Agilent 16193A
Small Side Electrode SMD Test Fixture
Operation and Service Manual
Agilent
16193A Small
Side
Electrode
SMD
T
est
Fixture
Operation and
Service
Manual
Agilent P art N o . 16193-90040
Printed in JAP AN A ugust 2 001
Seventh Edition
Notice
The
information
This
document
reserved.
language
contains
No
part
without
contained
proprietary
of
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the
prior
in
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document
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is
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is
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to
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protected
reproduced,
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echnologies .
without
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are
Agilent
T
echnologies
Component
1-3-2,
Hyogo
Murotani,
,
651-2241
T
est
Japan,
PGU-Kobe
Nishi-ku,
Japan
Ltd.
Kobe-shi,
c
Copyright Agilent T echnologies Japan, L td. 1 993, 1996, 1999, 2 000, 2001
Manual Printing
The
manual
changes
at
reprint
technical
printing
when
do
not
changes
a
date
new
edition
cause
are
incorporated.
History
and part
is
the
date to
number indicate
printed. (Minor
change .)
The m anual
its c urrent
corrections a nd
part number
edition. The
updates t hat
changes when
printing date
are i ncorporated
extensive
December
June
1996
October
A
ugust
1996
1999
December
September
A
ugust
2001
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16193-90000)
Edition
Edition
16193-90020)
16193-90020)
16193-90030)
16193-90040)
iii
Safety Summary
The
following
service
W
and
The
,
ARNINGS
intended
A
gilent
requirements
DO
NOT
Do
not
operate
electrical
K
eep
A
general
and
repair
given
T
of
elsewhere
use
of
the
echnologies a ssumes
.
Operate
the
instrument
instrument
way
From
in
safety
this
In
Live Circuits
precautions must
instrument. F
in
this
instrument.
An
Explosive
in
the
such
an
environment
be observed
ailure t o
manual violates
no liability
for the
Atmosphere
presence
constitutes
comply w ith
safety standards
customer's failure
of
ammable
during a ll
these precautions
a
safety
gasses
or
hazard.
phases of
of design,
to
comply
fumes
.
operation,
or with
manufacture ,
with
Operation
specic
these
of
any
Operating
adjustments
with
with
circuits
DO NOT
Do not
aid and
DO
Because
unauthorized
Sales
personnel
must
the
power
the p ower
be
cable
cable
must
made by
connected.
removed.
before touching
Service
attempt
resuscitation,
Or
internal
is
NOT S ubstitute
of the
danger
modications to
and Service
Oce for
them.
service
present.
P
of
introducing
Dangerous Procedure
W arning
this
W arning
s ,
manual.
such a s
Instructions
Dangerous
the
example
instrument.
this instrument.
not
remove
instrument covers
qualied m aintenance
A
djust
arts
Under
T
o
or
Or
certain
avoid
Alone
adjustment
Modify
additional
the instrument.
service
and
repair
W arnings
below
,
precede
contained
voltages
Use
in
the
,
capable
extreme
conditions
injuries
,
always
unless
Instrument
hazards
Return
to
ensure
potentially
warnings
of
causing
caution when
. Component
personnel.
,
dangerous voltages
disconnect
another
,
do
not
the
instrument
the
safety
dangerous
must
be
death,
handling,
Do
not
person,
substitute
features
followed.
are
replacement and
replace
components
may
power
testing,
and
capable
of
parts
to
a
Agilent
are
procedures
present in
and
discharge
rendering
or
T
maintained.
throughout
this
internal
exist
even
rst
perform
echnologies
adjusting
The voltage l evels found i n t his test xture
when used with the i ntended instruments d o not
warrant m ore t han n ormal safety precautions for o perator safety
iv
.
Operating Precaution
Do
not
exceed
appropriate
for
the
operating input
the
instrument
power ,
being
used,
voltage ,
refer t o
and current
level a nd
your instrument's
signal t ype
operation manual.
Caution
Electrostatic discharge
your instrument.
being c onnected
grounding s trap
ground yourself
outer
connectors .
Never touch
Use a
Certication
Agilent
of
measurements
T
echnology
facilities
T
echnologies
shipment
of
from
,
to
other
are
the
shell
of
work
station
certies
the
factory
traceable
extent
.
to
allowed
International
(
ESD damage
or disconnected.
that provides
to discharge
any
grounded
the
test
clip
equipped
that
this
product
Agilent
the
United
by
the
T
echnologies
Standards
esd
)c a n
damage the
is
a
high
any
instrument
contacts
with
met
States
National
Institution's
Organization
most
Protect
resistance
static
.
an
anti-static
its
further
calibration
highly sensitive
likely
to
them
charge
chassis
published
certies
Institute
members
occur
as
the
from
ESD
path
to
ground.
built-up
before
work
by
touching
surface
specications
that
of
Standards
facility
,o r
.
microcircuits
test
xtures
damage
by
Alternatively
touching
the
the
test
.
at
the
its c alibration
and
to the
calibration
are
wearing
port
time
in
a
,
W
arranty
This
Agilent
workmanship
certain
for
the
either
F
or
warranty service
Agilent T
T
echnologies
pay all shipping charges
another c ountry
Agilent T
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echnologies
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listed
of
in
During
products which
or repair
echnologies .
shall
Buyer shall
pay
shipping
, d uties
.
echnologies warrants that
product
one
year
Instrument
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is
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Specications
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prove to
, t his
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to
return
, and taxes f or products returned to Agilent T
its software and rmware designated by Agilent
instrument will execute its p rogramming instruction when
property installed on that i nstrument. Agilent T
of the instrument, o r s oftware
,o r
rmware will be uninterrupted or error f ree
warranted
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echnologies will,
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Buyer
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and
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be
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echnologies f rom
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.
v
Limitation O f
The
foregoing
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misuse
,
operation
preparation
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implied
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by
Buyer
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Buyer-supplied
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.
is
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to defects
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resulting from
or interfacing,
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and
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tness
echnologies specically
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improper or
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Exclusive
The
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whether
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Assistance
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or
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ddresses
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Oce
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for
vi
Safety Symbols
General
denitions
Instruction
necessary
against
Indicates
exceeding
Protective
of
connected
Low-noise
common,
fault.
manner
the equipment.
