Brooks Instrument 5861i User Manual

Installation and Operation Manual

X-TMF-5861i-MFM-eng
Part Number: 541B1 11AAG
November, 200 8

Model 5861i

Mass Flowmeter

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

Brooks® Model 5861i

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to
factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain
components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity
can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5861i-MFM-eng
Part Number: 541B1 11AAG
November, 200 8

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5861i

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 1
Introduction

Section 2
Installation

Brooks® Model 5861i

Paragraph

Number Page

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-1

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice ....................................... 2-1

2-3 Return Shipment................................................................ 2-2

2-4 Gas Connections ............................................................... 2-2

2-5 Installation ......................................................................... 2-2

2-6 In-Line Filter....................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

2-8 Configuring PC Board........................................................ 2-6

Section 3
Operation

Section 4
Maintenance

Section 5
Parts List

3-1 Theory of Operation........................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-2

3-4 Calibration Procedure ........................................................ 3-3

3-5 Response (Flow Output Signal) ......................................... 3-6

4-1 General.............................................................................. 4-1

4-2 Troubleshooting................................................................. 4-1

4-3 Sensor Tube...................................................................... 4-4

4-4 Disassembly and Assembly ............................................... 4-4

4-5 Use of the Conversion Tables ............................................ 4-6

4-6 Restrictor Sizing ................................................................ 4-9

5-1 General.............................................................................. 5-1

Section A
CE Certification

CE Certification of Mass Flow Equipment.......................... A-1

i

Brooks® Model 5861i

Figures

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November , 2008

Figure Page

2-1 Model 5861i Dimensions ................................................... 2-3

2-2 "D" Type Connector Pin Arrangement................................ 2-3

2-3 Maximum Allowable Loop Resistance ............................... 2-5

2-4 Common Electrical Hook-Ups ........................................... 2-7

3-1 Flow Sensor Operational Diagram..................................... 3-2

3-2 Model 5861i Calibration Connections ................................ 3-4

3-3 Adjustment Potentiometer Location ................................... 3-4

3-4 Fast Response Adjustment................................................ 3-4

3-5 PC Board Jumper Location and Function .......................... 3-7

4-1 Restrictor Element Assembly............................................ 4-10

4-2 Restrictor Element Orientation in Meter Body ................... 4-10

5-1 Model 5861i Parts Drawing................................................ 5-2

Tables

Table Page

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting...................................................... 4-2

4-2 Sensor Troubleshooting..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base).................................. 4-7

4-4 Restrictor Selection Guide .................................................4-11

5-1 Model 5861i Replacement Parts List ................................. 5-3

5-2 Tool and Spare Part Kits for 5861i ..................................... 5-4

ii

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

1-1 Purpose

1-2 Description

Section 1 Introduction

Brooks® Model 5861i

The Brooks® Model 5861i Flowmeter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5861i Mass Flow Meter . This manual is
organized into five sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5861i.

1-3 Specifications

The Brooks Model 5861i Mass Flowmeter is used widely in the
semiconductor, as well as many other industries where manual, electronic
or computer controlled gas handling occurs. The Model 5861i consists of
two basic units: a flow sensor and an integral electronic signal conditioner .
This combination produces a stable gas flow indication which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures.

Standard Ranges

10 slpm to 100 slpm* ( Nitrogen Equivalent), up to 200 slpm Hydrogen
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0° C and

101.3 kPa (760 Torr).

Accuracy

±1% full scale including linearity at calibration conditions;
68°F±3°F;50%±5%RH

Repeatability

0.25% of rate

Response Time (Flow Output Signal)

Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% flow step.

1-1

Section 1 Introduction

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Power Requirements

+15 to +28Vdc @ 90 mA

2.5 watts power consumption max.@28 volts

Ambient T emperature Limit s

Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)

Working Pressure

1500 psi (10.34 MPa) maximum

Output Signal

0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.
Jumper selectable 4-20 mAdc or 0-20 mAdc. Refer to Figure 2-3 for
maximum allowable loop resistance.

Temperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift over 10-50° C range

Pressure Sensitivity

0.03% per PSI up to 200 PSIG

Power Supply Sensitivity

±0.09% full scale per % power supply voltage variation

Mounting Attitude Sensitivity

±0.5% maximum full scale deviation after re-zeroing

Leak Integrity

-9

1 x 10

Atm. scc/sec Helium

Usable Range

50 to 1

Mechanical Connection

Refer to Figure 2-1.

Electrical Connection

D-type, 15 pin male connector (DA-15P)
Refer to Figure 2-2.

1-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5861i

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 194 40 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 50% nominal. Upon removal from storage, a visual
inspection should be conducted to verify its condition is “as re­ceived.” If the equipment has been in storage for an excess of ten
(10) months or in conditions in excess of those recommended, all
pressure boundary seals should be replaced and the device sub­jected to a pneumatic pressure test in accordance with applicable
vessel codes.

