Panasonic FR-H10-KV1 Manual

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Panasonic FR-H10-KV1 Manual

OPTICAL FIBER HEAD

WAFER MAPPING FIBER

FR-KV1Retroreflective Type

SERIES

FT-KV1Thru-beam Type

SERIES

ULTRA-COMPACT FIXED-FOCUS REFLECTIVE FIBER

FD-WL48

Retrorefelctive type mapping fiber with ultra-thin 2.2 mm 0.087 in body and easy beam axis alignment

FR-KV1

Ultra-compact size

W7.2 H7.5 D2 mm W0.283 H0.295 D0.079 in

FD-WL48

Wafer mapping fiber FR/FT-KV1

NEW Concept !

Retrorefelctive type mapping fiber with ultra-thin 2.2 mm 0.087 in body and easy beam axis alignment

Ultra-thin retroreflective type reduces construction work Retroreflective type

2.0 mm 0.079 in fiber head and an ultra-thin 2.2 mm 0.087 in reflector allow these to be mounted even in thin robot hands. Furthermore, because they are retroreflective type fibers, the amount of wiring needed can be reduced, and the robot hands require less processing and so can be kept strength.

21.5 mm

0.846 in

2 mm

0.079 in

4 mm

Fiber head

 

 

 

0.157 in

 

 

 

 

 

7.5 mm

 

 

0.295 in

 

 

 

 

 

 

 

11.2

mm

 

 

 

 

 

 

2.2 mm

 

0.441 in

0.087 in

 

 

 

Reflector

M1.4 screw mounting

Only 2 mm 0.079 in from tip of the fiber head to the beam axis

2.2 mm

0.087 in

FR-KV1 can be mounted to robot hands with

thicknesses of 2.2 mm 0.087 in

Ultra-narrow beams and extended angular deviation characteristics Retroreflective type

A retroreflective type fiber is used, so that an aperture angle of less than 3 produces an ultra-narrow beam, but still with extended angular deviation characteristics compared to thru-beam types. This allows stronger curvatures in robot hands and reduces the work required for beam axis alignment.

Aperture angle 3

Beam axis alignment for the fiber head relative to the mounting reference surface is carried out at the time of assembly.

Extended reflector angular deviation characteristics

Heat-resistant type available FR-H10-KV1

Resistant to temperatures of 105 C 221 F, so that the robots can be used with confidence for wafer transportation immediately after heat processing.

Thru-beam type fiber FT-KV1 / FT-H10-KV1

Heat-resistant type available FT-H10-KV1

Resistant to temperatures of 105 C 221 F, so that it can be used with confidence for wafer transportation immediately after heat processing.

Ultra-compact size

The ultra-compact size of W2 H1.5 D20 mm W0.079H0.059 D0.787 in means that mounting is possible even in places such as robot hands where space is limited.

2 mm

0.079 in

20 mm

0.787 in

1.5 mm

0

Aperture angle 3 2 mm

0.079 in

With the FT(-H10)-KV1, the fiber can be embedded into a plate with a thickness of 2 mm 0.079 in.

Reduces work required for beam axis alignment

In order to reduce the amount of work required for mounting, beam axis alignment for the fiber head relative to the mounting reference surface is carried out at the time of assembly.

 

Beam axis alignment complete

 

All that is needed

Mounting

is vertical direction

adjustment !

reference

 

surface

 

Extended sensing range

A sensing range of 250 mm 9.843 in (in STD mode) allows easy mapping of 300 mm 11.811 in wafers.

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