Brooks Instrument GF81 User Manual

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Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Brooks® GF40/GF80/GF81 Series MultiFlo

Capable Digital Thermal Mass

Flow Devices

Brooks® GF40/GF80/GF81 Series available with RS485, DeviceNetTM, Profibus® or EtherCA T® I/O

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Dear Customer , We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user . It is designed with the ever changing process conditions, accuracy requirement s and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Of fice listed on the back cover of this manual or visit www .BrooksInstrument.com.

Y ours sincerely , Brooks Instrument

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

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Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Paragraph Page Number Number

Section 1 Introduction

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ................................................................................................................1-1

1-3 Product Support References ......................................................................................................... 1-2

1-4 Warning, Caution and Notice S tatements ...................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF40/GF80 Series Device.................................................................................... 1-2

1-7 Industry S tandard References .......................................................................................................1-2

1-8 GF40/GF80/GF81 Series Gas Table .............................................................................................. 1-3

1-9 Glossary of Terms and Acronyms.................................................................................................. 1-3

1-10 Description .................................................................................................................................... 1-5

1-1 1 Specifications for GF40/GF80/GF81 Series Devices .................................................................... 1-7

Section 2 Installation

2-1 General..........................................................................................................................................2-1

2-2 Receipt of Equipment .................................................................................................................... 2-1

2-3 Recommended Storage Practice ...................................................................................................2-2

2-4 Return Shipment ............................................................................................................................2-2

2-5 Transit Precautions........................................................................................................................ 2-2

2-6 Removal from Storage ...................................................................................................................2-2

2-7 Gas Connections...........................................................................................................................2-3

2-8 In-Line Filter .................................................................................................................................. 2-3

2-9 Mechanical Installation .................................................................................................................. 2-3

2-10 Flow Controller Inst allation Arrangement........................................................................................ 2-4

2-1 1 Purge the Gas Supply Line Before GF40/GF80/GF81 Series Installation...................................... 2-5

2-12 Position and Mount the GF40/GF80/GF81 Series.......................................................................... 2-6

2-13 Perform a Leak Test ......................................................................................................................2-8

2-14 Performance Checks..................................................................................................................... 2-8

2-15 Zeroing Setup Process ..................................................................................................................2-8

2-16 Zeroing the GF40/GF80/GF81 Series............................................................................................ 2-9

2-17 Auto Shut-Off................................................................................................................................. 2-9

2-18 Using the MultiFloTM Configurator.................................................................................................2-10

2-19 Electrical Connections.................................................................................................................. 2-12

2-19-1 DeviceNet Connections ................................................................................................................ 2-12

2-19-2 Analog/RS485 Connector............................................................................................................. 2-13

2-19-3 Profibus Connections ................................................................................................................... 2-14

2-19-4 EtherCAT Connections.................................................................................................................2-14

2-19-5 Alarm Output (Analog I/O Version Only) ....................................................................................... 2-15

Brooks® GF40/GF80/GF81 Devices

Contents

Section 3 Operation

3-1 General..........................................................................................................................................3-1

3-2 Theory of Operation for Flow Measurement................................................................................... 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview ........................................................................................................................................ 4-1

4-2 Maintenance .................................................................................................................................. 4-1

4-3 Troubleshooting ............................................................................................................................. 4-2

4-4 Troubleshooting Checklist .............................................................................................................. 4-3

4-5 GF40/GF80/GF81 Series Troubleshooting Guide .......................................................................... 4-4

Section 5 Product Description Code ......................................................................................................5-1

Contents

Brooks® GF40/GF80/GF81 Devices

Appendix A: GF40/GF80 Series Gas T able .............................................................................................A-1

Appendix B: GF40/GF80/GF81 Series Patents......................................................................................B-1

Appendix C: Essential Instructions ....................................................................................................... C-1

Warranty , Local Sales/Service Contact Information....................................................................... Back Cover

Figure Page Number Number

1-1 GF40/GF80/GF81 Series Digital Thermal Mass Flow Devices .......................................................1-1

1-2 Dimensions - GF40 Series ........................................................................................................... 1-11

1-3 Dimensions - GF80 Series ........................................................................................................... 1-12

1-4 Dimensions - GF81 Series, RS485/Analog & Profibus................................................................. 1-13

1-5 Dimensions - GF81 Series, DeviceNet ......................................................................................... 1-14

2-1 Typical Gas Supply Arrangement...................................................................................................2-4

2-2 GF80 Series Mounted to K1 Series Substrate Blocks.................................................................... 2-7

2-3 Mounting Screws T orque Pattern................................................................................................... 2-7

2-4 Zero Button Accessible at Top of Device ....................................................................................... 2-9

2-5 MultiFlo Cable Adapter..................................................................................................................2-10

2-6 RS-232/RS-485 Converter (P/N A33231) ..................................................................................... 2-11

2-7 Diagnostic Port ............................................................................................................................. 2-12

2-8 GF40/GF80/GF81 Series DeviceNet Connection and Pin-Outs.................................................... 2-12

2-9 GF40/GF80/GF81 Series with 15-Pin Analog Connector and Pin-Outs ........................................ 2-13

2-10 GF40/GF80/GF81 Series Profibus Connections and Pin-Outs.....................................................2-14

2-1 1 GF40/GF80/GF81 Series EtherCA T Connections and Pin-Outs................................................... 2-14

2-12 Alarm Output Schematic ...............................................................................................................2-15

3-1 GF40/GF80/GF81 Series Operating Principles.............................................................................. 3-2

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Table Page Number Number

1-1 Industry Standard References....................................................................................................... 1-3

1-2 Terms and Acronyms ..................................................................................................................... 1-4

1-3 S pecifications for Standard GF40/GF80 Series.............................................................................1-8

1-4 S pecifications for Standard GF81 Series ...................................................................................... 1-9

1-5 Electrical Specifications for GF40/GF80/GF81 Series ................................................................. 1-10

2-1 K1 Substrate Torque Dat a..............................................................................................................2-7

2-2 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ..................................................... 2-10

4-1 Environmental Factors................................................................................................................... 4-3

4-2 GF40/GF80/GF81 Series Troubleshooting Guide .......................................................................... 4-4

5-1 GF40/GF80 Series Product Description Code T able ..................................................................... 5-1

5-2 GF81 Series Product Description Code T able ............................................................................... 5-3

A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43..................................................A-1

A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43..........................................A-2

A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50..................................................A-3

A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50..........................................A-4

B-1 GF40/GF80/GF81 Series Patents ..................................................................................................B-1

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

1-1 Introduction

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Based upon Brooks award-winning GF100 Series, the GF40/GF80/GF81 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features:

• MultiFlo™ process gas and flow range programmability, enabling customers to re-configure the MFC for new gases and full scale flow rates for unparalleled process flexibility .

• A high-performance, corrosion-resist ant flow measurement sensor delivers improved reproducibility and stability .

• Elastomer (GF40) and metal seal (GF80/GF81) options enable customers to select the optimum and most cost effective mix of products for their application.

• Full range of industrial communication protocols (DeviceNet, Profibus DP-V1, and EtherCA T).

• An independent service/diagnostic port enables on-tool reconfiguration/ optimization, data logging, and troubleshooting without having to remove the MFC from the gas line.

1-2 How to Use This Manual

Figure 1-1 GF40/GF80 Series MultiFloTM Capable Digital Thermal Mass Flow Devices

This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. The manual is organized in the following sections:

Section 1 Introduction Section 2 Installation Section 3 Operation Section 4 Maintenance and Troubleshooting Section 5 Product Description Code Appendix A GF40/GF80 Series Gas Table Appendix B GF40/GF80/GF81 Series Patents Appendix C Essential Instructions Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting to operate or repair these devices.

1-1

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

1-3 Product Support References

Refer to www .BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF40/GF80/ GF81 Series. Those documents include:

• Brooks MultiFloTM Configurator Quick S tart Manual (X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG)

• Brooks GF40/GF80 Series data sheet (DS-TMF-GF40-GF80-MFC)

• Brooks GF81 Series data sheet (DS-TMF-GF81-MFC)

• DeviceNetTM Supplemental Manual for GF40/GF80/GF81 Series Mass Flow Controllers and Meters (X-DPT -DeviceNet-GF40-GF80-MFC-eng; part number 541B168AAG)

• Profibus® Supplemental Manual for Brooks® GF40/GF80/GF81 Series Mass Flow Controllers and Meters (X-DPT -Profibus-GF40-GF80-MFC-eng; part number 541B162AAG)

• RS485 Supplemental Manual for GF40/GF80/GF81 Series Mass Flow Controllers and Meters (X-DPT -RS485-GF40-GF80-MFC-eng; part number 541B169AAG)

• EtherCAT Supplemental Manual for Brooks® GF40/GF80 Series Mass Flow Controllers and Meters (X-DPT -EtherCA T-GF40-GF80-MFC-eng; part number 541B170AAG)

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

1-4 Warning, Caution and Notice St atement s

Warning, caution and notice statements are located throughout this manual in the ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury . A CAUTION statement indicates a potentially hazardous situation which, if not avoided, MA Y result in minor or moderate injury. It may also be used to alert against unsafe practices. A NOTICE statement describes specific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of this Manual and on the Brooks website at www.BrooksInstrument.com. This information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group.

1-6 How to Order a GF40/GF80 Series Device

Refer to Section 5.

1-2

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

1-7 Industry Standard References

Refer to Table 1-1.

1-8 GF40/GF80 Devices Gas T able

Refer to Appendix A.

1-9 Glossary of T erms and Acronyms

Refer to Table 1-2

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18 Guideline for temperature specifications of the MFC SEMI E27 Standard for MFC and MFM linearity SEMI E28 Guideline for pressure specifications for the MFC SEMI E52 Practice for referencing gases used in digital MFCs SEMI E54 Sensor actuator network connections for DeviceNet SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs SEMI E66 Test method for determining particle contribution by MFCs SEMI E67 Test method for determining reliabilty of MFCs SEMI E68 Test method for determining warm-up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for determining attitude sensitivity of MFCs SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates SEMI F36 Guide for dimensions and connections of gas distribution components SEMI F44 Guideline for standardization of machined stainless steel weld fittings SEMI F45 Guideline for standardization of machined stainless steel reducing fittings SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity SEMI S2 Environmental, Health and Safety Guidelines SEMI S9 Dielectric testing SEMI S10 Risk assessment SEMI S12 Decontamination of fielded products

1-3

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Table 1-2 Terms and Acronyms

Term or Acronym Definition CSR Customer S pecial Requirement. CVD Chemical V apor Deposition. DSP Digital Signal Processor. EPI Epitaxy (EPI). A process technology where a pure silicon

HBD Horizontal Base Down. HLD Horizontal Label Down. HLU Horizontal Label Up. HUD Horizont al Upside Down. GF40/GF80 Series MultiFlo capable digital device. GF81 Series High Flow Digital Device. F.S. Full Scale. LED Light Emitting Diode. MFC Mass Flow Controller . MultiFlo Configurator I/O communication software package that

MultiFlo Technology A physics-based calibration methodology that

PID Proportional Integral Derivative Controller. PSIA Pounds per Square Inch Absolute. PSID Pounds per Square Inch Differential. PSIG Pounds per Square Inch Gauge. ROR As pressure increases, flow increases at a

HC S tandard Configuration w/ Hastelloy® sensors

S.P. Setpoint. S tep Technology Enables fast set point control through a high

VID Vertical mounting attitude with inlet side facing

VIU Vertical mounting attitude with inlet side facing up.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

crystalline structure is deposited or “grown” on a bare wafer, enabling a high-purity st arting point for building the semiconductor device.

configures gas and flow ranges.

enables gas and flow range configuration within a defined standard configuration.

pressure rate of rise, or ROR.

(to reduce reaction to corrosive gases).

speed DSP.

down.

1-4

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

1-10 Description

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Control

The GF40/GF80/GF81 Series brings together Brooks high-performance, patented ultra-fast T -rise flow sensor, high-speed ARM based digita l architecture, and a fast-acting diaphragm-free solenoid valve to deliver:

• Fast reproducible transitions between setpoints without overshoot or ringing

• User-programmable ramp functions for processes requiring a slowramp in flow or time critical transitions

• Optional bubble tight shut down (elastomer valve seat)

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non-linear gases. This is achieved through advanced gas modeling and optimized through actual gas testing. Brooks MultiFloTM allows the device to be quickly and easily configured for another gas and/or flow range without sacrificing accuracy or rangability . Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, automatically compensates for gas density effects, and ensures smooth overshoot-free transitions between flow rates with excellent steady-state stability . Brooks MultiFlo technology offers unparalleled flexibility. An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations. Process benefits achieved include:

• Mass flow controller full scale full range can be rescaled down typically by a factor of 3:1 with no impact on accuracy , turndown or leak by specifications

• Optimum process and inventory flexibility resulting in dramatically reduced inventory costs

• Fewer configurations/bin sizes required to support many different processes

• Less down-time with rapid process recovery

MultiFloTM Support References: Brooks MultiFlow Configurator Quick Start Guide (X-SW -MultiFlo-Config-QS-eng (Part Number: 541B167AAG))

MultiFloTM Configurator Accessory Kit s: 778Z010ZZZ Basic MultiFlo Configurator Kit

*Software, MultiFlo Configurator A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485

1-5

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and Adapter Cables *Software, MultiFlo Configurator

A331710003 Cable Assembly 2.5 mm A332300001 Converter 232/485 A332295001 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet * MultiFlo Configurator Software is available on the Brooks Instrument

website at: www.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement Sensor

Brooks high-performance thermal flow sensor brings together key design elements to deliver the accurate, repeatable measurement under challenging process conditions:

• Improved accuracy at elevated temperatures through isothermal packaging and ambient temperature sensing and compensation

• Enhanced signal-to-noise performance enables improved low setpoint accuracy

• A large bore, corrosion resist ant, Hastelloy® C-22 sensor tube ensures long life and reliability

• Optimized temperature profile for gases prone to thermal decomposition

• Onboard electronics store sensor calibration data for ease of service

Extensive Mechanical Configurations

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

www .BrooksInstrument.com/MultiFlo

1-6

GF40 GF80

1/4'' VCR 9/16'' - 18 UNF 1-1/8'' C Seal 92 mm 1/8'' tube compression 1/4'' tube compression 3/8'' tube compression 1/2'' tube compression 6-mm tube compression 10-mm tube compression 1/4'' RC 1/4'' VCO 1/4'' NPT

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Enhanced Diagnostics and User Interface

The mass flow controller is typically the most complex and critical component in a gas delivery system, When dealing with toxic or reactive gases, removing the MFC to access its functionality should be the last resort. To address this, Brooks GF Series devices include self-diagnostics and an independent service port for in-situ device evaluation and troubleshooting:

• Embedded self-test routines at power-up

• Independent RS485 service port that can be accessed while the MFC is in operation for data logging and troubleshooting

• A convenient Zero button to enable easy re-zeroing during scheduled maintenance

Communication Interfaces

The GF40/GF80/GF81 Series supports 0-5 Vdc, 4-20 mA, DeviceNet, EtherCA T, and Profibus communication protocols. DeviceNet, Profibus, and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet, 128 devices for Profibus, 32 devices for RS485, and 65,535 devices for EtherCA T to be connected on the same network.

Brooks Instruments' DeviceNet profile has been certified by the ODVA (Open DeviceNet V endor's Association).

Brooks Instrument Profibus interface has been certified by the PNO (Profibus User Organization).

The Brooks Instrument EtherCAT interface has been successfully tested by the EtherCA T Conformance Test application version 1.20.30.0.

1-11 Product Description for GF81 Series Devices

The Brooks GF81 Series is a high flow version of the GF80 featuring a corrosion-resistant Hastelloy C-22 for durable, long term operation. Sub-1 second settling times and 1% of reading accuracy ensures that the GF81 will provide reliable flow measurement or control in demanding gas flow applications. The GF81 achieves excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes. With a wide range of digital and analog I/O options available, the GF81 represents an extremely powerful, yet easy , upgrade for existing MFCs or MFMs.

1-12 Specifications for GF40/GF80/GF81 Series Devices

Control

1-7

Section 1 Introduction

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80/GF81 Devices

See Tables 1-3 thru 1-5 for specifications for the GF40/GF80/GF81 Series. See Figures 1-2 thru 1-5 for dimensions for the GF40/GF80/GF81 Series.

Table 1-3 Specifications for Standard GF40/GF80 Series

GF40GF40

GF40

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow Flow

AccurAccur

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

LinearityLinearity

Linearity

LinearityLinearity

Response Response

Response

Response Response

ConCon

Con

ConCon

MultiFloMultiFlo

MultiFlo optional

MultiFloMultiFlo

Number of BinsNumber of Bins

Number of Bins 10 bins

Number of BinsNumber of Bins

PrPr

Auto ZAuto Z

Auto Z

Auto ZAuto Z

Auto shut-off:Auto shut-off:

Auto shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale

Auto shut-off:Auto shut-off:

RatingsRatings

Ratings

RatingsRatings

OperOper

Oper

OperOper

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

DifferDiffer

Differ

DifferDiffer Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure

Leak InLeak In

Leak In

Leak InLeak In

MecMec

Mec

MecMec

Primary Primary

Primary

Primary Primary

External SealsExternal Seals

External Seals Viton, Buna, Kalrez, EPDM or Neoprene Metal/Nickel

External SealsExternal Seals

InIn

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms*:Alarms*:

Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Alarms*:Alarms*:

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

ComplianceCompliance

Compliance

ComplianceCompliance

EnEn

acyacy

Accur

acy +1% S.P. 35-100%, +0.35% F.S. 2-35%

AccurAccur

acyacy

Time (Settling Time (Settling

Time (Settling

Time (Settling Time (Settling

trtr

ol Rangeol Range

ol Range 2-100%

trtr

ol Rangeol Range

alve Shut Downalve Shut Down

alve Shut Down < 1% of F.S.

alve Shut Downalve Shut Down

erer

o Stabilityo Stability

o Stability <

erer

o Stabilityo Stability

essuressur

e Coefficiene Coefficien

essur

e Coefficien

essuressur

e Coefficiene Coefficien

ttitude Sensitivityttitude Sensitivity

ttitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)

ttitude Sensitivityttitude Sensitivity

erer

o:o:

o: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to

erer

o:o:

ating ating

emperemper

ating

emper

ating ating

emperemper

ating Prating Pr

ating Pr

ating Prating Pr

enen

tial Prtial Pr

essuressur

tial Pr

essur

enen

tial Prtial Pr

essuressur

tegrity (External)tegrity (External)

tegrity (External) 1x10-9 atm. cc/sec He 1x10

tegrity (External)tegrity (External)

hanicalhanical

hanical

hanicalhanical

alve alve

ypeype

alve

ype Normally Closed, Normally Open, No Valve (Meter) Normally Closed, No Valve (Meter)

alve alve

ypeype

etted Materialsetted Materials

etted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS

etted Materialsetted Materials

ternal Seals/Vternal Seals/V

ternal Seals/V

ternal Seals/Vternal Seals/V

virvir

onmenonmen

vir

onmen

virvir

onmenonmen

alve Seatalve Seat

alve Seat Viton, Buna, Kalrez, EPDM or Neoprene PFA/Kalrez

alve Seatalve Seat

tal Compliance:tal Compliance:

tal Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

tal Compliance:tal Compliance:

Eq.) Eq.)

Eq.) 3 sccm to 50 slm

Eq.) Eq.)

oducibilityoducibility

oducibility < + 0.2% S.P.

oducibilityoducibility

Time)Time)

Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)

Time)Time)

t 0.03% per psi (0-50psi N2)

aturatur

e Rangee Range

atur

e Range 5-50OC (41-122OF)

aturatur

e Rangee Range

essuressur

essur

e 150 psig (10 bar)

essuressur

e Rangee Range

e Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid

e Rangee Range

ort:ort:

ort: RS485 via 2.5mm jack

ort:ort:

General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification

GF40GF40

+ 0.5% F.S. (included in accuracy)

Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)

+ 0.5% F.S. per year

zero. To accomplish, simply provide a zero set point.)

Safety EN61010-1

RoHS

GF80GF80

GF80

GF80GF80

-10

atm. cc/sec He

June, 2013

1-8

*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Table 1-4 Specifications for Standard GF81 Series

erformanceerformance

erformance

erformanceerformance

StandarStandar

d Cond Con

figurfigur

Standar

d Con

StandarStandar

d Cond Con

Flow Range (NFlow Range (N

Flow Range (N

Flow Range (NFlow Range (N

Flow Flow

AccurAccur

Flow

Accur

Flow Flow

AccurAccur

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

LinearityLinearity

Linearity

LinearityLinearity

Response Response

Response

Response Response

ConCon

trtr

ol Rangeol Range

Con

ol Range 5% - 100%

ConCon

trtr

ol Rangeol Range

alve Shut Downalve Shut Down

alve Shut Down <2% of Standard Configuration F.S. @ 30 N2 psig/atm out

alve Shut Downalve Shut Down

erer

o Stabilityo Stability

o Stability <±0.5% F.S. per year

erer

o Stabilityo Stability

PrPr

essuressur

e Coefficiene Coefficien

essur

e Coefficien

PrPr

essuressur

e Coefficiene Coefficien

ttitude Sensitivityttitude Sensitivity

ttitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)

ttitude Sensitivityttitude Sensitivity

Auto ZAuto Z

erer

o:o:

Auto Z

o: Optional: When Auto Zero is enabled the device performs the zero function once every time the set point returns to

Auto ZAuto Z

erer

o:o:

Auto Shut-off:Auto Shut-off:

Auto Shut-off: The Auto Shut-off feature closes the GF81 valve when the set point drops below 2% of full scale.

Auto Shut-off:Auto Shut-off:

vailable Gases:vailable Gases:

vailable Gases: N2, H2, Ar, He, O2, NH3 (consult factory for other gases)

vailable Gases:vailable Gases:

ation Full Scaleation Full Scale

figur

ation Full Scale

figurfigur

ation Full Scaleation Full Scale

equivlenequivlen

t)t)

equivlen

t) 51 - 300 slm

equivlenequivlen

t)t)

acyacy

acy 35-100% = 1% S.P., 2-35% = 0.35% F.S.

acyacy

oducibilityoducibility

oducibility 0.15% S.P.

oducibilityoducibility

Time (Settling Time (Settling

Time (Settling

Time (Settling Time (Settling

Time)Time)

Time) < 1 second

Time)Time)

t 0.03% per psi (0-50psi N2)

zero. To accomplish. simply provide a zero set point.

Brooks® GF40/GF80/GF81 Devices

GF81GF81

GF81

GF81GF81

+ 0.5% F.S. (included in accuracy)

RatingsRatings

Ratings

RatingsRatings

OperOper

ating ating

emperemper

aturatur

Oper

ating

OperOper

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

DifferDiffer

Differ

DifferDiffer

Leak InLeak In

Leak In

Leak InLeak In

MecMec

hanicalhanical

Mec

hanical

MecMec

hanicalhanical

alve alve

alve

alve alve

Primary Primary

Primary

Primary Primary

External SealsExternal Seals

External Seals 316 Stainless Steel

External SealsExternal Seals

InIn

ternal Seals/Vternal Seals/V

ternal Seals/V

InIn

ternal Seals/Vternal Seals/V

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms*:Alarms*:

Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Alarms*:Alarms*:

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

ComplianceCompliance

Compliance

ComplianceCompliance

EnEn

* Note: Application specific lower supply pressure and/or lower differential pressure operation available through Brooks Customer Special Request (CSR) process.

emper

ating ating

emperemper

enen

tial Prtial Pr

tial Pr

enen

tial Prtial Pr

tegrity (External)tegrity (External)

tegrity (External) Metal Seal 1 x 10

tegrity (External)tegrity (External)

ypeype

ype Normally Closed, Meter

ypeype

etted Materialsetted Materials

etted Materials 316 Stainless Steel, Hastelloy C-22, KM45

etted Materialsetted Materials

virvir

onmenonmen

vir

tal Compliance:tal Compliance:

onmen

tal Compliance: CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

virvir

onmenonmen

tal Compliance:tal Compliance:

e Rangee Range

atur

e Range 5-50OC (41-122OF)

aturatur

e Rangee Range

ating Prating Pr

essuressur

ating Pr

ating Prating Pr

essuressur

e Range*e Range*

essur

e Range* 30 - 90 psid

essuressur

e Range*e Range*

alve Seatalve Seat

alve Seat 316 Stainless Steel

alve Seatalve Seat

e*e*

essur

e* Controller: 75 psig (5 bar) / Meter: 150 psig (10 bar)

essuressur

e*e*

-10

atm cc/sec He

ort:ort:

ort: RS485 via 2.5mm jack

ort:ort:

Safety EN61010-1

RoHS

*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.

1-9

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Table 1-5 GF40/GF80/GF81 Electrical Specifications

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Communication PrCommunication Pr

Communication Pr

Communication PrCommunication Pr

Electrical ConnectionElectrical Connection

Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with

Electrical ConnectionElectrical Connection

Analog I/OAnalog I/O

Analog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V 0-5 V

Analog I/OAnalog I/O

GF40/GF80 PGF40/GF80 P

GF40/GF80 P

GF40/GF80 PGF40/GF80 P

GF81 PGF81 P

ower Max./Purower Max./Pur

GF81 P

ower Max./Pur

GF81 PGF81 P

ower Max./Purower Max./Pur

oltage Set Poltage Set P

oltage Set P

oltage Set Poltage Set P

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-11 Vdc 0-5.5 Vdc N/A N/A

Full RangeFull Range

Absolute Max.Absolute Max.

Absolute Max. 25 V (without damage) N/A N/A

Absolute Max.Absolute Max.

Input ImpedenceInput Impedence

Input Impedence 192 kOhms N/A N/A

Input ImpedenceInput Impedence

RequirRequir

ed Max. Sink Curred Max. Sink Curr

Requir

ed Max. Sink Curr

RequirRequir

ed Max. Sink Curred Max. Sink Curr

CurrCurr

enen

t Set Pt Set P

Curr

t Set P

CurrCurr

enen

t Set Pt Set P

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-22 mA N/A N/A

Full RangeFull Range

Absolute Max.Absolute Max.

Absolute Max. 25 mA (without damage) N/A N/A

Absolute Max.Absolute Max.

Input ImpedenceInput Impedence

Input Impedence 250 Ohms 125 Ohms N/A N/A

Input ImpedenceInput Impedence

Flow Output (VFlow Output (V

Flow Output (V

Flow Output (VFlow Output (V

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc

Nominal RangeNominal Range

Full RangeFull Range

Full Range (-0.5)-11 Vdc 0-5.5 Vdc (-0.5)-5.5 Vdc

Full RangeFull Range

Min Load ResistanceMin Load Resistance

Min Load Resistance 1 kOhms 1 kOhms 0.5 kOhms

Min Load ResistanceMin Load Resistance

Flow Output (CurrFlow Output (Curr

Flow Output (Curr

Flow Output (CurrFlow Output (Curr

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Full RangeFull Range

Max. LoadMax. Load

Max. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A

Max. LoadMax. Load

Analog I/O Analog I/O

Analog I/O

Analog I/O Analog I/O

Analog I/O

Analog I/O Analog I/O

Alarm Ouput*Alarm Ouput*

Alarm Ouput*

Alarm Ouput*Alarm Ouput*

ypeype

ype Open Collector N/A N/A

ypeype

Max. Closed (On) CurrMax. Closed (On) Curr

Max. Closed (On) Curr

Max. Closed (On) CurrMax. Closed (On) Curr

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μAN/AN/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Max. Open (Off)

Max. Open (Off)

Max. Open (Off) Max. Open (Off)

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A N/A

Floating/UnconnectedFloating/Unconnected

OR < 1.40 OR < 1.40

OR < 1.40

OR < 1.40 OR < 1.40

1.70 1.70

dc < dc <

1.70

dc <

1.70 1.70

dc < dc <

OR > 3.20 OR > 3.20

OR > 3.20

OR > 3.20 OR > 3.20

Input ImpedenceInput Impedence

Input Impedence 800 kOhms N/A N/A

Input ImpedenceInput Impedence

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input

Absolute Max. InputAbsolute Max. Input

otocolotocol

otocol

otocolotocol

ower Max./Purower Max./Pur

ower Max./Pur

ower Max./Purower Max./Pur

oinoin

t Input Specificationt Input Specification

oin

t Input Specification

oinoin

t Input Specificationt Input Specification

oinoin

oin

oinoin

oltage) Specificationsoltage) Specifications

oltage) Specifications

oltage) Specificationsoltage) Specifications

enen

t) Specificationst) Specifications

t) Specifications

enen

t) Specificationst) Specifications

alve Override Signal Specifications**alve Override Signal Specifications**

alve Override Signal Specifications**

alve Override Signal Specifications**alve Override Signal Specifications**

dcdc

dc Valve Closed N/A N/A

dcdc

OR < 2.90 OR < 2.90

OR < 2.90

OR < 2.90 OR < 2.90

dcdc

dc Valve Open N/A N/A

dcdc

gege

ge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to

gege

ge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to N/A

gege

enen

t 0.002 mA N/A N/A

enen

t 25 mA N/A N/A

enen

oltageoltage

oltage 30 Vdc N/A N/A

oltageoltage

dcdc

dc Valve Normal N/A N/A

dcdc

(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

+24 Vdc: 3.3 Watt/10.2 Watt +27 Vdc: 3.3 Watt/10.2 Watt +25 Vdc: 3.3 Watt/10.2 Watt

RS485RS485

RS485

RS485RS485

(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/

0-20 mA, 4-20 mA 4-20 mA

+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt

PrPr

ofibusofibus

ofibus

PrPr

ofibusofibus

Sub-D (B) 2 x RJ45

DeviceNetDeviceNet

DeviceNet

DeviceNetDeviceNet

EtherCAEtherCA

EtherCA

EtherCAEtherCA

*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of

various alarm conditions.

** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the

1-10

measured reading as shown in this section.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Figure 1-2 Dimensions - GF40 Series

1-11

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

1-12

Figure 1-3 Dimensions - GF80 Series

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Model GF81 RS485/Analog

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Model GF81 Profibus

3.67

93.1

5.71

145.1

5.84

148.3

.50

12.7

3.43

87.1

5.28

134.2

1.17

29.7

1.48

37.6

.50

12.7

1.13

28.6

.58

14.8

1.13

28.7

Figure 1-4 Dimensions - GF81 Series, RS485/Analog & Profibus

1.13

28.7

.58

14.8

1-13

Section 1 Introduction

Brooks® GF40/GF80/GF81 Devices

Model GF81 DeviceNet

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Figure 1-5 Dimensions - GF81 Series, DeviceNet

1-14

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-1 General

2-2 Receipt of Equipment

Americas: Asia, Japan:

Brooks Instrument Brooks Instrument

407 W. Vine Street 1-4-4 Kitsuna, Koto-ku P.O. Box 903 Tokyo 136-0073 Hatfield, PA 19440 USA Japan Toll Free (888) 554 FLOW (3569) Tel 81 (3) 5633-7104 Tel (215) 362 3700 Fax (215) 362 3745 Brooks Instrument Korea, Ltd. E-mail: BrooksAm@BrooksInstrument.com D-406 Bundang Techno Park 151 www.BrooksInstrument.com Sungnam, Kyungki-do, 463-070

Europe, Middle East, Africa: Tel +82 31 708 2522

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

This section provides installation instructions for the Brooks GF40/GF80/ GF81 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.

When the instrument is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding their liability . A report should be submitted to your nearest Product Service Department.

Korea

Brooks Instrument B.V.

Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD 6710 BX Ede RM 203, Bldg 6 Netherlands NO 1888 Xin Jin Qiao Rd Tel +31 (0) 318 549292 or Jinqiao E.P.Z. Pudong +31 (0) 318 549291 Shanghai 201206 E-mail: service.coordinator@Brooks Instrument.com China

Tel 86-21-3895-4788

Brooks Instrument GmbH

Zur Wetterwarte 50 Haus 377/B, 01109 Dresden Germany Tel +49 (0) 351 215 20 442 E-mail: service.coordinatorDD@Brooks Instrument.com

In case you need technical assistance:

USA 888 275 8946 Korea +82 31 708 2521 Netherlands +31 (0) 318 549290 Taiwan +886 3 5590 988 Germany +49 351 215 2040 China +86 21 5079 8828 Japan +81 3 5633 7100 Singapore +6297 9741

2-1

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

Remove the envelope containing the packing list. Outside of your clean area, carefully remove the equipment from the packing case. Make sure spare parts are not discarded with the packing material. Inspect the contents for damaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

2-5 Transit Precautions

Prior to returning any device to the factory , visit the Brooks web site (www.BrooksInstrument.com) for a Return Materials Authorization Number (RMA#), or contact one of the locations provided on p. 2-1.

Prior to returning the device, it must be purged in accordance with the following:

All flow devices returned to Brooks require completion of Form RPR003-2, Brooks Instrument Decontamination Statement, along with a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing by Brooks personnel. Copies of these forms can be downloaded from the Brooks website (www.BrooksInstrument.com) or are available from any of the Brooks Instrument locations provided on p. 2-1.

T o safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory , if circumstances permit.

2-6 Removal from Storage

2-2

Upon removal of the device from storage, a visual inspection should be conducted to verify its "as-received" condition. If the device has been subject to storage conditions in excess of those recommended (refer to "2-3 Recommended Storage Practice" on p. 2-1), it should be subjected to

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-7 Gas Connections

2-8 In-Line Filter

2-9 Mechanical Installation

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

a pneumatic pressure test in accordance with applicable vessel codes. To maintain a device's clean integrity , this service should be performed by the factory or one of the certified service centers.

Prior to installation, ensure that all piping is clean and free from obstructions. Install piping in such a manner that permits easy access to the device if removal becomes necessary .

It is recommended that an in-line filter be installed upstream from the device to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned.

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free from shock and vibration.

• Leave sufficient room for access to the user interface and MAC ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and removal if the device requires servicing.

The GF40/GF80 Series also utilizes MultiFlo® technology that allows the user to configure standard configurations ("SAs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo® technology enables the user to reduce unique inventory requirements.

2-3

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangement s are shown in Figure 2-1. GF40s/GF80s/ GF81s are often arranged inside a gas panel. Configure standard configurations ("SAs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo technology enables the user to reduce unique inventory requirements.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

1. Gas Source

2. Regulated Gas Supply

3. Point of Use (POU) Regulator 4

. Filter

5. Upstream Shut-Off Valve

Figure 2-1 Typical Gas Supply Arrangement

6. GF40 or GF80

7. Downstream Shut-Off Valve

8. Tool

9. Vacuum Pump

975

2-4

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-11 Purge the Gas Supply Line Before GF40/GF80/GF81 Series Inst allation

Brooks® GF40/GF80/GF81 Devices

Section 2 Installation

Before operating the GF40/GF80/GF81 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. The purge gas must be free of moisture and oxygen to less than 100 ppb. Purge the gas lines as follows or in accordance with prescribed company and safety procedures.

1. Shut off the process gas supply valve(s) upstream of the GF40/GF80/ GF81 Series. If such a valve is not available, shut the valve on the gas panel. T ag the valve at this point to prevent accident al re-exposure of the process gas to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas. Cycle purging consists of evacuating to a low pressure adequate to induce out-gassing and then purging to remove adhered moisture and oxygen. If a toxic or reactive gas is present and a clogged GF40/GF80/GF81 Series is suspected, then proceed with caution. Pump down and purge the GF40/GF80/GF81 Series from both downstream and upstream lines. If check valves are present in the gas line, both pumping down and purging are required. Pumping down without purging is inadequate. If a good vacuum source is not available, the GF40/GF80/GF81 Series can be de-contaminated by purge only .

3. Repeat the purge cycle several times within 2-4 hours to complete the cleaning. For toxic and corrosive gasses, it is recommended to use 100120 cycles.

2-5

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

2-12 Position and Mount the GF40/GF80/GF81 Series

It is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information).

If your GF80 Series is configured with downported fittings, follow Step s 1 through 4 below. If your GF40/GF80/GF81 Series has in-line fittings (UNF, RC, VCR, VCO, NPT , or tube compression), proceed to Step 5.

1. Refer to Figure 2-2. If downported fittings (1) are used, the GF80 Series is mounted to K1 Series substrate blocks (2) with four screws (3). Metal C-seals (4) (as provided by integrator) are inserted between the GF80 Series and substrate blocks before the screws are installed. These metal seals must be replaced after each installation.

2. Select the mounting screws for downported devices. M4 screws are used on 1.125" devices, K1S.

3. Refer to Figure 2-2. Insert the two mounting seals (4) over the gas flow path of the K1 block. Carefully align the GF80 Series mounting holes onto the K1 substrate blocks. Using your fingers, install the screws through the GF80 Series fitting and hand tighten.

4. Using a torque wrench and a metric hex key, tighten the screws to the torque value as described in Table 2-1 and the Torque Pattern in Figure 2-3.

5. If your GF40/GF80/GF81 Series is configured with in-line fittings, secure the GF40/GF80/GF81 Series block to the gas panel with two, 832-UNC-2B" screws. Then connect the inlet/ outlet fittings to the gas supply line using two wrenches. T ighten the fittings to manufacturer recommendations.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

2-6

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

3 1

4 2

Figure 2-2 GF80 Series Mounted to K1 Series Substrate Blocks

Table 2-1 K1 Substrate Torque Data

Connection

GF80 to

Subtstrate

T orque Pattern

Use a square pattern as

shown in Figure 2-3.

Start at 25 inch-pounds and

increase in increments of

10 inch-pounds until proper

value is obtained.

Torque (Inch-Pounds)

K1S K1R2 K1H

45 45 45

Figure 2-3 Mounting Screws Torque Pattern

2-7

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

2-13 Perform a Leak T est

It is critical to leak test the gas supply lines and GF40/GF80/GF81 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method. Follow leak test specifications as defined by integrator.

2-14 Performance Checks

This section describes how to zero and sequence the GF40/GF80/GF81 Series devices for proper operation.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

2-15 Zeroing Setup Process

• The GF40/GF80/GF81 Series must be warmed up for at least 45 minutes.

• The active gas page must be correct.

The following steps are required before the GF40/GF80/GF81 Series is zeroed.

1. Place the GF40/GF80/GF81 under normal inlet operating pressure.

2. Make sure that the GF40/GF80/GF81 Series has been installed inside the equipment (panel) for at least four hours and powered up at least one hour prior to zeroing. This insures that the GF40/GF80/GF81 Series is in its "use attitude" and is operating at normal temperature. If the GF40/GF80/GF81 Series is subjected to a vacuum purge for more than one minute, turn off the GF40/GF80/GF81 Series (i.e., provide a zero setpoint) for a time period of twice the vacuum purge time.

3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the downstream shut-off valve (7). This eliminates a pressure drop across the GF40/GF80/GF81 Series and subsequent leakage from the PID control valve inside the GF40/GF80/GF81 Series.

4. Provide a 100% setpoint to the GF40/GF80/GF81 Series for no longer than 30 seconds. This equalizes the pressure across the PID control valve.

5. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any pressure effects from the regulator (3).

2-8

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-16 Zeroing the GF40/GF80 Series

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

6. Close the GF40/GF80/GF81 Series and wait two minutes.

7. Read the output signal of the GF40/GF80/GF81 Series in percent of full scale. This output signal is the initial flow . The output signal should be 0.0 (± 0.1%). If the output signal is too high, re-zero the GF40/GF80/GF81 Series as described in Section 2-16.

1. Allow time for gas pressure to equalize across the MFC's internal control valve to ensure gas movement.

2. Press and hold down the Zero button, shown in Figure 2-4, for a minimum of 5 seconds.

2-17 Auto Shut-Off

Zero button

Figure 2-4 Zero Button Accessible at Top of Device

The Auto Shut-of f feature closes the GF0xx valve when the set point drops below 1.5% of full scale. When the Auto Shut-off feature is NOT chosen, then the GF0xx valve will shut off when the set point drops below 0.5% of full scale.

2-9

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

2-18 Using the MultiFloTM Configurator

The MutliFlo Configurator application is used to configure the gas and range of the GF40/GF80 Series devices.

The MultiFlo Configurator application allows communication to GF40/GF80 Series devices through personal computer with serial COM Port and a Windows XP or Windows 7 operating system. It’s primary function is to configure gas and flow ranges within defined standard configurations. Flow ranges are configured to the Nitrogen equivalent.

Using the MultiFlo Configurator software, configure the gas and flow rate according to T able 2-2.

Table 2-2 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Figure 2-5 MultiFlo Cable Adaptor

2-10

The MultiFlo Configurator interfaces to the GF40/GF80 Series device through RS485. There are various ways to connect the device regardless of device configuration. Devices may be connected through the diagnostic port using cables in one of the two Basic MultiFlo Configurator Kits.

778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

778Z011ZZZ Basic MultiFlo Configurator Kit

w/Power Supply and Adapter Cables A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485

Connect the MultiFlo cable adapter 2.5-mm jack to the diagnostic port on the top of the device. See Figure 2-7.

Connect the RS485 end of the converter to the 15-pin RS485 end of the MultiFlo Cable Adapter .

Connect the RS-232 end of the converter to the Serial Port of a laptop or PC. The latest MutliFlo Configurator Software and Databases and MultiFlo

Configurator Quick Start Guide are available on the Brooks Instrument website at: MultiFlo Configurator Quick Start Guide for inst allation and operation details. Download the MultiFlo Configurator software into your computer from the Brooks Instrument website www.BrooksInstrument.com/MultiFlo. Install the MultiFlo Configurator as described in the MultiFlo Configurator Quick S tart Guide and use the guide as a reference for operation details.

www .BrooksInstrument.com/MultiFlo. Please reference the

Figure 2-6 RS232/RS485 Converter (P/N 332300001)

2-11

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

Diagnostic Port

Figure 2-7 Diagnostic Port

2-19 Electrical Connections

2-19-1 DeviceNet Connections

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave. Obtain a DeviceNet communication cable (Micro M-12) and fasten it to the 5-pin connector as shown in Figure 2-8.

DeviceNet 5-Pin (M-12)

Connector (M)

2-12

Figure 2-8 GF40/GF80/GF81 Series DeviceNet Connection and Pinouts

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-19-2 Analog/RS485 Connections

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

The GF40/GF80/GF81 Series devices are available with the Analog/RS485 15-Pin D-Connector shown in Figure 2-9.

It is recommended that when using -15 Vdc & 0, the wiring hook-up should be: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected to Pin 5 (POWER SUPPLY(+12 to +24 VDC)).

Analog/RS485

15-Pin Connector

Figure 2-9 GF40/GF80/GF81 Series with 15-Pin Analog Connector and Pinouts

2-13

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

2-19-3 Profibus Connections

The GF40/GF80/GF81 Series devices are available with the Profibus connections as shown in Figure 2-10.

Profibus Connectors

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Figure 2-10 GF40/GF80/GF81 Series Profibus Connections and Pinouts

2-19-4 EtherCA T Connections

The GF40/GF80 Series devices are available with the EtherCA T connections as shown in Figure 2-1 1.

EtherCA T Connectors

Figure 2-1 1 GF40/GF80 Series EtherCA T Connections and Pinouts

2-14

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

2-19-5 Alarm Output (Analog I/O versions only)

The Alarm Output is an open collector or "contact" type that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicaqte any one of various conditions.

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

Figure 2-12 Alarm Output Schematic

2-15

Section 2 Installation

Brooks® GF40/GF80/GF81 Devices

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2-16

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

3-1 General

Section 3 Operation

Brooks® GF40/GF80/GF81 Devices

After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge. A bypass is help ful in bringing the flow on smoothly . Avoid starting a pump to supply the device without the use of a valve upstream of the device.

3-2 Theory of Operation for Flow Measurement

The thermal mass flow measurement system consists of two components: the restrictor or bypass and the flow sensor. Figure 3-1 is a diagram of the flow stream through the device, with an enlarged view of the flow sensor. Gas flow entering the device is separated into two paths; one straight through the restrictor and the other through the flow sensor.

The separation of the flow streams is caused by the restrictor . During flow conditions, there will be a pressure differential across the restrictor that forces gas to flow in the sensor.

The pressure difference caused by the restrictor varies linearly with total flow rate. The sensor has the same linear pressure difference versus flow relationship. The ratio of sensor flow to the flow through the restrictor remains constant over the range of the device. The full scale flow rate of the device is established by selecting a restrictor with the correct pressure differential for the desired flow .

The flow sensor is a very narrow , thin-walled Hastelloy tube. This tube has upstream and downstream temperature sensing and heating elements. During no-flow conditions, the amount of heat reaching each temperature sensor is equal, so temperatures T1 and T2 (Figure 3-1) are equal. Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor. The temperature dif ference, T2 – T1, is directly proportional to the gas mass flow .

3-1

Section 3 Operation

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Figure 3-1 GF40/GF80/GF81 Series Operating Principles

3-2

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

4-1 Overview

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

No routine maintenance is required on the Brooks GF40/GF80/GF81 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. If reactive gases are being used, it is recommended that you send the device to a Brooks Service Center for cleaning and recalibration. Please follow the instructions for removal, product packaging and product return instructions found in Section 2Installation—Return Shipment. All active process instrumentation and equipment is subject to aging and wear from their environment. This includes temperature, mechanical stress, component tolerance shift, contaminant buildup, oxidation, and other influences. The effects are gradual, but over time the changes can affect the accuracy of even the best equipment. Therefore, it is recommended to re-zero the device at 6 month intervals. Refer to Section 2-14 Performance Checks for re-zeroing instructions.

4-2 Maintenance

4-1

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

4-3 Troubleshooting

This section includes a Troubleshooting Checklist and a GF40/GF80/GF81 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions.

4-2

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

4-4 T roubleshooting Checklist

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

1. Check environmental factors that could affect changes to GF40/GF80/ GF81 Series performance. The most common environmental factors are listed in Table 4-1.

2. Check supply voltage and check for a consistent ground.

3. Insure OEM tool setpoint matches the setpoint at the GF40/GF80/GF81 Series. Observe for consistency.

4. V erify isolations valves are open and the gas supply is turned on. Then verify operating pressures are within operating ranges.

5. Check GF40/GF80/GF81 Series voltage response by moving the setpoint back and forth.

Observe for voltage changes.

Table 4-1 Environmental Factors

GF40/GF80/GF81 Series Performance Possible Causes

Inaccurate flow. Temperature shift (steady state or transient).

Inlet pressure shift (steady state or transient). Power supply problem. Electrical interference Dirty gas chamber Changes in gas.

Control problems. Can Differential pressure not within operating range not reach setpoint. Inlet pressure not stable Oscillation.

Zeroing problems, Indicated Temperature shift (steady state or transient). zero is not stable. Inlet pressure shift (steady state or transient).

Power supply problem. Electrical interference

4-3

Section 4 Maintenance & T roubleshooting

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80/GF81 Devices

4-5 GF40/GF80/GF81 Series Troubleshooting Guide

T able 4-2 GF40/GF80/GF81 Series Troubleshooting Guide

Symptoms & Possible Causes Corrective Action

1. No gas flow.

Is the gas supply turned on? Check shut-off valve and pressure readout. Open

the gas supply.

Is the regulator turned on at the Turn off the regulator and reset it to the correct operating pressure? recommended pressure as described in the

Data Sheet.

Are any upstream or downstream Verify that the valves are open and operating shut-off valves closed, either by properly. the system or because of failure?

June, 2013

Is the MOD LED light on the GF40/GF80/GF81 Observe the LED display panel on top of the GF40/GF80/ Series lit solid green? GF81device to verify. If the LED light is not lit, cycle power

to reboot the device.

Is the commanded setpoint from Use the tool software to verify . tool/system at 0.00 Vdc?

Has the valve been commanded Use the tool software to verify. off by an active “valve closed” input? Confirm that pin 12 is not connected to DC common.

2. Flow out of range.

Is the gas inlet/outlet pressure differential Verify that the pressure is correct for the gas either too high or too low? and range. If required, adjust inlet/outlet pressure

to achieve proper pressure reading. NOTE: If the differential pressure is too high, voltage to the valve will be zero, which is abnormally low for the setpoint. If the differential is too low , voltage to the valve will be at its maximum value, which is abnormally high for the set-point.

Is the MOD LED light on the GF40/GF80/Gf81 Observe the LED at the top of the GF40/GF80/GF81 device. Series lit solid green? If the LED light is not lit, cycle power the device to

reboot.

4-4

Is the setpoint correct for the Use the tool software to verify the analog signal. required gas flow?

Is the device calibrated for the Check the device side label. Run a particular gas? flow check to verify .

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

T able 4-2 GF40/GF80/GF81 Series T roubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

2. Flow out of range (Continuted).

Is the device zero correct? Zero the device according to zeroing

procedure in Section 2-16. Verify leak check rates are OK.

3. No gas control; flow is at or above maximum.

Is the gas pressure across the device Verify that the pressure is correct for the gas and too high? range. If required, adjust inlet/outlet pressure to

achieve proper pressure reading.

Are system valves open, or is the Use tool software to verify. purge input activated? Confirm that pin 12 is not connected to an active voltage

source.

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

Is the setpoint correct for the Use tool software to verify. required flow?

4. No gas flow above some setpoint.

NOTE: When the setpoint is increased beyond this point, the GF40/GF80/GF81 Series signal remains at some value lower than the set-point.

Is the gas inlet/outlet differential Verify that the pressure is correct for pressure sufficient? the gas and range. If required, adjust

regulator to achieve proper pressure. NOTE: If the pressure is too low, the valve voltage to the GF40/GF80/GF81 Series will be at its maximum output. This condition will cause internal GF valve heating and inability to properly reach desired flow setpoints.

Is the GF40/GF80/GF81 Series calibrated for the Check GF40/GF80/GF81 Series side label. Run a flow check gas flow? to verify. If flow is incorrect, replace the GF40/GF80/GF81

Series with a unit that is calibrated properly .

4-5

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

T able 4-2 GF40/GF80/GF81 Series T roubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

5. No gas flow below some setpoint.

NOTE: When the setpoint is decreased below this point, the

GF40/GF80/GF81 Series signal remains at

some value higher than the setpoint.

Is the gas inlet/outlet differential Verify that the pressure is correct for pressure too high? regulator to achieve proper pressure.

Is the GF40/GF80/GF81 Series leaking? Check for contamination. Test the GF40/GF80/GF81 Series

for leak integrity . Replace the GF40/GF80/GF81 Series

if leakage is detected.

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

6. Gas flow oscillates.

Is the GF40/GF80/GF81 Series calibrated for the Check the GF40/GF80/GF81 Series side can label. Run gas flowing? a flow check to verify. If flow is incorrect,

replace the GF40/GF80/GF81 Series. Is there too much gas pressure Verify that the pressure is correct for

across the GF40/GF80/GF81 Series? this gas and range. If required, adjust

regulator to achieve proper pressure

reading. Are inlet and outlet pressures stable? If outlet pressure is unstable, check for

(no oscillation or hunting) a faulty vacuum pump,

or hunting at a downstream valve.

Check inlet pressure on tool. A faulty

pressure regulator can make the

GF40/GF80/GF81 Series appear to oscillate.

Adjust inlet pressure up or down by 2

psig increments until hunting disappears.

Verify common gas pressure is

within range.

NOTE: Hunting or oscillation can be

contributed to multiple GF40/GF80/GF81 Series sharing

a common gas manifold. Therefore,

inspect gas delivery sources to

the gas box (for example; two tools

sharing a common gas bottle and

calling for gas at the same time). Valve leak.

Unregulated gas pressure from Facilities.

4-6

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

T able 4-2 GF40/GF80/GF81 Series T roubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

7. OEM tool does not read correct

GF40/GF80/GF81 Series zero reading.

Is the differential pressure across the GF40/GF80/GF81 Series valve leakage.

GF40/GF80/GF81 Series really zero? Incorrect MFC zero.

Is the supply voltage within specified range? Is the GF40/GF80/GF81 Series mounted in the proper attitude? Is the flow output signal of the

GF40/GF80/GF81 Series really zero?

8. Zero Drift.

Improper zero of the GF40/GF80/GF81 Series? GF40/GF80/GF81 Series aging or sensor stabilization. Excessive Valve leakage? Zero is not correct.

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

9. Calibration Drift.

Gas box temperature too high? Zero is not correct. Is it linear offset?

10. GF40/GF80 Series indicates Overshoot.

If the tool is idle for an extended period of time, Purge the line before operating. high inlet pressure or contamination will cause overshoot on first use.

11.OEM tool indicates the wrong full scale value for GF40/GF80 Series.

Older version of Multiflo Configurator used Update Multiflo Configurator . Refer to Section 2-17. to program GF40/GF80 Series.

12. GF40/GF80/GF81 Series dumps large volume of gas into chamber when setpoint is commanded from the tool.

The tool is commanding a setpoint before the Change the tool sequence. pneumatic valves are opened.

GF40/GF80/GF81 Series and pneumatic timing may

be offset. GF40/GF80/GF81 Series overshoots.

13. T ool display output doesn’t match

GF40/GF80/GF81 Series flow output.

Cable resistance or read-out impedance causing Check cables and read out. Eliminate any ground loops. offset in the tool’s display.

4-7

Section 4 Maintenance & T roubleshooting

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

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5 Product Description Code

T able 5-1 GF40/GF80 Series Product Description Code T able

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II . Configurability

II.II.

III.III.

III. Special Application

III.III.

IVIV

. Valve Configuration

IVIV

. MultiFlo Bin & Range or

Gas & Range (Standard)

VI.VI.

VI. Fitting

VI.VI.

VII.VII.

VII. Downstream Condition

VII.VII.

VIII.VIII.

VIII. External Seals, Valve Seat

VIII.VIII.

Code OptionCode Option

Code Option

Code OptionCode Option

GF040GF040

GF040 Elastomer / Range Flow (0-50 slpm)

GF040GF040 GF080GF080

GF080 Metal / Range Flow (0-50 slpm)

GF080GF080

XXXX

XX Standard

XXXX

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, example: “0004” = Argon and “010L” = 10 slpm

XXXX XXXXXXXX XXXX

SA40 010CSA40 010C

SA40 010C Standard Configuration #40, 3-10 sccm N2 Eq. @ 0 deg C Ref Temp.

SA40 010CSA40 010C SA41 030CSA41 030C

SA41 030C Standard Configuration #41, 11-30 sccm N2 Eq. @ 0 deg C Ref Temp.

SA41 030CSA41 030C SA42 092CSA42 092C

SA42 092C Standard Configuration #42, 31-92 sccm N2 Eq. @ 0 deg C Ref Temp.

SA42 092CSA42 092C SA43 280CSA43 280C

SA43 280C Standard Configuration #43,93-280 sccm N2 Eq. @ 0 deg C Ref Temp.

SA43 280CSA43 280C SA44 860CSA44 860C

SA44 860C Standard Configuration #44, 281-860 sccm N2 Eq. @ 0 deg C Ref Temp.

SA44 860CSA44 860C

SA45 2-6LSA45 2-6L

SA45 2-6L Standard Configuration #45, 861-2600 sccm N2 Eq. @ 0 deg C Ref Temp.

SA45 2-6LSA45 2-6L SA46 7-2LSA46 7-2L

SA46 7-2L Standard Configuration #46, 2601-7200 sccm N2 Eq. @ 0 deg C Ref Temp.

SA46 7-2LSA46 7-2L

SA47 015LSA47 015L

SA47 015L Standard Configuration #47, 7201-15000 sccm N2 Eq. @ 0 deg C Ref Temp.

SA47 015LSA47 015L SA48 030LSA48 030L

SA48 030L Standard Configuration #48, 15001-30000 sccm N2 Eq. @ 0 deg C Ref Temp.

SA48 030LSA48 030L SA50 050LSA50 050L

SA50 050L Standard Configuration #50, 30001-50000 sccm N2 Eq. @ 0 deg C Ref Temp.

SA50 050LSA50 050L

XXXX

XX 9/16” - 18 UNF (GF40 Only)

XXXX CXCX

CX 1-1/8” C Seal 92mm (GF80 Only)

CXCX T1T1

T 1 1/8” tube compression (GF40 Only)

T1T1 T2T2

T 2 1/4” tube compression (GF40 Only)

T2T2 T3T3

T 3 3/8” tube compression (GF40 Only)

T3T3 T4T4

T 4 1/2” tube compression (GF40 Only)

T4T4 T6T6

T 6 6 mm tube compression (GF40 Only)

T6T6 T0T0

T 0 10 mm tube compression (GF40 Only)

T0T0 R2R2

R 2 1/4” RC (BSP) (GF40 Only)

R2R2 VXVX

VX 1/4” VCR (GF40, GF80)

VXVX

O2O2

O 2 1/4” VCO (GF40 Only)

O2O2 N2N2

N 2 1/4” NPT (GF40 Only)

N2N2

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

C MultiFlo Capable. Standard Bins or specific gas range may be selected

CC XX

X Not MultiFlo Capable. Specific gas/range required

C Normally Closed Valve

CC OO

O Normally Open Valve (GF40 only)

OO MM

M Meter (No Valve)

A Atmosphere

AA VV

V Vacuum

VV PP

P Positive Pressure

B Seal Buna / Seat Buna (GF40 Only)

BB EE

E Seal EPDM / Seat EPDM (GF40 Only)

EE KK

K Seal Kalrez / Seat Kalrez (GF40 Only)

N Seal Neoprene / Seat Neoprene (GF40 Only)

V Seal Viton / Seat Viton (GF40 Only)

M Seal Metal / Seat PFA (GF80 Only)

Z Seal Nickel / Seat Kalrez (GF80 Only)

Section 5 Product Description Code

Brooks® GF40/GF80/GF81 Devices

5-1

Section 5 Product Description Code

Brooks® GF40/GF80/GF81 Devices

Table 5-1 GF40/GF80 Series Product Description Code Table (Continued)

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

IX.IX.

IX . Communications / Connector

IX.IX.

X.X.

X. Customer Special Request

X.X.

XI.XI.

XI. Auto Shut-Off

XI.XI.

XII.XII.

XII. Auto Zero

XII.XII.

XIII.XIII.

XI II. Reference Temperature

XIII.XIII.

Code OptionCode Option

Code Option

Code OptionCode Option

P5P5

P 5 Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn.

P5P5 P0P0

P 0 Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.

P0P0 P4P4

P 4 Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.

P4P4 E5E5

E 5 EtherCAT

E5E5

D5D5

D 5 DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signal

D5D5

S5S5

S 5 RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Pin alignment with Brooks SLA SII)

S5S5 S1S1

S 1 RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S1S1 S0S0

S 0 RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S0S0 S4S4

S 4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S4S4 L5L5

L 5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L5L5 L1L1

L 1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L1L1 L0L0

L 0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L0L0 L4L4

L 4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L4L4 A5A5

A 5 RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A5A5 A1A1

A 1 RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A1A1 A0A0

A 0 RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A0A0 A4A4

A 4 RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A4A4

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

00C00C

00C 0

00C00C 15C15C

15C 15

15C15C 20C20C

20C 20

20C20C 70F70F

7 0F 21.1

70F70F

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

/ (Output 0-5 V); 2xRJ45 signal 2-Pin power

A Auto Shut-Off (Included)

X Auto Shut-Off (Not Included)

A Auto Zero (Included)

X Auto Zero (Not Included)

C Reference

C Reference / 70

F Reference

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Example Model CodeExample Model Code

Example Model Code

Example Model CodeExample Model Code

GF040GF040

GF040

GF040GF040

IIII

IIII CC

IIIIII

III

IIIIII

XXXX

IVIV

0013300C0013300C

0013300C

0013300C0013300C

VIVI

VIIVII

VIIIVIII

VII

VIVI

T2T2

VIIVII

VIII

VIIIVIII

IXIX

P5P5

XIXI

XXXXXXXX

XXXX

XXXXXXXX

XIIXII

XII

XIXI

XIIXII

XIIIXIII

XIII

XIIIXIII

20C20C

20C

20C20C

5-2

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

T able 5-2 GF81 Series Product Description Code T able

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II . Configurability

II.II.

III.III.

III. Special Application

III.III.

IVIV

. Valve Configuration

IVIV

. Gas or Range

VI.VI.

VI. Fitting

VI.VI.

VII.VII.

VII. Downstream Condition

VII.VII.

VIII.VIII.

VIII. External Seal/Valve Seat

VIII.VIII.

IX.IX.

IX . Communications/

IX.

Connector

X.X.

X. Customer Special Request

X.X.

XI.XI.

XI. Auto Shut-Off

XI.XI.

XII.XII.

XII. Auto Zero-Off

XII.XII.

XII. Reference Temperature

XII.XII.

Code OptionCode Option

Code Option

Code OptionCode Option

GF081GF081

GF081 Metal/Hi-flow (51-300 slpm N

GF081GF081

XXXX

XX Standard

XXXX

M Meter (No Valve)

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, example: “0007” = Hydrogen and “200L” = 200 slpm

XXXX XXXXXXXX XXXX

V1V1

V 1 1 -1/2" body width, 1/2" VCR, 134.2 mm

V1V1

P5P5

P 5 Profibus/Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn./15-Pin Male D conn.

P5P5 P0P0

P 0 Profibus/Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

P0P0 P4P4

P 4 Profibus/Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

P4P4 L5L5

L 5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L5L5 L1L1

L 1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Celerity Power)

L1L1 L0L0

L 0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L0L0 L4L4

L 4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

L4L4 A5A5

A 5 RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A5A5 A1A1

A 1 RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A1A1 A0A0

A 0 RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A0A0 A4A4

A 4 RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

A4A4 S5S5

S 5 RS485 (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S5S5 S1S1

S 1 RS485 (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S1S1 S0S0

S 0 RS485 (S-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S0S0 S4S4

S 4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks SLA SII)

S4S4

D5D5

D 5 DeviceNet®/Analog (Ouput 0-5 V); 5-pin micro signal and power/3-pin analog signal

D5D5

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

00C00C

00C 0 Deg C Reference

00C00C 15C15C

15C 15 Deg C Reference

15C15C 20C20C

20C 20 Deg C Reference

20C20C 70F70F

7 0F 21.1 Deg C/70 Deg F Reference

70F70F

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

X Specific Gas & Range Required

C Normally Closed Valve

A Atmospheric

AA VV

V Vacuum

VV PP

P Positive Pressure

S Metal Seal/Metal Seat

A Auto Shut-Off (Included)

AA XX

X Auto Shut-Off (Not Included)

A Auto Zero (Included)

AA XX

X Auto Zero (Not Included)

Section 5 Product Description Code

Brooks® GF40/GF80/GF81 Devices

Eq)

Example Model CodeExample Model Code

Example Model Code

Example Model CodeExample Model Code

GF081GF081

GF081

GF081GF081

IIII

IIII XX

IIIIII

III

IIIIII

XXXX

IVIV

0013 100L0013 100L

0013 100L

0013 100L0013 100L

VIVI

VIIVII

VIIIVIII

VII

VIVI

V1V1

VIIVII

VIII

VIIIVIII

IXIX

P5P5

XIXI

XXXXXXXX

XXXX

XXXXXXXX

XIIXII

XII

XIXI

XIIXII

XIIIXIII

XIII

XIIIXIII

00C00C

00C

00C00C

5-3

Section 5 Product Description Code

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

5-4

Installation and Operation Manual

Appendix A: GF40/GF80 Series Gas Table

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

A GF40/GF80 Series Gas Table

Table A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43

Gas Symbol

He 1 Helium Viton 19.7 24.7 29.7 21.3 25.1 29.7 5 14 15 42 43 128 129 400 Ne 2 Neon Viton 24.7 25.1 14.7 5 14 15 42 43 129 130 400 Ar 4 Argon Viton 24.7 29.7 44.7 25.1 29. 7 44.7 5 14 15 42 43 130 131 400 Kr 5 Krypton Viton 29.7 29.7 4 11 12 32 33 100 101 300 Xe 6 Xenon Viton 24.7 25.1 3 6 7 19 20 58 59 178 H2 7 Hydrogen Viton 14.7 14.7 19.7 18.4 18.4 21.3 3 10 11 30 31 92 93 280 Air 8 Air Viton 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 CO 9 Carbon Monoxide Viton 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 HBr 10 Hydrogen Brom ide Viton 24.7 25.1 3 8 9 25 26 77 78 235 HCl 11 Hydrogen Chloride EPDM 24.7 40.0 25.1 40.0 3 10 11 30 31 92 93 280 N2 13 Nitrogen Viton 24.7 29.7 32.7 25.1 29.7 32.7 3 10 11 30 31 92 93 280 D2 14 Deuterium Vit on 14. 7 14.7 18.4 18.4 3 10 11 30 31 94 95 280 O2 15 Oxygen Viton 24.7 29.7 34.7 25.1 29.7 34.7 3 10 11 30 31 92 93 280 NO 16 Nitric Oxide Viton,Kalrez 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 HI 17 Hydrogen Iodide Kalrez 24.7 29. 7 25.1 29.7 3 5 6 15 16 46 47 141 F2 18 Fluorine - 24.7 29.7 25.1 29.7 3 9 10 27 28 83 84 254 Cl2 19 Chlorine Viton 24.7 29.7 25.1 29.7 3 6 7 19 20 57 58 173 H2S 22 Hydrogen Sulfide Kalrez 24.7 29.7 25.1 29.7 3 8 9 25 26 76 77 232 H2Se 23 Hydrogen Selenide Kalrez 24.7 29.7 25.1 29.7 3 7 8 22 23 66 67 202 CO2 25 Carbon Dioxide Buna 24.7 29.7 29.7 25.1 29.7 29.7 3 7 8 22 23 69 70 209 N2O 27 Nitrous Oxide Viton,Buna 24.7 29.7 29.7 25.1 29.7 29.7 3 7 8 21 22 65 66 200 CH4 28 Methane Viton,Buna 24.7 24.7 29.7 25.1 25.1 29.7 3 8 9 23 24 71 72 215 NH3 29 Ammonia Neoprene,EPDM 24.7 24.7 29.7 25.1 25.1 29.7 3 8 9 24 25 73 74 223 PH3 31 Phosphine Kalrez 19.7 24.7 21.3 25.1 3 7 8 22 23 67 68 205 SO2 32 Sulfur Dioxide EPDM 19.7 24.7 21.3 25.1 3 6 7 17 18 52 53 157 CH3F 33 Methyl Fl uoride Viton 24.7 29.7 25.1 29.7 3 7 8 22 23 67 68 204 COS 34 Carbonyl Sulfide Viton 24.7 29.7 25.1 29.7 3 7 8 20 21 60 61 183 AsH3 35 Arsine Kalrez 24.7 29.7 25.1 29.7 3 6 7 18 19 55 56 170 ClCN 37 Cyanogen Chloride Kalrez 14.7 21. 7 18.4 22.7 3 5 6 15 16 46 47 142 C2H4 38 Ethylene Viton 24.7 29.7 25.1 29.7 3 6 7 17 18 54 55 163 SiH4 39 Silane Kalrez 24.7 29.7 25.1 29.7 3 6 7 18 19 56 57 170 C2H2 42 Acetylene Viton 16.7 19. 7 19.4 21.3 3 6 7 18 19 57 58 170 GeH4 43 Germane - 24.7 29.7 25.1 29.7 3 6 7 17 18 53 54 161 COF2 46 Carbonyl Fluoride Viton 19.7 19.7 21.7 21.3 21.3 22.7 3 5 6 17 18 53 54 160 BF3 48 Boron Tri fluoride Kalrez 19.7 24. 7 21.3 25.1 3 5 6 16 17 50 51 150 CHF3 49 Fluoroform (Freon-23) Viton,Kalrez 24.7 24.7 26.7 25.1 25.1 26.8 3 5 6 16 17 48 49 145 NF3 53 Nitrogen Trifluoride Teflon 24.7 29.7 26.7 25.1 29.7 26.8 3 5 6 15 16 46 47 140 B2H6 58 Diborane Kalrez 19.7 19.7 21.3 21.3 3 4 5 12 13 38 39 116 COCl2 60 Phosgene Kalrez 12.7 14.7 17.4 18.4 3 3 4 11 12 35 36 106 PF3 62 Phosphorus Trifluoride - 19.7 24.7 21.3 25.1 3 4 5 14 15 42 43 129 CF4 63 Carbon Tetrafluoride (Freon-14) Viton 24.7 24.7 26.7 25.1 25.1 26.8 3 4 5 13 14 40 41 121 SiH2Cl2 67 Dichlorosilane Kalrez 14.7 19.7 18.4 21.3 3 3 4 10 11 29 30 89 C3H6-b) 69 Propylene Viton 19.7 19.7 21.3 21.3 3 4 5 12 13 36 37 110 BCl3 70 Boron Trichloride Kalrez 11.7 14.7 17.0 18.4 3 3 4 10 11 31 32 94 ClO3F 72 Perchloryl Fluoride - 14.7 20.7 18.4 22.0 3 4 5 12 13 38 39 114 ClF3 77 Chlorine Trifluoride Kalrez 14.7 20.7 18.4 22.0 3 4 5 11 12 35 36 107 C2H7N 85 Dimethylamine Viton,Kalrez 9.7 14.7 16.3 18.4 3 3 4 11 12 34 35 101 SiF4 88 Silicon Tetrafluoride - 19.7 24.7 21.3 25.1 3 4 5 11 12 34 35 103 C3H8 89 Propane Viton 9.7 11.7 16.3 17.0 3 3 4 10 11 32 33 100 C2F4 94 Tetrafluoroethyl ene Viton,Buna 19.7 19.7 21.3 21.3 3 3 4 10 11 31 32 100 Si2H6 97 DISILANE - 19.7 19.7 21.3 21.3 3 3 4 10 11 30 31 92 GeF4 99 Germanium Tetrafluoride - 20. 7 24.7 22.0 25.1 3 3 4 10 11 30 31 92

Gas Code Gas Name

Elastomer seal GF040

Min inlet pressure for vac.

exhaust (PSIA)

SA40-

SA47 SA48 SA50

Min inlet pressure for atm.

exhaust (PSIA) SA40 SA41 SA42 SA43

SA40-

SA47 SA48 SA50 Low High Low High Low High Low High

For reference only, consult factory on the latest tables.

A-1

Appendix A: GF40/GF80 Series Gas Table

Brooks® GF40/GF80/GF81 Devices

Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

Gas Symbol SiCl4 108 Silicon Tetrachloride Kalrez 8.7 16.0 0 0 3 6 7 18 19 56 C3H9N 109 Trimethylamine Kalrez 6.7 8.7 15.5 16.0 0 0 3 8 9 25 26 78 SF6 110 Sulf ur Hexafluoride Viton,EPDM 19.7 19.7 20.7 21.3 21.3 22.0 0 0 3 8 9 25 26 77 C2F6 118 He xafluoroethane (Freon-116) Viton,Buna 19.7 19.7 21. 3 21.3 0 0 3 8 9 23 24 71 WF6 121 Tungsten Hexafluoride - 9.7 11.7 16.3 17.0 0 0 3 5 6 16 17 50 C3F8 128 Perfluoropropane Viton 19.7 19.7 21.3 21.3 0 0 3 5 6 16 17 50 C4F8 129 Octafluorocyclobutane V iton 19.7 19.7 21.3 21.3 0 0 3 5 6 16 17 50 C3F6 138 Hexafluoropropylene Vit on,Buna 19.7 19.7 21.3 21.3 0 0 3 6 7 20 21 60 C2HF5 155 PENTAFLUOROETHANE (FREON-125) Viton 19.7 19.7 21.3 21.3 0 0 3 8 9 25 26 77 CH2F2 160 Difluoromethane Viton 24.7 29.7 25.1 29.7 3 6 7 19 20 57 58 174 CH6Si 185 Methyls ilane (MONO) - 9.7 14.7 16.3 18.4 3 4 5 12 13 37 38 111 (CH3)3SiH 190 Trimethylsilane (TMSi) - 6.7 15.5 0 0 3 7 8 20 21 62 C5F8 266 Octafluorocyclopentene - 9.7 14.7 16.3 18.4 0 0 3 5 6 14 15 44 C4F6 270 He xafluoro-2-butyne - 9.7 16.3 0 0 3 6 7 19 20 57 C4F6-q) 297 Hexafluoro Butadiene-1-3 - 14.7 14.7 18.4 18.4 0 0 3 6 7 17 18 52 C5F8O 354 Epoxyperfluorocyclopentene - 19.7 19.7 21.3 21.3 0 0 3 4 5 13 14 40 Si3H9N 368 Trisilylamine (TSA) - 6.0 7.2 15.3 15.6 0 0 3 6 7 20 21 60 10%GeH4/H2 509 10%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 9 10 28 29 86 87 260 10%PH3/H2 516 10%Phosphine/Hydrogen MIX-Check components 14.7 14.7 18.4 18.4 3 9 10 28 29 90 91 275

4.5%PH3/N2 528 4.5%Phosphine/Nitrogen MIX-Check components 20.7 29.7 22.0 29.7 3 10 11 30 31 94 95 280 20%O2/He 536 20%Oxygen/Helium MIX-Check components 19.7 29.7 21.3 29.7 4 13 14 38 39 120 121 360 5%H2/N2 542 5%Hydrogen/ Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 1%B2H6/H2 557 1%Diborane Hydrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 91 92 270 1%PH3/H2 563 1%Phosphine/Hydrogen MI X-Check components 19.7 19.7 21.3 21.3 3 10 11 30 31 90 91 273 3%B2H6/N2 595 3%Diborane/Nitrogen MIX-Check components 20.7 29.7 22.0 29. 7 3 9 10 29 30 90 91 270 3%H2/N2 597 3%Hydrogen/ Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 30%He/O2 603 30%Helium/Oxygen MIX-Check components 24.7 29.7 25.1 29.7 4 11 12 33 34 100 101 301 30%O2/He 604 30%Oxygen/Helium MIX-Check components 19.7 29.7 21.3 29.7 4 12 13 37 38 113 114 345 4%H2/He 606 4%Hydrogen/ Helium MIX-Check components 19.7 19.7 21.3 21.3 5 14 15 41 42 126 127 400 4%H2/N2 607 4%Hydrogen/ Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280 5%B2H6/Ar 615 5%Diborane/Argon MIX-Check components 24.7 25.1 4 12 13 38 39 116 117 353 50%PH3/SiH4 632 50%Phosphine/Silane MIX-Check components 16.7 24.7 19.4 25.1 3 6 7 20 21 62 63 190 10%O2/He 649 10%Oxygen/Helium MIX-Check components 19.7 24.7 21.3 25.1 5 13 14 41 42 123 124 380 2%SiH4/N2 653 2%SILANE/NITROGEN MIX-Check components 19. 7 24.7 21.3 25.1 3 10 11 30 31 93 94 280 5%B2H6/N2 654 5%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29. 7 3 9 10 28 29 86 87 262 .8%B2H6/N2 662 .8%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 93 94 280 10%PH3/He 674 10%Phosphine/Helium MIX-Check components 14.7 19.7 18.4 21.3 4 13 14 40 41 120 121 370 2%B2H6/N2 695 2%Diborane/Nitrogen MIX-Check components 24.7 29.7 25.1 29. 7 3 10 11 30 31 93 94 280 10%GeH4/Ar 698 10%Germane/Argon MI X-Check components 24.7 29.7 25.1 29.7 4 12 13 38 39 114 115 350 5%H2/He 762 5%Hydrogen/ Helium MIX-Check components 19.7 19.7 21.3 21.3 5 14 15 41 42 125 126 400 5%B2H6/He 766 5%Diborane/Helium MIX-Check components 14.7 16.7 18.4 19.4 4 12 13 38 39 115 116 350 15%B2H6/H2 820 15%Diborane/Hydrogen MIX-Check components 14.7 14.7 18.4 18.4 3 8 9 25 26 76 77 230 3%C2H4/He 878 3%Ethylene/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 375 10%B2H6/Ar 881 5%Diborane/Argon MIX-Check c omponents 24.7 29.7 25.1 29.7 4 11 12 35 36 105 106 320

2.7%C2H4/He 897 2.7%Ethylene/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 377 1%GeH4/H2 898 1%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 10 11 30 31 91 92 275 .5%GeH4/H2 910 0.5%Germane/Hydrogen MIX-Check components 20.7 20.7 22.0 22.0 3 10 11 30 31 92 93 280 2%PH3/H2 916 2%Phosphine/Hydrogen MI X-Check components 21.7 21.7 22.7 22.7 3 10 11 30 31 91 92 275

3.9%H2/N2 930 3.9%Hydrogen/Nitrogen MI X-Check components 24.7 29.7 25.1 29.7 3 10 11 30 31 92 93 280

10%B2H6/He 939 10%Diborane/Helium MIX-Check components 19.7 19.7 21.3 21.3 4 11 12 34 35 103 104 314

30%C2H4/He 946 30%Ethylene/Helium MIX-Check components 19.7 24.7 21.3 25.1 3 10 11 30 31 90 91 275

10%H2/He 950 10%Hydrogen/Helium MI X-Check components 19.7 19.7 21.3 21.3 4 13 14 40 41 125 126 380

15%H2/B2H6 953 15%Hydrogen/Diborane MIX-Check components 19.7 19.7 21.3 21.3 3 4 5 14 15 42 43 130

17%CH4/CO2 958 17%Methane/Carbon Dioxide MIX-Check components 24.7 29.7 25.1 29.7 3 7 8 23 24 70 71 210

20%CH6Si/H2 962 20%Methylsilane (MONO)/Hydrogen MIX-Check components 14.7 19.7 18.4 21.3 3 7 8 23 24 71 72 212

50%CH3SiHCl2/H2 965 50%Dichloromethylsilane/ Hydrogen MIX-Check components 11.7 13.7 17.0 17.9 3 4 5 14 15 42 43 130

20%GeH4/H2 978 20%Germane/Hydrogen MIX-Check components 19.7 24.7 21.3 25.1 3 8 9 26 27 81 82 241

0.5%B2H6/He 979 0.5%Diborane/Helium MIX-Check components 14.7 19.7 18.4 21.3 5 14 15 42 43 130 131 400 COS-Special 5022 Carbonyl Sulfide (Special) - 24.7 29.7 25.1 29.7 3 7 8 20 21 60 61 183

Gas Code Gas Name Elastomer seal GF040

Min inlet pressure for

vac. exhaust (PSIA)

SA40-

SA47 SA48 SA50

Min inlet pressure for atm. exhaust (PSIA) SA40 SA41 SA42 SA43

SA40-

SA47 SA48 SA50 Low High Low High Low High Low High

For reference only, consult factory on the latest tables.

A-2

Installation and Operation Manual

Appendix A: GF40/GF80 Series Gas Table

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Table A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50

SA44 SA45 SA46 SA47 SA48 SA50

Gas Symbol

He 1 Hel ium Viton 401 1194 1195 3609 3610 11100 11101 23100 23101 47000 47001 90900 Ne 2 Neon Viton 401 1207 1208 3650 3651 10700 10701 22100 x x x x Ar 4 Argon V iton 401 1214 1215 3671 3672 10000 10001 20200 20201 41000 41001 50001 Kr 5 Krypton Viton 301 930 931 2800 2801 7160 7161 14901 x x x x Xe 6 Xenon Viton 179 546 547 1651 1652 4210 4211 8761 x x x x H2 7 Hydrogen Viton 281 860 861 2600 2601 8000 8001 16400 16401 33000 33001 66301 Air 8 Air Viton 281 860 861 2600 2601 7400 7401 15000 15001 30001 x x CO 9 Carbon Monoxide Viton 281 860 861 2600 2601 7300 7301 15000 15001 30001 x x HBr 10 Hydrogen Bromi de Viton 236 723 724 2187 2188 5610 5611 11701 x x x x HCl 11 Hydrogen Chloride EPDM 281 860 861 2600 2601 6900 6901 14200 14201 29001 x x N2 13 Nitrogen Viton 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 50001 D2 14 Deuterium Viton 281 880 881 2600 2601 8100 8101 16500 16501 33001 x x O2 15 Oxygen Viton 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 50001 NO 16 Nitric Oxide Vi ton,Kalrez 281 860 861 2600 2601 7200 7201 15000 15001 30001 x x HI 17 Hydrogen Iodide Kalrez 142 432 433 1305 1306 3340 3341 6960 6961 13901 x x F2 18 Fluorine - 255 780 781 2358 2359 6700 6701 14000 14001 28001 x x Cl2 19 Chlorine Viton 174 531 532 1604 1605 4850 4851 10100 10101 20201 x x H2S 22 Hydrogen Sulfide Kalrez 233 713 714 2155 2156 5900 5901 12100 12101 24101 x x H2Se 23 Hydrogen Selenide Kalrez 203 620 621 1874 1875 4770 4771 10000 10001 20001 x x CO2 25 Carbon Dioxide Buna 210 642 643 1942 1943 5300 5301 11000 11001 22000 22001 35401 N2O 27 Nitrous Oxide Viton,Buna 201 611 612 1849 1850 5100 5101 10400 10401 21000 21001 33601 CH4 28 Methane Viton,Buna 216 660 661 2000 2001 5800 5801 12000 12001 24000 24001 41801 NH3 29 Ammonia Neoprene,EPDM 224 685 686 2072 2073 6000 6001 12200 12201 25000 25001 41801 PH3 31 Phosphine Kalrez 206 629 630 1901 1902 5200 5201 10700 10701 21301 x x SO2 32 Sulfur Dioxide EPDM 158 483 484 1459 1460 3800 3801 7920 7921 15801 x x CH3F 33 Methyl Fluoride Viton 205 625 626 1890 1891 5200 5201 10600 10601 21201 x x COS 34 Carbonyl Sulfide Viton 184 562 563 1700 1701 4500 4501 9400 9401 18301 x x AsH3 35 Arsine Kalrez 171 510 511 1550 1551 4000 4001 8500 8501 17001 x x ClCN 37 Cyanogen Chloride Kalrez 143 435 436 1320 1321 3400 3401 7060 7061 14101 x x C2H4 38 Ethylene Viton 164 501 502 1516 1517 4400 4401 9300 9301 18201 x x SiH4 39 S ilane Kalrez 171 523 524 1581 1582 4400 4401 9300 9301 18201 x x C2H2 42 Acetylene Vit on 171 530 531 1600 1601 4400 4401 9300 9301 18201 x x GeH4 43 Germane - 162 495 496 1500 1501 4000 4001 8400 8401 16401 x x COF2 46 Carbonyl Fluori de Viton 161 500 501 1500 1501 4000 4001 8400 8401 16500 16501 19001 BF3 48 Boron Trif luoride Kalrez 151 457 458 1381 1382 3800 3801 7900 7901 15501 x x CHF3 49 Fluoroform (Freon-23) Viton,Kalrez 146 445 446 1344 1345 3600 3601 7600 7601 15000 15001 23601 NF3 53 Nitrogen Trifluori de Teflon 141 430 431 1300 1301 3600 3601 7500 7501 15000 15001 23601 B2H6 58 Diborane Kalrez 117 358 359 1082 1083 3100 3101 6400 6401 12601 x x COCl2 60 Phosgene Kalrez 107 325 326 1000 1001 2520 2521 5250 5251 10501 x x PF3 62 Phosphorus Tri fluoride - 130 400 401 1200 1201 3200 3201 6800 6801 13301 x x CF4 63 Carbon Tetrafluoride (Freon-14) Viton 122 372 373 1123 1124 3010 3011 6400 6401 12600 12601 20001 SiH2Cl2 67 Dichloros ilane Kalrez 90 273 274 824 825 2140 2141 4450 4451 8901 x x C3H6-b) 69 Propylene Viton 111 338 339 1022 1023 2800 2801 5900 5901 11701 x x BCl3 70 Bo ron Trichloride Kalrez 95 289 290 874 875 2230 2231 4650 4651 9301 x x ClO3F 72 Perchloryl Fluoride - 115 350 351 1060 1061 2800 2801 5800 5801 11501 x x ClF3 77 Chlorine Trifluoride Kalrez 108 327 328 1000 1001 2560 2561 5340 5341 10701 x x C2H7N 85 Dimethylam ine Viton,K alrez 102 310 311 960 961 2530 2531 5400 5401 10601 x x SiF4 88 Silicon Tetrafluoride - 104 316 317 1000 1001 2600 2601 5400 5401 10601 x x C3H8 89 Propane Viton 101 300 301 910 911 2420 2421 5100 5101 10101 x x C2F4 94 Tetrafluoroethylene Viton,Buna 101 300 301 900 901 2300 2301 4900 4901 9801 x x Si2H6 97 DISILANE - 93 282 283 853 854 2300 2301 4900 4901 9801 x x GeF4 99 Germanium Tetrafluoride - 93 282 283 860 861 2200 2201 4700 4701 9401 x x

Gas Code Gas Name Elastomer seal GF040 Low High Low High Low High Low High Low High Low High

Brooks® GF40/GF80/GF81 Devices

For reference only, consult factory on the latest tables. For gases not specified for SA50, contact Brooks Product Marketing.

A-3

Appendix A: GF40/GF80 Series Gas Table

Brooks® GF40/GF80/GF81 Devices

Table A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

SA44 SA45 SA46 SA47 SA48 SA50

Gas Symbol

SiCl4 108 Silicon Tetrachloride Kalrez 57 172 173 520 521 1320 1321 2751 x x x x C3H9N 109 Trimethylamine Kalrez 79 240 241 720 721 1910 1911 4000 4001 8101 x x SF6 110 Sulfur Hexafluoride Viton,EPDM 78 237 238 715 716 1900 1901 4000 4001 8000 8001 12101 C2F6 118 Hexafluoroethane (Freon-116) Viton,Buna 72 218 219 658 659 1750 1751 3700 3701 7401 x x WF6 121 Tungsten Hexafluoride - 51 150 151 460 461 1200 1201 2500 2501 5001 x x C3F8 128 Perfluoropropane Viton 51 154 155 465 466 1200 1201 2500 2501 5101 x x C4F8 129 Octafluorocyclobutane Viton 51 154 155 465 466 1170 1171 2430 2431 4901 x x C3F6 138 Hexafluoropropylene Viton,Buna 61 184 185 556 557 1470 1471 3050 3051 6111 x x C2HF5 155 PENTAFLUOROETHANE (FREON-125) V iton 78 235 236 711 712 1900 1901 4000 4001 8001 x x CH2F2 160 Difl uoromethane Viton 175 533 534 1612 1613 4300 4301 9000 9001 18001 x x CH6Si 185 Methylsilane (MONO) - 112 340 341 1050 1051 2800 2801 5900 5901 11601 x x (CH3)3SiH 190 Trimethylsi lane (TMSi) - 63 189 190 572 573 1530 1531 3200 x x x x C5F8 266 Octafluorocyclopentene - 45 134 135 406 407 1050 1051 2200 2201 4501 x x C4F6 270 Hexafluoro-2-butyne - 58 176 177 533 534 1400 1401 2900 x x x x C4F6-q) 297 Hexafluoro Butadi ene-1-3 - 53 160 161 500 501 1270 1271 2640 2641 5271 x x C5F8O 354 Epoxyperfluorocyclopentene - 41 122 123 369 370 1000 1001 2100 2101 4201 x x Si3H9N 368 Trisilylamine (TSA) - 61 181 182 560 561 1410 1411 3000 3001 6001 x x 10%GeH4/H2 509 10%Germane/Hydrogen MIX-Check components 261 800 801 2400 2401 7200 7201 15000 15001 30001 x x 10%PH3/H2 516 10%Phosphine/Hydrogen MIX-Check components 276 813 814 2500 2501 7600 7601 15500 15501 31001 x x

4.5%PH3/N2 528 4.5%Phosphine/Nitrogen MIX-Check components 281 880 881 2600 2601 7200 7201 15000 15001 30001 x x 20%O2/He 536 20%Oxygen/Helium MIX-Check components 361 1102 1103 3331 3332 10000 10001 21000 21001 42001 x x 5%H2/N2 542 5%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 31001 x x 1%B2H6/H2 557 1%Diborane Hydrogen MIX-Check components 271 850 851 2510 2511 7900 7901 16100 16101 33001 x x 1%PH3/H2 563 1%Phosphine/Hydrogen MIX-Check components 274 850 851 2531 2532 7800 7801 16000 16001 32001 x x 3%B2H6/N2 595 3%Diborane/Nitrogen MIX-Check components 271 850 851 2500 2501 7100 7101 14500 14501 29001 x x 3%H2/N2 597 3%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x 30%He/O2 603 30%Heli um/Oxygen MIX-Check components 302 950 951 2800 2801 8100 8101 17000 17001 34001 x x 30%O2/He 604 30%Oxygen/Helium MIX-Check components 346 1060 1061 3203 3204 9700 9701 20000 20001 40001 x x 4%H2/He 606 4%Hydrogen/ Helium MIX-Check components 401 1200 1201 3600 3601 11000 11001 23000 23001 46001 x x 4%H2/N2 607 4%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x 5%B2H6/Ar 615 5%Diborane/ Argon MIX-Check components 354 1084 1085 3278 3279 8900 8901 18201 x x x x 50%PH3/SiH4 632 50% Phosphine/Silane MIX-Check c omponents 191 580 581 1730 1731 4800 4801 10000 10001 20001 x x 10%O2/He 649 10%Oxygen/Helium MIX-Check components 381 1150 1151 3500 3501 10500 10501 22000 22001 44001 x x 2%SiH4/N2 653 2%SILANE/NITROGEN MIX-Check components 281 870 871 2600 2601 7300 7301 15000 15001 30001 x x 5%B2H6/N2 654 5%Diborane/Nitrogen MIX-Check components 263 804 805 2500 2501 7000 7001 14100 14101 28101 x x .8%B2H6/N2 662 .8%Diborane/Nitrogen MIX-Check components 281 870 871 2600 2601 7300 7301 15000 15001 30001 x x 10%PH3/He 674 10%Phosphine/Helium MIX-Check components 371 1100 1101 3400 3401 10000 10001 21000 21001 43001 x x 2%B2H6/N2 695 2%Diborane/Nitrogen MIX-Check components 281 870 871 2600 2601 7200 7201 15000 15001 30001 x x 10%GeH4/Ar 698 10%Germane/Argon MIX-Check components 351 1070 1071 3300 3301 8700 8701 18000 18001 36001 x x 5%H2/He 762 5%Hydrogen/ Helium MIX-Check components 401 1200 1201 3600 3601 11000 11001 23000 23001 46001 x x 5%B2H6/He 766 5%Diborane/Helium MIX-Check components 351 1100 1101 3300 3301 10000 10001 21000 21001 42001 x x 15%B2H6/H2 820 15%Diborane/Hydrogen MIX-Check components 231 710 711 2120 2121 6500 6501 13300 13301 27001 x x 3%C2H4/He 878 3%Ethylene/Helium MI X-Check components 376 1150 1151 3500 3501 10700 10701 22100 22101 45001 x x 10%B2H6/Ar 881 5%Diborane/Argon MIX-Check components 321 1000 1001 3000 3001 8100 8101 17000 17001 34001 x x

2.7%C2H4/He 897 2.7%Ethylene/Helium MIX-Check components 378 1158 1159 3502 3503 10700 10701 22200 22201 45001 x x 1%GeH4/H2 898 1%Germane/Hydrogen MIX-Check components 276 850 851 2530 2531 8000 8001 16200 16201 33001 x x .5%GeH4/H2 910 0.5%Germane/Hydrogen MIX-Check components 281 860 861 2600 2601 8000 8001 16300 16301 33001 x x 2%PH3/H2 916 2%Phosphine/Hydrogen MIX-Check components 276 850 851 2530 2531 8000 8001 16200 16201 33001 x x

3.9%H2/N2 930 3.9%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x

10%B2H6/He 939 10%Diborane/Hel ium MIX-Check components 315 965 966 2918 2919 9000 9001 18400 18401 37001 x x

30%C2H4/He 946 30%Ethylene/Helium MIX-Check components 276 850 851 2551 2552 7800 7801 16000 16001 32001 x x

10%H2/He 950 10%Hydrogen/Helium MIX-Check components 381 1200 1201 3500 3501 10700 10701 22200 22201 45001 x x

15%H2/B2H6 953 15%Hydrogen/Diborane MIX-Check components 131 400 401 1200 1201 3400 3401 7100 7101 14001 x x

17%CH4/CO2 958 17%Methane/Carbon Di oxide MIX-Check components 211 650 651 2000 2001 5400 5401 11000 11001 22001 x x

20%CH6Si/H2 962 20%Methylsilane (MONO)/Hydrogen MIX-Check components 213 660 661 2000 2001 5900 5901 12000 12001 24001 x x

50%CH3SiHCl2/H2 965 50%Dichloromethylsilane/Hydrogen MIX-Check components 131 400 401 1200 1201 3100 3101 6600 6601 13001 x x

20%GeH4/H2 978 20%Germane/Hydrogen MIX-Check components 242 750 751 2240 2241 6600 6601 13500 13501 27001 x x

0.5%B2H6/He 979 0.5%Diborane/Helium MIX-Check components 401 1200 1201 3700 3701 11000 11001 23000 23001 47001 x x COS-Special 5022 Carbonyl S ulfide (Special) - 184 562 563 1700 1701 4500 4501 9400 9401 18301 x x

Gas Code Gas Name Elastomer seal GF040 Low High Low High Low High Low High Low Hi gh Low High

For reference only, consult factory on the latest tables. For gases not specified for SA50, contact Brooks Product Marketing.

A-4

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

B GF40/GF80/GF81 Series Patents

T able B-1 GF40/GF80/GF81 Series Patents

Patent/Pub. No. Title

6343617 6389364 6425281 6445980 6539792 6640822 6681787 6714878 6752166 6826953 6845659

6910381

6941965 6962164 7043374 7073392 7082824

7113895 7114511 7133785 7143774 7150201 7216019 7231931 7243035 7272512 7273063 7287434 7360551 7363182 7380564 7409871 7412986 7424894 7434477

Appendix B: GF40/GF80GF81 Series

Patents

Brooks® GF40/GF80/GF81 Devices

The GF40/GF80/GF81 Series may be protected by the following US patents and their international filings.

System and method of operation of a digital mass flow controller System and method for a digital mass flow controller Pressure insensitive gas control system System and method for a variable gain proportional-integral (PI) controller Method and apparatus for balancing resistance System and method of operation of a digital mass flow controller System and method of operation of a digital mass flow controller System and method for a digital mass flow controller Method and apparatus for providing a determined ratio of process fluids Flow sensor Variable resistance sensor with common reference leg System and method of operation of an embedded system for a digital capacitance diaphragm gauge Method and apparatus for providing a determined ratio of process fluids System and method for a mass flow controller Flow sensor signal conversion Methods and apparatus for pressure compensation in a mass flow controller Variable resistance sensor with common reference leg

System and method for filtering output in mass flow controllers and mass flow meters System and method for a mass flow controller Valve control system and method Method and apparatus for providing a determined ratio of process fluids System and method for measuring flow Method and system for a mass flow controller with reduced pressure sensitivity System and method for a mass flow controller System and method for mass flow detection device calibration Flow sensor signal conversion Methods and apparatus for pressure compensation in a mass flow controller System and method for measuring flow Method and apparatus for providing a determined ratio of process fluids System and method for mass flow detection device calibration System and method for a mass flow controller Mass flow meter or controller with inclination sensor Method and system for flow measurement and validation of a mass flow controller Method and apparatus for providing a determined ratio of process fluids Methods and apparatus for pressure compensation in a mass flow controller

B-1

Appendix B: GF40/GF80/GF81 Series Patents

Brooks® GF40/GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

June, 2013

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

B-2

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

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ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ!

Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ. Ɍɟɡɢ ɨɛɨɪɭɞɜɚɧɢɹ ɬɪɹɛɜɚ ɩɪɚɜɢɥɧɨ ɞɚ ɫɟ ɢɧɫɬɚɥɢɪɚɬ, ɟɤɫɩɥɨɚɬɢɪɚɬ ɢ ɩɨɞɞɴɪɠɚɬ ɡɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ, ɱɟ ɳɟ ɦɨɝɚɬ ɞɚ ɪɚɛɨɬɹɬ ɫɴɨɬɜɟɬɧɨ ɧɚ ɬɟɯɧɢɬɟ ɧɨɪɦɚɥɧɢ ɫɩɟɰɢɮɢɤɚɰɢɢ. ɋɥɟɞɜɚɳɢɬɟ ɢɧɫɬɪɭɤɰɢɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɢ ɩɪɨɝɪɚɦɚɬɚ ɡɚ ɛɟɡɨɩɚɫɧɨɫɬ ɧɚ ɬɪɭɞɚ ɩɪɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɢɬɟ ɧɚ Brooks Instrument.

x Ɂɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ ɯɚɪɚɤɬɟɪɧɚɬɚ ɩɪɨɢɡɜɨɞɢɬɟɥɧɨɫɬ, ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ, ɚɤɬɭɚɥɢɡɢɪɚɧɟɬɨ, ɩɪɨɝɪɚɦɢɪɚɧɟɬɨ ɢ ɩɨɞɞɪɴɠɤɚɬɚ

ɧɚ ɩɪɨɞɭɤɬɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɜɴɪɲɜɚɬ ɫɚɦɨ ɨɬ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ.

x ɉɪɨɱɟɬɟɬɟ ɜɫɢɱɤɢ ɢɧɫɬɪɭɤɰɢɢ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ

ɫɴɨɬɜɟɬɫɬɜɚɳɨɬɨ ɢɡɞɚɧɢɟ, ɜɢɠɬɟ ɧɚ ɡɚɞɧɚɬɚ ɨɛɥɨɠɤɚ ɢɧɮɨɪɦɚɰɢɹɬɚ ɡɚ ɤɨɧɬɚɤɬ ɫ ɦɟɫɬɧɢɹ ɬɴɪɝɨɜɫɤɢ ɨɮɢɫ. Ɂɚɩɚɡɟɬɟ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɡɚ ɩɨ-ɤɴɫɧɨ ɢɧɮɨɪɦɢɪɚɧɟ.

ȼɇɂɆȺɇɂȿ: ɇɟ ɪɚɛɨɬɟɬɟ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɜɴɧ ɞɢɚɩɚɡɨɧɢɬɟ, ɭɤɚɡɚɧɢ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɢ ɪɴɤɨɜɨɞɫɬɜɨɬɨ ɩɨ ɟɤɫɩɥɨɚɬɚɰɢɹ.

ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɫɟɪɢɨɡɧɢ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ɢ / ɢɥɢ ɩɨɜɪɟɠɞɚɧɟ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ.

x Ⱥɤɨ ɧɟ ɪɚɡɛɢɪɚɬɟ ɧɹɤɨɢ ɢɧɫɬɪɭɤɰɢɢɬɟ, ɫɜɴɪɠɟɬɟ ɫɟ ɫ ɩɪɟɞɫɬɚɜɢɬɟɥɹ ɧɚ Brooks Instrument ɡɚ ɢɡɹɫɧɹɜɚɧɟ ɧɚ ɩɪɨɛɥɟɦɚ. x ɋɩɚɡɜɚɣɬɟ ɜɫɢɱɤɢ ɩɪɟɞɭɩɪɟɠɞɟɧɢɹ, ɩɪɢɡɨɜɢ ɢ ɢɧɫɬɪɭɤɰɢɢ x ɂɧɫɬɚɥɢɪɚɣɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ ɫɴɨɬɜɟɬɧɨ ɧɚ ɭɤɚɡɚɧɢɹɬɚ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɡɚ ɢɧɫɬɚɥɢɪɚɧɟ ɢ ɧɚ ɞɟɣɫɬɜɚɳɢɬɟ ɧɚ ɦɟɫɬɧɢ ɢ ɧɚɰɢɨɧɚɥɧɢ

ɩɪɟɞɩɢɫɚɧɢɹ. ɋɜɴɪɡɜɚɣɬɟ ɩɪɨɞɭɤɬɢɬɟ ɫɚɦɨ ɤɴɦ ɩɨɞɯɨɞɹɳɢ ɢɡɬɨɱɧɢɰɢ ɧɚ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɧɚɥɹɝɚɧɟ.

x ɏɨɞ: (1) Ȼɚɜɧɨ ɜɴɜɟɞɟɬɟ ɫɢɫɬɟɦɚɬɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ȼɚɜɧɨ ɨɬɜɨɪɟɬɟ ɪɚɛɨɬɧɢɬɟ ɤɥɚɩɚɧɢ ɡɚ ɞɚ ɫɟ

ɉɪɨɜɟɪɟɬɟ ɞɚɥɢ ɧɹɦɚ ɢɡɬɢɱɚɧɟ ɩɪɢ ɜɯɨɞɧɨɬɨ ɢ ɢɡɯɨɞɧɨɬɨ ɫɴɟɞɢɧɟɧɢɟ ɧɚ ɪɚɡɯɨɞɨɦɟɪɚ. Ⱥɤɨ ɧɹɦɚ ɢɡɬɢɱɚɧɟ, ɧɚɩɴɥɧɟɬɟ ɫɢɫɬɟɦɚɬɚ ɞɨ ɪɚɛɨɬɧɨ ɧɚɥɹɝɚɧɟ.

x ɉɪɟɞɢ ɢɡɜɴɪɲɜɚɧɟ ɧɚ ɩɨɞɞɪɴɠɤɚɬɚ ɧɟɩɪɟɦɟɧɧɨ ɩɪɨɜɟɪɟɬɟ ɞɚɥɢ ɪɚɛɨɬɧɢɹɬ ɬɪɴɛɨɩɪɨɜɨɞ ɧɟ ɫɟ ɧɚɦɢɪɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ⱥɤɨ ɫɚ ɧɟɨɛɯɨɞɢɦɢ

ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ, ɫ ɨɩɪɟɞɟɥɟɧɢɬɟ ɨɬ Brooks Instrument ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ ɬɪɹɛɜɚ ɞɚ ɛɨɪɚɜɢ ɱɚɫɬɢ ɢ ɩɪɨɰɟɞɭɪɢ ɦɨɝɚɬ ɞɚ ɨɤɚɠɚɬ ɜɥɢɹɧɢɟ ɜɴɪɯɭ ɪɚɛɨɬɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ, ɢ ɫɴɳɨ ɞɚ ɡɚɫɬɪɚɲɚɬ ɛɟɡɨɩɚɫɧɨɫɬɬɚ ɧɚ ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ. Ɂɚɦɟɫɬɜɚɧɟɬɨ ɫ ɧɟɨɪɢɝɢɧɚɥɧɢ ɱɚɫɬɢ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɩɨɠɚɪ, ɨɩɚɫɧɨɫɬ ɨɬ ɬɨɤɨɜ ɭɞɚɪ ɢɥɢ ɧɟɩɪɚɜɢɥɧɚ ɪɚɛɨɬɚ.

x ȼɫɢɱɤɢ ɜɪɚɬɢ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɧɟɩɪɟɦɟɧɧɨ ɞɚ ɛɴɞɚɬ ɡɚɬɜɨɪɟɧɢ, ɚ ɡɚɳɢɬɧɢɬɟ ɩɨɤɪɢɬɢɹ

ɬɨɤɨɜɢɬɟ ɭɞɚɪɢ ɢ ɬɟɥɟɫɧɢɬɟ ɩɨɜɪɟɞɢ, ɨɫɜɟɧ ɚɤɨ ɤɜɚɥɢɮɢɰɢɪɚɧɢ ɫɩɟɰɢɚɥɢɫɬɢ ɢɡɜɴɪɲɜɚɬ ɪɚɛɨɬɢ ɩɨ ɧɟɝɨɜɨɬɨ ɩɨɞɞɴɪɠɚɧɟ.

ȼɇɂɆȺɇɂȿ: ɉɪɢ ɨɛɨɪɭɞɜɚɧɢɹɬɚ ɫ ɩɪɨɬɢɱɚɳɢ ɬɟɱɧɨɫɬɢ, ɚɤɨ ɩɨ ɧɹɤɚɤɜɚ ɩɪɢɱɢɧɚ ɟ ɧɟɨɛɯɨɞɢɦɨ ɞɚ ɫɟ ɡɚɬɜɨɪɹɬ ɧɚɦɢɪɚɳɢɬɟ ɫɟ ɞɨ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɯɨɞɧɢ ɢ ɜɯɨɞɧɢ ɤɥɚɩɚɧɢ, ɨɛɨɪɭɞɜɚɧɟɬɨ ɬɪɹɛɜɚ ɧɚɩɴɥɧɨ ɞɚ ɫɟ ɢɡɩɪɚɡɧɢ. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɩɪɢɱɢɧɢ ɬɨɩɥɢɧɧɨ ɪɚɡɲɢɪɟɧɢɟ ɧɚ ɬɟɱɧɨɫɬɬɚ, ɤɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ.

ɨɡɧɚɱɟɧɢ ɜɴɪɯɭ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɥɢ ɞɨɫɬɚɜɟɧɢ ɡɚɟɞɧɨ ɫ ɧɟɝɨ.

ɩɪɨɞɭɤɬɚ. Ⱥɤɨ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɧɟ ɟ

ɢɡɛɟɝɧɚɬ ɤɨɥɟɛɚɧɢɹɬɚ ɧɚ ɩɨɬɨɤɚ. (2)

ɫɚɦɨ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ. ɇɟɪɚɡɪɟɲɟɧɢɬɟ

ɞɚ ɛɴɞɚɬ ɧɚ ɦɹɫɬɨɬɨ ɫɢ, ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ

ɬɪɹɛɜɚ ɞɚ ɫɟ ɜɤɥɸɱɚɬ ɜ

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED)

ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0,5 bar (g) ɢ ɫ ɪɚɡɦɟɪ ɩɨ-ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1" (ɢɧɱ), ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED).

x Ƚɥɚɜɚ „Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ” ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ PED ɢɧɫɬɪɭɤɰɢɢ. x ɍɤɚɡɚɧɢɬɟ ɜ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɢɡɦɟɪɢɬɟɥɧɢ ɭɪɟɞɢ ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ 97/23/ȿɈ. x

ȼɫɢɱɤɢ ɪɚɡɯɨɞɨɦɟɪɢ ɧɚ Brooks Instrument ɫɟ ɨɬɧɚɫɹɬ ɤɴɦ ɮɥɭɢɞɢ ɨɬ ɝɪɭɩɚ 1.

x ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɩɨ-ɝɨɥɟɦɢ ɨɬ 25 mm ɢɥɢ 1" (ɢɧɱ) ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ I, II ɢɥɢ III ɤɚɬɟɝɨɪɢɹ ɫɩɨɪɟɞ PED.

ɂɡɦɟɪɢɬɟɥɧɢɬɟ ɭɪɟɞɢ ɫ ɪɚɡɦɟɪɢ 25 mm ɢɥɢ 1" (ɢɧɱ), ɢɥɢ ɩɨ-ɦɚɥɤɢ, ɫɥɟɞɜɚɬ ɞɨɛɪɚɬɚ ɢɧɠɟɧɟɪɧɚ ɩɪɚɤɬɢɤɚ (SEP).

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (EMC)

ɇɨɫɟɳɨɬɨ ɡɧɚɤɚ ɋȿ (ɟɥɟɤɬɪɢɱɟɫɤɨ/ɟɥɟɤɬɪɨɧɧɨ) ɨɛɨɪɭɞɜɚɧɟ ɧɚ Brooks Instrument ɟ ɢɡɩɴɥɧɢɥɨ ɭɫɩɟɲɧɨ ɬɟɫɬɨɜɟɬɟ ɡɚ ɩɪɨɜɟɪɤɚ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (ɞɢɪɟɤɬɢɜɚ EMC 2004/108/EC). Ɉɫɨɛɟɧɨ ɜɧɢɦɚɧɢɟ ɬɪɹɛɜɚ ɞɚ ɫɟ ɨɛɪɴɳɚ ɨɛɚɱɟ ɧɚ ɢɡɛɢɪɚɧɟɬɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɢɡɩɨɥɡɜɚɧɢ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ, ɧɨɫɟɳɨ ɡɧɚɤɚ ɋȿ.

Ʉɚɱɟɫɬɜɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɤɚɛɟɥɧɢɬɟ ɫɚɥɧɢɰɢ ɢ ɫɴɟɞɢɧɢɬɟɥɢ:

Brooks Insturment ɩɪɟɞɥɚɝɚ ɜɢɫɨɤɨɤɚɱɟɫɬɜɟɧɢ ɤɚɛɟɥɢ, ɨɬɝɨɜɚɪɹɳɢ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. Ⱥɤɨ ɢɡɩɨɥɡɜɚɬɟ ɫɨɛɫɬɜɟɧ ɫɢɝɧɚɥɟɧ ɤɚɛɟɥ, ɬɪɹɛɜɚ ɞɚ ɢɡɛɟɪɟɬɟ ɬɚɤɴɜ, ɤɨɣɬɨ ɟ ɧɚɩɴɥɧɨ ɡɚɳɢɬɟɧ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɬɢɩ „D” ɢɥɢ „ɤɪɴɝɨɜ” ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɟɤɪɚɧɢɪɚɧɢ ɫ ɦɟɬɚɥɟɧ ɳɢɬ. ɉɪɢ ɧɟɨɛɯɨɞɢɦɨɫɬ ɡɚ ɮɢɤɫɢɪɚɧɟɬɨ ɧɚ ɳɢɬɚ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɩɨɥɡɜɚɬ ɦɟɬɚɥɧɢ ɤɚɛɟɥɧɢ ɫɚɥɧɢɰɢ ɓɢɬɴɬ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɜɴɪɠɟ ɫ ɦɟɬɚɥɧɨɬɨ ɩɨɤɪɢɬɢɟ ɢɥɢ ɦɟɬɚɥɧɢɹ ɫɚɥɧɢɤ ɢ ɜ ɞɜɚɬɚ ɤɪɚɹ ɞɚ ɫɟ ɟɤɪɚɧɢɪɚ ɜ 360°. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɡɚ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɫɚ ɫɬɚɧɞɚɪɬɧɨ ɧɟɦɟɬɚɥɧɢ. ɂɡɩɨɥɡɜɚɧɢɬɟ ɤɚɛɟɥɢ ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɡɚɳɢɬɟɧɢ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ, ɡɚ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ Ʉɨɧɮɢɝɭɪɚɰɢɹ ɧɚ ɤɨɧɬɚɤɬɢɬɟ: ȼɢɠ ɩɪɢɥɨɠɟɧɚɬɚ ɢɧɫɬɪɭɤɰɢɹ ɡɚ ɟɤɫɩɥɨɚɬɚɰɢɹ.

ɛɴɞɟ ɡɚɡɟɦɟɧ.

ȿɥɟɤɬɪɨɫɬɚɬɢɱɟɧ ɪɚɡɪɹɞ (ESD)

ȼɇɂɆȺɇɂȿ: ɉɪɢɛɨɪɴɬ ɫɴɞɴɪɠɚ ɟɥɟɤɬɪɨɧɧɢ ɤɨɦɩɨɧɟɧɬɢ, ɤɨɢɬɨ ɫɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɫɬɚɬɢɱɧɨɬɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɦɨɝɚɬ ɞɚ ɫɟ

ɩɨɜɪɟɞɹɬ ɨɬ ɧɟɝɨ. Ɍɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɫɴɨɬɜɟɬɧɢɬɟ ɩɪɨɰɟɞɭɪɢ ɩɨ ɜɪɟɦɟ ɧɚ ɢɡɜɚɠɞɚɧɟ, ɫɥɚɝɚɧɟ ɢɥɢ ɞɪɭɝɨ ɛɨɪɚɜɟɧɟ ɫ ɜɴɬɪɟɲɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɢ ɭɫɬɪɨɣɫɬɜɚ. ɉɪɨɰɟɞɭɪɚ ɡɚ ɪɚɛɨɬɚ:

1. ɂɡɤɥɸɱɟɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ.

2. ɉɟɪɫɨɧɚɥɴɬ ɬɪɹɛɜɚ ɞɚ ɫɟ ɡɚɡɟɦɢ ɫ ɪɟɝɭɥɢɪɚ ɦɨɧɬɚɠɧɚ ɩɥɚɬɤɚ ɢɥɢ ɞɪɭɝɨ ɜɴɬɪɟɲɧɨ ɭɫɬɪɨɣɫɬɜɨ.

3. ɉɟɱɚɬɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɬɪɚɧɫɩɨɪɬɢɪɚɬ ɜ ɩɪɨɜɨɞɹɳɚ ɨɩɚɤɨɜɤɚ. ɉɟɱɚɬɧɢɬɟ ɩɥɚɬɤɢ ɦɨɝɚɬ ɞɚ ɫɟ ɢɡɜɚɠɞɚɬ ɨɬ ɡɚɳɢɬɧɨɬɨ

ɩɨɤɪɢɬɢɟ ɫɚɦɨ ɧɟɩɨɫɪɟɞɫɬɜɟɧɨ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ. Ɉɬɫɬɪɚɧɟɧɢɬɟ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɧɟɡɚɛɚɜɧɨ ɬɪɹɛɜɚ ɞɚ ɫɥɭɠɟɳɚ ɡɚ ɬɪɚɧɫɩɨɪɬɢɪɚɧɟ, ɫɤɥɚɞɢɪɚɧɟ ɢɥɢ ɜɪɴɳɚɧɟ ɧɚ ɩɪɨɢɡɜɨɞɢɬɟɥɹ.

Ɂɚɛɟɥɟɠɤɢ:

ɇɟ ɟ ɭɧɢɤɚɥɧɨ ɹɜɥɟɧɢɟ, ɱɟ ɬɨɡɢ ɩɪɢɛɨɪ ɫɴɞɴɪɠɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɟɥɟɤɬɪɨɫɬɚɬɢɱɧɢɹ ɡɚɪɹɞ (ESD) ɤɨɦɩɨɧɟɧɬɢ. Ȼɨɥɲɢɧɫɬɜɨɬɨ ɨɬ ɫɴɜɪɟɦɟɧɧɢɬɟ ɟɥɟɤɬɪɨɧɧɢ ɩɪɢɛɨɪɢ ɫɴɞɴɪɠɚɬ ɤɨɦɩɨɧɟɧɬɢ, ɢɡɝɨɬɜɟɧɢ ɩɨ ɬɟɯɧɨɥɨɝɢɹ ɦɟɬɚɥ-ɨɤɢɫ (NMOS, SMOS ɢ ɬ.ɧ.). Ɉɩɢɬɴɬ ɞɨɤɚɡɜɚ, ɱɟ ɞɚɠɟ ɢ ɦɚɥɤɨ ɤɨɥɢɱɟɫɬɜɨ ɫɬɚɬɢɱɟɫɤɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɪɚɛɨɬɹɬ ɩɪɚɜɢɥɧɨ, ɩɪɨɹɜɹɜɚɬ ɧɚɱɚɥɧɢ ɧɟɢɡɩɪɚɜɧɨɫɬɢ.

ɝɪɢɜɧɚ ɢɥɢ ɞɪɭɝɨ ɛɟɡɨɩɚɫɧɨ ɢ ɩɨɞɯɨɞɹɳɨ ɡɚ ɰɟɥɬɚ ɫɪɟɞɫɬɜɨ, ɩɪɟɞɢ ɞɚ ɢɧɫɬɚɥɢɪɚ, ɢɡɜɚɠɞɚ ɢɥɢ

ɫɟ ɫɥɨɠɚɬ ɜ ɡɚɳɢɬɧɚ ɨɩɚɤɨɜɤɚ,

ɦɨɠɟ ɞɚ ɩɨɜɪɟɞɢ ɢɥɢ ɫɴɫɢɩɟ ɬɟɡɢ ɩɪɢɛɨɪɢ. ɉɨɜɪɟɞɟɧɢɬɟ ɤɨɦɩɨɧɟɧɬɢ ɞɚɠɟ ɚɤɨ ɩɪɢɜɢɞɧɨ

C-1

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Czech

Základní instrukce

PĜed instalací si pĜeþtČte následující instrukce!

Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ. PĜístroje musí být ĜádnČ nainstalovány, používány a udržovány tak, aby byl zajištČn jejich nepĜetržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující pokyny a integrovat jejich obsah do svého bezpeþnostního programu pĜi instalování, používání a udržování produktĤ spoleþnosti Brooks.

x Pro zajištČní správné funkce zaĜízení mohou jeho instalaci, obsluhu, programování, údržbu a aktualizace firmwaru provádČt výhradnČ

kvalifikované osoby.

x PĜed instalací, provozem a údržbou produktu si prostudujte všechny pokyny. Pokud tato pĜíruþka není tou správnou pĜíruþkou pro dané

zaĜízení, informujte se na zadní stranČ obálky o kontaktu na místní prodejní kanceláĜ. Uchovejte si tuto pĜíruþku pro pozdČjší potĜebu.

UPOZORNċNÍ: Neprovozujte zaĜízení v rozsahu mimo daný rozsah v provozní pĜíruþce. Porušení tohoto upozornČní mĤže mít za následek

vážné újmy na zdraví a vést k poškození zaĜízení.

x Pokud nČkterým pokynĤm nerozumíte, kontaktujte svého prodejního zástupce spoleþnosti Brooks a vyžádejte si objasnČní. x Dodržujte všechny výstrahy, upozornČní a pokyny, uvedené a vyznaþené na produktu, nebo s ním dodané. x Namontujte zaĜízení specifikovaným zpĤsobem podle správné montážní pĜíruþky a podle platných místních a národních pĜedpisĤ. PĜipojte

všechny produkty ke správným zdrojĤm elektrické energie a stlaþených médií.

x Postup: (1) Pomalu do systému pĜivádČjte médium. Pro zabránČní vzniku rázĤ v systému otvírejte procesní ventily postupnČ. (2) PĜekontrolujte

tČsnost vstupního a výstupního pĜipojení prĤtokomČru. Pokud nezjistíte žádné netČsnosti, postupnČ zvedejte tlak na provozní hodnotu.

x PĜed provádČním servisních prací zkontrolujte, zda systém není pod tlakem. V pĜípadČ potĜeby výmČny dílĤ zajistČte, aby byly použity náhradní

souþásti specifikované spoleþností Brooks Instrument a výmČnu provádČla kvalifikovaná osoba. Použití neschválených dílĤ a postupĤ mĤže negativnČ ovlivnit efektivitu a bezpeþnost procesu. Použití náhrad za originální díly mĤže zpĤsobit požár, úraz elektrickým proudem nebo nesprávnou funkci.

x Pokud není zrovna provádČna údržba kvalifikovanou osobou, ujistČte se, že zaĜízení je opatĜeno všemi pĜedepsanými kryty.

UPOZORNċNÍ: Pokud je u zaĜízení s prĤtokem kapalin nutno z jakéhokoli dĤvodu uzavĜít vstupní a výstupní ventily, je nutné zaĜízení

kompletnČ vyprázdnit. Pokud tak neuþiníte, mĤže z dĤvodu teplotní roztažnosti zbytkĤ média v zaĜízení dojít k jeho poškození nebo k ohrožení zdraví osob.

Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0,5 baru (g) a velikosti vČtší než 25 mm nebo 1" (palec) se vztahuje platnost smČrnice o tlakovém zaĜízení (PED). Kapitola „Technické údaje“ v této pĜíruþce obsahuje dĤležité bezpeþnostní a provozní pokyny související se smČrnicí PED.

x MČĜicí pĜístroje popsané v této pĜíruþce jsou v souladu se smČrnicí EN 97/23/ES. x Všechny prĤtokomČry spoleþnosti Brooks Instrument spadají do rámce Kapaliny, skupina I. x MČĜicí pĜístroje vČtší než 25 mm nebo 1" (palec) jsou v souladu se smČrnicí PED, kategorii I, II nebo III x MČĜicí pĜístroje s velikostí 25 mm nebo 1" (palec) a menší spadají do rámce Správných technických postupĤ (SEP).

Elektrické/elektronické zaĜízení Brooks Instrument nesoucí znaþku CE bylo úspČšnČ testováno dle pĜedpisĤ pro elektromagnetickou kompatibilitu (smČrnice EMC þ. 2004/108/EC). VýbČru signálních kabelĤ pro použití se zaĜízením oznaþeném CE je nutné vČnovat zvláštní pozornost.

Kvalita signálních kabelĤ, kabelových prĤchodek a konektorĤ:

Brooks Instrument dodává vysoce jakostní kabely splĖující požadavky kvalitativního zaĜazení CE. Pokud chcete použít vlastní signální kabely, zvolte typy s kvalitním stínČním všech žil a v celé délce trasy. V pĜípadČ použití konektorĤ kruhových nebo tvaru „D“, musí mít tyto kovové stínČní. V pĜípadČ jejich použití, musí kovové kabelové prĤchodky být propojeny se stínČním kabelu. StínČní by mČlo být pĜipojené ke kovovému tČlesu pĜístroje nebo krytu, na obou koncích kabelu a po celém jeho obvodu. StínČní by mČlo být uzemnČno. PĜípojky vedoucí ke kartám podle norem jsou nekovová. Pro splnČní požadavkĤ pĜedpisĤ CE musí být použité kabely kompletnČ stínČny. StínČní by mČlo být uzemnČno. Konfigurace kontaktĤ je uvedena v pĜiloženém návodu k obsluze.

UPOZORNċNÍ: Tento pĜístroj obsahuje komponenty citlivé na poškození statickou elektĜinou. PĜi montáži, demontáži þi jiné manipulaci

s vnitĜními elektronickými obvody je potĜeba dodržovat pĜíslušné postupy.

Postup ošetĜování:

Odpojte pĜístroj od napájení.

Osoba provádČjící údržbu má být pĜi instalaci, vyjímání þi práci na desce plošných spojĤ nebo jiné vnitĜní elektronice uzemnČna zemnícím náramkem, nebo jiným vyhovujícím zpĤsobem.

Desky plošných spojĤ je nutné pĜepravovat v elektricky vodivém obalu. Plošné spoje vyjímejte z vodivého obalu až bezprostĜednČ pĜed instalací do pĜístroje! Plošné spoje vyjmuté z pĜístroje a urþené pro další využití, opČt neprodlenČ umístČte do ochranného obalu.

Poznámky:

Existence prvkĤ, citlivé na elektrostatické výboje (ESD) v pĜístrojích je þastým jevem. Prvky s technologií oxidu kovĤ (NMOS,SMOS) jsou používány u vČtšiny moderních elektronických zaĜízení. Zkušenosti dokazují, že i jen malé elektrostatické výboje mohou poškodit nebo zniþit tyto zaĜízení. U poškozených souþástek, jakkoli zdánlivČ pracujících bezchybnČ, dochází brzy k poruše.

Evropská smČrnice pro elektromagnetickou kompatibilitu (EMC)

Evropská smČrnice pro tlakové zaĜízení (PED)

Elektrostatický výboj (ESD)

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Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Dansk

Grundlæggende vejledninger

Læs disse før anvendelse!

Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation.

x For at garantere den passende kapacitet, er udstyrets installation, anvendelse, opdatering, programmering kun tilladt for kvalificeret personale.

Alle vejledninger skal læses før produktets installation, anvendelse og reparation.

x Hvis denne manual ikke er den passende udgave, kontakt venligst jeres leverandør for yderligere information. x Det anbefales at gemme denne manual for senere brug.

OBS.: Udstyret må ikke anvendes til andet end det er angivet i brugsanvisningen. Hvis denne regel brydes, kan der forekomme alvorlige

personskader eller brist på udstyret.

Hvis vejledningerne ikke er forståelig, kontakt venligst Deres Brooks repræsentant for at afklare problemet som er opstået.

x Overhold alle regler, som er markeret eller leveret sammen med udstyret. x Installer udstyret efter den angivne installationsvejledning og gældende lovgivning for anvendelsesområde. Udstyret må kun tilsluttes med kabler

og stik som overholder kravspecifikationerne i vejledningen.

x Ibrugtagning: (1) Åbn langsomt for trykket i systemet.. Åbn langsomt for alle procesventiler for at forhindre ustabil gas flow. (2) Tjek systemet for

lækage ved tilsluttet måleinstrumenter, samlinger og andet tilsluttet udstyr. Derefter øg trykket i systemet indtil arbejdstrykket er opnået.

x Før reparation tjek altid at procesledningen ikke står under tryk. Hvis der er brug for at udskifte defekte dele må kun kvalificeret personale udføre

arbejdet og af sikkerhedsmæssige årsager må der kun anvendes originale Brooks reservedele. Det er ikke tilladt at anvende reservedele eller udføre arbejde der på nogen måde kan ændre produktet fra dens oprindelige specifikationer. Manglende overholdelse af de foreskrevne procedurer kan resultere i brænd, og fare for elektrisk stød eller kortslutning.

x Af sikkerhedsmæssige årsager sørg for at alle sikkerhedsforanstaltninger er overholdt. Eksempelvis at alle afskærmninger eller anden form for

installationsbeskyttelse er lukket eller installeret ved normal drift.

Advarsel.: Ved brug af udstyr som anvendes til væske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket på samme tid i forbindelse med aftapning. Såfremt dette ikke overholdes, er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer.

Det Europæiske direktiv for trykudstyr (PED)

På alt udstyr hvis indgangstryk er større end 0,5bar (g) og større end 25 mm eller en tomme, gælder det europæiske direktiv for trykapparater. Manualens afsnit ”tekniske data” indeholder anvisninger om PED direktivet.

x I manualen angives måleinstrumenter der er tilpasset direktivet 97/23/EK EU. x Alle Brooks gennemstrømningsmålere tilhører væskegruppen nr. 1. x Alle målinstrumenter som er større end 25 mm eller en tomme beskrives i direktivet PED´s kategorier I, II eller III. x Alle målinstrumenter som er på 25 mm eller en tomme, eller mindre, beskrives i Sound Engineering Practice (SEP).

Det europæiske direktiv for elektromagnetisk kompatibilitet (EMC)

Alle Brooks instrumenter (elektrisk/elektronisk) som har CE markering er godkendt og testet ifølge om elektromagnetiske kompatibilitets forskrifter (EMC direktiv 2004/108/EC). OBS: Man skal være opmærksom på hvilken type kabler der bruges til CE mærket udstyr..

Om kvalitet af signalkabler, kabeltilslutninger og koblinger:

Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj. Tilslutningerne ”D” eller rundformede tilslutninger skal være afskærmet med skal af metal. Stikket skal være afskærmet på alle sider. Al afskærmning skal jordes.. Card Edge tilslutninger er ifølge standarden ikke metalliske.. De anvendte kabler og stik skal være 100 % afskærmet for at opfylde CE kravene.. De skal ligeledes jordes. For stik konfigurationen se vedlagte brugsvejledning.

Elektrostatisk afladning (ESD)

OBS.: Udstyret indeholder tilbehør som kan skades ved elektrostatisk elektricitet. Alle forskrifter skal overholdes ved kontakt med alle

elektriske komponenter både under drift og vedligeholdelse..

Behandlingsproceduren:

1. Sluk for al strømtilførsel til udstyret.

2. Personer som skal i kontakt med udstyret skal være jordet eller bære anden form for elektrisk beskyttende udstyr. Manglende overholdelse af dette kan medføre skader på alle elektriske komponenter.

3. Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader. Emballagen må ikke åbnes før komponenten skal installeres i udstyret. Ved afslutning af vedligeholdelse/reparation af udstyret, skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal på lager eller transporteres.

Bemærkninger:

Dette udstyr er ikke unik i den hensigt, at det indeholder for elektrostatisk afladning (ESD) sensitive reservedel. I de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel (NMOS, SMOS m.m.). Erfaringerne viser at selv den mindste statiske elektricitet kan skade, eller ødelægge disse instrumenter. Selv en fungerende elektrisk del kan have levetiden markant reduceret på grund af statisk elektricitet..

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Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Dutch

Essentiële instructies

Leeszevoordatuverdergaat!

Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale norme n. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.

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Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren, bedienen, updaten, programmeren en onderhouden.

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Lees alle instructies voordat u het product gaat installeren, bedienen en onderhouden. Als dit niet de juiste handleiding is, kijk dan op de achterzijde voor contactinformatie van uw vertegenwoordiger. Bewaar deze handleiding voor later.

WAARSCHUWING: gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding. Het niet naleven van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben.

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Als u één of meer instructies niet begrijpt, vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument.

•

Neem alle waarschuwingen, voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd.

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Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften. Sluit alle producten aan op de juiste elektrische voedings- en drukbronnen.

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Bediening: (1) Laat het systeem langzaam volstromen. Open de procesafsluiters langzaam om drukstoten te voorkomen. (2) Controleer op lekkages rondom de inlaat- en uitlaataansluitingen van de stromingsmeter. Als er geen lekkages zijn, kan het systeem op de bedrijfsdruk worden gebracht.

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Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren. Als vervangingsonderdelen nodig zijn, zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt. Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen. Niet goedgekeurde vervangingsonderdelen kunnen brand, elektrische schokken of een onjuiste werking tot gevolg hebben.

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Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen, behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert.

WAARSCHUWING: bij vloeistofstroomapparaten waarvan de inlaat- en uitlaatkleppen om welke reden dan ook gesloten zijn, moet de vloeistof volledig worden afgetapt. Als dat wordt nagelaten, kan dit leiden tot t hermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken.

PED-richtlijn (Pressure Equipment Directive)

Alle drukapparatuur met een interne druk van meer dan 0,5 barg en een diameter van meer dan 25 mm valt onder de PED-richtlijn.

In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED-richtlijn.

De meters die in deze handleiding worden beschreven, voldoen aan de Europese richtlijn 97/23/EG.

Alle stromingsmeters van Brooks Instrument vallen in groep 1.

Meters met een diameter van meer dan 25 mm voldoen aan de categorieën I, II of III van de PED-richtlijn.

Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap.

Elektromagnetische compatibiliteit (EMC)

De elektronische apparatuur van Brooks Instrument met de CE-markering is succesvol getest in overeenstemming met de EMC-voorschriften (richtlijn EMC 2004/108/EC). De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE-markering verdient speciale aandacht.

Kwaliteit van de signaalkabel, kabelafdichtingen en stekkers:

Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE-markering. Als u zelf voor signaalkabel zorgt, moet u altijd een volledig afgeschermde kabel gebruiken. Stekkers van het type “D” of ronde stekkers moeten zijn voorzien van een metalen afscherming. Indien nodig moeten metalen kabel afdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt. Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd. De afscherming moet aan de aardpotentiaal worden aangesloten. Card Edge Connectors zijn standaard niet van metaal. De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE-markering. De afscherming moet aan de aardpotentiaal worden aangesloten. Voor de pinconfiguratie: Raadpleeg de bijgevoegde handleiding.

Elektrostatische ontlading

OORZICHTIG: Dit instrument bevat elektronische compo nenten die gevoelig zijn voor stat ische elektriciteit. Neem de juiste procedures i n acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten. Procedure:

1. Schakel de voeding van de eenheid uit.

2. Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat o f ander intern apparaat mag worden

geïnstalleerd, verwijderd of aangepast.

3. Printplaten moeten in een geleidende verpakking worden vervoerd. De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking

worden gehaald. Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getrans porteerd, opgeslagen of teruggestuurd naar de fabriek.

Opmerkingen

Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading. De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie (NMOS, SMOS, enz.). Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen. Beschadigde componenten, zelfs als ze goed lijken te functioneren, raken eerder defect.

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Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Estonian

Olulised juhised

Enne kasutamist lugege hoolikalt läbi!

Brooks Instrument konstrueerib, valm istab ja kat setab oma t ootei d sellisel t, et ne ed va staksid paljude erine vate riiklike ja ra hvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.

x Nõuetekohase talitluse tagamiseks tohib toodet paigaldada, kasutada, täiustada, programmeerida ja hooldada ainult kvalifitseeritud personal.

x Enne toote paigaldamist, kasutamist ja hooldamist lugege kõik kasutusjuhised hoolikalt läbi. Kui käesolev kasutusjuhend ei vasta teie tootele, pöörduge

kohaliku edasimüüja poole, kelle kontaktandmed leiate kasutusjuhendi tagakaanelt. Hoidke see kasutusjuhend edaspidiseks alles.

HOIATUS: ärge kasutage seda instrumenti väljaspool kasutusjuhendis spetsifitseeritud piirväärtusi. Selle hoiatuse eiramine võib põhjustada

tõsiseid kehavigastusi ja/või kahjustada seadet.

x Kui te saa mõne juhise mõttest aru, pöörduge selgituste saamiseks kohaliku Brooks Instrument’i edasimüüja poole.

x Järgige kõiki hoiatusi, tähelepanule manitsusi ja juhiseid, mis on tootele peale kantud või tootega kaasa antud.

x Seadme paigaldamisel järgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju. Ühendage tooted

nõuetekohaste toite- ja surveallikatega.

x Talitlus: (1) Avage aeglaselt vool süsteemi. Vooluimpulsside vältimiseks avage tööventiilid aeglaselt. (2) Kontrollige, et voolukulumõõturi sisend- või

väljundühenduste ümber ei ole lekkeid. Kui lekkeid ei ole, laske süsteemil saavutada töösurve.

x Enne seadme hooldamist ve endu ge, et ko gu sü ste em on su r ve alt vaba sta tud. Varu osa sid toh ib vahe tada ainu lt kva lifit seer itud personal, kasutades selleks

Brooks Instrument’i poolt heakskiidetud varuosi. Mitteoriginaalvaruosade kasutamine ja ebapädev toimingute tegemine võivad kahjustada toote tööomadusi ja põhjustada riski tootmistegevuse ohutuse tagamisel. Originaalvaruosadele sarnaste osade kasutamine võib põhjustada tule- või elektrilöögiohtu või seadme väärtalitlust.

x Elektrilöögi- ja vigastuseohu vältimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal, va seadme hooldamisel kvalifitseeritud isikute

poolt.

HOIATUS: voolava vedelikuga seadmete kasutamisel – kui seadmega külgnevad sisend- ja väljundklapid on vaja mingil põhjusel sulgeda, tuleb seadmed vedelikust täiesti tühjaks lasta. Vastasel korral v õib vedelik soojuse mõjul paisuda niivõrd, et seade puru neb . See võib põhjustada tõsiseid kehavigastusi.

Euroopa surveseadmete direktiiv (PED)

Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele, mille sisesurve on üle 0,5 baari (g) ja läbimõõt üle 25 mm või 1 tolli.

x Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid. x Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97/23/EÜ nõuetele. x Brooks Instrument’i voolukulumõõturid kuuluvad vedelike 1. gruppi. x Mõõturid läbimõõduga üle 25 mm või 1 tolli vastavad surveseadmete direktiivi kategooriale I, II või III. x Mõõturitele läbimõõduga alla 25 mm või 1 tolli kohaldatakse häid inseneritavasid.

Euroopa elektromagnetilise ühilduvuse direktiiv (EMÜ)

Brooks Instrument’i (elektrilised/elektroonilised) seadmed, millele on omistatud CE-tähis, on edukalt läbinud asjakohased katsed ja vastavad elektromagnetilise ühilduvuse nõuetele (EMÜ direktiiv 2004/108/EC). Kuid signaalkaabli valimisel on vaja pöörata suurt tähelepanu CE-tähisega seadmetele.

Signaalkaabli, läbiviigutihendite ja konnektorite kvaliteet

Brooks Instrument turustab kõrgekvaliteedilisi kaableid, mis vastavad CE-sertifikaadi nõuetele. Olemasoleva kaabli kasutamisel jälgige, et kaabel oleks täielikult ümbritsetud varjestusega. „D” või „Ring“-tüüpi konnektorid peavad olema varustatud metallvarjestusega. Kus kohaldatav, tuleb kasutada metallist läbiviike, mis tagavad kaabli varjestuse ühenduse. Kaabli varjestus ühendatakse metallkesta või läbiviigutihendiga ja on mõlemast otsast kaitstud 360° ulatuses. Varjestus peab olema maandatud. Mikroskeemide servaühendused on üldjuhul mittemetallist. Vastavuse tagamiseks CE-sertifikaadi nõuetele peavad kasutatud kaablid olema 100% varjestatud. Varjestus peab olema maandatud. Klemmide konfigureerimine: vt komplekti kuuluvat kasutusjuhendit.

Elektrostaatiline laeng

TÄHELEPANU: seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente. Seadmesse paigaldatud trükkplaatide eemaldamisel ja paigaldamisel, samuti trükkp laa di v õi seadme ga muude toim ingute teostam isel järg ige nõu etekoha se kä sits emis e ju hiseid. Käsitsemisjuhised

1. Lahutage seade toiteallikast.

2. Enne trükkplaadi või mõne muu siseelemendi paigaldamist, eemaldamist või konfigureerimist peab personal olema maandatud läbi randmepaela või mõne

muu sobiva vahendi.

3. Trükkplaate transporditakse voolujuhtivas konteineris. Võtke trükkplaat kaitsvast konteinerist välja vahetult enne selle paigaldamist. Seadmest eemaldatud

trükkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks, hoiustamiseks või tehasesse tagasisaatmiseks.

Kommentaarid

See seade ei ole ainus, mis sisaldab staatilise elektri suhtes tundlikke elemente. Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente, mille valmistamiseks on kasutatud metalloksiidtehnoloogiat (NMOS, SMOS jne). Kogemused näitavad, et isegi väike kogus staatilist elektrit võib neid seadmeid kahjustada või isegi hävitada. Kuigi võib näida, et kahjustatud komponendid töötavad nõuetekohaselt, hakkavad talitlushäired ilmnema juba varakult.

C-5

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

Finnish

Perusohjeet

Lue ensin ohjeet huolellisesti!

Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.

Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkilö saa asentaa, käynnistää, päivittää, ohjelmoida ja huoltaa

laitteita. Lue kaikki käyttöohjeet koskien tuotteen asennusta, käyttöä ja huoltoa. Jos käyttöohje on puutteellinen, lisätietoja saa paikalliselta jälleenmyyjältä. Yhteystiedot löytyvät oppaan kansilehdestä. Säilytä ohjeet.

VAROITUS!: Käyttöohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja-arvoja ei saa ylittää. Rajoitusten

laiminlyönti voi aiheuttaa tuotteen rikkoutumisen ja/tai vakavan henkilövahingon vaaran.

x Jos ohjeissa on epäselvyyttä, ota yhteyttä Brooks Instrumentin edustajaan ongelman selvittämiseksi. x Noudata kaikkia laitteessa olevia tai si ihen liittyviä ohjeita, määräyksia ja varoit uksia. x Laittteen asennuksessa on noudatettava erityisiä asennusohjeita sekä voimassa olevia paikallisia ja kansainvälisiä määräyksiä.

Laitteet saa yhdistää vain soveltuvaan sähkö- ja paineverkkoon.

x Asennusohjeita: (1) Päästä virtaus hitaasti järjestelmään. Avaa venttiilit hitaasti, jotta virtaus pysyy tasaisena. (2) Tarkista, ettei

virtausmittarin sisään- ja ulosmenon vieressä ole vuotoa. Jos järjestelmässä ei ole vuotoa, aseta oikea käyttöpaine.

x Tarkista, että laitteeseen menevä paine on katkaistu ennen laitteen korjaamista välttääksesi äkillisen painepäästön aiheuttaman

loukkaantumisriskin. Mahdollisten varaosien tulee olla Brooks Instrume ntin hyväksymiä. Vain valtuutettu huoltohenkilö saa asentaa varaosat. Ei-hyväksyttyjen varaos ien käyttö voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin. Samoin eihyväksyttyjen varaosien käyttö voi aiheuttaa tulipalon, sähköiskun tai virhetoiminnan riskin.

x Varmista että kaikki kaikki laitteen ovet/luukut ovat suljettuina ja tarkista että suojakannet ovat paikoillaan estääksesi mahdollisen

sähköisku- ja loukkaantumisvaaran.

VAROITUS!: Jos järjestelmässä virtaa neste ja laitteen sisään- ja ulosm enoventtiilit pitää sulkea, laite on ensin

tyhjennettävä kokonaan. Tyhjentämisen laiminlyönti aiheuttaa nesteen lämpölaajenemista, joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan.

June, 2013

Eurooppalainen painelaitedirektiivi (PED)

Painelaitteet, joidenpaine on suurempi kuin 0,5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma , kuuluvat eurooppalaiseen painelaitedirektiiviin (PED).

x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. x Käyttöoppaassa kuvatut mittarit ovat 97/23/EC EU-direktiivin mukaisia. x Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhmään 1. Laitteet jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat

PED I, II, III kategorien mukaisia.

Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyvän konepajakäytännön (SEP) mukaisia.

Eurooppalainen direktiivi sähkömagneettisesta yhteensopivuudesta (EMC)

Brooks Instrumentin CE-merkin saaneet (sähkö/sähköiset) laitteet täyttävät EMC direktiivin vaatimukset ja testit sähkömagneettisesta yhteensopivuudesta (2004/108/EC EM C direkt i ivi) . Erityistä huomioita on kiinnitettävä CE-merkittyjen laitteiden käytössä olevien kaapelien valintaa n.

Kaapelien, kiinnikkeiden ja liittimien laatu:

Brooks Insturmentin kaapelit ovat korkealaatuisia ja täyttävät CE-merkintä direktiivin vaatimukset. Muun valmistajan kaapelia käytettäessä on käytettävä 100% suojattua kaapelia. Liittimien tulee olla häi ri ösuojattua tyyppiä. Tarvittaessa käytetään metallisia kiinnikkeitä kaapelin suojuksen kiinnittämiseen. Kaapelin suojakuoren pitää olla yhdistettynä metallisuojukseen tai laippaan ja sen pitää olla molemmista päistä suojattuna 360 päättyy maadoitukseen. Standardin mukaan korttien liittimet eivät ole metallisia. Käytettyjen kaapelien suojaus on oltava 100%, jotta se täyttäisi CEmerkinnän direktiivin vaatimukset. Suojaus päättyy maadoitukseen. Napojen järjestys: Katso liitteenä oleva käyttöopas.

Elektrostaattinen purkaus (ESD)

VAROITUS!: Tuote sisältää elektroniikkakomponentteja jotka voivat vahingoittua staattisesta sähköstä. Sisäisten piirilevyjen purkamisessa,asennuksessa ja käsittelyssä tulee noudattaa kaikkia määräyksiä ja ohjeita. Asennusohjeet:

1. Järjestelmän sähköt katkaistaan.

2. Laitteen kanssa työskentelevä henkilö on suojattava sähköiskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sisäosan asennusta, poistamista tai korjaamista.

3. Piirilevyt kuljetetaan konduktiivisessa pakkauksessa. Piirilevyt puretaan paketista juuri ennen asennusta. Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista, varastoimista tai palautusta varten.

Huomautukset:

Tuotteen herkkyys elektrostaattiselle purkauksel l e (ESD ) ei ole epätavallis ta. Suurin osa ele ktroni ikka tuo tteista sisältää komponentteja jotka hyödyntävät metallioksiditekniikkaa (NMOS, SMOS jne.) Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen. Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite näyttäisi toimivan normaalisti.

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. Suojaus

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

French

Instructions essentielles

A lire avant de commencer !

Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à votre programme de sécurité lors de l’installation, l’utilisation et l’entretien des produits Brooks Instrument.

• Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’installation, l’utilisation, la mise à jour, la programmation et l’entretien du produit.

• Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le présent manuel d’utilisation n’est pas le bon, consultez la dernière page de la couverture pour connaître le point de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y reporter par la suite.

AVERTISSEMENT : n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement.

• Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications.

• Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci.

• Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et conformément à la législation en vigueur au niveau local et national. Branchez tous les produits aux sources d’électricité et de pression agréées.

• Utilisation : (1) Faites lentement entrer le débit dans le système. Ouvrez progressivement les vannes de procédé pour éviter des pics de débits. (2) Vérifiez qu’il n’y a pas de fuite au niveau des branchements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation.

• Avant de procéder à l’entretien, assurez-vous que la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une pièce, assurez-vous que les pièces de rechange sont celles indiquées par Brooks Instrument et que des personnes qualifiées effectuent le re mplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.

• Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour éviter les chocs électriques et les blessures, sauf lorsque l’entretien est réalisé par des personnes qualifiées.

AVERTISSEMENT : dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermées pour une raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation thermique du fluide peut casser l’appareil et provoquer des blessures.

Directive européenne « équipements sous pression » (PED)

Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED.

• La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED.

• Les appareils de mesure de ce manuel sont conformes à la directive EN 97/23/EC.

• Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1.

• Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III.

• Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie » (SEP).

Compatibilité électromagnétique européenne (CEM)

L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique (directive CEM 2004/108/EC). Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utiliser avec l’équipement marqué CE.

Qualité du câble d’interconnexion, des presse-étoupes et connecteurs :

Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral. Les connecteurs rectangulaires ou circulaires utilisés doivent avoir un blindage métallique. S’il y a lieu, des presse-étoupes métalliques doivent faire office de serre-écran de câble. L’écran du câble doit être raccordé à l’enveloppe métallique ou au presse-étoupe et blindé aux deux extrémités sur 360 degrés. Le blindage doit s’achever sur une prise de terre. Les connecteurs de carte standards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se conformer à la certification

CE. Le blindage doit s’achever sur une prise de terre.

En ce qui concerne la configuration des broches, veuillez vous reporter au manuel d’utilisation joint.

ESD (décharge électrostatique)

ATTENTION : cet instrument contie nt des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être respectées pendant le retrait, l’installation ou la manipulati on des cartes de circuits imprimés ou des dispositifs internes. Procédure de manipulation :

1. L’alimentation électrique de l’appareil doit être coupée.

2. Le personnel doit être mis à la terre, au moyen d’une bande de poignet ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes de circuits imprimés ou autres dispositifs internes.

3. Les cartes de circuits imprimés doivent être transportées dans un récipient conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transport, le stockage ou le retour à l’usine.

Observations

Brooks Instrument n’est pas le seul à proposer des produits comportant des composants sensibles aux décharges électrostatiques. La plupart des produits électroniques modernes contiennent des composants qui utilisent des technologies à oxydes métalliques (NMOS, SMOS, etc.). L’expérience démontre que d’infimes quantités d’électricité statique suffisent à endommager ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne.

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Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

German

Wichtige Anweisungen

Bitte zuerst lesen!

Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.

• Um die entsprechende Leistung zu gewährleisten, setzen Sie qualifiziertes Personal für die Installation, den Betrieb, die Aktualisierung, Programmierung und Wartung des Produkts ein.

• Lesen Sie alle Anweisungen, bevor Sie das Produkt installieren, in Betrieb nehmen und warten. Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt, schauen Sie bitte auf der Rückseite nach den Kontaktdaten Ihres Vertriebsbüros vor Ort. Bewahren Sie dieses Handbuch auf, falls Sie später etwas nachschauen möchten.

WARNUNG: Dieses Gerät nicht außerhalb der in Bedienungs anleitung und Handbuch angegebenen Grenzen betreiben. Wird diese Warnung nicht

beachtet, kann dies zu schweren Personenschäden bzw. Schäden des Gerätes führen.

• Falls Sie Anweisungen nicht verstehen, wenden Sie sich zur Klärung an Ihren Brooks Instrument Vertreter.

• Befolgen Sie alle Warnhinweise und Anweisungen, die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden.

• Installieren Sie Ihr Gerät, wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gemäß der gültigen regionalen und nationalen Gesetze. Schließen Sie alle Produkte an eine geeignete Strom- und Druckluftversorgung an.

• Bedienung: (1) Langsam den Zufluss zum System starten. Die Ventile langsam öffnen, um einen sprunghaften Anstieg der Durchflussmenge zu verhindern. (2) Bereich der Anschlüsse (Zufluss und Ausfluss) des Durchflussmessers auf Undichtigkeiten überprüfen. Wenn das System dicht ist, auf Betriebsdruck hochfahren.

• Sicherstellen, dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird. Wenn Ersatzteile benötigt werden, stellen Sie sicher, dass qualifizierte Personen Ersatzteile verwenden, die von Brooks Instrument vorgegeben sind. Nicht genehmigte Teile und Verfahren können die Leistungsfähigkeit des Produkts beeinträchtigen und den sicheren Betrieb Ihres Prozesses gefährden. Ähnlich aussehende Austauschteile können zu Bränden, elektrischen Gefahren oder nicht sachgerechtem Betrieb führen.

• Stellen Sie sicher, dass alle Türen der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind, um Stromschläge und Personenschäden zu vermeiden, es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgeführt.

WARNUNG: Werden die Ein- und Auslassventile neben Durchfl ussmessgeräten aus irgendwelchen Gründen geschlossen, so müssen die Geräte

komplett entleert werden.

Durchflussmessgeraete muessen vor dem Schliessen von Ein- und Auslassventilen komplett entleert werden,

anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen; Personenschäden können die Folge sein.

Europäische Druckgeräterichtlinie (PED)

Alle Druckgeräte mit einem internen Druck von mehr als 0,5 bar (g) und einer Größe von mehr als 1in ( 1 in = 25,4 mm) unterliegen der Druckgeräterichtlinie.

Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits- und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie.

Messgeräte, die in diesem Handbuch beschrieben sind, erfüllen die europäische Richtlinie 97/23/EG.

Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1.

Messgeräte, die größer als 25 mm oder 1“ (inch) sind, erfüllen die Kategorien I, II oder III der Druckgeräterichtlinie (PED).

Messgeräte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP).

Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV)

Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2004/108/EC) erfolgreich bestanden. Dennoch muss bei der Wahl des Signalkabels für das Gerät mit CE-Zeichen auf folgende Dinge geachtet werden.

Qualität von Signalkabel, Kabeldurchführung und Anschlüsse:

Brooks Instrument liefert qualitativ hochwertige Kabel, die den Anforderungen für eine CE-Zertifizierung entsprechen. Sollten Sie eigene Kabel einsetzen, so sollte das Kabel überall mit einer 100%-Abschirmung versehen sein. D- oder Rundstecker sollten eine Metallabschirmung aufweisen. Wenn möglich, müssen Kabeldurchführungen aus Metall mit Kabelschirmgeflechts-Klemmen verwendet werden. Der Kabelschirm sollte an die Metallhülle oder -durchführung angeschlossen werden und an beiden Enden rundherum (360 °) abgeschirmt werden. Die Abschirmung sollte geerdet werden. Randstecker auf Platinen sind standardmäßig nicht aus Metall. Die verwendeten Kabel müssen mit einer 100 % Abschirmung versehen werden, um die CEVorgaben zu erfüllen. Die Abschirmung sollte geerdet werden. Klemmenbelegung: Siehe beigefügtes Handbuch.

ESD (Elektrostatische Entladung)

ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden. Verfahrensanweisung:

1. Trennen Sie das Gerät von der Stromversorgung.

2. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden.

3. Platinen sind in speziellen Behältern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport, zur Lagerung oder Rücksendung an das Werk gelegt werden.

Anmerkung

Dieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh aus, obwohl sie funktionsfähig zu sein scheinen.

C-8

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Greek

ǺĮıȚțȑȢ ȠįȘȖȓİȢ

ǻȚĮȕȐıĲİ ʌȡȚȞ ıȣȞİȤȓıİĲİ!

Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ ĲĮ ʌȡȠȧȩȞĲĮ ĲȘȢ ıİ ıȣȝȝȩȡĳȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠĲȪʌȦȞ. Ǿ ıȦıĲȒ İȖțĮĲȐıĲĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞĲȒȡȘıȒ ĲȠȣȢ ĮʌȠĲİȜİȓ ĮʌĮȡĮȓĲȘĲȘ ʌȡȠȨʌȩșİıȘ ĲȘȢ ȜİȚĲȠȣȡȖȓĮȢ İȞĲȩȢ ĲȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ. ȅȚ ʌĮȡĮțȐĲȦ ȠįȘȖȓİȢ ʌȡȑʌİȚ ȞĮ ĲȘȡȠȪȞĲĮȚ țĮȚ ʌȡȑʌİȚ ȞĮ İȞıȦȝĮĲȦșȠȪȞ ıĲȠ ʌȡȩȖȡĮȝȝĮ ĮıĳȐȜİȚĮȢ ĲȘȢ İȡȖĮıȓĮȢ ıĮȢ țĮĲȐ ĲȘȞ İȖțĮĲȐıĲĮıȘ ʌȡȠȧȩȞĲȦȞ ĲȘȢ Brooks Instrument.

x īȚĮ ıȦıĲȩ ĮʌȠĲȑȜİıȝĮ Ș İȖțĮĲȐıĲĮıȘ, ȜİȚĲȠȣȡȖȓĮ, İȞȘȝȑȡȦıȘ, ʌȡȠȖȡĮȝȝĮĲȚıȝȩȢ țĮȚ ıȣȞĲȒȡȘıȘ ʌȡȑʌİȚ ȞĮ ȖȓȞİĲĮȚ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ. x ǻȚĮȕȐıĲİ ȩȜİȢ ĲȚȢ ȠįȘȖȓİȢ ʌȡȚȞ İȖțĮĲĮıĲȒıİĲİ, ȜİȚĲȠȣȡȖȒıİĲİ țĮȚ ıȣȞĲȘȡȒıİĲİ ĲȠ ʌȡȠȧȩȞ. ǼȐȞ ĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ įİȞ İȓȞĮȚ ĲȠ ıȦıĲȩ İȖȤİȚȡȓįȚȠ,

ıȣȝȕȠȣȜİȣșİȓĲİ ĲȠ ʌȓıȦ İȟȫĳȣȜȜȠ ȖȚĮ ĲĮ ıĲȠȚȤİȓĮ

ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȂȘ ȜİȚĲȠȣȡȖİȓĲİ ĲȘ ıȣıțİȣȒ ĮȣĲȒ țĮș’ ȣʌȑȡȕĮıȘ ĲȦȞ ȠȡȓȦȞ ʌȠȣ ĮȞĮȖȡȐĳȠȞĲĮȚ ıĲȠ ǼȖȤİȚȡȓįȚȠ ȅįȘȖȚȫȞ țĮȚ ȁİȚĲȠȣȡȖȓĮȢ. Ǿ ȝȘ ıȣȝȝȩȡĳȦıȘ ȝİ ĲȘȞ ʌȡȠİȚįȠʌȠȓȘıȘ ĮȣĲȒ ȝʌȠȡİȓ ȞĮ ȠįȘȖȒıİȚ ıİ ıȠȕĮȡȩ ʌȡȠıȦʌȚțȩ ĲȡĮȣȝĮĲȚıȝȩ Ȓ/țĮȚ ȗȘȝȚȐ ıĲȠȞ İȟȠʌȜȚıȝȩ.

x Ȉİ ʌİȡȓʌĲȦıȘ ȝȘ țĮĲĮȞȩȘıȘȢ țȐʌȠȚĮȢ Įʌȩ ĲȚȢ ȠįȘȖȓİȢ ȗȘĲȒıĲİ įȚİȣțȡȚȞȓıİȚȢ Įʌȩ ĲȠȞ ĲȠʌȚțȩ ĮȞĲȚʌȡȩıȦʌȠ x ȉȘȡİȓĲİ ȩȜİȢ ĲȚȢ ʌȡȠİȚįȠʌȠȚȒıİȚȢ, ʌȡȠĳȣȜȐȟİȚȢ țĮȚ ȠįȘȖȓİȢ ʌȠȣ ĮȞĮȖȡȐĳȠȞĲĮȚ Ȓ ıȣȞȠįİȪȠȣȞ ĲȠ ʌȡȠȧȩȞ. x ǼȖțĮĲĮıĲȒıĲİ ĲȘ ıȣıțİȣȒ ȩʌȦȢ ʌȡȠȕȜȑʌİĲĮȚ ıĲȚȢ ȠįȘȖȓİȢ İȖțĮĲȐıĲĮıȘȢ ĲȠȣ ıȦıĲȠȪ İȖȤİȚȡȚįȓȠȣ ȠįȘȖȚȫȞ țĮȚ ıĲȚȢ țİȓȝİȞİȢ ĲȠʌȚțȑȢ țĮȚ İșȞȚțȑȢ

įȚĮĲȐȟİȚȢ. ȈȣȞįȑıĲİ ĲĮ ʌȡȠȧȩȞĲĮ ıĲȚȢ İțȐıĲȠĲİ ıȦıĲȑȢ ʌĮȡȠȤȑȢ ȡİȪȝĮĲȠȢ țĮȚ ʌȓİıȘȢ.

x ǻȚĮįȚțĮıȓĮ: (1) ǹĳȒıĲİ ȞĮ ȟİțȚȞȒıİȚ

ȡȠȒȢ. (2) ǼȜȑȖȟĲİ ȖȚĮ įȚĮȡȡȠȑȢ ĲȚȢ ıȣȞįȑıİȚȢ İȚıȩįȠȣ țĮȚ İȟȩįȠȣ ĲȠȣ ȡȠȩȝİĲȡȠȣ. ǹȞ įİȞ ȣʌȐȡȤȠȣȞ įȚĮȡȡȠȑȢ, ȖİȝȓıĲİ ĲȠ ıȪıĲȘȝĮ ȝȑȤȡȚ Ș ʌȓİıȘ ȞĮ ĳĲȐıİȚ ĲȘȞ țĮȞȠȞȚțȒ ʌȓİıȘ İȡȖĮıȓĮȢ.

x ȆȡȚȞ Įʌȩ ĲȘ ıȣȞĲȒȡȘıȘ ȕİȕĮȚȦșİȓĲİ ȩĲȚ ȖȡĮȝȝȒ

ĲȠ ʌȡȠıȦʌȚțȩ İȓȞĮȚ İȚįȚțİȣȝȑȞȠ țĮȚ ȤȡȘıȚȝȠʌȠȚİȓ ĮȞĲĮȜȜĮțĲȚțȐ ʌȠȣ ʌȡȠȕȜȑʌİȚ Ș Brooks Instrument. ȂȘ İȖțİțȡȚȝȑȞĮ ĮȞĲĮȜȜĮțĲȚțȐ țĮȚ İʌİȝȕȐıİȚȢ İȞįȑȤİĲĮȚ ȞĮ İʌȘȡİȐıȠȣȞ ĲȚȢ İʌȚįȩıİȚȢ ĲȠȣ ʌȡȠȧȩȞĲȠȢ țĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ țȓȞįȣȞȠ ȖȚĮ ĲȘȞ ĮıĳĮȜȒ ȜİȚĲȠȣȡȖȓĮ. ǹȞĲȚțĮĲĮıĲȐıİȚȢ ȝİ ĳĮȚȞȠȝİȞȚțȐ ȩȝȠȚĮ ĮȞĲĮȜȜĮțĲȚțȐ İȞįȑȤİĲĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ ʌȣȡțĮȖȚȐ,

x ǺİȕĮȚȦșİȓĲİ ȩĲȚ ȩȜĮ ĲĮ ĮȞȠȓȖȝĮĲĮ ĲȠȣ İȟȠʌȜȚıȝȠȪ İȓȞĮȚ țȜİȚıĲȐ țĮȚ ĲĮ ʌȡȠıĲĮĲİȣĲȚțȐ țĮȜȪȝȝĮĲĮ İȓȞĮȚ ıĲȘ șȑıȘ ĲȠȣȢ ʌȡȠțİȚȝȑȞȠȣ ȞĮ ĮʌȠĳİȣȤșİȓ

Ƞ țȓȞįȣȞȠȢ ȘȜİțĲȡȠʌȜȘȟȓĮȢ țĮȚ ʌȡȠıȦʌȚțȫȞ ĲȡĮȣȝĮĲȚıȝȫȞ, İțĲȩȢ İȐȞ İțĲİȜȠȪȞĲĮȚ İȡȖĮıȓİȢ ıȣȞĲȒȡȘıȘȢ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ.

ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȆȡȠțİȚȝȑȞȠȣ ȖȚĮ ıȣıțİȣȑȢ ȝİ ȡȠȒ ȡİȣıĲȠȪ, ȩĲĮȞ ȖȚĮ ȠʌȠȚȠȞįȒʌȠĲİ ȜȩȖȠ ʌȡȩțİȚĲĮȚ ȞĮ țȜİȓıȠȣȞ ȠȚ ȕĮȜȕȓįİȢ İȚıĮȖȦȖȒȢ țĮȚ İȟĮȖȦȖȒȢ țȠȞĲȐ ıĲȚȢ ıȣıțİȣȑȢ, ȠȚ ıȣıțİȣȑȢ ʌȡȑʌİȚ ȞĮ ĮʌȠıĲȡĮȖȖȚıĲȠȪȞ İȞĲİȜȫȢ. Ǿ ȝȘ ıȣȝȝȩȡĳȦıȘ ȝʌȠȡİȓ ȞĮ ʌȡȠțĮȜȑıİȚ șİȡȝȚțȒ įȚĮıĲȠȜȒ ĲȠȣ ȣȖȡȠȪ ʌȠȣ ʌİȡȚȑȤȠȣȞ, ȝİ ĮʌȠĲȑȜİıȝĮ ȞĮ ȡĮȖȓıİȚ Ș ıȣıțİȣȒ țĮȚ ȞĮ ʌȡȠțȜȘșȠȪȞ ʌȡȠıȦʌȚțȠȓ ĲȡĮȣȝĮĲȚıȝȠȓ

ĮȡȖȐ Ș ȡȠȒ ıĲȠ ıȪıĲȘȝĮ. ǹȞȠȓȟĲİ ĮȡȖȐ ĲȚȢ ȕĮȜȕȓįİȢ ȜİȚĲȠȣȡȖȓĮȢ ȖȚĮ ȞĮ ĮʌȠĳȪȖİĲİ ĲȚȢ ĮʌȩĲȠȝİȢ ĮȣȟȠȝİȚȫıİȚȢ

İʌȚțȠȚȞȦȞȓĮȢ ĲȠȣ ĲȠʌȚțȠȪ ĮȞĲȚʌȡȠıȫʌȠȣ. ĭȣȜȐȟĲİ ĲȠ İȖȤİȚȡȓįȚȠ ĮȣĲȩ ȖȚĮ ȝİȜȜȠȞĲȚțȒ ĮȞĮĳȠȡȐ.

İȡȖĮıȓĮȢ ȑȤİȚ Ĳİșİȓ İțĲȩȢ ʌȚȑıİȦȢ. Ȉİ ʌİȡȓʌĲȦıȘ ĮȞĲȚțĮĲȐıĲĮıȘȢ ĮȞĲĮȜȜĮțĲȚțȫȞ ȕİȕĮȚȦșİȓĲİ ȩĲȚ

țȓȞįȣȞȠ ȘȜİțĲȡȠʌȜȘȟȓĮȢ Ȓ ĮȞİʌĮȡțȒ ȜİȚĲȠȣȡȖȓĮ.

, ȤȡȒıȘ țĮȚ ıȣȞĲȒȡȘıȘ

ĲȘȢ Brooks Instrument.

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED)

ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦĲİȡȚțȒ ʌȓİıȘ ȐȞȦ ĲȠȣ 0,5 bar (g) țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪĲİȡȠȣ ĲȦȞ 25 mm Ȓ ĲȘȢ 1 ȓȞĲıĮȢ İȝʌȓʌĲİȚ ıĲȚȢ įȚĮĲȐȟİȚȢ ĲȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED).

x ȉȠ țİĳȐȜĮȚȠ ȆȡȠįȚĮȖȡĮĳȑȢ ĲȠȣ ʌĮȡȩȞĲȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİĲȚțȐ ȝİ ĲȘȞ ȅįȘȖȓĮ PED. x ȅȚ ȝİĲȡȘĲȑȢ ʌȠȣ ʌİȡȚȖȡȐĳȠȞĲĮȚ ıĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝȠȡĳȫȞȠȞĲĮȚ ȝİ ĲȘȞ x ǵȜĮ ĲĮ ȡȠȩȝİĲȡĮ ĲȘȢ Brooks Instrument ĮȞȒțȠȣȞ ıĲȘȞ ȠȝȐįĮ ȡİȣıĲȫȞ 1. x ȂİĲȡȘĲȑȢ ȝİȖĮȜȪĲİȡȠȚ Įʌȩ 25 mm Ȓ 1 ȓȞĲıĮ ıȣȝȝȠȡĳȫȞȠȞĲĮȚ ȝİ ĲȚȢ țĮĲȘȖȠȡȓİȢ ǿ, ǿǿ țĮȚ ǿǿǿ ĲȘȢ ȅįȘȖȓĮȢ PED. x ȂİĲȡȘĲȑȢ ȝİȖȑșȠȣȢ 25 mm Ȓ 1 ȓȞĲıĮȢ Ȓ țĮȚ ȝȚțȡȩĲİȡȠȚ țĮĲĮıțİȣȐȗȠȞĲĮȚ ıȪȝĳȦȞĮ ȝİ ĲȠȣȢ țĮȞȩȞİȢ ĲȘȢ ĲȑȤȞȘȢ (SEP).

İȣȡȦʌĮȧțȒ ȅįȘȖȓĮ 97/23/ǼȀ.

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȘȞ ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ ıȣȝȕĮĲȩĲȘĲĮ (EMC)

ȅ (ȘȜİțĲȡȚțȩȢ/ȘȜİțĲȡȠȞȚțȩȢ) İȟȠʌȜȚıȝȩȢ ĲȘȢ Brooks Instrument ʌȠȣ ĳȑȡİȚ ĲȠ ıȒȝĮ CE ȑȤİȚ ȣʌȠıĲİȓ İʌȚĲȣȤȫȢ ĲȚȢ įȠțȚȝȑȢ ʌȠȣ ʌȡȠȕȜȑʌȠȣȞ ȠȚ įȚĮĲȐȟİȚȢ ĲȘȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȘȞ ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ ıȣȝȕĮĲȩĲȘĲĮ (ȅįȘȖȓĮ 2004/108/EC ȖȚĮ ĲȘȞ EMC). ȆȐȞĲȦȢ ȤȡİȚȐȗİĲĮȚ ȚįȚĮȓĲİȡȘ ʌȡȠıȠȤȒ ıĲȘȞ İʌȚȜȠȖȒ ĲȠȣ țĮȜȦįȓȠȣ ıȒȝĮĲȠȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ʌȠȣ ĳȑȡİȚ ĲȠ ıȒȝĮ CE.

ȆȠȚȩĲȘĲĮ ĲȦȞ țĮȜȦįȓȦȞ ıȒȝĮĲȠȢ, ıĲȣʌȚȠșȜȚʌĲȫȞ țĮȚ ȕȣıȝȐĲȦȞ țĮȜȦįȓȦȞ

Ǿ Brooks Instrument ʌȡȠıĳȑȡİȚ ȣȥȘȜȒȢ ʌȠȚȩĲȘĲĮȢ țĮȜȫįȚĮ ĲĮ ȠʌȠȓĮ ʌȜȘȡȠȪȞ ĲȚȢ ʌȡȠįȚĮȖȡĮĳȑȢ CE. Ȉİ ʌİȡȓʌĲȦıȘ ʌĮȡȠȤȒȢ įȚțȠȪ ıĮȢ țĮȜȦįȓȠȣ ıȒȝĮĲȠȢ, ȤȡȘıȚȝȠʌȠȚİȓĲİ țĮȜȫįȚȠ ȝİ ʌȜȒȡȘ șȦȡȐțȚıȘ 100% ıİ ȩȜĮ ĲĮ ıȘȝİȓĮ. ǺȪıȝĮĲĮ ĲȪʌȠȣ «D» Ȓ țȣțȜȚțȐ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ ȝİĲĮȜȜȚțȒ șȦȡȐțȚıȘ. ȃĮ ȤȡȘıȚȝȠʌȠȚȘșȠȪȞ țĮĲȐ ʌȡȠĲȓȝȘıȘ ȝİĲĮȜȜȚțȠȓ ıĲȣʌȚȠșȜȓʌĲİȢ țĮȜȦįȓȦȞ ȖȚĮ ĲȘ ıĲİȡȑȦıȘ ĲȘȢ șȦȡȐțȚıȘȢ. ȃĮ ıȣȞįİșİȓ Ș ʌȡȑʌİȚ ȞĮ ĲİȡȝĮĲȓȗİȚ ıİ ȖİȓȦıȘ İįȐĳȠȣȢ. ȉĮ ȕȪıȝĮĲĮ ȐțȡȠȣ ĲȘȢ ʌȜĮțȑĲĮȢ İȓȞĮȚ İț țĮĲĮıțİȣȒȢ ȝȘ ȝİĲĮȜȜȚțȐ. ȉĮ ȤȡȘıȚȝȠʌȠȚȠȪȝİȞĮ țĮȜȫįȚĮ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ 100% șȦȡȐțȚıȘ ȖȚĮ ıȣȝȝȩȡĳȦıȘ ȝİ ĲȘȞ ʌȚıĲȠʌȠȓȘıȘ CE. Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ īȚĮ ĲȘ įȚȐĲĮȟȘ ĲȦȞ ĮțȓįȦȞ: ȈȣȝȕȠȣȜİȣșİȓĲİ ĲȠ ıȣȞȘȝȝȑȞȠ İȖȤİȚȡȓįȚȠ ȠįȘȖȚȫȞ.

șȦȡȐțȚıȘ ĲȠȣ țĮȜȦįȓȠȣ ıĲȠ ȝİĲĮȜȜȚțȩ țȑȜȣĳȠȢ Ȓ ıĲȣʌȚȠșȜȓʌĲȘ țĮȚ ȞĮ șȦȡĮțȚıĲİȓ țĮȚ ıĲĮ įȪȠ ȐțȡĮ țĮĲȐ 360 ȝȠȓȡİȢ. Ǿ șȦȡȐțȚıȘ

ĲİȡȝĮĲȓȗİȚ ıİ ȖİȓȦıȘ İįȐĳȠȣȢ.

ǾȜİțĲȡȠıĲĮĲȚțȒ İțțȑȞȦıȘ (ESD)

ȆȇȅĭȊȁǹȄǾ: Ǿ ıȣıțİȣȒ ĮȣĲȒ ʌİȡȚȑȤİȚ ȘȜİțĲȡȠȞȚțȐ İȟĮȡĲȒȝĮĲĮ ĲĮ ȠʌȠȓĮ ȝʌȠȡȠȪȞ ȞĮ ȣʌȠıĲȠȪȞ İȪțȠȜĮ ȕȜȐȕİȢ Įʌȩ ĲȠȞ ıĲĮĲȚțȩ

ȘȜİțĲȡȚıȝȩ. ȆȡȑʌİȚ ȞĮ ĮțȠȜȠȣșȠȪȞĲĮȚ ȠȚ ȠȡșȑȢ įȚĮįȚțĮıȓİȢ ȤİȚȡȚıȝȠȪ țĮĲȐ ĲȘȞ ĮĳĮȓȡİıȘ, ĲȠʌȠșȑĲȘıȘ Ȓ ȐȜȜȠ ȤİȚȡȚıȝȩ ĲȦȞ İıȦĲİȡȚțȫȞ ʌȜĮțİĲȫȞ țĮȚ įȚĮĲȐȟİȦȞ. ǻȚĮįȚțĮıȓĮ ȤİȚȡȚıȝȠȪ:

1. ĬȑıĲİ ĲȘ ıȣıțİȣȒ İțĲȩȢ ĲȐıİȦȢ.

2. ĭȡȠȞĲȓıĲİ ȖȚĮ ĲȘ ȖİȓȦıȘ ĲȠȣ ĲȣʌȦȝȑȞȦȞ țȣțȜȦȝȐĲȦȞ Ȓ ȐȜȜȘ İıȦĲİȡȚțȒ įȚȐĲĮȟȘ.

3. ȅȚ țȐȡĲİȢ ĲȣʌȦȝȑȞȦȞ țȣțȜȦȝȐĲȦȞ ʌȡȑʌİȚ ȞĮ ȝİĲĮĳȑȡȠȞĲĮȚ ıİ ıȣıțİȣĮıȓĮ Įʌȩ ĮȖȫȖȚȝȠ ȣȜȚțȩ. ȅȚ țȐȡĲİȢ įİȞ ʌȡȑʌİȚ ȞĮ ĮĳĮȚȡİșȠȪȞ Įʌȩ ĲȠ

ʌȡȠıĲĮĲİȣĲȚțȩ ʌİȡȓȕȜȘȝĮ ʌĮȡȐ ȝȩȞȠ ĮȝȑıȦȢ ʌȡȚȞ Įʌȩ ĲȘȞ ĲȠʌȠșȑĲȘıȘ. ʌȡȠıĲĮĲİȣĲȚțȒ ıȣıțİȣĮıȓĮ ȖȚĮ ȝİĲĮĳȠȡȐ, ĮʌȠșȒțİȣıȘ Ȓ İʌȚıĲȡȠĳȒ ıĲȠ İȡȖȠıĲȐıȚȠ.

ȆĮȡĮĲȘȡȒıİȚȢ:

Ǿ ȪʌĮȡȟȘ İȟĮȡĲȘȝȐĲȦȞ İȣĮȓıșȘĲȦȞ ıĲĮ ĳĮȚȞȩȝİȞĮ ESD (ȘȜİțĲȡȠıĲĮĲȚțȒȢ İțțȑȞȦıȘȢ) įİȞ İȓȞĮȚ ȝȠȞĮįȚțȩ ȤĮȡĮțĲȘȡȚıĲȚțȩ ĲȘȢ ıȣıțİȣȒȢ ĮȣĲȒȢ. ȅȚ ʌİȡȚııȩĲİȡİȢ ıȪȖȤȡȠȞİȢ ȘȜİțĲȡȠȞȚțȑȢ ıȣıțİȣȑȢ ʌİȡȚȑȤȠȣȞ İȟĮȡĲȒȝĮĲĮ ĲİȤȞȠȜȠȖȓĮȢ ȝİĲĮȜȜȚțȫȞ ȠȟİȚįȓȦȞ (NMOS, SMOS țȐ.). Ǿ ʌİȓȡĮ ȑȤİȚ ĮʌȠįİȓȟİȚ

ȝȚțȡȒ ʌȠıȩĲȘĲĮ ıĲĮĲȚțȠȪ ȘȜİțĲȡȚıȝȠȪ Įȡțİȓ ȖȚĮ ȞĮ ʌȡȠțĮȜȑıİȚ ȕȜȐȕİȢ Ȓ ȞĮ țĮĲĮıĲȡȑȥİȚ ĲȚȢ ıȣıțİȣȑȢ ĮȣĲȑȢ. ǼȟĮȡĲȒȝĮĲĮ ʌȠȣ ȣʌȑıĲȘıĮȞ

ȩĲȚ ȝȚĮ ȕȜȐȕȘ, ĮțȩȝȘ țĮȚ ĮȞ ȝȠȚȐȗȠȣȞ ȞĮ ȜİȚĲȠȣȡȖȠȪȞ ıȦıĲȐ, țȚȞįȣȞİȪȠȣȞ Įʌȩ ʌȡȫȚȝȘ ĮıĲȠȤȓĮ.

ʌȡȠıȦʌȚțȠȪ ȝİ ʌİȡȚțȐȡʌȚȠ Ȓ ȐȜȜȠ ĮıĳĮȜȑȢ țĮȚ țĮĲȐȜȜȘȜȠ ȝȑıȠ ʌȡȚȞ ĲȠʌȠșİĲȒıİĲİ, ĮĳĮȚȡȑıİĲİ Ȓ ȡȣșȝȓıİĲİ țȐȡĲİȢ

ȅȚ țȐȡĲİȢ ʌȠȣ ĮĳĮȚȡȑșȘțĮȞ ʌȡȑʌİȚ ȞĮ ĲȠʌȠșİĲȘșȠȪȞ ĮȝȑıȦȢ ıİ

C-9

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

Hungarian

AlapvetĘ utasítások

ElĘször olvassa el ezeket!

A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelelĘen kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál mĦködési tartományuknak megfelelĘen üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során. A megfelelĘ teljesítmény garantálása érdekében kizárólag szakképzett személyzet végezze a termék telepítését, üzemeltetését, frissítését, programozását és karbantartását. Valamennyi utasítást el kell olvasni a termék telepítése, üzemeltetése és szervizelése elĘtt. Amennyiben ez a kézikönyv nem a megfelelĘ kiadvány, a hátsó borítón keresse meg a helyi forgalmazót, és további tájékoztatásért lépjen kapcsolatba vele. ėrizze meg ezt a kézikönyvet késĘbbi tájékoztatásként.

FIGYELEM: Ne mĦködtesse a berendezést az üzemeltetési utasításban megadott üzemi tartományokon túl. Ennek megsértése súlyos

személyi sérüléshez vagy a berendezés meghibásodásához vezethet.

x Amennyiben a gépkönyv utasításai nem egyértelmĦek, lépjen kapcsolatba Brooks Instrument képviselĘjével, hogy tisztázzák a problémát. x Tartsa be a berendezésen feltüntetett vagy azzal együtt szállított összes figyelmeztetést, felhívást és utasítás. x A megfelelĘ telepítési utasításban megadott utasítások valamint a hatályos helyi és nemzeti elĘírások szerint telepítse a berendezést. A

termékeket kizárólag a megfelelĘ elektromos és nyomásellátó forrásra kösse.

x Menete: (1) Lassan helyezze nyomás alá a rendszert. Lassanként nyissa ki az üzemi szelepeket az áramlásingadozás elkerülése érdekében. (2)

EllenĘrizze, nincs-e szivárgás az áramlásmérĘ be-, és kimeneti bekötéseinél. Ha nincs szivárgás, töltse fel a rendszert az üzemi nyomásra.

x Szervizelés elĘtt mindenképpen ellenĘrizze, hogy az üzemi vezeték nincs-e nyomás alatt. Amennyiben cserealkatrészekre van szükség,

mindenképpen szakképzett személynek kell kezelnie a Brooks Instrument által meghatározott cserealkatrészeket. A nem engedélyezett alkatrészek és tevékenységek befolyásolhatják a termék teljesítményét, illetve veszélyeztethetik a biztonságos üzemeltetést. A pusztán hasonló alkatrészekkel történĘ helyettesítés tüzet, áramütésveszélyt vagy elégtelen mĦködést eredményezhet.

x A berendezés összes ajtaja mindenképpen legyen zárva, a védĘburkolatok pedig legyenek a helyükön az áramütés és a személyi sérülések

elkerülése érdekében, kivéve, ha szakképzett szakember végez rajta karbantartási munkákat.

FIGYELEM: Folyadékot áramoltató berendezések esetében, ha bármilyen okból el kell zárni a berendezés melletti ki-, és belépĘ

szelepeket, a berendezést teljesen le kell üríteni. Ennek elmulasztása a folyadék hĘtágulását okozhatja, ami károsíthatja a berendezést, és személyi sérüléshez vezethet.

Nyomástartó berendezésekre vonatkozó európai irányelv (PED)

Minden 0,5 bar-nál (g) magasabb belsĘ nyomású és 25 mm-nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv (PED) hatálya alá tartozik.

x A gépkönyv „MĦszaki adatok” fejezete tartalmaz a PED irányelvre vonatkozó utasításokat. x A gépkönyvben megadott mérĘeszközök megfelelnek a 97/23/EK EU irányelvnek. x Minden Brooks átfolyásmérĘ az 1-es folyadékcsoportba tartozik. x A 25 mm-nél vagy 1 hüvelyknél nagyobb mérĘeszközök megfelelnek a PED I, II, vagy III kategóriának. x A 25 mm-es illetve 1 hüvelykes vagy kisebb mérĘeszközök az elfogadott mérnöki gyakorlatot (SEP) követik.

Elektromágneses kompatibilitásra vonatkozó európai irányelv (EMC)

A Brooks Instrument CE jelölést kiérdemelt (elektromos/elektronikus) berendezései sikeresen teljesítették az elektromágneses kompatibilitási követelményeket (2004/108/EC sz. EMC irányelv) vizsgáló teszteket. Ugyanakkor különös figyelmet kell fordítani a CE jelölésĦ berendezésekhez felhasznált jelkábelek kiválasztására.

A jelkábelek, kábelösszekötĘk, csatlakozók minĘsége:

A Brooks Insturment magas minĘségĦ kábeleket kínál, melyek megfelelnek a CE minĘsítés követelményeinek. Amennyiben saját jelkábelt alkalmaznak, olyat kell választani, amely 100%-os árnyékolással, teljes mértékben szĦrt. A „D” vagy „kör alakú” csatlakozóknak fémárnyékolóval árnyékoltnak kell lennie. Szükség esetén fém kábelösszekötĘket kell alkalmazni a kábelszĦrĘ rögzítésére. A kábelszĦrĘt a fém házhoz vagy hüvelyhez kell csatlakoztatni és mindkét felén 360°-ban le kell árnyékolni. Az árnyékolásnak földelésben kell végzĘdnie. A kártyákhoz tartozó csatlakozók szabványosan nem fémesek. Az alkalmazott kábeleknek 100%-és árnyékolással szĦrteknek kell lenniük, hogy megfeleljenek a CE minĘsítésnek. Az árnyékolásnak földelésben kell végzĘdnie. ÉrintkezĘ konfiguráció: Lásd a mellékelt kezelési utasítást.

Elektrosztatikus kisülés (ESD)

VIGYÁZAT: A készülék olyan alkatrészeket tartalmaz, melyek hajlamosak a sztatikus elektromosság okozta károsodásra. Be kell tartani

a megfelelĘ eljárásokat a belsĘ áramköri kártyák és eszközök eltávolítása, behelyezése vagy egyéb kezelése során. Kezelési eljárás:

1. A berendezést áramtalanítani kell.

2. A személyt földelni kell csuklópánttal vagy egyéb biztonságos és a célra alkalmas eszközzel, mielĘtt áramköri kártyát vagy egyéb belsĘ eszközt telepítene, venne ki, vagy állítana be.

3. A nyomtatott áramköri kártyákat vezetĘképes csomagolásban kell szállítani. A kártyák kizárólag közvetlenül a behelyezés elĘtt vehetĘk ki a védĘburkolatból. A kiszerelt kártyát haladéktalanul el kell helyezni a mozgatásra, raktározásra vagy a gyári visszaszállításra szolgáló védĘcsomagolásba.

Megjegyzések:

Nem egyedi jelenség, hogy a készülékben elektrosztatikus kisülésre (ESD) érzékeny alkatrészek találhatók. A legtöbb

eszközben fémoxid technológiás alkatrészek (NMOS, SMOS stb.) találhatók. A tapasztalatok azt igazolják, hogy még kis mértékĦ sztatikus elektromosság is károsíthatja, vagy tönkreteheti ezeket az eszközöket. A károsodott alkatrészek, még ha látszólag megfelelĘen mĦködnek is, kezdĘdĘ hibára utalnak.

C-10

korszerĦ elektronikus

June, 2013

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Italian

Istruzioni fondamentali

Leggerle subito!

La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento. Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l’installazione, il funzionamento e la manutenzione dei prodotti Brooks Instrument.

x Per garantire un adeguato rendimento l'installazione, il funzionamento, l’aggiornamento, la programmazione e la manutenzione del prodotto devono

essere eseguiti esclusivamente da personale specializzato.

x Leggere tutte le istruzioni prima dell’installazione, utilizzo e manutenzione del prodotto. Se questo manuale non è quello relativo al Vostro prodotto,

cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni. Conservare il presente manuale per future consultazioni.

ATTENZIONE: Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d’Uso. L’inosservanza può

causare gravi lesioni alle persone e/o danni all’apparecchiatura.

x Qualora le istruzioni del manuale non siano chiare, contattare un rappresentante della Brooks Instrument per chiarire il problema. x Rispettare tutti gli avvisi, le istruzioni e gli avvertimenti riportati sull’apparecchiatura o forniti insieme ad essa. x Installare l’apparecchiatura in base alle istruzioni riportate nel Manuale d’Uso e alle prescrizioni locali e nazionali in vigore. Collegare i prodotti

esclusivamente ad un’adeguata sorgente di pressione ed alimentazione elettrica.

x Procedimento: (1) mettere lentamente sotto pressione il sistema. Aprire lentamente le valvole di servizio per evitare l’oscillazione del flusso. (2) Controllare

che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso. Se non ci sono perdite, caricare il sistema alla pressione d’esercizio.

x Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione. Se avete bisogno di pezzi di ricambio, il personale

specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument. Attività e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza. La sostituzione con pezzi di ricambio non originali può causare incendi, pericolo di scosse elettriche o funzionamento improprio.

x Tutti gli sportelli dell’impianto devono essere chiusi, le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali,

tranne quando il personale specializzato esegue lavori di manutenzione.

ATTENZIONE: In caso di apparecchiature in cui scorre un liquido, se per qualsiasi motivo bisogna chiudere le valvole d’entrata e d’uscita accanto all’apparecchiatura, allora si deve svuotare completamente l’apparecchiatura. L’inosservanza può causare la dilatazione termica del liquido che può danneggiare l’apparecchiatura e provocare lesioni alle persone.

Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell ’ambito della Direttiva Europea relativa alle apparecchiature a pressione (PED).

x Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED. x Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97/23/CE. x Ogni flussimetro Brooks appartiene al gruppo di fluidi 1. x Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED.

Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice).

Direttiva europea relativa alla compatibilità elettromagnetica (EMC)

Direttiva europea relativa alle apparecchiature a pressione (PED)

Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.

Qualità dei cavi di segnale, dei pressacavi e dei connettori:

La Brooks Instrument offre cavi d’alta qualità conformi ai requisiti della certificazione CE. Qualora vengano utilizzati cavi di segnale propri, devono essere scelti con schermatura al 100% e interamente filtrati. I connettori „D” o „rotondi” devono essere schermati con schermatura metallica. In caso di necessità bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo. La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il cavo deve essere schermato su entrambi i lati a 360°. La schermatura deve essere effettuata con messa a terra. I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conformi alla marcatura CE. La schermatura deve essere effettuata con messa a terra. Configurazione pin: Vedi Manuale d’uso allegato.

Scarica elettrostatica (ESD)

ATTENZIONE: Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricità statica. Bisogna rispettare le adeguate procedure durante la rimozione, l’installazione o altra manovra delle schede del circuito elettrico interno. Procedura di manovra:

1. Togliere alimentazione elettrica all’apparecchiatura.

2. La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare, togliere o impostare la scheda del circuito elettrico o altri dispositivi interni.

3. Le schede del circuito stampato devono essere spedite in contenitori conduttivi. Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell’installazione. Le schede confezionate devono essere collocate immediatamente nell’imballaggio protettivo per la movimentazione, l’immagazzinamento o resa alla fabbrica.

Note:

È un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica (ESD). Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo-ossido (NMOS, SMOS, ecc.). Le esperienze dimostrano che l’elettrostaticità anche in piccola misura può danneggiare o rovinare gli strumenti. I componenti danneggiati, anche se all’apparenza funzionano correttamente, potrebbero manifestare il difetto rapidamente.

C-11

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Latvian

SvarƯga instrukcija

Pirms turpinƗt izlasiet!

„Brooks Instrument” projektƝ, ražo un pƗrbauda savus ražojumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj. UzstƗdot, lietojot „Brooks Instrument” izstrƗdƗjumus un veicot to apkopi, ir jƗievƝro šie norƗdƯjumi un jƗiekƺauj tie jǌsu drošƯbas programmƗ.

x Lai nodrošinƗtu pienƗcƯgu izstrƗdƗjuma sniegumu, izstrƗdƗjuma uzstƗdƯšanu, lietošanu, atjauninƗšanu, programmƝšanu un apkopi uzticiet veikt tikai

kvalificƝtam personƗlam.

x Pirms izstrƗdƗjuma uzstƗdƯšanas, lietošanas un apkalpošanas izlasiet visus norƗdƯjumus. Ja šƯ instrukciju rokasgrƗmata nav pareizƗ, izstrƗdƗjumam

atbilstošƗ rokasgrƗmata, lǌdzu skat. aizmugurƝjo vƗku, kur ir sniegta vietƝjƗ tirdzniecƯbas biroja kontaktinformƗcija.

BRƮDINƖJUMS! Nelietot instrumentu Ɨrpus Instrukciju un lietošanas rokasgrƗmatƗ norƗdƯtajiem parametriem. ŠƯ brƯdinƗjuma

neievƝrošanas rezultƗtƗ var rasties traumas un / vai aprƯkojuma bojƗjumi.

x Ja jǌs nesaprotat kƗdu no instrukcijƗm, sazinieties ar „Brooks Instrument” pƗrstƗvi un lǌdziet izskaidrot to. x IevƝrojiet visus brƯdinƗjumus, piesardzƯbas mƝrus un instrukcijas, kas norƗdƯti uz izstrƗdƗjuma vai piegƗdƗti kopƗ ar to. x UzstƗdiet aprƯkojumu tƗ, kƗ tas norƗdƯts attiecƯgajƗ instrukciju rokasgrƗmatƗ iekƺautajƗ uzstƗdƯšanas instrukcijƗ un atbilstoši piemƝrojamajƗm vietƝjƗm

un nacionƗlajƗm normƗm. Pievienojiet visus izstrƗdƗjumus pareiziem elektriskajiem un spiediena avotiem.

x Lietošana: (1) LƝnƗm uzsƗciet plǌsmu sistƝmƗ. Lai izvairƯtos no straujiem plǌsmas kƗpumiem, lƝnƗm atveriet procesa vƗrstus. (2) PƗrbaudiet, vai nav

noplǌdes ap plǌsmas mƝrƯtƗja ieplǌdes un izplǌdes savienojumiem. Ja noplǌdes nav, uzstƗdiet sistƝmƗ darba spiedienu.

x PƗrliecinieties par to, lai pirms instrumenta tehniskƗs apkopes bǌtu likvidƝts procesa lƯnijas spiediens. Ja ir nepieciešams veikt kƗdu daƺu nomaiƼu,

nodrošiniet, lai tiktu izmantotas „Brooks Instrument” norƗdƯtƗs daƺas un daƺu nomaiƼu veiktu kvalificƝts personƗls. Neatƺautu daƺu un procedǌru izmantošana var ietekmƝs ražojuma sniegumu un samazinƗt procesa drošƯbu. LƯdzƯgu, bet ne identisku daƺu nomaiƼas lietošana var izraisƯt ugunsgrƝka, elektrisko traucƝjumu riskus un nepareizu izstrƗdƗjuma darbƯbu.

x Nodrošiniet, lai bǌtu aizvƝrtas visas durvis un bǌtu pareizi uzstƗdƯti visi aizsargpƗrsegumi, tƗdƝjƗdi novƝršot elektrošoka un traumu risku. IzƼƝmums ir

gadƯjumi, kad kvalificƝts personƗls veic ražojuma apkopi.

BRƮDINƖJUMS! Ja šƷidrƗs plǌsmas ierƯþu tuvumƗ esošos ieplǌdes un izplǌdes vƗrstus kƗda iemesla dƝƺ ir jƗaizver, no ierƯcƝm ir jƗizlaiž

viss šƷidrums. PretƝjƗ gadƯjumƗ šƷidrums var termiski izplesties, pƗrraut ierƯci un radƯt traumas.

Eiropas spiedieniekƗrtu direktƯva (PED)

Uz visƗm spiedieniekƗrtƗm, kuru iekšƝjais spriegums pƗrsniedz 0,5 bar (g) un ir lielƗkas par 25 mm jeb 1” (collu), attiecas Eiropas spiedieniekƗrtu direktƯva (PED).

x ŠƯs rokasgrƗmatas tehnisko parametru nodaƺƗ ir sniegtas a PED DirektƯvu saistƯtƗs instrukcijas. x ŠajƗ rokasgrƗmatƗ aprakstƯtie mƝrƯtƗji atbilst EN DirektƯvas 97/23/EK prasƯbƗm. x Visi „Brooks Instrument” plǌsmas mƝrƯtƗji ietilpst 1. šƷidrumu grupƗ. x Uz 25 mm jeb 1” (collu) maziem un mazƗkiem mƝrƯtƗjiem attiecas labas inženierijas prakse (SEP).

x 25 mm jeb 1” (collu) mazi vai mazƗki mƝrƯtƗji atbilst PED kategorijai I, II vai III.

Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯva (EMS)

Brooks Instrument” (elektriskƗs / elektroniskƗs) iekƗrtas ar CE zƯmi ir izturƝjušas pƗrbaudi un atzƯtas par atbilstošƗm Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯvas (EMS) prasƯbƗm (EMS 2004/108/EC)

TomƝr, izvƝloties signƗlkabeli, kas tiks lietots kopƗ ar CE marƷƝjuma iekƗrtu, ir jƗievƝro Ưpaša uzmanƯbaSignƗlkabeƺa, kabeƺa blƯvslƝgu un savienotƗju kvalitƗte:

„Brooks Instrument” piegƗdƗ augstas kvalitƗtes kabeƺus, kas atbilst CE sertifikƗcijas tehniskajiem parametriem. Ja jǌs lietojat pats savu signƗlkabeli, tam ir jƗbǌt pilnƯbƗ, 100% ekranizƝtam. „D” un „apaƺƗ” tipa savienotƗjiem ir jƗbǌt aprƯkotiem ar metƗla ekranizƝjumu. Ja nepieciešams, ir jƗizmanto metƗla blƯvslƝgi ar kabeƺa ekranizƝjuma skavojumu. Kabeƺa ekranizƝjumam ir jƗbǌt savienotam ar metƗla apvalku un abƗs pusƝs aizsargƗtam 360 grƗdu diapazonƗ. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma. „Card Edge” savienotƗji standarta izpildƯjumƗ ir nemetƗla. Kabeƺiem ir jƗbǌt pƗrklƗtiem ar 100% ekranizƝjumu, lai tie atbilstu CE sertifikƗcijas prasƯbƗm. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma.

AttiecƯbƗ uz tapu konfigurƗciju: skat. pievienoto instrukciju rokasgrƗmatu.

ESD (elektrostatiskƗ izlƗde)

IEVƜROT PIESARDZƮBU! Šis instruments satur elektriskos komponentus, kas ir jutƯgi pret statisko elektrƯbu. IzƼemot un uzstƗdot iekšƝjƗs

ƷƝdes plates un ierƯces vai kƗ citƗdi darbojoties ar tƗm, ir jƗievƝro noteikta darba kƗrtƯba.

Darba kƗrtƯba:

1. IekƗrta jƗatslƝdz no barošanas.

2. Pirms jebkƗdas drukƗtas shƝmas kartes vai citas iekšƝjƗs ierƯces uzstƗdƯšanas, izƼemšanas vai regulƝšanas personƗlam, kas veiks šos darbus, ir jƗbǌt iezemƝtam, piem., izmantojot aproces vai citus drošus, piemƝrotus lƯdzekƺus.

3. DrukƗtƗs shƝmas kartes ir jƗtransportƝ vadošƗ iepakojumƗ. PlƗksnes no aizsargkorpusa drƯkst izƼemt tikai tieši pirms uzstƗdƯšanas. TransportƝjot, uzglabƗjot vai atgriežot rǌpnƯcƗ no izƼemtƗs plƗksnes ir nekavƝjoties jƗievieto aizsargiepakojumƗ.

KomentƗri

Instruments nav unikƗls tajƗ aspektƗ, ka tas satur pret ESD (elektrostatisko izlƗdi) jutƯgus komponentus. Vairums mǌsdienu elektroiekƗrtu satur komponentus, kuru ražošanƗ izmantota metƗla oksƯdu tehnoloƧijas (NMOS, SMOS u.c.). Pieredze rƗda, ka pat neliels daudzums statiskƗs elektrƯbas var nodarƯt bojƗjumus šƗdƗm ierƯcƝm vai pilnƯbƗ sabojƗt tƗs. BojƗtie komponenti pat tad, ja tie šƷietami darbojas pareizi, ir pakƺauti ƗtrƗkai atteicei.

C-12

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Lithuanian

Pagrindinơs instrukcijos

Perskaitykite prieš tĊsdami!

„Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bǌti tinkamai montuojami, eksploatuojami ir prižiǌrimi, kad ir toliau veiktǐ pagal jiems bǌdingus techninius parametrus. Toliau pateiktǐ nurodymǐ reikia laikytis ir Ƴtraukti juos Ƴ saugos programą montuojant, eksploatuojant ir prižiǌrint „Brooks Instrument“ produktus.

x Siekiant užtikrinti tinkamą veikimą, montuoti, eksploatuoti, naujinti, programuoti ir prižiǌrơti gaminƳ turi tik kvalifikuoti darbuotojai. x Perskaitykite visus nurodymus prieš montuodami, eksploatuodami ir prižiǌrơdami gaminƳ. Jei gavote netinkamą instrukciją, galiniame jos viršelyje žiǌrơkite

vietinơs prekybos atstovybơs kontaktinĊ informaciją. Išsaugokite šią instrukciją pasižiǌrơjimui ateityje.

ƲSPƠJIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio

Ƴspơjimo galite sunkiai susižeisti ir (arba) sugadinti Ƴrangą.

x Jei nesuprantate kokiǐ nors nurodymǐ, kreipkitơs Ƴ „Brooks Instrument“ atstovą, kad paaiškintǐ. x Paisykite visǐ Ƴspơjimo, perspơjimǐ ir nurodymǐ, pažymơtǐ ant gaminio arba pateiktǐ su juo. x Ʋrangą montuokite taip, kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose. Visus

gaminius junkite prie tinkamǐ elektros ir slơgio šaltiniǐ.

x Eksploatacija: (1) lơtai Ƴjunkite srautą Ƴ sistemą. Lơtai atidarykite proceso vožtuvus, kad išvengtumơte srauto antplǌdžiǐ. (2) Patikrinkite, ar nơra nuotơkiǐ

aplink srauto matuoklio Ƴleidimo ir išleidimo jungtis. Jei nuotơkiǐ nơra, sukurkite sistemoje darbinƳ slơg

x Prieš atlikdami priežiǌros darbus bǌtinai pašalinkite slơgƳ proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti darbuotojai naudotǐ „Brooks

Instrument“ nurodytas pakaitines dalis. Netinkamos dalys ir procedǌros gali pakenkti gaminio veikimui ir kelti pavojǐ saugiai jǌsǐ proceso eksploatacijai. Tik panašiai atrodantys pakaitalai gali sąlygoti gaisrą, elektros pavojus ar netinkamą veikimą.

x Užtikrinkite, kad visos Ƴrangos durelơs bǌtǐ uždarytos, o apsauginiai dangþiai uždơti, kad išvengtumơte elektros smǌgio ir sužeidimǐ, išskyrus kai kvalifikuoti

darbuotojai atlieka priežiǌros darbus.

ƲSPƠJIMAS: naudojant skysto srauto Ƴrenginius, jei dơl kokios nors priežasties prireikia uždaryti šalia Ƴrenginio esanþius Ƴleidimo ir išleidimo

vožtuvus, iš Ƴrenginio reikia išleisti visą skystƳ. To nepadarius galimas šiluminis skysþio plơtimasis, galintis sugadinti ƳrenginƳ ir sužeisti žmonơs.

Visa slơginơ Ƴranga, kurios vidinis slơgis didesnis nei 0,5 bar (g), o dydis didesnis nei 25 mm arba 1 colis, yra reglamentuojama slơginơs Ƴrangos direktyvos (PED).

x Šios instrukcijos dalyje „Techniniai duomenys“ pateikiami nurodymai, susijĊ su PED direktyva. x Šioje instrukcijoje aprašyti matuokliai atitinka Europos Sąjungos direktyvą 97/23/EB. x Visi „Brooks Instrument“ srauto matuokliai priklauso 1 skysþiǐ grupei. x Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I, II arba III kategoriją.

25 mm arba 1 colio ar mažesni matuokliai atitinka tinkamą inžinerijos praktiką (SEP).

Europos slơginơs Ƴrangos direktyva (PED)

CE ženklu pažymơta „Brooks Instrument“ (elektrinơ / elektroninơ) Ƴranga buvo sơkmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyvą 2004/108/EC). Bet reikia ypatingo dơmesio renkantis signalizavimo kabelƳ, kuris bus naudojamas su CE ženklu pažymơta Ƴranga.

Signalizavimo kabelio, kabeliǐ riebokšliǐ ir jungþiǐ kokybơ:

„Brooks Instrument“ tiekia kokybiškus kabelius, kurie atitinka CE sertifikavimo specifikacijas. Jei naudojate savo signalizavimo kabelƳ, jis turi bǌti visiškai ir visas ekranuotas 100 % ekranu. Naudojamos „D“ arba „apskrito“ tipo jungtys turi bǌti ekranuotos metaliniu ekranu. Jei taikoma, reikia naudoti metalinius kabeliǐ riebokšlius, užtikrinanþius kabelio ekrano suspaudimą. Kabelio ekraną reikia jungti prie metalinio apvalkalo ar riebokšlio ir ekranuoti abiejuose galuose 360 laipsniǐ. Ekranas turi baigtis Ƴžeminimu. Standartinơs kraštinơs jungtys yra ne metalinơs. Naudojami kabeliai turi bǌti ekranuoti 100 % ekranu, kad atitiktǐ CE sertifikavimą. Ekranas turi baigtis Ƴžeminimu. Keturiǐ kontaktǐ konfigǌracija: žr. pridơtą instrukciją.

Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai

ESD (elektrostatinis išlydis)

PERSPƠJIMAS: šiame prietaise yra elektroniniǐ komponentǐ, kuriuos gali sugadinti statinơ elektra. Išimant ar Ƴdedant vidines spausdintines plokštes ar Ƴrenginius, arba atliekant su jomis kitus darbus, reikia laikytis tinkamǐ darbo procedǌrǐ. Darbo procedǌra:

1. Atjunkite Ƴrenginio maitinimą.

2. Darbuotojai turi pasirǌpinti Ƴžeminimu naudodami riešo juostelĊ ar kitas saugias tinkamas priemones prieš Ƴdơdami, išimdami ar reguliuodami bet kokią

spausdintinơs plokštơs kortelĊ ar kitą vidinƳ komponentą.

3. Spausdintinơs plokštơs korteles reikia transportuoti laidžiame konteineryje. Neleidžiama išimti plokštơs iš apsauginio dơklo, nebent prieš pat Ƴdơjimą. Išimtas

plokštes reikia nedelsiant Ƴdơti Ƴ apsauginƳ konteinerƳ transportavimui ar saugojimui arba grąžinti Ƴ gamyklą.

Pastabos

Šis instrumentas nơra unikalus dơl jame esanþiǐ ESD (elektrostatiniam išlydžiui) jautriǐ komponentǐ kuriuose naudojama metalo oksidǐ technologija (NMOS, SMOS ir pan.). Patirtis rodo, kad net ir mažas statinơs elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti. Sugadinti komponentai, net jei atrodo, kad jie veikia tinkamai, anksti nustoja veikti.

Ƴ.

. Daugelyje šiuolaikiniǐ

elektroniniǐ gaminiǐ yra komponentǐ,

C-13

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Polish

Zalecenia wstĊpne

Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych. Te produkty muszą byü poprawnie instalowane, obsáugiwane oraz konserwowane, aby zapewniü ich prawidáowe dziaáanie zgodnie ze specyfikacją techniczną. Podczas instalowania, obsáugiwania i konserwowania produktów firmy Brooks Instrument naleĪy przestrzegaü nastĊpujących zaleceĔ:

x Aby zapewniü wáaĞciwe dziaáanie sprzĊtu, instalacja, obsáuga, aktualizacje, programowanie i konserwacja powinny byü wykonywane przez

przeszkolony personel.

x Przed instalacją, obsáugą i czynnoĞciami serwisowymi naleĪy zapoznaü siĊ ze wszystkimi zaleceniami producenta. Aby uzyskaü instrukcjĊ

obsáugi odpowiednią dla danego sprzĊtu naleĪy skontaktowaü siĊ z lokalnym przedstawicielem handlowym producenta. InstrukcjĊ obsáugi naleĪy zachowaü do póĨniejszego uĪycia.

OSTRZEĩENIE: Nie wolno przekraczaü podanych w instrukcji zakresów dziaáania urządzenia. Nieprzestrzeganie tego zalecenia

moĪe doprowadziü do powaĪnego zagroĪenia Īycia lub zdrowia personelu i / lub uszkodzenia sprzĊtu.

x JeĪeli jakieĞ zalecenia w instrukcji obsáugi urządzenia są niezrozumiaáe, prosimy o skontaktowanie siĊ z przedstawicielem firmy Brooks

Instrument, aby wyjaĞniü problem.

x NaleĪy postĊpowaü biorąc pod uwagĊ wszystkie ostrzeĪenia, uwagi i zalecenia umieszczone na produkcie lub doáączone do niego. x InstalacjĊ urządzenia naleĪy przeprowadziü zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowiązującymi lokalnymi i narodowymi

oznaczeniami. Wszystkie urządzenia moĪna podáączaü wyáącznie do odpowiednich Ĩródeá energii elektrycznej oraz ciĞnienia.

x Pierwsze czynnoĞci obsáugowe: (1) NaleĪy powoli wáą

wahaĔ przepáywu. (2) NaleĪy teraz sprawdziü, czy nie wystĊpują nieszczelnoĞci przy podáączeniach wejĞciowym i wyjĞciowym miernika przepáywu. JeĪeli nie ma Īadnych nieszczelnoĞci, moĪna zwiĊkszyü ciĞnienie w instalacji do wartoĞci ciĞnienia roboczego.

x Przed przystąpieniem do czynnoĞci serwisowych naleĪy upewniü siĊ, Īe ciĞnienie robocze jest odáączone. JeĪeli konieczna jest wymiana czĊĞci

zamiennych, naleĪy zawsze stosowaü czĊĞci zamienne specyfikowane przez firmĊ Brooks Instrument a czynnoĞci ich wymiany powinien w kaĪdym przypadku dokonywaü przeszkolony personel. Stosowanie nieautoryzowanych czĊĞci i procedur serwisowych moĪe niekorzystnie wpáynąü na dziaá do poĪaru, poraĪenia prądem lub nieprawidáowego dziaáania urządzenia.

x NaleĪy upewniü siĊ, Īe wszystkie otwory urządzenia są zamkniĊte a osáony umocowane na swoich miejscach, aby zapobiec obraĪeniom ciaáa lub

poraĪeniu prądem personelu. Zalecenie to nie dotyczy przeszkolonego pracownika wykonującego prace serwisowe lub konserwacyjne.

OSTRZEĩENIE: W przypadku mierników przepáywu cieczy, jeĪeli znajdujące siĊ na nich zawory wejĞciowe i wyjĞciowe mają byü z

jakiegoĞ powodu zamkniĊte, to urządzenie musi zostaü caákowicie opróĪnione z ciekáego medium. Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy, co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu.

anie produktu oraz zagroziü bezpieczeĔstwu instalacji. Korzystanie z podobnie wyglądających zamienników moĪe doprowadziü

Wszystkie urządzenia ciĞnieniowe pracujące przy ciĞnieniu wewnĊtrznym wzglĊdnym wiĊkszym niĪ 0.5 bara i wielkoĞci powyĪej 25 mm lub 1 cala podlegają dyrektywie europejskiej dotyczącej urządzeĔ ciĞnieniowych (PED).

x Rozdziaá „Specyfikacja techniczna” niniejszej instrukcji zawiera zalecenia dotyczące dyrektywy PED. x Mierniki opisane w tej instrukcji są zgodne z dyrektywą EN 97/23/EC. x Wszystkie mierniki przepáywu firmy Brooks Instrument naleĪą do 1-szej grupy cieczy. x Urządzenia pomiarowe o wielkoĞci powyĪej 25 mm lub 1 cala naleĪą do kategorii I, II lub III dyrektywy PED. x Urządzenia pomiarowe o wielkoĞci 25 mm lub 1 cala lub mniejsze podlegają zaleceniom „Uznanej Praktyki InĪynierskiej” (SEP).

Europejska dyrektywa dotycząca kompatybilnoĞci elektromagnetycznej (EMC)

Urządzenia elektryczne / elektroniczne firmy Brooks Instrument posiadające oznaczenie CE, przeszáy pozytywnie testy pod kątem speániania przez nich wymogów kompatybilnoĞci elektromagnetycznej (Dyrektywa EMC 2004/108/EC). JednakĪe szczególną uwagĊ naleĪy poĞwiĊciü przy doborze przewodów sygnaáowych, które mają byü stosowane z urządzeniami ze znakiem CE.

JakoĞü przewodu sygnaáowego, dáawic oraz záączy przewodu:

Firma Brooks Instrument dostarcza wysokiej jakoĞci przewody, które speániają wymagania zawarte w specyfikacji dla certyfikatu CE. JeĪeli stosuje siĊ wáasne przewody sygnaáowe, to powinny one byü w caáoĞci w peáni ekranowane. Záącza typu „D” lub okrągáe powinny zawieraü metalowy ekran. JeĞli to moĪliwe, naleĪy stosowaü metalowe dáawice przewodu zapewniające mocowanie jego ekranu. Ekran przewodu powinien byü poáączony z metalową osáoną lub dáawicą zapewniając caákowite, dookólne ekranowanie na obu koĔcach przewodu. Ekran przewodu powinien byü uziemiony. Záącza krawĊdziowe są standardowo niemetaliczne. Stosowane przewody muszą byü w peáni ekranowane zgodnie z certyfikatem CE. Ekran przewodu powinien byü uziemiony. Konfiguracja styków jest podana w niniejszej instrukcji obsáugi.

UWAGA: Urządzenie zawiera czĊĞci elektroniczne podatne na uszkodzenia spowodowane áadunkami elektrostatycznymi. Przy

obchodzeniu siĊ z wewnĊtrznymi podzespoáami i czĊĞciami elektronicznymi naleĪy przestrzegaü nastĊpujących zasad postĊpowania:

1. NaleĪy odáączyü zasilanie od urządzenia.

2. Osoba wykonująca czynnoĞci musi zostaü uziemiona za pomocą opaski na przegubie dáoni lub w inny, bezpieczny sposób, zanim przystąpi do

instalacji, wyjĊcia lub regulacji obwodów drukowanych lub innych wewnĊtrznych podzespoáów elektronicznych urządzenia.

3. Obwody drukowane naleĪy transportowaü w przewodzącym pojemniku. Páytki drukowane naleĪy wyjmowaü z opakowania ochronnego

bezpoĞrednio przed ich montaĪem. Wymontowane páytki naleĪy niezwáocznie umieĞciü w opakowaniu ochronnym sáuĪącym do transportowania, skáadowania lub odsyáania do producenta.

Uwagi:

Fakt, Īe urządzenie zawiera czĊĞ elektronicznych zawiera komponenty wykonane w technologii tlenków metali (NMOS, SMOS itp.). Jak pokazuje praktyka, nawet niewielkie wyáadowanie elektrostatyczne moĪe uszkodziü lub zniszczyü takie urządzenie. Uszkodzone czĊĞci, nawet jeĪeli na pozór dziaáają poprawnie, szybko doprowadzają do nieprawidáowej pracy urządzenia.

Prosimy przeczytaü przed rozpoczĊciem uĪytkowania!

czyü przepáyw w instalacji. NastĊpnie powoli otworzyü zawory robocze tak, aby uniknąü

Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych (PED)

Wyáadowania elektrostatyczne (ESD)

ci nieodporne na wyáadowania elektrostatyczne (ESD) jest rzeczą normalną. WiĊkszoĞü nowoczesnych urządzeĔ

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Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Portuguese

Instruções Básicas

A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de protecção e segurança no trabalho.

x Para assegurar o desempenho adequado, a instalação, exploração, actualização e/ou manutenção do equipamento deve ser realizada,

exclusivamente, por pessoal qualificado.

x Antes de instalar, utilizar e/ou executar operações de manutenção devem ser lidas todas as instruções do equipamento. No caso do presente

manual não ser apropriado procure, na capa traseira, o distribuidor mais próximo e contacte-o para obter informações adicionais. Guarde este manual para futura referência.

ATENÇÃO: não sujeite o equipamento a condições fora das gamas de serviços indicadas. Ao não respeitar esta advertência poderá

provocar avarias no equipamento e/ou danos pessoais.

x Se as instruções deste manual não estiverem suficientemente claras, contacte o representante Brooks Instrument para esclarecer as suas

dúvidas.

x Tenha sempre presente todas as advertências, apelos e instruções indicadas no equipamento e/ou fornecidas junto com o mesmo. x A instalação do equipamento deverá ser efectuada cumprindo todas as instruções indicadas no manual assim como as normas e regulamentos

locais e nacionais vigentes. Ligue o equipamento exclusivamente a fontes de energia eléctrica e/ou pneumática adequadas.

x Procedimento: (1) Pressurize lentamente o sistema. Abra lentamente as válvulas para evitar variações bruscas de caudal. (2) Verifique se há

fugas nas ligações de entrada e saída do medidor de caudal. Se não detectar fugas, poderá colocar o sistema à pressão de trabalho.

x Antes de efectuar qualquer operação de manutenção verifique sempre a possibilidade do equipamento estar sob pressão. No caso de ser

preciso substituir peças, estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituição deverá ser efectuado por técnicos qualificados. Procedimentos e peças não conformes poderão alterar o desempenho do equipamento, danificá-lo ou colocar em risco a sua segurança ou de outros. Substituir peças por outras não originais, meramente semelhantes, poderá originar choques eléctricos, fogo ou em funcionamento inadequado.

x Deverá manter o equipamento intacto e fechado, verificando se as coberturas de protecção estão nos seus lugares devidos, de forma a evitar

choques eléctricos e/ou danos pessoais, excepto no caso de se tratar de um técnico qualificado e se estiver a executar trabalhos de manutenção.

ATENÇÃO: Se por qualquer razão for necessário fechar as válvulas a montante e jusante do equipamento, tenha em atenção que o

mesmo deverá ser pre viamente esvaziad o do fluído que o atr avessa. Esta obrig ação surge do fact o de existir a possi bilidade de ocorrer dilatação térmica do líquido, no interior do aparelho, podendo provocar danos pessoais ou materiais gr aves.

Ler antes de proceder!

Todos os equipamentos sujeitos a pressão interior superior a 0,5 bar (g) e com calibre superior a 25 mm (1 polegada) estão sob a vigência da directiva europeia de equipamentos sob pressão (PED).

x O capítulo "Dados técnicos" do manual contém instruções relativas à Directiva PED. x O caudalímetro objecto deste manual satisfaz a directiva 97/23/CE da UE. x Os caudalímetros Brooks pertencem ao grupo 1 de fluidos. x Os caudalímetros com calibre superior a 25 mm (1 polegada) pertencem às categorias PED I, II, ou III.

Os caudalímetros de 25 mm (1 polegada) ou menores seguem as “Boas regras de engenharia” (SEP).

Directiva Europeia sobre Compatibilidade electromagnética (EMC)

Directiva Europeia para equipamentos sob pressão (PED)

Os equipamentos (eléctricos/electrónicos) da Brooks Instrument que têm a marcação CE passaram os testes comprovativos dos requisitos de compatibilidade electromagnética (Directiva EMC número 2004/108/EC). Todavia, ao utilizar os aparelhos compete-lhe a escolha dos cabos de sinal adequados para os equipamentos com marcação CE.

Qualidade dos cabos de sinal, bucins e conectores:

A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marcação CE. No caso de utilizar os seus próprios cabos de sinal, assegure uma blindagem a 100%. Os conectores do tipo “D” ou "circular" têm que ser blindados por uma malha metálica. Se precisar de usar bucins, estes têm que permitir a crimpagem da malha/blindagem do cabo. A blindagem do cabo deve ser ligada ao corpo metálico ou bocal e assegurando a blindagem em 360°. A blindagem deve terminar numa ligação à terra. Os conectores ligados a cartões serão, em geral, não-metálicos. Os cabos utilizados devem ter fita de blindagem a 100% para satisfazer a marcação CE. A blindagem, deverá terminar numa ligação à terra.

Atribuição de pinos: Veja as instruções de operação anexas.

Descarga Electrostática (ESD)

ATENÇÃO: Alguns componentes deste equipamento são susceptíveis à acção da electricidade estática, podendo ficar danificados. Ao remover, colocar ou manipular placas de circuitos electrónicos deverá ter em atenção os seguintes procedimentos:

1. Desligar o equipamento da rede.

2. O utilizador, antes de qualquer intervenção que envolva os cartões de circuitos ou outros dispositivos internos, terá que se ligar à terra por meio duma bracelete de pulso ou outro dispositivo adequado.

3. Os circuitos impressos deverão ser transportados numa embalagem condutiva. Os cartões só deverão ser retirados da embalagem protectora imediatamente antes da sua inserção. O cartão retirado deverá ser recolocado imediatamente na embalagem protectora que servirá para o seu transporte, armazenagem ou retorno a fábrica.

Observações:

Tenha presente que este equipamento poderá não ser o único objecto capaz de ser portador de peças sensíveis a descargas electrostáticas (ESD). Na maioria dos dispositivos electrónicos Brooks encontram-se peças de tecnologia de óxidos metálicos (NMOS, SMOS, etc.). A experiência mostra que até pequenas quantidades de electricidade estática são capazes de danificar ou destruir esses dispositivos. Os componentes danificados, embora inicialmente funcionem aparentemente bem, acabam por ter falhas prematuramente.

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Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

Romanian

IndicaĠii de referinĠă

Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale. Aceste instalaĠii trebuie amplasate, exploatate úi întreĠinute corespunzător, pentru ca în toate situaĠiile, domeniul lor de lucru să corespundă operării normale. În ceea ce priveúte instalarea, operarea úi întreĠinerea produselor Brooks Instrument, indicaĠiile de mai jos trebuie respectate úi trebuie introduse in programul de protecĠia muncii.

x Pentru garantarea prestaĠiei corecte, instalarea, operarea, actualizarea, programarea úi întreĠinerea produsului poate fi realizată doar de către

personal calificat.

x InstrucĠiunile de instalare ale produsului trebuie citite integral, înainte de punerea în serviciu úi exploatarea sa. În măsura în care ediĠia acestui

manual nu este cea adecvată, identificaĠi pe ultima copertă coordonatele distribuitorului local úi pentru lămuriri suplimentare adresaĠi-vă acestuia. PăstraĠi acest manual pentru referinĠe ulterioare.

ATENğIE: Nu utilizaĠi instalaĠia în afara intervalului de funcĠionare indicat în instrucĠiunile de operare. Nerespectarea acestui lucru se

poate solda cu răniri grave de persoane sau defectarea instalaĠiei.

x În măsura în care indicaĠiile cărĠii maúinii nu sunt suficient de lămuritoare, luaĠi legătura cu reprezentantul Brooks Instrument pentru clarificarea

problemei.

x PăstraĠi toate avertismentele, avizele úi instrucĠiunile livrate odată cu instalaĠia sau inscripĠionate pe aceasta. x EfectuaĠi instalarea echipamentului în conformitate cu indicaĠiile de instalare corespunzătoare, respectiv cu respectarea prevederilor naĠionale.

Echipamentul se conectează exclusiv la surse de energie electrică úi de presiune corespunzătoare.

x Succesiune: (1) PresurizaĠi lent instalaĠia. DeschideĠi încetul cu încetul supapa de funcĠionare pentru evitarea fluctuaĠiilor de flux. (2) ControlaĠi

dacă nu sunt prelingeri la intrarea sau ieúirea debitmetrului de branúare. Dacă nu sunt scurgeri, presurizaĠi instalaĠia la presiunea de lucru.

x Înaintea exploat

schimb, este neapărat necesar ca manevrarea pieselor de schimb să fie făcută de personal cu calificare profesională agreat de Brooks Instrument. Utilizarea altor piese de schimb decât cele originale úi licenĠiate poate avea efecte asupra performanĠelor instalaĠiei úi asupra siguranĠei sale în exploatare. Utilizarea de piese asemănătoare de substituire poate avea ca rezultat pericol de incendiu úi electrocutare.

x În toate cazurile toate uúile instalaĠiei trebuie să fie închise, cuútile de protecĠie să fie puse la locurile lor, pentru evitarea electrocutării úi rănirii de

persoane, exceptând situaĠiile când un specialist efectuează lucrări de întreĠinere.

ATENğIE: În cazul instalaĠiilor cu flux de fluide, dacă din orice motiv este necesară închiderea valvelor de intrare úi ieúire, limitrofe instalaĠiei, instalaĠia trebuie complet golită. Neglijarea acestui lucru poate avea ca efect dilatarea termică a fluidului, care poate defecta instalaĠia úi poate produce răniri de persoane.

ării/ întreĠinerii, verificaĠi neapărat dacă conducta uzinală nu este sub presiune. În măsura în care este nevoie de piese de

Directiva europeană pentru instalaĠiile sub presiune (PED)

Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0,5 mbar (g) úi au mai mult de 25 mm sau 1 Ġol, cad sub incidenĠa normei europene corespunzătoare (PED).

x La capitolul "Date tehnice" din cartea maúinii se găsesc indicaĠiile corespunzătoare directivei PED. x Mijloacele de măsurare menĠionate în cartea maúinii corespund directivei 97/23/EK EU. x Toate debitmetrele Brooks corespund clasei 1 de fluide. x Mijloacele de măsurare mai mari de 25 mm sau 1 Ġol corespund categoriei PED I, II sau III. x Mijloacele de măsurare mai mici de 25 mm sau 1 Ġol se conformează practicii inginereúti acceptate (SEP).

Directiva europeană privitoare la compatibilitatea electromagnetică (EMC).

InstalaĠiile (electrice /electronice) ce poartă marca Brooks Instrument CE îndeplinesc cu succes cerinĠele testelor de verificare ale compatibilităĠii electromagnetice (Cf. directivelor europene EMC cu nr. 2004/108/EC). În acelaúi timp trebuie acordată o atenĠie deosebită la alegerea cablurilor de semnalizare utilizate pentru instalaĠiile ce poartă marcajul CE.

Calitatea cablurilor de semnalizare, a legăturilor prin cablu úi a conectoarelor:

Brooks Instrument oferă cabluri de calitate ridicată, care corespund cerinĠelor calitative ale CE. În măsura în care folosiĠi cabluri proprii, trebuie alese acelea care sunt 100% ecranate úi prevăzute cu filtre Conectoarele „D” sau cele „circulare” trebuie sa dispună de ecrane metalice. În caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu. Filtrul de cablu trebuie conectat la carcasa metalică sau manúon úi în ambele cazuri trebuie asigurată ecranarea la 360°. Ecranarea trebuie terminată cu o legare la pământ. Conform standardului, conectoarele aparĠinând plăcilor electronice nu sunt metalice. Cablurile folosite trebuie să fie 100% ecranate úi prevăzute cu filtre pentru a corespunde clasificării CE. Ecranarea trebuie terminată cu o legare la pământ. ConfiguraĠie de contact: Vezi instrucĠiunile de operare ataúate.

ATENğIE: InstalaĠia include piese care sunt predispuse la defectare sub influenĠa electricităĠii statice. Trebuie respectate metodele

corespunzătoare de extragere, instalare sau alte manipulări ale circuitelor electronice. Procedură de manipulare:

1. InstalaĠia trebuie scoasă de sub tensiune.

2. Înaintea de inserarea, scoaterea sau reglarea vreunei cartele electronice, sau a altui dispozitiv intern, persoana trebuie să se lege la pământ cu banda pentru articulaĠia mâinii sau alte dispozitive de siguranĠă disponibile pentru acest scop.

3. Cartelele cu cablaje electronice imprimate trebuie transportate în ambalaje anti-electrostatice (conductoare). Cartelele se pot scoate din ambalaj, doar nemijlocit înaintea amplasării lor. Cartela demontată trebuie pusă neîntârziat în ambalajul de protecĠie în vederea transportării, a depozitării sau returnării la producător.

ObservaĠii:

În echipamente se găsesc adesea componente sensibile la descărcare electrostatică (ESD). Majoritatea echipamentelor moderne includ componente electronice realizate în tehnologie metal-oxid semiconductor (NMOS, SMOS, etc.) ExperienĠa a dovedit că acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slabă intensitate. Componentele defectate, cu toate că în aparenĠă sunt funcĠionale, duc în timp la defecĠiuni incipiente.

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CitiĠi-le întâi pe acestea!

Descărcare electrostatică (ESD)

June, 2013

Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Slovak

Základné príkazy

Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu. Nižšie uvedené príkazy je potrebné dodržiavaĢ a zaþleniĢ do programu bezpeþnostných predpisov v priebehu inštalácie, prevádzky a údržby výrobkov Brooks Instruments.

• V záujme zabezpeþenia vyhovujúceho výkonu inštaláciu, prevádzku, programovanie, aktualizáciu a údržbu zariadení má vykonávaĢ výluþne odborne kvalifikovaný personál.

• Pred inštaláciou, prevádzkou a servisu zariadení je potrebné preþítaĢ všetky príkazy. Ak táto príruþka nie je správna, tak na zadnej strane treba nájsĢ miestneho distribútora, kontaktovaĢ ho pre ćalšie informácie. Pre neskoršie informácie uschovajte príruþku.

UPOZORNENIE: NeprevádzkovaĢ zariadenie v rozsahu mimo rozsahu uvedenom v prevádzkovej príruþke. Porušenie tohto oznámenia

môže maĢ za následok Ģažkú ujmu na zdraví a vedie k poškodeniu zariadenia.

x Ak príkazy v návode nie sú jednoznaþné, kontaktujte zástupcu Brooks Instrument na objasnenie problémov. x Dodržujte všetky upozornenia, príkazy a usmernenia uvedené na zariadení, alebo s ním dodané. x Zariadenia inštalujte podĐa návodu uvedeného v príkaze na inštaláciu, v súlade s miestnymi a národnými predpismi. Zariadenie pripojte výluþne

len na vyhovujúci elektrický a tlakový zdroj

x Postup: (1) Pomaly natlakujte systém. Prevádzkový ventil otvorte pomaly na zamedzenie kolísania prietoku. (2) Prekontrolujte tesnosĢ vstupného

a výstupného zapojenia prietokomeru. Keć nie je presakovanie, spoje sú tesné, naplniĢ systém na prevádzkový tlak.

x Pred vykonávaním servisných prác kontrolovaĢ, þi systém nie je pod tlakom. V prípade, že je potrebná výmena súþiastky, výmenu dielov,

urþených Brooks Instrument musí vykonaĢ kvalifikovaná osoba. Použitie nepovolených dielov a vykonávanie nepovolených aktivít ohrozujú bezpeþnosĢ prevádzvky a majú negatívny vplyv na výkon zariadenia. Nahradenie súþiastok len podobnými komponentmi môže maĢ za následok požiar, úraz elektrickým prúdom alebo nedostatoþnú funkciu zariadenia

x Všetky ochranné kryty, dvierka zariadenia majú byĢ zatvorené na zabezpeþenie ochrany proti úrazu elektrickým prúdom a proti poraneniam

obsluhy. Výnimku tvorí vykonávanie údržby kvalifikovaným odborníkom.

UPOZORNENIE: Pri zariadeniach s prietokom kvapalín, keć z akéhokoĐvek dôvodu je nutné uzavrieĢ vstupné a výstupné ventily, zariadenie je potrebné úplne vyprázdniĢ. Zanedbanie vypúšĢania má za následok poškodenie zariadenia s možnosĢou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne.

Európska smernica vzĢahujúca sa na tlakové zariadenia (PED)

x Všetky zariadenia s vyšším vnútorným pretlakom ako 0,5 bar (g), a väþšieho rozmeru ako 25 mm alebo 1 anglický palec, podliehajú pod

Európsku smernicu vzĢahujúcu sa na tlakové nádoby (PED).

x Kapitola "Technické údaje" návodu na obsluhu obsahuje príkazy vzĢahujúce sa na smernicu PED. x Meracie prostriedky uvedené v návode na obsluhu vyhovujú smernici 97/23/ES EÚ. x Všetky prietokomery Brooks patria do 1. skupiny kvapalín. x Meracie prístroje presahujúce rozmery 25 mm alebo 1 " spĎĖajú I., II., alebo III. kategóriu PED. x Meracie prístroje menšie alebo rovné ako 25 mm alebo 1 " zodpovedajú zaužívanej meracej praxi (SEP).

Európska smernica vzĢahujúca sa na elektromagnetickú kompatibilitu (EMC)

Elektrické / elektronické zariadenia Brooks Instrument, ktoré si zaslúžili znaþku CE, úspešne splnili skúšobné testy požiadaviek elektromagnetickej kompatibility (smernica EMC þ. 2004/108/EC). Pritom treba venovaĢ zvláštnu starostlivosĢ na výber signálnych káblov zariadenia, s oznaþením CE. Kvalita signálnych káblov, káblových spojov a prípojov: Brooks Instrument ponúka vysoko kvalitné káble, ktoré spĎĖajú požiadavky kvalitatívneho zaradenia CE. Ak použijete vlastné signálne káble, majú maĢ 100%-né tienenie, s plným filtrovaním. Prípojky "kruhové" alebo tvaru "D" majú maĢ kovové tienenie. V prípade potreby treba použiĢ kovové káblové spojky k upevneniu káblového filtra. Káblový filter treba pripojiĢ ku kovovému telesu alebo k puzdru, na oboch stranách zabezpeþiĢ tienenie v kruhu 360 °. Tienenie má byĢ ukonþené uzemnením. Prípojky vedúce ku kartám podĐa noriem sú nekovové. Použité káble, pre vyhovenie predpisom CE musia maĢ 100%-né filtrovanie tienením. Tienenie má byĢ ukonþené uzemnením. Konfigurácia kontaktov: Vić priložený návod na obsluhu. .

UPOZORNENIE: Prístroj obsahuje súþiastky, ktoré môžu byĢ poškodené od elektrostatických nábojov. Pri montáži, odstraĖovaní alebo

inej údržby vnútorných obvodových kariet je potrebné dodržiavaĢ príslušné postupy. Postup ošetrovania:

1. Zariadenie odpojiĢ od napájania.

2. Osoba vykonávajúca údržbu má byĢ uzemnená uzemĖujúcim náramkom, alebo iným, na túto prácu vyhovujúcim spôsobom pred vykonávaním inštalácie, demontáže a nastavenia obvodových kariet alebo iného vnútorného prostriedku.

3. Karty obvodov sa musia prepravovaĢ v elektricky vodivom balení. Karty sa môžu vyberaĢ z ochranného obalu výluþne len tesne pred montážou, zasunutím! Vybranú kartu okamžite treba umiestniĢ do ochranného obalu, urþeného pre dopravu, skladovanie, alebo pre spätnú prepravu do výrobného závodu.

Poznámky:

Existencia prvkov, ktoré sú citlivé na elektrostatické výboje (ESD) v prístroji je þastým javom. U väþšiny moderných elektronických prostriedkov sú použité prvky s technológiou oxidu kovov (NMOS, SMOS, atć.). Skúsenosti dokazujú, že aj nepatrné elektrostatické výboje poškodzujú, zniþia tieto prostriedky. Poškodené súþiastky, aj keć zdanlivo pracujú bez chyby, odkazujú na vznikajúce poruchy.

PreþítaĢ pred inštaláciou!

Elektrostatický výboj (ESD)

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Section C Essential Instructions

Installation and Operation Manual

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Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Slovene

Osnovna navodila

Najprej preberite jih

Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, korišþenju in vzdržavanju izdelkov proizvajalca Brooks Instrument.

x Za jemstvo ustreznega uþinka naj izkljuþno strokovno osobje opravlja instaliranje, korišþenje, osveženje, programiranje in vzdrževanje izdelka. x Potrebno je prebrati vsa navodila pred instaliranjem, korišþenjem in servisiranjem izdelka. V kolikor ta priroþnik ni ustrezna publikacija, na zadnji

strani poišþite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt. Prihranite ta priroþnik za poznejše informacije.

OPOMBA: Ne koristite napravo izven podroþja iz navodila za uporabo. Prekršek tega lahko privede do osebnih poškodb ali okvare

naprave.

x V kolikor navodila priroþnika niso enosmiselna, stopite v kontakt z zastopnikom društva Brooks Instrument, da razþistite problem. x Držite se vseh opozoril, povabil, navodil, ki so navedena na napravi ali skupaj z njim izporoþena. x Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje.. Izdelek spojite izkljuþno na

ustrezni izvir elektrike in obskrbo tlaka.

x Proces: (1) Poþasi položite sistem pod tlak. Poþasi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka. (2) Preverjajte, ima li curljanja pri

povezu vstopa in izstopa merilca toka. ýe ni curljanja, naplonite sistem na pogonski tlak.

x Pred servisom vsekakor preverjajte, ali je pogonski vod pod tlakom. ýe je potreben rezervni del, svekakor strokovna oseba mora rokovati z

rezervnimi deli odrejenimi od Brooks Instrument. Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na uþinek izdelka, oziroma ugrožavajo varnostni pogon. Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico požar, nevarnost elektiþnega šoka ali nedovoljno funkcioniranje.

x Vsa vrata naprave svekakor morajo biti zaprta, zašþitni ovitki morajo biti na svojem mestu zaradi izogibanja šoku in osebnim poškodbam, razen,

þe na njej strokovnjak opravlja dela vzdrževanja.

OPOMBA: V primeru naprave za tok tekoþine, þe je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi,

naprava se mora celotno izprazniti. Zamuda tega lahko provzroþi toplotno proširjenje tekoþine, kar poškoduje napravo in lahko povrzoþi osebno poškodbo.

Vsaka naprava ohranjanja pritiska z notranjim pritiskom veþ od 0,5 bara (g) in veþjim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska (PED).

x Poglavje priroþnika „Tehniþni podatki” vsebuje navodila, ki se nanašajo na smernice PED. x Merilni instrumenti navajani v priroþniku ustrezajo smernicam EU številke 97/23/EK x Vsaki merilec pretoka Brooks sodi v skupino tekoþin številke 1. x Merilni instrumenti veþji od 25 mm ali 1 palca ustrezajo kategriji PED I, II, ali III. x Merilni instrumenti manjši od 25 mm oziroma 1 palca ali manjši sledijo sprejeti inženjeski praksi (SEP).

Naprave Brooks Instrument, ki so zaslužile CE oznaþbo (elektriþni/elektronski) so uspešno izpolnile testove zahteve o elektromangnetni kompatibilnosti (št. 2004/108/EC smernice EMC) . Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla, ki se uporabljajo za naprave z oznaþbo CE.

Kakaovost signalnih kablov, povezav kablov, prikljuþkov:

Brooks Insturment nuja kabele visoke kakovosti, ki ustrezajo zahtevam kvalificiranja CE. V kolikor se uporbalja lastni signalni kabel, treba je izbrati, ki za 100 % senco v polni meri filtriran. Prikljuþki „D” „olika kroga” morajo biti zasenþeni kovonskom sencom. ýe bo potrebno, uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba prikljuþiti na kovinsko ohišje ali plašt in na obe polovici je treba senþiti v 360°. Senþenje mora završiti v ozemljitvi. Prikljuþki, ki sodijo karitcam normalno nisu kovinskik. Korišþeni kabli moraju biti filtrirani s 100 % senco, da odgovarjajo CE kvalifikaciji. Sencanje mora imat konec v ozemljitvi. Konfiguracija stika: Vidi priloženo navodilo za uporabo.

OPOZORILO: Naprava vsebuje take sestavne dele, ki so naklonjeni k poškodbi od statiþne elektrike. Treba se je držati ustreznih

postopkov pri odstranjevanju, vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov. Posotpek rokovanja:

1. napravo je treba izklopiti iz elektriþnega toka.

2. Osebo je treba ozemljiti zapestnim pašþekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala, jemala, ali nastavila kartico za tokovni krog ali drugo notranjo opremo.

3. Tiskane kartice tokovnega kroga je treba izporoþiti v konduktivni embalaži. Karte so odstranjive izkljuþno neposredno pred vlogom iz zašþitne embalaže ven. Izjemljeno kartico nemudoma staviti v zašþitno embalažo za gibanje, skladišþenje ali pošiljanje nazaj.

Opombe:

Nije poseben pojav, da se v napravi nahajajo obþutljivi sestavni deli na elektrostatiþno pražnjenje (ESD). V veüem delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo (NMOS, SMOS itd..). Izkustva potrjujejo, da majhna statiþna elektrika more poškodovati ali uniþiti ta sredstva. Oškodovani rezervni deli, þe na videz dobro delajo, nakažejo zaþetno napako.

Europske smernice za naprave ohranjanja pritiska (PED)

Evropska smernica za Elektromagnetno kompatibilnost (EMC)

Elektrostatiþno izpražnjenje (ESD)

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Installation and Operation Manual

Section C Essential Instructions

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

Spanish

Instrucciones básicas

¡Léalos primero!

El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando, operando y mantenimiento los productos Brooks Instrument.

x Para asegurar el adecuado rendimiento, para instalar, operar, actualizar, programar y mantener tiene que realizarse exclusivamente por una persona

calificada.

x Antes de la instalación, operación y servicio del producto leer todas las respectivas instrucciones. Si el presente manual no es la adecuada publicación,

busque al distribuidor local que figura en la contraportada y póngase en contacto con él para obtener informaciones. Guarde el presente manual para tener informaciones también en el futuro.

ATENCIÓN: No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento. El incumplimiento de estas últimas

puede conducir a graves daños personales o a la avería del equipo.

x Si las instrucciones del manual no son evidentes, póngase en contacto con el representante de Brooks Instrument para aclarar el problema x Observar todas las alertas, advertencias e instrucciones indicadas en el equipo o suministradas con el mismo. x Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalación y con las pautas de las normas

vigentes locales e internacionales. Conectar el producto exclusivamente a la adecuada fuente eléctrica y presión.

x Proceso: (1) Colocar lentamente flujo en el sistema. Abrir lentamente las válvulas de proceso para evitar oscilación del flujo. (2) Verificar si ha y fuga

alrededor de las conexiones de entrada y salida del flujómetro, Si no hay, llenar el sistema con la presión de operación.

x Antes de efectuar el servicio, verificar si hay presión o no en la tubería de la red. Si se requiere realizar un recambio de piezas, solamente el personal

calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro. El recambio realizado con piezas sólo similares pueden traer como consecuencias incendios, choques eléctricos o funcionamiento bajo.

x Todas las puertas de la instalación deben estar cerradas, las cubiertas de protección tienen que hallarse en el debido sitio con el fin de evitar los daños

personales y los choques eléctricos, salvo cuando un especialista efectúa el mantenimiento.

ADVERTENCIA: En caso de instalaciones que circulen líquido, si por cualquier razón se hubiera de cerrar las válvulas de entrada y salida situadas al lado del equipo, dichas instalaciones deberán ser completamente vaciadas. La omisión de esto último puede provocar la dilatación térmica del líquido, lo que puede dañar al equipo y conducir a daños personales.

Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión (PED).

x El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x Los instrumentos de medición indicados en el Manual responden a las EN directivas 97/23/EC. x Todos los flujómetros Brooks pertenecen a la categoría 1 del grupo de fluidos. x Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED x Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP).

Directriz Europea respecto a la Compatibilidad Electromagnética (EMC)

Directriz Europea de los Equipos de Presión (PED)

Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC 2004/108/EC). Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE.

Calidad de los cables de señal, piezas de unión de cable y conectores:

El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE. Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%. Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable. Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°. El blindaje debe terminar en tierra. Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE. El blindaje debe terminarse en tierra. Configuración de contacto: Véase Instrucciones de operación adjuntas.

Descarga Electroestática (ESD)

PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática. Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos Proceso de operación:

1. Desconectar la fuente eléctrica de la unidad.

2. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o ajustar el circuito impreso eléctrico u otro medio interno.

3. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica.

Notas:

Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial.

C-19

Section C Essential Instructions

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng

Part Number: 541B161AAG

Brooks® GF40/GF80GF81 Devices

June, 2013

Swedish

Väsentliga anvisningar.

Läs detta innan du fortsätter !

Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.

x För att garantera angiven funktion, använd kvalificerad personal till att installera, handha, uppgradera, programmera och serva produkten. x Läs alla instruktioner innan produkten installeras, startas upp och underhålls. Om du finner att denna instruktionshandbok inte är den rätta

instruktionsboken, titta på i slutet av pärmen för information om hur man kan kontakta lokala representanter. Spara denna instruktions manual för senare behov.

VARNING: Kör inte detta instrument utanför dess specifikationer som är angiven i Instruktionsboken. Undvikande att ta denna varning

kan leda till allvarliga personliga skador och / eller skada utrustningen.

x Om du inte förstår någon av dessa instruktioner, kontakta din representant för Brooks Instrument för klarläggande. x Följ alla varningar och instruktioner som följer med leveransen av denna produkt. x Installera din utrustning på sättet som anges i den gällande handbokens installationsanvisningar och enligt tillämpliga lokala och nationella föreskrifter.

Koppla varje produkt till föreskriven ström- och tryckkällan.

x Igångsättning: (1) Koppla långsamt på flöde i systemet. Öppna processventiler sakta för att undvika för höga flöden. (2) Kontrollera läckor vid mätarens

anslutningar för in- och utlopp. Om inget läckage förekommer, kör systemet upp till drifttrycket.

x Kontrollera att processledningens tryck är bortkopplat före service. I fall det behöves kompletteras med nya delar, se till att komponenter föreskrivna av

Brooks Instrument används. Samt att kvalificerad personal utför arbetet. Ej rekommenderade komponenter och åtgärder kan påverka produktens prestanda och sätta din driftsäkerhet på spel. ”Felaktiga” ersättningar kan orsaka eld, elektriska skador samt felaktig funktion.

x Se till att anordningens kåpor och skyddslock ligger på sin plats med syfte att förebygga elektriska kontakt och personliga skador; det enda undantag

gäller när underhållsarbete utförs av kvalificerad personal.

VARNING: I fall av - flödesmätare / regulatorer för vätskor: Ifall ventiler före och efter skall stängas av, måste alla ledningar tömmas på all vätska. Att ej tömma ledningar alt koppla bort trycket kan göra så att vätskans värmeutvidgning kan spräcka / skada utrustningen och orsaka personliga skador.

European Pressure Equipment Directive (PED) - (Rådets Direktiv 99/36/EG av den 29 april 1999[1] om transportabla

tryckbärande anordningar)

Alla utrustning för tryck med ett tryck över 0.5 Bar(g) bar och större demensioner än 25 mm eller 1" (inch) faller under Tryck direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar - PED.

x Den här Instruktionsbokens Sektion ” Specifikation” innehåller anvisningar gällande PED Direktivet. x Mätare som beskrivs i denna Instruktionsbok är i överensstämmelse med EN Direktivet 97/23/EC. x Brooks Instruments alla flödesmätare faller under flödesgrupp nr. I. x Mätare som är större än 25 mm eller 1" (inch) överensstämmer med PED kategorier I, II eller III. x Mätare på 25mm eller 1" (inch) eller mindre faller under Sound Engineering Practice (SEP) (God Teknisk Praxis).

European Electromagnetic Compatibility (EMC) - Elektromagnetisk kompatibilitet

Brooks Instrument (elektriska/elektroniska) CE-märkta anordningar har redan genomgått ett framgångsrikt prov enligt regleringar under Electromagnetic Compatibility (EMC directive 2004/108/EC). Man måstre dock ägna särskild uppmärksamhet till valet av signalkabeln som skall används för CE-märkta anordningar.

Signalkablars, packboxars och kontakdons kvalitet:

Brooks Instrument levererar högkvalitativa kablar som överensstämmer med specifikation för CE-intygade produkter. Om man använder sin egen signalkabel, då bör man använda en kabel som är fullständigt skärmad med en 100% avskärmning. “D” eller “Cirkelformiga” kontakdon skall vara skärmade med metalliska avskärmningar. Om det är användbart, bör metallpackboxar som ger en bra fastspänning för kabelskärmar användas. Kabelavsärmningen måste kopplas till den metalliska skärmande anordningen eller packboxen och skärmas vid båda ändar runt omkring. Avskärmningens avspänning måste jordas. Card Edge Kontaktdon är icke metalliska. För att överensstämma med krav på CE-intyg, skall de kablarna som används vara skärmade med 100% skärmning. Skärmningen måste jordas. Vad gäller stiftkonfigurationen: Se den bifogade Instruktionshandboken.

OBS: Denna utrustning innehåller elektroniska komponenter som är lättpåverkade av skada orsakad av statisk elektricitet. Lämplig

hanteringsprocedur måste följas när man tar bort, installerar eller på något annat sätt hanterar inre kretskort eller andra anordningar.

1. Ström till enheten måste kopplas från.

2. Personalen måste jordas med hjälp av ett armband eller något annat säkert medel innan något kretskort eller andra inre anordningar installerras, tas bort eller justeras.

3. Kretskort måste transporteras i en speciell förpackning för elektronik. Kort skall ej tas bort från deras skydsskåpa innan man skall installera dem. De borttagna korten bör omedelbart läggas i speciell förpackning för transport, lagring eller återlämnande till fabriken.

Anmärkningar:

Dessa instrument är ej unika vad gäller dess ESD (Elektrostatiska urladdningar) - känsliga komponenter. De flesta samtida konstruktioner innehåller komponenter som utnyttjar metalloxid teknologi (NMOS, SMOS, o.s.v.). Erfarenhet har visat att även små mängder av statisk elektricitet kan skada eller förstöra dess komponenter. Skadade komponenter - även om de annars verkar fungera ordentligt – har ofta en kortare livslängd. .

ESD (Elektrostatiska urladdningar)

C-20

Installation and Operation Manual

X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013

Brooks® GF40/GF80/GF81 Devices

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Installation and Operation Manual

X-TMF-GF40-GF80-Series-eng

Part Number: 541B161AAG

Brooks® GF40/GF80/GF81 Devices

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller. Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended by the original manufacturer. All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse, accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of Seller are not covered by this limited warranty, and shall be at Buyer’s expense. Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

June, 2013

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

USA Netherlands Germany Japan

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS

Brooks...........................................................Brooks Instrument, LLC

DeviceNet ...................... Open DeviceNet Vendors Association, Inc.

Hastelloy ............................................................ Haynes International

MultiFlo ......................................................... Brooks Instrument, LLC

ODVA............................. Open DeviceNet Vendors Association, Inc.

VCR .................................................................................... Cajon Co.

888 275 8946 Korea +82 31 708 2521 +31 (0) 318 549290 Taiwan +886 3 5590 988 +49 351 215 2040 China +86 21 5079 8828 +81 3 5633 7100 Singapore +6297 9741

Brooks Instrument GF81 User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual