Leica DM8000M, DM12000M User Manual

Leica DM8000 M & DM12000 M

See More, Detect Faster –

High-throughput Inspection Systems

The New Class of Inspection Systems

Inspection, process control and defect analysis of wafers or LCDs
and TFTs has to be fast, accurate and ergonomic. Leica Micro­systems has many years of experience in developing inspection
systems for the semiconductor industry. Using this expertise, we
have developed a totally new line of products for the inspection of
8 and 12 inch wafers.

The Leica DM8000 M and Leica DM12000 M optical inspection
systems provide an innovative yet cost-effective system solution
for mastering present and future inspection challenges with con­fi dence.

More image information in less time

New optical features offered by the
Leica DM8000 M such as the macro mode
or the oblique UV illumination (OUV) not
only improve resolving power but also
speed up sample throughput.

2

Larger field

Top resolution

for faster inspection

The Leica DM8000 M and the Leica DM12000 M
feature an integrated macro mode, giving you four
times the fi eld of view of conventional scanning
objectives. Seeing more means faster throughput.

from every angle

The new Oblique UV (OUV) mode combines
oblique illumination with UV light, which
enables you to view a sample in top resolution
from any angle – and enhances the accuracy
of the inspection results.

Higher quality
due to ergonomic design

An ergonomic design enables users to work in
comfort, enhancing their performance and ulti­mately improving the quality of their work. The
Leica DM8000 M/DM12000 M is specifi cally
designed to provide comfort for long hours at the
microscope, and is intuitively operated and easy
to adapt to different users’ microscopy skill levels.

LED illumination
for a cleaner environment

The LED illumination integrated in the
Leica DM8000 M/DM12000 M optimizes
the airfl ow and creates a cleaner cleanroom.
With their long lifetimes and low power
consumption, LEDs also have a lower cost of
ownership.

3

a

From Macro to Micro –

Defects Don’t Stand a Chance

Macro

b

20x

c

See four times more

To detect macro defects, the Leica DM8000 M and DM12000 M
have a micro/macro mode for rapid scanning of large components.
The macro magnifi cation captures an object fi eld of approximately
40 mm – that’s almost four times more than with conventional
scanning objectives. The entire scan area can be accurately

scanned for possible defects in a fraction of the time.

Change your perspective by keystroke

If you want to take a closer look, just press a single key to switch
from macro to micro mode and inspect the defect in darkfi eld,
brightfi eld or DIC. Press another key to switch to UV mode for
even higher resolution or the OUV mode for a completely new
visual experience. Save valuable time.

New contrasting techniques

20x

for ultra-high resolution

d

Accurate detection in all types of illumination: Quick macro

mode scan (a), particle detection in brightfi eld (b), detection
of micro scratches with in-depth darkfi eld (c), looking for
defects on transparent fi lms with the DIC mode (d). It takes
less than a second to switch modes, and best of all, the mi­croscope integrates a contrast and illumination manager to
support users with little experience using the system.

4

20x

Oblique illumination is an indispensable tool for examining sides,
edges or chipping, whereas UV light is useful for obtaining high­er resolution. The unique OUV mode combines both techniques.

View the sample from all sides, in 3D and in highest resolution.

In-depth darkfi eld contrast

The in-depth darkfi eld contrast reveals far more details of sam­ples than conventional optical techniques. What’s more, the large
working distance protects samples from inadvertent damage dur­ing inspection.

For the Demanding
Production Environment

Keep the environment clean

LED illumination is integrated with the Leica DM8000 M/
DM12000 M. You’ll notice the effect of this smart design on your
working environment: Without a lamphousing to get in the way,
there is an optimal airfl ow around the microscope. A clean solu­tion for the cleanroom.

The powerful LEDs have an extremely long lifetime yet extremely
low power consumption. There is no need for lamp change, and
there are no downtimes for servicing. Help the environment while

saving money and increasing productivity at the same time.

The objective nosepiece of the Leica DM8000 M/DM12000 M is
designed to meet the most demanding cleanroom specifi cations,
also.

Patented for continuous operation

The motorized objective nosepiece is encapsulated and, like the
entire system, designed for the most demanding cleanroom re­quirements. This is a solution that keeps the microscope in ser­vice for years, however tough the conditions.

Effective protection of the samples

The focus stop works both mechanically and electronically to
protect samples from inadvertent damage. With the large vertical
adjustment range of the focus and individually extendable work­ing distance, every sample height is accommodated, from micro­electronic components to polished metal sections, composites or
minerals.

System integration means single-source supply

With the Leica DM8000 M/DM12000 M, you have a complete sys­tem: the microscope, camera and the Leica Application Suite
(LAS) software are perfectly matched.

Or upgrade the Leica DM8000 M/DM12000 M to an inspection or
review system by choosing a wafer loader, matching accessories
such as vacuum wafer chucks, and by installing inspection soft­ware or fi lm thickness measurement software.

Upgrade to an inspection or review system with wafer loader and
customized inspection software

5

Perfect Ergonomics
and Convenience

Ergonomics means higher quality

It has been proven that ergonomically-designed workplaces help
increase productivity and enhance work quality. Adaptable to any
user with its individually adjustable Ergotube and height-adjust­able focus knobs, the Leica DM8000 M/DM12000 M is ideal for
routine inspection and other applications.

Easy to use, even in the cleanroom

Designed to the highest ergonomic standards, the controls are
specifi cally intended for the more diffi cult conditions in the
cleanroom.

