Olympus MX61A User Manual
ASSEMBLY/SETUP
MANUAL
MX61A
MOTORIZED 300 mm COMPATIBLE
SEMICONDUCTOR/FPD INSPECTION
MICROSCOPE
This manual is for assembly and setup of the Olympus MX61A Semiconductor/FPD Inspection
Microscopes. To ensure the safety, obtain optimum performance and familiarize yourself fully with the
use of this microscope, we recommend that you study this manual thoroughly before operating the
microscope. As this manual will be needed when you replace the lamp or fuses or modify a setup,
retain it in an easily accessible place near the work desk for future reference.
A X 7 6 7 7
CONTENTS
MX61A
IMPORTANT – Be sure to read this section for safe use of the equipment. –
1 NOMENCLATURE
2 ASSEMBLY
2-1 Assembly Diagram ........................................................................................................................................................................... 12
2-2 Detailed Assembly Procedures ........................................................................................................................... 13-24
2-3 Modules Installed by Olympus...................................................................................................................................... 25
3 SETUP OF MX-OPU61A OPERATION UNIT
1 Initialization 2 USER Screen Setup
3 CONFIG 1/6 Screen Setup 4 CONFIG 2/6 Screen Setup
5 CONFIG 3/6 Screen Setup 6 CONFIG 4/6 Screen Setup
7 CONFIG 5/6 Screen Setup 8 CONFIG 6/6 Screen Setup
1-8
9-11
12-25
26-36
4
CENTRATION OF REFLECTED LIGHT APERTURE IRIS DIAPHRAGM
5 CENTRATION OF MERCURY/XENON BURNER
6 EXTERNAL CONTROL OF REVOLVING NOSEPIECE
1 Connector Used 2 Pin Layout and Signal Names
3 Revolving Nosepiece Position Numbers (Index Nos. on the Center of Revolving Nosepiece)
7 MAINTENANCE PARTS LIST
PROPER SELECTION OF THE POWER SUPPLY CORD ............................................................ 42,43
37
38,39
40
41
IMPORTANT
This microscope employs a UIS2 (UIS) (Universal Infinity System) optical design, and should be used
only with eyepieces, objectives, observation tubes, etc. specified for use with the UIS2 (UIS) optics.
Less-than-optimal performance may result if inappropriate accessories are used.
The MX61A microscope is compatible with stage strokes of 200 mm (8 inches) and 300 mm (12
inches). Its control can be motorized by using the MX-OPU61A Operation Unit (with built-in computer)
and a PC in which the MX2-BSW Control Software is installed. The motorized control is also available
using the MX-HS61A Hand Switch with the jog dial control capability (the MX-OPU61A or the MX2-BSW
software should also be used in combination with the MX-HS61A Hand Switch).
SAFETY PRECAUTIONS
1. Always use the power cord provided by Olympus. If no power cord is provided, please select the power cord by referring
to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this instruction manual. If the proper
power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment. Lay out the
power cord at a sufficient distance from the sources of heat such as the power supply unit/light source and lamp housing
to avoid contact with these heat sources.
2. To avoid potential shock hazard, always set the main switch of the BX-UCB control box to “
power cord before replacing the bulb/burner or connecting/disconnecting motorized parts. And since the system contains
motorized parts, do not plug in the power cord until all of the assembly procedures have completed.
}Always use the lamp bulb or burner supplied by Olympus.
” (OFF) and disconnect the
Bulb/Burner Model Average Life
Halogen bulb · 12V100WHAL-L (Long life type)
(PHILIPS 7724)
· 12V100WHAL (High-resolution type)
(PHILIPS 7023)
Mercury burner · USH-103OL
(USHIO)
· HBO103W/2
(OSRAM)
Xenon burner · UXL-75XB-A
(USHIO)
Halogen bulb for light guide
light source
3. Do not light the mercury or xenon burner while it is not mounted on the microscope because the UV rays in their light are
harmful to your eyes.
The used mercury burner should be disposed of as an industrial waste.
4. The eye point of this microscope can be adjusted in the range between 408 and 560 mm above the desktop surface (with
basic combination). According to the SEMI standard guidelines (SEMI S8-0705), prepare a microscope desk with an
optimum height for the application of the customer.
· JCR12V-100WB
(USHIO)
2000 hrs.
50 hrs.
300 hrs.
300 hrs.
200 hrs.
1000 hrs.
1
MX61A
5. The desktop surface on which the microscope system is installed should be almost horizontal with a tilting angle of less
than 20’ with a 300 mm (12-inch) stage or less than 1° with a 200 mm (8-inch) stage (to prevent spontaneous displacement of the stage) and rigid.
(Weight of the microscope system with the basic combination for reflected light observation: 14x12-inch stage combination
— approx. 52 kg, 8x8-inch stage combination — approx. 45 kg)
}Although this microscope is designed with excellent vibration resistance, its maximum performance can be achieved
when an anti-vibration bench is used.)
6. The lamp housing surface at the rear of the microscope frame will become very hot during operation. When installing the
microscope, ensure that there are ample free spaces (of more than 100 mm) around and in particular above and below
the lamp housing. Also, the power cord and other cables should be laid out at distances from the microscope because
contact with them may result in their fusion and an electric shock due to it.
7. To avoid a potential shock hazard, make sure that the power cord is safety grounded/earthed.
8. To allow each microscope manifest its full performance, reserve an installation space having the minimum dimensions
described below before assembly and installation of the microscope. (Sizes in )
}The dimensions of the area enclosed in alternate long and two short dashes lines indicate the stage movement range.
The dimensions marked * are variable depending on the lamp housing used.
}When maintenance is required, a larger workspace can be prepared by changing the observation tube orientation or
moving the stage.
}The following installation space is set according to the SEMI standard guidelines (SEMI S8-0705). It is recommended that
you set the optimum installation space for each customer based on the SEMI standard guidelines (SEMI S8-0705).
MX61A installation space: When the 14x12-inch stage is combined
MX61A
Stage movement
range
Unit: mm
Installation footprint
2
MX61A installation space: When the 8x8-inch stage is combined
MX61
Stage movement
range
Unit: mm
Installation space
MX61A external view, eye point and center of gravity: When the 14x12-inch stage is combined
Eye point
(Bottom view of microscope)
Unit: mm
Position of center of gravity
3
(Note) The center of gravity is an approximate position when the microscope is equipped with the basic combination for
reflected light oservation. Note that the position is variable depending on the weight of specimen, position of the
stage and other modules used.
MX61A external view, eye point and center of gravity: When the 8x8-inch stage is combined
MX61A
Eye point
(Bottom view of microscope)
Unit: mm
Position of center of gravity
(Note) The center of gravity is an approximate position when the microscope is equipped with the standard module
combination for transmitted light observation. Note that the position is variable depending on the weight of specimen, position of the stage and other modules used.
9. To prevent toppling of the microscope system, keep the total height of the microscope below 1 meter (3.3 ft) when
attachments (including Olympus optional modules and the CCD camera prepared by the customer) are mounted.
10. Each microscope has screw holes (M5, depth 10 mm) for prevention of
@
²
Fig. 1
toppling (in the case of an earthquake or microscope imbalance) on the
side panels @ (x 2 holes) and the rear panel ² (x 2 holes). Clamp the
microscope using L-shaped clamps and these screw holes as required.
When clamping the microscope using L-shaped clamps prepared
by the customer, be sure to use steel bolts (strength category 12.9)
with as long as possible threaded sections (8 mm or more is recommended).
4
Safety Symbols
The following symbols are found on the microscope. Study the meaning of the symbols and always use the equipment
in the safest possible manner.
Symbol Explanation
Be careful not to have your finger caught by the stage or stage holder.
Be careful against high voltage (1 kV or more) applied inside the unit.
Indicates that the surface becomes hot, and should not be touched with bare hands.
Before use, carefully read the instruction manual. Improper handling could result in injury to the
user and/or damage to the equipment.
l
Indicates that the main switch is ON.
Indicates that the main switch is OFF.
Caution indications
Caution indications are affixed at parts where special precaution is required when handling and using the microscope.
Always heed the cautions.
Caution indication
positions
Lamp housing
/power supply unit
Light guide light source
(LG-PS2)
Front of base
(MX61A)
Power supply unit [High voltage caution]
[High temperature caution]
[High temperature caution]
[Caution against finger
catching]
5
Getting Ready
1
@
²
Fig. 2
@
MX61A
1. Do not use the microscope where it is subjected to direct sunlight, high
temperature and humidity, dust or vibrations. (For the operating conditions,
refer to the INSTRUCTIONS manual’s chapter 8, “SPECIFICATIONS” on
page 43.)
2. A microscope is a precision instrument. Handle it with care and avoid
subjecting it to sudden or severe impacts. Never attempt to rotate the
motorized revolving nosepiece by hand; otherwise, the gear or other parts
may be damaged.
3. When moving the microscope, detach the observation tube, stage, lamp
housing and specimen to reduce the total system weight, then insert the
two provided carrying rods @ firmly into each of the left and right side
panels, and attach the two provided guarding parts ² on the two carrying
rods on the front.
If the guarding parts are not attached, the person holding the front
carrying rods may have a finger caught between the carrying rod
and the desktop.
Two persons are needed to carry the microscope; one should hold the
two front carrying rods and the other person should hold the rear carrying
rods. Be sure to move the microscope cautiously. (The microscope frame
weight is about 31 kg, or 68.2 lbs.)
}After movement, remove the guarding parts and carrying rods and retain
them carefully without losing. The carrying rods can be inserted in the
four threaded holes on the rear of the microscope. For the screw holes
left by removing the carrying rods, attach the provided screw caps on the
holes for the rear carrying rods and the cap seals on the holes for the
front carrying rods.
#Do not change the position of the microscope by sliding it on the
desktop surface; otherwise, the rubber feet will be damaged.
4. Be sure to attach the transport clamping plate(s) to the stage before
transporting it.
With the 14x12-inch stage combination, the center of gravity varies
greatly depending on the position of the stage. To ensure extra
stability, keep the two provided carrying rods attached to the mounting
holes on the front right side when using the microscope.
Maintenance and Storage
2
1. To clean the lenses and other glass components, simply blow dirty away using a commercially available blower and wipe
gently using a piece of cleaning paper (or clean gauze).
If a lens is stained with fingerprints or oil smudges, wipe it gauze slightly moistened with commercially available absolute
alcohol.
Since the absolute alcohol is highly flammable, it must be handled carefully.
Be sure to keep it away from open flames or potential sources of electrical sparks –– for example, electrical
equipment that is being switched on or off.
Also remember to always use it only in a well-ventilated room.
2. If any part of the equipment (other than glass components) gets dirty, with it with a clean cloth.
If the part is extremely dirty, do not attempt to use organic solvents to clean it; instead, use a soft, lint-free cloth slightly
moistened with a diluted neutral detergent.
3. Never disassemble any part other than instructed of the microscope. This could result in malfunctions or reduced
performance.
4. When not using the microscope, keep it covered with a dust cover. Make sure the lamp housing is cool before covering
the microscope.
5. When disposing of the microscope. Check the regulations and rules of your local government and be sure to observe
them.
6
Applicable Standards
3
1. This device is in compliance with or certified by the following standards.
2. Although this device is designed for use in industrial environments, its full performances may not be manifested if it is not
operated properly. Be sure to handle it properly as instructed in this manual.
This device is designed for use in industrial environments (Class A device).
Using it in a residential environment may affect other equipment in the environment.
CE marking
This device complies with the requirements of both directive 89/336/EEC, 2004/108/EC concerning
electromagnetic compatibility and directive 2006/95/EC concerning low voltage. The CE marking indicates
compliance with the above directives.
FCC
This device has been subjected to the compliance evaluation of the following FCC regulation:
· FCC Part 15, Subpart B ClassA: Radio Frequency Equipment (Commercial and industrial areas)
NOTE: This equipment has been tested and found to comply with the limits for a Class A digital device,
pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection
against harmful interference when the equipment is operated in a commercial environment. This
equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in
accordance with the instruction manual, may cause harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference in which case
the user will be required to correct the interference at his own expense.
FCC WARNING: Changes or modifications not expressly approved by the party responsible for compliance
could void the user’s authority to operate the equipment.
CALIFORNIA USA ONLY
This operation unit uses a Lithium Battery which contains Perchlorate Material - special handling may apply,
See www.dtsc.ca.gov/hazardouswaste/perchlorate.
SEMI
This device has been subjected to the compliance evaluations of the following guidelines under the S8 Standard.
· S2-0706: Safety Guidelines for Semiconductor Manufacturing Equipment
· S8-0705: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
7
MX61A
If the microscope is used in a manner not specified by this manual, the safety of the user may be imperiled. In addition,
the equipment may also be damaged. Always use the equipment as outlined in this instruction manual.
The following symbols are used to set off text in this instruction manual.
: Indicates that failure to follow the instructions in the warning could result in bodily harm to the
user and/or damage to equipment (including objects in the vicinity of the equipment).
<Reference>
# : Indicates that failure to follow the instructions could result in damage to equipment.
}: Indicates commentary (for ease of operation and maintenance).
8
NOMENCLATURE
}The modules shown below are examples of those used in a typical system. Certain modules are usable even when they
are not mentioned below. For these modules, refer to the latest catalogues or contact Olympus.
For the modules marked *, refer to their instruction manuals.
Motorized Revolving Nosepiece
U-D6BDREMC
U-D5BDREMC
U-D6REMC
U-P5BDREMC
Eyepieces
SWH series
(FN 26.5)
Objectives
UIS2 (UIS) series
DIC Slider
U-DICRM*
U-DICR
(Not motorized)
U-DICRH
(Not motorized)
U-DICRHC
(Not motorized)
Observation Tube
MX-SWETTR (FN 26.5)
U-SWETTR-5 (FN 26.5)
Lamp Housing
U-LH100-3/LH100IR (Halogen bulb)
U-LH100HG/LH100HGAPO
(Mercury burner)
U-LH75XEAPO* (Xenon burner)
(Note) The MX-HGAD adapter is
required for the mercury
burner and xenon burner.
Intermediate Attachment
(Only one of the following
can be attached.)
U-UVF248IM*
U-AFA2M* (+ MX-ANM)
U-CFU*
Breath Shield
MX-BSH
MX-BSH-ESD-2
Operation Unit
MX-OPU61A
or
PC + MX2-BSW
9
Hand Switch
MX-HS61A
**
Microscope Frame
MX61A-F
Stage
MX-SIC1412R2
(For transmitted light/reflected
light observation)
MX-SIC8R
(For transmitted light/reflected
light observation)
Transmitted Light
Module
Flexible Light Guide
LG-SF
** Regarding the transmitted light module, please ask your Olympus dealer.
Light Source
LG-PS2*
Control Box
BX-UCB
8x8-Inch Stage and Holder System
5-Inch Mask Holder
BH3-MH5
MX61A
Rotary Wafer Holder Plate
MX-WHPR86 (For 6-8 inch wafers)
4-Inch Mask Holder
BH3-MH4
Black Plate
BH3-SP6
Glass Plate
BH3-SPG6
8x8-Inch Stage
MX-SIC8R
10
14x12-Inch Stage and Holder System
6-Inch Mask Holder
MX-MH6
Glass Plate
MX-SPG1412
14x12-Inch Stage
MX-SIC1412R2
Rotary Wafer Holder for 8-inch
and 12-inch wafers
MX-WHPR128
11
ASSEMBLY
2-1 Assembly Diagram
MX61A
}The diagram below shows where the various modules should be
mounted. Study the assembly instructions for only the modules to be
employed.
For the connection of cables and power cord, see page 21.
# When assembling the equipment, make sure that all parts are free
of dust and dirt and avoid scratching any parts or touching glass
surfaces.
Video/digital camera
Photomicrography system
Eyepieces
DIC Slider
U-DICRM
U-DICR
U-DICRH
U-DICRHC
SWH series
Motorized Revolving
Nosepiece
U-D6BDREMC
U-D5BDREMC
U-D6REMC
U-P5BDREMC
Observation Tube
MX-SWETTR
U-SWETTR-5
(Provided with the microscope frame)
Intermediate Attachment
(Only one of the following
can be attached.)
U-UVF248IM
U-AFA2M
(+ MX-ANM)
U-CFU
Tools Used
Allen screwdriver (3 mm)
Allen wrench (3 mm)
Tool holder
Lamp Housing
for Halogen Bulb
U-LH100-3
LH100IR
Halogen bulb
12V100WHAL-L
12V10WHAL
High-Intensity
Lamp Housing
U-LH75XEAPO
U-LH100HG
LH100HGAPO
Adapter
MX-HGAD
Breath Shield
MX-BSH
MX-BSH-ESD-2
Brightfield/
darkfield
objective
(See pages 10 & 11.)
Stage
MX-SIC1412R2
MX-SIC8R
Holders
Brightfield
Objective
Adapter
BD-M-AD
Brightfield
objective
Microscope Frame
MX61A-F
Filters
U-25D6-2
U-25ND25-2
U-25LBD
U-25IF550, etc.
Analyzer
U-AN360-3
Polarizer
U-PO3
Hand Switch
MX-HS61A
Control Software
PC + MX2-BSW
}The tools used can be stored in the holes on the tool holder provided
with the microscope frame. Use the double-sided adhesive tape of the
tool holder to attach it to a position that does not hinder operation.
Do not attach the tool holder anywhere near the bottom of the lamp
housing since it generates high-temperature heat.
Control Board
U-ZPCB or
U-AFA2M-CB
+ U-DICPCB
Control Box
BX-UCB
Operation Unit
MX-OPU61A
12
Loading...