Brooks Instrument GF100, GF120, GF125 Operating Manual

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Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Brooks® GF100 Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices

Model GF125 Analog I/O Model GF125 Digital I/O

Model GF135 Analog I/O Model GF121 Analog I/O

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

Essential Instructions

Read before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

European Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

European Electromagnetic Compatibility (EMC)

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU). Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification. If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield. “D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping. The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees. The shield should be terminated to an earth ground. Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification. The shield should be terminated to an earth ground. For pin configuration : Please refer to the enclosed Instruction Manual.

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices. Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Dear Customer , We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user . It is designed with the ever changing process conditions, accuracy requirement s and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Of fice listed on the back cover of this manual or visit www .BrooksInstrument.com.

Y ours sincerely , Brooks Instrument

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

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Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Paragraph Page Number Number

Section 1 General Information

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ...............................................................................................................1-1

1-3 Product Support References.................................................................................................. .......1-2

1-4 Notice and Caution Statements..................................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF100 Series Device...........................................................................................1-2

1-7 Industry Standard References....................................................................................................... 1-2

1-8 GF100 Series Gas Table ...............................................................................................................1-2

1-9 Glossary of Terms and Acronyms .................................................................................................1-2

1-10 Description .................................................................................................................................... 1-5

1-11 Specifications for GF100 Series Devices...................................................................................... 1-8

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended S torage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage ..................................................................................................................2-2

2-7 Gas Connections........................................................................................................................... 2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation.................................................................................................................. 2-2

2-10 Flow Controller Inst allation Arrangement ......................................................................................2-3

2-11 Purge the Gas Supply Line Before GF100 Series Installation....................................................... 2-4

2-12 Position and Mount the GF100 Series .......................................................................................... 2-5

2-13 Perform a Leak Test ......................................................................................................................2-7

2-14 Zeroing Setup Process..................................................................................................................2-7

2-15 Zeroing the GF100 Series............................................................................................................. 2-7

2-15-1 Zeroing the GF100 Series Pressure T ransducer from the LCD Display Panel ............................. 2-8

2-15-2 Zeroing GF100 Series Flow from LCD Display Panel ................................................................... 2-9

2-16 Performance Checks .................................................................................................................... 2-9

2-17 Introduction to the MultiFloTM Configurator ...................................................................................2-10

2-18 Using the MultiFlo Configurator.................................................................................................... 2-10

2-19 Electrical Connections.................................................................................................................. 2-12

2-19-1 DeviceNet Connections................................................................................................................2-12

2-19-2 Analog/RS485 Connections ......................................................................................................... 2-13

2-19-3 EtherCat Connections.................................................................................................................. 2-14

2-20 GF135 Inlet V alve Installation....................................................................................................... 2-16

2-21 GF135 Commissioning................................................................................................................. 2-17

GF100 Series

Contents

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Flow Measurement ................................................................................. 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................4-1

4-2 Maintenance.................................................................................................................................. 4-1

4-3 Troubleshooting............................................................................................................................. 4-3

4-4 Troubleshooting Checklist ............................................................................................................. 4-3

4-5 GF100 Series Troubleshooting Guide...........................................................................................4-4

Section 5 Product Description Code

5-1 Overview .......................................................................................................................................5-1

Appendix A: GF100 Series Gas T able

A-1 Overview .......................................................................................................................................A-1

Appendix B: GF100 Series Patents

B-1 Overview .......................................................................................................................................B-1

Appendix C: Essential Instructions

C-1 Overview .......................................................................................................................................C-1

Warranty , Local Sales/Service Contact Information....................................................................... Back Cover

Contents

GF100 Series

Figure Page Number Number

1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital.................................... 1-1

1-2 LCD Display ..................................................................................................................................1-7

1-3 Dimensions - GF100/GF120/GF125 Series ................................................................................. 1-15

1-4 Dimensions - GF135, DeviceNet.................................................................................................. 1-16

1-5 Dimensions - GF135, RS485 ....................................................................................................... 1-17

1-6 Dimensions - GF101/GF121/GF126 ............................................................................................ 1-18

1-8 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications1-19

2-1 T ypical Gas Supply Arrangement with Non-PTI MFC.................................................................... 2-4

2-2 T ypical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4

2-3 GF100 Series Mounting Attitude Positions.................................................................................... 2-5

2-4 GF100 Series Mounted to K1 Series Substrate Blocks................................................................. 2-6

2-5 Mounting Screws Torque Pattern .................................................................................................. 2-6

2-6 Display with PSI Reading .............................................................................................................. 2-8

2-7 Display Reading Zero PSI .............................................................................................................2-8

2-8 Display Set to %FS ...................................................................................................................... 2-10

2-9 % Flow Display Set to Zero ..........................................................................................................2-10

2-10 MultiFlo Cable Adapter................................................................................................................. 2-11

2-1 1 USB-RS485 Converter (214F027AAA) ........................................................................................ 2-11

2-12 Diagnostic Port Locations ............................................................................................................ 2-11

2-13 GF100 Series DeviceNet Connection ..........................................................................................2-12

2-14 GF100 Series with 9-Pin Analog Connector................................................................................. 2-15

2-15 Analog 9-Pin Connector (M)......................................................................................................... 2-15

2-16 GF100 with EtherCat Communications, M8 Power Connector Location...................................... 2-14

2-17 M8 Power Connector Drawing .....................................................................................................2-14

2-18 GF100 Series Electrical Interface Options ...................................................................................2-15

2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines...........................................2-16

3-1 GF100 Series Operating Principles............................................................................................... 3-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Table Page Number Number

1-1 Industry S tandard References.......................................................................................................1-3

1-2 Terms and Acronyms .................................................................................................................... 1-4

1-3 S pecifications for S t andard GF100/GF120/GF125 Series............................................................. 1-9

1-4 Specifications for Safe Delivery System (SDS) GF120 Series..................................................... 1-10

1-3 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... 1-11

1-6 Specifications for GF135 Series................................................................................................... 1-12

1-7 S pecifications for GF101/GF121/GF126 Series........................................................................... 1-13

1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... 1-14

2-1 K1 Series Fasteners......................................................................................................................2-7

2-2 K1 Substrate Torque Data............................................................................................................. 2-7

2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ...................................................2-10

4-1 Environmental Factors .................................................................................................................. 4-3

4-2 GF100 Series T roubleshooting Guide........................................................................................... 4-4

5-1 GF100, GF120 & GF125 Series Product Description Code.......................................................... 5-1

5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ...... 5-3

5-3 Model GF135 Product Description Code....................................................................................... 5-4

5-4 GF101, GF121 & GF126 Series Product Description Code.......................................................... 5-5

5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ...... 5-6

A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ......................................................A-1

A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 ..................................................A-2

A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................A-2

B-1 GF100 Series Patents...................................................................................................................B-1

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

1-1 Introduction

Section 1 Introduction

GF100 Series

Designed for semiconductor, MOCVD , and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility. Process throughput and yield are maximized while process costs are reduced by the GF100 Series featuring:

• Ultra fast settling time for quick start up and very rapid process steps

• MultiFlo™ gas and range configurability enabling reconfiguration without removing device from the gas line

• An independent diagnostic/service port to troubleshoot or change flow conditions without removing the mass flow controller from service

• Long-term stability due to extremely low wetted surface area, and corrosion resistant Hastelloy® sensor and valve seat

Optional model variations including—pressure transient insensitivity (PTI) and Safe Delivery System (SDS)

1-2 How to Use This Manual

Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital

This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A GF100 Series Gas Table

Appendix B GF100 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting to operate or repair these devices.

1-1

Section 1 Introduction

GF100 Series

1-3 Product Support References

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include:

1-4 Notice and Caution Statement s

1-5 Product Warranty

- Brooks MultiFlo

X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG

Configurator Quick Start Manual:

- Brooks GF100 Series data sheets:

DS-TMF-GF100-Series-MFC-eng DS-TMF-GF135-Series-MFC-eng DS-TMF-GF121-Series-MFC-eng DS-DPT-EtherCAT-GF100-Series-eng

Warning, caution and notice statements are located throughout this manual in the ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. A CAUTION statement indicates a potentially hazardous situation which, if not avoided, MAY result in minor or moderate injury. It may also be used to alert against unsafe practices. A NOTICE statement describes specific information that requires special attention.

1-6 How to Order a GF100 Series Device

1-7 Industry Standard References

1-8 GF100 Series Gas T able

1-9 Glossary of T erms and Acronyms

1-2

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group.

Refer to Section 5.

Refer to Table 1-1.

Refer to Appendix A.

Refer to Table 1-2

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18 Guideline for temperature specifications of the MFC SEMI E27 Standard for MFC and MFM linearity SEMI E28 Guideline for pressure specifications for the MFC SEMI E52 Practice for referencing gases used in digital MFCs SEMI E54 Sensor actuator network connections for DeviceNet SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs SEMI E66 Test method for determining particle contribution by MFCs SEMI E67 Test method for determining reliabilty of MFCs SEMI E68 Test method for determining warm-up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for determining attitude sensitivity of MFCs SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates SEMI F19 Specification for the finish of the wetted surface of electro polished

216L stainless steel components SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications SEMI F36 Guide for dimensions and connections of gas distribution components SEMI F37 Method for determination of surface roughness parameters for gas

distribution system components SEMI F44 Guideline for standardization of machined stainless steel weld fittings SEMI F45 Guideline for standardization of machined stainless steel reducing fittings SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity SEMI S2 Environmental, Health and Safety Guidelines SEMI S9 Dielectric testing SEMI S10 Risk assessment SEMI S12 Decontamination of fielded products ETG.1000.2 Physical Layer service definition and protocol specification ETG.1000.3 Data Link Layer service definition ETG.1000.4 Data Link Layer protocol specification ETG.1000.5 Application Layer service definition ETG.1000.6 Application layer protocol specification ETG.1020 EtherCAT Protocol Enhancements ETG.2000 EtherCAT Slave Information ETG.5001.1 Modular Device Profile - Part 1: General MDP Device Model ETG.5003.1 Semiconductor Device profile - Part 1: Common Device Profile (CDP) ETG.5003.2020 Specific Device Profile: Enhanced Mass Flow Controller ETG.5003.2021 Specific Device Profile: Mass Flow Controller ETG.5003.2022 Specific Device Profile: Mass Flow Meter ETG.5003.2023 Specific Device Profile: Enhanced Mass Flow Meter

GF100 Series

1-3

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Table 1-2 Terms and Acronyms

Term or Acronym Definition

CSR Customer Special Requirement

CVD Chemical Vapor Deposition

DeviceNet A 5-wire local network I/O communication device

that employs a command/response communication protocol

DSP Digital Signal Processor

EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a bare wafer, enabling a high-purity starting point for building the semiconductor device.

HBD Horizontal Base Down

GF100 Series Integrated Flow Controller

F.S. Full Scale

LED Light Emitting Diode

MFC Mass Flow Controller

MultiFlo Configurator I/O communication software package that

configures gas and flow ranges

MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within a defined standard configuration

PID Proportional Integral Derivative Controller

PSIA Pounds per Square Inch Absolute

PSID Pounds per Square Inch Differential

PSIG Pounds per Square Inch Gauge

PTI Pressure Transient Insensitive. Reduces the

effect of pressure fluctuations in gas flow. Applicable to GF125 only.

ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.

HC Standard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases)

S.P. Setpoint

Step Technology Enables fast set point control through a high

speed DSP and low volume drive circuit

VIU Vertical mounting attitude with inlet side facing up

1-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

1-10 Description

Section 1 Introduction

GF100 Series

Ultra Fast Response

The Brooks GF Series patented flow sensor combined with a high speed ARM processor and fast acting diaphragm-free valve assembly enables:

• Faster response and settling time for improved wafer throughput

• Ultra-fast 1-2 second etch step processing

• Reduced diverted gas consumption and associated abatement costs

• Time sensitive gas delivery steps in Atomic Layer Deposition

• User programmable start-up function for processes requiring a slow ramped gas turn-on or time critical transitions between flow rates

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non-linear gases. This is achieved through advanced gas modeling and optimized through actual gas testing. Brooks MultiFlo another gas and/or flow range without sacrificing accuracy or rangability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, automatically compensates for gas density effects, and ensures smooth overshoot-free transitions between flow rates with excellent steady-state stability. Brooks MultiFlo technology offers unparalleled flexibility. An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations. Process benefits achieved:

• Mass flow controller full scale full range can be rescaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications

• Optimum process and inventory flexibility resulting in dramatically reduced inventory costs

• Fewer configurations/bin sizes required to support many different processes

• Less down-time with rapid process recovery

MultiFloTM Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))

MultiFloTM Configurator Accessory Kit s: 778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

A332295001 Power Supply MFC

A332297002 Cable, Power, 9-Pin

A332297001 Cable, Power, DeviceNet

* MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

allows the device to be quickly and easily configured for

*Software, MultiFlo Configurator

Adapter Cables *Software, MultiFlo Configurator

1-5

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models

Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions. The Brooks GF125 & GF135 (PTI) devices utilize a patented control algorithm that inverts the pressure signal, compares it to the pre-fluctuation signal and drives realtime valve position compensation to maintain stable flow. Enhanced pressure transient is achieved through faster sensing, quicker processing, and a reduction in internal dead-volume between the sensors and valve orifice.

GF101/121/126 based on the same technology and design as the low flow GF's (same sensor, same electronics, low power support)

• Smaller footprint than competitive MFC's

• Handles flow rates up to 300 slpm

• Metal seal for durability and high leak integrity

• Proprietary sensor technology

• Precise flow control with fast sub-1 second settling time

• 1% of reading accuracy

• Corrosion-resistant Hastelloy C-22 sensor tube

Optional Safe Delivery System (SDS)— GF120 model only

The Safe Delivery System (SDS) enhanced GF120 model is a state-of-theart low pressure drop devices for the delivery of sub atmospheric safe delivery system gases used in Implant and Etch processes. The Brooks GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.

Advanced Thermal Flow Measurement Sensor

Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an enhanced sensor manufacturing and burn in process incorporates a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminates thermal siphoning effects. This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition. This design results in:

• Enhanced signal to noise performance for improved accuracy at low set points

• Superior reproducibility at elevated temperature through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation

• Improved long-term stability

1-6

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Section 1 Introduction

GF100 Series

High Purity Flow Path

The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. The GF120, GF125 & GF135 devices are constructed with a 4μ

constructed with a 10μ inch Ra.

• Overall reduced surface area and un-swept volumes for faster dry-down during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Extensive Mechanical Configurations

GF Series supports all metal seal/UHP industry gas connection interface standards for full OEM and process coverage.

• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2" bodies

• 124mm 4 VCR on 1-1/2" body

inch Ra max surface finish while the GF100 is

Figure 1-2 LCD Display

Enhanced Diagnostics and User Interface

The mass flow controller is one of the most complex and critical components in gas delivery systems. When dealing with ultra-high-purity gas distribution or highly toxic or corrosive gases, removing the mass flow controller to assess functionality should be the last resort. Brooks GF Series devices provide for in-line device evaluation and instantaneous troubleshooting through:

• Embedded self test routines and independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local indication of Flow (%), Temperature (oC), Pressure (PSIA/kPa) and Network Address

• Zero button to easily re-zero the device during scheduled maintenance

• Rotatable display with a push button to enable improved readability based on how the MFC is mounted. Simply hold button down for at least 3 seconds to rotate display. This featue is standard for GF135 and GF101/ GF121/GF126 and available for GF100/GF120/GF125.

This combination of features results in limiting service interruption and reduced downtime.

1-7

Section 1 Introduction

GF100 Series

Communication Interfaces

The GF100 Series supports analog 0-5 Vdc, RS485, DeviceNet™ and EtherCAT via the DeviceNet or RS485 or Analog only connector options. DeviceNet and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet based communications system know for its high cycle time and cost efficient cabling and master application solutions. The EtherCAT GF100 Series devices conform to the ETG.5003 Semiconductor Device Profile specification. A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the same gas/range but different electrical connectors.

1-11 Specifications for GF100 Series Devices

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

communication protocols. Analog connections can be accessed

1-8

See Table 1-3 for specifications for standard GF100 Series.

See Table 1-4 for specifications for the Safe Delivery System (SDS) GF120 Series.

See Table 1-5 for specifications for standard GF100 Series-EtherCAT

See Table 1-6 for specifications for the GF135 Series.

See Table 1-7 for specifications for the GF121 Series.

See Table 1-8 for specifications for the GF121 Series-EtherCAT

See Figure 1-3 for dimensions for the GF100 Series.

See Figures 1-4 & 1-5 for dimensions for the GF135 Series.

See Figure 1-6 for dimensions for the GF121 Series.

See Figure 1-7 for dimensions for the GF100/GF121 Series-EtherCAT

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-3 Specifications for Standard GF100/GF120/GF125 Series

GF100GF100

GF100

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

LinearityLinearity

Linearity

LinearityLinearity

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time) 300ms (3-860 sccm N2 Eq.)

Response Time (Settling Time)Response Time (Settling Time) Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec 700ms 400ms (861-7200 sccm N2 Eq.)

Normally Closed ValveNormally Closed Valve

Normally Open ValveNormally Open Valve

Normally Open Valve <1.5 sec

Normally Open ValveNormally Open Valve

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 11 bins

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 1% of F.S.

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve) Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S.

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Span: 0.05% S.P. per

Temperature CoefficientTemperature Coefficient

Eq.) Eq.)

Eq.) 3 sccm to 55 slm

Eq.) Eq.)

GF100GF100

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

+ 0.5% F.S. (included in accuracy)

GF120GF120

GF120

GF120GF120

+ 0.15% S.P.

< 5% SP up to 5 psi/sec upstream press. spike

standard

+ 0.5% F.S. per year

C, Zero: 0.005% F.S. per oC

GF125GF125

GF125

GF125GF125

500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)

GF100 Series

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range

Operating Temperature RangeOperating Temperature Range

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid

Differential Pressure Range*Differential Pressure Range*

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external)

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 4μ inch Ra (0.1 μm Ra)

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

Units Displayed / ResolutionUnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Electrical Connection Electrical Connection

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication Digital Communication

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Diagnostic /Service Port Diagnostic /Service Port

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc

Power Supply/Consumption Power Supply/Consumption

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

500 psia max 100 psia max

1x10

GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Control Valve Output, Network Interruption

10 feet

RS485/Analog: 6 Watts max @

C), Pressure (psia, kPa) /

+15Vdc. (+10%) or +24 Vdc (±10%)

0.1 (unit)

10-50

-10

atm. cc/sec He

Normally Open

Meter (no valve)

via 5-Pin “M12” connector

Compliance Compliance

Compliance

Compliance Compliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications

REACH Directive EC 1907/2006

1-9

Section 1 Introduction

GF100 Series

Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N Gases SupportedGases Supported

Gases Supported AsH

Gases SupportedGases Supported

MultiFlo ProgrammableMultiFlo Programmable

MultiFlo Programmable Not Configurable

MultiFlo ProgrammableMultiFlo Programmable Flow AccuracyFlow Accuracy

Flow Accuracy +/-1% S.P.

Flow AccuracyFlow Accuracy Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <+/- 0.15% S.P.

Repeatability & ReproducibilityRepeatability & Reproducibility Zero StabilityZero Stability

Zero Stability <=0.6% F.S. per year

Zero StabilityZero Stability

Settling Time (to within Settling Time (to within

Settling Time (to within

Settling Time (to within Settling Time (to within

Warm Up TimeWarm Up Time

Warm Up Time minimum of 30 minutes

Warm Up TimeWarm Up Time Leak IntegrityLeak Integrity

Leak Integrity 1X10

Leak IntegrityLeak Integrity

Valve Shut Down (Leaky by)Valve Shut Down (Leaky by)

Valve Shut Down (Leaky by) <1% F.S.

Valve Shut Down (Leaky by)Valve Shut Down (Leaky by)

Operating ConditionsOperating Conditions

Operating Conditions

Operating ConditionsOperating Conditions

Minimum Operating Inlet Pressure*Minimum Operating Inlet Pressure*

Minimum Operating Inlet Pressure* 4 to 20 sccm

Minimum Operating Inlet Pressure*Minimum Operating Inlet Pressure*

Maximum PressureMaximum Pressure

Maximum Pressure 500 psia max

Maximum PressureMaximum Pressure Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity

Pressure InsensitivityPressure Insensitivity DifferentialPressure**DifferentialPressure**

DifferentialPressure** 10 Torr-30 psid typical (1.33-207 kPa typical)

DifferentialPressure**DifferentialPressure** Valve ConfigurationValve Configuration

Valve Configuration Normally Closed

Valve ConfigurationValve Configuration Ambient Temperature RangeAmbient Temperature Range

Ambient Temperature Range 10

Ambient Temperature RangeAmbient Temperature Range Zero Temperature CoefficientZero Temperature Coefficient

Zero Temperature Coefficient Span:

Zero Temperature CoefficientZero Temperature Coefficient

Eq.) Eq.)

Eq.) 4 - 25 sccm >25 to 1 slpm

Eq.) Eq.)

2% F.S.)2% F.S.)

2% F.S.) < 3 sec

2% F.S.)2% F.S.)

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

, PH3, BF3, SiF4, Ar, Xe, N2O, N2, GeF4, AsF5, PF3,

H2Se, HMDSO, HMDSN, H2O***

>35% F.S. +/-0.35% F.S. <35% F.S.

-11

atm. cc/sec He

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

< 10 Torr >20 to 50 sccm >50 sccm to 1 slpm < 50 Torr

Not Available

0.05% SP per

C, Zero:

< 20 Torr

C-50OC

0.005% F.S. per OC

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details. **Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details. ***Consult factory for other gases.

1-10

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slpm

Full Scale Flow RangeFull Scale Flow Range

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

Flow Settling Time (NC Valve)Flow Settling Time (NC Valve)

Flow Settling Time (NC Valve)

Flow Settling Time (NC Valve)Flow Settling Time (NC Valve)

Flow Settling Time (NO Valve)Flow Settling Time (NO Valve)

Flow Settling Time (NO Valve) <1.5 sec ----------

Flow Settling Time (NO Valve)Flow Settling Time (NO Valve)

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable < 1% S.P. up to 5 psi/sec ----------

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 2-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 11 bins ----------

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) 0.15% of F.S. <1% of F.S.

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S. ----------

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

Temperature CoefficientTemperature Coefficient

GF100GF100

GF100

GF100GF100

+1% S.P. > 20-100%; +0.2% F.S. 2-20% ±1% S.P. 35-100%; ±0.35% F.S. 2-35%

< 1 sec 700ms

-100% (Normally Open Valve)

GF120GF120

GF120

GF120GF120

<700ms (30001-55000 sccm N2 Eq.)

Standard ----------

+ 0.15% F.S. per year < + 0.6% F.S. per year

C Zero 0.005% of F.S. per °C

GF125GF125

GF125

GF125GF125

+ 0.15% S.P.

300ms (3-860 sccm N2 Eq.)

400ms (861-7200 sccm N2 Eq.)

500ms (7201-30000 sccm N2 Eq.)

upstream press. spike

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

GF100 Series

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

< 3 sec

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid 10 Torr - 30 psid typical

Differential Pressure Range*Differential Pressure Range*

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra 5μ inch Ra

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

nits Displayed / Resolutionnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Electrical ConnectionElectrical Connection

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Digital CommunicationDigital Communication

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Diagnostic /Service PortDiagnostic /Service Port

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption

Power Supply/ConsumptionPower Supply/Consumption

500 psia max 100 psia max up to 500 psia max

320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

861- 7200 sccm = 10-45 psid For more details

7201-55000 sccm = 15-45 psid consult factory

Normally Open

Meter (no valve)

Rotatable /

-10

atm. cc/sec He

10 feet

C), Pressure (psia, kPa) /

0.1 (unit)

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on

outlet (example SiCl4). Contact Brooks Technical Support for more information.

REACH Directive EC (1907/2006)

1-11

Section 1 Introduction

GF100 Series

Table 1-6 Specifications for GF135 Series

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range:Full Scale Flow Range:

Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)

Full Scale Flow Range:Full Scale Flow Range:

Gasses Supported:Gasses Supported:

Gasses Supported: N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),

Gasses Supported:Gasses Supported:

Flow Flow

AccurAccur

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

Linearity:Linearity:

Linearity: Included in accuracy

Linearity:Linearity:

Settling Settling

Settling

Settling Settling

PrPr

ConCon

Con

ConCon

alve Shut Down:alve Shut Down:

alve Shut Down: < 0.5% of F.S. N2

alve Shut Down:alve Shut Down:

erer

emperemper

emper

emperemper

Rate-of-Decay PRate-of-Decay P

Rate-of-Decay P

Rate-of-Decay PRate-of-Decay P

Flow Rate:Flow Rate:

Flow Rate: Maximum flow rate for which an ROD measurement can be obtained is 800 sccm

Flow Rate:Flow Rate:

emperemper

emper

emperemper

PrPr

Minimum Detectable ChangeMinimum Detectable Change

Minimum Detectable Change Zero Drift: +/- 0.02% F.S.

Minimum Detectable ChangeMinimum Detectable Change frfr

frfr

RatingsRatings

Ratings

RatingsRatings

OperOper

Oper

OperOper

DifferDiffer

Differ

DifferDiffer

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

Pneumatic Pneumatic

Pneumatic

Pneumatic Pneumatic

Leak InLeak In

Leak In

Leak InLeak In

MecMec

hanicalhanical

Mec

hanical

MecMec

hanicalhanical

alve alve

alve

alve alve

Surface Finish:Surface Finish:

Surface Finish: 4μ inch Ra (0.1 μm Ra)

Surface Finish:Surface Finish:

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms:Alarms:

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,

Alarms:Alarms:

Display Display

Display

Display Display

Viewing Distance:Viewing Distance:

Viewing Distance: Fixed / 10 feet

Viewing Distance:Viewing Distance:

Units Displayed / Resolution:Units Displayed / Resolution:

Units Displayed / Resolution: Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)

Units Displayed / Resolution:Units Displayed / Resolution:

ElectricalElectrical

Electrical

ElectricalElectrical

Electrical Connection:Electrical Connection:

Electrical Connection: Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector

Electrical Connection:Electrical Connection:

Digital Communication:Digital Communication:

Digital Communication: RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication:Digital Communication:

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

ower Supply/Consumption:ower Supply/Consumption:

ower Supply/Consumption: DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,

ower Supply/Consumption:ower Supply/Consumption:

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC EnEn

EnEn

1-12

acy:acy:

Accur

acy: +/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.)

