Brooks Instrument GF80, GF81 Specifications

Model GF80

DS-TMF-GF80-GF81-Series-MFC-eng

Data Sheet

Model GF81

GF80/GF81

Thermal Mass Flow

Metal Seal

Digital Mass Flow Controllers and Meters

OverviewOverview

Overview

OverviewOverview

Brooks® GF80 and GF81 thermal mass flow controllers (MFCs) and thermal mass flow
meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many
gas flow measurement and control applications.

At the heart of the GF80 is Brooks’ patented 4th generation MultiFloTM capable device.
MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing
gas types, a simple correction factor, such as the ratio of heat capacities between the
calibration gas and new gas, cannot account for accuracy-robbing viscosity and density
differences. The Brooks MultiFlo database is built on thousands of native gas runs to
establish correction functions that account for both thermal and physical differences
among gases making the GF80 Series among the most accurate and flexible MFCs/MFMs
available today.

January, 2017

The Brooks GF80/GF81 Series is the perfect choice for customers who use thermal mass
flow controllers or thermal mass flow meters on a variety of gases, who need to change
gas type frequently, or who need to re-range while preserving gas measurement and
control accuracy. Some examples:

• OEMs will reduce the number of gas and range-specific MFCs that they inventory

• Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing
and similar large users of mass flow meters and mass flow controllers will greatly
reduce their gas- and range-specific spares inventory

• R&D, research, and laboratory users can quickly change experiment conditions and
achieve much better actual process gas accuracy vs. traditional mass flow devices

MultiFlo programming is simple and fast – a new gas and range can be programmed
under 60 seconds plus the device can be programmed without removing it from service
or disconnecting the device from any process or tool control system.

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The Brooks GF80/GF81 Series features a corrosion-resistant Hastelloy C-22 sensor for
durable, long-term operation. Sub-1 second settling times and 1% of set point accuracy
ensure that the GF80/GF81 will provide reliable flow measurement or flow control in
demanding gas flow applications. Both GF80 and GF81 achieve excellent internal to
external leak integrity for challenging process gases as found in CVD, solar, and other
processes. With a wide range of digital and analog I/O options available, the GF80/GF81

represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.

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es and Benefits

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Analog and DigitalAnalog and Digital

Analog and Digital

Analog and DigitalAnalog and Digital
Communication Options:Communication Options:

Communication Options:

Communication Options:Communication Options:

• RS485 Analog

• DeviceNet

• Profibus

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ast Response Sensor

FF

ast Response Sensorast Response Sensor

• Excellent long-term stability
(<+0.5% F.S/yr.)

• Improved signal to noise ratio

• High purge rate capability

• Lower temperature operation
for gases prone to
thermal decomposition

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Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

• Easy diagnostics and troubleshooting

• Independent of tool communication

Solenoid ConSolenoid Con

Solenoid Con

Solenoid ConSolenoid Con

• Elastomer or Metal Seals

• High purge rate capability

• Normally open or normally
closed operation

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• Accurate flow and temperature measurement over
full temperature range

• Real-time compensation for ambient temperature
flucuations enable precise gas chemistry control

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Metal Seal High internal to external leak integrity. No periodic replacement of aging seals necessary

Adaptable Mechanical Configurations Compact footprint enables easy retrofit to existing systems

Metrology Measurement accuracy is traceable to international standards

MultiFlo Gas and Range Programmabilty with Select new gas calibrations and full-scale ranges without the trouble and cost of removing the mass flow
Advanced Diagnostics and User Accessible Service Port controller from the gas line. Convenient interface to diagnostics port for maximum uptime.

Corrosion resistant Hastelloy® Sensor Provides unmatched long-term sensor stability ensuring maximum yield and throughput.

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BenefitsBenefits

Benefits

BenefitsBenefits

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MultiFlo™ Gas and Range ConfigurabilityMultiFlo™ Gas and Range Configurability

MultiFlo™ Gas and Range Configurability

MultiFlo™ Gas and Range ConfigurabilityMultiFlo™ Gas and Range Configurability

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A major advancement over traditional single point gas
conversion factors, Brooks MultiFlo technology delivers up to a
three-times improvement in process gas accuracy. This is
achieved through advanced gas modeling plus extensive actual
gas testing protocols that provide extremely accurate
compensation. MultiFlo also allows the device to be quickly and
easily configured for another gas and/or flow range without
sacrificing accuracy or range-ability. Selecting a new gas
automatically creates a new calibration curve, establishes
optimized PID settings for dynamic control, compensates for
gas density and viscosity effects, and ensures smooth,
overshoot-free transitions between flow rates with excellent
steady state stability.

Brooks MultiFlo technology offers unparalleled flexibility; a
single device can be configured for thousands of different gas
and flow range configurations.

Re-programming is simple and fast; a new gas and range can
be programmed in under 60 seconds. Brooks provides an
enormous gas database to ensure the maximal value of
MultiFlo is realized:

• Dramatically reduces inventory or spares expense

• The MFC full scale flow range can be scaled down typically by
a factor of 3:1 with no impact on accuracy, turndown or
leak-by specifications for tremendous process flexibility

• Native gas calibration is not required

• Maximum flexibility for research applications

MultiFlo™ Configurator AccessoriesMultiFlo™ Configurator Accessories

MultiFlo™ Configurator Accessories

MultiFlo™ Configurator AccessoriesMultiFlo™ Configurator Accessories
MultiFlo kits are available in the following configurations:

778Z010ZZZ778Z010ZZZ

778Z010ZZZ

778Z010ZZZ778Z010ZZZ

Basic MultiFlo Configurator KitBasic MultiFlo Configurator Kit

Basic MultiFlo Configurator Kit

Basic MultiFlo Configurator KitBasic MultiFlo Configurator Kit
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female

®®

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778Z012ZZZ778Z012ZZZ

778Z012ZZZ

778Z012ZZZ778Z012ZZZ

GF0xx RS485 Analog/ProfibusGF0xx RS485 Analog/Profibus

GF0xx RS485 Analog/Profibus

GF0xx RS485 Analog/ProfibusGF0xx RS485 Analog/Profibus

Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc

Configurator Kit w/Power Supply 24 Vdc

Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc

®®

MultiFlo MultiFlo

MultiFlo

MultiFlo MultiFlo

A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
641Z117AAA Power Supply 24 Vdc with DB-15 female

TMTM

TM

778Z014ZZZ778Z014ZZZ

778Z014ZZZ

778Z014ZZZ778Z014ZZZ

GF0xx DeviceNetGF0xx DeviceNet

GF0xx DeviceNet

GF0xx DeviceNetGF0xx DeviceNet

Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc

Configurator Kit w/Power Supply 24 Vdc

Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc

TMTM

MultiFlo MultiFlo

MultiFlo

MultiFlo MultiFlo

A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
641Z117AAA Power Supply 24 Vdc with DB-15 female
124Z171AAA Cable, Power, DeviceNet to DB-15 male

*MultiFlo configurator software is available on the Brooks
Instrument website at: www.BrooksInstrument.com/MultiFlo

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Advanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement Sensor

Advanced Thermal Flow Measurement Sensor

Advanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement Sensor

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Brooks’ proprietary sensor technology combines:

• Improved signal to noise performance for improved accuracy

at low setpoints

• Improved reproducibility at elevated temperatures through

new isothermal packaging, onboard conditioning electronics
with ambient temperature sensing and compensation

• Improved long-term stability through an enhanced sensor

manufacturing process

• Highly corrosion resistant Hastelloy C-22 sensor tube

• Optimized temperature profile for gases prone to thermal

decomposition

Enhanced DiagnosticsEnhanced Diagnostics

Enhanced Diagnostics

Enhanced DiagnosticsEnhanced Diagnostics
The mass flow controller remains one of the most complex and
critical component in gas delivery systems; removing the mass
flow controller to determine if it is faulty should be the last
resort. In response to this fact, Brooks pioneered smarter mass
flow controllers with embedded self test routines and
introduced an independent diagnostic/service port to provide
the user with access to diagnostic data for troubleshooting
without interrupting flow controller operation.

