User's Manual
Plasma Monitoring
&
Control System
PlasCalc-2000-UV-VIS-NIR
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 1
© Copyright 2004-2011
Ocean Optics Germany GmbH
Thin Film Metrology
Maybachstrasse 11
D- 73760 Ostfildern / Germany
Tel.: +49 (0)711 34 16 96-0
Fax: +49 (0)711 34 16 96-85
E-Mail: thinfilm@oceanoptics.eu
www.oceanoptics.eu
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 2
Contents
1
Safety Instructions ............................................................................................. 1
2
Unpacking Instructions ...................................................................................... 1
3
Introduction ........................................................................................................ 2
4
Installation .......................................................................................................... 3
4.1 Installation .................................................................................................... 3
4.2 Removing PlasCalc ...................................................................................... 3
4.3 System Requirements .................................................................................. 3
5
Description ......................................................................................................... 4
6
Functions of Panel controls ............................................................................... 5
6.1 Front Panel ................................................................................................... 5
6.2 Back Panel ................................................................................................... 6
7
Software ............................................................................................................. 7
7.1 Installation .................................................................................................... 7
7.2 Quickstart ..................................................................................................... 7
7.3 Application Windows .................................................................................... 8
Application Windows.............................................................................................. 8
Menu and Tool Bars .......................................................................................... 9
File List .............................................................................................................. 9
Record/Spectrum Window ................................................................................. 9
Monitor Window ................................................................................................. 9
7.4 Menu Commands ....................................................................................... 10
Menu Commands ................................................................................................ 10
File Menu ......................................................................................................... 10
Edit Menu ......................................................................................................... 11
Recording Menu .............................................................................................. 13
View Menu ....................................................................................................... 18
Window Menu .................................................................................................. 19
Help Menu ....................................................................................................... 19
7.5 Tool Bars .................................................................................................... 20
7.6 Dialogs ....................................................................................................... 23
8
Specifications ................................................................................................... 48
9
End User License Agreement for Software (EULA) ........................................ 49
10 Appendix A ...................................................................................................... 51
10.1
Endpoint detection with the PlasCalc system ......................................... 51
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1 Safety Instructions
Instructions: All the safety and operating instructions should be read before the unit is
operated. Before using the power supply for the first time check for transport damage.
Warning: All warnings on the unit and in the operating instructions should be
adhered to.
Use this instrument in a clean laboratory environment.
Moisture
The unit is designed for operation in dry rooms only.
Heat
The unit should be situated away from radiators, hot bodies, ovens or other heat
sources.
Power Sources
The unit should be connected to a power supply only of the type described in the
operating instructions or as marked on the unit.
Object and Liquid Entry
Care should be taken that objects do not fall, or liquids spilled into the enclosure
through openings.
2 Unpacking Instructions
Your package should contain:
1x PlasCalc-2000-UV-VIS-NIR
1x Power supply 12VDC
1x USB connection cable
1x Software CD
1x This manual
1 Unpack your PlasCalc-2000 carefully. Dropping this instrument can cause permanent
damage.
2 Inspect the outside of the instrument and make sure that there is no damage to your
unit. In case of damage contact the dealer immediately and DO NOT USE THE
INSTRUMENT!
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 1
3 Introduction
Ocean Optics PlasCalc
Process control is essential in industrial plasma applications to ensure reliability and high quality of
the process. For this purpose optical emission spectroscopy (OES) is an excellent tool since this
technique does not affect the plasma and several plasma species can be monitored in real-time
and in-situ.
The Ocean Optics PlasCalc system is designed especially for industrial applications where a
robust set-up and an easy-to-use software are required. The Ocean Optics PlasCalc software is
an easy-to-use Windows® software which can be run interactively for research purposes as well as
stand-alone for process monitoring and controlling. The software can be configured for the use by
technical personal.
Enjoy working with this powerful OES system.
Ocean Optics Germany GmbH
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 2
4 Installation
4.1 Installation
Do not connect the system to the PC before PlasCalc Software has been installed.
Insert the PlasCalc CD in your CD drive and launch the setup program. The setup
program will lead you through the installation process. Please follow the instructions
and fill in the necessary information.
All program files and the Java Runtime Engine will be copied on the hard disk of
your computer. Please make sure that enough free disk space (approx. 100 MByte)
is available.
4.2 Software Update
Disconnect the PlasCalc-2000 system from the PC before updating the software.
Once the system is disconnected install the new version like first time installation.
4.3 Removing PlasCalc
For a complete removal of PlasCalc from your computer please activate the icon
Software in the System Panel of Windows, select PlasCalc in the lower list box and
then press the button Add/Remove. All program files of PlasCalc will be removed
completely from your computer.
