Leica DM 8000 M, DM 12000 M User Manual

Leica DM8000 M & DM12000 M

See More, Detect Faster – Higher Productivity

Convincing Technical Details

High-throughput Inspection Systems

Inspection, process control and defect analysis of wafers or LCDs and TFTs
has to be fast, accurate and ergonomic. The Leica DM8000 M and DM12000 M
optical inspection microscopes provide an innovative yet cost-effective system
solution for mastering present and future manual inspection challenges with
confi dence. Beside extreme large overview capabilities and high resolution optics
these systems are incorporated in a highly ergonomic design with fully integrated
LED illumination allowing the sample to be illuminated from different angles.

2

Larger field of view

Highest resolution

for faster inspection

The Leica DM8000 M and the Leica DM12000 M
feature an integrated macro mode, which gives
you four times the fi eld of view of conventional
scanning objectives. Seeing more means faster
throughput.

from every angle

The new Oblique UV (OUV) mode combines
oblique illumination with UV light, which en­ables you to view a sample in high resolution
from any angle – and enhances the accuracy
of the inspection results.

Higher quality
due to ergonomic design

An ergonomic design enables users to work in
comfort, enhancing their performance and ulti­mately improving the quality of their work.
The Leica DM8000 M/DM12000 M are specifi cally
designed to provide comfort for long hours at the
microscope, and are intuitively operated and easy
to adapt to different users’ microscopy skill levels.

LED illumination
for a cleaner environment

The LED illumination integrated in the
Leica DM8000 M/DM12000 M optimizes
the airfl ow and creates a cleaner cleanroom.
With their long lifetimes and low power
consumption, LEDs also have a lower cost
of ownership.

3

Optic – Excellent Image Quality

To achieve fast and reliable results during manual inspection within a very short time, the optical performance of the microscope is a
key element. With the Leica DM8000 M and DM12000 M, Leica Micro systems has developed a series of innovative features that support
the operator in completely new ways.

Macro overview

allows a fi eld of
approx. 40 mm
for fast inspection
work

1

6/7/8

High resolution optics incl.
PL APO 150x/0.95 for inspec­tions in BF, DF, DIC, POL, OBL,
UV and OUV

Refl ected light axis, incl.

5

automated aperture disk
with 17 openings, motor­ized or manual contrast
change and integrated

LED illumination

Integrated oblique
illumination

4

2

3

Fast switchable OUV contrast
e.g. for edge inspections with
high resolution

4

Transmitted light
axis with fully integrated

power LED

1.

1. Macro

Overview

In the motorized versions of the Leica
DM8000 M and DM12000 M the micro/macro
option for rapid scanning of large compo­nents can be integrated. The macro objective,
which is fully parfocal with all other inspection
objectives, captures an object fi eld of approx.
40 mm on the sample – that’s almost four times
more than with conventional scanning objec­tives. With the Leica macro mode you detect
defects that are invisible using conventional
light microscopes, such as insuffi cient de­velopment at the edge or within the center
of a wafer. Uneven radial fi lm thicknesses are
made visible using the macro overview mode.

The entire scan area can be accurately
checked for possible defects in a fraction of
the time. If you want to take a closer look,
simply press a single button to switch from
macro to micro mode and inspect the defect
in the required contrast mode.

3. Fast Switchable UV

and OUV Contrast

Achieving a higher resolution of the sample
image is done with a single button click using
the Leica DM8000 M and DM12000 M. Press­ing the UV button the visible light is cut and
the sample is illuminated in less than a sec­ond with UV light of 365 nm wavelength, thus
reducing the resolvable structure sizes down
to 0.14 µm. Just one additional button click
gives a completely new visual experience –
the OUV mode, an adjustable UV illumination
beam that allows high resolution edge inspec­tion, for example.

With the Leica macro mode, you detect
defects that are invisible using con­ventional light microscopes, such as
insuffi cient development at the edge.

2.

