Brooks Instrument SLA5800 Operating Manual

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X-TMF-SLA5800-Series-RevB-MFC-eng

Part Number: 541B187AAG July, 2019

SLA5800 Series Elastomer Sealed, Thermal Mass Flow Controllers & Meters

Installation & Operation Manual

Page 2

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

Essential Instructions

Read before proceeding!

For pin configuration: Please refer to the enclosed Instruction Manual.

European Electromagnetic Compatibility (EMC)

European Pressure Equipment Directive (PED)

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

for local sales office contact information. Save this instruction manual for future reference.

this warning can result in serious personal injury and / or damage to the equipment.

If you do not understand any of the instructions, contact your Brooks Instrum ent representative for clarification. Follow all warnings, cautions and instructions marked on and supplied with the product.

result in serious personal injury and / or damage to the equipment.

Connect all products to the proper electrical and pressure sources.

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

maintenance is being performed by qualified persons.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

•

The Specifications Section of this manual contains instructions related to the PED directive.

•

Products described in this manual are in compliance with EN directive 2014/34/EU.

•

All Brooks Instrument Flowmeters fall under fluid group 1.

•

Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

•

Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

Compatibility (EMC directive 2014/30/EU). Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies a limited selection of high quality cable(s) which meets the specifications for CE certification. If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

Card Edge Connectors are standard non-metallic. The cables used must be screened with

100% shield to comply with CE certification. The shield should be terminated to an earth ground. For additional instruction regarding

Protective Earth (PE) Connections please refer to Section 2, Electrical Interface page 31.

ESD (Electrostatic Discharge)

Handling Procedure:

Power to unit must be removed.

removed or adjusted.

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

devices. Damaged components, even though they appear to function properly, exhibit early failure.

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Contents

Section 1 Introduction

Purpose ....................................................................................................................................................... 1

Specifications .............................................................................................................................................. 3

Biotech Option ............................................................................................................................................ 7

Section 2 Installation

Receipt of Equipment ................................................................................................................................ 21

Recommended Storage Practice .............................................................................................................. 21

Return Shipment ....................................................................................................................................... 21

Transit Precautions ................................................................................................................................... 22

Removal from Storage .............................................................................................................................. 22

Gas Connections ...................................................................................................................................... 22

In-Line Filter ......................................................................................................................................... 22-25

Electrical Interface ............................................................................................................................... 25-30

Operation Check Procedure (Analog I/O) ................................................................................................. 31

Operation Check Procedure (Digital I/O) ................................................................................................... 32

Bus/Network (DeviceNet, Profibus, Foundation Fieldbus, EtherCAT) ....................................................... 32

Section 3 Operation

Features (Standard and Bitoech) .......................................................................................................... 33-34

Analog I/O Mode of Operation ............................................................................................................. 34-36

RS485 Communications Features (Analog versions only) ....................................................................... 36

EtherNET/IP

Communications Features ................................................................................................ 37

DeviceNet Communications Features ........... …………………………………………………………………37

Profibus Communications Features ............ ………………………………………………………………….38

EtherCAT Communications Features ......…………………………………………………………………..38-39

Alarms (Analog versions only) .................................................................................................................. 39

Alarms (Analog versions only) Configuration Attributes ....................................................................... 39-40

Diagnostic Alarms (Analog versions only) ................................................................................................. 41

General Alarms (Analog versions only) ................................................................................................ 41-42

Calibration/Configuration Sets ................................................................................................................... 42

Special Features ........................................................................................................................................ 42

Setpoint Ramping ...................................................................................................................................... 43

Low Setpoint Command Cutoff .................................................................................................................. 43

Low Flow Output Cutoff ............................................................................................................................. 43

Adaptive Control ......................................................................................................................................... 43

Flow Totalizer .................................................................................................................................................... 43

PC-based Support Tools ........................................................................................................................................ 43

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Contents

Section 4 Maintenance & Troubleshooting

Maintenance and Troubleshooting ............................................................................................................ 44

Troubleshooting Analog or Digital ........................................................................................................ 45-46

System Checks .................................................................................................................................... 46-48

Cleaning Procedures ................................................................................................................................ 49

Calibration Procedure .......................................................................................................................... 49-50

Warranty, Local Sales/Service Contact Information ........................................................................ Back Cover

Figures

1-1 1-2 1-3

General Wiring ................................................................................................................................ 9

Response Performance of Brooks Digital MFC ............................................................................ 10

Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5%

Per Second Setpoint Change ........................................................................................................ 10

1-4 1-5

SLA5800 Series RS485 15-Pin Analog Connector and Pinouts.................................................... 11

SLA5800 Series Profibus Connections and Pinouts ..................................................................... 12

1-5.5 SLA5800 Series EtherNet/IP Connections and Pinouts ................................................................ 13

1-6 1-7 1-8 1-9 1-10 1-11 1-12 1-13 1-14 1-15 1-16 1-17 1-18 1-19 2-1 2-2 2-3 2-4 3-1

SLA5800 Series DeviceNet Connections and Pinouts ................................................................... 14

SLA5800 Series EtherCAT Connections and Pinouts .................................................................... 15

Dimensions - Model SLA5850, Thru-Flow, EtherNet/IP ................................................................. 16

Dimensions - Model SLA5850, Thru-Flow, Profibus ...................................................................... 16

Dimensions - Model SLA5850, Thru-Flow, RS485 ........................................................................ 17

Dimensions - Model SLA5850, Downport, RS485 ......................................................................... 17

Dimensions - Model SLA5851, Thru-Flow, EtherCAT ................................................................... 18

Dimensions - Model SLA5851, Thru-Flow, DeviceNet ................................................................... 18

Dimensions - Model SLA5853, Thru-Flow, Profibus ...................................................................... 19

Dimensions - Model SLA5852, Thru-Flow, EtherCAT ................................................................... 19

Dimensions - Model SLA5860, Thru-Flow, Profibus ...................................................................... 20

Dimensions - Model SLA5860, Thru-Flow, RS48 .......................................................................... 20

Dimensions - Model SLA5861, Thru-Flow, RS485 ........................................................................ 21

Dimensions – Model SLA5861, Thru-Flow, DeviceNet .................................................................. 21

RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .................................. 27

Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) .............. 28

Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ...................... 28

RS485 Multidrop Interconnection TMFs and PC ........................................................................... 29

Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ................................... 36

4-1 Bench Troubleshooting Circuit ...................................................................................................... 48

Tables

1-1 1-2

1-3 1-4

2-1 Recommended Filter Size ............................................................................................................. 22

4-1 4-2

SLA5800 Series Specifications ....................................................................................................... 3

SLA5800 Series Biotech ................................................................................................................. 3

SLA5800 Series Electrical Specifications ........................................................................................ 5

SLA5800 Series Certifications ......................................................................................................... 6

Sensor Troubleshooting ................................................................................................................ 47

Troubleshooting ............................................................................................................................. 50

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Section 1 Introduction

Section 1: Introduction

Thank you for purchasing a Brooks Instrument mass flow device. This manual is an installation and operation manual for your instrument. If you

have purchased a Brooks

DeviceNet

, Profibus®, EtherCAT® or EtherNet IPTM communicatons, a

Digital Mass Flow Product with RS485,

separate supplemental manual is also available as part of the operating documentation.

Brooks Instrument mass flow measurement instruments are designed for accurately measuring (MFMs) and rapidly controlling (MFCs) flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain these devices. This manual is organized into the following sections.

Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance Section A Essential Instructions Back Cover Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting to operate or repair these devices.

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Section 1 Introduction

Specifications (Reference Tables 1-1 and 1-2)

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Section 1 Introduction

Table 1-1 SLA5800 Series Standard Specifications

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Section 1 Introduction

Table 1-2 SLA5800 Series Biotech Specifications

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Section 1 Introduction

Table 1-3 Electrical Specifications

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Section 1 Introduction

Mark

Agency

Certification

Applicable Standard

Details

(Recogonized)

Class I, Div 2, Group A, B, C, D

Class II, Zone 22

Standards

E73889 Vol 3, Sec 4

ATEX

EN 60079-15:2010

KEMA 04ATEX 1118X

IECEx

IEC 60079-15:2010

IECEx DEK 14.0072X

KOSHA

Ex nA IIC T4

15-AV4BO-0640

Table 1-4 SLA5800 Series Certifications

Class I, Zone 2, IIC T4

II 3 G Ex nA IIC T4 Gc EN60079-0:2012

II 3 G Ex nA IIC T4 Gc

EMC Directive 2014/30/EU Directive 2011/65/EU

UL & CSA

IEC 60079-0:2011

15-AV4BO-0641

EN:61326-1:2013 EMC

RoHS

*ATEX/IECEx Special Conditions for safe use:

The module shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental conditions under which the equipment will be used.

When the temperature under rated condition exceeds 70 °C at the cable or conduit entry point, or 80 °C at the branching point of the conductors, the temperature specification of the selected cable shall be in compliance with the actual measured temperature values.

Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more than 40%.

The equipment shall only be used in an area of not more than pollution degree 2, as defined in IEC 60664-1.

