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DS-CM-QmB-eng
July, 2018
Data Sheet
®
Quantim Series
Model QmB IP40
Coriolis Mass Flow
Low Flow Coriolis Mass Flow
Measurement and Control
Overview
Brooks Instrument’s Quantim® Series is the smallest, lowest ow Coriolis meter and
controller available on the market. With a footprint the size of a handheld organizer,
you can t this instrument into any tight space. The heart of the device is a patented
Coriolis sensor design which measures low ows independent of the uid type or process
variables. With a range of 0.001 to more than 27 kg/hr, you can measure mass or
volume ow and density or temperature all in one compact package. Quantim oers
unsurpassed accuracy and unmatched zero stability in demanding low ow applications.
Most critical processes require control as well as measurement, and Quantim oers an
optional integrally mounted, in-line control valve. No remote electronics are required as
all the transmitting and control electronics are contained within the product housing. A
remote valve conguration is also available.
Available with a variety of options and global approvals the Brooks Quantim Coriolis
mass ow meters and controllers provide unsurpassed performance, solving specic
challenges in demanding low-ow applications.
Product Description
The Quantim family of Coriolis mass ow meters and ow controllers uses a proven mass
ow measurement technology to provide direct mass ow measurement and control of
liquids and gases that has been employed in a wide variety of markets and applications
for more than 15 years. Brooks Quantim products are the smallest and lowest ow
Coriolis mass ow meters and controllers available on the market. Coriolis mass ow
devices have the option of using an integrally mounted or remote control valve in a
miniaturized conguration. They can simultaneously measure mass or volumetric ow
and uid density or temperature.
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Product Description
Precision for Even the Most Delicate or Lowest-Flow Processes
Quantim’s Coriolis technology allows for precise, direct mass measurements even for very low ow processes. This technology enables
for measurement accuracies within 0.2% of the rate for stainless steel construction and 0.5% of the rate for Alloy C-22 construction.
Quantim is the lowest coriolis ow controller available. The conguration with the lowest ow capability allows for measurement
down to 0.001kg/hr, which is perfect for extremely sensitive processes and costly components in any setting.
Process Flexibility
The Coriolis Eect is the deection of moving objects with respect to a reference point, utilizing this eect allows measurement
of ow while negating the need for calibration to a specic uid or process conditions. The Coriolis technology gives Quantim its’
industry-leading accuracy, and allows the direct measurement of mass ow. This allows Quantim to transition between process uids
without the need for recalibration, assuming the uid change doesn’t fall out of specication for the valve assembly.
Material Selection for Any Application
Quantim has material options to allow the best possible match for your needs. Quantim oers both stainless steel and Hastelloy
as materials for sensor construction. This accommodates for processes with more corrosive uids, and reduces maintenance due to
corrosion of the mass ow meter/controller. Even more variety can be found in seal choices. Customers have the choice of using
Viton® uoroelastomer, Buna, Kalrez®, EPDM, and Nickel as their seals.
Enclosures to Meet Any Need
Dierent enclosure types enable equipment to be installed in any environment from an indoor non-hazardous area to an outdoor
explosion risk area. Quantim is available in four dierent enclosure types. The IP40 is a basic enclosure, desired for most enclosed
environments. IP66 is weather/waterproof, as well as Class 1, Division 2, Zone 2 certied for hazardous locations. The IP66XP is
Division 1, Zone 1 certied for explosive environments. No matter the environment, Quantim can be tailored to t your needs.
Features and Benets
Features Benets
Integrated sensor, valve and PID control Simplies purchase, installation, and start up by having everything available
all in one small package from one supplier in a single compact unit
Low mass tube drive and optical sensing Enables accuracy at extreme low ow
Multivariable outputs and true mass measurement Improves and simplies process monitoring and diagnostics,
further reducing cost of ownership
Diagnostic alarms and warnings Provides early indication of potential process issues so preventative actions can be taken
Industry leading mass ow measurement precision Process chemistry and/or process conditions can be altered without the need to change or
recalibrate the measurement system, providing the user with maximum exibility
No internal moving parts Minimizes maintenance requirements and overall cost of ownership
Small physical size Easily integrated into most intricate process systems
Gas and liquid measurement and control The ultimate in process exibilty
capability in one package
Variety of options, enclosure types and The right product for your application
area classications available
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Features and Benets
Diagnostic Alarms and Warnings
• Provides early indication of potential
process issues for preventative action
Optical Sensor
• Allows precise measurement
of tube movement for direct
mass ow measurement
User Interface
• Easy installation, start-up, and operation
Advanced Electronics
• Integrated PID control
with superior signal
ltering
Tube Assembly
• Varied sizing allows
for up to 27 kg/hr of ow
Coplanar Valve
• Super-fast response times
(<400 msec typical)
• Minimum valve leak-by
(<0.2% FS)
Liquid or Gas Connections
• Seals are available in Viton®, Kalrez®,
Buna, EPDM and Nickel
• Flow-thru or Downported Congurations
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Product Applications
Catalyst Research
The Quantim coriolis mass ow controllers have been selected
by many companies participating in catalyst research due
to the precise measurement requirements for accurately
calculated conversion rate and selectivity, which allows for
successful scaling up of processes. Quantim is preferred due
to its exceptional precision, wide dynamic range, and super
stability. The coriolis technology within Quantim makes them
extremely well suited for critical measurements where the
composition or thermal properties of feeds vary. It is also
available for extremely high pressure service, with appropriate
area classications, and wetted materials.
Vacuum Process
Brooks oers many exceptionally performing products for CVD,
ALD, etch, diusion, and other vacuum operations.
The Quantim coriolis mass ow controller provides precision,
accuracy, and repeatability for liquid precursor applications.
Precision Coating
Many coating processes use liquids that are sprayed onto
substrates. The liquid delivery rate to the spray nozzles controls
the lm thickness on the substrate, while gas ow determines
droplet size and spray pattern.
The Quantim mass ow controller is perfect for controlling
the liquid ow rate to the spray nozzle. In addition, the
instantaneous density output available from the Quantim Series
can be employed diagnostically to detect the presence of gas
bubbles in the liquid stream.
The Brooks Model 0254 secondary electronics may be used to
provide power, local display, and setpoint for both ow devices.
The liquid density measurement, used for quality control, is
also displayed. A totalizer function may be used to track liquid
inventory to ensure that the process supply does not run low.
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Product Specications
Performance Specications
Gas Flow Limits: Air, 70OF (21OC), 14.5 psi (1 Bar) pressure drop
100,000
10,000
1,000
Flow rate (sccm)
Size 4 Meter
Size 4 Controller
Size 3 Meter
Size 3 Controller
Size 2 Meter
Size 2 Controller
100
50 100 200 500 1000 1500
Inlet Pressure (psig)
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Product Specications
100.0
Pressure Drop (psi)
Dierential Pressure Requirements, Meter
(9)
Pressure Drop Liquid - (H2O)
Tube Size 4
10.0
Tube Size 2
1.0
0.1
10 100 1,000 10,000 100,000
Tube Size 3
Mass Flow (grams/hr)
Pressure Drop (psi)
Pressure Drop Air @ 500 psi Inlet Pressure
100.0
10.0
Tube Size 4
Tube Size 3
Tube Size 2
1.0
0.1
100 1,000 10,000 100,000
Mass Flow (sccm)
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Product Specications
Performance
QMBC (Controller) QMBM (Meter)
Tube Size: 2 3 4 2 3 4
Nominal Flow Range:
Liquid (kg/hr)
Gas (kg/hr): 0.076 0.214 1.796 0.103 0.405 3.840
Gas (sccm)
Minimum Measurable Flow Liquid (kg/hr) 0.001 0.010 0.100 0.001 0.010 0.100
Zero Stability: QMBC (Controller) QMBM (Meter)
Stainless Steel Sensor (kg/hr): 0.00026 0.0020 0.0120 0.00026 0.0020 0.0120
Alloy C-22 Sensor (kg/hr): 0.0004 0.0030 0.0240 0.0004 0.0030 0.0240
Repeatability & Reproducibility: +0.05% or +[0.5 x (zero stability/owrate) x 100]% of rate whichever is greater
Response Time (Settling Time):
2% F.S. of nal value, Stainless Steel: <2 seconds <0.5 seconds
(per SEMI Guideline E17-91) Alloy C-22: <12 seconds <0.5 seconds
Flow Accuracy (Standard Flow): Standard Flow Accuracy or [(zero stability/ow rate) x 100]% of rate, whichever is greater
Stainless Steel Sensor: Liquid: 0.2% Gas: 0.5% of rate
Hastelloy Sensor: Liquid: 0.5% Gas: 0.5% of rate
Ratings
Operating Temperature Range: 0 to 60°C
Temperature Accuracy: ± 0.5°C
Differential Pressure Range: Liquid: 10 to 200 psi
Gas: 10 to 150 psi
Density Range: 0 to 0.3 and 0.5 to 2.0 g/cc
Density Accuracy: ± 0.005 g/cc
Maximum Operating Pressure:
Standard: 500 psi
Optional: 1500 psi
Optional: 4500 psi
Leak Integrity (external): Elastomer: Outboard 1 x 10-9 atm. cc/sec., helium (max)
Metal Seal: 1 x 10
(5)
: 0.15 0.78 7.97 0.19 1.00 13.50
(2)
: 1051 2955 24787 1432 5595 53116
-10
atm. cc/sec., helium (max)
Mechanical
Materials of Construction
Process Wetted: 316L, 316L VAR, High alloy ferritic stainless and 17-7PH
Optional: Alloy C-22 sensor tube
Process Seals: Elastomer Seal: Viton®uoroelastomers, Buna, Kalrez or EPDM
Metal Seal: stainless steel and nickel
Housing: IP40: polyurethane painted aluminum
IP66: polyurethane painted aluminum
IP66XP: aluminum
Inlet Filter: Tube size 2 controller: 1 micron or 10 micron inlet lter recommended
Tube size 3 or 4: 10, 20, 30 & 40 micron lters available
Weight: Housing IP40: 1.6 kg or 3.5 lbs.
Housing IP66: 1.9 kg or 4.2 lbs.
Housing IP66XP: 24 kg or 52 lbs.
Moisture Content: Purged to exhaust dew point less than -40OC (-40OF) prior to shipment to remove calibration liquid,
to prevent process contamination. Then vacuum bagged at ambient room conditions.
Process Fitting Options: 1/16”, 1/8”, 1/4” or 6mm tube compression, VCR, VCO or NPT(F), 3.2 mm UPG,
Downport ANSI/ISA 76.00.02 (See Model Code)
Electrical Connections: IP40: 15 pin D-Type connector (See Figure 3).
IP66: Unpluggable Terminal Block 28-16 Awg.
IP66XP: 3/4” NPT wiring access to IP40 device with 15 pin D-Type connector.
Dimensions: (See Figures 1 through 7)
Diagnostics
Status Lights: Status and Alarm LEDs
Alarms: Mass Flow, Density, Volumetric Flow, Temperature, Slug Flow,
Diagnostic Failure, Setpoint Deviation, Valve Drive
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Product Specications
Electrical
Output Signals: 4-20 mA and 0-5 Vdc active output represents mass ow or volume ow
(3)
And simultaneously available 4-20 mA or 0-5 Vdc active ouput represents on-line density or temperature information
Alarm output, max. voltage 30 Vdc, max. current 100 mA
Input Signals: Command (setpoint) that drives the control valve, either 4-20 mA or 0-5 Vdc input signals
Valve Override Function:
Left oating/unconnected - instrument controls ow at setpoint
Connected to signal at or above 5.0 volts - valve is forced open
Connected to signal at or below 0.0 volts - valve is forced closed
Power Requirements: Voltage: +14 to 27 Vdc
Nominal Current: Controller: 300 mA to 400 mA
Meter: 100 mA to 150 mA
Maximum Current: Controller: 715 @ 14 Vdc
Meter: 470 mA @ 14 Vdc
Maximum Power: Controller: 10.0 W
(12)
Meter: 6.6 W
Additional Functions and Outputs
Damping: Factory set time constant from 0 to 10 seconds
LED’s: ‘STAT’ solid green: system operative
‘AL’ solid red: system fault
Pushbutton: ‘ZERO’ setting pushbutton
Certications, Approvals and Compliance
US and Canada
IP40 Series: UL Recognized E73889, Vol 3, Section 3.
Non Incendive, Class I Division 2 Groups A, B, C and D; T4
per UL 1604, UL 508, and CSA 22.2 No. 213 1987; C-22.2 No. 14-M91
Ex nC IIC T4 per CSA E79-15
Europe
KEMA 04ATEX1241 X
II3G Ex nA II T4 per EN 60070-15: 2003
US and Canada
IP66 Series: UL Recognized E73889, Vol 1, Section 26 (conduit entry)
UL E73889, Vol. 3, Section 3 (cable gland entry)
Non Incendive, Class I Division 2 Groups A, B, C and D;
Dust Ignition-Proof, Class II, Division 2, Groups F and G;
Suitable for Class III, Division 2, T4 per UL 1604, UL 508,
and CSA 22.2 No. 213 1987; C-22.2 No. 14-M91
Ex nC IIC T4 per CSA E79-15
Class 1, Zone 2, AEx nC IIC T4 per ANSI/UL 60079-15
Europe
ATEX 4 IECEx
II 3 G Ex nA II T4 and II 3D T 135OC
per EN 60079-0: 2006, EN 60079-15: 2005, EN 61241-0: 2006, EN 61241-1: 2004,
IEC 60079-0: 2004, IEC 60079-15: 2005, IEC 61241-0: 2004, IEC 61241-1: 2004
US and Canada
IP66XP Series: UL Recognized E73889, Vol 1, Section 21.
UL E73889, Vol. 3, Section 3 (cable gland entry)
Explosion-Proof, Class I Division 1 Groups C and D;
Dust Ignition-Proof, Class I, Division 1, Groups E, F and G;
Suitable for Class III, Division 1, T4 per ANSI/UL 1203 and
CSA 22.2 No. 30
Class 1 Zone 1, ex d IIB per CSA E600 79-0, CSA E60079-1
Class 1 Zone 1, AEx d IIB per UL 60079-0, UL 60079-1
Europe
II 2 G Ex d IIB T6 and II 2 D T 85OC per EN 60079-0: 2006, EN 60079-1: 2007, EN 61241-0: 2006,
EN 61241-1: 2004
Environmental Compliance EMC Directive 2014/30/EU per EN 61326-1:2013
RoHS Directive2011/65/EU Optional)
Pressure Effects Compliance Pressure Equipment Directive 2014/68/EU
“Sound Engineering Practice”
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Product Specications
.742
.003
18.86
.08
3.060 77.72
.594
.003
15.10
.08
4X
THRU NEARSIDE ONLY
.213
.205
5.40
5.20
.594
.003
15.10
.08
.594
.003
15.10
.08
.594
.003
15.09
.08
.594
.003
15.09
.08
.750
19.05
.594
.003
15.09
.08
Notes
(1)
The nominal ow rate is the ow rate at which water at reference conditions causes approximately 1 bar of pressure drop or the laminar to turbulent transition ow
whichever is lower. Maximum ow rate is twice nominal ow rate or the laminar to turbulent transition ow whichever is lower.
(2)
Standard volumetric conditions are 14.696 psia and 70oF.
(3)
Actual volumetric ow is a function of the mass ow and the density measurements; therefore the accuracy of actual volumetric ow is a function of the mass ow
and density accuracy.
(4)
Accuracy includes combined repeatability, linearity, and hysteresis. Specications are based on reference test conditions of water/nitrogen at 68 to 77OF (20 to
25OC) and 15 to 30 psig (1 to 2 bar).
(5)
Dierential pressures are based on reference conditions of water and air at 68 to 77OF (20 to 25OC).
(6)
The density measurement at temperatures other than 21OC (70OF) has an additional error of approximately 0.0005 grams/cc per OC.
(7)
A temperature rise of up to 20OC (68OF) from internal heating can occur in an open environment where ambient temperature is 23OC (73OF). The device
temperature is aected by the ambient and process temperature as well as warming when the device is powered. The device should be maintained in the specied
temperature range at all times.
Product Dimensions - QmB IP40 - Downported
Figure 1 Dimensional Drawing QmB IP40 Downported
Quantim Patent Numbers as follows:
ArgentinaAR026329B1, .............................................. AR021594B1
Australia.....................................................778137, 771345, 782183
Canada ................................................................................2389433
China ............................................................ZL00817949.2, 171140
Federation of Russia ...........................2272257, 2263284, 2277227
Germany .........................................................................40004270.3
Hong Kong......................................................................HK1051720
India .......................................................................................199406
Indonesia ...................................................... 3660/2006, ID0015789
Japan ................................................................... 1111950, 3904926
Malaysia ......................................................................MY-128330-A
Mexico .......................................................242129, 244688, 231280
Singapore ........................................122105, 123306, 88632, 81430
South Korea...........................................................................678430
Switzerland ............................................................................127118
UK........................................................................................2092458
US......................D436876, 4843890, 4996871, 5231884, 5295084,
............5555190, 5687100, 5929344, 6226195, 6476522, 6487507,
............6505131, 6505135, 6512987, 6513392, 6526839, 6748813,
............................................. 6769301, 7032462, 7111519, 7117751
Counterparts in other countries and other patents pending
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Product Dimensions - QmBIP40 - Thru-Flow
Figure 2 Dimensional Drawing QmB IP40
Figure 3 D-Connector Electrical Pin Connections
Figure 4 Lay-In Dimensions Integral and Remote Valves
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Product Dimensions - QmB IP40 with Remote Valve & QmB IP66
Figure 5 Dimensional Drawing QmB IP40 with Remote Valve
Figure 6 Dimensional Drawing QmB IP66
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Product Dimensions - QmB IP66XP
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Figure 7 Dimensional Drawing QmB IP66XP
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Model Code
Nickel
Nickel
Buna
Code Description
I.
Base Model Code
QMBM
II. Tube Size
liqud gas liquid gas
2 190 grams/hr 1432 sccm 150 grams/hr 1051 sccm
3 1.00 kg/hr 5.595 slpm 780 grams/hr 2.96 slpm
4 13.5 kg/hr 53.12 slpm 7.97 kg/hr 24.79 slpm
III. Fluid Type
L liquid liquid to gas and vice-versa. Rezeroing is required.
IV. Pressure Transducer 1 no transducer
V. Valve Type A
B normally closed internal valve
C remote normally closed high pressure
VI. Accuracy
3 optional 0.5% of rate liquid & stainless steel
3 standard 0.5% of rate gas or Hastelloy
4 optional 1.0% of rate gas or Hastelloy
VII. Enclosure
A NEMA 1/ IP40
B NEMA 1/ IP40 Class 1 Div 2 Zone 2
C NEMA 4X/ IP66
D NEMA 4X/ IP66 Class 1 Div 2 Zone 2
E NEMA 4X/ IP66XP Div 1 Zone 1
VIII. Surface Finish 1
IX. Sensor Tube Material A stainless steel 316L
B Alloy C-22 (tubes only)
X.
Maximum Pressure Rating
2 100 bar or 1500 psi
3 300 bar or 4500 psi tube material - Alloy C-22 (meter)
XI. Maximum Temperature Rating A 65 Deg. C (149 Deg F)
XII. Process Connections
1B
1C
1D
1G
1J 1/8” NPT
1K 1/4” NPT
1L 1/8” VCR
1M 1/4” VCR
1P 1/4” VCO
1Y downport ANSI/ISA - 76.00.02
2A 3.2mm UPG
XIII. Electrical I/O - Communications
A 0-5 Vdc 4-20 mA
B 4-20 mA 4-20 mA
C 0-5 Vdc 0-5 Vdc
H HART/4-20mA HART/4-20mA
XIV. Electrical Connection
3 PG11 cable gland Enclosure NEMA 4X/ IP66
4 1/2” FNPT conduit Enclosure NEMA 4X/ IP66
6 M20 FNPT conduit Enclosure NEMA 4X/ IP66
8 3/4” FNPT conduit Enclosure NEMA 4X/ IP66XP
XV. Seals
G gas
2 standard 0.2% of rate liquid & stainless steel
1 35 bar or 500 psi
1A standard body connections 5/16” -24 UNF
Primary Output Secondary Output
1 15 pin D-type Enclosure NEMA 1/ IP40
Sensor Valve Stem Fitting
Code Option
QMBC
X
Y
A
B
C
D
E
F
G
Option Description
Type
0-5 Vdc
4-20 mA
Viton
Buna
Kalrez 4079
Kalrez 6375
EPDM
Nickel
N/A
N/A
Viton
Buna
Kalrez 4079
Kalrez 6375
Kalrez 4079
EPDM
Nickel
Stainless Steel
Kalrez 6375
Viton
Buna
EPDM
Viton
Stainless Steel
Stainless Steel
Stainless Steel
Stainless Steel
Stainless Steel
Stainless Steel
RoHS Compliant
No
No
No
No
Yes
Yes
(Model Code continued on next page)
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Model Code (Continued)
XV. Seals (continued) Sensor Valve Stem Fitting Orice Seal
H Nickel Nickel Kalrez Stainless Steel
J Nickel Nickel EPDM Stainless Steel
K Nickel Nickel Nickel Stainless Steel
XVI. Valve Seat Material 1 none (meter)
7 material 17-7PH Stainless Steel (controller)
XVII. Special Processing A none
B certied material 2.2 EN 10204
C certied material 3.1 EN 10204
D cleaning for oxygen service
E cleaning for oxygen service + certied material 2.2 EN 10204
F cleaning for oxygen service + certied material 3.1 EN 10204
XVIII. Quality Certications 1 none
2 calibration certicate traceble to NIST
3 calibration measurement capability certicate (NVLAP)
4 certicate of conformance
5 calibration certicate traceble to NIST + certicate of conformance
6 calibration measurement capability certicate + certicate of conformance
XIX. Inline Filter A none (metal seal or downport)
B inline lter cartridge lter, 10 micron (recommended for QMBC2)
C inline lter cartridge lter, 20 micron
D inline lter cartridge lter, 30 micron
E inline lter cartridge lter, 40 micron
F inline lter cartridge lter, 1 micron (recommended for QMBC2)
XX. OEM Code A Brooks
N no logo
Sample Model Code
I II III IV V VI VII VIII IX X XI XII XIII XIV XV XVI XVII XVIII XIX XX
QMBC 2 G 1 A 2 A 1 A 1 A 1A A 1 A 1 A 1 A A
Brooks Service and Support
Brooks is committed to assuring all of our customers receive the ideal ow solution for their application, along with outstanding service and support to back it up. We operate rst class repair facilities located around the world to provide rapid response and support.
Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is
certied by our local Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001
Quality Certication is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.
SEMINARS AND TRAINING
Brooks Instrument can provide seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
Due to Brooks Instrument’s commitment to continuous improvement of our products, all specications are subject to change without notice.
TRADEMARKS
Brooks, Quantim ..................................................Brooks Instrument, LLC
All other trademarks are the property of their respective owners.
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