Precise Flow ControlPrecise Flow Control

Precise Flow Control

Precise Flow ControlPrecise Flow Control
Speed of response and gas stability are often critical
requirements for advanced process control applications. GF81
addresses traditional hi-flow control issues such as overshoot/
undershoot and long flow stabilization times with its ultrafast
<1 second flow settling time eliminating wasted gas and
process variability.

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Solar Cell / CVDSolar Cell / CVD

Solar Cell / CVD

Solar Cell / CVDSolar Cell / CVD
Developed to meet the diverse process requirements for solar
cells, fiber optics, and the glass and metal coatings markets,
the GF80 and GF81 mass flow controllers offer a single
platform solution for diffusion furnaces, thin film deposition,
and other difficult applications.

With the GF80/GF81 offering metal seals, this single platform
can cover complex gas distribution systems. The MultiFlo
feature can minimze costly inventory while providing industry
leading actual gas accuracy.

Table Top BioreactorsTable Top Bioreactors

Table Top Bioreactors

Table Top BioreactorsTable Top Bioreactors
Brooks has earned the leading reputation in controlling gas
flows for bioreactor applications. The GF80 mass flow
controllers are perfect for controlling dissolved oxygen and pH.
The MultiFlo capability can greatly simplify spares inventory
and the ordering process. With multiple digital protocol
communication options and other advanced features, the GF80
is an ideal device for the bioreactor process.

ApplicationsApplications

Applications

ApplicationsApplications

Vacuum ProcessesVacuum Processes

Vacuum Processes

Vacuum ProcessesVacuum Processes
Brooks offers many products that deliver exceptional
performance for vacuum processes. The GF80/GF81 mass flow
controllers are no exception. With high flow and low flow
options, several digital communication protocols offerings, and
the MultiFlo capability, the GF80/GF81 can serve a wide variety
of vacuum porcesses.

With other products like the XacTorr® capacitance manometer
and SLA7800 Series pressure controllers, the GF80/GF81 makes
Brooks a one-stop-shop for instrumentation in vacuum
processes.

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GF80GF80

GF80

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow AccuracyFlow Accuracy

Flow Accuracy +1% S.P. 35-100%, +0.35% F.S. 2-35% +1% S.P. 35-100% , +0.35% F.S. 5-35%

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

LinearityLinearity

Linearity

LinearityLinearity

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time) Normally Closed Valve < 1 sec. < 1 second

Response Time (Settling Time)Response Time (Settling Time)

Control RangeControl Range

Control Range 2-100% 5% - 100%

Control RangeControl Range

MultiFloMultiFlo

MultiFlo optional N/A

MultiFloMultiFlo

Number of BinsNumber of Bins

Number of Bins 11 bins 4 bins

Number of BinsNumber of Bins

Valve Shut DownValve Shut Down

Valve Shut Down < 1% of F.S. <4% of Standard Configuration F.S. @ 30 psig/atm out N2 eq.

Valve Shut DownValve Shut Down

Zero StabilityZero Stability

Zero Stability < + 0.5% F.S. per year

Zero StabilityZero Stability

Pressure CoefficientPressure Coefficient

Pressure Coefficient 0.03% per psi (0-50psi N2)

Pressure CoefficientPressure Coefficient

Attitude SensitivityAttitude Sensitivity

Attitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)

Attitude SensitivityAttitude Sensitivity

Auto Zero:Auto Zero:

Auto Zero: Optional: (When Auto Zero is enabled the device performs the zero function once every time

Auto Zero:Auto Zero:
the set point returns to zero. To accomplish, simply provide a zero set point.)

