Brooks Instrument 5861i User Manual

Installation and Operation Manual

X-TMF-5861i-MFM-eng
Part Number: 541B1 11AAG
November, 200 8

Model 5861i

Mass Flowmeter

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

Brooks® Model 5861i

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to
factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain
components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity
can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5861i-MFM-eng
Part Number: 541B1 11AAG
November, 200 8

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5861i

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 1
Introduction

Section 2
Installation

Brooks® Model 5861i

Paragraph

Number Page

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-1

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice ....................................... 2-1

2-3 Return Shipment................................................................ 2-2

2-4 Gas Connections ............................................................... 2-2

2-5 Installation ......................................................................... 2-2

2-6 In-Line Filter....................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

2-8 Configuring PC Board........................................................ 2-6

Section 3
Operation

Section 4
Maintenance

Section 5
Parts List

3-1 Theory of Operation........................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-2

3-4 Calibration Procedure ........................................................ 3-3

3-5 Response (Flow Output Signal) ......................................... 3-6

4-1 General.............................................................................. 4-1

4-2 Troubleshooting................................................................. 4-1

4-3 Sensor Tube...................................................................... 4-4

4-4 Disassembly and Assembly ............................................... 4-4

4-5 Use of the Conversion Tables ............................................ 4-6

4-6 Restrictor Sizing ................................................................ 4-9

5-1 General.............................................................................. 5-1

Section A
CE Certification

CE Certification of Mass Flow Equipment.......................... A-1

i

Brooks® Model 5861i

Figures

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November , 2008

Figure Page

2-1 Model 5861i Dimensions ................................................... 2-3

2-2 "D" Type Connector Pin Arrangement................................ 2-3

2-3 Maximum Allowable Loop Resistance ............................... 2-5

2-4 Common Electrical Hook-Ups ........................................... 2-7

3-1 Flow Sensor Operational Diagram..................................... 3-2

3-2 Model 5861i Calibration Connections ................................ 3-4

3-3 Adjustment Potentiometer Location ................................... 3-4

3-4 Fast Response Adjustment................................................ 3-4

3-5 PC Board Jumper Location and Function .......................... 3-7

4-1 Restrictor Element Assembly............................................ 4-10

4-2 Restrictor Element Orientation in Meter Body ................... 4-10

5-1 Model 5861i Parts Drawing................................................ 5-2

Tables

Table Page

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting...................................................... 4-2

4-2 Sensor Troubleshooting..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base).................................. 4-7

4-4 Restrictor Selection Guide .................................................4-11

5-1 Model 5861i Replacement Parts List ................................. 5-3

5-2 Tool and Spare Part Kits for 5861i ..................................... 5-4

ii

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

1-1 Purpose

1-2 Description

Section 1 Introduction

Brooks® Model 5861i

The Brooks® Model 5861i Flowmeter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5861i Mass Flow Meter . This manual is
organized into five sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5861i.

1-3 Specifications

The Brooks Model 5861i Mass Flowmeter is used widely in the
semiconductor, as well as many other industries where manual, electronic
or computer controlled gas handling occurs. The Model 5861i consists of
two basic units: a flow sensor and an integral electronic signal conditioner .
This combination produces a stable gas flow indication which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures.

Standard Ranges

10 slpm to 100 slpm* ( Nitrogen Equivalent), up to 200 slpm Hydrogen
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0° C and

101.3 kPa (760 Torr).

Accuracy

±1% full scale including linearity at calibration conditions;
68°F±3°F;50%±5%RH

Repeatability

0.25% of rate

Response Time (Flow Output Signal)

Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% flow step.

1-1

Section 1 Introduction

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Power Requirements

+15 to +28Vdc @ 90 mA

2.5 watts power consumption max.@28 volts

Ambient T emperature Limit s

Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)

Working Pressure

1500 psi (10.34 MPa) maximum

Output Signal

0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.
Jumper selectable 4-20 mAdc or 0-20 mAdc. Refer to Figure 2-3 for
maximum allowable loop resistance.

Temperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift over 10-50° C range

Pressure Sensitivity

0.03% per PSI up to 200 PSIG

Power Supply Sensitivity

±0.09% full scale per % power supply voltage variation

Mounting Attitude Sensitivity

±0.5% maximum full scale deviation after re-zeroing

Leak Integrity

-9

1 x 10

Atm. scc/sec Helium

Usable Range

50 to 1

Mechanical Connection

Refer to Figure 2-1.

Electrical Connection

D-type, 15 pin male connector (DA-15P)
Refer to Figure 2-2.

1-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5861i

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 194 40 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 50% nominal. Upon removal from storage, a visual
inspection should be conducted to verify its condition is “as re­ceived.” If the equipment has been in storage for an excess of ten
(10) months or in conditions in excess of those recommended, all
pressure boundary seals should be replaced and the device sub­jected to a pneumatic pressure test in accordance with applicable
vessel codes.