AccurAccur

acy:acy:

oducibility:oducibility:

oducibility: < +/- 0.15% S.P.

oducibility:oducibility:

Time (to within +/-2% FS):Time (to within +/-2% FS):

Time (to within +/-2% FS): <300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)

Time (to within +/-2% FS):Time (to within +/-2% FS):

essuressur

e Insensitivity:e Insensitivity:

essur

e Insensitivity: < 1% S.P. up to 5 psi/sec upstream press. spike

essuressur

e Insensitivity:e Insensitivity:

trtr

ol Range:ol Range:

ol Range: 1-100%

trtr

ol Range:ol Range:

o Stability:o Stability:

o Stability: < +/- 0.5% F.S. per year

o Stability:o Stability:

aturatur

e Coefficiene Coefficien

atur

e Coefficien

aturatur

e Coefficiene Coefficien

aturatur

e Sensitivity:e Sensitivity:

atur

e Sensitivity: +/- 0.04% S.P./Deg C

aturatur

e Sensitivity:e Sensitivity:

essuressur

e Sensitivity:e Sensitivity:

essur

e Sensitivity: +/- 0.04% F.S./psi

essuressur

e Sensitivity:e Sensitivity:

om Commissioning Baseline:om Commissioning Baseline:

om Commissioning Baseline: Valve Leak: +0.1% F.S.

om Commissioning Baseline:om Commissioning Baseline:

ating ating

emperemper

ating

emper

ating ating

emperemper

enen

tial Prtial Pr

tial Pr

enen

tial Prtial Pr

alve Operalve Oper

alve Oper

alve Operalve Oper

tegrity (external):tegrity (external):

tegrity (external): 1x10-10 atm. cc/sec He

tegrity (external):tegrity (external):

ype:ype:

ype: Normally Closed

ype:ype:

etted Materials:etted Materials:

etted Materials: SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45

etted Materials:etted Materials:

ype:ype:

ype: Top Mount Electronically Rotatable Integrated LCD

ype:ype:

virvir

onmenonmen

vir

virvir

tal Compliancetal Compliance

onmen

tal Compliance RoHS Directive 2011/65/2006

onmenonmen

tal Compliancetal Compliance

t:t:

t: Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C

t:t:

erformance:erformance:

erformance: (ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned)

erformance:erformance:

aturatur

e Range:e Range:

atur

e Range: 10-50°C

aturatur

e Range:e Range:

essuressur

e Range**:e Range**:

essur

e Range**: 3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid

essuressur

e Range**:e Range**:

ating Prating Pr

essuressur

ating Pr

ating Prating Pr

e:e:

essur

e: 100 psia max

essuressur

e:e:

ating Prating Pr

essuressur

ating Pr

essur

ating Prating Pr

essuressur

ort:ort:

ort: RS485 via 2.5 mm jack

ort:ort:

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He

Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow)

**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Argon gas applications require higher differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

e:e:

e: 43.5 psia - 72.5 psia

e:e:

Sensor Drift, Flow Error, Valve Leak

Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%

Reach Directive EC 1907/2006

Part Number: 541B137AAG

April, 2017

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-7 Specifications for GF101/GF121/GF126 Series

GF101GF101

GF101

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

LinearityLinearity

Linearity

LinearityLinearity

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time)

Response Time (Settling Time)Response Time (Settling Time) Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec

Normally Closed ValveNormally Closed Valve

Pressure TransducerPressure Transducer

Pressure Transducer Ability to measure inlet pressure

Pressure TransducerPressure Transducer

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo Standard (All typical high flow rate process gases & mixtures supported)

MultiFloMultiFlo

# of Bins# of Bins

# of Bins 4 Bins

# of Bins# of Bins

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 2% of F.S. @ 30 N2 psig/atm out

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient

Temperature CoefficientTemperature Coefficient

Eq.) Eq.)

Eq.) 55 to 300 slm

Eq.) Eq.)

GF101GF101

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

+ 0.5% F.S. (included in accuracy)

Span: 0.05% S.P. per

GF121GF121

GF121

GF121GF121

+ 0.15% S.P.

+ 0.5% F.S. per year

C, Zero: 0.005% F.S. per oC

GF100 Series

GF126GF126

GF126

GF126GF126

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Differential Pressure RangeDifferential Pressure Range

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig / Meter: 150 psig

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra (0.1 μm Ra)

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms Control Valve Output, Network Interruption

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

Units Displayed / ResolutionUnits Displayed / Resolution

ElectricalElectrical

Electrical

ElectricalElectrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Electrical Connection Electrical Connection

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication Digital Communication

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Diagnostic /Service Port Diagnostic /Service Port

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)

Power Supply/Consumption Power Supply/Consumption

Meter (no valve)

GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

10 feet

RS485/Analog: 6 Watts max @

C), Pressure (psia, kPa) /

+15 Vdc. (+10%) (Under typical operating conditions)

0.1 (unit)

-10

atm. cc/sec He

via 5-Pin “M12” connector

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

REACH Directive EC 1907/2006

1-13

Section 1 Introduction

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 55 slm to 300 slm

Full Scale Flow RangeFull Scale Flow Range

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

Response Time/Settling TimeResponse Time/Settling Time

Response Time/Settling Time < 1 sec

Response Time/Settling TimeResponse Time/Settling Time (NC Valve)(NC Valve)

(NC Valve)

(NC Valve)(NC Valve)

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable Ability to measure inlet presssure

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 4 bins

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) <2% of F.S. @30 N2 psig/atm out

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

Temperature CoefficientTemperature Coefficient

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Differential Pressure RangeDifferential Pressure Range

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

Leak Integrity (external)Leak Integrity (external)

GF101GF101

GF101

GF101GF101

GF121GF121

GF121

GF121GF121

+1% S.P. > 35-100%; +0.35% F.S. 2-35%

+ 0.15% S.P.

Standard

+ 0.15% F.S. per year

Meter: 150 psig

-10

atm. cc/sec He

GF126GF126

GF126

GF126GF126

April, 2017

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

nits Displayed / Resolutionnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Electrical ConnectionElectrical Connection

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Digital CommunicationDigital Communication

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Diagnostic /Service PortDiagnostic /Service Port

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

Power Supply/ConsumptionPower Supply/Consumption

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

REACH Directive EC (1907/2006)

Meter (no valve)

Rotatable /

10 feet

C), Pressure (psia, kPa) /

0.1 (unit)

1-14

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Downport Configurations

Section 1 Introduction

GF100 Series

Electrical Connector

G1/GX/TX Specic Dimensions

5.09in

129mm

VCR Configurations

Electrical Connector DX/BB Specic Dimensions

4.45in

113mm

3.67in

93mm

Electrical Connector

SX Specic Dimensions

3.29in

84mm

.98in

25mm

3.75in

95mm

Fitting Option Code

Seal Type

C-SEAL

W-SEAL

C-SEAL

W-SEAL

C-SEAL

W-SEAL

C-SEAL

Dim A

92mm [3.62in]

79.8mm[3.14in]

92mm [3.62in]

79.8mm[3.14in]

92mm [3.62in]

Dim B Dim C

105mm [4.13in]

93mm [3.66in] 30mm [1.18in] 39mm [1.53in]

105mm [4.13in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in]

105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

30mm [1.18in] 39mm [1.53in]

22mm [0.86in] 28mm [1.12in]

Dim D

Dim E

83mm [3.28in]

72mm [2.82in]

83mm [3.28in]

72mm [2.82in] 25mm [1.00in]

83mm [3.28in] 25mm [1.00in]

Dim F

25mm [1.00in]

Dim G

127mm [5.00in]

Figure 1-3 Dimensions - GF100/GF120/GF125 Series

1-15

Section 1 Introduction

GF100 Series

Model GF135, DeviceNet, C-Seal Connections

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Model GF135, DeviceNet, VCR Connections

1-16

Figure 1-4 Dimensions - GF135, DeviceNet

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Model GF135, RS485, C-Seal Connections

Section 1 Introduction

GF100 Series

Model GF135, RS485, VCR Connections

Figure 1-5 Dimensions - GF135 Series, RS485

1-17

Section 1 Introduction

GF100 Series

C-Seal Configurations

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

VCR Configurations

1-18

Figure 1-6 Dimensions - GF101/GF121/GF126

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

EtherCAT, Downport Configurations

Section 1 Introduction

GF100 Series

EtherCAT, VCR Configurations

Figure 1-7 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications

1-19

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

1-20

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-1 General

2-2 Receipt of Equipment

Section 2 Installation

GF100 Series

This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.

When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability . A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters This device has been assembled, calibrated, and double-vacuum bagged in a Class 100 clean room. In your semi-clean area, remove the outer bag only . Pass the device into your clean area. Remove the second clean room compatible bag only when the device is ready to be tested and/or installed in your clean system.

2-3 Recommended Storage Practice

2-4 Return Shipment

If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

Prior to returning any instrument to the factory for any reason, visit our website for instructions on how to obtain a Return Materials Authorization Number (RMA #) and complete a Decont amination Statement to accompany it: BrooksInstrument.com/Service. All instrument s returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument. Instrument must have been purged in accordance with the following:

2-1

Section 2 Installation

GF100 Series

2-5 Transit Precautions

2-6 Removal from Storage

2-7 Gas Connections

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

To safeguard against damage during transit, transport the device to the installation site in the same container used for transportation from the factory , if circumstances permit.

Upon removal of the device from storage, a visual inspection should be conducted to verify its "as-received" condition. If the device has been subject to storage conditions in excess of those recommended (refer to "2-3 Recommended Storage Practice" on p. 2-1), it should be subjected to a pneumatic pressure test in accordance with applicable vessel codes. To maintain a devices ultraclean integrity, this service should be performed by the factory or one of the certified service centers.

2-8 In-Line Filter

2-9 Mechanical Installation

Prior to installation, ensure that all piping is clean and free from obstructions. Install piping in such a manner that permits easy access to the device if removal becomes necessary.

It is recommended that an in-line filter be installed upstream from the device to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be replaced periodically or ultrasonically cleaned.

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free from shock and vibration.

• Leave sufficient room for access to the user interface, display and MAC ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and removal if the device requires servicing.

2-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Section 2 Installation

GF100 Series

The GF100 Series is equipped with PTI technology , which reduces the effect of pressure fluctuations on gas flow. In PTI technology, a signal from an integrated pressure transducer is combined with the standard thermal sensor output. The combined signals allow precise and stable flow , even when the line pressure is fluctuating.

The GF100 Series also utilizes MultiFlo configure standard configurations ("SHs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo® technology enables the user to reduce unique inventory requirements.

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangement s are shown in Figures 2-1 and 2-2. GF100's are often arranged inside a gas panel. Configure standard configurations ("SHs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo technology enables the user to reduce unique inventory requirements.

technology that allows the user to

Figure 2-1 Typical Gas Supply Arrangement with non-PTI MFC

Figure 2-2 Typical Gas Supply Arrangement with PTI MFC

2-3

Section 2 Installation

GF100 Series

2-11 Purge the Gas Supply Line Before GF100 Series Installation

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Before operating the GF100 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. The purge gas must be free of moisture and oxygen to less than 100 ppb. Purge the gas lines as follows or in accordance to prescribed company and safety procedures.

1. Shut off the process gas supply valve(s) upstream of the GF100 Series. If such a valve is not available, shut the valve on the gas panel. Tag the valve at this point to prevent accidental re-exposure of the process gas to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the process gas. Cycle purging consists of evacuating to a low pressure adequate to induce out-gassing and then purging to remove adhered moisture and oxygen. If a toxic or reactive gas is present and a clogged GF100 Series is suspected, then proceed with caution. Pump down and purge the GF100 Series from both downstream and upstream lines. If check valves are present in the gas line, both pumping down and purging are required. Pumping down without purging is inadequate. If a good vacuum source is not available, the GF100 Series can be decontaminated by purge only.

3. Repeat the purge cycle several times within 2-4 hours to complete the cleaning. For toxic and corrosive gasses, it is recommended to use 100-120 cycles.

2-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Figure 2-3 GF100 Series Mounting Attitude Positions

Section 2 Installation

GF100 Series

2-12 Position and Mount the GF100 Series

Position the GF100 Series so that the gas flow is pointed in the direction of the flow arrow on the GF100 Series rear S/N label. The various mounting positions are described in Figure 2-3

The standard orientation for the GF100 Series is Horizontal Base Down (HBD). The GF125 & GF135 employ a proprietary algorithm that utilizes the

internal pressure sensor to compensate for potential orientation effects when the MFC is used with certain higher density gases. Non HBD mounting orientations can be selected by using the MultiFlo software.

In the case of the GF100/120 Series, which does not have an internal pressure sensor, it is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information).

If your GF100 Series is configured with downported fittings, follow Step s 1 though 4 below. If your GF100 Series has VCR fittings, proceed to Step 5.

1. Refer to Figure 2-4. If downported fittings (1) are used, the GF100 Series is mounted to K1 Series substrate blocks (2) with four screws (3). Metal C-seals or W-seals (4) (as provided by integrator) are inserted between the GF100 Series and substrate blocks before the screws are installed. These metal seals must be replaced after each installation.

2. Select the mounting screws noted in Table 2-1 below for downported devices. M4 screws are used on 1.125" devices, K1S. M5 screws are used on 1.5" devices, K1R2 and K1H.

3. Refer to Figure 2-4. Insert the two mounting seals (4) over the gas flow path of the K1 block. Carefully align the GF100 Series mounting holes onto the K1 substrate blocks. Using your fingers, install the screws through the GF100 Series fitting and hand tighten.

2-5

Section 2 Installation

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

3 1

4 2

Figure 2-4 GF100 Series Mounted to K1 Series Substrate Blocks

2-6

Figure 2-5 Mounting Screws Torque Pattern

Table 2-1 K1 Series Fasteners

Connection Fastener Size

K1S K1R2 K1H

GF 100 Series M4 x 34mm M5 x 30mm M5 x 37mm

to or

Subtstrate M4 x 35mm

Table 2-2 K1 Substrate Torque Data

Connection

GF125 to

Subtstrate

Torque Pattern

Use a square pattern as

shown in Figure 2-5.

Start at 25 inch-pounds and

increase in increments of

10 inch-pounds until proper

value is obtained.

Torque (Inch-Pounds)

K1S K1R2 K1H

45 45 45

4. Using a torque wrench and a metric hex key , tighten the screws to the torque value as described in Table 2-2 and Torque Pattern Figure 2-5.

5. If your GF100 Series is configured with ¼" VCR fittings, secure the GF100 Series block to the gas panel with two, 8-32-UNC-2B" screws. Then connect the inlet/ outlet fittings to the gas supply line using two wrenches. Tighten the fittings to manufacturer recommendations.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-13 Perform a Leak T est

2-14 Zeroing Setup Process

Section 2 Installation

GF100 Series

WARNING

It is critical to leak test the gas supply lines and GF100 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method. Follow leak test specifications as defined by integrator.

The following steps are required before the GF100 Series is zeroed.

1. Make sure that the GF100 Series has been installed inside the equipment (panel) for at least four hours and powered up at least one hour prior to zeroing. This insures that the GF100 Series is in its "use attitude" and is operating at normal temperature. If the GF100 Series is subjected to a vacuum purge for more than one minute, turn off the GF100 Series (ie., provide a zero setpoint) for a time period of twice the vacuum purge time.

2. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close the downstream shut-off valve (7). This eliminates a pressure drop across the GF100 Series and subsequent leakage from the PID control valve inside the GF100 Series.

3. Provide a 100% setpoint to the GF100 Series for no longer than 60 seconds. This equalizes the pressure across the PID control valve.

4. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent any pressure effects from the regulator (3).

5. Close the GF100 Series and wait two minutes.

6. Read the output signal of the GF100 Series. This output signal is the initial flow in percent of full scale. The output signal should be 0.0 (±

0.1%). If the output signal is too high, re-zero the GF100 Series as described in Section 2-15.

2-15 Zeroing the GF100 Series

Many high density gases exhibit slight changes in zero output as a function of inlet pressure. Gases such as tungsten hexafluoride and many fluorocarbons are especially sensitive to this problem. Since inlet pressure is a potential source for zero errors, the pressure transducer on each GF100 Series should be correctly set to zero after installation. The zeroing process is performed from the backlight LCD display on top of the GF100 Series.

OEM tools using a microprocessor or computer for operating the GF100 Series should sequence the GF100 Series off between processes. To accomplish this, simply provide a zero set point. The GF100 Series will shut off automatically .

2-7

Section 2 Installation

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Shut-off valves, whether upstream or downstream from the GF100 Series, should be programmed to turn on before the GF100 Series is turned on and turned off after the GF100 Series is turned off.

2-15-1 Zeroing the GF100 Series Pressure Transducer from the LCD Display Panel

1. Place the GF100 Series under a strong vacuum with the GF100 Series set to 100% set point. Make sure that upstream valve is closed and the downstream valve is open. Allow time for the upstream pressure to bleed off.

2. Looking at the top of the GF100 Series, press the "Display" button, starting at the MACID, four times to "PSI" or five times to "kPa" or until the LCD displays the labels "PSI" or "kPa". The GF100 Series will display pressure in units of PSIA or kPa. Press and hold down the Zero button a minimum of 5 seconds or until the display reads 0.000, with the last two digits flickering at different values. The pressure transducer zeroing procedure can be done while the display is either in PSIA or kPA output. Refer to Figure 2-6.

April, 2017

2-8

Figure 2-6 Display with PSI Reading

After completion of the pressure transducer zeroing, the LCD display will

read 0.0 with the last two digits flickering as shown in Figure 2-7.

Figure 2-7 Display Reading Zero PSI

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-15-2 Zeroing GF100 Series Flow from LCD Display Panel

1. Place the GF100 Series under normal inlet operating pressure. Close

the down stream valve to prevent any flow.

2. Looking at the top of the GF100 Series, press the "Display" button until

the LCD display label is "%FS" as shown in Figure 2-8. Three button depressions from the MACID label display .

Section 2 Installation

GF100 Series

2-16 Performance Checks

Figure 2-8 Display Set to %FS

3. Press and hold down the Zero button for a minimum of 5 seconds or

until the "%FS" display reads 0.0 as shown in Figure 2-9. The %FS label will flash during this procedure.

Figure 2-9 % Flow Display Set to Zero

This section describes how to zero and sequence the GF100 Series devices for proper operation.

• The GF100 Series must be warmed up for at least 30 minutes.

•The active gas page must be correct.

•The GF100 Series pressure transducer must be correctly zeroed.

•The GF100 Series flow must be correctly zeroed.

2-9

Section 2 Installation

SH50

055

0001-55000 scc

GF100 Series

2-17 Introduction to the MultiFloTM Configurator

The MutliFlo Configurator application is used to configure the gas and range of the GF Series devices. The following section describes the MultiFlo Configurator and its uses.

2-18 Using the MultiFlo Configurator

The MultiFlo Configurator application allows communication to GF Series devices through personal computer with serial COM Port and a Windows 10, Windows 7 or Windows XP operating system. It’s primary function is to configure gas and flow ranges within six defined standard configurations. Flow ranges are configured to the Nitrogen equivalent.

Using the MultiFlo Configurator software, configure the gas and flow rate according to Table 2-3.

Table 2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent

Standard MG-MR Bin

Configuration

SH40 SH41 SH42 SH43 SH44 SH45 SH46 SH47 SH48 SH49

Flow range

Code 010C

030C 092C 280C 860C

2.6L

7.2L 015L 030L 040L

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Gas Flow Range

(N2 Equivalent)

3-10 sccm 11-30 sccm 31-92 sccm

93-280 sccm

281-860 sccm

861-2600 sccm

2601-7200 sccm

7201-15000 sccm 15001-30000 s c cm 30001-40000 s c cm 4

2-10

The MultiFlo Configurator interfaces to the GF Series device through RS485 or DeviceNet communications. There are various ways to connect the device regardless of device configuration. Devices may be connected through the diagnostic port using cables in one of the two Basic MultiFlo Configurator Kits or DeviceNet devices can alternatively be connected using a National Instruments or SST DeviceNet scanner card.

778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm 214F027AAA USB-RS485 Converter with DB-9 female

778Z011ZZZ Basic MultiFlo Configurator Kit

w/Power Supply and Adapter Cables A331710003 Cable Assembly 2.5mm 214F027AAA USB-RS485 Converter with DB-9 female A332295001 Power Supply MFC A332297002 Cable, Power, 9-Pin A332297001 Cable, Power, DeviceNet

Connect the MultiFlo Cable Adapter 2.5mm jack to the Diagnostic Port on the top of the device. See Figure 2-12.

Connect the RS485 end of the converter to the 9-Pin RS485 end of the MultiFlo Cable Adapter .

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Figure 2-10 MultiFlo Cable Adapter

Section 2 Installation

GF100 Series

Diagnostic Port (2.5mm jack)

Figure 2-11 USB-RS485 Converter (214F027AAA)

Connect the USB end of the converter to a laptop or PC. For GF1xx devices with EtherCA T communication, the diagnostic port must be used to interface with the MultiFlo Configurator.

• Ensure the M8 power connector is attached and the device is powered on

• Only after the device is powered on, attach a micro-USB cable to the diagnostic port of the device and the USB end to a laptop or PC

• Once use of the diagnostic port is complete, remove the micro-USB cable before removing power from the device. See Figure 2-12 below

Diagnostic Port (EtherCA T with Micro-USB)

Figure 2-12 Diagnostic Port Locations

2-11

Section 2 Installation

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

The latest MutliFlo Configurator Software and Databases and MultiFlo Configurator Quick Start Guide are available on the Brooks Instrument website at: www .BrooksInstrument.com/MultiFlo. Please reference the MultiFlo Configurator Quick Start Guide for inst allation and operation details. Download the MultiFlo Configurator software into your computer from the Brooks Instrument website

www .BrooksInstrument.com/MultiFlo. Install the MultiFlo Configurator as described in the MultiFlo Configurator Quick Start Guide and use the guide as a reference for operation details.

2-19 Electrical Connections

2-19-1 DeviceNet Connections

DeviceNet (M-12)

DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave. Obtain a DeviceNet communication cable (Micro M-12) and fasten it to the 5-pin connector as shown in Figure 2-13.

Connector Cable

DeviceNet 5-Pin (M-12) Connector (M)

Pin Connection

1 Drain 2 V+ (11-25 Vdc) 3V-4 CAN-H 5 CAN-L

2-12

Figure 2-13 GF100 Series DeviceNet Connection

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-19-2 Analog/RS485 Connections

Section 2 Installation

GF100 Series

The GF100 Series devices are available with Analog 9-Pin D-Connectors shown in Figure 2-14.

Analog 9-Pin

Connector

(Refer to Figure 2-15

for Pin-Out Details)

Figure 2-14 GF100 Series with 9-Pin Analog Connector

PIN Connection

1 V alve Control 2 Output (0-5 Vdc) 3 +15 Vdc 4 Power Common 5-15 Vdc 6 Setpoint (0-5 Vdc) 7 Signal Common 8 RS485 DX+ 9 RS485 DX-

Figure 2-15 Analog 9-Pin Connector (M)

2-13

Section 2 Installation

GF100 Series

2-19-3 EtherCA T Connections

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Power needs to be supplied via the standard male M8 5-pin connector . The M8 connector is located on the upper inlet side of the device. Refer to Figures 2-16 and 2-17 below.

M8 Connector

(Refer to Figure 2-17 for Pin-Out Details)

Figure 2-16 GF100 with EtherCAT Communications, M8 Power Connector Location.

PIN Connection

1 +24V 3 Power Common

2-14

Figure 2-17 M8 Power Connector Drawing

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Section 2 Installation

GF100 Series

Base I/O Options

PDC OrPDC Or

dering Code G1dering Code G1

PDC Or

dering Code G1

PDC OrPDC Or

dering Code G1dering Code G1 Description: Industry standard Analog / RS485 interface

123

PDC OrPDC Or

dering Code GXdering Code GX

PDC Or

dering Code GX

PDC OrPDC Or

dering Code GXdering Code GX Description: OEM specific Analog / RS485 interface. Display and top plate re-oriented 180

PDC OrPDC Or

PDC Or

PDC OrPDC Or Description: Industry standard ODVA compliant DeviceNet interface

PDC OrPDC Or

PDC Or

PDC OrPDC Or Description: Industry standard Analog only interface

dering Code Ddering Code D

dering Code D

dering Code Ddering Code D

dering Code dering Code

dering Code

dering Code dering Code

TXTX

123

I/O Options Using Base Model and Adapter Cable

A range of low profile adapter cables have been developed to support replacing older generation MFC's with different pinout configurations. The base MFC will be either a G1, TX or SX configuration, depending on the product being replaced.

PDC OrPDC Or

dering Code UXdering Code UX

PDC Or

dering Code UX

PDC OrPDC Or

dering Code UXdering Code UX

Description: SX base I/O with 7003550 adapter for compatibility with Unit UDU15

PDC OrPDC Or

dering Code: FX / dering Code: FX /

PDC Or

dering Code: FX /

PDC OrPDC Or

dering Code: FX / dering Code: FX / Description: SX base I/O with 7003069 (FX)/7001814 (JX) adapter for compatibility with Unit UDF9/UDJ9

JXJX

PDC OrPDC Or

dering Code: dering Code:

PDC Or

dering Code:

PDC OrPDC Or

dering Code: dering Code: Description: TX base I/O with 7003551 adapter for compatibility with IFlow DB15 & TN 15 pin

PDC OrPDC Or

dering Code: EXdering Code: EX

PDC Or

dering Code: EX

PDC OrPDC Or

dering Code: EXdering Code: EX Description: GX base I/O with 7003083 adapter for compatibility with Unit “E”, IN “L”, “R”

T1T1

PDC OrPDC Or

dering Code SXdering Code SX

PDC Or

dering Code SX

PDC OrPDC Or

dering Code SXdering Code SX Description: Industry standard Analog 9-Pin Sub D connector and dual RJ11 RS485 ports

PDC OrPDC Or

dering Code BBdering Code BB

PDC Or

dering Code BB

PDC OrPDC Or

dering Code BBdering Code BB Description: Industry standard ODVA compliant DeviceNet interface, Plus a separate Analog 0-5 Vdc Connector

All Base I/O options include:All Base I/O options include:

All Base I/O options include:

Diagnostic port communication RS485 via 2.5mm jacDiagnostic port communication RS485 via 2.5mm jac

Diagnostic port communication RS485 via 2.5mm jac

Diagnostic port communication RS485 via 2.5mm jacDiagnostic port communication RS485 via 2.5mm jac

All Base I/O options include:All Base I/O options include:

Figure 2-18 GF100 Series Electrical Interface Options

PDC OrPDC Or

dering Code: KXdering Code: KX

PDC Or

dering Code: KX

PDC OrPDC Or

dering Code: KXdering Code: KX Description: G1 base I/O with 7003298 adapter for compatibility with Unit UDK15

Other adapter options arOther adapter options ar

Other adapter options ar

Other adapter options arOther adapter options ar

e available for the GF Series. Please cone available for the GF Series. Please con

e available for the GF Series. Please con

e available for the GF Series. Please cone available for the GF Series. Please con

Customer Service for morCustomer Service for mor

Customer Service for mor

Customer Service for morCustomer Service for mor

PDC OrPDC Or

dering Code: Bdering Code: B

PDC Or

dering Code: B

PDC OrPDC Or

dering Code: Bdering Code: B Description: G1 base I/O with 7003590 adapter for compatibility with Brooks 15-Pin D

e ine in

formation.formation.

e in

formation.

e ine in

formation.formation.

tact Brtact Br

tact Br

tact Brtact Br

ooksooks

ooks

ooksooks

2-15

Section 2 Installation

GF100 Series

2-20 GF135 Inlet Valve Inst allation

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

When installing the GF135 –

1. Connect the MFC tubing labeled "IN" to a CDA or N2 supply of 90 ±3 psi.

2. Next, the MFC tubing labeled "OUT" should be connected to the customer upstream pneumatic isolation valve.

Note – The air passes through a failsafe normally open valve inside the GF135 and is connected back to the inlet isolation valve. For safe operation and in line with S2 compliance, the GF135 cannot override and open the inlet isolation valve.

Outlet - Pneumatic

Isolation Valve

Line

Figure 2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines

Inlet - Pneumatic

Isolation Valve Line

2-16

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-21 GF135 Commissioning

Section 2 Installation

GF100 Series

Download the GF135 commissioning software, part number 805-C-026, from the Brooks Instrument website. The software will need to be downloaded onto a computer with a Windows® based operating system.