Auto shut-off:Auto shut-off:

Auto shut-off: The Auto Shut-off feature closes the GF80 valve The Auto Shut-off feature closes the GF81 valve

Auto shut-off:Auto shut-off:

Available Gases:Available Gases:

Available Gases: MultiFlo Capable N2, H2, Ar, He, O2, NH3 (consult factory for other gases)

Available Gases:Available Gases:

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 5-50OC (41-122OF)

Operating Temperature RangeOperating Temperature Range

Maximum Operating Pressure*Maximum Operating Pressure*

Maximum Operating Pressure* 150 psig (10 bar) Controller: 75 psig (5 bar) / Meter: 150 psig (10 bar)

Maximum Operating Pressure*Maximum Operating Pressure*

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid, 30 - 90 psid

Differential Pressure Range*Differential Pressure Range*

Leak Integrity (External)Leak Integrity (External)

Leak Integrity (External) 1x10

Leak Integrity (External)Leak Integrity (External)

Eq.) Eq.)

Eq.) 3 sccm to 55 slm 51 - 300 slm

Eq.) Eq.)

22

2

22

(within 2% for steps 0-10 through 0-100%)

when the set point drops below 1.5% of full scale when the set point drops below 2% of full scale.

861-7200 sccm = 15-45 psid,

7201-50000 sccm = 25-45 psid

Typical pressure drop, high density gases like Argon

gas applications require an additional

10 psid differential pressure

GF80GF80

+ 0.2% S.P. 0.15% S.P.

+ 0.5% F.S. (included in accuracy)

-10

atm. cc/sec He

GF81GF81

GF81

GF81GF81

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed, Meter

Valve TypeValve Type

Primary Wetted MaterialsPrimary Wetted Materials

Primary Wetted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS 316 Stainless Steel, Hastelloy C-22, KM45

Primary Wetted MaterialsPrimary Wetted Materials

External SealsExternal Seals

External Seals 316 Stainless Steel

External SealsExternal Seals

Internal Seals/Valve SeatInternal Seals/Valve Seat

Internal Seals/Valve Seat 316 Stainless Steel

Internal Seals/Valve SeatInternal Seals/Valve Seat

Surface FinishSurface Finish

Surface Finish 16μ inch Ra

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms*:Alarms*:

Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Alarms*:Alarms*:

Diagnostic / Service Port:Diagnostic / Service Port:

Diagnostic / Service Port: RS485 via 2.5mm jack

Diagnostic / Service Port:Diagnostic / Service Port:

ComplianceCompliance

Compliance

ComplianceCompliance

Environmental Compliance:Environmental Compliance:

Environmental Compliance: CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental Compliance:Environmental Compliance:

* Note: Application specific lower supply pressure and/or lower differential pressure operation available through Brooks Customer Special Request (CSR) process.

6

Safety EN61010-1

RoHS

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Communication ProtocolCommunication Protocol

Communication Protocol

Communication ProtocolCommunication Protocol

Electrical ConnectionElectrical Connection

Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with

Electrical ConnectionElectrical Connection

Analog I/OAnalog I/O

Analog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V

Analog I/OAnalog I/O

GF80 Power Max./PurgeGF80 Power Max./Purge

GF80 Power Max./Purge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to

GF80 Power Max./PurgeGF80 Power Max./Purge

GF81 Power Max./PurgeGF81 Power Max./Purge

GF81 Power Max./Purge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to N/A

GF81 Power Max./PurgeGF81 Power Max./Purge

N/A

Voltage Set Point Input SpecificationVoltage Set Point Input Specification

Voltage Set Point Input Specification

Voltage Set Point Input SpecificationVoltage Set Point Input Specification

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-11 Vdc 0-5.5 Vdc N/A N/A

Full RangeFull Range

Absolute Max.Absolute Max.

Absolute Max. 25 V (without damage) N/A N/A

Absolute Max.Absolute Max.

Input ImpedenceInput Impedence

Input Impedence 192 kOhms N/A N/A

Input ImpedenceInput Impedence

Required Max. Sink CurrentRequired Max. Sink Current

Required Max. Sink Current 0.002 mA N/A N/A

Required Max. Sink CurrentRequired Max. Sink Current

Current Set PointCurrent Set Point

Current Set Point

Current Set PointCurrent Set Point

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-22 mA N/A N/A

Full RangeFull Range

Absolute Max.Absolute Max.

