION:Thisinstrumentcontainselectroniccomponentsthataresusceptibletodamagebystaticelectricity.Properhandlingproceduresmustbeobserved
duringtheremoval,installationorotherhandlingofinternalcircuitboardsordevices.
Handling Procedure:
1.Power to unit must be removed.
2.Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.
3.Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Dear Customer,
GF100 Series
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com.
Yours sincerely,
Brooks Instrument
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
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Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Contents
GF100 Series
Paragraph |
Page |
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Number |
Number |
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Section 1 General Information |
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1-1 |
Introduction ................................................................................................................................... |
1-1 |
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1-2 |
How to Use This Manual ............................................................................................................... |
1-1 |
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1-3 |
Product Support References ......................................................................................................... |
1-2 |
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1-4 |
Notice and Caution Statements ..................................................................................................... |
1-2 |
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1-5 |
Product Warranty .......................................................................................................................... |
1-2 |
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1-6 |
How to Order a GF100 Series Device ........................................................................................... |
1-2 |
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1-7 |
Industry Standard References ....................................................................................................... |
1-2 |
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1-8 |
GF100 Series Gas Table ............................................................................................................... |
1-2 |
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1-9 |
Glossary of Terms and Acronyms ................................................................................................. |
1-2 |
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1-10 |
Description .................................................................................................................................... |
1-5 |
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1-11 |
Specifications for GF100 Series Devices ...................................................................................... |
1-8 |
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Section 2 Installation |
2-1 |
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2-1 |
General ......................................................................................................................................... |
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2-2 |
Receipt of Equipment .................................................................................................................... |
2-1 |
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2-3 |
Recommended Storage Practice .................................................................................................. |
2-1 |
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2-4 |
Return Shipment ........................................................................................................................... |
2-1 |
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2-5 |
Transit Precautions ....................................................................................................................... |
2-2 |
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2-6 |
Removal from Storage .................................................................................................................. |
2-2 |
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2-7 |
Gas Connections........................................................................................................................... |
2-2 |
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2-8 |
In-Line Filter .................................................................................................................................. |
2-2 |
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2-9 |
Mechanical Installation .................................................................................................................. |
2-2 |
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2-10 |
Flow Controller Installation Arrangement ...................................................................................... |
2-3 |
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2-11 |
Purge the Gas Supply Line Before GF100 Series Installation ....................................................... |
2-4 |
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2-12 |
Position and Mount the GF100 Series .......................................................................................... |
2-5 |
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2-13 |
Perform a Leak Test ...................................................................................................................... |
2-7 |
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2-14 |
Zeroing Setup Process .................................................................................................................. |
2-7 |
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2-15 Zeroing the GF100 Series ............................................................................................................. |
2-7 |
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2-15-1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel ............................. |
2-8 |
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2-15-2 Zeroing GF100 Series Flow from LCD Display Panel ................................................................... |
2-9 |
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2-16 |
Performance Checks .................................................................................................................... |
2-9 |
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2-17 |
Introduction to the MultiFloTM Configurator ................................................................................... |
2-10 |
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2-18 Using the MultiFlo Configurator .................................................................................................... |
2-10 |
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2-19 |
Electrical Connections.................................................................................................................. |
2-12 |
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2-19-1 |
DeviceNet Connections ................................................................................................................ |
2-12 |
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2-19-2 |
Analog/RS485 Connections ......................................................................................................... |
2-13 |
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2-19-3 |
EtherCat Connections .................................................................................................................. |
2-14 |
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2-20 |
GF135 Inlet Valve Installation ....................................................................................................... |
2-16 |
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2-21 |
GF135 Commissioning................................................................................................................. |
2-17 |
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Section 3 Operation |
3-1 |
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3-1 |
General ......................................................................................................................................... |
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3-2 |
Theory of Operation for Flow Measurement ................................................................................. |
3-1 |
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Section 4 Maintenance & Troubleshooting |
4-1 |
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4-1 |
Overview ....................................................................................................................................... |
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4-2 |
Maintenance.................................................................................................................................. |
4-1 |
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4-3 |
Troubleshooting............................................................................................................................. |
4-3 |
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4-4 |
Troubleshooting Checklist ............................................................................................................. |
4-3 |
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4-5 |
GF100 Series Troubleshooting Guide ........................................................................................... |
4-4 |
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Section 5 Product Description Code |
5-1 |
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5-1 |
Overview ....................................................................................................................................... |
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Appendix A: GF100 Series Gas Table |
A-1 |
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A-1 |
Overview ....................................................................................................................................... |
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Appendix B: GF100 Series Patents |
B-1 |