Necessary equipment:

• Computer that runs a Windows operating system

• Power (either DeviceNet or RS485) to the device or M8 EtherCA T power

• Need gas supply for pneumatic valve (90 ±3 psi)

• BB 485 to 232 converter or approved USB to 485 converter

• 9-pin to diagnostic cable

In order to ensure best results, commission the GF135 at operating temperature and pressure on tool.

1. Start up the GF135 Commission Application and select a port. This will bring up all of the devices on this port.

2-17

Section 2 Installation

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

2. Select the single device that you want to perform the commissioning and click on "Connect to Device". The Commissioning button becomes enabled.

2-18

3. Click on the "Commission" button to begin the process. Some intermediate messages will appear on the bottom mesage bar. You will then be presented the option to override the current inlet gas pressure. Selecting "Yes" will keep the current inlet pressure. Selecting "No" will allow the user to override the pressure. Selecting "Cancel" will end the commissioning process.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Section 2 Installation

GF100 Series

4. The user will be presented the option to override a few of the parameters being tested prior to actual commissioning. Selecting "Yes" will continue the process. By selecting "No" the commissioning process will end.

5. After numerous checks are performed, the auto-volume will start. This will take approximately 5 minutes to complete. The K1 setpoints will then begin. This process will run for approximately 40-90 minutes.

2-19

Section 2 Installation

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

6. Once the auto-volume and the K1 set points are complete, the program will go back to the initial screen. In addition, the overall run time will be displayed. From here, another device (or the same one again) may be selected for commissioning.

2-20

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

3-1 General

Section 3 Operation

GF100 Series

After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any up stream shutof f valve to avoid a flow surge. A bypass is helpful in bringing the flow on smoothly . Avoid starting a pump to supply the device without the use of a valve upstream of the device.

3-2 Theory of Operation for Flow Measurement

The thermal mass flow measurement system consists of two components: the restrictor or bypass and the flow sensor. Figure 3-1 is diagram of the flow stream through the device, with an enlarged view of the flow sensor. Gas flow entering the device is separated into two paths; one straight through the restrictor and the other through the flow sensor. This is represented in Figure 3-1, where the total flow A+B enters the device and is separated into streams A and B. The streams are joined again at the far side of the restrictor. The separation of the flow streams is caused by the restrictor . During flow conditions, there will be a pressure differential across the restrictor that forces gas to flow in the sensor. The pressure difference caused by the restrictor varies linearly with total flow rate. The sensor has the same linear pressure difference versus flow relationship. The ratio of sensor flow to the flow through the restrictor remains constant over the range of the device (A/B = constant). The full scale flow rate of the device is established by selecting a restrictor with the correct pressure differential for the desired flow . The flow sensor is a very narrow, thin-walled Hastelloy tube. Onto this tube are built upstream and downstream temperature sensing and heating elements. During no-flow conditions, the amount of heat reaching each temperature sensor is equal, so temperatures T1 and T2 (Figure 3-1) are equal. Gas flowing through the tube carries heat away from the upstream temperature sensor and toward the downstream sensor. The temperature difference, T2 – T1, is directly proportional to the gas mass flow. GF100 Series operating principles are described in Figure 3-1.

3-1

Section 3 Operation

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Operating principles are listed below by following #1-5.

1. The GF125 uses a pressure transducer and support circuitry that sums the transducer signal in the sensor path (transducer not included in the GF100 and the GF120). Incoming pressure fluctuation results in a signal that is proportional to fluctuation.

2. The signal from the pressure transducer is inverted and then summed in with the original sensor signal.

3. The two summed signals cancel each other out.

4. The sensor signal that is applied to the microprocessor is undisturbed.

5. The flow of process gas is undisturbed by incoming pressure fluctuations.

Figure 3-1 GF100 Series Operating Principles

3-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

4-1 Overview

Section 4 Maintenance & T roubleshooting

GF100 Series

No routine maintenance is required on the Brooks GF100 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time. If reactive gases are being used, it is recommended that you send the device to a Brooks Service Center for cleaning and recalibration. Please follow the instructions for removal, product packaging and product return instructions found in Section 2- Installation—Return Shipment. All active process instrumentation and equipment is subject to aging and wear from their environment. This includes temperature, mechanical stress, component tolerance shift, contaminant buildup, oxidation, and other influences. The effects are gradual, but over time the changes can affect the accuracy of even the best equipment. Therefore, it is recommended to re-zero the device at 6 month intervals. Refer to Section 2-18 Performance Checks for re-zeroing instructions.

4-2 Maintenance

4-1

Section 4 Maintenance & Troubleshooting

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

4-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

4-3 Troubleshooting

Section 4 Maintenance & T roubleshooting

GF100 Series

This section includes a Troubleshooting Checklist and a GF100 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions.

4-4 Troubleshooting Checklist

1. Check environmental factors that could affect changes to GF100 Series performance. The most common environmental factors are listed in Table 4-1.

Table 4-1 Environmental Factors

GF100 Series Performance Possible Causes

Inaccurate flow. Temperature shift (steady state or transient).

Inlet pressure shift (steady state or transient). Power supply problem. Electrical interference Dirty gas chamber Changes in gas.

Control problems. Can Differential pressure not within operating range not reach setpoint. Inlet pressure not stable Oscillation.

Zeroing problems, Indicated Temperature shift (steady state or transient). zero is not stable. Inlet pressure shift (steady state or transient).

Power supply problem. Electrical interference

2. Check supply voltage and check for a consistent ground.

3. Insure OEM tool setpoint matches the setpoint at the GF100 Series. Observe for consistency.

4. V erify isolations valves are open and the gas supply is turned on. Then verify operating pressures are within operating ranges.

5. Check GF100 Series voltage response by moving the setpoint back and forth. Observe for voltage changes.

4-3

Section 4 Maintenance & Troubleshooting

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

4-5 GF100 Series Troubleshooting Guide

Table 4-2 GF100 Series Troubleshooting Guide

Symptoms & Possible Causes Corrective Action

1. No gas flow.

Is the gas supply turned on? Check shut-off valve and pressure readout. Open

the gas supply . Is the regulator turned on at the Turn off the regulator and reset it to the correct operating pressure? recommended pressure as described in the

Data Sheet. Are any upstream or downstream Verify that the valves are open and operating shut-off valves closed, either by properly. the system or because of failure? Is the MOD LED light on the GF100 Series Observe the LED display panel on top of to lit solid green? verify. If the LED light is not lit, cycle power the

to reboot. Is the commanded setpoint from Use the tool software to verify. tool/system at 0.00 Vdc? Has the been commanded Use the tool software to verify. off by an active “valve closed” input?

2. Flow out of range.

Is the gas inlet/outlet pressure differential Verify that the pressure is correct for the gas either too high or too low? and range. If required, adjust inlet/outlet pressure

to achieve proper pressure reading. NOTE: If the differential pressure is too high, voltage to the will be zero, which is abnormally low for the setpoint. If the differential is too low, volt age to will be at its maximum value, which is abnormally high for the set-point. Is the MOD LED light on the GF100 Series Observe the LED display panel at top of . lit solid green? If the LED light is not lit, cycle power the to

reboot. Is the setpoint correct for the Use the tool software to verify. required gas flow? Is the calibrated for the Check the side label. Run a particular gas? flow check to verify . Is the zero correct? Zero the according to zeroing

procedure in Section 2-14. Verify leak check rates

are OK.

3. No gas control; flow is at or above maximum.

Is the gas pressure across the Verify that the pressure is correct for the gas and too high? range. If required, adjust inlet/outlet pressure to

achieve proper pressure reading. Are system valves open, or is the Use tool software to verify. purge input activated? Is the setpoint correct for the Use tool software to verify. required flow?

April, 2017

4-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 4-2 GF100 Series Troubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

4. No gas flow above some set-point.

NOTE: When the setpoint is increased beyond this point, the GF100 Series signal remains at some value lower than the set-point.

Is the gas inlet/outlet differential V erify that the pressure is correct for pressure sufficient? the gas and range. If required, adjust

regulator to achieve proper pressure NOTE: If the pressure reading is too low, the valve voltage to the GF100 Series will be at its maximum output. This condition will cause internal GF valve heating and inability to properly reach desired flow setpoints. Is the GF100 Series calibrated for the Check GF100 Series side label. Run a flow check to verify. gas flow? If flow is incorrect, replace the GF100 Series with a unit that

is calibrated properly .

5. No gas flow below some set-point.

NOTE: When the setpoint is decreased below this point, the GF100 Series signal remains at some value higher than the setpoint.

Section 4 Maintenance & T roubleshooting

GF100 Series

Is the gas inlet/outlet differential V erify that the pressure is correct for pressure too high, or above published this gas and range. If required, adjust setpoints? regulator to achieve proper pressure

NOTE: If the differential pressure reading. is too high, voltage to the GF100 Series will be at its maximum value when the setpoint is decreased below the point where flow decreases. Is the GF100 Series leaking? Check for contamination. T est the GF100 Series

for leak integrity . Replace the Unit

GF100 Series if leakage is detected.

6. Gas flow, or GF100 Series pressure reading oscillates.

Is the GF100 Series calibrated for the Check the GF100 Series side can label. Run gas flowing? a flow check to verify. If flow is incorrect,

replace the GF100 Series. Is there too much gas pressure Verify that the pressure is correct for across the GF100 Series? this gas and range. If required, adjust

regulator to achieve proper pressure

reading.

4-5

Section 4 Maintenance & Troubleshooting

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Table 4-2 GF100 Series Troubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

6. Gas flow, or GF100 Series pressure reading oscillates.

Are inlet and outlet pressures stable? If outlet pressure is unstable, check for

(no oscillation or hunting) a faulty vacuum pump,

or hunting at a downstream valve. NOTE: Most GF100 Series calibrated with nitrogen will oscillate Check inlet pressure on tool. A faulty with hydrogen or helium. pressure regulator can make the

GF100 Series appear to oscillate.

Adjust inlet pressure up or down by 2

psig increments until hunting disappears.

Verify common gas pressure is

within range.

NOTE: Hunting or oscillation can be

contributed to multiple GF100 Series sharing

a common gas manifold. Therefore,

inspect gas delivery sources to

the gas box. (for example; two tools

sharing a common gas bottle and

calling for gas at the same time.) Valve leak.

Unregulated gas pressure from Facilities.

7. GF100 Series does not read zero pressure when gas is shut off.

Is the differential pressure across Verify that the pressure is correct for the GF100 Series really zero? the gas and range. If the GF100 Series has

been contaminated, it may not be able

to close, and therefore, will not zero.

Equalize the pressure across the GF100 Series by

opening it briefly . Set up the GF100 Series for zeroing.

Then perform the zeroing procedure in Section 2-14. Is the GF100 Series configured properly Use the tool software to verify . in the tool software? Is the GF100 Series mounted to the Refer to the side can label on the GF100 Series. proper attitude? The GF100 Series should be calibrated

in the attitude it will be operating at.

8. OEM tool does not read correct GF100 Series zero reading.

Is the differential pressure across the GF100 Series valve leakage. GF100 Series really zero? Incorrect MFC zero. Is the supply voltage within specified range? Is the GF100 Series mounted in the proper attitude? Is the flow output signal of the GF100 Series really zero?

9. Zero Drift.

Improper zero of the GF100 Series? GF100 Series aging or sensor stabilization. Excessive Valve leakage? Zero is not correct.

April, 2017

4-6

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 4-2 GF100 Series Troubleshooting Guide (Continued)

Symptoms & Possible Causes Corrective Action

10. Calibration Drift.

Gas box temperature too high? Zero is not correct. Is it linear offset?

11. GF100 Series indicates Overshoot.

If the tool is idle for an extended period of time,

high inlet pressure or contamination will cause

overshoot on first use.

12.OEM tool indicates the wrong full scale value for GF100 Series.

Older version of Multiflo Configurator used

to program GF100 Series.

13. GF100 Series dumps large volume of gas into chamber when setpoint is commanded from the tool.

The tool is commanding a setpoint before the

pneumatic valves are opened.

GF100 Series and pneumatic timing may be offset.

GF100 Series overshoots.

14. Tool display output doesn’t match GF100 Series flow output.

Cable resistance causing offset in the tool’s Check GF100 Series zero. display .

Section 4 Maintenance & T roubleshooting

GF100 Series

4-7

Section 4 Maintenance & Troubleshooting

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

4-8

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

5-1 Overview

Reference Tables 5-1 through 5-5 for specific Product Description Codes.

Table 5-1 GF100, GF120 & GF125 Series Product Description Code

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Package / Finish Specifications

II.II.

III.III.

III. Configurability

III.III.

IV.IV.

IV. Special Application

IV.IV.

V.V.

V. Valve Configuration

V.V.

VI.VI.

VI. Gas or SH MultiFlo Bin

VI.VI.

VII.VII.

VII. Fitting

VII.VII.

VIII.VIII.

VIII. Downstream Condition

VIII.VIII.

IX.IX.

IX. Sensor

IX.IX.

Code OptionCode Option

Code Option

Code OptionCode Option

GFGF

GF High Purity/Ultra High Purity Digital Mass Flow Controllers

GFGF

100100

100 Flow range 3 sccm -55 slpm N

100100 120120

120 Flow range 3 sccm -55 slpm N

120120 125125

125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N

125125

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

300-700 msec Response; 4 Ra

C MultiFlo capable. Standard bins or specific gas/range may be selected.

CC XX

X Not MultiFlo capable. Specific gas/range required. (must select w/ SD, SL or HA special application)

XXXX

XX Standard

XXXX

SLSL

SL Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, Nitrogen Equivalent

SLSL

SDSD

SD Safe Delivery System (GF120 Only) Full scale flow range; >25 sccm to 1 slpm, Nitrogen Equivalent

SDSD

O Normally Open valve (not available with SD, SL or HA options)

OO CC

C Normally Closed valve (must select with SD, SL or HA special application)

M Meter (No Valve)

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm (must select w/ SD, SL or

XXXX XXXXXXXX XXXX

HA special application).

SH40 010CSH40 010C

SH40 010C Standard Configuration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference)

SH40 010CSH40 010C SH41 030CSH41 030C

SH41 030C Standard Configuration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference)

SH41 030CSH41 030C SH42 092CSH42 092C

SH42 092C Standard Configuration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)

SH42 092CSH42 092C SH43 280CSH43 280C

SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent (0° C Reference)

SH43 280CSH43 280C SH44 860CSH44 860C

SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent (0° C Reference)

SH44 860CSH44 860C

SH45 2.6LSH45 2.6L

SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent (0° C Reference)

SH45 2.6LSH45 2.6L SH46 7.2LSH46 7.2L

SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent (0° C Reference)

SH46 7.2LSH46 7.2L

SH47 015LSH47 015L

SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent (0° C Reference)

SH47 015LSH47 015L

SH48 030LSH48 030L

SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent (0° C Reference)

SH48 030LSH48 030L

SH49 040LSH49 040L

SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent (0° C Reference)

SH49 040LSH49 040L SH50 055LSH50 055L

SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent (0° C Reference)

SH50 055LSH50 055L

VXVX

VX 1-1/2” body width, 124mm 1/4” VCR male

VXVX VSVS

VS 1-1/8” body width, 124mm 1/4” VCR male

VSVS CXCX

CX 1-1/8” body width, 92mm C Seal

CXCX DXDX

DX 1-1/8” body width, 79.8mm C Seal

DXDX EXEX

EX 1-1/2” body width, 79.8mm W Seal

EXEX

WXWX

WX 1-1/8” body width, 92mm W Seal

WXWX

YXYX

YX 1-1/8” body width, 79.8mm W Seal

YXYX AXAX

AX 1-1/2” body width, 92mm C Seal

AXAX BXBX

BX 1-1/2” body width, 92mm W Seal

BXBX LXLX

LX 1-1/8” body width, 92mm C Seal w/Poke Yoke

LXLX ASAS

AS 1-1/2” body width, 92mm 0.440” large bore C Seal (only for bins SH45-SH50)

ASAS

A Atmosphere

V Vacuum; Default for SD, SL and HA special application

O Default Sensor Orientation

Section 5 Product Description Code

GF100 Series

Eq.; + 1.0% SP Accuracy; 1 sec Response; 10 Ra

Eq.; + 1.0% SP Accuracy; 700 msec Response; 4 Ra

Eq.; + 1.0% SP Accuracy;

Model Code continued on next page.

5-1

Section 5 Product Description Code

GF100 Series

Table 5-1 GF100, GF120 & GF125 Series Product Description Code (Continued)

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

X.X.

X. Connector

X.X.

Code OptionCode Option

Code Option

Code OptionCode Option

BXBX

BX Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base

BXBX EXEX

EX Cable adapter to Card Edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base

EXEX

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

(Not Available on 79.8mm fitting DX, YX, EX)

FXFX

FX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”F”,”O”) adapts SX base

FXFX GXGX

GX 9-Pin D with RS485 (Unit”G”); display and overlay 180

GXGX

G1G1

G1 9-Pin D with RS485 (Unit”G”) (Not Available on 79.8mm fitting DX, YX, EX)

G1G1

JXJX

JX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”J”,”W”) adapts SX base

JXJX

KXKX

KX Cable adapter to MKS 15-Pin D (Unit “K”) adapts G1 base

KXKX

SXSX

SX 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)

SXSX TXTX

TX 9 pin D with UDT9 pin-out (UDT9)

TXTX T1T1

T1 Cable adapter to 15 pin D (IFlow DB15 & TN 15 pin) adapts TX base (Not Available on 79.8mm fitting DX, YX, EX)

T1T1

UXUX

UX Cable adapter to 15 pin D (w/VTP) (Unit & TN “U”) adapts SX base

UXUX BBBB

BB DeviceNet

BBBB

TMTM

Analog (Not Available on 79.8mm fitting DX, YX, EX)

DeviceNet Standard Configuration Parameters

Power On Full Scale Full Scale Full Scale Instance Instance State Baud

I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

D0D0

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D0D0 D1D1

D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D1D1 D2D2

D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB

D2D2 D3D3

D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D3D3 D4D4

D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D4D4 D5D5

D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB

D5D5 D6D6

D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB

D6D6 D7D7

D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB

D7D7 D8D8

D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB

D8D8 D9D9

D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB

D9D9 DD

A DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB

DBDB

DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DBDB DCDC

DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB

DCDC DDDD

DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB

DDDD DEDE

DE DeviceNet 5 Pin Micro Executing Sccm Float 6000h 15 19 Executing 500KB

DEDE DD

X DeviceNet 5 Pin Micro To be defined by CSR

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

orientation (Not Available on 79.8mm fitting DX, YX, EX)

Poll IO Poll IO Poll IO External

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

XI.XI.

XI. Customer Special Request

XI.XI.

XII.XII.

XII. Auto Shut-Off

XII.XII.

XIII.XIII.

XIII. Auto Zero

XIII.XIII.

XIV.XIV.

XIV. Reference Temperature

XIV.XIV.

Sample Standard Model CodeSample Standard Model Code

Sample Standard Model Code

Sample Standard Model CodeSample Standard Model Code

GFGF

Sample Safe Delivery System (SDS) Model CodeSample Safe Delivery System (SDS) Model Code

Sample Safe Delivery System (SDS) Model Code

Sample Safe Delivery System (SDS) Model CodeSample Safe Delivery System (SDS) Model Code

GFGF

IIII

100100

100

100100

IIII

120120

120

120120

IIIIII

III

IIIIII

III

IIIIII

5-2

Code OptionCode Option

Code Option

Code OptionCode Option

XXXXXXXX

XXXX Customer Special Request Number; required with “DX, BB” Conn. Option to define DNet settings

XXXXXXXX

A Auto Shut-Off (Included) Default for SD and SL special application

AA XX

X Auto Shut-Off (Not Included) (Must be selected for meter)

X Auto Zero (Not Included)

000000

000 0

000000

IVIV

V VI VII V VI VII

V VI VII

IVIV

V VI VII V VI VII

XXXX

M - M -

M -

XXXX

M - M -

IVIV

SDSD

C - C -

C -

C - C -

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

C Reference Calibration (Standard) - Default Setting

SH40010C - SH40010C -

SH40010C -

SH40010C - SH40010C -

VIVI

XXXXXXXX - XXXXXXXX -

XXXXXXXX -

XXXXXXXX - XXXXXXXX -

VX VX

VII VII

VII

VII VII EX EX

EX EX

VIIIVIII

VIII

VIIIVIII

VIII

VIIIVIII

IXIX

IX X IX X

IX X

IX X IX X

XI XI

GX - GX -

GX -

GX - GX -

SX - SX -

SX -

SX - SX -

XXXXXXXX

XXXX

XXXXXXXX

XIXI

XXXXXXXX

XXXX

XXXXXXXX

XIII XIV XIII XIV

XIIXII

XIII XIV

XII

XIIXII

XIII XIV XIII XIV

X - 000 X - 000

X - 000

X - 000 X - 000

XIIXII

XIII XIV XIII XIV

XII

XIII XIV

XIIXII

XIII XIV XIII XIV

X - 000 X - 000

X - 000

X - 000 X - 000

Installation and Operation Manual

Section 5 Product Description Code

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code

GF100 Series

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Package / Finish Specifications

II.II.

III.III.

III. Configurability

III.III.

IV.IV.

IV. Special Application

IV.IV.

V.V.

V. Valve Configuration

V.V.

VI.VI.

VI. Gas or SH MultiFlo Bin

VI.VI.

VII.VII.

VII. Fitting

VII.VII.

VIII.VIII.

VIII. Downstream Condition

VIII.VIII.

IX.IX.

IX. Sensor

IX.IX.

X.X.

X. Connector

X.X.

XI.XI.

XI. Customer Special Request

XI.XI.

XII.XII.

XII. Auto Shut-Off

XII.XII.

XIII.XIII.

XIII. Auto Zero

XIII.XIII.

XIV.XIV.

XIV. Reference Temperature

XIV.XIV.

Code OptionCode Option

Code Option

Code OptionCode Option

GFGF

GF High Purity/Ultra High Purity Digital Mass Flow Controllers

GFGF

100100

100 Flow range 3 sccm - 55 slpm N2 Equivalent.; 1 sec Response; 10 Ra

100100

120120

120 Flow range 3 sccm - 55 slpm N2 Equivalent.; 700 msec Response; 5 Ra

120120 125125

125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N2 Equivalent;

125125

C MultiFlo capable. Standard bins or specific gas/range may be selected.

CC XX

X Not MultiFlo capable. Specific gas/range required. (must select w/ SD or SL special application)

XXXX

XX Standard

XXXX SLSL

SL Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, N2 Equivalent

SLSL SDSD

SD Safe Delivery System (GF120 Only) Full scale flow range; 25 sccm to 1 slpm, N2 Equivalent

SDSD

O Normally Open valve (not available with SD, SL or VS options)

OO CC

C Normally Closed valve

CC MM

M Meter (No Valve)

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm

XXXX XXXXXXXX XXXX SH40 010CSH40 010C

SH40 010C Standard Configuration #40, 3-10 sccm Nitrogen Equivalent

SH40 010CSH40 010C SH41 030CSH41 030C

SH41 030C Standard Configuration #41, 11-30 sccm Nitrogen Equivalent

SH41 030CSH41 030C SH42 092CSH42 092C

SH42 092C Standard Configuration #42, 31-92 sccm Nitrogen Equivalent

SH42 092CSH42 092C SH43 280CSH43 280C

SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent

SH43 280CSH43 280C SH44 860CSH44 860C

SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent

SH44 860CSH44 860C

SH45 2.6LSH45 2.6L

SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent

SH45 2.6LSH45 2.6L SH46 7.2LSH46 7.2L

SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent

SH46 7.2LSH46 7.2L

SH47 015LSH47 015L

SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent

SH47 015LSH47 015L SH48 030LSH48 030L

SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent

SH48 030LSH48 030L SH49 040LSH49 040L

SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent

SH49 040LSH49 040L SH50 055LSH50 055L

SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent

SH50 055LSH50 055L

VSVS

VS 1-1/8” body width, 1/4” VCR male

VSVS VXVX

VX 1-1/2” body width, 1/4” VCR male

VXVX CXCX

CX 1-1/8” body width, C Seal 92mm

CXCX

WX 1-1/8” body width, W Seal 92mm

WXWX

A Atmosphere

AA VV

V Vacuum

O Default Sensor Orientation

E0E0

E0 EtherCAT Communication

E0E0

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

A Auto Shut-Off (Included)

AA XX

X Auto Shut-Off (Not Included)

X Auto Zero (Not Included)

000000

000 0 deg C Reference Calibration (Standard) - Default Setting

000000

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

300-700 msec Response; 5 Ra

5-3

Section 5 Product Description Code

Installation and Operation Manual

GF100 Series

Table 5-3 Model GF135 Product Description Code

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Package/Finish Specifications

II.II.

III.III.

III. Configurability

III.III.

IVIV

. Special Application

IVIV

.Valve Configuration

VI.VI.

VI.Specific Gas Code & Range,

VI.VI.

VII.VII.

VII. Fitting

VII.VII.

VIII. VIII.

VIII. Downstream Condition

VIII. VIII.

IX.IX.

IX. Sensor

IX.IX.

X.X.

X. Connector DeviceNet Standard Configuration Parameters

X.X.

Code OptionCode Option

Code Option

Code OptionCode Option

GFGF

135135

135 Pressure Transient Insensitive (PTI) Ultra High Purity Advanced Diagnostic MFC

135135

X Gas specific

XXXX

XX Standard Application

XXXX

C Normally Closed Valve

XXXX XXXXXXXX XXXX

XXXX XXXX Specify Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm

XXXX XXXXXXXX XXXX

VXVX

VX 1 1/2" VCR 1/4"

VXVX

CXCX

CX 1 1/8" C Seal 92mm

CXCX

WXWX

WX 1 1/8" W Seal 92mm (FUTURE RELEASE)

WXWX

A Atmosphere

V Vacuum

O Default Orientation

D0D0

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D0D0

D1D1

D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D1D1

D2D2

D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB

D2D2

D3D3

D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D3D3

D4D4

D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D4D4

D5D5

D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB

D5D5

D6D6

D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB

D6D6

D7D7

D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB

D7D7

D8D8

D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB

D8D8

D9D9

D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB

D9D9

A DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB

DBDB

DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DBDB

DCDC

DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB

DCDC

DDDD

DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB

DDDD

DEDE

DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB

DEDE

X DeviceNet 5 Pin Micro To be defined by CSR

G2G2

G2 Analog/RS485 9 Pin D NA NA NA NA NA NA NA NA

G2G2

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

Power On Full Scale Full Scale Full Scale Instance Instance State Baud

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Poll IO Poll IO Poll IO External

XI.XI.

XI. Customer Special Request

XI.XI.

XII.XII.

XII. Auto Shut-Off

XII.XII.

XIII.XIII.

XIII. Auto Zero

XIII.XIII.

