Inficon BPG400, BPG400-SD, BPG400-SP Operating Manual

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Operating Manual

Bayard-Alpert Pirani Gauge

BPG400 BPG400-SD BPG400-SP

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Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

This document applies to products with the following part numbers:

BPG400 (without display)

353-500 353-502 (vacuum connection DN 40 CF-R)

BPG400 (with display)

353-501 353-503 (vacuum connection DN 40 CF-R)

BPG400-SD (with DeviceNet interface and switching functions)

353-507 353-508 (vacuum connection DN 40 CF-R)

BPG400-SP (with Profibus interface and switching functions)

353-505 353-506 (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

All BPG400 versions are shipped with an instruction sheet (® & [8]). BPG400-SD and BPG400-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (® & [9]).

(vacuum connection DN 25 ISO-KF)

If not indicated otherwise in the legends, the illustrations in this document correspond to the KF vacuum connection. They apply to other vacuum connections by analogy.

In illustrations that apply to all types of the BPG400 gauge family, the gauge with part number 353-500 is shown.

We reserve the right to make technical changes without prior notice.

Intended Use

2 tina03e1 (0206) BPG400 v1.om

The BPG400 gauges have been designed for vacuum measurement of non-flammable gases and gas mixtures in a pressure range of 5×10

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC103 or VGC40x or with other control devices.

-10

… 1000 mbar.

Functional Principle

Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure.

The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10 p > 5.5×10

5.5×10

-3

mbar). In the overlapping pressure range of 2.0×10-2 …

-3

mbar, a mixed signal of the two measurement systems is output. The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 pressure exceeds 3.2×10

-2

mbar) and a Pirani measurement system (for

-2

mbar (to prevent filament burn-out). It is switched off when the

-2

mbar.

Trademarks

DeviceNet™ Open DeviceNet Vendor Association, Inc.

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Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8

3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 15

3.1.2 Installing the Optional Extension 16

3.1.3 Using the Optional Baffle 17

3.1.3.1 Installing the Baffle 17

3.1.3.2 Replacing the Baffle 19

3.2 Electrical Connection 20

3.2.1 Use With INFICON VGC103 or VGC40x Vacuum Gauge Controller 20

3.2.2 Use With Other Controllers 21

3.2.2.1 Making an Individual Sensor Cable 21

3.2.2.2 Making a DeviceNet Interface Cable (BPG400-SD) 24

3.2.2.3 Making a Profibus Interface Cable (BPG400-SP) 25

3.2.3 Using the Optional Power Supply (With RS232C Line) 26

4 Operation 28

4.1 Measuring Principle, Measuring Behavior 28

4.2 Operational Principle of the Gauge 29

4.3 Putting the Gauge Into Operation 29

4.4 Degas 30

4.5 Display (BPG400) 30

4.6 RS232C Interface 32

4.6.1 Description of the Functions 32

4.6.1.1 Output String (Transmit) 32

4.6.1.2 Input String (Receive) 34

4.7 DeviceNet Interface (BPG400-SD) 35

4.7.1 Description of the Functions 35

4.7.2 Operating Parameters 35

4.7.2.1 Operating Software 35

4.7.2.2 Node Address Setting 35

4.7.2.3 Data Rate Setting 36

4.7.3 Status Lights 36

4.8 Profibus Interface (BPG400-SP) 37

4.8.1 Description of the Functions 37

4.8.2 Operating Parameters 37

4.8.2.1 Operating Software 37

4.8.2.2 Node Address Setting 37

4.9 Switching Functions (BPG400-SD, BPG400-SP) 38

4.9.1 Setting the Switching Functions 38

5 Deinstallation 40

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6 Maintenance, Repair 42

6.1 Maintenance 42

6.1.1 Cleaning the Gauge 42

6.2 Adjusting the Gauge 42

6.2.1 Adjustment at Atmospheric Pressure 42

6.2.2 Zero Point Adjustment 43

6.3 What to Do in Case of Problems 44

6.4 Replacing the Sensor 46

7 Options 47

8 Spare Parts 47

9 Storage 47

10 Returning the Product 48

11 Disposal 48

Appendix 49

A: Relationship Output Signal – Pressure 49 B: Gas Type Dependence 50 C: Literature 52

Declaration of Contamination 53

For cross-references within this document, the symbol (® 2 XY) is used, for crossreferences to further documents and data sources, the symbol (® & [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3 General Safety Instructions

· Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (® 2 11) and the process media.

Consider possible reactions of the process media due to the heat generated by the product.

· Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

· Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

· disregard the information in this document

· use the product in a non-conforming manner

· make any kind of interventions (modifications, alterations etc.) on the product

· use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media used.

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2 Technical Data

Measurement

Emission

Degas

Measuring range (air, N

) 5×10

2, O2

-10

… 1000 mbar, continuous

Accuracy 15% of reading in the range of

10-8 … 10-2 mbar (after 5 min stabilization)

Repeatability 5% of reading in the range of

-8

… 10-2 mbar

(after 5 min stabilization)

Gas type dependence ® Appendix B

Switching on threshold Switching off threshold

Emission current

p £7.2×10

7.2×10

-6

mbar

-6

mbar <p <3.2×10-2 mbar

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA 25 µA

Emission current switching

25 µA Þ 5 mA 5 mA Þ 25 µA

Degas emission current (p <7.2×10

-6

mbar)

7.2×10-6 mbar

-5

3.2×10

»16 mA (P

mbar

degas

»4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 ® 2 32)

Duration max. 3 min, followed by automatic stop

Output signal

Display (

BPG400)

Power supply

In degas mode, BPG400 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal (measuring signal) 0 … +10 V

Measuring range

0.774 V Z 5×10

-10

mbar

… +10 V Z 1000 mbar

Relationship voltage-pressure logarithmic, 0.75 V/decade

(

® Appendix A)

Error signal

Minimum loaded impedance

Display panel

<0.3 V/0.5 V (® 2 44)

10 kW

LCD matrix, 32×16 pixels, with background illumination

Dimensions

Pressure units (pressure p)

16.0 mm × 11.2 mm

mbar (default), Torr, Pa (selecting the pressure unit ® 2 32)

DANGER

The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused (INFICON-controllers fulfill these requirements).

8 tina03e1 (0206) BPG400 v1.om

Operating voltage at the gauge +24 VDC (20 … 28 VDC)

ripple max. 2 V

Power consumption

Standard Degas Emission start (<200 ms)

£0.5 A £0.8 A £1.4 A

Power consumption

BPG400 BPG400-SD, BPG400-SP

£16 W £18 W

Fuse necessary 1.25 AT

BPG400-SD requires an additional, separate power supply for the DeviceNet interface (® 2 24).

Supply voltage at the DeviceNet connector, (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)

Power consumption <2 W

The gauge is protected against reversed polarity of the supply voltage.

Sensor cable

For reasons of compatibility, the expression "sensor cable" is used for all BPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG400-SD and BPG400-SP) is normally transmitted via DeviceNet or Profibus.

Electrical connector

BPG400 BPG400-SD, BPG400-SP

Cable for BPG400

Analog values only Without degas function

Analog values With degas function

Analog values With degas function And RS232C interface

Cable for BPG400-SD, BPG400-SP

Max. cable length (supply voltage 24 V

Analog and fieldbus operation

RS232C operation

Gauge identification

Switching functions

BPG400

BPG400-SD, BPG400-SP

Adjustment range

Relay contact rating

Voltage Current

D-Sub,15 pins, male

® 2 22 ® 2 23

4 conductors plus shielding

5 conductors plus shielding

7 conductors plus shielding

depending on the functions used, max. 15 conductors plus shielding

)

£35 m, conductor cross-section 0.25 mm² £50 m, conductor cross-section 0.34 mm² £100 m, conductor cross-section 1.0 mm²

£30 m

42 kW resistor between Pin 10 (sensor cable) and GND

none

2 (Setpoints A and B)

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers (Setpoints A and B), one floating, normally open relay contact per setpoint (® 2 23, 38)

£60 V £0.5 ADC

Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).

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RS232C interface

Data rate

Data format

9600 baud

binary 8 data bits one stop bit no parity bit no handshake

Connections (sensor cable connector) TxD (Transmit Data) RxD (Receive Data) GND

Pin 13 Pin 14 Pin 5

(Function and communication protocol of the RS232C interface ® 2 32)

DeviceNet interface (BPG400-SD)

Profibus interface (BPG400-SP)

Fieldbus name DeviceNet

Standard applied

Communication protocol, data format

® & [6]

® & [1], [4]

Interface, physical CAN bus

Data rate (adjustable via "RATE" switch)

125 kbaud 250 kbaud 500 kbaud "P" (125 kbaud, 250 kbaud, 500 kbaud programmable via DeviceNet (® & [1])

Node address (MAC ID) (Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

dec

"P" (0 … 63 programmable via DeviceNet, ® & [1])

DeviceNet connector Micro-Style, 5 pins, male

Cable Shielded, special DeviceNet cable,

5 conductors (® 2 24 and & [4])

Cable length, system wiring According to DeviceNet specifications

(® & [6], [4])

Fieldbus name Profibus

Standard applied

Communication protocol data format

® & [7]

® & [10], [7]

Interface, physical RS485

Data rate

Node address

£12 Mbaud (® & [10])

00 … 3F

(0 … 127

hex

dec

) (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

Profibus connection D-Sub, 9 pins, female

Cable Shielded, special Profibus cable

(® 2 25 and & [5])

Cable length, system wiring According to Profibus specifications

(® & [7], [5])

10 tina03e1 (0206) BPG400 v1.om

Vacuum

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element

Internal volume

353-500, 353-501 353-505, 353-507

353-502, 353-503 353-506, 353-508

stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y molybdenum tungsten, copper

£24 cm

£34 cm

Pressure max. 2 bar (absolute)

2O3

)

Ambiance

Dimensions

Admissible temperatures

Storage

Operation

Bakeout

-20 … 70 °C

0 … 50 °C

+150 °C (without electronics unit or with bakeout extension ® 2 16)

Relative humidity

(year's mean / during 60 days)

£65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Type of protection IP 30

Part numbers

353-500 353-501 353-505 (353-507)

4-40UNC 2B

DN 25 ISO-KF 353-500 353-501

tina03e1 (0206) BPG400 v1.om 11

Part numbers

353-502 353-503 353-506 (353-508)

4-40UNC 2B

DN 40 ISO-KF 353-502 353-503

Gauges with DeviceNet connector are 14 mm longer. The other dimensions of housing and vacuum connection are identical.

Part numbers

353-507 353-508

Weight

353-500, 353-501 353-502, 353-503 353-505, 353-507 353-506, 353-508

285 g 550 g 430 g 695 g

12 tina03e1 (0206) BPG400 v1.om

3 Installation

3.1 Vacuum Connection

DANGER

Caution: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

Caution: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

· CF connections fulfill this requirement

· For gauges with a KF vacuum connection, use a conductive me-

tallic clamping ring.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (® 2 11).

· The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast particles, installation (® 2 17) of the optional baffle is recommended (® 2 47).

· For the vacuum connection sealing, use of a metal seal (® 2 47) is recom- mended, since elastomer seals (e.g. FPM) can impair the measurement accuracy already in the 10

· The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C, the electronics unit has to be removed (® 2 15) or an extension (Option ® 2 47) has to be installed (® 2 16).

-6

mbar range by outgassing.

tina03e1 (0206) BPG400 v1.om 13

Procedure

Remove the protective lid.



The protective lid will be needed for maintenance.

Make the flange connection.



When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted (® 2 38, 42).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

The gauge is now installed.

14 tina03e1 (0206) BPG400 v1.om

3.1.1 Removing and Installing the Electronics Unit

Required tools / material

Removing the electronics unit

· Allen key, size 2.5 mm

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

 Remove the electronics unit without twisting it.

Installing the electronics unit

Removal of the electronics unit is completed.

 Place the electronics unit on the sensor (3) (be careful to correctly align the

pins and notch (4)).

tina03e1 (0206) BPG400 v1.om 15

 Slide the electronics unit in to the mechanical stop and lock it with the

hexagon socket set screw (1).

The electronics unit is now installed.

3.1.2 Installing the Optional Extension

Bakeout area

With the optional extension (® 2 47) the sensor can also be baked during operation at temperatures up to 150 °C (only at p<10 tures, the accuracy of the Pirani sensor decreases).

Caution

Caution: rising heat

The electronics unit of gauges that are installed vertically, above the source of heat can be damaged through rising heat even with an installed extension.

123

Bakeout area

When installing the extension, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted (® 2 38, 42).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, ensure easy reading of the display.

-2

mbar because at high tempera-

Required tools / material

Procedure

· Extension (® 2 47)

· Allen key, size 2.5 mm

· Allen key, size 1.5 mm

 Remove the electronics unit (2) (® 2 15).

 Slide the sensor (3) into the extension (6) to the mechanical stop (be careful

to correctly position the pins and notch (4)).

16 tina03e1 (0206) BPG400 v1.om

 Secure the sensor with the hex socket set screws (7) using an Allen key,

size 1.5 mm.

3.1.3 Using the Optional Baffle

3.1.3.1 Installing the Baffle

 Slide the electronics unit (2) in to the mechanical stop (be careful to cor-

rectly align the pins and notch (4a)).

 Secure the electronics unit (2) with the hex socket set screw (1) using an

Allen key, size 2.5 mm.

The extension is now installed.

In severely contaminating processes and to protect measurement electrodes optically against light and fast particles, replacement of the built-in grid by the optional baffle (® 2 47) is recommended.

The optional baffle will be installed at the sensor opening of the deinstalled gauge (Deinstallation ® 2 40).

Required tools / material

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

· Baffle (® 2 47)

· Pointed tweezers

· Pin (e.g. pencil)

tina03e1 (0206) BPG400 v1.om 17

Procedure

 Carefully remove the grid with tweezers.

 Carefully place the baffle onto the sensor opening.

 Using a pin, press the baffle down in the center until it catches.

The baffle is now installed (Installation of the gauge ® 2 13).

18 tina03e1 (0206) BPG400 v1.om

3.1.3.2 Replacing the Baffle

In case of severe contamination the baffle can be easily replaced. For this purpose, the gauge first has to be deinstalled (Deinstallation of the gauge ® 2 40).

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

Required tools / material

Procedure

· New baffle (® 2 47)

· Screwdriver No 1

· Pin (e.g. pencil)

 Carefully remove the baffle with the screwdriver.

 Place new baffle carefully onto the sensor opening.

tina03e1 (0206) BPG400 v1.om 19

 Using a pin, press the baffle down in the center until it catches.

The new baffle is now installed (Installation of the gauge ® 2 13).

3.2 Electrical Connection

3.2.1 Use With INFICON VGC103 or VGC40x Vacuum Gauge Controller

Required material

If the gauge is used with an INFICON VGC103 or VGC40x controller, a corresponding sensor cable is required (® 2 47). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution

Caution: data transmission errors

If the gauge is operated with the INFICON VGC103 or VGC40x Vacuum Gauge Controller (RS232C) and a fieldbus interface at the same time, data transmission errors may occur.

The gauge must not be operated with an INFICON VGC103 or VGC40x controller and DeviceNet or Profibus at the same time.

· Sensor cable for INFICON controllers (® 2 47)

20 tina03e1 (0206) BPG400 v1.om

Procedure

 Plug the sensor connector into the gauge and secure it with the locking

screws.

 Connect the other end of the sensor cable to the INFICON controller and

secure it.

3.2.2 Use With Other Controllers

3.2.2.1 Making an Individual

Sensor Cable

Cable type

Procedure

The gauge can now be operated with the VGC103 or VGC40x controller.

The gauge can also be operated with other controllers.

Especially the fieldbus versions BPG400-SD (DeviceNet) and BPG400-SP (Profibus) are usually operated as part of a network, controlled by a master or bus controller. In such cases, the control system has to be operated with the appropriate software and communication protocol (® & [1] or [10]).

The sensor cable is required for supplying all BPG400 types with power. In connection with the gauges with fieldbus interface (BPG400-SD and BPG400-SP), it also permits access to the contacts of the switching functions (® 2 23, 38).

The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (® 2 9).

 Open the cable connector (D-Sub, 15 pins, female).

 Prepare the cable and solder/crimp it to the connector as indicated in the

diagram of the gauge used:

tina03e1 (0206) BPG400 v1.om 21

Sensor cable connection BPG400

BPG400

TxD

RxD

Measuring

signal

Degas

42k

1.25AT

Identification

Electrical connection Pin 2 Signal output (measuring signal)

Pin 5 Supply common, GND Pin 7 Degas on, active high Pin 8 Supply Pin 10 Gauge identification Pin 12 Signal common, GND Pin 13 RS232C, TxD Pin 14 RS232C, RxD Pin 15 Shielding, housing, GND

Pins 1, 3, 4, 6, 9 and 11 are not connected internally.

RS232C

24 V

0 … +10 V

+24 VDC +24 VDC

D-Sub, 15 pins

female,

soldering side

22 tina03e1 (0206) BPG400 v1.om

Sensor cable connection BPG400-SD, BPG400-SP

BPG400-SD, BPG400-SP

Threshold value, SP A

Threshold value, SP B

SP A

SP B

TxD

RxD

Degas

Measuring

signal

42 kW

RS232

Degas

1.25 AT

24V

Identification

Electrical connection Pin 1 Relay Switching function A, common

Pin 2 Signal output (measuring signal) 0 … +10 V Pin 3 Threshold value (Setpoint) A 0 … +10 V Pin 4 Relay Switching function A, normally open contact Pin 5 Supply common, GND Pin 6 Threshold value (Setpoint) B 0 … +10 V Pin 7 Degas on, active high +24 V Pin 8 Supply voltage +24 V Pin 9 Relay Switching function B, common Pin 10 Gauge identification Pin 11 Relay Switching function B, normally open contact Pin 12 Signal common GND Pin 13 RS232, TxD Pin 14 RS232, RxD

Pin 15 Shielding, housing GND

WARNING

The supply common (Pin 5) and the shielding (Pin 15) must be connected at the supply unit with protective ground.

Incorrect connection, incorrect polarity or inadmissible supply voltages can damage the gauge.

For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the output signal can be measured directly between the positive signal output (Pin 2) and supply common GND (Pin 5) without loss of accuracy. At greater cable lengths, differential measurement between signal output (Pin 2) and signal common (Pin 12) is recommended.

 Reassemble the cable connector.

D-Sub, 15 pins

female,

soldering side

 On the other cable end, terminate the cable according to the requirements

of the gauge controller you are using.

tina03e1 (0206) BPG400 v1.om 23

Plug the sensor connector into



the gauge and secure it with the locking screws.

 Connect the other end of the sensor cable to the connector of the instru-

ment or gauge controller you are using.

The gauge can now be operated via analog and RS232C interface.

3.2.2.2 Making a DeviceNet Interface Cable

(BPG400-SD)

Cable type

Procedure

For operating BPG400-SD via DeviceNet, an interface cable conforming to the DeviceNet standard is required. If no such cable is available, make one according to the following indications.

A shielded special 5 conductor cable conforming to the DeviceNet standard has to be used (

® & [4], [6]).

 Make the DeviceNet cable according to the following indications.

Micro-Style, 5 pins, (DeviceNet)

female, soldering side

Pin Function (BPG400-SD)

1 Drain

2 Supply +24 VDC (DeviceNet) interface only

3 Supply common GND (DeviceNet interface only)

4 CAN_H

5 CAN_L

24 tina03e1 (0206) BPG400 v1.om

 Plug the DeviceNet (and sensor) cable connector into the gauge.

3.2.2.3 Making a Profibus Interface Cable

(BPG400-SP)

Cable type

Sensor cable

DeviceNet cable

 Lock the DeviceNet (and sensor) cable connector.

The gauge can now be operated via DeviceNet interface (® 2 35).

For operating BPG400-SP via Profibus, an interface cable conforming to the Profibus standard is required.

If no such cable is available, make one according to the following indications.

Only a cable that is suited to Profibus operation may be used (

® & [5], [7]).

Procedure

 Make the Profibus interface cable according to the following indications:

1 5

D-Sub, 9 pins male, soldering side

6 9

Pin Function (BPG400-SP)

1 Do not connect

2 Do not connect

3 RxD/TxD-P

4 CNTR-P

5 DGND

6VP

7 Do not connect

8 RxD/TxD-N

9 Do not connect

Only to be connected if an optical link module is used.

Only required as line termination for devices at both ends of bus cable

® & [5]).

(

tina03e1 (0206) BPG400 v1.om 25

 Plug the Profibus (and sensor) cable connector into the gauge.

Sensor cable

Profibus cable

 Lock the Profibus (and sensor) cable connector.

The gauge can now be operated via Profibus interface (® 2 37).

3.2.3 Using the Optional Power Supply (With RS232C Line)

Technical data

Wiring diagram

The optional 24 V power supply (

® 2 47) allows RS232C operation of the BPG400

gauge with any suitable instrument or control device (e.g. PC).

The instrument or control device needs to be equipped with a software that supports the RS232C protocol of the gauge (

® 2 32).

Mains connection

Mains voltage 90 … 250 VAC 50 … 60 Hz

Mains cable 1.8 meter (Schuko DIN and U.S. con-

nectors)

Output (operating voltage of gauge)

Voltage 21 … 27 VDC, set to 24 VDC

Current Max. 1.5 A

Gauge connection

Connector D-Sub, 15 pins, female

24 V cable 5 m, black

Connection of the instrument or control device

RS232C connection D-Sub, 9 pins, female

Cable 5 m, black, 3 conductors, shielded

RS232C

D-Sub, 9 pins

Mains

90 ... 250 VAC

50 ... 60 Hz

BPG400

D-Sub, 15 pins

+24 V

GND

26 tina03e1 (0206) BPG400 v1.om

Connecting the power supply

 Connect the gauge to the power supply and lock the connector with the

screws.

 Connect the RS232C line to the instrument or control device and lock the

connector with the screws.

RS232C

Power supply

BPG400

 Connect the power supply to the mains.

 Turn the power supply on.

The gauge can now be operated via RS232C interface (® 2 32).

Mains

tina03e1 (0206) BPG400 v1.om 27

4 Operation

4.1 Measuring Principle,

Measuring Behavior

Bayard-Alpert

The BPG400 vacuum gauges consist of two separate measuring systems (hot cathode Bayard-Alpert (BA) and Pirani).

The BA measuring system uses an electrode system according to Bayard-Alpert which is designed for a low x-ray limit.

The measuring principle of this measuring system is based on gas ionization. Electrons emitted by the hot cathode (F) ionize a number of molecules proportional to the pressure in the measuring chamber. The ion collector (IC) collects the thus generated ion current I

and feeds it to the electrometer amplifier of the

measurement instrument. The ion current is dependent upon the emission current

, the gas type, and the gas pressure p according to the following relationship:

= Ie × p × C

Factor C represents the sensitivity of the gauge head. It is generally specified for

The lower measurement limit is 5×10

To usefully cover the whole range of 5×10

-10

mbar (gauge metal sealed).

-10

mbar … 10-2 mbar, a low emission current is used in the high pressure range (fine vacuum) and a high emission current is used in the low pressure range (high vacuum). The switching of the emission current takes place at decreasing pressure at approx. 7.2×10 creasing pressure at approx. 3.2×10

-5

mbar. At the switching threshold, the

-6

mbar, at in-

BPG400 can temporarily (<2 s) deviate from the specified accuracy.

Pirani

ECF

Diagram of the BA measuring system

F hot cathode (filament) IC ion collector EC anode (electron collector)

+– +–

(Degas 2.5V) (Degas 250V)

200V40V

Within certain limits, the thermal conductibility of gases is pressure dependent. This physical phenomenon is used for pressure measurement in the thermal conductance vacuum meter according to Pirani. A self-adjusting bridge is used as measuring circuit (

® schematic). A thin tungsten wire forms the sensor element.

Wire resistance and thus temperature are kept constant through a suitable control circuit. The electric power supplied to the wire is a measure for the thermal conductance and thus the gas pressure. The basic principle of the self-adjusting bridge circuit is shown in the following schematic.

28 tina03e1 (0206) BPG400 v1.om

Schematic

Pirani sensor

The bridge voltage UB is a measure for the gas pressure and is further processed electronically (linearization, conversion).

Measuring range

Gas type dependence

4.2 Operational Principle of the Gauge

The BPG400 gauges continuously cover the measuring range

-10

mbar … 1000 mbar.

5×10

· The Pirani constantly monitors the pressure.

· The hot cathode (controlled by the Pirani) is activated only at pressures

<2.4×10

-2

mbar.

If the measured pressure is higher than the switching threshold, the hot cathode is switched off and the Pirani measurement value is output.

If the Pirani measurement drops below the switching threshold (p = 2.4×10 the hot cathode is switched on. After heating up, the measured value of the hot cathode is fed to the output. In the overlapping range of 5.5×10

-3

… 2.0×10-2 mbar,

-2

mbar),

the output signal is generated from both measurements.

-2

Pressure rising over the switching threshold (p = 3.2×10

mbar) causes the hot

cathode to be switched off. The Pirani measurement value is output.

The output signal is gas type dependent. The characteristic curves are accurate for dry air, N

® Appendix B).

(

and O2. They can be mathematically converted for other gases

The measuring currents of the Bayard-Alpert and Pirani sensor are converted into a frequency. A micro-controller converts this frequency into a digital value representing the measured total pressure. After further processing this value is available as analog measurement signal (0 … +10 V) at the output (sensor cable connector Pin 2 and Pin 12). The maximum output signal is internally limited to +10 V

Zatmosphere). The measured value can be read as digital value through the

( RS232C interface (Pins 13, 14, 15) (

® 2 32). Gauges with a display show the

value as pressure. The default setting of the displayed pressure unit is mbar. It can be modified via the RS232C interface (

® 2 32).

In addition to converting the output signal, the micro controller's functions include monitoring of the emission, calculation of the total pressure based on the measurements of the two sensors, and communication via RS232C interface.

4.3 Putting the Gauge Into Operation

When the operating voltage is supplied ( available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector (Relationship Output Signal – Pressure

® Technical Data), the output signal is

® Appendix A).

Allow for a stabilizing time of approx. 10 min. Once the gauge has been switched on, permanently leave it on irrespective of the pressure.

Communication via the digital interfaces is described in separate sections.

tina03e1 (0206) BPG400 v1.om 29

4.4 Degas

Contamination

4.5 Display (BPG400)

Gauge failures due to contamination are not covered by the warranty.

Deposits on the electrode system of the BA gauge can lead to unstable measurement readings.

The degas process allows in-situ cleaning of the electrode system by heating the electron collector grid to approx. 700 °C by electron bombardment.

Depending on the application, this function can be activated manually by a switch or automatically by the system control via a digital interface. The BPG400 automatically terminates the degas process after 3 minutes, if it has not been stopped before.

The degas process should be run at pressures below 7.2×10-6 mbar (emission current 5 mA).

For a repeated degas process, the control signal first has to change from ON (+24 V) to OFF (0 V), to then start degas again with a new ON (+24 V) command. It is recommended that the degas signal be set to OFF again by the system control after 3 minutes of degassing, to achieve an unambiguous operating status.

The gauges with part number

352-501 and 353-503

have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line shows the pressure, the second line the pressure unit, the function and possible errors. The background illumination is usually green, in the event of an error, it changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pressure unit can be changed via RS232C interface (

® 2 32).

Pressure display

Function display

Pressure reading, pressure unit

(none) Pirani operation

Emission 25 mA Emission 5 mA Degas 1000 mbar adjustment (Pirani)

30 tina03e1 (0206) BPG400 v1.om

Error display

no error (green background illumination)

Pirani sensor warning (red background illumination)

Pirani sensor error (red background illumination)

BA sensor error (red background illumination)

Internal data connection failure (red background illumination)

tina03e1 (0206) BPG400 v1.om 31

4.6 RS232C Interface

The built-in RS232C interface allows transmission of digital measurement data and instrument conditions as well as the setting of instrument parameters.

Caution

Caution: data transmission errors

If the gauge is operated with the INFICON VGC103 or VGC40x Vacuum Gauge Controller (RS232C) and a fieldbus interface at the same time, data transmission errors may occur.

The gauge must not be operated with the RS232C interface and DeviceNet or Profibus at the same time.

4.6.1 Description of the Functions

Operational parameters

Electrical connections

4.6.1.1 Output String (Transmit

Format of the output string

The interface works in duplex mode. A nine byte string is sent continuously without a request approx. every 20 ms.

Commands are transmitted to the gauge in a five byte input (receive) string.

· Data rate

· Byte

· TxD

· RxD

· GND

(Sensor cable connector)

)

The complete output string (frame) is nine bytes (byte 0 … 8). The data string is seven bytes (byte 1 … 7).

Byte No Function Value Comment

0 Length of data string 7 (Set value)

1 Page number 5 (For BPG400)

2 Status

3 Error

4 Measurement high byte 0 … 255

5 Measurement low byte 0 … 255

6 Software version 0 … 255

7 Sensor type 10 (For BPG400)

8 Check sum 0 … 255

9600 baud set value, no handshake

8 data bits 1 stop bit

Pin 13

Pin 5

® Status byte

® Error byte

® Calculation of pressure value

® Software version

® Synchronization

Synchronization

32 tina03e1 (0206) BPG400 v1.om

Synchronization of the master is achieved by testing three bytes:

Byte No Function Value Comment

0 Length of data string 7 Set value

1 Page number 5 (For BPG400)

8 Check sum of bytes No 1 … 7 0 … 255 Low byte of check

High order bytes are ignored in the check sum.

sum

Status byte

Bit 1 Bit 0 Definition

0 0 Emission off

Emission 25

1 0 Emission 5 mA

1 1 Degas

Bit 2 Definition

0 1000 mbar adjustment off

1 1000 mbar adjustment on

Bit 3 Definition

0 Û 1

Toggle bit, changes with every string received correctly

Bit 5 Bit 4 Definition

0 0 Current pressure unit mbar

0 1 Current pressure unit Torr

1 0 Current pressure unit Pa

Bit 7 Bit 6 Definition

x x Not used

Error byte

Software version

Calculation of the pressure value

Bit 3 Bit 2 Bit 1 Bit 0 Definition

x x x x Not used

Bit 7 Bit 6 Bit 5 Bit 4 Definition

0 1 0 1 Pirani adjusted poorly

1 0 0 0 BA error

1 0 0 1 Pirani error

The software version of the gauge can be calculated from the value of byte 6 of the transmitted string according to the following rule:

Version No = Value

(Example: According to the above formula, Value

Byte 6

/ 20

of 32 means software ver-

Byte 6

sion 1.6)

The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on the currently selected pressure unit (

® byte 2, bits 4 and 5), the ap-

propriate rule must be applied.

As result, the pressure value results in the usual decimal format.

mbar

Torr

((high byte × 256 + low byte) / 4000 - 12.5)

= 10

((high byte × 256 + low byte) / 4000 - 12.625)

= 10

((high byte × 256 + low byte) / 4000 - 10.5)

= 10

tina03e1 (0206) BPG400 v1.om 33

Example

The example is based on the following output string:

Byte No 0 1 2 3 4 5 6 7 8

Value 7 5 0 0 242 48 20 10 69

The instrument or controller (receiver) interprets this string as follows:

Byte No Function Value Comment

0 Length of data

7 (Set value)

string

1 Page number 5 BPG400

2 Status 0

Emission = off Pressure unit = mbar

3 Error 0

No error

Measurement 4 5

High byte Low byte

6 Software version 20

Calculation of the pressure:

242

((242 × 256 + 48) / 4000 - 12.5)

p = 10

Software version = 20 / 20 = 1.0

= 1000 mbar

7 Sensor type 10 BPG400

8 Check sum 69

5 + 0 + 0 + 242 + 48 + 20 + 10 =

Z 01 45

325

dec

hex

High order byte is ignored Þ Check sum = 45

hex

Z 69

dec

4.6.1.2 Input String (Receive)

Format of the input string

Admissible input strings

For transmission of the commands to the gauge, a string (frame) of five bytes is sent (without <CR>). Byte 1 to byte 3 form the data string.

Byte no Function Value Comment

0 Length of data string 3 (Set value)

1 Data

2 Data

3 Data

4 Check sum

(from bytes No 1 … 3) 0 … 255

High order bytes are ignored in the check sum.

® admissible input strings

(low byte of sum)

For commands to the gauge, six defined strings are used:

Byte No

Command 01234

Set the unit mbar in the display 3 16 62 0 78

Set the unit Torr in the display 3 16 62 1 79

Set the unit Pa in the display 3 16 62 2 80

Power-failure-safe storage of current unit 3 32 62 62 156

Switch degas on

3 16 93 148 1

(switches itself off after 3 minutes)

Switch degas off before 3 minutes 3 16 93 105 214

Only low order byte of sum (high order byte is ignored).

34 tina03e1 (0206) BPG400 v1.om

4.7 DeviceNet Interface

(BPG400-SD)

This interface allows operation of BPG400-SD with part number

353-507 and 353-508

in connection with other devices that are suited for DeviceNet operation. The physical interface and communication firmware of BPG400-SD comply with the DeviceNet standard (

Two adjustable switching functions are integrated in BPG400-SD. The corresponding relay contacts are available at the sensor cable connector (

38).

The basic sensor and sensor electronics of all BPG400 gauges are identical.

® & [4], [6]).

® 2 8, 23,

Caution

Caution: data transmission errors

If the gauge is operated via RS232C interface and DeviceNet interface at the same time, data transmission errors may occur.

The gauge must not be operated via RS232C interface and DeviceNet interface at the same time.

4.7.1 Description of the Functions

4.7.2 Operating Parameters

4.7.2.1 Operating Software

4.7.2.2 Node Address Setting

Via this interface, the following and further data are exchanged in the standardized DeviceNet protocol (

· Pressure reading

· Pressure unit (Torr, mbar, Pa)

· Degas function

· Gauge adjustment

· Status and error messages

· Status of the switching functions

As the DeviceNet protocol is highly complex, the parameters and programming of BPG400-SD are described in detail in the separate Communication Protocol

® & [1]).

(

Before the gauge is put into operation, it has to be configured for DeviceNet operation. A configuration tool and the device specific EDS file (Electronic Data Sheet) are required for this purpose. The EDS file can be downloaded via internet

® & [3]).

(

For unambiguous identification of the gauge in a DeviceNet environment, a node address is required. The node address setting is made on the gauge or programmed via DeviceNet.

® & [1]):

Set the node address (0 … 63 and "LSD" switches. The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a setting higher than 63 is made, the previous node address setting remains valid.

If the „MSD“ switch is in the "P" position, the node address is programmable via DeviceNet (

tina03e1 (0206) BPG400 v1.om 35

) via the "ADDRESS" "MSD"

dec

® & [1]).

4.7.2.3 Data Rate Setting

The admissible data rate depends on a number of factors such as system parameters and cable length grammed via DeviceNet.

By means of the "RATE" switch, the data rate can be set to 125 ("1"), 250 ("2") or 500 kbaud ("5").

If the switch is in any of the "P" positions, the data rate is programmable via DeviceNet (

® & [4], [6]). It can be set on the gauge or pro-

® & [1]).

4.7.3 Status Lights

"STATUS MOD" (gauge status):

"STATUS NET" (network status):

Two lights (LEDs) on the gauge inform on the gauge status and the current DeviceNet status.

Light status Description

Dark No supply

Flashing

red/green

Green Normal operation

Red Non recoverable error

Light status Description

Dark Gauge not online:

Flashing

green

Green Gauge online; necessary connections established

Flashing red One or several input/output connections in "timed out" status

Red Communication error. The gauge has detected an error that im-

Selftest

- Selftest not yet concluded

- No supply, ® "STATUS MOD" light

Gauge online but no communication:

- Selftest concluded but no communication to other nodes

established

- Gauge not assigned to any master

pedes communication via the network (e.g. two identical node addresses (MAC IC) or "Bus-off")

Electrical connections

36 tina03e1 (0206) BPG400 v1.om

The gauge is connected to the DeviceNet system via the 5-pin DeviceNet connector (

® 2 24).

4.8 Profibus Interface

(BPG400-SP)

This interface allows operation of BPG400-SP with part number

353-505 and 353-506

in connection with other devices that are suited for Profibus operation. The physical interface and communication firmware of BPG400-SP comply with the Profibus standard (

® & [7], [5].

Two adjustable switching functions are integrated in the BPG400-SP. The corresponding relay contacts are available at the sensor cable connector (

® 2 8, 23,

38).

The basic sensor and sensor electronics of all BPG400 gauges are identical.

Caution

Caution: data transmission errors

If the gauge is operated via RS232C interface and Profibus interface at the same time, data transmission errors may occur.

The gauge must not be operated via RS232C interface and Profibus interface at the same time.

4.8.1 Description of the Functions

4.8.2 Operating Parameters

4.8.2.1 Operating Software

4.8.2.2 Node Address Setting

Via this interface, the following and further data are exchanged in the standardized Profibus protocol (

® & [2]):

· Pressure reading

· Pressure unit (Torr, mbar, Pa)

· Degas function

· Gauge adjustment

· Status and error messages

· Status of the switching functions

As the DeviceNet protocol is highly complex, the parameters and programming of BPG400-SP are described in detail in the separate Communication Protocol

® & [2]).

(

For operating the gauge via Profibus, prior installation of the BPG400 specific GSD file is required on the bus master side. This file can be downloaded via internet

® & [3]).

(

For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.

The node address (0 … 127 (00 … 3F

) via the "ADDRESS", "MSD", and "LSD" switches.

hex

) is set in hexadecimal form

dec

The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value higher than

(3F

127

dec

) is entered, the node address setting currently

hex

stored in the device remains valid.

Electrical connections

tina03e1 (0206) BPG400 v1.om 37

The gauge is connected to Profibus via the 9-pin Profibus connector (

® 2 25).

4.9 Switching Functions

(BPG400-SD, BPG400-SP)

The gauges BPG400-SD and BPG400-SP have two independent, manually settable switching functions. Each switching function has a floating normally open relay contact. The relay contacts are accessible at the sensor cable connector

® 2 23).

(

The threshold values of switching functions A and B can be set within the pressure range 1×10

-9

mbar … 100 mbar via potentiometers "SETPOINT A" and

"SETPOINT B".

The Formula applied to calculate the corresponding threshold voltage U

depends on the gauge version used (BPG400-SD or

Threshold

BPG400-SP).

For BPG400-SD: U

For BPG400-SP: U

Threshold

= 0.75 × (log p

Threshold

= 0.8129401 × (log p

– c) + 7.75

Setpoint

– c + 9.30102999)

Setpoint

Constant c is pressure unit dependent (® Appendix A).

Measuring Signal

(Pressure p)

Threshold

(Setpoint A, B)

Switching function

Off

Hysteresis 10% U

Threshold

Off

Time t

The hysteresis of the switching functions is 10% of the threshold setting.

4.9.1 Setting the Switching Functions

The threshold values of the two switching functions "SETPOINT A" and "SETPOINT B" are set locally on the potentiometers of the gauge that are accessible via the openings on one side of the gauge housing.

Required tools

· Voltmeter

· Ohmmeter or continuity checker

· Screwdriver, max. ø2.5 mm

38 tina03e1 (0206) BPG400 v1.om

Procedure

The procedure for setting the switching functions is the same for both gauge types.

 Put the gauge into operation.

 Connect the Ý-lead of a voltmeter to the threshold measurement point of

the selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and

Þ-lead to Pin 5.

its

max. ø2.5

Setpoint A Pin 3 Setpoint

Pin 6

Pin 5

 Using a screwdriver (max. ø2.5 mm), set the voltage of the selected

switching function (Setpoint A, B) to the desired value U

Setting of the switching functions is now concluded.

Threshold

There is no local visual indication of the statuses of the switching functions. However, a functional check of the switching functions (On/Off) can be made with one of the following methods:

· Reading the status via fieldbus interface ® & [1] for BPG400-SD, ® & [2] for BPG400-SP.

· Measurement of the relay contacts at the sensor cable connector

with a ohmmeter/continuity checker (

® 2 23).

tina03e1 (0206) BPG400 v1.om 39

5 Deinstallation

Procedure

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

 Vent the vacuum system.

Before taking the gauge out of operation, make sure that this has no adverse effect on the vacuum system.

Depending on the programming of the superset controller, faults may occur or error messages may be triggered.

Follow the appropriate shut-down and starting procedures.

 Take gauge out of operation.

 Disconnect all cables from the gauge.

 Remove gauge from the vacuum system.

40 tina03e1 (0206) BPG400 v1.om

 Place the protective lid.

The gauge is now deinstalled.

tina03e1 (0206) BPG400 v1.om 41

6 Maintenance, Repair

6.1 Maintenance

6.1.1 Cleaning the Gauge

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Small deposits on the electrode system can be removed by baking the anode (Degas easily ( case of severe contamination (

A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not use any aggressive or scouring cleaning agents.

® 2 30). In the case of severe contamination, the baffle can be exchanged

® 2 19). The sensor itself cannot be cleaned and needs to be replaced in

® 2 46).

Make sure that no liquid can penetrate the product. Allow the product to dry thoroughly before putting it into operation again.

Gauge failures due to contamination are not covered by the warranty.

6.2 Adjusting the Gauge

6.2.1 Adjustment at Atmospheric Pressure

The gauge is factory-calibrated. Through the use in different climatic conditions, fitting positions, aging or contamination (

® 2 46) a shifting of the characteristic curve can occur and readjustment can be-

( come necessary. Only the Pirani part can be adjusted.

At the push of a button the digital value and thus the analog output are adjusted electronically to 10 V at atmospheric pressure.

Adjustment is necessary if

· at atmospheric pressure, the output signal is <10 V

· the display reads < atmospheric pressure (if the gauge has a display)

· at atmosphere, the digital value of the RS232C interface is < atmospheric pres-

sure

· at atmosphere, the digital value received by the bus controller of the fieldbus

gauges (DeviceNet or Profibus) is < atmospheric pressure

· when the vacuum system is vented, the output voltage reaches 10 V (limited to

10 V by the software) before the measured pressure has reached atmosphere (gauges with display will show the error "5" at atmospheric pressure (Pirani sensor warning

· when the vacuum system is vented, the digital value of the RS232C interface

reaches its maximum before the measured pressure has reached atmosphere

· when the vacuum system is vented, the digital value received by the bus con-

troller of the fieldbus (DeviceNet or Profibus) reaches its maximum before the measured pressure has reached atmosphere.

® 2 31))

® 2 30) and after exchanging the sensor

42 tina03e1 (0206) BPG400 v1.om

Required tools

· Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)

Procedure

Gauges BPG400-SD and -SP are mechanically slightly different from the BPG400. The adjustment opening of BPG400-SD and -SP is on one side of the gauge housing. However, the adjustment procedure is the same for all gauge versions.

 Operate gauge for approx. 10 minutes at atmospheric pressure.

If the gauge was operated before in the BA range, a coolingdown time of approx. 30 minutes is to be expected (gauge temperature = ambient temperature).

Insert the pin through the opening marked <FULL SCALE> and push the



button inside for at least 5 s.

BPG400 BPG400-SD

BPG400-SP

6.2.2 Zero Point Adjustment

max. ø1.3

Gauges with display will show the reading "1000 mbar" and the function "A" when the button has been pushed for 4 s. Upon completion of the adjustment, the function indication "A" disappears.

The gauge is automatically adjusted (»10 s).

The gauge is now adjusted at atmospheric pressure.

A zero point adjustment is recommended

· after the sensor has been exchanged

· as part of the usual maintenance work for quality assurance

Required tools

tina03e1 (0206) BPG400 v1.om 43

· Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)

Procedure

The push button <FULL SCALE> is also used for the zero point adjustment

® Illustration in "Adjustment at Atmospheric Pressure").

(

6.3 What to Do in Case of

Problems

Required tools / material

Troubleshooting (BPG400)

 Operate gauge for approx. 10 minutes at a pressure of 1×10

-4

mbar.

 Insert the pin through the opening marked <FULL SCALE> and push the

button inside for at least 2 s.

The adjustment is done automatically and ends after 2 minutes.

The zero point of the gauge is now adjusted.

In the event of a fault or a complete failure of the output signal, the gauge can easily be checked.

· Voltmeter / ohmmeter

· Allen key, size 2.5 mm

· Spare sensor (if the sensor is faulty)

The output signal is available at the sensor cable connector (Pin 2 and Pin 12).

In case of an error, it may be helpful to just turn off the mains supply and turn it on again after 5 s.

Problem Possible cause Correction

Output signal permanently

Output signal »0.3 V (Display: error = 8)

Output signal »0.5 V (Display: error = 9)

Output signal »0.5 V

Display: Internal data connection

Gauge does not switch over to BA at low pressures

»0V

Sensor cable defective or not correctly connected

No supply voltage Turn on the power supply

Gauge in an undefined status

Hot cathode error (sensor faulty)

Pirani error (sensor defective)

Electronics unit not mounted correctly on sensor

not working

Pirani zero point out of tolerance

Check the sensor cable

Turn the gauge off and on again (reset)

Replace the sensor

® 2 46)

(

Replace the sensor

® 2 46)

(

Check the connection

Turn the gauge off and on again after 5 s

Replace the electronics unit

Carry out a zero point adjustment (

® 2 43)

44 tina03e1 (0206) BPG400 v1.om

Troubleshooting (sensor)

If the cause of a fault is suspected to be in the sensor, the following checks can be made with an ohmmeter (the vacuum system need not be vented for this purpose).

Separate the sensor from the electronics unit (

® 2 15). Using an ohmmeter, make

the following measurements.

Ohmmeter measure-

ment between pins

2 + 4

4 + 5

6 + 7

4 + 1

6 + 1

3 + 1

9 + 1

6 + 3

9 + 3

View on sensor pins

»37 W >>37 W

»0.15 W >>0.15 W

¥ << ¥

Hot cathode approx. 0.15 Ohm

7 8

Not connected

Pirani sensor 1 approx. 37 Ohm

Pirani sensor 2 approx. 37 Ohm

5 3

Anode

GND (connected to sensor housing)

Ion collector

Possible cause

Pirani element 1 broken

Pirani element 2 broken

Filament of hot cathode broken

Electrode - short circuit to ground

Short circuit between electrodes

Correction

Troubleshooting (BPG400-SD, BPG400-SP)

All of the above faults can only be remedied by replacing the sensor (® 2 46).

Error diagnosis of fieldbus gauges BPG400-SD and -SP can only be performed as described above for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can only be done via the superset bus controller (

® & [1], [2]).

For diagnosis of the BPG400-SD (DeviceNet) gauges, the status lights might produce some useful information (

tina03e1 (0206) BPG400 v1.om 45

® 2 36).

6.4 Replacing the Sensor

Replacement is necessary, when

· the sensor is severely contaminated

· the sensor is mechanically deformed

· the sensor is faulty, e.g. filament of hot cathode broken (® 2 44)

· the sensor is faulty, e.g. Pirani element broken (® 2 44)

Required tools / material

Procedure

· Allen key, size 2.5 mm

· Spare sensor (® 2 47)

 Deinstall the gauge (® 2 40).

 Deinstall the electronics unit from the faulty sensor and mount it to the new

sensor (

® 2 15).

 Adjust the gauge (® 2 42).

The new sensor is now installed.

46 tina03e1 (0206) BPG400 v1.om

7 Options

8 Spare Parts

Part number

24 VDC power supply / RS232C line (® 2 26)

Extension 100 mm (® 2 16)

Baffle DN 25 ISO-KF / DN 40 CF-R (® 2 17)

INFICON Vacuum Gauge Controller VGC103, VGC40x

® 2 20)

(

Sensor cable BPG400 – VGC103 / VGC40x (® 2 20)

Sensor cable with D-Sub female connector for gauge on one side, no connector on other side

Connection elements, seals, accessories

See INFICON sales literature and data sources for controllers and our range of sensor cables (

Since there is a vast variety of individual configurations and applications, please

® & [10]).

refer to the specific information for your individual configuration (

353-511

353-510

353-512

® & [10]).

9 Storage

When ordering spare parts, always indicate:

· All information on the product nameplate

· Description and part number

Sensor BPG400, vacuum connection DN 25 ISO-KF (including Allen key)

Sensor BPG400, vacuum connection DN 40 CF-R (including Allen key)

Caution

Caution: vacuum component

Inappropriate storage leads to an increase of the desorption rate and/or may result in mechanical damage of the product.

Cover the vacuum ports of the product with protective lids or grease free aluminum foil. Do not exceed the admissible storage temperature

® 2 11).

range (

Part number

354-490

354-491

tina03e1 (0206) BPG400 v1.om 47

10 Returning the Product

11 Disposal

WARNING

Caution: forwarding contaminated products

Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment.

Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

® 2 53).

Separating the components

Contaminated components

Other components

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING

After disassembling the product, separate its components according to the following criteria:

Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.

Such components must be separated according to their materials and recycled.

Caution: substances detrimental to the environment

Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local regulations.

48 tina03e1 (0206) BPG400 v1.om

Appendix

A: Relationship Output

Signal – Pressure

Conversion formulae

(U - 7.75) / 0.75 + c

p = 10

U = 0.75 × (log p - c) + 7.75

where U p c

[V] [mbar] 0

[V] [Pa] 2

[V] [Torr] -0.125

Conversion curve

Pressure p [mbar]

1E+04

1E+03

1E+02

1E+01

1E+00

1E–01

1E–02

1E–03

1E–04

1E–05

1E–06

1E–07

1E–08

1E–09

1E–10

Sensor error

Inadmissible range

1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

0.0

Inadmissible range

Measuring signal U[V]

tina03e1 (0206) BPG400 v1.om 49

Conversion table

B: Gas Type Dependence

Output signal U

[V] [mbar]

0.3 / 0.5

Pressure p

[Torr] [Pa]

Sensor error (

® 2 44)

0.51 … 0.774 Inadmissible range

0.774 5×10

1.00 1×10

1.75 1×10

2.5 1×10

3.25 1×10

4.00 1×10

4.75 1×10

5.50 1×10

6.25 1×10

7.00 1×10

7.75 1×10

8.50 1×10

9.25 1×10

10.00 1×10

-10

-9

-8

-7

-6

-5

-4

-3

-2

-1

7.5×10

3.75×10

7.5×10

-10

-9

-8

-7

-6

-5

-4

-3

-2

-1

>10.00 Inadmissible range

5×10

1×10

-8

-7

-6

-5

-4

-3

-2

-1

Indication range above 10

-2

mbar

Pressure indicated (gauge adjusted for air, Pirani-only mode)

p (mbar)

8 6

–1

8 6

–2

8 6

–3

H2O vapor

–3

246

Indication range above 10

–2

246

-2

mbar)

–1

246

H2He Ne

246

Air O2

CO Ar

Freon 12 Kr

(mbar)

eff

50 tina03e1 (0206) BPG400 v1.om

Calibration in pressure range

-2

… 1 mbar

The gas type dependence in the pressure range 10-2 … 1 mbar can be compensated by means of the following formula:

= C × indicated pressure

eff

where Gas type Calibration factor C

Air, O2, CO 1.0

0.9

0.5

Water vapor 0.7

Freon 12 1.0

0.5

He 0.8

Ne 1.4

Ar 1.7

Kr 2.4

Xe 3.0

(The above calibration factors are mean values.)

Calibration in pressure range

-3

<10

mbar

The gas type dependence in the pressure range <10

-3

mbar can be compensated

by means of the following formula (gauge adjusted for air):

= C × indicated pressure

eff

where Gas type Calibration factor C

Air, O2, CO, N2 1.0

1.0

He 5.9

Ne 4.1

2.4

Ar 0.8

Kr 0.5

Xe 0.4

(The above calibration factors are mean values.)

A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial-pressure measuring instrument.

tina03e1 (0206) BPG400 v1.om 51

C: Literature

& [1] www.inficon.com

Communication Protocol DeviceNet™ BPG400-SD tira03e1 INFICON AG, LI–9496 Balzers, Liechtenstein

& [2] www.inficon.com

Communication Protocol Profibus BPG400-SP tira36e1 INFICON AG, LI–9496 Balzers, Liechtenstein

& [3] www.inficon.com

Product descriptions and downloads INFICON AG, LI–9496 Balzers, Liechtenstein

& [4] www.odva.org

Open DeviceNet Vendor Association, Inc. DeviceNet™ Specifications

& [5] www.profibus.com

Profibus user organization

& [6] European Standard for DeviceNet EN 50325

& [7] European Standard for Profibus EN 50170

& [8] www.inficon.com

Instruction Sheet BPG400 (all versions) tima03e1 a INFICON AG, LI–9496 Balzers, Liechtenstein

& [9] www.inficon.com

Instruction Sheet BPG400-SD, BPG400-SP tima36e1 INFICON AG, LI–9496 Balzers, Liechtenstein

& [10] www.inficon.com

INFICON AG, LI–9496 Balzers, Liechtenstein

52 tina03e1 (0206) BPG400 v1.om

Declaration of Contamination

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of product

Type Part number Serial number

The product is free of any substances which are damaging to health yes

Reason for return

Operating fluid(s) used

Process related contamination of product

toxic no q 1) yes

caustic no q 1) yes q

biological hazard no q yes q 2)

explosive no q yes q 2)

radioactive no q yes q 2)

other harmful substances no q 1) yes

1) or not containing any amount of hazardous residues that exceed the permissible ex posure limits

(Must be drained before shipping.)

2) Products thus contami nated will not be ac cepted without written evidence of decontami nation!

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which

Trade/product name Manufacturer

Chemical name (preferably with formula)

the product

Precautions associated with substance

may have come into contact with:

Action in case of human contact

Legally binding declaration:

We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

E-mail

Name

Date and legally binding signature Company stamp

This form can be downloaded from our web site.

tina03e1 (0206) BPG400 v1.om 53

Copies: Original for addressee - 1 copy for accompanying documents - 1 copy for file of sen der

Notes

54 tina03e1 (0206) BPG400 v1.om

Notes

tina03e1 (0206) BPG400 v1.om 55

LI–9496 Balzers Liechtenstein Tel +423 / 388 3111 Fax +423 / 388 3700

Original: German tina03d1 (0206) reach.liechtenstein@inficon.com

t i na03e1

www.inficon.com

Inficon BPG400, BPG400-SD, BPG400-SP Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual