Fluke molbox RFM Operating Manual

molbox™ RFM™

Reference

Flow Monitor

(Ver 1.20 and Higher)

Operation and Maintenance Manual

 Warning

High pressure liquids and gases are potentially hazardous. Energy stored in these liquids and gases can be released unexpectedly and with extreme force. High pressure systems should be assembled and operated only by personnel who have

Information in this document i s subject to change without not i ce. No part of this docum ent may be reproduced or transmit ted in any form or by any means, elect ronic or mechanical, for any purpose, without the express writt en permission of Fluke Calibration,

4765 East Beautiful Lane, Phoenix, Arizona 85044-5318 USA.

Fluke Calibration makes sincere efforts to ensure the accuracy and quality of its published materials; however, no warranty,

expressed or implied, is provided. Fl uke Calibration disclaims any respons ibility or liability for any direct or indirect damages resulting from the use of the inform ation in this manual or products described in it. Mention of any product or brand does not constitute an endorsem ent by Fluke Calibration of that product or brand. This manual was original ly composed in English and was subsequently translated into ot her languages. The fi delit y of the t ransl ation c annot be guarant eed. I n cas e of confl ict between the English version and other language versions, the English version predom i nates.

Products described in thi s manual are manufactured under int ernational patents and one or more of the f ollowing U.S. patents: 5,142,483, 5,257,640, 5,331,838, 5,445,035. Other U.S. and international patents pending.

been instructed in proper safety practices.

Fluke Calibration, FCAL, DH, DHI, molbox, molbox RFM , molbox1, molbox1+, molbloc, molbloc-L, molbloc-S, molstic, COMPASS, CalTool are tradem ark s, registered and otherwise, of Fluke Corporation.

LabVIEW is registered trademark of National Ins truments Corporation. Swagelok is a regis t ered trademark of the Swagelok Com pany.

Document No. 3152156 101115 Printed in the USA.

Tables

Table 1. molbloc-L Pressure Dependent Calibration Types ......................................................................... 6

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations ............................................ 7

Table 3. molbloc-L Ranges with High Pressure Calibrations ....................................................................... 8

Table 4: molbloc-S Calibration Types ......................................................................................................... 11

Table 5: N2. molbloc-S Flow in Nitrogen at Various molbloc Upstream Pressures ................................... 12

Table 6: Ar. molbloc-S Flow in Argon at Various molbloc Upstream Pressures ........................................ 12

Table 7: He. molbloc-S Flow in Helium at Various molbloc Upstream Pressures ..................................... 13

Table 8: SF6. molbloc-S Flow in Sulfur Hexafluoride at Various molbloc Upstream Pressures ................ 13

Table 9: Xe. molbloc-S Flow in Xenon at Various molbloc Upstream Pressures ...................................... 14

Table 10: C4H10. molbloc-S Flow in Butane at Various molbloc Upstream Pressures ............................. 14

Table 11: C2H6. molbloc-S Flow in Ethane at Various molbloc Upstream Pressures ............................... 15

Table 12: C2H4. molbloc-S Flow in Ethylene at Various molbloc Upstream Pressures ............................ 15

Table 13: H2. molbloc-S Flow in Hydrogen at Various molbloc Upstream Pressures ............................... 16

Table 14: CH4. molbloc-S Flow in Methane at Various molbloc Upstream Pressures .............................. 16

Table 15: C3H8. molbloc-S Flow in Propane at Various molbloc Upstream Pressures ............................ 17

Table 16: CF4. molbloc-S Flow in Carbon Tetrafluoride at Various molbloc Upstream Pressures ........... 17

Table 17: C2F6. molbloc-S Flow in Hexafluoroethene at Various molbloc Upstream Pressures .............. 18

Table 18: CHF3. molbloc-S Flow in Trifluoromethane at Various molbloc Upstream Pressures .............. 18

Table 19: Air. molbloc-S Flow in Air at Various molbloc Upstream Pressures .......................................... 19

Table 20: CO2. molbloc-S Flow in Carbon Dioxide at Various molbloc Upstream Pressures ................... 19

Table 21: CO. molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures ................. 20

Table 22: N2O. molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures ...................... 20

Table 23: C4F8. molbloc-S Flow in Octafluorocyclobutane1 at Various molbloc Upstream Pressures ..... 21

Table 24: O2. molbloc-S Flow in Oxygen at Various molbloc Upstream Pressures .................................. 21

Table 25. molbox RFM Parts List ............................................................................................................... 25

Table 26: Minimum molbloc-S Critical Flow (slm) in Nitrogen at Various

molbloc-S Downstream Pressures .......................................................................................... 34

Table 27. Summary of molbox RFM Direct Function Key Operations ....................................................... 42

Table 28. Available molbloc-L Gases ......................................................................................................... 45

Table 29. Available Flow Units ................................................................................................................... 52

Table 30. Flow Units and Corresponding Total Mass or Volume Units ...................................................... 80

Table 31. molbloc-L Size and Nominal Range Designations ..................................................................... 85

Table 32. molbloc-S Size Designation and Pressure to Flow Conversion Ratio (KF) ................................. 86

Table 33. Pressure Units of Measure Available ......................................................................................... 88

Table 34. Security Levels - Functions NOT Executed Per Function/Level ................................................ 96

Table 35. Security Levels - Functions NOT Executed Per Function/Level (Continued) ............................. 97

Table 36. COM1 and COM2 Available Settings ....................................................................................... 103

Table 37. COM1 DB-9F Pin Designation ................................................................................................. 112

Table 38. COM2 DB-9M Pin Designation ................................................................................................. 113

Table 39. Command Summary ................................................................................................................ 114

Table 40. Error Messages ........................................................................................................................ 116

Table 41. Status Byte Register ................................................................................................................. 147

Table 42. Standard Event Register .......................................................................................................... 149

Table 43. Troubleshooting Checklist ........................................................................................................ 167

ABOUT THIS MANUAL

Table 44. Pressure Unit Conversions ...................................................................................................... 173

Table 45. Temperature Unit Conversion .................................................................................................. 173

Table 46. Conversions From kg/s To sccm At 0 °C For Various Gases .................................................. 174

Table 47. Conversions From sccm At 0 °C To Other Volumetrically Based Flow Units .......................... 174

Table 48. Conversions From Volumetrically Based Flow Units At 0 °C To Corresponding Units

At Another Temperature (uxxx) ............................................................................................. 175

Table 49. Conversions From kg/s To mole/s For Various Gases ............................................................ 175

Table 50. Conversion From mole/s To pccm ........................................................................................... 176

Table 51. Conversion From sccm At 0 °C to Volume Flow Units At Another Pressure

And Temperature ................................................................................................................... 176

Table 52. Fluke Calibration Authorized Service Providers ....................................................................... 178

Figures

Figure 1. molbloc-L Upstream End Flange with Integrated Filter ................................................................. 2

Figure 2. molbox RFM Front Panel ............................................................................................................ 24

Figure 3. molbox RFM Rear Panel ............................................................................................................. 24

Figure 4. molbox RFM Internal Pneumatic Schematic – ............................................................................ 36

Figure 5. Keypad Layout ............................................................................................................................ 40

Figure 6. molbox RFM Internal Pneumatic Schematic – TARING,

UPSTREAM molbloc-L OPERATION ...................................................................................... 55

Figure 7. molbox RFM Internal Pneumatic Schematic – TARING molbloc-S OPERATION ...................... 58

Figure 8. molbox RFM Internal Pneumatic Schematic – PURGING .......................................................... 59

Figure 9. molbox RFM Internal Pneumatic Schematic – LEAK CHECK molbox ....................................... 62

Figure 10. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –

CHECKING OFFSET AND STABILITY molbloc-L operation .................................................. 64

Figure 11. molbox RFM Internal Pneumatic Schematic – SYSTEM LEAK CHECK –

CHECKING OFFSET AND STABILITY molbloc-S operation .................................................. 66

Figure 12. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR ON ................ 107

Figure 13. molbox RFM Internal Pneumatic Schematic – molbloc-S OPERATION, BPR OFF ............... 107

Figure 14. Status Byte Register ............................................................................................................... 148

Figure 15. molbox RFM Internal Pneumatic Schematic – RUN UPSTREAM OR DOWNSTREAM

ABSOLUTE RPT CALIBRATION .......................................................................................... 157

Figure 16. molbox RFM Internal Pneumatic Schematic – RUN MICRORANGE DIFFERENTIAL

RPT CALIBRATION............................................................................................................... 158

Figure 17. molbox RFM Internal View ...................................................................................................... 164

Figure 18. molbox RFM Valving Assembly Schematic ............................................................................ 166

ABOUT THIS MANUAL

Notes

About This Manual

This manual provides the user with the infor mation necessary to operate a molbox RFM, Referenc e Flow Monitor. It also includes a great deal of additional information provided to help you optimize molbox RFM use and take full advantage of its many features and functions.

Before using the m anual, tak e a m om ent to f am iliarize yourself with the Table of Contents str ucture: All f irst time molbox RFM user s should read Section 2. Section 3 provides a comprehensive description of gener al molbox RFM operating principles. Section 4 is for remote operation from an ex ternal computer. Section 5 provides maintenance and calibration information. Section 6 is a quick troubleshooting guide. Use it to troubleshoot unexpected molbox RFM behavior based on the symptoms of that behavior.

Certain words and expres s ions have s pecif ic meaning as they pertain to molbox RFM. Section 8 is useful as a quick reference for exact definition of specific words and expressions as they are used in this manual.

Note

For those of you who “don’t read manuals”, go directly to section 2.3, initial setup, to set up your molbox RFM. Then go to section 2.4, power up and verification. This will get you running quickly with minimal risk of causing damage to yourself or your molbox RFM. THEN… when you have questions or start to wonder about all the great features you might be missing, get into the manual!

Manual Conventions

 Caution

“Caution” is used in throughout the manual to identify conditions or actions that could cause harm to the molbox RFM or to the devices that are connected to the molbox RFM.

 Warning

“Warning” is used in throughout the manual to identify actions that could pose a hazard to the user of the molbox RFM.

Note

“Note” is used throughout the manual to identify operating and applications advice

[ ] Indicates direct function keys (e.g., [RANGE]). < > Indicates molbox1+ screen displays (e.g., <1yes>).

and additional explanations.

ABOUT THIS MANUAL

Notes

1. Introduction

1.1 Product Overview

molbox RFM is a support unit for making low mass flow measurements using molbloc mass flow elements. molbox RFM reads calibration data off the molbloc EEPROM and measures molbloc upstream and downstream pressure using built-in high accuracy Reference Pressure Transducers (RPTs). An ohmic measurement system reads the resistance of the molbloc platinum resistance thermometers from which molbloc temperature is calculated. Using the molbloc calibration data, pressures, temperature and gas properties stored in memory, the flow rate of the gas flowing through the molbloc is calculated. For molbloc-L laminar flow element model ranges 1E1-L to 3E4-L a

microrange option is available to increa se resoluti on and accuracy be low 10 % FS of the flow ra nge. For the molbloc-L model range 1E5-L the microrange option is required to achieve the stated uncertainty due to the very low differential pressure of this range. The microrange option has no function in relation to the molbloc-S sonic flow elements.

Internal molbox RFM valving supports on-boar d PRESSURE TRANSDUCER TARING , LEAK TESTING and SELF PROTECTION functions as well as a gas purge routine.

molbox RFM provides a loc al user interface via a fr ont panel key pad and display and includes advanced on-board functions. Remote communication capability is supported with RS232 and IEEE-488 interfaces.

molbox RFM is intended for applications in which a highly compact presentation, high range ability and lower cost are the prim ary considerations. A second m odel, m olbox 1+, is available for applications where higher accuracy is the most important requirement.

1.1.1 molbloc Flow Elements

Two different types of molblocs may be used with molbox RFM; molbloc-L (laminar) and

molbloc-S (sonic). The molbox RFM version 1.20 or later maintains support for older

molblocs but also supports operation with new or upgraded molblocs that have the updated

data structure to take advantage of molbox1+ features.

1.1.1.1 molbloc-L Flow Eleme nt

molbloc-L is the original molbloc laminar flow element. molbloc-L covers the lower portion of the molbloc/molbox system flow range. The key molbloc-L measurement is the differential pressure across the element, which is roughly proportional to the m ass flow rate through it. molbloc -L elements are calibrated to be used at an absolute pressure that remains nearly constant, while the differential pressure varies with flow rate. Different operating pressure options and their effect on molbloc flow range are described in Section 1.2.4.1.2.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

In addition to the new data structure and modelization methods that became available for molblocs with the introduction of molbox1+, all molbloc-L elements of range 1E1-L to 3E4-L produced or upgraded af ter the r elease of m olbox1+ are equipped standard with an upstream ¼” VCR flange, or f lowpath connection, that has an integrated sintered metal filter. T his filter is intended to be a last defense against particulate contamination of the molbloc-L internal flowpath which can affect molbloc-L m easurem ents. Every eff ort should still be m ade to supply clean dry gas to the molbloc to ensure its measurement performance and long-term stability. molblocs that have the integrated upstream filter are recognizable by the visible filter element as shown below.

Figure 1. molbloc-L Upstream End Flange with Integrated Filter

New molbloc-L elements produced with molbox1+ calibration data structure, premium calibration options, and integrated filter hardware can be identified by having a serial number of 6000 or higher. Most older molbloc-L elements are eligible for upgrade to this hardware/version by Fluke Calibration.

1.1.1.2 molbloc-S Flow Eleme nt

molbloc-S elements us e critical (s onic) f low venturi nozzle technology to measure flows, which overlap with the higher molbloc-L ranges and ex tend the high end of the molbloc/molbox RFM system flow range. The mass flow rate through a molbloc-S element is roughly proportional to the upstream absolute pressure when the flow is “choked”, so the molbloc-S operating pres sure can vary widely as the mass flow rate is changed throughout the flow range. The limits of molbloc-S operating pressure and flow ranges are defined by the molbloc-S calibration type, described in Section 1.2.4.2.2.

New calibration data structure and premium calibration options for molbloc-S were also introduced along with molbox1+. molbloc-S elements produced with this support will have serial num ber of 4000 or higher. O lder molbloc-S elem ents are eligible for upgrade to this version format by Fluke Calibration.