XIVXIV

XIV

. Reference Temperature

XIVXIV

Example Model CodeExample Model Code

Example Model Code

Example Model CodeExample Model Code

GFGF

5-4

GFGF

IIII

135135

135

135135

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

A Auto Shut Off (Included)

X Auto Shut Off (Not Included)

A Auto Zero (Included)

X Auto Zero (Not Included)

000000

000 0°C Reference Calibration (Standard) - Default Setting

000000

IIIIII

IVIV

XXXX

IVIV

VV CC

III

IIIIII

VIVI

XXXX XXXXXXXX XXXX

XXXX XXXX

XXXX XXXXXXXX XXXX

VIIVII

VII

VIIVII VXVX

VXVX

VIIIVIII

VIII

VIIIVIII

IXIX

XIXI

XIIXII

XIIIXIII

IXIX

D1D1

XIXI

XXXXXXXX

XXXX

XXXXXXXX

XII

XIIXII

XIII

XIIIXIII

XIVXIV

XIV

XIVXIV

000000

000

000000

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 5-4 GF101, GF121 & GF126 Series Product Description Code

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Package / Finish Specifications

II.II.

III.III.

III. Configurability

III.III.

IV.IV.

IV. Special Application

IV.IV.

V.V.

V. Valve Configuration

V.V.

VI.VI.

VI. Gas or SH MultiFlo Bin

VI.VI.

VII.VII.

VII. Fitting

VII.VII.

VIII.VIII.

VIII. Downstream Condition

VIII.VIII.

IX.IX.

IX. Sensor

IX.IX.

X.X.

X. Connector

X.X.

XI.XI.

XI. Customer Special Request

XI.XI.

XII.XII.

XII. Auto Shut-Off

XII.XII.

XIII.XIII.

XIII. Auto Zero

XIII.XIII.

XIV.XIV.

XIV. Reference Temperature

XIV.XIV.

Sample Standard Model CodeSample Standard Model Code

Sample Standard Model Code

Sample Standard Model CodeSample Standard Model Code

GFGF

IIII

101101

101

101101

IIIIII

III

IIIIII

Code OptionCode Option

Code Option

Code OptionCode Option

GFGF

GF High Purity/Ultra High Purity Digital Mass Flow Controllers

GFGF

101101

101 Flow range 55 - 300 slm N

101101 121121

121 Flow range 55 - 300 slm N

121121 126126

126 Flow range 55 - 300 slm N

126126

C MultiFlo capable

CC XX

X Not configurable

XXXX

XX Standard

XXXX

C Normally Closed valve

M Meter (No Valve)

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “100L” = 100 slpm

XXXX XXXXXXXX XXXX SH51 055LSH51 055L

SH51 055L Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)

SH51 055LSH51 055L

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

Special Bin for low density gases, e.g. 73,002-120,000 He, 100,002-170,000 H2

SH52 100LSH52 100L

SH52 100L Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)

SH52 100LSH52 100L SH53 200LSH53 200L

SH53 200L Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)

SH53 200LSH53 200L SH54 300LSH54 300L

SH54 300L Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)

SH54 300LSH54 300L

V1V1

V1 1-1/2” body width, 134mm 1/2” VCR male (See Accessories on Page 3 for VCR lay length adapters)

V1V1 V2V2

V2 1-1/2” body width, 150.4mm 1/2” VCR male

V2V2 V3V3

V3 1-1/2” body width, 166mm 1/2” VCR male

V3V3 V4V4

V4 1-1/2” body width, 168.6mm 1/2” VCR male

V4V4

C1C1

C1 1-1/2” body width, 92mm 3/8” C Seal

C1C1 C2C2

C2 1-1/2” body width, 114mm 3/8” C Seal

C2C2

A Atmosphere

AA VV

V Vacuum

O Default Sensor Orientation

BXBX

BX Cable adapter to 15 pin D Brooks (Unit “B”,”N”)

BXBX EXEX

EX Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”);

EXEX

display and overlay 180

FXFX

FX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”F”,”O”)

FXFX G1G1

G1 9-Pin D with RS485 (Unit”G”)

G1G1

JXJX

JX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”J”,”W”)

JXJX

KXKX

KX Cable adapter to MKS 15-Pin D (Unit “K”)

KXKX SXSX

SX 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)

SXSX UXUX

UX Cable adapter to 15 pin D (w/VTP) (Unit & TN “U”)

UXUX

orientation

DeviceNet Standard Configuration Parameters

Power On Full Scale Full Scale Full Scale Instance Instance State Baud

I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

D0D0

DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D0D0 D1D1

DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D1D1 D2D2

DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB

D2D2 D3D3

DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D3D3 D4D4

DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D4D4 D5D5

DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB

D5D5 D6D6

DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB

D6D6 D7D7

DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB

D7D7 D8D8

DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB

D8D8 D9D9

DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB

D9D9 DD

DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB

DBDB

DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DBDB DCDC

DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB

DCDC DDDD

DD DEDE

DEDE DD

DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB

DDDD

DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB

DeviceNet 5 Pin Micro To be defined by CSR

XXXXXXXX

XXXX Customer Special Request Number

XXXXXXXX

A Auto Shut-Off (Included)

AA XX

X Auto Shut-Off (Not Included) (Must be selected for meter)

A Auto Zero (Included)

AA XX

X Auto Zero (Not Included)

000000

000 0

000000

IVIV

V VI VII V VI VII

V VI VII

IVIV

V VI VII V VI VII

XXXX

C - C -

C -

XXXX

C - C -

C Reference Calibration (Standard) - Default Setting

VIIIVIII

VIII

SH52 100L - SH52 100L -

SH52 100L -

SH52 100L - SH52 100L -

V1 V1

VIIIVIII

Section 5 Product Description Code

GF100 Series

Eq.; 10 Ra HP wetted flow path Eq. 5 Ra UHP wetted flow path Eq. 5 Ra UHP wetted flow path & integrated pressure measurement

Poll IO Poll IO Poll IO External

IXIX

XI XI

G1 - G1 -

G1 -

G1 - G1 -

XXXXXXXX

XXXX

XXXXXXXX

XIIXII

XIII XIV XIII XIV

XII

XIII XIV

XIIXII

XIII XIV XIII XIV

X - 000 X - 000

X - 000

X - 000 X - 000

5-5

Section 5 Product Description Code

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code

Code DescriptionCode Description

Code Description

Code DescriptionCode Description

I.I.

I. Base Model Code

I.I.

II.II.

II. Package / Finish Specifications

II.II.

III.III.

III. Configurability

III.III.

IV.IV.

IV. Special Application

IV.IV.

V.V.

V. Valve Configuration

V.V.

VI.VI.

VI. Gas or SH MultiFlo Bin

VI.VI.

VII.VII.

VII. Fitting

VII.VII.

VIII.VIII.

VIII. Downstream Condition

VIII.VIII.

IX.IX.

IX. Sensor

IX.IX.

X.X.

X. Connector

X.X.

XI.XI.

XI. Customer Special Request

XI.XI.

XII.XII.

XII. Auto Shut-Off

XII.XII.

XIII.XIII.

XIII. Auto Zero

XIII.XIII.

XIV.XIV.

XIV. Reference Temperature

XIV.XIV.

Code OptionCode Option

Code Option

Code OptionCode Option

GFGF

GF High Purity/Ultra High Purity Digital Mass Flow Controllers

GFGF

101101

101 Flow range 55 - 300 slm N2 Equivalent.; 10 Ra HP wetted flow path

101101 121121

121 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path

121121 126126

126 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path & integrated pressure measurement

126126

C MultiFlo capable. Standard bins or specific gas/range may be selected

CC XX

X Not MultiFlo capable. Specific gas/range required

XXXX

XX Standard

XXXX

C Normally Closed valve

CC MM

M Meter (No Valve)

XXXX XXXXXXXX XXXX

XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm

XXXX XXXXXXXX XXXX SH51 055LSH51 055L

SH51 055L Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)

SH51 055LSH51 055L SH52 100LSH52 100L

SH52 100L Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)

SH52 100LSH52 100L SH53 200LSH53 200L

SH53 200L Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)

SH53 200LSH53 200L SH54 300LSH54 300L

SH54 300L Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)

SH54 300LSH54 300L

V1V1

V1 1-1/2” body width, 134mm 1/2” VCR male

V1V1 C1C1

C1 1-1/2” body width, 92mm C Seal

C1C1 C2C2

C2 1-1/2” body width, 114mm C Seal

C2C2

A Atmosphere

AA VV

V Vacuum

O Default Sensor Orientation

E0E0

E0 EtherCAT Communication

E0E0

XXXXXXXX

XXXX Customer Special Request (CSR) Number

XXXXXXXX

A Auto Shut-Off (Included)

AA XX

X Auto Shut-Off (Not Included)

X Auto Zero (Not Included)

000000

000 0

000000

Option DescriptionOption Description

Option Description

Option DescriptionOption Description

C Reference Calibration (Standard) - Default Setting

April, 2017

5-6

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series Ordering Instructions

Refer to the Product Description Codes on the previous pages. S tarting from the lef t, choose the product code options as follows:

1. Required performance model. a. Standard Performance, non-PTI: GF100 b. High Performance, non-PTI: GF120 c. High Performance, w/ PTI: GF125 d. High Performance, w/ PTI, w/ROD: GF135 e. Standard Performance, High Flow, Non-PTI: GF101 f. High Performance, High Flow , Non-PTI: GF121 g. High Performance, High Flow , w/PTI: GF126

2. Configurability a. Disabled: X b. Enabled: C, Standard (not an option for GF135)

3. Specialty Application a. Safe Delivery , for GF120 only: SD b. No Specialty App: XX

4. Valve Configuration a. Normally Closed: C b. Normally Open: O c. Meter: M

5. Gas or SH MultiFlo Bin a.If Gas Specific, enter SEMI gas code: ex. 0013, for N2 b.If SH MuliFlow Bin: SHnn, nn being the required SHBin, 40 - 50 or 51 - 54 (High Flow)

6. Maximum Flow a.If Gas Specific, enter maximum range in sccm, "C" or slm "L": ex. 500C b.If SH Bin, enter defined maximum flow: ex. 860, choosing SH44, 281 - 860 sccm

7. Fitting a.Enter 2-character option code as defined: ex. CX, 1 1/8" C Seal 92mm

8. Downstream Condition a.Outlet to V acuum: V b.Outlet to Atmosphere: A

9. Sensor a.Orthogonal: O, this is default, non-selectable

10.Connector a.Enter 2-character option code as defined: ex. DX, DeviceNet

11.CSR a.Customer S pecial Requirement, contact Brooks Apps Engineering for review of requirement and creation of CSR: nnnn b.If DNET connector, CSR required to define DNET attributes: 0924, generic, ODV A Std. configuration c.None Required: XXXX

12.Auto Shut-Off. a.Enabled: A b.Disabled: X

13.Auto Zero a.Disabled: X

14.Reference Temperature, Operating Temperature in Degrees C a.0oC Reference Calibration (Standard): 000, default

Section 5 Product Description Code

GF100 Series

Here is an example of a configured Product Description Code (PDC) for a GF125, Configurable, no Specialty Application, Valve Normally Closed, MultiFlo for 281-860 sccm, 1 1/8" C Seal 92mm, outlet to Vacuum, default sensor, DNET, no CSR, Auto Shut Off enabled, Auto Zero disabled and Default Reference Temperature:

GF125CXXC-SH44860C-CXVODX-0924AX-000

5-7

Section 5 Product Description Code

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

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5-8

Installation and Operation Manual

SH40-SH47 SH48 SH49 SH50 Low High Low High Low High Low High Low High Low High Low High Low High Low High

Low High Low High

He Helium 19.7 24.7 29.7 5 14 15 42 43 128 129 400 401 1194 1195 3609 3610 11100 11101 23100 23101 47000 47001 100000

Ne Neon 24.7 5 14 15 42 43 129 130 400 401 1207 1208 3650 3651 10700 10701 22100

Ar Argon 24.7 29.7 39.7 44.7 5 14 15 42 43 130 131 400 401 1214 1215 3671 3672 10000 10001 20200 20201 41000 41001 42000 42001 55000

Kr Krypton 29.7 4 11 12 32 33 100 101 300 301 930 931 2800 2801 7160 7161 14900

Xe Xenon 24.7 3 6 7 19 20 58 59 178 179 546 547 1651 1652 4210 4211 8760

H2 Hydrogen 14.7 14.7 19.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 8000 8001 16400 16401 33000 33001 73000

Air Air 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7400 7401 15000 15001 30000

CO Carbon Monoxide 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7300 7301 15000 15001 30000

HBr Hydrogen Bromide 24.7 3 8 9 25 26 77 78 235 236 723 724 2187 2188 5610 5611 11700

HCl Hydrogen Chloride 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 6900 6901 14200 14201 29000

HF Hydrogen Fluoride 14.7 17.7 3 10 11 30 31 94 95 281 282 880 881 2610 2611 7400 7401 15000 15001 30000

N2 Nitrogen 24.7 29.7 29.7 32.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 40000 40001 55000

D2 Deuterium 14.7 14.7 3 10 11 30 31 94 95 280 281 880 881 2600 2601 8100 8101 16500 16501 33000

O2 Oxygen 24.7 29.7 29.7 34.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 37000 37001 55000

NO Nitric Oxide 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000

HI Hydrogen Iodide 24.7 29.7 3 5 6 15 16 46 47 141 142 432 433 1305 1306 3340 3341 6960 6961 13900

F2 Fluorine 24.7 29.7 3 9 10 27 28 83 84 254 255 780 781 2358 2359 6700 6701 14000 14001 28000

Cl2 Chlorine 24.7 29.7 3 6 7 19 20 57 58 173 174 531 532 1604 1605 4850 4851 10100 10101 20200

H2S Hydrogen Sulfide 24.7 29.7 3 8 9 25 26 76 77 232 233 713 714 2155 2156 5900 5901 12100 12101 24100

H2Se Hydrogen Selenide 24.7 29.7 3 7 8 22 23 66 67 202 203 620 621 1874 1875 4770 4771 10000 10001 20000

CO2 Carbon Di oxide 24.7 29.7 29.7 29.7 3 7 8 22 23 69 70 209 210 642 643 1942 1943 5300 5301 11000 11001 22000 22001 28000 28001 39000

N2O Nit rous Oxide 24.7 29.7 29.7 29.7 3 7 8 21 22 65 66 200 201 611 612 1849 1850 5100 5101 10400 10401 21000 21001 25000 25001 37000

CH4 Methane 24.7 24.7 29.7 3 8 9 23 24 71 72 215 216 660 661 2000 2001 5800 5801 12000 12001 24000 24001 46000

NH3 Ammonia 24.7 24.7 29.7 3 8 9 24 25 73 74 223 224 685 686 2072 2073 6000 6001 12200 12201 25000 25001 46000

PH3 Phosphine 19.7 24.7 3 7 8 22 23 67 68 205 206 629 630 1901 1902 5200 5201 10700 10701 21300

SO2 Sulfur Diox ide 19.7 24.7 3 6 7 17 18 52 53 157 158 483 484 1459 1460 3800 3801 7920 7921 15800

CH3F Methyl Fluoride 24.7 29.7 3 7 8 22 23 67 68 204 205 625 626 1890 1891 5200 5201 10600 10601 21200

COS Carbonyl Sulfide 24.7 29.7 3 7 8 20 21 60 61 183 184 562 563 1700 1701 4500 4501 9400 9401 18300

AsH3 Arsine 24.7 29.7 3 6 7 18 19 55 56 170 171 510 511 1550 1551 4000 4001 8500 8501 17000

ClCN Cyanogen Chloride 14.7 21.7 3 5 6 15 16 46 47 142 143 435 436 1320 1321 3400 3401 7060 7061 14100

C2H4 Ethylene 24.7 29.7 3 6 7 17 18 54 55 163 164 501 502 1516 1517 4400 4401 9300 9301 18200

SiH4 Silane 24.7 29.7 3 6 7 18 19 56 57 170 171 523 524 1581 1582 4400 4401 9300 9301 18200

C2H2 Acetylene 16.7 19.7 3 6 7 18 19 57 58 170 171 530 531 1600 1601 4400 4401 9300 9301 18200

GeH4 Germane 24.7 29.7 3 6 7 17 18 53 54 161 162 495 496 1500 1501 4000 4001 8400 8401 16400

COF2 Carbonyl Fluoride 19.7 19.7 21.7 3 5 6 17 18 53 54 160 161 500 501 1500 1501 4000 4001 8400 8401 16500 16501 21000

BF3 Boron Trifluoride 19.7 24.7 3 5 6 16 17 50 51 150 151 457 458 1381 1382 3800 3801 7900 7901 15500

CHF3 Fluoroform (Freon-23) 24.7 24.7 24.7 26.7 3 5 6 16 17 48 49 145 146 445 446 1344 1345 3600 3601 7600 7601 15000 15001 17000 17001 26000

NF3 Nitrogen Trifluoride 24.7 29.7 24.7 26.7 3 5 6 15 16 46 47 140 141 430 431 1300 1301 3600 3601 7500 7501 15000 15001 17000 17001 26000

C2H6 Ethane 17.7 29.7 3 5 6 16 17 50 51 153 154 469 470 1418 1419 4000 4001 8300 8301 16300

B2H6 Diborane 19.7 19.7 3 4 5 12 13 38 39 116 117 358 359 1082 1083 3100 3101 6400 6401 12600

COCl2 Phosgene 12.7 14.7 3 3 4 11 12 35 36 106 107 325 326 1000 1001 2520 2521 5250 5251 10500

PF3 Phosphorus Trifluoride 19.7 24.7 3 4 5 14 15 42 43 129 130 400 401 1200 1201 3200 3201 6800 6801 13300

CF4 Carbon Tetrafluoride (Freon-14) 24.7 24.7 24.7 26.7 3 4 5 13 14 40 41 121 122 372 373 1123 1124 3010 3011 6400 6401 12600 12601 17000 17001 22000

SiH2Cl2 Dichlorosilane 14.7 19.7 3 3 4 10 11 29 30 89 90 273 274 824 825 2140 2141 4450 4451 8900

C3H6-b) Propylene 19.7 19.7 3 4 5 12 13 36 37 110 111 338 339 1022 1023 2800 2801 5900 5901 11700

BCl3 Boron Trichloride 11.7 14.7 3 3 4 10 11 31 32 94 95 289 290 874 875 2230 2231 4650 4651 9300

ClO3F Perchloryl Fluoride 14.7 20.7 3 4 5 12 13 38 39 114 115 350 351 1060 1061 2800 2801 5800 5801 11500

ClF3 Chlorine Trifluoride 14.7 20.7 3 4 5 11 12 35 36 107 108 327 328 1000 1001 2560 2561 5340 5341 10700

C2H7N Dimethylamine 9.7 14.7 3 3 4 11 12 34 35 101 102 310 311 960 961 2530 2531 5400 5401 10600

SiF4 Silicon Tetrafluoride 19.7 24.7 3 4 5 11 12 34 35 103 104 316 317 1000 1001 2600 2601 5400 5401 10600

C3H8 Propane 9.7 11.7 3 3 4 10 11 32 33 100 101 300 301 910 911 2420 2421 5100 5101 10100

C2F4 Tetrafluoroethylene 19.7 19.7 3 3 4 10 11 31 32 100 101 300 301 900 901 2300 2301 4900 4901 9800

Si2H6 DISILANE 19.7 19.7 3 3 4 10 11 30 31 92 93 282 283 853 854 2300 2301 4900 4901 9800

GeF4 Germanium Tetrafluoride 20.7 24.7 3 3 4 10 11 30 31 92 93 282 283 860 861 2200 2201 4700 4701 9400

104

C4H8-i) Butene 20.7 24.7 3 5 6 17 18 52 53 159 160 480 481 1420 1421 2950 2951 5900

108

SiCl4 Silicon Tetrachloride 8.7 3 6 7 18 19 56 57 172 173 520 521 1320 1321 2750

Gas

Code

Gas Symbol

Gas Name

SH44

SH40

SH43

SH42

SH41

Min inlet pressure for vac. exhaust

(PSIA)

SH49

SH50

SH48

SH45

SH46

SH47

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

A-1 GF100 Series Gas Table

Table A-1 GF100 Series Gas Table

(Reference the following pages, A-1 and A-2).

Table A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50

Appendix A: GF100 Series Gas Table

GF100 Series

For reference only, consult factory on the latest tables. (990-100-0082-R17)

A-1

Appendix A: GF100 Series Gas Table

SH40-SH47 SH48 SH49 SH50 Low High Low High Low High Low High Low High Low High Low High Low High Low High

Low High Low High

Gas

Code

Gas Symbol

Gas Name

SH44

SH40

SH43

SH42

SH41

Min inlet pressure for vac. exhaust

(PSIA)

SH49

SH50

SH48

SH45

SH46

SH47

878

3%C2H4/He 3%Ethylene/Helium 19.7 19.7 4 13 14 40 41 125 126 375 376 1150 1151 3500 3501 10700 10701 22100 22101 45000

881

10%B2H6/Ar 5%Diborane/Argon 24.7 29.7 4 11 12 35 36 105 106 320 321 1000 1001 3000 3001 8100 8101 17000 17001 34000

897

2.7%C2H4/He 2.7%Ethylene/Helium 19.7 19.7 4 13 14 40 41 125 126 377 378 1158 1159 3502 3503 10700 10701 22200 22201 45000

898

1%GeH4/H2 1%Germane/Hydrogen 20.7 20.7 3 10 11 30 31 91 92 275 276 850 851 2530 2531 8000 8001 16200 16201 33000

910

.5%GeH4/H2 0.5%Germane/Hydrogen 20.7 20.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 8000 8001 16300 16301 33000

916

2%PH3/H2 2%Phosphine/Hydrogen 21.7 21.7 3 10 11 30 31 91 92 275 276 850 851 2530 2531 8000 8001 16200 16201 33000

917

50%C3H6-b)/N2 50%Propylene/Nitrogen 19.7 21.7 3 5 6 17 18 53 54 160 161 500 501 1500 1501 4100 4101 8600 8601 17000

925

10%C3H6-b)/N2 10%Propylene/Nitrogen 19.7 21.7 3 8 9 26 27 82 83 243 244 760 761 2300 2301 6400 6401 13100 13101 26100

929

10%CH4/N2 10%Methane/Nitrogen 19.7 21.7 3 10 11 29 30 91 92 272 273 850 851 2520 2521 7200 7201 15000 15001 30000

930

3.9%H2/N2 3.9%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7400 7401 15100 15101 30100

939

10%B2H6/He 10%Diborane/Helium 19.7 19.7 4 11 12 34 35 103 104 314 315 965 966 2918 2919 9000 9001 18400 18401 37000

946

30%C2H4/He 30%Ethylene/Helium 19.7 24.7 3 10 11 30 31 90 91 275 276 850 851 2551 2552 7800 7801 16000 16001 32000

950

10%H2/He 10%Hydrogen/Helium 19.7 19.7 4 13 14 40 41 125 126 380 381 1200 1201 3500 3501 10700 10701 22200 22201 45000

953

15%H2/B2H6 15%Hydrogen/Diborane 19.7 19.7 3 4 5 14 15 42 43 130 131 400 401 1200 1201 3400 3401 7100 7101 14000

958

17%CH4/CO2 17%Methane/Carbon Dioxide 24.7 29.7 3 7 8 23 24 70 71 210 211 650 651 2000 2001 5400 5401 11000 11001 22000

962

20%CH6Si/H2

20%Methylsilane (MONO)/Hydrog

965

50%CH3SiHCl2/H2

50%Dichloromethylsilane/Hydroge

11.7 13.7 3 4 5 14 15 42 43 130 131 400 401 1200 1201 3100 3101 6600 6601 13000

978

20%GeH4/H2 20%Germane/Hydrogen 19.7 24.7 3 8 9 26 27 81 82 241 242 750 751 2240 2241 6600 6601 13500 13501 27000

979

0.5%B2H6/He 0.5%Diborane/Helium 14.7 19.7 5 14 15 42 43 130 131 400 401 1200 1201 3700 3701 11000 11001 23000 23001 47000

980

20%F2/Ar 20%Fluorine/Argon 24.7 29.7 4 13 14 39 40 120 121 360 361 1100 1101 3400 3401 9000 9001 18400 18401 37000

982

5%HF/N2 5%Hydrogen Fluoride/Nitrogen 24.7 29.7 4 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000

983

3%H2S/CO

3%Hydrogen Sulfide/Carbon Mon

984

1.4%C2H2/Ar 1.4%Acetylene/Argon 24.7 29.7 5 14 15 42 43 130 131 390 391 1200 1201 3600 3601 9700 9701 20000 20001 40000

985

2%Ge2H6/H2 2%Digermane/Hydrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000

986

38%SiCl4/O2 38%Silicon Tetrachloride/Oxygen 24.7 29.7 29.7 29.7 3 5 6 16 17 50 51 150 151 460 461 1400 1401 3600 3601 7500 7501 15000 15001 15001 15002 25000

987

20%H2S/20%CO2/

20%Hydrogen Sulfide/20%Carbon

988

20%SiH2Cl2/H2 20%Dichlorosilane/Hydrogen 24.7 29.7 3 8 9 24 25 74 75 222 223 700 701 2100 2101 5900 5901 12000 12001 24000

989

0.1%Cl2/N2 0.1%Chlorine/Nitrogen 24.7 29.7 4 10 11 30 31 94 95 280 281 880 881 2600 2601 7400 7401 15000 15001 30000

990

1%HCl/N2 1%Hydrogen Chloride/Nitrogen 24.7 29.7 4 10 11 30 31 94 95 280 281 880 881 2600 2601 7400 7401 15000 15001 30000

991

3%BCl3/N2 3%Boron Trichloride/Nitrogen 24. 7 29.7 3 9 10 29 30 91 92 270 271 850 851 2510 2511 7000 7001 14400 14401 29000

992

18%NO/N2 18%Nitric Oxide/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880 881 2600 2601 7300 7301 15000 15001 30000

993

9%NO/41%N2/H2 9%Nitric Oxide/41%Nitrogen/H2 24.7 29.7 4 10 11 30 31 94 95 281 282 880 881 2610 2611 7700 7701 16000 16001 32000

994

20%H2/Ar 20%Hydrogen/Argon 24.7 29.7 4 13 14 40 41 120 121 370 371 1120 1121 3400 3401 9400 9401 19200 19201 39000

5022

COS-Special Carbonyl Sulfide (Special) 24.7 29.7 3 7 8 20 21 60 61 183 184 562 563 1700 1701 4500 4501 9400 9401 18300

SH40-SH47 SH48 SH49 SH50 Low High Low High Low High Low High Low High Low High Low High Low High Low High

Low High Low High

Gas

Code

Gas Symbol

Gas Name

SH44

SH40

SH43

SH42

SH41

Min inlet pressure for vac. exhaust

(PSIA)

SH49

SH50

SH48

SH45

SH46

SH47

109

C3H9N Trimethylamine 6.7 8.7 3 8 9 25 26 78 79 240 241 720 721 1910 1911 4000 4001 8100

110

SF6 Sulfur Hexafluoride 19.7 19.7 19.7 20.7 3 8 9 25 26 77 78 237 238 715 716 1900 1901 4000 4001 8000 8001 8200 8201 13400

111

C4H10-d) Isobutane 19.7 19.7 19.7 20.7 3 7 8 23 24 70 71 216 217 653 654 1800 1801 3800 3801 7600 7601 8200 8201 13200

117

C4H10-c) Butane 19.7 19.7 19.7 20.7 3 8 9 25 26 76 77 234 235 706 707 1910 1911 4000 4001 8100 8101 8200 8201 14100

118

C2F6 Hexafluoroethane (Freon-116) 19.7 19.7 3 8 9 23 24 71 72 218 219 658 659 1750 1751 3700 3701 7400

121

WF6 Tungsten Hexafluoride 9.7 11.7 3 5 6 16 17 50 51 150 151 460 461 1200 1201 2500 2501 5000

128

C3F8 Perfluoropropane 19.7 19.7 3 5 6 16 17 50 51 154 155 465 466 1200 1201 2500 2501 5100

129

C4F8 Octafluorocyclobutane 19.7 19.7 3 5 6 16 17 50 51 154 155 465 466 1170 1171 2430 2431 4900

138

C3F6 Hexafluoropropylene 19.7 19.7 3 6 7 20 21 60 61 184 185 556 557 1470 1471 3050 3051 6110

155

C2HF5

PENTAFLUOROETHANE (FREO

19.7 19.7 3 8 9 25 26 77 78 235 236 711 712 1900 1901 4000 4001 8000

160

CH2F2 Difluoromethane 24.7 29.7 3 6 7 19 20 57 58 174 175 533 534 1612 1613 4300 4301 9000 9001 18000

185

CH6Si Methylsilane (MONO) 9.7 14.7 3 4 5 12 13 37 38 111 112 340 341 1050 1051 2800 2801 5900 5901 11600

190

(CH3)3SiH Tri methylsilane (TMSi) 6.7 3 7 8 20 21 62 63 189 190 572 573 1530 1531 3200

266

C5F8 Octafluorocyclopentene 9.7 14.7 3 5 6 14 15 44 45 134 135 406 407 1050 1051 2200 2201 4500

270

C4F6 Hexafluoro-2-butyne 9.7 3 6 7 19 20 57 58 176 177 533 534 1400 1401 2900

297

C4F6-q) Hexafluoro Butadiene-1-3 14.7 14.7 3 6 7 17 18 52 53 160 161 500 501 1270 1271 2640 2641 5270

354

C5F8O Epoxyperfluorocyclopentene 19.7 19.7 3 4 5 13 14 40 41 122 123 369 370 1000 1001 2100 2101 4200

368

Si3H9N Trisilylamine (TSA) 6.0 7.2 3 6 7 20 21 60 61 181 182 560 561 1410 1411 3000 3001 6000

371

C4H11N Dimethylethylamine 8.7 8.7 3 6 7 20 21 63 64 190 191 580 581 1530 1531 3200 3201 6500

509

10%GeH4/H2 10%Germane/Hydrogen 20.7 20.7 3 9 10 28 29 86 87 260 261 800 801 2400 2401 7200 7201 15000 15001 30000

516

10%PH3/H2 10%Phosphine/Hydrogen 14.7 14.7 3 9 10 28 29 90 91 275 276 813 814 2500 2501 7600 7601 15500 15501 31000

527

10%PH3/N2 10%Phosphine/Nitrogen 19.7 24.7 3 9 1 0 30 31 91 92 271 272 850 851 2510 2511 7100 7101 14500 14501 29000

528

4.5%PH3/N2 4.5%Phosphine/Nitrogen 20.7 29.7 3 10 11 30 31 94 95 280 281 880 881 2600 2601 7200 7201 15000 15001 30000

536

20%O2/He 20%Oxygen/Helium 19.7 29.7 4 13 14 38 39 120 121 360 361 1102 1103 3331 3332 10000 10001 21000 21001 42000

537

1%PH3/Ar 1%Phosphine/Argon 19.7 29.7 5 14 15 42 43 128 129 390 391 1200 1201 3600 3601 9800 9801 20000 20001 40000

542

5%H2/N2 5%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7400 7401 15100 15101 31000

557

1%B2H6/H2 1%Diborane Hydrogen 24.7 29.7 3 10 11 30 31 91 92 270 271 850 851 2510 2511 7900 7901 16100 16101 33000

563

1%PH3/H2 1%Phosphine/Hydrogen 19.7 19.7 3 10 11 30 31 90 91 273 274 850 851 2531 2532 7800 7801 16000 16001 32000

595

3%B2H6/N2 3%Diborane/Nitrogen 20.7 29.7 3 9 10 29 30 90 91 270 271 850 851 2500 2501 7100 7101 14500 14501 29000

597

3%H2/N2 3%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7400 7401 15100 15101 30100

603

30%He/O2 30%Helium/Oxygen 24.7 29.7 4 11 12 33 34 100 101 301 302 950 951 2800 2801 8100 8101 17000 17001 34000

604

30%O2/He 30%Oxygen/Helium 19.7 29.7 4 12 13 37 38 113 114 345 346 1060 1061 3203 3204 9700 9701 20000 20001 40000

606

4%H2/He 4%Hydrogen/Helium 19.7 19.7 5 14 15 41 42 126 127 400 401 1200 1201 3600 3601 11000 11001 23000 23001 46000

607

4%H2/N2 4%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7400 7401 15100 15101 30100

615

5%B2H6/Ar 5%Diborane/Argon 24.7 4 12 13 38 39 116 117 353 354 1084 1085 3278 3279 8900 8901 18200

626

5%PH3/Ar 5%Phosphine/Argon 27.7 32.7 5 13 14 41 42 125 126 380 381 1170 1171 3600 3601 9500 9501 19400 19401 39000

632

50%PH3/SiH4 50%Phosphine/Silane 16.7 24.7 3 6 7 20 21 62 63 190 191 580 581 1730 1731 4800 4801 10000 10001 20000

649

10%O2/He 10%Oxygen/Helium 19.7 24.7 5 13 14 41 42 123 124 380 381 1150 1151 3500 3501 10500 10501 22000 22001 44000

653

2%SiH4/N2 2%SILANE/NITROGEN 19.7 24.7 3 10 11 30 31 93 94 280 281 870 871 2600 2601 7300 7301 15000 15001 30000

654

5%B2H6/N2 5%Diborane/Nitrogen 24.7 29.7 3 9 10 28 29 86 87 262 263 804 805 2500 2501 7000 7001 14100 14101 28100

662

.8%B2H6/N2 .8%Diborane/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870 871 2600 2601 7300 7301 15000 15001 30000

674

10%PH3/He 10%Phosphine/Helium 14.7 19.7 4 13 14 40 41 120 121 370 371 1100 1101 3400 3401 10000 10001 21000 21001 43000

676

7.5%PH3/SiH4 7.5%Phosphine/Silane 14.7 14.7 3 6 7 19 20 58 59 175 176 540 541 1610 1611 4500 4501 9400 9401 18400

693

5%PH3/He 5%Phosphine/Helium 12.7 14.7 4 13 14 41 42 125 126 380 381 1150 1151 3500 3501 10500 10501 22000 22001 44000

695

2%B2H6/N2 2%Diborane/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870 871 2600 2601 7200 7201 15000 15001 30000

698

10%GeH4/Ar 10%Germane/Argon 24.7 29.7 4 12 13 38 39 114 115 350 351 1070 1071 3300 3301 8700 8701 18000 18001 36000

700

4%H2/Ar 4%Hydrogen/Argon 24.7 29.7 5 14 15 42 43 130 131 390 391 1200 1201 3700 3701 9800 9801 20000 20001 40000

701

10%B2H6/H2 10%Diborane/Hydrogen 14.7 14.7 3 8 9 26 27 81 82 241 242 760 761 2300 2301 7000 7001 14200 14201 29000

762

5%H2/He 5%Hydrogen/Helium 19.7 19.7 5 14 15 41 42 125 126 400 401 1200 1201 3600 3601 11000 11001 23000 23001 46000

766

5%B2H6/He 5%Diborane/Helium 14.7 16.7 4 12 13 38 39 115 116 350 351 1100 1101 3300 3301 10000 10001 21000 21001 42000

780

5%SiH4/He 5%Silane/Helium 14.7 16.7 4 13 14 40 41 122 123 380 381 1140 1141 3500 3501 10500 10501 22000 22001 44000

805

1%B2H6/Ar 1%Diborane/Argon 14.7 16.7 5 14 15 42 43 130 131 390 391 1200 1201 3600 3601 9700 9701 20000 20001 40000

820

15%B2H6/H2 15%Diborane/Hydrogen 14.7 14.7 3 8 9 25 26 76 77 230 231 710 711 2120 2121 6500 6501 13300 13301 27000

824

2%SO2/N2 2%Sulfur Dioxide/Nitrogen 14.7 14.7 3 10 11 30 31 93 94 280 281 870 871 2600 2601 7300 7301 15000 15001 30000

837

30%GeH4/Ar 30%Germane/Argon 14.7 14.7 3 10 11 30 31 93 94 280 281 860 861 2600 2601 6900 6901 14100 14101 28100

875

20%O2/Ar 20%Oxygen/Argon 14.7 14.7 4 13 14 39 40 120 121 370 371 1120 1121 3400 3401 9200 9201 19000 19001 38000

GF100 Series

Table A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Table A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50

14.7 19.7 3 7 8 23 24 71 72 212 213 660 661 2000 2001 5900 5901 12000 12001 24000

24.7 29.7 3 10 11 30 31 92 93 280 281 860 861 2600 2601 7200 7201 15000 15001 30000

24.7 29.7 3 9 10 27 28 85 86 252 253 790 791 2400 2401 6500 6501 13300 13301 27000

For reference only, consult factory on the latest tables. (990-100-0082-R17)

A-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

B-1 GF100 Series Patents

Table B-1 GF100 Series Patents

Patent/Pub. No. Title

6343617 6389364 6425281 6445980 6539792 6640822 6681787 6714878 6752166 6826953 6845659

6910381

6941965 6962164 7043374 7073392 7082824

7113895 7114511 7133785 7143774 7150201 7216019 7231931 7243035 7272512 7273063 7287434 7360551 7363182 7380564 7409871 7412986 7424894 7434477

Appendix B: GF100 Series Patents

GF100 Series

The GF100 Series may be protected by the following US patents and their international filings.

System and method of operation of a digital mass flow controller System and method for a digital mass flow controller Pressure insensitive gas control system System and method for a variable gain proportional-integral (PI) controller Method and apparatus for balancing resistance System and method of operation of a digital mass flow controller System and method of operation of a digital mass flow controller System and method for a digital mass flow controller Method and apparatus for providing a determined ratio of process fluids Flow sensor Variable resistance sensor with common reference leg System and method of operation of an embedded system for a digital capacitance diaphragm gauge Method and apparatus for providing a determined ratio of process fluids System and method for a mass flow controller Flow sensor signal conversion Methods and apparatus for pressure compensation in a mass flow controller Variable resistance sensor with common reference leg

System and method for filtering output in mass flow controllers and mass flow meters System and method for a mass flow controller Valve control system and method Method and apparatus for providing a determined ratio of process fluids System and method for measuring flow Method and system for a mass flow controller with reduced pressure sensitivity System and method for a mass flow controller System and method for mass flow detection device calibration Flow sensor signal conversion Methods and apparatus for pressure compensation in a mass flow controller System and method for measuring flow Method and apparatus for providing a determined ratio of process fluids System and method for mass flow detection device calibration System and method for a mass flow controller Mass flow meter or controller with inclination sensor Method and system for flow measurement and validation of a mass flow controller Method and apparatus for providing a determined ratio of process fluids Methods and apparatus for pressure compensation in a mass flow controller

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Appendix B: GF100 Series Patents

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

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Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Bulgarian

Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ

ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ!

Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ. Ɍɟɡɢ ɨɛɨɪɭɞɜɚɧɢɹ ɬɪɹɛɜɚ ɩɪɚɜɢɥɧɨ ɞɚ ɫɟ ɢɧɫɬɚɥɢɪɚɬ, ɟɤɫɩɥɨɚɬɢɪɚɬ ɢ ɩɨɞɞɴɪɠɚɬ ɡɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ, ɱɟ ɳɟ ɦɨɝɚɬ ɞɚ ɪɚɛɨɬɹɬ ɫɴɨɬɜɟɬɧɨ ɧɚ ɬɟɯɧɢɬɟ ɧɨɪɦɚɥɧɢ ɫɩɟɰɢɮɢɤɚɰɢɢ. ɋɥɟɞɜɚɳɢɬɟ ɢɧɫɬɪɭɤɰɢɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɢ ɩɪɨɝɪɚɦɚɬɚ ɡɚ ɛɟɡɨɩɚɫɧɨɫɬ ɧɚ ɬɪɭɞɚ ɩɪɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ ɩɪɨɞɭɤɬɢɬɟ ɧɚ Brooks Instrument.

x Ɂɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ ɯɚɪɚɤɬɟɪɧɚɬɚ ɩɪɨɢɡɜɨɞɢɬɟɥɧɨɫɬ, ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ, ɚɤɬɭɚɥɢɡɢɪɚɧɟɬɨ, ɩɪɨɝɪɚɦɢɪɚɧɟɬɨ ɢ ɩɨɞɞɪɴɠɤɚɬɚ

ɧɚ ɩɪɨɞɭɤɬɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɜɴɪɲɜɚɬ ɫɚɦɨ ɨɬ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ.

x ɉɪɨɱɟɬɟɬɟ ɜɫɢɱɤɢ ɢɧɫɬɪɭɤɰɢɢ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ, ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ ɢ ɩɨɞɞɪɴɠɤɚɬɚ ɧɚ

ɫɴɨɬɜɟɬɫɬɜɚɳɨɬɨ ɢɡɞɚɧɢɟ, ɜɢɠɬɟ ɧɚ ɡɚɞɧɚɬɚ ɨɛɥɨɠɤɚ ɢɧɮɨɪɦɚɰɢɹɬɚ ɡɚ ɤɨɧɬɚɤɬ ɫ ɦɟɫɬɧɢɹ ɬɴɪɝɨɜɫɤɢ ɨɮɢɫ. Ɂɚɩɚɡɟɬɟ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɡɚ ɩɨ-ɤɴɫɧɨ ɢɧɮɨɪɦɢɪɚɧɟ.

ȼɇɂɆȺɇɂȿ: ɇɟ ɪɚɛɨɬɟɬɟ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɜɴɧ ɞɢɚɩɚɡɨɧɢɬɟ, ɭɤɚɡɚɧɢ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɢ ɪɴɤɨɜɨɞɫɬɜɨɬɨ ɩɨ ɟɤɫɩɥɨɚɬɚɰɢɹ.

ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɫɟɪɢɨɡɧɢ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ ɢ / ɢɥɢ ɩɨɜɪɟɠɞɚɧɟ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ.

x Ⱥɤɨ ɧɟ ɪɚɡɛɢɪɚɬɟ ɧɹɤɨɢ ɢɧɫɬɪɭɤɰɢɢɬɟ, ɫɜɴɪɠɟɬɟ ɫɟ ɫ ɩɪɟɞɫɬɚɜɢɬɟɥɹ ɧɚ Brooks Instrument ɡɚ ɢɡɹɫɧɹɜɚɧɟ ɧɚ ɩɪɨɛɥɟɦɚ. x ɋɩɚɡɜɚɣɬɟ ɜɫɢɱɤɢ ɩɪɟɞɭɩɪɟɠɞɟɧɢɹ, ɩɪɢɡɨɜɢ ɢ ɢɧɫɬɪɭɤɰɢɢ

ɉɊȿȾɍɉɊȿɀȾȿɇɂȿ: ɉɪɟɞɢ ɢɧɫɬɚɥɚɰɢɹɬɚ ɫɟ ɭɛɟɞɟɬɟ, ɱɟ ɬɨɡɢ ɢɧɫɬɪɭɦɟɧɬ ɩɪɢɬɟɠɚɜɚ ɧɟɨɛɯɨɞɢɦɢɬɟ ɨɞɨɛɪɟɧɢɹ ɡɚ ɫɴɨɬɜɟɬɫɬɜɢɟ ɧɚ ɦɟɫɬɧɢɬɟ ɢ ɧɚɰɢɨɧɚɥɧɢɬɟ ɤɨɞɨɜɟ. ɇɟɫɩɚɡɜɚɧɟɬɨ ɧɚ ɬɨɜɚ ɩɪɟɞɭɩɪɟɠɞɟɧɢɟ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɫɟɪɢɨɡɧɢ ɬɪɚɜɦɢ ɢ/ɢɥɢ ɩɨɜɪɟɞɚ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ.

x ɂɧɫɬɚɥɢɪɚɣɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ ɫɴɨɬɜɟɬɧɨ ɧɚ ɭɤɚɡɚɧɢɹɬɚ ɜ ɢɧɫɬɪɭɤɰɢɹɬɚ ɡɚ

ɩɪɟɞɩɢɫɚɧɢɹ. ɋɜɴɪɡɜɚɣɬɟ ɩɪɨɞɭɤɬɢɬɟ ɫɚɦɨ ɤɴɦ ɩɨɞɯɨɞɹɳɢ ɢɡɬɨɱɧɢɰɢ ɧɚ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɧɚɥɹɝɚɧɟ.

x ɏɨɞ: (1) Ȼɚɜɧɨ ɜɴɜɟɞɟɬɟ ɫɢɫɬɟɦɚɬɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ȼɚɜɧɨ ɨɬɜɨɪɟɬɟ ɪɚɛɨɬɧɢɬɟ ɤɥɚɩɚɧɢ ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ ɤɨɥɟɛɚɧɢɹɬɚ ɧɚ ɩɨɬɨɤɚ. (2)

ɉɪɨɜɟɪɟɬɟ ɞɚɥɢ ɧɹɦɚ ɢɡɬɢɱɚɧɟ ɩɪɢ ɜɯɨɞɧɨɬɨ ɢ ɢɡɯɨɞɧɨɬɨ ɫɴɟɞɢɧɟɧɢɟ ɧɚ ɪɚɡɯɨɞɨɦɟɪɚ. Ⱥɤɨ ɧɹɦɚ ɢɡɬɢɱɚɧɟ ɪɚɛɨɬɧɨ ɧɚɥɹɝɚɧɟ.

x ɉɪɟɞɢ ɢɡɜɴɪɲɜɚɧɟ ɧɚ ɩɨɞɞɪɴɠɤɚɬɚ ɧɟɩɪɟɦɟɧɧɨ ɩɪɨɜɟɪɟɬɟ ɞɚɥɢ ɪɚɛɨɬɧɢɹɬ ɬɪɴɛɨɩɪɨɜɨɞ ɧɟ ɫɟ ɧɚɦɢɪɚ ɩɨɞ ɧɚɥɹɝɚɧɟ. Ⱥɤɨ ɫɚ ɧɟɨɛɯɨɞɢɦɢ

ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ, ɫ ɨɩɪɟɞɟɥɟɧɢɬɟ ɨɬ Brooks Instrument ɪɟɡɟɪɜɧɢ ɱɚɫɬɢ ɬɪɹɛɜɚ ɞɚ ɛɨɪɚɜɢ ɫɚɦɨ ɤɜɚɥɢɮɢɰɢɪɚɧ ɩɟɪɫɨɧɚɥ. ɇɟɪɚɡɪɟɲɟɧɢɬɟ ɱɚɫɬɢ ɢ ɩɪɨɰɟɞɭɪɢ ɦɨɝɚɬ ɞɚ ɨɤɚɠɚɬ ɜɥɢɹɧɢɟ ɜɴɪɯɭ ɪɚɛɨɬɚɬɚ ɧɚ ɩɪɨɞɭɤɬɚ, ɢ ɫɴɳɨ Ɂɚɦɟɫɬɜɚɧɟɬɨ ɫ ɧɟɨɪɢɝɢɧɚɥɧɢ ɱɚɫɬɢ ɦɨɠɟ ɞɚ ɞɨɜɟɞɟ ɞɨ ɩɨɠɚɪ, ɨɩɚɫɧɨɫɬ ɨɬ ɬɨɤɨɜ ɭɞɚɪ ɢɥɢ ɧɟɩɪɚɜɢɥɧɚ ɪɚɛɨɬɚ.

x ȼɫɢɱɤɢ ɜɪɚɬɢ ɧɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɧɟɩɪɟɦɟɧɧɨ ɞɚ ɛɴɞɚɬ ɡɚɬɜɨɪɟɧɢ, ɚ ɡɚɳɢɬɧɢɬɟ ɩɨɤɪɢɬɢɹ ɞɚ ɛɴɞɚɬ ɧɚ ɦɹɫɬɨɬɨ ɫɢ, ɡɚ ɞɚ ɫɟ ɢɡɛɟɝɧɚɬ

ɬɨɤɨɜɢɬɟ ɭɞɚɪɢ ɢ ɬɟɥɟɫɧɢɬɟ ɩɨɜɪɟɞɢ, ɨɫɜɟɧ ɚɤɨ ɤɜɚɥɢɮɢɰɢɪɚɧɢ ɫɩɟɰɢɚɥɢɫɬɢ

ȼɇɂɆȺɇɂȿ: ɉɪɢ ɨɛɨɪɭɞɜɚɧɢɹɬɚ ɫ ɩɪɨɬɢɱɚɳɢ ɬɟɱɧɨɫɬɢ, ɚɤɨ ɩɨ ɧɹɤɚɤɜɚ ɩɪɢɱɢɧɚ ɟ ɧɟɨɛɯɨɞɢɦɨ ɞɚ ɫɟ ɡɚɬɜɨɪɹɬ ɧɚɦɢɪɚɳɢɬɟ ɫɟ ɞɨ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɡɯɨɞɧɢ ɢ ɜɯɨɞɧɢ ɤɥɚɩɚɧɢ, ɨɛɨɪɭɞɜɚɧɟɬɨ ɬɪɹɛɜɚ ɧɚɩɴɥɧɨ ɞɚ ɫɟ ɢɡɩɪɚɡɧɢ. ɇɟɢɡɩɴɥɧɟɧɢɟɬɨ ɧɚ ɬɨɜɚ ɦɨɠɟ ɞɚ ɩɪɢɱɢɧɢ ɬɨɩɥɢɧɧɨ ɪɚɡɲɢɪɟɧɢɟ ɧɚ ɬɟɱɧɨɫɬɬɚ, ɤɨɟɬɨ ɦɨɠɟ ɞɨ ɫɩɭɤɚ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢ ɞɚ ɞɨɜɟɞɟ ɞɨ ɬɟɥɟɫɧɢ ɩɨɜɪɟɞɢ.

ɨɡɧɚɱɟɧɢ ɜɴɪɯɭ ɨɛɨɪɭɞɜɚɧɟɬɨ ɢɥɢ ɞɨɫɬɚɜɟɧɢ ɡɚɟɞɧɨ ɫ ɧɟɝɨ.

ɢɧɫɬɚɥɢɪɚɧɟ ɢ ɧɚ ɞɟɣɫɬɜɚɳɢɬɟ ɧɚ ɦɟɫɬɧɢ ɢ ɧɚɰɢɨɧɚɥɧɢ

ɢɡɜɴɪɲɜɚɬ ɪɚɛɨɬɢ ɩɨ ɧɟɝɨɜɨɬɨ ɩɨɞɞɴɪɠɚɧɟ.

ɩɪɨɞɭɤɬɚ. Ⱥɤɨ ɬɨɜɚ ɪɴɤɨɜɨɞɫɬɜɨ ɧɟ ɟ

ɞɚ ɡɚɫɬɪɚɲɚɬ ɛɟɡɨɩɚɫɧɨɫɬɬɚ ɧɚ ɟɤɫɩɥɨɚɬɚɰɢɹɬɚ.

ɬɪɹɛɜɚ ɞɚ ɫɟ ɜɤɥɸɱɚɬ ɜ

, ɧɚɩɴɥɧɟɬɟ ɫɢɫɬɟɦɚɬɚ ɞɨ

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED)

ȼɫɢɱɤɢ ɫɴɨɪɴɠɟɧɢɹ ɩɨɞ ɧɚɥɹɝɚɧɟ ɫ ɜɴɬɪɟɲɧɨ ɧɚɥɹɝɚɧɟ ɧɚɞ 0,5 bar (g) ɢ ɫ ɪɚɡɦɟɪ ɩɨ-ɝɨɥɹɦ ɨɬ 25 mm ɢɥɢ 1" (inch), ɩɨɩɚɞɚɬ ɩɨɞ ɞɟɣɫɬɜɢɟɬɨ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɭɪɟɞɢ ɩɨɞ ɧɚɥɹɝɚɧɟ (PED).

x Ƚɥɚɜɚ „Ɍɟɯɧɢɱɟɫɤɢ ɞɚɧɧɢ” ɧɚ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɫɴɞɴɪɠɚ ɫɜɴɪɡɚɧɢɬɟ ɫ ɞɢɪɟɤɬɢɜɚɬɚ PED ɢɧɫɬɪɭɤɰɢɢ. x ɍɤɚɡɚɧɢɬɟ ɜ ɧɚɫɬɨɹɳɨɬɨ ɪɴɤɨɜɨɞɫɬɜɨ ɩɪɨɞɭɤɬɢ ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ ɟɜɪɨɩɟɣɫɤɚɬɚ ɞɢɪɟɤɬɢɜɚ 2014/34/EU. x ȼɫɢɱɤɢ ɪɚɡɯɨɞɨɦɟɪɢ x ɉɪɨɞɭɤɬɢɬɟ ɩɨ-ɝɨɥɟɦɢ ɨɬ 25 mm ɢɥɢ 1" (inch) ɫɴɨɬɜɟɬɫɬɜɚɬ ɧɚ I, II ɢɥɢ III ɤɚɬɟɝɨɪɢɹ ɫɩɨɪɟɞ PED.

ɉɪɨɞɭɤɬɢɬɟ ɫ ɪɚɡɦɟɪɢ 25 mm ɢɥɢ 1" (inch), ɢɥɢ ɩɨ-ɦɚɥɤɢ, ɫɥɟɞɜɚɬ ɞɨɛɪɚɬɚ ɢɧɠɟɧɟɪɧɚ ɩɪɚɤɬɢɤɚ (SEP).

ɧɚ Brooks Instrument ɫɟ ɨɬɧɚɫɹɬ ɤɴɦ ɮɥɭɢɞɢ ɨɬ ɝɪɭɩɚ 1.

ȿɜɪɨɩɟɣɫɤɚ ɞɢɪɟɤɬɢɜɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (EMC)

ɇɨɫɟɳɨɬɨ ɡɧɚɤɚ ɋȿ (ɟɥɟɤɬɪɢɱɟɫɤɨ/ɟɥɟɤɬɪɨɧɧɨ) ɨɛɨɪɭɞɜɚɧɟ ɧɚ Brooks Instrument ɟ ɢɡɩɴɥɧɢɥɨ ɭɫɩɟɲɧɨ ɬɟɫɬɨɜɟɬɟ ɡɚ ɩɪɨɜɟɪɤɚ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɡɚ ɟɥɟɤɬɪɨɦɚɝɧɢɬɧɚ ɫɴɜɦɟɫɬɢɦɨɫɬ (ɞɢɪɟɤɬɢɜɚ EMC 2014/30/EU). Ɉɫɨɛɟɧɨ ɜɧɢɦɚɧɢɟ ɬɪɹɛɜɚ ɞɚ ɫɟ ɨɛɪɴɳɚ ɨɛɚɱɟ ɧɚ ɢɡɛɢɪɚɧɟɬɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɢɡɩɨɥɡɜɚɧɢ ɫ ɨɛɨɪɭɞɜɚɧɟɬɨ, ɧɨɫɟɳɨ ɡɧɚɤɚ ɋȿ.

