Fluke MOLBOX RFM User Manual

molbox™ RFM™

(Ver 1.10 and Higher)

Reference Flow Monitor

Operation and Maintenance Manual

High pressure liquids and gases are potentially hazardous. Energy stored in these liquids and gases

can be released unexpectedly and with extreme force. High pressure systems should be assembled and operated only by personnel who have been instructed in proper safety practices.

Information in this document is subject to change without notice. No part of this document may be reproduced or transmitted in any form or by any means, electronic or mechanical, for any purpose, without the express written permission of DH Instruments, a

Fluke Company 4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.

DH Instruments makes sincere efforts to ensure the accuracy and quality of its’ published materials; however, no warranty,

expressed or implied, is provided. DH Instruments disclaims any responsibility or liability for any direct or indirect damages resulting from the use of the information in this manual or products described in it. Mention of any product does not constitute an endorsement by DH Instruments of that product. This manual was originally composed in English and was subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict between the English version and other language versions, the English version predominates.

Products described in this manual are manufactured under international patents and one or more of the following U.S. patents: 5,142,483, 5,257,640, 5,331,838, 5,445,035. Other U.S. and international patents pending.

DH Instruments, DH, DHI, molbox, molbox RFM, molbloc, molbloc-L, molbloc-S and CalTool are trademarks, registered and otherwise, of DH Instruments, a Fluke Company.

LabVIEW is registered trademark of National Instruments Corporation. Swagelok is a registered trademark of the Swagelok Company.

Document No. 550107f 050512 Printed in the USA.

AABBLLEE

OONNTTEENNTTS

TABLE OF CONTENTS ...............................................................I

TABLES.................................................................................. V

FIGURES................................................................................VI

ABOUT THIS MANUAL............................................................ VII

1. INTRODUCTION ................................................................. 1

1.1 PRODUCT OVERVIEW.................................................................................................................................................................1

1.1.1 MOLBLOC FLOW ELEMENTS ........................................................................................................................................................... 1

1.1.1.1 MOLBLOC-L FLOW ELEMENT....................................................................................................................................................... 1

1.1.1.2 MOLBLOC-S FLOW ELEMENT...................................................................................................................................................... 1

1.2 SPECIFICATIONS.........................................................................................................................................................................2

1.2.1 GENERAL SPECIFICATIONS ............................................................................................................................................................. 2

1.2.2 REFERENCE PRESSURE TRANSDUCER (RPT) SPECIFICATIONS .............................................................................................. 2

1.2.2.1 UPSTREAM AND DOWNSTREAM RPTS...................................................................................................................................... 2

1.2.2.2 DIFFERENTIAL RPT (MICRORANGE OPTION)............................................................................................................................3

1.2.3 TEMPERATURE MEASUREMENT SPECIFICATIONS......................................................................................................................3

1.2.4 FLOW MEASUREMENT SPECIFICATIONS.......................................................................................................................................3

1.2.4.1 MOLBLOC-L .................................................................................................................................................................................... 3

1.2.4.1.1 MOLBLOC-L FLOW MEASUREMENT SPECIFICATIONS, MICRORANGE OPTION............................................................. 4

1.2.4.1.2 MOLBLOC-L PRESSURE DEPENDENT CALIBRATION TYPES............................................................................................. 4

1.2.4.1.3 MOLBLOC-L RANGES WITH LOW PRESSURE CALIBRATIONS........................................................................................... 6

1.2.4.1.4 MOLBLOC-L RANGES WITH HIGH PRESSURE CALIBRATIONS..........................................................................................7

1.2.4.1.5 MOLBLOC-L DIMENSIONS....................................................................................................................................................... 8

1.2.4.2 MOLBLOC-S.................................................................................................................................................................................... 9

1.2.4.2.1 MOLBLOC-S RANGES............................................................................................................................................................... 9

1.2.4.2.2 MOLBLOC-S PRESSURE DEPENDENT CALIBRATION TYPES.......................................................................................... 11

1.2.4.2.3 MOLBLOC-S DIMENSIONS.....................................................................................................................................................12

1.2.5 FRONT AND REAR PANELS............................................................................................................................................................ 13

1.2.5.1 FRONT PANEL..............................................................................................................................................................................13

1.2.5.2 REAR PANEL................................................................................................................................................................................ 14

2. INSTALLATION ................................................................ 15

2.1 UNPACKING AND INSPECTION ...............................................................................................................................................15

2.1.1 REMOVING FROM PACKAGING...................................................................................................................................................... 15

2.1.2 INSPECTING CONTENTS ................................................................................................................................................................. 15

2.2 SITE REQUIREMENTS............................................................................................................................................................... 15

2.3 INITIAL SETUP............................................................................................................................................................................ 16

2.3.1 PREPARING FOR OPERATION ....................................................................................................................................................... 16

2.3.2 POWER CONNECTION ..................................................................................................................................................................... 16

2.3.3 MOLBOX RFM TO MOLBLOC CONNECTION.................................................................................................................................16

2.3.4 GAS SUPPLY AND FLOWPATH CONNECTIONS........................................................................................................................... 17

2.3.5 VACUUM SUPPLY (MOLBLOC-S ONLY) ........................................................................................................................................ 18

2.3.6 COMMUNICATIONS CONNECTIONS .............................................................................................................................................. 18

2.4 POWER UP AND VERIFICATION.............................................................................................................................................. 18

2.4.1 POWER UP.........................................................................................................................................................................................18

2.4.2 CH E CK P ROPER PRESS URE MEASU REMEN T OP ERATI O N .......................................................................................... 19

2.4.3 CHECK PROPER TEMPERATU R E M EASUR E M ENT OPERATIO N..........................................................................................19

2.4.4 LEAK CHECK.....................................................................................................................................................................................19

2.4.5 CHECK/SET SECURITY LEVEL ....................................................................................................................................................... 20

2.5 ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING FLOW MEASUREMENTS .......................................................20

2.6 SHORT TERM STORAGE...........................................................................................................................................................20

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

3. OPERATION..................................................................... 21

3.1 GENERAL OPERATING PRINCIPLES ......................................................................................................................................21

3.1.1 MOLBLOC-L AND MOLBLOC-S OPERATION................................................................................................................................ 21

3.1.2 MOLBLOC-S BPR LIMITS................................................................................................................................................................. 21

3.1.3 FLOW READY/NOT READY INDICATION ....................................................................................................................................... 22

3.1.3.1 MOLBLOC-L OPERATION............................................................................................................................................................22

3.1.3.2 MOLBLOC-S OPERATION............................................................................................................................................................ 22

3.1.4 SOFT [ON/OFF] KEY ......................................................................................................................................................................... 23

3.1.5 MICRORANGE OPTION (OPTIONAL).............................................................................................................................................. 23

3.1.6 REFERENCE PRESSURE TRANSDUCER (RPT) OVERPRESSURE ............................................................................................ 24

3.1.6.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS................................................................................................................ 24

3.1.6.2 DIFFERENTIAL RPT, MICRORANGE OPTION........................................................................................................................... 24

3.2 MAIN RUN SCREEN................................................................................................................................................................... 25

3.2.1 MOLBLOC-L OPERATION................................................................................................................................................................ 25

3.2.2 MOLBLOC-S OPERATION................................................................................................................................................................ 26

3.3 MANUAL OPERATION............................................................................................................................................................... 27

3.3.1 KEYPAD LAYOUT AND PROTOCOL............................................................................................................................................... 27

3.3.2 SOUNDS............................................................................................................................................................................................. 28

3.3.3 SOFT [ON/OFF] KEY ......................................................................................................................................................................... 28

3.3.4 DIRECT FUNCTION KEYS SUMMARY ............................................................................................................................................ 28

3.4 DIRECT FUNCTION KEYS.........................................................................................................................................................29

3.4.1 [K] ....................................................................................................................................................................................................... 29

3.4.2 [GAS] .................................................................................................................................................................................................. 31

3.4.2.1 MOLBLOC-L OPERATION............................................................................................................................................................32

3.4.2.2 MOLBLOC-S OPERATION............................................................................................................................................................ 33

3.4.3 [UNIT]..................................................................................................................................................................................................34

3.4.3.1 MASS FLOW VS. VOLUME FLOW...............................................................................................................................................35

3.4.3.2 VOLUMETRICALLY BASED MASS FLOW UNITS....................................................................................................................... 36

3.4.3.3 VOLUMETRICALLY BASED MASS FLOW UNITS AT VARIOUS REFERENCE TEMPERATURES (UXXX) ........................... 37

3.4.3.4 VOLUME FLOW UNITS (VLM)......................................................................................................................................................37