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B-1 |
Overview ....................................................................................................................................... |
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Appendix C: Essential Instructions |
C-1 |
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C-1 |
Overview ....................................................................................................................................... |
i |
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Warranty, Local Sales/Service Contact Information |
Back Cover |
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||||
Contents
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Figure |
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Page |
Number |
Number |
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1-1 |
GF100 Series High Performance Gas Flow Controller Analog and Digital |
.................................... 1-1 |
1-2 |
LCD Display .................................................................................................................................. |
1-7 |
1-3 |
Dimensions - GF100/GF120/GF125 Series ................................................................................. |
1-15 |
1-4 |
Dimensions - GF135, DeviceNet.................................................................................................. |
1-16 |
1-5 |
Dimensions - GF135, RS485 ....................................................................................................... |
1-17 |
1-6 |
Dimensions - GF101/GF121/GF126 ............................................................................................ |
1-18 |
1-8 |
Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications1-19 |
|
2-1 |
Typical Gas Supply Arrangement with Non-PTI MFC.................................................................... |
2-4 |
2-2 |
Typical Gas Supply Arrangement with PTI MFC ........................................................................... |
2-4 |
2-3 |
GF100 Series Mounting Attitude Positions .................................................................................... |
2-5 |
2-4 |
GF100 Series Mounted to K1 Series Substrate Blocks................................................................. |
2-6 |
2-5 |
Mounting Screws Torque Pattern .................................................................................................. |
2-6 |
2-6 |
Display with PSI Reading .............................................................................................................. |
2-8 |
2-7 |
Display Reading Zero PSI ............................................................................................................. |
2-8 |
2-8 |
Display Set to %FS ...................................................................................................................... |
2-10 |
2-9 |
% Flow Display Set to Zero .......................................................................................................... |
2-10 |
2-10 |
MultiFlo Cable Adapter ................................................................................................................. |
2-11 |
2-11 |
USB-RS485 Converter (214F027AAA) ........................................................................................ |
2-11 |
2-12 |
Diagnostic Port Locations ............................................................................................................ |
2-11 |
2-13 GF100 Series DeviceNet Connection .......................................................................................... |
2-12 |
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2-14 GF100 Series with 9-Pin Analog Connector ................................................................................. |
2-15 |
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2-15 Analog 9-Pin Connector (M) ......................................................................................................... |
2-15 |
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2-16 GF100 with EtherCat Communications, M8 Power Connector Location ...................................... |
2-14 |
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2-17 M8 Power Connector Drawing ..................................................................................................... |
2-14 |
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2-18 GF100 Series Electrical Interface Options ................................................................................... |
2-15 |
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2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines........................................... |
2-16 |
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3-1 |
GF100 Series Operating Principles ............................................................................................... |
3-2 |
Table |
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Page |
Number |
Number |
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1-1 |
Industry Standard References ....................................................................................................... |
1-3 |
1-2 |
Terms and Acronyms .................................................................................................................... |
1-4 |
1-3 |
Specifications for Standard GF100/GF120/GF125 Series ............................................................. |
1-9 |
1-4 |
Specifications for Safe Delivery System (SDS) GF120 Series ..................................................... |
1-10 |
1-3 |
Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... |
1-11 |
1-6 |
Specifications for GF135 Series ................................................................................................... |
1-12 |
1-7 |
Specifications for GF101/GF121/GF126 Series ........................................................................... |
1-13 |
1-8 |
Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... |
1-14 |
2-1 |
K1 Series Fasteners...................................................................................................................... |
2-7 |
2-2 |
K1 Substrate Torque Data ............................................................................................................. |
2-7 |
2-3 |
Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ................................................... |
2-10 |
4-1 |
Environmental Factors .................................................................................................................. |
4-3 |
4-2 |
GF100 Series Troubleshooting Guide ........................................................................................... |
4-4 |
5-1 |
GF100, GF120 & GF125 Series Product Description Code .......................................................... |
5-1 |
5-2 |
GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ...... |
5-3 |
5-3 |
Model GF135 Product Description Code....................................................................................... |
5-4 |
5-4 |
GF101, GF121 & GF126 Series Product Description Code .......................................................... |
5-5 |
5-5 |
GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ...... |
5-6 |
A-1A |
GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ...................................................... |
A-1 |
A-1B |
GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 .................................................. |
A-2 |
A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................ |
A-2 |
|
B-1 |
GF100 Series Patents ................................................................................................................... |
B-1 |
ii
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
1-1 Introduction
Designed for semiconductor, MOCVD , and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility. Process throughput and yield are maximized while process costs are reduced by the GF100 Series featuring:
•Ultra fast settling time for quick start up and very rapid process steps
•MultiFlo™ gas and range configurability enabling reconfiguration without removing device from the gas line
•An independent diagnostic/service port to troubleshoot or change flow conditions without removing the mass flow controller from service
•Long-term stability due to extremely low wetted surface area, and corrosion resistant Hastelloy® sensor and valve seat
Optional model variations including—pressure transient insensitivity (PTI) and Safe Delivery System (SDS)
Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital
1-2 How to Use This Manual
This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. The manual is organized in the following sections:
Section 1 Introduction
Section 2 Installation |
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Section 3 Operation |
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Section 4 Maintenance and Troubleshooting |
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Section 5 Product Description Code |
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Appendix A GF100 Series Gas Table |
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Appendix B GF100 Series Patents |
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Appendix C Essential Instructions |
|
Warranty, Local Sales/Service Contact Information |
|
It is recommended that this manual be read in its entirety before attempting |
|
to operate or repair these devices. |
1-1 |
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
1-3 Product Support References
Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include:
- Brooks MultiFloTM Configurator Quick Start Manual:
X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG
- Brooks GF100 Series data sheets: DS-TMF-GF100-Series-MFC-eng DS-TMF-GF135-Series-MFC-eng DS-TMF-GF121-Series-MFC-eng DS-DPT-EtherCAT-GF100-Series-eng
1-4 Notice and Caution Statements
Warning, caution and notice statements are located throughout this manual in the ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. A CAUTION statement indicates a potentially hazardous situation which, if not avoided, MAY result in minor or moderate injury. It may also be used to alert against unsafe practices. A NOTICE statement describes specific information that requires special attention.
1-5 Product Warranty
Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group.
1-6 How to Order a GF100 Series Device
Refer to Section 5.
1-7 Industry Standard References
Refer to Table 1-1.
1-8 GF100 Series Gas Table
Refer to Appendix A.
