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DS-TMF-GF40-MFC-eng
May, 2017
Data Sheet
GF40
Model GF40
Thermal Mass Flow
Elastomer Seal
Digital Mass Flow Controllers and Meters
OverviewOverview
Overview
OverviewOverview
Brooks® GF40 (elastomer seal) thermal mass flow controller (MFC) and thermal mass flow
meter (MFM) achieves unprecedented performance, reliability, and flexibility in many gas
flow measurement and control applications.
At the heart of the GF40 is Brooks’ patented 4th generation MultiFloTM capable device.
MultiFlo overcomes a long-standing limitation of many thermal MFCs – when changing
gas types, a simple correction factor, such as the ratio of heat capacities between the
calibration gas and new gas, cannot account for accuracy-robbing viscosity and density
differences. The Brooks MultiFlo database is built on thousands of native gas runs to
establish correction functions that account for both thermal and physical differences
among gases making the GF40 Series among the most accurate and flexible MFCs/MFMs
available today.
The Brooks GF40 Series is the perfect choice for customers who use thermal mass flow
controllers or thermal mass flow meters on a variety of gases, who need to change gas
type frequently, or who need to re-range while preserving gas measurement and control
accuracy. Some examples:
• OEMs will reduce the number of gas and range-specific MFCs that they inventory
• Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing
and similar large users of mass flow meters and mass flow controllers will greatly
reduce their gas- and range-specific spares inventory
• R&D, research, and laboratory users can quickly change experiment conditions and
achieve much better actual process gas accuracy vs. traditional mass flow devices
MultiFlo programming is simple and fast – a new gas and range can be programmed
under 60 seconds plus the device can be programmed without removing it from service
or disconnecting the device from any process or tool control system.
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The Brooks GF40 Series features a corrosion-resistant Hastelloy C-22 sensor for durable,
long-term operation. Sub-1 second settling times and 1% of set point accuracy ensure
that the GF40 will provide reliable flow measurement or flow control in demanding gas
flow applications. The GF40 achieves excellent internal to external leak integrity for
challenging process gases as found in CVD, solar, and other processes. With a wide range
of connector types, seal and seat materials, and digital and analog I/O options available,
the GF40 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.
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FeaturFeatur
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• Excellent long-term stability
• Improved signal to noise ratio
• High purge rate capability
• Lower temperature operation
es and Benefitses and Benefits
es and Benefits
es and Benefitses and Benefits
Diagnostic / Service PDiagnostic / Service P
Diagnostic / Service P
Diagnostic / Service PDiagnostic / Service P
• Easy diagnostics and troubleshooting
• Independent of tool communication
d Generd Gener
ationation
d Gener
ation
d Generd Gener
ationation
ast Response Sensorast Response Sensor
ast Response Sensor
ast Response Sensorast Response Sensor
(<+0.5% F.S/yr.)
for gases prone to
thermal decomposition
ortort
ort
ortort
Analog and DigitalAnalog and Digital
Analog and Digital
Analog and DigitalAnalog and Digital
Communication Options:Communication Options:
Communication Options:
Communication Options:Communication Options:
• RS485 Analog
• DeviceNet
• Profibus
• EtherCAT
TM
®
®
Solenoid ConSolenoid Con
Solenoid Con
Solenoid ConSolenoid Con
• Elastomer or Metal Seals
• High purge rate capability
• Normally open or normally
closed operation
trtr
ol ol
VV
alvealve
tr
ol
V
alve
trtr
ol ol
VV
alvealve
TT
emperemper
aturatur
atur
aturatur
e Sensore Sensor
e Sensor
e Sensore Sensor
BenefitsBenefits
Benefits
BenefitsBenefits
T
emper
TT
emperemper
• Accurate flow and temperature measurement over
full temperature range
• Real-time compensation for ambient temperature
fluctuations enable precise gas chemistry control
FeaturFeatur
eses
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es
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eses
Variety of Elastomer Seals Cost performance flexibility for a wide range of applications.
MultiFlo Gas and Range Programmabilty with Select new gas calibrations and full-scale ranges without the trouble and cost of removing the mass flow
Advanced Diagnostics and User Accessible Service Port controller from the gas line. Convenient interface to diagnostics port for maximum uptime.