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Section 1 Introduction

中国

声明表

China RoHS Declaration Table*

Product Family:

SLA5800 Series Pressure Controllers and Thermal Mass Flow Meters & Controllers

SLA5860, SLA5861 and SLA5863 Thermal Mass Meters

Table 1: Names and Contents of Toxic or Hazardous Substances or Elements

Toxic or hazardous Substances and Elements

Assemblies

Connectors

Parts

requirement in SJ/T11363-2006.

limit requirement in SJ/T11363-2006

is valid only when the product is operated under the conditions defined in the product manual.

Product Model:

表 1：有毒有害物质或元素的名称及含量

环保使用期限

EFUP

部件名称

Part Name

印刷电路组件

Printed Circuit

电缆和连接器

Cables and

(Analog, RS485 , DeviceNet™, Profibus, Ethercat, Ethernet/IP™) SLA5810 and SLA5820 Pressure Controller SLA5840 Remote Transducer Pressure Controller SLA5850, SLA5851, and SLA5853 Thermal Mass Controllers

有毒有害物质或元素

铅

Lead

(Pb)

X O O O O O

Mercury

汞

(Hg)

镉

Cadmium

(Cd)

RoHS

六价铬

Hexavalent Chromium

(Cr (VI))

多溴联苯

Polybrominated

biphenyls (PBB)

多溴二苯醚

Polybrominated diphenyl ethers

(PBDE)

壳体

Housing

机械零件

Mechanical

O 表示该有毒有害物质在该部件所有均质材料中的含量均在 SJ/T11363-2006 规定的限量要求以下 O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this part is below the limit

X 表示该有毒有害物质至少在该部件的某一均质材料中的含量超出 SJ/T11363-2006 规定的限量要求。 X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above the

环保期限（EFUP ）的产品及其部件是每个列出的符号，除非另有标明。使用期限只适用于产品在产品手册中规定的条件下工作

The Environmentally Friendly Period (EFUP) for the product and its parts are per the symbol listed, unless otherwise marked. Use Period

O O O O O O

*Certain special SLA’s have Chine RoHS labels, so this table applies to those cases only

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Section 1 Introduction

Reference Conditions

Due to effects of pressure and temperature on the compressibility of gases, specific reference conditions must be used when reporting volumetric flow rates in mass flow terms. For example, the unit of measure SCCM (standard cubic centimeters per minute) refers to a volumetric gas flow at a standard reference condition, NOT the actual volumetric gas flow at the actual operating pressure and temperature. The key point is that the MASS FLOW of the gas is fixed, but the reference volumetric flow can be reported differently based upon the standard reference condition used in the calculation.

Throughout the world, there are differences in terminology when describing reference conditions for gases. The words “normal conditions” and “standard conditions” are sometimes used interchangeably to describe the reference STP (Standard Temperature and Pressure) for gases. Further note that temperature and pressure values for standard or normal reference conditions vary in countries and industries worldwide. For example, the Semiconductor Equipment Manufacturing Industry (SEMI) defines standard temperature and pressure conditions as 273.15 K (0 °C) and 101,325 Pa (760 torr). The main concern is that no matter what words are used for descriptive purposes, a gas mass flow rate must have a defined standard pressure and temperature reference condition when performing a volumetric conversion.

Biotech Options Packages

The SLA58XX mass flow controllers and meters are available with two biotech options packages - Performance and Premium - that include a number of enhanced features designed for the biotech industry and for bioreactors/fermenters specifically. The specifications are shown in Table 1-2. Instructions for changing between the four available gasses are included in Section 3 on page 33 of this manual.

PC-based Support Tools

Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 S-Protocol in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. The Brooks Expert Support Tool (BEST) may be used to monitor, diagnose, tune and calibrate Brooks devices equipped with DeviceNet communications. The Brooks Expert Support Tool interfaces with Brooks products via a special service port.

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Section 1 Introduction

Figure 1-1 General Wiring

Fast Response Performance

The curves in Figure 1-2 depict the MFC output signal and actual transitional flow to steady-state when gas flow enters into process chamber, under a step response command condition.

Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear ramp-up and/or ramp-down control characteristics.

Calibration Selection

Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or digital signal (See communications protocol for your digital coms). Analog devices can be switched via voltage signals to Pin 11 & 8 on Firmware Version 1.18 & newer.

Selectable Soft Start

Processes requiring injection of gases can be adversely affected by excessive initial gas flow. This abrupt injection of gas can result in process damage from explosion or initial pressure impact. These problems are virtually eliminated with the soft start feature.

Page 14

Section 1 Introduction

Linear ramp-up or ramp-up/down (Figure 1-3) set by user via software tools or digital commands.

Linear ramp-up/ramp-down is adjustable at 200% per second down to

0.5% per second setpoint change.

Figure 1-2 Response Performance of Brooks Digital MFC

Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change

Page 15

Section 1 Introduction

Note: Aux Input is used for Remote

Transducer Pressure Controllers only.

Function

Setpoint: Common Input (-)

Flow Signal: 0(1) -5 Vdc, 0-10 Vdc (Option), Output (+)

TTL Alarm: Open collector, Output (+)

3 Flow Signal: 0(4)-20 mA, Output (+)

Power Supply: +13.5 Vdc to +27 Vdc(+)

Not Connected

6 Setpoint: 0(4)-20 mA, Input (+)

Setpoint: 0(1)-5 Vdc, 0-10 Vdc, Input (+)

Power Supply: Common (-)

Flow Signal: Common, Output, (-)

Not Connected

Valve Override: Input

Auxilliary: RT Input, 0-5 Vdc, 0-10 Vdc, Input (+)

RS-485: Common B (-)

RS-485: Common A (+)

Figure 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts

RS485 Communications

The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-4 (Analog I/O pin connections), that enables the device to communicate via a personal computer for process control.

Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via the Brooks Expert Support Tool (BEST) .

The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be connected to a computer system. Personal computers are not equipped with RS485 ports as standard. An RS232/USB to RS485 converter or RS485 interface board is therefore required to connect an RS485 network to a standard personal computer. The RS485 bus, a daisy chain network, meaning that the wires are connected at the units as in Figure 1-1.

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Section 1 Introduction

Transducer Pressure Controllers only.

Note: Aux Input is used for Remote

Figure 1-5 SLA5800 Series Profibus Connections and Pinouts

Profibus Communications

The Brooks SLA5800 is now equipped to support the Profibus communication protocol. Profibus is a fieldbus-based automation standard of Profibus and Profinet International (PI). Via a single bus cable, Profibus links controller or control systems with decentralized field devices (sensors and actuators) on the field level and also enables consistent data exchange with higher ranking communication systems. A 9-pin sub-D connector is included on every device and is galvanic isolated from the main electronics as defined by the EN 50170 Profibus standard to allow easy network connection separate from the main connector. The main 15-pin sub-D connector or termination board is still needed for the power supply, but also allows for the standard analog I/O signals, analog valve override, and (open-collector) alarm signaling to be used separate from the network connection.

The communication electronics allows for automatic baud rate detection ranging from 9600 baud to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required. For selecting the device address, which must be unique on the network, two rotary switches are provided. This allows a user to easily select any address number ranging from 0 to 126. This can provide fast device replacement without complex network configurations. The Profibus-DP piggyback board is equipped with a zero command pushbutton, allowing the user to give a manual command to the device to (re)balance the flow sensor electronics. This command can also be issued through the protocol.

The Profibus-DP communication option supports the following message types:

•

Cyclic data exchange (Write/Read data).

•

Read inputs (e.g. status, flow, temperature, totalizer, etc.).

•

Read outputs (e.g. commands, setpoint).

•

Global control commands (e.g. fail safe, sync).

•

Get configuration (i.e. read number of I/O bytes and composition).

•

Read diagnostics information (i.e. get error and alarm status).

•

Set parameters (i.e. select gas number, engineering units, I/O configuration

•

Set parameters (i.e. select gas number, engineering units, I/O configuration etc.).

•

Check configuration (i.e. check I/O composition).

Page 17

Section 1 Introduction

Figure 1-5.5 EtherNet/IP™ M8 Power Connection and Pinnouts

EtherNet/IPTM Communications

The SLA5800 Series is now available with the state-of-the-art EtherNet/IP communications interface. Please refer to the supplemental EtherNet/IPTM manual for more description of the benefits of Brooks’ implementation of the communications platform.

The available physical interfaces on the EtherNet/IP

device are listed below:

• 5 pin M8 threaded male connector for power and Analog l/O, indicated by pwr”.

• ln and Out ports with RJ-45 connectors with industry standard pin outs, labelled “1” and “2”.

• 2.5mm female jack for RS485 diagnostic port indicated by “DlAG”

Web-based Network Settings Interface:

• Network configuration is DHCP.

• Network address is 192.168.1.100

Page 18

Section 1 Introduction

Figure 1-6 SLA5800 Series DeviceNet Connection and Pinouts

DEVICENET BUS

5 PIN MALE M12 CONNECTOR

M12 X 1.0 OUTSIDE THREAD

DeviceNet Communications

The SLA5800 Series is also available with DeviceNet capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a member of

ODVA

(Open DeviceNet Vendors Association), the governing standard

body for DeviceNet.

DeviceNet is similar to the RS485 standard in that it is a multi-drop connection that allows a maximum of 64 devices to be connected on the same network. Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via a rate switch mounted on the device.