1-9 Glossary of Terms and Acronyms
Refer to Table 1-2
1-2
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
Table 1-1 Industry Standard References
Reference Number |
Reference Description |
|
MIL-STD-810 |
Method 514.4, Category 1, Transportation Requirement |
|
|
Method 516.4, Procedure 1, Functional Shock Test Requirement |
|
SEMI E12 |
Standard temperature and pressure |
|
SEMI E16 |
Guideline for determining and describing MFC leak rates |
|
SEMI E17 |
Guideline for MFC transient characteristics tests |
|
SEMI E18 |
Guideline for temperature specifications of the MFC |
|
SEMI E27 |
Standard for MFC and MFM linearity |
|
SEMI E28 |
Guideline for pressure specifications for the MFC |
|
SEMI E52 |
Practice for referencing gases used in digital MFCs |
|
SEMI E54 |
Sensor actuator network connections for DeviceNet |
|
SEMI E56 |
Test method for detemining accuracy, linearity, repeatability, short-term |
|
|
reproducibility, hystereses of thermal MFCs |
|
SEMI E66 |
Test method for determining particle contribution by MFCs |
|
SEMI E67 |
Test method for determining reliabilty of MFCs |
|
SEMI E68 |
Test method for determining warm-up time of MFCs |
|
SEMI E69 |
Test method for reproducibilty and zero drift for thermal MFCs |
|
SEMI E80 |
Test method for determining attitude sensitivity of MFCs |
|
SEMI E16-90 |
Guidelines for determining and describing mass flow controllers leak rates |
|
SEMI F19 |
Specification for the finish of the wetted surface of electro polished |
|
|
216L stainless steel components |
|
SEMI F20 |
Specifications for 316L stainless steel bar, extruded shapes, plate, and |
|
|
investment castings for components used in ultra-high purity semi |
|
|
manufacturing applications |
|
SEMI F36 |
Guide for dimensions and connections of gas distribution components |
|
SEMI F37 |
Method for determination of surface roughness parameters for gas |
|
|
distribution system components |
|
SEMI F44 |
Guideline for standardization of machined stainless steel weld fittings |
|
SEMI F45 |
Guideline for standardization of machined stainless steel reducing fittings |
|
SEMI F47 |
Specifications for semiconductor processing equipment |
|
|
voltage sag immunity |
|
SEMI S2 |
Environmental, Health and Safety Guidelines |
|
SEMI S9 |
Dielectric testing |
|
SEMI S10 |
Risk assessment |
|
SEMI S12 |
Decontamination of fielded products |
|
ETG.1000.2 |
Physical Layer service definition and protocol specification |
|
ETG.1000.3 |
Data Link Layer service definition |
|
ETG.1000.4 |
Data Link Layer protocol specification |
|
ETG.1000.5 |
Application Layer service definition |
|
ETG.1000.6 |
Application layer protocol specification |
|
ETG.1020 |
EtherCAT Protocol Enhancements |
|
ETG.2000 |
EtherCAT Slave Information |
|
ETG.5001.1 |
Modular Device Profile - Part 1: General MDP Device Model |
|
ETG.5003.1 |
Semiconductor Device profile - Part 1: Common Device Profile (CDP) |
|
ETG.5003.2020 |
Specific Device Profile: Enhanced Mass Flow Controller |
|
ETG.5003.2021 |
Specific Device Profile: Mass Flow Controller |
|
ETG.5003.2022 |
Specific Device Profile: Mass Flow Meter |
|
ETG.5003.2023 |
Specific Device Profile: Enhanced Mass Flow Meter |
|
1-3
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-2 Terms and Acronyms
Term or Acronym |
Definition |
CSR |
Customer Special Requirement |
CVD |
Chemical Vapor Deposition |
|
|
DeviceNet |
A 5-wire local network I/O communication device |
|
that employs a command/response |
|
communication protocol |
DSP |
Digital Signal Processor |
|
|
EPI Epitaxy (EPI). |
A process technology where a pure silicon |
|
crystalline structure is deposited or “grown” on a |
|
bare wafer, enabling a high-purity starting point |
|
for building the semiconductor device. |
HBD |
Horizontal Base Down |
|
|
GF100 Series |
Integrated Flow Controller |
|
|
F.S. |
Full Scale |
LED |
Light Emitting Diode |
|
|
MFC |
Mass Flow Controller |
MultiFlo Configurator |
I/O communication software package that |
|
configures gas and flow ranges |
|
|
MultiFlo Technology |
A physics-based calibration methodology that |
|
enables gas and flow range configuration within |
|
a defined standard configuration |
PID |
Proportional Integral Derivative Controller |
|
|
PSIA |
Pounds per Square Inch Absolute |
PSID |
Pounds per Square Inch Differential |
|
|
PSIG |
Pounds per Square Inch Gauge |
|
|
PTI |
Pressure Transient Insensitive. Reduces the |
|
effect of pressure fluctuations in gas flow. |
|
Applicable to GF125 only. |
ROR |
As pressure increases, flow increases at a |
|
pressure rate of rise, or ROR. |
HC |
Standard Configuration w/ Hastelloy® sensors |
|
(to reduce reaction to corrosive gases) |
|
|
S.P. |
Setpoint |
Step Technology |
Enables fast set point control through a high |
|
speed DSP and low volume drive circuit |
VIU |
Vertical mounting attitude with inlet side facing up |
|
|
1-4
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
1-10 Description
Ultra Fast Response
The Brooks GF Series patented flow sensor combined with a high speed
ARM processor and fast acting diaphragm-free valve assembly enables:
•Faster response and settling time for improved wafer throughput
•Ultra-fast 1-2 second etch step processing
•Reduced diverted gas consumption and associated abatement costs
•Time sensitive gas delivery steps in Atomic Layer Deposition
•User programmable start-up function for processes requiring a slow ramped gas turn-on or time critical transitions between flow rates
MultiFlo™ Gas and Range Configurability
The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non-linear gases. This is achieved through advanced gas modeling and optimized through actual gas testing. Brooks MultiFloTM allows the device to be quickly and easily configured for another gas and/or flow range without sacrificing accuracy or rangability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, automatically compensates for gas density effects, and ensures smooth overshoot-free transitions between flow rates with excellent steady-state stability. Brooks MultiFlo technology offers unparalleled flexibility. An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations. Process benefits achieved:
•Mass flow controller full scale full range can be rescaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications
•Optimum process and inventory flexibility resulting in dramatically reduced inventory costs
•Fewer configurations/bin sizes required to support many different processes
•Less down-time with rapid process recovery
MultiFloTM Support References: Brooks MultiFlow Configurator Quick
Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))
MultiFloTM Configurator Accessory Kits:
778Z010ZZZ |
Basic MultiFlo Configurator Kit |
|
*Software, MultiFlo Configurator |
A331710003 |
Cable Assembly 2.5mm |
214F027AAA |
USB-RS485 Converter with DB-9 female |
778Z011ZZZ |
Basic MultiFlo Configurator Kit w/Power Supply and |
|
Adapter Cables *Software, MultiFlo Configurator |
A331710003 |
Cable Assembly 2.5mm |
214F027AAA |
USB-RS485 Converter with DB-9 female |
A332295001 |
Power Supply MFC |
A332297002 |
Cable, Power, 9-Pin |
A332297001 |
Cable, Power, DeviceNet |
* MultiFlo Configurator Software is available on the Brooks Instrument
website at: www.BrooksInstrument.com/MultiFlo
1-5
www.BrooksInstrument.com/Documentation&Downloads
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models
Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions. The Brooks GF125 & GF135 (PTI) devices utilize a patented control algorithm that inverts the pressure signal, compares it to the pre-fluctuation signal and drives realtime valve position compensation to maintain stable flow. Enhanced pressure transient is achieved through faster sensing, quicker processing, and a reduction in internal dead-volume between the sensors and valve orifice.
GF101/121/126 based on the same technology and design as the low flow GF's (same sensor, same electronics, low power support)
•Smaller footprint than competitive MFC's
•Handles flow rates up to 300 slpm
•Metal seal for durability and high leak integrity
•Proprietary sensor technology
•Precise flow control with fast sub-1 second settling time
•1% of reading accuracy
•Corrosion-resistant Hastelloy C-22 sensor tube
Optional Safe Delivery System (SDS)— GF120 model only
The Safe Delivery System (SDS) enhanced GF120 model is a state-of-the- art low pressure drop devices for the delivery of sub atmospheric safe delivery system gases used in Implant and Etch processes. The Brooks GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.