Corrosion Resistant Hastelloy Sensor Provides unmatched long-term sensor stability ensuring maximum yield and throughput.
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MultiFlo™ Gas and Range ConfigurabilityMultiFlo™ Gas and Range Configurability
MultiFlo™ Gas and Range Configurability
MultiFlo™ Gas and Range ConfigurabilityMultiFlo™ Gas and Range Configurability
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A major advancement over traditional single point gas
conversion factors, Brooks MultiFlo technology delivers up to a
three-times improvement in process gas accuracy. This is
achieved through advanced gas modeling plus extensive actual
gas testing protocols that provide extremely accurate
compensation. MultiFlo also allows the device to be quickly and
easily configured for another gas and/or flow range without
sacrificing accuracy or range-ability. Selecting a new gas
automatically creates a new calibration curve, establishes
optimized PID settings for dynamic control, compensates for
gas density and viscosity effects, and ensures smooth,
overshoot-free transitions between flow rates with excellent
steady state stability.
Brooks MultiFlo technology offers unparalleled flexibility; a
single device can be configured for thousands of different gas
and flow range configurations.
Re-programming is simple and fast; a new gas and range can
be programmed in under 60 seconds. Brooks provides an
enormous gas database to ensure the maximal value of
MultiFlo is realized:
• Dramatically reduces inventory or spares expense
• The MFC full scale flow range can be scaled down typically by
a factor of 3:1 with no impact on accuracy, turndown or
leak-by specifications for tremendous process flexibility
• Native gas calibration is not required
• Maximum flexibility for research applications
MultiFlo™ Configurator AccessoriesMultiFlo™ Configurator Accessories
MultiFlo™ Configurator Accessories
MultiFlo™ Configurator AccessoriesMultiFlo™ Configurator Accessories
MultiFlo kits are available in the following configurations:
778Z010ZZZ778Z010ZZZ
778Z010ZZZ
778Z010ZZZ778Z010ZZZ
Basic MultiFlo Configurator KitBasic MultiFlo Configurator Kit
Basic MultiFlo Configurator Kit
Basic MultiFlo Configurator KitBasic MultiFlo Configurator Kit
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
®®
®
778Z012ZZZ778Z012ZZZ
778Z012ZZZ
778Z012ZZZ778Z012ZZZ
GF0xx RS485 Analog/ProfibusGF0xx RS485 Analog/Profibus
GF0xx RS485 Analog/Profibus
GF0xx RS485 Analog/ProfibusGF0xx RS485 Analog/Profibus
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
®®
MultiFlo MultiFlo
MultiFlo
MultiFlo MultiFlo
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
641Z117AAA Power Supply 24 Vdc with DB-15 female
®®
®
778Z013ZZZ778Z013ZZZ
778Z013ZZZ
778Z013ZZZ778Z013ZZZ
GF0xx EtherCATGF0xx EtherCAT
GF0xx EtherCAT
GF0xx EtherCATGF0xx EtherCAT
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
®®
MultiFlo MultiFlo
MultiFlo
MultiFlo MultiFlo
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
641Z117AAA Power Supply 24 Vdc with DB-15 female
124Z170AAA Cable, Power, EtherCAT to DB-15 male
TMTM
TM
778Z014ZZZ778Z014ZZZ
778Z014ZZZ
778Z014ZZZ778Z014ZZZ
GF0xx DeviceNetGF0xx DeviceNet
GF0xx DeviceNet
GF0xx DeviceNetGF0xx DeviceNet
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 Vdc
Configurator Kit w/Power Supply 24 VdcConfigurator Kit w/Power Supply 24 Vdc
TMTM
MultiFlo MultiFlo
MultiFlo
MultiFlo MultiFlo
A331710003 Cable Assembly 2.5mm
214F027AAA USB-RS485 converter with DB-9 female
641Z117AAA Power Supply 24 Vdc with DB-15 female
124Z171AAA Cable, Power, DeviceNet to DB-15 male
*MultiFlo configurator software is available on the Brooks
Instrument website at: www.BrooksInstrument.com/MultiFlo
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Enhanced DiagnosticsEnhanced Diagnostics
Enhanced Diagnostics
Enhanced DiagnosticsEnhanced Diagnostics
The mass flow controller remains one of the most complex and
critical component in gas delivery systems; removing the mass
flow controller to determine if it is faulty should be the last
resort. In response to this fact, Brooks pioneered smarter mass
flow controllers with embedded self test routines and
introduced an independent diagnostic/service port to provide
access to diagnostic data for troubleshooting without
interrupting flow controller operation.
Advanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement Sensor
Advanced Thermal Flow Measurement Sensor
Advanced Thermal Flow Measurement SensorAdvanced Thermal Flow Measurement Sensor
Brooks’ proprietary sensor technology combines:
• Improved signal to noise performance for improved accuracy
at low setpoints
• Improved reproducibility at elevated temperatures through
new isothermal packaging, onboard conditioning electronics
with ambient temperature sensing and compensation
• Improved long-term stability through an enhanced sensor
manufacturing process
• Highly corrosion resistant Hastelloy C-22 sensor tube
• Optimized temperature profile for gases prone to thermal
decomposition
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Solar Cells / CVDSolar Cells / CVD
Solar Cells / CVD
Solar Cells / CVDSolar Cells / CVD
Developed to meet the diverse process requirements for solar
cells, fiber optics, and the glass and metal coatings markets,
the GF40 mass flow controllers offer a single platform solution
for diffusion furnace, thin film deposition, and other difficult
applications.
With the GF40 offering a variety of elastomer seals this single
platform can cover complex gas distribution systems. The
MutliFlo feature can minimize costly inventory while providing
industry leading actual gas accuracy.
Table Top BioreactorsTable Top Bioreactors
Table Top Bioreactors
Table Top BioreactorsTable Top Bioreactors
Brooks has earned the leading reputation in controlling gas
flows for bioreactor applications. The GF40 mass flow
controllers are perfect for controlling dissolved oxygen and pH.
The MultiFlo capability can greatly simplify spares inventory
and the ordering process. With multiple digital protocol
communication options and other advanced features, the GF40
is an ideal device for the bioreactor process.
ApplicationsApplications
Applications
ApplicationsApplications
Vacuum ProcessesVacuum Processes
Vacuum Processes
Vacuum ProcessesVacuum Processes
Brooks offers many products that deliver exceptional
performance for vacuum processes. The GF40 mass flow
controllers are no exception. With elastomer and metal seal
options, several digital communication protocols offerings, and
the MultiFlo capability, the GF40 can serve a wide variety
vacuum processes.
With Brooks’ other products like the XacTorr® capacitance
manometer and SLA Series pressure controllers, the GF40
makes Brooks a one-stop-shop for instrumentation in vacuum
processes.
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GF40GF40
GF40
PerformancePerformance
Performance
PerformancePerformance
Full Scale Flow Range (NFull Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (NFull Scale Flow Range (N
Flow AccuracyFlow Accuracy
Flow Accuracy +1% S.P. 35-100%, +0.35% F.S. 2-35%
Flow AccuracyFlow Accuracy
Repeatability & ReproducibilityRepeatability & Reproducibility
Repeatability & Reproducibility <
Repeatability & ReproducibilityRepeatability & Reproducibility
LinearityLinearity
Linearity
LinearityLinearity
Response Time (Settling Time)Response Time (Settling Time)
Response Time (Settling Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Response Time (Settling Time)Response Time (Settling Time)
Control RangeControl Range
Control Range 2-100%
Control RangeControl Range
MultiFloMultiFlo
MultiFlo optional
MultiFloMultiFlo
Number of BinsNumber of Bins
Number of Bins 10 bins
Number of BinsNumber of Bins
Valve Shut DownValve Shut Down
Valve Shut Down < 1% of F.S.
Valve Shut DownValve Shut Down
Zero StabilityZero Stability
Zero Stability < + 0.5% F.S. per year
Zero StabilityZero Stability
Pressure CoefficientPressure Coefficient
Pressure Coefficient 0.03% per psi (0-50psi N2)
Pressure CoefficientPressure Coefficient
Attitude SensitivityAttitude Sensitivity
Attitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)
Attitude SensitivityAttitude Sensitivity
Auto Zero:Auto Zero:
Auto Zero: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to
Auto Zero:Auto Zero:
Auto shut-off:Auto shut-off:
Auto shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale
Auto shut-off:Auto shut-off:
Eq.) Eq.)
