Operating Manual
Bayard-Alpert Pirani Gauge
BPG400
BPG400-SD
BPG400-SP
BPG400-SR
tina03e1-b (2004-02) 1
RS485
Product Identification
In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.
INFICON AG, LI-9496 Balzers
Model:
PN:
SN:
V W
Validity
This document applies to products with the following part numbers:
BPG400 (without display)
353-500
353-502 (vacuum connection DN 40 CF-R)
BPG400 (with display)
353-501
353-503 (vacuum connection DN 40 CF-R)
BPG400-SD (with DeviceNet interface and switching functions)
353-507
353-508 (vacuum connection DN 40 CF-R)
BPG400-SP (with Profibus interface and switching functions)
353-505
353-506 (vacuum connection DN 40 CF-R)
BPG400-SR (with RS485 interface and switching functions)
353-509
353-513 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 353-500. They apply to the
other gauges by analogy.
All BPG400 versions are shipped with an instruction sheet (→ [8]). BPG400-SD,
BPG400-SP and BPG400-SR come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (→ [9]).
We reserve the right to make technical changes without prior notice.
Intended Use
2 tina03e1-b (2004-02) BPG400 v1.om
The BPG400 gauges have been designed for vacuum measurement of non-flammable gases and gas mixtures in a pressure range of 5×10
The gauges can be operated in connection with the INFICON Vacuum Gauge
Controller VGC103 or VGC40x or with other control devices.
-10
… 1000 mbar.
Functional Principle
Over the whole measuring range, the gauge has a continuous characteristic curve
and its measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ionization measurement
system (for p < 2.0×10
p > 5.5×10
2.0×10
-3
mbar). In the overlapping pressure range of
-2
… 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10
switched off when the pressure exceeds 3.2×10
-2
mbar) and a Pirani measurement system (for
-2
mbar (to prevent filament burn-out). It is
-2
mbar.
Trademarks
DeviceNet™ Open DeviceNet Vendor Association, Inc.
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Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3
Trademarks 3
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8
3 Installation 13
3.1 Vacuum Connection 13
3.1.1 Removing and Installing the Electronics Unit 14
3.1.2 Installing the Optional Extension 16
3.1.3 Using the Optional Baffle 17
3.2 Electrical Connection 19
3.2.1 Use With INFICON VGC103 or VGC40x Vacuum Gauge Controller 19
3.2.2 Use With Other Controllers 19
3.2.2.1 Making an Individual Sensor Cable 20
3.2.2.2 Making a DeviceNet Interface Cable (BPG400-SD) 22
3.2.2.3 Making a Profibus Interface Cable (BPG400-SP) 23
3.2.2.4 Making a RS485 Interface Cable (BPG400-SR) 24
3.2.3 Using the Optional Power Supply (With RS232C Line) 25
4 Operation 27
4.1 Measuring Principle, Measuring Behavior 27
4.2 Operational Principle of the Gauge 28
4.3 Putting the Gauge Into Operation 29
4.4 Degas 29
4.5 Display (BPG400) 30
4.6 RS232C Interface 31
4.6.1 Description of the Functions 31
4.6.1.1 Output String (Transmit) 31
4.6.1.2 Input String (Receive) 33
4.7 DeviceNet Interface (BPG400-SD) 34
4.7.1 Description of the Functions 34
4.7.2 Operating Parameters 34
4.7.2.1 Operating Software 34
4.7.2.2 Node Address Setting 34
4.7.2.3 Data Rate Setting 35
4.7.3 Status Lights 35
4.8 Profibus Interface (BPG400-SP) 36
4.8.1 Description of the Functions 36
4.8.2 Operating Parameters 36
4.8.2.1 Operating Software 36
4.8.2.2 Node Address Setting 36
4.9 RS485 Interface (BPG400-SR) 37
4.9.1 Description of the Functions and Modes 37
4.9.2 Data Exchange 37
4.9.2.1 Operational Parameters 37
4.9.2.2 Device Address 38
4.9.2.3 Command Structure (Host) 38
4.9.2.4 Response Structure 38
4.9.2.5 Error Messages 38
4.9.3 Syntax Description 39
4.9.3.1 Definitions, Legend 39
4.9.3.2 Commands and Responses 40
4.9.4 Switching Functions 42
4.9.4.1 Programming the Switching Functions 43
4.10 Switching Functions (BPG400-SD, -SP, -SR) 44
4.10.1 Setting the Switching Functions 44
4 tina03e1-b (2004-02) BPG400 v1.om
5 Deinstallation 46
6 Maintenance, Repair 47
6.1 Maintenance 47
6.1.1 Cleaning the Gauge 47
6.2 Adjusting the Gauge 47
6.2.1 Adjustment at Atmospheric Pressure 47
6.2.2 Zero Point Adjustment 48
6.3 What to Do in Case of Problems 49
6.4 Replacing the Sensor 51
7 Options 52
8 Spare Parts 52
9 Storage 52
10 Returning the Product 53
11 Disposal 53
Appendix 54
A: Relationship Output Signal – Pressure 54
B: Gas Type Dependence 55
C: Literature 57
Declaration of Contamination 58
For cross-references within this document, the symbol (→ XY) is used, for crossreferences to further documents and data sources, the symbol (→ [Z]).
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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Notice
1.2 Personnel Qualifications
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
6 tina03e1-b (2004-02) BPG400 v1.om
1.3 General Safety
Instructions
• Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→ 11) and the process
media.
Consider possible reactions of the process media (e.g. explosion) due to the
heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.) on the product
• use the product with accessories not listed in the corresponding product docu-
mentation.
The end-user assumes the responsibility in conjunction with the process media
used.
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2 Technical Data
Measurement
Emission
Degas
Measuring range (air, N
) 5×10
2, O2
-10
… 1000 mbar, continuous
Accuracy 15% of reading in the range of
10-8 … 10-2 mbar
(after 5 min stabilization)
Repeatability 5% of reading in the range of
-8
10
… 10-2 mbar
(after 5 min stabilization)
Gas type dependence → Appendix B
Switching on threshold
Switching off threshold
Emission current
p ≤7.2×10
7.2×10
-6
mbar
-6
mbar <p <3.2×10-2 mbar
2.4×10-2 mbar
-2
3.2×10
mbar
5 mA
25 µA
Emission current switching
25 µA ⇒ 5 mA
5 mA ⇒ 25 µA
Degas emission current
(p <7.2×10
-6
mbar)
7.2×10-6 mbar
-5
3.2×10
≈16 mA (P
mbar
degas
≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232 → 31)
Duration max. 3 min, followed by automatic stop
Output signal
Display (
BPG400)
Power supply
In degas mode, BPG400 gauges keep supplying measurement values, however
their tolerances may be higher than during normal operation.
Output signal (measuring signal) 0 … +10 V
-10
Measuring range 0.774 V (5×10
mbar)
… +10 V (1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(
→ Appendix A)
Error signal
Minimum loaded impedance
Display panel
<0.3 V/0.5 V (→ 49)
10 kΩ
LCD matrix, 32×16 pixels,
with background illumination
Dimensions
Pressure units (pressure p)
16.0 mm × 11.2 mm
mbar (default), Torr, Pa
(selecting the pressure unit → 31)
DANGER
The gauge must only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to the
gauge has to be fused (INFICON-controllers fulfill these requirements).
8 tina03e1-b (2004-02) BPG400 v1.om
Operating voltage at the gauge +24 VDC (20 … 28 VDC)
ripple max. 2 V
pp
1)
Power consumption
Standard
Degas
Emission start (<200 ms)
≤0.5 A
≤0.8 A
≤1.4 A
Power consumption
BPG400
BPG400-SD, -SP, -SR
≤16 W
≤18 W
Fuse necessary 1.25 AT
BPG400-SD requires an additional, separate power supply for the
DeviceNet interface (→ 22).
Supply voltage at the DeviceNet connector, (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)
Power consumption <2 W
The gauge is protected against reversed polarity of the supply voltage.
Sensor cable connection
For reasons of compatibility, the expression "sensor cable" is used for all
BPG400 versions in this document, although the pressure reading of the
gauges with fieldbus interface (BPG400-SD, BPG400-SD and
BPG400-SR) is normally transmitted via the corresponding bus.
Electrical connector
BPG400
BPG400-SD, -SP, -SR
Cable for BPG400
Analog values only
Without degas function
Analog values
With degas function
Analog values
With degas function
And RS232C interface
Cable for BPG400-SD, -SP, -SR
Max. cable length (supply voltage 24 V
Analog and fieldbus operation
RS232C operation
Gauge identification
Switching functions
BPG400
BPG400-SD, -SP, -SR
Adjustment range
Relay contact rating
Voltage
Current
D-Sub,15 pins, male
→ 20
→ 21
4 conductors plus shielding
5 conductors plus shielding
7 conductors plus shielding
depending on the functions used,
max. 15 conductors plus shielding
1)
)
≤35 m, conductor cross-section 0.25 mm²
≤50 m, conductor cross-section 0.34 mm²
≤100 m, conductor cross-section 1.0 mm²
≤30 m
42 kΩ resistor between Pin 10 (sensor
cable) and GND
none
2 (setpoints A and B)
-9
mbar … 100 mbar
1×10
Setpoints adjustable via potentiometers
(setpoints A and B), one floating, normally open relay contact per setpoint
(→ 21, 44)
Adjusting the setpoints via field bus is
described in the corresponding bus sections.
≤60 V
≤0.5 ADC
1)
Measured at sensor cable connector (consider the voltage drop as function of
the sensor cable length).
tina03e1-b (2004-02) BPG400 v1.om 9
RS232C interface
Data rate
Data format
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND
Pin 13
Pin 14
Pin 5
(Function and communication protocol of the RS232C interface → 31)
DeviceNet interface
(BPG400-SD)
Profibus interface
(BPG400-SP)
Fieldbus name DeviceNet
Standard applied
Communication protocol, data format
→ [6]
→ [1], [4]
Interface, physical CAN bus
Data rate (adjustable via "RATE"
switch)
125 kBaud
250 kBaud
500 kBaud
"P" (125 kBaud, 250 kBaud, 500 kBaud
programmable via DeviceNet
(→ [1])
Node address (MAC ID)
(Adjustable via "ADDRESS", "MSD",
"LSD" switches)
0 … 63
dec
"P" (0 … 63 programmable via
DeviceNet, → [1])
DeviceNet connector Micro-Style, 5 pins, male
Cable Shielded, special DeviceNet cable,
5 conductors (→ 22 and [4])
Cable length, system wiring According to DeviceNet specifications
(→ [6], [4])
Fieldbus name Profibus
Standard applied
Communication protocol data format
→ [7]
→ [10], [7]
Interface, physical RS485
Data rate
≤12 MBaud (→ [10])
Node address
Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)
00 … 7D
(0 … 125
hex
dec
)
Via Profibus
(hexadecimal "ADDRESS" switches
set to >7d
hex
(>125
dec
))
00 … 7D
(0 … 125
hex
dec
)
Profibus connection D-Sub, 9 pins, female
Cable Shielded, special Profibus cable
(→ 23 and [5])
Cable length, system wiring According to Profibus specifications
(→ [7], [5])
10 tina03e1-b (2004-02) BPG400 v1.om
RS485 interface
(BPG400-SR)
Fieldbus name RS485
Data rate 300 … 28'800 Baud
Device address
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD" switches)
00 … 7F
(0 … 127
hex
RS485 connection D-Sub, 9 pins, male
Cable
Cable length
shielded RS485 cable (→ 24)
≤100m
), (→ 38)
dec
Vacuum
Weight
Ambiance
Materials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
Internal volume
DN 25 ISO-KF
DN 40 CF-R
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y
molybdenum
tungsten, copper
3
≤24 cm
3
≤34 cm
Pressure max. 2 bar (absolute)
Part number
353-500, 353-501
353-502, 353-503
353-505, 353-507, 353-509
353-506, 353-508, 353-513
≈290 g
≈550 g
≈430 g
≈695 g
Admissible temperatures
Storage
Operation
Bakeout
-20 … 70 °C
0 … 50 °C
+150 °C (without electronics unit or with
bakeout extension → 16)
Relative humidity
(year's mean / during 60 days)
≤65 / 85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30
2O3
)
tina03e1-b (2004-02) BPG400 v1.om 11
Dimensions
Part number Part number
353-500 353-502
353-501 353-503
353-505 353-506
353-509 353-513
(353-507)
1)
(353-508)
1)
4-40UNC 2B
DN 25 ISO-KF
1)
Gauges with DeviceNet connector are 14 mm longer.
4-40UNC 2B
The other dimensions of housing and vacuum connection are identical.
Part number
353-507
353-508
DN 40 CF-R
12 tina03e1-b (2004-02) BPG400 v1.om
3 Installation
3.1 Vacuum Connection
DANGER
Caution: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a protective connection according to EN 61010:
• CF connections fulfill this requirement
• For gauges with a KF vacuum connection, use a conductive me-
tallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Procedure
The gauge may be mounted in any orientation. To keep condensates
and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→ 12).
• The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast charged particles,
installation (→ 17) of the optional baffle is recommended (→ 52).
• The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (→ 14) or an extension (Option
→ 52) has to be installed (→ 16).
Remove the protective lid.
The protective lid will be
needed for maintenance.
tina03e1-b (2004-02) BPG400 v1.om 13
Make the flange connection to the vacuum system, preferably without
applying vacuum grease.
3.1.1 Removing and Installing
the Electronics Unit
Required tools / material
Removing the electronics unit
When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge
is mounted (→ 44, 47).
When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.
If you are using a gauge with display, make sure easy reading of the
display is possible.
The gauge is now installed.
• Allen key, size 2.5 mm
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
14 tina03e1-b (2004-02) BPG400 v1.om
Installing the electronics unit
Remove the electronics unit without twisting it.
Removal of the electronics unit is completed.
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3
Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw (1).
The electronics unit is now installed.
tina03e1-b (2004-02) BPG400 v1.om 15
3.1.2 Installing the Optional
Extension
With the optional extension (→ 52) the sensor can also be baked during operation at temperatures up to 150 °C (only at p<10
tures, the accuracy of the Pirani sensor decreases).
-2
mbar because at high tempera-
Caution
Caution: rising heat
The electronics unit of gauges that are installed vertically, above the
source of heat can be damaged through rising heat even with an installed extension.
Bakeout area
Required tools / material
Procedure
123
Bakeout area
When installing the extension, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge
is mounted (→ 44, 47).
When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.
If you are using a gauge with display, ensure easy reading of the display.
• Extension (→ 52)
• Allen key, size 2.5 mm
• Allen key, size 1.5 mm
Remove the electronics unit (2) (→ 14).
Slide the sensor (3) into the extension (6) to the mechanical stop (be careful
to correctly position the pins and notch (4)).
Secure the sensor with the hex socket set screws (7) using an Allen key,
size 1.5 mm.
2
4a
4
3
7
16 tina03e1-b (2004-02) BPG400 v1.om
6
1
Slide the electronics unit (2) in to the mechanical stop (be careful to cor-
rectly align the pins and notch (4a)).
Secure the electronics unit (2) with the hex socket set screw (1) using an
Allen key, size 2.5 mm.
The extension is now installed.
3.1.3 Using the Optional Baffle
Installing/deinstalling
the baffle
Required tools / material
Installation
In severely contaminating processes and to protect measurement electrodes optically against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→ 52) is recommended.
The optional baffle will be installed/deinstalled at the sensor opening of the deinstalled gauge (Deinstallation gauge → 46).
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
• Baffle (→ 52)
• Pointed tweezers
• Pin (e.g. pencil)
• Screwdriver No 1
Carefully remove the grid with tweezers.
tina03e1-b (2004-02) BPG400 v1.om 17
Carefully place the baffle onto the sensor opening.
Using a pin, press the baffle down in the center until it catches.
Deinstallation
The baffle is now installed (Installation of the gauge → 13).
Using a pin, press the baffle down in the center until it catches.
The new baffle is now installed (Installation of the gauge → 13).
18 tina03e1-b (2004-02) BPG400 v1.om
3.2 Electrical Connection
3.2.1 Use With INFICON
VGC103 or VGC40x
Vacuum Gauge
Controller
Required material
Procedure
If the gauge is used with an INFICON VGC103 or VGC40x controller, a corresponding sensor cable is required (→ [10]). The sensor cable permits supplying
the gauge with power, transmitting measurement values and gauge statuses, and
making parameter settings.
Caution
Caution: data transmission errors
If the gauge is operated with the INFICON VGC103 or VGC40x Vacuum Gauge Controller (RS232C) and a fieldbus interface at the same
time, data transmission errors may occur.
The gauge must not be operated with an INFICON VGC103 or
VGC40x controller and DeviceNet, Profibus or RS485 at the same
time.
• Sensor cable (→ [10], INFICON sales literature)
Plug the sensor connector into the gauge and secure it with the locking
screws.
Connect the other end of the sensor cable to the INFICON controller and
secure it.
The gauge can now be operated with the VGC103 or VGC40x controller.
3.2.2 Use With Other
Controllers
tina03e1-b (2004-02) BPG400 v1.om 19
The gauge can also be operated with other controllers.
Especially the fieldbus versions BPG400-SD (DeviceNet), BPG400-SP (Profibus)
and BPG400-SR (RS485) are usually operated as part of a network, controlled by a
master or bus controller. In such cases, the control system has to be operated with
the appropriate software and communication protocol (→ [1], [10] or 37 respectively).
3.2.2.1 Making an Individual
Sensor Cable
For reasons of compatibility, the expression "sensor cable" is used for all
BPG400 versions in this document, although the pressure reading of the
gauges with fieldbus interface (BPG400-SD, BPG400-SP or
BPG400-SR) is normally transmitted via DeviceNet, Profibus or RS485.
The sensor cable is required for supplying all BPG400 types with power.
In connection with the gauges with fieldbus interface (BPG400-SD,
BPG400-SP and BPG400-SR), it also permits access to the relay contacts of the switching functions (→ 21, 44).
Cable type
Procedure
Sensor cable connection
BPG400
The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (→ 9).
Open the cable connector (D-Sub, 15 pins, female).
Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the gauge used:
BPG400
TxD
RxD
Measuring
signal
Degas
+U
b
13
14
2
12
7
8
5
10
15
1.25AT
Identification
RS232C
+
+
24 V
Electrical connection
Pin 2 Signal output (measuring signal)
Pin 5 Supply common, GND
Pin 7 Degas on, active high
Pin 8 Supply
Pin 10 Gauge identification
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
Pins 1, 3, 4, 6, 9 and 11 are
not connected internally.
15
0 … +10 V
+24 VDC
+24 VDC
9
D-Sub, 15 pins
soldering side
1
8
female,
20 tina03e1-b (2004-02) BPG400 v1.om
Sensor cable connection
BPG400-SD, -SP, -SR
BPG400-SD, BPG400-SP, BPG400-SR
Threshold value, SP A
Threshold value, SP B
SP A
3
6
1
4
SP B
TxD
RxD
Degas
+U
Measuring
signal
b
42 kΩ
9
11
13
14
7
8
2
12
5
10
15
RS232
Degas
1.25 AT
24V
Identification
Electrical connection
Pin 1 Relay Switching function A, COM contact
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 3 Threshold value (Setpoint) A 0 … +10 V
Pin 4 Relay Switching function A, N.O. contact
Pin 5 Supply common, GND
Pin 6 Threshold value (Setpoint) B 0 … +10 V
Pin 7 Degas on, active high +24 V
Pin 8 Supply voltage +24 V
Pin 9 Relay Switching function B, COM contact
Pin 10 Gauge identification
Pin 11 Relay Switching function B, N.O. contact
Pin 12 Signal common GND
Pin 13 RS232, TxD
Pin 14 RS232, RxD
9
1
Pin 15 Shielding, housing GND
.
WARNING
The supply common (Pin 5) and the shielding (Pin 15) must be
connected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply
voltages can damage the gauge.
For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the output signal can be measured directly between the positive signal output
(Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output
(Pin 2) and signal common (Pin 12) is recommended.
Reassemble the cable connector.
15
8
D-Sub, 15 pins
female,
soldering side
On the other cable end, terminate the cable according to the requirements
of the gauge controller you are using.
tina03e1-b (2004-02) BPG400 v1.om 21
Plug the sensor connector into
the gauge and secure it with the
locking screws.
Connect the other end of the sensor cable to the connector of the instru-
ment or gauge controller you are using.
The gauge can now be operated via analog and RS232C interface.
3.2.2.2 Making a DeviceNet
Interface Cable
(BPG400-SD)
Cable type
Procedure
For operating BPG400-SD via DeviceNet, an interface cable conforming to the
DeviceNet standard is required.
If no such cable is available, make one according to the following indications.
A shielded special 5 conductor cable conforming to the DeviceNet standard has to
be used (
→ [4], [6]).
Make the DeviceNet cable according to the following indications.
1
Micro-Style, 5 pins,
(DeviceNet)
42
female, soldering side
5
3
Pin Function (BPG400-SD)
1 Drain
2 Supply +24 VDC (DeviceNet) interface only
3 Supply common GND (DeviceNet interface only)
4 CAN_H
5 CAN_L
22 tina03e1-b (2004-02) BPG400 v1.om
Plug the DeviceNet (and sensor) cable connector into the gauge.
3.2.2.3 Making a Profibus
Interface Cable
(BPG400-SP)
Cable type
Sensor cable
DeviceNet cable
Lock the DeviceNet (and sensor) cable connector.
The gauge can now be operated via DeviceNet interface (→ 34).
For operating BPG400-SP via Profibus, an interface cable conforming to the
Profibus standard is required.
If no such cable is available, make one according to the following indications.
Only a cable that is suited to Profibus operation may be used (
→ [5], [7]).
Procedure
Make the Profibus interface cable according to the following indications:
1 5
D-Sub, 9 pins
male, soldering side
6 9
Pin Function (BPG400-SP)
1 Do not connect
2 Do not connect
3 RxD/TxD-P
4 CNTR-P
5 DGND
6VP
7 Do not connect
8 RxD/TxD-N
9 Do not connect
1)
Only to be connected if an optical link module is used.
2)
Only required as line termination for devices at both ends of bus cable
→ [5]).
(
1)
2)
2)
tina03e1-b (2004-02) BPG400 v1.om 23
Plug the Profibus (and sensor) cable connector into the gauge.
Sensor cable
Profibus cable
Lock the Profibus (and sensor) cable connector.
The gauge can now be operated via Profibus interface (→ 36).
3.2.2.4 Making a RS485
Interface Cable
(BPG400-SR)
Cable type
Procedure
For operating BPG400-SR via RS485 bus, a suitable interface cable is required.
If no such cable is available, make one according to the following indications.
For RS485 operation, the following cable data are required:
Cable type: 1 twisted pair, shielded
Coductor cross section:
Impedance (Z):
Capacity between conductors and screen:
≥0.22 mm
135 … 165
≤60 pF/m
2
(recommended)
Ω
Make the RS485 interface cable according to the following indications.
1 5
D-Sub, 9-pin,
male, soldering side
6 9
Pin 1 Setpoint A relay, N.O.
Pin 2 Do not connect
Pin 3 No connection
Pin 4 Do not connect
Pin 5 Setpoint A relay, N.C.
Pin 6 RS485 (-) Input
Pin 7 Setpoint A relay, COM
Pin 8 No connection
Pin 9 RS485 (+) Input
1)
The changeover relay contact available on the RS485 interface connector is galvanically connected to the N.O. contact of the setpoint A relay available on the 25 pin D-sub connector on the BPG400 (
2)
In order to minimize cable reflections, the bus cable must be terminated
at both ends with appropriate termination resistors.
1)
1)
2)
1)
2)
→ 21).
24 tina03e1-b (2004-02) BPG400 v1.om
Plug the RS485 (and sensor) cable connector into the gauge.
Sensor cable
RS485 cable
Lock the RS485 (and sensor) cable connector.
The gauge can now be operated via RS485 interface (→ 37).
3.2.3 Using the Optional Power
Supply (With RS232C
Line)
Technical data
Wiring diagram
The optional 24 V power supply (→ 52) allows RS232C operation of the BPG400
gauge with any suitable instrument or control device (e.g. PC).
The instrument or control device needs to be equipped with a software that supports the RS232C protocol of the gauge (
→ 31).
Mains connection
Mains voltage 90 … 250 VAC 50 … 60 Hz
Mains cable 1.8 meter (Schuko DIN and U.S. con-
nectors)
Output (operating voltage of gauge)
Voltage 21 … 27 VDC, set to 24 VDC
Current Max. 1.5 A
Gauge connection
Connector D-Sub, 15 pins, female
24 V cable 5 m, black
Connection of the instrument or control
device
RS232C connection D-Sub, 9 pins, female
Cable 5 m, black, 3 conductors, shielded
8
7
6
RS232C
4
D-Sub, 9 pins
5
2
3
L
Mains
N
90 ... 250 VAC
PE
50 ... 60 Hz
BPG400
D-Sub, 15 pins
5
13
14
8
15
PE
+24 V
GND
DC
AC
tina03e1-b (2004-02) BPG400 v1.om 25
Connecting the power supply
Connect the gauge to the power supply and lock the connector with the
screws.
Connect the RS232C line to the instrument or control device and lock the
connector with the screws.
RS232C
Power supply
BPG400
Connect the power supply to the mains.
Turn the power supply on.
The gauge can now be operated via RS232C interface (→ 31).
PC
Mains
26 tina03e1-b (2004-02) BPG400 v1.om
4 Operation
4.1 Measuring Principle,
Measuring Behavior
Bayard-Alpert
The BPG400 vacuum gauges consist of two separate measuring systems (hot
cathode Bayard-Alpert (BA) and Pirani).
The BA measuring system uses an electrode system according to Bayard-Alpert
which is designed for a low x-ray limit.
The measuring principle of this measuring system is based on gas ionization. Electrons emitted by the hot cathode (F) ionize a number of molecules proportional to
the pressure in the measuring chamber. The ion collector (IC) collects the thus
generated ion current I
ment instrument. The ion current is dependent upon the emission current I
+
and feeds it to the electrometer amplifier of the measure-
, the
e
gas type, and the gas pressure p according to the following relationship:
+
= Ie × p × C
I
Factor C represents the sensitivity of the gauge head. It is generally specified for
.
N
2
The lower measurement limit is 5×10
To usefully cover the whole range of 5×10
-10
mbar (gauge metal sealed).
-10
mbar … 10-2 mbar, a low emission
current is used in the high pressure range (fine vacuum) and a high emission current is used in the low pressure range (high vacuum). The switching of the emission current takes place at decreasing pressure at approx. 7.2×10
creasing pressure at approx. 3.2×10
-5
mbar. At the switching threshold, the
-6
mbar, at in-
BPG400 can temporarily (<2 s) deviate from the specified accuracy.
IC
Pirani
ECF
+– +–
Diagram of the BA measuring system
200V40V
(Degas 250V)
EC
F hot cathode (filament)
IC ion collector
EC anode (electron collector)
F
IC
Within certain limits, the thermal conductibility of gases is pressure dependent. This
physical phenomenon is used for pressure measurement in the thermal conductance vacuum meter according to Pirani. A self-adjusting bridge is used as
measuring circuit (
→ schematic). A thin tungsten wire forms the sensor element.
Wire resistance and thus temperature are kept constant through a suitable control
circuit. The electric power supplied to the wire is a measure for the thermal conductance and thus the gas pressure. The basic principle of the self-adjusting bridge
circuit is shown in the following schematic.
tina03e1-b (2004-02) BPG400 v1.om 27
Schematic
U
B
Pirani sensor
The bridge voltage UB is a measure for the gas pressure and is further processed
electronically (linearization, conversion).
Measuring range
Gas type dependence
4.2 Operational Principle of
the Gauge
The BPG400 gauges continuously cover the measuring range
-10
mbar … 1000 mbar.