Advanced Thermal Flow Measurement Sensor
Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an enhanced sensor manufacturing and burn in process incorporates a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminates thermal siphoning effects. This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition. This design results in:
•Enhanced signal to noise performance for improved accuracy at low set points
•Superior reproducibility at elevated temperature through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation
•Improved long-term stability
1-6
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
High Purity Flow Path
The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. The GF120, GF125 & GF135 devices are constructed with a 4μ inch Ra max surface finish while the GF100 is constructed with a 10μ inch Ra.
•Overall reduced surface area and un-swept volumes for faster dry-down during purge steps
•Long-term sensor and device stability for maximum yield and throughput
Extensive Mechanical Configurations
GF Series supports all metal seal/UHP industry gas connection interface standards for full OEM and process coverage.
•Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2" bodies
•124mm 4 VCR on 1-1/2" body
Figure 1-2 LCD Display
Enhanced Diagnostics and User Interface
The mass flow controller is one of the most complex and critical components in gas delivery systems. When dealing with ultra-high-purity gas distribution or highly toxic or corrosive gases, removing the mass flow controller to assess functionality should be the last resort. Brooks GF Series devices provide for in-line device evaluation and instantaneous troubleshooting through:
•Embedded self test routines and independent diagnostic/service port
•High visibility LCD display with easy accessible push button for local indication of Flow (%), Temperature (oC), Pressure (PSIA/kPa) and Network Address
•Zero button to easily re-zero the device during scheduled maintenance
•Rotatable display with a push button to enable improved readability based on how the MFC is mounted. Simply hold button down for at least 3 seconds to rotate display. This featue is standard for GF135 and GF101/ GF121/GF126 and available for GF100/GF120/GF125.
This combination of features results in limiting service interruption and
reduced downtime.
1-7
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Communication Interfaces
The GF100 Series supports analog 0-5 Vdc, RS485, DeviceNet™ and EtherCAT® communication protocols. Analog connections can be accessed via the DeviceNet or RS485 or Analog only connector options. DeviceNet and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet based communications system know for its high cycle time and cost efficient cabling and master application solutions. The EtherCAT GF100 Series devices conform to the ETG.5003 Semiconductor Device Profile specification. A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the same gas/range but different electrical connectors.
1-11 Specifications for GF100 Series Devices
See Table 1-3 for specifications for standard GF100 Series.
See Table 1-4 for specifications for the Safe Delivery System (SDS) GF120
Series.
See Table 1-5 for specifications for standard GF100 Series-EtherCAT
See Table 1-6 for specifications for the GF135 Series.
See Table 1-7 for specifications for the GF121 Series.
See Table 1-8 for specifications for the GF121 Series-EtherCAT
See Figure 1-3 for dimensions for the GF100 Series.
See Figures 1-4 & 1-5 for dimensions for the GF135 Series.
See Figure 1-6 for dimensions for the GF121 Series.
See Figure 1-7 for dimensions for the GF100/GF121 Series-EtherCAT
1-8
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
Table 1-3 Specifications for Standard GF100/GF120/GF125 Series
Performance |
GF100 |
|
|
GF120 |
|
|
GF125 |
|
|
|
|
|
|
|
|
|
|
||
Full Scale Flow Range (N2 Eq.) |
|
|
3 sccm to 55 slm |
|
|
|
|||
|
|
|
|
|
|
||||
Flow Accuracy |
+1% S.P. > 35-100%, |
+0.35% F.S. 2-35% |
|
||||||
|
|
|
|
|
|
|
|||
Repeatability & Reproducibility |
|
|
< + 0.15% S.P. |
|
|
|
|||
|
|
|
|
|
|
|
|||
Linearity |
|
+ 0.5% F.S. (included in accuracy) |
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
Response Time (Settling Time) |
|
|
|
|
|
|
300ms (3-860 sccm N2 Eq.) |
|
|
Normally Closed Valve |
< 1 sec |
|
|
700ms |
|
|
400ms (861-7200 sccm N2 Eq.) |
|
|
|
|
|
|
|
|
|
|
500ms (7201-30000 sccm N2 Eq.) |
|
|
|
|
|
|
|
|
|
<700ms (30001-55000 sccm N2 Eq.) |
|
Normally Open Valve |
|
|
|
<1.5 sec |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Pressure Insensitivity |
Not |
Applicable |
|
|
|
< 5% SP up to 5 psi/sec upstream press. spike |
|
||
|
|
|
|
|
|
||||
Control Range |
2-100% (Normally Closed Valve) |
3-100% (Normally Open Valve) |
|
||||||
|
|
|
|
|
|
|
|
|
|
MultiFlo |
|
|
|
|
standard |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
#of Bins |
|
|
|
|
11 bins |
|
|
|
|
|
|
|
|
|
|
|
|
||
Valve Shut Down (N.C. Valve) |
|
|
|
< 1% of F.S. |
|
|
|
||
Valve Shut Down (N.O. Valve) |
|
|
|
2% of F.S. |
|
|
|
||
|
|
|
|
|
|
|
|||
Zero Stability |
|
|
< + 0.5% F.S. per year |
|
|
|
|||
|
|
|
|
|
|
||||
Temperature |
Coefficient |
Span: 0.05% S.P. per oC, Zero: 0.005% F.S. per oC |
|
||||||
Ratings |
|
|
|
|
|
|
|
|
|
Operating |
Temperature Range |
|
|
|
10-50oC |
|
|
|
|
|
|
|
|
|
|
|
|||
Differential Pressure Range* |
3-860 sccm = 7-45 psid, |
8617200 sccm = 10-45 psid, |
7201-55000 sccm = 15-45 psid |
|
|||||
|
|
*Argon gas applications require an additional 10 psid differential pressure. |
|
||||||
|
|
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet |
|
||||||
|
|
(example SiCl4). Contact Brooks Technical Support for more information. |
|
||||||
|
|
|
|
|
|
|
|
|
|
Maximum Operating Pressure |
500 psia max |
|
|
|
100 psia max |
|
|||
|
|
|
|
|
|
|
|||
Leak Integrity (external) |
|
|
1x10-10 atm. cc/sec He |
|
|
|
|||
Mechanical |
|
|
|
|
|
|
|
|
|
Valve Type |
|
|
|
|
Normally Closed |
|
|
|
|
|
|
|
|
|
Normally Open |
|
|
|
|
|
|
|
|
|
Meter (no valve) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Wetted Materials |
GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45 |
|
|||||||
|
|
GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45 |
|
||||||
|
|
|
|
|
|
|
|
|
|
Surface Finish |
10μ inch Ra |
|
|
|
|
4μ inch Ra (0.1 μm Ra) |
|
||
Diagnostics & Display |
|
|
|
|
|
|
|
|
|
Status Lights |
|
|
MFC Health, Network Status |
|
|||||
|
|
|
|
|
|
||||
Alarms |
|
Control Valve Output, Network Interruption |
|
||||||
|
|
|
|
|
|
|
|
|
|
Display Type |
|
Top Mount Integrated LCD |
|
|
|
|
|
|
|
Viewing Angle / Viewing Distance |
Fixed / 10 feet |
|
|
|
|
|
|
|
|
Units Displayed / Resolution |
Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit) |
|
|
|
|
||||
Electrical |
|
|
|
|
|
|
|
|
|
Electrical Connection |
RS485/Analog via 9-Pin “D” connector, DeviceNetTM via 5-Pin “M12” connector |
|
|||||||
|
|
|
|
|
|||||
Digital Communication |
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models) |
|
|||||||
|
|
|
|
|
|
|
|
|
|
Diagnostic /Service Port |
RS485 via 2.5mm jack |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Power Supply/Consumption |
DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc |
|
|
|
|||||
|
|
RS485/Analog: 6 Watts max @ +15Vdc. (+10%) or +24 Vdc (±10%) |
|
||||||
Compliance |
|
|
|
|
|
|
|
|
|
EMC |
|
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
|
||||||
Environmental |
Compliance |
RoHS Directive (2011/65/EU) |
|
|
|
|
|
|
|
|
|
REACH Directive EC 1907/2006 |
|
|
|
|
|
|
|
NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications |
|
1-9 |
|||||||
|
|
|
|
|
|
|
|||
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series
Performance |
|
|
|
GF120XSL |
|
GF120XSD |
|
|
|
|
|
Full Scale Flow Range (N2 Eq.) |
4 - 25 sccm |
|
>25 to 1 slpm |
|
|
|
|
Gases Supported |
AsH3, PH3, BF3, SiF4, Ar, Xe, N2O, N2, GeF4, AsF5, PF3, |
||
|
H2Se, HMDSO, HMDSN, H2O*** |
||
|
|
|
|
MultiFlo Programmable |
|
Not Configurable |
|
Flow Accuracy |
+/-1% S.P. >35% F.S. +/-0.35% F.S. <35% F.S. |
||
|
|
|
|
Repeatability & Reproducibility |
|
<+/- 0.15% S.P. |
|
|
|
|
|
Zero Stability |
|
<=0.6% F.S. per year |
|
|
|
|
|
Settling Time (to within +2% F.S.) |
|
< 3 sec |
|
|
|
|
|
Warm Up Time |
|
minimum of 30 minutes |
|
|
|
|
|
Leak Integrity |
|
1X10-11 atm. cc/sec He |
|
|
|
|
|
Valve Shut Down (Leaky by) |
|
<1% F.S. |
|
Operating Conditions |
|
|
|
|
|
GF120XSD |
|
GF120XSL |
|
|
|
|
|
|
Minimum Operating Inlet Pressure* |
|
4 to 20 sccm < 10 Torr |
||
|
|
|
>20 to 50 sccm < 20 Torr |
|
|
|
|
>50 sccm to 1 slpm < 50 Torr |
|
|
|
|
|
|
Maximum Pressure |
|
500 psia max |
||
|
|
|
|
|
Pressure Insensitivity |
|
Not Available |
||
|
|
|
||
DifferentialPressure** |
10 Torr-30 psid typical (1.33-207 kPa typical) |
|||
|
|
|
|
|
Valve Configuration |
|
Normally Closed |
||
|
|
|
|
|
Ambient Temperature Range |
|
10OC-50OC |
||
|
|
|
||
Zero Temperature Coefficient |
Span: 0.05% SP per OC, Zero: 0.005% F.S. per OC |
|||
*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details. **Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details.
***Consult factory for other gases.
1-10
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications
Performance |
GF100 |
|
GF120 |
GF125 |
GF120XSL |
GF120XSD |
|
|
|
|
|
|
|
Full Scale Flow Range |
|
3 sccm to 55 slm |
|
4 sccm to 25 sccm |
>25 sccm to 1 slpm |
|
|
|
|
|
|
|
|
Flow Accuracy |
+1% S.P. > 20-100%; +0.2% F.S. 2-20% |
±1% S.P. 35-100%; ±0.35% F.S. 2-35% |
||||
|
|
|
|
|
|
|
Repeatability & Reproducibility |
|
|
|
< + 0.15% S.P. |
|
|
|
|
|
|
|
|
|
Flow Settling Time (NC Valve) |
|
|
|
300ms (3-860 sccm N2 Eq.) |
|
|
|
< 1 sec |
|
700ms |
400ms (861-7200 sccm N2 Eq.) |
< 3 sec |
|
|
|
|
|
500ms (7201-30000 sccm N2 Eq.) |
|
|
|
|
|
|
<700ms (30001-55000 sccm N2 Eq.) |
|
|
|
|
|
|
|
|
|
Flow Settling Time (NO Valve) |
|
|
<1.5 sec |
|
---------- |
|
|
|
|
|
|
|
|
Pressure Insensitivity |
Not Applicable |
|
< 1% S.P. up to 5 psi/sec |
---------- |
||
|
|
|
|
upstream press. spike |
|
|
|
|
|
|
|
|
|
Control Range |
2-100% (Normally Closed Valve) |
2-100% (Normally Closed Valve) |
||||
|
3-100% (Normally Open Valve) |
|
|
|||
|
|
|
|
|
|
|
MultiFlo |
|
|
Standard |
|
---------- |
|
|
|
|
|
|
|
|
#of Bins |
|
|
11 bins |
|
---------- |
|
|
|
|
|
|
|
|
Valve Shut Down (N.C. Valve) |
