Pirani/Capacitance Gauge
EGPC550
EGPC552
Instruction Manual
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Product Identification
In all communications with EBARA, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
EBARA Technologies, Inc. USA
Model: |
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PN: |
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SN: |
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V |
W |
Validity
This document applies to products with the following part numbers:
EGPC550 (W filament)
EGPC550-0000 DN 16 ISO-KF, w/o display, mbar
EGPC550-0004 DN 16 ISO-KF, with two switching functions and display, mbar
EGPC550-0104 DN 16 ISO-KF, with two switching functions and display, Torr
EGPC550-0204 DN 16 ISO-KF, with two switching functions and display, Pa
EGPC550-1000 DN 16 CF-F, w/o display, mbar
EGPC550-1004 DN 16 CF-F, with two switching functions and display, mbar
EGPC550-1104 DN 16 CF-F, with two switching functions and display, Torr
EGPC550-1204 DN 16 CF-F, with two switching functions and display, Pa
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EGPC552 (Ni filament)
EGPC552-0000 DN 16 ISO-KF, w/o display, mbar
EGPC552-0004 DN 16 ISO-KF, with two switching functions and display, mbar
EGPC552-0104 DN 16 ISO-KF, with two switching functions and display, Torr
EGPC552-0204 DN 16 ISO-KF, with two switching functions and display, Pa
EGPC552-1000 DN 16 CF-F, w/o display, mbar
EGPC552-1004 DN 16 CF-F, with two switching functions and display, mbar
EGPC552-1104 DN 16 CF-F, with two switching functions and display, Torr
EGPC552-1204 DN 16 CF-F, with two switching functions and display, Pa
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document correspond to gauges with part number EGPC550-0004. They apply to gauges with other part numbers by analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
Intended Use
The Pirani/Capacitance Gauge EGPC55x has been designed for vacuum measurement of gases in the pressure range of
5×10-5 … 1500 mbar.
It must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauge is intended for operation in connection with an EBARA Vacuum Gauge Controller (e.g. EGC) or with another suitable controller.
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Functional Principle
The EGPC gauge is a combination gauge consisting of a Pirani sensor and a diaphragm capacitive sensor. Both sensors are constantly active.
At low pressures, only the signal of the Pirani sensor is used for pressure measurement; at high pressures, only the signal of the diaphragm capacitive sensor. To determine the output signal in the intermediate range, both signals are used proportionally to the pressure.
Patents
EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons 1× Instruction Manual
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Contents
Product Identification |
2 |
|
Validity |
2 |
|
Intended Use |
3 |
|
Functional Principle |
4 |
|
Patents |
4 |
|
Scope of Delivery |
4 |
|
1 |
Safety |
6 |
1.1 |
Symbols Used |
6 |
1.2 |
Personnel Qualifications |
6 |
1.3 |
General Safety Instructions |
7 |
1.4 |
Liability and Warranty |
7 |
2 |
Technical Data |
8 |
2.1 |
Output Signal vs. Pressure |
12 |
2.2 |
Gas Type Dependence |
13 |
3 |
Installation |
14 |
3.1 |
Vacuum Connection |
14 |
3.2 |
Power Connection |
17 |
4 |
Operation |
19 |
4.1 |
Status Indication and Display |
19 |
4.2 |
Gas Type Dependence |
23 |
4.3 |
Switching Functions |
24 |
5 |
Deinstallation |
26 |
6 |
Maintenance, Repair |
28 |
6.1 |
Adjusting the Gauge |
28 |
6.2 |
Replacing the Sensor |
30 |
6.3 |
Troubleshooting |
31 |
7 |
Returning the Product |
32 |
8 |
Disposal |
33 |
9 |
Spare Parts |
34 |
Further Information |
35 |
|
For cross-references within this document, the symbol ( XY) is used, for cross-references to further documents, listed under "Further Information", the symbol ( [Z]).
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1 Safety
1.1Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.
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1.3General Safety Instructions
Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process media due to the heat generated by the product.
Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.
Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
1.4Liability and Warranty
EBARA assumes no liability and the warranty becomes null and void if the end-user or third parties
disregard the information in this document
use the product in a non-conforming manner
make any kind of interventions (modifications, alterations etc.) on the product
use the product with accessories not listed in the product documentation.
The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination or wear and tear, as well as expendable parts (e.g. seals, filament), are not covered by the warranty.
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2 Technical Data
Measurement range
Measurement principle 10 mbar … 1500 mbar
1 … 10 mbar 5×10-5 … 1 mbar
Accuracy (N2)
5×10-4 … 1×10-3 mbar 1×10-3 … 100 mbar 100 … 950 mbar
950 … 1050 mbar
Repeatability (N2) 1×10-3 … 1100 mbar
5×10-5 … 1500 mbar
diaphragm capacitive sensor
crossover range
thermal conductance acc. to Pirani
50% of reading15% of reading5% of reading2.5% of reading
2% of reading
Output signal (measurement signal) |
|
Voltage range |
0 … +10.23 V |
Measurement range |
+0.61 … +10.23 V |
Error signal |
0 V (default) |
Voltage vs. pressure |
1.286 V/decade, logarithmic |
Output impedance Load impedance Response time
2 × 4.7 , short circuit-proof >10 k
<30 ms
Gauge identification |
71.5 k |
HV adjustment |
at 10-5 mbar |
ATM adjustment |
at >100 mbar |
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Switching functions |
SP1, SP2 |
Setting range (N2) |
5.0×10-5 … 1500 mbar |
Hysteresis |
10% of threshold |
Switching characteristics |
Low Trip Point |
Type |
1 floating contact (n.o.) per |
|
switching function |
Contact rating |
<30 VAC/DC, ≤1 A |
|
resistive |
closed |
LED lit solid |
open |
LED off |
Switching time |
<30 ms |
Supply |
|
DANGER
The gauge may only be connected to power supplies, instruments, or control devices that conform to the requirements of a grounded protective extralow voltage (SELV). The connection to the gauge has to be fused. 1)
Supply voltage at the gauge |
+15 … +30 VDC |
Ripple |
≤1 Vpp |
Power consumption |
≤2.5 W |
Fuse to be connected 1) |
1 AT |
Electrical connection |
FCC68 |
Sensor cable |
shielded |
|
0.14 mm2/conductor |
Cable length |
≤100 m |
1) EBARA controllers fulfill this requirement.
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Grounding concept |
"Power Connection" |
Vacuum connection to |
|
signal common |
connected via 10 k , 10 nF |
Materials exposed to vacuum |
|
Vacuum connection |
stainless steel 1.4435 |
Filament |
|
EGPC550 |
W |
EGPC552 |
Ni |
Feedthrough |
glass |
Orifice |
stainless steel |
Diaphragm |
ceramic |
Further materials |
Ni, NiFe, stainless steel |
|
1.4301, SnAg |
Internal volume |
4.7 cm3 |
Permissible pressure (absolute) |
≤5 bar |
Bursting pressure (absolute) |
10 bar |
Permissible temperatures |
|
Operation |
+10 °C … +50 °C |
Vacuum connection 2) |
≤80 °C |
Filament |
<160 °C |
Storage |
–20 °C … +65 °C |
Relative humidity |
|
Year's mean |
≤65% (no condensation) |
During 60 days |
≤85% (no condensation) |
Mounting orientation |
any |
Use |
indoors only, altitude up to |
|
2000 m NN |
Degree of protection |
IP 40 |
Weight |
115 g …130 g |
2)For horizontal mounting orientation only. During bakeout, measurement range, accuracy, and repeatability may deviate from specifications.
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Dimensions [mm]
50 |
65 |
|
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45 |
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79.5 |
28 |
ST |
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DIA |
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SP2 SP1 ADJ |
14.5 |
14 |
DN 16 ISO-KF |
DN 16 CF-R |
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