1.2 Specifications

1.2.1 General Specifications

Power Requirements

Fuse

Operating Temperature Range

Storage Temperature Range

Vibration

Weight

Dimensions

85 to 264 VAC, 47 to 440 Hz, 18 VA m ax. c onsumption 1A/250V, slow blow, 5x20mm, NSN: 5920008930491 15 to 35 °C

-20 to 70 °C Meets MIL-T-28800D

2.55 kg (5.6 lb) max. 8 cm H x 22.5 cm W x 20 cm D

(3.1 in. x 8.9 in. x 7.9 in.) approx.

1. INTRODUCTION

Microprocessor

Communication Ports

Reference Pressure Transducers

(RPTs)

Ohmic Measurement System

Gases Supported

Pressure Connections

Pressure Limits

Flow Ranges

CE Conformance

Motorola 68302, 16 MHz RS232 (COM1), RS232 (COM2), IEEE-488 Standard: 2 x 600 kPa (87 psia) calibrated range piezores i s tive silicon

Microrange option: 12.5 kPa (1.8 psi d) pi ezores i stive silicon Resolution: 0.004 Ω Accuracy: ± 0.04 Ω Accuracy of 100 and 110 Ω ref erence resistors: ± 0.01 % Stability of 100 and 110 Ω reference resistors: ± 0.005 % per three years

molbloc-L and molbloc -S Nitrogen (N2), dry Air, humid Air (molbloc-S only) , Argon (Ar), B utane (Butn), Carbon Monoxide (CO), Helium (He), Oxygen (O2), Carbon Dioxide (CO2), Carbon Tetrafluoride (CF4), Octofluorocyclobutane (C4F8), Ethane (C2H6), Ethylene (C2H4), Fluoroform (CHF3), Hexafluoroethane (C2F6), Hydrogen (H2), Methane (CH4), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe) Quick connectors equivalent to Swagelok QM Series (-QM2-B200) Maximum working pressure 600 kPa absolute (87 psi a) Maximum pressure without damage 800 kPa absolute (115 psia) NOTE: The microrange option includes a 12. 5 kPa (1.8 psi) differenti al

RPT which may be damaged by differenti al pressure greater than 100 kPa (15 psi).

See Sections 1.2.4. 1. 3, 1.2.4.1.4and 1.2.4.2. 1 Available. Must be specif i ed.

1.2.2 Reference Pressure Transducer (RPT) Specifications

1.2.2.1 Upstream and Downstream RPTs

Piezoresistive silicon

Type

Range

Resolution

Repeatability

Accuracy

1.2.2.2 Differential RPT (Microrange Option)

Range

Resolution

Repeatability

Accuracy

0 to 600 kPa absolute (0 to 87 psia)

6.0 Pa (0.0009 psi) ± 0.01 % FS Absolute measurements: ± 0.06 % FS f or one year Differential measurements: ± (20 Pa + 0.05 % ∆Ρ). T ari ng sequence eliminates zero

error on measurement of dif ference between the two RPTs.

Piezoresistive silicon

Type

0 to 12.5 kPa differenti al (0 t o 1.8 psid)

0.14 Pa (0.00002 psi) ± 0.01 % FS ± (0.14% of reading + 0.01% F.S .) for one year. Taring sequence eliminates zero error.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.3 Temperature Measurement Specifications

Specifications are for m olbloc mounted Platinum Resistance T hermom eters (PRT ) combined

with molbox RFM resistance measurement system and temperature calculation.

Range

Accuracy

Resolution

0 to 40 °C ± 0.05 °C

0.01 °C

The molbox RFM internal res istance measurement system is autom atically calibrated using

reference 100 and 110 Ω (± 0.01 %) resistors (see Section 5.3).

1.2.4 Flow Measurement Specif i cations

molbox RFM meas ures the f low through molbloc flow elements. Ther e are two different types

of molblocs, molbloc-L (laminar) (see Section 1.1.1.1) and molbloc-S (sonic) (see Section

1.1.1.2). Flow measurement specifications, calibration types, ranges and dimensions are

detailed separately for each molbloc type in Section 1.2.4.1 and 1.2.4.2.

All flow measurem ent uncertainties are valid only for measurem ents in a gas for which the

molbloc is calibrated, and within the range of pressures for which the calibration is specified.

1.2.4.1 molbloc-L Flow Measurement Specifications, Model Ranges 1E1-L thru 3E4-L

The flow range, useable operating pressure and absolute and differential pressure associated with molbloc -L operation depend on the molbloc used and its pressure-dependent calibration options (s ee Section 1.2.4.1.2). Use of mobloc-L model range 1E5-L is only recomm ended for us e with the mic rorange option (s ee Section 1.2.4.1.1).

Measurement Update Rate

Range

Resolution

Linearity

Repeatability

Precision

Stability

(1 year)

Measurement Uncertainty

(1 year, N2 and any molbox RFM

supported gas for which the molbl oc

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.

3 Measurement Uncertainty: Maximum deviation of the molbox RFM flow indication from the true value of the flow

through the molbloc including precision, stability and Fluke calibration standard uncertainty. Measurement uncertainty specifications for molblocs are valid only for gases with which the molbloc has been calibrated. All molblocs are calibrated for N maintained at all times for all gases on all molbloc designations. Check for availability before ordering.

in use is calibrated)

2. Calibrations with other gases are optional. Fluke calibration capability is not

1 second 0 to molbloc full s cale depending on gas and molbloc

pressure dependent calibration type (see Section 1.2.4.1.2).

0.01 % FS

± 0.23 % of reading from 10 t o 100 % F S, ± 0.023 % FS under 10 % FS

± 0.1 of reading from 10 to 100 % F S, ± 0.01 % FS under 10 % FS

1

± 0.25 % of reading from 10 t o 100 % FS, ± 0.025 % FS under 10 % FS

2

± 0.15 % of reading from 10 t o 100 % F S, ± 0.015 % FS under 10 % FS

3

± 0.5 % of reading from 10 t o 100 % F S, ± 0.05 % FS under 10 % FS

1. INTRODUCTION

1.2.4.1.1 molbloc-L FLOW MEASUREMENT

SPECIFICATIONS, MICRORANGE OPTION

The microrange option (see Section 1.2.2.2) improves molbloc-L flow measurement s pecifications below 10 % FS of the molbloc model ranges 1E1-L

thru 3E4-L, and is required to achieve the measurement specification of molbloc model range 1E5-L. With the microrange option, the affected measurement

specifications become:

Molbloc-L (Ranges 1E1-L Thru 3E4-L)

Update Rate

Range

Resolution

Linearity

Repeatability

Precision

Stability

(1 year)

Measurement Uncertainty

molbloc-L (Ranges 1E5-L Only)

Update Rate

Range

Resolution

Linearity

Repeatability

Precision

Stability

(1 year)

Measurement Uncertainty

1 Precision: Combined linearity, hysteresis, repeatability. 2 Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc used

under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.

3 Measurement Uncertainty: Maximum deviation of the molbox RFM flow indication from the true value of the

flow through the molbloc including precision, stability and Fluke calibration standard uncertainty. Measurement uncertainty specifications for molblocs are valid only for gases with which the molbloc has been calibrated. All molblocs are calibrated for N maintained at all times for all gases on all molbloc designations. Check for availability before ordering.

2. Calibrations with other gases are optional. Fluke calibration capability is not

1 second 0 to molbloc full s cale depending on gas and molbloc

pressure dependent calibration type (s ee molbloc-L tables)

0.01% FS, 0.001% FS under 10% FS ±0.23% of reading from 1 to 100% FS,

±0.0023% FS under 1% FS ±0.1% of reading from 1 to 100% FS,

±0.001% FS under 1% FS

1

±0.25% of reading from 1 to 100% FS, ±0.0025% FS under 1% FS

2

±0.15% of reading from 1 to 100% FS, ±0.0015% FS under 1% FS

3

±0.5% of reading from 1 to 100% FS, ±0.005% FS under 1% FS

1 second 0 to molbloc full scale depending on gas and molbloc

pressure dependent calibration type (s ee molbloc-L tables)

0.01% FS ± 0.25% of reading from 5 to 100% FS,

± 0.0125% FS under 5% FS ± 0.2% of reading from 5 t o 100% F S,

± 0.01% FS under 5% FS

1

± 0.32% of reading from 5 to 100% FS, ± 0.016% FS under 5% FS

2

± 0.2% of reading from 5 to 100% FS, ± 0.01% FS under 5% FS

3

± 0.5% of reading from 5 to 100% FS, ± 0.025% FS under 5% FS

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

PRESSURE AT MAX. FLOW

MOLBLOC

MOLBLOCS

1.2.4.1.2 molbloc-L Pressure Dependent Calibration Types

See your molbloc’s Calibration Report to determine the calibration type of the molbloc you are using.

Different pressure dependent calibration options for molbloc-L elements determine the range of operating pressures over which a molbloc can be used within its mass flow measurement specifications. The calibration option also affects the molbloc flow range and the differential pressure associated with the flow range.

Measurement uncertainty (accuracy) specifications for molbloc-L are valid only for gases with which the molbloc has been calibrated. All m olbloc-L elements are calibrated for N2. Calibrations with other gases are optional. Fluke calibration capability is not maintained at all times for all gases on all molbloc designations. Check for availability before ordering calibrations.

The molbloc-L pressure dependent calibration types are summarized in Table 1.

Table 1. molbloc-L Pressure Dependent Calibration Types

Note

CALIBRATION TYPE

(CALIBRATION NAME)

Low pressure (LOP)

High pressure (HIP)

Downstream (DOWN)

OPERATING PRESSURE

200 to 325 kPa absolute (29 to 48 psia) upstream of molbloc

325 to 525 kPa absolute (48 to 76 psia) upstream of molbloc

Atmospheric pressure downstream of m ol bl oc. 85 to 105 kPa (12 to15 psia).

NOMINAL DIFFERENTIAL

1E5

5 kPa

(.725 psi)

Not available 50 kPa

12.5 kPa (1.8 psi)

ALL OTHER

50 kPa

(7.5 psi)

80 kPa (12 psi)

Note

Differential pressure values are nominal and may vary by up to 15 % with the actual molbloc used.

1. INTRODUCTION

2

CARBONS

1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations

Table 2. molbloc-L Ranges with Low Pressure and Downstream Calibrations

SIZE

Nitrogen

GASES

N

SIZE

1E1

5E1

10 50 100 200 500 1,000 5,000 10,000 30,000 100,000

Argon Ar 10 50 100 200 500 1,000 5,000 10,000 30,000 80,000 Helium He 10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 Sulfur Hexafluoride

INERT

SF

10 50 100 200 500 1,000 2,000

6

Xenon XE 10 40 80 150 400 800 3,500

Butane

Ethane

Ethylene

Hydrogen

FLAMMABLE

Methane

Propane

Carbon Tetrafluoride

Hexafluorethene

Trifluoromethane

FLUORO-

C

4H1

0

C

2H6

C

2H4

H

2

CH

C

3H8

CF

C

2F6

CHF

20 100 130

20 100 200 400 1,000 2,000 6,000

16 80 160 320 800 1 600 7,000

20 100 200 400 1,000 2,000 10,000 20,000 60,000 200,000 16 80 160 320 800 1 600 8,000 16,000 40,000

4

20 100 200 400 1,000 2,000 3,000

10 50 100 200 500 1,000 4,000

4

10 50 100 200 500 1,000 2,000

10 50 100 200 500 1,000 4,000

3

Air Air 10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 Carbon Dioxide

CO

10 50 100 200 500 1,000 5,000 10,000 20,000

2

Carbon Monoxide CO 10 50 100 200 500 1,000 5,000 10,000 30,000 100,000 Nitrous Oxide

N

2

10 50 100 200 500 1,000 5,000 10,000 20,000

O

OTHER

C

Octafluorocyclobutane1

Oxygen

15 60 9 65

4F8

O

2

10 50 100 200 500 1,000 5,000 10,000 30,000 80,000

See Table 3 for footnotes.

molbloc-L SIZE AND FULL SCALE FLOW (sccm @ 0 ºC)

SIZE

1E2

SIZE

2E2

SIZE

5E2

SIZE

1E3

SIZE

5E3

500

270

30

50

670 140

2,300 2,200

1,400

18,000

1,000

16,000 20,000

1,000

10,000

1,000

10,000 12,000

600

10,000 12,000

600

130

17

34

330

85

1,100

175

1,050

840

SIZE

1E4

6,000 1,000

SIZE

3E4

6,000 4,000

8,000 11,000

3,000

7,000 3,000

---

18,000

2,000

6,000

5,000

10,000

2,000

7,000

3,000

6,000 1,200

6,000 4,000

4,000

3,400

--- ---

1,700

SIZE

1E5

---

30,000 20,000

---

60,000 50,000

70,000 40,000

120,000

40,000

---

36,000 25,000

---

38,000 30,000

60,000 30,000

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

CARBONS

1.2.4.1.4 molbloc-L Ranges with High Pressure Calibrations

Table 3. molbloc-L Ranges with High Pressure Calibrations

GASES

Nitrogen

SIZE

1E1

5E1

N

2

20 100 200 400 1,000 2,000 10,000 20,000 40,000

molbloc-L SIZE AND FULL SCALE FLOW (sccm @ 0 ºC)

SIZE

1E2

2E2

SIZE

5E2

SIZE

1E3

SIZE

5E3

SIZE

1E4

SIZE

3E4

7,500

Argon Ar 20 100 200 400 1,000 2,000 10,000 17,000 35,000

6,000

Helium He 20 100 200 400 1,000 2,000 10,000 20,000 65,000 N/A

INERT

Sulfur Hexafluoride

SF

6

Xenon XE 20 100 150 350 650 1,700 3,350

Butane Ethane

Ethylene

Hydrogen Methane

FLAMMABLE

Propane

Carbon Tetrafluoride

Hexafluorethene

FLUORO-

Trifluoromethane

C

4H10

C

2H6

C

2H4

H

2

CH

C

3H8

CF

C

2F6

CHF

4

25 100

15

120

30

250

50

600 150

2,000

300

2,000 1,400

6,200 2,800

11,000

950

1,900

N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A

40 200 350

40 200 350 700 2,000 4,000 7,000

50

700 100

1,800

200

4,000 6,000

2 300

2,000

20,000

4,500

22,000

4,000

40 200 400 900 2,000 4,500 22,000 45,000 130,000 N/A 35 175 350 700 1,700 3,500 13,000

4

50 200

20 100 200 400 1,000 2,000 3,700

25 100

25 125 240

3

25

15

200

50

120

30

400 100

250

50

450

60

1,000

250

600 150

1,200

150

2,000

3,500

500

3,500 2,600

1,200

2,000

300

1,800 1,500

2,500 4,000

1,500

33,000 42,000

11,000

5,400

12,000

2,400 6,000

3,000

12,000

3,000

--

11,000

5,700

20,000 13,000

22,000 12,700

12,000

--

12,000

7,300

--

12,000

8,800

Air Air 20 100 200 400 1,000 2,000 10,000 20,000 40,000

7,200

Carbon Dioxide

CO

25 125 250 500 1,250 2,500 6,600

2

1,400

20,000

2,500

20,000

8,800

Carbon Monoxide CO 20 100 200 400 1,000 2,000 10,000 20,000 40,000

7,500

Nitrous Oxide

OTHER

Octafluorocyclobutane2 Oxygen

N

O

2

C

4F8

O

2

25 125 250 500 1,250 2,500 11,000

1,500

20,000

3,000

20,000

9,000

N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A

20 100 200 400 1,000 2,000 10,000 20,000 40,000

6,500

SIZE

1E5

N/A

A bold value indicates that the maximum flow is li mited by the maximum Reynolds number value of 1 200 which is reached before the normal differenti al pressure range is reached. In that c ase, the second value gives the minimum flow for which measurement uncert ai nt y (ac curacy) is equal to the nominal uncertainty specific at i on. Divide the second value by 10 when using molbox RFM microrange option.

Where there is no value in t he field (–), this indicates that the maximum Reynolds number is reached before the di fferential pressure reaches 5 kPa (1 kPa i n the case of the 1E5 molbl oc), therefore calibration with that gas is not useful.

1

Due to low vapor pressure, only downstream calibrati on type is available.

2

The operating pressure range is greater than t he vapor pressure value for this gas.

1. INTRODUCTION

1.2.4.1.5 molbloc-L DIMENSIONS

5E3 AND LOWER 1E4, 3E4 1E5

58.50 (2.303) 74.50 (2.933) 74.50 (2.933)

A

16.00 (0.630) 24.00 (0.945) 24.00 (0.945)

B

32.00 (1.260) SQ 48.00 (1.890) SQ 48.00 (1.890) SQ

C

68.84 (2.750) 80.00 (3.150) 80.00 (3.150)

D

19.06 (0.750) 28.00 (1.102) 28.00 (1.102)

E

124.00 (4.881) 157.00 (6.181) 164.00 (6.458)

F

1/4 in. VCR M 1/4 in. VCR M 1/2 in. VCR M

G

molbloc-L SIZES [mm(in.)]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

calibration

1.2.4.2 molbloc-S

The flow range and operating pressure associated with molbloc-S operation depend on the molbloc used and its calibration options (see Section 1.2.4.2.2)

Measurement Update

Range

Resolution

Linearity

Repeatability

Precision

Predicted Stability

(1 year)

Measurement

Uncertainty

With SP molbloc-S

calibration

Measurement

Uncertainty

With LP molbloc-S

calibration

Measurement

Uncertainty

With HP molbloc-S

1 Precision: Combined linearity, hysteresis, repeatability.

2. Stability: Maximum change in zero and span over specified time period for typical molbox RFM and molbloc

used under typical conditions. As stability can only be predicted, stability for a specific molbloc and molbox RFM should be established from experience.

3. Measurement uncertainty (accuracy): Maximum deviation of the molbox RFM flow indication from the true value

of the flow through the molbloc including precision, stability and Fluke calibration standard measurement uncertainty.

1 second

Rate

Depends on molbloc-S pressure dependent calibration type (see Section 1.2.4.2. 2)

0.01 % of FS

± 0.25 % of reading ± 0.10 % of reading

1

± 0.30 % of reading

2

± 0.2 % of reading

± 0.5 % of reading from 50 to 500 kPa

3

± 0.5 % of reading from 50 t o 200 kPa

3

± 0.5 % of 50 kPa flow from 20 to 50 kPa

± 0.5 % of reading from 200 to 600 kPa

3

1.2.4.2.1 molbloc-S Pressure Dependent Calibration Types

See your molbloc’s Calibration Report to determine the calibration type of the molbloc you are using.

Measurement uncertainty (accuracy) specificat ions for molbloc s are valid only for gases with which the m olbloc has been calibrated. All molbloc-S elements are calibrated in one standard gas, either air or N2, and m ay be calibrated in other gases. Calibrations with other gases are optional. The list of gases which can be measured by molbloc-S is the sam e as molbloc-L. FLUKE calibration capability is not maintained at all times for all gases on all molbloc designations. Check for availability before ordering calibrations.

molbloc-S calibrations are performed over flow ranges corres ponding to one of three pressure ranges, summarized in Table 4.

Note

Table 4: molbloc-S Calibration Types

1. INTRODUCTION

CALIBRATION TYPE

(CALIBRATION NAME)

Low pressure (LP)

Standard pressure (SP)

High pressure (HP)

OPERATING PRESSURE

20 to 200 kPa absolute (3 to 30 psia) upstream of molbloc

50 to 500 kPa absolute (7 to 70 psia) upstream of molbloc

200 to 2000 kPa absolute (29 to 290 psia)

upstream of molbloc

Note

molbloc-S flow measurements are valid only when the ratio of pressure downstream to the pressur e ups tre am of th e nozzle is low enough to assure a critical (choked) flow (see Section 3.1.5).

1.2.4.2.2 molbloc-S Ranges

molbloc-S flow ranges are defined by the molbloc’s Pres sure to Flow Conversion Ratio, K molbloc-S, the downstream pr ess ur e and the acceptable back pressure ratio (see Section 3.1.5). K between mass f low in nitrogen and the absolute upstream press ure delivered to the molbloc-S. molbloc-S s izes are defined by the nominal K nozzle, using scientific notation, for example a 1E3 molbloc -S has a K sccm/k Pa. To differentiate from molbloc-L size designations, this molbloc s ize is designated 1E3-S.

, the gas used, the absolute pressure that can be delivered upstream of

F

is expressed in units of s ccm/k Pa and defines the relationship

F

of the molbloc-S

F

of 1,000

F

The molbox RFM pressure range, the molbloc-S calibration type (see Section

1.2.5.2.2) and the back pressure ratio (BPR) requirements limit the pressures, and

flows, over which a molbloc-S can be used within known measurement uncertainty limits. In practice, the usable range of a molbloc-S in a given application also may depend on the available gas supply pressure, the presence and flow capacity of a vacuum pump downstream or the allowable back pres sure on an upstream DUT.

The mass f low range of a m olbloc-S element is dependent on the properties of the gas used, so the range of a molbloc-S is diff erent f or each support ed gas. The f low ranges for each molbloc-S size at various typical operating pressures are summarized separately for each molbloc-S supported gas in the Tables below. For the common application of using a molbloc-S with its downstream pressure at or near atmospher ic pressure, it is helpful to know what minimum flow can be measured before violating back pressure ratio requirements (see Section 3.1.5). In the tables below, this minimum flow value is given in the “Minimum without vacuum” column.

FLUKE calibration capability may not be available for som e of the gas es listed, or may be limited to less than the maxim um flow rate listed. Check for availability before ordering calibrations.

The following notes apply to the ra nge table s below:

Ratio = Inverse square root density ratio of the current gas to Nitrogen KF = Pressure to Flow Conversion Ratio, sccm/kPa To estimate a f low in a given gas at a given pres s ure: F low(slm) = KF * Pressure

in kPa absolute / 1000 * Gas Ratio

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

Ratio = 1

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 5: N2. molbloc-S Flow in Nitrogen at Various molbloc Upstream Pressures

Nitrogen

N2

KF

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

Argon Ratio = 0.837 Ar

100 2 5 10 15 20 50 200 4 10 20 28 40 100

500 10 25 50 67 100 250 1,000 20 50 100 129 200 500 2,000 40 100 200 248 400 1,000 5,000 100 250 500 596 1,000 2500

10,000 200 500 1,000 1,173 2,000 5,000

KF

10 0.2 0.5 1 2.0 2 5 20 0.4 1 2 3.5 4 10 50 1 2.5 5 7.7 10 25

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

7 14 35 70 140 350 700 1,400 3,500 7,000

12 20 24 40

60 100 120 200 240 400 600 1,000

1,200 2,000 2,400 4,000 6,000 10,000

12,000 20,000

Table 6: Ar. molbloc-S Flow in Argon at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S

10 0.2 0.4 0.8 1.7 1.7 4.2 5.9 10.0 16.7 20 0.3 0.8 1.7 3.0 3.3 8.4 11.7 20.1 33.5 50 0.8 2.1 4.2 6.5 8.4 20.9 29.3 50.2 83.7 100 1.7 4.2 8.4 12.9 16.7 41.9 58.6 100.5 167.4 200 3.3 8.4 16.7 23.3 33.5 83.7 117.2 200.9 334.9 500 8.4 20.9 41.9 57.1 83.7 209.3 293.0 502.3 837.2 1,000 16.7 41.9 83.7 107.8 167.4 418.6 586.0 1,004.6 1,674.4 2,000 33.5 83.7 167.4 207.6 334.9 837.2 1,172.1 2,009.3 3,348.8 5,000 83.7 209.3 418.6 498.2 837.2 2,093.0 2,930.2 5,023.2 8,372.0

10,046.4 16,744.

1E4-S

10,000 167.4 418.6 837.2 996.2 1,674.4 4,186.0 5,860.4

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

0

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 7: He. molbloc-S Flow in Helium at Various molbloc Upstream Pressures

Helium Ratio = 2.647 He

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.5 1.3 2.6 9.4 5.3 13.2 18.5 31.8 20 1.1 2.6 5.3 13.1 10.6 26.5 37.1 63.5 105.9 50 2.6 6.6 13.2 25.7 26.5 66.2 92.6 158.8 100 5.3 13.2 26.5 51.4 52.9 132.3 185.3 317.6 529.4 200 10.6 26.5 52.9 91.5 105.9 264.7 370.6 635.2 500 26.5 66.2 132.3 199.4 264.7 661.7 926.4 1,588.1 2,646.8 1000 52.9 132.3 264.7 398.7 529.4 1,323.4 1,852.8 3,176.2 2000 105.9 264.7 529.4 695.1 1,058.7 2,646.8 3,705.5 6,352.3 10,587.2 5000 264.7 661.7 1,323.4 1,737.8 2,646.8 6,617.0 9,263.8 15,880.9 10,000 529.4 1,323.4 2,646.8 3,281.0 5,293.6 13,234.0 18,527.7 31,761.7 52,936.2

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

50 kPa

100 kPa

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

2 MPa

52.9

264.7

1,058.7

5,293.6

26,468.1

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Table 8: SF6. molbloc-S Flow in Sulfur Hexafluoride at Various molbloc Upstream Pressures

Sulfur Hexafluoride Ratio = 0.435 SF6

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.2 0.4 0.8 0.9 2.2 3.0 n/a 20 0.2 0.4 0.9 1.4 1.7 4.3 6.1 n/a 50 0.4 1.1 2.2 3.1 4.3 10.9 15.2 n/a 100 0.9 2.2 4.3 5.9 8.7 21.7 30.4 n/a 200 1.7 4.3 8.7 11.4 17.4 43.5 60.9 n/a 500 4.3 10.9 21.7 26.9 43.5 108.7 152.2 n/a 1,000 8.7 21.7 43.5 53.8 87.0 217.4 304.3 n/a 2,000 17.4 43.5 87.0 100.0 173.9 434.8 608.7 n/a 5,000 43.5 108.7 217.4 249.9 434.8 1,086.9 1,521.7 n/a 10,000 87.0 217.4 434.8 499.7 869.5 2,173.8 3,043.4 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 9: Xe. molbloc-S Flow in Xenon at Various molbloc Upstream Pressures

Xenon Ratio = 0.460 Xe

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.2 0.4 0.8 0.7 1.8 3.2 n/a 20 0.1 0.4 0.7 1.4 1.5 3.6 6.4 n/a 50 0.4 0.9 1.8 3.6 3.6 9.1 16.1 n/a 100 0.7 1.8 3.6 6.5 7.3 18.2 32.2 n/a 200 1.5 3.6 7.3 12.9 14.6 36.4 64.5 n/a 500 3.6 9.1 18.2 29.7 36.4 91.0 161.2 n/a 1,000 7.3 18.2 36.4 59.3 72.8 182.0 322.3 n/a 2,000 14.6 36.4 72.8 109.6 145.6 364.0 644.6 n/a 5,000 36.4 91.0 182.0 267.2 364.0 910.0 1,611.5 n/a 10,000 72.8 182.0 364.0 529.2 728.0 1,819.9 3,223.1 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

Butane Ratio = 0.680 C4H10

KF

1E1-S

2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.3 0.7 1.0 1.4 n/a

20 0.3 0.7 1.4 1.9 2.7 n/a 50 0.7 1.7 3.4 4.8 6.8 n/a 100 1.4 3.4 6.8 9.0 13.6 n/a 200 2.7 6.8 13.6 18.0 27.2 n/a 500 6.8 17.0 34.0 42.2 68.0 n/a 1,000 13.6 34.0 68.0 84.4 136.0 n/a 2,000 27.2 68.0 136.0 157.0 272.0 n/a 5,000 68.0 170.0 340.0 392.4 679.9 n/a 10,000 136.0 340.0 679.9 784.9 1,359.8 n/a

Table 10: C4H10. molbloc-S Flow in Butane at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

700 kPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 11: C2H6. molbloc-S Flow in Ethane at Various molbloc Upstream Pressures

Ethane Ratio = 0.960 C2H6

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.5 1.0 1.5 1.9 4.8 6.7 n/a 20 0.4 1.0 1.9 3.0 3.8 9.6 13.4 n/a 50 1.0 2.4 4.8 6.7 9.6 24.0 33.6 n/a 100 1.9 4.8 9.6 13.4 19.2 48.0 67.2 n/a 200 3.8 9.6 19.2 25.2 38.4 96.0 134.5 n/a 500 9.6 24.0 48.0 61.9 96.0 240.1 336.1 n/a 1,000 19.2 48.0 96.0 118.7 192.1 480.2 672.3 n/a 2,000 38.4 96.0 192.1 228.6 384.2 960.4 1,344.6 n/a 5,000 96.0 240.1 480.2 551.9 960.4 2,401.0 3,361.4 n/a 10,000 192.1 480.2 960.4 1,103.8 1,920.8 4,802.0 6,722.8 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

