Ebara A70W, A30W, A25S, A10S, A07V User Manual

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

A70W (A70W-S,A70W-C)

A30W (A30W-S, A30W-C)

A25S (A25S-S)

A10S (A10S-S)

A07V (A07V-S)

idealvac.com

[phone] idealvac.com

Do not reproduce or reprint any portion of this manual without permission.

Manufacturer reserves the right to discontinue or change any specifications or designs without notice and without incurring obligations.

All rights reserved, copyright EBARA Corporation.

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Record of Changes

Rev.	Date	Page	Position	Contents	Reason
0	2-Jun-94			Newly issued
1	13-Jul-94	5	A07V Spec.	Pumping Speed	Correction
		6-10	Outline Drawing	Water Sup./Rtn	Add NPT
		14	Fig. 3.4	Sys. Flow	Add Note
		17	Fig. 4.2	Coupler	Add Drawing
		21	Fig. 4.6	Ctrl. Wiring	Correction
		22	Table 4.5	Pin Assign.	Add note
2	14-Nov-96	,	Fig. 1,2,3,4,5	Safety warning	Add
				labels
		, ,	Drawing	Warning label	Add
				Location
		4	3.3 List	Detailed	Add List
				specifications
		21	Dig. 4.4	Power Sup. Rec	Correction
			Table 4.6	Dipswitch	Design Change
		25	Fig. 4.7	S.W setting	Design Change
		26	Table 6.1	Typical check	Add Table
		33		items
		35,36	6.3	Spare Parts	Add List
			7 (8)	Pump Lifting	Add Note
		37	9	Service Net.	Add List
		44,45
A	12-Dec-97				New release
					per ECO 2905
3	20-May-99	21	Tab. 4.2	Suitable wire	Correction
		44,45	9. Service Network	Japan, Taiwan	Change
				(Add., Phone, Fax)
		5,6,18,	-----	The Unit was	-----
		27,28,		changed in terms
		32		of Domestic
				regulation for
				Measurement low.
3A	27-Apr-01				ETI release of
					EC Rev 3 per
					ECO 5394.
3B	June 2002	20		Add UL grounding	Third-party
				note	marking
		iv		Add LCD “hot	Third-party
				surface” note	marking
				Add appendices	SEMI S2
		Thruout		Language Edit	ECO 5771

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Safety Information

Anyone operating this pump must have the knowledge to identify and avoid hazardous conditions associated with the pump.

Rash actions or improper operation may cause dangerous accidents and serious injuries.

Before installation and operation, the operator first should have a thorough knowledge of the pump’s construction, operating procedures, and hazards.

The operator should read this instruction manual and other documents issued by EBARA.

If you have any questions on pump operation, safety, or maintenance, please do not hesitate to contact EBARA directly.

Three terms in this manual designate different levels of hazard:

DANGER

WARNING

CAUTION

indicates an imminently hazardous situation that, if not avoided, will result in death or serious injury.

indicates a potentially hazardous situation that, if not avoided, could result in death or serious injury.

indicates an imminently hazardous situation that, if not avoided, may result in minor or moderate injury.

This term may also indicate situations that might damage equipment.

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Important Precautions

	DANGER	Keep out from under the pump when it is elevated.
		Only qualified personnel should unload and lift the pump.

	WARNING	Be careful not to overturn the pump when pushing or pulling it
		sideways. The pump is narrow in comparison to its height.

	WARNING	Only a qualified electrician, observing all national and local
		regulations, should perform electrical work.