Absolute Max. 25 mA (without damage) N/A N/A

Absolute Max.Absolute Max.

Input ImpedenceInput Impedence

Input Impedence 250 Ohms 125 Ohms N/A N/A

Input ImpedenceInput Impedence

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Flow Output (Voltage) Specifications

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A 0-5 Vdc

Nominal RangeNominal Range

Full RangeFull Range

Full Range (-0.5)-11 Vdc 0-5.5 Vdc N/A (-0.5)-5.5 Vdc

Full RangeFull Range

Min Load ResistanceMin Load Resistance

Min Load Resistance 1 kOhms 1 kOhms N/A 0.5 kOhms

Min Load ResistanceMin Load Resistance

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Flow Output (Current) Specifications

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A N/A

Nominal RangeNominal Range

Full RangeFull Range

Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Full RangeFull Range

Max. LoadMax. Load

Max. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A

Max. LoadMax. Load

Analog I/O Alarm Ouput**Analog I/O Alarm Ouput**

Analog I/O Alarm Ouput**

Analog I/O Alarm Ouput**Analog I/O Alarm Ouput**

TypeType

Type Open Collector N/A N/A

TypeType

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Closed (On) Current 25 mA N/A N/A

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) VoltageMax. Open (Off) Voltage

Max. Open (Off) Voltage 30 Vdc N/A N/A

Max. Open (Off) VoltageMax. Open (Off) Voltage

Analog I/O Valve Override Signal Specifications***Analog I/O Valve Override Signal Specifications***

Analog I/O Valve Override Signal Specifications***

Analog I/O Valve Override Signal Specifications***Analog I/O Valve Override Signal Specifications***

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A N/A

Floating/UnconnectedFloating/Unconnected

VOR < 1.40 VdcVOR < 1.40 Vdc

VOR < 1.40 Vdc Valve Closed N/A N/A

VOR < 1.40 VdcVOR < 1.40 Vdc

1.70 Vdc < VOR < 2.90 Vdc1.70 Vdc < VOR < 2.90 Vdc

1.70 Vdc < VOR < 2.90 Vdc Valve Normal N/A N/A

1.70 Vdc < VOR < 2.90 Vdc1.70 Vdc < VOR < 2.90 Vdc

VOR > 3.20 VdcVOR > 3.20 Vdc

VOR > 3.20 Vdc Valve Open N/A N/A

VOR > 3.20 VdcVOR > 3.20 Vdc

Input ImpedenceInput Impedence

Input Impedence 800 kOhms N/A N/A

Input ImpedenceInput Impedence

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input

Absolute Max. InputAbsolute Max. Input

*There are three (3) RS485 Protocols:

S-Protocol is a RS485 communication based on HART® command set.
L-Protocol is a RS485 communication compatible with legacy Unit® and Celerity® devices.
A-Protocol is a RS485 communication compatible with Aera® mass flow devices.

**The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of various alarm

conditions.

*** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the measured reading as shown in

this section.

(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

RS485*RS485*

RS485*

RS485*RS485*

(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/

0-20 mA, 4-20 mA 4-20 mA

+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 13.6 Watt/15.0Watt +27 Vdc: 7 Watt/8 Watt

+24 Vdc: 3.3 Watt/10.2 Watt +27 Vdc: 3.3 Watt/10.2 Watt +25 Vdc: 3.3 Watt/10.2 Watt

®®

ProfibusProfibus

Profibus

ProfibusProfibus

Sub-D (B) 2 x RJ45

DeviceNetDeviceNet

DeviceNet

DeviceNetDeviceNet

TMTM

TM

TMTM

EtherCATEtherCAT

EtherCAT

EtherCATEtherCAT

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®

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(GF80 only)(GF80 only)

(GF80 only)

(GF80 only)(GF80 only)

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Electrical InElectrical In

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Electrical InElectrical In

terface Optionsterface Options

terface Options

terface Optionsterface Options

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GF80 ConGF80 Con

GF80 Con

GF80 ConGF80 Con

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ationsations

GF81 ConGF81 Con

GF81 Con

GF81 ConGF81 Con

figurfigur

figur

figurfigur

ationsations

ations

ationsations

9

Model Code - GF80Model Code - GF80

Model Code - GF80

Model Code - GF80Model Code - GF80

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Configurability

II.II.

III.III.

III. Special Application

III.III.

IV.IV.

IV. Valve Configuration

IV.IV.

V.V.

V. Gas or SH MultiFlo Bin

V.V.

VI.VI.

VI. Fitting

VI.VI.

VII.VII.

VII. Downstream Condition

VII.VII.

VIII.VIII.

VIII. External Seals, Valve Seat

VIII.VIII.

IX.IX.

IX. Communications / Connector

IX.IX.

X.X.

X. Customer Special Request

X.X.

XI.XI.

XI. Auto Shut-Off

XI.XI.

XII.XII.

XII. Auto Zero

XII.XII.

XIII.XIII.

XIII. Reference Temperature

XIII.XIII.

Code OptionCode Option

Code Option

Code OptionCode Option

GF080GF080

GF080 Metal / Range Flow (0-55 slpm)

GF080GF080

XXXX

XX Standard

XXXX

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm

XXXX XXXXXXXX XXXX
SH40 010CSH40 010C

SH40 010C Standard Configuration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference)

SH40 010CSH40 010C
SH41 030CSH41 030C

SH41 030C Standard Configuration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference)

SH41 030CSH41 030C
SH42 092CSH42 092C

SH42 092C Standard Configuration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)

SH42 092CSH42 092C
SH43 280CSH43 280C

SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent (0° C Reference)

SH43 280CSH43 280C
SH44 860CSH44 860C

SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent (0° C Reference)

SH44 860CSH44 860C

SH45 2.6LSH45 2.6L

SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent (0° C Reference)

SH45 2.6LSH45 2.6L
SH46 7.2LSH46 7.2L

SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent (0° C Reference)

SH46 7.2LSH46 7.2L

SH47 015LSH47 015L

SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent (0° C Reference)

SH47 015LSH47 015L
SH48 030LSH48 030L

SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent (0° C Reference)

SH48 030LSH48 030L
SH49 040LSH49 040L

SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent (0° C Reference)

SH49 040LSH49 040L
SH50 055LSH50 055L

SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent (0° C Reference)

SH50 055LSH50 055L

VXVX

VX 1/4” VCR

VXVX

P5P5

P5 Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn.

P5P5
P0P0

P0 Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.

P0P0
P4P4

P4 Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.

P4P4
S5S5

S5 RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Brooks® Protocol)

S5S5
S1S1

S1 RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Brooks® Protocol)

S1S1
S0S0

S0 RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Brooks® Protocol)

S0S0
S4S4

S4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Brooks® Protocol)

S4S4
L5L5

L5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Celerity®/Legacy Protocol)

L5L5
L1L1

L1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Celerity®/Legacy Protocol)

L1L1
L0L0

L0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Celerity®/Legacy Protocol)

L0L0
L4L4

L4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Celerity®/Legacy Protocol)

L4L4

D0D0

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D0D0
D1D1

D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D1D1
D2D2

D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB

D2D2
D3D3

D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D3D3
D4D4

D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D4D4
D5D5

D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB

D5D5
D6D6

D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB

D6D6
D7D7

D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB

D7D7
D8D8

D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB

D8D8
D9D9

D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB

D9D9
DD

D

DD
DBDB

DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DBDB
DCDC

DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB

DCDC
DDDD

DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB

DDDD
DEDE

DE DeviceNet 5 Pin Micro Executing Sccm Float 6000h 15 19 Executing 500KB

DEDE
DD

D

DD

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

00C00C

00C 0

00C00C
15C15C

15C 15

15C15C
20C20C

20C 20

20C20C
70F70F

70F 21.1

70F70F

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

CC

C MultiFlo Capable. Standard Bins or specific gas range may be selected

CC
XX

X Not MultiFlo Capable. Specific gas/range required

XX

CC

C Normally Closed Valve

CC
MM

M Meter (No Valve)