The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital Series functions for “control and monitor” operations, including:

•

Accurate setpoint adjustment and flow output measurement (including units of measure selection)

•

PID Settings (controller only)

•

Valve Override (controller only)

•

Calibration Gas Select

•

Soft Start Control (controller only)

communication

Page 19

Section 1 Introduction

Figure 1-7 SLA5800 Series EtherCAT Connection and Pinout

EtherCAT Communications

The SLA5800 Series is also available with EtherCAT communication capability. Many applications of Flow Controllers/Meters are moving to increase the use of automation. Automation comes in many forms including Ethernet based field buses. Digital communications from these varied systems and the devices they measure and control, are a very effective means of not only accomplishing more effective and rapid system integration, but also providing greatly improved system diagnostics and maintainability.

The available physical interfaces on the EtherCAT device are listed below:

•

5 pin M8 threaded male connector for power and Analog l/O, indicated by “pwr”.

•

ln and Out ports with RJ-45 connectors.

•

2.5mm female jack for RS485 diagnostic port indicated by “DlAG” (refer to the SLA 5800 Series installation and operation manual for more details) The EtherCAT communication option supports the following message types:

•

Cyclic data exchange (Read/Write data)

•

Read lnputs (e.g. status, flow, temperature, actuator drive value, etc.)

•

Read Outputs (e.g. commands, setpoint, actuator override, etc.)

•

Read Diagnostics information (warning & alarm status)

•

Check Device configuration

•

Calibration due status

•

Hardware/Software versions etc.

Page 20

Section 1 Introduction

Figure 1-8 Dimensions- Model SLA5850, Thru-Flow, EtherNet/IP

Figure 1-9 Dimensions- Model SLA5850, Thru-Flow, Profibus

Page 21

Section 1 Introduction

Figure 1-10 Dimensions- Model SLA5850, Thru-Flow, RS485

Figure 1-11 Dimensions- Model SLA5850, Downport, RS485

Page 22

Section 1 Introduction

Figure 1-12 Dimensions- Model SLA5851, Thru-Flow, EtherCAT

Figure 1-13 Dimensions- Model SLA5851, Thru-Flow, DeviceNet

Page 23

Section 1 Introduction

Figure 1-15 Dimensions- Model SLA5853, Thru-Flow, EtherCAT

Figure 1-14 Dimensions- Model SLA5853, Thru-Flow, Profibus

Page 24

Section 1 Introduction

Figure 1-16 Dimensions- Model SLA5860, Thru-Flow, Profibus

Figure 1-17 Dimensions- Model SLA5860, Thru-Flow, RS48

Page 25

Section 2 Installation

Figure 1-18 Dimensions- Model SLA5861, Thru-Flow, RS485

Figure 1-19 Dimensions- Model SLA5863, Thru-Flow, DeviceNet

Page 26

Section 2 Installation

Section 2: Installation

Receipt of Equipment

This section provides installation instructions for the Brooks® Digital MFC's and MFM's. Section 1, Figures 1-8 thru 1-17 show the dimensions and electrical connections.

When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website:

BrooksInstrument.com/GlobalSupportCenters

Remove the envelope containing the packing list. Carefully remove the instrument from the packing case. Make sure spare parts are not discarded with the packing materials. Inspect for damaged or missing parts.

Recommended Storage Practice

Return Shipment

If intermediate or long-term storage of equipment is required, it is recommended that the equipment be stored in accordance with the following:

Within the original shipping container.

Stored in a sheltered area, preferably a warm, dry, heated warehouse.

32°C (90°F) maximum, 7°C (45°F) minimum.

Relative humidity 45% nominal, 60% maximum, 25% minimum. Upon removal from storage a visual inspection should be conducted to verify the condition of equipment is "as received".

Prior to returning any instrument to the factory for any reason, visit our website for instructions on how to obtain a Return Materials Authorization Number (RMA #) and complete a Decontamination Statement to accompany it: BrooksInstrument.com/Service. All instruments returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument.

Instrument must have been purged in accordance with the following:

Page 27

Section 2 Installation

Models

Maximum Flow Rate

Recommended Filter

SLA5850/60

100 ccm

2 micron

SLA5850/60

500 ccm

2 micron

SLA5850/60

1 to 5 lpm

10 micron

SLA5850/60

10 to 50 lpm

40 micron

SLA5851/61

15 to 100 lpm

40 micron

SLA5853/63

> 100 lpm

Consult factory

Transit Precautions

Removal from Storage

Gas Connections

In-Line Filter

To safeguard against damage during transit, transport the instrument to the installation site in the same container used for transportation from the factory if circumstances permit.

Upon removal from storage, a visual inspection should be conducted to verify the condition of the equipment is “as received.” If the equipment has been in storage in conditions in excess of those recommended (See Section 2-3), the device should be subjected to a pneumatic pressure test in accordance with applicable vessel codes.

Prior to installation ensure all piping is clean and free from obstructions. Install piping in such a manner that permits easy access to the instrument if removal becomes necessary.

Unless an integrated (internal) filter is already installed, it is recommended that an in-line filter be installed upstream from the mass flow controller or meter to prevent the possibility of any foreign material entering the flow sensor or control valve MFC. The filtering element should be replaced periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Note: Brooks provides many filter options. For those not listed here, please contact factory.

Page 28

Section 2 Installation

Installation

Recommended installation procedures: e.

The Brooks Digital MFC or MFM should be located in a clean, dry atmosphere relatively free from shock and vibration.

Leave sufficient room for access to Self-zero function push-button.

Install in such a manner that permits easy removal if the instrument requires servicing.

The Brooks Digital MFC or MFM can be installed in any position. However, mounting in orientations other than the original factory calibration (see calibration data sheet supplied with the instrument) can result in a<±0.2% maximum full scale shift after re-zeroing.

When installing a mass flow controller or meter with full scale flow rates of 10 lpm or greater, be aware that sharp, abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy. If possible, have at least ten pipe diameters of straight tubing upstream of the mass flow controller or meter. This is not required for meters with an integrated filter.

Page 29

Section 2 Installation

Special considerations for high pressure installations

The SLA-Series mass flow devices are capable of operation in high pressure applications. To ensure proper operation the user must be aware of the pressure conditions specified for the device. Inlet and outlet pressure conditions can be found on the device label and calibration sheet. The device was sized and tuned to operate at the specified pressure conditions. If the differential pressure during start up exceeds the specified differential pressure, hydraulic forces may keep the valve from opening and/or controlling properly. In these applications it is important to bring the pressure up in a controlled manner.

One method to assure successful startups is set a 100% setpoint command or valve override open command and then gently ramp the pressure up to operating (specified) conditions. This will allow you to bring your process pressure up to normal operating conditions where the SLA mass flow controller will function as specified.

Another method is to utilize a bypass valve to allow pressure around the device while ramping up the back pressure to normal operating conditions.

Special considerations to be taken when installing the SLA5853 MFC:

The Model SLA5853 has a valve design that is different from the standard low flow Brooks TMFC's. The SLA5853 consists of a dual stage, pilot operated valve. The pilot valve (located on the top of the MFC) controls a differential pressure across the main valve which, in turn controls the flow through the device. The main valve is a pressure operated valve that utilizes a bellows spring and diaphragm to control flow. This bellows and diaphragm assembly can be susceptible to damage by pressure spikes or surges. For this reason, it is recommended that process line startups are handled with care.

The bellows spring is offered in two levels. A low force for low differential pressures (Delta P < 30psig), and a high force (delta P >30 and <300 psig).

The selection of the bellows spring is mainly determined by the differential pressure as specified on the customer order. This should reflect your actual process conditions.The low force bellows consists of a softer bellows spring which is required to allow flow control at lower differential pressures.

During startup conditions, when a process line is being pressurized, the pressure and/or pressure differentials that the SLA5853 is exposed to may be different from the final process conditions. For higher pressure applications, and especially those with the low force bellows, it is important to bring the pressure up in a controlled manner in order to prevent a possible pressure spike to the bellows spring and main valve diaphragm. A pressure spike could deform the bellows, damage the diaphragm or blow out the bellows O-ring seal. This typically results in a failure to shutoff (leakby at zero setpoint).

One method to assure successful startups is to set a 100% setpoint command or valve override open command and then gently ramp the pressure up to operating conditions. This will allow you to bring your process pressures up to normal process conditions and the SLA5853 will then function as specified.

Another method is to utilize a bypass valve to allow pressure around the device while ramping up pressure to proper operating conditions.

Page 30

Section 2 Installation

The main point is to not instantly open a ball valve and allow a high upstream pressure or high back pressure surge into the SLA5853 main valve.

Proper process line venting is also important. If operating at pressures greater than 50 psig, be sure to perform a controlled pressure release from inlet and back pressure simultaneously in order to prevent bellows damage from excesssive back pressure.

Following careful startup and venting procedures will contribute to a long problem free life of your SLA5853 controller.

Stable Operating Conditions:

As stated above, the SLA5853 model utilizes a pressure operated main valve. Valve performance is dependant on stable system pressures. Oscillating or unstable upstream or downstream pressures are likely to cause the device flow control to become unstable. For the best performance, it is important to create a stable pressure environment by utilizing quality inlet and back pressure regulators in your process design. In many cases, the addition of a back pressure regulator will isolate the SLA5853 from the unstable downstream pressures inherent in many process designs.

All thermal mass flow controllers are factory tested with stable and equal ambient and process temperatures. If the process temperature does not equal the ambient temperature, the bypass ratio/accuracy will be affected. When a hot or cold process fluid is being measured, ensure that the piping system is designed to allow the gas temperature to equalize with the flow controller ambient temperature.

For more information, please contact the Brooks Technical Service group.

Special considerations to be taken when using Sanitary Fittings:

The maximum recommended product rating of 500 psi is based on published product specifications of commonly available sanitary clamps. Brooks does not supply sanitary clamps with the products. Customers shall select the appropriate sanitary clamps and follow the manufacturers installation instructions to achieve the needed pressure ratings

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Section 2 Installation

Electrical Interface

The setpoint signal is supplied as a 0(1) to 5 Vdc, 0 to 10 Vdc or 0(4)-20 mA analog signal. All signals are supplied via the 15-pin D-Connector. For an analog unit the minimum set of connections which must be made to the MFC and MFM includes +13.5 - 27 Vdc, supply common, and a setpoint signal.

The Brooks Digital electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply. These commons are electrically connected together on the PC board.

Analog I/O Versions

•

Signal Common

•

Signal Output (Voltage or Current)

• +13.5 - 27 Vdc Supply

•

Setpoint Input (Voltage or Current)

•

Setpoint Common

•

Supply Common

•

Chassis Ground (via unit body)

Refer to Figures 2-1, 2-2, 2-3, 2-4 and 2-5 for pin connections and

electrical I/O connections.

(The Brook’s MFC acts as a current sink to a setpoint input signal. The 0/4-20 mA setpoint signal should be “driven” into the MFC input by a controlled current source. Reference Brook’s device specifications for the setpoint input impedance.)

(The Brook’s MFC acts as the current source when providing a 0/4-20 mA output signal to the load. The output signal is “driven” by the MFC into the customer load. Reference Brook’s device specifications for maximum load capacity.)

Page 32

Section 2 Installation

Figure 2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version

Page 33

Section 2 Installation

Figure 2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)

Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)

Page 34

Section 2 Installation

Figure 2-4 RS485 Multidrop Interconnection TMFs and PC

The RS485 is a multidrop connection and allows a maximum of 32 devices to be connected to a computer system. Personal computers are not equipped with RS485 ports as standard. An RS232 to RS485 converter or RS485 interface board is therefore required to connect an RS485 to a standard PC. Figure 2-4 is an interconnection diagram showing two TMFs linked to a PC, via RS485 and RS485 to RS232 converter. The RS485 bus, a daisy-chain network, meaning that the wires are connected at the units as in Figure 2-4.

Protective Earth (PE) Connections:

DeviceNet™: The shield of the cable does not directly short to the device chassis. In order to achieve proper EMC compliance, the device conductive chassis shall be connected to protective earth (PE). The connection can be made via the 8-32 threaded connection on the flow body of the meter/controller.

Ethernet/IP™: The shields of the RJ45 cables do not directly short to the device chassis, per ODVA guidelines for an “active device.” The shield of the power cable does directly connect to the device chassis. In order to achieve proper EMC compliance, it is recommended to connect the device conductive to protective earth (PE). The connection can be made via the 8-32 threaded connection on the flow body of the meter/controller.

Page 35

Section 2 Installation

Other device types: The shields of the power and I/O cables directly connect to the device chassis. In order to achieve proper EMC compliance, it is recommended to connect the device conductive to protective earth (PE). The connection can be made via the 8-32 threaded connection on the flow body of the meter/controller.

Page 36

Section 2 Installation

Operation Check Procedure (Analog I/O)

Mount the MFC/MFM in its final orientation.

Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature.

Do NOT supply gas to the MFC/MFM. Ensure that the differential pressure across the MFC/MFM is zero.

Apply a setpoint of:

0.000 Vdc ± 10 mV (0 - 5 Vdc or 0 - 10 Vdc setpoint)

1.000 Vdc ± 10 mV (1 - 5 Vdc setpoint)

0.000 mA ± 100 µA (0 - 20 mA setpoint)

4.000 mA ± 100 µA (4 - 20 mA setpoint)

If the zero exceeds one of these limits, follow the re-zeroing procedure in Section 3-4. The analog output signal should be:

0.000 Vdc ± 10 mV (0 - 5 Vdc or 0 - 10 Vdc output)

1.000 Vdc ± 10 mV (1 - 5 Vdc output)

0.000 mA ± 40 µA (0 - 20 mA output)

4.000 mA ± 40 µA (4 - 20 mA output)

Turn on the gas supply. A positive flow signal may be present due to slight valve leak-thru (MFC only).

Supply a setpoint signal between:

to 5 Vdc (0 - 5 Vdc setpoint) or 0 to 10 Vdc (0 - 10 Vdc setpoint)

to 5 Vdc (1 - 5 Vdc setpoint) 0 to 20 mA (0 - 20 mA setpoint) 4 to 20 mA (4 - 20 mA setpoint)

Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1-4 of this document.

If flow output signal does not match the setpoint, and pressure settings are correct, this could indicate a problem in the MFC. A secondary issue could be the gas type. When checking with a surrogate gas, ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas.

Example:

Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride). The sensor factor N

(nitrogen) is 0.27, therefore the eqivalent N

needed is 100/0.27 = 370.4 ccm. This may require a pressure increase to make this flow rate.

Page 37

Section 2 Installation

Operation Check Procedure (Digital I/O)

Mount the MFC/MFM in its final orientation.

Apply power to the MFC/MFM and allow approximately 45 minutes for the instrument to completely warm up and stabilize its temperature.

Turn on the gas supply. A positive flow signal may be present due to slight valve leak-thru (MFC only).

Provide the proper UOM setpoint between 20% and 100% FS to the MFC via the digital network controller.

Check the MFC Flow value. It should match the setpoint UOM. Value within ± 0.2% FS in less than 10 seconds after setpoint change.

Example: Checking an MFC calibrated for 100 ccm SF6 (sulfur hexafluoride). The sensor factor N2 (nitrogen) is 0.27, therefore the equivalent N2

needed is 100/0.27 = 370.4 ccm. This may require a pressure increase to make this flow rate.

Bus/Network (DeviceNet, Profibus, EtherCAT, EtherNET/IPTM)

Other problems that may occur in an operational checkout of a Bus/ Network MFC could be due to data mismatches of Input/Output I/O assemblies. For proper communication over the Bus/Network network, the MFC must be set up with the same I/O Assembly as the network master. The Bus/Network specification defines Input and Output relative to the network (i.e. the data being PRODUCED from the device (MFC) as an INPUT into the network or the data is being CONSUMED by the device (MFC) is an OUTPUT from the network). NOTE: For additional EtherNET/IP details, please see Brooks Supplemental Instruction Manuals.

, DeviceNet, Profibus, or EtherCAT

Page 38

Section 3 Operation

Section 3: Operation

Features

Note: Not all features are available on all instruments.

Brooks Instrument digital MFC/MFMs are full-featured devices that perform much like traditional analog MFCs, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog MFCs so it can be retrofitted into tools using analog MFCs. Other versions of the Delta Class can provide a variety of digital protocols.

SLA5800 Series Standard

A digital SLA5800 Series Standard MFC is capable of storing up to six different gas pages. Each page (also) includes a calibration curve, PID controller settings, valve performance data, and information about the calibration conditions. The device can contain calibrations for different gases or for the same gas at multiple conditions (pressures, full scale flow rates).

Calibrations will appear in the calibration table in the same order as they appeared on the order, unless otherwise specified. The first listed gas will appear as calibration #1, the second as calibration #2 and so on. Note that unless specified otherwise on the order any unit containing a single calibration will have that calibration stored s calibration #1.

The EtherNET/IP™, DeviceNet, Profibus, EtherCAT and RS485 supplemental manuals describe further details on specific communication features.

SLA5800 Series Biotech

The SLA5800 Series Biotech Devices ships standard with the 4 key BioPhamracuetical industry gasses: Air, N in the standard Performance Package option. The device is sized for the specific gas chosen by the user at time of order, that is the configuration gas. The calibration curves are obtained by use of N2 as a surrogate gas. If actual

gas is chosen, as an extra cost option (for SLA58X0 and SLA58X1 only),

then the device is calibrated on CO2 and N2 surrogate for the remaining gasses.

Each gas has a “page” that includes a calibration curve, PID controller settings, valve performance data, and information about the calibration conditions. The active gas page will be the Configuration Gas, which will be listed on ordering documents, and the top label of the controller. The other three gas ranges will also be listed on the controller label.

The operator can change the active gas “page” either through the Brooks Expert Support Tool (BEST) software available at BrooksInstrument.com or through the digital communications protocols if the device is so equipped.

2, CO2 and O2. These are included

Page 39

Section 3 Operation

Setpoint Signal Type

Full Scale

Minimum Signal

Maximum Signal

0 to 5 Vdc

5 Vdc

0 V

5.5 Vdc = 110%

1 to 5 Vdc

5 Vdc

1 V

5.5 Vdc = 111%

0 to 20 mA

20 mA

0 mA

22 mA = 110%

4 to 20 mA

20 mA

4 mA

22 mA = 111%

0 to 10 Vdc

10 Vdc

0 V

11 Vdc = 110%

Analog I/O Type

Full Scale

Minimum Signal

Maximum Signal

0 to 5 Vdc

5 Vdc

-0.5 V

5.5 Vdc = 110%

1 to 5 Vdc

5 Vdc

0.5 V

5.5 Vdc = 111%

Analog I/O Mode of Operation

When using BEST, the pages will appear in the calibration table in the same order as noted above: Air will appear as calibration #1, N

2 as calibration #2

and so on. For more detailed instructions on how to activate gas pages using BEST, please see the Cal Pages and Flow Cal Pages section of the Installation and Operations manual for BEST, also available at BrooksInstrument.com.

The EtherNET/IP™, DeviceNet, Profibus, EtherCAT and RS485 supplemental manuals describe further details on how to change gases for specific communication features.

The following paragraphs describe the basic features of the Brooks Digital Series Mass Flow Meters/Controllers.

Functional Description

The analog interface may include any of the following I/O options as specified by the user:

- 5 Vdc setpoint, 0 - 5 Vdc flow output

- 5 Vdc setpoint, 1 - 5 Vdc flow Output 0 - 20 mA setpoint, 0 - 20 mA flow output 4 - 20 mA setpoint, 4 - 20 mA flow output 0 - 10 Vdc setpoint, 0 - 10 Vdc flow output

Also included is the Valve Override input pin. All analog signals available are on the 15 pin D-Connector. (See Fig. 2-1 for connections). The contents of the ten calibrations are determined from the customer order. Only those calibrations ordered will be available in the instrument. Unless otherwise specified, a Brooks Digital MFC/MFM ordered with only one calibration will have that calibration stored in calibration #1.

Before operating the MFC/MFM, apply power and warm-up the instrument for approximately 45 minutes. After warm-up, apply gas pressure then proceed by following the instructions in the following sections.

Analog I/O Setpoint (MFC Only)

This input allows the user to establish the MFC setpoint,. Several input types are available as follows:

Analog I/O Flow Signal

This output is used to indicate the flow signal. A negative flow signal indicates reverse flow through the device, but is NOT calibrated.

Several flow signal types are available:

Page 40

Section 3 Operation

0 to 20 mA

20 mA

0 mA

22 mA = 110%

4 to 20 mA

20 mA

3.8 mA

22 mA = 111%

0 to 10 Vdc

10 Vdc

0 V

11 Vdc = 110%

Valve Override (MFC Only)

Valve Override Input allows the valve to be forced to its most closed state or its most open state, regardless of setpoint. If this input is not electrically connected, the MFC will operate according to the current values of the other MFC inputs. If this input is held at 0 Vdc or -15 Vdc the valve will be forced to its most closed state. If this input is held at +5 Vdc or greater (max = 24 Vdc), the the valve will be forced to its open state.

Zeroing the MFC

It may be desirable to re-zero the flow sensor if it is operated at its temperature extremes or if it is positioned in an attitude other than that specified on the customer order.

To zero the device’s sensor:

1. Allow the device to be powered on for 45 minutes so that it achieves its operating temperature.

2. Close the downstream shutoff valve. The device should be full of process gas with no pressure differential.

3. Wait at least 30 seconds for the flow signal to drop to zero.

4. Using the device’s Zero pushbutton, zero the device:

- press the pushbutton until the device’s Status LED flashes red, then release the pushbutton. A successful zeroing operation is indicated by the Status LED being a steady green.

The zeroing operation can take up to 10 seconds to complete.

Note: Before zeroing the instrument, zero pressure differential MUST be established across the device. If there is pressure across the instrument during the zero process, any detected flow through the sensor will be misinterpreted as the zero flow reading. This will result in calibration inaccuracy during normal operation. Once zero differential pressure is established and verified, press the recessed, momentary push-button (zero button) located on the side of the device (See Figure 3-2) to start the zero function.

Page 41

Section 3 Operation

Zero Button

Figure 3-1 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers.

RS485 Communications Features (Analog versions only)

Digital communication, designed to emulate the Brooks S-series "S-protocol" or pseudo-HART communications is available on the Brooks

Digital Series via RS485. This form of multi-drop capable communication provides access to many of the Brooks Digital Series functions for "control and monitor" operations, including:

•

Accurate setpoint adjustment flow output measurement (including units of measure selection)

•

Valve Override (controller only)

•

Flow Totalizer

•

Alarm status and settings

•

Soft Start Control (controller only)

RS485 equipped units support the following baud rates. Please specify the desired baud rate when ordering (default is 19200 baud). Alternately, baud rate may be changed using the Brooks Expert Support Tool (BEST).

Baud Rates: 1200, 2400, 4800, 9600, 19200 and 38400

Reference the Brooks document "Supplemental Manual for RS485 Communications for Brooks Series" (X-DPT-RS485-SLA5800-SLAMf-Series-RevB-MFC-eng) for more details regarding the capabilities of this communication interface.

MFCs/MFMs, for SLA5800/SLAMf Revsion B

Page 42

Section 3 Operation

EtherNet/IP™ Communication Features

Brooks lnstrument now introduces the state-of-the-art EtherNet/IP™ communications interface on its SLA Series platform.

Please refer to the supplemental EtherNet/IP™ manual for more description of the benefits of Brooks’ implementation of the communications platform. The available physical interfaces on the EtherNet/IP™ device are listed below:

• 5 pin M8 threaded male connector for power and Analog I/O, indicated by pwr.

• In and Out ports with RJ-45 connectors Labeled “1” and “2”.

• 2.5mm female jack for RS485 diagnostic port indicated by ‘DIAG’

• Web-based Network Settings Interface

Web-based Network Settings Interface:

• Network configuration is DHCP.

• Network address is 192.168.1.100

DeviceNet Communications Features

The Brooks SLA5800 Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a

member of ODVA

(Open DeviceNet Vendors Association), the governing

standard body for DeviceNet.

DeviceNet is similar to the RS485 standard in that it is a multi-drop connection

that allows a maximum of 64 devices to be connected on the same network. Baud rate selections for DeviceNet products are 125K, 250K and 500K and can be selected via MAC ID switches mounted on the device.

The DeviceNetcommunication link also provides access to many of the Brooks SLA5800 Digital Series functions for “control and monitor” operations, including:

•

Accurate setpoint adjustment and flow output measurement (including units of measure selection)

•

PID Settings (controller only)

•

Valve Override (controller only)

•

Calibration Gas Select

•

Soft Start Control (controller only)

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Section 3 Operation

Profibus Communications Features

EtherCAT Communications Features

The Profibus-DP communication option supports the following message types:

•

Cyclic data exchange (Write/Read data).

•

Read inputs (e.g. status, flow, temperature, totalizer, etc.).

•

Read outputs (e.g. commands, setpoint).

•

Global control commands (e.g. fail safe, sync).

•

Get configuration (i.e. read number of I/O bytes and composition).

•

Read diagnostics information (i.e. get error and alarm status).

•

Set parameters (i.e. select gas number, engineering units, I/O configuration

•

Set parameters (i.e. select gas number, engineering units, I/O configuration etc.).

•

Check configuration (i.e. check I/O composition).

The SLA5800 Series is also available with the state-of-the-art EtherCAT communications interface. Many applications of Flow Controllers/Meters are moving to increase the use of automation. Automation comes in many forms including Ethernet based field buses. Digital communications from these varied systems and the devices they measure and control, are a very effective means of not only accomplishing more effective and rapid system integration, but also providing greatly improved system diagnostics and maintainability.

EtherCAT is an Ethernet based communication system and is known for its high cycle time and cost efficient cabling and master application solutions. The available physical interfaces on the EtherCAT device are listed below:

•

5 pin M8 threaded male connector for power and Analog l/O, indicated by “pwr”.

•

ln and Out ports with RJ-45 connectors.

•

2.5mm female jack for RS485 diagnostic port indicated by “DlAG” (refer

to the SLA 5800 Series installation and operation manual for more details)

Page 44

Section 3 Operation

The EtherCAT communication option supports the following message types:

•

Cyclic data exchange (Read/Write data)

•

Read lnputs (e.g. status, flow, temperature, actuator drive value, etc.)

•

Read Outputs (e.g. commands, setpoint, actuator override, etc.)

•

Read Diagnostics information (warning & alarm status)

•

Check Device configuration

•

Calibration due status

•

Hardware/Software versions etc.

Various companies provide EtherCAT master applications, (e.g. TwinCAT from Beckoff), or offer EtherCAT master stacks to develop a master

application (e.g. Acontis, A P.C.) can be used to run most EtherCAT master applications but needs dedicated EtherCAT hardware to support the high cycle times and kernel mode operations of the master applications, see www.beckoff.com.

Alarms (Analog versions only)

This section outlines alarms associated with the Analog versions of the Brooks Digital Series.

For information describing alarms specifically for Brooks DeviceNet units, reference the following supplemental manual: X-DPT-DeviceNet-SLA5800-SLAMf-Series-RevB-MFC-eng Part Number: 541B190AAG. For information describing alarms specifically for Brooks Profibus units, reference the following supplemental manual: X-DPT-Profibus-SLA5800-SLAMf-Series-RevB-MFC-PC-RT-eng Part Number: 541B191AAG.

Alarms (Analog versions only) - Configuration Attributes

Alarms are a user configurable feature. This feature may be adjusted via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool (BEST) User Manual for more information about the Diagnostic Port and software application. Each alarm has the following common user configurable attributes:

Alarm Code - The alarm code specifies the code to be flashed on the LED to indicate that an alarm condition has occurred. When more than one alarm is active, then the LED will indicate the most severe alarm with the highest Alarm Code. Alarm Codes do not have to be unique, i.e., more than one alarm type can use the same alarm code. Connector Pin 3, on the 15 pin D-Connector also provides an open collector TTL output that will close depending on the alarm situation and the alarm settings for remote monitoring of alarms.

Page 45

Section 3 Operation

Code

Low Limit

(%)

High Limit

(%)

Diagnostic

n/a

High Flow

n/a

100

n/a

Low Flow

-1

n/a

No Flow Indication

9 n/a

n/a 2

n/a

Setpoint Deviation

8 n/a

n/a

Temperature Out of Limits

7 5 60

n/a

Totalizer Overflow

7 n/a

n/a

Internal Power Supply Failure

6 n/a

n/a

Valve Drive Out of Limits

3 0 99

n/a

Device Calibration Due

2 n/a

n/a

8760

Latching Enable - When an alarm is set to non-latching that means the alarm is indicated only when the monitored value exceeds the specified conditions. When the alarm is set to latching. This means that the alarm will

be indicated when the monitored value first exceeds the specified conditions, and will be indicated until the user clears the alarm. If the user clears the alarm while the monitored value still exceeds the specified conditions, then the alarm will be re-latched and continue to be indicated.

Contact Enable - If the alarm condition is detected and the alarm contact is enabled, then the alarm contact (Pin 3) is “closed”.

Low Limit - The value of the monitored value below which is considered an alarm condition. (This attribute not valid for alarms that monitor a state condition of the device.)

High Limit - The value of the monitored value above which is considered an alarm condition.(This attribute not valid for alarms that monitor a state condition of the device.)

Alarm Summary - The following table summarizes the parameters for each alarm and the respective default values.

Alarm Alarm

Error

Hours

Device Overhaul Due

n/a n/a n/a

8760

Page 46

Section 3 Operation

RAM Test Failure

Byte by byte test of RAM detects bad memory location

Program Memory Corrupt

Checksum failure

Non-Volatile Memory

Byte by byte test of Non-Volatile Memory;

Diagnostic Alarms (Analog versions only)

General Alarms (Analog versions only)

A Diagnostic Alarm will be indicated when any of the diagnostics below detect a failure providing a visual indication via the red LED. The diagnostic test or tests that have detected a problem and caused the Diagnostic Alarm to occur can be determined only by reading alarm status via the Diagnostics Port.

Diagnostic Failure Description

detects bad memory location

Several alarms are available to indicate unexpected process control events as follows:

Flow Alarms

Two flow alarms are provided. Each allows the user to set a minimum and maximum flow limit range. Whenever flow is not within the range, the alarm will occur. These two general flow alarms provide more flexibility than having specific low and high flow alarms. These two alarms may be used to create separate low and high flow alarms, or used to provide banding around a flowrate. If the device is a controller, then this alarm is disabled if the setpoint is not within the specified flow limits or if the valve override is active.

No Flow Indication Alarm

The No Flow Indication Alarm will occur when the measurement of flow indicates flow less than a value that can be configured to 0 - 2%. If the device is a controller, setpoint must exceed the configured limit and valve override must not be active for this alarm to occur.

Setpoint Deviation Alarm

The Setpoint Deviation Alarm monitors the difference between Setpoint and Flow and sets the alarm when the difference exceeds the specified limits for more than the specified delay period. The user specifies a minimum and maximum limit in percent of Setpoint. This alarm is disabled if the valve override is active.

Temperature Out of Limits

The Temperature Out of Limits alarm will occur when the internal temperature is below the low limit or above the high limit.

Totalizer Overflow Alarm

The Totalizer Overflow Alarm will occur when the Flow Totalizer reaches its maximum value and resets to zero. This alarm is permanently configured as a latching type alarm which requires the user to reset the alarm via the Service Port or the RS485 interface.

Page 47

Section 3 Operation

Calibration/Configuration Sets

Special Features

Internal Power Supply Failure

This alarm will occur when any internally generated power supply voltage falls outside operational limits. Internal supply voltages must be within their nominal limits.

Valve Drive Out of Limits

The Valve Drive Out of Limits alarm will occur when the valve drive is below the low limit or above the high limit.

Device Calibration Due

The Device Calibration Due alarm occurs after the specified elapsed hours indicating that the device requires recalibration. The default setting is 8760 hours, equivalent to one year. The alarm will be cleared either by disabling it or changing the setting.

All Flow Calibration parameters and some of the device configuration parameters are saved in the device Non-Volatile Memory as “sets”. Up to 6 sets of calibration/configuration sets can be saved in order to have a unit pre-configured for multiple gas calibration, different pressure conditions, multiple scalings of the same gas.

Calibration and configuration data sets may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool User Manual (BEST) for more information about the Diagnostic Port and software application.

Flow Calibration Options

In addition to the factory calibration polynomial, the following calibration options are provided to modify the factory calibration:

Gas Correction Factor

Calibration Scaling

User Calibration Polynomial

Configuration Options

The following configuration parameters are stored in the Calibration/ Configuration Sets:

P, I, and D

Valve Offset, Span, and Leaktight Offset

Pole Compensation and filtering

Special Features may be adjusted by an advanced user via the Diagnostics Port using a special software application available from Brooks. Reference the Brooks Expert Support Tool User Manual (BEST) for more information about the Diagnostic Port and software application.

Page 48

Section 3 Operation

Setpoint Ramping

Low Setpoint Command Cutoff

Low Flow Output Cutoff

Adaptive Control

Flow Totalizer

PC-based Support Tools

The following Setpoint Ramping Options are provided:

Off – The device responds immediately to Setpoint changes.

Time – The device will Ramp Flow from the old Setpoint to the new

Setpoint in the time specified by the user in seconds.

When the Setpoint is derived from analog input, the Low Setpoint Command Cutoff parameter sets the minimum valid value of Setpoint. If the Setpoint value reported by the analog input is below the Low Setpoint Command Cutoff parameter value, then the Setpoint will be set to zero.

Whenever the measured flow is below the Low Flow Output Cutoff parameter, the Flow Output will be set to zero.

Adaptive Valve Control is a means of dynamically adjusting valve offset and span in response to changing process conditions. Options for Adaptive Control are: On/Off, Adjust Offset Only, Adjust Offset and Span.

A Flow Totalizer will be provided and maintained in Non-Volatile Memory. The update rate of the totalizer in Non-Volatile Memory will be 5 seconds.

Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. Smart Interface may be used with any unit supporting RS485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices. The Brooks Expert Support Tool (Analog I/O versions only) may be used to monitor, diagnose, tune and calibrate Brooks devices. The Brooks Expert Support Tool interfaces with Brooks products via a special diagnostics port.

Page 49

Section 4 Maintenance &

Section 4: Maintenance & Troubleshooting

Troubleshooting

No routine maintenance is required on the Brooks Digital MFC's and MFM's. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned.

Page 50

Section 4 Maintenance &

Troubleshooting Analog or Digital

Troubleshooting

This section contains suggestions to help diagnose MFC related problems in the gas distribution system and answers commonly asked questions.

Failure of the flow rate or flow signal to achieve setpoint.

1. Insufficient pressure drop across the MFCs (low or no pressure). If there

is not enough pressure differential across the MFC, it is impossible for the MFC's orifice to pass the full scale flow rate. To check for this condition, compare the actual inlet/outlet pressure drop with that specified on the order. Increase the pressure if necessary.

2. If pressure settings are correct and flow signal does not match setpoint,

a secondary issue could be the gas type. If checking the MFC with a surrogate gas, ensure that there is enough pressure to the MFC in order to flow the correct amount of the surrogate gas. You may have to calculate the equivalent flow using the thermal correction factors. Ex.: a device built and sized for hydrogen will have a small orifice and will be unable to achieve higher flows of a heavier gas such as N2.

3. Clogged sensor tube. If the MFC sensor tube is clogged, the flow signal

will be very low or zero while the actual flow will be at the valve's maximum rate, also, the valve is likely to drive to max opening (100%).

4. Flow signal matched setpoint but, actual flow is not correct.

Clogged restrictor. If the MFC's restrictor becomes clogged, a much larger flow stream will pass through the sensor rather than going straight through the restrictor. The symptom of this condition is a substantially reduced actual flow with a flow signal which matches the setpoint.

5. Flow rate in excess of 100% at zero setpoint.

Valve Override pin set to open or sensor tube is clogged (see above). If Valve Override (VOR) pin is active, the valve will be forced open or closed. Set this pin to its normal level before setting a setpoint.

6. Flow/Flow signal 'Unstable'

Model SLA5800 Series MFC performance is tuned during calibration at the conditions specified on the order. If the conditions in use (inlet and outlet pressure, temperature, attitude, gas or mixture type) are different or become different over time, the MFC may not perform as it did when it left the factory.

Bus System Devices Version Only

7. Failure of the flow rate or flow signal to achieve setpoint.

Specifically for a bus system device MFC, there may be problems associated with the network communication link. One common problem is due to data mismatches of the Input/Output (I/O) Assemblies. For proper communication over a bus system device network, the MFC must be set up with the same I/O assembly as the network master. Confirm these I/O settings are correct.

NOTE: This information and all other detailed DeviceNet information is available in the Brooks DeviceNet Supplement Instruction Manual.

Page 51

Section 4 Maintenance &

System Checks

Troubleshooting

Frequently Asked Questions (FAQ)

Q: What are the purposes of the LEDs on top of the MFC?

A: For EtherNET/IP and DeviceNet, there are two LEDs on top of a version MFC. The LED labeled 'MOD' is used to indicate module status ( please reference the Brooks DeviceNet or therNET/IP Instruction Manual for more detail). This LED should normally be lit steady GREEN: this signifies the MFC is in proper working mode. If the 'MOD' LED is lit steady RED, this signifies a critical fault has occurred in the MFC. Please contact the factory for instructions.

The LED labeled 'NET' is used to indicate NETWORK status. Note the 'NET' LED can have 4 distinct operational states for DeviceNet, and 5 distinct states for EtherNET/IP. For more complete details on these LEDs, reference the Brooks DeviceNet or EtherNET/IP Instruction Manual.

Q: What is purpose of the Rotary Switches on top of the MFC?

A: Two of the rotary switches are labeled 'ADDRESS' (DeviceNET only).

These two switches are used to configure the MAC ID of the MFC when used on the DeviceNet network. MAC ID stands for Media Access Control Identifier and is used to set the unique address of the device on the network. The possible range of addresses is 00 to 63. The out-ofbox MAC ID setting is 63. The third rotary switch is labeled 'RATE'. This switch sets the baud rate of the MFC for communicating over the DeviceNet network. The out-of-box default setting is 125K baud. For more complete details on these switches, reference the Brooks DeviceNet Supplement Instruction Manual.

The Brooks Digital Series Flowmeters and Controllers are generally used as a component in gas handling systems, which can be complex in nature. It can therefore be very difficult to isolate a malfunction in the system. An inaccurately diagnosed malfunction can cause many hours of unnecessary downtime. If possible, perform the following system checks before removing a suspect Mass Flow Meter or Controller for bench troubleshooting or return to the factory. (especially if the system is new):

8. Verify a low resistance common connection and that the correct power

supply voltage and signals are present of the connector of the Smart TMF.

Supplement

Page 52

Section 4 Maintenance &

SENSOR

SCHEMATIC

Remove the sensor connector from the PC Board for this procedure.

PIN NO.

FUNCTION

1 Heater

Upstream

Sensor (Su)

Downstream

Sensor (Sd)

Sensor Common

5 Heater Common

6 Thermistor

7 Thermistor

Pin 6 to Pin 7

Nominal 580 ohm reading.

Table 4-1 Sensor Troubleshooting

Troubleshooting

OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL

Temperature

Open circuit on ohmmeter. If either heater (1) or

Pin 1 or 4 to meter body

Pin 4 to Pin 2

Pin 4 to Pin 3

Pin 5 to Pin 1 Nominal 1000 ohm reading.

sensor common (4) are shorted, an ohmmeter reading will be obtained.

Nominal 1100 ohms reading, depending on

temperature and ohmmeter current.

9. Verify that the process gas connections have been made correctly, and

that they have been tested for leaks.

10.If the Mass Flow Controller appears to be functioning but cannot achieve Setpoint, verify that there is sufficient inlet pressure and pressure drop at the controller to provide the

required flow. This section contains suggestions to help diagnose simple MFC/MFM related problems in the gas distribution system and answers commonly asked questions.

Page 53

Section 4 Maintenance &

Troubleshooting

Figure 4-1 Bench Troubleshooting Circuit

Bench Troubleshooting

Establish a proper connection between the Brooks Digital Series Mass Flow Meter or Controller (using Figure 4-1 as a reference) Switch on the power and allow the instrument to warm-up for 45 minutes. In case of a Controller model, adjust the Setpoint to zero. Do not connect the device to a gas source yet. Observe the output signal and, if necessary, perform the zero adjustment procedure (See Section 3-4 zeroing function). If the output signal does not zero properly, please contact Brooks Instrument.

Connect the instrument to a source of the same gas used for it's original calibration. Regulate the Setpoint to 100% flow and adjust the inlet and outlet pressures to calibration conditions. Verify that the output signal reaches its full scale value and stabilizes at that value. Vary the command voltage over the 1 to 100% range and verify that the output signal follows the Setpoint If possible, connect a flow measurement device to monitor the actual flow behavior and verify the accuracy of the mass flow instrument. If the mass instrument performs as described above, then it is functioning correctly and the problem may lie

elsewhere. Table 4-2 lists possible malfunctions which may be encountered during bench troubleshooting. For Controller Models Only: Apply +5 Vdc to the +15 Vdc valve override pin (pin 12) and verify that the output exceeds 100%. Connect the valve override pin to earth and verify that the output signal falls below 2%.

Page 54

Section 4 Maintenance &

Troubleshooting

Cleaning Procedures

When deposition makes it necessary to clean the Brooks Digital Series Mass Flow Controller or Mass Flow Meter, use the following procedures:

10. Remove the unit from the system.

11. Purge with dry nitrogen gas, which removes virtually all particulate matter from the device. Should contamination persist,

subject all wetted

components to ultrasonic cleaning. Following

this, purge the device thoroughly with dry nitrogen gas once again.

12. If the sensor is contaminated, remove the sensor and use a hemostat or tweezers to push a 0.007" diameter piano wire through the flow-sensor tube to remove any contamination (end closest to the control valve). The sensor tube can then be flushed with a solvent that leaves no residue. This can be accomplished conveniently using a hypodermic needle filled with solvent.

NOTE: Do not soak the sensor assembly in a cleaning solvent. If solvent seeps into the sensor assembly, it will likely damage or significantly alter the sensor's operating characteristics.

Calibration Procedure

The calibration of Brooks Digital Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment in addition to digital communications.

If your device needs calibration Brooks Instrument can provide this service at one of its service locations. Visit www.BrooksInstrument.com to locate the service location nearest to you. However, if traceable calibration equipment is available at your facility, calibration software, along with training, is available for purchase.

Wetted components include the body, laminar-flow element, and all valve components including the orifice, process adapters and inlet

filters (if so equipped).

Page 55

Section 4 Maintenance &

Trouble

Possible cause

Check/Corrective Action

Output stays at zero

meter/controller

Clogged Sensor

Defective electronic board

Clean sensor. Refer to cleaning procedures

Contact Brooks Instrument

Flow cannot be achieved

Clogged Control Valve

Clean the control valve (Section 4-1-2) or

Output signal stays at approx.

Valve leaks or is stuck open

Clean and/or adjust control valve

Defective PC board

Contact Brooks Instrument

Output signal follows Setpoint

go below 2%

Control valve leaks or is stuck

Clean the control valve or return the device

Output signal follows Setpoint

not reach full scale

Insufficient inlet pressure or

Adjust pressures, inspect in-line filters and

Partially clogged sensor

Clean sensor, see cleaning procedures

(applicable to MFC)

Instrument grossly out of

desired.

Partially clogged sensor

Clean sensor, see cleaning procedures

Instrument grossly out of

desired.

Partially clogged restrictor

Replace or clean restrictor

Adjust pressures to original specifications

Table 4-2 Troubleshooting

Troubleshooting

(regardless of Setpoint) and there is flow through the

regardless of Setpoint. (applicable to MFC)

5.5 Vdc or 22 mA (regardless of Setpoint) and there is flow through the meter/controller

at higher Setpoints but will not

at lower Setpoints, but does

Valve override input is grounded

Defective electronic board

(applicable to MFC)

+15 V applied to the valve override input (applicable to MFC)

open.

pressure drop

(Section 4-1-3).

return the device to the factory

Check the valve override input (Pin 12)

Contact Brooks Instrument.

(Section 4-1-2).

Check the valve override terminal (Pin 12)

to the factory (Section 4-1-2).

clean/replace as necessary.

(Section 4-1-2).

calibration. Flow is higher than

calibration. Flow is lower than

Controller oscillates (applicable to MFC)

Partially clogged valve (applicable to MFC)

Valve out of adjustment (applicable to MFC)

Valve guide spring failure

Pressure drop or inlet pressure deviates from calibrated values

Valve out of adjustment

Unstable inlet pressure

Defective PC board

Clean the control valve (Section 4-1-2) or return the device to the factory, see cleaning proceedures

Contact Brooks Instrument

(Section 4-1-2).

Contact Brooks Instrument

Check external pressure regulator

Contact Brooks Instrument

Page 56

Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être co rrectement

nner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à

ent manuel d’utilisation n’est pas le bon, consulte z la dernière page de la

onformément à la législation en vigueur au niv eau local et

cédé pour éviter des pics de débits. (2) Vérifiez qu’il n’y a pas

vous que les pièces de

ures non autorisées peuvent

s d’apparence similaire peuvent en traîner

éviter les chocs électriques et les blessures, sauf

es pour une

thermique du fluide peut casser l’appareil

•

Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse 25 mm ou un pouce entrent dans le

ATTENTION : cet instrument contient des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être

ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes

La plupart des produits électroniques

NMOS, SMOS, etc.). L’ expérience démontre que d’ infimes quantités d’électricité

L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique (di rective

ESD (décharge électrostatique)

Compatibilité électromagnétique européenne (CEM)

Directive européenne « équipements sous pression » (PED)

Instructions essentielles A lire avant de commencer !

French

installés, utilisés et entretenus pour pouvoir fonctio votre programme de sécurité l ors de l’installation, l’utilisation e t l’entretien des produits Brooks Instrument.

•

Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’install ation, l’utilisation, la mise à jour , la programmation et l’entretien du produit.

•

Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le prés

couverture pour connaître le p oint de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y rep orter par la suite.

AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation.

Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement.

•

Si vous ne comprenez pas l’ une des instructions, prenez c ontact avec un représentant de Brooks Instrument pour obtenir des explications.

•

Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci.

AVERTISSEMENT: Avant toute installation, vérifier que cet instrument est conformes aux normes locales et nationales.

Le non-respect de cet avertissement peut entrainer des blessures graves et/ou endommager l’équipement.

Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et c

national. Branchez tous les p roduits aux sources d’électricité e t de pression agréées.

Utilisation : (1) Faites lentement entrer le débit dans le système . Ouvrez progressivement les vannes d e pro

de fuite au niveau des bran chements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation.

Avant de procéder à l ’entretien, assurez-vous qu e la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une pièce, assu rez-

rechange sont celles i ndiquées par Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procéd porter atteinte au fonctionnement du p roduit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièce des incendies, des risques éle ctriques ou un mauvais fonctionnement.

Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour

lorsque l’entretien est réalisé par des personnes qualifiées.

AVERTISSEMENT: dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermé raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation et provoquer des blessures.

cadre de la directive PED.

•

La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED.

•

Les appareils de mesure de ce manuel sont conformes à la directive EN 2014/34/EU.

•

Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1.

•

Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III.

•

Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie » (SEP).

CEM 2014/30 /EU). Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utilis er avec l’équipement marqué CE.

Qualité du câble d’interconnexion, des presse-étoupes et connecteurs :

Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral. Les connecteurs rectangulaires o u circulaires utilisés doivent av oir un blindage métallique. S’i l y a lieu, des presse-étoupes mé talliques doivent faire office de serreécran de câble. L’écran du câble doit être raccordé à l’enveloppe métalli que ou au presse-étoupe et blin dé aux deux extrémités sur 360 degrés. Le blindage doit s’achever sur une prise de terre. Pour des instructions supplé mentaires concernant la protection pa r mise à la terre veuillez vo us reporter à la Section 2 , Interface électrique, page 31. Les connecteurs de carte stan dards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se conformer à la certification CE.

Le blindage doit s’achever su r une prise de terre. En ce qui concerne la con figuration des broches, veuillez vous reporter au manuel d’utilisation joint.

respectées pendant le retrait, l’installation ou la manipulation des cartes de circuits imprimés ou des dispositifs internes.

Procédure de manipulation :

L’alimentation électrique de l’ appareil doit être coupée.

Le personnel doit être mis à la terre, au moyen d’une bande de poignet

de circuits imprimés ou autres dispositifs internes.

Les cartes de circuits i mprimés doivent être transportées dans un récipien t conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier

moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transpor t, le stockage ou le retour à l’usine.

Observations

Brooks Instru ment n’est pas le seul à proposer des produits comportant des composants sensibles aux dé charges électrostatiques. modernes contiennent des composants qui utilisent des technologies à oxydes métalliques ( statique suffisent à endommage r ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne.

Page 57

Wichtige Anweisungen

aus, obwohl sie funktionsfähig zu sein scheinen.

ESD (Elektrostatische Entladung)

German

ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden.

Verfahrensanweisung:

Trennen Sie das Gerät von der Stromversorgung.

Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden.

Platinen sind in speziellen Behältern mit Schutz gege n elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport , zur Lagerung oder Rücksendung an das Werk gelegt werden.

Anmerkung

Dieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh

Page 58

Istruzioni fondamentali

Leggerle subito!

Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell’ambito della Direttiva

I prodotti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice).

Scarica elettrostatica (ESD)

Direttiva europea relativa alla compatibilità elettromagnetica (EMC)

Direttiva europea relativa alle apparecchiature a pressione (PED)

Italian

Europea relativa alle apparecchiature a pressione (PED).

Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED.

I prodotti di misura descritti nel presente manuale sono conformi alla Direttiva UE 2014/34/EU.

Ogni flussimetro Brooks appartiene al gruppo di fluidi 1.

I prodotti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED.

Le appar ecchiature (el ettriche/elet troniche) Br ooks Instrument dispongono del marchi o CE ed hanno super ato positivam ente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU).

In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.

Qualità dei cavi di segnale, dei pressacavi e dei connettori:

La Brooks Instrument offre cavi d’alta qualità conformi ai requisiti della certificazione CE.

Qualor a vengano utili zzati cavi di segn ale propri, dev ono essere scelt i con schermatu ra al 100% e interam ente filtrat i.

I connettori „D” o „rot ondi” devono ess ere schermati c on schermatura m etallica. In ca so di necessità bi sogna utilizzar e pressacavi m etallici di collegamento per fissare la schermatura del cavo.

La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il ca vo deve essere sch ermato su entramb i i lati a 360°. La scherm atura deve esser e effettuata c on messa a terra.

Per ulter iori istruzi oni sui collegam enti di terra di protez ione (PE), far e riferimento al la Sezione 2, Int erfaccia Elet trica, pagina 31.

I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conf ormi alla marcatu ra CE.

La scherm atura deve esser e effettuata con mes sa a terra.

Configurazione pin: Vedi Manuale d’uso allegato.

Page 59

Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz

Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP).

Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las

Descarga Electroestática (ESD)

PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática.

electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial.

Directriz Europea respecto a la Compatibilidad Electromagnética (EMC)

Directriz Europea de los Equipos de Presión (PED)

Spanish

Europea de los Equipos de Presión (PED).

El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED

Los instrumentos de medición indicados en el Manual responden a las EN directivas 2014/34/EU.

Todos los caudalímetros Brooks pertenecen a la categoría 1 del grupo de fluidos.

Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED

exigencias de la compatibilidad electromagnética (directiva de EMC 2014/30/EU). Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE.

Calidad de los cables de señal, piezas de unión de cable y conectores:

El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE. Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%. Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable. Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°. El blindaje debe terminar en tierra. El blindaje debe conectarse a tierra. Para obtener instrucciones

adicionales sobre las conexiones a tierra (PE), consulte la Sección 2, Interfaz eléctrica, página 31.

Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE. El blindaje debe terminarse en tierra. Configuración de contacto: Véase Instrucciones de operación adjuntas.

Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos Proceso de operación:

Desconectar la fuente eléctrica de la unidad. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o

ajustar el circuito impreso eléctrico u otro medio interno. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente

directamente antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica.

Notas:

Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima

Page 60

LIMITED WARRANTY

Visit www.BrooksInstrument.com for the terms and conditions of our limited warranty.

SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. W e operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.

X-TMF-SLA5800-Series-RevB-MFC-eng/541B187AAG/2019-7

Page 61

Brooks Instrument SLA5800 Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Section 4 Maintenance & Troubleshooting

Section 1: Introduction

Specifications (Reference Tables 1-1 and 1-2)

Reference Conditions

PC-based Support Tools

Fast Response Performance

Calibration Selection

Selectable Soft Start

RS485 Communications

Profibus Communications

DeviceNet Communications

EtherCAT Communications

Section 2: Installation

Receipt of Equipment

Recommended Storage Practice

Return Shipment

Transit Precautions

Removal from Storage

Gas Connections

In-Line Filter

Installation

Special considerations for high pressure installations

Special considerations to be taken when installing the SLA5853 MFC:

Stable Operating Conditions:

Special considerations to be taken when using Sanitary Fittings:

Electrical Interface

Operation Check Procedure (Analog I/O)

Operation Check Procedure (Digital I/O)

Bus/Network (DeviceNet, Profibus, EtherCAT, EtherNET/IPTM)

Section 3: Operation

Features

Analog I/O Mode of Operation

Functional Description

Analog I/O Setpoint (MFC Only)

Analog I/O Flow Signal

Valve Override (MFC Only)

Zeroing the MFC

RS485 Communications Features (Analog versions only)

EtherNet/IP™ Communication Features

DeviceNet Communications Features

Profibus Communications Features

EtherCAT Communications Features

Alarms (Analog versions only)

Alarms (Analog versions only) - Configuration Attributes

Diagnostic Alarms (Analog versions only)

General Alarms (Analog versions only)

Flow Alarms

No Flow Indication Alarm

Setpoint Deviation Alarm

Temperature Out of Limits

Totalizer Overflow Alarm

Calibration/Configuration Sets

Special Features

Internal Power Supply Failure

Valve Drive Out of Limits

Device Calibration Due

Flow Calibration Options

Configuration Options

Setpoint Ramping

Low Setpoint Command Cutoff

Low Flow Output Cutoff

Adaptive Control

Flow Totalizer

PC-based Support Tools

Section 4: Maintenance & Troubleshooting

Troubleshooting Analog or Digital

Bus System Devices Version Only

System Checks

Frequently Asked Questions (FAQ)

Bench Troubleshooting

Cleaning Procedures

Calibration Procedure