Brooks Instrument 5861E User Manual

Installation and Operation Manual

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

Model 5861E
Mass Flowmeter

Model 5861E

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

Model 5861E

November , 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Model 5861E

Model 5861E

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November , 2008

THIS PAGE WAS
INTENTIONALLY

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Installation and Operation Manual

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November , 2008

Paragraph Page
Number Number

Section 1 Introduction

1-1 Purpose ......................................................................................................................................1-1

1-2 Description .................................................................................................................................1-1

1-3 Specifications .............................................................................................................................1-1

Section 2 Installation

2-1 Receipt of Equipment ........................................................................................................ .........2-1

2-2 Recommended Storage Practice................................................................................................ 2-1

2-3 Return Shipment ........................................................................................................................2-2

2-4 Gas Connections........................................................................................................................2-2

2-5 Installation ..................................................................................................................................2-2

2-6 In-Line Filter ...............................................................................................................................2-4

2-7 Electrical Interfacing ...................................................................................................................2-5

Section 3 Operation

3-1 Theory of Operation....................................................................................................................3-1

3-2 Operating Procedure ..................................................................................................................3-2

3-3 Zero Adjustment .........................................................................................................................3-2

3-4 Calibration Procedure.................................................................................................................3-3

3-5 Response (Flow Output Signal) ..................................................................................................3-6

Model 5861E

Contents

Section 4 Maintenance

4-1 General ......................................................................................................................................4-1

4-2 Troubleshooting ..........................................................................................................................4-1

4-3 Sensor Tube ...............................................................................................................................4-4

4-4 Disassembly and Assembly ........................................................................................................4-4

4-5 Use of the Conversion T ables.....................................................................................................4-6

4-6 Restrictor Sizing .........................................................................................................................4-9

Section 4 Parts List

5-1 General ......................................................................................................................................5-1

Section A CE Certificate

CE Certificate of Mass Flow Equipment.................................................................................................A-1

Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover

i

Contents

Model 5861E

Figures

Figure Page
Number Number

2-1 Model 5861E Dimensions...........................................................................................................2-3

2-2 "D" Type Connector Pin Arrangement.........................................................................................2-3

3-1 Flow Sensor Operational Diagram..............................................................................................3-2

3-2 Model 5861E Calibration Connections........................................................................................3-4

3-3 Adjustment Potentiometer Location............................................................................................ 3-4

3-4 Fast Response Adjustment......................................................................................................... 3-4

4-1 Restrictor Element Assembly.....................................................................................................4-10

4-2 Restrictor Orientation in Meter Body ..........................................................................................4-10

5-1 Model 5861E Parts Drawing .......................................................................................................5-2

Tables

Table Page
Number Number

2-1 Recommended Filter Size ..........................................................................................................2-4

4-1 Bench Troubleshooting...............................................................................................................4-2

4-2 Sensor Troubleshooting..............................................................................................................4-2

4-3 Conversion Factors (Nitrogen Base) ..........................................................................................4-7

4-4 Restrictor Selection Guide.........................................................................................................4-11

5-1 Model 5861E Replacement Parts List.........................................................................................5-3

5-2 Tool and Spare Part Kits for 5861E.............................................................................................5-4

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November, 2008

ii

Installation and Operation Manual

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

1-1 Purpose

1-2 Description

Section 1 Introduction

Model 5861E

The Brooks® Model 5861E Flowmeter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5861E Mass Flowmeter. This manual is
organized into five sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List

It is recommended that this manual be read in its entirety before
attempting to operate or repair the Model 5861E.

1-3 Specifications

The Brooks Model 5861E Mass Flowmeter is used widely in the
Semiconductor, as well as many other industries where manual, electronic,
or computer controlled gas handling occurs. The Model 5861E consists of
two basic units: a flow sensor and an integral electronic signal control
system. This combination produces a stable gas flow indication, which
eliminates the need to continuously monitor and compensate for changing
gas pressures and temperatures.

Flow Ranges

Any full scale flow rate from 10 slpm* to 100 slpm, Nitrogen equivalent (200
slpm H2).

*Standard pressure and temperature in accordance with SEMI (Semiconductor Equipment
and Materials Institute) standard: 0°C and 101.3 kPa (760 Torr).

Ratings

Maximum Operating Pressure: 1500 psi (103 bar)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212°F (-25°C to 100°C)

Performance

Accuracy: ±1% full scale including linearity at calibrated conditions.

Repeatability

0.25% of rate

Response Time

Less than 3 seconds

1-1

Section 1 Introduction

Model 5861E

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November, 2008

Control / Usable Range

50 to 1

Sensitivity to Mounting Attitude

±0.5% F .S. maximum deviation from specified accuracy after rezeroing under
200 psig

T emperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shif t from original calibration over 10-50°C range

Pressure Sensitivity

0.03% per PSI up to 200 PSIG

Power Supply Sensitivity

±0.09% full scale per % power supply voltage variation

Output Signal

0 to 5 Vdc into 3000 ohms (or greater) load. Maximum ripple 3 mV

Leak Integrity

-9

1 x 10

atmosphere scc/sec. Helium

Power Requirements

+15 Vdc (±5%) at 35 mA dc

-15 Vdc (±5%) at 35 mA dc

1.05 watts power consumption

Materials of Construction

Fittings and Transducer Assembly - Wetted parts 316 stainless steel
O-rings and Gaskets - Standard: Viton® fluoroelastomers and Buna-N;
Optional: Kalrez

®

Electrical Connections

D-connector, 15-pin type (DA-15P)

Dimensions

See Figure 2-1

1-2

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

2-1 Receipt of Equipment

Section 2 InstallationInstallation and Operation Manual

Model 5861E

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condi-tion is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-1

Section 2 Installation

Model 5861E

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November, 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5861E are 3/
8" compression fittings.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figures 2-1 through 2-2)

2-2

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

Section 2 InstallationInstallation and Operation Manual

Model 5861E

Figure 2-1 Model 5861E Dimensions

PIN NO. FUNCTION COLOR CODE

1 Cmd. Common (Command Pot "CCW") • Black
2 0-5 Volt Signal Output White
3 Supply Common Red
4 Valve Off • Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge • Wht/Blk
8 Cmd. Input or Cmd. Pot "S" • Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Command Pot "CW") • Blu/Blk
12 Valve Override • Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input* • Blu/Wht

* Factory Activated Option.

• These connections are used for the 5850E and 5851E Mass Flow Controllers.

Make no connections to these pins.

Figure 2-2 "D" Type Connector Pin Arrangement

NOTE:

1. Cable shield tied to chassis ground
in meter connector. Make no
connection on customer end.

2. All power leads must be connected
to power supply.

2-3

Section 2 Installation

When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.

Model 5861E

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November, 2008

Recommended installation procedures:

a. The Model 5861E should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

2-6 In-Line Filter

d. The Model 5861E Mass Flowmeter can be installed in any position.

However mounting orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.
e. When installing Flowmeters, be aware that sharp abrupt angles in

the system piping directly upstream of the controller may cause a

small shift in accuracy . If possible have at least 10 pipe diameters of

straight tubing upstream of the Model 5861E Mass Flowmeter .

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

10-30slpm 15 micron

Above 30 slpm 30 micron

Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.

2-4

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

2-7 Electrical Interfacing

Section 2 InstallationInstallation and Operation Manual

Model 5861E

To insure proper operation the Model 5861E must be connected as shown in
Figure 2-2.

Note: There are several functions on the printed circuit board which are not
used by the Model 5861E. Avoid making connections marked in Figure 2-2
which are marked •. Also, the plug-in jumpers on printed circuit board are
not used by the Model 5861E and have no effect on performance.

The following minimum electrical connections must be made for new
installations:

Chassis Ground
0-5 Volt Signal Common
0-5 Volt Signal Output
+15 Vdc Supply

-15 Vdc Supply
Power Supply Common

2-5

Section 2 Installation

Model 5861E

Installation and Operation Manual

X-TMF-5861E-MFM-eng

Part Number: 541B107AAG

November, 2008

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INTENTIONALLY

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2-6