3.4.3.5 CUSTOMIZING FLOW UNITS AVAILABLE UNDER THE UNIT FUNCTION.............................................................................. 38

3.4.4 [TARE] ................................................................................................................................................................................................ 39

3.4.4.1 <1TARE> ....................................................................................................................................................................................... 40

3.4.4.1.1 MOLBLOC-L OPERATION.......................................................................................................................................................40

3.4.4.1.2 MOLBLOC-S OPERATION....................................................................................................................................................... 43

3.4.4.2 <2PURGE>.................................................................................................................................................................................... 44

3.4.4.3 <3LEAK CHECK>.......................................................................................................................................................................... 46

3.4.4.3.1 LEAK CHECK MOLBOX........................................................................................................................................................... 47

3.4.4.3.2 LEAK CHECK SYSTEM........................................................................................................................................................... 49

3.4.4.4 <4AUTOZ>.....................................................................................................................................................................................53

3.4.4.4.1 EDIT AUTOZ.............................................................................................................................................................................55

3.4.4.4.2 RUN AUTOZ............................................................................................................................................................................. 56

3.4.4.5 <5BPR> (MOLBLOC-S OPERATION ONLY) ...............................................................................................................................58

3.4.5 [P&T] (PRESSURE AND TEMPERATURE)......................................................................................................................................59

3.4.6 [DISPLAY] .......................................................................................................................................................................................... 61

3.4.6.1 <1RATE> ....................................................................................................................................................................................... 62

3.4.6.2 <2AVG> (AVERAGE) .................................................................................................................................................................... 63

3.4.6.3 <3 HI/LO>....................................................................................................................................................................................... 64

3.4.6.4 <4TOTAL> (TOTALIZER).............................................................................................................................................................. 64

3.4.6.5 <5UNIT>......................................................................................................................................................................................... 66

3.4.6.6 <6DEV>.......................................................................................................................................................................................... 66

3.4.6.7 <7FREEZE>................................................................................................................................................................................... 67

3.4.6.8 <8CLEAN>..................................................................................................................................................................................... 68

3.4.7 [MICRO] (OPTIONAL)........................................................................................................................................................................ 68

3.4.8 [MOLBLOC]........................................................................................................................................................................................70

3.4.8.1 MOLBLOC-L AND MOLBLOC-S SIZE AND RANGE DESIGNATIONS.......................................................................................70

3.4.9 [RES]...................................................................................................................................................................................................71

3.5 [SETUP].......................................................................................................................................................................................72

3.5.1 <1FLOWU>......................................................................................................................................................................................... 72

3.5.2 <2PRESU>..........................................................................................................................................................................................73

3.5.3 <3TEMPU> ......................................................................................................................................................................................... 73

3.5.4 <4MOLBLOC>.................................................................................................................................................................................... 74

3.5.5 <5STAB> ............................................................................................................................................................................................ 74

3.5.6 <6ADJ>............................................................................................................................................................................................... 75

TABLE OF CONTENTS

3.6 [SPECIAL]................................................................................................................................................................................... 76

3.6.1 <1RESET>.......................................................................................................................................................................................... 77

3.6.1.1 <1SETS>........................................................................................................................................................................................ 78

3.6.1.2 <2UNITS>...................................................................................................................................................................................... 78

3.6.1.3 <3COM>......................................................................................................................................................................................... 79

3.6.1.4 <4CAL>.......................................................................................................................................................................................... 79

3.6.1.5 <5ALL>........................................................................................................................................................................................... 79

3.6.2 <2LEVEL> .......................................................................................................................................................................................... 80

3.6.2.1 SECURITY LEVELS...................................................................................................................................................................... 80

3.6.3 <3UL> ................................................................................................................................................................................................. 83

3.6.3.1 UPPER LIMIT ALARM AND SEQUENCE.....................................................................................................................................84

3.6.4 <4CAL>............................................................................................................................................................................................... 84

3.6.5 <5PREFS>.......................................................................................................................................................................................... 84

3.6.5.1 <1SCRSVR>..................................................................................................................................................................................85

3.6.5.2 <2SOUND>....................................................................................................................................................................................85

3.6.5.3 <3TIME>......................................................................................................................................................................................... 86

3.6.5.4 <4ID>.............................................................................................................................................................................................. 86

3.6.5.5 <5LOG>.......................................................................................................................................................................................... 87

3.6.6 <6REMOTE>.......................................................................................................................................................................................87

3.6.6.1 COM1 AND COM2......................................................................................................................................................................... 88

3.6.6.2 IEEE-488........................................................................................................................................................................................88

3.6.6.3 RS232 SELF-TEST........................................................................................................................................................................ 88

3.6.7 <7MICRO>.......................................................................................................................................................................................... 89

3.6.8 <8HEAD>............................................................................................................................................................................................ 90

3.6.9 <9BPR>............................................................................................................................................................................................... 91

4. REMOTE OPERATION ....................................................... 95

4.1 OVERVIEW..................................................................................................................................................................................95

4.2 INTERFACING.............................................................................................................................................................................95

4.2.1 RS232 INTERFACE ........................................................................................................................................................................... 96

4.2.1.1 COM1.............................................................................................................................................................................................96

4.2.1.2 COM2.............................................................................................................................................................................................96

4.2.2 IEEE-488 (GPIB).................................................................................................................................................................................97

4.3 COMMANDS................................................................................................................................................................................ 97

4.3.1 COMMAND SYNTAX ......................................................................................................................................................................... 97

4.3.2 COMMAND SUMMARY ..................................................................................................................................................................... 98

4.3.3 ERROR MESSAGES..........................................................................................................................................................................99

4.3.4 COMMAND DESCRIPTIONS...........................................................................................................................................................101

4.3.4.1 IEEE STD. 488.2 COMMON AND STATUS COMMANDS.........................................................................................................101

4.3.4.2 MOLBOX RFM COMMANDS...................................................................................................................................................... 104

4.4 STATUS SYSTEM.....................................................................................................................................................................129

4.4.1 STATUS REPORTING SYSTEM ..................................................................................................................................................... 129

4.4.1.1 STATUS BYTE REGISTER.........................................................................................................................................................129

4.4.1.2 STANDARD EVENT REGISTER................................................................................................................................................. 131

5. MAINTENANCE, ADJUSTMENTS AND CALIBRATION ...........133

5.1 PRODUCT OVERVIEW.............................................................................................................................................................133

5.2 CALIBRATION OF REFERENCE PRESSURE TRANSDUCERS (RPTS)..............................................................................134

5.2.1 PRINCIPLE....................................................................................................................................................................................... 134

5.2.1.1 PA AND PM COEFFICIENTS...................................................................................................................................................... 135

5.2.2 EQUIPMENT REQUIRED.................................................................................................................................................................135

5.2.2.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS.............................................................................................................. 135

5.2.2.2 DIFFERENTIAL (MICRORANGE) RPT....................................................................................................................................... 136

5.2.3 SET-UP AND PREPARATION.........................................................................................................................................................136

5.2.3.1 UPSTREAM AND DOWNSTREAM ABSOLUTE RPTS.............................................................................................................. 136

5.2.3.2 MICRORANGE DIFFERENTIAL RPT......................................................................................................................................... 136

5.2.4 VIEWING AND EDITING RPT READINGS AND CALIBRATION INFORMATION........................................................................ 137

5.2.4.1 VIEWING RPT OUTPUTS...........................................................................................................................................................138

5.2.4.2 VIEWING AND EDITING RPT PA, PM AND CALIBRATION DATE...........................................................................................140

5.2.5 RPT CALIBRATION/ADJUSTMENT PROCEDURE WITHOUT USING CALTOOL FOR RPTS SOFTWARE ............................ 141

5.3 OHMIC MEASUREMENT SYSTEM VERIFICATION................................................................................................................142

5.4 RELOADING EMBEDDED SOFTWARE INTO MOLBOX RFM FLASH MEMORY.................................................................143

5.5 RELOADING MOLBLOC EEPROM FILE.................................................................................................................................144

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

5.6 OVERHAUL...............................................................................................................................................................................144

5.6.1 INTERNAL VIEW..............................................................................................................................................................................145

5.6.1.1 UPSTREAM ABSOLUTE RPT ....................................................................................................................................................146

5.6.1.2 DOWNSTREAM ABSOLUTE RPT..............................................................................................................................................146

5.6.1.3 DIFFERENTIAL MICRORANGE RPT (OPTIONAL)................................................................................................................... 146

5.6.1.4 DISPLAY......................................................................................................................................................................................146

5.6.1.5 POWER SUPPLY........................................................................................................................................................................ 146

5.6.1.6 MICRO BOARD........................................................................................................................................................................... 146

5.6.1.7 VALVING MODULE..................................................................................................................................................................... 146

5.6.1.8 MAIN BOARD ..............................................................................................................................................................................147

5.6.1.9 COOLING FAN ............................................................................................................................................................................147

6. TROUBLESHOOTING .......................................................149

6.1 OVERVIEW................................................................................................................................................................................149

7. APPENDIX ......................................................................155

7.1 CONVERSION OF NUMERICAL VALUES...............................................................................................................................155

7.1.1 PRESSURE ...................................................................................................................................................................................... 155

7.1.2 TEMPERATURE...............................................................................................................................................................................155

7.1.3 FLOW................................................................................................................................................................................................ 156

7.2 WARRANTY STATEMENT....................................................................................................................................................... 159

8. GLOSSARY .....................................................................161

TABLES & FIGURES

AABBLLEES

Table 1. molbloc-L Pressure Dependent Calibration Types........................................................................5

Table 2. molbloc-L Ranges with Low Pressure Calibrations.......................................................................6

Table 3. molbloc-L Ranges with High Pressure Calibrations ...................................................................... 7

Table 4. molbloc-S Flow at Various molbloc Upstream Pressures ...........................................................10

Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures ..............10

Table 6. molbloc-S Calibration Types........................................................................................................11

Table 7. molbox RFM Parts List.................................................................................................................15

Table 8. Summary of molbox RFM Direct Function Key Operations.........................................................29

Table 9. Available molbloc-L Gases .......................................................................................................... 32

Table 10. Available molbloc-S Gases........................................................................................................33

Table 11. Available Flow Units...................................................................................................................39

Table 12. Flow Units and Corresponding Total Mass or Volume Units.....................................................65

Table 13. molbloc-L Size and Nominal Range Designations .................................................................... 71

Table 14. molbloc-S Size Designation and Pressure to Flow Conversion Ratio (KF)................................71

Table 15. Pressure Units of Measure Available.........................................................................................73

Table 16. Security Levels - Functions NOT Executed Per Function/Level................................................81

Table 17. Security Levels - Functions NOT Executed Per Function/Level (Continued)............................82

Table 18. COM1 and COM2 Available Settings ........................................................................................88

Table 19. COM1 DB-9F Pin Designation...................................................................................................96

Table 20. COM2 DB-9M Pin Designation..................................................................................................97

Table 21. Command Summary..................................................................................................................98

Table 22. Error Messages........................................................................................................................100

Table 23. Status Byte Register ................................................................................................................129

Table 24. Standard Event Register..........................................................................................................131

Table 25. Troubleshooting Checklist .......................................................................................................149

Table 26. Pressure Unit Conversions......................................................................................................155

Table 27. Temperature Unit Conversion..................................................................................................155

Table 28. Conversions From kg/s To sccm At 0 °C For Various Gases .................................................156

Table 29. Conversions From sccm At 0 °C To Other Volumetrically Based Flow Units .........................156

Table 30. Conversions From Volumetrically Based Flow Units At 0 °C To

Table 31. Conversions From kg/s To mole/s For Various Gases............................................................157

Table 32. Conversion From mole/s To pccm...........................................................................................158

Table 33. Conversion From sccm At 0 °C to Volume Flow Units At Another Pressure

Table 34. Authorized Service Providers ..................................................................................................159

Corresponding Units At Another Temperature (uxxx)...........................................................157

And Temperature...................................................................................................................158

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

IIGGUURREES

Figure 1. molbox RFM Front Panel............................................................................................................13

Figure 2. molbox RFM Rear Panel ............................................................................................................ 14

Figure 3. molbox RFM Internal Pneumatic Schematic – MICRORANGE OPTION RPT

Figure 4. Keypad Layout............................................................................................................................27

Figure 5. molbox RFM Internal Pneumatic Schematic – TARING, UPSTREAM

Figure 6. molbox RFM Internal Pneumatic Schematic – TARING molbloc-S OPERATION..................... 44

Figure 7. molbox RFM Internal Pneumatic Schematic – PURGING ......................................................... 45

Figure 8. molbox RFM Internal Pneumatic Schematic – LEAK CHECK molbox.......................................48

Figure 9. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –

Figure 10. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –

Figure 11. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR ON..................92

Figure 12. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR OFF................ 92

Figure 13. Status Byte Register...............................................................................................................130

Figure 14. molbox RFM Internal Pneumatic Schematic – RUN UPSTREAM OR DOWNSTREAM

Figure 15. molbox RFM Internal Pneumatic Schematic – RUN MICRORANGE DIFFERENTIAL

Figure 16. molbox RFM Internal View......................................................................................................145

Figure 17. molbox RFM Valving Assembly Schematic............................................................................147

ACTIVE/INACTIVE..................................................................................................................23

molbloc-L OPERATION...........................................................................................................41

CHECKING OFFSET AND STABILITY molbloc-L operation..................................................50

CHECKING OFFSET AND STABILITY molbloc-S operation .................................................52

ABSOLUTE RPT CALIBRATION..........................................................................................139

RPT CALIBRATION ..............................................................................................................139

ABOUT THIS MANUAL

BBOOUUTT

This manual provides the user with the information necessary to operate a molbox RFM, Reference Flow Monitor. It also includes a great deal of additional information provided to help you optimize molbox RFM use and take full advantage of its many features and functions.

Before using the manual, take a moment to familiarize yourself with the Table of Contents structure: All first time molbox RFM users should read Section molbox RFM operating principles. Section 4 is for provides maintenance and calibration information. Section 6 is a quick troubleshooting guide. Use troubleshoot unexpected molbox RFM behavior based on the symptoms of that behavior.

Certain words and expressions have specific meaning as they pertain to molbox RFM. Section 8 is useful as a quick reference for exact definition of specific words and expressions as they are used in this manual.

For those of you who “don’t read manuals”, go directly to section 2.3, initial setup, to set up your

molbox RFM. Then go to section 2.4, power up and verification. This will get you running quickly with minimal risk of causing damage to yourself or your molbox RFM. THEN… when you have questions or start to wonder about all the great features you might be missing, get into the manual!

HHIISS

AANNUUAAL

2. Section 3 provides a comprehensive description of general remote operation from an external computer. Section 5

Manual Conventions

it to

(CAUTION) is used in throughout the manual to identify user warnings and cautions.

(NOTE) is used throughout the manual to identify operating and applications advice and

additional explanations.

[ ] indicates direct function keys (e.g., [RANGE]).

< > indicates molbox RFM screen displays (e.g., <1yes>).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

OOTTEES

1. INTRODUCTION

11.

NNTTRROODDUUCCTTIIOON

1.1 PRODUCT OVERVIEW

molbox RFM is a support unit for making low mass flow measurements using molbloc mass flow elements. molbox RFM reads calibration data off the molbloc EEPROM and measures molbloc upstream and downstream pressure using built-in high accuracy Reference Pressure Transducers (RPTs). An ohmic measurement system reads the resistance of the molbloc platinum resistance thermometers from which molbloc temperature is calculated. Using the molbloc calibration data, pressures, temperature and gas properties stored in memory, the flow rate of the gas flowing through the molbloc is calculated. A microrange option is available to increase resolution and accuracy below 10 % FS of the molbloc-L flow range.

Internal molbox RFM valving supports on-board PRESSURE TRANSDUCER TARING, LEAK TESTING and SELF PROTECTION functions as well as a gas purge routine.

molbox RFM provides a local user interface via a front panel key pad and display and includes advanced on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.

molbox RFM is intended for applications in which a highly compact presentation, high range ability and lower cost are the primary considerations. A second model, molbox1, is available for applications where higher accuracy is the most important requirement.

1.1.1 MOLBLOC FLOW ELEMENTS

Two different types of molblocs may be used with molbox RFM; molbloc-L (laminar) and molbloc-S (sonic).

1.1.1.1 MOLBLOC-L FLOW ELEMENT

molbloc-L is the original molbloc laminar flow element. molbloc-L covers the lower portion of the molbloc/molbox system flow range. The key molbloc-L measurement is the differential pressure across the element, which is roughly proportional to the mass flow rate through it. molbloc-L elements are calibrated to be used at an absolute pressure that remains nearly constant, while the differential pressure varies with flow rate. Different operating pressure options and their effect on molbloc flow range are described in Section 1.2.4.1.2.