Half transparent mirror

α

Brightfield objective

2. Integrated Oblique

Illumination

For a quick inspection of edges, e.g. of trans­parent fi lms or solar cells, the oblique illumina­tion is integrated with every Leica DM8000 M
and DM12000 M. By pressing the OBL but­ton, oblique illumination is activated and the
operator can decide which deviation angle α
(see picture 2) of the beam path is applied to
inspect the sample in the best way – fast, re­liable, and with topographic information. The
oblique illumination is combined with visible
light contrast modes such as BF or DIC, but
also with UV light in the OUV mode.

PL FLUOTAR 100x/0.90 – brightfi eld

PL FLUOTAR 100x/0.90 – oblique illumination

Sample

Edges of transparent layers are inspected
using the oblique illumination mode.

3.

A single button click switches from visible
to UV light within 1 second.

5

5.

The illumination with powerful LEDs is fully
integrated with the Leica DM8000 M and
DM12000 M stands.

4. Transmitted

Light Axis

The transmitted light axis (TL) is equipped
with a fully integrated LED illumination in the
same way as the refl ected light axis. With the
integrated LED illumination samples such as
transparent LCD panels are inspected with
brightfi eld or with polarized light.

For high precision inspection of semitranslu­cent devices, a single button click is enough
to activate refl ected light (RL) and transmitted
light (TL) simultaneously. Intensity, aperture,
and even contrast mode can be switched
independently for RL and TL. To inspect mi­croscratches, for example, you can have the
OBL mode in RL and polarized light in TL at the
same time and adjust intensity and aperture
of both axes separately. This saves time dur­ing inspection and allows additional informa­tion to be gathered from the sample.

5. Fully Integrated

LED Illumination

The LED illumination is integrated within the
microscope. Without a lamphousing in the
way, there is an optimal airfl ow around the
microscope. A clean solution for the clean­room. The powerful LEDs with a color tem­perature of 4,000 K have a very long lifetime
of up to 25,000 hours yet extremely low power
consumption with the highest illumination
power. For BF, DF or DIC in refl ected light the
powerful LEDs are used in the same way as
for UV illumination or transmitted light inspec­tions. The long lifetime of the LEDs reduces
the downtime of the instrument signifi cantly
as there is no need for bulb exchange. Keep
your environment clean while saving money
and increasing productivity at the same time.

6. Multi-functional

a

150x BF

150x UV

Plan APO 150x/0.90

Top of the line of the inspection objectives is the
multi-functional Plan APO 150x/0.90 objective.
With this single objective, which is fully parfo­cal with all other inspection objectives, the user
works in BF, DF, DIC, POL, OBL, UV and OUV.

a

b

Multi-functional objective: HCX Plan APO 150x/0.90LCD panel in (a) transmitted light only and

(b) transmitted and refl ected light simultaneously

150x OUV

6

7. In-depth

Darkfield

Increased intensity and a higher resolution
combined with a longer working distance
characterize the new in-depth darkfi eld Plan
FLUOTAR objectives. Compared to conven­tional darkfi eld objectives, the image bright­ness has improved signifi cantly while the
working distance has nearly doubled, thus
keeping the sample safe and providing even
more image information.

8. Dedicated Inspection

Objective Series

8.

a

Macro

b

To attain faster and more accurate sample
analysis without damaging the sample, the
PL FLUOTAR LWD and PL APO objectives se­ries are used. While the inspection objectives
of the PL FLUOTAR LWD series feature extra
long working distances for sample protec­tion, the high resolving power and high image
sensitivity of the PL APO objective allow fast,
precise analysis and decisions on the results
viewed.

20x

c

20x

d

Dedicated objectives for the inspection of microelectronic components

20x

Quick macro mode scan (a),
brightfi eld (b), in-depth darkfi eld (c),
differential interference mode (d).
It takes less than a second to switch
contrast modes.

7

Ergonomics – Clean Design

The Leica DM8000 M and DM12000 M inspection microscopes make routine work as comfortable and effortless as possible. Using
these microscopes, which are specifi cally designed for inspection of microelectronics parts, only a few moments are required to ad­just the instrument to the operator’s seated height, posture, arm length, and hand size. Microscopy has never been more comfortable,
enabling fast and precise inspection work.

17

Integrated focus fi nder

Ergo tube

with upright image;
tilt angle 0°–35°;
beamsplitting 0/100%
and 100/0%

9

14/15/16

Support functions

such as the integrated
contrast manager or the
illumination manager

Objective revolver,

6-fold, motorized;
for BD objectives (M32);
with integrated
illumination manager

High precision focus drive

Manual version: 3-gear drive,
height adjustable focus knobs,
sample protection
Motorized version with
magnifi cation related speed
selection and integrated
parfocality function

10

11

13

LED status display

integrated in each
automated version;
indications for contrast
modes, focus setting
and travel speed

12

Freely programmable
function keys, e.g. for

contrast modes BF, DF,
DIC or RL/TL switch or
OBL activation

8

9.

9. Upright Image

Ergo Tube

With an adjustment angle from 0–35°, the
upright image ergo tube fi ts any body shape
and delivers in the version with a 100/0%
(eyepiece/camera) and 0/100% or in the ver­sion 0/100% and 50/50% excellent images at
both the eyepieces and the camera port. For
UV and VIS imaging a separate upright image
ergo tube is used, ensuring that no UV light
passes the eyepieces.

10. Fast, Smooth-moving

Objective Nosepiece

Overview inspections with the macro objec­tive, edge inspection with a 5x or 10x magni­fi cation or review of small details with 100x
or 150x magnifi cation – all these steps of an
exemplary inspection workfl ow often need to
be performed in less than a minute, requiring
highest parcentration accuracy. Especially
developed for use in a cleanroom environ­ment, the sealed 6-fold BD (M32) objective
revolver integrates two separate motors, one
for rotation and the other for fi ne movement,
resulting in fast yet completely smooth move­ment that is an audible sign of its long-life
quality. Comfortable use even with cleanroom
gloves is ensured by easy to reach control
buttons at the front of the instrument.

11. Focus Drive

The manual Leica DM8000 M and DM12000 M
inspection microscopes feature a precision
3-gear system, a sample protection stop, a
torque adjustment mechanism, and height­adjustable focus knobs. A total travel range of
35 mm can be adjusted in the coarse mode,
the fi ne mode or the super-fi ne mode. The
automated Leica DM8000 M and DM12000 M
inspection microscopes are outfi tted with a
motorized focus drive having a travel range of
35 mm with a minimal step size of 3.6 nm and
a maximum speed of 5 mm/sec. The electroni­cally controlled focus drive has fi ve speeds.
Parfocal compensation can be set easily for
all objectives, which eliminates the need for
individual refocusing after objective change.

Height-adjustable
Focus Knobs

No two hands are alike. And so the manual
Leica DM8000 M and DM12000 M micro­scope versions enable every hand to rest
on the table while reaching the focus knobs
in complete comfort. The vertical position of
the focus knobs can be precisely adjusted to
fi t the individual user’s hand. This prevents
hand, arm, and shoulder tension and ensures
a comfortable, fatigue-free grip – without
additional arm supports.

Tilting trinocular tube with upright image
to suit any viewing position

10.

Fast, smooth and reliable long-life
objective change

11.

Height-adjustable focus knobs fi t every
operator’s hand size.

9

12.

The easy to reach variable function
buttons allow a reduction of inspection
time of up to 10%.

13.

Easy to read feedback with the integrated
LED display

12. Programmable

Function Buttons

Inspection routines can differ from sample to
sample. With the introduction of programma­ble function buttons, the speed of operation
can be signifi cantly increased without harm­ing the quality of inspection. Three of the con­veniently arranged buttons with integrated
feedback LED are located on the front of each
Leica DM8000 M or DM12000 M microscope.
Semi-motorized or motorized stands feature
4 additional buttons behind the focus knobs
to provide easy, fast access to the func­tions used most. Additional function buttons
are available on the external Leica STP6000
SmartTouch Panel, on the joystick or on the
Leica SmartMove remote control.

13. LEDs Displaying

Microscopy Status

Immediate feedback of the current contrast
mode, the focus setting or the x, y, z travel
speed (coarse or fi ne mode) is provided for
the user of a motorized and semi-motorized
Leica DM8000 M or DM12000 M microscope
with the integrated LED status display.

14. Motorized Aperture

Diaphragm

All Leica DM8000 M and DM12000 M feature a
motorized disk with 17 stops of various sizes,
which are saved separately for every objec­tive. This allows aperture openings from 5%
to 100% to be approached enabling a 100%
reproducibility of the imaging conditions. To­gether with the light intensity this aperture
information is stored when saving an image
and can be reproduced at any time. This high
reproducibility is especially important for the
review and classifi cation of critical defects.

15. Illumination

Manager

All Leica DM8000 M and DM12000 M inspection
microscopes feature automatic Köhler light
management. This fully integrated illumination
control system detects the selected objective
and automatically sets the user defi ned values
for aperture and light intensity. This reduces
inspection time and signifi cantly supports less
experienced operators. The user can change
these illumination values according to the
requirements of the sample at any time. The
modifi ed settings are automatically saved and
used as the new default values.

The 17-position aperture disk
allows 100% reproducibility.

10

14.

The illumination manager automatically adjusts intensity
and aperture.

17.

16. Contrast Manager

The contrast manager which is integrated
in motorized (and semi-motorized) Leica
DM8000 M or DM12000 M microscopes allows
an easy and very fast change of the contrast
mode: just press one of the programmable
function buttons and all required adjustments
of the light path for the selected contrast are
automatically set. Toggle between brightfi eld
and DF or have the UV and even the OUV
contrast adjusted within less than a single
second. This naturally covers more than just
setting the appropriate refl ector cubes on the
integrated 4 position refl ector turret; it also
includes automatic adjustment of aperture
diaphragm and light intensity.

17. Integrated Focus

Finder

of the user interface with the requirements of
the individual inspection workfl ow.

a

b

Easy focusing of even highly refl ective
surfaces with the focus fi nder

18.

Easy focusing even on highly refl ective surfac­es, such as mirror-like bare wafers, is achieved
with the integrated focus fi nder. With just a 90°
rotation of the focus fi nder knob a round shaped
diaphragm is inserted into the refl ected light
beam path. The correct focus position is easily
found by focusing on the edge of the projected
circle. Fast, easy and reliable.

18. Leica STP6000

SmartTouch Panel

The automated functions of the Leica
DM8000 M or DM12000 M can be controlled
directly on the microscope or on external re­mote devices provided by Leica such as a joy­stick for x, y control (incl. 4 additional function
buttons), the Leica SmartMove for x, y and z
control (incl. 4 additional function buttons) or
the Leica STP6000 SmartTouch Panel for x, y
and z control (incl. 12 additional function but­tons). This selection provides a perfect match

c

Accurate detection in all types of illumina­tion: (a) brightfi eld, (b) in-depth darkfi eld, (c)
DIC (Differential Interference Contrast). With
the contrast manager of the motorized Leica
DM8000 M or DM12000 M microscopes it
takes less than a second to switch modes,
and support operators with little experience
using the system.

The large, clearly arranged display
of the Leica STP6000 shows all settings
at a glance.

18.

Leica SmartMove remote control is used
to control the x, y, and z settings.

11

Serving the Highest Standards

Protecting your investment and your samples

The innovative solutions incorporated into the Leica DM8000 M and DM12000 M go well beyond just the optical and mechanical per­formance of the inspection microscopes. Listening to our customers, we also integrated an innovative service concept, ESD protection
and further measures allowing you to be compliant with the most important industrial standards.

Service interval indicator

19

on back

23

Compliance with
SEMI S2 and S8

20

Fully integrated
electronics

(control and
power supply)

22

Anti-static
protection

21

Precision inspection
stage: travel ranges of

8”x8” or 12”x12”; manual
version with fast adjust­ment handle or motorized
version with precision
4 mm lead screw pitch

12

19.

19. Service Interval

Indicator

In addition to design features such as the
long-life objective nosepiece or the integrat­ed LED illumination the Leica DM8000 M and
DM12000 M inspection microscopes support
the user with information concerning the ser­vice status. A service-interval indication LED
is integrated on the back of each 8” or 12” in­strument.

This allows you to plan preventative mainte­nance well in advance and further reduces
the risk of downtime of the instrument, even
in very demanding applications.

20. Fully Integrated

Electronics

The entire electronics required for control of
nosepiece, illumination, contrasting and xyz
movement for the LED illumination of TL and RL
axis and also for the control of intensity and ap­erture are fully integrated into the stand of the
microscope. Without the need for control boxes
or power supplies the space around the inspec­tion microscope is kept empty and clean.

21. Precision Inspection

and Review Stages

Depending on the requirements and the
sample size different stages are available.
The manual 8“ or 12“ inspection stages are
equipped with a fast adjustment handle. The
positioning of the coaxial drive allows one­hand operation for the control of x, y and z
movement.

Both the motorized 8“ and 12“ review stages
feature a spindle drive with a ball screw pitch
of 4 mm, allowing a fast travel speed of up to
240 mm/sec and at the same time a resolution
of 0.01µm in x and y direction.

Using the motorized review stage, a point of
interest selected in the Leica Application Suite
(LAS) live image shown on the monitor is im­mediately positioned in the center of the fi eld
of view. For live image measurements or im­age analysis, this function is a key element.

A variety of different inserts for the manual
and the motorized 8“ or 12“ stages is used
depending on the size and the type of sample.
Wafer holders (chucks) for 6-8“ or for 8-12“ di­ameters, both with or without vacuum fi xation
or mask holders, steel plates or glass plates –
the user has a wide selection to choose from.
Due to the same internal dimensions of the
stages all inserts fi t each stage and are fully
interchangeable.

The service LED indicates the service
status.

20.

All control elements including electronics
are integrated, leaving space around the
microscope.

a

d

Glass plate (a), metal plate (b), mask holders in different sizes (c), 8-12“ wafer holder (d), 6-8“ wafer holder (e),
6-8“ vacuum wafer holder (f)

b

e

c

f

21.

High precision positioning with dedicated
inspection stages

13

inside a cleanroom as well as special

.

22.

Leica DM8000 M with contamination
protection

22. Anti-static

Protection

For the entire microscope frame including the
tube or the optional adaptable contamination
protection an antistatic coating is applied to
prevent each type of microelectronic compo­nent being destroyed during inspection.

23. Compliance with

SEMI S2 and S8

All Leica DM8000 M and DM12000 M inspec­tion and review microscopes are in accor­dance with SEMI S2-0706 and SEMI S8-0705,
CE and other industry standards. The assem­bly inside a cleanroom as well as special
cleanroom packaging are keys for a high level

leanroom packaging are keys for a high level

of reliability of these systems in the same way

reliability of these systems in the same way

as their ergonomic design or the integrated

s their ergonomic design or the integrated

long-lifetime and safety precautions.

long-lifetime and safety precautions

24. System Integration –

Single-source Supply

With the Leica DM8000 M/DM12000 M, you
have a complete system: the microscope, the
Leica DFC camera and the Leica Application
Suite (LAS) software are perfectly matched.
Or upgrade the Leica DM8000 M/DM12000 M
to an inspection system by choosing a wafer
loader, matching accessories such as vacuum
wafer chucks, and by installing a dedicated
inspection software.

14

Fast but safe wafer handling is achieved with the adaptation of a wafer loader to the Leica DM8000 M, thus increasing
the throughput of the system signifi cantly. Different versions are combinable to the microscope ranging from load-only
function to systems with integrated visual macro front- and back side inspection capabilities.

Selection Overview

Leica DM8000 M

manual focus

Contrast modes

BF

, OBL

DF, DIC

UV/OUV

Macro mode –

LED illumination

Illumination manager

Contrast manager

Stage

Manual version

Motorized (stage control integrated)

