Brooks Instrument 5800S User Manual

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Page 1

Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Brooks® Smart-Series Digital Mass Flow Meters and Controllers

Models 5800-S

Brooks Smart Family

Page 2

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed by qualified persons, to prevent electrical shock and personal injury .

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly , exhibit early failure.

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day , flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirement s and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety . Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com

Y ours sincerely, Brooks Instrument

Models 5800-S

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Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

Table of Contents

Section 1:Introduction ......................................................................................................................................... 5

1.1 Purpose ........................................................................................................................................... 5

1.2 How to use this Manual.................................................................................................................... 5

1.3 Description....................................................................................................................................... 6

Section 2: Installation ......................................................................................................................................... 9

2.1 General ............................................................................................................................................ 9

2.2 Receipt of Equipment....................................................................................................................... 9

2.3 Recommended Storage Practice.....................................................................................................10

2.4 Return Shipment .............................................................................................................................10

2.5 Gas Connections ............................................................................................................................10

2.6 Mechanical Installation....................................................................................................................11

2.7 IN-LINE Filter ..................................................................................................................................11

2.8 Electrical Interfacing........................................................................................................................12

2.9 Digital Communication ....................................................................................................................14

2.10 Interconnection..............................................................................................................................16

Section 3: Operation ..........................................................................................................................................19

3.1 Operating Procedure .......................................................................................................................19

3.2 Zero Adjustment..............................................................................................................................19

3.3 Calibration Procedure......................................................................................................................19

Section 4: Maintenance .....................................................................................................................................20

4.1 General ...........................................................................................................................................20

4.2 Troubleshooting and System checks...............................................................................................20

4.3 Cleaning Procedures .......................................................................................................................23

4.4 Calibration Procedure......................................................................................................................23

4.5 V alve (Dis)Assembly Procedure .....................................................................................................23

Section 5: Specification........................................................................................................................................24

Appendix A: Gas Conversion T ables.....................................................................................................................28

Appendix B: Dimensional drawings ......................................................................................................................32

Appendix C:Translation of CE Marking electrical installation instructions..............................................................34

Appendix D: Important Safety Instructions............................................................................................................39

Appendix E: Modellist .........................................................................................................................................44

Figures

Figure 2-1: Open Collector ...................................................................................................................................13

Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom 14

Figure 2-3: RS-232 interconnection of TMF and PC..............................................................................................16

Figure 2-4: RS-485 multidrop interconnection TMFs and PC.................................................................................16

Figure 2-5: TMF/C to Read-out cable ...................................................................................................................17

Figure 2-6: TMF/C Read-out and pc .....................................................................................................................17

Tables

T able 1-1: Flow ranges per model.......................................................................................................................... 6

T able 2-1: Electrical interfacing. Smart TMF ........................................................................................................12

T able 2-2: Dipswitch settings ...............................................................................................................................15

Table 2-3: Electrical interfacing. Smart TMF cable...............................................................................................18

T able 4-1: T roubleshooting...................................................................................................................................22

T able 5-1: Flow ranges and pressure ratings ........................................................................................................25

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Section 1 Introduction

1.1 Purpose

This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks Smart series Mass Flow meters 5860S, 5861S, 5863S and controllers 5850S, 5851S, 5853S.

1.2 How to use this Manual

It is recommended to read this manual before installing, operating or repairing these Mass Flow Instruments. This manual is organised into nine sections:

Section 1. Introduction Section 2. Installation Section 3. Operation Section 4. Maintenance Section 5. Specification Appendices A - E

Models 5800-S

This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks Smart Mass Flow Meters and Controllers. This series of microprocessor-based field instruments is designed to meet the rigorous demands of various industries/applications. The use of digital technology ensures that the Brooks Smart series provides maximum accuracy and signal integrity . In addition it allows easy interfacing to any peripheral equipment either through analogue or digital communication. This manual covers Smart Mass Flow Meter models: 5860S, 5861S, 5863S and 5864S and Smart Mass Flow Controller models: 5850S, 5851S and 5853S.

Digital communication

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The presence of a computer icon to the left of the text (as shown here) denotes that the accompanying text refers to digital communication.

Smart Control

Digital communication (either via RS-232 or RS-485) allows to connect our Brooks model 0160 Smart Control. This interface program can be used to operate and (re)configure Smart Mass Flow Products (calibration parameters are not accessible).

Smart DDE

If you require bi-directional links between your Windows-based applications software and Brooks Smart Mass Flow Products,our model 0162 Smart DDE (a powerful, user-friendly Dynamic Data Exchange software program) offers all the features you need.

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Section 1: Introduction

Models 5800-S

1.3 Description

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

Smart Service

If you are equipped with primary standard Volumeter calibration equipment or (secondary standard) Brooks Smart Mass Flow Meters, you can use the model 0163 Brooks Smart Service program for (re)configuration, diagnostics, calibration and/or verification.The HART protocol-based commands are listed in a separate.

Communication manual

Document: Brooks part number: 541-C-053-AAA.

Models 5860S, 5861S, 5863S and 5864S Brooks Smart Mass Flow Meters are primarily used to provide accurate measurements of gas flows. The heart of these systems is the thermal mass flow sensor, which produces an electrical output signal as a function of flow rate. In addition, models 5850S, 5851S and 5853S Brooks Smart Mass Flow Controllers control gas flows. The flow ranges per model are listed in Table 1-1.

Table 1-1: Flow ranges per model

Mass Flow

Controller

Model

5850 S 5860 S 0.003 30 ln/min. 5851 S 5861 S 20 100 ln/min. 5853 S 5863 S 100 2500 ln/min.

*refers to ‘normal’ conditions, i.e. 0°C, 1013.25mbar . The Brooks Smart Mass Flow Meter is a stand-alone instrument with

microprocessor-based electronics on board. The MF-series Smart Mass Flow Controller has an integrally-mounted control-valve module with which stable gas flows can be achieved.

The standard features listed below apply to all models. The supplied inlet adapter has a built-in, upstream inlet filter for flow straightening. Besides reducing the effects of changes in upstream piping, this also protects the measuring element from occasional debris in the flow stream. In addition, it eliminates the need for extra (expensive) nlet filtering.

•

Flow signal adjustable via software: 0-5 Vdc or 1-5 Vdc or 0-20 mA or 4-20 mA.

Mass Flow

Meter

Model

Flow Ranges

min. f.s. max. f.s. Unit *

Note: Digital output (communication) is simultaneously available with analogue output.

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•

Output damping provides a constant scale reading under fluctuating flow rate conditions. Standard factory setting: 0.5 sec.

•

Output limiting prevents possible damage to delicate acquisition devices by limiting the output to 0-5.25 Vdc on the voltage signal output and 0-21 mA on the current output.

An alarm (TTL open collector) signal output is available to the user. If the instrument’s specifications are exceeded, either by process conditions or by the device itself, an alarm signal can be generated.

MASS FLOW CONTROLLER

Standard features include:

• Each Smart Mass Flow Controller is provided with an adaptive valve-control

algorithm for the maintenance of stable flow control, even under varying

process conditions (pressure/temperature).

Section 1: Introduction

Models 5800-S

•

Setpoint source selectable: Setpoint signal source for the Mass Flow Controller can be selected from:

- communication (RS232 / RS485) or

- 0-5 Vdc or

- 1-5 Vdc or

- 0-20 mA or

- 4-20 mA.

•

Fast Response Control provides rapid gas settling times with minimal over/ undershoot. Standard factory setting: 1 sec. for 5850/51 and meter models, 3 sec. for 5853.

•

Valve Override (VOR, availabe at pin 12) allows the user to fully open or close the control valve independently of the set-point.

•

Low flow cut-off prevents the valve from opening whenever the Set point is less than 1% of full scale.

Digital communication features

Digital communication, via RS485 or RS232, provides access to all of the Smart TMF’s functions, including: Accurate mass flow measurement and Set point regulation (controller only), as a percentage of full scale and in selectable engineering units

• Flow totalizer

• Ambient temperature

• Operational settings ⇒ Calibration (storage of up to 10 calibration curves) ⇒ Controller settings (controller only)

• PID settings

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Section 1: Introduction

Models 5800-S

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

• selectable soft start

• adaptive valve control ⇒ Adaptive filtering for signal flow component

• Alarms ⇒ Self-diagnostic

• EEPROM error

• database error

• analogue output error ⇒ Out-of-range indications

• for analogue set points higher than 100% (controller only)

• flow

• valve (controller only)

• analogue output ⇒ Environmental errors

• no gas flow detected

• power supply outside specification range

• ambient temperature outside specified range

• high and low flow alarms

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Section 2: Installation

2.1 General

This section contains the procedures for the receipt and installation of the instrument. Do not attempt to start the system until the instrument has been permanently installed. It is extremely important that the start-up procedures be followed in the exact sequence presented.

NOTE: Operating procedure: do not operate this instrument outside the specification range listed in section 5. Before bringing the unit into operation, make sure that all gas connections have been correctly tightened and that all the necessary electrical connections have been made.

Models 5800-S

2.2 Receipt of Equipment

When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability . A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554-FLOW (3569) Tel (215) 362-3700 Fax (215) 362-3745 Email: BrooksAm@BrooksInstrument.com http://www.brooksinstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku 6718 WX Ede, Netherlands Tokyo, 136-0073 Japan P.O. Box 428 Tel 011-81-3-5633-7100 6710 BK Ede, Netherlands Fax 011-81-3-5633-7101 Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com Fax 31-318-549-309 Email:BrooksEu@BrooksInstrument.com

Remove the envelope containing the packing list. Carefully remove the instrument from the packing case. Make sure spare parts are not discarded with the packing materials. Inspect for damaged or missing parts.

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Section 2: Installation

Models 5800-S

2.3 Recommended Storage Practice

If equipment supplied by Brooks Instrument is to be placed in intermediate or long-term storage, it is recommended that it be:

a. S tored within the original shipping container. b. S tored in a sheltered area, under the following conditions:

c. Subjected to a visual inspection upon removal from storage, to verify that the

2.4 Return Shipment

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

1) Optimum ambient temperature 21°C (70 °F), maximum 32 °C (90 °F),

minimum 7 °C (45 °F),.

2) Optimum relative humidity 45% (maximum 60%/minimum 25%). condition of the equipment is ‘as received’. If the equipment has been in

storage for more than ten months or if it has not been stored under the recommended conditions, all pressure containing seals should be replaced. In addition, the device should be subjected to a pneumatic pressure test in accordance with the applicable vessel codes.

Prior to returning any instrument to the factory , contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations:

Brooks Instrument

407 W. Vine Street P.O. Box 903 Hatfield, PA 19440 USA Toll Free (888) 554-FLOW (3569) Tel (215) 362-3700 Fax (215) 362-3745 Email: BrooksAm@BrooksInstrument.com http://www.brooksinstrument.com

Brooks Instrument Brooks Instrument

E-mail: BrooksEu@BrooksInstrument.com

Any instrument returned to Brooks requires completion of Form RPR003-1, Brooks Instrument Decontamination St atement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. This is required before any Brooks Personnel can begin processing. Copies of the form can be obtained from any Brooks Instrument location listed above.

2.5 Gas Connections

All models are fitted with the following inlet and outlet connectors as standard: NPT(F), tube compression fittings, VCR, VCO, DIN or ANSI flanges. Prior to installation, make certain that all piping is clean and free of obstruction. Install the piping in a manner that permits easy access to the instrument, should it need to be removed for cleaning or test-bench troubleshooting.

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2.6 Mechanical Installation

(For dimensional drawings see Appendix B: Dimensional drawings)

NOTE: When installing the Mass Flow device, care should be taken to prevent foreign materials from entering the instrument’s inlet or outlet. Do not remove the protective end-caps until the actual moment of installation. When used with reactive gases (some of which may be toxic), contamination or corrosion may occur as a result of plumbing leaks or improper purging. Plumbing should be checked carefully for leaks and the Mass Flow device should be purged (for a significant time) with Nitrogen before and after use on reactive gasses. Recommended installation procedures: a. All models should be mounted in places that are relatively free from

mechanical shocks and vibration. b. Leave sufficient room for access to the electrical components. c. Install in a manner that allows the instrument to be easily removed for

cleaning. d. The mounting position of the Smart Mass Flow Meter or Controller can be

either horizontal or vertical, in case process pressures are smaller than 10

bar. e. For higher process pressures, a horizontal installation is preferred, since

these pressures may cause a thermal siphon effect of the output signal at

zero flow conditions and degrading specifications.

Section 2: Installation

Models 5800-S

2.7 In-Line Filter

NOTE: The control valve of the Smart Mass Flow Controller provides precision

control and is not designed for positive shut off. If positive shut off is required, it is recommended that a separate shut-off valve be installed in-line, downstream from the Smart Mass Flow Controller.

NOTE: If the power supply to the Smart Mass Flow Controller is interrupted, a NORMALL Y CLOSED valve will be fully closed, while a NORMALL Y OPEN valve will be fully open. The NORMALL Y OPEN control valve meets application specific requirements, since it allows nitrogen gas purging if the power supply is interrupted.

An in-line filter is installed, as standard, in the instrument’s inlet to prevent any foreign material entering the flow sensor or control valve. The filtering element

should be periodically replaced or ultrasonically cleaned.

Apply only clean gasses on Mass Flow Meter/Controllers.

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Section 2: Installation

Models 5800-S

2.8 Electrical Interfacing

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

The installation of Smart TMF includes a 15-pin Sub-D connector . For details of correct installation, see Table 2-1

Table 2-1: Electrical interfacing. Smart TMF

Pin (TMF s ide) Func ti on Controller Met er

1. Set point return (-) * n.a.

2. 0 (1)-5 V dc F low s ignal out put * *

3. (TTL) Open col lec t or alarm output * *

4. 0 (4)-20 mA Fl ow s ignal out put * *

5. +15 V dc t o + 28 V dc P ower s upply * *

6. -15 V dc Power s upply (if required) * *

7. 0 (4)-20 m A S et point input (+) * n.a.

8. 0 (1)-5 Vdc S et point input (+ ) * n.a.

9. Power s upply com m on * *

10. Flow s ignal out put c om m on * *

11. +5 V dc ref. output * n.a.

12. Valve override input * n.a.

13. Not c onnec t ed * *

14. Optional RS232C-Rx D or RS485-A - * *

Signal Output (pins 2, 4 and 10) Pin 2 indicates the flow rate, represented by a 0-5 Vdc or 1-5 Vdc signal proportional to the mass flow. Pin 4 indicates the flow rate, represented by either a 0-20 mA or 4-20 mA signal current proportional to the mass flow . Both the current and voltage signals are returned via pin 10 on the D-connector .

Analogue Setpoint Input (pins 7/8 and 1; Controller models only) . The Smart Mass Flow Controller can be used either with a current or voltage Set point. To use the current Set point, connect the Set point signal to pin 7 and the Set point return signal to pin 1 on the terminal (jumper J1 must be in place refer to Figure 2-2). To use the voltage Set point, connect the Set point signal to pin 8 and the Set point return to pin 1 on the D-connector.

5 Vdc reference (pin 1 1; Controller models only) A +5 Vdc ref. volt age is available on pin 1 1. This can be used to set the Setpoint with the aid of an externally located potentiometer (10 turn 2 KOhm suggested)..

NOTE: I/O configuration to be defined at time of ordering. Reconfiguration at customer side can be accomplished using digital communication.

Power Supply

Mass Flow Meter models (pin 5 and 9): The Mass Flow Meter's power supply is connected via pins 5 (+15 to +28 Vdc) and 9 (power supply common) on the D-connector. Mass Flow Controller models (pin 5, 6 and 9): The Mass Flow Controller's power supply is connected via pin 5 (+15 to +28 Vdc) and 9 (power supply

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Installation and Operation Manual

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common) on the D-connector. If a -15 Vdc power supply is required, pin 6 must

be connected and jumper [K2] on the p.c. board must be set the lower position (see Figure 2-2).

This is applicable for model 5851S and/or when a Normally Opened (N.O.) control valve is used.

NOTE: With regard to the power supply connections, the attached cable must be as short as possible to ensure that the minimum required voltage and current is available at the mass flow device.

Cable Shielding Earth

Cable requirements

Compliance with EMC directive 89/336/EEC, requires that the equipment be fitted with fully screened signal cables with at least 80% shielding.The cable shielding should be connected to the PG connector’s metal shell, and have 360° shielding at both ends. The shielding should be connected to an earth terminal. For translations of this instruction, see Appendix D: Translations of installation instructions

Section 2: Installation

Models 5800-S

Alarm (pin 3 of 9) A (TTL) Open Collector alarm output is available. Type of used transistor is NPN.

Figure 2-1: Open Collector

Valve override (pin 12; Controller models only) To open or close the control valve independently of the Set point signal (e.g. for safety reasons), pin 12 is available to carry a valve override signal. Leave floating (i.e. not connected) to allow for normal control operation.

≥ 5 Vdc V alve Open (for both NO and NC valves)

≤ ≤

≤ 0 Vdc V alve Closed (for both NO and NC valves)

≤ ≤

NOTE: The valve override command on pin 12 takes precedence over the communication-mediated valve override command.

Digital communication (pins 14 and 15)

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Section 2: Installation

Models 5800-S

2.9 Digital Communication

Installation and Operation Manual

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PN 541-C-051-AAG

November, 2008

pins 14 and 15 are available for connecting the device to the RxD/A- or TxD/A lines for RS-232/RS-485 communications.

NOTE: Either RS-232 or RS-485 should be specified at the time of ordering. See section 2.7 for details of how to configure the p.c. board.

NOTE: The printed circuit boards only need to be reconfigured if the hardware settings differ from those specified at the time of ordering.

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Brooks Smart Mass Flow Meters and Controllers incorporate two printed circuit boards: one main board containing the processor and a piggyback board. The piggyback board enables the device to communicate with a PC via an RS-232 or RS-485 connection.The piggyback board is installed via the K5, K6 and K7 connectors on the main board (see Figure 2-2).

The p.c. board enclosure must be removed to gain access to the electronics. Disconnect the power to the device and any cables running to the D-connector. Remove the three screws at the base of the electronics enclosure, then lift off the enclosure. The electronics enclosure must be replaced before returning the unit to service.

Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom

The digital communication piggyback board is used for all communication-related hardware settings. For this purpose, the board is equipped with a dipswitch block (SW1) holding 4 switches. RS-232 Board (097-B-364-ZZZ) or RS-485 Board (097-B-363-ZZZ), and to select the baud rate. T able 2-2 summarises the possible settings.

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Table 2-2: Dipswitch settings

Physical

layer

selection

RS-232 Off RS-485 On

Since Brooks Smart Mass Flow devices are capable of communication immediately after start-up, you should set the correct baud rates prior to power up. Any changes to the baud rate settings or the physical layer selection made during operation will take effect immediately . The communication I/O drivers are directly connected to the D-connector on top of the device.

Section 2: Installation

Models 5800-S

Baud rate

selection

1200 Off Off Off 2400 On Off Off 3600 Off On Off 4800 On On Off 7200 Off Off On 9600 On Off On 19200 Off On On 38400 On On On

Switch

Dipswitch block SW1

Switch #2Switch #3Switch #4

The RS-232 is essentially a point-to-point connection, i.e. one host-computer and one Smart Mass Flow device. Most IBM-compatible PCs are equipped with one or more RS-232 ports (COM ports) as standard. The RS 232 usage and definitians are very diverse. On the MF Smart Mass Flow devia the TxD signal is the output signal of the devia and the RxD the input signal.The communication terminals can be directly connected to a serial COM-port of any PC. The other part of the terminals can be connected to Brooks model 0152/0154 Microprocessor-based Read-out and Control Electronics. This model provides the power supply for Smart Mass Flow devices, as well as providing local read-out and displaying the analogue output signals. Figure 2-3 shows the interconnection diagram of the RS-232 configuration. The pin assignment on an IBM Compatible PC. This is standard for RS-232.

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Section 2: Installation

Models 5800-S

Installation and Operation Manual

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PN 541-C-051-AAG

November, 2008

Figure 2-3: RS-232 interconnection of TMF and PC

D-connector to PC

25-pin (9-pin)

3(2)

RxD TxD

2(3)

Gnd

7(5)

2.10 Interconnection

Figure 2-4: RS-485 multidrop interconnection TMFs and PC

The RS-485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a computer system. IBM-ompatible PCs are not equipped with RS-485 ports as standard. An RS-232 to RS-485 converter or RS-485 interface board is therefore required o connect an RS-485 to a standard PC. Figure 2-4 is an interconnection diagram showing two TMFs linked to an IBM-compatible PC, via RS-485 and RS-485 to RS-232 converter. The RS-485 bus, a daisy-chain network, meaning that the wires are connected at the units as in figure 2-4.

If no digital communication is required (i.e. analogue I/O only), the following cables are available for connection of the Smart Mass Flow Meter/Controller to the Brooks Microprocessor Control & Read-out Unit (see figure 2-5):

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Length: 3 m; part number 124-Z-236-AAA Length: 6 m; part number 124-Z-237-AAA Length: 12 m; part number 124-Z-610-AAA

Section 2: Installation

Models 5800-S

THERMAL SIDE

Sub-D 15-pin female

READ-OUT SIDE

Sub-D 15-pin male

Figure 2-5: TMF/C to Read-out cable

If no digital communication is required, a split cable can be supplied to interconnect the Brooks Microprocessor Control & Read-out Unit, the Smart Mass Flow Meter/Controller and computer (see figure 2-5):

Length: 3 m; part number 124-Z-893-AAA Length: 6 m; part number 124-Z-894-AAA Length: 12 m; part number 124-Z-895-AAA

Figure 2-6: TMF/C Read-out and pc

NOTE: Special cables can be supplied multidrop (RS-485) installations are required.

For detailed information about the cable connections, see table 2-3.

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Section 2: Installation

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

Table 2-3: Electrical interfacing. Smart TMF cable

Su b -D (1 5 c.)

sub D (15p)

female

pin no.

1. 6 brown Set point ret urn (-)

2. 10 white 0 (1)-5 Vdc Fl ow s ignal out put

3. 9 grey/ pink (TTL) Open c ol lec t or alarm out put

4. 2 red/blue 0 (4)-20 m A F low s ignal out put

5. 13 red +15 Vcc to +28 Vdc Power supply

6. 14 blue -15 Vdc P ower supply (if required)

7. 3 violet 0 (4)-20 mA S et piont i nput (+ )

8. 5 grey 0 (1)-5 Vdc S et pi ont input (+ )

9. 12 7 5 black Power s upply c om m on

10. 8 pink Flow s i gnal out put com m on

11. 4 yel low +5 V dc ref. out put

12. 7 green valve override input

14. 2 3 green/whit e O pt ional RS232C-Rx D or RS 485-A -

15. 3 2 bl ue/ whit e Opti onal RS232C-TxD or RS 485-A +

Read-out side

s ub D (15p )

male

pin no.

11 shielding Chass is

s ub D (2 5p ) female pin no.

sub D (9p) female pin no.

Colour Func tion Computer side

November, 2008

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X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Section 3: Operation

3.1 Operating Procedure

1 Apply power to the Smart Mass Flow device and allow approximately 45

minutes for the instrument to reach a stable temperature. 2 Check the flow reading before turning on the pressurised gas supply . If the

flow reading is >0.2% then the instrument should be re-zeroed

(see section 3.2). 3 Turn on the gas supply . 4 Regulate flow to 0%. Monitor the instrument’s output signal. If the output is

not <0.2%, check for leaks. 5 Commence normal operation.

3.2 Zero Adjustment

Models 5800-S

3.3 Calibration Procedure

Each Smart Mass Flow device is factory-adjusted to provide a 0 ±10 mVdc signal at zero flow. The adjustment is carried out in our calibration laboratory , an ambient the temperature of 20°C is maintained. Af ter initial installation and warm-up in the gas system, the zero flow indication may differ from the factory setting. This is primarily caused by differences in temperature between our calibration laboratory and the final mounting position. When checking the zero flow indication, always mount the device in its final location and allow a minimum of 45 minutes for it to reach a stable temperature.

In case Zero adjustment is required, this can be done via Smart Control (model

0160) or via the zero push button next to the diagnostics LED. The zero adjustment should be carried out under process conditions and no flow.

Calibration of the Smart Mass Flow device is not described in this manual. Calibration can only be achieved with use of the accurate Brooks Vol-U-Meter equipment and the digital communication.

Page 20

Models 5800-S

Section 4: Maintenance

4.1 General

No routine maintenance is required on the Smart Mass Flow Meters and Controllers other than occasional cleaning. The in-line filter should periodically be replaced or ultrasonically cleaned.

NOTE: If recalibration is required, but the necessary expertise or equipment is not available, the instrument should be returned to the factory .

4.2 Troubleshooting and System checks

The Smart Mass Flow Meters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime. If possible, perform the following system checks before removing a suspect Mass Flow Meter or controller for bench troubleshooting or return to the factory (especially if the system is new):

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

1. Verify a low resistance common connection and that the correct power supply voltage and signals are present of the connector of the Smart TMF.

2. Verify that the process gas connections have been made correctly , and that they have been tested for leaks.

3. If the mass flow controller appears to be functioning but cannot achieve Set point, verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow.

4. Verify that all user-selectable jumpers and switches have been set to the appropriate positions. Refer to Figure 2-2 and table 2-2 .

NOTE: If it becomes necessary to remove the instrument from the system after exposure to toxic, pyrophoric, flammable or corrosive gas, purge the instrument thoroughly with a dry inert gas such as nitrogen before disconnecting the gas connections. Failure to correctly purge the instrument could result in fire, explosion or death. The MF-series Smart Mass Flow device may also become corroded or contaminated upon exposure to air .

Bench Troubleshooting

1. Establish a proper connection between the Smart Mass Flow Meter or Controller and a +15 Vdc to +28 Vdc power supply (and, if necessary , to a

-15 Vdc power supply) and connect an output signal read-out device (4½ digit voltmeter recommended) to pins 2 and 10 on the 15-pin Sub-D connector. Switch on the power and allow the instrument to warm-up for 45 minutes. In case of a Controller model, adjust the Set point to zero. Do not connect the device to a gas source yet. Observe the output signal and, if

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

necessary , perform the zero adjustment procedure (section 3.2). If the output signal does not zero properly , please contact Brooks Instrument.

2. Connect the instrument to a source of the same gas used for its original calibration. Regulate the Set point to 100% flow and adjust the inlet and outlet pressures to the calibration conditions. Verify that the output signal reaches 5.00 volts and stabilises at that value. V ary the command voltage over the 1 to 100% range and verify that the output signal follows the Set point. If possible, connect a flow measurement device to monitor the actual flow behaviour and verify the accuracy of the mass flow instrument. If the mass flow instrument performs as described above then it is functioning correctly and the problem may lie elsewhere.

T able 4-1 lists possible malfunctions which may be encountered during bench troubleshooting.

For controller models only: Apply +5 to the +15 Vdc valve override pin (pin 12) and verify that the output exceeds 100%. Connect the valve override pin to earth and verify that the output signal falls below 2%.

Section 4: Maintenance

Models 5800-S

Page 22

Section 4: Maintenance

Models 5800-S

Table 4-1: Troubleshooting

Trouble Possible Cause Check/Corre ctive Action

Output stays at zero (regardles s of Set point) and there is flow through the meter/controller Flow c an not be ac hieved regardless of Set point. (applicable to M F C)

Output s ignal s tay s at approx.

5.25 V dc or 21 mA (regardless of Set point) and there is flow through the m eter/c ont roller

Output s ignal follows S et point at higher set points but will not go below 2% Output s ignal follows S et point at lower set points , but does not reach full sc ale

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

Clogged Sens or Clean s ens or. Refer to cleaning

procedures (S ec tion 4. 3).

Defective elec t ronic board Clogged Control Valve Clean the cont rol valve (S ec tion 4.3)

or return the device t o the fact ory

Valve override input is grounded

Defective elec t ronic board Contac t B rook s Instrum ent. Valve leaks or is stuck

open (applicable to M F C) +15V applied t o the valve

override input (applicable to MFC)

Defective elec t ronic board Contac t B rook s Instrum ent. Control valve leak s or is st uc k open

Insuffic ient inlet press ure or press ure drop

Partially c logged s ens or Clean s ens or, s ee c leaning

Partially c logged valve (applicable to M F C)

Check t he valve override input (pin 12)

Clean and/or adjust c ontrol valve (Sec tion 4. 3).

Check t he valve override t erminal (pin 12)

Clean the c ontrol valve or return the devic e to t he factory (Sec t ion 4.3)

Adjus t press ures , ins pec t in-line filters and clean/ replace as necess ary

procedures (S ec tion 4. 3) Clean the c ontrol valve (S ec t ion 4.3)

or return the device t o the fact ory, see c leaning proc edures

Instrument gross ly out of calibration. Flow is higher than desired. Instrument gross ly out of calibration. Flow is lower than desired.

Controller osc illates (applicable to M F C)

Valve out of adjus t m ent (applicable to M F C)

Valve guide spring failure (applicable to M F C)

Partially c logged s ens or Clean s ens or, s ee c leaning

Partially c logged res tric tor Replace or clean res tric tor.

Pres s ure drop or inlet press ure deviates from calibrated values

Overs iz ed orifice Check orifice s iz e Valve out of adjus t m ent Adjust valve, see c alibration

Unst able inlet pres s ure Chec k ex t ernal press ure regulator Defective p. c . board Cont ac t B rook s Instrum ent

Adjus t valve, see c alibration procedures (S ec tion 4. 4)

Controller osc illates (s ee below)

procedures (S ec tion 4. 3)

Adjus t press ures

procedures (S ec tion 4. 4.)

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

4.3 Cleaning Procedures

When deposition makes it necessary to clean the Smart Mass Flow Controller or Mass Flow Meter, use the following procedures:

1. Remove the unit from the system.

2. Purge with dry nitrogen gas, which removes virtually all particulate matter from the device. Should contamination persist, subject all wetted components to ultrasonic cleaning. Following this, purge the device thoroughly with dry nitrogen once again.

3. If the sensor is contaminated, remove the sensor and use a haemostat or tweezers to push a 0.007”-diameter piano wire through the flow-sensor tube to remove any contamination (end closest to the control valve). The sensor tube can then be flushed with a solvent that leaves no residue. This can be accomplished conveniently using a hypodermic needle filled with solvent.

NOTE: Do not soak the sensor assembly in a cleaning solution. If solvent seeps into the sensor assembly , it will probably damage the sensor , or at least significantly alter its operating characteristics.

Section 4: Maintenance

Models 5800-S

4.4 Calibration Procedure

The calibration of Smart Mass Flow devices is not described in this manual. Such calibration requires the use of accurate and traceable calibration equipment such as Brooks Volumeter equipment, in addition to digit al communications. However, if the above equipment is available at your facility , then Brooks Instrument will supply you with copy of the calibration procedure document (no.:834-P-064) upon request.

4.5 Valve (Dis)Assembly Procedure

NOTE: If (dis)assembly is required, but the necessary expertise or equipment is

not available, then the instrument should be returned to the factory . However, if the requisite equipment is available at your facility, Brooks

Instrument will supply you with copy of the dis (assembly) procedure document (no.: 834-L-030) upon request. The model 5853S control valve assembly consists of an axially mounted main valve driven by the top-mounted pilot valve. The main valve should not be disassembled. If necessary , please return the Mass Flow Controller to the factory.

Wetted components include the body, laminar-flow element, and all valve components including the orifice, process adapters and inlet filter.

Page 24

Models 5800-S

Section 5: Specification

PERFORMANCE SPECIFICA TIONS

Flow ± 0.7% of rate and ±0.2% F.S. (at calibration conditions) Accuracy ± 0.5% of rate and ±0.1% F.S. (optional consult factory)

± 1.0% F .S. for flowrates above 1 100 ln/min (for 5863/5853)

Repeatability ± 0.25% of rate Rangeability 50:1 (within specified accuracy) Controllability 100:1 (i.e. total operating range) Stability Less than ± 0.5% of rate per year T emperature - Zero: Less than 0.075% F.S. per degree C Sensitivity For flowrates over 100 l/min gas and ambient temperature must

be equal

PHYSICAL SPECIFICA TIONS

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X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

Materials of Wetted parts stainless steel with Viton®, Buna-N®, Construction PTFE/Kalrez® or EPDM seals

Mechanical NPT(F), Tube compression, VCR / VCO Downport Option: connections Flanged DIN- or ANSI type available

Electrical 15-pin, D-type connector (goldplated contacts) connections

SPECIFICA TIONS

Certification

Setpoint Input*Voltage: 0 - 5 Vdc or 1 - 5 Vdc input

Analogue Voltage: 0 - 5 Vdc or 1 - 5 Vdc > 2000 Ohm output* Current: 0 - 20 mA or 4-20 mA

••

•

CE certified

••

•

EMC Directive (89/336/EEC)

••

EN 61326-1: 1997 + A1: 1998

••

•

Pressure Equipment Directive (97/23/EC)

••

•

II 3 G EEx nA II T4, per EN 60079-15:2003

••

•

KEMA 03A TEX1433 X

••

The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to EN 60529, taking into account the environmental conditions under which the equipement will be used”.

impedance > 2000 Ohm Current: 0 - 20 mA or 4-20 mA Communication: 250 Ohm impedance.

max. loop resistance 375 Ohm

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Table 5-1: Flow ranges and pressure ratings

Mass Flow Controller

Mass Flow Meter

Brook s S m art M as s F low P roduct s

Flow Ranges N2

Equivalent Ratings

Pressure P.E.D. Module H

Section 5: Specification

Models 5800-S

Appendix B: Dimensional drawings

Model 5860S

Model 5861S

PN 541-C-051-AAG

November, 2008

5860S CONNECTIONS A (mm)Inches 9/16-18 UNF 3/8" TUBE COMPR. 113 4,45 1/4" TUBE COMPR. 110 4,33 1/8" TUBE COMPR. 105 4,15 1/4" VCR 106 4,19 1/4" VCO 98 3,87 1/4" NPT 99 3,89 6mm TUBE COMPR. 110 4,33 10mm TUBE COMPR. 113 4,45 1/4" BSP 99 3,89

no adapters)59 2,31

Model 5863S

58 6 1S CO NNECTIONS Filt er s > > excl. in c l. e x c l. in cl. 9/16-18 UNF 1/4" TUBE COMPR. 131 167 5,17 6,59 3/8" TUBE COMPR. 134 170 5,29 6,71 1/4" VCR 128 164 5,03 6,45 1/2" VCO 131 167 5,15 6,57 1/4" VCO 120 156 4,71 6,13 1/4" NPT 120 156 4,73 6,15 6mm TUBE COMPR. 131 167 5,17 6,59 10mm TUBE COMPR. 134 170 5,29 6,71 1/4" BSP 120 156 4,73 6,15

no 80 116 3,15 4,57

Inc hes

Model 5863S

5863S CONNECTIONS A (mm)Inches 1/2" TUBE COMPR. 223 8,78 3/4" TUBE COMPR. 223 8,78 1" TUBE COMPR. 232 9,12 1/2" VCR 210 8,28 1/2" VCO 206 8,1 3/4" VCO 213 8,38

0.5", 1", 1.5" NPT OR 1- 1/16"-12 FLENS 255 10,04

no adapters

155 6,1

CONNECTIONS DIN DN15 PN40 DIN DN25 PN40 DIN DN40 PN40 DIN DN50 PN40 ANSI 0.5" 150 LBS ANSI 0.5" 300 LBS

ANSI 1" 150 LBS ANSI 1" 300 LBS ANSI 1.5" 150 LBS ANSI 1.5" 300 LBS ANSI 2" 150 LBS ANSI 2" 300 LBS

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Installation and Operation Manual

(

(mm)

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Appendix B

Models 5800-S

Model 5850S

5850S CONNECTIONS A (mm)Inches 9/16-18 UNF 3/8" TUBE COMPR. 131 5,14 1/4" TUBE COMPR. 128 5,02 1/8" TUBE COMPR. 123 4,84 1/4" VCR 124 4,88 1/4" VCO 116 4,56 1/4" NPT 116 4,58 6mm TUBE COMPR. 128 5,02 10mm TUBE COMPR. 131 5,14 1/4" BSP 116 4,58

no adapters)76 3

Model 5851S

5851S CONNECTIONS Filters >> excl. incl. excl. incl. 9/16-18 UNF 1/4" TUBE COMPR. 145 181 5,7 7,12 3/8" TUBE COMPR. 148 184 5,82 7,24 1/4" VCR 141 17 7 5,56 6 ,98 1/2" VCO 144 180 5,68 7,1 1/4" VCO 133 169 5,24 6,66 1/4" NPT 134 170 5,26 6,68 6mm TUBE COMPR. 145 181 5,7 7,12 10mm TUBE COMPR. 148 184 5,82 7,24 1/4" BS

no 94 130 3,68 5,1

134 170 5,26 6,68

Inc hesA

Model 5853S

5853S CONNECTIONS A (mm)Inches 1/2" TUBE COMPR. 267 10,51 3/4" TUBE COMPR. 267 10,51 1" TUBE COMPR. 276 10,85 1/2" VCR 322 12,69 1/2" VCO 250 9,83 3/4" VCO 257 10,11

0.5", 1", 1.5" NPT OR 1- 1/16"-12 FLENS 299 11,76

no adapters)199 7,83

Model 5853S

CONNECTIONS DIN DN15 PN40 DIN DN25 PN40 DIN DN40 PN40 DIN DN50 PN40 ANSI 0.5" 150 LBS ANSI 0.5" 300 LBS ANSI 2" 300 LBS

ANSI 1" 150 LBS ANSI 1" 300 LBS ANSI 1.5" 150 LBS ANSI 1.5" 300 LBS ANSI 2" 150 LBS

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Installation and Operation Manual

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PN 541-C-051-AAG

Models 5800-S

November, 2008

Appendix C: Translation of CE Marking electrical installation instructions

Dansk

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik: Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.

Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 80% dækning. Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten være af metal eller metal skærmet. Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader. Skærmen bør være forbundet til jord.

“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 80% dækning. Skærmen bør være forbundet til jord.

Deutsch

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen. Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung. Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine 80 %igenSchirmababdeckung des Kabels gewährleistet ist.

· „D“ oder „Rund“ -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen. Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschirmung verwendet werden. Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von 360 ° anzuschließen. Die Abschirmung ist mit dem Erdpotential zu verbinden.

Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 80 %igen Schirmababdeckung zu verwenden. Die Abschirmung ist mit dem Erdpotential zu verbinden.

English

All Brooks (electrical/electronic) equipment bearing the CE mark has been successfully tested in accordance with the Electromagnetic Compatibility regulations (EMC directive 89/336/EEC). However, special care is required when selecting signal cables to be used with equipment bearing the CE mark.

Quality of signal cables, cable glands and connectors:

Brooks supplies high quality cabling that meets the specifications for CE certification. However, if you wish to use your own signal cable, you should select one that is fully screened with at least 80% shielding.

Any ‘D’ or ‘Circular’ type connectors used should be screened with a metal shield. If applicable, metal cable glands must be used to clamp the cable shielding. The cable shielding should be connected to the metal shell or gland, and have 360° shielding at both ends. The shielding should be connected to an earth terminal.

Card Edge Connectors are non-metallic, as standard. The cables used must be screened with 80% shielding to comply with CE certification. The shielding should be connected to an earth terminal.

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Installation and Operation Manual

Appendix C

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Español

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magnetica (EMC directiva 89/336/EEC). Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE . Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un apantallamiento del 80%.

Cuando utilice conectores del tipo «D» ó «Circular» deberían estar protegidos con una pantalla metálica. Cuando sea posible, se deberan utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable. La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente en los 360 Grados. La pantalla deberá conectarse a tierra.

Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberan ser protegidos con un apantallamiento del 80% para cumplir con la certificación CE.

La pantalla deberá conectarse a tierra.

Models 5800-S

Français

Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC). Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE. Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 80 %.

Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre. Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre. Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à chacune de ses extrémités. Tous les blindages doivent être reliés à la terre.

Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 80% pour satisfaire à la réglementation CE. Tous les blindages doivent être reliés à la terre.

Page 36

Appendix C

Models 5800-S

Greek

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

Italiano

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC). E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare propri cavi, questi devono possedere una schermatura del 80%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le estemità. Lo schermo deve essere collegato ad un terminale di terra.

I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 80% per soddisfare la certificazione CE. Lo schermo deve essere collegato ad un terminale di terra.

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Installation and Operation Manual

Appendix C

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Nederlands

Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC). Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen: Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering. Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd met een bedekkingsgraad van 80%.

“D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden. Het scherm moet worden verbonden met aarde.

“Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een bedekkingsgraad van 80% om te voldoen aan de CE certificering. Het scherm moet worden verbonden met aarde.

Norsk

Models 5800-S

Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret. Utførelse av signalkabel og tilhørende plugger: Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

Dersom kunden selv velger kabel, må kabel med fullstendig, 80% skjerming av lederene benyttes. “D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet elektrisk jord. Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 80% skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

Português

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética (directiva CEM 89/336/EEC). Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores: A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.

Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 80%. Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-se buchas

metálicas de cabo para o isolamento do aperto do cabo. O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º. A blindagem deve terminar com a ligação à massa.

Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a 80% nos termos da Certificação CE.. A blindagem deve terminar com ligação à massa.

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Appendix C

Installation and Operation Manual

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PN 541-C-051-AAG

Models 5800-S

Suomi

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi hankittava

80%:sti suojattu kaapeli. “D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä kiinnitettäessä

suojaa. Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta. Suojan tulisi olla maadoitettu.

“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 80%: sesti suojattuja jotta ne olisivat CE sertifikaatin mukaisia. Suoja on oltava maadoitettu.

Svensk

November, 2008

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC). Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter: Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.

Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 80%. “D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med metalliserad

skärmning. Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning. Skärmen ska avslutas med en jordförbindelse.

Kortkontakter är som standard ej metalliserade, kablar som används måste vara 80% skarmade för att överensstämma med CEcertifieringen. Skärmen ska avslutas med en jordförbindelse.

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Installation and Operation Manual

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Models 5800-S

ppendix D: Important Safety Instructions

ENGLISH

IMPORTANT SAFETY INSTRUCTIONS

This appendix contains important safety and operating instructions for use with the Thermal Mass Flow Meter / Controller Series. The instrument complies to the (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Consult local authorities as to national and/or local safety codes and any additional installation requirements.

SAFETY INSTRUCTIONS

1. Please read all instructions and cautionary markings on (1) the flowmeter and (2) all appropriate sections of the Instruction and Operating Manual before using this product.

2. WARNING: Do not operate this instrument in excess of the specifications, listed in the Instruction and Operating Manual. Failure to heed this warning can result in serious personal injury and/or damage to the equipment.

3. Please make sure that the instrument is properly connected to electrical and pressure sources.

4. OPERATION: (a) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (b) Check for leaks around the meter inlet and outlet connections. If no leaks are present, bring the system up to operating pressure.

5. WARNING: If this equipment is not properly serviced, serious personal injury and/or damage to the equipment can result from potentially high operating pressures. Please make sure that the process line pressure is removed prior to service.

6. Please make sure that original parts of Brooks are used when the device requires servicing. Note however that lookalike substitutions and procedures can affect the product’s performance and place the save operation of your process at risk. It furthermore may result in fire, electrical hazards or improper operation.

DANISH

VIGTIGE SIKKERHEDSINSTRUKTIONER

Denne instruktion indeholder vigtige oplysninger om sikkerhed og anvendelse af Brooks Thermal Mass Flow Meter / Controller Series. Instrumentet opfylder (PED) trykudstyrs CE direktivet 97/23/EC. Kontakt de lokale myndigheder for oplysning om nationale og/eller lokale sikkerhedskrav og yderligere krav i forbindelse med installationen.

SIKKERHEDSINSTRUKTIONER

1. Læs alle instruktioner samt faremarkeringer på (1) flowmeteret og (2) i alle relevante sektioner af instruktions- og

brugervejledningen før instrumentet tages i brug.

2. ADVARSEL: Anvend ikke dette instrument udover de specifikationer, som er angivet i instruktions- og

brugervejledningen. Manglende opmærksomhed på denne advarsel kan resultere i alvorlige personskader og/ eller skader på udstyret.

3. Vær sikker på at instrumentet er korrekt tilsluttet elektrisk og mekanisk.

4. ANVENDELSE: (a) Luk langsomt flow ind i systemet. For at undgå trykstød åbnes afspærringsventilen langsomt.

(b) Kontroller ind- og udgangstilslutningerne for lækager. Hvis ingen lækager findes, kan systemet bringes op på normalt procestryk.

5. ADVARSEL: Hvis vedligehold af instrumentet ikke sker som anbefalet, er der - i tilfælde af høje tryk - risiko for

alvorlige skader på såvel personer som på instrumentet. Sørg derfor for at instrumentet er trykløst, før det afmonteres for service.

6. Vær opmærksom på kun at anvende originale Brooks reservedele, når instrumentet skal vedligeholdes. Bemærk

at anvendelse af uoriginale reservedele kan forringe instrumentets specifikationer og dermed øge risikoen for skader. Desuden kan anvendelse af uoriginale reservedele medføre risiko for brand, elektrisk stød eller forringet

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Appendix D

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

NEDERLANDS

BELANGRIJKE VEILIGHEIDSINSTRUCTIES

Deze appendix bevat belangrijke veiligheidsinstructies voor het gebruik van de Themal Mass Flow Meter/ Controller Series Deze instrumenten voldoen aan de (PED) Pressure Equipment CE Directive 97/23/EC (wet op het vervaardigen en distibueren van drukvaten binnen de Europese lidstaten). De locale authoriteiten kunnen u op de hoogte stellen van de daar geldende additionele en/of locale eisen voor installatie en gebruik.

VEILIGHEIDS INSTRUCTIES

1. Lees voor het in gebruiknemen alle instructies en waarschuwingen op de flowmeter en in de gebruiks-handleiding.

2. WAARSCHUWING: Gebruik dit instrument niet buiten de in de gebruiks-handleiding vastgelegde MAXIMALE GEBRUIKS DRUKKEN. Het niet in acht nemen van deze waarschuwingen kunnen leiden tot persoonlijke verwondingen en/of beschadiging van de meetapparatuur.

3. Overtuig u zelf, vòòr het in gebruik nemen, dat het instrument volgens de geldende voorschriften is ingebouwd in de leiding en aangesloten op het (eventuele) spanningsnetwerk.

4. INGEBRUIK NEMEN: (a) Langzaam opvoeren van de stroom in het systeem. Open de kranen langzaam om een plotselinge golfbeweging van de vloeistofstroom te voorkomen. (b) Controleer het instrument op eventuele lekkage, met name de in- en uitlaat aansluitingen. Als er geen lekkage wordt ontdekt, kan het systeem op bedrijfsdruk worden gebracht.

5. WAARSCHUWING: Nalatig onderhoud van dit instrument kan ernstig persoonlijk letsel en/of beschadiging van de meet apparatuur tot gevolg hebben. Overtuig u zelf ervan dat de procesdruk is afgevoerd alvorens onderhoud aan het instrument te plegen.

6. Overtuig u ervan dat er uitsluitend originele Brooks Instrument onderdelen worden gebruikt voor onderhoud en service aan het instrument. U wordt erop gewezen dat het gebruik van universele onderdelen en voorschriften om daar mee om te gaan, nadelige gevolgen kunnen hebben voor het gebruik van het instrument, en daardoor de juiste weking van uw proces in gevaar kan komen. Zelfs kan het gebruik daarvan resulteren in brandgevaarlijke situaties, electriciteitsgevaar of onjuist functioneren.

SUOMI

TURVAOHJEET

Tämä liite sisältää tärkeitä turva- ja käyttöohjeita Brooks:Thermal Mass Flow Meter / Controller Series Instrumentit kuuluvat CE-direktiiviin (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kysy lisää paikallisilta viranomaisilta koskien kansainvälisiä ja/tai paikallisia turvakoodeja sekä muita asennusvaatimuksia.

TURV AOHJEET

1. Kaikki ohjeet ja (1) virtausmittariin kiinnitetyt varoittavat merkinnät sekä (2) manuaalin soveltuvat kohdat on luettava ennen laitteen käyttöönottoa.

2. VAROITUS: Älä käytä tätä instrumenttia yli manuaalissa mainittujen maksimiarvojen. Mikäli tätä varoitusta ei noudateta, voi seurauksena olla vakava henkilövahinko ja/tai laitteen vaurioituminen.

3. Varmista, että mittalaite on oikein asennettu sekä prosessiputkistoon että sähköisesti.

4. KÄYTTÖ: (a) Päästä paineet hitaasti järjestelmään. Avaa putkistossa olevat venttiilit hitaasti, jotta vältyttäisiin paineiskuilta. (b) Tarkista mahdolliset vuodot mittarin prosessiliittimien kohdalta. Mikäli vuotoja ei ole, nosta prosessipaine käyttöpaineeseen.

5. VAROITUS: Mikäli tätä laitetta ei huolleta asianmukaisesti, saattaa korkea käyttöpaine aiheuttaa vakavia henkilövahinkoja ja/tai laitteen rikkoutumisen. On varmistettava, että putkistopaine on poistettu huollon ajaksi.

6. Tulee varmistaa, että käyetään Brooks:in alkuperäisiä varaosia kun laite vaatii huoltoa. Huomaa että korvaavat näköisoasat sekä käsittely voi vaikuttaa laitteen toimintaan sekä saattaa prosessin riskialttiiksi. Lisäksi tämä voisi aiheuttaa palo- tai sähköisen vaaran tai toimintaongelmia.

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Installation and Operation Manual

Appendix D

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Models 5800-S

DEUTSCH

WICHTIGE SICHERHEITSHINWEISE

Dieser Anhang enthält wichtige Hinweise für einen sicheren Betrieb des Ganzmetall-Schwebekörperdurchflussmessers der Baureihe Thermal Mass Flow Meter / Controller Series von Brooks Instrument . Das Gerät entspricht den gültigen PEDRichtlinien (PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC). Konsultieren Sie lokale Zulassungsbehörden für nationale und/oder regionale Sicherheitsbestimmungen bzw. weitergehende Installationsvorschriften..

SICHERHEITSHINWEISE

1. Bitte lesen Sie alle gekennzeichneten Sicherheitshinweise/ Warnungen auf (1.) dem Gerät und (2.) alle entsprechenden Kapitel in der dazugehörigen Installations- und Bedienungsanleitung vor dem Betrieb des Gerätes.

2. WARNUNG: Betreiben Sie das Gerät nicht außerhalb der Spezifikationen. In der Installations- und Bedienungsanleitung finden Sie den baugrößenspezifischen MAXIMALEN BETRIEBSDRUCK in der entsprechenden Tabelle. Bei Nichtbeachtung dieses Hinweises kann das Gerät beschädigt und/ oder zerstört werden und dies kann zu ernsthaften Verletzungen und/oder zum Tod von Personen führen.

3. Bitte stellen Sie sicher, dass das Gerät einwandfrei mit elektrischen und druckbeaufschlagten Leitungen verbunden ist.

4. BETRIEB: (a) Lassen Sie das Gerät zu Beginn langsam durchströmen. Öffnen Sie Ventile langsam, damit Druckstöße verhindert werden. (b) Prüfen Sie den Aufbau am Ein- und Ausgang des Gerätes auf Leckagen. Wenn Sie kein Leck feststellen können, erhöhen Sie langsam den Systemdruck bis der gewünschte Prozessdruck erreicht ist.

5. WARNUNG: Bei unsachgemäßer Wartung des Gerätes geht von diesem aufgrund potentiell hoher Betriebsdrücke ein hohes Sicherheitsrisiko für Personen und Material aus. Bitte vergewissern Sie sich vor Wartungsarbeiten, dass die Leitungen drucklos sind.

6. Verwenden Sie ausschließlich Original-Ersatzteile von Brooks Instrument für die Wartung und Reparatur von Geräten. Verwendung von Fremdfabrikaten oder Nachbildungen kann die Leistung des Gerätes einschränken und die Betriebssicherheit aufheben. Fehlfunktionen und gefährliche Betriebszustände können weitere Folgen sein.

FRANCAIS

INSTRUCTIONS IMPORTANTES DE SECURITE

Cet appendice contient des instructions importantes de sécurité pour l’utilisation du Thermal Mass Flow Meter / Controller Series. Cet instrument est conforme aux nouvelles directives PED “PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC”.

INSTRUCTIONS

1. Veuillez bien lire toutes les instructions, remarques et avertissements (1) sur l’appareil et (2) dans le manuel d’installation, d’utilisation et d’entretien.

2. AVERTISSEMENTS: Ne pas utiliser cet instrument en dehors des caractéristiques de fonctionnement spécifiées dans le manuel d’instructions. Dans le cas contraire, le personnel risque de se blesser grièvement et/ou d’endommager le matériel.

3. S’assurer que l’appareil est bien relié électriquement et soumis à une pression de travail.

4. OPERATION: (a) Lorsque l’installation du débitmètre dans la canalisation est achevée. La mise en débit du débitmètre doit être exécutée progressivement en ouvrant doucement le vanne de régulation afin d’éviter tout sur débit (b) Vérifier que les raccordements d’entrée et sortie soient parfaitement étanches (sans fuite), puis mettre sous pression de travail.

5. AVERTISSEMENT: Lors d’interventions d’entretien, bien s’assurer que la pression dans la canalisation est proche de zéro. Dans le cas contraire, le personnel risque de se blesser grièvement et/ou d’endommager le matériel.

6. Bien s’assurer que les pièces d’origine Brooks sont utilisées pour des interventions d’entretien. Des pièces de substitution pourraient affecter les performances de l’appareil et engendrer de graves disfonctionnements.

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Appendix D

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

NORSK

VIKTIG SIKKERHETS INSTRUKS

Dette tillegget inneholder viktige sikkerhets og drifts instruksjoner for bruk av Brooks metall rør mengde måler Thermal Mass Flow Meter / Controller Series. Instrumentet tilfredstiller (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kontakt lokale myndigheter for nasjonale eller lokale sikkerhetskoder og andre installasjonskrav.

SIKKERHETS INSTRUKS

1. Les alle instruksjoner og sikkerhetsanmerkninger for (1) mengde måleren (Flow meteret) og (2) alle aktuelle seksjoner av instruksjons manualen før bruk av produktet.

2. ADVARSEL: Bruk ikke dette instrumentet utover de spesifikasjonene som er gitt I instruksjons boken. Dersom advarslene ikke følges kan det resultere i alvorlig personskader og/eller ødeleggelse av utstyret.

3. Kontroller at instrumentet er skikkelig koblet både elektrisk og mekanisk.

4. DRIFT: (a) Start forsiktig. Ventilen åpnes langsomt for å unngå strømning sjokk. (b) Kontroller at det ikke er lekkasjer rundt målerens inn- og utløpstilkoblinger. Dersom det ikke er synlige lekkasjer kan ventilen åpnes til fullt operasjonstrykk.

5. ADVARSEL: Dersom utstyret ikke blir riktig vedlikeholdt kan det føre til alvorlige personskader og/eller skade på instrumentet på grunn av potensielle høye trykk. Påse at prosesstrykket er avlastet før utstyret demonteres.

6 Bruk alltid Brooks original deler ved service. Merk at selv om erstatningene ser like ut kan de påvirke

produktets virkemåte og gjøre prosessen usikker. Det kan videre føre til brann, elektrisk risiko eller feil virkemåte.

ITALIANO

IMPORTANTI ISTRUZIONI PER LA SICUREZZA

Questa appendice contiene importanti istruzioni sia per la sicurezza che per l’uso corretto degli flussometri metallici della Brooks Instrument della Thermal Mass Flow Meter / Controller Series. Questi strumenti seguono la normativa (PED) Direttiva CE 97/23/EC per gli strumenti in pressione. Consultare le autorità locali per i codici di sicurezza nazionali/ internazionali e per ulteriori norme di installazione.

ISTRUZIONI DI SICUREZZA

1. Prima di utilizzare il prodotto leggere attentamente tutte le istruzioni ed I marchi di sicurezza applicati sui flussimetri (1)

e Appendici relative delle istruzioni e del manuale operativo (2).

ATTENZIONE: Non utilizzare questo strumento oltre I limiti massimi delle specifiche elencate sia nelle istruzioni per l’uso che nel manuale operativo. La mancata osservanza di tali istruzioni potrebbe causare il rischio di lesioni personali e/o al danneggiamento dello strumento stesso.

3. Controllare che lo strumento sia correttamente collegato alle fonti di pressione che a quelle elettriche.

4. ISTRUZIONI OPERATIVE: (a) Lentamente procedere ad aprire il flusso allo strumento. Aprire lentamente le valvole di

processo dello strumento per evitare picchi di pressione. (b) Controllare l’assenza di perdite sia sui raccordi di entrata che in quelli di uscita dello strumento. Se non si riscontra alcuna perdita, portare lo strumento alla pressione di esercizio.

ATTENZIONE: Se allo strumento non viene fatta regolarmente una corretta manutenzione, alle alte pressioni potrebbero verificarsi lesioni personali e/o danni allo strumento. Assicurarsi che la pressione di processo sia stata tolta laddove si necessiti effettuare una manutenzione.

6. Assicurarsi che siano utilizzate solo parti originali nella manutenzione degli strumenti. Si fa notare che la sostituzione

con parti compatibili e la manutenzione effettuata non seguendo le procedure del fornitore, posso provocare alterazioni nelle prestazioni dello strumento ed alterare lo stato di sicurezza delle Vs. linee di processo. Ancor più potrebbe provocare rischi di incendio, rischi elettrici o far risultare errati i processi in corso..

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Appendix D

X-TMF-5800S-MFC-eng PN 541-C-051-AAG November, 2008

Models 5800-S

SWEDISH

VIKTIG SÄKERHETSINFORMATION

Denna bilaga innehåller viktig information om säkerhet och handhavande vid installation och användande av Brooks Flödesmätare i Thermal Mass Flow Meter / Controller Series. Instrumentet är i överensstämmande med (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kontakta de lokala myndigheterna angående eventuella nationella föreskrifter och ytterligare föreskrifter angående krav på riktig installation.

SÄKERHETS INSTRUKTION

1. Läs alla instruktioner och varningsföreskrifter på (1) flödesmätaren och (2) alla aktuella avsnitt i Instruktion - och handhavande manualen innan produkten tas i drift.

2. VARNING! Använd inte detta instrument utanför de angivna specifikationerna, som anges i Instruktion - och handhavande manualen. Att ej beakta denna varning kan resultera i alvarlig personskada och/eller skada på utrustningen.

3. Vänligen kontrollera att instrumentet är rätt inkopplat elektriskt och mekaniskt med avseende på elektrisk spänning och aktuellt tryck.

4. Vid igångsättning: (a) Släpp långsamt på aktuellt flöde i systemet. Öppna processventiler långsamt för att undvika för höga flöden. (b) Kontrollera om det finns några läckage runt flödesmätarens anslutningar. Om det inte finns något läckage, öka försiktigt till aktuellt arbetstryck.

5. Varning: Om denna utrustning inte servas enligt instruktionsboken kan alvarlig personskada inträffa. Utrustningen kan skadas av för högt tryck. Vänligen kontrollera att processtrycket på mätaren är frånkopplat i samband med service.

6. Vänligen kontrollera att bara BROOKS originaldelar används i samband med service. Observera at delar med motsvarande utseende, men ej originaldelar, kan påverka flödesmätarens funktion och prestanda samt påverkar säkerheten i processen. Det kan även resultera i eldsvåda, elektrisk fara eller felaktig funktion.

ESPANIOL

IMPORTANTES INSTRUCCIONES DE SEGURIDAD

Este apéndice contiene importantes instrucciones de operación y seguridad para el uso de los rotámetros de tubo de vidrio BROOKS de la Thermal Mass Flow Meter / Controller. El instrumento es conforme a la directiva 97/23/CE sobre Equipos a Presión de la Comunidad Europea (PED). Consulte con sus autoridades locales por si existieran normas ó directivas adicionales sobre el uso y/o instalación de dicho tipo de instrumentos.

INSTRUCCIONES DE SEGURIDAD

1. Lease con cuidado todas y cada una de las identificaciones del aparato (1) asi como las secciones del Manual de Inatalación y Operción antes de usar el rotámetro.

2. ATENCION! No operar nunca el instrumento por encima de las especificiones de Máxima Presión de Operación reseñadas en el Manual de Instalación y Operación. El no seguir estas instrucciones puede provocar daños y perjuicios en personas y/ó equipos.

3. Asegurarse de que el instrumento ha sido conectado e instalado correctamente a la fuente de presión y/o eléctrica.

4. OPERACION: (a) Empezar abriendo el caudal cuidadosamente. Abra lentamente las válvulas para evitar puntas de caudal. (b) Comprobar si existen fugas en el caudalímetro y sus conexiones. Si no se encuentran fugas continuar abriendo hasta conseguir las condiciones normales de servicio.

5. ATENCION! Llevar un mantenimiento adecuado con el fín de prevenir y evitar fallos debidos a altas presiones de operación. El no seguir estas instrucciones puede provocar daños y perjuicios en personas y/ó equipos. Despresurizar la línea antes de desmontar el rotámetro.

6. Utilice solo piezas originales BROOKS para el mantenimiento de su rotámetro. El uso de piezas de otros suministradores con apariencia similar puede afectar las prestaciones y la seguridad del equipo. Cualquier cambio indebido puede resultar en una explosión ó operación incorecta.

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Models 5800-S

Appendix E: Modellist

BROOKS SMART MASS FLOW PRODUCTS SMART MASS FLOW METERS / CONTROLLERS

BA SE MODEL NUM BER DESCRIPTIO N

5860S/BA MASS FLOW METER; F.S. FLOWRA NGES: 0.003 - 0.008 ln/min. 5860S/BC MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min. 5861S/BD MASS FLOW METER; F.S. FLOWRA NGES: 20 - 100 ln/min. 5863S/B 5863S/BF MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min. 5863S/BG MASS FLOW METER; F.S. FLOWRA NGES: 300 - 400 ln/min. 5863S/BH MASS FLOW METER; F.S. FLOWRA NGES: 400 - 500 ln/min. 5863S/BJ MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min. 5863S/BK MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min. 5863S/BL MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min. 5863S/BM MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min. 5863S/BN MASS FLOW METER; F.S. FLOWRA NGES: 900 - 1000 ln/min. 5863S/B1 MASS FLOW METER; F.S. FLOWRANGES: 1001 - 1100 ln/min. 5863S/B2 MASS FLOW METER; F.S. FLOWRANGES: 1101 - 1300 ln/min. 5863S/B3 MASS FLOW METER; F.S. FLOWRANGES: 1301 - 1600 ln/min. 5863S/B4 MASS FLOW METER; F.S. FLOWRANGES: 1601 - 1900 ln/min. 5863S/B5 MASS FLOW METER; F.S. FLOWRANGES: 1 901 - 2200 ln/min. 5863S/B6 MASS FLOW METER; F.S. FLOWRANGES: 2201 - 2500 ln/min. 5850S/BA MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min. 5850S/BC MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min. 5851S/BD MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min. 5853S/B 5853S/BF MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min. 5853S/BG MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min. 5853S/BH MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min. 5853S/BJ MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min. 5853S/BK MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min. 5853S/BL MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min. 5853S/BM MASS FLOW CONTROLLER; F.S. FLOWRA NGES: 800 - 900 ln/min. 5853S/BN MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min. 5853S/B1 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1001 - 1100 ln/min. 5853S/B2 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1101 - 1300 ln/min. 5853S/B3 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1301 - 1600 ln/min. 5853S/B4 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1601 - 1900 ln/min. 5853S/B5 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1 901 - 2200 ln/min. 5853S/B6 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 2201 - 2500 ln/min.

MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min.

MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min.

Installation and Operation Manual

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November, 2008

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M ECHANICAL CONNECTIONS

1A WITHOUT ADAPTORS (9/16"-18" UNF) (ONLY FOR 5850/60/51/61/53/63) 1B 1/4" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61) 1C 1/8" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61) 1D 3/8 " TUBE COMPRESS ION F ITTINGS (O NLY FOR 5851/61)

1E 1/4" VCR (ONLY FOR 5850/60/51/61)

1F 1/4" VCO (ONLY FOR 5850/60/51/61) 1G 1/4" NPT (ONLY FOR 5850/60/51/61) 1H 6mm TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61)

1J 10mm TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61) 1K 1/4" BSP ( F) (ONLY FOR 5850/60/51/61) 1Y ½" BSP (F) (ONLY FOR 5853/63) 1Z 1" BSP ( F) (ONLY FOR 5853/63) 2A 1 1/16" - 12SAE/MS (ONLY FOR 5853/63) 2B ½" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61/53/63) 2C 3/4" TUBE COMPRESSION FITTINGS (ONLY FOR 5853/63) 2D 1" TUBE COMPRESSION FITTINGS (ONLY FOR 5853/63)

2E ½" NPT(F) (ONLY FOR 5853/63)

2F 1" NPT(F) (ONLY FOR 5853/63) 2G 1½" NPT(F) (SEE OPTION "E") (ONLY FOR 5853/63/64) 2H ½" VCO (200 ln/min. max.) (ONLY FOR 5850/60/51/61/53/63)

2J 3/4" VCO (ONLY FOR 5853/63) 2K ½" VCR (200 ln/min. max.) (ONLY FOR 5850/60/51/61/53/63)

2L DIN DN15PN40 (ONLY FOR 5853/63) 2M DIN DN25PN40 (O NLY FOR 585 3/ 63) 2N DIN DN40PN40 (O NLY FO R 585 3/ 63) 2O DIN DN5 0PN40 (ONL Y FO R 585 3/ 63)

2P ANSI ½" 150 LBS (ONLY FOR 5853/63)

2R ANSI ½" 300 LBS (ONLY FOR 5853/63) 2S A NSI 1" 150 LBS (ONLY FOR 5853/63)

2T ANSI 1" 300 LBS (ONLY FOR 5853/63) 2U ANSI 1½ 2V ANSI 1½

2W ANSI 2" 150 LBS (ONLY FOR 5853/63)

2X A NSI 2" 300 LBS (ONLY FOR 5853/63) 2Y 1" VCO (ONLY FOR 5853/63) 2Z 3/4" VCR (ONLY FOR 5853/63) 9Z SPECIFY

O-RI NG/V ALV E SEAT M ATERIAL

AVITON

B BUNA (NOT FOR 5853 s ee Options 3, " I ") C PTFE/KALREZ (KALREZ S ENS OR O-RINGS & V A LVE S EAT) (NOT F OR 5 853/63) D KALREZ (NOT FOR 5853/63 see Options 3, " I ") E PTFE O-RINGS / EPDM VALVE SEAT (Teflon Diaphragm for 5853)

M KALREZ O -RINGS / METAL V AL V E SEAT (NO T FOR 5 853 /6 3)

Z SPECIFY

Appendix E

Models 5800-S

150 LBS (ONLY FOR 5853/63) 300 LBS (ONLY FOR 5853/63)

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Appendix E

Models 5800-S

0 METER ONLY (NO VALVE) 1 NORMALLY CLOSED (5850/51 SERIES) 2 NO RMAL LY CL OSED (PRESS. DIFF. >2 BAR. 58 53 SERIES) 3 NO RMAL LY CL OSED (PRESS. DIFF. <2 BAR. 58 53 SERIES) 4 NORMALL Y OPENED (58 5 0 ONLY) 5 NORMALLY CLOSED, 5850 SERIES, 300 BAR 9 SPECIFY

A 0-5Vdc 0-5 Vdc & 0-20mA (INCL. RS 232, 9600 BDS)

B 4-20mA 4-20 mA & 1-5Vdc (INCL. RS 232, 9600 BDS)

C 0-20 mA 0-20mA & 0-5Vdc (INCL. RS 232, 9600 BDS)

D 1-5Vdc 1- 5 Vdc & 4-20mA (INCL. RS 232, 9600 BDS)

E DIG. C OMM. DIG. COMM. + 0 - 5 V dc

F DIG. COMM. D IG. COMM. + 4 - 20 m A G DIG. COMM. DIG. COMM. + 0 - 20 mA

H DIG. COMM. D IG. COMM. + 1 - 5 V dc

I DIG. CO MM. DIGITA L COMMUNICA T ION (ONL Y )

Z SPECIFY

A 0 NONE (Communication w ill be possible via RS/232 and 9600 baud) B* RS232 C* RS485

D 0 PROFIBUS-DP (PNO CERTIFIED, 831-A- 023 and 541- C-068-AAG)

E 0 PROFIBUS- DP (not CERTIFIED, 831- A- 021 and 541- C-062-AAG) F* CARDEDGE CONNECTO R (ONL Y 0-5 I/O & COMMUNICATION)

G* CARDEDGE CONNECTOR (ONLY 0 -5 I/O & COMMUNICATION) RS-2 32

H* CARDEDGE CONNECTOR (ONL Y 0 -5 I/O & COMMUNICA TION) RS-48 5

*1 38400 Baud *2 19200 *3 9600 *4 7200 *5 4800 *6 3600 *7 2400 * BOTH HAVE TO BE SPECIFIED *8 1200

ANO CABLE

B MAT ING CONNECTOR ONLY C 3m RO UND CA BL E D 6m RO UND CA BL E E 3 m ROUND CABLE INCLUDING COMMUNICATION CABL F 6m RO UND CA BL E INCLUDING CO MMUNICATION CA BL

Z SPECIFY

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

VALVE TYPE

ELECTRICAL INPUT/OUTPUT INPUT OUTPUT

C OM M UNI CA TIO N / BAUDRATE

INTERCONNECTION CABLE

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ENHANCEM ENTS

A STA NDARD RESPONSE:< 1 SEC (5850/51) < 3 SEC (5853) [1].

B FAST RESPONSE ( SPECIFY VAL UES .... SEC.) [1]

C LINEAR RAMP (SPECIFY VALUES ....%/SEC.) [1]

D FLOW OUTPUT DAMPING (SPECIFY VALUES .... SEC.) [1]

CALIBRATION

0 UNCALIBRA TED 1 ST A NDARD CALIBRA TION INCLUDED 2 ST ORAGE OF MULTIPLE CAL. CURV ES; ADD PER AV AILAB LE

CALIBRATION GA S

9 SPECIFY

POWER SUPPLY INPUT

A± 15 Vdc

B + 24 Vdc = (Standard selection) C + 15 Vdc only

Z SPECIFY

AREA CLASSIFICATION

1 SAFE AREA 2 CERTIFIED FOR USE IN ZONE 2 9 SPECIFY

5850S/BC 1H A 1 A B3 C A 1 B 1 = TYPICAL MODEL NUMBER

Appendix E

Models 5800-S

BROOKS SMART MASS FLOW PRODUCTS SMART MASS FLOW METERS / CONTROLLERS

NOTES:

1. ENHANCEMENTS

PLEASE FILL IN THE REQUESTED SPECIFICATIONS WHEN YOU HAVE DESCRIBED THE ENHANCEMENTS. Standard response time of the flow output signal: Model 5850/51 and 5860/60, standard 1 s ec. or on request better than 0.2 sec. Model 5853/63, standard 3 s ec. or on request better than 1 sec. Model 5864, 3 sec. Standard settling time for controllers: Model 5850/51, st andard 1 sec. or on request better than 0.2 sec. Model 5853, standard 3 sec. or on request bett er than 1 sec. (to within 2%full sc al e of final value)

2. AREA SAFETY CLASSIFICATION

A "SPECIAL" CABLE CONNECTOR IS REQUIRED FOR ZONE 2 CERTIFICATION REQUIREMENTS. THIS WILL BE SUPPLIED WHEN YOU HAVE SELECTED THE INTERCONNECTING CABLE. IF THE CUSTOMER MAKES HIS OWN CABLE SET; YOU ALWAYS HAVE TO SELECT POSITION B - "MATING CONNECTOR ONLY".

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Appendix E

Installation and Operation Manual

Models 5800-S

3. OPTIONS

A) HIGH PRESSURE RATING 300 BAR FOR MODEL 5861S B) FOR GASES WHICH CLOG AND CONTAMINATE THE MFC EASILY, AN ANTI-CLOG LAMINAR FLOW ELEMENT MUST BE ORDERED. FOR FLOW RANGES UP TO 3460 mln/min. N2, ADD: C) 0 - 10 Vdc I/O CONFIGURATION (NO FURTHER I/O OPTIONS ARE POSSIBLE WITH THIS SELECTION) D) 0 - 5 Vdc Input / 0 - 10 Vdc output (0550E repl acement configuration) E) DIN/ANSI (PN40/150 LBS PRESSURE RATING) FLANGED CONNECTION FOR THE 1,5" AND 2" 5864S F) ENHANCED ACCURACY SPECIF ICATIONS: 0.5% OF RATE PLUS 0.1% F.S. (Flo w range 50 ml n/ min to 100 ln/min) G) INTERCONNECTION CABLE, A DD PER METER: H) INTERCONNECTION CABLE FOR RS-485 MULTI DROP CONFIGURAT ION, BASIS PRICE FOR THE FIRST DEVICE (3 METER CABLE LENGTH) ADD PER METER:

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

PRICE ADDER FOR AN ADDITIONAL DEVICE (1 MTR CABLE LENGTH):

I) O-RING / VALVE MATERIAL

Selection B can only be delivered for a 5853 model in combination with a Teflon Diaphragm Selection D can be delivered only in combination of a Teflon Diaphragm for Model 5853 price adder Selection D for Model 5863 price adder

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LEFT BLANK

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Models 5800-S

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller. Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended by the original manufacturer. All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of Seller are not covered by this limited warranty, and shall be at Buyer’s expense. Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration. The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

November, 2008

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas Europe +(31) 318 549 290 Within Netherlands 0318 549 290

Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS

Brooks ........................................................ Brooks Instrument, LLC

Buna........................................................... DuPont Dow Elastomers

Kalrez ........................................................ DuPont Dow Elastomers

Teflon ............................................... E.I. DuPont de Nemours & Co.

Viton............................................DuPont Performance Elastomers

1-888-554-FLOW

+011-81-3-5633-7100

Brooks Instrument 5800S User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

1.1 Purpose

1.2 How to use this Manual

1.3 Description

Section 2: Installation

2.1 General

2.2 Receipt of Equipment

2.3 Recommended Storage Practice

2.4 Return Shipment

2.5 Gas Connections

2.6 Mechanical Installation

2.7 In-Line Filter

2.8 Electrical Interfacing

2.9 Digital Communication

2.10 Interconnection

Section 3: Operation

3.1 Operating Procedure

3.2 Zero Adjustment

3.3 Calibration Procedure

Section 4: Maintenance

4.1 General

4.2 Troubleshooting and System checks

4.3 Cleaning Procedures

4.4 Calibration Procedure

4.5 Valve (Dis)Assembly Procedure

Section 5: Specification

Appendix B: Dimensional drawings

Appendix C: Translation of CE Marking electrical installation instructions