Brooks Instrument 5882/92 User Manual

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Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Flomega, Liquid MFC’s/MFM’s

Brooks® Flomega, Liquid MFC’s/MFM’s

Model 5881/5891 and 5882/5892

Installation and Operation Manual

X-TMF-FM-MFC-eng

Flomega, Liquid MFC’s/MFM’s

PN 541-C-007-AAG

April, 2008

WARNING !

This publication must be read in its entirety before performing any operation. Failure to understand and follow these instructions could result in serious personal injury and/or damage to the equipment. Should this equipment require repair or adjustment, contact the nearest Brooks Sales & Repair Office. It is important that servicing is performed by trained and qualified personnel only .

If this equipment is not properly serviced, serious personal injury and/or damage to the equipment could result.

Dear customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument

device. Every day , flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirement s and hostile

process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety . Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com

Y ours sincerely, Brooks Instrument

CAUTION !

This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power must be removed.

2. Personnel must be grounded, via a wrist wrap or other safe, suitable means, before any printed circuit card or other internal device is installed, removed or adjusted.

3. Printed circuit board must be transported on a conductive bag or other conductive container . Boards must not be removed from protective enclosure until the immediate time of installation. Removed boards must be placed immediately in a protective container for transport, storage or factory .

Comments:

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronics designs contain microprocessor technology including SMD-components. Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly , exhibit early failure.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Flomega, Liquid MFC’s/MFM’s

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to install, operate, update, program and maint ain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product’s performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed by qualified persons, to prevent electrical shock and personal injury .

Pressure Equipment Directive (PED) All pressure equipment with an internal pressure greater than 0,5 bar (g) and a size larger than 25 mm or 1" (inch) falls under the Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway , Iceland and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

** Appendix 1 of this manual contains important safety and operating instructions related to the PED directive ** Meters decribed in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment. ** All Brooks Instrument flowmeters falls under Fluid-group I ** Meters larger then 25mm or 1" (inch) are in compliance with category I, II or III of the PED. ** Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

Installation and Operation Manual

X-TMF-FM-MFC-eng

Flomega, Liquid MFC’s/MFM’s

PN 541-C-007-AAG

April, 2008

CAUTION

This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling: procedures must be observed during the removal, installation or other handling of internal circuit boards or devices.

Handling procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive bag or other conductive cont ainer. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory .

Comments:

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, CMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly , exhibit early failure.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Paragraph Page Number Number

Section 1 Introduction ............................................................................................................... 7

1-1 Purpose ............................................................................................................... 7

1-2 Description ............................................................................................................... 7

1-3 Specifications .............................................................................................................. 7

Section 2 Installation ............................................................................................................... 10

2-1 General ............................................................................................................... 10

2-2 Receipt of Equipment .................................................................................................. 10

2-3 Recommended Storage Practice................................................................................. 10

2-4 Return Shipment.......................................................................................................... 11

2- 5 Transit Precautions...................................................................................................... 11

2-6 Removal from Storage ................................................................................................. 11

2-7 In-line Filter ............................................................................................................... 12

2-8 Connections ............................................................................................................... 12

2-9 Precision 5V Reference ............................................................................................... 12

2-10 Command Input ........................................................................................................... 12

2-11 Valve Override.............................................................................................................. 12

2-12 Installation ............................................................................................................... 14

2-13 Start-up Guidelines...................................................................................................... 15

Flomega, Liquid MFC’s/MFM’s

Contents

Section 3 Operation ............................................................................................................... 16

3-1 Theory of operation ...................................................................................................... 16

3-2 Calibration procedure................................................................................................... 21

3-3 Response Adjustment ................................................................................................. 21

3-4 Rangeability ............................................................................................................... 21

Section 4 MAINTENANCE AND TROUBLE SHOOTING............................................................. 22

4-1 General ............................................................................................................... 22

4-2 Disassembly and Assembly ........................................................................................ 22

4-3 Trouble shooting Guidelines ........................................................................................ 23

Section 5 PARTS LIST ............................................................................................................... 25

5-1 General ............................................................................................................... 25

5-2 Service Tools ............................................................................................................... 26

Section 6 Modellist ............................................................................................................... 27

Section 7 CE Certification ......................................................................................................... 28

Section 8 Safety Instructions .................................................................................................... 33

Appendix A ATEX Certification(EEx nA II T4).............................................................................. 38

ATEX Certification (EEx d IIB T6...T4) ..................................................................... 39

Contents

Flomega, Liquid MFC’s/MFM’s

Figure Page Number Number

1-1 Dimensions .................................................................................................................................... 9

2-1 Standard and EEx nA execution .................................................................................................... 13

2-2 Pin Function................................................................................................................................... 13

2-3 Eex d. execution ............................................................................................................................ 13

2-4 Pin Wire Color Function ................................................................................................................. 13

3-1 Measurement Principle 5891.......................................................................................................... 16

3-2 Measurement Principle .................................................................................................................. 17

3- 3 Principle Mass Flow Controller....................................................................................................... 18

3-4 Jumper Settings for Flomega ......................................................................................................... 20

3-5 Jumper Settings for Flomega ......................................................................................................... 20

5-1 Flomega spare parts ...................................................................................................................... 26

Table Number

5-1 Spare Parts list .............................................................................................................................. 25

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

1-1 Purpose

The Brooks models 5881/5882 Flow Controllers are a mass flow measurement devices designed for accu rately measuring and controlling flows of liquids. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5881/5882 Mass Flow Controllers and 5891/5892 Flow Meters. This manual is organized into six chapters:

1. Introduction

2. Installation

3. Operation

4. Maintenance

5. Replacement parts

6. Modellist

It is recommended that this manual be read in its entirety before attempting to operate or repair.

1-2 Description

Section 1 Introduction

Flomega, Liquid MFC’s/MFM’s

The Brooks models 5881/5882 consist of three basic units: a flow sensor, a control valve and an integral electronic control system. Designed to operate at +15 Vdc or +24 Vdc, the models 5881/5882 monitor and maintain a stable mass flow relatively independent of pressure and temperature variations.

Standard features include: a. Thru-flow (patented) design of the sensor b. In-line type control valve c. Soft start d. Valve override e. Low command valve inhibit f. Flow output limiting g. Temperature of heater output h. Field adjustable orifice

1-3 Performance Specifications

Accuracy incl. linearity ± 0.5% full scale measured at calibration conditions Process temperature effects ± 0.03% F.S./°C Ambient temperature effects ± 0.1 % F.S./°C

Repeatability

Applicable flowrange

Models from 100% to 50% of max. f.s. less than 50% of max. f.s. 5881/91 ± 0.2% of rate ± 0.2% f.s.* 5882/92 ± 0.2% of rate ± 0.4% of rate

* The measured repeatability is (technically) limited by the current calibration method using an highly accurate balance (weighscale)

Section 1 Introduction

Flomega, Liquid MFC’s/MFM’s

Specification

Flowranges

Brooks FLOMEGA

Models Min. full scale Flowrate* Max. full scale Flowrate* Units PED Module Category 5881/91 15** 100 gr/hour S.E.P.

5882/92 200 1000 gr/hour S.E.P.

* To be specified at ordering (factory selectable) (water equivalent flowranges) ** Down to 15 gr/hour minimum full scale is possible

@ ± 1% f.s. accuracy and ± 0,4% f.s. repeatability Flowranges from > 30 gr/h are within specified accuracy

Rangeability 50:1 Viscosity limits Up to 200 cP (limited by max. diff. pressure) Ambient temperature range 0 - 65°C Process temperature range 0 to 100°C (Model 5882/92: max. 90°C) Pressure limits 100/400 bar versions Max pressure difference • Model 5881: 20 bar • Model 5882: 40 bar Pressure drop sensor • Model 5891: 10 mbar @ 100 gram/hour water

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

• Model 5892: 150 mbar @ 1000 gram/hour water

Setpoint input/Flow signal output 0 (4) -20 mA*, or 0-5Vdc* Power supply + 15Vdc or 24Vdc* ± 10% max. current 660 mA Warm-up time Performance within specifications: 60 minutes

(Within ± 1.5% F.S. accuracy: 15 minutes)

Response time (to within 2% of final value for a 2-100% command change, at a constant

operating pressure)

• Models: 5881/91: 5 seconds • Models: 5882/92: 7 seconds

Mounting insensitivity Not affected by mounting position* Certification • A TEX Zone I, II 2 GD KEMA 03 A TEX2036

CE 0344 EEx d IIB T6...T4 T100°C (IP 66) Temperature Class Process Temperature T6 < 75°C T5 75 - 85°C T4 85 - 100°C

Per: EN 50014:1997 +A1 + A2

EN 50018:2000 + A2 EN 50281-1-1:1998 + A1

• A TEX Zone 2, II 3 GD KEMA 99 A TEX3626

EEx nA II T4 T75°C (IP65) Per: EN 60079-15:2003

EN 50281-1-7:1998+A1

* To be specified at ordering

Physical specifications

Mechanical connections • St andard: 1/16” or 1/8” tube connections

• Optional: ¼” tube compression, ¼” NPT (F), or ¼”B.VCO fittings

Inlet filter Material: stainless steel Mess size: 40 micron Materials of construction • All wetted materials: stainless steel. For seals: Viton, PTFE, EPDM,

Buna or Kalrez

• All st ainless steel construction (including welded adapters) for

SANIT ARY sensor

Housing materials Cast aluminium Electrical connections 12-pole circular connector Weight less than 3.5 kg

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Section 1 Introduction

Flomega, Liquid MFC’s/MFM’s

When EEx d IIB T4...T6 required, please contact factory for detailed dimensional drawing.

Connections A A with filter

5/16” - 24 UNF 143,5 mm 175 mm 1/16” Tube Compression 176,5 mm 208 mm 1/8” Tube Compression 188 mm 220 mm 1/4” Tube Compression 188 mm 220 mm 1/4” NPT(F) 208 mm 240 mm

Figure 1-1 Dimensions

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

2-1 General

This section contains the procedures for the receipt and installation of the instrument. See Section 1 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented.

2- 2 Receipt of Equipment

When the instrument is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability . A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine S treet P.O. Box 903 Hatfield, PA 19 440 USA T oll Free (888) 554-FLOW (3569) T el (215) 362-3700 Fax (215) 362-3745 E-mail: BrooksAm@EmersonProcess.com www.BrooksInstrument.com

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku 6718 WX Ede, Netherlands T okyo, 136-0073 Japan P.O. Box 428 Tel 011-81-3-5633-7100 6710 BK Ede, Netherlands Fax 01 1-81-3-5633-7101 T el 31-318-549-300 Email: BrooksAs@EmersonProcess.com Fax 31-318-549-309 E-mail: BrooksEu@EmersonProcess.com

Remove the envelope containing the packing list. Carefully remove the instrument from the packing case. Make sure spare parts are not discarded with the packing materials. Inspect for damaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is recommended that the equipment be stored in accordance with the following:

a. Within the original shipping container. b. Stored in a sheltered area, preferably a warm, dry , heated warehouse. c. Ambient temperature of 70° F (21° C) nominal, 109° F (43° C) maximum,

45° F (7° C) minimum.

d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is “as received”.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

2- 4 Return Shipment

Prior to returning any instrument to the factory visit the Brooks website www.BrooksInstrument.com for a Return Materials Authorization Number (RMA#), or contact one of the following locations:

Brooks Instrument

407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA T oll Free (888) 554-FLOW (3569) T el (215) 362-3700 Fax (215) 362-3745 E-mail: BrooksAm@EmersonProcess.com www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku 6718 WX Ede, Netherlands T okyo, 136-0073 Jap an P.O. Box 428 Tel 011-81-3-5633-7100 6710 BK Ede, Netherlands Fax 011-81-3-5633-7101 T el 31-318-549-300 Email: BrooksAs@EmersonProcess.com Fax 31-318-549-309 E-mail: BrooksEu@EmersonProcess.com

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

Instrument must have been purged in accordance with the following:

All flow instruments returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination St atement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. Copies of these forms can be downloaded from the Brooks website www.BrooksInstrument.com or are available from any Brooks Instrument location listed above.

2- 5 Transit Precautions

T o safeguard the instrument against transportation damage, it is recommended to keep the instrument in its factory container until ready for installation.

2-6 Removal from Storage

Upon removal of the instrument from storage, a visual inspection should be conducted to verify its "asreceived" condition. If the instrument has been subject to storage conditions in excess of those recommended (See Section 2-3), it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes.

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

2-7 In-line Filter

An in-line type 40 micron filter has been installed upstream from the flow sensor to prevent the possibility of any foreign material entering the flow sensor or control valve.

2-8 Connections

Standard, the Flomega models are supplied with adapters. Inlet and outlet thread size is 5/16”-24 UNF. Optional adapters can be supplied. 5/16”-24 to 1/16” tube compression fittings 5/16”-24 to 1/8” tube compression fittings 5/16”-24 to ¼” tube compression fittings 5/16”-24 to ¼” NPT (F) Prior to installation, make certain all piping is clean and free of obstructions. Install the piping in such a manner that permits easy removal if the instrument is to be removed for cleaning or test bench troubleshooting.

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

2-9 Precision 5V Reference

The 5881/5882 is equipped with a precision 5V reference. The reference voltage is available at terminal 1 1 (ref. to fig. 2-1) for use in conjunction with potentiometer to provide a 0-5 Vdc command.

2.10 Command Input

The command input hook-up is as follows: a. Connect the external command voltage to terminal 8, (command input) and to terminal 1 (command input return). Refer to figure 2-1.

2-11 Valve Override

The valve override function allows full opening and closing of the valve independent of the command setting. The valve override function can be accessed from terminal 12. Refer to figure 2-1. The valve override for the mass flow controller is as follows: a. To open the valve apply a volt age between +5 Vdc and +15 Vdc to the valve override terminal. (V .O.R.+) b. To close the valve apply 0 Vdc, or “common” to the valve override terminal. (V.O.R.-)

Note: For normal operation terminal 12 must be left open (floating).

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

Pin Function

1 Command Common 2 Signal output voltage 3 V alve Common 4 Current output 5 +15 Vdc to +24 Vdc supply 6 7 V alve voltage tp. 8 Command 9 Supply common 10 Signal common 1 1 Ref. output 12 Valve override

Figure 2-1 Standard and EEx nA execution

Figure 2-3, EEx d. execution

Figure 2-2

Figure 2-4

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

2-12 Installation

The Brooks (electrical/electronic) equipment bearing the CE mark has been succesfully tested to the regulations of the Electro Magnetic Compatability (EMC directive 89/336/EEC). S pecial attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable and cable connectors:

• Brooks standard supplies high quality cable(s) which meets the specifications for CE certification.

• If you provide your own signal cable you should use a cable which is overall completely screened with

at least 100% shield.

Cable connectors used should be made from metal and cable glands should either be metal or metal shielded. The cable screen should be connected to the metal connector or gland and shielded at both ends over 360 degrees. For pin configuration, please refer to fig. 2-1 and 2-2 or 2-3 and 2-4.

The cable entry device for the Ex Proof execution, shall be in type of explosion protection flameproof enclosure “d”, suitable for the conditions of use and correctly installed. The minimum ingress protection requirement of IP 6X according to EN 60529 must be satisfied.

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Cables suitable for a temperature of at least 90°C shall be used.

CAUTION

When installing the controller , care should be taken that no foreign materials enter the inlet or outlet of the instrument.

