Inficon BPG400, BPG400-SD, BPG400-SP Operating Manual

Operating Manual

Bayard-Alpert Pirani Gauge

BPG400 BPG400-SD BPG400-SP

tina03e1 (0206) 1

Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

This document applies to products with the following part numbers:

BPG400 (without display)

353-500 353-502 (vacuum connection DN 40 CF-R)

BPG400 (with display)

353-501 353-503 (vacuum connection DN 40 CF-R)

BPG400-SD (with DeviceNet interface and switching functions)

353-507 353-508 (vacuum connection DN 40 CF-R)

BPG400-SP (with Profibus interface and switching functions)

353-505 353-506 (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

All BPG400 versions are shipped with an instruction sheet (® & [8]). BPG400-SD and BPG400-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (® & [9]).

(vacuum connection DN 25 ISO-KF)

If not indicated otherwise in the legends, the illustrations in this document correspond to the KF vacuum connection. They apply to other vacuum connections by analogy.

In illustrations that apply to all types of the BPG400 gauge family, the gauge with part number 353-500 is shown.

We reserve the right to make technical changes without prior notice.

Intended Use

2 tina03e1 (0206) BPG400 v1.om

The BPG400 gauges have been designed for vacuum measurement of non-flammable gases and gas mixtures in a pressure range of 5×10

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC103 or VGC40x or with other control devices.

-10

… 1000 mbar.

Functional Principle

Over the whole measuring range, the gauge has a continuous characteristic curve and its measuring signal is output as logarithm of the pressure.

The gauge functions with a Bayard-Alpert hot cathode ionization measurement system (for p < 2.0×10 p > 5.5×10

5.5×10

-3

mbar). In the overlapping pressure range of 2.0×10-2 …

-3

mbar, a mixed signal of the two measurement systems is output. The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 pressure exceeds 3.2×10

-2

mbar) and a Pirani measurement system (for

-2

mbar (to prevent filament burn-out). It is switched off when the

-2

mbar.

Trademarks

DeviceNet™ Open DeviceNet Vendor Association, Inc.

tina03e1 (0206) BPG400 v1.om 3

Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3

1 Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8

3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 15

3.1.2 Installing the Optional Extension 16

3.1.3 Using the Optional Baffle 17

3.1.3.1 Installing the Baffle 17

3.1.3.2 Replacing the Baffle 19

3.2 Electrical Connection 20

3.2.1 Use With INFICON VGC103 or VGC40x Vacuum Gauge Controller 20

3.2.2 Use With Other Controllers 21

3.2.2.1 Making an Individual Sensor Cable 21

3.2.2.2 Making a DeviceNet Interface Cable (BPG400-SD) 24

3.2.2.3 Making a Profibus Interface Cable (BPG400-SP) 25

3.2.3 Using the Optional Power Supply (With RS232C Line) 26

4 Operation 28

4.1 Measuring Principle, Measuring Behavior 28

4.2 Operational Principle of the Gauge 29

4.3 Putting the Gauge Into Operation 29

4.4 Degas 30

4.5 Display (BPG400) 30

4.6 RS232C Interface 32

4.6.1 Description of the Functions 32

4.6.1.1 Output String (Transmit) 32

4.6.1.2 Input String (Receive) 34

4.7 DeviceNet Interface (BPG400-SD) 35

4.7.1 Description of the Functions 35

4.7.2 Operating Parameters 35

4.7.2.1 Operating Software 35

4.7.2.2 Node Address Setting 35

4.7.2.3 Data Rate Setting 36

4.7.3 Status Lights 36

4.8 Profibus Interface (BPG400-SP) 37

4.8.1 Description of the Functions 37

4.8.2 Operating Parameters 37

4.8.2.1 Operating Software 37

4.8.2.2 Node Address Setting 37

4.9 Switching Functions (BPG400-SD, BPG400-SP) 38

4.9.1 Setting the Switching Functions 38

5 Deinstallation 40

4 tina03e1 (0206) BPG400 v1.om

6 Maintenance, Repair 42

6.1 Maintenance 42

6.1.1 Cleaning the Gauge 42

6.2 Adjusting the Gauge 42

6.2.1 Adjustment at Atmospheric Pressure 42

6.2.2 Zero Point Adjustment 43

6.3 What to Do in Case of Problems 44

6.4 Replacing the Sensor 46

7 Options 47

8 Spare Parts 47

9 Storage 47

10 Returning the Product 48

11 Disposal 48

Appendix 49

A: Relationship Output Signal – Pressure 49 B: Gas Type Dependence 50 C: Literature 52

Declaration of Contamination 53

For cross-references within this document, the symbol (® 2 XY) is used, for crossreferences to further documents and data sources, the symbol (® & [Z]).

tina03e1 (0206) BPG400 v1.om 5

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

6 tina03e1 (0206) BPG400 v1.om

1.3 General Safety Instructions

· Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (® 2 11) and the process media.

Consider possible reactions of the process media due to the heat generated by the product.

· Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

· Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

· disregard the information in this document

· use the product in a non-conforming manner

· make any kind of interventions (modifications, alterations etc.) on the product

· use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media used.

tina03e1 (0206) BPG400 v1.om 7

2 Technical Data

Measurement

Emission

Degas

Measuring range (air, N

) 5×10

2, O2

-10

… 1000 mbar, continuous

Accuracy 15% of reading in the range of

10-8 … 10-2 mbar (after 5 min stabilization)

Repeatability 5% of reading in the range of

-8

… 10-2 mbar

(after 5 min stabilization)

Gas type dependence ® Appendix B

Switching on threshold Switching off threshold

Emission current

p £7.2×10

7.2×10

-6

mbar

-6

mbar <p <3.2×10-2 mbar

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA 25 µA

Emission current switching

25 µA Þ 5 mA 5 mA Þ 25 µA

Degas emission current (p <7.2×10

-6

mbar)

7.2×10-6 mbar

-5

3.2×10

»16 mA (P

mbar

degas

»4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 ® 2 32)

Duration max. 3 min, followed by automatic stop

Output signal

Display (

BPG400)

Power supply

In degas mode, BPG400 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal (measuring signal) 0 … +10 V

Measuring range

0.774 V Z 5×10

-10

mbar

… +10 V Z 1000 mbar

Relationship voltage-pressure logarithmic, 0.75 V/decade

(

® Appendix A)

Error signal

Minimum loaded impedance

Display panel

<0.3 V/0.5 V (® 2 44)

10 kW

LCD matrix, 32×16 pixels, with background illumination

Dimensions

Pressure units (pressure p)

16.0 mm × 11.2 mm

mbar (default), Torr, Pa (selecting the pressure unit ® 2 32)

DANGER

The gauge must only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to the gauge has to be fused (INFICON-controllers fulfill these requirements).

8 tina03e1 (0206) BPG400 v1.om

Operating voltage at the gauge +24 VDC (20 … 28 VDC)

ripple max. 2 V

Power consumption

Standard Degas Emission start (<200 ms)

£0.5 A £0.8 A £1.4 A

Power consumption

BPG400 BPG400-SD, BPG400-SP

£16 W £18 W

Fuse necessary 1.25 AT

BPG400-SD requires an additional, separate power supply for the DeviceNet interface (® 2 24).

Supply voltage at the DeviceNet connector, (Pin 2 and Pin 3) +24 VDC (+11 … 25 VDC)

Power consumption <2 W

The gauge is protected against reversed polarity of the supply voltage.

Sensor cable

For reasons of compatibility, the expression "sensor cable" is used for all BPG400 versions in this document, although the pressure reading of the gauges with fieldbus interface (BPG400-SD and BPG400-SP) is normally transmitted via DeviceNet or Profibus.

Electrical connector

BPG400 BPG400-SD, BPG400-SP

Cable for BPG400

Analog values only Without degas function

Analog values With degas function

Analog values With degas function And RS232C interface

Cable for BPG400-SD, BPG400-SP

Max. cable length (supply voltage 24 V

Analog and fieldbus operation

RS232C operation

Gauge identification

Switching functions

BPG400

BPG400-SD, BPG400-SP

Adjustment range

Relay contact rating

Voltage Current

D-Sub,15 pins, male

® 2 22 ® 2 23

4 conductors plus shielding

5 conductors plus shielding

7 conductors plus shielding

depending on the functions used, max. 15 conductors plus shielding

)

£35 m, conductor cross-section 0.25 mm² £50 m, conductor cross-section 0.34 mm² £100 m, conductor cross-section 1.0 mm²

£30 m

42 kW resistor between Pin 10 (sensor cable) and GND

none

2 (Setpoints A and B)

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers (Setpoints A and B), one floating, normally open relay contact per setpoint (® 2 23, 38)

£60 V £0.5 ADC

Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).

tina03e1 (0206) BPG400 v1.om 9

RS232C interface

Data rate

Data format

9600 baud

binary 8 data bits one stop bit no parity bit no handshake

Connections (sensor cable connector) TxD (Transmit Data) RxD (Receive Data) GND

Pin 13 Pin 14 Pin 5

(Function and communication protocol of the RS232C interface ® 2 32)

DeviceNet interface (BPG400-SD)

Profibus interface (BPG400-SP)

Fieldbus name DeviceNet

Standard applied

Communication protocol, data format

® & [6]

® & [1], [4]

Interface, physical CAN bus

Data rate (adjustable via "RATE" switch)

125 kbaud 250 kbaud 500 kbaud "P" (125 kbaud, 250 kbaud, 500 kbaud programmable via DeviceNet (® & [1])

Node address (MAC ID) (Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

dec

"P" (0 … 63 programmable via DeviceNet, ® & [1])

DeviceNet connector Micro-Style, 5 pins, male

Cable Shielded, special DeviceNet cable,

5 conductors (® 2 24 and & [4])

Cable length, system wiring According to DeviceNet specifications

(® & [6], [4])

Fieldbus name Profibus

Standard applied

Communication protocol data format

® & [7]