	WARNING	Cut and lock out electrical power before beginning wiring or
		maintenance work.
		Do not switch on the power supply to the pump until work is
		completed and pump and piping are back in safe operating
		condition.
	WARNING	Supply N2 gas to the exhaust piping when necessary to dilute
		flammable or toxic gases down to a safe concentration.
	WARNING	Purge system with sufficient N2 gas before removing and cleaning
		the vacuum lines and exhaust piping.
		Prevent dispersal of flammable, toxic or dangerous materials and
		guard against their contact with the human body.
		Work only in locations with an emergency escape route.
	WARNING	Do not convert the pump from one process to another without an
		intervening overhaul. Gases or reaction products remaining in
		the pump may react and lead to accidents or to the formation of
		large amounts of byproduct.
	WARNING	Check Safety Interlock functions periodically (every 6 months) to
		confirm correct operation. See Appendix 2 for a description of
		these interlocks.
	WARNING	Connect exhaust from pumps handling process gases to an
		appropriate exhaust abatement system that is equipped with
		discharge quality monitors to provide warnings and to shut down
		the process gas flow if concentrations exceed allowable limits.
	WARNING	Check for gas leaks after initial installation of the piping and after
		reassembly following maintenance or, at least, annually. Gas
		leaks can result in the discharge of harmful and dangerous
		substances and in abnormal reactions due to the admission of air
		into the pump. Replace o-rings as required to correct leaks.
		See Appendix 4.
	WARNING	Do not modify the pump or any of its parts without EBARA's
		approval.

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	WARNING	Do not place the LCD controller on or near a surface with a
		temperature exceeding 65ºC.

	WARNING	The pump casing and exhaust piping become extremely hot
		during operation and remain hot for some time after stopping.
		Keep pump and exhaust piping away from contact with personnel
		and flammable substances.
		Do not remove pump enclosure panels during operation.

	CAUTION	Disposal of process byproducts must be in strict accord with all
		local and national environmental and safety regulations.

	CAUTION	Dispose of printed circuit boards containing lithium batteries in
		strict accord with all applicable local and national environmental
		regulations.

	CAUTION	The height of EBARA dry pumps may place the EMO button and
		the LCD controller below the heights recommended in SEMI
		S8-95. See Appendix 3.

The following safety warning labels appear on the pump covers:

High temperature warning

Hazardous voltage warning

Hazardous materials warning

Electric charge mark

Hazardous weight danger

High temperature warning

Hot surface may burn or cause injury.

Allow the piping and casing to cool before servicing.

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Hazardous voltage warning

Hazardous Voltage may shock, burn, or cause death.

Turn power off and lockout before servicing.

Hazardous materials warning

(Applies only when pumping hazardous materials) Run the pump only with N2 gas purge before servicing.

Take adequate measures against dangerous reaction and contact with human body.

Electric charge mark

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Hazardous weight danger

Heavy weight may cause severe injury or death due to overturning or falling pump. Keep out from under the lifted pump.

Raise all adjuster feet fully when moving.

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			Contents
Record of Changes.........................................................................................................				i
Safety Information .........................................................................................................				ii
Important Precautions..................................................................................................				iii
Contents		.........................................................................................................................		x
1	Foreword..................................................................................................................			1
2	Introduction .............................................................................................................			1
3	Product ................................................................................................Description			2
	3.1 ........................................................................................................	Summary		2
	....................................................................................	3.1.1	Pump Module	2
	...............................................................................................	3.1.2	N2 Gas	2
	...................................................................................	3.1.3	Cooling Water	2
	.............................................................................................	3.1.4	Exhaust	2
	3.2 ..............................................................................................	Control System		2
	.............................................................................................	3.2.1	Warning	3
	.................................................................	3.2.2	Operation Status Control	3
	3.3 ...........................................................................................	Moving the Pump		3
	.......................................................................................	3.3.1	Preparation	3
	.................................................................................	3.3.2	Moving Method	4
	3.4 .................................................................................	Detailed Specifications		4
4	Installation .............................................................................................................			16
	4.1 .......................................................................................................	Location		16
	4.2 ...........................................................................................................	Piping		17
	.........................................................	4.2.1	Vacuum and Exhaust Piping	17
	.....................................................................	4.2.2	Cooling Water Piping	17
	..................................................................................	4.2.3	N2 Gas Piping	19
	..............................................................................	4.2.4	Ventilation Duct	19
	4.3 ..........................................................................................	Electrical Wiring		20
	.....................................................................	4.3.1	Power Supply Wiring	20
	.....................................................................	4.3.2	Control Signal Wiring	21
	4.4 ...........................................................................................	Operation Mode		24
5	Operation ...............................................................................................................			26
	5.1 .............................................................................................	Before Starting		26
	5.2 .....................................................................................................	Operation		30
	........................................................	5.2.1	Local (Pump side) Operation	31
	...........................................................	5.2.2	Remote (Distant) Operation	31
6	Maintenance ...................................................................................and Overhaul			32
	6.1 ......................................................................................	Routine Inspection		32
	6.2 .....................................................................................	Piping Maintenance		33
	6.3 ................................................................................................	Lubricant Oil		33
	6.4 ..................................................................	Spare (Maintenance) Parts List		34
	6.5 .......................................................................................................	Overhaul		35