2-1

Section 2 Installation

Brooks® Model 5861i

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5861i are
3/8" compression fittings.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figures 2-1 through 2-2)

2-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Connection "X" Dim.

1/4" Compression

Fitting 131

1/4" Tube VCO

1/4" Tube VCR

3/8" Compression

Fitting 134

3/8" or 1/2" Tube

VCO 131
3/8" or 1/2" Tube
VCR 135

5.17

4.71
120

5.03
128

5.29

5.15

5.33

Section 2 Installation

Brooks® Model 5861i

Figure 2-1 Model 5861i Dimensions

PIN NO. FUNCTION COLOR CODE

1* Set Point Return Black

2 Voltage Signal Output White
3 Not Used
4 Current Signal Output Green
5 +15 to +28Vdc Supply Orange

6 Not Used
7* Current Set Point Input Wht/Blk
8* Voltage Set Point Input Red/Blk

9 Supply Common Grn/Blk

10 Signal Output Return Org/Blk
11* +5 Volt Reference Output Blu/Blk
12* Valve Override Input Blk/Wht

13 Not Used

14 Chassis Ground Grn/Wht

15 Not Used

* These connections are used for the 5850i and 5851i Mass Flow Controllers.

Make no connections to these pins.

NOTE:

1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.

2. All power leads must be connected to
power supply.

Figure 2-2 "D" Type Connector Pin Arrangement

2-3

Section 2 Installation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Recommended installation procedures:

a. The Model 5861i should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

2-6 In-Line Filter

d. The Model 5861i Mass Flowmeter can be inst alled in any position.

However mounting orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.
e. When installing flowmeters, be aware that sharp abrupt angles in the

system piping directly upstream of the controller may cause a small

shift in accuracy. If possible have at least 10 pipe diameters of

straight tubing upstream of the Model 5861i Mass Flowmeter .

It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

10-30 slpm 15 micron

Above 30 slpm 30 micron

Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.

2-4

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

2-7 Electrical Interfacing

Section 2 Installation

Brooks® Model 5861i

To insure proper operation the Model 5861i must be connected per Figures
2-2, 2-3, and 2-4 and configured according to Section 2-7.

Note: There are several functions on the printed circuit board which are not
used by the Model 5861i. Avoid making connections marked in Figure 2-2
which are marked *.

The following minimum electrical connections must be made for new
installations:

Chassis Ground
Voltage and/or Current Signal Output
Signal Output Return
+15 to +28 Vdc Supply
Supply Common

Electrical Hook-Up

Signal Output

A 0-5 Vdc flow signal output is always available. The current signal output
is jumper - selectable for either 0-20 mAdc or 4-20 mAdc. The flow signal
output can be measured as a voltage and a current simultaneously on two
different pins of the D-connector . Pin 2 indicates the flowrate with a 0-5
Vdc signal proportional to the mass flow rate. Pin 4 indicates the flowrate
with either a 0-20 mAdc or 4-20 mAdc current signal as determined by the
jumpers on the printed circuit board (Refer to Section 2-7 for jumper
positions). Both the current and voltage signals are returned on Pin 10 of
the D-connector .

Figure 2-3 Maximum Allowable Loop Resistance

2-5

Section 2 Installation

Brooks® Model 5861i

2-8 Configuring PC Board

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Supply

The power of the mass flow meter is connected to Pin 5 (+15 to +28 Vdc)
and Pin 9 (supply common) of the D-connector. Refer to Section 1-3 for the
power requirements.

Note: The length of the wire for the power supply connection (Pins 5&9)
must be selected as to insure a minimum of 15 Vdc is available at the
mass flow meter.

Chasis Ground

Connect earth ground to Pin 14 of the D-connector.

Note: To obtain easiest access to the jumpers, the electronics cover must
be removed. Disconnect the power to the mass flow meter , and cables to
the D-connector . Remove the three screws at the base of the can and
remove the top jack post of the D-connector. Remove the can. The can
must be replaced before returning the unit to service.

Refer to Section 2-6 for the proper electrical hook-up.
Refer to Section 3-5 for printed circuit board jumper locations and

functions.

Jumper Setting

Jumpers J3 and J4 (blue) must be in the upper position for 0-20 mAdc
output and in the lower position for 4-20 mAdc output.

Note: Both J3 and J4 must be in the same upper or lower position.
Jumpers J3 and J4 do not affect voltage output.

2-6

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 2 Installation

Brooks® Model 5861i

Figure 2-4 Common Electrical Hook-Ups

Notes:

1. Tie cable shields to ground at one end only.

2. Current and voltage outputs may be used simultaneously.

2-7

Section 2 Installation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

THIS PAGE WAS
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2-8

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

3-1 Theory of Operation

Section 3 Operation

Brooks® Model 5861i

The thermal mass flow sensing technique used in the 5861i works as
follows:

A precision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. (Refer to Figure
3-1) At zero or no flow conditions, the heat reaching each temperature
sensor (one upstream and one downstream of the heater) is equal.
Therefore, the temperatures T1 and T2 are equal. When gas flows through
the tube, the upstream sensor is cooled and the downstream sensor is
heated, producing a temperature difference. The temperature difference
T2-T1 is directly proportional to the gas mass flow.