|
|
0.15% of F.S. |
|
<1% of F.S. |
|
|
|
|
|
|
|
|
Valve Shut Down (N.O. Valve) |
|
|
2% of F.S. |
|
---------- |
|
|
|
|
|
|
|
|
Zero Stability |
|
< + 0.15% F.S. per year |
|
< + 0.6% F.S. per year |
||
|
|
|
|
|
|
|
Temperature Coefficient |
|
Zero: 0.005% F.S. per oC |
|
Zero 0.005% of F.S. per °C |
||
Ratings |
|
|
|
|
|
|
Operating Temperature Range |
|
|
|
10-50oC |
|
|
|
|
|
|
|
|
|
Differential Pressure Range* |
|
3-860 sccm = 7-45 psid |
|
10 Torr - 30 psid typical |
||
|
8617200 sccm = 10-45 psid |
For more details |
||||
|
7201-55000 sccm = 15-45 psid |
consult factory |
||||
|
|
|
|
|
|
|
Maximum Operating Pressure |
500 psia max |
|
100 psia max |
up to 500 psia max |
||
|
|
|
|
|
|
|
Leak Integrity (external) |
|
|
|
1x10^-10 atm. cc/sec He |
|
|
Mechanical |
|
|
|
|
|
|
Valve Type |
|
Normally Closed |
|
Normally Closed |
||
|
|
Normally Open |
|
|
|
|
|
|
Meter (no valve) |
|
|
|
|
|
|
|
|
|
|
|
Wetted Materials |
SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45 |
|||||
|
|
|
|
|
|
|
Surface Finish |
10μ inch Ra |
|
5μ inch Ra |
5μ inch Ra |
||
Diagnostics & Display |
|
|
|
|
|
|
Status Lights |
|
|
Run, Error, Power, Network Status |
|
||
|
|
|
|
|
|
|
Alarms |
Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag |
|||||
|
|
|
|
|
|
|
Display Type |
|
|
|
Top Mount Integrated LCD |
|
|
|
|
|
|
|
|
|
Viewing Angle / Viewing Distance |
|
|
|
Rotatable / 10 feet |
|
|
|
|
|
|
|
|
|
Units Displayed / Resolution |
|
|
Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit) |
|
||
Electrical |
|
|
|
|
|
|
Electrical Connection |
|
|
Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks |
|
||
|
|
|
|
|
|
|
Digital Communication |
|
|
|
EtherCAT |
|
|
|
|
|
|
|
|
|
Diagnostic /Service Port |
|
|
|
Micro-USB |
|
|
|
|
|
|
|
|
|
Power Supply/Consumption |
320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions) |
|||||
Compliance |
|
|
|
|
|
|
EMC |
EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013 |
|
|
|||
Environmental Compliance |
RoHS Directive (2011/65/EU) |
|
|
|
|
|
|
REACH Directive EC (1907/2006) |
|
|
|
||
*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on |
|
outlet (example SiCl4). Contact Brooks Technical Support for more information. |
1-11 |
|
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-6 Specifications for GF135 Series
Performance
Full Scale Flow Range: |
3 sccm to 5 slm (N2 Eq.) |
|
|
Gasses Supported: |
N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr), |
|
C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He |
|
|
Flow Accuracy: |
+/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.) |
|
|
Repeatability & Reproducibility: |
< +/- 0.15% S.P. |
|
|
Linearity: |
Included in accuracy |
|
|
Settling Time (to within +/-2% FS): |
<300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent) |
|
|
Pressure Insensitivity: |
< 1% S.P. up to 5 psi/sec upstream press. spike |
|
|
Control Range: |
1-100% |
|
|
Valve Shut Down: |
< 0.5% of F.S. N2 |
|
|
Zero Stability: |
< +/- 0.5% F.S. per year |
|
|
Temperature Coefficient: |
Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C |
|
|
Rate-of-Decay Performance: |
(ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned) |
|
|
Flow Rate: |
Maximum flow rate for which an ROD measurement can be obtained is 800 sccm |
|
|
Temperature Sensitivity: |
+/- 0.04% S.P./Deg C |
|
|
Pressure Sensitivity: |
+/- 0.04% F.S./psi |
|
|
Minimum Detectable Change |
Zero Drift: +/- 0.02% F.S. |
from Commissioning Baseline: |
Valve Leak: +0.1% F.S. |
|
Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow) |
Ratings
Operating Temperature Range: |
10-50°C |
|
|
Differential Pressure Range**: |
3-860 sccm = 7-45 psid, 8615000 sccm = 10-45 psid |
|
**Typical pressure drop. Actual pressure drop will be gas and flow dependent. |
|
Argon gas applications require higher differential pressure. |
|
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet |
|
(example SiCl4). Contact Brooks Technical Support for more information. |
|
|
Maximum Operating Pressure: |
100 psia max |
|
|
Pneumatic Valve Operating Pressure: |
43.5 psia - 72.5 psia |
|
|
Leak Integrity (external): |
1x10-10 atm. cc/sec He |
Mechanical
Valve Type: |
Normally Closed |
|
|
Wetted Materials: |
SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45 |
|
|
Surface Finish: |
4μ inch Ra (0.1 μm Ra) |
Diagnostics & Display
Status Lights: |
MFC Health, Network Status |
|
|
Alarms: |
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption, |
|
Sensor Drift, Flow Error, Valve Leak |
|
|
Display Type: |
Top Mount Electronically Rotatable Integrated LCD |
|
|
Viewing Distance: |
Fixed / 10 feet |
|
|
Units Displayed / Resolution: |
Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit) |
Electrical
|
Electrical Connection: |
Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector |
|
|
|
|
|
|
Digital Communication: |
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models) |
|
|
|
|
|
|
Diagnostic / Service Port: |
RS485 via 2.5 mm jack |
|
|
|
|
|
|
Power Supply/Consumption: |
DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc., |
|
|
|
Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10% |