Eq.) 3 sccm to 50 slm
Eq.) Eq.)
22
2
22
+ 0.5% F.S. (included in accuracy)
Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)
zero. To accomplish, simply provide a zero set point.)
GF40GF40
+ 0.2% S.P.
RatingsRatings
Ratings
RatingsRatings
Operating Temperature RangeOperating Temperature Range
Operating Temperature Range 5-50OC (41-122OF)
Operating Temperature RangeOperating Temperature Range
Maximum Operating PressureMaximum Operating Pressure
Maximum Operating Pressure 150 psig (10 bar)
Maximum Operating PressureMaximum Operating Pressure
Design Proof PressureDesign Proof Pressure
Design Proof Pressure 4000 psig (275 bar)
Design Proof PressureDesign Proof Pressure
Differential Pressure RangeDifferential Pressure Range
Differential Pressure Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Differential Pressure RangeDifferential Pressure Range
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak Integrity (External)Leak Integrity (External)
Leak Integrity (External) 1x10-9 atm. cc/sec He
Leak Integrity (External)Leak Integrity (External)
MechanicalMechanical
Mechanical
MechanicalMechanical
Valve TypeValve Type
Valve Type Normally Closed, Normally Open, No Valve (Meter)
Valve TypeValve Type
Primary Wetted MaterialsPrimary Wetted Materials
Primary Wetted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
Primary Wetted MaterialsPrimary Wetted Materials
External SealsExternal Seals
External Seals Viton, Buna, Kalrez, EPDM or Neoprene
External SealsExternal Seals
Internal Seals/Valve SeatInternal Seals/Valve Seat
Internal Seals/Valve Seat Viton, Buna, Kalrez, EPDM or Neoprene
Internal Seals/Valve SeatInternal Seals/Valve Seat
Surface FinishSurface Finish
Surface Finish 32μ inch Ra
Surface FinishSurface Finish
ComplianceCompliance
Compliance
ComplianceCompliance
Environmental Compliance:Environmental Compliance:
Environmental Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance:Environmental Compliance:
General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification
Safety EN61010-1
RoHS
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®®
®
Communication ProtocolCommunication Protocol
Communication Protocol
Communication ProtocolCommunication Protocol
Electrical ConnectionElectrical Connection
Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with
Electrical ConnectionElectrical Connection
Analog I/OAnalog I/O
Analog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V 0-5 V
Analog I/OAnalog I/O
GF40 Power Max./PurgeGF40 Power Max./Purge
GF40 Power Max./Purge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to
GF40 Power Max./PurgeGF40 Power Max./Purge
Voltage Set Point Input SpecificationVoltage Set Point Input Specification
Voltage Set Point Input Specification
Voltage Set Point Input SpecificationVoltage Set Point Input Specification
Nominal RangeNominal Range
Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A
Nominal RangeNominal Range
Full RangeFull Range
Full Range 0-11 Vdc 0-5.5 Vdc N/A N/A
Full RangeFull Range
Absolute Max.Absolute Max.
Absolute Max. 25 V (without damage) N/A N/A
Absolute Max.Absolute Max.
Input ImpedenceInput Impedence
Input Impedence 192 kOhms N/A N/A
Input ImpedenceInput Impedence
Required Max. Sink CurrentRequired Max. Sink Current
Required Max. Sink Current 0.002 mA N/A N/A
Required Max. Sink CurrentRequired Max. Sink Current
Current Set PointCurrent Set Point
Current Set Point
Current Set PointCurrent Set Point
Nominal RangeNominal Range
Nominal Range 4-20 mA or 0-20 mA N/A N/A
Nominal RangeNominal Range
Full RangeFull Range
Full Range 0-22 mA N/A N/A
Full RangeFull Range
Absolute Max.Absolute Max.
Absolute Max. 25 mA (without damage) N/A N/A
Absolute Max.Absolute Max.