MM

AA

A Atmosphere

AA
VV

V Vacuum

VV
PP

P Positive Pressure

PP

SS

S Seal Metal / Seat Metal (316 SS)

SS

DeviceNet Standard Configuration Parameters

I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

AA

A DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB

AA

XX

X DeviceNet 5 Pin Micro To be defined by CSR

XX

AA

A Auto Shut-Off (Included)

AA
XX

X Auto Shut-Off (Not Included)

XX

XX

X Auto Zero (Not Included)

XX

oo

o

oo

C Reference

oo

o

oo

C Reference

oo

o

oo

C Reference

oo

o

oo

C Reference / 70

Power On Full Scale Full Scale Full Scale Instance Instance State Baud

oo

o

oo

F Reference

Poll IO Poll IO Poll IO External

Example Model CodeExample Model Code

Example Model Code

Example Model CodeExample Model Code

II

I

II

GF080GF080

GF080

GF080GF080

IIII

II

IIII
CC

C

CC

10

IIIIII

III

IIIIII

XXXX

XX

XXXX

IVIV

IV

IVIV

CC

C

CC

--

-

--

VV

V

VV

0013300C0013300C

0013300C

0013300C0013300C

VIVI

VIIVII

VIIIVIII

VI

VII

VIVI

--

-

--

VIIVII

T2T2

AA

T2

A

T2T2

AA

VIII

VIIIVIII

IXIX

IX

IXIX

SS

P5P5

S

P5

SS

P5P5

XX

XIXI

X

XX

--

XXXXXXXX

-

XXXX

--

XXXXXXXX

XIIXII

XI

XII

XIXI

XIIXII

XX

XX

X

X

XX

XX

XIIIXIII

XIII

XIIIXIII

--

20C20C

-

20C

--

20C20C

Model Code - GF81Model Code - GF81

Model Code - GF81

Model Code - GF81Model Code - GF81

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Configurability

II.II.

III.III.

III. Special Application

III.III.

IV.IV.

IV. Valve Configuration

IV.IV.

V.V.

V. Gas or Range

V.V.

VI.VI.

VI. Fitting

VI.VI.

VII.VII.

VII. Downstream Condition

VII.VII.

VIII.VIII.

VIII. External Seal/Valve Seat

VIII.VIII.

IX.IX.

IX. Communications/

IX.IX.

Connector

X.X.

X. Customer Special Request

X.X.

XI.XI.

XI. Auto Shut-Off

XI.XI.

XII.XII.

XII. Auto Zero-Off

XII.XII.

XII.XII.

XII. Reference Temperature

XII.XII.

Code OptionCode Option

Code Option

Code OptionCode Option

GF081GF081

GF081 Metal/Hi-flow (51-300 slpm N

GF081GF081

XXXX

XX Standard

XXXX

MM

M Meter (No Valve)

MM

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, example: “0007” = Hydrogen and “200L” = 200 slpm

XXXX XXXXXXXX XXXX

V1V1

V1 1 -1/2" body width, 1/2" VCR, 134.2 mm

V1V1

P5P5

P5 Profibus/Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn./15-Pin Male D conn.

P5P5
P0P0

P0 Profibus/Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

P0P0
P4P4

P4 Profibus/Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn./15-Pin Male D conn.

P4P4
L5L5

L5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks

L5L5
L1L1

L1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Celerity

L1L1
L0L0

L0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks

L0L0
L4L4

L4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks

L4L4
A5A5

A5 RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

A5A5
A1A1

A1 RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

A1A1
A0A0

A0 RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

A0A0
A4A4

A4 RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

A4A4
S5S5

S5 RS485 (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

S5S5
S1S1

S1 RS485 (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

S1S1
S0S0

S0 RS485 (S-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

S0S0
S4S4

S4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Pin alignment with Brooks® SLA SII)

S4S4

D0D0

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D0D0
D1D1

D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D1D1
D2D2

D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB

D2D2
D3D3

D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D3D3
D4D4

D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D4D4
D5D5

D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB

D5D5
D6D6

D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB

D6D6
D7D7

D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB

D7D7
D8D8

D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB

D8D8
D9D9

D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB

D9D9
DD

D

DD
DBDB

DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DBDB
DCDC

DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB

DCDC

DDDD

DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB

DDDD
DEDE

DE DeviceNet 5 Pin Micro Executing Sccm Float 6000h 15 19 Executing 500KB

DEDE
DD

D

DD

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

00C00C

00C 0 Deg C Reference

00C00C
15C15C

15C 15 Deg C Reference

15C15C
20C20C

20C 20 Deg C Reference

20C20C
70F70F

70F 21.1 Deg C/70 Deg F Reference

70F70F

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

XX

X Specific Gas & Range Required

XX

CC

C Normally Closed Valve

CC

AA

A Atmospheric

AA
VV

V Vacuum

VV
PP

P Positive Pressure

PP

SS

S Metal Seal/Metal Seat

SS

I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

AA

A DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB

AA

XX

X DeviceNet 5 Pin Micro To be defined by CSR

XX

AA

A Auto Shut-Off (Included)

AA
XX

X Auto Shut-Off (Not Included)

XX

XX

X Auto Zero (Not Included)

XX

Eq)

2

®

SLA SII)

®

Power)

®

SLA SII)

®

SLA SII)

DeviceNet Standard Configuration Parameters

Power On Full Scale Full Scale Full Scale Instance Instance State Baud

Poll IO Poll IO Poll IO External

Example Model CodeExample Model Code

Example Model Code

Example Model CodeExample Model Code

II

I

II

GF081GF081

GF081

GF081GF081

IIII

II

IIII
XX

X

XX

IIIIII

III

IIIIII
XXXX

XX

XXXX

IVIV

IV

IVIV

CC

C

CC

--

0013 100L0013 100L

-

0013 100L

--

0013 100L0013 100L

VV

V

VV

VIVI

VIIVII

VIIIVIII

VI

VII

VIVI

V1V1

V1

V1V1

VIIVII

AA

A

AA

--

-

--

VIII

VIIIVIII

IXIX

IX

IXIX

55

P5P5

5

P5

55

P5P5

XX

XIXI

X

XX

--

XXXXXXXX

-

XXXX

--

XXXXXXXX

XIIXII

XI

XII

XIXI

XIIXII

AA

XX

A

X

AA

XX

XIIIXIII

XIII

XIIIXIII

--

00C00C

-

00C

--

00C00C

11

BrBr

ooks Service and Supportooks Service and Support

Br

ooks Service and Support

BrBr

ooks Service and Supportooks Service and Support

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding
service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and
support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and
recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

STST

ARAR

TT

-UP SERVICE -UP SERVICE

ST

AR

T

-UP SERVICE

STST

ARAR

TT

-UP SERVICE -UP SERVICE

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001
Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTCUST

OMER SEMINARS OMER SEMINARS

CUST

OMER SEMINARS

CUSTCUST

OMER SEMINARS OMER SEMINARS

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.

Please contact your nearest sales representative for more details.

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS
Brooks, Celerity, MultiFlo, Unit, XacTorr are marks of Brooks Instrument, LLC
All other marks are property of their respective owners.

AND IN-SITU CALIBRAAND IN-SITU CALIBRA

AND IN-SITU CALIBRA

AND IN-SITU CALIBRAAND IN-SITU CALIBRA

AND AND

TRAININGTRAINING

AND

TRAINING

AND AND

TRAININGTRAINING

TIONTION

TION

TIONTION

12