|
Compliance |
|
|
|
|
|
|
|
|
EMC |
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
|
|
Environmental Compliance |
RoHS Directive 2011/65/2006 |
|
1-12 |
|
Reach Directive EC 1907/2006 |
|
|
|
|
|
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
Table 1-7 Specifications for GF101/GF121/GF126 Series
Performance |
GF101 |
|
|
GF121 |
|
GF126 |
|
|
|
|
|
|
|
|
|
Full Scale Flow Range (N2 Eq.) |
|
|
|
55 to 300 slm |
|
|
|
|
|
|
|
|
|
|
|
Flow Accuracy |
|
|
|
+1% S.P. > 35-100%, +0.35% F.S. 2-35% |
|
|
|
|
|
|
|
|
|
|
|
Repeatability & Reproducibility |
|
|
|
< + 0.15% S.P. |
|
|
|
|
|
|
|
|
|
|
|
Linearity |
|
|
|
+ 0.5% F.S. (included in accuracy) |
|
|
|
|
|
|
|
|
|
|
|
Response Time (Settling Time) |
|
|
|
|
|
|
|
Normally Closed Valve |
|
|
|
< 1 sec |
|
|
|
|
|
|
|
|
|
|
|
Pressure Transducer |
|
|
|
|
Ability to measure inlet pressure |
|
|
|
|
|
|
|
|
|
|
Control Range |
|
|
|
5-100% (Normally Closed Valve) |
|
|
|
|
|
|
|
|
|
|
|
MultiFlo |
|
|
|
Standard (All typical high flow rate process gases & mixtures supported) |
|
||
|
|
|
|
|
|
|
|
# of Bins |
|
|
|
4 Bins |
|
|
|
|
|
|
|
|
|
|
|
Control Range |
|
|
|
5-100% (Normally Closed Valve) |
|
|
|
|
|
|
|
|
|
|
|
Valve Shut Down (N.C. Valve) |
|
|
|
< 2% of F.S. @ 30 N2 psig/atm out |
|
|
|
|
|
|
|
|
|
|
|
Zero Stability |
|
|
|
< + 0.5% F.S. per year |
|
|
|
|
|
|
|
|
|
|
|
Temperature Coefficient |
|
Span: 0.05% S.P. per oC, Zero: 0.005% F.S. per oC |
|
|
|||
Ratings |
|
|
|
|
|
|
|
Operating Temperature Range |
|
|
|
10-50oC |
|
|
|
|
|
|
|
|
|
|
|
Differential Pressure Range |
|
|
|
30-90 psid |
|
|
|
|
|
|
|
|
|
|
|
Maximum Operating Pressure |
|
|
|
Controller: 75 psig / Meter: 150 psig |
|
|
|
|
|
|
|
|
|
|
|
Leak Integrity (external) |
|
|
|
1x10-10 atm. cc/sec He |
|
|
|
Mechanical |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Valve Type |
Normally Closed |
|
|
|
|
|
|
|
Meter (no valve) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Wetted Materials |
GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45 |
|
|||||
|
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45 |
|
|||||
|
|
|
|
|
|
|
|
Surface Finish |
10μ inch Ra |
|
|
5μ inch Ra (0.1 μm Ra) |
|
|
|
Diagnostics & Display |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Status Lights |
MFC Health, Network Status |
|
|
||||
|
|
|
|
|
|
|
|
Alarms |
Control Valve Output, Network Interruption |
|
|
||||
|
|
|
|
|
|
|
|
Display Type |
Top Mount Integrated LCD |
|
|
|
|
|
|
Viewing Angle / Viewing Distance |
Fixed / 10 feet |
|
|
|
|
|
|
Units Displayed / Resolution |
Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit) |
|
|
||||
Electrical |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Electrical Connection |
RS485/Analog via 9-Pin “D” connector, DeviceNetTM via 5-Pin “M12” connector |
|
|
||||
|
|
|
|
|
|
|
|
Digital Communication |
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models) |
|
|
||||
|
|
|
|
|
|
|
|
Diagnostic /Service Port |
RS485 via 2.5mm jack |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Power Supply/Consumption |
DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions) |
|
|||||
|
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions) |
|
|
||||
Compliance |
|
|
|
|
|
|
|
EMC |
EC Directive 2004/108/EC |
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
|
||||
Environmental Compliance |
RoHS Directive (2011/65/EU) |
|
|
||||
|
REACH Directive EC 1907/2006 |
|
|
||||
1-13
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications
Performance |
GF101 |
|
GF121 |
|
GF126 |
|
|
|
|
|
|
Full Scale Flow Range |
|
|
55 slm to 300 slm |
|
|
|
|
|
|
|
|
Flow Accuracy |
|
|
+1% S.P. > 35-100%; +0.35% F.S. 2-35% |
|
|
|
|
|
|
|
|
Repeatability & Reproducibility |
|
|
< + 0.15% S.P. |
|
|
|
|
|
|
|
|
Response Time/Settling Time |
|
|
< 1 sec |
|
|
(NC Valve) |
|
|
|
|
|
|
|
|
|
|
|
Pressure Insensitivity |
Not |
Applicable |
|
Ability to measure inlet presssure |
|
|
|
|
|
|
|
Control Range |
|
|
5-100% (Normally Closed Valve) |
|
|
|
|
|
|
|
|
MultiFlo |
|
|
Standard |
|
|
|
|
|
|
|
|
#of Bins |
|
|
4 bins |
|
|
|
|
|
|
|
|
Valve Shut Down (N.C. Valve) |
|
|
<2% of F.S. @30 N2 psig/atm out |
|
|
|
|
|
|
|
|
Zero Stability |
|
|
< + 0.15% F.S. per year |
|
|
|
|
|
|
|
|
Temperature Coefficient |
|
|
Zero: 0.005% F.S. per oC |
|
|
Ratings |
|
|
|
|
|
|
|
|
|
|
|
Operating Temperature Range |
|
|
10-50oC |
|
|
|
|
|
|
|
|
Differential Pressure Range |
|
|
30-90 psid |
|
|
|
|
|
|
|
|
Maximum Operating Pressure |
|
|
Controller: 75 psig |
|
|
|
|
|
Meter: 150 psig |
|
|
|
|
|
|
|
|
Leak Integrity (external) |
|
|
1x10^-10 atm. cc/sec He |
|
|
Mechanical |
|
|
|
|
|
Valve Type |
|
|
Normally Closed |
|
|
|
|
|
Meter (no valve) |
|
|
|
|
|
|
|
|
Wetted Materials |
SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, |
304 Stainless Steel, KM-45 |
|||
|
|
|
|
|
|
Surface Finish |
10μ inch Ra |
|
5μ inch Ra |
|
|
Diagnostics & Display |
|
|
|
|
|
Status Lights |
|
|
Run, Error, Power, Network Status |
|
|
|
|
|
|
|
|
Alarms |
Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag |
||||
|
|
|
|
|
|
Display Type |
|
|
Top Mount Integrated LCD |