Input ImpedenceInput Impedence
Input Impedence 250 Ohms 125 Ohms N/A N/A
Input ImpedenceInput Impedence
Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications
Nominal RangeNominal Range
Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc
Nominal RangeNominal Range
Full RangeFull Range
Full Range (-0.5)-11 Vdc 0-5.5 Vdc (-0.5)-5.5 Vdc
Full RangeFull Range
Min Load ResistanceMin Load Resistance
Min Load Resistance 1 kOhms 1 kOhms 0.5 kOhms
Min Load ResistanceMin Load Resistance
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Flow Output (Current) Specifications
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Nominal RangeNominal Range
Nominal Range 0-20 mA or 4-20 mA N/A N/A
Nominal RangeNominal Range
Full RangeFull Range
Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/ A
Full RangeFull Range
Max. LoadMax. Load
Max. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A
Max. LoadMax. Load
Analog I/O Alarm Ouput**Analog I/O Alarm Ouput**
Analog I/O Alarm Ouput**
Analog I/O Alarm Ouput**Analog I/O Alarm Ouput**
TypeType
Type Open Collector N/A N/A
TypeType
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Closed (On) Current 25 mA N/A N/A
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) Leakage 1μA N/A N/A
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) VoltageMax. Open (Off) Voltage
Max. Open (Off) Voltage 30 Vdc N/A N/A
Max. Open (Off) VoltageMax. Open (Off) Voltage
Analog I/O Valve Override Signal Specifications***Analog I/O Valve Override Signal Specifications***
Analog I/O Valve Override Signal Specifications***
Analog I/O Valve Override Signal Specifications***Analog I/O Valve Override Signal Specifications***
Floating/UnconnectedFloating/Unconnected
Floating/Unconnected Instrument controls valve to command set point N/A N/A
Floating/UnconnectedFloating/Unconnected
VOR < 1.40 VdcVOR < 1.40 Vdc
VOR < 1.40 Vdc Valve Closed N/A N/A
VOR < 1.40 VdcVOR < 1.40 Vdc
1.70 Vdc < VOR < 2.90 Vdc1.70 Vdc < VOR < 2.90 Vdc
1.70 Vdc < VOR < 2.90 Vdc Valve Normal N/A N/A
1.70 Vdc < VOR < 2.90 Vdc1.70 Vdc < VOR < 2.90 Vdc
VOR > 3.20 VdcVOR > 3.20 Vdc
VOR > 3.20 Vdc Valve Open N/A N/A
VOR > 3.20 VdcVOR > 3.20 Vdc
Input ImpedenceInput Impedence
Input Impedence 800 kOhms N/A N/A
Input ImpedenceInput Impedence
Absolute Max. InputAbsolute Max. Input
Absolute Max. Input
Absolute Max. InputAbsolute Max. Input
(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A
RS485*RS485*
RS485*
RS485*RS485*
(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/
0-20 mA, 4-20 mA 4-20 mA (Output only) (Output only)
+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt
®®
ProfibusProfibus
Profibus
ProfibusProfibus
Sub-D (B) 2 x RJ45
DeviceNetDeviceNet
DeviceNet
DeviceNetDeviceNet
TMTM
TM
TMTM
EtherCATEtherCAT
EtherCAT
EtherCATEtherCAT
®®
®
®®
*There are three (3) RS485 Protocols:
S-Protocol is a RS485 communication based on HART® command set.
L-Protocol is a RS485 communication compatible with legacy Unit® and Celerity® devices.
A-Protocol is a RS485 communication compatible with Aera® mass flow devices.
**The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of
various alarm conditions.
*** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the
measured reading as shown in this section.
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Electrical InElectrical In
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Electrical In
PrPr
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Electrical InElectrical In
terface Optionsterface Options
terface Options
terface Optionsterface Options
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Model CodeModel Code
Model Code
Model CodeModel Code
Code DescriptionCode Description
Code Description
Code DescriptionCode Description
I.I.
I. Base Model Code
I.I.
II.II.
II. Configurability
II.II.
III.III.
III. Special Application
III.III.
IV.IV.
IV. Valve Configuration
IV.IV.
V.V.
V. MultiFlo Bin & Range or XXXX XXXX Specific Gas Code & Range, example: “0004” = Argon and “010L” = 10 slpm
V.V.
Gas & Range (Standard)
VI.VI.
VI. Fitting
VI.VI.
VII.VII.
VII. Downstream Condition
VII.VII.
VIII.VIII.
VIII. External Seals, Valve Seat
VIII.VIII.
Code OptionCode Option
Code Option
Code OptionCode Option
GF040GF040
GF040 Elastomer / Range Flow (0-50 slpm)
GF040GF040
XXXX
XX Standard
XXXX
M Meter (No Valve)
SA40 010CSA40 010C
SA40 010C Standard Configuration #40, 3-10 sccm N2 Eq. @ 0 deg C
SA40 010CSA40 010C
SA41 030CSA41 030C
SA41 030C Standard Configuration #41, 11-30 sccm N2 Eq. @ 0 deg C Ref Temp.
SA41 030CSA41 030C
SA42 092CSA42 092C
SA42 092C Standard Configuration #42, 31-92 sccm N2 Eq. @ 0 deg C
SA42 092CSA42 092C
SA43 280CSA43 280C
SA43 280C Standard Configuration #43,93-280 sccm N2 Eq. @ 0 deg C
SA43 280CSA43 280C
SA44 860CSA44 860C
SA44 860C Standard Configuration #44, 281-860 sccm N2 Eq. @ 0 deg C Ref Temp.
SA44 860CSA44 860C
SA45 2-6LSA45 2-6L
SA45 2-6L Standard Configuration #45, 861-2600 sccm N2 Eq. @ 0 deg C Ref Temp.
SA45 2-6LSA45 2-6L
SA46 7-2LSA46 7-2L
SA46 7-2L Standard Configuration #46, 2601-7200 sccm N2 Eq. @ 0 deg C Ref Temp.
SA46 7-2LSA46 7-2L
SA47 015LSA47 015L
SA47 015L Standard Configuration #47, 7201-15000 sccm N2 Eq. @ 0 deg C Ref Temp.
SA47 015LSA47 015L
SA48 030LSA48 030L
SA48 030L Standard Configuration #48, 15001-30000 sccm N2 Eq. @ 0 deg C
SA48 030LSA48 030L
SA50 050LSA50 050L
SA50 050L Standard Configuration #50, 30001-50000 sccm N2 Eq. @ 0 deg C
SA50 050LSA50 050L
XXXX
XX 9/16” - 18 UNF
XXXX
T1T1
T1 1/8” tube compression
T1T1
T2T2
T2 1/4” tube compression
T2T2
T3T3
T3 3/8” tube compression
T3T3
T4T4
T4 1/2” tube compression
T4T4
T6T6
T6 6 mm tube compression
T6T6
T0T0
T0 10 mm tube compression
T0T0
R2R2
R2 1/4” RC (BSP)
R2R2
VXVX
VX 1/4” VCR
VXVX
O2O2
O2 1/4” VCO
O2O2
N2N2
N2 1/4” NPT
N2N2
Option DescriptionOption Description
Option Description
Option DescriptionOption Description
CC
C MultiFlo Capable. Standard Bins or specific gas range may be selected
CC
XX
X Not MultiFlo Capable. Specific gas/range required
XX
CC
C Normally Closed Valve
CC
OO
O Normally Open Valve
OO
MM
MM
Ref Temp.
Ref Temp.
Ref Temp.
AA
A Atmosphere
AA
VV
V Vacuum
VV
PP
P Positive Pressure
PP
BB
B Seal Buna / Seat Buna
BB
EE
E Seal EPDM / Seat EPDM
EE
KK
K Seal Kalrez / Seat Kalrez
KK
NN
N Seal Neoprene / Seat Neoprene
NN
VV
V Seal Viton / Seat Viton
VV
Ref Temp.
Ref Temp.
Table continued on next page.
10
Page 11
Model Code Model Code
Model Code
Model Code Model Code
(Con(Con
(Con
(Con(Con
tinued)tinued)
tinued)
tinued)tinued)
Code DescriptionCode Description
Code Description
Code DescriptionCode Description
IX.IX.
IX. Communications / Connector
IX.IX.