The equation is: ΔT = A * P * Cp * m

Where,

ΔT = temperature difference T2 - T1 (°K)

C

P = heater power (kJ/s)
m = mass flow (kg/s)
A = constant of proportionality (S2-°K2/kJ2)

= specific heat of the gas at constant pressure

p

(kJ/kg-°K)

A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.

The flow restrictor shown in Figure 3-1 performs a ranging function similar
to a shunt resistor in an electrical ammeter . The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter . Dif ferent
restrictors have different pressure drops and produce meters with different
full scale flow rates. The span adjustment in the electronics af fects the fine
adjustment of the controller's full scale flow .

.

3-1

Section 3 Operation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Figure 3-1 Flow Sensor Operational Diagram

3-2 Operating Procedure

3-3 Zero Adjustment

a. Apply power to the flowmeter and allow approximately 45 minutes for

the instrument to warm-up and stabilize its temperature.
b. T urn on the gas supply.
c. Shut-off flow to the meter and observe the flowmeter's output signal.

If the output is not 0mVdc (±10mVdc), check for leaks and if none

are found, refer to the re-zeroing procedure in Section 3-3.
d. Open valve to allow flow to pass through the meter . Monitor the flow

output signal.

Each Model 5861i is factory adjusted to provide a 0mVdc ±10mVdc signal
at zero flow. This will equate to a 4mA or 0mA current output depending no
the jumper selection. After initial installation and warm-up in the gas
system the zero flow indication may be other than the factory setting. This
is primarily caused by changes in temperature between our calibration
laboratory and the final installation. The zero flow reading can also be
affected to a small degree by changes in line pressure and mounting
attitude.

3-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

3-4 Calibration Procedure

Section 3 Operation

Brooks® Model 5861i

To check zero always mount the flowmeter in its final configuration and
allow a minimum of 20 minutes for the temperature of the controller and its
environment to stabilize. Using a suitable voltmeter check the flowmeter
output signal. If it differs from the factory setting adjust it by removing the
lower pot hold plug, which is located closest to the controller body. Adjust
the zero potentiometer (refer to Figure 3-3) until the desired output signal is
obtained.

NOTE 1: This calibration procedure is shown using the voltage output (not
current). The conversion accuracy of the voltage to current convertor
allows this with no loss in accuracy using the 4-20 mA output.

NOTE 2: If the mass flowmeter is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor. ( Refer to
Section 4-5).

NOTE 3: Calibration of the Model 5861i mass flowmeter requiresthe use of
a Digital V oltmeter (DVM), and a flow control valve or mass flow controller
to set the flowrate and precision flow standard calibrator such as the Brok
Uol-U-Meter. It is recommended that the calibration be performed only by
trained and qualified service personnel.

a. Adjust the anticipate potentiometer fully clockwise (20 turns). Then

adjust the anticipate potentiometer 10 turns counter clockwise to

center the potentiometer . This will provide a rough adjustment of this

circuit.
b. Connect the DVM positive lead to the 0-5V signal output

(pin 2 D-connector) and the negative lead to circuit common (TP4).

Adjust the zero potentiometer for an output of 0mV ±2mV.
c. Increase the flow rate until the flow signal output equals 5.000V .

Connect the DVM positive lead to TP2 (linearity voltage) and the

negative lead to TP4 (circuit common). Adjust the linearity potenti-

ometer for an output of 0.0V (zero volts).
d. Connect the DVM positive lead to the 0-5V signal output (pin 2 of D-

Connector) and the negative lead to TP4 (circuit common). Adjust

the actual flow rate to within ±2% of desired full scale flow . Measure

the flow rate using suitable volumetric calibration equipmentand

record value. Calculate flow signal voltage with the following for-

mula:

Adjust the span potentiometer (Refer to Figure 3-3) until the 0-5V

signal output equals the flow signal voltage calculated above.

e. Connect the DVM positive lead to TP1 (sensor voltage). The volt age

at TP1 is -100 times the output voltage of the sensor. This voltage

can range from +1.2 to +12 volts, however it is recommended that

this voltage stay between +2.0 to +9.0 volts for proper operation. If

the recommended voltage range exceeds this than the desired

accuracy and/or signal stability may not be achieved. If one of the

limits is reached check the restrictor sizing procedure.

( Refer to Section 4-6).

3-3

Section 3 Operation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Figure 3-2 Model 5861i Calibration Connections

*

*Note: Not used for a 5861i

Figure 3-3 Adjustment Potentiometer Location

3-4

Figure 3-4 Fast Response Adjustment

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 3 Operation

Brooks® Model 5861i

f. Shut off the flow. Connect the DVM positive lead to flow signal output

(pin 2 D-connector) and the negative lead to TP4. Readjust the zero

potentiometer for an output of 0mV±2mV as necessary .
g. Adjust flow rate for a flow signal output of 50% (2.500V) and mea-

sure the flow rate. Calculate the error as a percentage of full scale.

Note: indicated flow rate can be found using the following formula:

Example:
What is the percent of full scale error w hen full sca le is equal to 50 slpm?
Measured flow rate = 25.75 slpm
Indicated flow rate = 25 slpm

h. Calculate the TP2 correction voltage:
(error recorded in step g) x -0.450 volts

Example:
Error = -1.5%
TP2 correction voltage = -1.5 x- 0.450 = 0.675 volts
New TP2 voltage = 0 volts + (0.675) = 0.675 volt s

i. Adjust flow rate for a flow signal output of 100% (5.000V). Connect

the DVM positive lead to TP2 and the negative lead to TP4.
j. Adjust the linearity potentiometer for an output equal to the new

calculated TP2 voltage.

Note: the output signal should be kept at

5.000 V during this adjustment.
This can be done by varying the actual flowrate.

k. Repeat steps d, e, f and g.

1. If the error recorded in step g is less than 0.5%, then the calibration

procedure is complete.

2. If the error is greater than 0.5% set the flow rate for a flow signal

output of 100% (5.000V). Connect the DVM positive lead to TP2

(linearity voltage) and the negative lead to TP4 (circuit common).

Calculate a new TP2 voltage as follows:

Example:
Full scale error = 0.7% (found in step g)
Measured TP2 voltage = -0.567 volts
TP2 correction = 0.7 x -0.450 = -0.315 volts
New TP2 correction = -0.315 + (-0.567) = -0.882 volts

3-5

Section 3 Operation

Brooks® Model 5861i

3-5 Response (Flow Output Signal)

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

3. Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat step k.

Note: The voltage at TP2 can range from -3 to +3 volts, however, it is
recommended that this voltage stay between -2.5 and +2.5 volts for proper
operation. If the recommended voltage range is exceeded the desired
accuracy and/or signal stability may not be achieved. If one of the limits is
reached, check the restrictor sizing. Refer to section 4-6.

To achieve the proper response characteristics the response
compensation circuit must be adjusted. This adjustment is performed by
observing the output signal of the meter when the flow is suddenly
stopped. Place a metering valve upstream of the Model 5861i to control
the flow rate. A Brooks NRSTM precision metering valve is well suited for
this application. Also place a fast acting shut-off valve immediately
downstream of the flowmeter . A solenoid valve is ideal for this, but a
manual toggle valve will do. Keep the length of interconnecting tubing as
short as possible between the valves and the Model 5861i since the tubing
can have a dampening effect on the flow and the gas may not stop flowing
the instant the downstream valve is closed. Adjustment of the fast
response circuit will not alter the steady state accuracy of the flowmeter as
adjusted in Section 3-4.

Note: This procedure requires an oscilloscope chart recorder, or a DVM
with a sampling speed of three samples per second or greater to monitor
the rate of change of the output signal during the test. Monitor the output
signal at pin 2 of D-Connector. TP4 may be used for circuit common.

a. With the shut-off valve open adjust the metering valve so that the

output voltage of the Model 5861i is 4.050 to 5.000 Vdc. Allow the
output to stablize at this setting.

b. Close the shut off valve to stop the flow . Observe the output signal as

it decays.

c. The behavior of the output signal during the transition between 100%

and 0% flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-4.

1. If the flow signal decays to -0.05 to -0.5V then rises to 0.0V, the
anticipate potentiometer is properly adjusted.

2. If the flow signal decays rapidly and goes below -0.5V before rising to

0.0V, the anticipate potentiometer must be adjusted clockwise and
steps a and b repeated.

3. If the flow signal decays slowly and does not go below -0.05V, the
anticipate potentiometer must be adjusted counterclockwise and
steps a and b repeated.

3-6

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Section 3 Operation

Brooks® Model 5861i

* Not Used

Figure 3-5 PC Board Jumper Location and Function

3-7

Section 3 Operation

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

3-8

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

4-1 General

Section 4 Maintenance

Brooks® Model 5861i

4-2 Troubleshooting

No routine maintenance is required on the Model 5861i other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.

A. System Checks

The Model 5861i is generally used as a component in gas handling
systems which can be quite complex. This can make the task of
isolating a malfunction in the system a difficult one. An incorrectly
diagnosed malfunction can cause many hours of unnecessary
downtime. If possible, make the following system checks before
removing a suspected defective mass flow controller for bench
troubleshooting or return, especially if the system is new:

1. Verify a low resistance common connection and that the correct power
supply voltage and signals are reaching and leaving the meter . The
Break-out Board (refer to Table 5-2) listed in section 5 , will make this
job much easier.