Ʉɚɱɟɫɬɜɨ ɧɚ ɫɢɝɧɚɥɧɢɬɟ ɤɚɛɟɥɢ, ɤɚɛɟɥɧɢɬɟ ɫɚɥɧɢɰɢ ɢ ɫɴɟɞɢɧɢɬɟɥɢ:

Brooks Insturment ɩɪɟɞɥɚɝɚ ɜɢɫɨɤɨɤɚɱɟɫɬɜɟɧɢ ɤɚɛɟɥɢ, ɨɬɝɨɜɚɪɹɳɢ ɧɚ ɢɡɢɫɤɜɚɧɢɹɬɚ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. Ⱥɤɨ ɢɡɩɨɥɡɜɚɬɟ ɫɨɛɫɬɜɟɧ ɫɢɝɧɚɥɟɧ ɤɚɛɟɥ, ɬɪɹɛɜɚ ɞɚ ɢɡɛɟɪɟɬɟ ɬɚɤɴɜ, ɤɨɣɬɨ ɟ ɧɚɩɴɥɧɨ ɡɚɳɢɬɟɧ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɬɢɩ „D” ɢɥɢ „ɤɪɴɝɨɜ” ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɟɤɪɚɧɢɪɚɧɢ ɫ ɦɟɬɚɥɟɧ ɳɢɬ. ɉɪɢ ɧɟɨɛɯɨɞɢɦɨɫɬ ɡɚ ɮɢɤɫɢɪɚɧɟɬɨ ɧɚ ɳɢɬɚ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɢɡɩɨɥɡɜɚɬ ɦɟɬɚɥɧɢ ɤɚɛɟɥɧɢ ɫɚɥɧɢɰɢ. ɓɢɬɴɬ ɧɚ ɤɚɛɟɥɚ ɬɪɹɛɜɚ ɞɚ ɫɟ ɫɜɴɪɠɟ ɫ ɦɟɬɚɥɧɨɬɨ ɩɨɤɪɢɬɢɟ ɢɥɢ ɦɟɬɚɥɧɢɹ ɫɚɥɧɢɤ ɢ ɜ ɞɜɚɬɚ ɤɪɚɹ ɞɚ ɫɟ ɟɤɪɚɧɢɪɚ ɜ 360°. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ ɡɚɡɟɦɟɧ. ɋɴɟɞɢɧɢɬɟɥɢɬɟ ɡɚ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɫɚ ɫɬɚɧɞɚɪɬɧɨ ɧɟɦɟɬɚɥɧɢ. ɂɡɩɨɥɡɜɚɧɢɬɟ ɤɚɛɟɥɢ ɬɪɹɛɜɚ ɞɚ ɛɴɞɚɬ ɡɚɳɢɬɟɧɢ ɫɴɫ 100%-ɨɜɨ ɟɤɪɚɧɢɪɚɧɟ, ɡɚ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ CE ɫɟɪɬɢɮɢɤɚɰɢɹɬɚ. ɓɢɬɴɬ ɬɪɹɛɜɚ ɞɚ ɛɴɞɟ Ʉɨɧɮɢɝɭɪɚɰɢɹ ɧɚ ɤɨɧɬɚɤɬɢɬɟ: ȼɢɠ ɩɪɢɥɨɠɟɧɚɬɚ ɢɧɫɬɪɭɤɰɢɹ ɡɚ ɟɤɫɩɥɨɚɬɚɰɢɹ.

ɡɚɡɟɦɟɧ.

ȿɥɟɤɬɪɨɫɬɚɬɢɱɟɧ ɪɚɡɪɹɞ (ESD)

ȼɇɂɆȺɇɂȿ: ɉɪɢɛɨɪɴɬ ɫɴɞɴɪɠɚ ɟɥɟɤɬɪɨɧɧɢ ɤɨɦɩɨɧɟɧɬɢ, ɤɨɢɬɨ ɫɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɫɬɚɬɢɱɧɨɬɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɢ ɦɨɝɚɬ ɞɚ ɫɟ

ɩɨɜɪɟɞɹɬ ɨɬ ɧɟɝɨ. Ɍɪɹɛɜɚ ɞɚ ɫɟ ɫɩɚɡɜɚɬ ɫɴɨɬɜɟɬɧɢɬɟ ɩɪɨɰɟɞɭɪɢ ɩɨ ɜɪɟɦɟ ɧɚ ɢɡɜɚɠɞɚɧɟ, ɫɥɚɝɚɧɟ ɢɥɢ ɞɪɭɝɨ ɛɨɪɚɜɟɧɟ ɫ ɜɴɬɪɟɲɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɢ ɭɫɬɪɨɣɫɬɜɚ. ɉɪɨɰɟɞɭɪɚ ɡɚ ɪɚɛɨɬɚ:

1. ɂɡɤɥɸɱɟɬɟ ɨɛɨɪɭɞɜɚɧɟɬɨ.

2. ɉɟɪɫɨɧɚɥɴɬ ɬɪɹɛɜɚ ɞɚ ɫɟ ɡɚɡɟɦɢ ɫ ɪɟɝɭɥɢɪɚ ɦɨɧɬɚɠɧɚ ɩɥɚɬɤɚ ɢɥɢ ɞɪɭɝɨ ɜɴɬɪɟɲɧɨ ɭɫɬɪɨɣɫɬɜɨ.

3. ɉɟɱɚɬɧɢɬɟ ɦɨɧɬɚɠɧɢ ɩɥɚɬɤɢ ɬɪɹɛɜɚ ɞɚ ɫɟ ɬɪɚɧɫɩɨɪɬɢɪɚɬ ɜ ɩɪɨɜɨɞɹɳɚ ɨɩɚɤɨɜɤɚ. ɉɟɱɚɬɧɢɬɟ ɩɥɚɬɤɢ ɦɨɝɚɬ ɞɚ ɫɟ ɢɡɜɚɠɞɚɬ ɨɬ ɡɚɳɢɬɧɨɬɨ

ɩɨɤɪɢɬɢɟ ɫɚɦɨ ɧɟɩɨɫɪɟɞɫɬɜɟɧɨ ɩɪɟɞɢ ɢɧɫɬɚɥɢɪɚɧɟɬɨ. Ɉɬɫɬɪɚɧɟɧɢɬɟ ɩɟɱɚɬɧɢ ɩɥɚɬɤɢ ɧɟɡɚɛɚɜɧɨ ɬɪɹɛɜɚ ɞɚ ɫɥɭɠɟɳɚ ɡɚ ɬɪɚɧɫɩɨɪɬɢɪɚɧɟ, ɫɤɥɚɞɢɪɚɧɟ ɢɥɢ ɜɪɴɳɚɧɟ ɧɚ ɩɪɨɢɡɜɨɞɢɬɟɥɹ.

Ɂɚɛɟɥɟɠɤɢ:

ɇɟ ɟ ɭɧɢɤɚɥɧɨ ɹɜɥɟɧɢɟ, ɱɟ ɬɨɡɢ ɩɪɢɛɨɪ ɫɴɞɴɪɠɚ ɱɭɜɫɬɜɢɬɟɥɧɢ ɤɴɦ ɟɥɟɤɬɪɨɫɬɚɬɢɱɧɢɹ ɡɚɪɹɞ (ESD) ɤɨɦɩɨɧɟɧɬɢ. Ȼɨɥɲɢɧɫɬɜɨɬɨ ɨɬ ɫɴɜɪɟɦɟɧɧɢɬɟ ɟɥɟɤɬɪɨɧɧɢ ɩɪɢɛɨɪɢ ɫɴɞɴɪɠɚɬ ɤɨɦɩɨɧɟɧɬɢ, ɢɡɝɨɬɜɟɧɢ ɩɨ ɬɟɯɧɨɥɨɝɢɹ ɦɟɬɚɥ-ɨɤɢɫ (NMOS, SMOS ɢ ɬ.ɧ.). Ɉɩɢɬɴɬ ɞɨɤɚɡɜɚ, ɱɟ ɞɚɠɟ ɢ ɦɚɥɤɨ ɤɨɥɢɱɟɫɬɜɨ ɫɬɚɬɢɱɟɫɤɨ ɟɥɟɤɬɪɢɱɟɫɬɜɨ ɪɚɛɨɬɹɬ ɩɪɚɜɢɥɧɨ, ɩɪɨɹɜɹɜɚɬ ɧɚɱɚɥɧɢ ɧɟɢɡɩɪɚɜɧɨɫɬɢ.

ɝɪɢɜɧɚ ɢɥɢ ɞɪɭɝɨ ɛɟɡɨɩɚɫɧɨ ɢ ɩɨɞɯɨɞɹɳɨ ɡɚ ɰɟɥɬɚ ɫɪɟɞɫɬɜɨ, ɩɪɟɞɢ ɞɚ ɢɧɫɬɚɥɢɪɚ, ɢɡɜɚɠɞɚ ɢɥɢ

ɫɟ ɫɥɨɠɚɬ ɜ ɡɚɳɢɬɧɚ ɨɩɚɤɨɜɤɚ,

ɦɨɠɟ ɞɚ ɩɨɜɪɟɞɢ ɢɥɢ ɫɴɫɢɩɟ ɬɟɡɢ ɩɪɢɛɨɪɢ. ɉɨɜɪɟɞɟɧɢɬɟ ɤɨɦɩɨɧɟɧɬɢ ɞɚɠɟ ɚɤɨ ɩɪɢɜɢɞɧɨ

C-1

Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

April, 2017

Czech

Základní instrukce

Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ. PĜístroje musí být ĜádnČ nainstalovány, používány a udržovány tak, aby byl zajištČn jejich nepĜetržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující pokyny a integrovat jejich obsah do svého bezpeþnostního programu pĜi instalování, používání a udržování produktĤ spoleþnosti Brooks. x Pro zajištČní správné funkce zaĜízení mohou jeho instalaci, obsluhu, programování, údržbu a aktualizace firmwaru provádČt výhradnČ kvalifikované osoby. x PĜed instalací, provozem a údržbou produktu si prostudujte všechny pokyny. Pokud tato pĜíruþka není tou správnou pĜíruþkou pro dané zaĜízení, informujte se na zadní stranČ obálky o kontaktu na místní prodejní kanceláĜ. Uchovejte si tuto pĜíruþku pro pozdČjší potĜebu.

UPOZORNċNÍ: Neprovozujte zaĜízení v rozsahu mimo daný rozsah v provozní pĜíruþce. Porušení tohoto upozornČní mĤže mít za

následek vážné újmy na zdraví a vést k poškození zaĜízení.

x Pokud nČkterým pokynĤm nerozumíte, kontaktujte svého prodejního zástupce spoleþnosti Brooks a vyžádejte si objasnČní. x Dodržujte všechny výstrahy, upozornČní a pokyny, uvedené a vyznaþené na produktu, nebo s ním dodané.

VAROVÁNÍ: PĜed instalací provČĜte, zda má tento pĜístroj požadované schválené parametry splĖující místní a národní pĜedpisy.

Nedodržení tohoto varování mĤže zpĤsobit vážnou újmu na zdraví osob a/nebo poškození zaĜízení.

x Namontujte zaĜízení specifikovaným zpĤsobem podle správné montážní pĜíruþky a podle platných místních a národních pĜedpisĤ. PĜipojte všechny produkty ke správným zdrojĤm elektrické energie a stlaþených médií. x Postup: (1) Pomalu do systému pĜivádČjte médium. Pro zabránČní vzniku rázĤ v systému otvírejte procesní ventily postupnČ. (2) PĜekontrolujte tČsnost vstupního a výstupního pĜipojení prĤtokomČru. Pokud nezjistíte žádné netČsnosti, postupnČ zvedejte tlak na provozní hodnotu. x PĜed provádČním servisních prací zkontrolujte, zda systém není pod tlakem. V pĜípadČ potĜeby výmČny dílĤ zajistČte, aby byly použity náhradní souþásti specifikované spoleþností Brooks Instrument a výmČnu provádČla kvalifikovaná osoba. Použití neschválených dílĤ a postupĤ mĤže negativn

Č ovlivnit efektivitu a bezpeþnost procesu. Použití náhrad za originální díly mĤže zpĤsobit požár, úraz elektrickým proudem nebo nesprávnou funkci. x Pokud není zrovna provádČna údržba kvalifikovanou osobou, ujistČte se, že zaĜízení je opatĜeno všemi pĜedepsanými kryty.

UPOZORNċNÍ: Pokud je u zaĜízení s prĤtokem kapalin nutno z jakéhokoli dĤvodu uzavĜít vstupní a výstupní ventily, je nutné zaĜízení kompletnČ vyprázdnit. Pokud tak neuþiníte, mĤže z dĤvodu teplotní roztažnosti zbytkĤ média v zaĜízení dojít k jeho poškození nebo k ohrožení zdraví osob.

Na veškerá tlaková zaĜízení s vnitĜním tlakem vyšším než 0,5 baru (g) a velikosti vČtší než 25 mm nebo 1" (palec) se vztahuje platnost smČrnice o tlakovém zaĜízení (PED). Kapitola „Technické údaje“ v této pĜíruþce obsahuje dĤležité bezpeþnostní a provozní pokyny související se smČrnicí PED.

x Produkty popsané v této pĜíruþce jsou v souladu se smČrnicí EN 2014/34/EU. x Všechny prĤtokomČry spoleþnosti Brooks Instrument spadají do rámce Kapaliny, skupina I. x Produkty vČtší než 25 mm nebo 1" (palec) jsou v souladu se smČrnicí PED, kategorii I, II nebo III x Produkty s velikostí 25 mm nebo 1" (palec) a menší spadají do rámce Správných technických postupĤ (SEP).

Elektrické/elektronické zaĜízení Brooks Instrument nesoucí znaþku CE bylo úspČšnČ testováno dle pĜedpisĤ pro elektromagnetickou kompatibilitu (smČrnice EMC þ. 2014/30/EU). VýbČru signálních kabelĤ pro použití se zaĜízením oznaþeném CE je nutné vČnovat zvláštní pozornost.

Kvalita signálních kabelĤ, kabelových prĤchodek a konektorĤ:

Brooks Instrument dodává vysoce jakostní kabely splĖující požadavky kvalitativního zaĜazení CE. Pokud chcete použít vlastní signální kabely, zvolte typy s kvalitním stínČním všech žil a v celé délce trasy. V pĜípadČ použití konektorĤ kruhových nebo tvaru „D“, musí mít tyto kovové stínČní. V pĜípadČ jejich použití, musí kovové kabelové prĤchodky být propojeny se stínČním kabelu. StínČní by mČlo být pĜipojené ke kovovému tČlesu pĜístroje nebo krytu, na obou koncích kabelu a po celém jeho obvodu. StínČní by mČlo být uzemnČno. PĜípojky vedoucí ke kartám podle norem jsou nekovová. Pro splnČní požadavkĤ pĜedpisĤ CE musí být použité kabely kompletnČ stínČny. StínČní by mČlo být uzemnČno. Konfigurace kontaktĤ je uvedena v pĜiloženém návodu k obsluze.

UPOZORNċNÍ: Tento pĜístroj obsahuje komponenty citlivé na poškození statickou elektĜinou. PĜi montáži, demontáži þi jiné manipulaci s vnitĜními elektronickými obvody je potĜeba dodržovat pĜíslušné postupy. Postup ošetĜování:

Odpojte pĜístroj od napájení.

Osoba provádČjící údržbu má být pĜi instalaci, vyjímání þi práci na desce plošných spojĤ nebo jiné vnitĜní elektronice uzemnČna zemnícím

náramkem, nebo jiným vyhovujícím zpĤsobem.

Desky plošných spojĤ je nutné pĜepravovat v elektricky vodivém obalu. Plošné spoje vyjímejte z vodivého obalu až bezprostĜednČ pĜed instalací

do pĜístroje! Plošné spoje vyjmuté z pĜístroje a urþené pro další využití, opČt neprodlenČ umístČte do ochranného obalu.

Poznámky:

Existence prvkĤ, citlivé na elektrostatické výboje (ESD) v pĜístrojích je þastým jevem. Prvky s technologií oxidu kovĤ (NMOS,SMOS) jsou používány u vČtšiny moderních elektronických zaĜízení. Zkušenosti dokazují, že i jen malé elektrostatické výboje mohou poškodit nebo zniþit tyto zaĜízení. U poškozených souþástek, jakkoli zdánlivČ pracujících bezchybnČ, dochází brzy k poruše.

Evropská smČrnice pro elektromagnetickou kompatibilitu (EMC)

PĜed instalací si pĜeþtČte následující instrukce!

Evropská smČrnice pro tlakové zaĜízení (PED)

Elektrostatický výboj (ESD)

C-2

Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Dansk

Grundlæggende vejledninger

Læs disse før anvendelse!

Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation. x For at garantere den passende kapacitet, er udstyrets installation, anvendelse, opdatering, programmering kun tilladt for kvalificeret personale.

Alle vejledninger skal læses før produktets installation, anvendelse og reparation.

x Hvis denne manual ikke er den passende udgave, kontakt venligst jeres leverandør for yderligere information. x Det anbefales at gemme denne manual for senere brug.

OBS.: Udstyret må ikke anvendes til andet end det er angivet i brugsanvisningen. Hvis denne regel brydes, kan der forekomme alvorlige

personskader eller brist på udstyret.

Hvis vejledningerne ikke er forståelig, kontakt venligst Deres Brooks repræsentant for at afklare problemet som er opstået.

Overhold alle regler, som er markeret eller leveret sammen med udstyret.

ADVARSEL! Før ibrugtagning/installation skal det kontrolleres, at det ihåndenværende instrument opfylder de lokale og nationale

sikkerhedskrav. Hvis denne advarsel ignoreres, kan det resultere i alvorlig personskade og/eller skader på instrumentet.

Installer udstyret efter den angivne installationsvejledning og gældende lovgivning for anvendelsesområde. Udstyret må kun tilsluttes med kabler og stik som overholder kravspecifikationerne i vejledningen.

Ibrugtagning: (1) Åbn langsomt for trykket i systemet.. Åbn langsomt for alle procesventiler for at forhindre ustabil gas flow. (2) Tjek systemet for lækage ved tilsluttet måleinstrumenter, samlinger og andet tilsluttet udstyr. Derefter øg trykket i systemet indtil arbejdstrykket er opnået.

Før reparation tjek altid at procesledningen ikke står under tryk. Hvis der er brug for at udskifte defekte dele må kun kvalificeret personale udføre arbejdet og af sikkerhedsmæssige årsager må der kun anvendes originale Brooks reservedele. Det er ikke tilladt at anvende reservedele eller udføre arbejde der på nogen måde kan ændre produktet fra dens oprindelige specifikationer. Manglende overholdelse af de foreskrevne procedurer kan resultere i brænd, og fare for elektrisk stød eller kortslutning.

Af sikkerhedsmæssige årsager sørg for at alle sikkerhedsforanstaltninger er overholdt. Eksempelvis at alle afskærmninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift.

Advarsel.: Ved brug af udstyr som anvendes til væske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket på samme tid i forbindelse med aftapning. Såfremt dette ikke overholdes, er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer.

På alt udstyr hvis indgangstryk er større end 0,5bar (g) og større end 25 mm eller en tomme, gælder det europæiske direktiv for trykapparater. Manualens afsnit ”tekniske data” indeholder anvisninger om PED direktivet.

I manualen angives instrumenter der er tilpasset direktiv 2014/34/EU.

Alle Brooks gennemstrømningsmålere tilhører væskegruppe nr. 1.

Alle instrumenter som er større end 25 mm eller en tomme beskrives i direktivet PED´s kategorier I, II eller III.

Alle instrumenter som er på 25 mm eller en tomme, eller mindre, beskrives i Sound Engineering Practice (SEP).

Det europæiske direktiv for elektromagnetisk kompatibilitet (EMC)

Det Europæiske direktiv for trykudstyr (PED)

Alle Brooks instrumenter (elektrisk/elektronisk) som har CE markering er godkendt og testet ifølge om elektromagnetiske kompatibilitets forskrifter (EMC direktiv 2014/30/EU). OBS: Man skal være opmærksom på hvilken type kabler der bruges til CE mærket udstyr..

Om kvalitet af signalkabler, kabeltilslutninger og koblinger:

Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj. Tilslutningerne ”D” eller rundformede tilslutninger skal være afskærmet med skal af metal. Stikket skal være afskærmet på alle sider. Al afskærmning skal jordes.. Card Edge tilslutninger er ifølge standarden ikke metalliske.. De anvendte kabler og stik skal være 100 % afskærmet for at opfylde CE kravene.. De skal ligeledes jordes. For stik konfigurationen se vedlagte brugsvejledning.

Elektrostatisk afladning (ESD)

OBS.: Udstyret indeholder tilbehør som kan skades ved elektrostatisk elektricitet. Alle forskrifter skal overholdes ved kontakt med alle elektriske komponenter både under drift og vedligeholdelse..

Behandlingsproceduren:

Sluk for al strømtilførsel til udstyret.

Personer som skal i kontakt med udstyret skal være jordet eller bære anden form for elektrisk beskyttende udstyr. Manglende overholdelse af dette kan medføre skader på alle elektriske komponenter.

Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske skader. Emballagen må ikke åbnes før komponenten skal installeres i udstyret. Ved afslutning af vedligeholdelse/reparation af udstyret, skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal på lager eller transporteres.

Bemærkninger:

Dette udstyr er ikke unik i den hensigt, at det indeholder for elektrostatisk afladning (ESD) sensitive reservedel. I de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel (NMOS, SMOS m.m.). Erfaringerne viser at selv den mindste statiske elektricitet kan skade, eller ødelægge disse instrumenter. Selv en fungerende elektrisk del kan have levetiden markant reduceret på grund af statisk elektricitet..

C-3

Appendix C Essential Instructions

Installation and Operation Manual

GF100 Series

Dutch

Essentiële instructies

Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.

• Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren, bedienen, updaten,

programmeren en onderhouden.

• Lees alle instructies voordat u het product gaat installeren, bedienen en onderhouden. Als dit niet de juiste handleiding is, kijk dan

op de achterzijde voor contactinformatie van uw vertegenwoordiger. Bewaar deze handleiding voor later.

WAARSCHUWING: gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding. Het niet naleven

van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben.

• Als u één of meer instructies niet begrijpt, vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument.

• Neem alle waarschuwingen, voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd.

WAARSCHUWING: Zorg ervoor dat dit instrument de vereiste goedkeurings-classificatie heeft om te voldoen aan de lokale en nationale standaarden, voordat u het gaat installeren. Het niet naleven van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben.

• Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en

nationale voorschriften. Sluit alle producten aan op de juiste elektrische voedings- en drukbronnen.

• Bediening: (1) Laat het systeem langzaam volstromen. Open de procesafsluiters langzaam om drukstoten te voorkomen.

(2) Controleer op lekkages rondom de inlaat- en uitlaataansluitingen van de stromingsmeter. Als er geen lekkages zijn, kan het systeem op de bedrijfsdruk worden gebracht.

• Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren. Als vervangingsonderdelen

nodig zijn, zorg er dan voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt. Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen. Niet goedgekeurde vervangingsonderdelen kunnen brand, elektrische schokken of een onjuiste werking tot gevolg hebben.

• Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en

lichamelijk letsel te voorkomen, behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert.

WAARSCHUWING: bij vloeistofstroomapparaten waarvan de inlaat- en uitlaatkleppen om welke reden dan ook gesloten zijn, moet de vloeistof volledig worden afgetapt. Als dat wordt nagelaten, kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken.

Lees ze voordat u verder gaat!

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Alle drukapparatuur met een interne druk van meer dan 0,5 barg en een diameter van meer dan 25 mm valt onder de PED-richtlijn.

• In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED-richtlijn.

• De producten die in deze handleiding worden beschreven, voldoen aan de Europese richtlijn 2014/34/EU.

• Alle stromingsmeters van Brooks Instrument vallen in groep 1.

• Producten met een diameter van meer dan 25 mm voldoen aan de categorieën I, II of III van de PED-richtlijn.

• Producten met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap.

Elektromagnetische compatibiliteit (EMC)

PED (Pressure Equipment Directive)

De elektronische apparatuur van Brooks Instrument met de CE-markering is succesvol getest in overeenstemming met de EMCvoorschriften (richtlijn EMC 2014/30/EU). De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE-markering verdient speciale aandacht.

Kwaliteit van de signaalkabel, kabelafdichtingen en stekkers:

Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE-markering. Als u zelf voor signaalkabel zorgt, moet u altijd een volledig afgeschermde kabel gebruiken. Stekkers van het type “D” of ronde stekkers moeten zijn voorzien van een metalen afscherming. Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt. Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd. De afscherming moet aan de aardpotentiaal worden aangesloten. Card Edge Connectors zijn standaard niet van metaal. De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE-markering. De afscherming moet aan de aardpotentiaal worden aangesloten. Voor de pinconfiguratie: Raadpleeg de bijgevoegde handleiding.

Elektrostatische ontlading

VOORZICHTIG: Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit. Neem de juiste procedures in acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten.

Procedure:

1. Schakel de voeding van de eenheid uit.

2. Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern

apparaat mag worden geïnstalleerd, verwijderd of aangepast.

3. Printplaten moeten in een geleidende verpakking worden vervoerd. De platen mogen pas vlak voor de eigenlijke installatie uit de

beschermende verpakking worden gehaald. Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd, opgeslagen of teruggestuurd naar de fabriek.

Opmerkingen

Dit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading. De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie (NMOS, SMOS, enz.). Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen. Beschadigde componenten, zelfs als ze goed lijken te functioneren, raken eerder defect.

C-4

Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Estonian

Olulised juhised

Enne kasutamist lugege hoolikalt läbi!

Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.

x Nõuetekohase talitluse tagamiseks tohib toodet paigaldada, kasutada, täiustada, programmeerida ja hooldada ainult kvalifitseeritud

personal.

x Enne toote paigaldamist, kasutamist ja hooldamist lugege kõik kasutusjuhised hoolikalt läbi. Kui see kasutusjuhend ei vasta teie tootele,

pöörduge kohaliku edasimüüja poole, kelle kontaktandmed leiate kasutusjuhendi tagakaanelt. Hoidke see kasutusjuhend edaspidiseks alles.

HOIATUS. Ärge kasutage seda instrumenti väljaspool kasutusjuhendis spetsifitseeritud piirväärtusi. Hoiatuse eiramine võib

kaasa tuua raske kehavigastuse ja/või kahjustada seadet.

x Kui te saa mõne juhise mõttest aru, pöörduge selgituste saamiseks kohaliku Brooks Instrumenti edasimüüja poole. x Järgige kõiki hoiatusi, tähelepanule manitsusi ja juhiseid, mis on tootele peale kantud või tootega kaasa antud.

HOIATUS. Enne paigaldamist veenduge, et see instrument vastaks kohalike ja riiklike määrustega kehtestatud

nimiandmetele. Hoiatuse eiramine võib kaasa tuua raske kehavigastuse ja/või kahjustada seadet.

x Seadme paigaldamisel järgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju.

Ühendage tooted nõuetekohaste toite- ja surveallikatega.

x Talitlus. (1) Avage aeglaselt vool süsteemi. Vooluimpulsside vältimiseks avage tööventiilid aeglaselt. (2) Kontrollige, et voolukulumõõturi

sisend- või väljundühenduste ümber ei oleks lekkeid. Kui lekkeid ei ole, laske süsteemil saavutada töösurve.

x Enne seadme hooldamist veenduge, et kogu süsteem oleks surve alt vabastatud. Varuosasid tohib vahetada ainult kvalifitseeritud

personal, kasutades selleks Brooks Instrumenti heakskiidetud varuosi. Mitteoriginaalvaruosade kasutamine ja ebapädev toimingute tegemine võivad kahjustada toote tööomadusi ja põhjustada riski tootmistegevuse ohutuse tagamisel. Originaalvaruosadele sarnaste osade kasutamine võib põhjustada tule- või elektrilöögiohtu või seadme väärtalitlust.

x Elektrilöögi- ja vigastuseohu vältimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal, v.a seadme hooldamisel

kvalifitseeritud isikute poolt.