Ethylene Ratio = 0.996 C2H4

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.5 1.0 1.7 2.0 5.0 7.0 n/a 20 0.4 1.0 2.0 3.1 4.0 10.0 13.9 n/a 50 1.0 2.5 5.0 7.5 10.0 24.9 34.9 n/a 100 2.0 5.0 10.0 13.9 19.9 49.8 69.7 n/a 200 4.0 10.0 19.9 27.7 39.8 99.6 139.4 n/a 500 10.0 24.9 49.8 64.2 99.6 248.9 348.5 n/a 1,000 19.9 49.8 99.6 128.2 199.2 497.9 697.0 n/a 2,000 39.8 99.6 199.2 237.0 398.3 995.8 1394.1 n/a 5,000 99.6 248.9 497.9 572.2 995.8 2,489.5 3485.2 n/a 10,000 199.2 497.9 995.8 1,144.4 1,991.6 4,978.9 6970.5 n/a

Table 12: C2H4. molbloc-S Flow in Ethylene at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 13: H2. molbloc-S Flow in Hydrogen at Various molbloc Upstream Pressures

Hydrogen Ratio = 3.730 H2

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S

1E4-S

10 0.7 1.9 3.7 8.3 7.5 18.6 26.1 44.8 74.6 20 1.5 3.7 7.5 14.5 14.9 37.3 52.2 89.5 149.2 50 3.7 9.3 18.6 36.2 37.3 93.2 130.5 223.8 373.0 100 7.5 18.6 37.3 62.5 74.6 186.5 261.1 447.6 746.0 200 14.9 37.3 74.6 114.5 149.2 373.0 522.2 895.2 1,491.9 500 37.3 93.2 186.5 280.9 373.0 932.4 1,305.4 2,237.9 3,729.8 1,000 74.6 186.5 373.0 508.7 746.0 1,864.9 2,610.9 4,475.8 7,459.6 2,000 149.2 373.0 746.0 979.6 1,491.9 3,729.8 5,221.7 8,951.5 14,919.2 5,000 373.0 932.4 1,864.9 2,311.7 3,729.8 9,324.5 13,054.3 22,378.8 37,297.9

10,000 746.0

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

KF

20 kPa

50 kPa

100 kPa

1,864. 9 3,729.8 4,623.4 7,459.6

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

downstream of molbloc-S (no vacuum).

Minimum

witout

(3)

200 kPa

500 kPa

700 kPa

1.2 MPa

18,649. 0 26,108.6 44,757.5 74,595.9

2 MPa

Methane Ratio = 1.320 CH4

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.3 0.7 1.3 2.6 2.6 6.6 9.2 15.8 26.4 20 0.5 1.3 2.6 4.4 5.3 13.2 18.5 31.7 52.8 50 1.3 3.3 6.6 10.2 13.2 33.0 46.2 79.2 132.0 100 2.6 6.6 13.2 20.1 26.4 66.0 92.4 158.4 264.0 200 5.3 13.2 26.4 36.7 52.8 132.0 184.8 316.8 528.1 500 13.2 33.0 66.0 88.2 132.0 330.0 462.1 792.1 1,320.2 1,000 26.4 66.0 132.0 170.0 264.0 660.1 924.1 1,584.2 2,640.3 2,000 52.8 132.0 264.0 327.3 528.1 1,320.2 1,848.2 3,168.4 5,280.6 5,000 132.0 330.0 660.1 785.5 1,320.2 3,300.4 4,620.5 7,920.9 13,201.5 10,000 264.0 660.1 1,320.2 1,517.2 2,640.3 6,600.8 9,241.1 15,841.8 26,403.0

Table 14: CH4. molbloc-S Flow in Methane at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

2 MPa

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 15: C3H8. molbloc-S Flow in Propane at Various molbloc Upstream Pressures

Propane Ratio = 0.789 C3H8

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.4 0.8 1.3 1.6 3.9 5.5 n/a 20 0.3 0.8 1.6 2.3 3.2 7.9 11.0 n/a 50 0.8 2.0 3.9 5.5 7.9 19.7 27.6 n/a 100 1.6 3.9 7.9 10.5 15.8 39.4 55.2 n/a 200 3.2 7.9 15.8 20.8 31.5 78.9 110.4 n/a 500 7.9 19.7 39.4 48.8 78.9 197.2 276.1 n/a 1,000 15.8 39.4 78.9 97.5 157.7 394.4 552.1 n/a 2,000 31.5 78.9 157.7 181.4 315.5 788.7 1,104.2 n/a 5,000 78.9 197.2 394.4 453.2 788.7 1,971.8 2,760.5 n/a 10,000 157.7 394.4 788.7 906.5 1,577.4 3,943.6 5,521.0 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

Table 16: CF4. molbloc-S Flow in Carbon Tetrafluoride at Various molbloc Upstream Pressures

Carbon Tetrafluoride Ratio = 0.563 CF4

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.3 0.6 0.9 1.1 2.8 3.9 n/a 20 0.2 0.6 1.1 1.8 2.3 5.6 7.9 n/a 50 0.6 1.4 2.8 4.1 5.6 14.1 19.7 n/a 100 1.1 2.8 5.6 7.9 11.3 28.1 39.4 n/a 200 2.3 5.6 11.3 15.7 22.5 56.3 78.8 n/a 500 5.6 14.1 28.1 36.3 56.3 140.7 197.0 n/a 1,000 11.3 28.1 56.3 69.9 112.6 281.4 394.0 n/a 2,000 22.5 56.3 112.6 134.1 225.1 562.9 788.0 n/a 5,000 56.3 140.7 281.4 323.4 562.9 1,407.2 1,970.0 n/a 10,000 112.6 281.4 562.9 646.9 1,125.7 2,814.3 3,940.1 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 17: C2F6. molbloc-S Flow in Hexafluoroethene at Various molbloc Upstream Pressures

Hexafluoroethene Ratio = 0.447 C2F6

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.2 0.4 0.8 0.9 2.2 3.1 n/a 20 0.2 0.4 0.9 1.3 1.8 4.5 6.3 n/a 50 0.4 1.1 2.2 3.2 4.5 11.2 15.7 n/a 100 0.9 2.2 4.5 5.9 8.9 22.4 31.3 n/a 200 1.8 4.5 8.9 11.8 17.9 44.7 62.6 n/a 500 4.5 11.2 22.4 27.6 44.7 111.8 156.6 n/a 1,000 8.9 22.4 44.7 55.3 89.5 223.7 313.1 n/a 2,000 17.9 44.7 89.5 102.9 178.9 447.3 626.3 n/a 5,000 44.7 111.8 223.7 257.1 447.3 1,118.3 1,565.7 n/a 10,000 89.5 223.7 447.3 514.1 894.7 2,236.7 3,131.3 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

Table 18: CHF3. molbloc-S Flow in Trifluoromethane at Various molbloc Upstream Pressures

Trifluoromethane Ratio = 0.629 CHF3

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.3 0.6 1.0 1.3 3.1 4.4 n/a 20 0.3 0.6 1.3 2.0 2.5 6.3 8.8 n/a 50 0.6 1.6 3.1 4.4 6.3 15.7 22.0 n/a 100 1.3 3.1 6.3 8.8 12.6 31.5 44.1 n/a 200 2.5 6.3 12.6 17.2 25.2 62.9 88.1 n/a 500 6.3 15.7 31.5 40.6 62.9 157.3 220.3 n/a 1,000 12.6 31.5 62.9 77.9 125.9 314.7 440.6 n/a 2,000 25.2 62.9 125.9 149.9 251.8 629.4 881.1 n/a 5,000 62.9 157.3 314.7 361.7 629.4 1,573.4 2202.8 n/a 10,000 125.9 314.7 629.4 723.3 1,258.8 3,146.9 4405.6 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 19: Air. molbloc-S Flow in Air at Various molbloc Upstream Pressures

Air Ratio = 0.983 Air

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.5 1.0 2.0 2.0 4.9 6.9 11.8 19.7 20 0.4 1.0 2.0 3.4 3.9 9.8 13.8 23.6 39.3 50 1.0 2.5 4.9 7.6 9.8 24.6 34.4 59.0 98.3 100 2.0 4.9 9.8 15.2 19.7 49.2 68.8 118.0 196.7 200 3.9 9.8 19.7 27.4 39.3 98.3 137.7 236.0 393.4 500 9.8 24.6 49.2 67.1 98.3 245.9 344.2 590.1 983.5 1,000 19.7 49.2 98.3 126.7 196.7 491.7 688.4 1,180.2 1,967.0 2,000 39.3 98.3 196.7 243.9 393.4 983.5 1,376.9 2,360.4 3,933.9 5,000 98.3 245.9 491.7 585.2 983.5 2,458.7 3,442.2 5,900.9 9,834.8 10,000 196.7 491.7 983.5 1,170.3 1,967.0 4,917.4 6,884.4 11,801.8 19,669.7

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

KF

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

2 MPa

Carbon Dioxide Ratio = 0.795 CO2

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.4 0.8 1.4 1.6 4.0 5.6 n/a 20 0.3 0.8 1.6 2.5 3.2 8.0 11.1 n/a 50 0.8 2.0 4.0 6.2 8.0 19.9 27.8 n/a 100 1.6 4.0 8.0 11.1 15.9 39.8 55.7 n/a 200 3.2 8.0 15.9 22.1 31.8 79.5 111.3 n/a 500 8.0 19.9 39.8 51.2 79.5 198.8 278.4 n/a 1,000 15.9 39.8 79.5 102.4 159.1 397.7 556.7 n/a 2,000 31.8 79.5 159.1 189.3 318.1 795.3 1,113.4 n/a 5,000 79.5 198.8 397.7 473.2 795.3 1,988.3 2,783.6 n/a 10,000 159.1 397.7 795.3 914.1 1,590.6 3,976.6 5,567.2 n/a

Table 20: CO2. molbloc-S Flow in Carbon Dioxide at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 21: CO. molbloc-S Flow in Carbon Monoxide at Various molbloc Upstream Pressures

Carbon Monoxide Ratio = 1.000 CO

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.5 1.0 2.0 2.0 5.0 7.0 12.0 20.0 20 0.4 1.0 2.0 3.5 4.0 10.0 14.0 24.0 40.0 50 1.0 2.5 5.0 7.7 10.0 25.0 35.0 60.0 100.0 100 2.0 5.0 10.0 15.4 20.0 50.0 70.0 120.0 200.0 200 4.0 10.0 20.0 27.8 40.0 100.0 140.0 240.0 400.0 500 10.0 25.0 50.0 68.3 100.0 250.0 350.0 600.0 1,000.0 1,000 20.0 50.0 100.0 128.7 200.0 500.0 700.0 1,200.0 1,999.9 2,000 40.0 100.0 200.0 247.9 400.0 1,000.0 1,399.9 2,399.9 3,999.9 5,000 100.0 250.0 500.0 595.0 1,000.0 2,499.9 3,499.9 5,999.8 9,999.6 10,000 200.0 500.0 1,000.0 1,190.0 1,999.9 4,999.8 6,999.7 11,999.6 19,999.3

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

2 MPa

Nitrous Oxide Ratio = 0.795 N20

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.4 0.8 1.4 1.6 4.0 5.6 n/a 20 0.3 0.8 1.6 2.5 3.2 8.0 11.1 n/a 50 0.8 2.0 4.0 6.2 8.0 19.9 27.8 n/a 100 1.6 4.0 8.0 11.1 15.9 39.8 55.7 n/a 200 3.2 8.0 15.9 22.1 31.8 79.5 111.3 n/a 500 8.0 19.9 39.8 51.2 79.5 198.8 278.3 n/a 1,000 15.9 39.8 79.5 102.4 159.0 397.6 556.6 n/a 2,000 31.8 79.5 159.0 189.3 318.0 795.1 1,113.2 n/a 5,000 79.5 198.8 397.6 473.1 795.1 1,987.8 2,782.9 n/a 10,000 159.0 397.6 795.1 913.7 1,590.2 3,975.6 5,565.8 n/a

Table 22: N2O. molbloc-S Flow in Nitrous Oxide at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

1. INTRODUCTION

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

DESIGNATOR

[sccm/ kPa]

(3 psia)

(7 psia)

(15 psia)

vacuum

(30 psia)

(70 psia)

(100 psia)

(174 psia)

(290 psia)

Table 23: C4F8. molbloc-S Flow in Octafluorocyclobutane1 at Various molbloc Upstream Pressures

Octafluorocyclobutane1 Ratio = 0.367 C4F8

KF

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.1 0.2 0.4 0.6 0.7 n/a 20 0.1 0.4 0.7 1.1 1.5 n/a 50 0.4 0.9 1.8 2.4 3.7 n/a 100 0.7 1.8 3.7 4.8 7.3 n/a 200 1.5 3.7 7.3 9.2 14.7 n/a 500 3.7 9.2 18.3 22.7 36.7 n/a 1,000 7.3 18.3 36.7 43.8 73.3 n/a 2,000 14.7 36.7 73.3 84.3 146.7 n/a 5,000 36.7 91.7 183.3 210.7 366.7 n/a 10,000 73.3 183.3 366.7 421.4 733.3 n/a

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

[4] Operation in this gas is limited to lower pressures due to the gas vapor pressure.

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

700 kPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

1.2 MPa

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

[4]

n/a

2 MPa

[4]

Oxygen Ratio = 0.935 O2

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

10 0.2 0.5 0.9 1.9 1.9 4.7 6.5 11.2 18.7 20 0.4 0.9 1.9 3.4 3.7 9.4 13.1 22.5 37.4 50 0.9 2.3 4.7 7.3 9.4 23.4 32.7 56.1 93.5 100 1.9 4.7 9.4 14.4 18.7 46.8 65.5 112.3 187.1 200 3.7 9.4 18.7 26.4 37.4 93.5 131.0 224.5 374.2 500 9.4 23.4 46.8 63.8 93.5 233.9 327.4 561.3 935.4 1,000 18.7 46.8 93.5 120.4 187.1 467.7 654.8 1,122.5 1,870.8 2,000 37.4 93.5 187.1 231.9 374.2 935.4 1,309.6 2,245.0 3,741.7 5,000 93.5 233.9 467.7 556.6 935.4 2,338.5 3,274.0 5,612.5 9,354.2 10,000 187.1 467.7 935.4 1,113.1 1,870.8 4,677.1 6,547.9 11,225.0 18,708.3

Table 24: O2. molbloc-S Flow in Oxygen at Various molbloc Upstream Pressures

molbloc-S MASS FLOW RATE (slm @ 0 °C) WHEN molbloc-S UPSTREAM PRESSURE IS:[1][2]

KF

20 kPa

[1] Flow values in table are valid only when critical flow is established. [2] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values will

[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)

50 kPa

generally be higher; the flow values for a given molbloc and upstream pressure are approximately 7% higher when expressed in slm at 20°C. Flow values at a given pressure may vary by up to ± 2% due to flowpath machining tolerances.

downstream of molbloc-S (no vacuum).

