Brooks Instrument GF126 User Manual

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

GF100 Series

Brooks® GF100 Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices

Model GF125 Analog I/O

Model GF125 Digital I/O

Model GF135 Analog I/O

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Dear Customer , We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user . It is designed with the ever changing process conditions, accuracy requirement s and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Of fice listed on the back cover of this manual or visit www .BrooksInstrument.com.

Y ours sincerely , Brooks Instrument

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013GF100 Series

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Paragraph Page Number Number

Section 1 General Information

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ...............................................................................................................1-1

1-3 Product Support References.................................................................................................. .......1-2

1-4 Notice and Caution Statements..................................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF100 Series Device...........................................................................................1-2

1-7 Industry Standard References.......................................................................................................1-2

1-8 GF100 Series Gas Table ...............................................................................................................1-2

1-9 Glossary of Terms and Acornyms .................................................................................................1-2

1-10 Description .................................................................................................................................... 1-5

1-11 Specifications for GF100 Series Devices...................................................................................... 1-8

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended S torage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-2

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage ..................................................................................................................2-2

2-7 Gas Connections........................................................................................................................... 2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation.................................................................................................................. 2-3

2-10 Flow Controller Inst allation Arrangement ......................................................................................2-4

2-11 Purge the Gas Supply Line Before GF100 Series Installation.......................................................2-5

2-12 Position and Mount the GF100 Series .......................................................................................... 2-6

2-13 Perform a Leak Test ......................................................................................................................2-8

2-14 Zeroing Setup Process..................................................................................................................2-8

2-15 Zeroing the GF100 Series............................................................................................................. 2-9

2-15-1 Zeroing the GF100 Series Pressure T ransducer from the LCD Display Panel ............................. 2-9

2-15-2 Zeroing GF100 Series Flow from LCD Display Panel .................................................................. 2-10

2-16 Performance Checks ................................................................................................................... 2-11

2-17 Introduction to the MultiFloTM Configurator ................................................................................... 2-11

2-18 Using the MultiFlo Configurator....................................................................................................2-11

2-19 Electrical Connections..................................................................................................................2-14

2-19-1 DeviceNet Connections................................................................................................................2-14

2-19-2 Analog/RS485 Connections ......................................................................................................... 2-15

2-20 GF135 Inlet V alve Installation.......................................................................................................2-17

2-21 GF135 Commissioning.................................................................................................................2-18

GF100 Series

Contents

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Flow Measurement ................................................................................. 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................4-1

4-2 Maintenance..................................................................................................................................4-1

4-3 Troubleshooting............................................................................................................................. 4-3

4-4 Troubleshooting Checklist ............................................................................................................. 4-3

4-5 GF100 Series Troubleshooting Guide...........................................................................................4-4

Section 5 Product Description Code

5-1 Overview .......................................................................................................................................5-1

Contents

GF100 Series

Appendix A: GF100 Series Gas Table

A-1 Overview .......................................................................................................................................A-1

Appendix B: GF100 Series Patents

B-1 Overview .......................................................................................................................................B-1

Appendix C: Essential Instructions

C-1 Overview .......................................................................................................................................C-1

Warranty , Local Sales/Service Contact Information....................................................................... Back Cover

Figure Figure Number Number

1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital ....................................1-1

1-2 LED Display .................................................................................................................................. 1-7

1-3 Dimensions - GF100 Series .........................................................................................................1-12

1-4 Dimensions - GF135, DeviceNet..................................................................................................1-13

1-5 Dimensions - GF135, RS485 ....................................................................................................... 1-14

2-1 T ypical Gas Supply Arrangement with Non-PTI MFC.................................................................... 2-4

2-2 T ypical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4

2-3 GF100 Series Mounting Attitude Positions....................................................................................2-6

2-4 GF100 Series Mounted to K1 Series Substrate Blocks.................................................................2-7

2-5 Mounting Screws Torque Pattern ..................................................................................................2-8

2-6 Display with PSI Reading .............................................................................................................. 2-9

2-7 Display Reading Zero PSI ............................................................................................................2-10

2-8 Display Set to %FS ...................................................................................................................... 2-10

2-9 %Flow Display Set to Zero ...........................................................................................................2-10

2-10 MultiFlo Cable Adapter................................................................................................................. 2-12

2-1 1 RS-232/RS-485 Converter (P/N A33231).....................................................................................2-13

2-12 Diagnostic Port............................................................................................................................. 2-13

2-13 GF100 Series DeviceNet Connection ..........................................................................................2-14

2-14 GF100 Series with 9-Pin Analog Connector................................................................................. 2-15

2-15 Analog 9-Pin Connector (M).........................................................................................................2-15

2-16 GF100 Series Electrical Interface Options ................................................................................... 2-16

2-17 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines...........................................2-17

3-1 GF100 Series Operating Principles...............................................................................................3-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Table Table Number Number

1-1 Industry S tandard References.......................................................................................................1-3

1-2 Terms and Acronyms .................................................................................................................... 1-4

1-3 Specifications for Standard GF100 Series .................................................................................... 1-9

1-4 Specifications for High Accuracy (HA) GF100 Series ..................................................................1-10

1-5 Specifications for Safe Delivery System (SDS) GF100 Series.....................................................1-10

1-6 S pecifications for GF135 Series................................................................................................... 1-11

2-1 K1 Series Fasteners......................................................................................................... .............2-7

2-2 K1 Substrate Torque Data............................................................................................................. 2-7

2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ....................................................2-9

4-1 Environmental Factors .................................................................................................................. 4-3

4-2 GF100 Series Troubleshooting Guide...........................................................................................4-4

5-1 GF100 Series Product Description Code T able............................................................................. 5-1

5-2 Model GF135 Product Description Code Table .............................................................................5-3

A-1A GF100 Series Gas Table - Codes 1-110, Bins SH40 to SH50.......................................................A-1

A-1B GF100 Series Gas Table - Codes 118-953, Bins SH40 to SH50...................................................A-2

A-1C GF100 Series Gas Table - Codes 958-5022, Bins SH40 to SH50 ................................................A-3

B-1 GF100 Series Patents...................................................................................................................B-1

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

1-1 Introduction

Section 1 Introduction

GF100 Series

Designed for semiconductor, MOCVD , and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance, reliability , and flexibility . Process throughput and yield are maximized while process costs are reduced by the GF100 Series featuring:

• Ultra fast settling time for quick start up and very rapid process steps

• MultiFlo™ gas and range configurability enabling reconfiguration without removing device from the gas line

• An independent diagnostic/service port to troubleshoot or change flow conditions without removing the mass flow controller from service

• Long-term stability due to extremely low wetted surface area, and corrosion resistant Hastelloy® sensor and valve seat

Optional model variations including—pressure transient insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS)

1-2 How to Use This Manual

Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital

This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. The manual is organized in the following sections:

Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance and Troubleshooting Section 5 Product Description Code Appendix A GF100 Series Gas Table Appendix B GF100 Series Patents Appendix C Essential Instructions Warranty, Local Sales/Service Contact Information It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

1-1

Section 1 Introduction

GF100 Series

1-3 Product Support References

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Refer to www .BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include:

1-4 Notice and Caution Statement s

1-5 Product Warranty

- Brooks MultiFlo

X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG

Configurator Quick Start Manual:

- Brooks GF100 Series data sheets:

DS-TMF-GF100-Series-MFC-eng DS-TMF-GF135-Series-MFC-eng

Warning, caution and notice statements are located throughout this manual in the ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury . A CAUTION statement indicates a potentially hazardous situation which, if not avoided, MA Y result in minor or moderate injury. It may also be used to alert against unsafe practices. A NOTICE statement describes specific information that requires special attention.

Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group.

1-6 How to Order a GF100 Series Device

1-7 Industry Standard References

1-8 GF100 Series Gas T able

1-9 Glossary of T erms and Acronyms

1-2

Refer to Section 5.

Refer to Table 1-1.

Refer to Appendix A.

Refer to Table 1-2

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18 Guideline for temperature specifications of the MFC SEMI E27 Standard for MFC and MFM linearity SEMI E28 Guideline for pressure specifications for the MFC SEMI E52 Practice for referencing gases used in digital MFCs SEMI E54 Sensor actuator network connections for DeviceNet SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs SEMI E66 Test method for determining particle contribution by MFCs SEMI E67 Test method for determining reliabilty of MFCs SEMI E68 Test method for determining warm-up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for determining attitude sensitivity of MFCs SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates SEMI F19 Specification for the finish of the wetted surface of electro polished

216L stainless steel components SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications SEMI F36 Guide for dimensions and connections of gas distribution components SEMI F37 Method for determination of surface roughness parameters for gas

distribution system components SEMI F44 Guideline for standardization of machined stainless steel weld fittings SEMI F45 Guideline for standardization of machined stainless steel reducing fittings SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity SEMI S2 Environmental, Health and Safety Guidelines SEMI S9 Dielectric testing SEMI S10 Risk assessment SEMI S12 Decontamination of fielded products

GF100 Series

1-3

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Table 1-2 Terms and Acronyms

Term or Acronym Definition CSR Customer S pecial Requirement CVD Chemical V apor Deposition DeviceNet A 5-wire local network I/O communication device

that employs a command/response

communication protocol DSP Digital Signal Processor EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a

bare wafer, enabling a high-purity st arting point

for building the semiconductor device. HBD Horizontal Base Down GF100 Series Integrated Flow Controller F.S. Full Scale LED Light Emitting Diode MFC Mass Flow Controller MultiFlo Configurator I/O communication software package that

configures gas and flow ranges MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within

a defined standard configuration PID Proportional Integral Derivative Controller PSIA Pounds per Square Inch Absolute PSID Pounds per Square Inch Differential PSIG Pounds per Square Inch Gauge PTI Pressure Transient Insensitive. Reduces the

effect of pressure fluctuations in gas flow.

Applicable to GF125 only . ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR. HC S tandard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases) S.P. Setpoint S tep Technology Enables fast set point control through a high

speed DSP and low volume drive circuit VIU Vertical mounting attitude with inlet side facing up

1-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

1-10 Description

Section 1 Introduction

GF100 Series

Ultra Fast Response

The Brooks GF Series patented flow sensor combined with a high speed ARM processor and fast acting diaphragm-free valve assembly enables:

• Faster response and settling time for improved wafer throughput

• Ultra-fast 1-2 second etch step processing

• Reduced diverted gas consumption and associated abatement costs

• Time sensitive gas delivery steps in Atomic Layer Deposition

• User programmable start-up function for processes requiring a slow ramped gas turn-on or time critical transitions between flow rates

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non-linear gases. This is achieved through advanced gas modeling and optimized through actual gas testing. Brooks MultiFlo another gas and/or flow range without sacrificing accuracy or rangability . Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, automatically compensates for gas density effects, and ensures smooth overshoot-free transitions between flow rates with excellent steady-state stability . Brooks MultiFlo technology offers unparalleled flexibility. An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations. Process benefits achieved:

• Mass flow controller full scale full range can be rescaled down typically by a factor of 3:1 with no impact on accuracy , turndown or leak by specifications

• Optimum process and inventory flexibility resulting in dramatically reduced inventory costs

• Fewer configurations/bin sizes required to support many different processes

• Less down-time with rapid process recovery MultiFloTM Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW -MultiFlo-Config-QS-eng (Part Number: 541B167AAG))

MultiFloTM Configurator Accessory Kit s: 778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and

A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485 A332295001 Power Supply MFC A332297002 Cable, Power , 9-Pin A332297001 Cable, Power , DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument

website at: www.BrooksInstrument.com/MultiFlo www .BrooksInstrument.com/Documentation&Downloads

allows the device to be quickly and easily configured for

*Software, MultiFlo Configurator

Adapter Cables *Software, MultiFlo Configurator

1-5

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models

Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions. The Brooks GF125 & GF135 (PTI) devices utilize a patented control algorithm that inverts the pressure signal, compares it to the pre-fluctuation signal and drives realtime valve position compensation to maintain stable flow . Enhanced pressure transient is achieved through faster sensing, quicker processing, and a reduction in internal dead-volume between the sensors and valve orifice.

Optional High Accuracy (HA)— GF125 model only

The GF125 High Accuracy (HA) is a gas and range specific model for critical gas process applications requiring the widest working range with tightest flow control accuracy. A typical application is for multi-step processes requiring a high flow rate, up to 10 slpm, and a very accurate low flow rate.

Optional Safe Delivery System (SDS)— GF120 model only

The Safe Delivery System (SDS) enhanced GF120 model is a state-of-theart low pressure drop devices for the delivery of sub atmospheric safe delivery system gases used in Implant and Etch processes. The Brooks GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.

Advanced Thermal Flow Measurement Sensor

Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an enhanced sensor manufacturing and burn in process incorporates a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminates thermal siphoning effects. This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition. This design results in:

• Enhanced signal to noise performance for improved accuracy at low set points

• Superior reproducibility at elevated temperature through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation

• Improved long-term stability

High Purity Flow Path

The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. The GF120, GF125 & GF135 devices are constructed with a 4µ inch Ra max surface finish while the GF100 is constructed with a 10µ inch Ra.

• Overall reduced surface area and un-swept volumes for faster dry-down during purge steps

• Long-term sensor and device stability for maximum yield and throughput

1-6

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Section 1 Introduction

GF100 Series

Extensive Mechanical Configurations

GF Series supports all metal seal/UHP industry gas connection interface standards for full OEM and process coverage.

• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2" bodies

• 124mm 4 VCR on 1-1/2" body

Enhanced Diagnostics and User Interface

The mass flow controller is one of the most complex and critical components in gas delivery systems. When dealing with ultra-high-purity gas distribution or highly toxic or corrosive gases, removing the mass flow controller to assess functionality should be the last resort. Brooks GF Series devices provide for in-line device evaluation and instantaneous troubleshooting through:

• Embedded self test routines and independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local indication of Flow (%), Temperature (oC), Pressure (PSIA/kPa) and Network Address

• Zero button to easily re-zero the device during scheduled maintenance This combination of features results in limiting service interruption and

reduced downtime.

Figure 1-2 LED Display

Communication Interfaces

The GF100 Series supports analog 0-5 Vdc, RS485, and DeviceNet™ communication protocols. Analog connections can be accessed via the DeviceNet or RS485 or Analog only connector options. DeviceNet and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODV A™ (Open DeviceNet Vendor’s Association). A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the same gas/range but different electrical connectors.

1-7

Section 1 Introduction

GF100 Series

1-11 Specifications for GF100 Series Devices

See Table 1-3 for specifications for standard GF100 Series. See Table 1-4 for specifications for the high accuracy (HA) GF100 Series. See Table 1-5 for specifications for the Safe Delivery System (SDS) GF100

Series. See Table 1-6 for specifications for the GF135 Series. See Figure 1-3 for dimensions for the GF100 Series. See Figures 1-4 & 1-5 for dimensions for the GF135 Series.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

1-8

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Table 1-3 Specifications for Standard GF100 Series

GF100GF100

GF100

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow Flow

AccurAccur

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

LinearityLinearity

Linearity + 0.5% F.S. (included in accuracy)

LinearityLinearity

Response Response

Response

Response Response Normally Closed Normally Closed

Normally Closed

Normally Closed Normally Closed

Normally Open Normally Open

Normally Open

Normally Open Normally Open

PrPr

ConCon

Con

ConCon

MultiFloMultiFlo

MultiFlo optional standard

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 11 bins

#of Bins#of Bins

VV VV

emperemper

emper

emperemper

acyacy

Accur

acy +1% S.P. > 35-100%, +0.35% F.S. 2-35%

AccurAccur

acyacy

Time (Settling Time (Settling

Time (Settling

Time (Settling Time (Settling

essuressur

e Insensitivitye Insensitivity

essur

e Insensitivity Not Applicable

essuressur

e Insensitivitye Insensitivity

trtr

ol Rangeol Range

ol Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)

trtr

ol Rangeol Range

alve Shut Down (N.C. alve Shut Down (N.C.

alve Shut Down (N.C.

alve Shut Down (N.C. alve Shut Down (N.C. alve Shut Down (N.O. alve Shut Down (N.O.

alve Shut Down (N.O.

alve Shut Down (N.O. alve Shut Down (N.O.

erer

o Stabilityo Stability

o Stability < + 0.5% F.S. per year

erer

o Stabilityo Stability

aturatur

e Coefficiene Coefficien

atur

e Coefficien

aturatur

e Coefficiene Coefficien

Eq.) Eq.)

Eq.) 3 sccm to 55 slm

Eq.) Eq.)

oducibilityoducibility

oducibility < + 0.15% S.P.

oducibilityoducibility

Time)Time)

Time) 300ms (3-860 sccm N2 Eq.)

Time)Time)

alvealve

alve < 1 sec <1 sec 400ms (861-7200 sccm N2 Eq.)

alvealve

alve <1.5 sec

alvealve

alve)alve)

alve) < 1% of F.S.

alve)alve)

alve) 2% of F.S.

alve)alve)

t Span: 0.005% full scale per oC, Zero: 0.001% full scale per oC

GF100GF100

GF120GF120

GF120

GF120GF120

< 5% SP up to 5 psi/sec upstream press. spike

Section 1 Introduction

GF100 Series

GF125GF125

GF125

GF125GF125

500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)

RatingsRatings

Ratings

RatingsRatings

OperOper

ating ating

emperemper

aturatur

Oper

ating

OperOper

DifferDiffer

Differ

DifferDiffer

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

PrPr

oof Proof Pr

oof Pr

PrPr

oof Proof Pr

Burst PrBurst Pr

Burst Pr

Burst PrBurst Pr

Leak InLeak In

Leak In

Leak InLeak In

MecMec

hanicalhanical

Mec

hanical

MecMec

hanicalhanical

alve alve

alve

alve alve

etted Materialsetted Materials

etted Materials GF100: SEMI F20 GP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

etted Materialsetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 4μ inch Ra (0.1 μm Ra)

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

AlarmsAlarms

Display Display

Display

Display Display Viewing Viewing

Viewing

Viewing Viewing Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (oC), Pressure (psia, kPa) /

Units Displayed / ResolutionUnits Displayed / Resolution

emper

ating ating

emperemper

enen

tial Prtial Pr

tial Pr

enen

tial Prtial Pr

essuressur

essur

e 700 psia max 140 psia max

essuressur

essur

e 3000 psia max 500 psia max

essuressur

tegrity (external)tegrity (external)

tegrity (external)

tegrity (external)tegrity (external)

ypeype

ype Normally Closed

ypeype

ype Top Mount Integrated LCD

ypeype

Angle / Angle /

Angle /

Angle / Angle /

e Rangee Range

atur

e Range

aturatur

e Rangee Range

essuressur

e Range*e Range*

essur

e Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid

essuressur

e Range*e Range*

ating Prating Pr

essuressur

essur

essuressur

ating Pr

ating Prating Pr

Viewing DistanceViewing Distance

Viewing Distance Fixed /

Viewing DistanceViewing Distance

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

500 psia max 100 psia max

Normally Open (>93sccm flow rate N2 Equivalent) Meter (no valve)

GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

10 feet

10-50oC

1x10

0.1 (unit)

-11

atm. cc/sec He

Electrical Electrical

Electrical

Electrical Electrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Electrical Connection Electrical Connection

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication Digital Communication

Diagnostic /Service P Diagnostic /Service P

Diagnostic /Service P

Diagnostic /Service P Diagnostic /Service P

P P

ower Supply/Consumptionower Supply/Consumption

ower Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc RS485/Analog: 6 Watts max @ +15Vdc. (+10%)

P P

ower Supply/Consumptionower Supply/Consumption

ortort

ort RS485 via 2.5mm jack

ortort

via 5-Pin “M12” connector

1-9

Section 1 Introduction

GF100 Series

Table 1-4 Specifications for High Accuracy (HA) GF100 Series

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range*Full Scale Flow Range*

Full Scale Flow Range* 5 sccm - 10 slpm N2 equivalent

Full Scale Flow Range*Full Scale Flow Range* Gases SupportedGases Supported

Gases Supported N

Gases SupportedGases Supported MultiFlo PrMultiFlo Pr

MultiFlo Pr

MultiFlo PrMultiFlo Pr Flow Flow

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr TT

urn Down Ratiourn Down Ratio

urn Down Ratio 100:1

urn Down Ratiourn Down Ratio

erer

Settling Settling

Settling

Settling Settling

arm Up arm Up

arm Up

arm Up arm Up

Leak InLeak In

Leak In

Leak InLeak In VV

alve Shut Down (Leak by)alve Shut Down (Leak by)

alve Shut Down (Leak by) <0.5% F.S.

alve Shut Down (Leak by)alve Shut Down (Leak by)

OperOper

Oper

OperOper

Max. OperMax. Oper

Max. Oper

Max. OperMax. Oper PrPr

oof Proof Pr

oof Pr

PrPr

oof Proof Pr

Burst PrBurst Pr

Burst Pr

Burst PrBurst Pr PrPr

essuressur

essur

PrPr

essuressur

DifferDiffer

Differ

DifferDiffer High PrHigh Pr

High Pr

High PrHigh Pr Low PrLow Pr

Low Pr

Low PrLow Pr

alve Conalve Con

alve Con

alve Conalve Con

AmbienAmbien

Ambien

AmbienAmbien ZZ

erer

ogrogr

ammable*ammable*

ogr

ammable* Not Configurable

ogrogr

ammable*ammable*

AccurAccur

acy*acy*

Accur

acy* 10-100%F.S.=+1.0%S.P.

AccurAccur

acy*acy*

oducibilityoducibility

oducibility < +0.15% S.P.

oducibilityoducibility

o Stabilityo Stability

o Stability

o Stabilityo Stability

Time (to within Time (to within

Time (to within

Time (to within Time (to within

TimeTime

Time Minimum of 30 minutes

TimeTime

tegritytegrity

tegrity 1X10

tegritytegrity

ating Conditionsating Conditions

ating Conditions

ating Conditionsating Conditions

ating Prating Pr

ating Pr

ating Prating Pr

essuressur

essur

e 140 psia max

essuressur

essur

e 500 psia max

essuressur

e Insensitivitye Insensitivity

e Insensitivity +5% S.P. for up to 5 psi/sec. upstream press. spike

e Insensitivitye Insensitivity

enen

tialPrtialPr

essuressur

tialPr

essur

enen

tialPrtialPr

essuressur

e Gasese Gases

essur

e Gases

essuressur

e Gasese Gases

essuressur

e Gasese Gases

essur

e Gases >100 Torr (SiCl4)

essuressur

e Gasese Gases

figurfigur

ation*ation*

figur

ation* Normally Closed

figurfigur

ation*ation*

t t

emperemper

emper

t t

emperemper

o o

emperemper

aturatur

emper

atur

o o

emperemper

aturatur

2% F2% F

.S.)*.S.)*

2% F

.S.)* 300ms (<860 sccm N2 Equivalent)

2% F2% F

.S.)*.S.)*

essuressur

essur

e 100 psia max

essuressur

e**e**

e**

e**e**

aturatur

e Rangee Range

atur

e Range 10oC-50OC

aturatur

e Rangee Range

e Coefficiene Coefficien

e Coefficien

e Coefficiene Coefficien

t Span:

GF125(HA) GF125(HA)

GF125(HA)

GF125(HA) GF125(HA)

, O

, Cl2, HBr, SiCl

2-10%F.S.=

+1% S.P. plus +0.04% F.S.

< 0.5% F.S./OC

400ms (861-7200 sccm N2 Equivalent)

500ms (7201-55000 sccm N2 Equivalent)

-11

atm. cc/sec He

GF125(HA) GF125(HA)

GF125(HA)

GF125(HA) GF125(HA)

7-45 psid (N2, O2, Cl2, HBr, H2)

0.005% full scale per OC, Zero:

, H

0.001% full scale per OC

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

*Consult Technical Support for details. **Typical pressure drop. Actual pressure drop will be gas and flow dependent.

Table 1-5 Specifications for Safe Delivery System (SDS) GF100 Series

erformanceerformance

erformance

1-10

erformanceerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N Gases SupportedGases Supported

Gases Supported AsH3, PH3, BF3, SiF4, Ar, Xe, N2O, N2***

Gases SupportedGases Supported MultiFlo PrMultiFlo Pr

MultiFlo Pr

MultiFlo PrMultiFlo Pr Flow Flow

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr ZZ

erer

Settling Settling

Settling

Settling Settling

arm Up arm Up

arm Up

arm Up arm Up

Leak InLeak In

Leak In

Leak InLeak In

alve Shut Down (Leaky by)alve Shut Down (Leaky by)

alve Shut Down (Leaky by) <1% F.S.

alve Shut Down (Leaky by)alve Shut Down (Leaky by)

OperOper

Oper

OperOper

Minimum Oper

Maximum Pr Pr

Burst PrBurst Pr

Burst Pr

Burst PrBurst Pr PrPr

essuressur

essur

PrPr

essuressur

DifferDiffer

Differ

DifferDiffer VV

alve Conalve Con

alve Con

alve Conalve Con

AmbienAmbien

Ambien

AmbienAmbien ZZ

erer

ogrogr

ammableammable

ogr

ammable Not Configurable

ogrogr

ammableammable

AccurAccur

acyacy

Accur

acy +/-0.35% S.P. <35% F.S.

AccurAccur

acyacy

o Stabilityo Stability

o Stability <=0.6% F.S. per year

o Stabilityo Stability

Time (to within Time (to within

Time (to within

Time (to within Time (to within

TimeTime

Time minimum of 30 minutes

TimeTime

tegritytegrity

tegrity 1X10

tegritytegrity

ating Conditionsating Conditions

ating Conditions

ating Conditionsating Conditions

Minimum OperMinimum Oper

Maximum PrMaximum Pr

Maximum PrMaximum Pr PrPr

oof Proof Pr

oof Pr

PrPr

oof Proof Pr

enen

o o

emperemper

emper

o o

emperemper

ating Inlet Prating Inlet Pr

ating Inlet Pr

ating Inlet Prating Inlet Pr

essuressur

essur

essuressur

essur

e 700 psia max

essuressur

essur

e 3000 psia max

essuressur

e Insensitivitye Insensitivity

e Insensitivity Not Available

e Insensitivitye Insensitivity

tialPrtialPr

essuressur

tialPr

essur

tialPrtialPr

essuressur

figurfigur

ationation

figur

ation Normally Closed

figurfigur

ationation

t t

emperemper

aturatur

emper

atur

t t

emperemper

aturatur

e Coefficiene Coefficien

atur

e Coefficien

aturatur

e Coefficiene Coefficien

Eq.) Eq.)

Eq.) 4 - 25 sccm >25 to 1 slpm

Eq.) Eq.)

oducibilityoducibility

oducibility <+/- 0.15% S.P.

oducibilityoducibility

2% F2% F

.S.).S.)

2% F

.S.) < 3 sec

2% F2% F

.S.).S.)

essuressur

e*e*

essur

e* 4 to 20 sccm < 10 Torr

essuressur

e*e*

e 500 psia max

e**e**

e** 10 Torr-30 psid typical (1.33-207 kPa typical)

e**e**

e Rangee Range

e Range 10oC-50oC

e Rangee Range

t Span:

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

+/-1% S.P. >35% F.S.

-11

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

>20 to 50 sccm < 20 Torr >50 sccm to 1 slpm < 50 Torr

0.005% full scale per oC, Zero:

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

atm. cc/sec He

0.001% full scale per oC

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details. **Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details. ***Consult factory for other gases.

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Table 1-6 Specifications for GF135 Series

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range:Full Scale Flow Range:

Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)

Full Scale Flow Range:Full Scale Flow Range:

Gasses Supported:Gasses Supported:

Gasses Supported: N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),

Gasses Supported:Gasses Supported:

Flow Flow

AccurAccur

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

Linearity:Linearity:

Linearity: Included in accuracy

Linearity:Linearity:

Settling Settling

Settling

Settling Settling

PrPr

ConCon

Con

ConCon

emperemper

emper

emperemper

Rate-of-Decay PRate-of-Decay P

Rate-of-Decay P

Rate-of-Decay PRate-of-Decay P

RatingsRatings

Ratings

RatingsRatings

OperOper

Oper

OperOper

DifferDiffer

Differ

DifferDiffer

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

Pneumatic Pneumatic

Pneumatic

Pneumatic Pneumatic

PrPr

Burst PrBurst Pr

Burst Pr

Burst PrBurst Pr

Leak InLeak In

Leak In

Leak InLeak In

MecMec

hanicalhanical

Mec

hanical

MecMec

hanicalhanical

Surface Finish:Surface Finish:

Surface Finish: 4μ inch Ra (0.1 μm Ra)

Surface Finish:Surface Finish:

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms:Alarms:

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,

Alarms:Alarms:

Display Display

Display

Display Display

Viewing Distance:Viewing Distance:

Viewing Distance: Fixed / 10 feet

Viewing Distance:Viewing Distance:

Units Displayed / Resolution:Units Displayed / Resolution:

Units Displayed / Resolution: Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)

Units Displayed / Resolution:Units Displayed / Resolution:

ElectricalElectrical

Electrical

ElectricalElectrical

Electrical Connection:Electrical Connection:

Electrical Connection: Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector

Electrical Connection:Electrical Connection:

Digital Communication:Digital Communication:

Digital Communication: RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication:Digital Communication:

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

ComplianceCompliance

Compliance

ComplianceCompliance

EnEn

Safety:Safety:

Safety: EN61010-1

Safety:Safety:

DeviceNetDeviceNet

DeviceNet ODVA

DeviceNetDeviceNet

acy:acy:

Accur

acy: +/-1.0%S.P. (10-100%F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10%F.S.)

AccurAccur

acy:acy:

oducibility:oducibility:

oducibility: < +/- 0.15% S.P.

oducibility:oducibility:

Time:Time:

Time: <300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)

Time:Time:

essuressur

e Insensitivity:e Insensitivity:

essur

e Insensitivity: < 1% SP up to 5 psi/sec upstream press. spike

essuressur

e Insensitivity:e Insensitivity:

trtr

ol Range:ol Range:

ol Range: 1-100%

trtr

ol Range:ol Range:

alve Shut Down:alve Shut Down:

alve Shut Down: < 0.5% of F.S. N2

alve Shut Down:alve Shut Down:

erer

o Stability:o Stability:

o Stability: < +/- 0.5% F

erer

o Stability:o Stability:

aturatur

e Coefficiene Coefficien

atur

e Coefficien

aturatur

e Coefficiene Coefficien

Flow Rate:Flow Rate:

Flow Rate: Maximum flow for which an ROD measurement can be obtained 800 sccm

Flow Rate:Flow Rate:

AccurAccur

acy:acy:

Accur

acy: +/- 2% of setpoint down to 5% SP, then 0.1% FS from 5% SP to 1% SP

AccurAccur

acy:acy:

emperemper

aturatur

emper

atur

emperemper

aturatur

PrPr

essuressur

e Coefficiene Coefficien

essur

e Coefficien

PrPr

essuressur

e Coefficiene Coefficien

alve Leakby alve Leakby

alve Leakby

alve Leakby alve Leakby

ating ating

emperemper

ating

emper

ating ating

emperemper

enen

tial Prtial Pr

tial Pr

enen

tial Prtial Pr

alve Operalve Oper

alve Oper

alve Operalve Oper

oof Proof Pr

essuressur

oof Pr

oof Proof Pr

alve alve

alve

alve alve

etted Materials:etted Materials:

etted Materials: SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45

etted Materials:etted Materials:

ower Supply/Consumption:ower Supply/Consumption:

ower Supply/Consumption: DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,

ower Supply/Consumption:ower Supply/Consumption:

virvir

vir

virvir

e:e:

essur

e: 140 psia max

essuressur

e:e:

essuressur

e:e:

essur

e: 500 psia max

essuressur

e:e:

tegrity (external):tegrity (external):

tegrity (external): 1x10-10 atm. cc/sec He

tegrity (external):tegrity (external):

ype:ype:

ype: Normally Closed

ype:ype:

ype: Top Mount Electronically Rotatable Integrated LCD

ype:ype:

onmenonmen

tal Compliance:tal Compliance:

onmen

tal Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

onmenonmen

tal Compliance:tal Compliance:

t:t:

t: Span: +/-0.05% full scale per °C, Zero: +/-0.005% full scale per °C

t:t:

erformanceerformance

erformance

erformanceerformance

e Coefficiene Coefficien

e Coefficien

e Coefficiene Coefficien

essuressur

essur

essuressur

ating Prating Pr

ating Pr

ating Prating Pr

t:t:

t: +/- 0.04% SP/Deg C

t:t:

t: +/- 0.04% FS/psi

t:t:

AccurAccur

acy:acy:

Accur

acy: +/- 0.2% FS.

AccurAccur

acy:acy:

aturatur

e Range:e Range:

atur

e Range: 10-50°C

aturatur

e Range:e Range:

e Range**:e Range**:

e Range**: 3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid

e Range**:e Range**:

essuressur

e:e:

essur

e: 100 psia max

essuressur

e:e:

ating Prating Pr

essuressur

ating Pr

essur

ating Prating Pr

essuressur

ort:ort:

ort: Micro USB

ort:ort:

C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr)

.S. per year

**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Argon gas applications require higher differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

e:e:

43.5 psia - 72.5 psia

e:e:

Sensor Drift, Flow Error, Valve Leak

Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%

GF100 Series

1-11

Section 1 Introduction

GF100 Series

Downport Congurations

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Electrical Connector

G1/GX/TX Specic Dimensions

5.09in

129mm

VCR Congurations

Electrical Connector DX/BB Specic Dimensions

4.45in

113mm

3.67in

93mm

Electrical Connector SX Specic Dimensions

3.29in

84mm

.98in

25mm

3.75in

95mm

Fitting Option Code

CX EX WX DX YX AX BX LX

Seal Type

C-SEAL W-SEAL W-SEAL C-SEAL W-SEAL C-SEAL W-SEAL C-SEAL

Dim A

92mm [3.62in]

79.8mm[3.14in] 92mm [3.62in]

79.8mm[3.14in]

79.8mm[3.14in] 92mm [3.62in] 92mm [3.62in] 92mm [3.62in]

Dim B Dim C

105mm [4.13in]

93mm [3.66in] 30mm [1.18in] 38.7mm [1.525in]

105mm [4.13in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in] 105mm [4.13in] 105mm [4.13in] 105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

30mm [1.18in] 39mm [1.53in] 30mm [1.18in] 39mm [1.53in] 22mm [0.86in] 28mm [1.12in]

Dim D

Dim E 83mm [3.28in] 72mm [2.82in] 83mm [3.28in] 72mm [2.82in] 25mm [1.00in] 72mm [2.82in] 25mm [1.00in] 83mm [3.28in] 25mm [1.00in] 83mm [3.28in] 25mm [1.00in] 83mm [3.28in] 25mm [1.00in]

Dim F 25mm [1.00in] 25mm [1.00in] 25mm [1.00in]

Dim G 127mm [5.00in] 127mm [5.00in] 127mm [5.00in] 127mm [5.00in] 127mm [5.00in] 127mm [5.00in] 127mm [5.00in] 127mm [5.00in]

5.09in

129mm

Electrical Connector

G1/GX/TX Specic Dimensions

Fitting Option Code

VCR 1/4"

4.45in

113mm

Dim A

69mm [2.72in] 82mm [3.24in] 18mm [0.72in] 38mm [1.48in]

4X 8-32 UNC

0.12 (3.0mm)

Dim B Dim C

Electrical Connector DX/BB Specic Dimensions

Dim D

Dim E

83mm [3.28in]

3.66in 93mm

Dim F

31mm [1.21in] 127mm [5.0in] 13mm [0.50in]

Dim G Dim H

Electrical Connector

SX Specic Dimensions

3.29in 84mm

Dim J

124mm [4.88in]

.98in

25mm

3.75in 95mm

1-12

Figure 1-3 Dimensions - GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

Model GF135, DeviceNet, C-Seal Connections

Section 1 Introduction

GF100 Series

Model GF135, DeviceNet, VCR Connections

Figure 1-4 Dimensions - GF135, DeviceNet

1-13

Section 1 Introduction

GF100 Series

Model GF135, RS485, C-Seal Connections

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Model GF135, RS485, VCR Connections

1-14

Figure 1-5 Dimensions - GF135 Series, RS485

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

2-1 General

2-2 Receipt of Equipment

Section 2 Installation

GF100 Series

This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.

When the instrument is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding their liability . A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA T oll Free (888) 554 FLOW (3569) T el (215) 362 3700 Fax (215) 362 3745 E-mail: BrooksAm@BrooksInstrument.com www.BrooksInstrument.com

2-3 Recommended Storage Practice

Europe Asia Brooks Instrument GmbH Brooks Instrument Korea, Ltd.

Zur Wetterwarte 50 Haus 377/B, D-406 Bundang T echno Park 151 01109 Dresden Sungnam, Kyungki-do, 463-070 Germany Korea T el +49 (0) 351 215 20 442 T el +82 31 708 2522

In case you need technical assistance:

USA 888 275 8946 Taiwan +886 3 5590 988 Europe +49 351 215 2040 China +86 21 5079 8828 Japan +81 3 5633 7100 Singapore +6297 9741 Korea +82 31 708 2521

Remove the envelope containing the packing list. Outside of your clean area, carefully remove the equipment from the packing case. Make sure spare parts are not discarded with the packing material. Inspect the contents for damaged or missing parts. This device has been assembled, calibrated, and double-vacuum bagged in a Class 100 clean room. In your semi-clean area, remove the outer bag only . Pass the device into your clean area. Remove the second clean room compatible bag only when the device is ready to be tested and/or installed in your clean system.

If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-1

Section 2 Installation

GF100 Series

2-4 Return Shipment

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Prior to returning any device to the factory , visit the Brooks web site (www.BrooksInstrument.com) for a Return Materials Authorization Number (RMA#), or contact one of the locations provided on p. 2-1. Prior to returning the device, it must be purged in accordance with the following:

All flow devices returned to Brooks require completion of Form RPR003-1, Brooks Instrument Decontamination St atement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. Copies of these forms can be downloaded from the Brooks website (www.BrooksInstrument.com) or are available from any of the Brooks Instrument locations provided on p. 2-1.

2-5 Transit Precautions

2-6 Removal from Storage

2-7 Gas Connections

2-8 In-Line Filter

T o safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory, if circumstances permit.

Upon removal of the device from storage, a visual inspection should be conducted to verify its "as-received" condition. If the device has been subject to storage conditions in excess of those recommended (refer to "2-3 Recommended Storage Practice" on p. 2-1), it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes. T o maintain a devices ultraclean integrity, this service should be performed by the factory or one of the certified service centers.

Prior to installation, ensure that all piping is clean and free from obstructions. Install piping in such a manner that permits easy access to the device if removal becomes necessary .

2-2

It is recommended that an in-line filter be installed upstream from the device to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

2-9 Mechanical Installation

Section 2 Installation

GF100 Series

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free from shock and vibration.

• Leave sufficient room for access to the user interface, display and MAC ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and removal if the device requires servicing.

The GF100 Series is equipped with PTI technology , which reduces the effect of pressure fluctuations on gas flow . In PTI technology, a signal from an integrated pressure transducer is combined with the standard thermal sensor output. The combined signals allow precise and stable flow , even when the line pressure is fluctuating.

The GF100 Series also utilizes MultiFlo® technology that allows the user to configure standard configurations ("SHs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo® technology enables the user to reduce unique inventory requirements.

2-3

Section 2 Installation

GF100 Series

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangements are shown in Figures 2-1 and 2-2. GF100's are often arranged inside a gas panel. Configure standard configurations ("SHs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo technology enables the user to reduce unique inventory requirements.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Figure 2-1 Typical Gas Supply Arrangement with non-PTI MFC

Figure 2-2 T ypical Gas Supply Arrangement with PTI MFC

2-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG March, 2013

2-11 Purge the Gas Supply Line Before GF100 Series Inst allation

Section 2 Installation

GF100 Series

Before operating the GF100 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. The purge gas must be free of moisture and oxygen to less than 100 ppb. Purge the gas lines as follows or in accordance to prescribed company and safety procedures.

1. Shut off the process gas supply valve(s) upstream of the GF100 Series. If such a valve is not available, shut the valve on the gas panel. Tag the valve at this point to prevent accidental re-exposure of the process gas to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas. Cycle purging consists of evacuating to a low pressure adequate to induce out-gassing and then purging to remove adhered moisture and oxygen. If a toxic or reactive gas is present and a clogged GF100 Series is suspected, then proceed with caution. Pump down and purge the GF100 Series from both downstream and upstream lines. If check valves are present in the gas line, both pumping down and purging are required. Pumping down without purging is inadequate. If a good vacuum source is not available, the GF100 Series can be decontaminated by purge only .

3. Repeat the purge cycle several times within 2-4 hours to complete the cleaning. For toxic and corrosive gasses, it is recommended to use 100120 cycles.

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Brooks Instrument GF126 User Manual

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