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7	Removal and Transportation................................................................................		36
8	Troubleshooting ....................................................................................................		38
	8.1	Troubleshooting (1) Basic Trouble ............................................................	38
	8.2	Troubleshooting (2) ALARM .......................................................................	39
	8.3	Troubleshooting (3) TRIP............................................................................	41
	8.4	Troubleshooting (4) TRIP [Options] ...........................................................	42
9	Inquiries .................................................................................................................		43
	9.1	North America ..............................................................................................	43
	9.2	Asia ...............................................................................................................	44
	9.3	Europe ..........................................................................................................	45

Appendices
1.	Material Safety Data Sheet – Vacuum Pump Oil	.................................................I
2.	Safety Interlocks ..............................................................................................	III
3.	Ebara Dry Pumps and SEMI S2-93A (S2-0200)................................................	V
4.	Leak Check Procedure .....................................................................................	VI
5.	Returning pumps for Rebuild in U.S. ...............................................................	VII

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1 Foreword

We appreciate your selection of an EBARA A Series dry vacuum pump. EBARA has manufactured this pump with much care and attention to permit safe and satisfactory operation.

Incorrect operation will result in lack of performance and may cause accidents and injuries to personnel.

[NOTE] This instruction manual contains necessary information on operation and maintenance of the pump.

Operate the pump correctly in accordance with these instructions to ensure a long service life.

Keep this instruction manual in a suitable place for immediate reference whenever needed.

2 Introduction

Check the following items on receipt of the pump package.

Check the nameplate affixed to the outer cover of the pump to confirm that the pump supplied agrees with your order.

Check the accessories against the packing list and the previously submitted drawings and documents to confirm that the all ordered accessories have arrived.

Check for damage and for screws/bolts that have worked loose in transit.

	CAUTION	Notify EBARA without delay when there is damage or when
		components are missing.
		Do not use when a leak is present as this may result in an accident.

Store the pump in a dry and clean place until installation.

Temperature	:	5 – 40 °C
Humidity	:	80 % or less

Do not stack the pump. Place it in an upright position.

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3 Product Description

3.1Summary

The A Series dry vacuum pump has a compact design and includes various sensors and controls to enhance reliability and operation.

3.1.1 Pump Module

The pump is a roots-type vacuum pump that rotates a pair of non-contact, multi-stage rotors synchronized by timing gears. High-capacity units have a Booster Pump (BP) connected in series with the Main Pump (MP).

A compartment, isolated from the pump casing, encloses the timing gears and bearings, which require lubrication with Perfluoro-Polyether (PFPE) oil and grease.

The pumps of this series are factory-filled with lubricating oil. Replenish or replace only with the recommended oil grades shown in Specification Tables 3.1 and 3.2.

3.1.2 N2 Gas

Pressurized nitrogen, supplied to the labyrinth seal section, isolates the vapor stream from the lubricated components, enabling the pump to draw a clean vacuum without admitting lubricant oil to the pump casing.

Additional N2 gas, injected in various pump stages, reduces corrosion due to process gas and retards the accumulation of reaction byproducts. For processes that do not produce corrosion or reaction byproducts, the selector valve can stop completely the dilution N2 flow. Adjusting the regulation pressure to the specified value supplies the correct amount of N2 gas for these two types of purge operation.

The pumps of this series are equipped with a dilution N2 gas control valve. Consult EBARA before adjusting the N2 gas supply to the appropriate level for specific conditions of use. (Maximum dilution N2 flow rate: 76 Pam3/s.)

3.1.3 Cooling Water

Compressing gas from vacuum to atmospheric pressure generates heat. Therefore, cool motors and casings with cooling water.

Quick-connect cooling water couplers make connection and disconnection easy.

3.1.4 Exhaust

The exhaust check valve, a standard accessory, prevents reverse flow of gas from the exhaust back through the pump to the vacuum chamber when pump stops. A silencer (optional) reduces exhaust noise.

3.2Control System

A Series dry vacuum pumps have a built-in sensing unit consisting of an Earth Leakage Breaker (ELB), an electro-magnetic switch and a control circuit or an overcurrent circuit breaker (CB). To improve reliability and safety, sensors monitor the condition of each utility

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and pump section.

During pump operation the central processing unit monitors all operating conditions, including power supply, cooling water flow, N2 gas flow, lubrication oil level, casing and motor coil temperature, motor current and suction pressure.

Pump operation “rides through” a transient power outage up to 500 milliseconds long. (Two-second ride through is available as an option.)

3.2.1 Warning

To improve the reliability of the vacuum exhaust system, the pump control scheme generates two levels of trouble warning: ALARM and TRIP.

An ALARM signal draws attention to an operating parameter value that has exceeded the normal operating range; it does not signify that danger is imminent. The pump will continue to operate in this condition, which enables the operator to complete the wafer cycle before checking the pump.

The pump will stop automatically and generate a TRIP signal output if a parameter approaches a mechanical safety limit.

Contact EBARA Corporation for details on checking the ALARM and TRIP setting conditions.

3.2.2 Operation Status Control

To facilitate operation status control and daily inspection, the LCD controller displays the sensor data.

The LCD controller displays all ALARM and TRIP signals. For remote operation and monitoring, the signals are available individually and as collective outputs.

3.3Moving the Pump

3.3.1 Preparation

Raise all four adjuster feet fully before moving the pump; otherwise, an obstacle on the floor may cause the moving pump to tip over.

Caster

fully raised

Adjuster f

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3.3.2 Moving Method

Move pump slowly by pushing eyebolt along the long axis of the pump (Direction A). Keep toes and fingers away from moving wheels. If placing the pump in a corner or narrow space requires moving it along the short axis (Direction B), two persons should “walk” the pump over by alternately pushing the ends as shown below.

B

A

To move the pump across cracks or joints in the floor, spread a steel plate or similar device, which can sustain the pump’s weight, over the discontinuity. At least two persons, using great caution, should move the pump.

Steel Plate

	DANGER	If, when moving a pump, it loses balance and starts to tip over, do
		not attempt to stop it. Get away from the pump immediately and
		let it fall.

3.4Detailed Specifications

Refer to the following tables and figures for detailed specifications, size, and pump performance.

List of Tables and Figures

Category	Contents	Page
Table 3.1, 3.2	Specification	5,6
Outline Drawing 1	A70W	7
Outline Drawing 2	A30W	8
Outline Drawing 3	A25S	9
Outline Drawing 4	A10S	10
Outline Drawing 5	A07V	11
Figure 3.1	Performance Curve (A70W, A30W)	12
Figure 3.2	Performance Curve (A25S, A10S)	13
Figure 3.3	Performance Curve (A07V)	14
Figure 3.4	System Flow	15

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Table 3.1 Specification (A70W, A30W)

		Model	A70W		A30W
	Pumping Speed (50 / 60Hz)		7000 / 8400 L/min		3000 / 3600 L/min
	Ultimate Pressure (50 / 60Hz)		0.27 / 0.13 Pa		0.4 / 0.27 Pa
	Connection	Gas Inlet		NW50
		Gas Outlet		NW40
		Motor	2P 2.2 kW + 3.7 kW		2P 1.5 kW + 2.2 kW
		Connection	Coupler ( c 3/8)
	Cooling	Pressure	Supply Max 0.4 MPa
		[Gauge Press.]
	Water		Differential Press. 0.1 MPa
		Flow Rate	Min. 3.5 L/min
		Temperature	Max. 30 deg C
		Connection	1/4” Tube Fitting (Same as Swagelok®)
		Pressure	Supply 0.1-0.7 MPa
	N2 Gas	[Gauge Press.]	Setting 0.04-0.07 MPa
		Approx. Flow	24-27 Pa m3/s		17-22 Pa m3/s
		Rate	[3.4 Pa m3/s]		[3.4 Pa m3/s]
		[Dilution 0 Mode]
		Connection	d50 mm×L50 mm
	Duct
		Pressure		-196 Pa
	Ventilation
		Approx. Flow		0.5 m3/min
		Rate
			FOMBLIN Y-L VAC 25/6
	Lubrication	Brand	BARRIERTA J100
			DEMNUM S-65
	Oil
			KRYTOX VPF 1525
		Quantity		0.8 L
	Approximate Weight		380 kg		330 kg
		Phase/Volt/Freq.	3 Phase, 200V (50 Hz), 200-220 V (60Hz)
	Power	Current Rating	29.5 / 28.1 A		19.7 / 18.5 A
		(50 / 60 Hz)
	Supply
		Connection	MS Series 22-22
			(Japan Aviation Electronics Industry)
	Control Signal		57 Series 50 (DDK. Ltd)

[Note] Approximate flow rate of N2 gas shows a necessary total amount for seal N2 and dilution N2.

LCD controller displays only the flow rate of dilution N2.

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Table 3.2 Specification (A25S, A10S, A07V)

	Model	A25S			A10S		A07V
Pumping Speed (50 / 60 Hz)		2500 / 3000 L/min		1000 / 1200 L/min			700 / 840 L/min
Ultimate Pressure (50 / 60 Hz)		5.3 / 4.0Pa			5.3 / 4.0Pa		1.1 / 1.0 Pa
Connection	Gas Inlet	NW50			NW40		NW40
	Gas Outlet				NW40
	Motor	2P 3.7 kW			2P 2.2 kW		2P 1.5 kW
	Connection			Coupler ( c 3/8)
Cooling	Pressure		Supply		ax 0.4MPa
	[Gauge Press.]
Water			Differential Press. Min 0.1MPa
	Flow Rate			Min. 3.5 L/min
	Temperature			Max. 30 deg C
	Connection	1/4” Tube Fitting (Same as Swagelok®)
	Pressure			Supply 0.1-0.7 MPa
N2 Gas	[Gauge Press.]		Setting 0.04-0.07 MPa
	Approx.	17-20 Pa m3/s		17-20 Pa m3/s			15-19 Pa m3/s
	Flow Rate**	[3.4 Pa m3/s]		[3.4 Pa m3/s]			[3.4 Pa m3/s]
	Connection	d50 mm×L50 mm					d50 mm×L60 mm
Duct
	Pressure				-196 Pa
Ventilation
	Approx. Flow				0.5 m3/min
	Rate
			FOMBLIN Y-L VAC 25/6
Lubrication	Brand			BARRIERTA J100
				DEMNUM S-65
Oil
				KRYTOX VPF 1525
	Quantity	0.4 L			0.4 L		0.5 L
Approx. Weight		240 kg			220 kg		150 kg
	Phase/Volt/Freq.	3 Phase,		200V (50 Hz), 200-220		V (60Hz)
Power	Current Rating	18.3 / 17.5 A		11.7 / 11.1 A			8.4 / 8.6 A
	(50 / 60 Hz)
Supply
	Connection	MS Series 22-22			MS Series 20-4
		(Japan Aviation Electronics Industry)
Control Signal			57 Series 50 (DDK. Ltd)

** Numerals in brackets [ ] are flow rate in dilution-0 mode.

[Note] Approximate flow rate of N2 gas shows a necessary total amount for seal N2 and dilution N2.

LCD controller displays only the flow rate of dilution N2.

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Outline Drawing A70W

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