® & [10], [7]

Interface, physical RS485

Data rate

Node address

£12 Mbaud (® & [10])

00 … 3F

(0 … 127

hex

dec

) (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

Profibus connection D-Sub, 9 pins, female

Cable Shielded, special Profibus cable

(® 2 25 and & [5])

Cable length, system wiring According to Profibus specifications

(® & [7], [5])

10 tina03e1 (0206) BPG400 v1.om

Vacuum

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element

Internal volume

353-500, 353-501 353-505, 353-507

353-502, 353-503 353-506, 353-508

stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y molybdenum tungsten, copper

£24 cm

£34 cm

Pressure max. 2 bar (absolute)

2O3

)

Ambiance

Dimensions

Admissible temperatures

Storage

Operation

Bakeout

-20 … 70 °C

0 … 50 °C

+150 °C (without electronics unit or with bakeout extension ® 2 16)

Relative humidity

(year's mean / during 60 days)

£65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Type of protection IP 30

Part numbers

353-500 353-501 353-505 (353-507)

4-40UNC 2B

DN 25 ISO-KF 353-500 353-501

tina03e1 (0206) BPG400 v1.om 11

Part numbers

353-502 353-503 353-506 (353-508)

4-40UNC 2B

DN 40 ISO-KF 353-502 353-503

Gauges with DeviceNet connector are 14 mm longer. The other dimensions of housing and vacuum connection are identical.

Part numbers

353-507 353-508

Weight

353-500, 353-501 353-502, 353-503 353-505, 353-507 353-506, 353-508

285 g 550 g 430 g 695 g

12 tina03e1 (0206) BPG400 v1.om

3 Installation

3.1 Vacuum Connection

DANGER

Caution: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER

Caution: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

· CF connections fulfill this requirement

· For gauges with a KF vacuum connection, use a conductive me-

tallic clamping ring.

Caution

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

The gauge may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (® 2 11).

· The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast particles, installation (® 2 17) of the optional baffle is recommended (® 2 47).

· For the vacuum connection sealing, use of a metal seal (® 2 47) is recom- mended, since elastomer seals (e.g. FPM) can impair the measurement accuracy already in the 10

· The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C, the electronics unit has to be removed (® 2 15) or an extension (Option ® 2 47) has to be installed (® 2 16).

-6

mbar range by outgassing.

tina03e1 (0206) BPG400 v1.om 13

Procedure

Remove the protective lid.



The protective lid will be needed for maintenance.

Make the flange connection.



When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted (® 2 38, 42).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

The gauge is now installed.

14 tina03e1 (0206) BPG400 v1.om

3.1.1 Removing and Installing the Electronics Unit

Required tools / material

Removing the electronics unit

· Allen key, size 2.5 mm

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

 Remove the electronics unit without twisting it.

Installing the electronics unit

Removal of the electronics unit is completed.

 Place the electronics unit on the sensor (3) (be careful to correctly align the

pins and notch (4)).

tina03e1 (0206) BPG400 v1.om 15

 Slide the electronics unit in to the mechanical stop and lock it with the

hexagon socket set screw (1).

The electronics unit is now installed.

3.1.2 Installing the Optional Extension

Bakeout area

With the optional extension (® 2 47) the sensor can also be baked during operation at temperatures up to 150 °C (only at p<10 tures, the accuracy of the Pirani sensor decreases).

Caution

Caution: rising heat

The electronics unit of gauges that are installed vertically, above the source of heat can be damaged through rising heat even with an installed extension.

123

Bakeout area

When installing the extension, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge is mounted (® 2 38, 42).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, ensure easy reading of the display.

-2

mbar because at high tempera-

Required tools / material

Procedure

· Extension (® 2 47)

· Allen key, size 2.5 mm

· Allen key, size 1.5 mm

 Remove the electronics unit (2) (® 2 15).

 Slide the sensor (3) into the extension (6) to the mechanical stop (be careful

to correctly position the pins and notch (4)).

16 tina03e1 (0206) BPG400 v1.om

 Secure the sensor with the hex socket set screws (7) using an Allen key,

size 1.5 mm.

3.1.3 Using the Optional Baffle

3.1.3.1 Installing the Baffle

 Slide the electronics unit (2) in to the mechanical stop (be careful to cor-

rectly align the pins and notch (4a)).

 Secure the electronics unit (2) with the hex socket set screw (1) using an

Allen key, size 2.5 mm.

The extension is now installed.

In severely contaminating processes and to protect measurement electrodes optically against light and fast particles, replacement of the built-in grid by the optional baffle (® 2 47) is recommended.

The optional baffle will be installed at the sensor opening of the deinstalled gauge (Deinstallation ® 2 40).

Required tools / material

Caution

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

· Baffle (® 2 47)

· Pointed tweezers

· Pin (e.g. pencil)

tina03e1 (0206) BPG400 v1.om 17

+ 39 hidden pages

Inficon BPG400, BPG400-SD, BPG400-SP Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual