Brooks Instrument 5800S User Manual

Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

Brooks® Smart-Series Digital Mass
Flow Meters and Controllers

Models 5800-S

Brooks Smart Family

1

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these
instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate
within their normal specifications. The following instructions must be adhered to and integrated into your safety program when
installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual,
please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local
and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk.
Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed by
qualified persons, to prevent electrical shock and personal injury .

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure
Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland and
Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return
to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts
of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly , exhibit
early failure.

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Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day , flow customers all over the world turn to Brooks Instrument for solutions to their gas
and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various
industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical
instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirement s
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety . Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely,
Brooks Instrument

Models 5800-S

3

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

Models 5800-S

November, 2008

Table of Contents

Section 1:Introduction ......................................................................................................................................... 5

1.1 Purpose ........................................................................................................................................... 5

1.2 How to use this Manual.................................................................................................................... 5

1.3 Description....................................................................................................................................... 6

Section 2: Installation ......................................................................................................................................... 9

2.1 General ............................................................................................................................................ 9

2.2 Receipt of Equipment....................................................................................................................... 9

2.3 Recommended Storage Practice.....................................................................................................10

2.4 Return Shipment .............................................................................................................................10

2.5 Gas Connections ............................................................................................................................10

2.6 Mechanical Installation....................................................................................................................11

2.7 IN-LINE Filter ..................................................................................................................................11

2.8 Electrical Interfacing........................................................................................................................12

2.9 Digital Communication ....................................................................................................................14

2.10 Interconnection..............................................................................................................................16

Section 3: Operation ..........................................................................................................................................19

3.1 Operating Procedure .......................................................................................................................19

3.2 Zero Adjustment..............................................................................................................................19

3.3 Calibration Procedure......................................................................................................................19

Section 4: Maintenance .....................................................................................................................................20

4.1 General ...........................................................................................................................................20

4.2 Troubleshooting and System checks...............................................................................................20

4.3 Cleaning Procedures .......................................................................................................................23

4.4 Calibration Procedure......................................................................................................................23

4.5 V alve (Dis)Assembly Procedure .....................................................................................................23

Section 5: Specification........................................................................................................................................24

Appendix A: Gas Conversion T ables.....................................................................................................................28

Appendix B: Dimensional drawings ......................................................................................................................32

Appendix C:Translation of CE Marking electrical installation instructions..............................................................34

Appendix D: Important Safety Instructions............................................................................................................39

Appendix E: Modellist .........................................................................................................................................44

Figures

Figure 2-1: Open Collector ...................................................................................................................................13

Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom 14

Figure 2-3: RS-232 interconnection of TMF and PC..............................................................................................16

Figure 2-4: RS-485 multidrop interconnection TMFs and PC.................................................................................16

Figure 2-5: TMF/C to Read-out cable ...................................................................................................................17

Figure 2-6: TMF/C Read-out and pc .....................................................................................................................17

Tables

T able 1-1: Flow ranges per model.......................................................................................................................... 6

T able 2-1: Electrical interfacing. Smart TMF ........................................................................................................12

T able 2-2: Dipswitch settings ...............................................................................................................................15

Table 2-3: Electrical interfacing. Smart TMF cable...............................................................................................18

T able 4-1: T roubleshooting...................................................................................................................................22

T able 5-1: Flow ranges and pressure ratings ........................................................................................................25

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Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

Section 1 Introduction

1.1 Purpose

This instruction manual is intended to provide the user with all the information
necessary to install, operate and maintain the Brooks Smart series Mass Flow
meters 5860S, 5861S, 5863S and controllers 5850S, 5851S, 5853S.

1.2 How to use this Manual

It is recommended to read this manual before installing, operating or repairing
these Mass Flow Instruments. This manual is organised into nine sections:

Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance
Section 5. Specification
Appendices A - E

Models 5800-S

This instruction manual is intended to provide the user with all the information
necessary to install, operate and maintain the Brooks Smart Mass Flow Meters
and Controllers.
This series of microprocessor-based field instruments is designed to meet the
rigorous demands of various industries/applications. The use of digital
technology ensures that the Brooks Smart series provides maximum accuracy
and signal integrity . In addition it allows easy interfacing to any peripheral
equipment either through analogue or digital communication.
This manual covers Smart Mass Flow Meter models: 5860S, 5861S, 5863S and
5864S and Smart Mass Flow Controller models: 5850S, 5851S and 5853S.

Digital communication







The presence of a computer icon to the left of the text (as shown here) denotes
that the accompanying text refers to digital communication.

Smart Control

Digital communication (either via RS-232 or RS-485) allows to connect our
Brooks model 0160 Smart Control. This interface program can be used to
operate and (re)configure Smart Mass Flow Products (calibration parameters are
not accessible).

Smart DDE

If you require bi-directional links between your Windows-based applications
software and Brooks Smart Mass Flow Products,our model 0162 Smart DDE
(a powerful, user-friendly Dynamic Data Exchange software program) offers all
the features you need.

5

Section 1: Introduction

Models 5800-S

1.3 Description

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

Smart Service

If you are equipped with primary standard Volumeter calibration equipment or
(secondary standard) Brooks Smart Mass Flow Meters, you can use the
model 0163 Brooks Smart Service program for (re)configuration, diagnostics,
calibration and/or verification.The HART protocol-based commands are listed in
a separate.

Communication manual

Document: Brooks part number: 541-C-053-AAA.

Models 5860S, 5861S, 5863S and 5864S Brooks Smart Mass Flow Meters are
primarily used to provide accurate measurements of gas flows. The heart of
these systems is the thermal mass flow sensor, which produces an electrical
output signal as a function of flow rate.
In addition, models 5850S, 5851S and 5853S Brooks Smart Mass Flow
Controllers control gas flows. The flow ranges per model are listed in Table 1-1.

Table 1-1: Flow ranges per model

Mass Flow

Controller

Model

5850 S 5860 S 0.003 30 ln/min.
5851 S 5861 S 20 100 ln/min.
5853 S 5863 S 100 2500 ln/min.

*refers to ‘normal’ conditions, i.e. 0°C, 1013.25mbar .
The Brooks Smart Mass Flow Meter is a stand-alone instrument with

microprocessor-based electronics on board. The MF-series Smart Mass Flow
Controller has an integrally-mounted control-valve module with which stable gas
flows can be achieved.

The standard features listed below apply to all models.
The supplied inlet adapter has a built-in, upstream inlet filter for flow
straightening. Besides reducing the effects of changes in upstream piping, this
also protects the measuring element from occasional debris in the flow stream.
In addition, it eliminates the need for extra (expensive) nlet filtering.

•

Flow signal adjustable via software:
0-5 Vdc or 1-5 Vdc or
0-20 mA or 4-20 mA.

Mass Flow

Meter

Model

Flow Ranges

min. f.s. max. f.s. Unit *

Note: Digital output (communication) is simultaneously available with analogue
output.

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Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

•

Output damping provides a constant scale reading under fluctuating flow rate
conditions. Standard factory setting: 0.5 sec.

•

Output limiting prevents possible damage to delicate acquisition devices by
limiting the output to 0-5.25 Vdc on the voltage signal output and 0-21 mA on
the current output.

An alarm (TTL open collector) signal output is available to the user. If the
instrument’s specifications are exceeded, either by process conditions or by the
device itself, an alarm signal can be generated.

MASS FLOW CONTROLLER

Standard features include:

• Each Smart Mass Flow Controller is provided with an adaptive valve-control

algorithm for the maintenance of stable flow control, even under varying

process conditions (pressure/temperature).

Section 1: Introduction

Models 5800-S

•

Setpoint source selectable: Setpoint signal source for the Mass Flow
Controller can be selected from:

- communication (RS232 / RS485) or

- 0-5 Vdc or

- 1-5 Vdc or

- 0-20 mA or

- 4-20 mA.

•

Fast Response Control provides rapid gas settling times with minimal over/
undershoot. Standard factory setting: 1 sec. for 5850/51 and meter models,
3 sec. for 5853.

•

Valve Override (VOR, availabe at pin 12) allows the user to fully open or
close the control valve independently of the set-point.

•

Low flow cut-off prevents the valve from opening whenever the Set point is
less than 1% of full scale.

Digital communication features

Digital communication, via RS485 or RS232, provides access to all of the Smart
TMF’s functions, including:
Accurate mass flow measurement and Set point regulation (controller
only), as a percentage of full scale and in selectable engineering units

• Flow totalizer

• Ambient temperature

• Operational settings
⇒ Calibration (storage of up to 10 calibration curves)
⇒ Controller settings (controller only)

• PID settings

7

Section 1: Introduction

Models 5800-S

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

• selectable soft start

• adaptive valve control
⇒ Adaptive filtering for signal flow component

• Alarms
⇒ Self-diagnostic

• EEPROM error

• database error

• analogue output error
⇒ Out-of-range indications

• for analogue set points higher than 100% (controller only)

• flow

• valve (controller only)

• analogue output
⇒ Environmental errors

• no gas flow detected

• power supply outside specification range

• ambient temperature outside specified range

• high and low flow alarms

8

Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

Section 2: Installation

2.1 General

This section contains the procedures for the receipt and installation of the
instrument. Do not attempt to start the system until the instrument has been
permanently installed. It is extremely important that the start-up procedures be
followed in the exact sequence presented.

NOTE: Operating procedure: do not operate this instrument outside the
specification range listed in section 5.
Before bringing the unit into operation, make sure that all gas connections have
been correctly tightened and that all the necessary electrical connections have
been made.

Models 5800-S

2.2 Receipt of Equipment

When the equipment is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the local
carrier should be notified at once regarding his liability . A report should be
submitted to your nearest Product Service Department.

Brooks Instrument

407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
Email: [e-mail]
http://www.brooksinstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
Email:[e-mail]

Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare parts are not discarded with
the packing materials. Inspect for damaged or missing parts.

9

Section 2: Installation

Models 5800-S

2.3 Recommended Storage Practice

If equipment supplied by Brooks Instrument is to be placed in intermediate or
long-term storage, it is recommended that it be:

a. S tored within the original shipping container.
b. S tored in a sheltered area, under the following conditions:

c. Subjected to a visual inspection upon removal from storage, to verify that the

2.4 Return Shipment

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

1) Optimum ambient temperature 21°C (70 °F), maximum 32 °C (90 °F),

minimum 7 °C (45 °F),.

2) Optimum relative humidity 45% (maximum 60%/minimum 25%).
condition of the equipment is ‘as received’. If the equipment has been in

storage for more than ten months or if it has not been stored under the
recommended conditions, all pressure containing seals should be replaced.
In addition, the device should be subjected to a pneumatic pressure test in
accordance with the applicable vessel codes.

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Brooks Instrument

407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
Email: [e-mail]
http://www.brooksinstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

Any instrument returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination St atement, as well as, a Material Safety
Data Sheet (MSDS) for the fluid(s) used in the instrument. This is required
before any Brooks Personnel can begin processing. Copies of the form can be
obtained from any Brooks Instrument location listed above.

2.5 Gas Connections

10

All models are fitted with the following inlet and outlet connectors as standard:
NPT(F), tube compression fittings, VCR, VCO, DIN or ANSI flanges. Prior to
installation, make certain that all piping is clean and free of obstruction. Install
the piping in a manner that permits easy access to the instrument, should it
need to be removed for cleaning or test-bench troubleshooting.

Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

2.6 Mechanical Installation

(For dimensional drawings see Appendix B: Dimensional drawings)

NOTE: When installing the Mass Flow device, care should be taken to prevent
foreign materials from entering the instrument’s inlet or outlet. Do not remove the
protective end-caps until the actual moment of installation.
When used with reactive gases (some of which may be toxic), contamination or
corrosion may occur as a result of plumbing leaks or improper purging.
Plumbing should be checked carefully for leaks and the Mass Flow device
should be purged (for a significant time) with Nitrogen before and after use on
reactive gasses.
Recommended installation procedures:
a. All models should be mounted in places that are relatively free from

mechanical shocks and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in a manner that allows the instrument to be easily removed for

cleaning.
d. The mounting position of the Smart Mass Flow Meter or Controller can be

either horizontal or vertical, in case process pressures are smaller than 10

bar.
e. For higher process pressures, a horizontal installation is preferred, since

these pressures may cause a thermal siphon effect of the output signal at

zero flow conditions and degrading specifications.

Section 2: Installation

Models 5800-S

2.7 In-Line Filter

NOTE: The control valve of the Smart Mass Flow Controller provides precision

control and is not designed for positive shut off. If positive shut off is required, it
is recommended that a separate shut-off valve be installed in-line, downstream
from the Smart Mass Flow Controller.

NOTE: If the power supply to the Smart Mass Flow Controller is interrupted, a
NORMALL Y CLOSED valve will be fully closed, while a NORMALL Y OPEN valve
will be fully open. The NORMALL Y OPEN control valve meets application
specific requirements, since it allows nitrogen gas purging if the power supply is
interrupted.

An in-line filter is installed, as standard, in the instrument’s inlet to prevent any
foreign material entering the flow sensor or control valve. The filtering element

should be periodically replaced or ultrasonically cleaned.

Apply only clean gasses on Mass Flow Meter/Controllers.

11

Section 2: Installation

Models 5800-S

2.8 Electrical Interfacing

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

The installation of Smart TMF includes a 15-pin Sub-D connector . For details of
correct installation, see Table 2-1

Table 2-1: Electrical interfacing. Smart TMF

Pin (TMF s ide) Func ti on Controller Met er

1. Set point return (-) * n.a.

2. 0 (1)-5 V dc F low s ignal out put * *

3. (TTL) Open col lec t or alarm output * *

4. 0 (4)-20 mA Fl ow s ignal out put * *

5. +15 V dc t o + 28 V dc P ower s upply * *

6. -15 V dc Power s upply (if required) * *

7. 0 (4)-20 m A S et point input (+) * n.a.

8. 0 (1)-5 Vdc S et point input (+ ) * n.a.

9. Power s upply com m on * *

10. Flow s ignal out put c om m on * *

11. +5 V dc ref. output * n.a.

12. Valve override input * n.a.

13. Not c onnec t ed * *

14. Optional RS232C-Rx D or RS485-A - * *

Signal Output (pins 2, 4 and 10)
Pin 2 indicates the flow rate, represented by a 0-5 Vdc or 1-5 Vdc signal
proportional to the mass flow. Pin 4 indicates the flow rate, represented by
either a 0-20 mA or 4-20 mA signal current proportional to the mass flow . Both
the current and voltage signals are returned via pin 10 on the D-connector .

Analogue Setpoint Input (pins 7/8 and 1; Controller models only) . The Smart
Mass Flow Controller can be used either with a current or voltage Set point. To
use the current Set point, connect the Set point signal to pin 7 and the Set
point return signal to pin 1 on the terminal (jumper J1 must be in place refer to
Figure 2-2). To use the voltage Set point, connect the Set point signal to pin 8
and the Set point return to pin 1 on the D-connector.

5 Vdc reference (pin 1 1; Controller models only)
A +5 Vdc ref. volt age is available on pin 1 1. This can be used to set the
Setpoint with the aid of an externally located potentiometer (10 turn 2 KOhm
suggested)..

NOTE: I/O configuration to be defined at time of ordering. Reconfiguration at
customer side can be accomplished using digital communication.

Power Supply

Mass Flow Meter models (pin 5 and 9): The Mass Flow Meter's power
supply is connected via pins 5 (+15 to +28 Vdc) and 9 (power supply common)
on the D-connector.
Mass Flow Controller models (pin 5, 6 and 9): The Mass Flow Controller's
power supply is connected via pin 5 (+15 to +28 Vdc) and 9 (power supply

12

Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

common) on the D-connector. If a -15 Vdc power supply is required, pin 6 must

be connected and jumper [K2] on the p.c. board must be set the lower
position (see Figure 2-2).

This is applicable for model 5851S and/or when a Normally Opened (N.O.)
control valve is used.

NOTE: With regard to the power supply connections, the attached cable must
be as short as possible to ensure that the minimum required voltage and
current is available at the mass flow device.

Cable Shielding Earth

Cable requirements

Compliance with EMC directive 89/336/EEC, requires that the equipment be
fitted with fully screened signal cables with at least 80% shielding.The cable
shielding should be connected to the PG connector’s metal shell, and have
360° shielding at both ends. The shielding should be connected to an earth
terminal.
For translations of this instruction, see Appendix D: Translations of installation
instructions

Section 2: Installation

Models 5800-S

Alarm (pin 3 of 9)
A (TTL) Open Collector alarm output is available.
Type of used transistor is NPN.

Figure 2-1: Open Collector

Valve override (pin 12; Controller models only)
To open or close the control valve independently of the Set point signal (e.g. for
safety reasons), pin 12 is available to carry a valve override signal. Leave floating
(i.e. not connected) to allow for normal control operation.

≥ 5 Vdc V alve Open (for both NO and NC valves)

≤ ≤

≤ 0 Vdc V alve Closed (for both NO and NC valves)

≤ ≤

NOTE: The valve override command on pin 12 takes precedence over the
communication-mediated valve override command.

Digital communication (pins 14 and 15)





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13

Section 2: Installation

Models 5800-S

2.9 Digital Communication

Installation and Operation Manual

X-TMF-5800S-MFC-eng

PN 541-C-051-AAG

November, 2008

pins 14 and 15 are available for connecting the device to the RxD/A- or TxD/A
lines for RS-232/RS-485 communications.

NOTE: Either RS-232 or RS-485 should be specified at the time of ordering. See
section 2.7 for details of how to configure the p.c. board.

NOTE: The printed circuit boards only need to be reconfigured if the hardware
settings differ from those specified at the time of ordering.







Brooks Smart Mass Flow Meters and Controllers incorporate two printed
circuit boards: one main board containing the processor and a piggyback board.
The piggyback board enables the device to communicate with a PC via an
RS-232 or RS-485 connection.The piggyback board is installed via the K5, K6
and K7 connectors on the main board (see Figure 2-2).

The p.c. board enclosure must be removed to gain access to the electronics.
Disconnect the power to the device and any cables running to the D-connector.
Remove the three screws at the base of the electronics enclosure, then lift off
the enclosure. The electronics enclosure must be replaced before returning the
unit to service.

+

14

Figure 2-2: p.c. boards with the locations of jumper switches
Note: Switch number 1 is the switch at the bottom

The digital communication piggyback board is used for all
communication-related hardware settings. For this purpose, the board is
equipped with a dipswitch block (SW1) holding 4 switches. RS-232 Board
(097-B-364-ZZZ) or RS-485 Board (097-B-363-ZZZ), and to select the baud rate.
T able 2-2 summarises the possible settings.

Installation and Operation Manual

X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008

Table 2-2: Dipswitch settings

Physical

layer

selection

RS-232 Off
RS-485 On

Since Brooks Smart Mass Flow devices are capable of communication
immediately after start-up, you should set the correct baud rates prior to power
up. Any changes to the baud rate settings or the physical layer selection made
during operation will take effect immediately . The communication I/O drivers are
directly connected to the D-connector on top of the device.

Section 2: Installation

Models 5800-S

Baud rate

selection

1200 Off Off Off
2400 On Off Off
3600 Off On Off
4800 On On Off
7200 Off Off On
9600 On Off On
19200 Off On On
38400 On On On

Switch

#1

Dipswitch block SW1

Switch #2Switch #3Switch #4

The RS-232 is essentially a point-to-point connection, i.e. one host-computer
and one Smart Mass Flow device. Most IBM-compatible PCs are equipped with
one or more RS-232 ports (COM ports) as standard. The RS 232 usage and
definitians are very diverse. On the MF Smart Mass Flow devia the TxD signal is
the output signal of the devia and the RxD the input signal.The communication
terminals can be directly connected to a serial COM-port of any PC. The other
part of the terminals can be connected to Brooks model 0152/0154
Microprocessor-based Read-out and Control Electronics. This model provides
the power supply for Smart Mass Flow devices, as well as providing local
read-out and displaying the analogue output signals. Figure 2-3 shows the
interconnection diagram of the RS-232 configuration. The pin assignment on an
IBM Compatible PC. This is standard for RS-232.

15