4.4 System Requirements
IBM compatible PC with Pentium processor or equivalent and CD drive
Operating system Windows 2000/XP/WIN7 (32bit)
Required free hard disk space:
approx. 100 MByte
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 3
5 Description
With its high resolution miniature fiberoptic spectrometer equipped with a 2048 pixel
CCD and fast acquisition electronics, the PlasCalc acquires plasma light emission
from 200 to 1100 nm in 3 ms. The well engineered PlasCalc process control system
brings the benefits of sophisticated algorithms for data acquisition and signal
treatment. The analog-digital output and input capabilities gives together with full
PC connectivity all options to control the process.
System Setup:
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6 Functions of Panel controls
SMA
-
Connector
Power
6.1 Front Panel
For detection fiber
indicator
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6.2 Back Panel
12VDC Socket
USB
-
Socket
Inputs (4x)
Outputs
Analog outputs
Pinout
Serialnumber
Digital
Type &
Digital
Digital I/O
The digital inputs and outputs are differential I/Os. Therefore you need to connect a signal and a
ground wire to each input and each output.
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 6
7 Software
7.1 Installation
Connect the system to the PC only after the software has been installed.
1. Close all applications running on the PC
2. Insert the software CD into the CD-ROM drive
3. Run the "setup" executable to start the installation process
• Click next on the welcome dialog
• Read the license agreement carefully and click next if you accept it
• Enter a user-name and your organization, choose who should be able to use the
software and click next
• Choose an installation path and click next
• If the settings shown are correct click install
• Click finish to exit the installation routine
• Reboot the PC sot hat the new settings can take effect
7.2 Quickstart
At the first start the following dialog will appear. To do the first measurements select "open default
recipe" and click OK. The application window (Spectrum and Monitor window) will be loaded.
To start Recording spectra goto menu: Recording | Start recording.
To start Monitoring and Recording goto menu: Monitoring | Start monitoring
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Menu Bar and Tool Bar
Record/Spectrum
File List
Monitor
7.3
Application Windows
The application window of Mikropack PlasCalc is divided in the following windows:
Menu and tool bars: main window with menu and tool bar commands
File list: listing of all open files and tracks
Record/Spectrum: window with currently recorded spectrum
Monitor: window with monitor tracks
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Menu and Tool Bars
This is the main window of the application which appears after starting the program. The menus
and toolbars contain all commands available as it is common in Windows® applications.
File List
The file list is a summary of all open files with a listing of the tracks for each file. The check box in
front of each track indicates whether a track is visible or hidden. The check box of the currently
selected track is displayed in red and the background color of the track name corresponds to the
system color for selections.
Pressing the right mouse button above a track or file name will open up a menu with commands
available for that track or file.
Record/Spectrum Window
While recording this window displays the currently acquired spectrum as well as the background
and reference spectrum. Lines and integrals are indicated and you may add, change or delete
those lines and integrals for monitoring or evaluation purposes.
When evaluating spectral data you may open and superpose as many spectra as you like in this
window.
Monitor Window
In the monitor window the time tracks of the intensities of selected lines and integrals are
displayed. Tracks can be added by selecting a line or integral in the Record/Spectrum window and
by carrying out the command Add line/integral as monitor track.
When evaluating monitor data a saved PlasCalc File (.pcf) is displayed in this window.
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 9
7.4
Menu Commands
7.4.1
New ... <
Create one of the following configurations as new:
New record
New monitor
Open ...
Open a spectrum or an existing PlasCalc File (.pcf).
Save
Save the data of the active window in ASCII format. You will be asked which spectra or time tracks
you want to save.
Close
Close the active window with all spectra and/or PlasCalc Files.
File Menu
Print...
Print the active window. For the setting up the printer please refer to the options section in the
printer set-up.
Start options ...
Open the dialog for changing the start options.
Operation mode <<<<
Select the operation mode and configure the user mode
Administrator mode
User mode
User setting
Changing between administrator and user mode requires a password. The default password is
"admin".
If you don't remember your password copy the default administration file "admin" from the
installation CD in the program folder.
Exit
Close the application Ocean Optics PlasCalc stopping all recording processes.
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7.4.2
XY-Autoscale
Set the display ranges of the wavelength/time and of the signal to the minimum and maximum data
values of the selected file.
This will display all data of the selected file.
X-Autoscale
Set the display range of the wavelength/time to the minimum and maximum data values of the
selected file.
The display range of the signal remains unaffected.
Y-Autoscale
Set the display range of the signal to the minimum and maximum data values within the displayed
wavelength/time range of the selected file.
The display range of the wavelength/time remains unaffected.
XY-Autoscale single track
Set the display ranges of the wavelength/time and of the signal to the minimum and maximum data
values of the selected spectrum/track.
This will display all data of the selected track.
Edit Menu
X-Autoscale single track
Set the display range of the wavelength/time to the minimum and maximum data values of the
selected spectrum/track.
The display range of the signal remains unaffected.
Y-Autoscale single track
Set the display range of the signal to the minimum and maximum data values within the displayed
wavelength/time range of the selected spectrum/track.
The display range of the wavelength/time remains unaffected.
Add line
Add a line to the selected spectrum.
This line may be used for monitoring the time dependency of the intensity.
Add integral
Add a line integral to the selected spectrum.
This line integral may be used for monitoring the time dependency of the intensity.
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Delete line/integral
Delete selected line or line integral.
If this line or line integral was connected to a monitor track the corresponding monitor track will be
deleted as well.
Configure plot ...
Open the dialog for setting up or changing the plot options.
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7.4.3
Recording Menu
New record
Create a new record file.
Start recording
Start recording spectral data.
Stop recording
Stop recording spectral data.
Suspend record display
Suspend record display while recording data.
Since updating the display consumes a lot of CPU time this option may be helpful for
measurements in which time is critical.
Configure recording
Open the dialog for setting up and changing the recording options.
Save current spectrum
Save the current spectrum while recording.
This button is only available if the Save spectra on demand option is selected in the Dialog Record
Options. The file name for saving must also be specified in that dialog or in the dialog Monitor
Options.
Recording mode | Spectrum mode
Switch to Spectrum mode. In this mode unprocessed spectra are shown
Recording mode | Transmission mode
Switch to transmission mode. In this mode transmission spectra are shown. Transmission is
calculated using the actual spectrum and a reference and dark spectrum which have to be defined
before.
Recording mode | Reflection mode
Switch to reflection mode. In this mode reflection spectra are shown. Reflection is calculated using
the actual spectrum and a reference and dark spectrum which have to be defined before.
Recording mode | Absorption mode
Switch to absorption mode. In this mode absorption spectra re shown. Reflection is calculated
using the actual spectrum and a reference and dark spectrum which have to be defined before.
Switching between the recording modes is only possible while recording and monitoring are
stopped.
Ocean Optics Germany GmbH PlasCalc 2000 Thin Film Metrology 13
Reference spectrum | Subtract reference spectrum
Switch on/off automatic subtraction of reference spectrum while recording.
Reference spectrum | Take current spectrum as reference spectrum
Set current spectrum as reference spectrum.
Reference spectrum | Open reference spectrum from file
Load a reference spectrum from hard disk.
Reference spectrum | Save reference spectrum to file
If the saving option is selected in the dialog Record Options and default file name for the
reference spectrum is specified, the current spectrum will also be saved to hard disk using the
default file name.
Reference spectrum | Clear reference spectrum
Clear the reference spectrum. All signal values are set to zero.
Intensity calibration | Apply intensity calibration
Activate / deactivate intensity calibration
Intensity calibration | Take current spectrum as calibration spectrum
Set current spectrum as calibration spectrum.
Intensity calibration | Open calibration spectrum from file
Load an existing calibration spectrum from disk
Intensity calibration | Save calibration spectrum to file
Save the calibration spectrum do disk
Intensity calibration | Clear calibration spectrum
Clear the calibration spectrum. All values are set to zero.
Dark spectrum | Subtract dark spectrum
Switch on/off automatic subtraction of background spectrum while recording.
Dark spectrum | Take current spectrum as dark spectrum
Set current spectrum as background spectrum.
If the saving option is selected in the dialog Record Options and default file name for the
background spectrum is specified, the current spectrum will also be saved to hard disk using the
default file name.
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Dark spectrum | Open dark spectrum from file
Load existing dark spectrum from disk
Dark spectrum | Save dark spectrum to file
Save the dark spectrum to disk.
Dark spectrum | Clear dark spectrum
Clear the background spectrum. All signal values are set to zero.
7.4.4 Monitoring Menu
New monitor
Create a new monitor file.
Start monitoring
Start monitoring.
If the option Synchronize recording with monitoring is selected in the dialog Monitor Options
recording spectra will start as well.
Pause monitoring
Pause monitoring.
While pausing monitoring recording spectra will continue. Monitoring time is suspended until
pausing is turned off.
Stop monitoring
Stop monitoring.
If the option Synchronize recording with monitoring is selected in the dialog Monitor Options
recording will stop as well.
Suspend monitor display
Suspend monitor display while recording data.
Since updating the display consumes a lot of CPU time this option may be helpful for
measurements in which time is critical.
Configure monitoring
Open the dialog for setting up and changing the recording options.
Fix plot at minimum x
Fixes the monitor plot at actual x value
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