Leica DM 8000 M, DM 12000 M User Manual

Leica DM8000 M & DM12000 M

See More, Detect Faster – Higher Productivity

Convincing Technical Details

High-throughput Inspection Systems

Inspection, process control and defect analysis of wafers or LCDs and TFTs
has to be fast, accurate and ergonomic. The Leica DM8000 M and DM12000 M
optical inspection microscopes provide an innovative yet cost-effective system
solution for mastering present and future manual inspection challenges with
confi dence. Beside extreme large overview capabilities and high resolution optics
these systems are incorporated in a highly ergonomic design with fully integrated
LED illumination allowing the sample to be illuminated from different angles.

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Larger field of view

Highest resolution

for faster inspection

The Leica DM8000 M and the Leica DM12000 M
feature an integrated macro mode, which gives
you four times the fi eld of view of conventional
scanning objectives. Seeing more means faster
throughput.

from every angle

The new Oblique UV (OUV) mode combines
oblique illumination with UV light, which en­ables you to view a sample in high resolution
from any angle – and enhances the accuracy
of the inspection results.

Higher quality
due to ergonomic design

An ergonomic design enables users to work in
comfort, enhancing their performance and ulti­mately improving the quality of their work.
The Leica DM8000 M/DM12000 M are specifi cally
designed to provide comfort for long hours at the
microscope, and are intuitively operated and easy
to adapt to different users’ microscopy skill levels.

LED illumination
for a cleaner environment

The LED illumination integrated in the
Leica DM8000 M/DM12000 M optimizes
the airfl ow and creates a cleaner cleanroom.
With their long lifetimes and low power
consumption, LEDs also have a lower cost
of ownership.

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Optic – Excellent Image Quality

To achieve fast and reliable results during manual inspection within a very short time, the optical performance of the microscope is a
key element. With the Leica DM8000 M and DM12000 M, Leica Micro systems has developed a series of innovative features that support
the operator in completely new ways.

Macro overview

allows a fi eld of
approx. 40 mm
for fast inspection
work

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6/7/8

High resolution optics incl.
PL APO 150x/0.95 for inspec­tions in BF, DF, DIC, POL, OBL,
UV and OUV

Refl ected light axis, incl.

5

automated aperture disk
with 17 openings, motor­ized or manual contrast
change and integrated

LED illumination

Integrated oblique
illumination

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2

3

Fast switchable OUV contrast
e.g. for edge inspections with
high resolution

4

Transmitted light
axis with fully integrated

power LED

1.

1. Macro

Overview

In the motorized versions of the Leica
DM8000 M and DM12000 M the micro/macro
option for rapid scanning of large compo­nents can be integrated. The macro objective,
which is fully parfocal with all other inspection
objectives, captures an object fi eld of approx.
40 mm on the sample – that’s almost four times
more than with conventional scanning objec­tives. With the Leica macro mode you detect
defects that are invisible using conventional
light microscopes, such as insuffi cient de­velopment at the edge or within the center
of a wafer. Uneven radial fi lm thicknesses are
made visible using the macro overview mode.

The entire scan area can be accurately
checked for possible defects in a fraction of
the time. If you want to take a closer look,
simply press a single button to switch from
macro to micro mode and inspect the defect
in the required contrast mode.

3. Fast Switchable UV

and OUV Contrast

Achieving a higher resolution of the sample
image is done with a single button click using
the Leica DM8000 M and DM12000 M. Press­ing the UV button the visible light is cut and
the sample is illuminated in less than a sec­ond with UV light of 365 nm wavelength, thus
reducing the resolvable structure sizes down
to 0.14 µm. Just one additional button click
gives a completely new visual experience –
the OUV mode, an adjustable UV illumination
beam that allows high resolution edge inspec­tion, for example.

With the Leica macro mode, you detect
defects that are invisible using con­ventional light microscopes, such as
insuffi cient development at the edge.

2.

Half transparent mirror

α

Brightfield objective

2. Integrated Oblique

Illumination

For a quick inspection of edges, e.g. of trans­parent fi lms or solar cells, the oblique illumina­tion is integrated with every Leica DM8000 M
and DM12000 M. By pressing the OBL but­ton, oblique illumination is activated and the
operator can decide which deviation angle α
(see picture 2) of the beam path is applied to
inspect the sample in the best way – fast, re­liable, and with topographic information. The
oblique illumination is combined with visible
light contrast modes such as BF or DIC, but
also with UV light in the OUV mode.

PL FLUOTAR 100x/0.90 – brightfi eld

PL FLUOTAR 100x/0.90 – oblique illumination

Sample

Edges of transparent layers are inspected
using the oblique illumination mode.

3.

A single button click switches from visible
to UV light within 1 second.

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5.

The illumination with powerful LEDs is fully
integrated with the Leica DM8000 M and
DM12000 M stands.

4. Transmitted

Light Axis

The transmitted light axis (TL) is equipped
with a fully integrated LED illumination in the
same way as the refl ected light axis. With the
integrated LED illumination samples such as
transparent LCD panels are inspected with
brightfi eld or with polarized light.

For high precision inspection of semitranslu­cent devices, a single button click is enough
to activate refl ected light (RL) and transmitted
light (TL) simultaneously. Intensity, aperture,
and even contrast mode can be switched
independently for RL and TL. To inspect mi­croscratches, for example, you can have the
OBL mode in RL and polarized light in TL at the
same time and adjust intensity and aperture
of both axes separately. This saves time dur­ing inspection and allows additional informa­tion to be gathered from the sample.

5. Fully Integrated

LED Illumination

The LED illumination is integrated within the
microscope. Without a lamphousing in the
way, there is an optimal airfl ow around the
microscope. A clean solution for the clean­room. The powerful LEDs with a color tem­perature of 4,000 K have a very long lifetime
of up to 25,000 hours yet extremely low power
consumption with the highest illumination
power. For BF, DF or DIC in refl ected light the
powerful LEDs are used in the same way as
for UV illumination or transmitted light inspec­tions. The long lifetime of the LEDs reduces
the downtime of the instrument signifi cantly
as there is no need for bulb exchange. Keep
your environment clean while saving money
and increasing productivity at the same time.

6. Multi-functional

a

150x BF

150x UV

Plan APO 150x/0.90

Top of the line of the inspection objectives is the
multi-functional Plan APO 150x/0.90 objective.
With this single objective, which is fully parfo­cal with all other inspection objectives, the user
works in BF, DF, DIC, POL, OBL, UV and OUV.

a

b

Multi-functional objective: HCX Plan APO 150x/0.90LCD panel in (a) transmitted light only and

(b) transmitted and refl ected light simultaneously

150x OUV

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