Teledyne 200, 202 User Manual

TELEDYNE HASTINGS
INSTRUMENTS
INSTRUCTION MANUAL
200/202 SERIES
FLOWMETERS/CONTROLLERS
CERTIFIED
Manual Print History
The print history shown below lists the printing dates of all revisions and addenda created for this manual. The revision level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new revision is created, all addenda associated with the previous revision of the manual are incorporated into the new revision of the manual. Each new revision includes a revised copy of this print history page.
Revision A (Document Number 140-0999) ....................................................................September 1999
Revision B (Document Number 140-1199)...................................................................... November 1999
Revision C (Document Number 140-102002) ..................................................................... October 2002
Revision D (Document Number 140-082005) .......................................................................August 2005
Revision E (Document Number 140-112007).................................................................. November 2007
Revision F (Document Number 140-062008)............................................................................ June 2008
Revision G (Document Number 140-082008) .......................................................................August 2008
Revision H (Document Number 140-022009) ....................................................................February 2009
Revision J (Document Number 140-102009) ....................................................................... October 2009
Revision K (Document Number 140-102009A)................................................................... October 2009
Revision L (Document Number 140-082010)........................................................................August 2010
Revision M (Document Number 140-072011)............................................................................ July 2011
Visit www.teledyne-hi.com for WEEE disposal guidance.
CAUTION:
CAUTION:
CAUTION:
Hastings Instruments reserves the right to change or modify the design of its equipment without
any obligation to provide notification of change or intent to change.
The ins truments described in this manual are available with multiple pin-outs .
Ensure that all electrical connections are correct.
The instruments described in this manual are designed for INDOOR use only.
The instruments described in this manual are designed for Class 2 installations
in accordance with IPC standards
140-072011 200/202 Series Page 2 of 24
Table of Contents
GENERAL INFORMATION....................................................................................................................................4
1.
1.1. FEATURES............................................................................................................................................................4
1.2. SPECIFICATIONS HFM-200*.................................................................................................................................5
1.3. SPECIFICATIONS HFC-202*..................................................................................................................................5
1.4. OPTIONAL 4-20 MA CURRENT OUTPUT ...............................................................................................................6
1.5. OTHER ACCESSORIES...........................................................................................................................................6
1.5.1. Hastings Power supplies.................................................................................................................................6
1.5.2. Interconnecting Cables...................................................................................................................................7
2. INSTALLATION AND OPERATION.....................................................................................................................8
2.1. RECEIVING INSPECTION .......................................................................................................................................8
2.2. POWER REQUIREMENTS .......................................................................................................................................8
2.3. OUTPUT SIGNAL...................................................................................................................................................8
2.4. MECHANICAL CONNECTIONS...............................................................................................................................9
2.4.1. Standard Configuration ..................................................................................................................................9
2.4.2. LFE Configuration .........................................................................................................................................9
2.5. ELECTRICAL CONNECTIONS...............................................................................................................................10
2.6. OPERATION........................................................................................................................................................11
2.6.1. Operating Conditions ...................................................................................................................................11
2.6.2. Zero Check...................................................................................................................................................12
2.6.3. High Pressure Operation ..............................................................................................................................12
2.6.4. Blending of Gases ........................................................................................................................................12
2.7. OPERATION WITH EXTERNAL DEVICES ..............................................................................................................12
2.7.1. Operation with a Hastings power supply......................................................................................................12
2.7.2. Operation with a Power Supply other than a Hastings.................................................................................13
2.7.3. Operation with an external sensor (Fig. 2.2)...............................................................................................14
2.7.4. Response to Command Changes..................................................................................................................14
2.8. RANGE CHANGING.............................................................................................................................................15
2.9. VALVE-OVERRIDE CONTROL.............................................................................................................................15
3. THEORY OF OPERATION................................................................................................................................... 16
3.1. OVERALL FUNCTIONAL DESCRIPTION................................................................................................................16
3.2. SENSOR..............................................................................................................................................................16
3.3. ELECTRONICS ....................................................................................................................................................17
3.4. SHUNT ...............................................................................................................................................................17
3.5. VALVE ...............................................................................................................................................................18
4. MAINTENANCE......................................................................................................................................................19
4.1. AUTHORIZED MAINTENANCE.............................................................................................................................19
4.2. TROUBLESHOOTING ...........................................................................................................................................19
4.3. ADJUSTMENTS..............................................................................................................................................20
4.3.1. Calibration Procedure: (Figure 4.1)..............................................................................................................20
4.3.2. Miscellaneous adjustments...........................................................................................................................21
4.4. END CAP REMOVAL...........................................................................................................................................21
4.5. PRINTED CIRCUIT BOARD REPLACEMENT..........................................................................................................21
4.6. SENSOR REPLACEMENT .....................................................................................................................................21
4.7. ORIFICE CHANGES .............................................................................................................................................21
4.7.1. HFC-202 Orifice ..........................................................................................................................................22
5. WARRANTY AND REPAIR..................................................................................................................................24
5.1. WARRANTY REPAIR POLICY ..............................................................................................................................24
5.2. NON-WARRANTY REPAIR POLICY .....................................................................................................................24
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1. General Information
The Hastings HFM-200 mass flow meter and HFC-202 flow controller are designed to accurately measure and control mass flow over the range of 10 sccm to 30 slm, without corrections or compensations for gas pressure and temperature with an accuracy of better than ±1% FS. Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi/3.45MPa) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen) then a correction factor is used to adjust the output for the intended gas.
1.1. Features
LINEAR BY DESIGN. The HFM-200/HFC-202 series is inherently linear (no linearization
circuitry is employed). Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. There will be no appreciable linearity change of the instrument when the flowing gas is changed.
MODULAR SENSOR. The HFM-200/HFC-202 series incorporates a removable/replaceable
sensor module. Field repairs to units can be achieved with a minimum of production line downtime.
METER SETTLING TIME. Changes in flow rate for the HFM-200 are detected in less than 2
seconds when using the fast-response circuitry.
LOW TEMPERATURE DRIFT. The temperature coefficient of span for the HFM-200/HFC-
202 series is typically less than 0.05% of full scale/°C from 15-45°C. The temperature coefficient of zero is typically less than 0.1 % of reading/°C from 0-50°C.
CURRENT LOOP. The 4-20 mA option gives the user the advantages of a current loop output to
minimize environmental noise pickup.
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1.2. Specifications HFM-200
*
Accuracy1 and Linearity ........................................................................................................................ ±1% F.S.
Repeatability .....................................................................................................................................±0.05% F.S.
Standard Pressure Rating ....................................................................................................................... 500 psig
Pressure Coefficient.............................................................................. -0.0067%/psi (0 - 1000 psig N2) typical
High-Pressure Option ................................................................................................... Proof tested to 1500 psig
-9
Leak Integrity ..................................................................................................................................< 1x10
sccs
Temperature Coefficient .................................................................................. Zero ±0.035% FS/°C (0 - 60°C)
........................................................................................................................ Span ±0.05% RDG/°C (0 - 60°C)
STP ......................................................................................................................................... 0°C and 760 Torr
Power (±15 Volt flow meter) .................................................................. ±(14-16) VDC @ ±30 mA (< 1 Watt)
Power (24 Volt flow meter).......................................................................................(14 - 32) VDC < 1.9 Watts
Flow Signal ................................................................................. (inherently linear) 0 - 5.00 VDC or 4 - 20 mA
2
Wetted Material
.........................................................................................316 SS, Viton®, 82/18 Au/Ni Braze,
................................................................................................................................................ Trace Silver Solder
Connector ....................................................................................... 15-pin subminiature D / (9-pin for 24 Volt)
®
Fittings .............................................................................................................. ¼ in. Swagelok
, others available
Weight (approx.) ......................................................................................................................... 1.8 lb (0.82 kg)
1.3. Specifications HFC-202
*
Accuracy1 and Linearity .........................................................................................................................±1% F.S.
Repeatability......................................................................................................................................±0.05% F.S.
Std. Pressure Rating ................................................................................................................................ 500 psig
High Pressure Option ................................................................................................... Proof tested to 1500 psig
Pressure Coefficient .............................................................................. -0.0067%/psi (0 - 1000 psig N2) typical
Control Valve DP* ................................................................................................................ per customer order
-9
Leak Integrity ..................................................................................................................................< 1x10
sccs
Temperature Coefficient 3 ............................................................................... Zero ±0.035% FS/°C (0 - 60°C)
........................................................................................................................ Span ±0.05% RDG/°C (0 - 60°C)
STP ......................................................................................................................................... 0°C and 760 Torr
Power (±15 Volt controller) ................................................. ±(14 - 16) VDC @ +60 mA/-185 mA (< 3 Watts)
Power (24 Volt controller)........................................................................................ (14 - 32) VDC < 4.2 Watts
Flow Signal ................................................................................. (inherently linear) 0 - 5.00 VDC or 4 - 20 mA
Command Signal ...................................................................................................... 0 - 5.00 VDC or 4 - 20 mA
2
Wetted Material
..................................................................................................316 SS, 302 SS, Nickel, Viton,
.................................................................................................82/18 Au/Ni Braze, Trace Silver Solder, Kalrez®
Connector ....................................................................................... 15-pin subminiature D / (9-pin for 24 Volt)
Fittings ................................................................................................................¼ in. Swagelok, others available
Weight (approx.) ......................................................................................................................... 1.8 lb (0.82 kg)
1 Stated accuracy is for nitrogen or other gas specific calibration and using this gas only.
2 Other materials are available. Viton is the standard O-ring option.
* Specifications may vary for instruments with ranges greater than 10 slpm.
140-072011 200/202 Series Page 5 of 24
1.4. Optional 4-20 mA Current Output
An option to the standard 0 - 5 VDC output is the 4 - 20 mA current output that is proportional to flow. The 4 - 20 mA signal is produced from the 0 - 5 VDC output of the flow meter. The current loop output is useful for remote applications where pickup noise could substantially affect the stability of the voltage output or long cable runs where cable resistance would cause a voltage signal to decay.
The current loop signal replaces the voltage output on pin 6 of the DA-15 connector (pin 2 of DE-9 24 Volt). The current loop is sourced internally from the +15 VDC supply and must be returned to the signal supply common after (pin 5 [±15 VDC] or pin 8 [24 VDC]) passing through the monitoring circuitry to complete the loop. The load must be between 0 and 600 Ohm.
The 4-20 mA I/O option can accept a current input for flow controllers. The 0-5 VDC command signal on pin 14 / (pin 3 for 24 Volts) can be replaced by a 4 - 20mA command signal. The loop presents an impedance of 50 Ohms and is returned to the signal common. On the 24 Volt units, the signal common will need to be tied to the power supply common external to the flow controller to complete the loop since the signal common is galvanically isolated internally from the supply common. This line must be current limited (< 50 mA) to prevent short circuit currents from damaging the receiving circuit in the flow controller.
24 Volt Supply
±15 Volt Supply
1.5. Other Accessories
1.5.1. Hastings Power supplies
Hastings Power Pod power supply/display units are available in one and four channel versions. They convert 100, 115 or 230 VAC to the ±15 VDC required to operate the flow meter and provide a digital indication of the flow rate. Interface terminals for the retransmission of the flow meter analog output signal are located on the rear of the panel.
The Power Pod 100 and 400 models are built with controllers in mind but will work with meters as well. The Model 40 is for flow meters only. Throughout this manual, when reference is made to a power supply, it is assumed the customer is using a Hastings power supply. Hastings PowerPod-100 and PowerPod-400 power supplies are CE marked, but the Model 40 does not meet CE standards at this time. The Model 40 and PowerPod-100 are not compatible with 4 – 20 mA analog signals. With the PowerPod 400, individual channels’ input signals, as well as their commands, become 4 – 20 mA compatible when selected. The PowerPod-400 also sports a Totalizer feature. More information about the Power Pods can be found on the Hastings web site. http://www.teledyne-hi.com/products/powerpod­series.htm
140-072011 200/202 Series Page 6 of 24
1.5.2. Interconnecting Cables
Cables are available from Hastings, in various lengths, to connect from the 15 pin "D" connector on the back of the Power Pod directly to any of the 200 series and 300 series flow instruments (including digital versions). More information about the available cables can be found in the Power Pod 400 bulletin on the Hastings web site. http://www.teledyne-hi.com/pdfs/bulletins.htm
140-072011 200/202 Series Page 7 of 24
2. Installation and Operation
This section contains the steps necessary to install a new flow meter/controller into operation as quickly and easily as possible. Please read the following thoroughly before attempting to install the instrument.
2.1. Receiving Inspection
Carefully unpack the Hastings HFM-200/HFC-202 series instrument and any accessories that have also been ordered. Inspect for any obvious signs of damage to the shipment. Immediately advise the carrier who delivered the shipment if any damage is suspected. Check each component shipped with the packing list. Insure that all parts are present (i.e., Flowmeter, power supply, cables, etc.). Optional equipment or accessories will be listed separately on the packing list. There may also be one or more OPT-options on the packing list. These normally refer to special ranges or special gas calibrations. They may also refer to special helium leak tests, or high pressure tests. In most cases, these are not separate parts, but special options or modifications built into the flow meter.
2.2. Power Requirements
The HFM-200/HFC-202 series (bipolar 15 Volt version) require ±15 VDC @ ±30 mA / 1 Watt (HFM-200) +60 mA, -185 mA / 3 Watts (HFC-202) for proper operation. The supply voltage should be sufficiently regulated to no more than 50 mV ripple. The supply voltage can vary from 14.0 to 16.0 VDC. Surge suppressors are recommended to prevent power spikes reaching the instrument. The Hastings power supplies described in Section 1.4.1 satisfy these power requirements.
The HFM-200/HFC-202 series (24 Volt version) require 14 - 32 VDC @ 1.9 Watts (HFM-200) and
4.2 Watts (HFC-202) for proper operation. The supply voltage should be reasonably regulated as power supply ripple may propagate to the output. The supply common is galvanically isolated from the signal common such that this instrument can be powered from a bipolar 15 Volt supply using only the positive and negative output terminal (30 Volts). Surge suppressors are recommended to prevent power spikes reaching the instrument.
Warning:
Attempting to operate the 24 volt version for any significant length of time at a voltage less than the specified minimimum voltage will cause the internal DC-DC convertors to fail.
The HFM-200/HFC-202 series instruments have an integral 5 VDC reference source. This stable voltage is on pin 15 of the DA-15 connector (pin 1 of the DE-9 for 24 Volt) and may be used for the command voltage.
2.3. Output Signal
The standard output of the flow meter is a 0-5 VDC signal proportional to the flow rate. In the Hastings power supplies, the output is routed to the display and is also available at the terminals on the rear panel. If a Hastings supply is not used, the output is available on pin 6 of the DA-15 connector (pin 2 of the DE-9 for 24 Volt) and is referenced to pin 5 (pin 8 for 24 Volt). It is recommended that the load resistance be no less that 2kΩ. If the optional 4-20 mA output is used, the load impedance must be selected in accordance with Section 1.3.
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