|
|
|
|
|
|
|
|
Viewing Angle / Viewing Distance |
|
|
Rotatable / 10 feet |
|
|
|
|
|
|
|
|
Units Displayed / Resolution |
|
|
Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit) |
||
Electrical |
|
|
|
|
|
|
|
|
|
|
|
Electrical Connection |
|
|
Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks |
||
|
|
|
|
|
|
Digital Communication |
|
|
EtherCAT |
|
|
|
|
|
|
|
|
Diagnostic /Service Port |
|
|
Micro-USB |
|
|
|
|
|
|
|
|
Power Supply/Consumption |
320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions) |
||||
Compliance |
|
|
|
|
|
EMC |
EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013 |
|
|||
Environmental Compliance |
RoHS Directive (2011/65/EU) |
|
|
|
|
|
REACH Directive EC (1907/2006) |
|
|
|
|
1-14
Installation and Operation Manual |
Section 1 Introduction |
X-TMF-GF100-Series-MFC-eng |
|
|
|
|
|
|
|
|
|
|
|
Part Number: 541B137AAG |
|
|
|
|
|
|
|
|
GF100 Series |
||
April, 2017 |
|
|
|
|
|
|
|
|
|||
Downport Configurations |
|
|
|
|
|
|
|
|
|
|
|
Electrical Connector |
|
|
Electrical Connector |
|
|
Electrical Connector |
|
|
|||
G1/GX/TX Specific Dimensions |
|
|
DX/BB Specific Dimensions |
|
|
SX Specific Dimensions |
|
||||
E |
|
|
|
3.67in |
|
|
|
3.29in |
|
|
|
|
|
|
|
|
|
|
|
|
|
||
|
|
|
|
93mm |
|
|
|
84mm |
|
|
|
|
|
|
|
|
|
|
|
|
|
.98in |
|
|
|
|
|
|
|
|
|
|
|
25mm |
|
5.09in |
|
4.45in |
|
|
|
|
|
|
|
|
|
129mm |
G |
|
|
|
|
|
|
|
|
|
|
113mm |
|
|
|
|
|
|
|
3.75in |
|
||
|
|
|
|
|
|
|
|
|
|||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
95mm |
|
|
F |
|
|
|
|
|
|
|
|
|
|
A |
|
Fitting Option Code |
Seal Type |
Dim A |
Dim B |
Dim C |
Dim D |
Dim E |
Dim F |
Dim G |
|
|
|
||||||||||
|
|
CX |
|
C-SEAL |
92mm [3.62in] |
105mm [4.13in] |
22mm [0.86in] |
28mm [1.12in] |
83mm [3.28in] |
25mm [1.00in] |
127mm [5.00in] |
C |
D |
EX |
|
W-SEAL |
79.8mm[3.14in] |
93mm [3.66in] |
30mm [1.18in] |
39mm [1.53in] |
72mm [2.82in] |
25mm [1.00in] |
127mm [5.00in] |
WX |
|
W-SEAL |
92mm [3.62in] |
105mm [4.13in] |
22mm [0.86in] |
28mm [1.12in] |
83mm [3.28in] |
25mm [1.00in] |
127mm [5.00in] |
||
|
|
DX |
|
C-SEAL |
79.8mm[3.14in] |
93mm [3.66in] |
22mm [0.86in] |
28mm [1.12in] |
72mm [2.82in] |
25mm [1.00in] |
127mm [5.00in] |
|
|
YX |
|
W-SEAL |
79.8mm[3.14in] |
93mm [3.66in] |
22mm [0.86in] |
28mm [1.12in] |
72mm [2.82in] |
25mm [1.00in] |
127mm [5.00in] |
|
|
AX |
|
C-SEAL |
92mm [3.62in] |
105mm [4.13in] |
30mm [1.18in] |
39mm [1.53in] |
83mm [3.28in] |
25mm [1.00in] |
127mm [5.00in] |
B |
|
BX |
|
W-SEAL |
92mm [3.62in] |
105mm [4.13in] |
30mm [1.18in] |
39mm [1.53in] |
83mm [3.28in] |
25mm [1.00in] |
127mm [5.00in] |
|
|
LX |
|
C-SEAL |
92mm [3.62in] |
105mm [4.13in] |
22mm [0.86in] |
28mm [1.12in] |
83mm [3.28in] |
25mm [1.00in] |
127mm [5.00in] |
VCR Configurations |
|
|
|
|
|
|
|
|
|
|
|
Figure 1-3 Dimensions - GF100/GF120/GF125 Series |
|
|
|
|
|
|
|
|
1-15 |
||
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Model GF135, DeviceNet, C-Seal Connections
Model GF135, DeviceNet, VCR Connections
1-16 Figure 1-4 Dimensions - GF135, DeviceNet
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 1 Introduction
GF100 Series
Model GF135, RS485, C-Seal Connections
Model GF135, RS485, VCR Connections
Figure 1-5 Dimensions - GF135 Series, RS485 |
1-17 |
Section 1 Introduction |
Installation and Operation Manual |
|
|
X-TMF-GF100-Series-MFC-eng |
|
GF100 Series |
Part Number: 541B137AAG |
|
April, 2017 |
|
|
C-Seal Configurations |
|
|
VCR Configurations |
|
1-18 |
Figure 1-6 Dimensions - GF101/GF121/GF126 |
|
Installation and Operation Manual |
Section 1 Introduction |
X-TMF-GF100-Series-MFC-eng |
|
Part Number: 541B137AAG |
GF100 Series |
April, 2017 |
|
EtherCAT, Downport Configurations |
|
EtherCAT, VCR Configurations |
|
Figure 1-7 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications |
1-19 |
Section 1 Introduction
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
1-20
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017
Section 2 Installation
GF100 Series
2-1 General
This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.
2-2 Receipt of Equipment
When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters
This device has been assembled, calibrated, and double-vacuum bagged in a Class 100 clean room. In your semi-clean area, remove the outer bag only. Pass the device into your clean area. Remove the second clean room compatible bag only when the device is ready to be tested and/or installed in your clean system.
2-3 Recommended Storage Practice
If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions:
•Within the original shipping container.
•Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C (45°F) minimum.
•Relative humidity 45% nominal, 60% maximum, 25% minimum.
2-4 Return Shipment
Prior to returning any instrument to the factory for any reason, visit our website for instructions on how to obtain a Return Materials Authorization Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. All instruments returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument.
Instrument must have been purged in accordance with the following:
2-1
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