Ergonomics in perfection – for consistent, reliable results

The tube and focus knobs can be optimally adjusted to specifi c
body size to reduce user fatigue.

All controls are easy to reach, so that users don’t have to take
their eyes and hands away from the microscope to switch to a
different contrast technique or illumination. The camera’s shutter
release key is integrated with the microscope stand, also. Conve-

nient for the user and saves time.

Helps prevent user error

Even for users with no microscope skills, the Leica DM8000 M/
DM12000 M is easy to use. The controls are preassigned us­ing the memory function, reducing the risk of operation errors.

Intelligent support

The contrast can be selected at the press of a button with
the integrated contrast manager – the relevant parameters
are adjusted accordingly. The integrated illumination man­ager automatically adapts the illumination to the
chosen objective. Ultra-easy operation helps
avoid errors and saves time.

For the inspection of strongly refl ecting sur­faces such as blank wafers, the focus fi nder
is an intelligent feature for quickly focusing
on the detail of interest.

Inspection tasks can be clearly and sim­ply defi ned by different user authorizations
where several users with different skill levels
work at the same microscope.

6

Technical Data

Systems Leica DM8000 M Leica DM12000 M

Optical system Leica HC optics (optical system corrected to infi nity)
Viewing tube Trinocular Ergotube with upright and unreversed image

Macro imaging Super widefi eld overview image with up to 40 mm scan fi eld on the sample
Illumination system – Full LED incident light illumination; viewing techniques:

Status feedback Status indicator on front

Operation support Integrated contrast manager

Objective nosepiece Motorized, brightfi eld/darkfi eld objectives (M32), 6-position
Microscope stages Manual inspection stage 8 x 8”; 202 x 202 mm travel

Switching positions (eyepiece/camera): 100/0 and 0/100

100/0 and 50/50

Brightfi eld, darkfi eld, DIC, qualitative POL, oblique illumination, UV, OUV

– Full LED transmitted light illumination; viewing techniques: Brightfi eld, qualitative POL

Service interval indicator (on back of instrument)

Integrated illumination manager

Manual inspection stage 12 x 12” ; 302 x 302 mm
range, integrated rapid adjustment; for incident and
transmitted light techniques

travel range, integrated rapid adjustment; for incident

and transmitted light techniques

Scanning stage 8 x 8” ; 202 x 202 mm travel range,
motorized, 4 mm pitch; for incident and transmitted
light techniques

Control units Joystick with 4 freely programmable function keys

Leica SmartMove, x,y,z control with 4 freely programmable function keys
Leica STP6000 SmartTouch, x,y,z control with 4 freely programmable function keys

Focus Heavy-duty manual 2-stage focus, coarse and fi ne mode; 35 mm travel range; height-adjustable focus knobs

Precision 3-stage focus with coarse, fi ne and super fi ne mode; 35 mm adjustment range;
height-adjustable focus knobs
Motorized 2-stage focus; 35 mm travel range; high reproducibility; parfocality compensation

Electrical system Supply voltage: 100–120/220–240 V AC, 50/60 Hz
Weight approx. 41 kg (of which microscope approx. 36,1 kg) approx. 52 kg (of which microscope approx. 36,5 kg)
Ambient conditions For use in industrial environments with EMC (Class A threshold).

If used in a protected environment, instruments may infl uence each other
Ambient temperature: 15°C – 35°C
Relative humidity: 80% for temperatures up to 33°C (without condensation)
Voltage fl uctuations: +/- 10%
Over-voltage category: II according to IEC60664
Contamination class: 2 according to IEC60664

Can be delivered in cleanroom packaging (two-layer packaging) on request.

Scanning stage 12 x 12” ; 302 x 302 mm travel range,

motorized, 4 mm pitch; for incident and transmitted

light techniques

7

“With the user, for the user”
Leica Microsystems

Leica Microsystems operates globally in four divi sions,
where we rank with the market leaders.

Life Science Division

•

The Leica Microsystems Life Science Division supports the
imaging needs of the scientifi c community with advanced
innovation and technical expertise for the visualization,
measurement, and analysis of microstructures. Our strong
focus on understanding scientifi c applications puts Leica
Microsystems’ customers at the leading edge of science.

Industry Division

•

The Leica Microsystems Industry Division’s focus is to
support customers’ pursuit of the highest quality end result.
Leica Microsystems provide the best and most innovative
imaging systems to see, measure, and analyze the micro­structures in routine and research industrial applications,
materials science, quality control, forensic science inves­tigation, and educational applications.

Biosystems Division

•

The Leica Microsystems Biosystems Division brings his­topathology labs and researchers the highest-quality,
most comprehensive product range. From patient to pa­thologist, the range includes the ideal product for each
histology step and high-productivity workfl ow solutions
for the entire lab. With complete histology systems fea­turing innovative automation and Novocastra™ reagents,
Leica Microsystems creates better patient care through
rapid turnaround, diagnostic confi dence, and close cus­tomer collaboration.

Medical Division

•

The Leica Microsystems Medical Division’s focus is to
partner with and support surgeons and their care of pa­tients with the highest-quality, most innovative surgi cal
microscope technology today and into the future.

The statement by Ernst Leitz in 1907, “with the user, for the user,” describes the fruitful collaboration
with end users and driving force of innovation at Leica Microsystems. We have developed fi ve
brand values to live up to this tradition: Pioneering, High-end Quality, Team Spirit, Dedication to
Science, and Continuous Improvement. For us, living up to these values means: Living up to Life.

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by Leica Microsystems GmbH, Wetzlar, Germany, 2010

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