4-1

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

Brooks® Model 5861i

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-2.
regardless of flow.

Output signal stays at a voltage Defective PC Board. Replace PC Board. Refer to Section 4-4.
greater than 5.000 volts and
there is no flow through meter Defective Sensor. Replace Sensor Assembly. Refer to Section 4-4.

Meter grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.
Flow is higher than indicated. Refer to Section 4-2.

Meter grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than indicated.

Meter output oscillates. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-4.

Faulty pressure regulator. Check regulator output.

Defective PC Board. Replace PC Board. Refer to Section 4-4.

Output voltage works properly Loop resistance is too high. Lower loop resistance.
but output current doesn't change

Loop reading device not isolated. Use isolated reading device.

Defective PC board Replace board,Refer to Section 4-4.

November, 2008

Table 4-2 Sensor Troubleshooting

4-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

Section 4 Maintenance

Brooks® Model 5861i

2. Verify that the process gas connections have been correctly terminated
and leak checked.

B. Bench Troubleshooting

1. Properly connect the mass flow controller to a +15 to +28 Vdc power

supply , and connect an output signal readout device (4-1/2 digit
voltmeter recommended) to (Pins 2 and 10 D-connector) (Refer to
Figure 2-2). Apply power, and allow the flowmeter to warm up for 45
minutes. Do not connect to a gas source at this time. Observe the
output signal and, if necessary perform the zero adjustment
procedure (Section 3-3). If the output signal will not zero properly ,
refer to the sensor troubleshooting section and check the sensor. If
the sensor is electrically functional, the printed circuit board is
defective and will require replacement.

2. Connect the flowmeter to a source of the gas on which it was

originally calibrated. Increase the flow until 100% indication
(5.00Vdc) is achieved. V ary the flow rate over the 2 to 100% range
and verify that the output signal follows the flow rate. If possible,
connect a flow measurement device in series with the mass
flowmeter to observe the actual flow behavior and verify the
accuracy of the mass flowmeter . If the mass flowmeter functions as
described above, it is functioning properly and the problem may lie
elsewhere.

Table 4-1 lists possible malfunctions which may be encountered during
bench troubleshooting.

C. Sensor T roubleshooting

If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce the expected results the
sensor assembly is defective and must be replaced. Refer to Section 4-4
for the disassembly and assembly procedures to use when replacing the
sensor.

Note: Do not attempt to disassemble the sensor.

Cleaning Procedures

Should the Model 5861i Mass Flowmeter require cleaning due to
deposition, use the following procedures:

1. Remove the unit from the system.

2. Refer to Section 4-4 to disassemble the meter.

4-3

Section 4 Maintenance

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

3. Use a hemostat or tweezers to push a 0.007" dia. piano wire through

the flow sensor tube to remove any contamination. For best results
push the wire into the downstream opening of the sensor. The
sensor tube can be flushed with a non-residuous. A hypodermic
needle filled with solvent is a convenient means to accomplish this.

4. Deposits of silicon dioxide may be removed from the remainig p art s

by soaking the internal parts in solution of 5% of hydrofluoric acid (5
parts hydrofluoric acid (HF), 95 part s water (H2O)) followed by a non­residuous solvent rinse.

5. Sintered type restrictor elements should be replaced as it is not

always possible to adequately remove deposits from them.

6. Blow all parts dry with dry nitrogen and reassemble.

Refer to Section 4-4 (assembly).

7. Purge the assembled flowmeter with dry nitrogen.

8. Perform the calibration procedure in Section 3-4.

9. When the flowmeter is reinstalled in the system, the connections should

be leak tested and the system should be purged with dry nitrogen for
30 minutes prior to start-up to prevent the formation of deposits.

4-3 Sensor T ube

4-4 Disassembly and Assembly

The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.

The Model 5861i Mass Flowmeter may be disassembled in the field by user for
cleaning, re-ranging or servicing. Disassemble and assemble the meter as fllows:

Note: the Model 5861i Mass Flowmeter should be disassembled and
assembled in a clean environment to prevent particulate contamination.

A. Disassembly

The number s in () re fer to th e spare par ts explo ded view in Figu re 5-1.

4-4

1. Remove the three screws (27) attaching the electronics cover and

loosen the upper jack post on the D-Connector. Remove the
electronics cover (40).

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

Section 4 Maintenance

Brooks® Model 5861i

2. Unplug the sensor connector from the PC Board. Remove the two

screws securing the bracket (26) and PC Board (28). Remove the
bracket and PC Board.

3. Remove the two allen nuts (9) using an 1/8" allen wrench and

washers (10) securing the sensor assembly (7). Remove the sensor
assembly.

Note: Do not attempt to disassemble the sensor assembly .

4. Remove the sensor assembly O-rings (8) from the flowmeter body (1).
Using the Brooks O-ring removal tool will help prevent scratching the
sealing surface. (part of service tool kit liisted in Section 5, Table 5-2).

5. Remove the inlet and outlet fittings(1 1) from the flowmeter body (1).

6. Remove the 4 screws (5) from the end block (3) and carefully remove
the end block.

7. Remove the restrictor assembly (37) from the inlet side of the body(1)
using the header removal tool(part of service kit tool kit listed in section
5, Table 5-2). Note the rotational position of the restrictor assembly .
( Refer to Figure 4-2).

B. Assembly

Note: It is recommended that all O-rings be replaced during meter
assembly . All O-rings should be lightly lubricated with Fomblin grease,

(part of O-ring kit, Section 5) prior to their installation.

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Place a lightly lubricated O-ring (35) onto the header plate of the
restrictor assembly (37).

3. Install restrictor assembly into the restrictor cavity using the header
removal tool. Rotating the assembly slightly assists installation. It is
important that the restrictor assembly is put into the body in the same
orientation as it was prior to removal. (Refer to Section 4-6). Do not
press header assembly into body with an arbor press as it may damage
the O-ring.

4. Place the end block O-ring (6) in position and install end block (3) with
the 4 hex socket screws (5). Tighten these screws to 34 inch lbs. Do
not over tighten.

5. Install O-rings (19) on inlet and outlet fittings. Install fittings into body (1)
and end block (3).

4-5

Section 4 Maintenance

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

6. Press the lubricated sensor O-rings (8) into the flowmeter body (1).

7. Install the sensor assembly (7) as shown in Figure 5-1 and secure with
the 2 allen nuts (9) and washers (10). Tighten the allen nut s to 10 inch
lbs.

8. Install the printed circuit board(28), secure with bracket (26) and 2
screws (27). Plug the connector from the sensor assembly (7) into the
PC board.The flow arrow on the connector should be pointing in the
direction of the flow .

9. Install the electronics cover (40) on the meter and secure with 3 screws
(27).Tighten the upper jack post on the "D" connector.

10. Prior to installation, leak and pressure test the assembled flowmeter to
any applicable pressure vessel codes.

4-5 Use of the Conversion T ables

If a mass flowmeter is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relationship between the
output signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases, or sensor
conversion factor . A list of sensor conversion factors is given in Table 4-3.
To change to a new gas, multiply the output reading by the ratio of the
sensor factor for the desired gas to the sensor factor for the calibration
gas.

Actual gas = Output x factor of the new gas

flow rate reading factor of the calibrated gas

Example:
The flowmeter is calibrated for 100slpm Nitrogen.
The process gas is Carbon Dioxide.
The flowmeter output is 75 % (3.750 volts).
What is the actual carbon dioxide flow?

Actual CO
flow rate 1

= 75 slpm x .773

2

= 57.98 slpm

4-6

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Installation and Operation Manual

Section 4 Maintenance

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

Table 4-3 Conversion Factors (Nitrogen Base)

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C3H
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C
Butane C
1-Butene C4H
CIS-2-Butene C4H
Trans-2-Butene C4H
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H
Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

4

3

3
3

3

5

3

3

3

4H6

4H10

8

8

8
2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H
Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879
Ethylene C2H
Ethylene Oxide C2H4O 0.589 1.254 1.965
Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C2F
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H

4

6

6

6

4

2

3
4

4

3

3

6

6

6

2

14

FACTOR FACTOR (kg/m3)

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.773 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

Brooks® Model 5861i

4-7

Section 4 Maintenance

Brooks® Model 5861i

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539
Iodine Pentafluoride IF
Isobutane C
Isobutene C4H
Isopentane C
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C
Methyl Chloride CH
Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C3H
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF
Uranimum Hexafluoride UF
Vinyl Bromide C2H3Br 0.524 1.985 4.772

4-8

Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046
Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

FACTOR FACTOR (kg/m

2

5

4H10

8

5H12

4

4

5H10

CL 0.687 1.347 2.308

3

2

2

4

2

2

3

3

8

2

2

3

5

12

10

8

8

12

2

3

5

3

3H8

6
6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

3

)

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

Section 4 Maintenance

Brooks® Model 5861i

Where,

P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)

Example: The desired gas is 20% Helium (He) and 80% Chlorine
(Cl) by volume. The desired full scale flow rate of the mixture is 20
slpm.

Sensor conversion factor for the mixture is:

4-6 Restrictor Sizing

N2 equivalent flow = 20/0.946 = 21.14 slpm

It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. Gas conditions that vary widely from these reference
conditions may cause an additional error due to the change in specific heat
due to temperature and/or pressure.

The restrictor assembly is a ranging device for the flow sensor. It creates a
pressure drop which is linear with flow rate. This diverts a sample quantity
of the process gas flow through the sensor. Each restrictor maintains the
ratio of sensor flow to restrictor flow, however the tot al flow through each
restrictor is different. Different restrictors (micron porosity and active area)
have different pressure drops and produce meters with dif ferent full scale
flow rates. For a discussion of the interaction of the various parts of the
meter , you are urged to review Section 3-1 (Theory of Operation).

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop vs. flow characteristics will be altered and it must be cleaned
or replaced. It may also be necessary to replace the restrictor assembly
when the mass flowmeter is to be calibrated to a new flow rate.

Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:

- Appropriate size wrench for the removal of the inlet process connection
and end block screws.

- Restrictor removal tool (Refer to Table 5-2)

- Restrictor O-ring, refer to the spare parts Section 5, for the correct part
number.

4-9

Section 4 Maintenance

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Figure 4-1 Restrictor Element Assembly

4-10

Figure 4-2 Restrictor Element Orientation in Meter Body

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November , 2008

Section 4 Maintenance

Brooks® Model 5861i

Table 4-4 Restrictor Selection Guide

Based on 0
**For Hydrogen from 130 slpm to 200 slpm use 3-60

micron restrictor elements.
Note: If the Nitrogen equivalent flow is between two

sizes, choose the larger size.

0

C Standard Reference Temperature

The Model 5861i Mass Flowmeter utilizes porous metal restrictor
assemblies for all full scale flow rates. Restrictor elements with porosities
of 40 and 60 microns are used in different combinations. Up to three
restrictor elements can be placed in one assembly. These restrictors are
assembled by pressing the porous metal elements into the header plate.

When sizing a restrictor assembly for gases other than nitrogen, the
sensor conversion factor must be used to calculate a nitrogen equivalent
flow rate. Use the following equation to obtain the desired flow in nitrogen
equivalent units. Refer to Table 4-3 for the conversion factor list.

N2 equivalent = desired gas flow

sensor conversion factor

Using this Nitrogen equivalent flow, select a restrictor assembly from Table
4-4.

Example:
The desired gas is cyanogen
The desired full scale flow rate is 30 slpm.
Sensor conversion factor is 0.498 from Table 4-3.
Nitrogen equivalent flow = 30/0.498 = 60.24 slpm

In the previous example , the restrictor should be sized for a 60.24 slpm
flow rate (P/N S613E528BMT).

If a restrictor assembly is being replaced because the original has become
contaminated, the original may be used as a guide to select the
replacement assembly . The porosity of the original element or element s is
marked on the calibration sheet which was shipped with the flowmeter. The
replacement assembly should be replaced in the same orientation as the
original restrictor. (Refer to Section 4-4 for assembly procedure).

4-11

Section 4 Maintenance

Brooks® Model 5861i

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

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INTENTIONALLY

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4-12

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

5-1 General

Section 5 Parts List

Brooks® Model 5861i

When ordering parts, please specify:

Brooks Serial Number
Model Number
Part Description
Part Number
Quantity

(Refer to Figure 5-1 and Tables 5-1 and 5-2).

5-1

Section 5 Patrs List

Brooks® Model 5861i

Figure 5-1 Model 5861i Parts Drawing.

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November , 2008

5-2

Installation and Operation Manual

Section 5 Parts List

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Table 5-1 Model 5861 i Replacement Parts List

Item

No. Qty. Description Part Number

1 1 Body and Stud Weldment S854Z165BMA
3 1 Endblock and Screen Weldment S079Z200AAA
5 4 Soc. Hd. Cap Screw, #8-32x1/2" 751Z105AAO
6 1 #029 O-rings Viton 375B029QTA

1 (between endblock Buna 375B029SUA

1 & body) Kalrez 375B029TTA
7 1 Removable Sensor S774Z508BMA
8 2 #004 O-rings Viton 375B004QTA

2 (for sensor) Buna 375B004SUA

2 Kalrez 375B004TTA
9 2 Allen nut, #5-40 573Q103ACZ

10 2 Lockspring washer,#5 962D005AWA
11 2 Fittings, 1/4" Compression Swagelok 320B136BMA

2 1/4" Male VCR, Cajon 315Z036BMA

2 1/4" Male VCO, Cajon 315Z035BMA

2 3/8" Compression Swagelok 320B150BMA

2 3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA

2 3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA

19 2 #906 O-rings Viton 375B906QTA

2 (for fittings) Buna 375B906SUA

2 Kalrez 375B906TTA

26 1 Can Mtg. Bracket Block 079Z135EAA
27 5 Screws - Cover to Block 753L056AWZ
28 1 PCA: D-Conn S097Y847AAA
35 1 #026 O-ring Viton 375B026QTA

1 (for Header assy.) Buna 375B026SUA

1 Kalrez 375B026TTA

37 Restrictor Assembly

& Components
(Refer to Section 4-6 for sizing)

40 1 Silkscreened Cover 219Z490EA%
41 1 Blinding Strip 852Z213EA%
45 2 Plug for Potentiometer Holes 620Z434SXA

NS 2 O-ring, VCO Gland,

Size 010 Viton 375B010QTA
Buna 375B010SUA
Kalrez 375B010TTA
Interconnecting Cables: Length: D-type

NS 1 Connector on one end 5 Feet S124Z361AAA

with no termination 10 Feet S124Z362AAA
on other end 25 Feet S124Z363AAA

50 Feet S124Z435AAA

NS 1 Connector on one end 5 Feet S124Z576AAA

with Connector for Model 5870 10 Feet S124Z577AAA
Series Secondary 25 Feet S124Z578AAA
Electronics on other end 50 Feet S124Z579AAA

NS 2 8-32 Mounting Screw 753A330AWA

***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown

Brooks® Model 5861i

5-3

Section 5 Patrs List

Brooks® Model 5861i

Table 5-2 Tool and Spare Part Kits for Model 5861i

5850 Series Service Tool Kit 5850/5860 Series Break Out Board Assembly
P/N S778D017AAA P/N S273Z668AAA for D Connector version

Permits the complete disassembly of the Installs directly between mass flow sensor/
Model 5861i for servicing. controller and interconnecting cable. Allows

Contains: troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool 1 - Break Out PC Board
1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable
1 - Phillips Screw Driver 1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool

5851i/5861i Header Removal Tool
P/N S817Z036AAA

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November , 2008

convenient access to all signals for easy

5861

i

O-ring Kit

P/N S375Z334***

***QTA=V iton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown

Additional publications available:
MFC Contamination Control
V alve Application Guide/Service Manual

5-4

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om
elektrisk støj (EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger
skal enten være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender , til stikkets met alhus eller PG-forskruningen og have forbindelse over
360 grader .
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm
med 100% dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Section A CE Certification

Brooks® Model 5861i

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschif ten der Elektromagnetischen Verträglichkeit (EMC Richtlinie
89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der V erbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der S pezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet
werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen
Umfang von 360 ° anzuschließen.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Platinen-Steckverbindunger sind st andardmäßige keine metallgeschirmten V erbindungen. Um die
Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu
verwenden.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A CE Certification

Brooks® Model 5861i

English

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations
of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
S pecial attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a
100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands
must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to
comply with CE certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las
pruebas referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a
utilizar un equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su
conjunto con un apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pant alla metálica. Cuando
sea posible, se deberán utilizar prensaestopas metálicos provistos de abrazadera para la p ant alla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos
completamente en los 360 Grados.
La pantalla deberá conect arse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser
protegidos con un apantallamiento del 100% p ara cumplir con la certificación CE.
La pantalla deberá conect arse a tierra.
Para ver la configuración de los pines: Por favor , consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Français

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les
règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour
véhiculer le signal d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du
câble, et à chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100%
pour satisfaire à la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Section A CE Certification

Brooks® Model 5861i

Greek

A-3

Section A CE Certification

Brooks® Model 5861i

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portat a in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggett a a marcatura CE, ha
superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/
336/EEC).
E’ richiesta comunque una speciale attenzione nella scelt a dei cavi di segnale da usarsi con la strumentazione
soggetta a marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente
intende usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso
deve essere metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per
entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una
schermatura del 100% per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello
strumento.

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en
voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
S peciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde
produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE
certificering.

Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien
kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het
kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-met allisch. De gebruikte kabels moeten volledig afgeschermd zijn
met een bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
V oor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.

A-4

Hoogachtend,

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i
metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i
begge ender over 360°, tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100%
skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.For tilkobling av
medleverte plugger, vennligst se håndboken som hører til ut styret.
V ennlig hilsen

Section A CE Certification

Brooks® Model 5861i

Português

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento
da Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário
ter uma atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário,
deve utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com
blindagem a 100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A CE Certification

Brooks® Model 5861i

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan
signaalikaapelin itse, olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää met allisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja
jotta ne olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

November, 2008

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt
utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall
alternativt med metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kont akternas metallkåpor eller genomföringar med 360
graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att
överensstämma med CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-5861i-MFC-eng
Part Number: 541B1 11AAG
November, 2008

Brooks® Model 5861i

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INTENTIONALLY

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Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B1 11AAG

Brooks® Model 5861i

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

November, 2008

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290

Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks..........................................................Brooks Instrument, LLC

Fomblin ............................................................................... Ausimont

Freon TF .......................................... E. I. DuPont deNemours & Co.

Kalrez..........................................................DuPont Dow Elastomers

NRS .............................................................Brooks Instrument, LLC

VCO ......................................................................... Cajon Company

VCR ......................................................................... Cajon Company

Viton..............................................DuPont Performance Elastomers

1-888-554-FLOW

+011-81-3-5633-7100