INSTRUCTION MANUAL
MODEL 530
TYPE.ALL SYSTEM
KEITHLEY INSTRUMENTS
m
warranty
We warrant each of our products to be free from defects in material
and workmanship. Our obligation under this warranty is to repair
or replace any instrument or part thereof which, within a year after
shipment, proves defective upon examination. We will pay local
domestic surface freight costs.
To exercise this warranty, write or call your local Keithley repre-
sentative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and shipping instructions.
repairs and calibration
Keithley Instruments maintains a complete repair and calibration
service as well as a standards laboratory in Cleveland, Ohio. A
service facility is also located in Los Angeles for our west coast
customers.
A Keithley service facility at our Munich, Germany office is
available for our customers throughout Europe. Service in the
United Kingdom can be handled at our office in Reading. Addition-
ally, Keithley representatives in most countries maintain service
and calibration facilities.
To insure prompt repair or recalibration service, please contact
your local field representative or Keithley headquarters directly
before returning the instrument. Estimates for repairs, normal
recalibrations and calibrations traceable to the National Bureau of
Standards are available upon request.
KEITHLEY INSTRUMENTS
28776 AURORA ROAD * CLEVELAND, OHIO 44139
TELEPHONE (216) 246-0400 .
E”,,l,pr,n “dq,*: (4 Ave, “illsrdin
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TELEX 96-6469
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CONTENTS
Section
Page
ii
1
5
6
7
8
9
10
1074
PRINTED OCT 74
SPECIFICATIONS
SPECIFICATIONS
"OLTNETER RANGE: 21 microvolt per digit to Al000 Yolts full scale
in seven decade ranges
VOLTMETER ACCUKACY: fO.l% of reading, *1 digit on all ranges
CUFJENT SOURCE RANGE: 10
seven decade ranSes
CURRENT SOURCE ACCURACY: f0.5% of readinS, f0.05% of full range
-7
ampere full range to 10
-1
ampere in
MODEL 530
FLANGE OF TYPING MODE: 10-3
TYPING HODES : Rectification
ThetUlOeleCtIiC
PROSE CONFIG"W.TION REQUIRED: Four-point in-line probe
EQUIPMENT s"PPLIED:
Keithley Model 225 Current Source
Keithley Model 163 Digital Voltmeter
Keithley Model 530 Type-All Switching
Keithley Model '3201 Cable Assembly
SUPPLIED ACCESSOKY:
Model 5301 Test Lead (two pieces).
to 104 OHM-CM
1074
HODEL 530
GENERAL DESCRIPTION
SECTION 1.
GENERAL. The Keithley Model 530 Type-All System
1-l.
is an electronic system designed for measurement of
resisriviry and determination of conductivity rype of
a semiconductor.
cision current source, digital microvoltmeter, and
other circuitry needed for resisrivity and typing determinations.
ard four-point in-line probe co make contact to the
sample.
RESlSTIVITY MFASUREMENT. Resistivity of a semi-
1-z.
conductor material can be easily determined by applying a known current through the sample.
voltage drop across the sample is the” measured using
a sensitive microvoltmeter. However, since the resistiviry is a function of slice geometry and probe
spacing, several correction factors must be used.
These correction factors are explained in ASTM Desig-
nation: F84-70*.
considered are:
Slice diameter
Average probe separation 3 mm
Specimen thickness k’ mm
NOTE: All dimensions are assumed to be in metric
The Keithley ?!odel 530 System provides the convenience
of selectable current so that the voltage reading can
be scaled to read directly in terms of OIL’,-CX (where
1 mv - 1 OH%-C?!)