100 kPa

Minimum

witout

200 kPa

(3)

500 kPa

700 kPa

1.2 MPa

2 MPa

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.4.2.3 molbloc-S Dimensions

molbloc-S SIZE [mm(in.)]

A

B

C

D

E

F G H

I J

K

L

1E2-S

AND LOWER

48.0 (1.89) SQ

24.0 (0.94)

48.0 (1.89) SQ

80.0 (3.15)

28.0 (1.10)

167.5 (6.59) 171.0 (6.73) 175.0 (6.89) [1] 299.7 (11.80) [1] 331.0 (13.03) [1] KF16 FLANGE KF16 FLANGE KF16 FLANGE KF40 FLANGE KF40 FLANGE

100.0 (3.94)

128.0 (5.04) 128.0 (5.35) 128.0 (5.35) 236. 0 (9.29) 236.0 (9.29)

73.0 (2.87)

167.5 (6.59) 171.0 (6.73) 171.0 (6.73)

¼” VCR Male[2] ½” VCR M[2] ½” VCR M[2]

2E2-S THRU

1E3-S

48.0 (1.89) SQ

24.0 (0.94)

48.0 (1.89) SQ

80.0 (3.15)

28.0 (1.10)

84.0 (3.31)

73.0 (2.87)

48.0 (1.89) SQ

24.0 (0.94)

48.0 (1.89) SQ

80.0 (3.15)

28.0 (1.10)

84.0 (3.31)

73.0 (2.87)

2E3-S 5E3-S 1E4-S

80.0 (3.15) SQ

40.0 (1.57)

80.0 (3.15) SQ

176.0 (6.93) 176.0 (6.93)

44.0 (1.73)

154.0 (6.06) 154.0 (6.06)

106.0 (4.17) 106.0 (4.17)

290.0 (11.42)

KF25 FLANGE[2]

80.0 (3.15) SQ

40.0 (1.57)

80.0 (3.15) SQ

44.0 (1.73)

290.0 (11.42)

KF25 FLANGE[2]

1. INTRODUCTION

[1] On some molbloc-S elements, the venturi

nozzle extends beyond the molbloc downstream flange, making the overall length dimension, F, longer than the fitting to fitting length dimension, K. The nozzle overhang may interfere with some molbloc-S downstream connections or the connection of a blank off cap for leak testing, so a 40 mm diameter ISO-KF nipple is supplied with 5E3-S and 1E4-S molblocs.

[2] Default connector type is listed. Additional

upstream connector options may be available. Contact your FLUKE Sales Representative for details.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

1.2.5 Front and Rear Panel s

1.2.5.1 Front Panel

The front panel assembly provides a 2 x 20 vacuum fluorescent display, a membrane keypad for local user interface and a SOFT ON/OFF key.

 Display  Remote Communic ation Indicator  Multi-function K eypad  SOFT ON/OFF Key and I ndi cator

Figure 2. molbox RFM Front Panel

1.2.5.2 Rear Panel

The rear panel assembly provides pressure and electrical connections to a molbloc mass flow element, communications interfaces and the power connection module.

 Electrical power connector (IEC320-313)  IEEE-488 (GPIB) connector for host

communications

 COM1 (RS232) connector for host

communications

 Electrical connection to molbloc

Figure 3. molbox RFM Rear Panel

 COM2 (RS232) connector for

communicati ons with an external device

 Quick connectors to molbloc pressure

connections (color coded)

 Product label (on bottom of c ase)

2. Installation

2.1 UNP A CKING A ND INSPECTION

2.1.1 Removing From Packagi ng

molbox RFM is delivered, along with its standard access ories, in a corrugated container with polyurethane inserts to hold it in place.

Remove the molbox RFM and its ac cessories from the s hipping container and remove each element from its protective plastic bag.

2.1.2 Inspecting Contents

Check that all items are present and have NO visible damage. A molbox RFM includes:

Table 25. molbox RFM Parts List

DESCRIPTION PART #

molbox RFM Reference Flow Monitor 3078349 Report of Calibration 3152121

ACCESSORIES, INCLUDING:

1 Operation and Maintenance Manual 3152156 1 Power Cord, 2.3m (7.5 ft.) 3133781 1 Set of (2) molbox to molbloc pressure connecting

tubes, 1 m (3.3 ft.)

1 molbox to molbloc electric al / data connection

cable, 1.8 m (6 ft.) 2 straight through quick connector stem 3068652** 1 General Accessories CD (white)

(Important: Incl udes system support s oftware

and documentation.)

* 1.8m. (6 ft.) molbox to molbloc pressure connecting tubes are available as P/N 3070259 ** Equivalent to Swagelok P/N SS-QM2-S-200

2.2 Site Requirements

Install molbox RFM on any stable surface at a convenient height. The front feet are extendible so that the unit can be inclined for easier viewing.

3069560*

3068683

3139043

The molbox RFM can also be mounted in a standard 19-in. rac k mount using the optional rack mount kit (P/N 3069903). For additional information, contact your Fluke Calibration Sales Representative.

When installing molbox RFM, consideration should be given to where the molbloc flow measuring elem ent and assoc iated hardware will be located. m olbox RFM m ay be placed on a shelf or cart at a different height than the molbloc, but the distance between the molbloc and

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

molbox is lim ited by the length of the cable and pneumatic lines connecting them . If you will locate the molbox at a different height than the molbloc, the small errors that would be associated with the difference in pressure can be removed using the molbox RFM head correction (see Section 3.6.8).

If the molbloc/m olbox system is being used to calibrate other devices (DUTs), the m olbloc may need to be connected upstream or downstream of the DUT to operate within the pressure limits of the molbloc’s calibration type (see Sections 1.2.4.1.2, 2.2.4.2.2) and to accommodate the pr essure requirements of the DUT. See the molbloc’s Calibration Report to determine the calibration type of the molbloc you are using.

If the molbloc is connected upst ream of the DUT, it is im portant to supply the molbloc with a stable regulated gas source. The volum e present between the molbloc and the device to be calibrated should be minimized for low flows.

In some cases, m olbloc-S is used with a vacuum s ource downstream to reduc e the pressure at which critical flow is reached. Consider the plac ement of the vacuum pump and connections. Generally, a large vacuum pump is needed that should be isolated from the work area due to noise and oil vapor considerations. If the vacuum pum p and/or vacuum kit was purchased from Fluke Calibration, see the instruction sheets and/or manuals that ar e included with the hardware.

Optional molstics are offered for mounting m olblocs. They provide a convenient means of addressing supply regulation, filtering and interconnection issues with high quality, configured hardware. For additional information, contact your Fluke Calibration Representative.

If a DUT is located upstream of the molbloc and is contaminated, contaminates may flow from the DUT to the molbloc and alter the molbloc calibration. If the DUT must be connected upstrea m of the molbloc, be sure it is clean before flowing and consider installing a filter between the DUT and the molbloc.

2.3 Initial setup

2.3.1 Preparing for O peration

To prepare molbox RFM for check out and operation:

 Remove the plastic caps from the molbox RFM rear panel pressure connections.  Remove the protective plastic sheet from the front panel display.  Familiarize yourself briefly with the front and rear panels (see Section 1.2.5).

Follow the steps described in Sections 2.3.2 to 2.3.6

2.3.2 Power Conne c t ion

Connect the power cable supplied to molbox RFM and to a power source. Power requirements are 85 to 264 VAC, 50 to 60 Hz, 22 VA max. consumption.

 Caution

molbox RFM is always powered and active when power is supplied through the rear panel power connector. The front panel ON/OFF key controls a SOFT ON/OFF (see Section 3.3.3).

Note

2. INSTALLATION

2.3.3 molbox RFM to mol bloc Connection

There are two pressure connections (upstream and downstream) and one electrical/data connection between molbox RFM and a molbloc.

For the pressure connections, us e the m olbox RFM to m olbloc pressur e tubes (P/N 3069560) supplied with the molbox RFM. Following the color coding on the pres sure lines, connec t the upstream (HI) m olbox RFM rear panel quick connector to the upstream port of the molbloc and the downstream ( LO) quick connector to the downstream por t. Push firmly on the quick connectors until they click into place to assure that the connection is properly completed.

For the electrical/data c onnection, use the molbox to molbloc elec trical/data connection cable (P/N 3068683). Connect the cable to the molbloc and then to molbox RFM rear panel connector labeled “molbloc”.

 Caution

Avoid making molbloc electrical connections to molblocs while molbox RFM is plugged in. Damage to the molbloc EEPROM may result (see Section 5.5.5)

2.3.4 GAS Supply And Flowpath Connecti ons

Connect a gas supply to the molbloc. Gas supply requirements are:

• T he gas supply must be c lean and dry (especially free f rom oil and particulates ) to avoid contaminating the molbloc.

• For cor rect m eas urem ents, the gas m ust be of the sam e s pecies as that selected by the molbox RFM GAS function (see Section 3.4.2). Gas purity affects the measurement uncertainty of flow measurements as molbox RFM uses the thermodynamic properties of the flowing gas in its f low calculations. Generally, gases with purity of 99.9 % or better are used for molbloc m easurem ents. Ex cept when using ambient air with molbloc-S, the test gas should be free of any humidity (dew point less than – 40 °C).

• If the m olbloc is connec ted upstream of the DUT , the s upply pressure must be regulated and stable within the limits of the molbloc-L pressure dependent calibration type (see Section 1.2.4.1.2) or molbloc-S calibration type (see section 1.2.4.2.2). If the molbloc is connected downstream of the DUT, use regulators and valves to make sure that the pressure that is delivered to the molbloc will be within the limits of the molbloc calibration type.

• Care should also be taken to make sure that the pressure and flow supplied to the molbloc are always low enough to avoid over pressuring the molbox RFM RPTs (see Sections 1.2.2, 3.1.6). If a DUT ups tream of the m olbloc is oper ated at high press ure, a pressure reducing r egulator should be connected between the DUT and the molbloc to ensure that even momentary high pressure spikes do not reach the molbox RPTs.

 Caution

• The gas supplied to the molbloc should be clean and dry. Contamination

of the molbloc flow passage with liquids, particulates or any other matter will alter the molbloc calibration and can lead to out of tolerance flow measurements.

• NEVER connect a pressure source to the molbloc that is greater than the

overpressure limit of your molbox RFM. molbox RFM overpressure limit is 660 kPa absolute/560 kPa gauge (95 psia/80 psig). Overpressure can damage the molbox RFM internal RPTs (see Section 1.2.2, 3.1.6).

If you are using a Fluke Calibration molstic: Install the molbloc into the molstic and

connect a gas supply following the molstic ins truction sheet or m anual. The flow through the molbloc must be in the direction of the arrow engraved on the molbloc.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

If you are NOT using a Fluke Calibration molstic: Connect a gas supply to the molbloc

according to the Recommendations for molbloc Ins tallation instruction sheet, Fluke docum ent #3152446, and the pressure limits of the molbloc calibration type. A valve should be installed between the pressure supply and the molbloc to allow flow to the molbloc to be interrupted. The flow through the molbloc must be in the direction of the arrow engraved on the molbloc.

Adaptor kits are available from Fluke Calibration to make connec tions from the molbloc or molstic fittings to other common connector types. Ask your Fluke Calibration Sales Representative about your specific adaptor requirements.

 Caution

Operating at pressures other tha n those of the molbl oc-L pr essure dependent calibration type (see Section 1.2.4.1.2) or molbloc-S calibration type (see Section 1.2.4.2.2) may result in out of toleran ce flow measurement s. Refer to the molbloc Calibrati on Report to de termi ne its c alibr ation ty pe.

2.3.5 Vacuum Supply (molbloc-S only)

In some cases m olbloc-S is operated with a vacuum downstream of the molbloc to reduce the back pressure so that critical flow can be reached at a lower upstream pressure (see Section 3.1.2).

There is no lower limit to the pressure that may safely be applied to molbox RFM RPTs.

If you are using Fluke Calibration supplied downstream vacuum connect kit and vacuum pump: Install the kit and pump following the supplied instruction sheet or m anual.

Carefully follow the pump manufacturer’s recommendations for pump operation.

If you are NOT using Fluke Calibration supplied downstream vacuum connect kit and vacuum pump: Carefully evaluate vacuum pump specifications to be sur e that the vacuum

source available has the pum ping speed necess ary to safely handle the planned flows and to maintain low enough pressure at planned flow rates.

Be sure to provide facilities to avoid flowing into the pump when the pump is not ON as this will cause pressure to build up on the pump and may damage it. Normally, a shut-of f valve should be included between the pump and the molbloc-S.

It is preferable to install a check valve with very low cracking pressure between the molbloc and the vacuum shut-off valve.

Adaptor kits are available from Fluke Calibration to make connections fr om the molbloc or molstic fittings to other common connector types. Ask you Fluke Calibration Sales Representative about your specific adaptor requirements.

 Caution

Operating at pressures other than those of the molbloc-S calibration type may result in out of tolerance flow measurements (see Section 1.2.4.2.2). Refer to the molbloc Cali bratio n Report to de termin e its ca libra tion ty pe.

2.3.6 Communications Connect ions

If molbox RFM is being interf aced to a computer, connect an RS232 cable to molbox RFM COM1 or an IEEE-488 cable (cables not supplied) to the m olbox RFM IEEE-488 interface. Configure the interface (see Section 3.6.6).

2.4 Power UP and Verification

2.4.1 Power UP

Connect the molbox RFM power cable to an electric supply of 85 to 264 VAC (47 to 440 Hz). Observe the front panel display as molbox RFM initializes, error chec ks, calibrates its internal ohmic measurem ent system and goes to the m ain run screen (s ee Section 3.2). The top left side of the main run screen should display a flow value near zero or <BPR HI>. If <NO BLOC> is displayed, molbox RFM has not been able to identify a molbloc connection and load molbloc information. Verif y that a valid molbloc is proper ly connected (see Section 2.3.3) and press [SETUP], <4molbloc> to load the molbloc data. If m olbox RFM is still unable to identify a molbloc, the molbloc may require reloading of EEPROM information or molbox RFM may require repair.

If the molbox RFM fails to reach the main run screen: Service may be required. Record the sequence of operations and displays observed and contact a Fluke Calibration Authorized Service Provider (see Section 7.2).

Note

molbox RFM is always powered and active when power is supplied through the rear panel power connector. The front panel ON/OFF key controls a SOFT ON/OFF only (see Sec tion 3.1 .4).

2. INSTALLATION

2.4.2 Check Proper Pressure Measurement Operation

Check that the molbox RFM pressure measurements are operating properly. Proceed as follows:

 Connect the molbloc to the molbox RFM (see Section 2.3.3).  Shut off the gas supply to the molbloc and open one or both molbloc ends to atmospheric

(ambient) pressure.

 Press [P&T] and observe the display of the pressure measured by the upstream and

downstream absolute RPTs. Observe the upstream and downstream pressures (see Section 3.4.5). These should indicate current atmospheric pressure and be in agreement within ± 0.5 kPa (0.1 psi). If the two readings disagree by more than ± 0.5 kPa (0.1 psi), one or both RPTs may be out of calibration and service may be required. A difference in the RPT readings could also indicate that there is some flow through the molbloc. Check the flowpath valve or disconnect the molbloc to ensure that there is actually no flow.

 If the molbox RFM is equipped with the microrange option, and the option is currently

active, the bottom line left side of the display is <mDP>. Observe the differential pressure value following this indication (see Section 3.4.5). It should be 0, ± 50 Pa (0.004 psi). If the indication is different from zero by more than ± 50 Pa (0.004 psi), the microrange differential RPT may be out of calibration and ser vice may be required. Again, a non-zero differential pressure could indicate an unexpected flow through the molbloc.

 Press [ESCAPE] to return to the main run screen.

2.4.3 Check Proper Temperature Measurement Operation

Check that the molbox RFM temperature measurement is operating properly. Proceed as follows:

 Connect a molbloc to the molbox RFM (see Section 2.3.3).  From the molbox R FM main run screen, press [P&T] twice to arrive at the temper ature

display screen. Observe the temperature readings of the two molbloc PRTs

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

(see Section 3.4.5). If the molbloc has been in a stable temperature environment for 30 to 60 minutes, the temperature indications should be roughly ambient temperature and the two indications should agree within ± 0.2 °C. If the two readings disagree more than ± 0.2 °C, there may be a problem with the m olbloc or the molbox RFM TEMPERATURE MEASUREMENT function and service may be required.

2.4.4 Leak Check

It is recommended that a new molbox RFM be leak checked at start-up to assure that no internal leaks developed during shipping and handling. Run the molbox RFM on-board INTERNAL LEAK CHECKING function (see Section 3.4.5).

2.4.5 Check/Set Security Level

molbox RFM has a security system based on user levels. By default, the security system is set to “low”, which includes certain access res trictions, and there is no password required to change the security level (see Sections 3.6.2). As part of the molbox RFM startup, set your desired security level and a password.

 Caution

molbox RFM is delivered with the security level set at low to avoid inadvertent altering of critical internal settings but with access to changing security levels unrestricted. It is recom mended that the low security level be maintained at all times and password protection be implemented if control over setting of sec urity level s is des ired .

2.5 Additional Precautions to Take Before Making Flow Measurements

Before using molbox RFM to make meaningful flow measurements, consider the following:

• Be sure that the gas pressure connected to the molbloc is not great enough to overpressure the

molbox RFM internal RPTs.

• For m olbloc-L operation, the pres sure m eas uring RPT s should be tared at the operating line pressure

(see Section 3.4.4.1).

• Operating pressur e should be within the limits of the molbloc calibration type (see Sections 1.2.4.1.2.

and 1.2.4.2.2).

• The gas type selected should be the gas flowing through the molbloc (see Section 3.4.2).

• For best acc uracy, the gas type should be a gas with which molbloc has been calibrated. See the

molbloc Calibration Report or pr ess [SETUP], <4molbloc>, [ENTER] t o see if the gas is included in the molbloc calibration gas list (see Section 3.5.4).

• Do not s upply a gas or connect a device under tes t ups tr eam of the molbloc that m ay contam inate the

molbloc.

• Be sure the flow unit of measure you are using is correct. Many different types of flow units of

measure are com monly used. Before selecting a unit of measure, familiarize yourself with Section

3.4.3 thoroughly.

• Troubleshooting: For information on typically encountered start-up and operational issues, see

Section 6.

2. INSTALLATION

2.6 Short Term Storage

The following is recommended for short term storage of molbox RFM:

• Vent the molbox RFM pressure ports.

• Disconnect the power supply.

When m olbox RFM will NOT be used for s ome tim e, it m ay be left powered. Use the SOFT ON/OFF key to turn OFF the display.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

Notes

3. Operation

3.1 General Operating Principles

3.1.1 molbloc-L and molbloc-S operation

molbox RFM operates somewhat diff erently depending on whether a molbloc-L or molbloc-S is connected to it. mobloc-L and molbloc-S operation use different displays and flow calculations and some menu items are present for only one type of molbloc.

Most molbox RF M s ettings, s uch as gas , units, K f actor, etc ., are com m on t o both molbloc-L and molbloc-S operation. Changes made to these settings while operating one type of molbloc will still be in effec t when the other type of m olbloc is c onnec ted. The only setting that is used for both molbloc types but is st ored independently for each type is tare. See sect ion 3.4.4.1 for details on the tare function.

Several of the molbox RFM screen displays and functions described in this section are different for molbloc-L and molbloc-S operation. Where the differences are major, the description of these functions is divided into two parts.

3.1.2 molbloc-S BPR Limi t s

To make f low measurements within predictable m easurement uncer tainty limits with a molbloc-S flow element, critical (sonic) flow conditions must be present. Critical flow exists when the gas velocity reaches the local speed of sound at the throat of the molbloc-S venturi nozzle.

molbox RFM uses the bac k pressure ratio, or BPR (the ratio of the molbloc-S downstream absolute pressure to the upstream absolute pressure) to determine whether the flow is critical. For venturi nozzles in general, the BPR must remain below a certain value for critical flow to exist. Commonly accepted practice for typical venturi nozzle use suggests that this limiting BPR value, or “choking ratio”, is approximately 0.5. That is, the absolute pressure downstream of the nozzle must be less than one half of the absolute pres sur e upstream of the nozzle. Empirical study of the venturi nozzles used in molbloc-S shows that the actual choking ratio, or maximum BPR for critical flow, varies between about 0.4 and 0.9 as a function of the Reynolds number (Re) over which the molblocs ar e used. molbox RFM continually calculates Re during flow measurement and can monitor the BPR to ensure that it does not exceed the choking ratio at the current Re conditions. molbox RFM uses a conservative BPR limit to indicate to the user when the BPR approaches the choking ratio, to ensure that flow measurements are only made under “safe” critical flow conditions. molbox RFM includes features to measure BPR, automatically alert the operator when the BPR is too high and prevent measurements when flow is not critical (see Sections 3.1.3.2, 3.4.4.5, 3.6.9).

Maintaining a sufficiently low BPR must be considered by molbloc-S users when selecting molbloc-S sizes and hardware setups to use for flow measurements. For example, if a molbloc-S will be used with atmospheric pressure downstream , then the molbloc can only be used over a range of upstream pressures starting at the m axim um pres sure for its calibration type down to a minimum pres sure value at which the BPR becomes equal to the BPR limit calculated by molbox RFM. Since mass flow through molbloc-S is proportional to the upstream absolute pres sure, the flow range for the molbloc in this application is defined by this BPR limit. To maximize the range of a molbloc-S element, a vacuum pump can be connected downstream to reduce the downstream pressure while flowing. When the downstream pressur e is k ept suffic iently low, the upstream pressure, and thus the m ass flow

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

rate, can be adjusted all the way down to the minimum value for the molbloc’s pressure dependent calibration type without being limited by the BPR value.

Depending on the placement of the molbloc-S in relation to the DUT and other hardware, and the availability and capacity of a vacuum pump that may be used, the molbloc-S downstream pressure will vary in different applications . Calculating Re for different molbloc-S sizes and flow rates, and estimating the choking ratio (maximum BPR limit) as a function of Re is somewhat com plex, so Table 26 is offered to give the minim um flow that can be achieved with each molbloc-S size, without exceeding molbox BPR limits, when the molbloc-S downstream pressure is k nown: In actual operation, m olbox RFM calculates the Re and BPR ratio and provides an indication of whether the BPR is adequate for measurements to be made.

Table 26: Minimum molbloc-S Critical Flow (slm) in Nitrogen at Various molbloc-S Downstream Pressures

N2 MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH MOLBLOC DOWNSTREAM PRESSURE OF:

molbloc-S

DESIGNATOR

1E1-S 2E1-S 5E1-S 1E2-S 2E2-S 5E2-S 1E3-S 2E3-S 5E3-S 1E4-S

≤ 5 kPa (0.7

psia)

[2]

0.2

[2]

0.4

[2]

1

1.7 3.4 4.7 7.7 8.4 9.4 11 14 17 20

[2]

2

3.4 5.9 8.4 15 16 18 21 27 33 38

[2]

4

5.9 9.8 16 28 31 34 40 51 63 74

[2]

10

[2]

20

[2]

40

[2]

100

[2]

200

10 kPa (1.5

psia)

25 kPa (3.5

psia)

50

kPa

(7

psia)

100 kPa (15

psia)

110 kPa

(16

psia)

125 kPa

(18

psia)

150

kPa

(22

psia)

200 kPa

(30

psia)

0.4 0.9 1.1 1.8 2.0 2.2 2.4 2.8 3.5 4.2

0.7 1.6 1.8 3.2 3.5 3.7 4.2 5.6 7.0 7.6

12 20 37 67 72 80 95 122 149 179

[2]

20 40

100 200

39 69 129 139 154 184 239 294 349

[2]

73 131 248 268 298 358 468 578 687

[2]

173 317 596 646 746 871 1 145 1 420 1 694

[2]

347 615 1 173 1 273 1 442 1 741 2 240 2 789 3 338

250 kPa

(36

psia)

[1]

300 kPa

psia)

(44

[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, fl ow values will

generally be higher; for example, the flow values for a gi ven molbloc and upstream pres sure are approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a gi ven pres sure may vary by up to 2 % due to flowpath machining tolerances.

[2] Limited by 20 kP a minimum cal i bration pressure rather than back pressure ratio

3.1.3 Flow Ready/Not Ready Indication

The character to the left of the measured flow on the MAIN run screen provides a flow Ready/Not Ready indication. This indication is intended to provide the user with a clear and objective indication of when a stable flow has been achieved.

Ready <*> is indicated when the current stability (rate of change) of flow is less than the stability limit. The user can set the stability limit (see Section 3.5.5). The Ready/Not Ready indication is often used when comparing molbox RFM and a test device to help determine when steady state flow conditions are present so that a valid comparison reading can be made.

In addition to the conditions listed in sections 3.1.3.1 and 3.1.3.2 molblocs that have named calibration support will flash the flow display and indicate a Not Ready condition when the measured flow exceeds the calibrated flow range by 5% or the measured upstr eam pressur e exceeds the calibrated pressure r ange by 10 kPa above the maximum pressure or 10 kPa below the minimum pressure. The downsream pressure is used when a molbloc-L downstream calibration is active.

3. OPERATION

3.1.3.1 molbloc-L Operation

In molbloc-L operation, the Ready/Not Ready indic ation also helps guard against using molblocs above their valid range by monitoring the Reynolds number of the flow. If the Reynolds number of the current flow exceeds 1 300, the Ready (<*>) indicator flashes. The current Reynolds number value can be viewed using [P&T] (see Section 3.4.5). If molblocs are used within the pressure and flow range limits for the flowing gas and the press ure dependent calibration type (see Section 1.2.4.1.2), a Reynolds number of 1 200 will never be exceeded (1 300 is used as the warning limit to allow for individual molbloc differences).

Ready/Not Ready character indications are:

<*> Flow Ready (stable). <*> (Flashing): Reynolds number > 1 300.

↓> Flow Not Ready (unstable and decreasing).

< <

↑> Flow Not Ready (unstable increasing).

[Alternate] Flow Not Ready, flow flashes (pressure exceeds calibrated

pressure range by 10kPa)

<F> Flow Not Ready, flow flashes (flow exceeds calibrated max flow by 5%)

3.1.3.2 molbloc-S Operation

In molbloc-S operation, the Ready/Not Ready indic ation is also used to warn the user when the BPR (back pressure ratio) is too high to ensure c ritical flow (see Sections 3.1.2). When the BPR is beyond the choking limit, molbloc-S flow measurements may not be valid and the Ready indicator becomes . The Ready/Not Ready indicators based on flow stability are also used in molbloc-S operation, but the indicator takes priority over other indicators.

Ready/Not Ready character indications are: <*> Flow Ready (stable).

↓> Flow Not Ready (unstable and decreasing).

< <

↑> Flow Not Ready (unstable increasing). Flow Not Ready (BPR high / sub-critical flow) [Alternate] Flow Not Ready, flow flashes (pressure exceeds calibrated

pressure range by 10kPa)

<F> Flow Not Ready, flow flashes (flow exceeds calibrated max flow by 5%)

3.1.4 Soft [On/Off] Key

molbox RFM is equipped with a SOFT [ON/OFF] key and indicator LED on the bottom left hand corner of the front panel. The purpose of the SOFT ON/OFF key is to put molbox RFM into a dormant mode in which the display is turned OFF but power is still supplied and OVERPRESSURE functions are still active. When molbox RFM is ON, the ON/OFF indicator is ON continuously.

When molbox RFM is SOFT OFF, the ON/OFF indicator blinks every 5 seconds. When molbox RFM is SOFT OFF, receiving a remote command turns it ON. When molbox RFM is SOFT OFF, an overpressure conditions turns it ON.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

3.1.5 Microra nge opt ion (Optional)

The molbox RFM off ers a mic rorange option to improve m olbloc-L flow measurem ent specif ications below 10 % of full scale of the molbloc being used (see Section 1.2.4.1.1) for any range from 1E1-L thru 3E4-L. Due to the low differential pressure of a 1E5-L, the microrange option is required to use this range of molbloc within the standard flow measurement specification. The microrange option is only active during molbloc-L operation and has no effect on molbloc-S operation or specifications.

The microrange option includes a low differential pressure RPT to improve the measurement of differential pressure acros s the molbloc below 12.5 kPa (1.8 psi). A three-way valve and on-board logic automatically put the low differential RPT into and out of service. This allows it to be used as the source of differential pres sure values whenever differential pressure is under 12.5 kPa (1.8 psi) and bypassed for protection from overpr essure when differential pres sure exceeds 13.5 kPa (2 psi) (see Figure 3).

With autom atic micr orange operation ON, the mic rorange option (if present) is used transparently to the operator to optimize flow measurement resolution and accuracy (see Section 3.4.7). With automatic micror ange operation OFF, the microrange option is not us ed and all measurements are made using the upstream and downstream absolute RPTs only.

When the type of molbloc connected to m olbox RFM is changed from molbloc-L to molbloc-S, or molbox RFM power is cycled, the last state of the micror ange option (ON or OFF) is retained for molbloc-L operation.

The microrange option can also be controlled manually by pressing [SPECIAL] and selecting <7micro> (see Section 3.6.7).

The microrange indicator on the main run screen (see Section 3.4.7) indicates the status of the microrange option.

 High Isolation: Open  Low Isolation: Open  Bypass: Closed  Mirorange Bypass: Closed (microrange active)

Open (microrange inactive)

Figure 4. molbox RFM Internal Pneumatic Schematic –

MICRORANGE OPTION RPT ACTIVE/INACTIVE

Note

• To determine if a molbox RFM is equipped with the microrange option, check

the model number on the product label on the bottom of the molbox RFM case. If the model number includes a “-M”, the microrange option is installed.

• The microrange option is only active during molbloc-L operation. Mirorange

has no effect on molbloc-S operation or measurement specifications.

3. OPERATION

transducer, the display of microrange

Microrange RPT: OVERP! kPa [ENTER]

3.1.6 Reference pressure transducer (RPT) overpressure

3.1.6.1 Upstream and Downstream Absolute RPTS

Every molbox RFM has two absolute RPTs, one measures molbloc upstream pressure, the other usually measures molbloc downstream pressure and may provide a second measurement of molbloc upstream pressure in molbloc-S operation. In normal operation, they are not used at pressures greater than 600 kPa absolute (87 psia).

Exposing the molbox RFM RPTs to pressures greater than the maximum operating pressure may damage them . molbox RFM has a system of warnings and alarms to protect itself from overpressure (see Section 3.6.3.1).

3.1.6.2 Differential RPT, Microrange Option

The microrange option low differential RPT has no overpressure warnings or alarms in normal operation. It is, to the extent possible, protected from overpressure automatically and transparently as it is put into and out of service using the molbox RFM on-board valving.

In run calibration operation (see Section 5.2.4.1), the microrange RPT has an OVERPRESSURE function whose operation is similar to the absolute RPT overpressure function (see Section 3.6.3). Overpressure occurs at about 13.7 kPa (2 psi) differential.

When an overpressure condition occurs during run calibration of the microrange

pressure indicates:

Be sure the pressure conditions that caused the overpressure to occur have been cleared. Then press [ENTER] to reactivate the microrange RPT.

When using molbox RFM equipped with the microrange option, avoid very rapid pressurization of one molbloc port. Attempt to open flow isolation valves slowly. The microrange option low differential RPT is protected from overpressure automatically by internal valving. However, dumping pressure very rapidly on one port of the molbloc while the differential RPT is active could cause a very sudden surge in differential pressure that can overpressure it.

3.2 Main Run Screen

The molbox RFM MAIN run screen is its home display that is reached upon power up and from which other f unc tions and menus are accessed. I t is the top level of all menu structures. It indicates the current measured flow as well as a variety of additional information, if desired.

The appearance of the MAIN r un sc reen diff ers depending on whether the active m olbloc is a molbloc-L or a molbloc-S.

 Caution

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

↑

↓

internal pressure model for t he active calibration gas.

*FLOWWW unitkm GGGG D DISPLAY MODE DATA

σ

∑

3.2.1 molbloc-L Operation

Some items in the molbloc-L MAIN run screen may change or flash at times, to indicate that certain limits are exceeded, as described in the text accompanying the following screen display:

1. <*> Ready/Not Ready indication: <*> when Ready (flashes if Reynolds number of the flow exceeds 1 300 or if flow was not ready for a full averaging period in AVERAGE display), < (increasing) or < evolution when Not Ready (see Section 3.1.3). May also display or <F> if the calibrated pres sure or flow range of the attached molbloc is out of range.

2. <FLOWWW>: Numerical value and s ign of the flow m easured by molbox RFM. Result of l ast flow averaging cycle if in AVERAGE display (see Section 3.4.6.2). Flashes if Reynolds num ber of the flow exceeds 1 300. Flashing also occurs when a named calibration is active and t he flow exceeds the calibrated range by 5%, or the m easured upstream pressure exceeds the calibrated pressure range by 10 kPa above the maximum pressure or 10 kPa below the minimum pressure. The downsream pressure is used when a molbloc-L downstream calibration is active. The field displays “PMODEL” when the pressure exceeds the molbox

3. <UNIT>: Current flow unit of measure (see Sect i on 3.4.3).

4. <K>: Indicates whether a gas correction factor (K fac tor) i s currently being appli ed to the measured flow (see Section 3.4.1). <K> if a factor is bei ng applied, blank if no factor is bei ng applied. <A>: Indic ates that a flow adjustment adder and/or m ultiplier) is currently being applied to the m easured flow using the ADJ func tion (see Section 3.5.3). <A> if ADJ is being applied, bl ank if no ADJ is being appli ed. Alternating When bot h ADJ and a K factor are applied, t he i ndi cation alternates between <K> and <A> at each screen update.

5. <m>: Microrange option indicator (s ee Sections 3.4.7 and 3.6.7). Possible indications include: Bl ank, NO character: The m icrorange option is currently OFF or the m olbox RFM is not equipped with the

microrange option.

<m>: Automatic microrange is ON (see Sec t i on 3.4.7). <d>: Manual microrange is ON and t he differential press ure reading being used to calculate flow is coming

from the microrange di f ferential RPT (see Secti on 3. 6.7).

<a> (flashing): Manual microrange is ON and the differenti al pressure reading being used t o calculate f low

is NOT coming from the microrange low differential RPT. It is the dif ference between the upstream and downstream absolute RPTs (s ee S ection 3.6.7).

6. <GGGG>: Indic ates the current molbox gas selection (s ee Section 3.4.2). This should be the gas that is flowing through the molbloc.

7. <D>: Indication of what is being displayed on the bottom line of the display as set by the DEVIATION function (see Secti on 3. 4.6.6). Possible indications include:

<R>: Current DISPLAY m ode is RA TE (see Sect ion 3.4.6.1); or if <n avg> is in the bottom right hand corner

of the display, current DIS PLAY mode is “average” and thi s is the inst antaneous reading AVERAG E screen (see Section 3.4.6.2).

> (decreasing) indicating direction of flow rate

>

<

> Current DISPLAY mode is AVERAGE (see Section 3.4.6.2).

<H> Current DISPLAY mode is HI / LO (see Section 3.4.6.3). <

> Current DISPLAY mode is TOTAL (s ee Section 3.4.6.4). <=> Current DISPLAY mode i s UNIT (see Section 3.4.6.5). <D> Current DISPLAY mode is DE V IATION (see Section 3.4.6.6). <F> Current DISPLAY mode is FREEZE (see Secti on 3.4.6.7). Bl an k, No character Current DISPLAY mode is CLEAN (see Sect i on 3.4.6.8).

8. <DIS PLAY MO DE DAT A>: Information displayed depends on current dis pl ay mode (see Section 3.4.6).

3. OPERATION

↓

*FLOWWW unitk GGGG D DISPLAY MODE DATA

3. <UNIT> Current flow unit of measure (see Section 3.4.3). Flashes if BPR is higher than the choking limit.

Note

• When a number is too large to show in the allocated display space, molbox

RFM displays <********>.

• molbox RFM has a SCREEN SAVER function that caus es the di spl ay to d im

if NO key is pressed for 10 minutes. Pressing a key restores full power to the display. The screen sav er activation time can be changed or screen saving can be completely suppressed (see Section 3.6.5.1).

3.2.2 molbloc-S Operation

As with molbloc-L there are limits on som e of the conditions that m ay exist if the user expects to make accur ate flow measur ements with molbloc-S. The key condition that can be monitored is the back pressure ratio, or BPR, which determ ines whether cr itical f low through the molbloc is achieved (see Section 3.1.2).

When the BPR is in a “safe” region for critical flow measurements, the appearance of the MAIN run screen is identical to the MAIN run screen for molbloc-L operation (see Section

3.2.1). When the molbox RFM BPR limit is exceeded, there are two possible MAIN run screen indicators. A flashing flow value and unit indicate that the BPR limit has been exceeded. In this condition, the flow may not be critical and flow measurements should not be relied on to meet specifications. W hen the BPR limit is exceeded by a large margin, the flow is almost certainly not critical and the calculated value may be nonsensical, so the flow value is not shown and is replaced by <BPR HI>.

Note

When molbloc-S is in the BPR OFF mode (see Section 3.6.9), BPR is not monitored and invalid flow values may be displayed in the molbloc-S MAIN run screen with no indicati on that a the B PR value i s high.

1. <*> Ready/Not Ready indication; <*> when Ready <↑> (increasing) or

> (decreasing) indicating direction of flow rate evolution when Not

<

Ready; when BPR is higher than choking limit. (see Section 3.1.2). May also display or <F> if the cal ibrated pres sure or f low range of the attached molbloc is out of range.

2. <FLOWWW>: Numerical value and sign of the flow m easured by

molbox RFM. Result of l ast flow averaging cycle if in AVE RAGE display (see Section 3.4.6.2). Flashes if BP R is higher than the choking limit. If BPR exceeds the choking lim it by a large margin, <BPR HI> replaces the flow value. The flow will flash when a named calibration is active and the flow exceeds the calibrated range by 5% or the measured upstream pressure exceeds the calibrated pressure range by 10 kPa above the maximum pres sure or 10 kPa below the minimum pressure. The field displays “PMODEL” when the pressure exceeds the molbox internal pressure model for the act i ve calibration gas.

4. <K>: Same as molbloc-L (see Secti on 3. 4.1).

5. <GGGG>: I ndicates the current molbox gas selection (see Sect ion 3.4.2). This should be the gas that is flowing through the molbloc. <AirW> indicates that air is select ed and a humidit y correcti on is being applied (see Section 3.4.2.2).

6. <D>: Same as molbloc-L (see Sect i on 3.4.6).

7. < DISPL AY MODE DATA>: Inform at i on di splayed depends on current display mode (see Section 3.4.6).

Note

• When a number is too large to show in the allocated display space, molbox

RFM displays <********>.

• molbox RFM has a SCREEN SAVER function that causes the di spl ay to dim

if NO key is pressed for 10 minutes. Pressing a key restores full power to the display. The screen sav er activation time can be changed or screen saving can be completely suppressed (see Section 3.6.5.1).

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

are for

3.3 Manual Operation

molbox RFM is designed to offer the optimum balance between simple, intuitive operation and the availability of a wide variety of functions with a high level of operator discretion. T he local operator interface is through the front panel’s 2 x 20 char acter alpha-numeric display and a 4 x 4 multi-function keypad. Remote operation by RS232 or IEEE-488 interface is also available (see Section 4).

3.3.1 Keypad Layout and Protocol

Molbox RFM has a 4 x 4 keypad for local operator acc ess to direc t functions , function m enus and for data entry.

 The Function/Data keys allow very commonly

used functions to be acc essed directly from t he MAIN run screen by a single keystroke. The name of the function is on the bottom half of the key (see Sections 3.3.4 and 3.4. ) These keys enter numerical values when editing.

 The Editing and Execution keys

execution, suspending execution, backing up in menus and editing entries

 The Menu/Data keys provide access to function

menus from the MAI N run sc reen. The m enu name is on the bottom half of the key. T he SET UP menu is for more frequently used funct ions. The SPECIAL menu is for less frequently used and internal functions. These keys enter numerical values when editing.

Figure 5. Keypad Layout

Pressing the [ENTER] key generally causes execution or forward movement in the menu tree. Pressing the [ESCAPE] key generally allows movem ent back in the m enu tree and/or c auses

execution to cease or suspend without changes being implemented. Pressing [ESCAPE] repeatedly eventually returns to the MAIN run screen. From the MAIN run screen, pressing [ESCAPE] allows momentary viewing of the molbox RFM identification screen.

Pressing the [+/-] key changes a num er ical s ign when editing. It also toggles through multiple screens when available.

Pressing the [

←] and [→] keys allows reverse and forward cursor movem ent when editing

data entry. These keys are also used to scroll through menu choices. Menu selections can be made by pressing the num ber of the s election directly or by pressing

←] and [→] to place the cursor on the number of the desired selection and pressing

[ [ENTER].

Note

Some screens go beyond the two lines provided by the display. This is indicated by a flashing arrow in the second line of the display. Press [

→] to move the cursor to access the lines that are NOT visible or

and [ directly enter the number of the hidde n menu choi ce if y ou know it.

←]

3.3.2 Sounds

molbox RFM is equipped with a variable frequency tone device to provide audible feedback and alarms. Sounds are used for the following indications:

3. OPERATION

Valid key press

Invalid key press

Totalizing time complete Purge time complete Near overpressure limit

exceeded Overpressure limit

exceeded

Brief beep. Choice between three f requencies or NO sound is available (see Section 3.6.5.2).

Descending two tone “blurp”. Choice of NO sound is available (see Section 3.6.5.2).

Three, 2 second beeps (see Section 3.4.6.4). Three, 2 second beeps (see Section 3.4.4.2). Intermittent 1 second beeps (see Section 3.6.3).

5 second high frequency beep (see Section 3.6.3).

3.3.3 Soft [On/Off] Key

molbox RFM is equipped with a SOFT [ON/OFF] k ey and indicator LED on the bottom left hand corner of the front panel. T he purpose of the SOFT ON/OFF key is to put molbox RFM into a dormant mode in which the display is turned OFF but power is still supplied and OVERPRESSURE functions are still active. When molbox RFM is ON, the ON/OFF indicator is ON continuously.

When molbox RFM is SOFT OFF, the ON/OFF indicator blinks every 5 seconds. When molbox RFM is SOFT OFF, receiving a remote command turns it ON. When molbox RFM is SOFT OFF, an overpressure conditions turns it ON.

3.3.4 Direct Function Keys Summary

Local operation of molbox RFM is through the front panel 4 x 4 pressure sensitive keypad. To minimize the use of multi-layered menu structures, the keypad numerical keys also provide direct access to the m ost com monly used functions . The func tion access ed is labeled on the bottom half of the each k ey. Direct f unction keys are active whenever molbox RFM is in its MAIN run screen. Table 27 summarizes the operation of the direct function keys. See corresponding manual sections for full detail on each direct function.

Note

It may be useful to ke ep a copy of Table 27, Summary of mol box RFM Direct Function Key Operations, near the molbox RFM, especially when first becoming acquainted with its ope ra tion.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

Table 27. Summary of molbox RFM Direct Function Key Operations

DIRECT FUNCTION KEYS ARE ACTIVE FROM THE MAIN RUN SCREEN

SEE CORRESPONDI NG MANUAL SECTIONS FOR FULL DETAIL

Menu of commonly used setup features including unit changes and stability setting.

Menu of less frequently used internal f unctions and settings i ncluding preferences, resets, molbox calibration, remote interfaces, BPR (bac k pressure ratio) when using molbloc-S.

Turn automatic m i crorange ON/OFF.

Load the molbloc that is currently connected to molbox RFM. Use this to activate a new molbloc after a m ol bl oc change or to view details on the molbl oc that is currently in use.

Set the resolution with which the measured flow and other values are displayed.

Run the TARE, LEAK CHECK, PURGE, AutoZ and BPR functions .

Display the current pressure m easurements (first pres s). Display the current molbloc temperature measurements (second press). Display returns to

the normal run screen (third press).

Define the DISPLAY func tion for the second line of t he molbox RFM display. Choices include rate, average, hi/lo, t otalize, 2nd unit, deviation, freeze, clean.

Set/change a DUT gas correcti on factor (K factor).

Set flow measurement gas. This is also t he k ey used to access and selec t named gas calibrations on a molbl oc .

Set flow measurement uni t. Choice of units can be c ustomized.

3.4 Direct Function Keys

3.4.1 [K]

 PURPOSE

To cause the flow value calculated by molbox RFM to be multiplied by a factor, K. Generally used to apply a test device’s gas correc tion f ac tor us ed when a test device is calibrated with a gas other than its normal process gas.

 PRINCIPLE

Frequently, when testing or calibrating a flow-measuring device, it is not possible to flow the gas with which that device will normally be operated (the process gas). This may be because the

3. OPERATION

K Factor? 1on 2off

is selected, no conversion factor will

K Factor:

1.00000

process gas is toxic or corrosive or sim ply because it is not available or convenient to use. When the pro cess gas cannot be used for calibration, it is com mon to use a different gas for testing or calibrating (the calibration gas). In this case, a factor representing the relationship between the calibration gas and the process gas for the test device may be applied so that the

calibration gas simulates the p rocess gas. The calibration gas that sim ulates the process gas is often called a surrogate gas for the process gas.

The relationship between a test device’s process gas and calibration gas is frequently called a K factor or gas conversion factor. The factor’s value depends on specific properties of the test device and determining the value is the responsibility of the device manufacturer.

For example, Silane (SiH4) is a frequently used gas in semiconductor processing. SiH4 is highly toxic and requires extensive handling precautions so it is not practical for use in calibration and testing. A major m anufacturer of Mass Flow Controllers (MFCs) recomm ends that MFCs that are to be used with Silane be tested with Sulfur Hexafluoride (SF6), a nontoxic, non-flammable gas, using a conversion factor of 0.970. In other words:

SF6 flow x 0.970 = equivalent SiH4 flow for the MFC

The K function in molbox RF M allows a gas conversion factor to be entered by which flow values measured by m olbox RFM will be multiplied. In this exam ple, 0.970 would be entered as K so that the values indicated by molbox RFM when SF6 is f lowing through the molbloc simulate the flow of SiH4 for that manufacturer's MFC.

When the K f unction is active, molbox RFM perform s all of its flow calculations normally but multiplies the current flow value by the value of the K factor prior to displaying it.

The gas selected on molbox RF M which is displayed in the upper right corner of the molbox RFM display should always be the gas that is actually flowing through the molbloc.

Note

• K factors or gas conversion factors are based on the properties of the

device being tested. Their availability and validity are the responsibility of that device's manufacturer. molbloc/molbox does not use factors or conversion coefficients between gases. Flow is calculated from molbloc characteristics and specific gas properties for each gas supported by molbox. The gas selected on molbox RFM (see Section 3.4.2) which is displayed in the upper right corner of the molbox RFM display should always be the gas that is actually flowing through the molbloc.

• If the K function and the ADJ function are both active, the ADJ adder and

multiplier are first applied to the measured molbloc flow, then the result is multiplied by the K factor. This order of operations reflects the fact that the ADJ values are intended to represent an adjustment to be applied to the molbloc flow while measuring the calibration gas that is flowing, and the K factor is a correction related to gas effects on the device under test measurement (See Section 3.4.6).

 OPERATION

To enable a gas conversion factor press [K] f rom any run screen. The display is:

If <2off> be applied. If <1on> is selected, the next screen is:

The value of the gas conversion fact or c an be edited as desired. Pressing [ENTER] returns to the MAIN run screen with the entered K factor ac tive. The letter <K> is always appended

to the flow unit indication in the run screens when the K function is ON (e.g., sccmK). A K factor value of 1 is handled as if the K function were OFF.

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

 Caution

When the K function is ON, as indicated by a <K > fol lowing the c ur re nt flow unit in the first line of the MAIN run screen, the current molbox RFM flow indication equals:

(flow as calculated by molbox RFM for the selected gas) x (the current K factor)

So the indicated flow is actually in error (biased) relative to the true flow through the molbloc by the value of the K factor. Care should be taken to ensure that the correct molbloc range is selected for tests when a K fact or is used, since the actual flow rate through the molbloc is different from the device under test range in the process gas.

3.4.2 [GAS]

 PURPOSE

To specify the gas that is currently flowing through the molbloc so that molbox RFM uses the correct gas property values in its flow calculations.

 PRINCIPLE

molbox RFM calculates the flow through a molbloc from:

• molbloc geometric characteristics

• gas pressures

• gas temperature

• specific characteristics of the flowing gas

The gas characteristics include:

• gas density under standard conditions

• change in gas density with pressure and temperature

• gas viscosity under standard conditions (when needed)

• changes in gas viscosity with pressure and temperature

Proprietary algorithms are us ed to calculate gas density and viscosity (when needed) under the actual flowing pressure and temperature conditions from density and viscosity under standard conditions.

The characteristic s of molbox RFM supported gas es and cor res ponding algorithms are stored in molbox RFM mem ory. To correctly calculate the flow of a gas, the correct information for that gas must be used. T he molbox RFM GAS function allows the user to spec ify the flowing gas so that molbox RFM will use the correc t gas information in calculating the flow through the molbloc.

The set of available calibration gases that can be used is not the same with molbloc -L and molbloc-S, and the operation of the GAS function is different. They are described separately below.

3. OPERATION

1inert 2flammable

3toxic 4other

The gases available are grouped in categories to

1N2 2He 3Ar

A secondary menu displays when a specifically

default calibration for the molbloc will be used to

3.4.2.1 molbloc-L Operation

The molbox RFM gases available for use with molbloc-L at the time of this manual printing are listed in Table 27.

Table 28. Available molbloc-L Gases

<1inert> <2flammable> <3toxic> <4other>

<1N2> Nitrogen <2He> Helium <3Ar> Argon

• <Butn> is used to identify Butane in molbox RFM because the chemical

symbol for Butane (C RFM to abbreviate gas identifica tions.

• Mixtures of known gases in known concentrations can be measured by

calculation and use of the A DJ function (se e Sec tion 3.5.6).

<1H2> Hydrogen <2O2> Oxygen <3CH4> Methane <4C2H4> Ethylene <5C3H8> Propane <6C2H6> Ethane <7Butn> Butane

) has more than the 4 characters used by molbox

4H10

<1CO> Carbon Monoxide <1Air> Air

<2C2F6> Hexafluoroethane <3N2O> Nitrous Oxide <4CF4> Carbon Tetrafluoride <5SF6> Sulfur Hexafluoride <6CHF3> Fluoroform <7C02> Carbon Dioxide <8Xe> Xenon <9C4F8> Octafluorocyclobutane

Note

 OPERATION (molbloc-L OPERATION)

To specify the gas flowing through molbloc-L, press [GAS]. The display is:

facilitate finding a specific gas and as a rem inder to the user when selecting a gas that may require special precautions in use. There is a list of gases under each category. For example, the <1inert> selection displays:

calibrated gas is selected. The menu includes: the name of the gas, calibration nam e, the calibrated flow range, the calibration type (PREM for premium or STD for standard) and the supported pressure range. If multiple calibrations are available for the selected gas arrow keys “<>” display after the pressure. Use the left right arrow keys to select the other calibrations.

If the selected gas is not specifically calibrated on the molbloc a secondary menu displays indicating that the

derive the flow of the selected gas. Press enter to proceed.

Select the desired gas. Pressing [ENTER] returns to the last run screen with the newly selected gas active. The s elected gas is always displayed in the upper right hand corner of the MAIN run screen.

He, HI 5.0 slm STD 50-550 kPa <>

No Air cal, N2 coef used [ENTER]

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL

 



 



⋅−

 



 



⋅

⋅=

100

62188.

RH

PP

RH

P

W

gamb

g

P

1327760

9.14509

0528.53

0649289.0

:

3

2

1

0

−=

=

−=

=

C

where

Note

The gas selected on molbox RFM should always be the gas that is flowing through the molbloc. molbloc/molbox does not use K factors or gas conversion factors between gases. When calibrating or testing a device with a surrogate gas, molbox RFM should be set to the surrogate gas. The K factor or gas conversion factor, if used, defines the relationship between the surrogate gas and the process gas for the device being tested, not for molbloc/molbox (see Section 3.4.1, PRINCIPLE). The K factor is supplied by the manufacturer of the device being te sted.

3.4.2.2 molbloc-S Operation

The molbox RFM gases available for use with molbloc-S at the time of this manual printing are the same as molbloc-L, as listed in Table 27.

In addition to dry air, molbox RFM supports m easurement of ambient (hum id) air flow with molbloc-S. W hen Air is selected as the molbloc -S test gas, the user is prompted to enter a value of the humidity ratio (also known as the absolute humidity or water ratio) of the ambient air. The humidity ratio, W, is def ined as the ratio of water mass to gas mass in the flowing air. It is different from the relative humidity value, which is usually expressed as a percentage. Typical values of W are between zero and 0.06. molbox RFM does not accept an entry for W greater than 0.1.

Typically, humidity measuring instruments report relative humidity, which is dependent on the ambient pressure and temperature. Users who do not have the W value available can use Fluke Calibration’s free Unit of Measure Converter software utility or COMPASS for molbox calibration software to calculate W from measured pressure, tem perature, and relative hum idity. Visit www.flukecal.com see your Fluke Calibration sales representative for a copy of the Unit of Measure Converter software utility. Air relative humidity, pressure and temperature are converted to the humidity ratio, W, following Dalton’s Rule and thermodynamic principals using water saturation properties:

is the water saturation pressure, which can be calculated as:

3

0

2

1

CTCTCTCP

+++=

ambambambg

32

, or

If dry air will be measured, then the user should enter a W value of zero when prompted. Zero is the default W value.

When a non-zero W value is entered, molbox applies a correc tion to its air flow measurement for the change in air density due to humidity. If a correction for W is

Fluke molbox RFM Operating Manual

Table Of Contents

Tables

Figures

About This Manual

1. Introduction

1.1 Product Overview

1.1.1 molbloc Flow Elements

1.1.1.1 molbloc-L Flow Eleme nt

1.1.1.2 molbloc-S Flow Eleme nt

1.2 Specifications

1.2.1 General Specifications

1.2.2 Reference Pressure Transducer (RPT) Specifications

1.2.2.1 Upstream and Downstream RPTs

1.2.2.2 Differential RPT (Microrange Option)

1.2.3 Temperature Measurement Specifications

1.2.4 Flow Measurement Specif i cations

1.2.4.1 molbloc-L Flow Measurement Specifications, Model Ranges 1E1-L thru 3E4-L

1.2.4.1.2 molbloc-L Pressure Dependent Calibration Types

1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations

1.2.4.1.4 molbloc-L Ranges with High Pressure Calibrations

1.2.4.1.5 molbloc-L DIMENSIONS

1.2.4.2 molbloc-S

1.2.4.2.2 molbloc-S Ranges

1.2.5 Front and Rear Panel s

1.2.5.1 Front Panel

1.2.5.2 Rear Panel

2. Installation

2.1 UNP A CKING A ND INSPECTION

2.1.1 Removing From Packagi ng

2.1.2 Inspecting Contents

2.2 Site Requirements

2.3 Initial setup

2.3.1 Preparing for O peration

2.3.2 Power Conne c t ion

2.3.3 molbox RFM to mol bloc Connection

2.3.4 GAS Supply And Flowpath Connecti ons

2.3.5 Vacuum Supply (molbloc-S only)

2.3.6 Communications Connect ions

2.4 Power UP and Verification

2.4.1 Power UP

2.4.2 Check Proper Pressure Measurement Operation

2.4.3 Check Proper Temperature Measurement Operation

2.4.4 Leak Check

2.4.5 Check/Set Security Level

2.5 Additional Precautions to Take Before Making Flow Measurements

2.6 Short Term Storage

3. Operation

3.1 General Operating Principles

3.1.1 molbloc-L and molbloc-S operation

3.1.3 Flow Ready/Not Ready Indication

3.1.3.1 molbloc-L Operation

3.1.3.2 molbloc-S Operation

3.1.4 Soft [On/Off] Key

3.1.5 Microra nge opt ion (Optional)

3.1.6 Reference pressure transducer (RPT) overpressure

3.1.6.1 Upstream and Downstream Absolute RPTS

3.1.6.2 Differential RPT, Microrange Option

3.2 Main Run Screen

3.2.1 molbloc-L Operation

3.2.2 molbloc-S Operation

3.3 Manual Operation

3.3.1 Keypad Layout and Protocol

3.3.2 Sounds

3.3.3 Soft [On/Off] Key

3.3.4 Direct Function Keys Summary

3.4 Direct Function Keys

3.4.1 [K]

3.4.2 [GAS]

3.4.2.2 molbloc-S Operation