Brooks Instrument 5860E User Manual

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Model 5860E
Mass Flow Meter

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

Brooks® Model 5860E

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to
factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain
components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity
can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5860E

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 1
Introduction

Section 2
Installation

Contents

Brooks® Model 5860E

Paragraph Page

Number Number

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-2

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice....................................... 2-1

2-3 Return Shipment................................................................ 2-2

2-4 Gas Connections ............................................................... 2-2

2-5 Installation ......................................................................... 2-2

2-6 In-Line Filter....................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

Section 3
Operation

Section 4
Maintenance

Section 5
Parts List

3-1 Theory of Operation........................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-2

3-4 Calibration Procedure ........................................................ 3-3

3-5 Response (Flow Output Signal) ......................................... 3-6

4-1 General.............................................................................. 4-1

4-2 Troubleshooting ................................................................. 4-1

4-3 Sensor Tube...................................................................... 4-4

4-4 Disassembly and Assembly ............................................... 4-4

4-5 Use of the Conversion Tables............................................ 4-6

4-6 Restrictor Sizing ................................................................ 4-9

5-1 General.............................................................................. 5-1

Section A
CE Certification

CE Certification of Mass Flow Equipment.......................... A-1

i

Contents

Brooks® Model 5860E

Figures

Tables

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Figure Page

Number Number

1-1 Typical Response to Flow Step Changes........................... 1-2

2-1 Model 5860E Dimensions.................................................. 2-3

2-2 "D" T ype Connector Pin Arrangement................................ 2-3

3-1 Flow Sensor Operational Diagram..................................... 3-2

3-2 Model 5860E Calibration Connections............................... 3-4

3-3 Adjustment Potentiometer Location................................... 3-4

3-4 Fast Response Adjustment................................................ 3-4

5-1 Model 5860E Parts Drawing .............................................. 5-2

Table Page

Number Number

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting...................................................... 4-2

4-2 Sensor Troubleshooting..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base).................................. 4-7

4-4 Model 5860E Standard Restrictors ....................................4-11

5-1 Model 5860E Replacement Parts List................................ 5-3

5-2 Tool and S pare Part Kits for 5860E.................................... 5-3

ii

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

1-1 Purpose

Section 1 Introduction

Brooks® Model 5860E

The Brooks® Model 5860E Flow Meter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5860E Mass Flow Meter. This manual is
organized into five sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5860E.

1-2 Description

The Brooks Model 5860E Mass Flow Meter is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5860E consists of
two basic units: a flow sensor , and an integral electronic signal converter.
This combination produces a stable gas flow indication, which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures. Standard features include:

Fast Response rapidly indicates changes in actual mass flow rate. Refer

to Figure 1-1.

Removable Cleanable Sensor permits the user to clean or replace the

sensor. Refer to Section 4-4.

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to +6.8 Vdc and -.7 Vdc.

1-1

Section 1 Introduction

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Figure 1-1 Typical Response to Flow Step Changes

1-3 Specifications

Flow Ranges

Any full scale flowrate from 3 sccm to 30 slpm, N
*Standard temperature and pressure in accordance with SEMI

(Semiconductor Equipment and Materials Institute) standard: 0° C and

101.3 kPa (760 Torr).

Ratings

Maximum Operating pressure: 4500 psi (31.03 MPa)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-Operating:-13°F to +212°F (-25°C to 100°C)

Performance

Accuracy: ±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.

2

1-2

Repeatability

0.25% of rate

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 1 Introduction

Brooks® Model 5860E

Response Time

Less than 3 seconds response to within 2% of full scale final value for a
0 to 100% command step.

Control / Usable Range

50 to 1

Sensitivity to Mounting Attitude

±0.5% F.S. maximum deviation from specified accuracy after re-zeroing
under 200 psig.

T emperature Sensitivity

Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift from original calibration over
10-50° C range

Pressure Sensitivity

0.03% per PSI up to 200 PSIG

Power Supply Sensitivity

±0.09% full scale per % power supply voltage variation

Output Signal

0-5 Vdc into 2000 ohms (or greater) load.
Maximum ripple 3 mV.

Leak Integrity

-9

1 x 10

Atmosphere scc/sec. Helium

Power Requirements

+15 Vdc (±5%) at 35 mA dc

-15 Vdc (±5%) at 35 mA dc

1.05 watts power consumption

Materials of Construction

Fittings and Transducer Assembly - Wetted parts 316 stainless steel
O-rings and gaskets - S tandard: V iton® fluoroelastomers and Buna-N;
Optional: Kalrez®

Electrical Connection

D-connector, 15 pin type (DA-15P)

1-3

Section 1 Introduction

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

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1-4

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 200 8

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5860E

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condition is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-1

Section 2 Installation

Brooks® Model 5860E

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5860E are 1/
4" compression fittings for flow rates up to 10 slpm, and 3/8" compression
fittings for higher flow rates.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figures 2-1 through 2-2)

2-2

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 200 8

Section 2 Installation

Brooks® Model 5860E

INCHES/MILLIMETERS

Figure 2-1 Model 5860E Dimensions

PIN NO. FUNCTION COLOR CODE

1 Cmd. Common (Command Pot "CCW") • Black
2 0-5 Volt Signal Output White
3 Supply Common Red
4 Valve Off • Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge • Wht/Blk
8 Cmd. Input or Cmd. Pot "S" • Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Command Pot "CW") • Blu/Blk
12 Valve Override • Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht

15 Remote Transducer Input* • Blu/Wht

* Factory Activated Option.

Connection "X" Dim.

1/4" Compression

Fitting 109.7

1/4" Tube VCO

1/4" Tube VCR

3/8" Compression

Fitting 112.8

NOTE:

1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.

2. All power leads must be connected to
power supply.

4.32

3.86

98.0

4.18

106.2

4.44

• These connections are used for the 5850E and 5851E Mass Flow Controllers.
Make no connections to these pins.

Figure 2-2 "D" Type Connector Pin Arrangement

2-3

Section 2 Installation

When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Recommended installation procedures:

a. The Model 5860E should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

2-6 In-Line Filter

d. The Model 5860E Mass Flow Meter can be installed in any position.

However mounting orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.
e. When installing flow meters be aware that sharp abrupt angles in the

system piping directly upstream of the meter may cause a small shift

in accuracy. If possible have at least 10 pipe diameters of straight

tubing upstream of the Model 5860E Mass Flow Meter .

It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Note: The above Table lists the maximum recommended porosity for each
flow range. It is recommended that the minimum micron porosity that does
not limit the full scale flowrate be used.

2-4

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 200 8

2-7 Electrical Interfacing

Section 2 Installation

Brooks® Model 5860E

To insure proper operation, the Model 5860E must be connected per
Figure 2-2.

Note: There are several functions on the printed circuit board which are
not used by the Model 5860E. A void making connections marked in Figure
2-2 which are marked •. Also, the plug-in jumpers on the printed circuit
board are not used by the Model 5860E and have no effect on
performance.

The following minimum electrical connections must be made for new
installations:

Chassis Ground
0-5 Volt Signal Common
0-5 Volt Signal Output
+15 Vdc Supply

-15 Vdc Supply

2-5

Section 2 Installation

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

THIS PAGE WAS
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2-6

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

3-1 Theory of Operation

Section 3 Operation

Brooks® Model 5860E

The thermal mass flow sensing technique used in the 5860E works as
follows:

A precision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. (Refer to Figure
3-1) At zero or no flow conditions, the heat reaching each temperature
sensor (one upstream and one downstream of the heater) is equal.
Therefore, the temperatures T1 and T2 are equal. When gas flows through
the tube, the upstream sensor is cooled and the downstream sensor is
heated, producing a temperature difference. The temperature difference
T2-T1 is directly proportional to the gas mass flow.

The equation is: ΔT = A * P * Cp * m

Where,

ΔT = temperature difference T2 - T1 (°K)

C

P = heater power (kJ/s)
m = mass flow (kg/s)
A = constant of proportionality (S2-°K2/kJ2)

= specific heat of the gas at constant pressure

p

(kJ/kg-°K)

A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.

The flow restrictor shown in Figure 3-1 performs a ranging function similar
to a shunt resistor in an electrical ammeter . The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter . Dif ferent
restrictors have different pressure drops and produce meters with different
full scale flow rates. The span adjustment in the electronics af fects the fine
adjustment of the controller's full scale flow .

The Model 5860E has the following features incorporated in the integral
control circuit:

Fast Response adjusted by the anticipate potentiometer. This circuit, when

properly adjusted, allows the high frequency information contained in
the sensor signal to be amplified to provide a faster responding flow
signal for remote indication.

Removable cleanable sensor permits the user to clean or replace the

sensor. Refer to Section 4-4.

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to +6.8 Vdc and -.7 Vdc.

3-1

Section 3 Operation

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Figure 3-1 Flow Sensor Operational Diagram

3-2 Operating Procedure

3-3 Zero Adjustment

3-2

a. Apply power to the flowmeter and allow approximately 45 minutes for

the instrument to warm-up and stabilize its temperature.
b. T urn on the gas supply.
c. Shut-off flow to the meter and observe the flowmeter's output signal.

If the output is not 0mVdc (±10mVdc), check for leaks and if none

are found, refer to the re-zeroing procedure in Section 3-3.
d. Adjust for the desired flow and assume normal operation.

Each Model 5860E is factory adjusted to provide a 0 ±10mVdc signal at
zero flow . The adjustment is made in our calibration laboratory which is
temperature controlled to 21.1°C (70°F ±2°F). After initial inst allation and
warm-up in the gas system the zero flow indication may be other than the
factory setting. This is primarily caused by changes in temperature
between our calibration laboratory and the final installation. The zero flow
reading can also be affected to a small degree by changes in line pressure
and mounting attitude.

To check zero always mount the meter in its final configuration and allow a
minimum of 45 minutes for the temperature of the meter and its
environment to stabilize. Using a suitable voltmeter check the controller
output signal. If it differs from the factory setting adjust it by removing the
lower pot hole plug, which is located closest to the controller body . Adjust
the zero potentiometer (refer to Figure 3-3) until the desired output signal is
obtained.

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

3-4 Calibration Procedure

Section 3 Operation

Brooks® Model 5860E

NOTE 1: Calibration of the Model 5860E mass flowmeter requires the use
of a digital voltmeter (DVM) a flow control valve or mass flow controller to
set the flow rate and a precision flow standard calibrator such as the
Brooks Vol-U-Meter®. It is recommended that the calibration be performed
only by trained and qualified service personnel.

NOTE 2: If the mass flowmeter is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor .

a. Adjust the anticipate potentiometer fully clockwise (20 turns). Then

adjust the anticipate potentiometer 10 turns counterclockwise to

center the potentiometer . This will provide a rough adjustment of this

circuit and make the flow signal stable for calibration.
b. Connect the DVM positive lead to the 0-5V signal output (terminal 3

card edge, pin 2 D-type) and the negative lead to signal common

(TP4). Adjust the zero potentiometer for an output of 0mV ±2mV.
c. Increase the flow rate until the flow signal output equals 5.000V .

Connect the DVM positive lead to the 0.5V signal output (pin 2 of the

"D" connector) and the negative lead to TP4. Connect the DVM

positive lead to TP2 (linearity voltage) and the negative lead to TP4

(signal common). Adjust the linearity potentiometer for an output of

0.0V (zero volts).

d. Connect the DVM positive lead to the 0-5V signal output (pin 2 of D-

Connector) and the negative lead to TP4 (circuit common). Measure

the flow rate using suitable volumetric calibration equipment. Adjust

the flow rate to the proper full scale flow.

Adjust the span potentiometer until the voltage at pin 2 is 5.000V.

e. Measure the voltage at TP1. The voltage at TPl is -100 times the

output voltage of the sensor . This voltage can range from -1.2 to -12

volts, however it is recommended that this voltage stays between

-2.0 and -9.0 volts for proper operation. If the recommended voltage

range exceeds this then the desired accuracy and/or signal stability

may not be achieved. If one of the limits is reached check the

restrictor sizing procedures. Refer to Section 4-6.
f. Shut off the flow. Connect the DVM positive lead to flow signal output

(pin 2 D-type) and the negative lead to TP4. Readjust the zero

potentiometer for an output of 0mV± 2mV as necessary.
g. Flow rate for a flow signal output of 50% (2.500V) and measure the

flow rate. Calculate the error as a percentage of full scale.

3-3

Section 3 Operation

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Figure 3-2 Model 5860E Calibration Connections

3-4

Figure 3-4 Fast Response Adjustment

Figure 3-3 Adjustment Potentiometer Location

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 3 Operation

Brooks® Model 5860E

Example:
What is the perce nt of full scale error when full scale is equal to 100 sccm?
Measured flow rate = 50.0 sccm
Indicated flow rate = 48.5 sccm

h. Calculate the TP2 correction voltage:
(error recorded in step g) x 0.450 volts

Example:
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 volts
New TP2 voltage = 0 volts + (-0.675) = -0.675 volt s

i. Flow rate for a flow signal output of 100% (5.000V). Connect the DVM

positive lead to TP2 and the negative lead to TP4.
j. Adjust the linearity potentiometer for an output equal to the new

calculated TP2 voltage.
k. Repeat steps d, e, f, and g.

1. If the error recorded in step g is less than 0.5%, then the

calibration procedure is complete.

2. If the error is greater than 0.5% set the flow rate for a flow signal

output of 100% (5.000V). Connect the DVM positive lead to TP2

(linearity voltage) and the negative lead to TP4 (circuit common).

Calculate a new TP2 voltage as follows:

Example:

Sensor error = 0.7%

Measured TP2 voltage = -0.567 volt s

TP2 correction = 0.7 x 0.450 = 0.315 volts

New TP2 correction = 0.315 + (-0.567) = -0.252 volts

Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat steps f, g and h.

Note: The voltage at TP2 can range from -10 to +3 volts, however, it is
recommended that this voltage stay between -2.5 and +2.5 volts for proper
operation. If the recommended voltage range is exceeded the desired
accuracy and/or signal stability may not be achieved. If one of the limits is
reached, check the restrictor sizing. Refer to Section 4-6.

3-5

Section 3 Operation

Brooks® Model 5860E

3-5 Response (Flow Output Signal)

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

To achieve the proper response characteristics the response
compensation circuit must be adjusted. This adjustment is performed by
observing the output signal of the meter when the flow is suddenly
stopped. Place a metering valve upstream of the Model 5860E to control
the flow rate. A Brooks NRS® precision metering valve is well suited for
this application. Also place a fast acting shut-off valve immediately
downstream of the flowmeter . A solenoid valve is ideal for this, but a
manual toggle valve will do. Keep the length of interconnecting tubing as
short as possible between the valves and the Model 5860E since the
tubing can have a dampening effect on the flow and the gas may not stop
flowing the instant the downstream valve is closed as desired. Adjustment
of the fast response circuit will not alter the steady state accuracy of the
flowmeter as adjusted in Section 3-4.

Note: This procedure requires an oscilloscope, chart recorder , or a DVM
with a sample speed three samples per second or greater to monitor the
rate of change of the output signal during the test. Monitor the output signal
at pin 2 of D-Connector. TP4 may be used for ground.

a. With the shut-off valve open adjust the metering valve so that the

output voltage of the Model 5860E is 4.050 to 5.000 Vdc. Allow the

output to become stable at this setting.
b. Close the shut off valve to stop the flow . Observe the output signal as

it decays.
c. The behavior of the output signal during the transition between 100%

and 0% flow indicates the adjustment required of the anticipate

potentiometer . Refer to Figure 3-4.

1. If the flow signal decays to -0.05 to -0.5V then rises to 0.0V, the

anticipate potentiometer is properly adjusted.

2. If the flow signal decays rapidly and goes below -0.5V before rising to

0.0V, the anticipate potentiometer must be adjusted clockwise and

steps a and b repeated.

3. If the flow signal decays slowly and does not go below -0.05V, the

anticipate potentiometer must be adjusted counterclockwise and

steps a and b repeated.

3-6

Installation and Operation Manual

N

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

4-1 General

4-2 Troubleshooting

Section 4 Maintenance

Brooks® Model 5860E

No routine maintenance is required on the Model 5860E other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.

A. System Checks

The Model 5860E is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flowmeter for bench troubleshooting or return, especially if the
system is new:

B. Bench Troubleshooting

1. Properly connect the mass flowmeter to a ±15 Vdc power supply ,

and connect an output signal readout device (4-1/2 digit voltmeter

recommended) to terminals 2 and 3 (D-type pins 2 and 10) (Refer to

Figure 2-2). Apply power, and allow the flowmeter to warm up for 45

minutes. Do not connect to a gas source at this time. Observe the

output signal and, if necessary perform the zero adjustment proce-

dure (Section 3-3). If the output signal will not zero properly , refer to

the sensor troubleshooting section and check the sensor. If the

sensor is electrically functional, the printed circuit board is defective

and will require replacement.

2. Connect the flowmeter to a source of the gas on which it was origi-

nally calibrated. Increase the flow until 100% indication (5.00Vdc) is

achieved. V ary the flow rate over the 2 to 100% range and verify that

the output signal follows the flow rate. If possible, connect a flow

measurement device in series with the mass flowmeter to observe

the actual flow behavior and verify the accuracy of the mass flowme-

ter . If the mass flowmeter functions as described above, it is func-

tioning properly and the problem may lie elsewhere.

4-1

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

Brooks® Model 5860E

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-4.
regardless of flow.

Output signal stays at +6.8V Defective PC Board. Replace PC Board. Refer to Section 4-4.
and there is no flow through
the meter. Defective Sensor. Replace Sensor Assembly. Refer to Section 4-4.

Meter grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.
Flow is higher than indicated.

Meter grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than indicated.

Meter output oscillates. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-4.

Faulty pressure regulator. Check regulator output.

Defective PC Board. Replace PC Board. Refer to Section 4-4.

Table 4-2 Sensor Troubleshooting

November , 2008

4-2

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 4 Maintenance

Brooks® Model 5860E

Table 4-1 lists possible malfunctions which may be encountered during
bench troubleshooting.

C. Sensor Troubleshooting

If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce the expected results the
sensor assembly is defective and must be replaced. Refer to Section 4-4
for the disassembly and assembly procedures to use when replacing the
sensor.

Note: Do not attempt to disassemble the sensor.

D. Cleaning Procedures

Should the Model 5860E Mass Flow Meter require cleaning due to
deposition, use the following procedures:

1. Remove the unit from the system.

2. Refer to Section 4-4 to disassemble the flowmeter.

3. Use a hemostat or tweezers to push a 0.007" dia. piano wire through

the flow sensor tube to remove any contamination. For best results

push the wire into the downstream opening of the sensor tube. The

sensor tube can be flushed with a non-residuous solvent (Freon

TF® recommended). A hypodermic needle filled with solvent is a

convenient means to accomplish this.

An alternate method for flushing out the sensor is to replace the

restrictor element with a low flow plug restrictor . This plug forces all

the flow through the sensor and may dislodge any obstructions.

Subject the flow meter to a high differential pressure. Pressurizing

the outlet of the flowmeter higher than the inlet may help force the

obstruction upstream and out of the sensor tube.

4. Deposits of silicon dioxide may be removed by soaking the internal

parts in solution of 5% of hydrofluoric acid (5 part s hydrofluoric acid

(HF), 95 parts water (H2O)) followed by Freon TF.

5. Sintered type restrictor elements should be replaced as it is not

always possible to adequately remove deposits from them. Wire

mesh and A.C.L.F.E. type restrictor elements can be cleaned in an

ultrasonic bath. Refer to Section 4-7 for the correct restrictor to use.

6. Blow all parts dry with dry Nitrogen and reassemble. Refer to Section

4-4b (assembly).

7. Purge the assembled controller with dry Nitrogen.

8. Perform the calibration procedure in Section 3-4.

9. When the flowmeter is reinstalled in the system, the connections

should be leak tested and the system should be purged with dry

Nitrogen for 30 minutes prior to start-up to prevent the formation of

deposits.

4-3

Section 4 Maintenance

Do not attempt to disassemble the mass flowmeter until pressure
has been removed and purging has been performed. Hazardous
gas may be trapped in the valve assembly which could result in
explosion, fire, or serious injury.

Be careful not to stress the sensor lead wire to sensor assembly
junction when removing the sensor connector from the PC board.
If the sensor lead wires are stressed an open in the sensor wiring
could result.

Do not scratch the O-ring sealing surface.

Brooks® Model 5860E

4-3 Sensor T ube

4-4 Disassembly and Assembly

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.

Note: The Model 5860E Mass Flow Meter may be disassembled and
assembled in in the field by the user for cleaning, reranging or servicing.
Disassemble and reassembly the meter as follows:

A. Disassembly

The number s in () re fer to th e spare par ts explo ded view in Figu re 5-1.

1. Remove the three screws (8) attaching the electronics cover and

loosen the upper jack post on the D-Connector. Remove the elec-

tronics cover (1 1).

2. Unplug the sensor connector from the PC Board. Remove the two

screws securing the bracket (13) and PC Board (2). Remove the

bracket and PC Board.

3. Remove the two screws (6) and washers (7) securing the sensor

assembly (3). Remove the sensor assembly.

Note: Do not attempt to disassemble the sensor assembly .

4. Remove the backup rings (5) and the sensor assembly O-rings (4)

from the flowmeter body (1). Using the Brooks O-ring removal tool

will help prevent scratching the sealing surface.

5. Remove the adapter fittings (15) from the flowmeter body (1).

6. Remove the restrictor assembly (9) from the inlet side of the flowme-

4-4

ter body (1) using the restrictor tool (part of service tool kit listed in

Section 5, Table 5-2).

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Section 4 Maintenance

Brooks® Model 5860E

B. Assembly

Note: It is recommended that all O-rings be replaced during flowmeter
assembly . All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Place the restrictor O-ring on the restrictor assembly . Screw the
restrictor assembly (9) into the inlet side of the flowmeter body using the
restrictor tool, tighten hand tight.

3. Press the lubricated sensor O-rings (4) into the flowmeter body (1).

Press the back up rings (5) into the O-ring cavity above the O-rings.

Be sure that the O-rings are seated square and the backup rings are

below the surface of the body. The back end of the O-ring removal

tool is useful to press the backup rings all the way into the body .

4. Install the sensor assembly (3) as shown in Figure 5-1 and secure

with the two socket head cap screws (6) and washers (7). Tighten

the screws to 18 +2/-4 in-lbs.

5. Install the printed circuit board (2), secure with bracket (13) and two

screws (8). Plug the connector from the sensor assembly (3) onto

the PC Board. The flow arrow on the connector should be pointing in

the direction of the flow .

6. Install the electronics cover (1 1) on the controller and secure with

three screws (8). Tighten the upper jack post on the D-Connector.

7. Prior to installation leak and pressure test, the assembled flowmeter

to any applicable pressure vessel codes.

4-5

Section 4 Maintenance

Brooks® Model 5860E

4-5 Use of the Conversion T ables

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

If a mass flowmeter is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relationship between the
output signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases, or sensor
conversion factor . A list of sensor conversion factors is given in Table 4-3.
To change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas to the gas factor for the calibration gas.

Actual gas = Output x factor of the new gas

flow rate reading factor of the calibrated gas

Example:
The flowmeter is calibrated for Nitrogen.
The desired gas is Carbon Dioxide.
The output reading is 75 sccm when Carbon Dioxide is flowing.
Then 75 x 0.78 = 58.50 sccm

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Where,

P1 = percentage (%) of gas 1 (by volume)

P2 = percentage (%) of gas 2 (by volume)

Pn = percentage (%) of gas n (by volume)

Example: The desired gas is 20% Helium (He) and 80% Chlorine

(Cl) by volume. The desired full scale flow rate of the mixture is 20

slpm.

Sensor conversion factor for the mixture is:

Air equivalent flow = 20/.903 = 22.15 slpm air

4-6

It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases are not strongly pressure and
temperature dependent, however gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat due to temperature and/or pressure.

Installation and Operation Manual

Section 4 Maintenance

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Table 4-3 Conversion Factors (Nitrogen Base) Ref. No. J836D508.

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C3H
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C
Butane C
1-Butene C4H
CIS-2-Butene C4H
Trans-2-Butene C4H
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H
Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

4

3

3
3

3

5

3

3

3

4H6

4H10

8

8

8
2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H
Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879
Ethylene C2H
Ethylene Oxide C2H4O 0.589 1.254 1.965
Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C2F
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H

4

6

6

6

4

2

3
4

4

3

3

6

6

6

2

14

FACTOR FACTOR (kg/m3)

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.773 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

Brooks® Model 5860E

4-7

Section 4 Maintenance

Brooks® Model 5860E

Table 4-3 Conversion Factors (Nitrogen Base) Ref. No. J836D508 Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY

4-8

Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539
Iodine Pentafluoride IF
Isobutane C
Isobutene C4H
Isopentane C
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C
Methyl Chloride CH
Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C3H
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride W F
Uranimum Hexafluoride UF
Vinyl Bromide C2H3Br 0.524 1.985 4.772
Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046
Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

2

5

4H10

8

5H12

4

4

5H10

CL 0.687 1.347 2.308

3

2

2

4

2

2

3

3

8

2

2

3

5

12

10

8

8

12

2

3

5

3

3H8

6
6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

FACTOR FACTOR (kg/m

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

3

)

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

4-6 Restrictor Sizing

Section 4 Maintenance

Brooks® Model 5860E

The restrictor assembly is a ranging device for the sensor portion of the
flowmeter . It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow , however the
total flow through each restrictor is different. Different restrictors (micron
porosity and active area) have different pressure drops and produce
meters with different full scale flow rates. For a discussion of the
interaction of the various parts of the meter, you are urged to review
Section 3-1 (Theory of Operation).

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop vs. flow characteristics will be altered and it must be cleaned
or replaced. It may also be necessary to replace the restrictor assembly
when the mass flowmeter is to be calibrated to a new full scale flow rate.

Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:

Appropriate size wrench for the removal of the inlet process connec-

tion.

Restrictor removal tool (contained in service tool kit P/N S-778-D-017-

AAA)

Restrictor O-ring, refer to the spare parts Section 5, for the correct part

number.

Restrictors

The Model 5860E Series Mass Flowmeters use three types of restrictor
assemblies depending on full scale flowrate and expected service
conditions.

1. Porous sintered metal for air equivalent flow rates up to and including

9.5 slpm. The porosity ranges from 1-40 microns. This type of
assembly is least expensive and should be used when the gas
stream will not contain any particulate matter .

2. Sintered wire mesh for air equivalent flow rates above 3.5 slpm.
These restrictor assemblies are made from a cylinder of sintered
wire mesh and are easily cleaned if they become contaminated in
service.

3. Anti-Clog Laminar Flow Element (ACLFE). This type of restrictor
assembly is used for air equivalent flow rates less than 3.4 slpm the
ACLFE is much more tolerant to particulate contamination than the
sintered metal assembly . This is especially important when handling
semiconductor gases that tend to precipitate particles. The ACLFE
will also improve accuracy when operating at very low pressures.

Sizing

All Model 5860E Series restrictor assemblies are factory adjusted to
provide a 1 15 mm water column pressure drop for a specific flow rate. This
corresponds to the desired full scale flow rate. A list of restrictor
assemblies used in the Model 5860E Series Mass Flowmeters is shown in
Table 4-4.

4-9

Section 4 Maintenance

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November , 2008

Example:
The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.68 from Table 4-3.
Air equivalent flow = 200/0.68 = 294.1 sccm air .

In the example above a size P restrictor would be selected. Both the
sintered metal and ACLFE are available for this size. Either type will work
however, since Silane is known to precipit ate silicon dioxide particles when
contaminated an anti-clog laminar flow element should be selected for this
application.

NOTE: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

If a mixture of two or more gases are being used the restrictor selection
must be based on the air equivalent flow rate of the mixture.

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm.

Sensor conversion factor for the mixture is:

Air equivalent flow = 20/.903 = 22.15 slpm air.

In this example a size 4 wire mesh assembly would be selected.

4-10

Installation and Operation Manual

Section 4 Maintenance

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Table 4-4 Model 5860E Standard Restrictors

Range Part Number*

sccm Air Equivalent Flow

Size Low High Sintered ACLFE Wire Mesh

D 8.022 11.36 S110Z296 S110Z275
E 11.23 15.90 S110Z297 S110Z276
F 15.72 22.26 S110Z298 S110Z277
G 22.01 31.17 S110Z299 S110Z278
H 30.82 43.64 S110Z300 S110Z279

J 43.14 61.09 S110Z301 S110Z-280

K 60.40 85.53 S110Z302 S110Z281

L 84.56 119.7 S110Z303 S110Z282

M 118.4 167.6 S110Z304 S110Z283

N 165.7 234.7 S110Z305 S110Z284
P 232.0 328.6 S110Z306 S110Z285
Q 324.8 460.0 S110Z307 S110Z286
R 454.8 644.0 S110Z308 S110Z287
S 636.7 901.6 S110Z309 S110Z288
T 891.4 1262. S110Z310 S110Z289
U 1248. 1767. S110Z311 S110Z290
V 1747. 2474. S110Z312 S110Z291

W 2446. 3464. S110Z313 S110Z292

X 3424. 4849. S110Z319
Y 4794. 6789. S110Z321

1 6711. 9504. S110Z317
2 9396. 13310. S110Z228
3 13150. 18630. S110Z226
4 18420. 30000. S110Z224

Brooks® Model 5860E

*Materials: BMT = 316 Stainless Steel (ACLFE only)

BMA = Sintered 316 Stainless Steel (Wire Mesh and Sintered)

NOTE: For flow rates less than 8 sccm use the low flow plug, P/N 618K020BMT in place of a

restrictor assembly .

4-11

Section 4 Maintenance

Brooks® Model 5860E

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Part Number: 541B106AAG

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Installation and Operation Manual

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Part Number: 541B106AAG
November, 2008

5-1 General

Section 5 Parts List

Brooks® Model 5860E

When ordering parts, please specify:

Brooks Serial Number
Model Number
Part Description
Part Number
Quantity

(Refer to Figure 5-1 and Tables 5-1 and 5-2).

5-1

Section 5 Parts List

Brooks® Model 5860E

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Figure 5-1 Model 5860E Parts Drawing

5-2

Installation and Operation Manual

Section 5 Parts List

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Table 5-1 Model 5860E Replacement Parts List

Item

No. Qty. Description Part Number

1 1 Flowmeter Body 092Z773BM%
2 1 PC Board Assembly (D-Connector) S097Y847AAA
3 1 Sensor Assembly S774Z607AAA
4 2 O-ring, Sensor, Size 004 375B004***
5 2 Backup Ring, Sensor 962A027NZA
6 2 Screw Sensor Body 751Z107AA0
7 2 Lock Washer, Sensor 926D006AWA
8 5 Screw, Sensor PC Board Cover 753L056AWZ
9 1 Restrictor Assembly and Components

(Refer to Section 4-7 for sizing)
10 1 O-ring, Restrictor, Size 109 375B109***
11 1 Electronics Cover Can (D-Connector) 219Z392EA%
12 1 Cover Plate 852Z213EA%
13 1 PC Board Mounting Bracket 079Z135EAA
14 2 Pot Hole Plug 620Z434SXA

Fittings:

1/4" Compression, Swagelok 320B136BMA

NS 2 1/4" Male VCR, Cajon 315Z036BMA

1/4" Male VCO, Cajon 315Z035BMA
15 2 O-ring, Fitting, Size 906 375B906***

NS 2 O-ring, VCO Gland, Size 010 375B010***

Interconnecting Cables: Length: D-type

Connector on one end 5 Feet S124Z361AAA

with no termination 10 Feet S124Z362AAA

NS on other end 25 Feet S124Z363AAA

1 50 Feet S124Z435AAA

Connector on one end 5 Feet S124Z576AAA

NS with Connector for Model 5870 10 Feet S124Z577AAA

Series Secondary 25 Feet S124Z578AAA

Electronics on other end 50 Feet S124Z579AAA

NS 2 8-32 Mounting Screw Customer Supplied

***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown

Brooks® Model 5860E

Table 5-2 Tool and Spare Part Kits for Model 5860E

Model 5850 Service Tool Kit Model 5850 Break Out Board Assembly
P/N S778D017AAA P/N S273Z668AAA

Permits the complete disassembly of the Installs directly between mass flow sensor/
Model 5850E for servicing. controller and interconnecting cable. Allows

Contains: troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool 1 - Break Out PC Board
1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable
1 - Phillips Screw Driver 1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver

convenient access to all signals for easy

5-3

Section 5 Parts List

Brooks® Model 5860E

Installation and Operation Manual

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Part Number: 541B106AAG

November, 2008

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5-4

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om
elektrisk støj (EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger
skal enten være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender , til stikkets met alhus eller PG-forskruningen og have forbindelse over
360 grader .
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm
med 100% dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Section A CE Certification

Brooks® Model 5860E

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschif ten der Elektromagnetischen Verträglichkeit (EMC Richtlinie
89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der V erbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der S pezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet
werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen
Umfang von 360 ° anzuschließen.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Platinen-Steckverbindunger sind st andardmäßige keine metallgeschirmten V erbindungen. Um die
Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu
verwenden.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A CE Certification

Brooks® Model 5860E

English

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations
of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
S pecial attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a
100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands
must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to
comply with CE certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las
pruebas referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a
utilizar un equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su
conjunto con un apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pant alla metálica. Cuando
sea posible, se deberán utilizar prensaestopas metálicos provistos de abrazadera para la p ant alla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos
completamente en los 360 Grados.
La pantalla deberá conect arse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser
protegidos con un apantallamiento del 100% p ara cumplir con la certificación CE.
La pantalla deberá conect arse a tierra.
Para ver la configuración de los pines: Por favor , consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Français

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les
règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour
véhiculer le signal d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du
câble, et à chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100%
pour satisfaire à la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Section A CE Certification

Brooks® Model 5860E

Greek

A-3

Section A CE Certification

Brooks® Model 5860E

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggett a a marcatura CE, ha
superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/
336/EEC).
E’ richiesta comunque una speciale attenzione nella scelt a dei cavi di segnale da usarsi con la strumentazione
soggetta a marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente
intende usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso
deve essere metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per
entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una
schermatura del 100% per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello
strumento.

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en
voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
S peciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde
produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE
certificering.

Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien
kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het
kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn
met een bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.

A-4

V oor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November , 2008

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i
metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i
begge ender over 360°, tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100%
skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.For tilkobling av
medleverte plugger, vennligst se håndboken som hører til ut styret.
V ennlig hilsen

Section A CE Certification

Brooks® Model 5860E

Português

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento
da Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário
ter uma atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário,
deve utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com
blindagem a 100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A CE Certification

Brooks® Model 5860E

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan
signaalikaapelin itse, olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää met allisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja
jotta ne olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt
utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall
alternativt med metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kont akternas metallkåpor eller genomföringar med 360
graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att
överensstämma med CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008

Brooks® Model 5860E

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Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

Brooks® Model 5860E

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

November , 2008

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290

Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks..........................................................Brooks Instrument, LLC

Freon TF .......................................... E. I. DuPont deNemours & Co.

Kalrez..........................................................DuPont Dow Elastomers

NRS .............................................................Brooks Instrument, LLC

VCO ......................................................................... Cajon Company

VCR ......................................................................... Cajon Company

Viton..............................................DuPont Performance Elastomers

1-888-554-FLOW

+011-81-3-5633-7100