Stage control

Joystick

Leica SmartMove

Leica DM8000 M

motorized focus

+

{

{

+

{

{

{

Leica DM12000 M

manual focus

+

{

{

–

Leica DM12000 M

motorized focus

+

{

{

{

++++

++++

{

+ {

–

–

+

+

{

{

{

+

+

{

+

–

–

{

{

Leica STP6000

RL axis

Manual contrast selection

Contrast manager

Focus fi nder

LED status display

6-position nosepiece mot., M32

TL axis

LED illumination

Integrated polarizer

Tube

Ergo trinocular tube w. upright image

Fixed trinocular tube w. upright image

Focus

3-gear manual focus drive

Electronic focus drive

Height adjustable knobs

Parfocality adjustment

–

+

{

+

{

+

{

+
+

{

{

+

–

+

–

{

{

+
+
+
+

{

+
+

{

{

–

+

–

+

–

+

{

+

{

+

{

+
+

{

{

+

–

+

–

{

{

+
+
+
+

{

+
+

{

{

–

+

–

+

+ integrated as standard

{ optional

– not available

15

Technical Specifications

Systems Leica DM8000 M Leica DM12000 M

Optical systems HC optics (infi

Observation tube Trinocular ergo tube with image erection

Switching positions (eyepiece/camera):

Macro imaging Super-widefi eld overview image of up to 40 mm of the sample*

Illumination system Refl ected light illumination system with LED; observation methods:

brightfi eld, darkfi eld, DIC, qualitative POL, oblique, UV, OUV

Integrated automatic aperture diaphragm

Transmitted light illumination system with LED; observation methods: brightfi eld, qualitative POL

4-position refl ector turret (manual/motorized use)

Status feedback Front status display*

Service interval indicator (on back)

Support systems Integrated light manager

Revolving nosepiece Motorized, brightfi eld/darkfi eld (M32), 6-positions with slider slot for DIC

Magnifi cation change via front side control panel or external remote control unit

(Joystick, Leica SmartMove, Leica STP6000)

Stages Manual inspection stage 8 x 8” ; 202 x 202 mm trav-

el range, fast adjustment handle; for refl ected and
transmitted light observation

nity corrected optical system)

100/0% and 0/100%
100/0% and 50/50%

Integrated contrast manager*

Manual inspection stage 12 x 12” ; 302 x 302 mm
travel range, fast adjustment handle; for refl ected
and transmitted light observation

Scanning stage 8 x 8” ; 202 x 202 mm travel range,
motorized, 4 mm spindle pitch; for refl ected and
transmitted light observation*

Repeatability*: < 1 m (bi-directional, measured according to VDI / DGQ 3441)

Accuracy: +/- 5 m

Resolution: 0.01 m (smallest step size)

Orthogonality: < 10 arc sec

Max. travel speed: 240 mm/s, 4 mm ball screw pitch

Stage inserts 6–8” wafer holder w/wo vacuum, 8–12” wafer holder w/wo vacuum, mask holders, RL plate, glass plate

Control units Joystick with 4 freely programmable positions

Leica SmartMove, x, y, z control with 4 freely programmable positions

Leica STP6000 SmartTouch x, y, z control with full remote control of instrument

Focusing mechanism High rigidity manual 2-gear focus; 35 mm stroke; height adjustable focusing knobs

High precision manual 3-gear focus; 35 mm stroke; height adjustable focusing knobs

Motorized 2-gear focus; 35 mm stroke; high repeatability; parfocality adjustment

Electrical system Input rating: 100–120/220–240 V AC, 50/60 Hz, P max = 100 W

Weight approx. 41 kg (microscope approx. 29 kg) approx. 52 kg (microscope approx. 31 kg)

Operation environment For use in industrial environment for EMC performance (class A device).

Use in residential environment may affect other equipment in the environment

Amb. temperature: 15°C–35°C

Relative humidity: 80% for temperatures up to 33°C (without condensation)

Supply voltage fl uctuations: +/- 10%

Installation (overvoltage) category: II ref. IEC60664

Polution degree: 2 ref. IEC60664

16

Scanning stage 12 x 12” ; 302 x 302 mm travel
range, motorized, 4 mm spindle pitch; for refl ected
and transmitted light observation*

* Motorized versions only

Dimensions (in mm)

Leica DM8000 M

Leica DM12000 M

17

System Overview
Leica DM8000 M
Leica DM12000 M

Status: November 2010

Leica DFC cameras

11 543 706

C-mount

1/2

1x

11 543 702

B-mount

1/2

Sony

Leica DFC cameras

1x

33000097
UV-filter kit

11541510

1x

C-mount-adapter 1x

11565026
Tube top with 2 camera ports 50/50
1 port VIS / 1 port UV

11565024
Ergo tube with image erection
0/100 or 100/0 VIS

11565040
Laser autofocus for adaption to
manual focus drive

0.35x

0.55x

C-mount-adapter HC

0.7x

11541512

11541545

115650245
Ergo tube with image erection
0/100 or 100/0 VIS, UV

0.70x

11541544

11541543

1x

11541510

0.33–1.6x

11541517

11888741
RL illumination VIS

11888743
RL axis manual
Microelectronics 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

11888747
Basic stand DM8000 M, manual version, 2 gear
focus drive without TL illumination

11888748
with TL illumination

11888744
RL axis manual
Materials 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

3

11565027
Contamination protection

11888745
RL axis motorized
Microelectronics 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

3

2

11888749
Basic stand DM8000 M, motorized version,
without TL illumination

11888750
with TL illumination

11888742
RL illumination VIS/UV

1111

11888746
RL axis motorized
Materials 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

Leica DM8000 M

18

1

Special objectives

2

Remote controls

11565041
Joystick
Remote control

11505180
Leica SmartMove
Remote control

11501598
Fixed tube 20° with image erection
0/100 or 100/0 VIS

11505252
Manual magnification changer, VIS
1x, 1.5x, 2x

Tubes
Leica DM1000-6000

11888763 Macro overview

11566204 PL APO 150x/0.95 IVIS BD

3 4

8“ stages

11888755
Manual 8“ stage
with fast

2

Inserts and holders

5

Wafer chuck, manual
with vacuum
11565035 8“-12“

Wafer chuck, manual
11565033 8“-12“

adjustment handle

11888757
8“ Scanning stage

5 5

Wafer chuck, manual
with vacuum
11565034 6“-8“

afer chuck, manual

W
11565031 5“-6“
11565032 6“-8“

Mask holder
11565037 4“ x 4“
11565038 5“ x 5“

2

11501255

Leica STP6000
Remote control

12“ stages

11888756
Manual 12“ stage
with fast
adjustment handle

11888758
12“ Scanning stage

11565036
Glass
stage insert

11565029
Metal
stage insert

11888764
RL axis semi-mot
Microelectronics 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

11888762
Basic stand DM8000 M, semi-mot version,
3-gear focus drive, with controls, without TL illumination

11888761
with TL illumination

11888765
RL axis semi-mot
Materials, 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

3

11888751
Basic stand DM12000 M, manual version,
2 gear focus drive without TL illumination

11888752
with TL illumination

11888745
RL axis motorized
Microelectronics 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

4

Leica DM8000 M semi mot Leica DM12000 M

11 11

11888746
RL axis motorized
Materials 4-fold turret,
6-fold mot. nosepiece (M32),
Rear plane with electronics

4

2

11888753
Basic stand DM12000 M, motorized version,
without TL illumination

11888754
with TL illumination

19

“With the user, for the user”
Leica Microsystems

Leica Microsystems operates globally in four divi sions,
where we rank with the market leaders.

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•

The Leica Microsystems Life Science Division supports the
imaging needs of the scientifi c community with advanced
innovation and technical expertise for the visualization,
measurement, and analysis of microstructures. Our strong
focus on understanding scientifi c applications puts Leica
Microsystems’ customers at the leading edge of science.

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•

The Leica Microsystems Industry Division’s focus is to
support customers’ pursuit of the highest quality end result.
Leica Microsystems provide the best and most innovative
imaging systems to see, measure, and analyze the micro­structures in routine and research industrial applications,
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•

The Leica Microsystems Biosystems Division brings his­topathology labs and researchers the highest-quality,
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Leica Microsystems creates better patient care through
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•

The Leica Microsystems Medical Division’s focus is to
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microscope technology today and into the future.

The statement by Ernst Leitz in 1907, “with the user, for the user,” describes the fruitful collaboration
with end users and driving force of innovation at Leica Microsystems. We have developed fi ve
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and representatives in more than 100 countries

by Leica Microsystems CMS GmbH, Wetzlar, Germany, 2011

©

Order no.: English 914 734 • III/11 • Copyright

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