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BPG400 ATM
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INFICON BPG400 ATM User Manual

Operating Manual
Bayard-Alpert Pirani Gauge
BPG400 BPG400-SD BPG400-SP BPG400-SR
tina03e1-b (2004-02) 1
RS485
Product Identification
In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.
INFICON AG, LI-9496 Balzers
Model: PN: SN: V W
Validity
This document applies to products with the following part numbers:
BPG400 (without display)
353-500 353-502 (vacuum connection DN 40 CF-R)
BPG400 (with display)
353-501 353-503 (vacuum connection DN 40 CF-R)
BPG400-SD (with DeviceNet interface and switching functions)
353-507 353-508 (vacuum connection DN 40 CF-R)
BPG400-SP (with Profibus interface and switching functions)
353-505 353-506 (vacuum connection DN 40 CF-R)
BPG400-SR (with RS485 interface and switching functions)
353-509 353-513 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
(vacuum connection DN 25 ISO-KF)
If not indicated otherwise in the legends, the illustrations in this docu­ment correspond to gauge with part number 353-500. They apply to the other gauges by analogy.
All BPG400 versions are shipped with an instruction sheet (→ [8]). BPG400-SD, BPG400-SP and BPG400-SR come with a supplementary instruction sheet de­scribing the fieldbus interfaces and the switching functions (→ [9]).
We reserve the right to make technical changes without prior notice.
Intended Use
The BPG400 gauges have been designed for vacuum measurement of non-flam­mable gases and gas mixtures in a pressure range of 5×10
The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC103 or VGC40x or with other control devices.
-10
… 1000 mbar.
Functional Principle
Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10 p > 5.5×10
2.0×10
-3
mbar). In the overlapping pressure range of
-2
… 5.5×10-3 mbar, a mixed signal of the two measurement systems is output. The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 switched off when the pressure exceeds 3.2×10
-2
mbar) and a Pirani measurement system (for
-2
mbar (to prevent filament burn-out). It is
-2
mbar.
Trademarks
DeviceNet™ Open DeviceNet Vendor Association, Inc.
tina03e1-b (2004-02) BPG400 v1.om 3
Contents
Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3
1 Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2 Technical Data 8
3 Installation 13
3.1 Vacuum Connection 13
3.1.1 Removing and Installing the Electronics Unit 14
3.1.2 Installing the Optional Extension 16
3.1.3 Using the Optional Baffle 17
3.2 Electrical Connection 19
3.2.1 Use With INFICON VGC103 or VGC40x Vacuum Gauge Controller 19
3.2.2 Use With Other Controllers 19
3.2.2.1 Making an Individual Sensor Cable 20
3.2.2.2 Making a DeviceNet Interface Cable (BPG400-SD) 22
3.2.2.3 Making a Profibus Interface Cable (BPG400-SP) 23
3.2.2.4 Making a RS485 Interface Cable (BPG400-SR) 24
3.2.3 Using the Optional Power Supply (With RS232C Line) 25
4 Operation 27
4.1 Measuring Principle, Measuring Behavior 27
4.2 Operational Principle of the Gauge 28
4.3 Putting the Gauge Into Operation 29
4.4 Degas 29
4.5 Display (BPG400) 30
4.6 RS232C Interface 31
4.6.1 Description of the Functions 31
4.6.1.1 Output String (Transmit) 31
4.6.1.2 Input String (Receive) 33
4.7 DeviceNet Interface (BPG400-SD) 34
4.7.1 Description of the Functions 34
4.7.2 Operating Parameters 34
4.7.2.1 Operating Software 34
4.7.2.2 Node Address Setting 34
4.7.2.3 Data Rate Setting 35
4.7.3 Status Lights 35
4.8 Profibus Interface (BPG400-SP) 36
4.8.1 Description of the Functions 36
4.8.2 Operating Parameters 36
4.8.2.1 Operating Software 36
4.8.2.2 Node Address Setting 36
4.9 RS485 Interface (BPG400-SR) 37
4.9.1 Description of the Functions and Modes 37
4.9.2 Data Exchange 37
4.9.2.1 Operational Parameters 37
4.9.2.2 Device Address 38
4.9.2.3 Command Structure (Host) 38
4.9.2.4 Response Structure 38
4.9.2.5 Error Messages 38
4.9.3 Syntax Description 39
4.9.3.1 Definitions, Legend 39
4.9.3.2 Commands and Responses 40
4.9.4 Switching Functions 42
4.9.4.1 Programming the Switching Functions 43
4.10 Switching Functions (BPG400-SD, -SP, -SR) 44
4.10.1 Setting the Switching Functions 44
5 Deinstallation 46
6 Maintenance, Repair 47
6.1 Maintenance 47
6.1.1 Cleaning the Gauge 47
6.2 Adjusting the Gauge 47
6.2.1 Adjustment at Atmospheric Pressure 47
6.2.2 Zero Point Adjustment 48
6.3 What to Do in Case of Problems 49
6.4 Replacing the Sensor 51
7 Options 52
8 Spare Parts 52
9 Storage 52
10 Returning the Product 53
11 Disposal 53
Appendix 54
A: Relationship Output Signal – Pressure 54 B: Gas Type Dependence 55 C: Literature 57
Declaration of Contamination 58
For cross-references within this document, the symbol (→ XY) is used, for cross­references to further documents and data sources, the symbol (→ [Z]).
tina03e1-b (2004-02) BPG400 v1.om 5
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or mi­nor equipment damage.
Notice
1.2 Personnel Qualifications
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.
1.3 General Safety Instructions
• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions between the materials (→ 11) and the process media.
Consider possible reactions of the process media (e.g. explosion) due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum components are con­taminated. Adhere to the relevant regulations and take the necessary precau­tions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null and void if the end­user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations etc.) on the product
• use the product with accessories not listed in the corresponding product docu-
mentation.
The end-user assumes the responsibility in conjunction with the process media used.
tina03e1-b (2004-02) BPG400 v1.om 7
2 Technical Data
Measurement
Emission
Degas
Measuring range (air, N
) 5×10
2, O2
-10
… 1000 mbar, continuous
Accuracy 15% of reading in the range of
10-8 … 10-2 mbar (after 5 min stabilization)
Repeatability 5% of reading in the range of
-8
10
… 10-2 mbar
(after 5 min stabilization)
Gas type dependence → Appendix B
Switching on threshold Switching off threshold
Emission current
p ≤7.2×10
7.2×10
-6
mbar
-6
mbar <p <3.2×10-2 mbar
2.4×10-2 mbar
-2
3.2×10
mbar
5 mA 25 µA
Emission current switching
25 µA ⇒ 5 mA 5 mA ⇒ 25 µA
Degas emission current (p <7.2×10
-6
mbar)
7.2×10-6 mbar
-5
3.2×10
≈16 mA (P
mbar
degas
≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232 → 31)
Duration max. 3 min, followed by automatic stop
Output signal
Display (
BPG400)
Power supply
In degas mode, BPG400 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.
Output signal (measuring signal) 0 … +10 V
-10
Measuring range 0.774 V (5×10
mbar)
… +10 V (1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(
→ Appendix A)
Error signal
Minimum loaded impedance
Display panel
<0.3 V/0.5 V (→ 49)
10 kΩ
LCD matrix, 32×16 pixels, with background illumination
Dimensions
Pressure units (pressure p)
16.0 mm × 11.2 mm
mbar (default), Torr, Pa (selecting the pressure unit → 31)
DANGER
The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extra­low voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused (INFICON-controllers fulfill these requirements).
Operating voltage at the gauge +24 VDC (20 … 28 VDC)
ripple max. 2 V
pp
1)
Power consumption
Standard Degas Emission start (<200 ms)
≤0.5 A ≤0.8 A ≤1.4 A
Power consumption
BPG400 BPG400-SD, -SP, -SR
≤16 W ≤18 W
Fuse necessary 1.25 AT
BPG400-SD requires an additional, separate power supply for the DeviceNet interface (→ 22).
Supply voltage at the DeviceNet con­nector, (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)
Power consumption <2 W
The gauge is protected against reversed polarity of the supply voltage.
Sensor cable connection
For reasons of compatibility, the expression "sensor cable" is used for all BPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG400-SD, BPG400-SD and BPG400-SR) is normally transmitted via the corresponding bus.
Electrical connector
BPG400 BPG400-SD, -SP, -SR
Cable for BPG400
Analog values only Without degas function
Analog values With degas function
Analog values With degas function And RS232C interface
Cable for BPG400-SD, -SP, -SR
Max. cable length (supply voltage 24 V
Analog and fieldbus operation
RS232C operation
Gauge identification
Switching functions
BPG400
BPG400-SD, -SP, -SR
Adjustment range
Relay contact rating
Voltage Current
D-Sub,15 pins, male
→ 20 → 21
4 conductors plus shielding
5 conductors plus shielding
7 conductors plus shielding
depending on the functions used, max. 15 conductors plus shielding
1)
)
≤35 m, conductor cross-section 0.25 mm² ≤50 m, conductor cross-section 0.34 mm² ≤100 m, conductor cross-section 1.0 mm²
≤30 m
42 kΩ resistor between Pin 10 (sensor cable) and GND
none
2 (setpoints A and B)
-9
mbar … 100 mbar
1×10
Setpoints adjustable via potentiometers (setpoints A and B), one floating, nor­mally open relay contact per setpoint (→ 21, 44)
Adjusting the setpoints via field bus is described in the corresponding bus sec­tions.
≤60 V ≤0.5 ADC
1)
Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).
tina03e1-b (2004-02) BPG400 v1.om 9
RS232C interface
Data rate
Data format
9600 Baud
binary 8 data bits one stop bit no parity bit no handshake
Connections (sensor cable connector) TxD (Transmit Data) RxD (Receive Data) GND
Pin 13 Pin 14 Pin 5
(Function and communication protocol of the RS232C interface → 31)
DeviceNet interface (BPG400-SD)
Profibus interface (BPG400-SP)
Fieldbus name DeviceNet
Standard applied
Communication protocol, data format
→ [6]
→ [1], [4]
Interface, physical CAN bus
Data rate (adjustable via "RATE" switch)
125 kBaud 250 kBaud 500 kBaud "P" (125 kBaud, 250 kBaud, 500 kBaud programmable via DeviceNet (→ [1])
Node address (MAC ID) (Adjustable via "ADDRESS", "MSD", "LSD" switches)
0 … 63
dec
"P" (0 … 63 programmable via DeviceNet, → [1])
DeviceNet connector Micro-Style, 5 pins, male
Cable Shielded, special DeviceNet cable,
5 conductors (→ 22 and [4])
Cable length, system wiring According to DeviceNet specifications
(→ [6], [4])
Fieldbus name Profibus
Standard applied
Communication protocol data format
→ [7]
→ [10], [7]
Interface, physical RS485
Data rate
≤12 MBaud (→ [10])
Node address
Local (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)
00 … 7D
(0 … 125
hex
dec
)
Via Profibus (hexadecimal "ADDRESS" switches set to >7d
hex
(>125
dec
))
00 … 7D
(0 … 125
hex
dec
)
Profibus connection D-Sub, 9 pins, female
Cable Shielded, special Profibus cable
(→ 23 and [5])
Cable length, system wiring According to Profibus specifications
(→ [7], [5])
RS485 interface (BPG400-SR)
Fieldbus name RS485
Data rate 300 … 28'800 Baud
Device address (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)
00 … 7F
(0 … 127
hex
RS485 connection D-Sub, 9 pins, male
Cable
Cable length
shielded RS485 cable (→ 24)
≤100m
), (→ 38)
dec
Vacuum
Weight
Ambiance
Materials exposed to vacuum
Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element
Internal volume
DN 25 ISO-KF DN 40 CF-R
stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y molybdenum tungsten, copper
3
≤24 cm
3
≤34 cm
Pressure max. 2 bar (absolute)
Part number
353-500, 353-501 353-502, 353-503 353-505, 353-507, 353-509 353-506, 353-508, 353-513
≈290 g ≈550 g ≈430 g ≈695 g
Admissible temperatures
Storage
Operation
Bakeout
-20 … 70 °C
0 … 50 °C
+150 °C (without electronics unit or with bakeout extension → 16)
Relative humidity (year's mean / during 60 days)
≤65 / 85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Type of protection IP 30
2O3
)
tina03e1-b (2004-02) BPG400 v1.om 11
Dimensions
Part number Part number
353-500 353-502
353-501 353-503
353-505 353-506
353-509 353-513
(353-507)
1)
(353-508)
1)
4-40UNC 2B
DN 25 ISO-KF
1)
Gauges with DeviceNet connector are 14 mm longer.
4-40UNC 2B
The other dimensions of housing and vacuum connection are identical.
Part number 353-507 353-508
DN 40 CF-R
3 Installation
3.1 Vacuum Connection
DANGER
Caution: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.
DANGER
The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a pro­tective connection according to EN 61010:
• CF connections fulfill this requirement
• For gauges with a KF vacuum connection, use a conductive me-
tallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.
Procedure
The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (→ 12).
• The gauge is supplied with a built-in grid. For potentially contaminating appli­cations and to protect the electrodes against light and fast charged particles, installation (→ 17) of the optional baffle is recommended (→ 52).
• The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C, the electronics unit has to be removed (→ 14) or an extension (Option → 52) has to be installed (→ 16).
Remove the protective lid.
The protective lid will be needed for mainte­nance.
tina03e1-b (2004-02) BPG400 v1.om 13
Make the flange connection to the vacuum system, preferably without
applying vacuum grease.
3.1.1 Removing and Installing the Electronics Unit
Required tools / material
Removing the electronics unit
When installing the gauge, make sure that the area around the con­nector is accessible for the tools required for adjustment while the gauge is mounted (→ 44, 47).
When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.
If you are using a gauge with display, make sure easy reading of the display is possible.
The gauge is now installed.
• Allen key, size 2.5 mm
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
Installing the electronics unit
Remove the electronics unit without twisting it.
Removal of the electronics unit is completed.
Place the electronics unit on the sensor (3) (be careful to correctly align the
pins and notch (4)).
4
3
Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw (1).
The electronics unit is now installed.
tina03e1-b (2004-02) BPG400 v1.om 15
3.1.2 Installing the Optional Extension
With the optional extension (→ 52) the sensor can also be baked during opera­tion at temperatures up to 150 °C (only at p<10 tures, the accuracy of the Pirani sensor decreases).
-2
mbar because at high tempera-
Caution
Caution: rising heat
The electronics unit of gauges that are installed vertically, above the source of heat can be damaged through rising heat even with an in­stalled extension.
Bakeout area
Required tools / material
Procedure
123
Bakeout area
When installing the extension, make sure that the area around the con­nector is accessible for the tools required for adjustment while the gauge is mounted (→ 44, 47).
When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.
If you are using a gauge with display, ensure easy reading of the display.
• Extension (→ 52)
• Allen key, size 2.5 mm
• Allen key, size 1.5 mm
Remove the electronics unit (2) (→  14).
Slide the sensor (3) into the extension (6) to the mechanical stop (be careful
to correctly position the pins and notch (4)).
Secure the sensor with the hex socket set screws (7) using an Allen key,
size 1.5 mm.
2
4a
4
3
7
6
1
Slide the electronics unit (2) in to the mechanical stop (be careful to cor-
rectly align the pins and notch (4a)).
Secure the electronics unit (2) with the hex socket set screw (1) using an
Allen key, size 2.5 mm.
The extension is now installed.
3.1.3 Using the Optional Baffle
Installing/deinstalling the baffle
Required tools / material
Installation
In severely contaminating processes and to protect measurement electrodes opti­cally against light and fast charged particles, replacement of the built-in grid by the optional baffle (→ 52) is recommended.
The optional baffle will be installed/deinstalled at the sensor opening of the dein­stalled gauge (Deinstallation gauge → 46).
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean tools when working in this area.
• Baffle (→ 52)
• Pointed tweezers
• Pin (e.g. pencil)
• Screwdriver No 1
Carefully remove the grid with tweezers.
tina03e1-b (2004-02) BPG400 v1.om 17
Carefully place the baffle onto the sensor opening.
Using a pin, press the baffle down in the center until it catches.
Deinstallation
The baffle is now installed (Installation of the gauge → 13).
Using a pin, press the baffle down in the center until it catches.
The new baffle is now installed (Installation of the gauge → 13).
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