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www.perkinelmer.com/opto
HSH1003GILO and HSH1003GILOS
Lamps for Photolithography
DATASHEET
Lighting
Imaging
Telecom
Mercury Short Arc Lamps
Applications
• Microlithography
Description
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
semiconductor manufacturers.
PerkinElmer has been a leading manufacturer of high intensity arc lamps for more
than 30 years and is a premier lamp supplier for solid state lasers, medical equipment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the introduction of new materials and proprietary
manufacturing processes, we have extended lamp lifetimes form several hundred
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
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PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
© 2000 PerkinElmer inc. All rights reserved.
www.perkinelmer.com/opto
USA:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
Europe:
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
Asia:
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
Description
Power (idling mode)
Power (flash mode)
Current (idling mode)
Current (flash mode)
Voltage (idling mode)
Voltage (flash mode)
Current Ripple
Temperature (at base)
Lifetime
Nominal
700 watts
1000 watts
27 amps (DC)
36 amps (DC)
26 volts (DC)
28 volts (DC)
3%
220ºC (max)
1500 hours
Range
650-750 watts
1050 watts (max)
24-30 amps (DC)
32-40 amps (DC)
23-29 volts (DC)
25-31 volts (DC)
Operational Specifications
HSH1003GILO and HSH1003GILOS
Physical Specifications
Description
Arc Gap
Anode Base
Cathode Base
Specification
3.0 mm (max)
15mm Dia (M6-P1.0)
Cooling Fin
Typical Performance Graph
Notes
1. Lamp must be operated with cathode end up and
anode end down. Inclination of lamp axis to vertical
must not exceed 10º.
Dimensions
Spectral Output
ANODE (+)
END DOWN
CATHODE (-)
END UP
Part Number References
Used In
Replaces
Hours of Operation
Relative Intensity (%)
Wavelength (nm)
Relative Intensity (%)
GCA XLS
USH 1003FGIL2
All dimensions are in millimeters.
DS-174 Rev A 0102
Ø29
MAX
81.0 ± 2.0
185 MAX
100
90
80
70
60
50
40
30
20
10
0
250 300 350 400 450 500 550 600 650 700 750
100
90
80
70
60
50
40
30
20
10
0
0 300 600 900 1200 1500
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