5×10
• The Pirani constantly monitors the pressure.
• The hot cathode (controlled by the Pirani) is activated only at pressures
<2.4×10
-2
mbar.
If the measured pressure is higher than the switching threshold, the hot cathode is
switched off and the Pirani measurement value is output.
If the Pirani measurement drops below the switching threshold (p = 2.4×10
the hot cathode is switched on. After heating up, the measured value of the hot
cathode is fed to the output. In the overlapping range of 5.5×10
-3
… 2.0×10-2 mbar,
-2
mbar),
the output signal is generated from both measurements.
-2
Pressure rising over the switching threshold (p = 3.2×10
mbar) causes the hot
cathode to be switched off. The Pirani measurement value is output.
The output signal is gas type dependent. The characteristic curves are accurate for
dry air, N
→ Appendix B).
(
and O2. They can be mathematically converted for other gases
2
The measuring currents of the Bayard-Alpert and Pirani sensor are converted into a
frequency. A micro-controller converts this frequency into a digital value representing the measured total pressure. After further processing this value is available
as analog measurement signal (0 … +10 V) at the output (sensor cable connector
Pin 2 and Pin 12). The maximum output signal is internally limited to +10 V
(atmosphere). The measured value can be read as digital value through the
RS232C interface (Pins 13, 14, 15) (
→ 31). Gauges with a display show the
value as pressure. The default setting of the displayed pressure unit is mbar. It can
be modified via the RS232C interface (
→ 31).
In addition to converting the output signal, the micro controller's functions include
monitoring of the emission, calculation of the total pressure based on the measurements of the two sensors, and communication via RS232C interface.
28 tina03e1-b (2004-02) BPG400 v1.om
4.3 Putting the Gauge Into
Operation
4.4 Degas
When the operating voltage is supplied (→ Technical Data), the output signal is
available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector
(Relationship Output Signal – Pressure
Allow for a stabilizing time of approx. 10 min. Once the gauge has been switched
on, permanently leave it on irrespective of the pressure.
Communication via the digital interfaces is described in separate sections.
→ Appendix A).
Contamination
Gauge failures due to contamination are not covered by the warranty.
Deposits on the electrode system of the BA gauge can lead to unstable measurement readings.
The degas process allows in-situ cleaning of the electrode system by heating the
electron collector grid to approx. 700 °C by electron bombardment.
Depending on the application, this function can be activated by the system control
via one of the gauges digital interfaces. The BPG400 automatically terminates the
degas process after 3 minutes, if it has not been stopped before.
The degas process should be run at pressures below 7.2×10-6 mbar
(emission current 5 mA).
For a repeated degas process, the control signal first has to change from ON
(+24 V) to OFF (0 V), to then start degas again with a new ON (+24 V) command. It
is recommended that the degas signal be set to OFF again by the system control
after 3 minutes of degassing, to achieve an unambiguous operating status.
tina03e1-b (2004-02) BPG400 v1.om 29
4.5 Display (BPG400)
The gauges with part number
353-501 and
353-503
have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line
shows the pressure, the second line the pressure unit, the function and possible
errors. The background illumination is usually green, in the event of an error, it
changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pressure unit can be changed via RS232C interface (
→ 31).
Pressure display
Function display
Error display
Pressure reading, pressure unit
(none) Pirani operation
Emission 25 µA
Emission 5 mA
Degas
1000 mbar adjustment (Pirani)
no error
(green background illumination)
Pirani sensor warning
(red background illumination)
Pirani sensor error
(red background illumination)
BA sensor error
(red background illumination)
Internal data connection failure
(red background illumination)
What to do in case of problems → 49.
30 tina03e1-b (2004-02) BPG400 v1.om
4.6 RS232C Interface
The built-in RS232C interface allows transmission of digital measurement data and
instrument conditions as well as the setting of instrument parameters.
Caution
Caution: data transmission errors
If the gauge is operated with the RS232C interface and a fieldbus interface at the same time, data transmission errors may occur.
The gauge must not be operated with the RS232C interface and
DeviceNet, Profibus or RS485 at the same time.
4.6.1 Description of the
Functions
Operational parameters
Electrical connections
4.6.1.1 Output String (Transmit
Format of the output string
The interface works in duplex mode. A nine byte string is sent continuously without
a request approx. every 20 ms.
Commands are transmitted to the gauge in a five byte input (receive) string.
• Data rate
• Byte
• TxD
• RxD
• GND
(Sensor cable connector)
)
The complete output string (frame) is nine bytes (byte 0 … 8). The data string is
seven bytes (byte 1 … 7).
Byte No Function Value Comment
0 Length of data string 7 (Set value)
1 Page number 5 (For BPG400)
2 Status
3 Error
4 Measurement high byte 0 … 255
5 Measurement low byte 0 … 255
6 Software version 0 … 255
7 Sensor type 10 (For BPG400)
8 Check sum 0 … 255
9600 Baud set value, no handshake
8 data bits
1 stop bit
Pin 13
Pin 14
Pin 5
→ Status byte
→ Error byte
→ Calculation of pressure value
→ Calculation of pressure value
→ Software version
→ Synchronization
Synchronization
tina03e1-b (2004-02) BPG400 v1.om 31
Synchronization of the master is achieved by testing three bytes:
Byte No Function Value Comment
0 Length of data string 7 Set value
1 Page number 5 (For BPG400)
8 Check sum of bytes No 1 … 7 0 … 255 Low byte of check
1)
High order bytes are ignored in the check sum.
sum
1)
Status byte
Bit 1 Bit 0 Definition
0 0 Emission off
01
Emission 25
µA
1 0 Emission 5 mA
1 1 Degas
Bit 2 Definition
0 1000 mbar adjustment off
1 1000 mbar adjustment on
Bit 3 Definition
0 ⇔ 1
Toggle bit, changes with every
string received correctly
Bit 5 Bit 4 Definition
0 0 Current pressure unit mbar
0 1 Current pressure unit Torr
1 0 Current pressure unit Pa
Bit 7 Bit 6 Definition
x x Not used
Error byte
Software version
Calculation of the pressure
value
Bit 3 Bit 2 Bit 1 Bit 0 Definition
x x x x Not used
Bit 7 Bit 6 Bit 5 Bit 4 Definition
0 1 0 1 Pirani adjusted poorly
1 0 0 0 BA error
1 0 0 1 Pirani error
The software version of the gauge can be calculated from the value of byte 6 of the
transmitted string according to the following rule:
Version No = Value
(Example: According to the above formula, Value
Byte 6
/ 20
of 32 means software ver-
Byte 6
sion 1.6)
The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on the currently selected pressure unit (
→ byte 2, bits 4 and 5), the ap-
propriate rule must be applied.
As result, the pressure value results in the usual decimal format.
p
p
p
mbar
Torr
Pa
((high byte × 256 + low byte) / 4000 - 12.5)
= 10
((high byte × 256 + low byte) / 4000 - 12.625)
= 10
((high byte × 256 + low byte) / 4000 - 10.5)
= 10
32 tina03e1-b (2004-02) BPG400 v1.om
Example
The example is based on the following output string:
Byte No 0 1 2 3 4 5 6 7 8
Value 7 5 0 0 242 48 20 10 69
The instrument or controller (receiver) interprets this string as follows:
Byte No Function Value Comment
0 Length of data
7 (Set value)
string
1 Page number 5 BPG400
2 Status 0
Emission = off
Pressure unit = mbar
3 Error 0
No error
Measurement
4
5
High byte
Low byte
6 Software version 20
Calculation of the pressure:
242
48
((242 × 256 + 48) / 4000 - 12.5)
p = 10
Software version = 20 / 20 = 1.0
= 1000 mbar
7 Sensor type 10 BPG400
8 Check sum 69
5 + 0 + 0 + 242 + 48 + 20 + 10 =
01 45
325
dec
hex
High order byte is ignored ⇒
Check sum = 45
hex
69
dec
4.6.1.2 Input String (Receive)
Format of the input string
Admissible input strings
For transmission of the commands to the gauge, a string (frame) of five bytes is
sent (without <CR>). Byte 1 to byte 3 form the data string.
Byte no Function Value Comment
0 Length of data string 3 (Set value)
1 Data
2 Data
3 Data
4 Check sum
(from bytes No 1 … 3) 0 … 255
1)
High order bytes are ignored in the check sum.
→ admissible input strings
→ admissible input strings
→ admissible input strings
(low byte of sum)
1)
For commands to the gauge, six defined strings are used:
Byte No
Command 01234
2)
Set the unit mbar in the display 3 16 62 0 78
Set the unit Torr in the display 3 16 62 1 79
Set the unit Pa in the display 3 16 62 2 80
Power-failure-safe storage of current unit 3 32 62 62 156
Switch degas on
3 16 93 148 1
(switches itself off after 3 minutes)
Switch degas off before 3 minutes 3 16 93 105 214
2)
Only low order byte of sum (high order byte is ignored).
tina03e1-b (2004-02) BPG400 v1.om 33
4.7 DeviceNet Interface
(BPG400-SD)
This interface allows operation of BPG400-SD with part number
353-507 and
353-508
in connection with other devices that are suited for DeviceNet operation. The
physical interface and communication firmware of BPG400-SD comply with the
DeviceNet standard (
Two adjustable switching functions are integrated in BPG400-SD. The corresponding relay contacts are available at the sensor cable connector (
44).
