Brooks Instrument 5850EM User Manual

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG

November, 2008 Brooks

Brooks® Models 5964, 5850EM

Mass Flow Controllers

®

Models 5964, 5850EM

Model 5964

Mass Flow Controller

with D-Connector

Model 5850EM Downported

Mass Flow Controller

with Card Edge

Model 5850EM

Mass Flow Controller

with D-Connector

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

Brooks® Models 5964, 5850EM

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG

November, 2008 Brooks

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

®

Models 5964, 5850EM

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Paragraph Page
Number Number

Section 1 Introduction

1-1 How to Use This Manual ............................................................................................................1-1

1-2 Description .................................................................................................................................1-1

1-3 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ............................................................................................... 2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Transit Precaution ......................................................................................................................2-2

2-6 Removal from Storage ...............................................................................................................2-2

2-7 In-Line Filter ...............................................................................................................................2-3

2-8 Installation ..................................................................................................................................2-3

2-9 Electrical Interface......................................................................................................................2-4

2-10 Operation Procedure..................................................................................................................2-5

Brooks® Models 5964, 5850EM

Contents

Section 3 Operation

3-1 Overview .................................................................................................................................... 3-1

3-2 Connections and Controls ..........................................................................................................3-1

3-3 Theory of Operation ......................................................................................................... ..........3-4

3-4 Features .....................................................................................................................................3-6

3-5 Adjustment Potentiometers.......................................................................................................3-15

3-6 Zero Adjustment........................................................................................................................3-16

3-7 Calibration Procedure ...............................................................................................................3-17

3-8 Response Adjustment ...............................................................................................................3-22

Section 4 Maintenance

4-1 Overview .................................................................................................................................... 4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Gas Conversion Factors ............................................................................................................4-6

4-4 Orifice Sizing.............................................................................................................................4-10

4-5 Restrictor Sizing........................................................................................................................4-15

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

i

Contents

Brooks® Models 5964, 5850EM

Figures

Figure Page
Number Number

1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM

with D-Connector and VCR Fittings ........................................................................................ 1-5

1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM

with Card Edge and VCR Fittings............................................................................................ 1-6

1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector .... 1-7

1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge ....... 1-8

2-1 Card Edge Connector ............................................................................................................. 2-6

2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram................................................ 2-7

2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O V ersion..................................... 2-6

2-4 D-Connector Shielded Cable Hookup Diagram - Current I/O Version..................................... 2-8

2-5 Maximum Allowable Loop Resistance-Current I/O version ..................................................... 2-8

2-6 Common Electrical Hookups Current I/O version ...................................................................2-9

3-1 Model 5964/5850EM Components.......................................................................................... 3-2

3-2 Externaslly Accessible Adjustments ........................................................................................ 3-3

3-3 Flow Sensor Operational Diagram (VCRTM End Connections Shown) .................................... 3-4

3-4 Flow Controller System Block Diagram................................................................................... 3-4

3-5 Enhanced Response 20 Pin Card Edge PC Board Jumper location and Function ................. 3-6

3-6 Standard Response 20 Pin D-Connector PC Board Jumper location and Function................ 3-7

3-7 Enhanced Response 15 Pin D-Connector PC Board Jumper location and Function.............. 3-8

3-8 Standard Response 15 Pin D-Connector PC Board Jumper location and Function................ 3-9

3-9 Current I/O Version PC Board Jumper Location and Function.............................................. 3-10

3-10 Command Steps, Soft S tart Disabled .................................................................................... 3-11

3-11 100% Command Steps, Soft Start Enabled........................................................................... 3-1 1

3-12 Adjustment Potentiometer Location ...................................................................................... 3-14

3-13 Bench Troubleshooting Circuit .............................................................................................. 3-16

3-14 Response Adjustment ........................................................................................................... 3-22

4-1 Model 5964/5850EM Orifice Sizing Nomograph ................................................................... 4-11

4-2 Example Nomograph ............................................................................................................ 4-14

Installation and Operation Manual

X -TMF-5964-5850EM-MFC-eng

Part Number:541B121AHG

November, 2008

Tables

Table Page
Number Number

2-1 Recommended Filter Size..........................................................................................................2-3

3-1 Cables, calibration Covers and PC Boards for Model 5964/5850EM......................................... 3-3

4-1 Bench Troubleshooting .............................................................................................................. 4-4

4-2 Sensor Troubleshooting .............................................................................................................4-5

4-3 Conversion Factors (Nitrogen Base)..........................................................................................4-7

4-4 Model 5964/5850EM Standard Restrictors................................................................................4-16

ii

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

1-1 How to Use This Manual

1-2 Description

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the
Brooks

This manual is organized into the following sections:

The Brooks Models 5964 and 5850EM Mass Flow Controllers is used in
gas flow handling systems where very low leakage and high performance
are required. The Models 5964 and 5850EM incorporates metal seals or
welded joints, insuring leak integrity for high purity and high vacuum
applications. Reducing the amount of internal threads makes the design
less prone to system contamination. The control electronics and flow
sensor designs utilized in the Models 5964 and 5850EM have been well­proven in precision gas delivery systems. S tandard features include:

®

Models 5964 and 5850EM

Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
Section A CE Certifications
Back Cover Warranty, Local Sales/Service Contact Information

• High leak integrity (less than 10

-10

atm-cc/sec He)

• Enhanced process (7 Ra) internal surface finish (Optional 5850EM)

• Electropolished wetted surfaces (Optional 5850EM)

• High purity V AR 316L Stainless S teel

• All metal seals

• Particulate free

• Wide flow range (0.06 sccm through 30,000 sccm)

• Insensitive to mounting attitude

• Negligible flow overshoot/undershoot

• Fast response control permits rapid gas settling times with minimal
over/undershoot. Refer to Figure 1-1.

• Helium leak check ports

• Class 100 Clean Room assembly and calibration (Optional 5850EM)

• Available with all popular process connections

1-1

Section 1 Introduction

Brooks® Models 5964, 5850EM

1-3 Specifications

PERFORMANCE CHARACTERISTICS:

Flow Ranges*

Any range from 0 - 3 sccm to 0 - 30,000 sccm Nitrogen equivalent. Lower
flows available, consult factory .

*Standard: 0°C and 101 kPa (760 Torr). Per SEMI Guideline E12-96.

Control Range

2 - 100% with elastomeric valve seat
3 - 100% with metal or Teflon® valve seat

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Accuracy

1% Full Scale including linearity , at calibration conditions

1.5% Full Scale including linearity , for flow ranges greater than 20 slpm

Repeatability

0.25% of rate

Settling Time
Model 5964: Enhanced response PCB's less than 1 sec to within 2% of

Full Scale of final value for a 0-100% command step with Normally Closed
Valve. (Optional on 5850EM).
Model 5850EM: Less than 3 seconds to within 2% of Full Scale of final
value for a 0-100% command step with Normally Closed V alve.*

*Per SEMI Guideline E17-91.
Mounting Attitude Sensitivity

Available in any position

0.5% maximum full scale deviation after rezeroing

T emperature Sensitivity

Zero: Less than ±0.075% full scale per °C
Sp an: Less than ±1.0% full scale shif t over 10-50°C range

Pressure Equipment Directive (PED) 97/23/EC

Sound Engineering Practice

1-2

Pressure Sensitivity

0.008% per psi Nitrogen

RATINGS:

Operating Pressure

1,500 psi (10.342 MPa) max.

Note: 150 psi for enhanced response
500 psi for st ainless steel fasteners option.

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Differential Pressure

V alve orifice sized for any pressure drop between 5 to 50 p si (Minimum
pressure drop depends on gas and range).

Ambient T emperature Limit s

Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to 212°F (-25°C to 100°C)

Leak Integrity

Inboard to outboard 1 x 10

-10

atm. cc/sec. Helium max.

PHYSICAL CHARACTERISTICS:

Materials of Construction

316L V AR (Vacuum Arc Remelt), 316L, and high alloy ferritic stainless

steel.
External seals: Nickel.
Internal seals: Nickel.

V alve Seat: 316L, V iton® fluoroelastomers, Buna-N, Kalrez® or Teflon®.

Dimensions

Refer to Figures 1-1 thru 1-4

Process Connections

1/4" Tube VCR

TM

Downport C-Seal
Downport W-Seal

Surface Finish

5850EM: 32Ra, Passivated
5964: 7Ra, Electropolished

ELECTRICAL CHARACTERISTICS:

Electrical Connections

Card Edge: 30 microinch gold over low stress nickel-plated copper
D-Connector: 15 Pin (DA-15P)

Command Input

V oltage Option: 0-5 Vdc (Input resist ance 40 k ohm min.)
Current Option: 4-20 mAdc (Input resistance 75 ohm)

Output Signal

V oltage Option: 0 to 5 Vdc into 2,000 ohms minimum
Current Option: Jumper selectable 4-20 mAdc or 0-20 mAdc, refer to
Figure 2-6 for maximum total loop resistance

1-3

Section 1 Introduction

Brooks® Models 5964, 5850EM

ELECTRICAL CHARACTERISTICS (continued):

5 V olt Reference Output

5 Volt s, ±0.01 Vdc into 2,000 ohms minimum

Power Requirements

Voltage Option:
N.C. V alve (or N.O. Valve with flow less than 2.5 slpm):

N.O. V alve with flow rate greater than 2.5 slpm:

Current Option:
+15 Vdc to +28 Vdc: 3.68 Watts min, +15 Vdc @ 245 mA

Power Supply Sensitivity

None within ±5% of specified voltage (See Power Requirements)

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

3.25 watts max., + 15 Vdc @ 35 mA -15 Vdc @ 180 mA

10.5 watts max.,+15 Vdc @ 350 mA, -15 Vdc @ 350 mA

10.36 Watts max., +28 Vdc @ 370 mA

1-4

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 1-1 MFC/MFM Dimensional Drawing for Model 5964/5850EM with D-Connector and VCR Fittings

1-5

Section 1 Introduction

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Figure 1-2 MFC/MFM Dimensional Drawing for Model 5964/5850EM with Card Edge and VCR Fittings

1-6

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 1 IntroductionInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 1-3 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with D-Connector

1-7

Section 1 Introduction

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Figure 1-4 MFC/MFM Dimensional Drawing for Model 5964/5850EM Downported with Card Edge

1-8

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

2-1 General

2-2 Receipt of Equipment

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

This section contains the procedures for the receipt and installation of the
instrument. See Section 1 for dimensional and connection requirements.
Do not attempt to start the system until the instrument has been
permanently installed. It is important that the start-up procedures be
followed in the exact sequence presented.

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-3 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare part s are not
discarded with the packing materials. Inspect for damaged or missing
parts.

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following conditions:

a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

45°F (7°C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-1

Section 2 Installation

Brooks® Models 5964, 5850EM

2-4 Return Shipment

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

2-5 Transit Precautions

2-6 Removal from Storage

Instrument must have been purged in accordance with the following:

All flow instruments returned to Brooks requires completion of Form
RPR003-1, Brooks Instrument Decontamination S tatement, along with a
Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument.
Failure to provide this information will delay processing by Brooks
personnel. Copies of these forms can be downloaded from the Brooks
website www .BrooksInstrument.com or are available from any Brooks
Instrument location listed above.

To safeguard the instrument against transportation damage, it is
recommended to keep the instrument in its factory container until ready for
installation.

2-2

Upon removal of the instrument from storage, a visual inspection should be
conducted to verify its "as-received" condition. If the instrument has been
subject to storage conditions in excess of those recommended (See
Section 2-3), it should be subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

2-7 In-Line Filter

2-8 Installation

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the
flow sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Prior to installation, make certain all piping is clean and free of
obstructions, for tubing installations. Install the piping in such a manner
that permits easy access to the instrument if it needs to be removed for
cleaning or test bench troubleshooting. For surface mount (downported)
devices verify that the seal cavities are clean and free of lateral
scratches.

CAUTION

When installing the controller, care should be taken that no
foreign materials enter the inlet or outlet of the instrument. Do not
remove the protective end caps until time of installation.

Recommended installation procedures:

a. The Model 5964/5850EM should be located in a clean, dry atmo-

sphere relatively free from shock and vibration.

b. Leave sufficient room for access to the electrical components, span

and zero potentiometers.

c. Install in such a manner that permits easy removal if the instrument

requires servicing.

CAUTION

When used with a reactive (sometimes toxic gas) contamination
or corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
instrument purged with clean, dry N

d. The Model 5964/5850EM Mass Flow Controller can be installed in

any position. However , mounting in orientations other than the
original factory calibration (see calibration data sheet) can result in a

0.5% maximum full scale shift after re-zeroing.

before use.

2

2-3

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

CAUTION

Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.

e. The control valve in the Model 5964/5850EM provides precision

control and is not designed for positive shut-off. If positive shut-off is
required, it is recommended that a separate shut-off valve be
installed in-line.

2-9 Electrical Interface

2-4

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

To insure proper operation, the Model 5964/5850EM must be connected
per Figures 2-1 through 2-6 depending upon the type of printed circuit
board and connector. As a minimum, the following connections must be
made:

Voltage I/O Version Current I/O V ersion

• Chassis Ground • Chassis Ground

• Signal Common • Signal Output Return

• Signal Output • Voltage or Current

• +15 Vdc Supply Signal Output

• -15 Vdc Supply • 15-28 Vdc Supply

• Command Input • Supply Common

• Command Common • Voltage or Current

• Supply Common • V oltage or Current

• Valve Return (Specific Command Input
to applications see below) • Command Return

NOTICE

The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.

2-10 Operation Procedure

Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.

Note: If older Brooks secondary electronics are used to power and control
the Model 5964/5850EM, the 5 Volt reference must be enabled. Brooks
secondary electronics that require the 5 Volt reference consist of 587x and
589x series.

a. Mount the controller in its final orientation.
b. Apply power to the controller and allow approximately 45 minutes for

the instrument to warm up and stabilize its temperature.
c. Turn on the gas supply.
d. Command zero percent (0%) flow and observe the controller’s output

signal. If the output is not zero mVdc (10 mVdc), check for leaks and, if

none are found, refer to the re-zeroing procedure in Section 3-6.
e. Set the command for the desired flow rate to assume normal operation.

Note: If a separate positive shut-off valve is not installed, a flow signal

may result from leak-through. Leak-through is more significant with

stainless steel and Teflon valve seats.

2-5

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

5V Ref. or Valve Return or Not Used***10 L Valve Off

* This pin is used for Valve Common on Unit replacement PC Board.
** Remote Transducer In on 3 second response PCB only. Refer to Figure 3-6.
*** Jumper selectable. Refer to Figure 3-5 or 3-6.

Figure 2-1 Card Edge Connector

SLOT

110986

5432LABCD

Component Side

of PC Board

Chassis Ground 1 A Command Input

Flow Signal Common* 2 B Command Common

Flow Signal Output 3 C Supply Common

+15 Vdc Supply 4 D Valve Test Point

Not Used** 5 E Not Used

Not Used 6 F -15Vdc Supply

Slot 7 H Slot

Not Used 8 J Not Used

Valve Override 9 K Not Used

SLOT

EFJK

Non-Component Side

of PC Board

1

9

8

15

Pin No. Function Color Code

1 Command Common Black
2 0-5 Volt Signal Output White
3 Not Used/External Valve Return* Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge Wht/Blk
8 Command Input Red/Blk

9 Supply Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Not Used** Blu/Wht

*Jumper Selectable - Refer to Figure 3-7 or 3-8.
**Jumper Selectable - Remote Transducer input on standard response PC board only.

Refer to Figure 3-8.

Figure 2-3 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions

2-6

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

PCB No. Connector Pin No. Function Color Code

1 1 Chassis Ground Brown
A 2 Command Input Red
2 3 0-5 V Signal Common* Orange
B 4 Command Common Yellow
3 5 0-5 V Signal Output Green

C 6 Supply Common Blue

4 7 +15 Vdc Supply Violet

D 8 Valve test Point Gray

5 9 Not Used** White

E 10 Not Used Black

6 11 Not Used Brown

F 12 -15 Vdc Input Red

7 13 Slot Orange

H 14 Slot Yellow

8 15 Not Used Green
J 16 Not Used Blue
9 17 Valve Override Violet

K 18 Not Used Gray

10 19 +5 V Reference Output or Valve Return*** White

L 20 Valve Off Black
*This Pin is used for Valve Common on Unit replacement PC board.
**Jumper Selectable Remote Transducer input on standard response PC board only. Refer to Figure 3-6.
***Jumper Selectable - Refer to Figure 3-5 or 3-6.

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 2-2 20 Pin Card Edge Connector Ribbon Cable Hookup Diagram

2-7

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

1

9

Pin No. Function Color Code

1 Command Return Black
2 0-5 Volt Signal Output White
3 Not Used Red
4 Current Signal Output Green
5 +15 to +28 Vdc Supply Orange
6 Not Used Blue
7 Current Command Input Wht/Blk
8 Voltage Command Input Red/Blk

9 Supply Common Grn/Blk
10 Signal Output Return Org/Blk
11 +5 Volt Reference Output Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Not Used Blu/Wht

Figure 2-4 D-Connector Shielded Cable Hookup Diagram - Current
I/O Version

8

15

2-8

1000

900

ALLOWABLE OPERATING RANGE

800

700

600

500

400

300

200

100

TOTAL LOOP RESISTANCE (OHMS)

0

14 27262221 2825

2423201918171615

POWER SUPPLY VOLTAGE (VOLTS)

Figure 2-5 Maximum Allowable Loop Resistance - Current I/O Version

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

+

Power Supply

15 - 28 Vdc

Section 2 InstallationInst allation and Operation Manual

Brooks® Models 5964, 5850EM

+

Current

1

9

8

15

Setpoint

Input

Note 2

Com

+

Power Supply

15 - 28 Vdc

Com

Current Output

Signal Output

Return

Indicator or

+

Receiver

Current Signal: Setpoint and Output

+

Voltage

1

9

8

15

Setpoint

Input

V

Ret

Note 2

Voltage Output

Signal Output

Return

Ret

Indicator or

+

Receiver

Voltage Signal: Setpoint and Output

Notes:

1. The returns for the command input and current output are not isolated from power supply common.

2. Tie cable shields to ground at one end only.

3. Current and voltage outputs may be used simultaneously.

Figure 2-6 Common Electrical Hookups Current I/O Version

2-9

Section 2 Installation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

2-10

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

3-1 Overview

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

After the flowmeter has been properly installed in the process, it is ready
for operation. When initiating flow , slowly open the valve to avoid a flow
surge.Bypass is a help in bringing the flow on smoothly. Avoid starting a
pump to supply the flowmeter without the use of a valve upstream of the
flowmeter.

This section contains the following information:

• Features and Jumper Configurations

• Theory of Operation

• Adjustment Potentiometers

• Calibration and Response Adjustments

3-2 Connections and Controls

Figure 3-1 shows the locations of the Model 5964/5850EM controls and
connections. Figure 3-2 identifies the externally accessible adjustment
potentiometers located on the inlet side of the instrument.

3-1

Section 3 Operation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Electronics Cover

Adjustment
Potentiometers

Inlet
Connector

Electrical
Interface

Electrical
Interface

Valve Connector

Valve Coil
Assembly

Outlet
Connector

Tubing Connections

Electronics Cover

Valve Connector

Adjustment
Potentiometers

Mounting
Fastener Bore

Downported

Figure 3-1 Model 5964/5850EM Components

Valve Coil
Assembly

3-2

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Table 3-1 Cables, Calibration Covers and PC Boards for Model 5964/5850EM

Break Out Board Assembly:
Card Edge P/N S273Z649AAA
D-Connector P/N S273Z668AAA

Calibration Cover:
Card Edge P/N 909Z011EAD
D-Connector P/N 909Z017EAD

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Installs directly between mass flow controller and
interconnecting cable. Allows convenient access to all signals
for easy troubleshooting of the system.

Contains:
1 Break Out PC Board
1 5 foot Extension Cable
1 Terminal PC Board

5964/5850EM To Model Cable Type Cable Part Number

0151E (Panel) Ribbon S124Z469AAA S124Z470AAA S124Z471AAA S124Z472AAA

Card Open Frame

Edge 0151E (Table Top)

0152E Shielded S124Z669AAA S124Z539AAA S124Z562AAA S124Z670AAA
0154E

0151E (Panel) Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA
D-Connector Open Frame
(Voltage I/O) 0151E (Table Top)

0152E Shielded S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA
0154E

0151i (Panel) Shielded S124Z361AAA S124Z362AAA S124Z363AAA S124Z435AAA
D-Connector 0151i (Table Top)
(Current I/O) 0152i Shielded S124Z576AAA S124Z577AAA S124Z578AAA S124Z579AAA

0154i

***QTA = Viton, SUA = Buna, TTA = Kalrez

Calibration covers reduce the chance of accidental cantact with
the circuit board but allow access for all adjustment
potentiometers and test points needed for calibration.

5 feet 10 feet 25 feet 50 feet

3-3

Section 3 Operation

Brooks® Models 5964, 5850EM

3-3 Theory of Operation

The thermal mass flow sensing technique used in the Model 5964/5850EM
works as follows:

A precision power supply provides a const ant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. Refer to Figure
3-3. At zero, or no flow conditions, the heat reaching each temperature
sensor is equal. The temperatures T1 and T2, therefore, are equal. When
gas flows through the sensor tube, the upstream sensor is cooled and the
downstream sensor is heated which produces a temperature difference.
The temperature difference T2-T1 is directly proportional to the gas mass
flow. The equation is:

Where:
ΔT = T emperature difference T2 - T1 (K)
Cp = Specific heat of the gas at constant pressure (kJ/kg-K)
P = Heater power (kJ/s)
m = Mass flow (kg/s)
A = Constant of proportionality (s

Installation and Operation Manual

ΔT = A * P * Cp * m

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

2-K2

/kJ2)

A bridge circuit interprets the temperature difference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.

Side View

Span

Zero

Figure 3-2 Externally Accessible Adjustments

3-4

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 3-3. Flow Sensor Operational Diagram (VCRTM End Connections Shown)

Figure 3-4. Flow Control System Block Diagram.

3-5

Section 3 Operation

Brooks® Models 5964, 5850EM

The flow restrictor shown in Figure 3-3 performs a ranging function similar
to a shunt resistor in an electrical ammeter . The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter . Dif ferent
restrictors have different pressure drops and produce meters with different
full scale flow rates. The span adjustment, in the electronics, af fects the
fine adjustment of the meter's full scale flow .

In addition to the mass flow sensor, the Model 5964/5850EM Mass Flow
Controller has an integral control valve and control circuit as shown in
Figure 3-4. The control circuit senses any difference between the flow
sensor signal and the command input, adjusting the current in the
modulating solenoid valve to increase or decrease the flow.

3-4 Features

Note: All Model 5964/5850EM mass flow controllers/meters are configured
at the factory as ordered and do not require adjustment. The following
section is for reference should installation conditions change. Not all
features are available on all devices.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Refer to Figures 3-5 through 3-9 depending upon the type of printed circuit
board and connector for jumper locations, functions and adjustment
potentiometers.

Note: To obtain access to the jumpers and test points referenced in this
section, the Electronics Cover must be removed. Extract the cover by
removing the three screws and the valve connector. The cover must be
replaced before returning the device to service.

Fast Response

Adjusted by the anticipate potentiometer , and where applicable the
response potentiometer, this circuit, when properly adjusted, allows the
high frequency information contained in the sensor signal to be amplified.
This provides a faster responding flow signal for remote indication and use
by the control valve.

Soft St art (Refer to Figures 3-10 and 3-11)
This circuit provides a slow injection of the gas as a protection to the
process, particularly those using a volatile or reactive gas. Full gas flow is
achieved in approximately 15 seconds. This is enabled by moving the J2­Red Jumper on the printed circuit board. Refer to Figures 3-5 through
3-9, as applicable for jumper configurations.

V alve Test Point/Purge

This feature allows the user to monitor a relative control valve voltage
during operation. One terminal of the valve coil is connected to the -15 Vdc
supply , the other terminal is modulated by the electronics. The relative
valve voltage can be measured between circuit common and Pin D of the
card edge version or Pin 7 of the D-Connector version.

3-6

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

CIRCUIT COMMON TP4

VALVE VOLTAGE TP3

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE (-) TP1

SENSOR VOLTAGE (+) TP0

ADJUSTMENT POTENTIOMETERS:

Grounding the valve test point pin will cause the valve to open fully on
normally closed devices and close fully on normally open devices
regardless of command input voltage.
Note: The Current I/O Version does not of fer purge functions or a relative
control valve voltage monitor .

TEST POINTS:

LINEARITY

ANTICIPATE

ZERO

RESPONSE

SPAN

J1

C

AB

R4

R1

R12

R6

R9

D

J5

A

B

SENSOR

CONNECTOR

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

J5 - GREEN
LINEARITY JUMPER

- Error+ Error

ABAB

VALV E
CONNECTOR

J2

N

SS

J2 - RED
SOFT START

Disabled

(Standard)

CS REV G (944), D (992) & C (061) AND HIGHER.
COMPONENT SIDE SHOWN.

J1 - CONFIGURATIONS

BLACK

CD

YELLOW

AB

External Valve Return.

Pin 10 is grounded

at the Power Supply

end of the cable.
5V Ref. disabled.

NOTE:
For S097X061AAA PC Boards all J1 Pins should be open.

CD

BLACK

5V Ref. is enabled

on Pin 10.

YELLOW

AB

CD

YELLOW

BLACK

AB

Pin 10 is connected

to Circuit Common.

5V Ref. disabled.

(Standard)

Figure 3-5 Enhanced Response 20 Pin Card Edge PC Board Jumper Location and Function

Enabled

3-7

Section 3 Operation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

J7 - GREEN
REMOTE TRANSDUCER INPUT

Disabled

(Standard)

CIRCUIT COMMON TP4

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE TP1

ADJUSTMENT POTENTIOMETERS:

Enabled

TEST POINTS:

VALVE TEST TP3

(Multiplied by -100)

SPAN

LINEARITY

ANTICIPATE

ZERO

CAUTION

R

R1

R2

R3

R4

J7

NO

NC

J4

J8

N

J3

SENSOR

CONNECTOR

J1

J2

N

SS

J4 & J1 - BLUE
VALVE FUNCTION

Normally

Closed

NOTE:

Normally open valves are

identified by a label on the
solenoid cover.

VALV E
CONNECTOR

Normally

J2 - RED
SOFT START

Disabled

(Standard)

Open

J8

J3

Do not place a jumper

between J8 and J3 as
shown above.

Permanent damage

to the board will result.

J8 - YELLOW
5 VOLT REFERENCE & PIN 10 FUNCTION

J8

5V Ref. enabled

on Pin 10.

Pin 10 is Connected

to Circuit Common.

5V Ref. Disabled.

J8

(Standard)

J8

J3

External Valve Return. Use

where Pin 10 is connected
to Power Supply Common at
the Power Supply for 15 Volt

Valve Drive or where Pin 10

is connected to +15 Volts

at the Power Supply for

30 Volt Valve Drive.

5V Ref. Disabled.

J3 - BLACK
VALVE DRIVE

Figure 3-6 Standard Response 20 Pin Card Edge PC Board Jumper Location and Function

Enabled

CS REV J AND HIGHER.

COMPONENT SIDE SHOWN.

J3

Valve Drive

(15 Volts)

J3

Valve Drive

(30 Volts)

3-8

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

J3 - BLACK
VALVE DRIVE JUMPER

J1 - GREEN
LINEARITY JUMPER

- Error

CIRCUIT COMMON TP4

VALVE VOLTAGE TP3

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE (-) TP1

SENSOR VOLTAGE (+) TP0

ADJUSTMENT POTENTIOMETERS:

B

+ Error

A

TEST POINTS:

SPAN

LINEARITY

ANTICIPATE

ZERO

RESPONSE

Valve Drive

(15 Volts)

B

A

J1

B

A

J3

R4

NOTE:

The 5V Reference is always enabled

and is available on Pin 11.

VALVE
CONNECTOR

External

Valve

Return

R1

R12

J2

R6

R9

SENSOR

CONNECTOR

J2 - RED
SOFT START

CS REV H (984) & B (119).
COMPONENT SIDE SHOWN.

Figure 3-7 Enhanced Response 15 Pin D-Connector PC Board Jumper Location and Function

Disabled

(Standard)

Enabled

3-9

Section 3 Operation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

J7 - GREEN
REMOTE TRANSDUCER INPUT

TEST POINTS:

CIRCUIT COMMON TP4

VALVE VOLTAGE TP3

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE TP1

(Multiplied by -100)

ADJUSTMENT POTENTIOMETERS:

SPAN

LINEARITY

ANTICIPATE

ZERO

J2 - RED
SOFT START

Disabled

(Standard)

J7

R1

R2

R3

R4

NSS

J2

J3

SENSOR

CONNECTOR

51

50

J4

NC

J1

NO

Disabled

(Standard)

VALV E
CONNECTOR

J4 & J1 - BLUE
VALVE FUNCTION

Normally

Closed

NOTE:

Normally open valves are

identified by a label on the
solenoid cover.

Enabled

Normally

Open

Enabled

CS REV H AND HIGHER.

COMPONENT SIDE SHOWN.

J3 - BLACK
VALVE DRIVE JUMPER

Valve Drive.

(15 Volts)

NOTE:

The 5V reference is always enabled and is available on Pin 11.

Valve Drive.

(30 Volts)

External Valve Return.

Use where Pin 3 is connected

to Power Supply Common at

the Power Supply for 15 Volt

Valve Drive or where Pin 3

is connected to +15 Volts

at the Power Supply for

30 Volt Valve Drive.

Figure 3-8 Standard Response 15 Pin D-Connector PC Board Jumper Location and Function

3-10

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

TEST POINTS:

CIRCUIT COMMON TP4

VALVE VOLTAGE TP3

LINEARITY VOLTAGE TP2

SENSOR VOLTAGE TP1

(Multiplied by +100)

J7

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

J7 - GREEN
SETPOINT INPUT SIGNAL TYPE
(Mass Flow Controller only)

A

NOTE:

The 5V Reference is always enabled

and is available on Pin 11.

A

A

0 - 5 VOLTS4 - 20 mA

ADJUSTMENT POTENTIOMETERS:

SPAN

LINEARITY

ANTICIPATE

ZERO

J2 - RED
SOFT START

NSS

Enabled

NSS

Disabled

(Standard)

R1

R2

R3

R4

J2

NSS

CS REV H AND HIGHER.

COMPONENT SIDE SHOWN.

SENSOR

CONNECTOR

J4

J3

VALV E
CONNECTOR

B

A

B

A

J3 & J4 - BLUE
CURRENT OUTPUT RANGE

J4

B

A

B

J4

B

A

B

Figure 3-9 Current I/O Version PC Board Jumper Location and Function

A

J3

4 - 20 mA

Output

Note: Does not affect voltage output.

A

J3

0 - 20 mA

Output

3-11

Section 3 Operation

Brooks® Models 5964, 5850EM

Figure 3-10 Command Steps,Soft Start Disabled

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

ENHANCED RESPONSE PCB

3-12

Figure 3-11 100% Command Step, Soft Start Enabled

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Five-V olt Reference Output/Valve Drive Configuration

The 5 Volt reference output is required if a potentiometer is to be used to
generate the Command Signal. On Card Edge PC Boards, Pin 10 can be
jumper selected as any of three mutually exclusive functions, 5 V olt
reference output, external valve return or “not used.” In the "not used"
state Pin 10 is connected to Circuit Common.

CAUTION

Do not ground the 5 Volt reference output when it is enabled.
Improper operation of the printed circuit board will result.

The external valve return is used to minimize the effect of resistance in the
connection wiring. If the “external valve return” feature is not enabled, the
valve voltage is returned internally on the printed circuit board and the
connection wiring resistance must be less than 0.2 ohms.

a. Card Edge Connector Version

On the enhanced response PC Board, Pin 10 is configured using the J1
black and yellow jumpers. On the standard response PC Boards Pin 10
is configured using the J3 black and J8 yellow jumpers. Refer to Figure
3-5 or 3-6 as applicable for jumper configurations.

b. D-Connector - Volt age I/O Version Only

The valve drive is configured using the J3 black jumper. The 5 Volt
reference is always available on Pin 11. Refer to Figures 3-7 and 3-8 as
applicable for jumper configurations.

c. D-Connector - Current I/O Version

The current I/O PC Board provides a 5 Volt reference on Pin 11 at all
times. The external valve return is not available with this version. Valve
voltage is always returned internally on the printed circuit board. Refer
to Figures 2-4 and 3-9.

Valve Override

Allows full opening and closing of the control valve, independent of the
command input. The valve override for normally closed and normally open
mass flow controllers is as follows:

a. To open the valve, apply +15 Vdc supply volt age to the valve override pin.
b. To close the valve, apply -15 Vdc supply volt age to the valve override pin.
c. Isolating the valve override pin returns the controller to normal opera-

tion. The valve override function is activated by applying the appropri­ate voltage to Pin 9 for Card Edge versions or Pin 12 for D­Connector versions.

3-13

Section 3 Operation

Brooks® Models 5964, 5850EM

Valve Off

This feature allows the user to close the control valve by supplying a TTL
level low signal (<0.4 Vdc) to the proper terminal, independently of the
command input. A TTL level high or floating at this pin has no ef fect. Valve
off is accessed via Pin L on the Card Edge or Pin 4 on the D-Connector
version.
Note: V alve of f is not available on Current I/O versions.

Remote Transducer Input

This feature allows the use of the integral control electronics and valve to
regulate flow in response to signal from an external 0-5 Vdc signal. The
flow signal from the Model 5964/5850EM is still available for process
monitoring. This feature is only available on standard response versions.
The external signal is applied to Pin 5 on the Card Edge version or Pin 15
D-Connector. The input signal is selected by the J7 green jumper. Refer to
Figure 3-6 or 3-8 as applicable for jumper configurations.

Low Command Flow Cutoff (Auto Shut-Off)

Prevents the valve from opening whenever the command input is less than
2% of full scale. This function is always active and is present on all
versions.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Output Limiting

Prevents possible damage to delicate data acquisition devices by limiting
the output to +6.8 Vdc and -.7 Vdc (0 to 26 mA with the Current I/O
Option).

Current I/O Version (Refer to Figures 2-4, 2-5, 2-6 and 3-9)
a. Input Signal Selection

To use the current command, connect the command signal (+) to Pin 7
of the D-Connector and the command return (-) to Pin 1 of the
D-Connector. Configure the J7 green jumper in the left position.
To use the voltage command, connect the command signal (+) to Pin 8
and the command return (-) to Pin 1 of the D-Connector. Configure the
J7 green jumper in the right position.

b. Output Signal Selection

To use the current output, connect the output (+) signal to Pin 4 of the
D-Connector and the output return (-) to Pin 10. The current output
range is jumper selectable from 4-20 mA or 0-20 mA using the J3 and
J4 blue jumpers. The 0-5 Vdc output signal is always enabled on Pin 2.

3-14

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

3-5 Adjustment Potentiometers

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

All Model 5964/5850EM instruments are factory calibrated for optimum
performance. The only potentiometer recommended for field adjustment is
the Zero. As shown in Figure 3-2, access to the Zero Potentiometer is
provided by removing the plug labeled 'Z'. The S p an Adjustment is also
accessible by removing the 'S' plug, however, its adjustment is not
recommended as described below. Adjustment of the remaining
potentiometers necessitates removal of the electronics cover .

CAUTION

Adjusting potentiometers can seriously affect the performance of
the mass flow controller and should only be performed by
properly trained and qualified personnel.

Span

The span potentiometer is used to adjust the full scale setting of the mass
flow controller. An adjustment in the clockwise direction will give less flow
while turning counterclockwise will give more flow . Adjusting this
potentiometer will alter the calibration and is therefore not recommended
unless calibrating the device.

Side View

Span

Linearity

Anticipate

Zero

Response

Note:

1. Linearity, Anticipate and Response Potentiometers
necessitate removal of the electronics cover.

2. Not all Printed Circuit Boards contain
a Response Potentiometer.

Figure 3-12 Adjustment Potentiometer Location

3-15

Section 3 Operation

Brooks® Models 5964, 5850EM

Linearity

The linearity potentiometer is used to linearize the flow calibration due to
subtle non-linearities in various bypass elements. The linearity signal can
be viewed between TP2 and TP4 (circuit common). The value of the signal
is flow rate and gas dependent. On enhanced response PC boards
adjusting the potentiometer clockwise will increase the absolute value of
this number. On st andard response and Current I/O PC boards adjusting
the potentiometer clockwise will increase this number. Adjusting this
potentiometer will alter the calibration and is therefore not recommended
unless calibrating the device.

Anticipate

The anticipate potentiometer is used to adjust the response of the sensor
for steps in flow . Adjusting this potentiometer in the clockwise direction will
slow the response of flow signal and cause a controller to overshoot
more. Adjusting this potentiometer will alter the response of the mass flow
controller and is therefore not recommended unless adjusting the response
of the device.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

3-6 Zero Adjustment

Zero

The zero potentiometer is used to balance the thermal sensor at a no flow
condition. This potentiometer is adjusted at the time of calibration and
minor adjustments may be done in the field. See the "Zero Adjustment"
section below for details.

Response

The response potentiometer is used to adjust the response of the sensor
for steps in flow . Adjusting this potentiometer in the clockwise direction will
increase actual flow overshoot. Adjusting this potentiometer will alter the
response of the mass flow controller and is therefore not recommended
unless adjusting the response of the device.
Note: Only enhanced response printed circuit boards are equipped with a
response potentiometer.

Each Model 5964/5850EM is factory adjusted to provide a zero ±10 mVdc
at zero flow. The adjustment is made in our calibration laboratory which is
temperature controlled to 20°C (68°F ±3°F). After initial inst allation and
warm-up in the gas system, the zero flow indication may be other than the
factory setting. This is primarily caused by changes in temperature
between our calibration laboratory and the final installation. The zero flow
reading can also be affected, to a small degree, by changes in line
pressure and mounting attitude.

3-16

To check zero, always mount the controller in its final configuration and
allow a minimum of twenty minutes for the temperature of the controller
and its environment to stabilize. If an upstream shut-off valve is inst alled it
should be closed. Verify that the gas system is not pressurized. Using a
suitable voltmeter , check the controller output signal. If it dif fers from the
factory setting, adjust it by removing the lower pot hole plug (refer to Figure
3-2) which is located closest to the controller body . Adjust the zero
potentiometer until the desired output signal is obtained.

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

3-7 Calibration Procedure

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

If the valve has been disassembled and any of the following parts have
been replaced, the control valve adjusting procedure in Section 4-4 must
be performed before the Model 5964/5850EM is calibrated.

-orifice -lower guide spring

-valve stem -valve seat

-plunger assembly

Calibration of the Model 5964/5850EM mass flow controller requires the
use of a digital voltmeter (DVM) and a precision flow standard calibrator
such as the Brooks Instrument’s Vol-U-Meter. It is recommended that the
calibration be performed only by trained and qualified service personnel.
The recommended flow circuit for performing zero, adjustments, calibration
and troubleshooting is shown in Figure 3-13.

If the mass flow controller is to be used on a gas other than the calibration
gas, apply the appropriate gas conversion factor, (Refer to Section 4-5).
Size the orifice for actual operating conditions (Refer to Section 4-6).

If older Brooks’ secondary electronics, Models 5878, 5876 and 5896, are
being used as a power supply during the calibration, the 5 V olt reference
must be enabled on the card edge version for proper operation. Remember
to deactivate the 5 Volt reference before inst alling the calibrated mass flow
controller in the system where Terminal 10 is grounded.

CAUTION

Do not ground 5 Volt reference output when it is enabled.
Improper operation of the printed circuit board will result.

There are three fundamentally different printed circuit boards used on the
Model 5964/5850EM depending on line pressure and full scale flow rate.
The enhanced response PC Board is the primary board and is used for all
Nitrogen equivalent full scale flow rates above 50 sccm with line pressures
less than 150 psig. The settling time specification for the enhanced
response PC Board is one second. The second type of PC Board is the
standard response PC Board with a settling time of three seconds. The
enhanced response PC Board can be identified by five adjustment
potentiometers versus four potentiometers on the standard response PC
board. The third type of PC Board is the Current I/O version which also has
a settling time of three seconds.

Figure 3-13 Bench Troubleshooting Circuit

3-17

Section 3 Operation

Brooks® Models 5964, 5850EM

When calibrating the Current I/O Version, it is easiest to calibrate using
0-5 Vdc command and flow signals and follow the standard response
procedure. Refer to Section 3-4, Features, Current I/O Version, for proper
hookups. A fter calibration, the Model 5964/5850EM may be reconfigured
for Current I/O operation with negligible change in calibration.

Calibration Procedure for the Enhanced Response PC Board
(5 adjustment potentiometers)

a. With the controller installed in an unpressurized gas line, apply power

b. Rough-adjust the anticipate and response potentiometers fully clock-

c. Adjust zero by connecting the DVM (digital voltmeter) positive lead to

d. Apply pressure to the system and insure that the zero signal repeats

e. Set the command potentiometer for 100% flow (5.000 V). Connect the

f. Read the full scale sensor voltage and flowrate. Prior to taking the

g. Obtain the correct flowrate at 100% command by adjusting the span

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

and allow approximately 45 minutes for warm-up. During the warm-up,
adjustment, and calibration check procedures, do not allow the control
valve to drift when gas flow is not present. This situation is not a normal
operating mode and will cause abnormal heat-up of the control valve.
With this abnormally warm valve, the meter will be difficult to calibrate.
This situation can be prevented by switching a normally closed valve to
valve override closed or a normally open valve to valve override open
when there is no gas flow .

wise 20 turns. Then adjust the anticipate and response potentiometers
10 turns counterclockwise. This provides a rough adjustment of this
circuit and makes the flow more stable for calibration.

the 0-5 Volt output, (Pin 3 Card Edge, Pin 2 D-Connector) and the
negative lead to TP4 (circuit common). Adjust the zero potentiometer
(second pot from the bottom) for an output of zero mV ± 2 mV.

within 2 mV of the voltage set in Step c above. If the zero does not
repeat, check for leakage.
Note: Controllers with all metal or Teflon valve seats do not provide tight
shut-off. A 0-8% leak through is typical. For metal and Teflon seat
controllers, close a downstream shut-off valve and observe the flow
signal.

DVM positive lead to TP2 (linearity voltage) and the negative lead to
TP4 (circuit common). Adjust the linearity potentiometer for an output of

0.0 V (zero V olt s). As an alternative, you can turn the linearity potenti­ometer 25 turns counterclockwise.

measurement, allow a minimum of two minutes for the flow to stabilize.
Connect the DVM positive lead to TP1 and the negative lead to TP0.
Measure and record the voltage. If the flowrate is within specification,
skip to S tep h.

potentiometer , and calculate the new sensor voltage using the following
equation:

3-18

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Part Number: 541B121AHG
November, 2008

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Adjust the span potentiometer until the TP1 to TP0 (sensor volt age) is
equal to the value calculated above. Recheck the flow rate after the
flow is stable (at least two minutes). Repeat this step until the measured
flow rate is within specification. When the flow rate is within specifica­tion, record the sensor voltage and proceed to Step h.
Note: The TP1 to TP0 (sensor voltage) can range from about 12 mV to
about 120 mV . However, it is recommended that this voltage stay
between 20 mV and 90 mV for proper operation. If the recommended
voltage range is exceeded, the desired accuracy and/or signal stability
may not be achieved. If one of the limits is reached, check the orifice
and restrictor sizing using the procedures given in Sections 4-6 and 4-7
respectively.

h. Set the linearity jumper by adjusting the command potentiometer for

50% flow (2.500 V). Allow at least two minutes for the flow to fully
stabilize. Read the flow rate. Calculate the error using the following
equation:

Record the error:
If the error is positive (too much flow), the linearity jumper must be in

the (a) position (negative TP2 voltage).
If the error is negative (too little flow), the linearity jumper must be in the
(b) position (positive TP2 voltage).

i. Measure the linearity voltage by setting the command potentiometer to

100% flow (5.000 V) with the DVM positive lead connected to TP2 and
the negative lead connected to TP4. The proper full scale linearity
voltage can be calculated using the following equation:

Note: Error = The error calculated in S tep h.
Adjust the linearity potentiometer until the voltage at TP2 equals the
value calculated above.

k. Readjust the span by allowing the flowrate to stabilize at 100% for at

least 30 seconds. Connect the DVM positive lead to TP1 and
thenegative lead to TP0. Adjust the sp an potentiometer until the sensor
voltage (TP1 to TP0) equals the sensor voltage measured in Step g.

l. Check the calibration by rechecking zero and adjusting if necessary.

Check the flow rate accuracy at 25, 50, 75 and 100% command values.

m. Adjust the response characteristics. (Refer to Section 3-8).

3-19

Section 3 Operation

Brooks® Models 5964, 5850EM

Calibration Procedure for the Standard Response and Current I/O
PC Board (4 Adjustment Potentiometers)

a. With the controller installed in an unpressurized gas line, apply power

b. Rough adjust the anticipate potentiometer with 20 clockwise full turns.

c. Connect the DVM positive lead to the 0-5 V olt signal output, (Pin 3 Card

d. Apply pressure to the system and insure that the zero signal repeats

e. Set the command potentiometer for 100% of flow (5.000 V). Connect

f. Connect the DVM positive lead to TP1 (-100x sensor voltage) and the

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

and allow approximately 45 minutes for warm-up. During the warm-up,
adjustment, and calibration check procedures, do not allow the control
valve to drift when gas flow is not present. This situation is not a normal
operating mode and will cause abnormal heat-up of the control valve.
With this abnormally warm valve, the meter will be difficult to calibrate.
This situation can be prevented by switching a normally closed valve to
valve override closed or a normally open valve to valve override open
when there is no gas flow .

Then, adjust the anticipate potentiometer with 10 counterclockwise
turns to center the potentiometer . This will provide a rough adjustment
of this circuit and make the flow more stable for calibration.

Edge, Pin 2 D-Connector) and the negative lead to TP4 (circuit com­mon). Adjust the zero potentiometer for an output of zero mV ±2 mV.

within 2 mV of the voltage set in Step c above. If the zero does not
repeat, check for leakage.
Note: Controllers supplied with all metal or Teflon valve seats do not
provide tight shut-off. A 0-8% leak-through is typical. For metal or Teflon
seat controllers, close a downstream shut-off valve and observe the
flow signal.

the DVM positive lead to TP2 (linearity voltage) and the negative lead to
TP4 (circuit common). Adjust the linearity potentiometer for an output of

0.0 V (zero volts).
negative lead to TP4 (circuit common). The command potentiometer

should still be set at 100% flow (5.000 V). Measure the flow rate using
suitable volumetric calibration equipment. To adjust the controller to the
proper full scale flow , calculate a new TP1 volt age using the following
equation:

3-20

Adjust the span potentiometer until the voltage at TP1 is equal to the
value calculated above. Recheck the flow rate after the flow is stable (at
least two minutes). Repeat this check and adjustment procedure until
the measured flow rate is within 1% of the desired flow rate.

Note: The voltage at TP1 is -100 times the output volt age (+100 times
for Current I/O Version) of the sensor. This voltage can range from -1.2
to -12 V olt s, however , it is recommended that this voltage stay between

-2.0 and -9.0 V olts for proper operation. If the recommended volt ag e
range exceeds the desired range, accuracy and/or signal stability may
not be achieved. If one of the limits is reached, check the orifice and
restrictor sizing procedures given in Sections 4-6 and 4-7 respectively .

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

g. Set the command potentiometer for zero percent of flow. Connect the

DVM positive lead to flow signal output (Pin 3 Card Edge, Pin 2 D­Connector) and the negative lead to TP4 (circuit common). Readjust
the zero potentiometer for an output of zero mV ±2 mV as necessary .

h. Set the command potentiometer for 50% of flow (2.500 V) and measure

the flow rate. Calculate the error as a percentage of full scale.

Example:
What is the percent of full scale error when full scale is equal to 100
sccm?
Measured flow rate = 48.5 sccm
Desired flow rate = 50.0 sccm

i. Calculate the TP2 correction voltage:

error calculated in Step h x 0.450 Volts
Example:
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 V olts
New TP2 voltage = zero volt s + (-0.675) = -0675 Volts

j. Set the command potentiometer for 100% flow (5.000 V). Connect the

DVM positive lead to TP2 (linearity voltage) and the negative lead to
TP4 (circuit common).

k. Adjust the linearity potentiometer for an output equal to the new calcu-

lated TP2 voltage.

l. Repeat Steps f, g and h.

l1. If the error calculated in Step h is less than 0.5%, then the calibration

procedure is complete.

l2. If the error is greater than 0.5%, set the command potentiometer for

100% (5.000 V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common). Calculate a
new TP2 voltage as follows employing the measured TP2 volt age:

Example:
Controller error = 0.7%
Measured TP2 voltage = -0.567 V olts
TP2 correction = 0.7 x 0.450 = 0.315 V olts
New TP2 correction = 0.315 + (-0.567) = -0.252 V olt s

Adjust the linearity potentiometer for an output equal to the new TP2
correction voltage and then repeat S tep s f, g and h.

3-21

Section 3 Operation

Brooks® Models 5964, 5850EM

3-8 Response Adjustment

This section describes the procedure for step response adjustment. For
enhanced response PC Boards (5 potentiometers) follow either one of the
enhanced response procedures. For standard response PC Boards
(4 potentiometers) follow either one of the standard response procedures.
Two methods of adjusting the step response on the enhanced or st andard
response PC boards of the Model 5964/5850EM mass flow controller can
be used.

Adjustment #1 describes a method that will get the step response close to
optimum quickly and without any flow measuring equipment. This method
should be used when the response time of the flow controller is not critical
to overall system performance.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Note: The voltage at TP2 can range from -10 to +3 Volts. It is
recommended, however, that this volt age stay between -2.5 and
+2.5 Volt s for proper operation. If the recommended volt age range is
exceeded, the desired accuracy and/or signal stability may not be
achieved. If one of the limits is reached, check the restrictor sizing in
Section 4-7.

Adjustment #2 describes a method that will allow adjustment of your Model
5964/5850EM mass flow controller to optimum step response
performance. This method is the preferred way to adjust the step
response.

Adjustment of the response circuit will not affect the accuracy of the flow
controller as adjusted in Section 3-7.

Note: The output voltage shown in Figure 3-14 is based on a controller
equipped with an elastomeric seat. For a metal valve seat a positive offset
up to 400 mV can be expected for a zero command.

Enhanced Response PC Board Adjustment #1

(specification not guaranteed)
Note: This procedure requires an oscilloscope, chart recorder or a DVM ­with a sample speed of three samples, or greater, per second to monitor
the rate of change of the output signal.

a. Set the command potentiometer for 100% of flow (5.000 V) and wait

about 30 seconds for the flow output signal to stabilize.

b. Step the command signal to zero percent or activate valve override

closed to stop the flow . Observe the flow signal output as it decays.

c. The behavior of the flow signal during this transition between 100% and

zero percent flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-14.

3-22

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Part Number: 541B121AHG
November, 2008

Figure 3-14 Response Adjustment

Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

c1.If the flow signal decays to -0.05 to -0.5 Volt, then rises to zero Volts,

the anticipate potentiometer properly adjusted.

c2.If the flow signal decays rapidly and goes below -0.5 Volt before

rising to zero V olt, the anticip ate potentiometer must be adjusted
clockwise and S teps a and b repeated.

c3.If the flow signal decays slowly and does not go below -0.5 Volt, the

anticipate potentiometer must be adjusted counterclockwise and
S teps a and b repeated.

Enhanced Response PC Board Adjustment #2

(specification guaranteed)
Note: Adjustment of the response circuitry to obt ain a flow performance to

be within 2% of final value in less than one second after command change
of 0-100% requires the use of a fast response flowmeter (less than 100
millisecond response to within 0.2% of final value) in series with the Model
5964/5850EM and a storage oscilloscope or recorder.

a. Set the command to zero percent flow rate (0.000 V) and allow the flow

signal output to stabilize (30 seconds minimum). Step change the
command to 100% of flow (5.000 V) and record the output signal from
the fast response flowmeter.

b. This flow signal should overshoot above the final value, then overshoot

below the final value.
b1.If the signal from the fast response flowmeter does not overshoot

the final value and/or the signal does not reach and stay within ±2%
of final value within 1 second, adjust the anticipate potentiometer
one-half to one turn clockwise. If this signal does overshoot above
the final value then overshoots below the final value by more than
2%, the anticipate potentiometer must be adjusted one-half to one
turn clockwise.

b2.If the signal from the fast response flowmeter overshoots above the

final value by more than 2% and does not overshoot below the final
value, then the anticipate potentiometer must be adjusted one-half to
one turn counterclockwise.

3-23

Section 3 Operation

Brooks® Models 5964, 5850EM

c. Repeat Step s a and b above until no further anticipate potentiometer
d. If the response time and overshoot are not within the required limits, the

e. Repeat Step d above until no further adjustment of the response

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

adjustment is necessary.
response potentiometer must be adjusted to control the amount of

overshoot. Set the command to 0% flow rate (0.000 V) and allow the
flow signal output to stabilize (30 seconds minimum). S tep change the
command to 100% (5.000 V) and record the output signal from the fast
response flowmeter.

d1.If this signal shows excessive overshoot above the final value,

adjust the response potentiometer 2 to 3 turns counterclockwise.

d2.If this signal shows that the overshoot above the final value is not

excessive, adjusting the response potentiometer one-half to one turn
clockwise will speed up the response with correspondingly more
overshoot and may also significantly reduce the dead-time between
application of a change in command and the first noticeable change
in flowrate.

potentiometer is necessary. If the desired response characteristics are
still not achieved, some additional improvement can be realized by
making adjustments to the flow control valve. Refer to Section 4-4.

Standard Response and Current I/O PC Board Adjustment #1

(specification not guaranteed)

Note: This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples, or greater, per second to monitor
the rate of change of the output signal.

a. Set the command potentiometer for 100% of flow (5.000 V) and wait

about 30 seconds for the flow output signal to stabilize.

b. Step the command signal to zero percent or activate valve override

closed to stop the flow . Observe the flow signal output as it decays.

c. The behavior of the flow signal during this transition between 100% and

zero percent flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-14.

c1.If the flow signal decays to -0.05 to -0.5 Volt, then rises to zero V olt,

the anticipate potentiometer is properly adjusted.

c2.If the flow signal decays rapidly and goes below -0.5 Volt before

rising to zero V olt, the anticip ate potentiometer must be adjusted
clockwise and S teps a and b repeated.

c3.If the flow signal decays slowly and does not go below -0.5 Volt, the

anticipate potentiometer must be adjusted counterclockwise and
S teps a and b repeated.

3-24

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Section 3 OperationInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Standard Response and Current I/O PC Board Adjustment #2

(specification guaranteed)

Note: Adjustment of the anticip ate potentiometer to obt ain a flow rate
performance to be within 2% of flow rate commanded in less than three
seconds (six seconds for Current I/O Version) af ter command change
requires the use of a fast response flowmeter (500 millisecond response to
be within 0.2% of final value or better) in series with the Model 5850EM
and a storage oscilloscope or recorder.

a. Make a step change in command to the controller from zero to 100% of

full scale flow and record the output signal of the fast response flowme-
ter.

b. If this signal shows more than 4% overshoot, adjust the anticipate

potentiometer one-half to one turn counterclockwise. If the signal does
not show overshoot, but is not within 2% full scale of final value after
three seconds, adjust the anticipate potentiometer one-half to one turn
clockwise. Set the command potentiometer for zero percent of flow.

c. Repeat Steps a and b until the fast response flowmeter output signal

meets the specified response requirements.

3-25

Section 3 Operation

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

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INTENTIONALLY

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3-26

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4-1 Overview

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

4-1

Section 4 Maintenance

Brooks® Models 5964, 5850EM

No routine maintenance is required on the Model 5964/5850EM. If an in­line filter is used, the filtering element should periodically be replaced.

This section provides the following information:

• Troubleshooting

• Cleaning

• Control Valve Adjustment

• Gas Conversion Factors

• Orifice Sizing

• Restrictor Sizing

4-2 Troubleshooting

It is important that this controller only be serviced by properly
trained and qualified personnel.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

CAUTION

A. System Checks

The Model 5964/5850EM is generally used as a component in gas
handling systems which can be quite complex. This can make the task of
isolating a malfunction in the system a difficult one. An incorrectly
diagnosed malfunction can cause many hours of unnecessary downtime. If
possible, make the following system checks before removing a suspected
defective mass flow controller for bench troubleshooting or return,
especially if the system is new.

1. Verify a low resist ance common connection, correct power supply
voltage and that signals are reaching and leaving the controller . The
breakout board, P/N S273Z649AAA Card Edge version or
P/N S273Z668AAA D-Connector version listed in Section 5, will make
this job much easier .

2. Verify that the process gas connections have been correctly terminated
and leak-checked.

3. If the mass flow controller appears to be functioning but cannot achieve
set-point, verify that sufficient inlet pressure and pressure drop are
available at the controller to provide the required flow .

4. Verify that all user selectable jumpers are in their desired positions
Refer to Figures 3-5 through 3-9.

WARNING

If it becomes necessary to remove the controller from the system
after exposure to toxic, pyrophoric, flammable or corrosive gas,
purge the controller thoroughly with a dry inert gas such as
Nitrogen before disconnecting the gas connections. Failure to
correctly purge the controller could result in fire, explosion or
death. Corrosion or contamination of the mass flow controller,
upon exposure to air, may also occur.

4-2

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Part Number: 541B121AHG
November, 2008

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

B. Bench Troubleshooting

In order to assist in troubleshooting it is highly recommended that the
controller be installed in a flow circuit as shown in Figure 3-13.

1. Properly connect the mass flow controller to a ±15 Vdc power supply or
a +15 to +28 Vdc in the case of a current I/O board. Connect a com­mand voltage source and an output signal readout device (4-1/2 digit
voltmeter recommended) to Pins 2 and 3 on the Card Edge version, or
Pins 2 and 10 for the D-Connector version (Refer to Figure 2-2, 2-3, 2-4
or 2-6). Apply power, set the command voltage to zero and allow the
controller to warm-up for 45 minutes. Do not connect to a gas source at
this time.
Observe the output signal and, if necessary , perform the zero adjust­ment procedure (Section 3-6). If the output signal will not zero properly ,
refer to the sensor troubleshooting section and check the sensor. If the
sensor is electrically functional, the printed circuit board is defective and
will require replacement.

2. Connect the controller to a source of the gas on which it was originally
calibrated. Command 100% flow and adjust the inlet and outlet pres­sures to the calibration conditions. Verify that the output signal reaches
and stabilizes at 5.000 Volt s. Vary the command voltage over the
control range and verify that the output signal follows the command
input.
Apply +15 Volt s to the valve override input, (Pin 9 for the Card Edge
version, Pin 12 for D-Connector version) and verify that the output
exceeds 5.000 Volt s.
Apply -15 Volt s to the valve override terminal and verify that the output
signal falls below 0.100 Volt s for an elastomeric valve seat and below
400 Volt s for a metal valve seat. If the controller is connected in series
with a suitable flow standard, observe the actual flow behavior and
verify the accuracy of the mass flow controller. If the mass flow control­ler functions as described above, it is functioning properly and the
problem is most likely elsewhere. Table 4-1 lists possible malfunctions
which may be encountered during bench troubleshooting.

C. Sensor Troubleshooting

If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce expected results, the
sensor assembly is defective. Return to Brooks Instrument for sensor
replacement.

Note:Do not attempt to disassemble the sensor .

D. Cleaning Procedures

No routine external cleaning is required for Brooks thermal mass flow
controller. Should the Models 5964 or 5850EM Mass Flow Controller
require cleaning due to deposition, return the device to
Brooks Instrument for servicing by trained technicians.

4-3

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Actual flow overshoots setpoint by Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Sections 3-5 & 3-8 .
more than 5% full scale.

Output stays at zero level regardless Clogged Sensor tube and restrictor and/or a Clean sensor. Refer to cleaning procedure, Section 4-2D.
of command and there is no flow clogged orifice.
through the controller.

Output signal stays at +6.8 Volts Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 4-2D.
(26 mA for Current I/O Vers.) regard­less of command and there is flow +15 Volts applied to the valve override input. Check the valve override terminal. Refer to Section 2-6 for terminal assignments.

Output signal follows set-point at Leaky control valve Disassemble and repair valve. Refer to Section 4-3.
higher commands but will not go to
zero. Excessive resistance in valve voltage return line. Reduce wiring resistance or reconfigure controller for "External Valve Return." Refer

Output signal follows set-point at Insufficient inlet pressure or pressure drop. Adjust pressures, inspect in-line filters and clear/replace as necessary.
lower commands but does not reach
full scale. Partially clogged sensor Check calibration. Refer to Section 3-7.

Controller grossly out of calibration. Partially clogged sensor. Clean sensor. Refer to the cleaning procedure, Section 4-2D.
Flow is higher than desired.

Controller grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-3.
Flow is lower than desired.

Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

Closed or clogged flow path up- or downstream or Open valve(s). Clean filter(s). Remove any foreign material from gas delivery system.
the controller.

Clogged Control Valve. Check TP3 with the command at 100%. If the voltage is more negative than -11V,

Internal reference being used as the command Refer to Section 3-4.
source and the yellow jumper is in the wrong
position.

-15 volts applied to the valve override input Check valve override input. Refer to Section 2-6 for terminal assignments.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

Valve voltage not returned, Pin L at common. Check jumper for external valve return. Refer to Section 3-4.

"Valve-off" pin grounded. Check "Valve-Off" input. Refer to Section 2-6 for terminal assignments.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

Command input floating. Connect command signal. Refer to Section 2-6 for terminal assignments.

Pin D connected to common. Remove Pin D from common.

Partially clogged valve. Disassemble and repair control valve. Refer to Section 4-3.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Valve guide spring failure. Check valve spring.

Oversized orifice. Check orifice size. Refer to Section 4-6.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-8.

Faulty pressure regulator. Check regulator output.

Defective printed circuit board. Replace printed circuit board. Refer to Section 4-3.

disassemble and repair the control valve. Refer to Sections 4-3 and 4-4.

through the controller.

to Section 3-4.

November, 2008

4-4

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Part Number: 541B121AHG
November, 2008

Table 4-2 Sensor Troubleshooting

SENSOR

SCHEMATIC

Remove the sensor connector from the PC Board for this procedure.

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

PIN

NO. FUNCTION

1 Heater

Upstream

2 Temperature

Sensor (Su)

Downstream

3 Temperature

Sensor (Sd)

4 Sensor Common
5 Heater Common

OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL

Open circuit on ohmmeter. If either heater (1) or

Pin 1 or 4 to meter body sensor common (4) are shorted, an ohmmeter

reading will be obtained.

Pin 4 to Pin 2 Nominal 1100 ohms reading, depending on

Pin 4 to Pin 3

Pin 5 to Pin 1 Nominal 1200 ohm reading.

temperature and ohmmeter current.

4-5

Section 4 Maintenance

Brooks® Models 5964, 5850EM

4-3 Gas Conversion Factors

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in Table 4-5.
To change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas by the gas factor for the calibration gas used.

Example:

The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.773 = 57.98 sccm

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Where,
P1 = percentage (%) of gas 1 (by volume)

P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)

4-6

Section 4 MaintenanceInstallation and Operation Manual

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Table 4-3 Conversion Factors (Nitrogen Base)

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH

Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C4H
1-Butene C4H
CIS-2-Butene C4H
Trans-2-Butene C4H

Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H

Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2:CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

3H4

3

3

3

3

5

3

3

3

6

10

8

8

8

2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H

Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879

4

6

6

6

FACTOR FACTOR (kg/m

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.773 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

Brooks® Models 5964, 5850EM

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

3

)

4-7

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Ethylene C2H
Ethylene Oxide C

Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl

Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C
Hexamethyldisilane (HMDS) (CH
Hexane C
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645

4

O 0.589 1.254 1.965

2H4

2

3

4

4

3

3

6

2F6

3F6

2)6Si2

6H14

2

Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539

Iodine Pentafluoride IF
Isobutane C4H
Isobutene C4H
Isopentane C5H

5

10

8

12

Krypton Kr 1.382 1.729 3.708
Methane CH

Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308

4

4

10

Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH

2

2

Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913

4

2

2

3

3

Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F

Oxygen O
Oxygen Difluoride OF
Ozone O

Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F

8

2

2

3

5

12

10

8

8

FACTOR FACTOR (kg/m

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

November, 2008

3

)

4-8

Section 4 MaintenanceInstallation and Operation Manual

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Pentane (n-Pentane) C
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH
Propylene (Propene) C

3CH2CH3

)C

Rhenium Hexafluoride ReF
Silane SiH

Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F

Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF

Uranimum Hexafluoride UF

5H12

2

3

5

3

3H8

3H6

6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

Vinyl Bromide C2H3Br 0.524 1.985 4.772
Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046

Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

FACTOR FACTOR (kg/m3)

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

Brooks® Models 5964, 5850EM

Ref. No. J-836D508 Gasdata.doc Vsn. 8.6

Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation

is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However, gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.

4-9

Section 4 Maintenance

Brooks® Models 5964, 5850EM

4-4 Orifice Sizing

The Orifice Sizing Nomograph, Figure 4-1, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined in the following paragraphs.

Example: Determine the orifice size for the following conditions:

Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

gas
operating pressure (inlet and outlet)
flow range

1. Determine Nitrogen equivalent flow rate (refer to Table 4-3).

OR

Where:
Q

NITROGEN

Q

GAS

ρρ

ρ

ρρ

NITROGEN

ρρ

ρ

ρρ

GAS

SG

GAS

= Nitrogen equivalent flow rate (sccm)
= Desired flow rate of the gas (sccm)
= Density of Nitrogen at 70°F
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (taken at customer

temperature)

Refer to Table 4-5 for densities.

4-10

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

Figure 4-1 Model 5850EM Orifice Sizing Nomograph

4-11

Section 4 Maintenance

Brooks® Models 5964, 5850EM

Example:

In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:

= 2,000 sccm

Q

gas

= 2,000 x .269
= 538 sccm Nitrogen

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Where P

P
P

= percentage by volume of gas 1

1

= percentage by volume of gas 2

2

= percentage by volume of gas n

n

Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and
80% Chlorine gas mixture.

Q

Nitrogen

=Q

(orifice conversion factor)

gas

= 20 x 1.439
= 28.78 slpm Nitrogen

2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7
to convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia

4-12

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

3. Determine Critical Pressure Drop

Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or

If these conditions exist, the pressure drop (Dp) should be calculated
as follows:

Dp = Pressure drop (psi)
Pin= Inlet pressure (psia)

If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.

Then Dp = 64.7 - 44.7 = 20 psi

4. Using the nomograph, locate the pressure drop (psi) on the vertical line

marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical

line marked "Q

6. Draw a line connecting Dp and Q

Nitrogen

" (Point B).

and extend it to the baseline.

Nitrogen

Mark this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).

8. Draw a line connecting P

(Point D) and baseline (Point C) and then

in

extend this line to the vertical line marked Do (orifice diameter, inches)
(Point E).

9. This point on the line is the minimum orifice size for the given

conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow . If the orifice selected falls
below .0013, choose .0013 size orifice.

For the example in Figure 4-3, the .007 size orifice would be selected.

4-13

Section 4 Maintenance

Brooks® Models 5964, 5850EM

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

4-14

Figure 4-2 Example Nomograph

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

4-5 Restrictor Sizing

Section 4 MaintenanceInstallation and Operation Manual

Brooks® Models 5964, 5850EM

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow, however, the
total flow through each restrictor is different. Different restrictors (active
area) have different pressure drops and produce controllers with different
full scale flow rates. For a discussion of the interaction of the various parts
of the controller, you are urged to review Section 3-3, Theory of Operation.
If the restrictor assembly has been contaminated with foreign matter, the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate.
Restrictor assembly replacement should be performed only by trained
personnel. See Section 4-3, Disassembly and Assembly, for restrictor
removal and installation.

Restrictors

The Model 5964/5850EM mass flow controller/device uses two types of
restrictor assemblies depending on full scale flowrate and expected service
conditions.

1. Wire mesh for Nitrogen equivalent flow rates above 3.4 slpm. These
restrictor assemblies are made from a cylinder of wire mesh and are
easily cleaned if they become contaminated in service.

2. Anti-Clog Laminar Flow Element (A.C.L.F.E.) - This type of restrictor
assembly is used for Nitrogen equivalent flow rates less than 3.4
slpm.

Sizing

All Model 5964/5850EM Series Restrictor Assemblies are factory adjusted
to provide a specific pressure drop for each flow rate. This corresponds to
the desired full scale flow rate. A list of restrictor assemblies used in the
Model 5850EM mass flow controller/device is shown in Table 4-4.

Example:
The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.625 from Table 4-3.
Nitrogen equivalent flow = 200/0.625 = 320 sccm Nitrogen

4-15

Section 4 Maintenance

Brooks® Models 5964, 5850EM

In the example above a Size P restrictor would be selected.

Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

November, 2008

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.

Table 4-4 Model 5850EM Standard Restrictors

Size Low High ACLFE Wire Mesh

SCCM Nitrogen Equivalent Flow* Part Number

D 8.038 11.38 S110Z275BMG
E 11.25 15.93 S110Z276BMG
F 15.75 22.30 S110Z277BMG
G 22.05 31.23 S110Z278BMG
H 30.88 43.73 S110Z279BMG

J 43.23 61.21 S110Z280BMG

K 60.52 85.70 S110Z281BMG

L 84.73 119.9 S110Z282BMG
M 118.6 167.9 S110Z283BMG
N 166.0 235.2 S110Z284BMG
P 232.5 329.3 S110Z285BMG
Q 325.4 460.9 S110Z286BMG
R 455.7 645.3 S110Z287BMG
S 638.0 903.4 S110Z288BMG
T 893.2 1265. S110Z289BMG
U 1250. 1771. S110Z290BMG
V 1750. 2479. S110Z291BMG

W 2451. 3471. S110Z292BMG

X 3431. 4859. S110Z319BMG
Y 4804. 6802. S110Z321BMG

1 6724. 9523. S110Z317BMG

2 9388. 13337. S110Z228BMG

3 13176. 18667. S110Z226BMG

4 18457. 30060. S110Z224BMG

*Materials: BMG = 316 Stainless Steel Electropolished

CVA = Hastelloy CTM (ACLFE only)
DCA = Monel RTM (ACLFE only)

Range

4-16

NOTES: • For flow rates less than 8 sccm, use the low flow plug, P/N 618-K-019-BMG in place of a restrictor assembly.

• If two sizes are allowed because of overlap, select the larger size.

• Restrictor size not required to enter order.

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B121AHG
November, 2008

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).

Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten

være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%

dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Brooks® Models 5964, 5850EM

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.

Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von

360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-

Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section CE Certification

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used

providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE

certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

November, 2008

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).

Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un

apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,

se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente

en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un

apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B121AHG
November, 2008

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la

Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal

d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à

chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à

la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Brooks® Models 5964, 5850EM

Greek

A-3

Section CE Certification

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).

E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a
marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.

Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%

per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

November, 2008

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan

de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is

afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen

Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,

A-4

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B121AHG
November, 2008

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming

som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Brooks® Models 5964, 5850EM

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).

Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-

se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a

100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section CE Certification

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse,
olisi hankittava 100%:sti suojattu kaapeli.

“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne

olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

November, 2008

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).

Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.

“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.

Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med

CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng
Part Number: 541B121AHG
November, 2008

Brooks® Models 5964, 5850EM

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Installation and Operation Manual

X-TMF-5964-5850EM-MFC-eng

Part Number: 541B121AHG

Brooks® Models 5964, 5850EM

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration. The primary standard calibration equipment to calibrate our flow products is certified by our
local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

November, 2008

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290
Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks ................................................................. Brooks Instrument, LLC

Freon ........................................................ E.I. DuPont de Nemours & Co.

Kalrez.................................................................. DuPont Dow Elastomers

Teflon........................................................ E.I. DuPont de Nemours & Co.

VCO ............................................................................................ Cajon Co.

VCR ............................................................................................ Cajon Co.

Viton...................................................... DuPont Performance Elastomers

Vol-U-Meter ......................................................... Brooks Instrument, LLC

1-888-554-FLOW

+011-81-3-5633-7100