Frame
equipment
Alternating
Direct current
Alternating
W
or
injury
of
safety
a
fault.
A
or
arning
the
like
or
symbols used
manual
for
damage
dangerous
1000
the
user
to
the
volts
symbol:
voltage
must
conductor
Used
with
to
ground before
or
noiseless ,
as
well as
providing protection
terminal marked
described
chassis
which
current
in the
terminal.
normally
(power
(power line).
or
direct
current
denotes
,
death
which,
to
a
hazard.
if
not
personnel.
on equipment
the
product
to
refer
to the
instruction manual
instrument.
(terminals
be
terminal.
wiring
terminals to
so
F
fed
marked).
or
protection
operating equipment.
clean ground
with this
(earth) t erminal.
symbol must
installation (Operation)
A
connection
includes
all
exposed
line).
(power
It
calls
correctly
line).
attention
performed
or in
manuals .
is
marked with
from
the i nterior
against electrical
indicate the
terminal which
Used for
against electrical
be connected
manual, and
to
the
to
or
frame
metal
a
(chassis)
structures
procedure
adhered
this symbol
in order
to protect
by voltage
shock in
a
signal
shock in
to
ground
before o perating
of
.
,
practice ,
to
,
could result
when it
must
case
the
is
case
be
of
in
the
condition
in
Caution
condition
result
Note
sign
or
damage
denotes
condition o r
denotes
the
like
to
or
important
the like
a
hazard.
,
which,
if not
destruction
information.
,
which
is
It
calls attention
correctly performed
of
part or
all o f
It calls
essential
to
highlight.
to
a
procedure
the
product.
attention t o
,
or
adhered
a p rocedure
practice
to
,
could
, p ractice
,
,
vii
APC-7
viii
R
is a U .S. registered trademark o f t he Bunker Ramo C orporation.
Contents
1.
General
Introduction
Manual Summary
Product D escription
Applicable Instruments
Options A
A
ccessories
Specications
Supplemental
Residual
2.
Preparation
Introduction
Initial
Inspection
A
djust
the
Connecting
Repackaging
Measurement
3.
Operation
Introduction
Operating
Overview
How
to
set
Setting
Setting
How
to
connect
Information
.
.
.
.
vailable
Supplied
Inductance
Conguration
the
Flow
.
the
the
the
.
.
.
.
P
erformance
for
Use
.
.
.
.
.
.
T
est
the
T
est
Error
Correcting
.
.
.
.
.
.
.
.
.
.
SHORT
SHORT
OPEN
the
.
.
.
.
.
.
.
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.
.
.
.
.
.
.
.
.
.
Characteristics
of
the
Shorting
.
.
.
.
.
.
to
SMD
Fixture
Fixture
.
.
.
.
.
.
.
..
condition,
condition
condition
DUT
.
.
.
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for
F
or
Function
.
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..
..
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Bar
.
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.
Size
Use
.
Shipment
.
.
.
..
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.
and
.
..
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for
Each
.
.
..
.
.
.
.
.
.
.
.
the O PEN
..
..
..
..
..
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Instrument
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condition .
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.
1-1
.
1-1
.
1-1
.
1-1
.
1-2
.
1-2
.
1-2
.
1-3
.
1-4
.
2-1
.
2-1
.
2-3
.
2-4
.
2-5
.
2-6
.
3-1
. 3-1
. 3-2
.
3-3
.
3-3
.
3-5
.
3-5
4.
Service
Introduction
General
Assembly Replacement . . . . . . . . . . . .
Disassembly and Assembly P rocedure . . . . . . . . . . . . . . . . . . .
Pressure Arm A ssembly R emoval: . . . . . . . . . . . . . . . . . . . .
Pressure Arm A ssembly Disassemble: . . . . . . . . . . . . . . . . . . .
Replaceable
Troubleshooting
Open Impedance Check
Short Impedance Check
Short Impedance Repeatability Check . . . . . . . . . . . . . . . . . . . . 4-10
..
..
..
..
..
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Information
P arts .. .. .. .. .. .. .. .. .. .. .. .
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.. .. .. .. .. .. .. ..
... .. .. .. .. .. .. .. .. .. .. ..
.. .. .. ..
.. .. .. .. .
.. .. .. .. .. .. .. .. ..
. . .. .. .. .. .. .. .. .
..
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..
..
..
..
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.. .. ..
.. .. ..
..
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..
.
4-1
.
4-1
4-3
. 4-3
. 4-3
4-3
4-3
4-9
4-9
4-10
Contents-1
Figures
1-1. Applicable
1-2. Simulation
2-1. 16193A
2-2. Electrodes
2-3. Connecting
3-1.
16193A
4-1.
Replaceable
4-2.
