Brooks Instrument Mfi User Manual

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Brooks® Mf Series

NEMA 4X and IP66 Mass Flow Controllers and Meters

Mfi Series
Controllers: Mf50i, Mf51i and Mf53i
Meters: Mf60i, Mf61i and Mf63i

Mfx Series
Controllers: Mf50x, Mf51x and Mf53x
Meters: Mf60x, Mf61x and Mf63x

Mf61

Mass Flowmeter

Mf50

Mass Flow Controller

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

®

Mf Series

Part Number: 541B074AAG

August, 2009Brooks

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

®

Mf Series

Part Number: 541B074AAG

August, 2009Brooks

Mf Series Summary Installation Overview (shows cable gland option)

Terminal Strip Label:

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Paragraph Page
Number Number

Section 1 Introduction

1-1 Description .................................................................................................................................1-1

1-2 Design Features.........................................................................................................................1-1

1-3 Principle of Operation.................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

1-5 Electrical Specifications..............................................................................................................1-4

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 Gas Connections........................................................................................................................2-3

2-8 In-Line Filter ...............................................................................................................................2-3

2-9 Installation (Refer to Table 4-1, Figure 1-4 and Quick Start Instructions)...................................2-3

2-10 Electrical Interfacing (Electrical Specifications Refer to Section 1-5).........................................2-8

2-1 1 Configuring the PC Board ..........................................................................................................2-9

Brooks® Mf Series

Contents

Section 3 Operation

3-1 Theory of Operation ...................................................................................................................3-1

3-2 Operating Procedure..................................................................................................................3-2

3-3 Zero Adjustment.........................................................................................................................3-3

3-4 Calibration Procedure ................................................................................................................3-4

3-5 Response ...................................................................................................................................3-8

Section 4 Maintenance & Troubleshooting

4-1 General ......................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Sensor Tube...............................................................................................................................4-7

4-4 Disassembly and Assembly .......................................................................................................4-7

4-5 Gas Conversion Factors ...........................................................................................................4-18

4-6 Restrictor Sizing........................................................................................................................4-22

4-7 Orifice Sizing.............................................................................................................................4-25

Section 5 Parts List

5-1 General ......................................................................................................................................5-1

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

i

Contents Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

Brooks® Mf Series

Figure Page
Number Number

1-1 Principle of Operation.................................................................................................................1-2

1-2 Maximum Allowable Output Loop Resistance............................................................................1-5

1-3 T erminal Strip Labeling...............................................................................................................1-6

1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply..........................................................1-6

1-5 Model Mf50 Controller Dimensions ............................................................................................1-7

1-6 Model Mf51 Controller Dimensions ............................................................................................1-7

1-7 Model Mf53 Controller Dimensions ............................................................................................1-8

1-8 Model Mf53 Controller with Flange Dimensions.........................................................................1-8

1-9 Model Mf60 Meter Dimensions ..................................................................................................1-9

1-10 Model Mf61 Meter Dimensions ..................................................................................................1-9

1-11 Model Mf63 Meter Dimensions .................................................................................................1-10

1-12 Model Mf63 Meter with Flange Dimensions ..............................................................................1-10

2-1 Common Electrical Hookups......................................................................................................2-6

2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)......2-7

2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) .............2-7

August, 2009

3-1 Flow Sensor Operational Diagram .............................................................................................3-2

3-2 Flow Control System Block Diagram..........................................................................................3-3

3-3 Mf Series Calibration Connections.............................................................................................3-5

3-4 Adjustment Potentiometer Location ...........................................................................................3-5

3-5 PC Board Jumper Location & Function ......................................................................................3-6

3-6 Fast Response Adjustment ........................................................................................................3-8

4-1 Torque Sequence for the Valve Ret ainer Plate (Controller)........................................................4-5

4-2 Voltmeter Connections for V alve Adjustment .............................................................................4-9

4-3a Valve Adjusting Sp acer Locations (Normally Closed Valve) .....................................................4-12

4-3b Valve Adjusting Sp acer Locations (Normally Open Valve)........................................................4-13

4-4 Model Mf51/61 Restrictor Element Assembly............................................................................4-24

4-5 Model Mf51/61 Restrictor Element Orientation in Controller/Meter Body..................................4-25

5-1 Model Mf50/60Parts Drawing ..................................................................................................... 5-2

5-2 Model Mf51/61 Parts Drawing ....................................................................................................5-3

5-3 Model Mf53/63 Parts Drawing ....................................................................................................5-4

ii

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Tables

Table Page
Number Number

1-1 Flow Ranges ..............................................................................................................................1-2

1-2 Power Requirements..................................................................................................................1-4

1-3 Mf Series Controllers and Meters Terminal Strip Hookup ..........................................................1-5

2-1 Recommended Filter Size ..........................................................................................................2-3

4-1 Bench Troubleshooting ..............................................................................................................4-3

4-2 Sensor Troubleshooting .............................................................................................................4-4

4-3 Mf Series Torque Requirements................................................................................................4-10

4-4 Orifice Capacities ......................................................................................................................4-16

4-5 Conversion Factor( Nitrogen Base)...........................................................................................4-19

4-6 Model Mf50/60 Series Standard Restrictors..............................................................................4-22

4-7 Model Mf51/61 Restrictor Selection Guide................................................................................4-24

Brooks® Mf Series

Contents

5-1 Mf Series Common Replacement Parts.....................................................................................5-5

5-2 Model Mf50/60 Replacement Parts ............................................................................................5-6

5-3 Model Mf51/61 Replacement Parts ............................................................................................5-7

5-4 Model Mf53/63 Replacement Parts ............................................................................................5-8

5-5 Mf Series Tool and Spare Part Kits.............................................................................................5-9

iii

Contents Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

Brooks® Mf Series

August, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

iv

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

1-1 Description

1-2 Design Features

Section 1 Introduction

Brooks® Mf Series

The Brooks® MfTM Series mass flow controllers and meters are specifically
designed to be used in an industrial environment. These controllers and
meters offer high accuracy, control and measurement of industrial gases
with the added integrity of NEMA 4X, IP66 industrial p ackaging. The heart
of the controller and meter is the flow sensor which produces an electrical
output signal linear with mass flow rate. This output can be used for
indicating, recording and/or control purposes. The Brooks Mf Series Mass
Flow Controller has an integral valve and accepts a remote setpoint which
makes it a simple and easy to install flow control system. Many options are
offered to provide a versatile system of mass flow control and
measurement.

• NEMA 4X, IP66 watertight construction

• UL and cUL listed and recognized for
Class1 Division 2 hazardous locations (Mfx )

• Wide FS flow range for measurement and control
for gases from 3 sccm to 1000 slpm N2 (control)
and 1000 slpm N2 ( measurement)

Flow control to 1000 slpm N
Flow metering to 1000 slpm N

• Sensor: Removable (Mfi) / Welded (Mfx)

• Insensitive to mounting attitude

• Selectable response time

• Electrically activated valve override

• Low command flow cutoff

• Corrosion resistant valve

2

2

1-3 Principle of Operation

The operating principle of the Brooks mass flow controller and meter is
thermodynamic. A wire wound heating element directs heat to the midpoint
of the bypass sensor tube. A predetermined portion of the total flow , flows
through the bypass sensor tube. On the same tube, equidistant upstream
and downstream of the heat input, are resistance temperature measuring
elements.

With no flow, the heat reaching each temperature element is equal. With
increasing flow the flow stream carries heat away from the upstream
element, T1, and an increasing amount towards the downstream element,
T2. An increasing temperature dif ference develop s between the two
elements and this difference is proportional to the amount of gas flowing or
the mass flow rate. A bridge circuit interprets the temperature difference

1-1

Section 1 Introduction

s
s

Brooks® Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

and positions the precision solenoid control valve. When the command
signal is below 1% of full scale, the control valve is positioned to fully
closed. The control valve can be latched fully open or closed by activating
the valve override circuit.

To Power Supply

T1

Upstream

Temperature

Sensor

Heater

T2
Downstream
Temperature

Sensor

Bypass

Sensor Tube

1-4 Specifications

Flow

+ Vdc

Bridge

for

T Detection

Δ

Amplifier

0-5 Vdc

and

4-20 mA

Figure 1-1 Principle of Operation.

WARNING

Do not operate this instrument in excess of the specification
listed below. Failure to heed this warning can result in seriou
personal injury and/or damage to the equipment.

PERFORMANCE CHARACTERISTICS:

Table 1-1 Flow Ranges

Mass Flow Mass Flow Flow Ranges PED

Controller Meter Nitrogen* Module H

Model Model Min. F. S. Max. F. S. Max. Press.

(slpm) psi (Bar)

Mf50 Mf60 0.003 30 1500 (100) SEP

N/A Mf61 0.003 30 4500 (300)
Mf51 Mf63 10 100 1000 (6 8)
Mf53 N/A 100 1000 1000 (68) 1 for all 150 lbs.Flanges

* Standard temperature and pressure equals 0°C and 101kPa (760 Torr).

These mass flow controllers and meters can be calibrated to other
conditions. Specify at time of ordering.

1-2

Control/Usable Range

50 to 1

Accuracy

±1% full scale including linearity at calibrated conditions
±1.5% full scale including linearity for Mf50 and Mf60 for flow ranges
greater than 20 slpm

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Section 1 Introduction

Brooks® Mf Series

Repeatability

0.25% of rate

Sensitivity to Mounting Attitude

±0.5% full scale maximum deviation from specified accuracy after
re-zeroing under 200 psig. Specify mounting attitude at time of order to
insure optimum performance.

Temperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift from original calibration over 50°F to
122°F range (10°C to 50°C)

Pressure Sensitivity

±0.03% per psi up to 200 psig (N2)

Ratings:
Operating Pressure

Refer to Table 1-1

Differential Pressure (Controllers)

Mf50: 5 to 50 psid pressure drop
Mf51: 10 to 50 psid pressure drop
Mf53: Standard high dif ferential valve > 30 to 290 p sid
Optional: Low differential valve 7.5 to 30 psid (<500 slpm)

1 1.8 to 30 psid (>500 slpm)

Response Time

Less than 6 seconds to within 2% of full scale of final value for a 0 to 100%
command change. Refer to Figure 1-2, typical performance curve.

Temperature Ambient/Gas

41°F to 149°F (5°C to 65°C)

Leak Integrity , Outboard

1 x 10-9 atm cc/sec. He (excluding permeation)

PHYSICAL:

Materials of Construction

St andard wetted parts: S tainless steel with V iton® fluoroelastomers or Buna-N
Optional: Kalrez

®

Dimensions

Controllers: Refer to Figures 1-6 through 1-9
Meters: Refer to Figures 1-10 through 1-12

Process Connections

Refer to the table at the bottom of each dimensional drawing for process
connection sizes and options specific to each size controller and meter .

1-3

Section 1 Introduction

V

V

*

Brooks® Mf Series

1-5 Electrical Specifications

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Setpoint Command Requirements (Controllers)

4-20 mA (75 ohms input resist ance). The 4-20mA setpoint signal must be
supplied from the customers side(sourcing type).
The input load for this signal is 75 ohms.
For 0 to 5 Vdc (220 K ohms input resistance)

Output Signals

0/4-20 mA, loop resistance is power supply dependent, refer to Figure 1-2,
or 0 to 5 Vdc into 2000 ohms, or greater load. Maximum ripple 3 mV.

Power Requirements

Refer to Table 1-2.

Electrical Connections

Wire hookup is through a Pg1 1 water tight cable gland suitable for cable
diameters of .20 to .39 inches or 1/2" FNPT conduit fitting.
Wiring termination's are pluggable moving vise clamp with screw type
terminations. Refer to Figure 1-3 for termination points and Table 1-3 for
terminal identification and functions.

Typical Electrical Configuration

Figure 1-4 illustrates typical electrical hookup to Brooks 0151i Power
Supply/Set Point Controller/Readout.

Table 1-2 Power Requirements

Mass Flow Controllers Mass Flow Meters

Model

Mf50 15 to 28 Vdc 240 mA @ 15 Vdc Mf60 15 to 28 Vdc 90 mA

Mf51*

Mf53

** Note minimum voltage for Mf51 is 22 Vdc

oltage Current Model

370 mA @ 28 Vdc

15 to 28 Vdc 309 mA @ 22 Vdc Mf61 15 to 28 Vdc 90 mA

370 mA @ 28 Vdc

15 to 28 Vdc 240 mA @ 15 Vdc

370 mA @ 28 Vdc

Mf63

oltage Current

15 to 28 Vdc 90 mA

1-4

Figure 1-2 Maximum Allowable Output Loop Resistance

Installation and Operation Manual

r

r

r

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Section 1 Introduction

Brooks® Mf Series

Table 1-3 Mf Series Controllers and Meters Terminal Strip Hookup

TB-1 Label Function Colo

Terminal 1-6 Identification Code**

1 VSUP Supply Voltage P l us (+) See Table 3 Orange
2 SUPCOM Supply Voltage Common Grn/Blk
3 NC Not Used Blue
4 SUPCOM Signal Common Org/Blk
5 VSIG Voltage Signal O utput White
6 ISIG Current Si gnal Output G reen

TB-2 Label Function Colo

Terminal 1-9 Identification Code**

1 NC Not Used Blu/Wht
2 GND Chasis Grou nd Grn/Wht
3 NC Not Used Red
4 VREF Reference Output +5 Vdc Blu/Blk
5 VOR Valve Override Input Blk/Wht*
6 NC Not Used Red/Wht
7 CMDCOM Command Common Black*
8 VCMD Voltage Command Input (Setpoint) Red/Blk*
9 ICMD Current Comman d Input (Setpoin t) Wht/Blk*

TB-3 Label Function Colo

Termin al 1 & 2 Identification Code**

1 N ONE Valve Hookup Orange*
2 N ONE Valve Hookup Orange*

*These connections used only for controllers (Models Mf50, Mf51 and Mf53)
**Brooks reference

Certifications:
EMC Directive 89/336/EEC:

Per EN 61326

Hazardous Location Classification

Non-Incendive
Enclosure T ype 4X 1/IP66
Ambient T emperature: 50C > Tamb < 650C (T3C) or

50C > Tamb < 550C (T4)

United States and Canada

UL Listed: E73889 Volume 1, Section 17
UL Recognized: E73889 Volume 3, Section 1

Class I, Division 2, Groups A, B, C and D;
Class II, Division 2, Groups F and G;
Suitable for Class III, Division 2

Per UL 1604 and CSA-213

Pressure Equipment Directive (97/23/EC)

See Table 1-1 for further information

1-5

Section 1 Introduction

Brooks® Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

TB-1

TB-2

Figure 1-3 Terminal Strip Labeling

VSUP+

SUPCOMNCSIGCOM

ICMD

VCMD

CMDCOMNCVOR

VSIG

ISIG

VREF

NC

GND

VALVE

NC

TB-3

Figure 1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply

1-6

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Figure 1-5 Model Mf50 Controller Dimensions

Section 1 Introduction

Brooks® Mf Series

Connections "A" Dim.

9/16 -18 UNF 5.28/134
1/4" Tube Compr. 7.30/185
1/8" Tube Compr. 7.13/181

1/4" VCR
1/4" VCO

6mm Tube Compr. 7.32/186

TM
TM

1/4" NPT 6.89/175

Dimensions in inches/mm

7.17/182

6.85/174

Figure 1-6 Model Mf51 Controller Dimensions

Connections "A" Dim.

9/16 -18 UNF 5.85/148.5
1/4" Tube Compr. 7.87/199.9
3/8" Tube Compr. 7.99/203.0

1/4" VCR 7.74/196.5
1/4" VCO 7.42/188.5

Dimensions in inches/mm

1-7

Section 1 Introduction

Brooks® Mf Series

Figure 1-7 Model Mf53 Controller Dimensions

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Connections "A" Dim.

1/2" Tube Compr. 11.96/303.8
3/4" Tube Compr. 11.96/303.8

1" Tube Compr. 12.31/312.8

1/2" VCO 10.86/275.8
3/4" VCO 11.57/293.8

1/2" VCR 11.17/283.8

0.5", 0.1", 1.5" NPT or
1-1/16"-12 9.28/235.8

Dimensions in inches/mm

Figure 1-8 Model Mf53 Controller with Flange Dimensions

1-8

Flange Class

DIN DN14 PN 40
DIN DN25 PN 40
DIN DN40 PN 40
DIN DN50 PN 40

ANSI 0.5" 150 LBS
ANSI 0.5" 300 LBS

ANSI 1" 150 LBS

ANSI 1" 300 LBS
ANSI 1.5" 150 LBS
ANSI 1.5" 300 LBS

ANSI 2" 150 LBS

ANSI 2" 300 LBS

Dimensions in inches/mm

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Figure 1-9 Model Mf60 Meter Dimensions

Section 1 Introduction

Brooks® Mf Series

Connections "A" Dim.

9/16 -18 UNF 3.89/98.7
1/4" Tube Compr. 5.93/150.7
1/8" Tube Compr. 5.74/145.7

1/4" VCR 5.78/146.7

1/4" VCO 5.46/138.7

1/4" NPT 5.50/139.7

6 mm Tube Compr. 5.93/150.7

Dimensions in inches/mm

Figure 1-10 Model Mf61 Meter Dimensions

Connections "A" Dim.

9/16 -18 UNF 4.45/113.1
1/4" Tube Compr. 6.48/164.5
3/8" Tube Compr. 6.60/167.6

1/4" VCR 6.34/161
1/4" VCO 6.02/152.8

Dimensions in inches/mm

1-9

Section 1 Introduction

Brooks® Mf Series

Figure 1-11 Model Mf63 Meter Dimensions

Installation and Operation Manual

X-TMF-Mfi-Mfx-MFC-eng

Part Number: 541B074AAG

August, 2009

Connections "A" Dim.

1/2" Tube Compr. 10.23/260
3/4" Tube Compr. 10.23/260

1" Tube Compr. 10.59/269

1/2" VCO 9.13/232
3/4" VCO 9.84/250
1/2" VCR 9.44/240

0.5", 1", 1.5" NPT
or 1-1/16" - 12 7.55/192

Dimensions in inches/mm

Figure 1-12 Model Mf63 Meter with Flange Dimensions

1-10

Flange Class

DIN DN15 PN 40
DIN DN25 PN 40
DIN DN40 PN 40
DIN DN50 PN 40
ANSI 0.5" 150 LBS
ANSI 0.5" 300 LBS

ANSI 1" 150 LBS

ANSI 1" 300 LBS
ANSI 1.5" 150 LBS
ANSI 1.5" 300 LBS

ANSI 2" 150 LBS

ANSI 2" 300 LBS

Dimensions in inches/mm

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng
Part Number: 541B074AAG
August, 2009

2-1 General

2-2 Receipt of Equipment

Section 2 Installation

Brooks® Mf Series

This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-3 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare part s are not
discarded with the packing materials. Inspect for damaged or missing
parts.

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following conditions:

a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

7°C (45°F) minimum.

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-1

Section 2 Installation

Brooks® Mf Series

2-4 Return Shipment

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng

Part Number: 541B074AAG

August, 2009

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
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Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
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2-5 Transit Precautions

2-6 Removal from Storage

Instrument must have been purged in accordance with the following:

All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination S tatement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www .BrooksInstrument.com or are available from any Brooks
Instrument location listed above.

To safeguard the instrument against transportation damage, it is
recommended to keep the instrument in its factory container until ready for
installation.

2-2

Upon removal of the instrument from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the instrument has been
subject to storage conditions in excess of those recommended (See
Section 2-3), it should be subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng
Part Number: 541B074AAG
August, 2009

2-7 Gas Connections

2-8 In-Line Filter

Section 2 Installation

Brooks® Mf Series

Refer to Tables 5-1 through 5-4 for the available process connection types
and sizes. It is recommended that good tubing and piping practice be
followed. It is also recommended that for very low flows in meter size
Mf50's that tubing 1/4 or less be used and for flows over 10 slpm 3/8 tubing
be applied. Prior to installation, make certain all piping is clean and free of
obstructions. Install the piping in such a manner that permits easy removal
if the instrument is to be removed for cleaning or test bench
troubleshooting.

It is recommended that an Brooks in-line filter (refer to DS-5848 for
appropriate models/flows) be installed upstream from the instrument to
prevent the possibility of any foreign material entering the flow sensor or
control valve. The filtering element should be periodically replaced or
ultrasonically cleaned.

For Models Mf53/63, an in-line filter of 100 microns standard has been
installed upstream from the meter or controller to prevent the possibility of
any foreign material entering the flow sensor or control valve. The filtering
element should be periodically replaced or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

30 to 100 slpm 30 micron

Note: The above lists the max. recommended porosity for each flow range.
It is recommended that the minimum micron porosity that does not limit the
full scale flow rate be used.

2-9 Installation (Refer to Table 1-4, Figure 1-4, 2-1 and Quick Start Instructions)

CAUTION

When installing the controller, care should be taken that no
foreign materials enter the inlet or outlet of the instrument. Do not
remove the protective end caps until time of installation.

2-3

Section 2 Installation

Brooks® Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng

Part Number: 541B074AAG

August, 2009

Recommended installation procedures:

a. The Mf Series instrument should be located in an environment relatively

free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

CAUTION

When used with a reactive (sometimes toxic) gas, contamination
or corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
controller purged with dry Nitrogen before use.

d. The Mf Series controllers and meters can be installed in any position.

However, mounting orientations other than the original factory calibra-

tion will result in a ±0.5% maximum full scale shift after re-zeroing.
e. When installing controllers with full scale flow rates of 10 slpm or

greater, be aware that sharp abrupt angles in the system piping directly

upstream of the controller may cause a small shift in accuracy. If

possible, have at least ten pipe diameters of straight tubing upstream of

the Mf devices.
Note: The control valve in the Mf controller provides precision control and

is not designed for positive shut-off. If positive shut-off is required, it is

recommended that a separate shut-off valve be installed in-line.

2-4

Special considerations to be taken when installing the Mf53 MFC:

The Model Mf53 has a valve design that is different from standard low flow
Brooks TMFC’s. The Mf53 consists of a dual stage, pilot operated valve.
The pilot valve (located on top of the MFC) controls a differential pressure
across the main valve which, in turn controls the flow through the device.
The main valve is a pressure operated valve that utilizes a bellows spring
and diaphragm to control flow . This bellows and diaphragm assembly can
be susceptible to damage by pressure spikes or surges. For this reason, it
is recommended that process line startups are handled with care.

The bellows spring is offered in two levels. A low force for low differential
pressures (delta P < 30psig), and a high force (delta P >30 and <300 psig).

The selection of the bellows spring is mainly determined by the differential
pressure as specified on the customer order . This should reflect your
actual process conditions. The low force bellows consists of a softer
bellows spring which is required to allow flow control at lower differential
pressures.

During startup conditions, when a process line is being pressurized, the

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng
Part Number: 541B074AAG
August, 2009

Section 2 Installation

Brooks® Mf Series

pressures and/or pressure differentials that the Mf53 is exposed to may
be different from the final process conditions. For higher pressure
applications, and especially those with the low force bellows, it is
important to bring the pressure up in a controlled manner in order to
prevent a possible pressure spike to the bellows spring and main valve
diaphragm. A pressure spike could deform the bellows, damage the
diaphragm or blow out the bellows O-ring seal. This typically results in a
failure to shutoff (leakby at zero setpoint).

One method to assure successful startups is to set a 100% setpoint
command or valve override open command and then gently ramp the
pressure up to operating conditions. This will allow you to bring your
process pressures up to normal operating conditions and the Mf53 will
then function as specified.

Another method is to utilize a bypass valve to allow pressure around the
device while ramping up pressure to proper operating conditions.

The main point is to not instantly open a ball valve and allow a high
upstream pressure or high back pressure surge into the Mf53 main valve.
Proper process line venting is also important. If operating at pressures
greater than 50 psig, be sure to perform a controlled pressure release
from inlet and back pressure simultaneously in order to prevent bellows
damage from excessive back pressure.

Following careful startup and venting procedures will contribute to a long
problem free life of your Mf53 controller .

Stable Operating Conditions:

As stated above, the Mf53 model utilizes a pressure operated main valve.
V alve performance is dependant on st able system pressures. Oscillating
or unstable upstream or downstream pressures are likely to cause the
device flow control to become unstable. For the best performance, it is
important to create a stable pressure environment by utilizing quality inlet
and back pressure regulators. In many cases, the addition of a back
pressure regulator will isolate the Mf53 from the unstable downstream
pressures inherent in many process designs.

For more information, please contact the Brooks Technical Service group.

2-5

Section 2 Installation

Brooks® Mf Series

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng

Part Number: 541B074AAG

August, 2009

Figure 2-1 Common Electrical Hookups

2-6

Installation and Operation Manual

X-TMF-Mfi-Mfx-eng
Part Number: 541B074AAG
August, 2009

Section 2 Installation

Brooks® Mf Series

Figure 2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)

Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)

2-7