Brooks Instrument 5850EM User Manual

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG

November, 2008 Brooks

Brooks® Models 5964, 5850EM

Mass Flow Controllers

®

Models 5964, 5850EM

Model 5964

Mass Flow Controller

with D-Connector

Model 5850EM Downported

Mass Flow Controller

with Card Edge

Model 5850EM

Mass Flow Controller

with D-Connector

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

Brooks® Models 5964, 5850EM

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG

November, 2008 Brooks

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

®

Models 5964, 5850EM

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Paragraph Page
Number Number

Section 1 Introduction

1-1 How to Use This Manual ............................................................................................................1-1

1-2 Description .................................................................................................................................1-1

1-3 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ............................................................................................... 2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 In-Line Filter ...............................................................................................................................2-3

2-8 Installation ..................................................................................................................................2-3

2-9 Electrical Interface......................................................................................................................2-4

2-10 Operation Procedure..................................................................................................................2-5

Brooks® Models 5964, 5850EM

Contents

Section 3 Operation

3-1 Overview .................................................................................................................................... 3-1

3-2 Connections and Controls ..........................................................................................................3-1

3-3 Theory of Operation ......................................................................................................... ..........3-4

3-4 Features .....................................................................................................................................3-6

3-5 Adjustment Potentiometers.......................................................................................................3-15

3-6 Zero Adjustment........................................................................................................................3-16

3-7 Calibration Procedure ...............................................................................................................3-17

3-8 Response Adjustment ...............................................................................................................3-22

Section 4 Maintenance

4-1 Overview .................................................................................................................................... 4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Gas Conversion Factors ............................................................................................................4-6

4-4 Orifice Sizing.............................................................................................................................4-10

4-5 Restrictor Sizing........................................................................................................................4-15

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

i

Contents

Brooks® Models 5964, 5850EM

Figures

Figure Page
Number Number

1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM

with D-Connector and VCR Fittings ........................................................................................ 1-5

1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM

with Card Edge and VCR Fittings............................................................................................ 1-6

1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector .... 1-7

1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge ....... 1-8

2-1 Card Edge Connector ............................................................................................................. 2-6

2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram................................................ 2-7

2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O V ersion..................................... 2-6

2-4 D-Connector Shielded Cable Hookup Diagram - Current I/O Version..................................... 2-8

2-5 Maximum Allowable Loop Resistance-Current I/O version ..................................................... 2-8

2-6 Common Electrical Hookups Current I/O version ...................................................................2-9

3-1 Model 5964/5850EM Components.......................................................................................... 3-2

3-2 Externaslly Accessible Adjustments ........................................................................................ 3-3

3-3 Flow Sensor Operational Diagram (VCRTM End Connections Shown) .................................... 3-4

3-4 Flow Controller System Block Diagram................................................................................... 3-4

3-5 Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function ................. 3-6

3-6 Standard Response 20 Pin D-Connector PC Board Jumper location and Function................ 3-7

3-7 Enhanced Response 15 Pin D-Connector PC Board Jumper location and Function.............. 3-8

3-8 Standard Response 15 Pin D-Connector PC Board Jumper location and Function................ 3-9

3-9 Current I/O Version PC Board Jumper Location and Function.............................................. 3-10

3-10 Command Steps, Soft S tart Disabled .................................................................................... 3-11

3-11 100% Command Steps, Soft Start Enabled........................................................................... 3-1 1

3-12 Adjustment Potentiometer Location ...................................................................................... 3-14

3-13 Bench Troubleshooting Circuit .............................................................................................. 3-16

3-14 Response Adjustment ........................................................................................................... 3-22

4-1 Model 5964/5850EM Orifice Sizing Nomograph ................................................................... 4-11

4-2 Example Nomograph ............................................................................................................ 4-14

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

November, 2008

Tables

Table Page
Number Number

2-1 Recommended Filter Size..........................................................................................................2-3

3-1 Cables, calibration Covers and PC Boards for Model 5964/5850EM......................................... 3-3

4-1 Bench Troubleshooting .............................................................................................................. 4-4

4-2 Sensor Troubleshooting .............................................................................................................4-5

4-3 Conversion Factors (Nitrogen Base)..........................................................................................4-7

4-4 Model 5964/5850EM Standard Restrictors................................................................................4-16

ii

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

1-1 How to Use This Manual

1-2 Description

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks

This manual is organized into the following sections:

The Brooks Models 5964 and 5850EM Mass Flow Controllers is used in
gas flow handling systems where very low leakage and high performance
are required. The Models 5964 and 5850EM incorporates metal seals or
welded joints, insuring leak integrity for high purity and high vacuum
applications. Reducing the amount of internal threads makes the design
less prone to system contamination. The control electronics and flow
sensor designs utilized in the Models 5964 and 5850EM have been well­proven in precision gas delivery systems. S tandard features include:

®

Models 5964 and 5850EM

Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
Section A CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information

• High leak integrity (less than 10

-10

atm-cc/sec He)

• Enhanced process (7 Ra) internal surface finish (Optional 5850EM)

• Electropolished wetted surfaces (Optional 5850EM)

• High purity V AR 316L Stainless S teel

• All metal seals

• Particulate free

• Wide flow range (0.06 sccm through 30,000 sccm)

• Insensitive to mounting attitude

• Negligible flow overshoot/undershoot

• Fast response control permits rapid gas settling times with minimal
over/undershoot. Refer to Figure 1-1.

• Helium leak check ports

• Class 100 Clean Room assembly and calibration (Optional 5850EM)

• Available with all popular process connections

1-1

Section 1 Introduction

Brooks® Models 5964, 5850EM

1-3 Specifications

PERFORMANCE CHARACTERISTICS:

Flow Ranges*

Any range from 0 - 3 sccm to 0 - 30,000 sccm Nitrogen equivalent. Lower
flows available, consult factory .

*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.

Control Range

2 - 100% with elastomeric valve seat
3 - 100% with metal or Teflon® valve seat

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Accuracy

1% Full Scale including linearity , at calibration conditions

1.5% Full Scale including linearity , for flow ranges greater than 20 slpm

Repeatability

0.25% of rate

Settling Time
Model 5964: Enhanced response PCB's less than 1 sec to within 2% of

Full Scale of final value for a 0-100% command step with Normally Closed
Valve. (Optional on 5850EM).
Model 5850EM: Less than 3 seconds to within 2% of Full Scale of final
value for a 0-100% command step with Normally Closed V alve.*

*Per SEMI Guideline E17-91.
Mounting Attitude Sensitivity

Available in any position

0.5% maximum full scale deviation after rezeroing

T emperature Sensitivity

Zero: Less than ±0.075% full scale per °C
Sp an: Less than ±1.0% full scale shif t over 10-50°C range

Pressure Equipment Directive (PED) 97/23/EC

Sound Engineering Practice

1-2

Pressure Sensitivity

0.008% per psi Nitrogen

RATINGS:

Operating Pressure

1,500 psi (10.342 MPa) max.

Note: 150 psi for enhanced response
500 psi for st ainless steel fasteners option.

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Differential Pressure

V alve orifice sized for any pressure drop between 5 to 50 p si (Minimum
pressure drop depends on gas and range).

Ambient T emperature Limit s

Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)

Leak Integrity

Inboard to outboard 1 x 10

-10

atm. cc/sec. Helium max.

PHYSICAL CHARACTERISTICS:

Materials of Construction

316L V AR (Vacuum Arc Remelt), 316L, and high alloy ferritic stainless

steel.
External seals: Nickel.
Internal seals: Nickel.

V alve Seat: 316L, V iton® fluoroelastomers, Buna-N, Kalrez® or Teflon®.

Dimensions

Refer to Figures 1-1 thru 1-4

Process Connections

1/4" Tube VCR

TM

Downport C-Seal
Downport W-Seal

Surface Finish

5850EM: 32Ra, Passivated
5964: 7Ra, Electropolished

ELECTRICAL CHARACTERISTICS:

Electrical Connections

Card Edge: 30 microinch gold over low stress nickel-plated copper
D-Connector: 15 Pin (DA-15P)

Command Input

V oltage Option: 0-5 Vdc (Input resist ance 40 k ohm min.)
Current Option: 4-20 mAdc (Input resistance 75 ohm)

Output Signal

V oltage Option: 0 to 5 Vdc into 2,000 ohms minimum
Current Option: Jumper selectable 4-20 mAdc or 0-20 mAdc, refer to
Figure 2-6 for maximum total loop resistance

1-3

Section 1 Introduction

Brooks® Models 5964, 5850EM

ELECTRICAL CHARACTERISTICS (continued):

5 V olt Reference Output

5 Volt s, ±0.01 Vdc into 2,000 ohms minimum

Power Requirements

Voltage Option:
N.C. V alve (or N.O. Valve with flow less than 2.5 slpm):

N.O. V alve with flow rate greater than 2.5 slpm:

Current Option:
+15 Vdc to +28 Vdc: 3.68 Watts min, +15 Vdc @ 245 mA

Power Supply Sensitivity

None within ±5% of specified voltage (See Power Requirements)

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

3.25 watts max., + 15 Vdc @ 35 mA -15 Vdc @ 180 mA

10.5 watts max.,+15 Vdc @ 350 mA, -15 Vdc @ 350 mA

10.36 Watts max., +28 Vdc @ 370 mA

1-4

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM with D-Connector and VCR Fittings

1-5

Section 1 Introduction

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Figure 1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM with Card Edge and VCR Fittings

1-6

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector

1-7

Section 1 Introduction

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Figure 1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge

1-8

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

2-1 General

2-2 Receipt of Equipment

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-3 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare part s are not
discarded with the packing materials. Inspect for damaged or missing
parts.

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following conditions:

a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

45°F (7°C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-1

Section 2 Installation

Brooks® Models 5964, 5850EM

2-4 Return Shipment

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

2-5 Transit Precautions

2-6 Removal from Storage

Instrument must have been purged in accordance with the following:

All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination S tatement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www .BrooksInstrument.com or are available from any Brooks
Instrument location listed above.

To safeguard the instrument against transportation damage, it is
recommended to keep the instrument in its factory container until ready for
installation.

2-2

Upon removal of the instrument from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the instrument has been
subject to storage conditions in excess of those recommended (See
Section 2-3), it should be subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

2-7 In-Line Filter

2-8 Installation

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the
flow sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Prior to installation, make certain all piping is clean and free of
obstructions, for tubing installations. Install the piping in such a manner
that permits easy access to the instrument if it needs to be removed for
cleaning or test bench troubleshooting. For surface mount (downported)
devices verify that the seal cavities are clean and free of lateral
scratches.

CAUTION

When installing the controller, care should be taken that no
foreign materials enter the inlet or outlet of the instrument. Do not
remove the protective end caps until time of installation.

Recommended installation procedures:

a. The Model 5964/5850EM should be located in a clean, dry atmo-

sphere relatively free from shock and vibration.

b. Leave sufficient room for access to the electrical components, span

and zero potentiometers.

c. Install in such a manner that permits easy removal if the instrument

requires servicing.

CAUTION

When used with a reactive (sometimes toxic gas) contamination
or corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
instrument purged with clean, dry N

d. The Model 5964/5850EM Mass Flow Controller can be installed in

any position. However , mounting in orientations other than the
original factory calibration (see calibration data sheet) can result in a

0.5% maximum full scale shift after re-zeroing.

before use.

2

2-3

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

CAUTION

Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.

e. The control valve in the Model 5964/5850EM provides precision

control and is not designed for positive shut-off. If positive shut-off is
required, it is recommended that a separate shut-off valve be
installed in-line.

2-9 Electrical Interface

2-4

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

To insure proper operation, the Model 5964/5850EM must be connected
per Figures 2-1 through 2-6 depending upon the type of printed circuit
board and connector. As a minimum, the following connections must be
made:

Voltage I/O Version Current I/O V ersion

• Chassis Ground • Chassis Ground

• Signal Common • Signal Output Return

• Signal Output • Voltage or Current

• +15 Vdc Supply Signal Output

• -15 Vdc Supply • 15-28 Vdc Supply

• Command Input • Supply Common

• Command Common • Voltage or Current

• Supply Common • V oltage or Current

• Valve Return (Specific Command Input
to applications see below) • Command Return

NOTICE

The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.

2-10 Operation Procedure

Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.

Note: If older Brooks secondary electronics are used to power and control
the Model 5964/5850EM, the 5 Volt reference must be enabled. Brooks
secondary electronics that require the 5 Volt reference consist of 587x and
589x series.

a. Mount the controller in its final orientation.
b. Apply power to the controller and allow approximately 45 minutes for

the instrument to warm up and stabilize its temperature.
c. Turn on the gas supply.
d. Command zero percent (0%) flow and observe the controller’s output

signal. If the output is not zero mVdc (10 mVdc), check for leaks and, if

none are found, refer to the re-zeroing procedure in Section 3-6.
e. Set the command for the desired flow rate to assume normal operation.

Note: If a separate positive shut-off valve is not installed, a flow signal

may result from leak-through. Leak-through is more significant with

stainless steel and Teflon valve seats.

2-5

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

5V Ref. or Valve Return or Not Used***10 L Valve Off

* This pin is used for Valve Common on Unit replacement PC Board.
** Remote Transducer In on 3 second response PCB only. Refer to Figure 3-6.
*** Jumper selectable. Refer to Figure 3-5 or 3-6.

Figure 2-1 Card Edge Connector

SLOT

110986

5432LABCD

Component Side

of PC Board

Chassis Ground 1 A Command Input

Flow Signal Common* 2 B Command Common

Flow Signal Output 3 C Supply Common

+15 Vdc Supply 4 D Valve Test Point

Not Used** 5 E Not Used

Not Used 6 F -15Vdc Supply

Slot 7 H Slot

Not Used 8 J Not Used

Valve Override 9 K Not Used

SLOT

EFJK

Non-Component Side

of PC Board

1

9

8

15

Pin No. Function Color Code

1 Command Common Black
2 0-5 Volt Signal Output White
3 Not Used/External Valve Return* Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge Wht/Blk
8 Command Input Red/Blk

9 Supply Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Not Used** Blu/Wht

*Jumper Selectable - Refer to Figure 3-7 or 3-8.
**Jumper Selectable - Remote Transducer input on standard response PC board only.

Refer to Figure 3-8.

Figure 2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions

2-6

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

PCB No. Connector Pin No. Function Color Code

1 1 Chassis Ground Brown
A 2 Command Input Red
2 3 0-5 V Signal Common* Orange
B 4 Command Common Yellow
3 5 0-5 V Signal Output Green

C 6 Supply Common Blue

4 7 +15 Vdc Supply Violet

D 8 Valve test Point Gray

5 9 Not Used** White

E 10 Not Used Black

6 11 Not Used Brown

F 12 -15 Vdc Input Red

7 13 Slot Orange

H 14 Slot Yellow

8 15 Not Used Green
J 16 Not Used Blue
9 17 Valve Override Violet

K 18 Not Used Gray

10 19 +5 V Reference Output or Valve Return*** White

L 20 Valve Off Black
*This Pin is used for Valve Common on Unit replacement PC board.
**Jumper Selectable Remote Transducer input on standard response PC board only. Refer to Figure 3-6.
***Jumper Selectable - Refer to Figure 3-5 or 3-6.

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram

2-7

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

1

9

Pin No. Function Color Code

1 Command Return Black
2 0-5 Volt Signal Output White
3 Not Used Red
4 Current Signal Output Green
5 +15 to +28 Vdc Supply Orange
6 Not Used Blue
7 Current Command Input Wht/Blk
8 Voltage Command Input Red/Blk

9 Supply Common Grn/Blk
10 Signal Output Return Org/Blk
11 +5 Volt Reference Output Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Not Used Blu/Wht

Figure 2-4 D-Connector Shielded Cable Hookup Diagram - Current
I/O Version

8

15

2-8

1000

900

ALLOWABLE OPERATING RANGE

800

700

600

500

400

300

200

100

TOTAL LOOP RESISTANCE (OHMS)

0

14 27262221 2825

2423201918171615

POWER SUPPLY VOLTAGE (VOLTS)

Figure 2-5 Maximum Allowable Loop Resistance - Current I/O Version

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

+

Power Supply

15 - 28 Vdc

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

+

Current

1

9

8

15

Setpoint

Input

Note 2

Com

+

Power Supply

15 - 28 Vdc

Com

Current Output

Signal Output

Return

Indicator or

+

Receiver

Current Signal: Setpoint and Output

+

Voltage

1

9

8

15

Setpoint

Input

V

Ret

Note 2

Voltage Output

Signal Output

Return

Ret

Indicator or

+

Receiver

Voltage Signal: Setpoint and Output

Notes:

1. The returns for the command input and current output are not isolated from power supply common.

2. Tie cable shields to ground at one end only.

3. Current and voltage outputs may be used simultaneously.

Figure 2-6 Common Electrical Hookups Current I/O Version

2-9