Replaceable
4-3.
Obsolete
4-4. Shorting
T
ables
1-1. Furnished
1-2.
Supplied S horting
1-3.
Option 010
2-1.
16193A
2-2.
Measurement
4-1.
16193A
4-2.
Replaceable
4-3.
Replaceable
4-4.
Replaceable
4-5.
Open
4-6.
Short
4-7.
Short
DUT
Setup
Product
conguration and
the T
T
est
Fixture
P
arts
P
arts
parts
manufactured
Device
A
ccessories
Shorting
Contents .
Error Correcting
Product
P
arts
P
arts
P
arts
Impedance
Impedance
Impedance
Size
.
.
.
.
.
.
.
Overview
est
Fixture
Overview
for
Pressure
for
T
est
Stage
P
osition
Device
Overview
for
for
for
V
alue
V
alue
Repeatability
.
.
.
Residual
Device
.
.
.
Main
Pressure
T
est
Guideline
Guideline
Stage
.
.
.
.
.
.
.
.
.
.
.
.
DUT
Size
with
APC-7
.
.
Arm
Assembly
earlier
.
.
.
.
.
.
.
.
Inductance
Residual
.
.
.
.
Functions
.
.
.
.
Assembly
Arm
Assembly
.
.
Guideline
.
.
.
.
.
.
.
.
.
.
.
.
.
.
R
Connector ( 4291B)
.
.
.
.
Assembly
.
than
1996
.
.
.
.
.
.
.
.
Inductance
.
.
.
.
for
.
.
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Assembly
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1-3
.
1-5
.
2-2
2-3
.
2-4
.
3-2
. 4-5
.
4-7
. 4-8
.
4-9
.
1-2
.
1-4
.
1-4
.
2-2
.
2-6
.
4-2
.
4-4
.
4-6
.
4-8
.
4-10
.
4-10
.
4-10
Contents-2
1
General
Information
Introduction
The
purpose
Fixture
Manual
This
manual
The
specications
Installing
Operating
Ordering
Product
The 16193A
of
this manual
eciently
Summary
contains
the
16193A
the
16193A
replaceable
Description
is
used
repeatability .
and
condently .
the
of
the
(see
parts
to
measure
is to
following:
16193A
Chapter
(see
Chapter
for
a
enable you
(see
this
2).
3).
the
16193A
small,
side
to
use
your
chapter).
(see
Chapter
electrodes
16193A
4).
surface
Small
mount
Side
devise
Electrode
(SMD)
SMD
with
T
est
high
Applicable
The
16193A
Instruments
has
been
designed
to
operate
specically
with
the
following
LCR
meters
impedance analyzers:
Y
ou
can
directly
Y
ou
can
use
the
connect
16193A
the
with
16193A
43961A:
to:
4191A,
4395A
4291B
(option
,
E4991A
010),
4396A/B (option 010)
Y ou can use t he 16193A with 4 1951A:
Y ou can use t he 16193A with R F a dapter 42942A:
Y ou can use t he
Y ou can use t he 16193A
1
The 4284A is a typical i nstrument. Other 4 -terminal pair instruments that can be used with the 1 6085B are
16193A with R F a dapter 16085B:
with R F a dapter 16099A:
4195A
4294A
1
4284A
4194A w ith 4 1941A
also applicable .
2
The 4194A with 41941A is a t ypical instrument. Other i nstruments t hat c an be used with the 16099A are also
applicable .
General Information 1-1
and
2
Options A
The
following
vailable
option
is
supplied f or
the 1 6193A:
Option
Option
A
The
001
010
Delete
A
dd
the
industry
ccessories Supplied
following
accessories
Description
Operation
Shorting
Case
Option
Magnifying
for
010
and
device
shorting
*1
lens
Tweezers
Wrench
magnifying
standard
are
supplied
T
able
Service
(4
types)
devices
lens
size short
with
1-1.
Manual
and tweezers
bar s et
the
16193A:
Furnished
P art
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
P/N
A
ccessories
Number Quantity
16193-90040
16191-29001
16191-29002
16191-29003
16191-29004
1540-0692
16191-29005
16191-29006
16191-29007
16191-29008
16193-60002
8710-2081
8710-1181
1
1
1
1
1
1
1
1
1
1
1
1
1
*1
Option
set
2012(mm)/0805(inch),
has
has
the
010
the
same
sizes
following
size
as
are
the
same
as
industry
SMD
sizes
included
3216(mm)/1206(inch).
the
EIA/EIAJ
sizes
standard
:
1005(mm)/0402(inch),
Order
(EIA/EIAJ)
option
.
010
SMD
1608(mm)/0603(inch),
if
the
SMD
Specications
This
section lists t he complete 1 6193A specications
standards and limits against which the 16193A is tested. When
. T hese s pecications are the performance
shipped from the factory
16193A meets the following specications:
Maximum DC Bias V
Operating T
emperature
Operating Humidity
:: :: : : : : : : : : : : :: :: :: :: :
Non-operating T emperature
Non-operating Humidity
oltage
:: :: :: :
: : : : :: :: ::
:: :: :: :: ::: : : : : : : : :: :: :: :
:: : : : : : : : : : : : : :: :: :: :: : : :
(@wet bulb t emperature
:: :: :: :: :: : : : : : : : : : : :: :: :
:: :: :: :: : : : : : : : : : : : : :: :: :: :: : : : : : : : : : : : : :: :: :: :: : : : : : 0 55 to +85 C
(@wet bulb temperature < 65 C)
:: :: : : : : : : : : : : :: :: :: :: :: :
:: :: :: : : : : : : : : : : : : :: :: :
C)
<
40
:: :: ::: : : : : : : ::: :: :: :: :: :
:: :: :: ::: :: :: :: ::: : : : : : : : : : :: :: :: :: ::: : : : : : : : : : :: :: :: :: ::: :: :: :: :: ::: : : : : : : : :: :: :
W eight
Dimension
:: :: :: :: ::: :: :: :: ::: :: :: :: :: ::: : : : : : : : :: :: :: :: :: ::: : : : : : : : :: :: :: :: :: ::: : : : : : : ::: :: :: :
:: :: :: : : : : : : : : : : : : :: :: :: :: : : : : : : : : : : : : :: :: :: :: : : : : : : : : :
150(W) 2 70 (H) 2 80(D) [mm]
sizes
that
.
This
short
is
to
be
0
55
:: :: :
15 % t o 9 5 % RH
Up to 90 % R H
bar
measured
, the
:: :: ::
6
to +85
40V
500 g
C
1-2 General Information
Supplemental P
This
section
characteristics
information
lists
supplemental
are
not
for
the
operator
erformance Characteristics
performance characteristics
specications
.
Supplemental
,
but
are typical
performance c haracteristics
. S upplemental
characteristics included
performance
as additional
are n ot
guaranteed.
Frequency
Applicable
Supplied
P/N
P/N
P/N
P/N
Option
P/N
P/N
P/N
P/N
Electrical
A
dditional
Repeatability
(for
:
:
:
3
f:
frequency
Range
DUT
shorting
16191-29001
16191-29002
16191-29003
16191-29004
010
shorting device
16191-29005
16191-29006
16191-29007
16191-29008
length
Error
inductive
:
:
:
:
:
:
:
size
(when
3
3
component)
::
::
:
:
:
(GHz)
:
:
:
:
:
:
(see
device
:
:
:
:
::
:
:
:
:
::
:
:
:
:
::
::
::
::
::
::
::
::
::
::
::
::
::
:
:
::
::
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
Figure 1 -1
size
::
::
:
:
::
::
:
:
::
::
:
:
::
:
:
:
:
size
::
:
:
:
:
::
:
:
:
:
::
:
:
:
:
:
:
:
:
:
:
the
length
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
)
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
between
:
:
:
:
:
:
:
:
:
:
:
::
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
:
:
DC
to
2
GHz
:
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
0.5
mm
to
3.2
mm
:
:
:
:
:
:
:
:
:
:
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
1
2
1
2
2.4
[mm]
:
:
:
:
:
:
:
:
:
:
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
1.6
2
2.4
2
2
[mm]
:
:
:
:
:
:
:
:
:
:
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
2.4
2
2.4
2
3.2
[mm]
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
2.4
2
2.4
2
4.5
[mm]
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
1.0(L)
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
1.6(L)
:
:
:
:
:
:
::
::
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
2.0(L)
:
:
:
:
:
:
:
:
::
::
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
3.2(L)
electrodes i s
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
:
:
:
:
::
:
:
:
:
:
:
:
:
:
:
:
:
:
2
mm)
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
:
2
0.5(W)
2
0.8(W)
2
1.2(W)
2
1.6(W)
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
::
::
::
::
:
(impedance
:
:
:
:
:
:
:
:
:
:
(admittance
2
0.5(H) [mm]
2
0.8(H) [mm]
2
0.8(H) [mm]
2
0.8(H)
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
:
1.5
:
:
30
+
250
of
30
:
:
:
:
:
2
+
of
:
:
14.0 mm
2
2
m,
40
30
2
2
S,
[mm]
2
f
f
[m]
f
5
[%]
pH)
[
fF)
S]
Figure 1-1. Applicable DUT
Size
General Information 1-3
Residual Inductance
The
usual
method
In
this
method,
shorting
not
On
bar's
estimated.
the
other
measurement
inductance
a
reference
conditions
The
reference
relative
The
measurement
reproduce
as
of
dierence
the
value
to
compensate the
the
measurement
impedance
hand,
result
a
result
.
the
measurement
there i s
is
the
of
This
method,
.
The
a denition
absolute
its
size and
inductance values
to a
disk-type 0
of these
short b ars
reference inductance
T able
1-2. Supplied
of the
test xture's
result
short
bar's residual
value
shape i s
is useful
system.
presented T
t ermination
under other
values .
Shorting
Shorting Bar
residual i nductance
is the
relative value
inductance as
method to
of the
let SHORT
device's i mpedance
estimated under
for d evices
able 1 -2
with values
and T
on either
conditions than
Device
Residual
of the
a r esult
=
x
specic
which
able
1-3
the
7
mm
Inductance
is to
let SHORT
measured i mpedance
of its
size and
H.
In
this
method,
.T h e
short
bar's
conditions
were
or
shown
are
simulated
the
below
close
3.5
and
to
as
mm
cannot
(Typical)
=0 H .
to the
shape i s
the
residual
is
used
the
short
the
connector
as
.
Shorting
P/N
16191-29001
P/N
16191-29002
P/N
16191-29002
P/N
16191-29002
P/N
16191-29003
P/N
16191-29004
T
able
Shorting
P/N
16191-29005
P/N
16191-29006
P/N
16191-29007
P/N
16191-29008
Bar
1-3.
Bar
l
[mm] d [mm] h [mm]
Oset
[mm]
1 2.4 1 0.75 3.5
1.6 2.4 2 0.45 3.5
2 2.4 1.6 0.25 3.5
2.4 2 1.6 1.3 7
3.2 2.4 2.4 0.9 7
4.5 2.4 2.4 0 7
Option
010
Shorting
l
[mm] d [mm] h [mm]
Device
Oset
Residual
[mm]
1.0 0.5 0.5 0.75 3.5
1.6 0.8 0.8 0.45 3.5
2.0 1.2 0.8 1.5 7
3.2 1.6 0.8 0.9 7
Connector Inductance
(Typical)
mm
mm
mm
mm
mm
mm
Inductance
(Typical)
0.2
0.2
0.2
0.7
0.6
0.6
Connector Inductance
(Typical)
mm
mm
mm
mm
0.5
0.4
0.9
0.8
nH
nH
nH
nH
nH
nH
nH
nH
nH
nH
1-4 General Information
Figure
1-2.
Simulation
Setup
General Information 1-5
2
Preparation
for U se
Introduction
This
chapter e xplains
Initial
Connecting
inspection.
the test
Repackaging
Measurement
the t est
how t o
xture for
xture for
error correcting
Initial Inspection
The
small
side
electrode
from
the
should
also
inspection
and
missing
Y
our
Agilent
for
the
claim
factory
.
be
in
perfect
to
check
contents
T
echnologies
to
be
It
should
the
.
If
settled.
small
install t he
SMD
test
be
in
electrical
side
any
discrepancy
sales
use .
shipment.
function
xture
perfect
condition.
electrode
oce
16193A.
physical
is
will
for
each
has
been
V
erify
SMD
found,
arrange
The
topics
instrument.
carefully
condition,
this
by
test
xture
notify
for
repair
include
inspected
no
carefully
set
the
carrier
and
the
following:
before
scratches
,
performing an
for
signs o f
and
replacement
being
dents
or
physical
Agilent T
without
shipped
the
like
.I t
incoming
damage
echnologies
waiting
.
Inspect
the
completed.
V
erify
that
T
able
2-1
.
Inspect the
shipping
the
exterior of
container
shipping container
the
for
16193A
damage
. K eep
the s hipping
contains everything
for
any
signs
of
damage
shown in
.
materials
Figure 2 -1
until
the
and
inspection
listed
in
is
Preparation f or Use 2-1
.
1
T
est xture
2
Operation
3
Shorting device
4 Case for shorting device
5 Magnifying l ens
6 Tweezers
7 Wrench P/N 8710-1181
1
Operation and Service Manual is not s hown in Figure 2-1 .
2
Depending on your order c onguration.
3
The magnifying lens i s packed s eparately from the 1 6193A b ody . C onnect it as shown in
Figure 2-1 .
4
Not c ontained i f y ou ordered t he 16193A o ption 001.
2-2 Preparation for Use
Figure
Description
and Service
2
34
4
2-1.
T
able
16193A
2-1.
Product
16193A
Overview
Contents
Agilent
P
art
Number
16193A
1
2.4[mm]) P/N 16191-29001
(1
Manual
2 1 2
P/N
16193-90040
(1.6 2 2.4 2 2[mm]) P/N 16191-29002
(2.4 2 2.4 2 3.2[mm]) P/N 16191-29003
(2.4 2 2.4 2 4.5[mm]) P/N 16191-29004
P/N 1540-0692
P/N 16193-60002
P/N 8710-2081
Quantity
1
1
1
1
1
1
1
1
1
1
A djust
The
conguration
the Conguration
16193A's
electrodes
to
match
length
the
SMD
are 0 .2
as
follows:
to SMD
mm ,
0.5 m m
Size
,1
mm ,
and 2
mm ,
change
the
electrodes
Figure 2-2. Electrodes conguration and DUT Size
Preparation f or Use 2-3
Connecting the
Note
Some
\Applicable
1.
Calibrate
T
able
standards
2.
Place
3.
Tighten
your
analyzer
2-2
for
the
applicable
from
the
the
xture
on
(turn counterclockwise)
T est
Fixture for
instruments
Instruments"
at
the
error correcting
R
APC-7
the
connector
APC-7
require
R
APC-7
.
R
connector
the coupling
Use
an
adapter
in
Chapter
connector
function. After
.
nut of
to be
connected to
1).
plane
before
the APC-7
the 1 6193A
connecting
test
xture
calibration, disconnect
R
connector
.
(see
.S e e
any
Figure 2-3. Connecting the T
2-4 Preparation for Use
est Fixture with APC-7
R
Connector (4291B)
Repackaging the
If
shipment
repackaged
If
this
side
electrode
Use
sucient
cushion
to
using
material
and
to
an
Agilent T
the
is
not
SMD
shock
prevent
original
available
test
absorbing
T est
Fixture F
echnologies service
factory
packaging
, c omparable
xture
in
heavy
material on
movement.
Seal
or Shipment
center is
materials .
packaging materials
paper
the s hipping
and pack
all sides
of the
container s ecurely
required, each
may b e
in anti-static
16193A to
test xture
used. Wrap
plastic packing
provide
a
thick,
and mark
should be
the s mall
material.
rm
it
FRA
GILE
.
Preparation f or Use 2-5
Measurement Error
Each
LCR
meter
functions
of
Open/Short/Load
T
able
or
analyzer has
the
instrument
compensation.
2-2.
Measurement
Correcting Function
measurement e rror
that
can
be used
Error Correcting
for calibration,
correcting functions
Functions for
for Each
setting the
Each Instrument
Instrument
.T
able 2-2
shows the
electrical length,
and
Instrument Calibration Electrical
4291B Calibration
OPEN
Selecting
P
ort E xtension
SHORT
LO
AD
LOW-LOSS
Capacitor
4191A Calibration
0
S
0
50
4194A
with
No
capability
1
Electrical Length No capability No capability No capability
No
16085B
4195A
with
41951A
4194A
with
41941A/B
16099A
4194A
with
16085B
1
A
ccording
,
to
Calibration
demand
SHORT
LO
AD
Calibration
0
S
0
50
Calibration
0
S
0
50
for
precise
OPEN
measurement
P
ort
(P ort
No
No
length
T
est
Fixture
capability
Extension
1
or
P
ort
capability
capability
OPEN
Compensation
OPEN
Compensation
OPEN
Correction
0
S
OFFSET
SHORT
Compensation
SHORT
Compensation
SHORT
Correction LO AD
0
OFFSET
LO
AD
Compensation
LO
AD
Compensation
Correction
No
capability
1
1
2)
Compensation
ZERO
OPEN
Compensation
ZERO
OPEN
Compensation
ZERO
SHORT
Compensation
ZERO
SHORT
No
capability
No
capability
2-6 Preparation for Use
Operation
Introduction
This
chapter d escribes
techniques
for t he
how t o
test xture
use the
.
test
xture
and
the
measurement
error
3
correcting
Operating
Before
xture
measuring
performing a
by using
the
The
16193A
measurement.
measurement
Flow
the
measurement
DUT:
has
inherent
T o
compensate f or
instrument's
measurement, you
error
stray
capacitance
these
residuals
OPEN
and
SHORT
Described
The
16193A's
T
o
set
the
T
os e t
the xture
7
\How
to
have
correcting
,
residual
and
compensation
(
7
indicates
in
Chapter
electrical
electrical
set
the
to
compensate
functions
inductance
thus
minimize
capabilities
procedures
2.
length
length,
and
devices
SHORT
for
.
P
,
and
residual
their
eect
must
is
14.0
see
your
for
xture
condition,
the
residual
erform
resistance
on
be used.
in
the
mm
analyzer's
and
error
the
following
that
measurement
following
(typical
aect
accuracy
pages
value).
Operation
compensation,
the
OPEN
condition
of
steps
the
the
test
,
.)
Manual.
see:
"
when
the
These p rocedures show how to set t he test xture for t he
OPEN/SHORT/LO AD compensation
F or how to
supplied with your analyzer
T o c onnect the D UT
7
\How to connect the D UT"
3
The compensating f unctions are d ierent for e ach i nstrument. See T able 2-2 and p erform t he listed functions .
measure OPEN/SHORT/LO
.
, s ee:
procedure .
AD , see the Operation Manual
(Y ou can o mit L O
AD compensation.)
Operation 3-1
Overview
Arm
lifter
P
ositioner
Locking
knob
(Pressure) arm
(Device) h older
(Device) h older
(Size
selection)
Electrodes
Arm latch
knob
frame
Figure
Tilts
Slides
Fixes
Fixes the
Fixes
Holds the
Fixes
These
Latches the
up
3-1.
the
pressure
to
set
the
positioner
DUT
the holder
the
electrode
are
by
pushing the
16193A
arm
the
pressure
.
.
DUT .
connected
pressure
T
.
.
arm
est
up
to
arm
Fixture
.
arm
the
tilted
lifter
atop t he
device
up
.
T
o
Overview
DUT
.
.
(Push
set
the
the
latch
.
arm
latch,
to
o,
push
lifter .)
Pressure adjustment
Shorting device
A djusts the pressure l oad on the device
(
Not shown in Figure 3-1
) U sed for
short compensation.
.
F our types o f s horting devices are supplied w ith t he 16193A. Use o ne that has dimensions s imilar to the DUT
When making
conductivity metal (that is not e asily corroded) must be used to construct the shorting device
a s horting device of same dimensions as your DUT
, v ery low r esidual impedance and a high
. ( It must also be
clean.)
Magnifying lens
(
Not s hown in Figure 3-1
) U sed t o s et a small device within the
electrodes .
tilt
the
the arm
arm
.
W arning
3-2 Operation
DO NOT l ook a t the sun through the m agnifying glass .
DO NOT operate o r l eave the m agnifying glass under direct sunlight.
How to
set the
SHORT condition,
and the
OPEN condition
Setting
The n ames
the
SHORT
of
each
part
are
condition
listed
above
.
1.
1
button.
arm
latch
Push
the
3
Release
button
arm
so
lifter
the
that
.
arm
the
2
Push the
lifter
pressure
arm latch
while pushing
arm
is
held.
the
2.
1
Loosen
the
locking
knob
.
2
Rotate
the
positioner until the nose of the pressure a rm is
located outside the stage
.
3.
P
osition
the
size of the D UT
as an example
size
selection
frame
depending
on the
. (This procedure shows t he case for
.)
Operation 3-3
D
4.
Place
the
6.
1
Reposition
pressure
arm is
Tighten the
shorting
the
just
device
positioner
above
locking knob
on
the
electrode .
so
that
the
nose
the
shorting
device
.
.
of
2
the
5.
1
Loosen
that the
Tighten
7.
released.
1
short bar
the
Push
the shorting
the k nob
knob
the
2
Let
device .
.
contacts both
to
x
arm
lifter
down
the
2
the
so
P
osition
electrodes .
DUT
holder
that
pressure
the
the
arm
arm
DUT
.
to
holder
latch
press
so
3
is
down
3-4 Operation
Setting
1.
1
button.
arm
the
OPEN
Push
the
3
Release
latch b utton
arm
condition
lifter
the
arm
so that
.
the
2
Push
lifter
pressure
the
while
arm
pushing
arm
latch
is
held.
the
2.
Remove
the
shorting
device
.
How
to
connect
1. 1
Loosen the locking knob
the
DUT
. 2
Rotate the
positioner until the nose of the pressure a rm is
located outside the frame
.
2. Place the D UT on the e lectrode
.
Operation 3-5
3.
1
Loosen
that the
knob
.
3.
1
Push
released.
the DUT
the
knob
DUT c ontacts
the
arm
2
Let
down
.
.
2
P osition
both electrodes
lifter
so
that
the
pressure
the D UT
the
arm
arm
.
3
latch
to
holder so
Tighten
is
press
the
down
1
Reposition
pressure arm
locking
knob
the
is just
.
positioner
above the
so
that
DUT .
the nose
2
Tighten
of the
the
3-6 Operation
Service
Introduction
This
chapter
covers
the f ollowing
4
subjects:
General
Assembly
Information
Replacement
Disassembly
Replaceable
Procedure for
P arts
Troubleshooting
W
arning
Caution
These
NOT
section)
When
inner
(Agilent
servicing
perform
unless
you
repair
parts
of
part
General Information
T
able
4-1
shows
all
items
included
the Main
instructions
any
servicing
you
the
the
16193A.
number
with
Assembly
(other
are
qualied
16193A,
Agilent T
9300-0163).
the
16193A
are f or
to
put
on
use b y
than
that
do
so
.
lint-free
echnologies
Small
Side
qualied personnel
contained
groves
supplies
Electrode
to
in
the
avoid
contaminating
lint-free
SMD
T
est
only
.
Do
operating
groves
Fixture
.
Service 4-1
T
able 4-1.
16193A Product
Overview
Reference
Designator
1 (not
2 16193-60002 1 Magnifying
3 8710-1181 1 Wrench
4 8710-2081 1 Tweezers
5 16191-29001 1 Shorting
6 16191-29002 1 Shorting
7 16191-29003 1 Shorting
8 16191-29004 1 Shorting D evice ( 2.4
9 1540-0692 1 Case for shorting devices
- 16191-29021 1 Styrofoam H older
- 16193-90040 1 Operation and Service M anual
1 Not sho
Agilent
wn in the gure.
P
art
Number Qty
assigned)
1 Main
.
Description
Assembly
Glass
Device
Device
Device
(1
2
(1.6
(2.4
1
2
2.4
mm)
2
2.4
2
2
mm)
2
2.4
2
3.2 m m)
2
2.4
2
4.5 m m)
1
1
4-2 Service
Assembly Replacement
This
Main
section
Assembly
includes
.
Disassembly
and Assembly
Procedures and
Replacement P
arts for
the
Disassembly
This
section contains
Pressure
1.
Rotate
2.
Remove
Stage
Pressure
1.
Remove
2.
Remove
3.
Remove
Arm
the
Locking
the
Assembly
Arm
two
bottom
other
Replaceable
T
able
4-2
through
parts
listed
can
must
include
the
and Assembly
the
information
Assembly
Pressure
Removal:
Knob
counter-clockwise
Arm
Assembly
.
Assembly
screws
cover
screws
P
arts
T
able
be
ordered
Agilent
Disassemble:
(marked
(marked
and
other
4-4
show
from
part
number
Procedure
required
(including
with
\8"
with
\1"
parts
.
and
list
your
nearest
and
to
and
\12"
in
Figure
the
replaceable
Agilent
the
quantity
disassemble
and
remove
Spring,
in
Figure
4-1
T
and
it
(see
Bushing,
4-1
).
).
parts
for
echnologies
required.
assemble
T
able
4-2
and
W
the
Main
Oce
.
the
Main
).
asher)
Assembly .
Ordering
Assembly
from
the
information
The
T
.
est
Service 4-3
T
able 4-2.
Replaceable P
arts for
Main
Assembly
Reference
Designator
1 16193-23004 1 Locking Knob
2 1460-2368 1 Spring
3 16193-25003 1 Bushing
4 (not assigned) 1 Pressure A rm Assembly
5 16193-87101 1 Label
6 16193-25004 1 W asher
7 (not assigned) 1 T est S tage Assembly
4-4 Service
Agilent P
Number Qty . Description
art
Figure 4-1. Replaceable P arts for P ressure Arm A ssembly
Service 4-5
T
able 4-3.
Replaceable P
arts for
Pressure
Arm
Assembly
Reference
Designator
Agilent P
art
Number Qty . Description
1 16193-04002 1 Bottom
2 1460-2367 1 Spring
3 16193-23005 1 Shaft
4 2950-0054 1 Nut
5 2190-0054 1 W
asher
6, 16 0515-0914 2 Screw Flat
7 16193-25006 1 Arm
8,
12
9 16193-04001 1 T
0515-0914 2 Screw
op
10 16193-24008 1 Screw
11 0515-1052 1 Screw
13 16193-25007 1 Screw
14 3050-1139 1 Flat
15 1460-2316 1 Spring
17 16193-25008 1 Spacer
18 16193-01201 1 Angle
19 16193-25005 2 Bushing
20 0515-0976 1 Screw
21 3050-1066 1 Flat
22 16193-24007 2 Nut
23 3030-0285 1 Set
24 16193-23001 1 Rod
25 16193-23002 1 Holder
Cover
Latch
Flat
Cover
Socket
W
asher
P
an
W
asher
Screw
Head M3L6
Head
M3L6
Head
,
T
eon
Head
M2L6
M2
6-32
M3L12
4-6 Service
Figure 4-2. Replaceable P
arts for
T est Stage A ssembly
Service 4-7
T
able 4-4.
Replaceable P
arts for
T
est
Stage
Assembly
Reference
Designator
Agilent P
art
Number Qty . Description
1 16193-24011 1 Device
2 16193-25009 1 Device Holder
3 0515-1050 2 Screw
4 16193-24004 1 Size
5 16193-00613 1 Plate
6 16193-23003 1 Flange
7 0515-0914 6 Screw
8 16193-00201 1 T able
9 16193-00604 1 Ground
10 16193-60011 1 Contact
11 0515-0952 3 Screw
12 0515-0976 2 Screw
13 16193-24005 2 Spacer
14 1250-0907 1 Contact-RF
If
Caution
your 16193A
to
replace
10),
it
will
and
10)
since
(
Figure
and
4-2
10).
either
be
necessary
they
:
9
and
test
the
xture
plate
were
10)
was
(
Figure
to
buy
modied
can
be
tted
Holder
Socket Head
Selection
Flat Head
Plate
Assembly
Flat Head
P
an
manufactured
4-3
:
9)
or
replacements
at
the
same
to
the
other
Knob
Frame
M3L6
M2L4
Head
M2L6
Connector
earlier
the
contact
for
both
time
.
obsolete
M3L8
than
assembly
parts
Neither
parts
1996
(
Figure
of
and
you
(Figure
4-2
the
new p arts
(
Figure 4-3
need
:9
4-3 :
:
9
4-8 Service
Figure 4-3. Obsolete parts manufactured earlier than 1996
Troubleshooting
This
Side
section
Electrode
includes
SMD
T
the
est
functional check
Fixture
.
procedure used
to troubleshoot
the 16193A
Small
Open Impedance
1.
Set
the
Size
Selection
2.
A
djust
the
Device
16191-29001).
(Refer
to
Figure
Check
Holder
4-4
.)
Frame
for
to
the
position
connecting
the
for
small size
1
2
1
2
2.4
mm Shorting
DUT .
Device
(PN
Figure 4-4. Shorting Device P
R
3. Place the xture on the calibrated APC-7
terminal of the 4291B R F I mpedance/Material
Analyzer .
4. Set the 4291B R F I mpedance/Material Analyzer as follows:
Measurement P
Start Frequency
arameter Cp (parallel capacitance)
100 M Hz
Stop Frequency 1G H z
OSC Level 0.12 V
Number o f P oint 2
P oint A veraging F actor 16
P oint A veraging ON
5. P erform a s ingle s weep m easurement.
osition
Service 4-9
6. Read
Cp value
at 100
MHz and
1 G Hz.
The guideline
Short
1.
Impedance
After
the
16191-29001)
2. Set
the 4 291B
Measurement
Start
Frequency
Stop
Frequency
OSC
Level
Number
P
P
3.
P
4.
Read
oint
oint
erform
of
A
veraging
A
veraging
Ls
value
for the
open i mpedance
T able
P
arameter
Cp 100
Cp 1 GHz 750 f F
Check
Open
Impedance Check
between
the
RF Impedance/Material
P
arameter Ls
P
oint
F
actor
a
single
sweep
at
100
MHz
measurement.
value
is
as
follows:
4-5. O pen
Impedance V
Frequency Guideline
MHz
center
is completed,
electrode and
put the
the g round
Analyzer as
(series inductance)
100
MHz
1
GHz
0.12
V
2
16
ON
and
1G H z .
alue
750
1
follows:
Guideline
(absolute value)
fF
6
400
fF
6
400
fF
2
1
2
2.4
mm
electrode (refer
Shorting
to Figure
Device
(PN
4-4
).
The
guideline
Short
1. After
on the
2. P
erform a single sweep measurement with t he same measurement conditions
for
the
P arameter Frequency Guideline (absolute
Ls 100
Ls 1
Impedance
the S hort
Impedance Check
same p lace
short
impedance
T
able
4-6.
Repeatability
again ( refer
to Figure
value
Short
MHz
GHz
Check
is
completed,
is
as
follows:
Impedance
remove
4-4 ) .
V
alue
Guideline
2
nH
6
2
nH
6
the
Shorting
1
1
nH
nH
value)
Device
and
.
put
it
3. Read Ls value at 100 M Hz and 1 G Hz and check the value is within the S hort Impedance
V alue Guideline described i n T
able 4-6 .
4. Calculate the d ierence b etween the rst Ls measurement value and second L s
measurement v alue at each frequency
The guideline for the s hort impedance repeatability i s a s
.
follows:
T able 4-7. Short Impedance R epeatability G uideline
P arameter Frequency Guideline (dierence)
Ls 100 M Hz
Ls 1 GHz
6
6
45 pH
20 pH
back
4-10 Service
REGIONAL SALES AND SUPPORT OFFICES
For more information about Agilent Technologies test and measurement products, applications, services, and
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16193-90040
Copyright Agilent Technologies, Inc.
©
1993, 1996, 1999, 2000, 2001
Printed in Japan 8/2001
Reorder No. 16193-90040