The basic sensor and sensor electronics of all BPG400 gauges are identical.
→ [4], [6]).
→ 8, 21,
Caution
Caution: data transmission errors
If the gauge is operated via RS232C interface and DeviceNet interface
at the same time, data transmission errors may occur.
The gauge must not be operated via RS232C interface and DeviceNet
interface at the same time.
4.7.1 Description of the
Functions
4.7.2 Operating Parameters
4.7.2.1 Operating Software
4.7.2.2 Node Address Setting
Via this interface, the following and further data are exchanged in the standardized
DeviceNet protocol (
• Pressure reading
• Pressure unit (Torr, mbar, Pa)
• Degas function
• Gauge adjustment
• Status and error messages
• Status of the switching functions
As the DeviceNet protocol is highly complex, the parameters and programming of
BPG400-SD are described in detail in the separate Communication Protocol
→ [1]).
(
Before the gauge is put into operation, it has to be configured for DeviceNet operation. A configuration tool and the device specific EDS file (Electronic Data
Sheet) are required for this purpose. The EDS file can be downloaded via internet
→ [3]).
(
For unambiguous identification of the gauge in a DeviceNet environment, a node
address is required. The node address setting is made on the gauge or programmed via DeviceNet.
→ [1]):
Set the node address (0 … 63
and "LSD" switches. The node address is polled by the firmware
when the gauge is switched on. If the setting deviates from the
stored value, the new value is taken over into the NVRAM. If a
setting higher than 63 is made, the previous node address setting remains valid.
If the „MSD“ switch is in the "P" position, the node address is
programmable via DeviceNet (
34 tina03e1-b (2004-02) BPG400 v1.om
) via the "ADDRESS" "MSD"
dec
→ [1]).
4.7.2.3 Data Rate Setting
The admissible data rate depends on a number of factors such as system parameters and cable length
grammed via DeviceNet.
By means of the "RATE" switch, the data rate can be set to 125
("1"), 250 ("2") or 500 kBaud ("5").
If the switch is in any of the "P" positions, the data rate is programmable via DeviceNet (
→ [4], [6]). It can be set on the gauge or pro-
→ [1]).
4.7.3 Status Lights
"STATUS MOD"
(gauge status):
"STATUS NET"
(network status):
Two lights (LEDs) on the gauge inform on the gauge status and the current
DeviceNet status.
Light status Description
Dark No supply
Flashing
red/green
Green Normal operation
Red Non recoverable error
Light status Description
Dark Gauge not online:
Flashing
green
Green Gauge online; necessary connections established
Flashing red One or several input/output connections in "timed out" status
Red Communication error. The gauge has detected an error that im-
Selftest
− Selftest not yet concluded
− No supply, → "STATUS MOD" light
Gauge online but no communication:
− Selftest concluded but no communication to other nodes
established
− Gauge not assigned to any master
pedes communication via the network (e.g. two identical node addresses (MAC IC) or "Bus-off")
Electrical connections
tina03e1-b (2004-02) BPG400 v1.om 35
The gauge is connected to the DeviceNet system via the 5-pin DeviceNet connector (
→ 22).
4.8 Profibus Interface
(BPG400-SP)
This interface allows operation of BPG400-SP with part number
353-505 and
353-506
in connection with other devices that are suited for Profibus operation. The physical
interface and communication firmware of BPG400-SP comply with the Profibus
standard (
Two adjustable switching functions are integrated in the BPG400-SP. The corresponding relay contacts are available at the sensor cable connector (
44).
The basic sensor and sensor electronics of all BPG400 gauges are identical.
→ [7], [5].
→ 8, 21,
Caution
Caution: data transmission errors
If the gauge is operated via RS232C interface and Profibus interface at
the same time, data transmission errors may occur.
The gauge must not be operated via RS232C interface and Profibus
interface at the same time.
4.8.1 Description of the
Functions
4.8.2 Operating Parameters
4.8.2.1 Operating Software
4.8.2.2 Node Address Setting
Via this interface, the following and further data are exchanged in the standardized
Profibus protocol (
• Pressure reading
• Pressure unit (Torr, mbar, Pa)
• Degas function
• Gauge adjustment
• Status and error messages
• Status of the switching functions
As the DeviceNet protocol is highly complex, the parameters and programming of
BPG400-SP are described in detail in the separate Communication Protocol
→ [2]).
(
For operating the gauge via Profibus, prior installation of the BPG400 specific GSD
file is required on the bus master side. This file can be downloaded via internet
→ [3]).
(
For unambiguous identification of the gauge in a Profibus environment, a node
address is required. The node address setting is made on the gauge.
→ [2]):
The node address (0 … 125
(00 … 7D
The node address is polled by the firmware when the gauge is
switched on. If the setting deviates from the stored value, the
new value is taken over into the NVRAM. If a value >7D
(>125
the device remains valid but it can now be defined via Profibus
("Set slave Address",
) via the "ADDRESS", "MSD", and "LSD" switches.
hex
) is entered, the node address setting currently stored in
dec
→ [2]).
) is set in hexadecimal form
dec
hex
Electrical connections
36 tina03e1-b (2004-02) BPG400 v1.om
The gauge is connected to Profibus via the 9-pin Profibus connector (
→ 23).
4.9 RS485 Interface
(BPG400-SR)
This interface allows operation of BPG400-SR with part number
353-509 and
353-513
in connection with other devices that are suited for RS485 bus operation.
Two adjustable switching functions are integrated in BPG400-SR. The corresponding relay contacts are available on the sensor cable connector (
→ 21).
Additionally, the relay contact of the switching function A is accessible on the
RS485 interface connector (
→ 24).
The basic sensor and sensor electronics of all BPG400 gauges are identical.
Caution
Caution: data transmission errors
If the gauge is operated via RS485 and RS232C interface at the same
time, data transmission errors may occur.
The gauge must not be operated via RS485 and RS232C interface at
the same time.
4.9.1 Description of the
Functions and Modes
Operation modes of the
BPG400-SR
4.9.2 Data Exchange
4.9.2.1 Operational Parameters
Via this interface, the following and further data are exchanged between a bus
master (host) and the BPG400-SR (device) in the RS485 protocol.
• Pressure reading
• Pressure unit (Torr, mbar, Pa)
• Degas function
• Operation modes
• Status and error messages
• Thresholds of the switching functions
The BPG400-SR can be operated in two operation modes. While the "BPG" mode
(default mode) takes full advantage of all the gauges capabilities.
The "RIG" mode has a somewhat reduced scope of parameters (
→ 40).
The controlling host sends its commands to the individually addressed devices
connected to the bus. In replay the device returns the data requested via bus to the
host.
A maximum of 127 devices can be connected to a RS485 bus system.
1)
• Data rates:
• Byte:
300, 1200, 2400, 4800, 9600, 19'200
8 data bits
1 stop bit
No parity
1)
Default settings
1)
1)
1)
, 28'800 Baud
tina03e1-b (2004-02) BPG400 v1.om 37
4.9.2.2 Device Address
For unambiguous identification of the gauge in a RS485 bus environment, a device
address is required.
The device address (base address) setting is primarily made on the gauge. Via
RS485 communication, an address offset can be added from the host:
Operating device address = base address + offset
4.9.2.3 Command Structure
(Host)
where:
Operating device address 00 … 7F
Base address 00 … 7F
Offset 00 … 7F
1)
Sum of base address and offset must not exceed 7F
The base address (0 … 127
(00 … 7F
) via the "ADDRESS", "MSD", and "LSD" switches.
hex
1)
aa (→ 39)
hex
Gauge setting (switches, → below)
hex
From host, oo (→ 39)
hex
hex
) is set in hexadecimal form
dec
The address is polled by the firmware when the gauge is
switched on only. If the address set by the switches is above the
allowed range, all parameters are set to the factory default values. Communication is not possible in this case.
Commands sent by the host must include the following elements:
Element: Start character Operating
Value: # 00 … FF
1)
Characters can be upper or lower case.
2)
Carriage return (0D
3)
A Space character is signified by a "_" (underline) character in the text.
device address (aa)
or ctrl M)
hex
hex
_
Space
3)
Data
→ "commands
and responses"
1)
Terminator
2)
CR
4.9.2.4 Response Structure
4.9.2.5 Error Messages
The response message returned by the BPG400-SR has the following structure:
Element: Start character Operating
Value:
1)
Characters returned by the BPG400-SR are always upper case.
2)
Carriage return (0D
3)
A Space character is signified by a "_" (underline) character in the text.
*
device address (aa)
00 … FF
or ctrl M)
hex
hex
_
Space
3)
→ "commands
and responses"
Data
1)
Terminator
CR
If an incorrect data string is sent by the host, the BPG400-SR will return an error
message with the following structure:
Element: Start character Operating
Value:
1)
Characters returned by the BPG400-SR are always upper case.
2)
Carriage return (0D
3)
A Space character is signified by a "_" (underline) character in the text.