2-1

Section 2 Installation

Brooks® Model 5861i

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5861i are
3/8" compression fittings.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figures 2-1 through 2-2)

2-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Connection "X" Dim.

1/4" Compression

Fitting 131

1/4" Tube VCO

1/4" Tube VCR

3/8" Compression

Fitting 134

3/8" or 1/2" Tube

VCO 131
3/8" or 1/2" Tube
VCR 135

5.17

4.71
120

5.03
128

5.29

5.15

5.33

Section 2 Installation

Brooks® Model 5861i

Figure 2-1 Model 5861i Dimensions

PIN NO. FUNCTION COLOR CODE

1* Set Point Return Black

2 Voltage Signal Output White
3 Not Used
4 Current Signal Output Green
5 +15 to +28Vdc Supply Orange

6 Not Used
7* Current Set Point Input Wht/Blk
8* Voltage Set Point Input Red/Blk

9 Supply Common Grn/Blk

10 Signal Output Return Org/Blk
11* +5 Volt Reference Output Blu/Blk
12* Valve Override Input Blk/Wht

13 Not Used

14 Chassis Ground Grn/Wht

15 Not Used

* These connections are used for the 5850i and 5851i Mass Flow Controllers.

Make no connections to these pins.

NOTE:

1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.

2. All power leads must be connected to
power supply.

Figure 2-2 "D" Type Connector Pin Arrangement

2-3

Section 2 Installation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Recommended installation procedures:

a. The Model 5861i should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

2-6 In-Line Filter

d. The Model 5861i Mass Flowmeter can be inst alled in any position.

However mounting orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.
e. When installing flowmeters, be aware that sharp abrupt angles in the

system piping directly upstream of the controller may cause a small

shift in accuracy. If possible have at least 10 pipe diameters of

straight tubing upstream of the Model 5861i Mass Flowmeter .

It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

10-30 slpm 15 micron

Above 30 slpm 30 micron

Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.

2-4

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

2-7 Electrical Interfacing

Section 2 Installation

Brooks® Model 5861i

To insure proper operation the Model 5861i must be connected per Figures
2-2, 2-3, and 2-4 and configured according to Section 2-7.

Note: There are several functions on the printed circuit board which are not
used by the Model 5861i. Avoid making connections marked in Figure 2-2
which are marked *.

The following minimum electrical connections must be made for new
installations:

Chassis Ground
Voltage and/or Current Signal Output
Signal Output Return
+15 to +28 Vdc Supply
Supply Common

Electrical Hook-Up

Signal Output

A 0-5 Vdc flow signal output is always available. The current signal output
is jumper - selectable for either 0-20 mAdc or 4-20 mAdc. The flow signal
output can be measured as a voltage and a current simultaneously on two
different pins of the D-connector . Pin 2 indicates the flowrate with a 0-5
Vdc signal proportional to the mass flow rate. Pin 4 indicates the flowrate
with either a 0-20 mAdc or 4-20 mAdc current signal as determined by the
jumpers on the printed circuit board (Refer to Section 2-7 for jumper
positions). Both the current and voltage signals are returned on Pin 10 of
the D-connector .

Figure 2-3 Maximum Allowable Loop Resistance

2-5

Section 2 Installation

Brooks® Model 5861i

2-8 Configuring PC Board

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Supply

The power of the mass flow meter is connected to Pin 5 (+15 to +28 Vdc)
and Pin 9 (supply common) of the D-connector. Refer to Section 1-3 for the
power requirements.

Note: The length of the wire for the power supply connection (Pins 5&9)
must be selected as to insure a minimum of 15 Vdc is available at the
mass flow meter.

Chasis Ground

Connect earth ground to Pin 14 of the D-connector.

Note: To obtain easiest access to the jumpers, the electronics cover must
be removed. Disconnect the power to the mass flow meter , and cables to
the D-connector . Remove the three screws at the base of the can and
remove the top jack post of the D-connector. Remove the can. The can
must be replaced before returning the unit to service.

Refer to Section 2-6 for the proper electrical hook-up.
Refer to Section 3-5 for printed circuit board jumper locations and

functions.

Jumper Setting

Jumpers J3 and J4 (blue) must be in the upper position for 0-20 mAdc
output and in the lower position for 4-20 mAdc output.

Note: Both J3 and J4 must be in the same upper or lower position.
Jumpers J3 and J4 do not affect voltage output.

2-6

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 2 Installation

Brooks® Model 5861i

Figure 2-4 Common Electrical Hook-Ups

Notes:

1. Tie cable shields to ground at one end only.

2. Current and voltage outputs may be used simultaneously.

2-7