Recommended installation procedures: a. The flow controller or sensor should be inspected for cleanliness or any visible external

damage after it is removed from its shipping container .

b. The FLOMEGA should be located in an atmosphere with vibration levels lower than SAMA

PMC 31.1 condition 3. c. Leave sufficient room for access to the electrical components. d. Install in such a manner that it permits easy removal if the instrument requires cleaning.

CAUTION

The models 5881/5892 can be installed in any position. However , mounting orientations other than original factory calibration position (mounting holes down) may require re-zeroing to regain the specified accuracy.

e. Accurate upstream pressure regulation is required to ensure proper valve control operation.

Piping should be sized to avoid excessive pressure drops. It is recommended to install the controller in

a vertical-upwards position. This installation position will release the entrained gas in the valve

compartment more easily . A constant higher back pressure than atmospheric pressure is also

beneficial for the stability of the control valve performance.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Note:

The control valve in the 5881/5882 provides precision control. If positive shut-off is required, it is recommended a separate shut-off valve be installed in-line.

f. The controller body is machined to accept 5/16”-24, threaded inlet and outlet fittings. Make sure that

the proper o-ring size (902) and material is used when securing the fittings.

2-13 Start-up Guidelines

CAUTION:

When used with a reactive (sometimes toxic) liquid, contamination or corrosion may occur as a result of plumbing leaks or improper purging. Plumbing should be checked carefully for leaks and purged with nitrogen before use. (Refer to step a.)

Section 2 Installation

Flomega, Liquid MFC’s/MFM’s

a. After the flow controller has been installed in the flow system and the connecting cable attached (refer

to fig 2-1), apply power, set the command to 100%, and purge the controller with liquid to a minimum of 15 minutes or give V .O.R. + for some minutes. This is most important if the process liquid cont ains elements which will react with air components to form corrosive or precipitative mixtures. It will also preserve the accuracy and life of the controller. This purge should also be performed when a controller is being removed from an active, corrosive, or toxic process liquid line.

b. Set the command to zero and block the flow downstream of the controller. W ait at least 35 minutes to

allow the flow controller to reach operating temperature. Check the output signal from the controller (pin 2) with a voltmeter. If necessary , adjust the “zero” potentiometer (accessible through cover) to set the output signal to 0 mV +/-10 mV.

Note:

An absolute zero shift may occur during normal controller operation if the ambient temperature is substantially different than the temperature when the adjustment was performed.

The “zero” output signal can be adjusted. Please don’t remove the cover. If possible the “zero” pot should be adjusted while the controller is in its normal working environment.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

3-1 Theory of Operation

(refer to figures 3-1 and 3-2)

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Figure 3-1 Measurement Principle 5891

FLOMEGA

A new thermal measurement principle is used in our Flomega. The patented thru-flow sensor is especially designed for liquids and is different from the traditional Brooks 5850 series “thermal” mass flow meters for gases. The by-pass or shunt technique used for gases cannot be applied for liquids; viscosity variations, air bubbles, convection and attitude sensitivity deteriorates the performances dramatically . Therefore, Brooks Instrument developed Flomega. This thru-flow meter is unique in its patented design, performance and reliability.

In the new sensor, the heat transfer to and from the liquid is perpendicular to the pipe axis contrary to classic way of heat transfer along the pipe wall. This technique enables a high heat current to and from the liquid, which is essential for a thru-flow sensor. Using thermal feedback reduces power consumption to a minimum. Figure 3-1 shows the lay-out of the sensor. The temperature difference between heater and bottom of the sensor is regulated to a constant of 10 or 20 °C. To ensure a constant heat-gradient (linearity) along the tube, a high conductive strip (guideline) is added. A fixed conductance from the pipes to the guideline is realized with a so-called interface material. The temperature T1 - T2 reflects the heat current to and from the liquid. As can be seen, T1 - T2 is proportional to the liquid flow thru the sensor and the heat-gradient at T1, T2.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

As with relative high flows more heat-current is involved, the thermal “lag”of the fluidum increases. Also the decreasing operation of the guideline reduces the outstanding performance of the device.

For flows up to 1000 g/h, the design has been changed to overcome above mentioned problems. The guideline is left out to reduce the thermal lag effects. Since the heat-gradient now varies with flow , two extra sensors (T5 and T6) are added to measure the heat-gradient at T1, T2 (see figure 3-2). With this technique, flows up to 1000 g/h can be measured with high accuracy . This new technique is used in models 5882/5892. The FLOMEGA model 5881/82 liquid mass flow controller consists of the same unique sensor design. In addition, an in-line control valve and control electronics are included. This control valve differs from the traditional Brooks series 5850 mass flow controllers for gases. In the latter, exp ansion of the flow in the control valve compartment may lead to outgassing of the fluid and influences the controllability of the mass flow controller easily . A manual degassing of the valve would be required. Therefore, Brooks Instrument developed an in-line control valve especially designed for accurately controlling the liquid flowrates. Dead volumes in the flow path have been eliminated as much as possible to ensure troublefree operation. For easy maintenance, the valve orifice is field adjustable.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

Figure 3-2 Measurement Principle

Electronics (see figure 3-3)

There are two control sections in the electronics, one for creating a temperature difference between top and bottom of the sensor (upper part of block diagram) and one for controlling the valve. The signal gene rated by the temperature elements T1 and T2 are amplified in such a way that 100% of the customer’s flowrate equals 100% full scale output. This amplification has a three switch selectable coarse adjustment and one potentiometer for fine tuning. Using the temperature difference of T5 and T6 (5882/92) the output is corrected by the heat-gradient. For rapid response output this amplified signal is applied to a “D” action. A comparison amplifier compares the output signal with the customer adjusted setpoint value and will drive the valve to the desired value via a P .I.D. action. For specific fluidum which requires a one time linearisation, a network is created that linearises the sensor’s output signal. A voltage to current converter is added to provide a 0-20 mA or 4-20 mA output.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Figure 3-3 Principle Mass Flow Controller

MODEL 5881/91 ELECTRONIC FEA TURES (see figure 3-4)

The Flomega model 5881 liquid mass flow controller and model 5891 liquid mass flow meter has a number of features which are customer selectable (by jumper setting) or adjustable (by potentiometer). These are:

a. Volt age or current setpoint

This is jumper selectable. For 0-5 Vdc setpoint insert jumpers J9, J10 and J1 1 to position “0”. For 0-20 mA setpoint insert jumper J9 to position “X” and jumpers J10 and J1 1 to position “0”. For 4-20 mA setpoint insert jumper J9, J10 and J1 1 to position “X”.

b. 0-20 mA or 4-20 mA output

This is jumper selectable. For 0-20 mA output insert the jumpers J6 and J7 to position “X” and jumper J8 to position “0”. For 4-20 mA output insert jumpers J6 and J7 to position “0” and jumper J8 to position “X”. 0-5 Vdc output is always available. Volt age output: 6, 7, 8 “0”.

c. Proportional gain

By adjusting potentiometer P4, the proportional gain can be changed. This will enable you to optimize your response.

d. Valve Over Ride

When applying +5 Vdc to +15 Vdc on pin number 12 of the connector, the valve is commanded to the fully open position independent of the setpoint. When applying -15 Vdc to 0 Vdc on pin number 12 of the connector, the valve is commanded to the closed position independent of the setpoint.

Note:

Excessive high flowrates, around ≥ 200% full scale setting, may produce a decreasing output signal.The output signal is limited up to 6.8 Vdc and 24 mA.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

MODEL 5882/92 (see figure 3-5) ELECTRONIC FEA TURES

The Flomega model 5882 liquid mass flow controller and model 5892 liquid mass flow meter has a number of features which are customer selectable (by jumper setting) or adjustable (bypotentiometer). These are:

a. Volt age or current setpoint

This is jumper selectable. For 0-5 Vdc setpoint insert jumper J5 to position 2-3 and jumper J7 to position 2-4. For 0-20 mA setpoint insert jumper J5 to position 2-3 and jumper J7 to position 2-3. For 4-20 mA setpoint insert jumper J5 to position 1 1-2 1-2 and jumper J7 to position 1-2.

b. 0-20 mA or 4-20 mA output

c. Soft start

T o enable soft st art feature insert jumper J6 to position 2-3

d. Artificial zero

T o enable this feature insert jumper J14 to position 1-2. When flow signal is less than 1%, output is command to zero, i.e. 0 V and 0 mA or 4 mA.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

e. Output damping

The output can be dampened out by adjusting potentiometer P8. It can be adjusted between a RC-time of 0.1 sec. to 10 sec.

f. Proportional gain

By adjusting potentiometer P4, the proportional gain can be changed. This will enable you to optimize your response.

g. Valve Over Ride

When applying -15 Vdc to 0 Vdc on pin number 12 of the connector, the valve is commanded to the closed position independent of the setpoint.When applying +5 Vdc to +15 Vdc on the same pin, the valve is commanded to the fully open position independent of the setpoint.

Note:

Excessive high flowrates, around output signal is limited up to 6.8 Vdc and 24 mA.

h. Temperature heater output

On pin no. 6 of the connector, the output volt age can be monitored which reflects the temperature of the heat source. This can be used for monitoring or alarm purposes in case liquids are used which are limited regarding the warm-up temperature.

≥≥

≥200% full scale setting, may produce a decreasing output signal. The

≥≥

Note:

The electronics are executed with a temperature limiter for the heater. When this temperature is reached, the heating circuitry is switched off.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Figure 3-4 Jumper Settings for Flomega

Figure 3-5 Jumper Settings for Flomega

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

3-2 Calibration Procedure

Note:

Calibration of the Flomega models requires the use of the digital voltmeter (DVM), and an accurate calibration standard. It is recommended that calibration be performed only by trained and qualified service personnel.

a. Install the Flomega in the flow calibration system. Apply power , open downstream shut-off valve,

apply line pressure, and set command voltage to 100%, or apply V .O.R.+ for some minutes. Allow flow controller to purge with the calibration liquid for approximately 15 minutes.

b. Set command voltage to 0% and close downstream shutt-off valve. Allow the controller to warm up

for an additional 20 minutes.

c. Reference (REF) adjustment: Connect DVM Positive lead to pin REF and negative lead to the

Common. Adjust REF (P1) for 5 Vdc ± 1 mV. d. Zero adjustment: Connect DVM positive lead to OUTPUT . Adjust zero for 0 mV ± 10 mV . e. Command 100% flow. W ait 5 minutes. f. With command at 100%, use the calibration standard to measure the mass flow rate. Adjust span

until the measured flow rate is within 0.5% of the desired flow rate. g. Set command to 0% and close the downstream shut-off valve. Wait approximately 10 minutes for

the output signal to stabilize. Adjust zero for 0 mV ± 10 mV. Open downstream shut-off valve. h. Command 50% flow. W ait 5 minutes and measure the flow rate with the calibration standard.

Section 3 Theory of Operation

Flomega, Liquid MFC’s/MFM’s

3-3 Response Adjustment

a. Make a step-in command to the controller from 2 to 100% of full scale flow and record the output

signal.

b. If the output signal shows more than 10% overshoot or oscillate; adjust proportional gain. If the

signal does not show overshoot, but is not within 2% of final value after the response specification;

adjust proportional gain the other way around.

c. Repeat steps a. and b. until the response output signal meets the specification.

3-4 Rangeability

The 5881/5882 is designed to control mass flows from 2 to 100% of the specified full scale flowrate. This at an inlet pressure up to 100 or 400 bar (see pressure rating of your Flomega) and a maximal differential pressure of 40 bar (5881: 20 bar). Operation at other inlet or differential pressures is possible as long as certain guidelines are observed. If a controller is operated with a process liquid other than its calibration liquid, a scale shift can occur in the relationship between the output signal and the mass flowrate.

Section 4 Maintenance

Flomega, Liquid MFC’s/MFM’s

4-1 General

No routine maintenance is required to be performed on the models 5881/5892 other than occasional cleaning. It is recommended a non-residual solvent be used for cleaning the flow sensor and control valve. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned.

4- 2 Disassembly and Assembly

It is important that this instrument be serviced only by properly trained and qualified personnel. Proper purging techniques should be followed before removing the flow controller from a system.

a. Electronic disassembly

1. Remove the four screws from the top of the cover and remove cover.

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

W ARNING:

CAUTION!

Gasket for assuring IP65 protection should be handled carefully .

2. Remove the four screws which hold the pc-board assembly and gently pull the board from the base.

3. Disconnect the valve, output cable and sensor cable connector, from pc-board.

4. T o reassemble, follow the above step s in reverse order.

b. Internal disassembly

1. Remove the insulation from the sensor assembly.

2. Remove the inlet and outlet connections.

3. Unscrew the 3 screws which hold the whole ssembly, two are located at the outlet body and one just above the inlet body .

4. Gently pull the whole assembly from the base.

CAUTION!

By this operation the IP65 seal will be broken and has to be restored after assembly.

5. T o reassemble, follow the above step s in reverse order. T o assure IP65 protection a layer of silicone must be laid inside and between the inlet/outlet holes of housing and body . Be sure a good thermal contact is obtained between copper heatsink and housing.

c. Valve disassembly

1. Unscrew the four high tensile allen head key screws.

2. Gently pull the outlet body from the valve assembly, take care of the o-ring.

3. Remove o-ring from valve stem, before removing the coil assembly and adapter plate and pull gently the valve stem out of the body , take care of the o-ring.

4. T o reassemble, follow above steps in reverse order . Apply 3.5 Nm force to the screws (1) in a digit al pattern.

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

d. Orifice disassembly

1. Use a screwdriver to remove the orifice through the process connection from the outlet body.

2. Take care of the o-ring.

3. Apply Nitrogen gas flow at 2 bar inlet pressure.

4. Screw the orifice in the outlet body and adjust till 0% output signal has been reached again.

5. Check if value opens at 5-7 Vdc. if not, adjust orifice (final turn: clock wise).

4-3 Trouble Shooting Guidelines

Flomega, Liquid MFC’s/MFM’s

Section 4 Maintenance

W ARNING:

Service and troubleshooting should be performed only by personnel who have been trained in safe repair procedures who have thoroughly read this manual.

General

Before applying power, remove cover of the housing and check jumper setting (see calibration sheet), and make sure that the valve connector has been fixed correctly (Controller only .) After applying power , wait at least 35 minutes to allow the unit to warm up.

TROUBLE SHOOTING

SYMPTOM POSSIBLE CAUSE REMEDY No signal 1a) No power Check power / wiring

1b) Electronic failure Return to factory

Controller indicates 2a) Liquid source is empty Check in-line filters, liquid zero flow, regardless or blocked supply . Shut-off valve etc. of command 2b) Supply pressure too high Lower supply pressure

or differential pressure too high 2c) VOR input is -15 to 0 Vdc Determine undesirable voltage at VOR input 2d) V alve clogged Remove, clean and adjust orifice. (valve voltage will increase See 6a. to max.)

2e) V alve seat not compatible Choose correct valve seat with liquid (valve voltage max.) material (consult factory) 2f) Electronic failure Return to factory

Output controller 3a) Pressure diff. too low/ Increase pressure diff., clean much lower than in-line filter contaminated, filter/sensor/valve (6a) setpoint sensor/valve clogged

Section 4 Maintenance

Flomega, Liquid MFC’s/MFM’s

SYMPTOM POSSIBLE CAUSE REMEDY Output signal 4a) VOR input at +5V to +15V Determine cause of this undesirable input

remains at maximum

4b) Flow too high because Clean orifice or valve. Adjust orifice according of leakage of the valve to 6a (valve voltage min)

Oscillation 5a) Unstable upstream/ Check pressure regulator

downstream pressure control 5b) Differential pressure Power pressure or change prop. gain

too high 5c) Gas is valve compartment Purge system: VOR+ (2 minutes)

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

or 100% setpoint (15 minutes)

5d) Very low viscosity and/or Change prop. gain. Decrease gain high density of liquid (compared with water) 5e) Outgassing of liquid Max. temp. of liquid close to boiling point.

Choose proper liquid delivery system. Vertical position is recommended. Apply higher back pressure, proper pressurising gas

Low flow at zero 6a) V alve leakage Adjust orifice (turn C.W.), valve should open setpoint at 5V-7Vdc (1 bar dif f. pressure)

Output is fluctuating 7a) Pulsation because Apply damping (potmeter P8)

of pump

Output is stable but 8a) VOR+ has been used Shut valve and wait 20 minutes flow is too high too long

Section 5 Parts List

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

5-1 General

Refer to figure 5-1 and table 5-1 to order replacement parts.

Ref. Quant. Description Part No. No. Req.

1 1 Washer 964-E-019-ACK 2 1 Coil Assembly 185-Z-131-ZZZ 3 4 Screws 760-Z-052-ACA 4 1 Shassis Connector 207-G-008-ZJK 5* 1 Valve O-ring Buna-N 375-B-016-SUA

Viton 375-B-016-QT A Teflon 375-B-016-QMA

6 1 Stem Assembly 839-Z-040-AAA

Section 5 Spare Parts

Flomega, Liquid MFC’s/MFM’s

7 1 Plunger Assembly 622-Z-1 19-AAA 8 1 Lower Guide S pring 820-Z-076-BBA 9* 1 V alve Seat Viton 715-Z-245-AAA

Buna-N 715-Z-246-AAA

Kalrez 715-Z-162-AAA 10 1 Orifice 577-Z-151-BMT 1 1* 1 Orifice O-ring Buna-N 375-B-006-SUA

Viton 375-B-006-QT A

Kalrez 375-B-006-TTA 13 1 PC Board Assembly for model 5881/91 097-B-251-ZZZ 13 1 PC Board Assembly for model 5882/92 097-B-219-ZZZ 14 1 Cable Connector 207-F-014-ZJK 15* 1 O-ring Buna-N 375-B-003-SUA

Viton 375-B-003-QT A

Kalrez 375-B-003-TTA 17* 1 O-ring Buna-N 375-B-010-SUA

Viton 375-B-010-QT A

Teflon 375-B-010-QMA 18 1 Cover 442-B-088-EAD 19* 1 Gasket 375-E-109-TDA 23 2 O-ring Viton 375-B-902-QTA

Buna-N 375-B-902-SUA

Teflon 375-B-902-QMA

Table 5-1 * Recommended Spare Parts

Section 5 Spare Parts

Flomega, Liquid MFC’s/MFM’s

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Figure 5-1

5- 2 Service T ools

- Slotted head screwdriver

- Tweeker

- Allen head key wrench

- Syringe with silicon

- T orque wrench (3.5 N.m.)

Flomega spare parts

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

FLOMEG 5881/91 - 5882/92

BASE MODEL NUMBE

5881/D MASS FLOW CONTROLLER (MAX. 100 GRAMS/HOUR WATER EQUIVALENT) 5891/D MASS FLOW METER (MAX. 100 GRAMS/HOUR) 5882/D MASS FLOW CONTROLLER (MAX. 1000 GRAMS/HOUR WATER EQUIVALENT) 5892/D MASS FLOW METER (MAX. 1000 GRAMS/HOUR)

1A ST ST./VITON 1B ST.ST/BUNA 1C ST.ST/PTFE (STAKED KALREZ VALVE SEAT AND SENSOR O-RINGS) P>14 BAR 1D ST.ST/PTFE (MOULDED KALREZ VALVE SEAT AND SENSOR O-RINGS) P<14 BAR 1E ST.ST/KALREZ (MOULDED KALREZ VALVE SEAT) P<14 BAR 1F ST.ST/KALREZ (STAKED KALREZ VALVE SEAT) P>14 BAR 9Z SPECIFY

1 100 BAR 214 BAR 3 400 BAR 9 SPECIFY

A 4-20 mA B 0-20 mA C0-5 Vdc Z SPECIFY

1 5/16" - 24 UNF THREADS 2 1/16" - TUBE COMPRESSION FITTINGS (ONLY 5881/5891) (MAX. 100 BAR) 3 1/8" - TUBE COMPRESSION FITTINGS (MAX. 400 BAR) 4 1/4" - TUBE COMPRESSION FITTINGS (MAX. 400 BAR) 5 1/4" - NPT(F) (MAX. 400 BAR) 6 1/4" - VCO FITTINGS FOR SANITARY SENSOR ONLY (MAX. 400 BAR) 7 1/4" VCR (MAX. 100 BAR) 9 SPECIFY

0NONE A WEATHERPROOF MATING CONNECTOR B 3 m. INTERCONNECTION CABLE ** C 6 m. INTERCONNECTION CABLE **

Z SPECIFY

0 NONE (=WITH "BROOKS" LABELS) 4 SANITARY SENSOR PROVIDED WITH 1/4" VCO FITTINGS *

5891/D1A 1A 3A 00 1 = TYPICAL MODEL NUMBER

ACCESSORIES & OPTIONS:

* INTERCONNECTION CABLE, ADD PER METER

DESCRIPTION

MATERIALS OF CONSTRUCTI ON

RATINGS

INPUT/OU TP UT SIGNALS

MECHANICAL C ONNE CTIO NS

INTERCONNECTI ON CABLE

** THIS CABLE IS PROVIDED WITH A MATING 15-PINS D-TYPE CONNECTOR FOR CONNECTION WITH THE READ-OUT ELECTRONICS, 19" RACK 0152/0154 MODELS.

OPTIONS

* SEE NOTES

EX-PROOF

0NONE

ATEX ZONE I (EEx d IIB T4 ... T6)

D F ATEX ZONE II (EEx nA II T4)

POWER SUPPLY INPUT

0+15 Vdc 1+24 Vdc

Section 6 Modellist

Flomega, Liquid MFC’s/MFM’s

Notes:

1. FLOMEGA SANITARY SENSOR WITHST ANDS STERILIZA TION CONDITIONS I.E. MAX. 130°C, MAX. 30 MINUTES WITHOUT POWER SUPPL Y CONNECTED TO THE FLOMEGA.

2. FOR READ OUT AND CONTROL ELECTRONICS, PLEASE REFER TO THE MODELS 0152/0154.

Section 7 CE Certification

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

Flomega, Liquid MFC’s/MFM’s

Dansk

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning. Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 80% dækning.

Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten være af metal eller metal skærmet. Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader. Skærmen bør være forbundet til jord.

“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 80% ækning. Skærmen bør være forbundet til jord.

Deutsch

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen. Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

April, 2008

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung. Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine 80 %igenSchirmababdeckung des Kabels gewährleistet ist.

· „D“ oder „Rund“ -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen. Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschirmung verwendet werden. Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von 360 ° anzuschließen. Die Abschirmung ist mit dem Erdpotential zu verbinden.

Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 80 %igen Schirmababdeckung zu verwenden. Die Abschirmung ist mit dem Erdpotential zu verbinden.

English

All Brooks (electrical/electronic) equipment bearing the CE mark has been successfully tested in accordance with the Electromagnetic Compatibility regulations (EMC directive 89/336/EEC). However, special care is required when selecting signal cables to be used with equipment bearing the CE mark.

Quality of signal cables, cable glands and connectors:

Brooks supplies high quality cabling that meets the specifications for CE certification. However, if you wish to use your own signal cable, you should select one that is fully screened with at least 80% shielding.

Any ‘D’ or ‘Circular’ type connectors used should be screened with a metal shield. If applicable, metal cable glands must be used to clamp the cable shielding. The cable shielding should be connected to the metal shell or gland, and have 360° shielding at both ends. The shielding should be connected to an earth terminal.

Card Edge Connectors are non-metallic, as standard. The cables used must be screened with 80% shielding to comply with CE certification.

The shielding should be connected to an earth terminal.

Installation and Operation Manual

Section 7 CE Certification

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Español

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magnetica (EMC directiva 89/336/EEC). Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE . Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un apantallamiento del 80%.

Cuando utilice conectores del tipo «D» ó «Circular» deberían estar protegidos con una pantalla metálica. Cuando sea posible, se deberan utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable. La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente en los 360 Grados. La pantalla deberá conectarse a tierra.

Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberan ser protegidos con un apantallamiento del 80% para cumplir con la certificación CE. La pantalla deberá conectarse a tierra.

Flomega, Liquid MFC’s/MFM’s

Français

Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE. Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 80 %.

Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre. Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre. Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à chacune de ses extrémités. Tous les blindages doivent être reliés à la terre.

Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 80% pour satisfaire à la réglementation CE.

Tous les blindages doivent être reliés à la terre.

Section 7 CE Certification

Flomega, Liquid MFC’s/MFM’s

Greek

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Installation and Operation Manual

Section 7 CE Certification

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Italiano

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC). E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 80%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le estemità. Lo schermo deve essere collegato ad un terminale di terra.

I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 80% per soddisfare la certificazione CE.

Lo schermo deve essere collegato ad un terminale di terra.

Flomega, Liquid MFC’s/MFM’s

Nederlands

Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC). Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen: Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering. Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 80%.

“D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden. Het scherm moet worden verbonden met aarde.

“Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 80% om te voldoen aan de CE certificering. Het scherm moet worden verbonden met aarde.

Norsk

Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret. Utførelse av signalkabel og tilhørende plugger:

Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering. Dersom kunden selv velger kabel, må kabel med fullstendig, 80% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet elektrisk jord. Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 80% skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

Section 7 CE Certification

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

Flomega, Liquid MFC’s/MFM’s

Português

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética (directiva CEM 89/336/EEC). Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE. Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 80%.

Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo. O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º. A blindagem deve terminar com a ligação à massa.

Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a 80% nos termos da Certificação CE.. A blindagem deve terminar com ligação à massa.

April, 2008

Installation and Operation Manual

Section 8 Safety Instructions

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Flomega, Liquid MFC’s/MFM’s

ENGLISH

IMPORT ANT SAFETY INSTRUCTIONS

This appendix contains important safety and operating instructions for use with the Thermal Mass Flow Meter / Controller Series. The instrument complies to the (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Consult local authorities as to national and/or local safety codes and any additional installation requirements.

SAFETY INSTRUCTIONS

1. Please read all instructions and cautionary markings on (1) the flowmeter and (2) all appropriate sections of the Instruction and Operating Manual before using this product.

2. WARNING: Do not operate this instrument in excess of the specifications, listed in the Instruction and Operating Manual. Failure to heed this warning can result in serious personal injury and/or damage to the equipment.

3. Please make sure that the instrument is properly connected to electrical and pressure sources.

4. OPERATION: (a) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (b) Check for leaks around the meter inlet and outlet connections. If no leaks are present, bring the system up to operating pressure.

5. WARNING: If this equipment is not properly serviced, serious personal injury and/or damage to the equipment can result from potentially high operating pressures. Please make sure that the process line pressure is removed prior to service.

6. Please make sure that original parts of Brooks are used when the device requires servicing. Note however that lookalike substitutions and procedures can affect the product’s performance and place the save operation of your process at risk. It furthermore may result in fire, electrical hazards or improper operation.

DANISH

VIGTIGE SIKKERHEDSINSTRUKTIONER

Denne instruktion indeholder vigtige oplysninger om sikkerhed og anvendelse af Brooks Thermal Mass Flow Meter / Controller Series. Instrumentet opfylder (PED) trykudstyrs CE direktivet 97/23/EC. Kontakt de lokale myndigheder for oplysning om nationale og/eller lokale sikkerhedskrav og yderligere krav i forbindelse med installationen.

SIKKERHEDSINSTRUKTIONER

1. Læs alle instruktioner samt faremarkeringer på (1) flowmeteret og (2) i alle relevante sektioner af instruktions- og brugervejledningen før instrumentet tages i brug.

2. ADVARSEL: Anvend ikke dette instrument udover de specifikationer, som er angivet i instruktions- og brugervejledningen. Manglende opmærksomhed på denne advarsel kan resultere i alvorlige personskader og/eller skader på udstyret.

3. Vær sikker på at instrumentet er korrekt tilsluttet elektrisk og mekanisk.

4. ANVENDELSE: (a) Luk langsomt flow ind i systemet. For at undgå trykstød åbnes afspærringsventilen langsomt. (b) Kontroller ind- og udgangstilslutningerne for lækager. Hvis ingen lækager findes, kan systemet bringes op på normalt procestryk.

5. ADVARSEL: Hvis vedligehold af instrumentet ikke sker som anbefalet, er der - i tilfælde af høje tryk - risiko for alvorlige skader på såvel personer som på instrumentet. Sørg derfor for at instrumentet er trykløst, før det afmonteres for service.

6. Vær opmærksom på kun at anvende originale Brooks reservedele, når instrumentet skal vedligeholdes. Bemærk at anvendelse af uoriginale reservedele kan forringe instrumentets specifikationer og dermed øge risikoen for skader. Desuden kan anvendelse af uoriginale reservedele medføre risiko for brand, elektrisk stød eller forringet virkemåde.

Section 8 Safety Instructions

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

Flomega, Liquid MFC’s/MFM’s

April, 2008

DUTCH

BELANGRIJKE VEILIGHEIDSINSTRUCTIES!

Deze appendix bevat belangrijke veiligheidsinstructies voor het gebruik van de Thermal Mass Flow Meter/ Controller Series. Deze instrumenten voldoen aan de (PED) Pressure Equipment CE Directive 97/23/EC (wet op het vervaardigen en distribueren van drukvaten binnen de Europese lidstaten). De locale authoriteiten kunnen u op de hoogte stellen van de daar geldende additionele en/of locale eisen voor installatie en gebruik.

VEILIGHEIDS INSTRUCTIES

1. Lees voor het in gebruiknemen alle instructies en waarschuwingen op de flowmeter en in de gebruikshandleiding.

2. WAARSCHUWING: Gebruik dit instrument niet buiten de in de gebruiks-handleiding vastgelegde MAXIMALE GEBRUIKS DRUKKEN. Het niet in acht nemen van deze waarschuwingen kunnen leiden tot persoonlijke verwondingen en/of beschadiging van de meetapparatuur.

3. Overtuig uzelf, vòòr het in gebruik nemen, dat het instrument volgens de geldende voorschriften is ingebouwd in de leiding en aangesloten op het (eventuele) spanningsnetwerk.

4. IN GEBRUIK NEMEN: (a) Langzaam opvoeren van de stroom in het systeem. Open de kranen langzaam om een plotselinge golfbeweging van de vloeistofstroom te voorkomen. (b) Controleer het instrument op eventuele lekkage, met name de in- en uitlaat aansluitingen. Als er geen lekkage wordt ontdekt, kan het systeem op bedrijfsdruk worden gebracht.

5. WAARSCHUWING: Nalatig onderhoud van dit instrument kan ernstig persoonlijk letsel en/of beschadiging van de meetapparatuur tot gevolg hebben. Overtuig uzelf ervan dat de procesdruk is afgevoerd alvorens onderhoud aan het instrument te plegen.

6. Overtuig u ervan dat er uitsluitend originele Brooks Instrument onderdelen worden gebruikt voor onderhoud en service aan het instrument. U wordt erop gewezen dat het gebruik van universele onderdelen en voorschriften om daar mee om te gaan, nadelige gevolgen kunnen hebben voor het gebruik van het instrument en daardoor de juiste werking van uw proces in gevaar kan komen. Zelfs kan het gebruik daarvan resulteren in brandgevaarlijke situaties, electriciteitsgevaar of onjuist functioneren.

SUOMI

TURVAOHJEET

Tämä liite sisältää tärkeitä turva- ja käyttöohjeita Brooks:Thermal Mass Flow Meter / Controller Series Instrumentit kuuluvat CE-direktiiviin (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kysy lisää paikallisilta viranomaisilta koskien kansainvälisiä ja/tai paikallisia turvakoodeja sekä muita asennusvaatimuksia.

TURV AOHJEET

1. Kaikki ohjeet ja (1) virtausmittariin kiinnitetyt varoittavat merkinnät sekä (2) manuaalin soveltuvat kohdat on luettava ennen laitteen käyttöönottoa.

2. VAROITUS: Älä käytä tätä instrumenttia yli manuaalissa mainittujen maksimiarvojen. Mikäli tätä varoitusta ei noudateta, voi seurauksena olla vakava henkilövahinko ja/tai laitteen vaurioituminen.

3. Varmista, että mittalaite on oikein asennettu sekä prosessiputkistoon että sähköisesti.

4. KÄYTTÖ: (a) Päästä paineet hitaasti järjestelmään. Avaa putkistossa olevat venttiilit hitaasti, jotta vältyttäisiin paineiskuilta. (b) Tarkista mahdolliset vuodot mittarin prosessiliittimien kohdalta. Mikäli vuotoja ei ole, nosta prosessipaine käyttöpaineeseen.

5. VAROITUS: Mikäli tätä laitetta ei huolleta asianmukaisesti, saattaa korkea käyttöpaine aiheuttaa vakavia henkilövahinkoja ja/tai laitteen rikkoutumisen. On varmistettava, että putkistopaine on poistettu huollon ajaksi.

6. Tulee varmistaa, että käyetään Brooks:in alkuperäisiä varaosia kun laite vaatii huoltoa. Huomaa että korvaavat näköisoasat sekä käsittely voi vaikuttaa laitteen toimintaan sekä saattaa prosessin riskialttiiksi. Lisäksi tämä voisi aiheuttaa palo- tai sähköisen vaaran tai toimintaongelmia.

Installation and Operation Manual

Section 8 Safety Instructions

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Flomega, Liquid MFC’s/MFM’s

GERMAN

WICHTIGE SICHERHEITSHINWEISE

Dieser Anhang enthält wichtige Hinweise für einen sicheren Betrieb des Ganzmetall-Schwebekörperdurchflussmessers der Baureihe Thermal Mass Flow Meter / Controller Series von Brooks Instrument. Das Gerät entspricht den gültigen PEDRichtlinien (PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC). Konsultieren Sie lokale Zulassungsbehörden für nationale und/oder regionale Sicherheitsbestimmungen bzw. weitergehende Installationsvorschriften.

SICHERHEITSHINWEISE

1. Bitte lesen Sie alle gekennzeichneten Sicherheitshinweise/ Warnungen auf (1.) dem Gerät und (2.) alle

entsprechenden Kapitel in der dazugehörigen Installations- und Bedienungsanleitung vor dem Betrieb des Gerätes.

2. WARNUNG: Betreiben Sie das Gerät nicht außerhalb der Spezifikationen. In der Installations- und

Bedienungsanleitung finden Sie den baugrößenspezifischen MAXIMALEN BETRIEBSDRUCK in der entsprechenden Tabelle. Bei Nichtbeachtung dieses Hinweises kann das Gerät beschädigt und/ oder zerstört werden und dies kann zu ernsthaften Verletzungen und/oder zum Tod von Personen führen.

3. Bitte stellen Sie sicher, dass das Gerät einwandfrei mit elektrischen und druckbeaufschlagten Leitungen verbunden

ist.

4. BETRIEB: (a) Lassen Sie das Gerät zu Beginn langsam durchströmen. Öffnen Sie Ventile langsam, damit Druckstöße

verhindert werden. (b) Prüfen Sie den Aufbau am Ein- und Ausgang des Gerätes auf Leckagen. Wenn Sie kein Leck

Section 7 Safety Instructionsstellen können, erhöhen Sie langsam den Systemdruck bis der gewünschte

fest Prozessdruck erreicht ist. WARNUNG: Bei unsachgemäßer Wartung des Gerätes geht von diesem aufgrund potentiell hoher Betriebsdrücke ein

hohes Sicherheitsrisiko für Personen und Material aus. Bitte vergewissern Sie sich vor Wartungsarbeiten, dass die Leitungen drucklos sind.

6. Verwenden Sie ausschließlich Original-Ersatzteile von Brooks Instrument für die Wartung und Reparatur von Geräten.

Verwendung von Fremdfabrikaten oder Nachbildungen kann die Leistung des Gerätes einschränken und die Betriebssicherheit aufheben. Fehlfunktionen und gefährliche Betriebszustände können weitere Folgen sein.

FRENCH

INSTRUCTIONS IMPORT ANTES DE SECURITE

Cet appendice contient des instructions importantes de sécurité pour l’utilisation du Thermal Mass Flow Meter / Controller Series. Cet instrument est conforme aux nouvelles directives PED “PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC”.

INSTRUCTIONS

1. Veuillez bien lire toutes les instructions, remarques et avertissements (1) sur l’appareil et (2) dans le manuel d’installation, d’utilisation et d’entretien.

2. AVERTISSEMENTS: Ne pas utiliser cet instrument en dehors des caractéristiques de fonctionnement spécifiées dans le manuel d’instructions. Dans le cas contraire, le personnel risque de se blesser grièvement et/ou d’endommager le matériel.

3. S’assurer que l’appareil est bien relié électriquement et soumis à une pression de travail.

4. OPERATION: (a) Lorsque l’installation du débitmètre dans la canalisation est achevée. La mise en débit du débitmètre doit être exécutée progressivement en ouvrant doucement le vanne de régulation afin d’éviter tout sur débit (b) Vérifier que les raccordements d’entrée et sortie soient parfaitement étanches (sans fuite), puis mettre sous pression de travail.

5. AVERTISSEMENT: Lors d’interventions d’entretien, bien s’assurer que la pression dans la canalisation est proche de zéro. Dans le cas contraire, le personnel risque de se blesser grièvement et/ou d’endommager le matériel.

6. Bien s’assurer que les pièces d’origine Brooks sont utilisées pour des interventions d’entretien. Des pièces de substitution pourraient affecter les performances de l’appareil et engendrer de graves disfonctionnements.

Section 8 Safety Instructions

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

Flomega, Liquid MFC’s/MFM’s

April, 2008

NORSK

VIKTIG SIKKERHETS INSTRUKS

Dette tillegget inneholder viktige sikkerhets og drifts instruksjoner for bruk av Brooks metall rør mengde måler Thermal Mass Flow Meter / Controller Series. Instrumentet tilfredstiller (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kontakt lokale myndigheter for nasjonale eller lokale sikkerhetskoder og andre installasjonskrav.

SIKKERHETS INSTRUKS

1. Les alle instruksjoner og sikkerhetsanmerkninger for (1) mengde måleren (Flow meteret) og (2) alle aktuelle seksjoner av instruksjons manualen før bruk av produktet.

2. ADVARSEL: Bruk ikke dette instrumentet utover de spesifikasjonene som er gitt I instruksjons boken. Dersom advarslene ikke følges kan det resultere i alvorlig personskader og/eller ødeleggelse av utstyret.

3. Kontroller at instrumentet er skikkelig koblet både elektrisk og mekanisk.

4. DRIFT: (a) Start forsiktig. Ventilen åpnes langsomt for å unngå strømning sjokk. (b) Kontroller at det ikke erlekkasjer rundt målerens inn- og utløpstilkoblinger. Dersom det ikke er synlige lekkasjer kan ventilen åpnes til fullt operasjonstrykk.

5. ADVARSEL: Dersom utstyret ikke blir riktig vedlikeholdt kan det føre til alvorlige personskader og/eller skade på instrumentet på grunn av potensielle høye trykk. Påse at prosesstrykket er avlastet før utstyret demonteres.

6 Bruk alltid Brooks original deler ved service. Merk at selv om erstatningene ser like ut kan de påvirke produktets

virkemåte og gjøre prosessen usikker. Det kan videre føre til brann, elektrisk risiko eller feil virkemåte.

IT ALIAN

IMPORT ANTI ISTRUZIONI PER LA SICUREZZA

Questa appendice contiene importanti istruzioni sia per la sicurezza che per l’uso corretto degli flussometri metallici della Brooks Instrument B.V. della Thermal Mass Flow Meter / Controller Series. Questi strumenti seguono la normativa (PED) Direttiva CE 97/23/EC per gli strumenti in pressione. Consultare le autorità locali per i codici di sicurezza nazionali/internazionali e per ulteriori norme di installazione.

ISTRUZIONI DI SICUREZZA

1. Prima di utilizzare il prodotto leggere attentamente tutte le istruzioni ed I marchi di sicurezza applicati sui flussimetri

(1) e Appendici relative delle istruzioni e del manuale operativo (2).

2. ATTENZIONE: Non utilizzare questo strumento oltre I limiti massimi delle specifiche elencate sia nelle istruzioni

per l’uso che nel manuale operativo. La mancata osservanza di tali istruzioni potrebbe causare il rischio di lesioni personali e/o al danneggiamento dello strumento stesso.

3. Controllare che lo strumento sia correttamente collegato alle fonti di pressione che a quelle elettriche.

4. ISTRUZIONI OPERATIVE: (a) Lentamente procedere ad aprire il flusso allo strumento. Aprire lentamente le valvole

di processo dello strumento per evitare picchi di pressione. (b) Controllare l’assenza di perdite sia sui raccordi di entrata che in quelli di uscita dello strumento. Se non si riscontra alcuna perdita, portare lo strumento alla pressione di esercizio.

5. ATTENZIONE: Se allo strumento non viene fatta regolarmente una corretta manutenzione, alle alte pressioni

potrebbero verificarsi lesioni personali e/o danni allo strumento. Assicurarsi che la pressione di processo sia stata tolta laddove si necessiti effettuare una manutenzione.

6. Assicurarsi che siano utilizzate solo parti originali nella manutenzione degli strumenti. Si fa notare che la

sostituzione con parti compatibili e la manutenzione effettuata non seguendo le procedure del fornitore, posso provocare alterazioni nelle prestazioni dello strumento ed alterare lo stato di sicurezza delle Vs. linee di processo. Ancor più potrebbe provocare rischi di incendio, rischi elettrici o far risultare errati i processi in corso.

Installation and Operation Manual

Section 8 Safety Instructions

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Flomega, Liquid MFC’s/MFM’s

SWEDISH

VIKTIG SÄKERHETSINFORMA TION

Denna bilaga innehåller viktig information om säkerhet och handhavande vid installation och användande av Brooks Flödesmätare i Thermal Mass Flow Meter / Controller Series. Instrumentet är i överensstämmande med (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kontakta de lokala myndigheterna angående eventuella nationella föreskrifter och ytterligare föreskrifter angående krav på riktig installation.

SÄKERHETS INSTRUKTION

1. Läs alla instruktioner och varningsföreskrifter på (1) flödesmätaren och (2) alla aktuella avsnitt i Instruktion - och handhavande manualen innan produkten tas i drift.

2. VARNING! Använd inte detta instrument utanför de angivna specifikationerna, som anges i Instruktion - och handhavande manualen. Att ej beakta denna varning kan resultera i alvarlig personskada och/eller skada på utrustningen.

3. Vänligen kontrollera att instrumentet är rätt inkopplat elektriskt och mekaniskt med avseende på elektrisk spänning och aktuellt tryck.

4. Vid igångsättning: (a) Släpp långsamt på aktuellt flöde i systemet. Öppna processventiler långsamt för att undvika för höga flöden. (b) Kontrollera om det finns några läckage runt flödesmätarens anslutningar. Om det inte finns något läckage, öka försiktigt till aktuellt arbetstryck.

5. Varning: Om denna utrustning inte servas enligt instruktionsboken kan alvarlig personskada inträffa. Utrustningen kan skadas av för högt tryck. Vänligen kontrollera att processtrycket på mätaren är frånkopplat i samband med service.

6. Vänligen kontrollera att bara BROOKS originaldelar används i samband med service. Observera at delar med motsvarande utseende, men ej originaldelar, kan påverka flödesmätarens funktion och prestanda samt påverkar säkerheten i processen. Det kan även resultera i eldsvåda, elektrisk fara eller felaktig funktion.

SP ANISH

IMPORT ANTES INSTRUCCIONES DE SEGURIDAD

Este apéndice contiene importantes instrucciones de operación y seguridad para el uso de los rotámetros de tubo de vidrio BROOKS de la Thermal Mass Flow Meter / Controller. El instrumento es conforme a la directiva 97/23/CE sobre Equipos a Presión de la Comunidad Europea (PED). Consulte con sus autoridades locales por si existieran normas ó directivas adicionales sobre el uso y/o instalación de dicho tipo de instrumentos.

INSTRUCCIONES DE SEGURIDAD

1. Lease con cuidado todas y cada una de las identificaciones del aparato (1) asi como las secciones del Manual de Inatalación y Operción antes de usar el rotámetro.

2. ATENCION! No operar nunca el instrumento por encima de las especificiones de Máxima Presión de Operación reseñadas en el Manual de Instalación y Operación. El no seguir estas instrucciones puede provocar daños y perjuicios en personas y/ó equipos.

3. Asegurarse de que el instrumento ha sido conectado e instalado correctamente a la fuente de presión y/o eléctrica.

4. OPERACION: (a) Empezar abriendo el caudal cuidadosamente. Abra lentamente las válvulas para evitar puntas de caudal. (b) Comprobar si existen fugas en el caudalímetro y sus conexiones. Si no se encuentran fugas continuar abriendo hasta conseguir las condiciones normales de servicio.

5. ATENCION! Llevar un mantenimiento adecuado con el fín de prevenir y evitar fallos debidos a altas presiones de operación. El no seguir estas instrucciones puede provocar daños y perjuicios en personas y/ó equipos. Despresurizar la línea antes de desmontar el rotámetro.

6. Utilice solo piezas originales BROOKS para el mantenimiento de su rotámetro. El uso de piezas de otros suministradores con apariencia similar puede afectar las prestaciones y la seguridad del equipo. Cualquier cambio indebido puede resultar en una explosión ó operación incorecta.

Appendix A A TEX Certification

Flomega, Liquid MFC’s/MFM’s

Installation and Operation Manual

X-TMF-FM-MFC-eng

PN 541-C-007-AAG

April, 2008

Installation and Operation Manual

X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008

Appendix A A TEX Certification

Flomega, Liquid MFC’s/MFM’s

Installation and Operation Manual

X-TMF-FM-MFC-eng

Flomega, Liquid MFC’s/MFM’s

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller. Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended by the original manufacturer. All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of Seller are not covered by this limited warranty, and shall be at Buyer’s expense. Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller.

BROOKS LOCAL AND WORLDWIDE SUPPORT

Brooks Instrument provides sales and service facilities around the world, ensuring quick delivery from local stock, timely repairs and local based sales and service facilities. Our dedicated flow experts provide consultation and support, assuring successful applications of the Brooks flow measurement and control products. Calibration facilities are available in local sales and service offices. The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant international standards.

PN 541-C-007-AAG

April, 2008

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas Europe +(31) 318 549 290 Within Netherlands 0318 549 290

Asia +011-81-3-5633-7100

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS

Brooks ................................................................Brooks Instrument, LLC

Buna ..................................................................DuPont Dow Elastomers

Kalrez ................................................................... DuPont Dow Elastomers

Teflon .................................................................... E.I. DuPont de Nemours & Co.

Viton ............................................................... DuPont Performance Elastomers

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