X.X.
X. Customer Special Request
X.X.
XI.XI.
XI. Auto Shut-Off
XI.XI.
XII.XII.
XII. Auto Zero
XII.XII.
XIII.XIII.
XIII. Reference Temperature
XIII.XIII.
Example Model CodeExample Model Code
Example Model Code
Example Model CodeExample Model Code
II
I
II
GF040GF040
GF040
GF040GF040
IIII
II
IIII
CC
C
CC
IIIIII
III
IIIIII
XXXX
XX
XXXX
Code OptionCode Option
Code Option
Code OptionCode Option
P5P5
P5 Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn.
P5P5
P0P0
P0 Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.
P0P0
P4P4
P4 Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.
P4P4
E5E5
E5 EtherCAT
E5E5
D5D5
D5 DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signal
D5D5
S5S5
S5 RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Brooks Protocol)
S5S5
S1S1
S1 RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Brooks Protocol)
S1S1
S0S0
S0 RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Brooks Protocol)
S0S0
S4S4
S4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Brooks Protocol)
S4S4
L5L5
L5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Celerity/Legacy Protocol)
L5L5
L1L1
L1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Celerity/Legacy Protocol)
L1L1
L0L0
L0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Celerity/Legacy Protocol)
L0L0
L4L4
L4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Celerity/Legacy Protocol)
L4L4
A5A5
A5 RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Aera Protocol)
A5A5
A1A1
A1 RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Aera Protocol)
A1A1
A0A0
A0 RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Aera Protocol)
A0A0
A4A4
A4 RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Aera Protocol)
A4A4
XXXXXXXX
XXXX Customer Special Request Number
XXXXXXXX
00C00C
00C 0
00C00C
15C15C
15C 15
15C15C
20C20C
20C 20
20C20C
70F70F
70F 21.1
70F70F
IVIV
IV
IVIV
CC
--
C
-
CC
--
Option DescriptionOption Description
Option Description
Option DescriptionOption Description
TM
/ (Output 0-5 V); 2xRJ45 signal 2-Pin power
AA
A Auto Shut-Off (Included)
AA
XX
X Auto Shut-Off (Not Included)
XX
AA
A Auto Zero (Included)
AA
XX
X Auto Zero (Not Included)
XX
oo
o
oo
C Reference
oo
o
oo
C Reference
oo
o
oo
C Reference
VV
V
VV
0013300C0013300C
0013300C
0013300C0013300C
oo
o
oo
C Reference / 70
VIVI
VI
VIVI
--
T2T2
-
T2
--
T2T2
VIIVII
VII
VIIVII
AA
A
AA
oo
o
oo
F Reference
VIIIVIII
VIII
VIIIVIII
VV
V
VV
P5P5
P5
P5P5
IXIX
IX
IXIX
XX
XIXI
X
XX
--
XXXXXXXX
-
XXXX
--
XXXXXXXX
XIIXII
XI
XII
XIXI
XIIXII
XX
AA
X
A
XX
AA
XIIIXIII
XIII
XIIIXIII
--
20C20C
-
20C
--
20C20C
11
Page 12
BrBr
ooks Service and Supportooks Service and Support
Br
ooks Service and Support
BrBr
ooks Service and Supportooks Service and Support
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding
service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and
support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
STST
ARAR
TT
-UP SERVICE -UP SERVICE
ST
AR
T
-UP SERVICE
STST
ARAR
TT
-UP SERVICE -UP SERVICE
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001
Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.
CUSTCUST
OMER SEMINARS OMER SEMINARS
CUST
OMER SEMINARS
CUSTCUST
OMER SEMINARS OMER SEMINARS
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.
Please contact your nearest sales representative for more details.
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.
TRADEMARKS
Brooks, Celerity, MultiFlo, XacTorr are marks of Brooks Instrument, LLC
All other marks are property of their respective owners.
AND IN-SITU CALIBRAAND IN-SITU CALIBRA
AND IN-SITU CALIBRA
AND IN-SITU CALIBRAAND IN-SITU CALIBRA
AND AND
TRAININGTRAINING
AND
TRAINING
AND AND
TRAININGTRAINING
TIONTION
TION
TIONTION
12
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