(see Table 2-l) are provided in rhe Appendix of this
Instruction ?:anual for calculating the proper current
using BASIC language.
l-3. COh.DCCTIV’ITY TYPE DETH“‘INATI0~. The conducriviry type, or sign of the najoriry carrier is a fundamental property of a semiconductor sample. The
Model 530 Sysrelr utilizes two methods for quickly
derermining the semiconductor type. This srsrem is
basically described in a” arricle entitled “‘Type-All
sysrea fC
Type” fron, Solid Slate TechnologylYarch, 1971*. The
Sysrea incor~orares rectification and rhernoelectric
typing rechr.iques in a sysfen that makes the two methods
coupatibl.
Contact the sample.
units unless otherwise specified.
Dertrnining SerLconductar ConducCiviry
The Keithley System contains B pre-
The Model 530 must be used with a stand-
The resultant
The basic factors which need ro be
D mm
A computer program and prinrout
A four-point in-line probe is used to
GENERAL DESCRIPTION
semiconductor, then a dc voltage between points B and
D will result.
pends on the conductfviry type of the material.
biasing is achieved on a metal-to-n-type semiconductor
diode when the semiconductor is at a positive potential
with respect to the metal.
stilts in a back-biased junction for p-type semiconductor.
tion of the polarity of the voltage monitored by the
m~c~o~oltmete~. For certain resistivities the quality
of rectification degenerates such that the usefulness
of this mode decreases.
action occurs for voltage readings above 0.5 m,‘.
voltages less than 0.5 mV the thermoelectric mode
should be used.
b.
impressed across the input probe points increases the
temperature “ear the point oi contact by joule bearing of the semiconductor.
erated bewee” a hot and cold probe point where bP
is the voltage generated across rwo regions of mar-
erial whose temperatures differ by AT. The physical
process that generares the Seebeck voltage is the dif-
fusion of the thermally generated carriers fror: the
hot zegio” of the material fo the cold region. The
carriers vi11 diffuse iron high-to-lo,-concenrration
regions, in particular from the hot to the cold probe.
This diffusion creates a “on-equilibrium carrier con-
centration in the cold region which generates a” electric field, opposing further diffusion. This diffu-
soon oi carriers from the hot to the cold probe con-
LX”U~S U”LII the generared electric field is sufficient to overcome the tendency oi the carriers fo oiffuse. For example, in p-type material, the thermally
generated holes diffuse to the cold probe, building
up a positive space charge which retards further diffusion. As a result, the cold probe is more pasirive
than the hot probe.
mits a separation of the ai power source and tht volr-
age-detection functions.
sensing is performed by the ?lodel 163 digiral volrmeter
which provides speed and convenience of a digiral dis-
play virh auromaric polarity indication.
electric mode utilizes all four probe points as show
in Figure 3e.
Thus, the semiconductor type is simply a func-
Thermoelectric node.
The polarity of the recrificaria” de-
Back
A negative potential re-
An acceptable rectification
For
In this mode the ac voltage
A Seebeck voltage is gen-
The use of four probe painrr per-
In the Lfodel 530 rhe voltage
The rherno-
a. Recrir~cat~on Qde. Reccificaria” is the node
of operation initially used. A” ac voltage is imposed
across two of the grabe points as show” in Figure 3d.
A second ser of probe points is used to sense the polariry of rhe generated volrage. The polarity depends
on how the voltage 15 generated and o” the conducririry
type of rhe material.
ing a rectification effect at the contact paint re the
0274
It the probe poinrs are provid-
GENERAL DESCRIPTION
MODEL 530
Control
POWER Switch
PROBE Switch
FUNCTION sa
STANDBY Position
CLmRF.NT position
VF~Q Position
VREv Position
TYPE (RECT)
TYPE (THERM)
CURRENT
SHUNT
HI Terminal
LO Terminal
Switch
Sumarv of Model 530 Controls.
TABLE I-1.
Functional Description
Applies
power to Model 530 System including awtiliery
power receptacles.
Selects eirher
“A”
or “Et” probe inputs on the rear panel.
Selects function for resistivity or fyping determination.
No connections are made to probe.
Connects current source to enable a calibration check.
Connects probe to measure resistivity.
Connects probe to measure resistivity.
(reversed polarity)
Connects probe for typing using RectificationMethod.
connects probe for typing using Thermal Method.
Sets resistivity range.
Volmeter High Input
Voltmeter Low Input
circuit Desip,.
SlOl
s105
s103
JlOb
3107
2
0274
MODEL 530
0274
GENERAL DESCRIPTION
INPUT FOR -
P-POINT PROBE
MODEL 530
-LINE SWITCH
5102
MATING CONNECTOR
FURNISHED
COAXIAL CABLE-
FURNISHED
* y
4
\
:
-FUSE FlOl
-AC POWER
FOR SYSTEM
PlOl
i
6
:
i
P
:
0 6
LINK
BETWEEN
LOW & GND
:
i
i
i
i
_I
FIGURE 2. Rear Panel connections.
‘
0276
SECTION 2. OPERATION
OPERAT,ON
2-l. Keslstivity Determination: The measuremenf of
resistivity ir; accomplished through the “se of 1) a
constant current source, 2) a mirrovolt meter and 3)
a four-point resist,\~iry probe.
to give a direct reading in ““Y-CC: on 6 100 mV scale
(1 Ill,’ -
23:; (Set line witch S102 to proper position).
fuse FlOl for proper rating. The Model lb3 and 225
line cords should be connected to auxiliary power receptacles 3104 and JlO5.
b. Control Settings.
1 OH:-CN) Procedure:
Power.
1.
2. Set the Hodel 163 es follows:
3. Set the ?iodel 530 as follows:
Connect the Model 530 to either 117 or
Set rhe Model 225 as follws:
“L’TPUT SELECTOR -- STASDBY
FILTER -- OFF
I’OLTAGE CO\lPLIAKE -- 50
Decade Switches -- o-o-o
Range -- 100 PA
Power On
Range
power On
PROBE -- A
CURRENT SHUZ‘: -- 1K
POWER
Resistivitv is scaled
Check
-- O!<
-- 100.0 mv
-- ox
-- OK
the reading could also be interpreted as 173.1 OHM-CM,
If the Model 163 does not indicare fhe proper
currenl the probe is probably not making proper
contact to rhe slice.
lamp is lighted then rhe probe connections are
probably open.
f. Resistivity ?leasurement.
Vm function (Position 3) and record the reading on
the Model 163.
directly in ferms of OK+C?I resistivity (1 mV = 1 OK!:c?:) . Since the resistivity measurement is dependent
on slice geometry (thickness, etc.) the scaling is
valid far the particular current selected from Table
2-l. If the slice dimensions are changed, a new CUTrent should be dialed our on the blodel 225 to provide
direct reading in OHM-CM.
function (Position 4) to obtain a reading wirh opposite
polarity applied.
any position since it does not affecr the resistivity
UE%“remW,t.
Type Determination: The conductivity type can
2-2.
be determined by 1 of 2 methods: Rectification Mode
or hermoelectric Mode.
a. Rectification Mode.
(RICT) (Position 5). If the Model 163 indicates
greater than 0.5 mV rhen the material type is deter-
mined by the polarity indicated on the Model 163.
If the reading is less than 0.5 mV then proceed to
the Thermoelectric Mode.
The display is scaled fo indicate
Positive Polarity = P-type
Negarive Polarity = N-type
NOTE
If the Model 225 LIMIT
Set the Model 530 fo
Set the Model 530 to VRE\
The CURRENT SHUNT switch can be in
Set the Model 530 to TYPE
C. Connecrions.
1. Connect Model 225 wtpuf to JlOl on Model 530.
(Connect shorting link be&en LO-GTD on rear panel
of Model 225.)
2. Connect Model 163 terminals to JlO6 (Red) and
5107 (Black).
d. Calibration.
rent depending on the slice dimensions of the sample.
Table 2-l gives the current serring for particular
slice thickness and diameter (with probe rip spacing =
1.60 H3, or 0.0630 inch).
Cannecrian Check. Connect the probe and lower
e.
onto slice.
(Position 2).
Switch to give the maximum on-scale reading on the
Model 163. The volrage displayed on the 163 is B
function of the current x RSHmT. The Model 163 should
indicate the output which has bee” set on the Model
225 decade dials.
set to 173.1 !JA, the Model 163 should indicate 173.1 mV
with the Model 530 Shunt Resistor set to 1K.
Model 163 is scaled for direct reading of resistiviey,
1074
Set the Model 530 to CUWENT function
SET the Model 225 for proper CUI-
Ad,ust the Model 530 CURRENT SHLWT
For example, if the current has bee”
Since the
b. Thermoelectric Mode.
(THEP.M) (position 6).
greater than 0.5 q V.
by the polarity indicated on the Model163.
Positive Polarity = P-type
Negative Polarity = N-type
TABLE 2-l.
Typical Current Settings in &
Slice
Diameter
in i-C!+
16
17
18
19
20
(For other slice dimensions refer to Appendix.)
Slice Thickness in ME:
0.1 0.2 0.3
41.7 83.4 125.0 166.6 208.2
42.1 84.1 126.1 168.1 210.1
42.4 84.8 127.1 169.4 211.7
42.7 85.3 127.9 170.5 213.1
1 42.9 85.8 128.7 171.5 214.3
Set the Model 530 to TYPE
The Model 163 should indicate
The material type is determined
0.4 0.5
5
1
I
ClKCLllT DESCRIPTION
MODEL 53Cl
SECTION 3.
3-1. GENERAL. The “ode1 530 provides all the co”trols,
interconnections,
sistivity and semiLonductor typing determinations using
the “Type-All” system.
3-2. EQLIIPNENT USED. The Model 530 utilizes a Keithley
Model 225 Current Source,
hltmeter, and auxiliary ac paver source. Separate
circuit descriptions are provided in the individual
Instruction Manuals for Models 163 and 225. The remaining circuits are described in the following paragraph.
3-3. SWITCHING OPERATION
a. Standby Position.
terminals are completely disconnected from the Model
530 circuitry.
Current Position. In this position the Model
b.
163 and 225 are connected such that the Model 163 will
indicate the voltage drop across one of the Shunt Resisters. For euamle. with the Model 225 set at 100 UA
and a 1 kilohm Shunt Resistor selected, the Model 163
should indicate 100 mV if the probe points are making
satisfactory contact.
and
circuits necessary for making re-
a Model I60 or 163 Digital
In this position the probe
CIRCUIT DESCRIPTION
FWD Position.
c. v
is connected so as to read the volraee dram across the
semiconductor sample.
directly in terms of OHM-CM when the current setting
is scaled properly.
RPV Position. In this position the Model 225
d. V
polarity is reversed autom~ticaily so as to permit a
reverse voltage across rtle sample.
dicares the resisrivity in terms of OHM-CM when the
current setting is scaled properly.
Type (Rect) Position.
e.
voltage is impressed between terminals A and 8.
Model 163 is connected between pins S and D.
Type (Therm) Position. In this position the
i.
Model 163 is connected between terminals C and D. The
voltage which results from the Seebeck effect is meas-
ured at points separate from the impressed ac voltage
points.
3-4. AC POWER SUPPLY. An ac voltage is provided by
the 12.6V secondary windine of transformer TlOl. The
primary windings are connected in parallel or in series
depending on the position of the Line Switch S102.
sister RiOl provides short circuit protection for the
secondary. Fuse FlOl provides over-current protection
for the primary of TlOl.
In this position the Model 163
The resistivi;y is indicated
me Model 163 in.
In this position an ac
The
Re-
Type (Therm) Position (e)
FIGLRE 3. Type-All Circuit Connections
6
0274
SECTION 4.
REPLACEABLE PARTS
KID6
RI 07
FlOi
JlOl
3102
-_-
3103
-_
_.
3104
5105
3106
3107
PlOl
SiOl
SlO2
5103
5104
SlO5
TlDl
--
-__
__
-__
__
__
__
__
__
__
__
Ratinfi Type
5x, 5 w ww 91637
“.1X, l/4 w w D1686
0.17~., l/4 w ww Dl6S6 ,009
O.l%, 1/4w ww Dl6S6 ,009
10 KC
10 M.!
Fuse, Slo-Blo, l/h,, 3AG
Receptacle, BNC
Receptacle
Locking Ring, used with 5102
NuC, used with 3102
Receptacle
Locking Ring, used with 3103
NUf , used vith 3103
Receptacle, Power
Receptacle, power
Binding Post, Red
Binding Past, Biack
Line Cord
Svi tch, Toggle
Svirch, Slide (117-234,~)
Switch, Rotary
Switch, Rotary
Switch, Toggle
Transformer
Knob, (For S103, 5104)
Front Panel
Chassis Assembly
Rear Panel
Connector, Mate of 5103
Connector Body, used with CS-162
Locking Ring, used with CS-162
Connector, Mate of JlO2
Connector Body, used with CS-162
Locking Ring, used with CS-162
Cover Assembly (225)
Cover Assembly (163)
Cable Assembly
0.1%. 113 w w 15909 125” Ill,“-1K
lh, i/2 w
I’)., l/2 w DCb
DCb
Mfr.
Code
MISCELlANEOUS
Mfr.
Code
75915 312.500
95712 667211~34
02660 126-1428 CS-164
02660 41-153
02660 41-153
0266” 41-153
02660 1604
02660 1604
58474 DF2 1RC
584i4
93656 4638-13
80164 ---
80164 ___
80164 __80164 --80164 ___
80164 ___
80164 -__
80164 ___
80164 ___
80164 ---
02660 126-1427
02660 126-1425
02660 126-1430
02660 126-1427
02660
02660
80164
SO164
80164
Mir.
Desig.
RS-5
,009
DCF-l/2 R12-10K
DCF-112 RlZ-lOtI
Mfr.
Desig.
DFZlBC
126-1425
126-1430
___
___
-__
Keithley
Part No.
R4.-25
R95-1
R95-10
R95-100
Keithley
Part NO.
FL,-6
cs-15
cs-160
cs-160
CS-160
CS-248
CS-248
BP,,-RED
BPll-ELK
CO-5
SW-236
Sk’-151
SW-359
W-358
SW-35i
lx-146
21660A
241688
249418
241698
CS-162
CS-161
CS-165
CS-162
CS-161
CS-165
25510B
241778
Model 8201
NODIFICATIONS:
The Model 160 or 163 as supplied with the Model 530
has been modified as follows:
Resistors R112 and RI15 have bee” removed to increase
the input resistance of the voltmeter on the 100 mV
range.
1074
Note: If the Model 160 is supplied the ohms function
will not be useable on the 1 megohm and 10 megohm
ranges unless the resistors (R112 and R115) are replaced.
7
APPEh’DIX
MODEL 530
I: #.I# #RYY.I #YLX.I #“##.I *I#*.* ***Y.Y YYYY.I #I##.# I###.# ###I.#
2: INCHES
3: DIAM SLICE THICKNESS IN MlLS
4:
51 TO G,“E DIRECT READtNG OF RESISTIVITY ,N
61 OHM-CM CN THE 100 MF SCALE <I M” = 1 BHM-CM)
71 PRBBE TIP SPACING = #la” NILS (=##*.I# MM)
8:ENTER PRCBE TIP SPACING IN NILS
9:SLICE THICKNESS IN MILS.
1O:SLlCE DIAMETER IN INCHES. START, FINISH> STEP c.01 MINIMUM STEP,
II DIM P(25)
20 DATA 0.997.0.992,0.9P2,0.966r0.944r0.921
2, F0R K= 0 T0 5
22 READ Q(K)
23 NEXT K
30 DATA 4.532,4.53~,4.526,4.524,4.5,7~4.5D~,4.49?,4.4~5,4.470
3, DATA 4.454,4.436,4.417.4.395.4.372,4.348,4.322,4.294,4.265,4.235
32 DATA 4.204,4.171
33 F0R K=O T0 20
34 READ P(K)
35 NEXT K
100 PRINT USING 8
110 INPUT S
120 PRINT USING 9
130 INPUT T,rT2rT3
140 PRINT USING IO
150 INPUT Dl.D2.D3
160 LET 5,s S*25.4/1000
170 PRINT
180 PRINT USING 4
190 PRINT USING 5
200 PRINT USING 6
210 PRINT USING 7rS1Sl
220 PRINT
230 PRINT
239 PRINT USING 3
240 ,-ET T2’T2+0.0000O,
24, FL?,? T= T, T0 T2 STEP T3
242 LET I=l+l
243 LET T(l)= T
244 NEXT T
250 PRlNT “SING ~,T~I~.T~~~.T~~~,T~~~~TO~T~~)~TO~T~~~~T~~~.T~~~~T~~~
251 PRINT
260 F0R D= D, TO D2 STEP D3
26, LET X=S/(D*,OOO>
262 LET 7= INT(X*200)
263 LET Xl= X*200 -7
264 LET F2= P(Y) + X,*(P(Y+,Y-P(Y))
300 F0R J= 1 50 1
310 LET X’ T(J)/ S
31, IF X <= 1.0 THEN 320
312 PRINT “SLICE TH,CKNE’S/PKBBE SPACING ,S LARGER THAN 0NE”
320 IF X a= 0.5 THEN 400
330 LET F(J)= l-(X+0.006)
340 G0T0 450
LET Y= INT<X*,O) - 5
400
410 LET x1= x*,0 -5 -Y
420 LET F<J,=O(YY + Xl*(Q(Y+,)-O(Y))
450 LET A(J)= F28T(J)+F(Jl*2.54
~~~~-
460 NEX-I .I
470 PRINT USING ,,D,A~I~,A~2~.A~3~.A~4~,A~S~,A~7),A~8~,A~9~
400 NEXT D
##.l YX.U
TABLE OF CURRENT SETTINGS IN MlCReAMPERE.5
,l.Y
I#*# “I.” #I*”
START, FINISH. STEP (9 VALUES MAXIMUM,
I#*#
“#.I
#I.#
8
0274
M”DEL 530
APPEWIX
APPENDIX B
Table of Calculated Current Settings
I), Pli SLlCE ,UICKNESS IN V,r.
d, .7
42.)
Ci2.4 H4.R
42.1 H5.3
LIP.9 R5.R IPU.7
43. I
4 3 . 3 P6.6 129.9
43.5 P6l9 1311.4
43.6
‘3.7 6,.5 131.7
43.9 P7.7 131.5
4 4 . c “.,.q 13, .u
h4.1 Lt”. 1 132. I
44.1 Rlr.3 132.3
411.F RR.‘ 132.6
4*.3
411.3 93.7 132.9
‘4.‘ 8H.R ,33.,
n h . 4 PRi9 ,X3.>
44.5 89.” 133.b
64.5 R9 .P 133.5
44.6 89.1 133.6
da.6 “0.2 133.7
4*.7 R9.3 133.9
LA.7 HR.3 133.9
SLICE THICKNESS IN MN
“.R cl.9 1.0 I., I .?
H3.d 1PS.O
Pli. I
126.1
I2i.l
127.9
Ph.7
rt7 .P?
FAR.5
17q.3
13P.U
13?.7
“.4 “.S
166.6 3PU.2
Ih”., 710.1
,6S.* 2, I .7
,,“.S 213.1
171.5 21‘3.3
173.4 P,,.‘
173.1 316.3
I 7 3 . 7 217.1
174.3 P17.R
174.U
17s.3 219.0
,7,.-t 319.5
176.0 220.0
,,6.4 720.4
176.7 220.3
176.9 P2, .I
177.2 72, .L
177.4 22, .,
177.6 23, .Q
177.4 Z???.?
178.0 2?%.4
17H.I 222.6
,7?,.3 222.7
K/R.4
17P.5
7,O.d
2?2.9
‘23. I
“.h
F‘9.7
PSP.”
?53.9
PS5.6
257.1
2sa.3
250.4
260.4
261.3
P6P.C
362.7
763.3
263.Q
264.0
264.R
P65.p
265.6
2h5.s
?hC..Q
ph6.5
266.7
2i7.0
267.2
267.L
367.6
1.3
@.7
-
27, .?
293.9 335.7 376.5
296. I
P9R.I 340.5 38, .9
P99.R
3n1.3
3OP.6 345.7 387.7
303.7 347.”
304.7 348.1 390.4
305.6
3n6.3
307.1 35O.R 393.4
3n7.7 35, .5 304.3
3or.3 357.2 395.0
3”8.R
309.3
Z”9.7
310.1
31C.4 350.7 397.7
3,C.R
311.1
311.4
3, I.6
311.8
31P.1
1.4
“.R 0.9
339.7 373.,
33r.3 379.4
349.5 3R4. I
3n4.2 3R6.C
3R9. I
349. I 391.5
35O.P 392.5
3b.H 395.7
353.3 396.3
353.P 396.F‘
354.3 397.3
355.0 39”.?
355.4 39v.f’
355.7 39Y.0
356.0 399.2
356.3 399.5
356.5 399.P
1.5 1.6
0276
16 332.7 373.1 412.7
17 335.7 376.5 416.5
I8 338.3 379.4 419.7
19 340.5 351.9 427.5
20 343.5 384.1 424.9
PI 344.2 356.0 427.0
22 345.7 381.7 42R.P
23 347.0 389.1 43c.4
24 34P.l 390.4 431.”
25 349.1 391.5 433.1
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9
I-
+-+
CN
530-3
I
A-=-
Applies Lo Manual Frinted
October, 1974.
n
INSTRUCTION MANUAL
CHANGE NOT I CE
MODEL 530 TYPE-ALL SYSTEM
‘W
Sheet I of 1
0677
INTRODL~CTION:
duct perfornrance and reliabi I i ty, it is often necessary to make changes
to Instruction Manuals to reflect these improvements.
Instruction Manuals occasionally occur that require changes.
due to printing lead time and shipping requirements, we can’t get these
changes immediately into printed Manuals.
formation is supplied as a supplement to this Manual in order to provide
the user with the latest improvements and corrections in the shortest
possible time. Many users will transfer this change information directly
to a Manual to minimize user error.
cated in <r:,iicf.
CHAIIGE S
PAGE 5 - Paragraph Z-2
Thermoelectric Mode.
b.
6).
PAGE 7
J102
JlO3 Receptacle
PAGE 7 -
__
The Model
Receptacle
Locking Ring, used with JlO3
Since Keithley Instruments is continually improving pro-
Also, errors in
Some t i rmes ,
The fol lowing ne;‘, change in-
All changes or additions are indi-
Set the Model
I63
should indicate Zcss than
530
0.5
02660
C26EO
02660
to TYPE (THERM)(Position
mV.
l:tic-145.’
12c-14ZP
12C-142P
E-1 63
m-1 63
es-1 64
RI04
RI05
loo;!
1K’ .25% (
O.l%,
1 I4
IOk’
ww
ww
02985
94322
TS-I
EL:@A
H-249-1 00
R-231-1X
KEITHLEY INSTRUMENTS.
INC
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