1.1.1.2 MOLBLOC-S FLOW ELEMENT

molbloc-S elements use critical (sonic) flow venturi nozzle technology to measure flows, which overlap with the higher molbloc-L ranges and extend the high end of the molbloc/molbox RFM system flow range. The mass flow rate through a molbloc-S element is roughly proportional to the upstream absolute pressure when the flow is “choked”, so the molbloc-S operating pressure can vary widely as the mass flow rate is changed throughout the flow range. The limits of molbloc-S operating pressure and flow ranges are defined by the molbloc-S calibration type, described in Section 1.2.4.2.2.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2 SPECIFICATIONS

1.2.1 GENERAL SPECIFICATIONS

Power Requirements

Fuse

Operating Temperature Range

Storage Temperature Range

Vibration

Weight

Dimensions

Microprocessor

Communication Ports

Reference Pressure Transducers

(RPTs)

Ohmic Measurement System

Gases Supported

Pressure Connections

Pressure Limits

Flow Ranges

CE Conformance

85 to 264 VAC, 47 to 440 Hz, 18 VA max. consumption 1A/250V, slow blow, 5x20mm, NSN: 5920008930491 15 to 35 °C

-20 to 70 °C Meets MIL-T-28800D

2.55 kg (5.6 lb) max. 8 cm H x 22.5 cm W x 20 cm D

(3.1 in. x 8.9 in. x 7.9 in.) approx. Motorola 68302, 16 MHz

RS232 (COM1), RS232 (COM2), IEEE-488 Standard: 2 x 600 kPa (87 psia) calibrated range piezoresistive silicon

Microrange option: 12.5 kPa (1.8 psid) piezoresistive silicon Resolution: 0.004 Ω

Accuracy: ± 0.02 % of reading Accuracy of 100 and 110 Ω reference resistors: ± 0.01 % Stability of 100 and 110 Ω reference resistors: ± 0.005 % per three years With molbloc-L Nitrogen (N2), Air, Argon (Ar), Butane (Butn), Carbon

Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Octofluorocyclobutane (C4F8), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe)

With molbloc-S Nitrogen (N2), Air (dry and humid) Quick connectors equivalent to Swagelok QM Series (-QM2-B200)

Maximum working pressure 600 kPa absolute (87 psia) Maximum pressure without damage 800 kPa absolute (115 psia) NOTE: The microrange option includes a 12.5 kPa (1.8 psi) differential

RPT which may be damaged by differential pressure greater than 100 kPa (15 psi).

See Sections 1.2.4.1.3, 1.2.4.1.4and 1.2.4.2.1 Available. Must be specified.

1.2.2 REFERENCE PRESSURE TRANSDUCER (RPT) SPECIFICATIONS

1.2.2.1 UPSTREAM AND DOWNSTREAM RPTS

Type

Range

Resolution

Repeatability

Accuracy

Piezoresistive silicon 0 to 600 kPa absolute (0 to 87 psia)

6.0 Pa (0.0009 psi) ± 0.01 % FS Absolute measurements: ± 0.05 % FS for one year

Differential measurements: ± (20 Pa + 0.05 % ΔΡ). Taring sequence eliminates zero error on measurement of difference between the two RPTs.

1. INTRODUCTION

1.2.2.2 DIFFERENTIAL RPT (MICRORANGE OPTION)

Type

Range

Resolution

Repeatability

Accuracy

Piezoresistive silicon 0 to 12.5 kPa differential (0 to 1.8 psid)

0.14 Pa (0.00002 psi)

± 0.01 % FS ± 0.05 % FS for one year. Taring sequence eliminates zero error.

1.2.3 TEMPERATURE MEASUREMENT SPECIFICATIONS

Specifications are for molbloc mounted Platinum Resistance Thermometers (PRT) combined with molbox RFM resistance measurement system and temperature calculation.

Range

Accuracy

Resolution

0 to 40 °C ± 0.05 °C

0.01 °C

The molbox RFM internal resistance measurement system is automatically calibrated using reference 100 and 110 Ω (± 0.01 %) resistors (see Section

5.3).

1.2.4 FLOW MEASUREMENT SPECIFICATIONS

molbox RFM measures the flow through molbloc flow elements. There are two different types of molblocs, molbloc-L (laminar) (see Section 1.1.1.1) and molbloc-S (sonic) (see Section 1.1.1.2). Flow measurement specifications, calibration types, ranges and dimensions are detailed separately for each molbloc type in Section 1.2.4.1 and 1.2.4.2.

1.2.4.1 molbloc-L

The flow range, useable operating pressure and absolute and differential pressure associated with molbloc-L operation depend on the molbloc used and its pressure-dependent calibration options (see Section

Measurement Update Rate

Range

Resolution

Linearity

Repeatability

Precision

Stability

(1 year)

Measurement Uncertainty

(1 year, N2 and any molbox RFM

supported gas for which the molbloc

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: aximum change in zero and span over specified time period for typical molbox RFM and

molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.

3 Measurement Uncertainty (Accuracy): Maximum deviation of the molbox RFM flow indication from

the true value of the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

in use is calibrated)

1 second 0 to molbloc full scale depending on gas and molbloc

pressure dependent calibration type (see Section 1.2.4.1.2).

0.01 % FS

± 0.23 % of reading from 10 to 100 % FS, ± 0.023 % FS under 10 % FS

± 0.1 of reading from 10 to 100 % FS, ± 0.01 % FS under 10 % FS

± 0.25 % of reading from 10 to 100 % FS, ± 0.025 % FS under 10 % FS

± 0.15 % of reading from 10 to 100 % FS, ± 0.015 % FS under 10 % FS

± 0.5 % of reading from 10 to 100 % FS, ± 0.05 % FS under 10 % FS

1.2.4.1.2).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.4.1.1 molbloc-L FLOW MEASUREMENT

SPECIFICATIONS, MICRORANGE OPTION

The microrange option (see Section 1.2.2.2) improves molbloc-L flow measurement specifications below 10 % FS of the molbloc range. With the microrange option, the affected measurement specifications below 10 % FS become:

Resolution

Linearity

Repeatability

Precision1

Stability

(1 year)

Measurement Uncertainty

(1 year, N2 and any molbox RFM

supported gas for which the molbloc in

use is calibrated)

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox RFM and

molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.

3 Measurement Uncertainty (Accuracy): Maximum deviation of the molbox RFM flow indication from

the true value of the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

0.01 % of 10 % FS (0.001 % FS)

± 0.23 % of reading from 1 to 10 % FS ± 0.1 % of reading from 1 to 10 % FS ± 0.25 % of reading from 1 to 10 % FS

± 0.15 % of reading from 1 to 10 % FS

± 0.5 % of reading from 1 to 10 % FS

1.2.4.1.2 molbloc-L PRESSURE DEPENDENT CALIBRATION

TYPES

See your molbloc’s Calibration Report to determine the calibration type of

the molbloc you are using.

Different pressure dependent calibration options for molbloc-L elements determine the range of operating pressures over which a molbloc can be used within its mass flow measurement specifications. The calibration option also affects the molbloc flow range and the differential pressure associated with the flow range.

Measurement uncertainty (accuracy) specifications for molbloc-L are valid only for gases with which the molbloc has been calibrated. All molbloc-L elements are calibrated for N2. Calibrations with other gases are optional. DHI calibration capability is not maintained at all times for all gases on all molbloc designations. Check for availability before ordering calibrations.

1. INTRODUCTION

The molbloc-L pressure dependent calibration types are summarized in Table 1.

Table 1. molbloc-L Pressure Dependent Calibration Types

CALIBRATION TYPE

Full mod, low pressure

Full mod, high pressure

Downstream

Single P, low pressure (non-N2 gases only )

Single P, high pressure (non-N2 gases only )

OPERATING PRESSURE

200 to 325 kPa absolute (29 to 48 psia) upstream of molbloc

325 to 525 kPa absolute (48 to 76 psia) upstream of molbloc

Atmospheric pressure (95 to 105 kPa, 13.8 to 15.2 psia) downstream of molbloc

Any specified single molbloc upstream pressure between 200 and 325 kPa absolute (29 to 48 psia)

Any specified single molbloc upstream pressure between 325 and 525 kPa absolute (48 to 76 psia)

NOMINAL DIFFERENTIAL

PRESSURE AT MAX. FLOW

1E5

MOLBLOC

5 kPa

(.725 psi)

Not available 50 kPa

12.5 kPa (1.8 psi)

5 kPa

(.725 psi)

Not available 50 kPa

ALL OTHER MOLBLOCS

50 kPa

(7.5 psi)

80 kPa

(12 psi)

50 kPa

(7.5 psi)

Differential pressure values are nominal and may vary by up to 15 % with the

actual molbloc used.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations

Table 2. molbloc-L Ranges with Low Pressure Calibrations

- full mod, low pressure

- full mod, downstream

- single P, low pressure

SIZE

Nitrogen N2 Argon Ar

Helium He Sulfur Hexafluoride SF6

INERT

Xenon XE

Butane C4H10

Ethane C2H6

Ethylene C2H4

Hydrogen H2

FLAMMABLE

Methane CH4

Propane C3H8

Carbon Tetrafluoride

Hexafluorethene C2F6

FLUORO-

CARBONS

Trifluoromethane CHF3

Air Air Carbon Dioxide CO2

Carbon Monoxide CO Nitrous Oxide N2O

OTHER

Octafluorocyclobutane

Oxygen O2

A bold value indicates that the maximum flow is limited by the maximum Reynolds number value of 1 200 which is reached before the normal differential pressure range is reached. In that case, the second value gives the minimum flow for which relative accuracy is ± 0.5 % of the measured value. With the microrange option, this value is divided by 10 (see Section

1.2.2.2). Where there is no value in the field (--), this indicates that the maximum Reynolds number is reached before the differential

pressure reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful. [1] Due to low vapor pressure, only downstream calibration type is available.

GASES

[1]

C4F8

CF4

SIZE

1E1

5E1

10 50 100 200 500 1 000 5 000 10 000 30 000 100 000 10 50 100 200 500 1 000 5 000 10 000 25 000 80 000

10 50 100 200 500 1 000 5 000 10 000 30 000 100 000 10 50 100 200 500 1 000

10 40 80 150 400 800

20 100

20 100 200 400 1

16 80 160 320 800 1 600

20 100 200 400 1

16 80 160 320 800 1 600 8 000 16 000

20 100 200 400 1

10 50 100 200 500 1 000

10 50 100 200 500 1 000 5 000 10 000 30 000 100 000 10 50 100 200 500 1 000 5 000 10 000

10 50 100 200 500 1 000 5 000 10 000 30 000 80 000

molbloc-L SIZE AND FULL SCALE FLOW (sccm)

SIZE

1E2

130

609 65

SIZE

2E2

270

130

5E2

670 140

000

330

SIZE

1E3

2 300

2 000

2 000 10

2 000

1 100

175

SIZE

5E3

2 000

500

3 500

500

2 200 1 400

6 000 1 000

7 000 1 000

000

3 000 1 000

4 000

600

2 000

600

4 000

600

1 050

840

SIZE

1E4

6 000 1 000

8 000

7 000 3 000

18 000

2 000

16 000

20 000 60 000 200 000

10 000

2 000

10 000

6 000 1 200

10 000

3 400 1 700

6 000 4 000

11 000

18 000

20 000

40 000

10 000

12 000

20 000

SIZE

3E4

3 000

---

6 000

5 000

7 000

3 000 6 000

4 000

--- ---

SIZE

1E5

---

30 000 20 000

---

60 000 50 000

70 000 40 000

120 000

40 000

---

36 000 25 000

---

38 000 30 000

60 000 30 000

1. INTRODUCTION

1.2.4.1.4 molbloc-L Ranges with High Pressure Calibrations

Table 3. molbloc-L Ranges with High Pressure Calibrations

- full mod, high pressure

- single P, high pressure

SIZE

GASES

Nitrogen N2

SIZE

1E1

5E1

20 100 200 400 1 000 2 000 10 000 20 000

molbloc-L SIZE AND FULL SCALE FLOW (sccm)

SIZE

1E2

2E2

SIZE

5E2

SIZE

1E3

SIZE

5E3

SIZE

1E4

SIZE

3E4

40 000

SIZE

1E5

N/A

7 500

Argon Ar

20 100 200 400 1 000 2 000 10 000 17 000

35 000

N/A

6 000

Helium He

INERT

Sulfur Hexafluoride SF6

Xenon XE

[2]

Butane

4H10

Ethane C2H6

Ethylene C2H4

Hydrogen H2 Methane CH4

FLAMMABLE

Propane C3H8

Carbon

CF4

Tetrafluoride Hexafluorethene C2F6

FLUORO-

CARBONS

Trifluoromethane CHF3

Air Air

20 100 200 400 1 000 2 000 10 000 20 000 65 000 N/A 25

100

120

20 100 150 350 650 1 700

250

* * * * * * * * * N/A

40 200

350

700 100

40 200 350 700 2 000 4 000

600 150

1 800

200

2 000

300

4 000

2 000 1 400

3 350

950

6 000 2 300

7 000 2 000

6 200 2 800

11 000

1 900

20 000

4 500

22 000

4 000

11 000

5 700

20 000 13 000

22 000 12 700

40 200 400 900 2 000 4 500 22 000 45 000 130 000 N/A 35 175 350 700 1 700 3 500

13 000

2 000

50 200

20 100 200 400 1 000 2 000

200

400 100

1 000

250

3 500

500

3 500 2 600

3 700 1 200

100

120

25 125

240

250

450

600 150

1 200

150

2 000

300

2 500

1 800 1 500

4 000 1 500

20 100 200 400 1 000 2 000 10 000 20 000

33 000 42 000

12 000

11 000

5 400

12 000

2 400 6 000

3 000

12 000

3 000

12 000

7 300

12 000

8 800

40 000

N/A

7 200

Carbon Dioxide CO2

Carbon Monoxide CO

25 125 250 500 1 250 2 500

6 600 1 400

20 000

2 500

20 000

8 800

20 100 200 400 1 000 2 000 10 000 20 000 40 000

N/A

7 500

OTHER

Oxygen O2

20 100 200 400 1 000 2 000 10 000 20 000

40 000

N/A

6 500

Octafluorocyclobutane

[2]

C4F8

Nitrous Oxide N2O

Where there is no value in the field (--), this indicates that the maximum Reynolds number is reached before the differential pressure reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful.

* * * * * * * * * N/A

25 125 250 500 1 250 2 500

11 000

1 500

20 000

3 000

20 000

9 000

N/A

[2] The operating pressure range is greater than the vapor pressure value for the gas.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.4.1.5 molbloc-L DIMENSIONS

5E3 AND LOWER 1E4, 3E4 1E5

58.50 (2.303) 74.50 (2.933) 74.50 (2.933)

16.00 (0.630) 24.00 (0.945) 24.00 (0.945)

32.00 (1.260) SQ 48.00 (1.890) SQ 48.00 (1.890) SQ

68.84 (2.750) 80.00 (3.150) 80.00 (3.150)

19.06 (0.750) 28.00 (1.102) 28.00 (1.102)

124.00 (4.881) 157.00 (6.181) 164.00 (6.458)

1/4 in. VCR M 1/4 in. VCR M 1/2 in. VCR M

molbloc-L SIZES [mm(in.)]

1. INTRODUCTION

1.2.4.2 molbloc-S

The flow range and operating pressure associated with molbloc-S operation depend on the molbloc used and its calibration options (see Section 1.2.4.2.2)

Measurement Update

Range

Resolution

Linearity

Repeatability

Precision

Predicted Stability

(1 year)

Measurement

Uncertainty

With SP molbloc-S

calibration

Measurement

Uncertainty

With LP molbloc-S

calibration

1 Precision: Combined linearity, hysteresis, repeatability.

2. Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox RFM should be established from experience.

3. Measurement uncertainty (accuracy): Maximum deviation of the molbox RFM flow indication from the true value of the flow through the molbloc including precision, stability and DHI calibration standard measurement uncertainty.

1 second

Rate

Depends on molbloc-S pressure dependent calibration type (see Section 1.2.4.2.2)

0.01 % of FS

± 0.25 % of reading ± 0.10 % of reading

± 0.30 % of reading

± 0.2 % of reading

± 0.5 % of reading from 50 to 500 kPa

± 0.5 % of reading from 50 to 200 kPa

± 0.5 % of 50 kPa flow from 20 to 50 kPa

1.2.4.2.1 molbloc-S RANGES

molbloc-S flow ranges are defined by the molbloc’s Pressure to Flow Conversion Ratio, K downstream pressure and the acceptable back pressure ratio (see Section

3.1.2). K

between mass flow and the absolute upstream pressure delivered to the molbloc-S. molbloc-S sizes are defined by the nominal K nozzle, using scientific notation, for example a 1E3 molbloc-S has a K sccm/kPa. To differentiate from molbloc-L size designations, this molbloc size is designated 1E3-S.