?
device address (aa)
or Ctrl M)
hex
00 … FF
hex
_ 3) Data
Space ERROR CR
1) 3)
Terminator
2)
2)
38 tina03e1-b (2004-02) BPG400 v1.om
4.9.3 Syntax Description
4.9.3.1 Definitions, Legend
In the table "Commands and Responses" (→ 40) the following variables are
used:
Variable Description Values, range,
aa Operating device
00 … 3F
hex
address
fff Emission current _25UA
modeR Gauge operation
mode, response
5.0MA
_20MA
BPG_400_
RIG_
_ _ _ _
µA
= 25
= 5 mA
= 20 mA
= BPG400 mode
= RIG mode (reduced ion
gauge mode)
modeT Gauge operation
mode, command
BPG400
RIG
= BPG400 mode
= RIG mode (reduced ion
gauge mode)
n Filament selected 1
2
oo Address offset 00 … 3F
hex
No action, for future use
rate Data transfer rate 300, 1200, 2400, 4800,
9600, 19'200 or 28'800 Baud
status Gauge status BPG mode:
BPG_ST_0
BPG_ST_5
BPG_ST_8
BPG_ST_9
= no error
= Pirani warning
= BA error
= Pirani error
RIG mode:
01_OVPRS
02_EMISS
00_ST_OK
t Toggle status ON
OFF
If emission is switched off
= BA error
= normal operation
= toggle function on
= toggle function off
unit Pressure unit MBAR, TORR, PASCAL
v.vv Firmware version of
gauge
Three characters and a decimal point. Higher
revision numbers indicate newer versions of
firmware. Example: 1.00.
x.xx Mantissa of
pressure values 1.00 … 9.99
syy Signed exponent of
pressure values
z Operation of relays
(switching function)
s
yy
+
–
= Sign of exponent, +/–
= Exponent
00 … 09
= Relay on below threshold
= Relay on above threshold
All Commands and responses are terminated by "carriage return" (CR).
All response messages contain 13 characters, including
CR.
For better readability, a space character is signified by a " _ " (underline)
character in the table below.
tina03e1-b (2004-02) BPG400 v1.om 39
4.9.3.2 Commands and
Responses
The following table lists all permissible commands of the RS485 host and the corresponding responses of a BPG400 SR during data transfer.
Depending on the operation mode selected (BPG or RIG mode) the BPG400-SR
responses may differ. Syntax errors will produce an error message.
For each command listed, a programming example is given in the last column
where:
T: Command data transmitted by the host
R: Data received by the host (from BPG400-SR), in BPG and RIG mode
: Data received by the host (from BPG400-SR), only in BPG mode
R
BPG
R
: Data received by the host (from BPG400-SR), only in RIG mode
RIG
Host Command Host
Read pressure
measured value
Read status #aaRS CR *aa_status CR
Set address (offset) #aaSAoo CR *aa_PROGM_OK CR
Set pressure unit #aaSUunit CR *aa_PROGM_OK CR Error message T: #02SUPASCAL CR
Read pressure unit #aaRU CR *aa_unit CR Error message T: #02RU CR
Set filament #aaSFn CR For future use *aa_PROGM_OK CR T: #02SF2 CR
Set overpressure #aaSOx.xxEsyy CR For future use *aa_PROGM_OK CR T: #02SO5.00E–02 CR
Set degas off #aaDG0 CR *aa_PROGM_OK CR
Set degas on #aaDG1 CR *aa_PROGM_OK CR
Read emission #aaSES CR *aa_xxFA_EM CR
Read version #aaVER CR *aa_VERv.vv CR
Command syntax
#aaRD CR *aa_x.xxEsyy CR
BPG mode
Response syntax
RIG mode
Response syntax
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
Programming example and remarks
T: #02RD CR
R: *02_5.36E–04 CR
R
: *02_9.99E+09 CR
RIG
If gauge is switched off and during the first 3
seconds after gauge is switched on.
T: #02RS CR
R
: *02_BPG_ST_5 CR
BPG
R
: *02_00_ST_OK CR
RIG
T: #02A3_CR
R *02_PROGM_OK CR
New address becomes effective after power is
cycled or a reset command is executed.
If the user sets the offset address to a value so
that the operating device address would be
>0x3F
device itself.
R
New unit becomes effective after power is
cycled or a reset command is executed.
R
R
R
R: *02_PROGM_OK CR
R: *02_PROGM_OK CR
T: #02DG0 CR
R: *02_PROGM_OK CR
T: #02DG1 CR
R: *02_PROGM_OK CR
When the gauge is switched off, a degas on
command will produce an error message:
R: ?02_COMM_ERR CR
If pressure is >7.20E–06 mbar, the degas on
command is disabled
T: #02SES CR
R: *02_ _20MA_EM CR
T: #02VER CR
R: *02_VER_1.04 CR
, the offset address is set to "0" by the
Hex
: *02_PROGM_OK CR
BPG
: ?02_SYNTX_ER CR
RIG
: *02_PASCAL CR
BPG
: ?02_SYNTX_ER CR
RIG
Table continued on following page
40 tina03e1-b (2004-02) BPG400 v1.om
"Commands and Responses" continued:
Host Command Host
Set + threshold
(Setpoint A)
Set – threshold
(Setpoint A)
Read + threshold
(Setpoint A)
Read – threshold
(Setpoint A)
Set + threshold
(Setpoint B)
Set – threshold–
(Setpoint B)
Read + threshold
(Setpoint B)
Read – threshold–
(Setpoint B)
Read threshold
potentiometer
(Setpoint A)
Read threshold
potentiometer
(Setpoint B)
Set factory settings
(default)
Set data rate *)#aaSBrate CR *aa_PROGM_OK CR
Set parity none *)#aaSPN CR *aa_PROGM_OK CR
Set parity odd *)#aaSPO CR *aa_PROGM_OK CR
Set parity even *)#aaSPE CR *aa_PROGM_OK CR
Unlock #aaUNL CR *aa_PROGM_OK CR
Toggle unlock #aaTLU CR *aa_1_UL_t CR
Reset #aaRST CR No response No response After a reset command, communication can be
Set device mode *)#aaSDMmodeT CR *aa_PROGM_OK CR
Get device mode *)#aaGDM CR *aa_modeR CR
Command syntax
#aaSL+x.xxEsyy CR *aa_PROGM_OK CR
#aaSL–x.xxEsyy CR *aa_PROGM_OK CR
#aaRL+x.xxEsyy CR *aa_PROGM_OK CR
#aaRL–x.xxEsyy CR *aa_PROGM_OK CR
#aaSH+x.xxEsyy CR *aa_PROGM_OK CR
#aaSH–x.xxEsyy CR *aa_PROGM_OK CR
#aaRH+x.xxEsyy CR *aa_PROGM_OK CR
#aaRH–x.xxEsyy CR *aa_PROGM_OK CR
#aaGT1 CR *aa_x.xxEsyy CR
#aaGT2 CR *aa_x.xxEsyy CR
#aaFAC CR *aa_PROGM_OK CR
BPG mode
Response syntax
(*aa_zMIN_HYS CR)
(*aa_zMIN_HYS CR)
(*aa_zMIN_HYS CR)
(*aa_zMIN_HYS CR)
RIG mode
Response syntax
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
→ BPG mode
Programming example and remarks
T: #02SL+1.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL–2.00E–04 CR
R: *02_PROGM_OK CR (SL+ ≠ SL–)
T: #02SL+3.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL–3.00E–04 CR
R: *02_–MIN_HYS CR (SL+ = SL–)
SL+/SL– and SH+/ SH– commands define the
setpoints of the switching functions and
the operation of the corresponding relays
(→ 42).
T: #02GT1 CR
R: *02_3.50E–04 CR
All communication parameters will be set to
default values (default mode: BPG400)
T: #02SB9600 CR
R: *02_PROGM_OK CR
New data rate becomes effective after power
is cycled or a reset command is executed.
New setting becomes effective after power is
cycled or a reset command is executed.
T: #02UNL CR
R: *02_PROGM_OK CR
Prior to the commands SB, SPN, SPO, SPE,
SDM and GDM, a UNL command must be
executed. An attempt to execute the listed
commands without a UNL command will produce the error message
?02_COM_ERR CR
T: #02TLU CR
R: *02_1_UL_ON CR
T: #02TLU CR
R: *02_1_UL_OFF CR
The TLU command toggles the UNL function.
When TLU is in the ON state, the commands
SB, SPN, SPO, SPE, SDM or GDM can be
executed after a UNL command has been carried out. An attempt to execute the commands
SB, SPN, SPO, SPE or GDM while TLU is in
the OFF state, an error message
?02_SYNTX_ER CR will result.
reestablished after 3 seconds.
T: #02SDM_RIG CR
R: *02_PROGM_OK CR
T: #02GDM CR
R: *02_BPG_400_ CR
*) To prevent accidental changes of these parameters, a TLU - UNL sequence
has to be executed prior to the SB, SPN, SPO, SPE, SDM and GDM commands (
tina03e1-b (2004-02) BPG400 v1.om 41
→ "Toggle unlock" and "Toggle" commands).
4.9.4 Switching Functions
The BPG400-SR has two independent switching functions. A floating relay contact
is available for each switching function (
the switching function A is accessible on the RS485 interface connector (
→ 21). Additionally, the relay contact of
→ 24).
The functionality of the switching functions (setting of thresholds and relay operation) depends on the gauges threshold potentiometer settings:
Selecting the Source of the
Threshold Values
Threshold potentiometer setting Functionality of switching function
≤0.5 Volt
1)
• Thresholds defined by stored val-
ues (SL+/–, SH+/–, sent by the
host)
• Hysteresis defined by independent
setting of "+" and "–" values
• Relay operation defined by "+" and
"–" values and sequential order of
data transfer
→ following table)
(
• Thresholds defined by potentio-
>0.5 Volt
1)
meter settings
• Hysteresis = 10% of threshold
• Relays energize when pressure
falls below threshold
(Same as BPG400-SD/SP,
1)
Threshold voltages can be read by the host using the appropriate commands
→ 41) or measured on the corresponding pins of the gauges 25 pin D-Sub
(
connector (
→ 21).
→ 44)
42 tina03e1-b (2004-02) BPG400 v1.om
4.9.4.1 Programming the
Switching Functions
The programming procedure of the switching functions via the RS485 interface implemented in the BPG400-SR differs from the one used on BPG400-SD/SP.
The table below describes the programming possibilities.
Pressure p
Off
Relay
Pressure p
On
Relay
Function
On
Off
M
Hysteresis
M
Hysteresis
e
e
a
Off
a
On
Threshold values,
relay operation
e
u
l
a
v
d
e
r
u
s
SL -
SL +
u
l
a
v
d
e
r
u
s
SL +
SL -
SL+ < SL–
⇒ relay on below SL+
e
SL+ > SL–
⇒ relay off below SL–
Programming
example
→ table, 40)
(
T: #02SL+1.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL–2.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL+2.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL–1.00E–04 CR
R: *02_PROGM_OK CR
Pressure p
Off
Relay
Pressure p
On
Relay
On
Off
e
u
l
a
v
d
e
r
u
s
a
e
M
Minimal
Hysteresis
1
2
SL + = SL -
SL– = SL+,
SL+ command sent last
⇒ relay off below
SL+/SL–
(minimal hysteresis)
T: #02SL–3.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL+3.00E–04 CR
R: *02_+MIN_HYS CR
Off
e
u
l
a
v
d
e
r
u
s
a
e
M
Minimal
Hysteresis
1
2
SL - = SL +
SL+ = SL–,
SL– command sent last
⇒ relay on below
SL+/SL–
(minimal hysteresis)
T: #02SL+3.00E–04 CR
R: *02_PROGM_OK CR
T: #02SL–3.00E–04 CR
R: *02_–MIN_HYS CR
On
Programming the second switching function (setpoint B) is identical to
the procedure described above. Threshold variables are SH+ and SH–
in this case.
tina03e1-b (2004-02) BPG400 v1.om 43
4.10 Switching Functions
(BPG400-SD, -SP, -SR)
The gauges BPG400-SD, BPG400-SP and BPG400-SR have two independent,
manually settable switching functions. Each switching function has a floating normally open relay contact. The relay contacts are accessible at the sensor cable
connector (
→ 21).
On the BPG400-SR, the change over relay contact of setpoint A is also accessible
at the RS485 interface connector (
The threshold values of switching functions A and B can be set within the pressure
range 1×10
-9
mbar … 100 mbar via potentiometers "SETPOINT A" and
→ 24).
"SETPOINT B".
The Formula applied to calculate the corresponding threshold voltage
U
depends on the gauge version used.
Threshold
For BPG400-SD, -SR : U
For BPG400-SP: U
= 0.8129401 × (log p
Threshold
Threshold
= 0.75 × (log p
Setpoint
– c) + 7.75
Setpoint
– c + 9.30102999)
Constant c is pressure unit dependent (→ Appendix A).
Measuring signal
(Pressure p)
U
Threshold
(Setpoint A, B)
Switching function
Off
On
u
s
a
e
M
Hysteresis
10% U
Off
v
d
e
r
Threshold
Time t
e
u
l
a
The hysteresis of the switching functions is 10% of the threshold setting.
4.10.1 Setting the Switching
Functions
The threshold values of the two switching functions "SETPOINT A" and
"SETPOINT B" are set locally on the potentiometers of the gauge that are accessible via the openings on one side of the gauge housing.
Required tools
• Voltmeter
• Ohmmeter or continuity checker
• Screwdriver, max. ø2.5 mm
44 tina03e1-b (2004-02) BPG400 v1.om
Procedure
The procedure for setting thresholds is identical for both switching functions.
Put the gauge into operation.
Connect the + lead of a voltmeter to the threshold measurement point of the
selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and
– lead to Pin 5.
its
max. ø2.5
Setpoint A Pin 3
Setpoint
Pin 6
B
Pin 5
Using a screwdriver (max. ø2.5 mm), set the voltage of the selected
switching function (Setpoint A, B) to the desired value U
On the BPG400-SR, threshold potentiometer settings ≤0.5 V are
ignored, threshold values defined via RS485 will be effective in-
→ 42).
stead (
Threshold
.
Setting of the switching functions is now concluded.
There is no local visual indication of the statuses of the switching functions. However, a functional check of the switching functions (On/Off)
can be made with one of the following methods:
• Reading the status via fieldbus interface → [1] for BPG400-SD,
→ [2] for BPG400-SP, → 41 for BPG400-SR.
• Measurement of the relay contacts at the sensor cable connector
with a ohmmeter/continuity checker (
→ 21).
tina03e1-b (2004-02) BPG400 v1.om 45
5 Deinstallation
Procedure
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Vent the vacuum system.
Before taking the gauge out of operation, make sure that this has
no adverse effect on the vacuum system.
Depending on the programming of the superset controller, faults
may occur or error messages may be triggered.
Follow the appropriate shut-down and starting procedures.
Take gauge out of operation.
Disconnect all cables from the gauge.
Remove gauge from the vacuum system and replace the protective lid.
The gauge is now deinstalled.
46 tina03e1-b (2004-02) BPG400 v1.om
6 Maintenance, Repair
6.1 Maintenance
6.1.1 Cleaning the Gauge
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
Small deposits on the electrode system can be removed by baking the anode
(Degas
easily (
case of severe contamination (
A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not
use any aggressive or scouring cleaning agents.
→ 29). In the case of severe contamination, the baffle can be exchanged
→ 17). The sensor itself cannot be cleaned and needs to be replaced in
→ 51).
Make sure that no liquid can penetrate the product. Allow the product to
dry thoroughly before putting it into operation again.
Gauge failures due to contamination are not covered by the warranty.
6.2 Adjusting the Gauge
6.2.1 Adjustment at
Atmospheric Pressure
The gauge is factory-calibrated. Through the use in different climatic conditions,
fitting positions, aging or contamination (
→ 51) a shifting of the characteristic curve can occur and readjustment can be-
(
come necessary. Only the Pirani part can be adjusted.
At the push of a button the digital value and thus the analog output are adjusted
electronically to 10 V at atmospheric pressure.
Adjustment is necessary if
• at atmospheric pressure, the output signal is <10 V
• the display reads < atmospheric pressure (if the gauge has a display)
• at atmosphere, the digital value of the RS232C interface is < atmospheric pres-
sure
• at atmosphere, the digital value received by the bus controller of the fieldbus
gauges (DeviceNet, Profibus or RS485) is < atmospheric pressure
• when the vacuum system is vented, the output voltage reaches 10 V (limited to
10 V by the software) before the measured pressure has reached atmosphere
(gauges with display will show the error "5" at atmospheric pressure (Pirani
sensor warning
• when the vacuum system is vented, the digital value of the RS232C interface
reaches its maximum before the measured pressure has reached atmosphere
• when the vacuum system is vented, the digital value received by the bus con-
troller of the fieldbus (DeviceNet, Profibus or RS485) reaches its maximum before the measured pressure has reached atmosphere.
→ 30))
→ 29) and after exchanging the sensor
tina03e1-b (2004-02) BPG400 v1.om 47
Required tools
• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)
Procedure
Gauges BPG400-SD, -SP and -SR are mechanically slightly different from the
BPG400. The adjustment opening of BPG400-SD, -SP and -SR is on one side of
the gauge housing. However, the adjustment procedure is the same for all gauge
versions.
Operate gauge for approx. 10 minutes at atmospheric pressure.
If the gauge was operated before in the BA range, a coolingdown time of approx. 30 minutes is to be expected (gauge temperature = ambient temperature).
Insert the pin through the opening and push the button inside for at least
5 s.
BPG400-SD
BPG400
BPG400-SP
BPG400-SR
6.2.2 Zero Point Adjustment
max. ø1.3
Gauges with display will show the
reading "1000 mbar" and the function "A" when the button has been
pushed for 4 s. Upon completion of
the adjustment, the function indication "A" disappears.
The gauge is automatically adjusted (≈10 s).
The gauge is now adjusted at atmospheric pressure.
A zero point adjustment is recommended
• after the sensor has been exchanged
• if display shows "FAIL 5" (→ 30)
• as part of the usual maintenance work for quality assurance
48 tina03e1-b (2004-02) BPG400 v1.om
Required tools
• Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)
Procedure
6.3 What to Do in Case of
Problems
Required tools / material
The push button used for the adjustment at atmospheric pressure is also used for
the zero point adjustment (→ 47).
Operate gauge for approx. 10 minutes at a pressure of ≤1×10
-4
mbar.
Insert the pin through the opening and push the button inside for at least
2 s.
The adjustment is done automatically and ends after 2 minutes.
The zero point of the gauge is now adjusted.
In the event of a fault or a complete failure of the output signal, the gauge can easily be checked.
• Voltmeter / ohmmeter
• Allen key, size 2.5 mm
• Spare sensor (if the sensor is faulty)
Troubleshooting (BPG400)
The output signal is available at the sensor cable connector (Pin 2 and Pin 12).
In case of an error, it may be helpful to just turn off the mains supply and
turn it on again after 5 s.
Problem Possible cause Correction
Output signal
permanently
Output signal ≈0.3 V
(Display: error = 8)
Output signal ≈0.5 V
(Display: error = 9)
Output signal ≈0.5 V
Display: Internal data connection
≈0V
Sensor cable defective or
not correctly connected
No supply voltage Turn on the power supply
Gauge in an undefined
status
Hot cathode error
(sensor faulty)
Pirani error
(sensor defective)
Electronics unit not
mounted correctly on
sensor
not working
Check the sensor cable
Turn the gauge off and on
again (reset)
Replace the sensor
→ 51)
(
Replace the sensor
→ 51)
(
Check the connection
Turn the gauge off and on
again after 5 s
Replace the electronics
unit
Gauge does not switch
over to BA at low pressures
tina03e1-b (2004-02) BPG400 v1.om 49
Pirani zero point out of
tolerance
Carry out a zero point
adjustment (
→ 48)
Troubleshooting (sensor)
If the cause of a fault is suspected to be in the sensor, the following checks can be
made with an ohmmeter (the vacuum system need not be vented for this purpose).
Separate the sensor from the electronics unit (
→ 14). Using an ohmmeter, make
the following measurements on the contact pins.
Ohmmeter measure-
ment between pins
2 + 4
4 + 5
6 + 7
4 + 1
6 + 1
3 + 1
9 + 1
6 + 3
9 + 3
View on sensor pins
9
1
8
7
6
2
4
5
≈37 Ω >>37 Ω
≈37 Ω >>37 Ω
≈0.15 Ω >>0.15 Ω
∞ << ∞
∞ << ∞
∞ << ∞
∞ << ∞
∞ << ∞
∞ << ∞
6
Hot cathode approx. 0.15 Ohm
7
8
Not connected
2
3
Pirani sensor 1 approx. 37 Ohm
4
Pirani sensor 2 approx. 37 Ohm
5
3
Anode
1
GND (connected to sensor housing)
9
Ion collector
Possible cause
Pirani element 1 broken
Pirani element 2 broken
Filament of hot cathode broken
Electrode - short circuit to ground
Electrode - short circuit to ground
Electrode - short circuit to ground
Electrode - short circuit to ground
Short circuit between electrodes
Short circuit between electrodes
Correction
Troubleshooting on
Fieldbus Gauges
(BPG400-SD, -SP, -SR)
All of the above faults can only be remedied by replacing the sensor (→ 51).
Error diagnosis of fieldbus gauges can only be performed as described above for
the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can
only be done via the superset bus controller (
→ [1], [2] or 37).
For diagnosis of the BPG400-SD (DeviceNet) gauges, the status lights might produce some useful information (
→ 35).
50 tina03e1-b (2004-02) BPG400 v1.om
6.4 Replacing the Sensor
Replacement is necessary, when
• the sensor is severely contaminated
• the sensor is mechanically deformed
• the sensor is faulty, e.g. filament of hot cathode broken (→ 49)
• the sensor is faulty, e.g. Pirani element broken (→ 49)
Required tools / material
Procedure
• Allen key, size 2.5 mm
• Spare sensor (→ 52)
Deinstall the gauge (→ 46).
Deinstall the electronics unit from the faulty sensor and mount it to the new
sensor (
→ 14).
Adjust the gauge (→ 47).
The new sensor is now installed.
tina03e1-b (2004-02) BPG400 v1.om 51
7 Options
8 Spare Parts
Part number
24 VDC power supply / RS232C line (→ 25)
Extension 100 mm (→ 16)
Baffle DN 25 ISO-KF / DN 40 CF-R (→ 17)
When ordering spare parts, always indicate:
• All information on the product nameplate
• Description and part number
Replacement sensor BPG400, vacuum connection
DN 25 ISO-KF (including Allen key) 354-490
Replacement sensor BPG400, vacuum connection
DN 40 CF-R (including Allen key) 354-491
353-511
353-510
353-512
Part number
9 Storage
Caution
Caution: vacuum component
Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product.
Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature
→ 11).
range (
52 tina03e1-b (2004-02) BPG400 v1.om
10 Returning the Product
11 Disposal
WARNING
Caution: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic, caustic or biological
hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.
→ 58).
Separating the components
Contaminated components
Other components
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
WARNING
N
After disassembling the product, separate its components according to the following criteria:
Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and disposed of.
Such components must be separated according to their materials and recycled.
Caution: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local
regulations.
tina03e1-b (2004-02) BPG400 v1.om 53
Appendix
A: Relationship Output
Signal – Pressure
Conversion formulae
(U - 7.75) / 0.75 + c
p = 10
U = 0.75 × (log p - c) + 7.75
where U p c
[V] [mbar] 0
[V] [Pa] 2
[V] [Torr] -0.125
Conversion curve
Pressure p [mbar]
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
1E–06
1E–07
1E–08
1E–09
1E–10
Sensor error
Inadmissible range
1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
0.0
Inadmissible range
Measuring signal U[V]
54 tina03e1-b (2004-02) BPG400 v1.om
Conversion table
B: Gas Type Dependence
Output signal U
[V] [mbar]
0.3 / 0.5
Pressure p
[Torr] [Pa]
Sensor error (
→ 49)
0.51 … 0.774 Inadmissible range
0.774 5×10
1.00 1×10
1.75 1×10
2.5 1×10
3.25 1×10
4.00 1×10
4.75 1×10
5.50 1×10
6.25 1×10
7.00 1×10
7.75 1×10
8.50 1×10
9.25 1×10
10.00 1×10
-10
-9
-8
-7
-6
-5
-4
-3
-2
-1
0
1
2
3
7.5×10
3.75×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
7.5×10
-10
-10
-9
-8
-7
-6
-5
-4
-3
-2
-1
0
1
2
>10.00 Inadmissible range
5×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
1×10
-8
-7
-6
-5
-4
-3
-2
-1
0
1
2
3
4
5
Indication range
above 10
-2
mbar
Pressure indicated (gauge adjusted for air, Pirani-only mode)
p (mbar)
2
10
8
6
4
2
1
10
8
6
4
2
0
10
8
6
4
2
–1
10
8
6
4
2
–2
10
8
6
4
2
–3
10
10
H2O
vapor
–3
246
Indication range
above 10
10
–2
246
-2
mbar)
–1
10
246
0
10
H2He Ne
246
1
10
Air
O2
CO
N2
CO
Ar
Freon 12
Kr
Xe
246
(mbar)
p
eff
2
2
10
tina03e1-b (2004-02) BPG400 v1.om 55
Calibration in pressure range
-2
10
… 1 mbar
The gas type dependence in the pressure range 10-2 … 1 mbar can be compensated by means of the following formula:
= C × indicated pressure
p
eff
where Gas type Calibration factor C
Air, O2, CO 1.0
N
CO
2
2
0.9
0.5
Water vapor 0.7
Freon 12 1.0
H
2
0.5
He 0.8
Ne 1.4
Ar 1.7
Kr 2.4
Xe 3.0
(The above calibration factors are mean values.)
Calibration in pressure range
-3
<10
mbar
The gas type dependence in the pressure range <10
-3
mbar can be compensated
by means of the following formula (gauge adjusted for air):
= C × indicated pressure
p
eff
where Gas type Calibration factor C
Air, O2, CO, N2 1.0
N
2
1.0
He 5.9
Ne 4.1
H
2
2.4
Ar 0.8
Kr 0.5
Xe 0.4
(The above calibration factors are mean values.)
A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instrument.
56 tina03e1-b (2004-02) BPG400 v1.om
C: Literature
[1] www.inficon.com
Communication Protocol
DeviceNet™ BPG400-SD
tira03e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Communication Protocol
Profibus BPG400-SP
tira36e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.odva.org
Open DeviceNet Vendor Association, Inc.
DeviceNet™ Specifications
[5] www.profibus.com
Profibus user organization
[6] European Standard for DeviceNet EN 50325
[7] European Standard for Profibus EN 50170
[8] www.inficon.com
Instruction Sheet
BPG400 (all versions)
tima03e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[9] www.inficon.com
Instruction Sheet
BPG400-SD, BPG400-SP, BPG400-SR
tima36e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[10] www.inficon.com
INFICON AG, LI–9496 Balzers, Liechtenstein
tina03e1-b (2004-02) BPG400 v1.om 57
Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.
Description of product
Type
Part number
Serial number
The product is free of any substances which are damaging to
health. yes
Reason for return
Operating fluid(s) used
Used in copper process
no yes
Process related contamination of product:
toxic no 1) yes
caustic no 1) yes
biological hazard no yes 2)
explosive no yes 2)
radioactive no yes 2)
other harmful substances no 1) yes
1) or not containing any amount
of hazardous residues that
exceed the permissible ex posure limits
(Must be drained before shipping.)
Seal product in plastic bag and
mark it with a corresponding label.
2) Products thus contami nated will not be ac cepted without written
evidence of decontami nation.
Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name
Chemical name
(or symbol)
Precauti ons associated
with substance
Action if human contact
Legally binding declaration:
We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address Post code, place
Phone Fax
Email
Name
Date and legally binding signature Company stamp
This form can be downloaded
from our website.
Copies:
Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender
58 tina03e1-b (0402) BPG400 v1.om
Notes
tina03e1-b (2004-02) BPG400 v1.om 59
LI–9496 Balzers
Liechtenstein
Tel +423 / 388 3111
Fax +423 / 388 3700
Original: German tina03d1-b (2004-02) reachus@inficon.com
t i na03e1- b
www.inficon.com
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