Brooks Instrument 5860E User Manual

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Model 5860E
Mass Flow Meter

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

Brooks® Model 5860E

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to
factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain
components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity
can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5860E

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 1
Introduction

Section 2
Installation

Contents

Brooks® Model 5860E

Paragraph Page

Number Number

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-2

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice....................................... 2-1

2-3 Return Shipment................................................................ 2-2

2-4 Gas Connections ............................................................... 2-2

2-5 Installation ......................................................................... 2-2

2-6 In-Line Filter....................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

Section 3
Operation

Section 4
Maintenance

Section 5
Parts List

3-1 Theory of Operation........................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-2

3-4 Calibration Procedure ........................................................ 3-3

3-5 Response (Flow Output Signal) ......................................... 3-6

4-1 General.............................................................................. 4-1

4-2 Troubleshooting ................................................................. 4-1

4-3 Sensor Tube...................................................................... 4-4

4-4 Disassembly and Assembly ............................................... 4-4

4-5 Use of the Conversion Tables............................................ 4-6

4-6 Restrictor Sizing ................................................................ 4-9

5-1 General.............................................................................. 5-1

Section A
CE Certification

CE Certification of Mass Flow Equipment.......................... A-1

i

Contents

Brooks® Model 5860E

Figures

Tables

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Figure Page

Number Number

1-1 Typical Response to Flow Step Changes........................... 1-2

2-1 Model 5860E Dimensions.................................................. 2-3

2-2 "D" T ype Connector Pin Arrangement................................ 2-3

3-1 Flow Sensor Operational Diagram..................................... 3-2

3-2 Model 5860E Calibration Connections............................... 3-4

3-3 Adjustment Potentiometer Location................................... 3-4

3-4 Fast Response Adjustment................................................ 3-4

5-1 Model 5860E Parts Drawing .............................................. 5-2

Table Page

Number Number

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting...................................................... 4-2

4-2 Sensor Troubleshooting..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base).................................. 4-7

4-4 Model 5860E Standard Restrictors ....................................4-11

5-1 Model 5860E Replacement Parts List................................ 5-3

5-2 Tool and S pare Part Kits for 5860E.................................... 5-3

ii

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

1-1 Purpose

Section 1 Introduction

Brooks® Model 5860E

The Brooks® Model 5860E Flow Meter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5860E Mass Flow Meter. This manual is
organized into five sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5860E.

1-2 Description

The Brooks Model 5860E Mass Flow Meter is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5860E consists of
two basic units: a flow sensor , and an integral electronic signal converter.
This combination produces a stable gas flow indication, which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures. Standard features include:

Fast Response rapidly indicates changes in actual mass flow rate. Refer

to Figure 1-1.

Removable Cleanable Sensor permits the user to clean or replace the

sensor. Refer to Section 4-4.

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to +6.8 Vdc and -.7 Vdc.

1-1

Section 1 Introduction

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Figure 1-1 Typical Response to Flow Step Changes

1-3 Specifications

Flow Ranges

Any full scale flowrate from 3 sccm to 30 slpm, N
*Standard temperature and pressure in accordance with SEMI

(Semiconductor Equipment and Materials Institute) standard: 0° C and

101.3 kPa (760 Torr).

Ratings

Maximum Operating pressure: 4500 psi (31.03 MPa)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-Operating:-13°F to +212°F (-25°C to 100°C)

Performance

Accuracy: ±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.

2

1-2

Repeatability

0.25% of rate

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 1 Introduction

Brooks® Model 5860E

Response Time

Less than 3 seconds response to within 2% of full scale final value for a
0 to 100% command step.

Control / Usable Range

50 to 1

Sensitivity to Mounting Attitude

±0.5% F.S. maximum deviation from specified accuracy after re-zeroing
under 200 psig.

T emperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift from original calibration over
10-50° C range

Pressure Sensitivity

0.03% per PSI up to 200 PSIG

Power Supply Sensitivity

±0.09% full scale per % power supply voltage variation

Output Signal

0-5 Vdc into 2000 ohms (or greater) load.
Maximum ripple 3 mV.

Leak Integrity

-9

1 x 10

Atmosphere scc/sec. Helium

Power Requirements

+15 Vdc (±5%) at 35 mA dc

-15 Vdc (±5%) at 35 mA dc

1.05 watts power consumption

Materials of Construction

Fittings and Transducer Assembly - Wetted parts 316 stainless steel
O-rings and gaskets - S tandard: V iton® fluoroelastomers and Buna-N;
Optional: Kalrez®

Electrical Connection

D-connector, 15 pin type (DA-15P)

1-3

Section 1 Introduction

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

1-4

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 200 8

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5860E

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condition is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-1

Section 2 Installation

Brooks® Model 5860E

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5860E are 1/
4" compression fittings for flow rates up to 10 slpm, and 3/8" compression
fittings for higher flow rates.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figures 2-1 through 2-2)

2-2

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 200 8

Section 2 Installation

Brooks® Model 5860E

INCHES/MILLIMETERS

Figure 2-1 Model 5860E Dimensions

PIN NO. FUNCTION COLOR CODE

1 Cmd. Common (Command Pot "CCW") • Black
2 0-5 Volt Signal Output White
3 Supply Common Red
4 Valve Off • Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge • Wht/Blk
8 Cmd. Input or Cmd. Pot "S" • Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Command Pot "CW") • Blu/Blk
12 Valve Override • Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht

15 Remote Transducer Input* • Blu/Wht

* Factory Activated Option.

Connection "X" Dim.

1/4" Compression

Fitting 109.7

1/4" Tube VCO

1/4" Tube VCR

3/8" Compression

Fitting 112.8

NOTE:

1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.

2. All power leads must be connected to
power supply.

4.32

3.86

98.0

4.18

106.2

4.44

• These connections are used for the 5850E and 5851E Mass Flow Controllers.
Make no connections to these pins.

Figure 2-2 "D" Type Connector Pin Arrangement

2-3

Section 2 Installation

When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Recommended installation procedures:

a. The Model 5860E should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

2-6 In-Line Filter

d. The Model 5860E Mass Flow Meter can be installed in any position.

However mounting orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.
e. When installing flow meters be aware that sharp abrupt angles in the

system piping directly upstream of the meter may cause a small shift

in accuracy. If possible have at least 10 pipe diameters of straight

tubing upstream of the Model 5860E Mass Flow Meter .

It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Note: The above Table lists the maximum recommended porosity for each
flow range. It is recommended that the minimum micron porosity that does
not limit the full scale flowrate be used.

2-4