DS-TMF-GF100-Series-MFC-eng
May, 2019
Data Sheet
GF Series
GF100 Series
Thermal Mass Flow
High Purity/Ultra-High Purity
Digital Thermal Mass Flow Devices
Overview
Designedforsemiconductor,MOCVD,andothergasflowcontrolapplicationsthatrequire a high purity all-metal flow path, the Brooks® GF100 Series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility. Highlights of the GF Series industry-leading features include: ultra fast 300 millisecond settling time, MultiFlo™gasandrangeprogrammability,optionalpressuretransientinsensitivity(PTI),local display,extremelylowwettedsurfacearea,andcorrosionresistantHastelloy® sensortube andvalveseat.TheGF100Serieshasbeenmarathontestedtooverthreetimesthesemi- conductorindustrystandardforreliability,ensuringrepeatablelow-driftperformanceover time.Anindependentdiagnostic/serviceportpermitsuserstotroubleshootorchangeflow conditions without removing the mass flow controller from service.
The flagship GF125 is a second generation multi-variable, pressure transient insensitive mass flow controller. This product builds upon Brooks’leadership position in pressure transient insensitive (PTI) mass flow controller technology, minimizing process gas flow variationduetopressureandtemperaturefluctuations.TheGF125enablescustomersto simplify and reduce the size and cost of gas panels by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware.
MultiFlo™gasandrangeprogrammability,apatentedtechnologydevelopedandrefined by Brooks over the last 10 years, has changed the mass flow controller industry by offering customers the ability to select new gas calibrations and full scale ranges without the trouble and cost of removing the mass flow controller from the gas line.The GF Series fourthgenerationMultiFlotechnologycontinuestoleadthemarketwiththemostaccurateandbroadestrangeperformancethroughextensiverefinementandphysicalvalidation on critical process gases.
Product Description
The GF100 Series is a highly configurable platform based on a novel modular architecture. Already widely adopted by semiconductor, vacuum thin film, solar, and relatedcustomers,theGF100Seriesfeaturesetwascarefullyselectedtoenabledrop-in replacementandupgradeofmostbrandsofmetal-sealmassflowcontrollers,including the former Celerity, UNIT, Tylan, and Mykrolis brands. With the wide range of options andfeaturesavailable,theGF100Seriesprovidesuserswithapathtosimplificationand standardization, greatly reducing spares inventory and support costs.
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Features and Benefits
Convenient Service Port
•Easy diagnostics and troubleshooting
•Independent of tool communication
User Interface
• Easy installation, start-up, and operation
Magnetically Coupled Valve
•Corrosion resistant all metal valve
•Diaphragm free design, unaffected by differential pressure
•High purge rate capability
•Tested for over seven million cycles with no failures
Pressure Sensor
•Stable flow control regardless of upsets or fluctuations in delivery pressure
Second Generation T-Rise Sensor
•Excellent long-term stability (<+0.5% F.S/yr.)
•Improved signal to noise ratio
•High purge rate capability
•Lowertemperatureoperationforgases prone to thermal decomposition
Temperature Sensor
•Accurate flow and temperature measurement over full temperature range
•Real-timecompensationforambienttemperature flucuations enable precise gas chemistry control
Features |
Benefits |
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MultiFlo Gas and Range Configurability |
Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without |
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the time and costs of removing the device from the gas line. |
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User Accessible Service Port with Advanced |
Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user |
Diagnostics with User-Friendly Interface |
specified limits for high yield and maximum uptime. |
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Corrosion Resistant Hastelloy T-Rise Sensor |
Provides unmatched long-term sensor stability ensuring maximum yield and throughput. |
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Pressure Transient Insensitivity (PTI), and |
Improves yield. Reduces overall gas panel costs. |
Safe Delivery System (SDS) Options |
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Product Description
By combining Brooks’patented flow sensor technology with a high speed ARM processor and fast acting diaphragm free valve assembly, the GF100 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers, enabling:
•Improvedwaferthroughputbyreducingnonproductiveflow settling steps
•CriticalEtchprocessesrequiringultrafast1-2secondetch steps
•Reduced diverted gas consumption and associated abatement costs
•Time-sensitivegasdeliverystepsinAtomicLayerDeposition
•Forprocessesrequiringaslowrampedgasturn-onortime criticaltransitionsbetweenflowrates.Auserprogrammable ramp function is provided
MultiFlo™ Gas and Range Configurability
A major advancement over traditional single point gas conversionfactors,BrooksMultiFlotechnologydeliversupto a three-times improvement in process gas accuracy. This is achievedthroughadvancedgasmodelingoptimizedthrough actual gas testing providing compensation for non-linear gases.MultiFloalsoallowsthedevicetobequicklyandeasily configuredforanothergasand/orflowrangewithoutsacrificing accuracy or rangability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settingsfordynamiccontrol,automaticallycompensatesforgas densityeffects,andensuressmooth,overshoot-freetransitions between flow rates with excellent steady-state stability.
Brooks MultiFlo technology offers unparalleled flexibility; a singledevicecanbeprogrammedforthousandsofdifferentgas and flow range configurations.
Re-programming is simple and fast; a new gas and range can beprogrammedinunder30seconds.Brooksprovidesafullgas database to ensure the true value of MultiFlo is realized:
•Dramatically reduces inventory costs
•Massflowcontrollerfullscaleflowrangecanre-scaleddown typically by a factor of 3:1 with no impact on accuracy, turndownorleakbyspecifications,foroptimumprocessand inventory flexibility
•Upto40%fewerconfigurationsrequiredtosupporttypical etch and CVD processes verses our closest competitor
•Widestprocessgascoveragethroughextensivegaslibrary
•Massflowcontrollerscanbereplacedinonlyafewminutes
•Off-theshelfsparesprogrammabilityenablesrapidprocess recovery
•Maximum flexibility for research applications
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100 |
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Full Scale) |
80 |
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60 |
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(% of |
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Set Point |
40 |
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20 |
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0 |
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0 |
1 |
2 |
3 |
4 |
5 |
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Time in Seconds |
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-20 |
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Set-Point (% FS) |
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Brooks GF125 |
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Competitor A |
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Competitor B |
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Comparison of GF vs Competitors response time to ascending & decending setpoints
MFC |
MFC |
MFC |
MFC |
GF Series |
3.6L He |
3.6L Ar |
1.6L Xe |
2.6L H2 |
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MFC |
MFC |
MFC |
MFC |
MFC |
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=2.6L CO 2.1L HBr 2.6L N2 1.6L C12
MFC |
MFC |
MFC |
MFC |
1.8L H2Se 2.0L NH3 1.9L PH3 1.7L COS
MFC |
MFC |
MFC |
... |
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1.5L SiH4 1.3L NF3 1.5L COF2
MultiFloTM technology allows one GF Series to be programmed for thousands of different gases and flow ranges
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Competito r A |
Competito r B |
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# of |
GF1xx |
Series |
2 Model s |
4 Model s |
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Platforms |
Range |
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Range |
Range |
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1 |
3 - 10 |
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10 |
1 - 5 |
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2 |
11 - 30 |
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17.5 |
6 - 14 |
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3 |
31 - 92 |
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30 |
15 |
- 27 |
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4 |
93 - 280 |
55 |
28 |
- 38 |
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5 |
281 - 860 |
100 |
39 |
- 71 |
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6 |
861 - 2,600 |
175 |
72 |
- 103 |
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7 |
2,601 - 7,200 |
300 |
104 |
- 192 |
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8 |
7,201 - 15,000 |
550 |
193 |
- 279 |
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9 |
15,001 |
- 30,000 |
1,000 |
280 |
- 754 |
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10 |
30,001 |
- 40,000 |
1,750 |
755 |
- 2,037 |
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11 |
40,001 |
- 55,000 |
3,000 |
2,038 - 5,500 |
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12 |
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5,500 |
5,501 - 11,000 |
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13 |
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10,000 |
11,001 - 30,000 |
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14 |
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22,000 |
30,001 - 50,000 |
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15 |
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30,000 |
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16 |
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50,000 |
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The Brooks Advantage! Less platforms means more process flexibility and lower cost of spares.
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Product Description
MultiFloTM Configurator Accessory Kits:
778Z010ZZZ |
Basic MultiFlo Configurator Kit |
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*Software, MultiFlo Configurator |
124Y211AAA |
Best/Multiflo Cable - USB to RS485 |
778Z011ZZZ |
Basic MultiFlo Configurator Kit |
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w/Power Supply and Adapter Cables |
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*Software, MultiFlo Configurator |
124Y211AAA |
Best/Multiflo Cable - USB to RS485 |
A332295001 |
Power Supply MFC |
A332297002 |
Cable, Power, 9-Pin |
A332297001 |
Cable, Power, DeviceNet |
*MultiFloConfiguratorSoftwareisavailableontheBrooks Instrumentwebsiteat:www.BrooksInstrument.com/MultiFlo
Pressure Transient Insensitivity (PTI) (GF125 only)
Cost and space constraints are driving gas panel designers to remove point of use pressure regulators and pressure monitoring components, placing more burden on the mass flowcontrollertocontrolaccuratelyunderdynamicpressure conditions.Conventionalmassflowcontrollersreactstrongly to small inlet pressure fluctuations resulting in unstable performanceandunpredictableaccuracy(seeNon-Pressure Insensitive MFC). This drove Brooks to develop Pressure TransientInsensitivemassflowcontrollertechnology(PTI-MFC).
The GF125 PTI-MFC is a second generation PTI-MFC utilizing apatentedcontrolalgorithmthatinvertsthepressuresignal, comparesittothepre-fluctuationsignalanddrivesreal-time valvepositioncompensationtomaintainstableflow.Enhanced pressure transient insensitivity is achieved through faster sensing, faster processing, and a reduction in internal deadvolume between the sensors and valve orifice.
Advanced Thermal Flow Measurement Sensor Brooks’ proprietary sensor technology combines:
•Improvedsignaltonoiseperformanceforimprovedaccuracy at low setpoints
•Improvedreproducibilityatelevatedtemperaturesthrough new isothermal packaging, onboard conditioning electronics with ambient temperature sensing and compensation
•Improved long-term stability through enhanced sensor manufacturing and burn in process
•Highly corrosion resistant Hastelloy C-22 sensor tube
•Optimized temperature profile for gases prone to thermal decomposition
•Unique orthogonal sensor mounting orientation
-Eliminates sensor drift caused by valve heating effects -Eliminates thermal siphoning effects for the most common mounting orientations
Pressure Flucuations in Non-Pressure Transient Insensitivty MFC
Stable Pressure with Pressure Transient Insensitivty GF Device
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