The molbox RFM pressure range, the molbloc-S calibration type (see Section

1.2.4.2.2) and the back pressure ratio (BPR) requirements (see Section 3.1.2)

limit the pressures, and flows, over which a molbloc-S can be used within known measurement uncertainty limits. In practice, the usable range of a molbloc-S in a given application also may depend on the available gas supply pressure, the presence and flow capacity of a vacuum pump downstream or the allowable back pressure on an upstream DUT.

The flow ranges for each molbloc-S size at various typical operating pressures are summarized in Table 4 and the BPR limits are in Table 5.

, the absolute pressure that can be delivered upstream of molbloc-S, the

is expressed in units of sccm/kPa and defines the relationship

of the molbloc-S

1 000

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

Table 4. molbloc-S Flow at Various molbloc Upstream Pressures

[1][2]

250 kPa

(36 psia)

500 kPa

(70 psia)

molbloc-S

DESIGNATO

5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

FLOW [slm @ 0°C] WHEN molbloc-S UPSTREAM PRESSURE IS:

[sccm/kPa]

20 kPa (3psia)

50 kPa

(7 psia)

100 kPa

(15 psia)

Minimum

without

vacuum

]

150 kPa

(22 psia)

200 kPa

(30 psia)

50 1 2.5 5 7.7 7.5 10 12.5 25 100 2 5 10 15 15 20 25 50 200 4 10 20 28 30 40 50 100 500 10 25 50 67 75 100 125 250

1 000 20 50 100 129 150 200 250 500 2 000 40 100 200 248 300 400 500 1 000 5 000 100 250 500 596 750 1 000 1 250 2500

10 000 200 500 1 000 1 173 1 500 2 000 2 500 5 000

[1] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values

will generally be higher; for example, the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm @ 20°C. Flow values at a given pressure may vary by up to

2% due to flowpath machining tolerances. [2] Flow values in table are valid only when critical flow is established. [3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures

molbloc-S

DESIGNATO

5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

250 kPa

(36

psia)

[1]

300 kPa

(44

psia)

MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH molbloc DOWNSTREAM PRESSURE OF:

≤ 5 kPa (0.7

psia)

1 2

4 10 20 40

100 200

kPa

(1.5

psia)

[2]

1.7 3.4 4.7 7.7 8.4 9.4 11 14 17 20

[2]

3.4 5.9 8.4 15 16 18 21 27 33 38

[2]

5.9 9.8 16 28 31 34 40 51 63 74

[2]

12 20 37 67 72 80 95 122 149 179

[2]

100

[2]

200

25 kPa (3.5

psia)

[2]

39 69 129 139 154 184 239 294 349

[2]

73 131 248 268 298 358 468 578 687

[2]

173 317 596 646 746 871 1 145 1 420 1 694

[2]

347 615 1 173 1 273 1 442 1 741 2 240 2 789 3 338

kPa

psia)

100

kPa

(15

psia)

110 kPa

(16

psia)

125 kPa

(18

psia)

150 kPa

(22

psia)

200

kPa

(30

psia)

[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, flow values

will generally be higher; for example, the flow values for a given molbloc and upstream pressure are approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to 2 % due to flowpath machining tolerances.

[2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio.

1. INTRODUCTION

1.2.4.2.2 molbloc-S PRESSURE DEPENDENT CALIBRATION TYPES

See your molbloc’s Calibration Report to determine the calibration type of

the molbloc you are using.

Measurement uncertainty (accuracy) specifications for molblocs are valid only for gases with which the molbloc has been calibrated. All molbloc-S elements are calibrated in one standard gas, either air or N2, and may be calibrated in other gases. Calibrations with other gases are optional. The set of gases which can be measured by molbloc-S is separate from the list of molbloc-L gases, and may be more limited. DHI calibration capability is not maintained at all times for all gases on all molbloc sizes. Check for availability before ordering calibrations.

molbloc-S calibrations are performed over flow ranges corresponding to one of two pressure ranges, summarized in Table 6.

Table 6. molbloc-S Calibration Types

CALIBRATION TYPE

LP low pressure

SP standard pressure

OPERATING PRESSURE

20 to 200 kPa absolute (3 to 30 psia upstream of molbloc

50 to 500 kPa absolute (7 to 70 psia) upstream of molbloc

molbloc-S flow measurements are valid only when the ratio of pressure

downstream to pressure upstream of the nozzle is high enough to assure a critical (choked) flow (see Section 3.1.2).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.4.2.3 molbloc-S Dimensions

5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

48.0 (1.89) SQ 48.0 (1.89)SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 80.0 (3.15) SQ 80.0 (3.15) SQ

24.0 (0.94) 24.0 (0.94) 24.0 (0.94) 24.0 (0.94) 24.0 (0.94) 24.0 (0.94) 40.0 (1.57) 40.0 (1.57)

48.0 (1.89) SQ 48.0 (1.89)SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 48.0 (1.89) SQ 80.0 (3.15) SQ 80.0 (3.15) SQ

80.0 (3.15) 80.0 (3.15) 80.0 (3.15) 80.0 (3.15) 80.0 (3.15) 80.0 (3.15) 176.0 (6.93) 176.0 (6.93)

28.0 (1.10) 28.0 (1.10) 28.0 (1.10) 28.0 (1.10) 28.0 (1.10) 28.0 (1.10) 44.0 (1.73) 44.0 (1.73)

167.5 (6.59) 167.5 (6.59) 171.0 (6.73) 171.0 (6.73) 171.0 (6.73) 175.0 (6.89)

KF16 FLANGE KF16 FLANGE KF16 FLANGE KF16 FLANGE KF16 FLANGE KF16 FLANGE KF40 FLANGE KF40 FLANGE

100.0 (3.94) 100.0 (3.94) 84.0 (3.31) 84.0 (3.31) 84.0 (3.31) 84.0 (3.31) 154.0 (6.06) 154.0 (6.06)

128.0 (5.04) 128.0 (5.04) 128.0 (5.35) 128.0 (5.35) 128.0 (5.35) 128.0 (5.35) 236.0 (9.29) 236.0 (9.29)

73.0 (2.87) 73.0 (2.87) 73.0 (2.87) 73.0 (2.87) 73.0 (2.87) 73.0 (2.87) 106.0 (4.17) 106.0 (4.17)

167.5 (6.59) 167.5 (6.59) 171.0 (6.73) 171.0 (6.73) 171.0 (6.73) 171.0 (6.73) 290.0 (11.42) 290.0 (11.42)

K L

¼” VCR M

[2]

¼” VCR M

[2]

½” VCR M

molbloc-S SIZE [mm(in.)]

[2]

½” VCR M

[2]

½” VCR M

[2]

½” VCR M

[1]

299.7 (11.80)

[2]

1” NPT M

[1]

331.0 (13.03)

[2]

1” NPT M

[1] On some molbloc-S elements,

the venturi nozzle extends beyond the molbloc downstream flange, making the overall length dimension, F, longer than the fitting to fitting length dimension, K.The nozzle overhang may interfere with some molbloc-S downstream connections or the connection of a blank off cap for leak testing, so a 40 mm diameter ISO-KF nipple is supplied with 5E3-S and 1E4S molblocs.

[2] Default connector type is

listed. Additional upstream connector options may be available. Contact your DHI Sales Representative for details.

[1]

[2]

1. INTRODUCTION

1.2.5 FRONT AND REAR PANELS

1.2.5.1 FRONT PANEL

The front panel assembly provides a 2 x 20 vacuum fluorescent display, a membrane keypad for local user interface and a SOFT ON/OFF key.

1. Display

2. Multi-function Keypad P

3. Remote Communication Indicator

4. SOFT ON/OFF Key and Indicator

Figure 1. molbox RFM Front Panel

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.5.2 REAR PANEL

The rear panel assembly provides pressure and electrical connections to a molbloc mass flow element, communications interfaces and the power connection module.

1. Quick connectors to molbloc pressure connections (color coded)

2. Electrical power connector (IEC320-313)

3. IEEE-488 (GPIB) connector for host communications

4. COM1 (RS232) connector for host communications

5. Electrical connection to molbloc

6. COM2 (RS232) connector for communications with an external device

7. Product label (on bottom of case)

Figure 2. molbox RFM Rear Panel

22.

NNSSTTAALLLLAATTIIOON

2.1 UNPACKING AND INSPECTION

2.1.1 REMOVING FROM PACKAGING

molbox RFM is delivered, along with its standard accessories, in a corrugated container with polyurethane inserts to hold it in place.

Remove the molbox RFM and its accessories from the shipping container and remove each element from its protective plastic bag.

2.1.2 INSPECTING CONTENTS

Check that all items are present and have NO visible damage. A molbox RFM includes:

2. INSTALLATION

Table 7. molbox RFM Parts List

DESCRIPTION PART #

molbox RFM Reference Flow Monitor FAM0005 Report of Calibration 550100

ACCESSORIES, INCLUDING:

1 Operation and Maintenance Manual 550107 1 Power Cord (7.5 ft.) 100770 1 Set of (2) molbox to molbloc pressure connecting

tubes

1 molbox to molbloc electrical/data connection

cable 2 straight through quick connector stem 101889* 1 General Accessories CD (white)

(Important: Includes system support software

and documentation.)

* Equivalent to Swagelok P/N SS-QM2-S-200

2.2 SITE REQUIREMENTS

Install molbox RFM on any stable surface at a convenient height. The front feet are extendible so that the unit can be inclined for easier viewing.

The molbox RFM can also be mounted in a standard 19-in. rack mount using the optional rack mount kit (P/N 401465). For additional information, contact your DHI Sales Representative.

401125

102096

102987

When installing molbox RFM, consideration should be given to where the molbloc flow measuring element and associated hardware will be located. molbox RFM may be placed on a shelf or cart at a different height than the molbloc, but the distance between the molbloc and molbox is limited by the length of the cable and pneumatic lines connecting them. If you will locate the molbox at a different height than the molbloc, the small errors that would be associated with the difference in pressure can be removed using the molbox RFM head correction (see Section 3.6.8).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

If the molbloc/molbox system is being used to calibrate other devices (DUTs), the molbloc may need to be connected upstream or downstream of the DUT to operate within the pressure limits of the molbloc’s calibration type (see Sections 1.2.4.1.2, 2.2.4.2.2) and to accommodate the pressure requirements of the DUT. Se e th e mo lb lo c’ s Ca l ib ra ti on R eport to determine the calibration type of the molbloc you are using.

If the molbloc is connected upstream of the DUT, it is important to supply the molbloc with a stable regulated gas source. The volume present between the molbloc and the device to be calibrated should be minimized for low flows.

In some cases, molbloc-S is used with a vacuum source downstream to reduce the pressure at w h i c h critical flow is reached. Consider the placement of the vacuum pump and connections. Generally, a large vacu u m p u m p i s needed that should be isolated from the work area due to noise and oil vapor considerations. If the vacuum pump and/or vacuum kit was purchased from DHI, see the instruction sheets and/or manuals that are included with the hardware.

Optional molstics are offered for mounting molblocs. They provide a convenient means of addressing supply regulation, filtering and interconnection issues with high quality, configured hardware. For additional information, contact your DHI Representative.

If a DUT is located upstream of the molbloc and is contaminated, contaminates may flow

from the DUT to the molbloc and alter the molbloc calibration. If the DUT must be connected upstream of the molbloc, be sure it is clean before flowing and consider installing a filter between the DUT and the molbloc.

2.3 INITIAL SETUP

2.3.1 PREPARING FOR OPERATION

To prepare molbox RFM for check out and operation:

n Remove the plastic caps from the molbox RFM rear panel pressure connections. o Remove the protective plastic sheet from the front panel display. p Familiarize yourself briefly with the front and rear panels (see Section 1.2.5).

Follow the steps described in Sections 2.3.1 to 2.3.6

2.3.2 POWER CONNECTION

Connect the power cable supplied to molbox RFM and to a power source. Power requirements are 85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption.

molbox RFM is always powered and active when power is supplied through the rear panel

power connector. The front panel ON/OFF key controls a SOFT ON/OFF (see Section 3.3.3).

2.3.3 MOLBOX RFM TO MOLBLOC CONNECTION

There are two pressure connections (upstream and downstream) and one electrical/data connection between molbox RFM and a molbloc.

For the pressure connections, use the molbox RFM to molbloc pressure tubes (P/N 401125) supplied with the molbox RFM. Following the color coding on the pressure lines, connect the upstream (HI) molbox RFM rear panel quick connector to the upstream port of the molbloc and the downstream (LO) quick connector to the downstream port. Push firmly on the quick connectors until they click into place to assure that the connection is properly completed.

2. INSTALLATION

For the electrical/data connection, use the molbox to molbloc electrical/data connection cable (P/N 102096). Connect the cable to the molbloc and then to molbox RFM rear panel connector labeled “molbloc”.

Avoid making molbloc electrical connections to molblocs while molbox RFM is plugged in.

Damage to the molbloc EEPROM may result (see Section 5.5.5)

2.3.4 GAS SUPPLY AND FLOWPATH CONNECTIONS

Connect a gas supply to the molbloc. Gas supply requirements are:

• The gas supply must be clean and dry (especially free from oil and particulates) to avoid contaminating the molbloc.

• For correct measurements, the gas must be of the same species as that selected by the molbox RFM GAS function (see Section 3.4.2). Gas purity affects the measurement uncertainty of flow measurements as molbox RFM uses the thermodynamic properties of the flowing gas in its flow calculations. Generally, gases with purity of 99.9 % or better are used for molbloc measurements. Except when using ambient air with molbloc-S, the test gas should be free of any humidity (dew point less than – 40 °C).

• If the molbloc is connected upstream of the DUT, the supply pressure must be regulated and stable within the limits of the molbloc-L pressure dependent calibration type (see Section connected downstream of the DUT, use regulators and

1.2.4.1.2) or molbloc-S calibration type (see section 1.2.4.2.2). If the molbloc is valves to make sure that the

pressure that is delivered to the molbloc will be within the limits of the molbloc calibration type.

• Care should also be taken to make sure that the pressure and flow supplied to the molbloc are always low enough to avoid over pressuring the molbox RFM RPTs (see Sections 1.2.2, 3.1.6). If a DUT upstream of the molbloc is operated at high pressure, a pressure reducing regulator should be connected between the DUT and the molbloc to ensure that even momentary high pressure spikes do not reach the molbox RPTs.

The gas supplied to the molbloc should be clean and dry. Contamination of the molbloc

flow passage with liquids, particulates or any other matter will alter the molbloc calibration and can lead to out of tolerance flow measurements.

NEVER connect a pressure source to the molbloc that is greater than the overpressure

limit of your molbox RFM. molbox RFM overpressure limit is 660 kPa absolute/560 kPa gauge (95 psia/80 psig). Overpressure can damage the molbox RFM internal RPTs (see Section 1.2.2, 3.1.6).

If you are using a DHI molstic: Install the molbloc into the molstic and connect a gas supply following the molstic instruction sheet or manual. The flow through the molbloc must be in the direction of the arrow engraved on the molbloc.

If you are NOT using a DHI molstic: Connect a gas supply to the molbloc according to the molbloc instruction sheet and the pressure limits of the molbloc calibration type. A valve should be installed between the pressure supply and the molbloc to allow flow to the molbloc to be interrupted. The flow through the molbloc must be in the direction of the arrow engraved on the molbloc.

Adaptor kits are available from DHI to make connections from the molbloc or molstic fittings to other common connector types. Ask you DHI Sales Representative about your specific adaptor requirements.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

Operating at pressures other than those of the molbloc-L pressure dependent calibration type

(see Section 1.2.4.1.2) or molbloc-S calibration type (see Section 1.2.4.2.2) may result in out of tolerance flow measurements. Refer to the molbloc Calibration Report to determine its calibration type.

2.3.5 VACUUM SUPPLY (molbloc-S ONLY)

In some cases molbloc-S is operated with a vacuum downstream of the molbloc to reduce the back pressure so that critical flow can be reached at a lower upstream pressure (see Section 3.1.2).

There is no lower limit to the pressure that may safely be applied to molbox RFM RPTs. If you are using DHI supplied downstream vacuum connect kit and vacuum pump:

Install the kit and pump following the supplied instruction sheet or manual. Carefully follow the pump manufacturer’s recommendations for pump operation.

If you are NOT using DHI supplied downstream vacuum connect kit and vacuum pump: Carefully evaluate vacuum pump specifications to be sure that the vacuum source

available has the pumping speed necessary to safely handle the planned flows and to maintain low enough pressure at planned flow rates.

Be sure to provide facilities to avoid flowing into the pump when the pump is not ON as this will cause pressure to build up on the pump and may damage it. Normally, a shut-off valve should be included between the pump and the molbloc-S.

It is preferable to install a check valve with very low cracking pressure between the molbloc and the vacuum shut-off valve.

Operating at pressures other than those of the molbloc-S calibration type may result in

out of tolerance flow measurements (see Section 1.2.4.2.2). Refer to the molbloc Calibration Report to determine its calibration type.

2.3.6 COMMUNICATIONS CONNECTIONS

If molbox RFM is being interfaced to a computer, connect an RS232 cable to molbox RFM COM1 or an IEEE-488 cable (cables not supplied) to the molbox RFM IEEE-488 interface. Configure the interface (see Section

3.6.6).

2.4 POWER UP AND VERIFICATION

2.4.1 POWER UP

Connect the molbox RFM power cable to an electric supply of 85 to 264 VAC (47 to 440 Hz). Observe the front panel display as molbox RFM initializes, error checks, calibrates its internal ohmic measurement system and goes to the main run screen (see Section 3.2). The top left side of the main run screen should display a flow value near zero or <BPR HI>. If <NO BLOC> is displayed, molbox RFM has not been able to identify a molbloc connection and load molbloc information. Verify that a valid molbloc is properly connected (see Section

2.3.3) and press [SETUP], <4molbloc> to load the molbloc data. If molbox RFM is still

unable to identify a molbloc, the molbloc may require reloading of EEPROM information or molbox RFM may require repair.

2. INSTALLATION

If the molbox RFM fails to reach the main run screen: Service may be required. Record

the sequence of operations and displays observed and contact a DHI Authorized Service Provider (see Section 7.2).

molbox RFM is always powered and active when power is supplied through the rear panel

power connector. The front panel ON/OFF key controls a SOFT ON/OFF only (see Section

3.1.4).

2.4.2 CHECK PROPER PRESSURE MEASUREMENT OPERATION

Check that the molbox RFM pressure measurements are operating properly. Proceed as follows:

n Connect the molbloc to the molbox RFM (see Section o Shut off the gas supply to the molbloc and open one or

2.3.3). both molbloc ends to atmospheric

(ambient) pressure.

p Press [P&T] and observe the display of the pressure measured by the upstream and

downstream absolute RPTs. Observe the upstream and downstream pressures (see Section 3.4.5). These should indicate current atmospheric pressure and be in agreement within ± 0.5 kPa (0.1 psi). If the two readings disagree by more than ± 0.5 kPa (0.1 psi), one or both RPTs may be out of calibration and service may be required. A difference in the RPT readings could also indicate that there is some flow through the molbloc. Check the flowpath valve or disconnect the molbloc to ensure that there is actually no flow.

q If the molbox RFM is equipped with the microrange option, and the option is currently

active, the bottom line left side of the display is <mDP>. Observe the differential pressure value following this indication (see Section 3.4.5). It should be 0, ± 50 Pa (0.004 psi). If the indication is different from zero by more than ± 50 Pa (0.004 psi), the microrange differential RPT may be out of calibration and service may be required. Again, a non-zero differential pressure could indicate an unexpected flow through the molbloc.

r Press [ESCAPE] to return to the main run screen.

2.4.3 CHECK PROPER TEMPERATURE MEASUREMENT OPERATION

Check that the molbox RFM temperature measurement is operating properly. Proceed as follows:

n Connect a molbloc to the molbox RFM (see Section o From the molbox RFM main run

screen, press [P&T] twice to arrive at the temperature

2.3.3).

display screen. Observe the temperature readings of the two molbloc PRTs (see Section 3.4.5). If the molbloc has been in a stable temperature environment for 30 to 60 minutes, the temperature indications should be roughly ambient temperature and the two indications should agree within ± 0.2 °C. If the two readings disagree more than ± 0.2 °C, there may be a problem with the molbloc or the molbox RFM TEMPERATURE MEASUREMENT function and service may be required.

2.4.4 LEAK CHECK

It is recommended that a new molbox RFM be leak checked at start-up to assure that no internal leaks developed during shipping and handling. Run the molbox RFM on-board INTERNAL LEAK CHECKING function (see Section 3.4.5).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

2.4.5 CHECK/SET SECURITY LEVEL

molbox RFM has a security system based on user levels. By default, the security system is set to “low”, which includes certain access restrictions, and there is no password required to change the security level (see Sections 3.6.2). As part of the molbox RFM startup, set your desired security level and a password.

molbox RFM is delivered with the security level set at low to avoid inadvertent altering of

critical internal settings but with access to changing security levels unrestricted. It is recommended that the low security level be maintained at all times and password protection be implemented if control over setting of security levels is desired.

2.5 ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING FLOW MEASUREMENTS

Before using molbox RFM to make meaningful flow measurements, consider the following:

• Be sure that the gas pressure connected to the molbloc is not great enough to overpressure the

molbox RFM internal RPTs.

• For molbloc-L operation, the pressure measuring RPTs should be tared at the operating line pressure

(see Section 3.4.4.1).

• Operating pressure should be within the limits of the molbloc calibration type (see Sections 1.2.4.1.2.

and 1.2.4.2.2).

• The gas type selected should be the gas flowing through the molbloc (see Section 3.4.2).

• For best accuracy, the gas type should be a gas with which molbloc has been calibrated. See the

molbloc Calibration Report or press [SETUP], <4molbloc>, [ENTER] to see if the gas is included in the molbloc calibration gas list (see Section 3.5.4).

• Do not supply a gas or connect a device under test upstream of the molbloc that may contaminate

the molbloc.

• Be sure the flow unit of measure you are using is correct. Many different types of flow units of

measure are commonly used. Before selecting a unit of measure, familiarize yourself with Section

3.4.3 thoroughly.

• Troubleshooting: For information on typically encountered start-up and operational issues, see

Section 6.

2.6 SHORT TERM STORAGE

The following is recommended for short term storage of molbox RFM:

• Vent the molbox RFM pressure ports.

• Disconnect the power supply.

When molbox RFM will NOT be used for some time, it may be left powered. Use the SOFT ON/OFF key to turn OFF the display.

+ 142 hidden pages

Fluke MOLBOX RFM User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

TABLE OF CONTENTS

ABOUT THIS MANUAL

1. INTRODUCTION

1.1 PRODUCT OVERVIEW

1.1.1 MOLBLOC FLOW ELEMENTS

1.1.1.1 MOLBLOC-L FLOW ELEMENT

1.1.1.2 MOLBLOC-S FLOW ELEMENT

1.2 SPECIFICATIONS

1.2.1 GENERAL SPECIFICATIONS

1.2.2 REFERENCE PRESSURE TRANSDUCER (RPT) SPECIFICATIONS

1.2.2.1 UPSTREAM AND DOWNSTREAM RPTS

1.2.2.2 DIFFERENTIAL RPT (MICRORANGE OPTION)

1.2.3 TEMPERATURE MEASUREMENT SPECIFICATIONS

1.2.4 FLOW MEASUREMENT SPECIFICATIONS

1.2.4.1 molbloc-L

1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations

1.2.4.1.4 molbloc-L Ranges with High Pressure Calibrations

1.2.4.1.5 molbloc-L DIMENSIONS

1.2.4.2 molbloc-S

1.2.4.2.1 molbloc-S RANGES

1.2.5 FRONT AND REAR PANELS

1.2.5.1 FRONT PANEL

1.2.5.2 REAR PANEL

2.1 UNPACKING AND INSPECTION

2.1.1 REMOVING FROM PACKAGING

2.1.2 INSPECTING CONTENTS

2. INSTALLATION

2.2 SITE REQUIREMENTS

2.3 INITIAL SETUP

2.3.1 PREPARING FOR OPERATION

2.3.2 POWER CONNECTION

2.3.3 MOLBOX RFM TO MOLBLOC CONNECTION

2.3.4 GAS SUPPLY AND FLOWPATH CONNECTIONS

2.3.5 VACUUM SUPPLY (molbloc-S ONLY)

2.3.6 COMMUNICATIONS CONNECTIONS

2.4 POWER UP AND VERIFICATION

2.4.1 POWER UP

2.4.2 CHECK PROPER PRESSURE MEASUREMENT OPERATION

2.4.3 CHECK PROPER TEMPERATURE MEASUREMENT OPERATION

2.4.4 LEAK CHECK

2.4.5 CHECK/SET SECURITY LEVEL

2.5 ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING FLOW MEASUREMENTS

2.6 SHORT TERM STORAGE