HOIATUS. Voolava vedelikuga seadmete kasutamisel – kui seadmega külgnevad sisend- ja väljundklapid on vaja mingil põhjusel sulgeda, tuleb seadmed vedelikust täiesti tühjaks lasta. Vastasel korral võib vedelik soojuse mõjul paisuda niivõrd, et seade puruneb. See võib põhjustada raskeid kehavigastusi.

Euroopa surveseadmete direktiiv (PED)

Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele, mille sisesurve on üle 0,5 baari (g) ja läbimõõt üle 25 mm või 1 tolli.

x Selle kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid. x Kasutusjuhendis kirjeldatud tooted vastavad EL direktiivi 2014/34/EÜ nõuetele. x Brooks Instrumenti voolukulumõõturid kuuluvad vedelike 1. gruppi. x Tooted läbimõõduga üle 25 mm või 1 tolli vastavad surveseadmete direktiivi kategooriale I, II või III.

Toodetele läbimõõduga alla 25 mm või 1 tolli kohaldatakse häid inseneritavasid.

Euroopa elektromagnetilise ühilduvuse direktiiv (EMÜ)

Brooks Instrumenti (elektrilised/elektroonilised) seadmed, millele on omistatud CE-tähis, on edukalt läbinud asjakohased katsed ja vastavad elektromagnetilise ühilduvuse nõuetele (EMÜ direktiiv 2014/30/EÜ). Kuid signaalkaabli valimisel on vaja pöörata suurt tähelepanu CE-tähisega seadmetele.

Signaalkaabli, läbiviigutihendite ja konnektorite kvaliteet

Brooks Instrument turustab kõrgekvaliteedilisi kaableid, mis vastavad CE-sertifikaadi nõuetele. Olemasoleva kaabli kasutamisel jälgige, et kaabel oleks täielikult ümbritsetud varjestusega. „D”- või „Ring”-tüüpi konnektorid peavad olema varustatud metallvarjestusega. Võimaluse korral tuleb kasutada metallist läbiviike, mis tagavad kaabli varjestuse ühenduse. Kaabli varjestus ühendatakse metallkesta või läbiviigutihendiga ja on mõlemast otsast kaitstud 360° ulatuses. Varjestus peab olema maandatud. Mikroskeemide servaühendused on üldjuhul mittemetallist. Vastavuse tagamiseks CE-sertifikaadi nõuetele peavad kasutatud kaablid olema 100% varjestatud. Varjestus peab olema maandatud. Klemmide konfigureerimine: vt komplekti kuuluvat kasutusjuhendit.

Elektrostaatiline laeng

TÄHELEPANU! Seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente. Seadmesse paigaldatud trükkplaatide eemaldamisel ja paigaldamisel, samuti trükkplaadi või seadmega muude toimingute teostamisel järgige nõuetekohase käsitsemise juhiseid. Käsitsemisjuhised

1. Lahutage seade toiteallikast.

2. Enne trükkplaadi või mõne muu siseelemendi paigaldamist, eemaldamist või konfigureerimist peab personal olema maandatud läbi

randmepaela või mõne muu sobiva vahendi.

3. Trükkplaate transporditakse voolujuhtivas konteineris. Võtke trükkplaat kaitsvast konteinerist välja vahetult enne selle paigaldamist.

Seadmest eemaldatud trükkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse, kas siis edasiseks transportimiseks, hoiustamiseks või tehasesse tagasisaatmiseks.

Kommentaarid

See seade ei ole ainus, mis sisaldab staatilise elektri suhtes tundlikke elemente. Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente, mille valmistamiseks on kasutatud metalloksiidtehnoloogiat (NMOS, SMOS jne). Kogemused näitavad, et isegi väike kogus staatilist elektrit võib neid seadmeid kahjustada või isegi hävitada. Kuigi võib näida, et kahjustatud komponendid töötavad nõuetekohaselt, hakkavad talitlushäired ilmnema juba varakult.

C-5

Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

April, 2017

Finnish

Perusohjeet

Lue ensin ohjeet huolellisesti!

Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.

Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkilö saa asentaa, käynnistää, päivittää, ohjelmoida ja huoltaa laitteita.

Lue kaikki käyttöohjeet koskien tuotteen asennusta, käyttöä ja huoltoa. Jos käyttöohje on puutteellinen, lisätietoja saa paikalliselta jälleenmyyjältä. Yhteystiedot löytyvät oppaan kansilehdestä. Säilytä ohjeet.

VAROITUS!: Käyttöohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja-arvoja ei saa ylittää. Rajoitusten laiminlyönti voi

aiheuttaa tuotteen rikkoutumisen ja/tai vakavan henkilövahingon vaaran.

x Jos ohjeissa on epäselvyyttä, ota yhteyttä Brooks Instrumentin edustajaan ongelman selvittämiseksi. x Noudata kaikkia laitteessa olevia tai siihen liittyviä ohjeita, määräyksia ja varoituksia.

VAROITUS: Tarkista ennen asennusta, että tällä laitteella on paikallisten ja maasi koodien mukaiset

hyväksyntäluokitukset. Tämän varoituksen laiminlyönnistä saattaa aiheutua vakava vamma ja/tai laitevaurio.

x Laittteen asennuksessa on noudatettava erityisiä asennusohjeita sekä voimassa olevia paikallisia ja kansainvälisiä määräyksiä. Laitteet saa

yhdistää vain sopivaan sähkö- ja paineverkkoon.

x Asennusohjeita: (1) Päästä virtaus hitaasti järjestelmään. Avaa venttiilit hitaasti, jotta virtaus pysyy tasaisena. (2) Tarkista, ettei virtausmittarin

sisään- ja ulosmenon liitoksissa ole vuotoa. Jos järjestelmässä ei ole vuotoa, aseta oikea käyttöpaine.

x Tarkista, että laitteeseen menevä paine on katkaistu ennen laitteen korjaamista välttääksesi loukkaantumisriskin. Mahdollisten varaosien tulee

olla Brooks Instrumentin hyväksymiä. Vain valtuutettu huoltohenkilö saa asentaa varaosat. Ei-hyväksyttyjen varaosien käyttö voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin. Samoin ei-hyväksyttyjen varaosien käyttö voi aiheuttaa tulipalon, sähköiskun tai virhetoiminnan riskin.

x Varmista että kaikki kaikki laitteen ovet/luukut ovat suljettuina ja tarkista että suojakannet ovat paikoillaan estääksesi mahdollisen sähköisku- ja

loukkaantumisvaaran.

VAROITUS!: Jos järjestelmässä virtaa neste ja laitteen sisään- ja ulosmenoventtiilit pitää sulkea, laite on ensin tyhjennettävä kokonaan.

Tyhjentämisen laiminlyönti aiheuttaa nesteen lämpölaajenemista, joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan.

Painelaitteet, joiden paine on suurempi kuin 0,5 bar (g) ja joiden koko on suurempi kuin 25 mm tai 1 tuuma , kuuluvat eurooppalaiseen painelaitedirektiiviin (PED).

x PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. x Käyttöoppaassa kuvatut tuotteet ovat 2014/34/EU EU-direktiivin mukaisia. x Kaikki Brooks Instrumentin virtausmittarit kuuluvat ryhmään 1. Laitteet, jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien

mukaisia.

Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyvän konepajakäytännön (SEP) mukaisia.

Eurooppalainen direktiivi sähkömagneettisesta yhteensopivuudesta (EMC)

Eurooppalainen painelaitedirektiivi (PED)

Brooks Instrumentin CE-merkin saaneet (sähkö/sähköiset) laitteet täyttävät EMC direktiivin vaatimukset ja testit sähkömagneettisesta yhteensopivuudesta (2014/30/EU EMC direktiivi). Erityistä huomioita on kiinnitettävä CE-merkittyjen laitteiden käytössä olevien kaapelien valintaan.

Kaapelien, kiinnikkeiden ja liittimien laatu:

Brooks Insturmentin kaapelit ovat korkealaatuisia ja täyttävät CE-merkintä direktiivin vaatimukset. Muun valmistajan kaapelia käytettäessä on käytettävä 100% suojattua kaapelia. Liittimien tulee olla häiriösuojattua tyyppiä. Tarvittaessa käytetään metallisia kiinnikkeitä kaapelin suojuksen kiinnittämiseen. Kaapelin suojakuoren pitää olla yhdistettynä metallisuojukseen tai laippaan ja sen pitää olla molemmista päistä suojattuna 360 Standardin mukaan korttien liittimet eivät ole metallisia. Käytettyjen kaapelien suojaus on oltava 100%, jotta se täyttäisi CE-merkinnän direktiivin vaatimukset. Suojaus päättyy maadoitukseen. Napojen järjestys: Katso liitteenä oleva käyttöopas.

. Suojaus päättyy maadoitukseen.

Elektrostaattinen purkaus (ESD)

VAROITUS!: Tuote sisältää elektroniikkakomponentteja jotka voivat vahingoittua staattisesta sähköstä. Sisäisten piirilevyjen purkamisessa,asennuksessa ja käsittelyssä tulee noudattaa kaikkia määräyksiä ja ohjeita. Asennusohjeet:

1. Järjestelmän sähköt katkaistaan.

2. Laitteen kanssa työskentelevä henkilö on suojattava sähköiskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai muun sisäosan asennusta, poistamista tai korjaamista.

3. Piirilevyt kuljetetaan antistaattisessa pakkauksessa. Piirilevyt puretaan paketista juuri ennen asennusta. Poistettu piirilevy on heti pakattava soveltuvaan suojapakkaukseen kuljettamista, varastoimista tai palautusta varten.

Huomautukset:

Tuotteen herkkyys elektrostaattiselle purkaukselle (ESD) ei ole epätavallista. Suurin osa elektroniikkatuotteista sisältää komponentteja jotka hyödyntävät metallioksiditekniikkaa (NMOS, SMOS jne.) Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen. Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite näyttäisi toimivan normaalisti.

C-6

Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

French

Instructions essentielles

A lire avant de commencer !

Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à votre programme de sécurité lors de l’installation, l’utilisation et l’entretien des produits Brooks Instrument.

•

Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’installation, l’utilisation, la mise à jour, la programmation et l’entretien du produit.

• Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le présent manuel d’utilisation n’est pas le bon, consultez la dernière page de la couverture pour connaître le point de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y reporter par la suite.

AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation.

Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement.

• Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications.

• Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci.

AVERTISSEMENT: Avant toute installation, vérifier que cet instrument est conformes aux normes locales et nationales.

Le non-respect de cet avertissement peut entrainer des blessures graves et/ou endommager l’équipement.

x Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et conformément à la

législation en vigueur au niveau local et national. Branchez tous les produits aux sources d’électricité et de pression agréées.

x Utilisation : (1) Faites lentement entrer le débit dans le système. Ouvrez progressivement les vannes de procédé pour éviter des

pics de débits. (2) Vérifiez qu’il n’y a pas de fuite au niveau des branchements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation.

x Avant de procéder à l’entretien, assurez-vous que la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une

pièce, assurez-vous que les pièces de rechange sont celles indiquées par Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.

x Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour éviter les

chocs électriques et les blessures, sauf lorsque l’entretien est réalisé par des personnes qualifiées.

AVERTISSEMENT: dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermées pour une raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation thermique du fluide peut casser l’appareil et provoquer des blessures.

GF100 Series

• Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse

25 mm ou un pouce entrent dans le cadre de la directive PED.

• La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED.

• Les appareils de mesure de ce manuel sont conformes à la directive EN 2014/34/EU.

• Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1.

• Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III.

• Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie »

(SEP).

Compatibilité électromagnétique européenne (CEM)

Directive européenne « équipements sous pression » (PED)

L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique (directive CEM 2014/30/EU). Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utiliser avec l’équipement marqué CE.

Qualité du câble d’interconnexion, des presse-étoupes et connecteurs :

Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral. Les connecteurs rectangulaires ou circulaires utilisés doivent avoir un blindage métallique. S’il y a lieu, des presse-étoupes métalliques doivent faire office de serre-écran de câble. L’écran du câble doit être raccordé à l’enveloppe métallique ou au presse-étoupe et blindé aux deux extrémités sur 360 degrés. Le blindage doit s’achever sur une prise de terre. Les connecteurs de carte standards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se

conformer à la certification CE. Le blindage doit s’achever sur une prise de terre.

En ce qui concerne la configuration des broches, veuillez vous reporter au manuel d’utilisation joint.

ESD (décharge électrostatique)

ATTENTION : cet instrument contient des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être respectées pendant le retrait, l’installation ou la manipulation des cartes de circuits imprimés ou des dispositifs internes.

Procédure de manipulation :

1. L’alimentation électrique de l’appareil doit être coupée.

2. Le personnel doit être mis à la terre, au moyen d’une bande de poignet ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes de circuits imprimés ou autres dispositifs internes.

3. Les cartes de circuits imprimés doivent être transportées dans un récipient conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transport, le stockage ou le retour à l’usine.

Observations

Brooks Instrument n’est pas le seul à proposer des produits comportant des composants sensibles aux décharges électrostatiques. La plupart des produits électroniques modernes contiennent des composants qui utilisent des technologies à oxydes métalliques (NMOS, SMOS, etc.). L’expérience démontre que d’infimes quantités d’électricité statique suffisent à endommager ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne.

C-7

Appendix C Essential Instructions

Installation and Operation Manual

GF100 Series

German

Wichtige Anweisungen

Bitte zuerst lesen!

Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.

• Um die entsprechende Leistung zu gewährleisten, setzen Sie qualifiziertes Personal für die Installation, den Betrieb, die Aktualisierung, Programmierung und Wartung des Produkts ein.

• Lesen Sie alle Anweisungen, bevor Sie das Produkt installieren, in Betrieb nehmen und warten. Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt, schauen Sie bitte auf der Rückseite nach den Kontaktdaten Ihres Vertriebsbüros vor Ort. Bewahren Sie dieses Handbuch auf, falls Sie später etwas nachschauen möchten.

WARNUNG: Dieses Gerät nicht außerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben.

Wird diese Warnung nicht beachtet, kann dies zu schweren Personenschäden bzw. Schäden des Gerätes führen.

• Falls Sie Anweisungen nicht verstehen, wenden Sie sich zur Klärung an Ihren Brooks Instrument Vertreter.

• Befolgen Sie alle Warnhinweise und Anweisungen, die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden.

ACHTUNG: Vor der Installation sicherstellen, dass dieses Instrument den nationalen und lokalen Vorschriften endspricht.

Die Nichtbeachtung kann zu schweren Verletzungen und/oder Schäden am Gerät führen.

• Installieren Sie Ihr Gerät, wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gemäß der gültigen regionalen und nationalen Gesetze. Schließen Sie alle Produkte an eine geeignete Strom- und Druckluftversorgung an.

• Bedienung: (1) Langsam den Zufluss zum System starten. Die Ventile langsam öffnen, um einen sprunghaften Anstieg der Durchflussmenge zu verhindern. (2) Bereich der Anschlüsse (Zufluss und Ausfluss) des Durchflussmessers auf Undichtigkeiten überprüfen. Wenn das System dicht ist, auf Betriebsdruck hochfahren.

• Sicherstellen, dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird. Wenn Ersatzteile benötigt werden, stellen Sie sicher, dass qualifizierte Personen Ersatzteile verwenden, die von Brooks Instrument vorgegeben sind. Nicht genehmigte Teile und Verfahren können die Leistungsfähigkeit des Produkts beeinträchtigen und den sicheren Betrieb Ihres Prozesses gefährden. Ähnlich aussehende Austauschteile können zu Bränden, elektrischen Gefahren oder nicht sachgerechtem Betrieb führen.

• Stellen Sie sicher, dass alle Türen der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind, um Stromschläge und Personenschäden zu vermeiden, es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgeführt.

WARNUNG: Werden die Ein- und Auslassventile neben Durchflussmessgeräten aus irgendwelchen Gründen

geschlossen, so müssen die Geräte komplett entleert werden. Durchflussmessgeraete muessen vor dem Schliessen von Ein- und Auslassventilen komplett entleert werden, anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen;

Personenschäden können die Fol

e sein.

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Europäische Druckgeräterichtlinie (PED)

Alle Druckgeräte mit einem internen Druck von mehr als 0,5 bar (g) und einer Größe von mehr als 1in ( 1 in = 25,4 mm) unterliegen der Druckgeräterichtlinie.

• Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits- und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie.

• Produkte die in diesem Handbuch beschrieben sind, erfüllen die europäische Richtlinie 2014/34/EU.

• Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1.

• Produkte die größer als 25 mm oder 1“ (inch) sind, erfüllen die Kategorien I, II oder III der Druckgeräterichtlinie (PED).

• Produkte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP).

Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV)

Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2014/30/EU) erfolgreich bestanden. Dennoch muss bei der Wahl des Signalkabels für das Gerät mit CE-Zeichen auf folgende Dinge geachtet werden.

Qualität von Signalkabel, Kabeldurchführung und Anschlüsse:

Brooks Instrument liefert qualitativ hochwertige Kabel, die den Anforderungen für eine CE-Zertifizierung entsprechen. Sollten Sie eigene Kabel einsetzen, so sollte das Kabel überall mit einer 100%-Abschirmung versehen sein. D- oder Rundstecker sollten eine Metallabschirmung aufweisen. Wenn möglich, müssen Kabeldurchführungen aus Metall mit Kabelschirmgeflechts-Klemmen verwendet werden. Der Kabelschirm sollte an die Metallhülle oder -durchführung angeschlossen werden und an beiden Enden rundherum (360°) abgeschirmt werden. Die Abschirmung sollte geerdet werden. Randstecker auf Platinen sind standardmäßig nicht aus Metall. Die verwendeten Kabel müssen mit einer 100 % Abschirmung versehen werden, um die CE-Vorgaben zu erfüllen. Die Abschirmung sollte geerdet werden. Klemmenbelegung: Siehe beigefügtes Handbuch.

ESD (Elektrostatische Entladung)

ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden.

Verfahrensanweisung:

1. Trennen Sie das Gerät von der Stromversorgung.

2. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem Erdpotential zu verbinden.

3. Platinen sind in speziellen Behältern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport, zur Lagerung oder Rücksendung an das Werk gelegt werden.

Anmerkung

Dieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh aus, obwohl sie funktionsfähig zu sein scheinen.

C-8

Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Greek

ǺĮıȚțȑȢ ȠįȘȖȓİȢ

ǻȚĮȕȐıĲİ ʌȡȚȞ ıȣȞİȤȓıİĲİ!

Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ ĲĮ ʌȡȠȧȩȞĲĮ ĲȘȢ ıİ ıȣȝȝȩȡĳȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠĲȪʌȦȞ. Ǿ ıȦıĲȒ İȖțĮĲȐıĲĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞĲȒȡȘıȒ ĲȠȣȢ ĮʌȠĲİȜİȓ ĮʌĮȡĮȓĲȘĲȘ ʌȡȠȨʌȩșİıȘ ĲȘȢ ȜİȚĲȠȣȡȖȓĮȢ İȞĲȩȢ ĲȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ. ȅȚ ʌĮȡĮțȐĲȦ ȠįȘȖȓİȢ ʌȡȑʌİȚ ȞĮ ĲȘȡȠȪȞĲĮȚ țĮȚ ʌȡȑʌİȚ ȞĮ İȞıȦȝĮĲȦșȠȪȞ ıĲȠ ʌȡȩȖȡĮȝȝĮ ĮıĳȐȜİȚĮȢ ĲȘȢ İȡȖĮıȓĮȢ ıĮȢ țĮĲȐ ĲȘȞ İȖțĮĲȐıĲĮıȘ ʌȡȠȧȩȞĲȦȞ ĲȘȢ Brooks Instrument.

x īȚĮ ıȦıĲȩ ĮʌȠĲȑȜİıȝĮ Ș İȖțĮĲȐıĲĮıȘ, ȜİȚĲȠȣȡȖȓĮ, İȞȘȝȑȡȦıȘ, ʌȡȠȖȡĮȝȝĮĲȚıȝȩȢ țĮȚ ıȣȞĲȒȡȘıȘ ʌȡȑʌİȚ ȞĮ ȖȓȞİĲĮȚ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ. x ǻȚĮȕȐıĲİ ȩȜİȢ ĲȚȢ ȠįȘȖȓİȢ ʌȡȚȞ İȖțĮĲĮıĲȒıİĲİ, ȜİȚĲȠȣȡȖȒıİĲİ țĮȚ ıȣȞĲȘȡȒıİĲİ ĲȠ ʌȡȠȧȩȞ. ǼȐȞ ĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ įİȞ İȓȞĮȚ ĲȠ ıȦıĲȩ İȖȤİȚȡȓįȚȠ,

ıȣȝȕȠȣȜİȣșİȓĲİ ĲȠ ʌȓıȦ İȟȫĳȣȜȜȠ ȖȚĮ ĲĮ ıĲȠȚȤİȓĮ

ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȂȘ ȜİȚĲȠȣȡȖİȓĲİ ĲȘ ıȣıțİȣȒ ĮȣĲȒ țĮș’ ȣʌȑȡȕĮıȘ ĲȦȞ ȠȡȓȦȞ ʌȠȣ ĮȞĮȖȡȐĳȠȞĲĮȚ ıĲȠ ǼȖȤİȚȡȓįȚȠ ȅįȘȖȚȫȞ țĮȚ ȁİȚĲȠȣȡȖȓĮȢ. Ǿ ȝȘ ıȣȝȝȩȡĳȦıȘ ȝİ ĲȘȞ ʌȡȠİȚįȠʌȠȓȘıȘ ĮȣĲȒ ȝʌȠȡİȓ ȞĮ ȠįȘȖȒıİȚ ıİ ıȠȕĮȡȩ ʌȡȠıȦʌȚțȩ ĲȡĮȣȝĮĲȚıȝȩ Ȓ/țĮȚ ȗȘȝȚȐ ıĲȠȞ İȟȠʌȜȚıȝȩ.

x Ȉİ ʌİȡȓʌĲȦıȘ ȝȘ țĮĲĮȞȩȘıȘȢ țȐʌȠȚĮȢ Įʌȩ ĲȚȢ ȠįȘȖȓİȢ ȗȘĲȒıĲİ įȚİȣțȡȚȞȓıİȚȢ Įʌȩ ĲȠȞ ĲȠʌȚțȩ ĮȞĲȚʌȡȩıȦʌȠ x ȉȘȡİȓĲİ ȩȜİȢ ĲȚȢ ʌȡȠİȚįȠʌȠȚȒıİȚȢ, ʌȡȠĳȣȜȐȟİȚȢ țĮȚ ȠįȘȖȓİȢ ʌȠȣ ĮȞĮȖȡȐĳȠȞĲĮȚ Ȓ ıȣȞȠįİȪȠȣȞ ĲȠ ʌȡȠȧȩȞ.`

ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȆȡȚȞ Įʌȩ ĲȘȞ İȖțĮĲȐıĲĮıȘ ȕİȕĮȚȦșİȓĲİ ȩĲȚ ĮȣĲȩ ĲȠ İȡȖĮȜİȓȠ įȚĮșȑĲİȚ ĲȚȢ ĮʌĮȚĲȠȪȝİȞİȢ İȖțİțȡȚȝȑȞİȢ ʌȡȠįȚĮȖȡĮĳȑȢ ȫıĲİ ȞĮ ıȣȝȝȠȡĳȫȞİĲĮȚ ȝİ ĲȠȣȢ ĲȠʌȚțȠȪȢ țĮȚ İșȞȚțȠȪȢ țĮȞȠȞȚıȝȠȪȢ. Ǿ ĮʌȠĲȣȤȓĮ ĲȒȡȘıȘȢ ĲȘȢ ʌĮȡȠȪıĮȢ ʌȡȠİȚįȠʌȠȓȘıȘȢ ȝʌȠȡİȓ ȞĮ ȠįȘȖȒıİȚ ıİ ıȠȕĮȡȩ ĲȡĮȣȝĮĲȚıȝȩ țĮȚ/Ȓ ȗȘȝȚȐ ıĲȠȞ İȟȠʌȜȚıȝȩ

x ǼȖțĮĲĮıĲȒıĲİ ĲȘ ıȣıțİȣȒ ȩʌȦȢ ʌȡȠȕȜȑʌİĲĮȚ ıĲȚȢ ȠįȘȖȓİȢ İȖțĮĲȐıĲĮıȘȢ ĲȠȣ

įȚĮĲȐȟİȚȢ. ȈȣȞįȑıĲİ ĲĮ ʌȡȠȧȩȞĲĮ ıĲȚȢ İțȐıĲȠĲİ ıȦıĲȑȢ ʌĮȡȠȤȑȢ ȡİȪȝĮĲȠȢ țĮȚ ʌȓİıȘȢ.

x ǻȚĮįȚțĮıȓĮ: (1) ǹĳȒıĲİ ȞĮ ȟİțȚȞȒıİȚ ĮȡȖȐ Ș ȡȠȒ ıĲȠ ıȪıĲȘȝĮ. ǹȞȠȓȟĲİ ĮȡȖȐ ĲȚȢ ȕĮȜȕȓįİȢ ȜİȚĲȠȣȡȖȓĮȢ ȖȚĮ ȞĮ ĮʌȠĳȪȖİĲİ ĲȚȢ ĮʌȩĲȠȝİȢ ĮȣȟȠȝİȚȫıİȚȢ

ȡȠȒȢ. (2) ǼȜȑȖȟĲİ ȖȚĮ įȚĮȡȡȠȑȢ ĲȚȢ ıȣȞįȑıİȚȢ İȚıȩįȠȣ țĮȚ İȟȩįȠȣ ĳĲȐıİȚ ĲȘȞ țĮȞȠȞȚțȒ ʌȓİıȘ İȡȖĮıȓĮȢ.

x ȆȡȚȞ Įʌȩ ĲȘ ıȣȞĲȒȡȘıȘ ȕİȕĮȚȦșİȓĲİ ȩĲȚ ȖȡĮȝȝȒ İȡȖĮıȓĮȢ ȑȤİȚ Ĳİșİȓ İțĲȩȢ ʌȚȑıİȦȢ. Ȉİ ʌİȡȓʌĲȦıȘ ĮȞĲȚțĮĲȐıĲĮıȘȢ ĮȞĲĮȜȜĮțĲȚțȫȞ ȕİȕĮȚȦșİȓĲİ ȩĲȚ

ĲȠ ʌȡȠıȦʌȚțȩ İȓȞĮȚ İȚįȚțİȣȝȑȞȠ țĮȚ ȤȡȘıȚȝȠʌȠȚİȓ ĮȞĲĮȜȜĮțĲȚțȐ ʌȠȣ ʌȡȠȕȜȑʌİȚ Ș Brooks Instrument. ȂȘ İȖțİțȡȚȝȑȞĮ ĮȞĲĮȜȜĮțĲȚțȐ țĮȚ İȞįȑȤİĲĮȚ ȞĮ İʌȘȡİȐıȠȣȞ ĲȚȢ İʌȚįȩıİȚȢ ĲȠȣ ʌȡȠȧȩȞĲȠȢ țĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ țȓȞįȣȞȠ ȖȚĮ ĲȘȞ ĮıĳĮȜȒ ȜİȚĲȠȣȡȖȓĮ. ǹȞĲȚțĮĲĮıĲȐıİȚȢ ȝİ ĳĮȚȞȠȝİȞȚțȐ ȩȝȠȚĮ ĮȞĲĮȜȜĮțĲȚțȐ İȞįȑȤİĲĮȚ ȞĮ ʌȡȠțĮȜȑıȠȣȞ ʌȣȡțĮȖȚȐ, țȓȞįȣȞȠ ȘȜİțĲȡȠʌȜȘȟȓĮȢ Ȓ ĮȞİʌĮȡțȒ ȜİȚĲȠȣȡȖȓĮ.

x ǺİȕĮȚȦșİȓĲİ ȩĲȚ ȩȜĮ ĲĮ ĮȞȠȓȖȝĮĲĮ ĲȠȣ İȟȠʌȜȚıȝȠȪ İȓȞĮȚ țȜİȚıĲȐ țĮȚ ĲĮ ʌȡȠıĲĮĲİȣĲȚțȐ țĮȜȪȝȝĮĲĮ İȓȞĮȚ ıĲȘ șȑıȘ ĲȠȣȢ ʌȡȠțİȚȝȑȞȠȣ ȞĮ

Ƞ țȓȞįȣȞȠȢ ȘȜİțĲȡȠʌȜȘȟȓĮȢ țĮȚ ʌȡȠıȦʌȚțȫȞ ĲȡĮȣȝĮĲȚıȝȫȞ, İțĲȩȢ İȐȞ İțĲİȜȠȪȞĲĮȚ İȡȖĮıȓİȢ ıȣȞĲȒȡȘıȘȢ Įʌȩ İȚįȚțİȣȝȑȞȠ ʌȡȠıȦʌȚțȩ.

ȆȇȅǼǿǻȅȆȅǿǾȈǾ: ȆȡȠțİȚȝȑȞȠȣ ȖȚĮ ıȣıțİȣȑȢ ȝİ ȡȠȒ ȡİȣıĲȠȪ, ȩĲĮȞ ȖȚĮ ȠʌȠȚȠȞįȒʌȠĲİ ȜȩȖȠ ʌȡȩțİȚĲĮȚ ȞĮ țȜİȓıȠȣȞ ȠȚ ȕĮȜȕȓįİȢ İȚıĮȖȦȖȒȢ țĮȚ İȟĮȖȦȖȒȢ țȠȞĲȐ ıĲȚȢ ıȣıțİȣȑȢ, ȠȚ ıȣıțİȣȑȢ ʌȡȑʌİȚ ȞĮ ĮʌȠıĲȡĮȖȖȚıĲȠȪȞ İȞĲİȜȫȢ. Ǿ ȝȘ ıȣȝȝȩȡĳȦıȘ ȝʌȠȡİȓ ȞĮ ʌȡȠțĮȜȑıİȚ șİȡȝȚțȒ įȚĮıĲȠȜȒ ĲȠȣ ȣȖȡȠȪ ʌȠȣ ʌİȡȚȑȤȠȣȞ, ȝİ ĮʌȠĲȑȜİıȝĮ ȞĮ ȡĮȖȓıİȚ Ș ıȣıțİȣȒ țĮȚ ȞĮ ʌȡȠțȜȘșȠȪȞ ʌȡȠıȦʌȚțȠȓ ĲȡĮȣȝĮĲȚıȝȠȓ

İʌȚțȠȚȞȦȞȓĮȢ ĲȠȣ ĲȠʌȚțȠȪ ĮȞĲȚʌȡȠıȫʌȠȣ. ĭȣȜȐȟĲİ ĲȠ İȖȤİȚȡȓįȚȠ ĮȣĲȩ ȖȚĮ ȝİȜȜȠȞĲȚțȒ ĮȞĮĳȠȡȐ.

ıȦıĲȠȪ İȖȤİȚȡȚįȓȠȣ ȠįȘȖȚȫȞ țĮȚ ıĲȚȢ țİȓȝİȞİȢ ĲȠʌȚțȑȢ țĮȚ İșȞȚțȑȢ

ĲȠȣ ȡȠȩȝİĲȡȠȣ. ǹȞ įİȞ ȣʌȐȡȤȠȣȞ įȚĮȡȡȠȑȢ, ȖİȝȓıĲİ ĲȠ ıȪıĲȘȝĮ ȝȑȤȡȚ Ș ʌȓİıȘ ȞĮ

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED)

ȀȐșİ İȟȠʌȜȚıȝȩȢ ȣʌȩ ʌȓİıȘ ȝİ İıȦĲİȡȚțȒ ʌȓİıȘ ȐȞȦ ĲȠȣ 0,5 bar (g) țĮȚ ȝİȖȑșȠȣȢ ȝİȖĮȜȪĲİȡȠȣ ĲȦȞ 25 mm Ȓ ĲȘȢ 1 ȓȞĲıĮȢ İȝʌȓʌĲİȚ ıĲȚȢ įȚĮĲȐȟİȚȢ ĲȘȢ İȣȡȦʌĮȧțȒȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ȣʌȩ ʌȓİıȘ (PED).

x ȉȠ țİĳȐȜĮȚȠ ȆȡȠįȚĮȖȡĮĳȑȢ ĲȠȣ ʌĮȡȩȞĲȠȢ İȖȤİȚȡȚįȓȠȣ ʌİȡȚȜĮȝȕȐȞİȚ ȠįȘȖȓİȢ ıȤİĲȚțȐ ȝİ ĲȘȞ ȅįȘȖȓĮ PED. x ȉĮ ʌȡȠȧȩȞĲĮ ʌȠȣ ʌİȡȚȖȡȐĳȠȞĲĮȚ ıĲȠ ʌĮȡȩȞ İȖȤİȚȡȓįȚȠ ıȣȝȝȠȡĳȫȞȠȞĲĮȚ ȝİ ĲȘȞ x ǵȜĮ ĲĮ ȡȠȩȝİĲȡĮ ĲȘȢ Brooks Instrument ĮȞȒțȠȣȞ ıĲȘȞ ȠȝȐįĮ ȡİȣıĲȫȞ 1. x ȆȡȠȧȩȞĲĮ ȝİȖĮȜȪĲİȡĮ Įʌȩ 25 mm Ȓ 1 ȓȞĲıĮ ıȣȝȝȠȡĳȫȞȠȞĲĮȚ ȝİ ĲȚȢ țĮĲȘȖȠȡȓİȢ ǿ, ǿǿ țĮȚ ǿǿǿ ĲȘȢ ȅįȘȖȓĮȢ PED.

ȆȡȠȧȩȞĲĮ ȝİȖȑșȠȣȢ 25 mm Ȓ 1 ȓȞĲıĮȢ Ȓ țĮȚ ȝȚțȡȩĲİȡĮ țĮĲĮıțİȣȐȗȠȞĲĮȚ ıȪȝĳȦȞĮ ȝİ ȠȡșȑȢ ĲİȤȞȚțȑȢ ʌȡĮțĲȚțȑȢ (SEP).

İȣȡȦʌĮȧțȒ ȅįȘȖȓĮ 2014/34/EU.

ǼȣȡȦʌĮȧțȒ ȅįȘȖȓĮ ȖȚĮ ĲȘȞ ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ ıȣȝȕĮĲȩĲȘĲĮ (EMC)

ȅ (ȘȜİțĲȡȚțȩȢ/ȘȜİțĲȡȠȞȚțȩȢ) İȟȠʌȜȚıȝȩȢ ĲȘȢ Brooks Instrument ʌȠȣ ĳȑȡİȚ ĲȠ ıȒȝĮ CE ȑȤİȚ ȣʌȠıĲİȓ İʌȚĲȣȤȫȢ ĲȚȢ įȠțȚȝȑȢ ʌȠȣ ʌȡȠȕȜȑʌȠȣȞ ȠȚ įȚĮĲȐȟİȚȢ ĲȘȢ ȅįȘȖȓĮȢ ȖȚĮ ĲȘȞ ȘȜİțĲȡȠȝĮȖȞȘĲȚțȒ ıȣȝȕĮĲȩĲȘĲĮ (ȅįȘȖȓĮ 2014/30/EU ȖȚĮ ĲȘȞ EMC). ȆȐȞĲȦȢ ȤȡİȚȐȗİĲĮȚ ȚįȚĮȓĲİȡȘ ʌȡȠıȠȤȒ ıĲȘȞ İʌȚȜȠȖȒ ĲȠȣ țĮȜȦįȓȠȣ ıȒȝĮĲȠȢ ȖȚĮ ĲȠȞ İȟȠʌȜȚıȝȩ ʌȠȣ ĳȑȡİȚ ĲȠ ıȒȝĮ CE.

ȆȠȚȩĲȘĲĮ ĲȦȞ țĮȜȦįȓȦȞ ıȒȝĮĲȠȢ, ıĲȣʌȚȠșȜȚʌĲȫȞ țĮȚ ȕȣıȝȐĲȦȞ țĮȜȦįȓȦȞ

Ǿ Brooks Instrument ʌȡȠıĳȑȡİȚ ȣȥȘȜȒȢ ʌȠȚȩĲȘĲĮȢ țĮȜȫįȚĮ ĲĮ ȠʌȠȓĮ ʌȜȘȡȠȪȞ ĲȚȢ ʌȡȠįȚĮȖȡĮĳȑȢ CE. Ȉİ ʌİȡȓʌĲȦıȘ ʌĮȡȠȤȒȢ įȚțȠȪ ıĮȢ țĮȜȦįȓȠȣ ıȒȝĮĲȠȢ, ȤȡȘıȚȝȠʌȠȚİȓĲİ țĮȜȫįȚȠ ȝİ ʌȜȒȡȘ șȦȡȐțȚıȘ 100% ıİ ȩȜĮ ĲĮ ıȘȝİȓĮ. ǺȪıȝĮĲĮ ĲȪʌȠȣ «D» Ȓ țȣțȜȚțȐ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ ȝİĲĮȜȜȚțȒ șȦȡȐțȚıȘ. ȃĮ ȤȡȘıȚȝȠʌȠȚȘșȠȪȞ țĮĲȐ ʌȡȠĲȓȝȘıȘ ȝİĲĮȜȜȚțȠȓ ıĲȣʌȚȠșȜȓʌĲİȢ țĮȜȦįȓȦȞ ȖȚĮ ĲȘ ıĲİȡȑȦıȘ ĲȘȢ șȦȡȐțȚıȘȢ. ȃĮ ıȣȞįİșİȓ Ș șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ ĲİȡȝĮĲȓȗİȚ ıİ ȖİȓȦıȘ İįȐĳȠȣȢ. ȉĮ ȕȪıȝĮĲĮ ȐțȡȠȣ ĲȘȢ ʌȜĮțȑĲĮȢ İȓȞĮȚ İț țĮĲĮıțİȣȒȢ ȝȘ ȝİĲĮȜȜȚțȐ. ȉĮ ȤȡȘıȚȝȠʌȠȚȠȪȝİȞĮ țĮȜȫįȚĮ ʌȡȑʌİȚ ȞĮ ȑȤȠȣȞ 100% șȦȡȐțȚıȘ ȖȚĮ ıȣȝȝȩȡĳȦıȘ ȝİ ĲȘȞ ʌȚıĲȠʌȠȓȘıȘ CE. Ǿ șȦȡȐțȚıȘ ʌȡȑʌİȚ ȞĮ īȚĮ ĲȘ įȚȐĲĮȟȘ ĲȦȞ ĮțȓįȦȞ: ȈȣȝȕȠȣȜİȣșİȓĲİ ĲȠ ıȣȞȘȝȝȑȞȠ İȖȤİȚȡȓįȚȠ ȠįȘȖȚȫȞ.

ĲȠȣ țĮȜȦįȓȠȣ ıĲȠ ȝİĲĮȜȜȚțȩ țȑȜȣĳȠȢ Ȓ ıĲȣʌȚȠșȜȓʌĲȘ țĮȚ ȞĮ șȦȡĮțȚıĲİȓ țĮȚ ıĲĮ įȪȠ ȐțȡĮ țĮĲȐ 360 ȝȠȓȡİȢ. Ǿ șȦȡȐțȚıȘ

ĲİȡȝĮĲȓȗİȚ ıİ ȖİȓȦıȘ İįȐĳȠȣȢ.

ǾȜİțĲȡȠıĲĮĲȚțȒ İțțȑȞȦıȘ (ESD)

ȆȇȅĭȊȁǹȄǾ: Ǿ ıȣıțİȣȒ ĮȣĲȒ ʌİȡȚȑȤİȚ ȘȜİțĲȡȠȞȚțȐ İȟĮȡĲȒȝĮĲĮ ĲĮ ȠʌȠȓĮ ȝʌȠȡȠȪȞ ȞĮ ȣʌȠıĲȠȪȞ İȪțȠȜĮ ȕȜȐȕİȢ Įʌȩ ĲȠȞ ıĲĮĲȚțȩ

ȘȜİțĲȡȚıȝȩ. ȆȡȑʌİȚ ȞĮ ĮțȠȜȠȣșȠȪȞĲĮȚ ȠȚ ȠȡșȑȢ įȚĮįȚțĮıȓİȢ ȤİȚȡȚıȝȠȪ țĮĲȐ ĲȘȞ ĮĳĮȓȡİıȘ, ĲȠʌȠșȑĲȘıȘ Ȓ ȐȜȜȠ ȤİȚȡȚıȝȩ ĲȦȞ İıȦĲİȡȚțȫȞ ʌȜĮțİĲȫȞ țĮȚ įȚĮĲȐȟİȦȞ. ǻȚĮįȚțĮıȓĮ ȤİȚȡȚıȝȠȪ:

ĬȑıĲİ ĲȘ ıȣıțİȣȒ İțĲȩȢ ĲȐıİȦȢ.

ĭȡȠȞĲȓıĲİ ȖȚĮ ĲȘ ȖİȓȦıȘ ĲȠȣ ʌȡȠıȦʌȚțȠȪ ȝİ ʌİȡȚțȐȡʌȚȠ Ȓ ȐȜȜȠ ĮıĳĮȜȑȢ țĮȚ țĮĲȐȜȜȘȜȠ ȝȑıȠ ʌȡȚȞ ĲȠʌȠșİĲȒıİĲİ, ĮĳĮȚȡȑıİĲİ Ȓ ȡȣșȝȓıİĲİ țȐȡĲİȢ

ĲȣʌȦȝȑȞȦȞ țȣțȜȦȝȐĲȦȞ Ȓ ȐȜȜȘ İıȦĲİȡȚțȒ įȚȐĲĮȟȘ.

ȅȚ țȐȡĲİȢ ĲȣʌȦȝȑȞȦȞ țȣțȜȦȝȐĲȦȞ ʌȡȑʌİȚ ȞĮ ȝİĲĮĳȑȡȠȞĲĮȚ ıİ ıȣıțİȣĮıȓĮ Įʌȩ ĮȖȫȖȚȝȠ ȣȜȚțȩ. ȅȚ țȐȡĲİȢ įİȞ ʌȡȑʌİȚ ȞĮ ĮĳĮȚȡİșȠȪȞ Įʌȩ ĲȠ ʌȡȠıĲĮĲİȣĲȚțȩ ʌİȡȓȕȜȘȝĮ ʌĮȡȐ ȝȩȞȠ ĮȝȑıȦȢ ʌȡȚȞ Įʌȩ ĲȘȞ ĲȠʌȠșȑĲȘıȘ. ȅȚ țȐȡĲİȢ ʌȠȣ ĮĳĮȚȡȑșȘțĮȞ ʌȡȑʌİȚ ȞĮ ĲȠʌȠșİĲȘșȠȪȞ ĮȝȑıȦȢ ıİ ʌȡȠıĲĮĲİȣĲȚțȒ ıȣıțİȣĮıȓĮ ȖȚĮ ȝİĲĮĳȠȡȐ, ĮʌȠșȒțİȣıȘ Ȓ İʌȚıĲȡȠĳȒ ıĲȠ İȡȖȠıĲȐıȚȠ.

ȆĮȡĮĲȘȡȒıİȚȢ:

Ǿ ȪʌĮȡȟȘ İȟĮȡĲȘȝȐĲȦȞ ʌİȡȚııȩĲİȡİȢ ıȪȖȤȡȠȞİȢ ȘȜİțĲȡȠȞȚțȑȢ ıȣıțİȣȑȢ ʌİȡȚȑȤȠȣȞ İȟĮȡĲȒȝĮĲĮ ĲİȤȞȠȜȠȖȓĮȢ ȝİĲĮȜȜȚțȫȞ ȠȟİȚįȓȦȞ (NMOS, SMOS țȐ.). Ǿ ʌİȓȡĮ ȑȤİȚ ĮʌȠįİȓȟİȚ ȩĲȚ ȝȚĮ ȝȚțȡȒ ʌȠıȩĲȘĲĮ ıĲĮĲȚțȠȪ ȘȜİțĲȡȚıȝȠȪ Įȡțİȓ ȖȚĮ ȞĮ ʌȡȠțĮȜȑıİȚ ȕȜȐȕİȢ Ȓ ȞĮ țĮĲĮıĲȡȑȥİȚ ĲȚȢ ıȣıțİȣȑȢ ĮȣĲȑȢ. ǼȟĮȡĲȒȝĮĲĮ ʌȠȣ ȣʌȑıĲȘıĮȞ ȕȜȐȕȘ, ĮțȩȝȘ țĮȚ

İȣĮȓıșȘĲȦȞ ıĲĮ ĳĮȚȞȩȝİȞĮ ESD (ȘȜİțĲȡȠıĲĮĲȚțȒȢ İțțȑȞȦıȘȢ) įİȞ İȓȞĮȚ ȝȠȞĮįȚțȩ ȤĮȡĮțĲȘȡȚıĲȚțȩ ĲȘȢ ıȣıțİȣȒȢ ĮȣĲȒȢ. ȅȚ

ĮȞ ȝȠȚȐȗȠȣȞ ȞĮ ȜİȚĲȠȣȡȖȠȪȞ ıȦıĲȐ, țȚȞįȣȞİȪȠȣȞ Įʌȩ ʌȡȫȚȝȘ ĮıĲȠȤȓĮ.

, ȤȡȒıȘ țĮȚ ıȣȞĲȒȡȘıȘ

ĲȘȢ Brooks Instrument.

İʌİȝȕȐıİȚȢ

ĮʌȠĳİȣȤșİȓ

C-9

Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Hungarian

AlapvetĘ utasítások

A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelelĘen kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál mĦködési tartományuknak megfelelĘen üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során. A megfelelĘ teljesítmény garantálása érdekében kizárólag szakképzett személyzet végezze a termék telepítését, üzemeltetését, frissítését, programozását és karbantartását. Valamennyi utasítást el kell olvasni a termék telepítése, üzemeltetése és szervizelése elĘtt. Amennyiben ez a kézikönyv nem a megfelelĘ kiadvány, a hátsó borítón keresse meg a helyi forgalmazót, és további tájékoztatásért lépjen kapcsolatba vele. ėrizze meg ezt a kézikönyvet késĘbbi tájékoztatásként.

FIGYELEM: Ne mĦködtesse a berendezést az üzemeltetési utasításban megadott üzemi tartományokon túl. Ennek megsértése súlyos

személyi sérüléshez vagy a berendezés meghibásodásához vezethet.

• Amennyiben a kezikönyv utasításai nem egyértelmĦek, lépjen kapcsolatba Brooks Instrument képviselĘjével, hogy tisztázzák a problémát.

• Tartsa be a berendezésen feltüntetett vagy azzal együtt szállított összes figyelmeztetést, felhívást és utasítás.

FIGYELEM: Üzembe helyezés elĘtt gyĘzĘdjön meg arról, hogy a mĦszer rendelkezik-e a helyi és nemzeti szabványoknak megfelelĘ

jóváhagyásokkal. Ennek elmulasztása súlyos személyi sérülést és / vagy az eszköz károsodását okozhatja!

• A megfelelĘ telepítési utasításban megadott utasítások valamint a hatályos helyi és nemzeti elĘírások szerint telepítse a berendezést. A termékeket kizárólag a megfelelĘ elektromos és nyomásellátó forrásra kösse.

• Menete: (1) Lassan helyezze nyomás alá a rendszert. Lassanként nyissa ki az üzemi szelepeket az áramlásingadozás elkerülése érdekében. (2) EllenĘrizze, nincs-e szivárgás az áramlásmérĘ be-, és kimeneti bekötéseinél. Ha nincs szivárgás, töltse fel a rendszert az üzemi nyomásra.

• Szervizelés elĘtt mindenképpen ellenĘrizze, hogy az üzemi vezeték nincs-e nyomás alatt. Amennyiben cserealkatrészekre van szükség, mindenképpen szakképzett személynek kell kezelnie a Brooks Instrument által meghatározott cserealkatrészeket. A nem engedélyezett alkatrészek és tevékenységek befolyásolhatják a termék teljesítményét, illetve veszélyeztethetik a biztonságos üzemeltetést. A pusztán hasonló alkatrészekkel történĘ helyettesítés tüzet, áramütésveszélyt vagy elégtelen mĦködést eredményezhet.

• A berendezés összes ajtaja mindenképpen legyen zárva, a védĘburkolatok pedig legyenek a helyükön az áramütés és a személyi sérülések elkerülése érdekében, kivéve, ha szakképzett szakember végez rajta karbantartási munkákat.

FIGYELEM: Folyadékot áramoltató berendezések esetében, ha bármilyen okból el kell zárni a berendezés melletti ki-, és belépĘ szelepeket, a berendezést teljesen le kell üríteni. Ennek elmulasztása a folyadék hĘtágulását okozhatja, ami károsíthatja a berendezést, és személyi sérüléshez vezethet.

Nyomástartó berendezésekre vonatkozó európai irányelv (PED)

Minden 0,5 bar-nál (g) magasabb belsĘ nyomású és 25 mm-nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv (PED) hatálya alá tartozik.

x A használati utasítás „MĦszaki adatok” fejezete tartalmaz a PED irányelvre vonatkozó utasításokat. x A használati utasításban megadott termékek megfelelnek a 2014/34/EU EU irányelvnek. x Minden Brooks átfolyásmérĘ az 1-es folyadékcsoportba tartozik. x A 25 mm-nél vagy 1 hüvelyknél nagyobb termékek megfelelnek a PED I, II, vagy III kategóriának.

•

A 25 mm-es illetve 1 hüvelykes vagy kisebb termékek az elfogadott mérnöki gyakorlatot (SEP) követik.

Elektromágneses kompatibilitásra vonatkozó európai irányelv (EMC)

A Brooks Instrument CE jelölést kiérdemelt (elektromos/elektronikus) berendezései sikeresen teljesítették az elektromágneses kompatibilitási követelményeket (2014/30/EU sz. EMC irányelv) vizsgáló teszteket. Ugyanakkor különös figyelmet kell fordítani a CE jelölésĦ berendezésekhez felhasznált jelkábelek kiválasztására.

A jelkábelek, kábelösszekötĘk, csatlakozók minĘsége:

A Brooks Insturment magas minĘségĦ kábeleket kínál, melyek megfelelnek a CE minĘsítés követelményeinek. Amennyiben saját jelkábelt alkalmaznak, olyat kell választani, amely 100%-os árnyékolással, teljes mértékben szĦrt. A „D” vagy „kör alakú” csatlakozóknak fémárnyékolóval árnyékoltnak kell lennie. Szükség esetén fém kábelösszekötĘket kell alkalmazni a kábelszĦrĘ rögzítésére. A kábelszĦrĘt a fém házhoz vagy hüvelyhez kell csatlakoztatni és mindkét felén 360°-ban le kell árnyékolni. Az árnyékolásnak földelésben kell végzĘdnie. A kártyákhoz tartozó csatlakozók szabványosan nem fémesek. Az alkalmazott kábeleknek 100%-és árnyékolással szĦrteknek kell lenniük, hogy megfeleljenek a CE minĘsítésnek. Az árnyékolásnak földelésben kell végzĘdnie. ÉrintkezĘ konfiguráció: Lásd a mellékelt kezelési utasítást.

VIGYÁZAT: A készülék olyan alkatrészeket tartalmaz, melyek hajlamosak a sztatikus elektromosság okozta károsodásra. Be kell tartani

a megfelelĘ eljárásokat a belsĘ áramköri kártyák és eszközök eltávolítása, behelyezése vagy egyéb kezelése során. Kezelési eljárás:

1. A berendezést áramtalanítani kell.

2. A személyt földelni kell csuklópánttal vagy egyéb biztonságos és a célra alkalmas eszközzel, mielĘtt áramköri kártyát vagy egyéb belsĘ eszközt telepítene, venne ki, vagy állítana be.

3. A nyomtatott áramköri kártyákat vezetĘképes csomagolásban kell szállítani. A kártyák kizárólag közvetlenül a behelyezés elĘtt vehetĘk ki a védĘburkolatból. A kiszerelt kártyát haladéktalanul el kell helyezni a mozgatásra, raktározásra vagy a gyári visszaszállításra szolgáló védĘcsomagolásba.

Megjegyzések:

Nem egyedi jelenség, hogy a készülékben elektrosztatikus kisülésre (ESD) érzékeny alkatrészek találhatók. A legtöbb korszerĦ elektronikus eszközben fémoxid technológiás alkatrészek (NMOS, SMOS stb.) találhatók. A tapasztalatok azt igazolják, hogy még kis mértékĦ sztatikus elektromosság is károsíthatja, vagy tönkreteheti ezeket az eszközöket. A károsodott alkatrészek, még ha látszólag megfelelĘen mĦködnek is, kezdĘdĘ hibára utalnak.

ElĘször olvassa el ezeket!

Elektrosztatikus kisülés (ESD)

April, 2017

C-10

Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Italian

Istruzioni fondamentali

Leggerle subito!

La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento. Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l’installazione, il funzionamento e la manutenzione dei prodotti Brooks Instrument.

x Per garantire un adeguato rendimento l'installazione, il funzionamento, l’aggiornamento, la programmazione e la manutenzione del prodotto

devono essere eseguiti esclusivamente da personale specializzato.

x Leggere tutte le istruzioni prima dell’installazione, utilizzo e manutenzione del prodotto. Se questo manuale non è quello relativo al Vostro

prodotto, cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni. Conservare il presente manuale per future consultazioni.

ATTENZIONE: Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d’Uso. L’inosservanza

può causare gravi lesioni alle persone e/o danni all’apparecchiatura.

x Qualora le istruzioni del manuale non siano chiare, contattare un rappresentante della Brooks Instrument per chiarire il problema. x Rispettare tutti gli avvisi, le istruzioni e gli avvertimenti riportati sull’apparecchiatura o forniti insieme ad essa.

ATTENZIONE: prima di installare questo strumento, assicurarsi che sia in regola rispetto alle normative di sicurezza locali e nazionali. La

non osservanza di questo avvertimento può procurare seri danni a persone e/o danneggiare sia lo strumento che le cose circostanti.

x Installare l’apparecchiatura in base alle istruzioni riportate nel Manuale d’Uso e alle prescrizioni locali e nazionali in vigore. Collegare i prodotti

esclusivamente ad un’adeguata sorgente di pressione ed alimentazione elettrica.

x Procedimento: (1) mettere lentamente sotto pressione il sistema. Aprire lentamente le valvole di servizio per evitare l’oscillazione del flusso. (2)

Controllare che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso. Se non ci sono perdite, caricare il sistema alla pressione d’esercizio.

x Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione. Se avete bisogno di pezzi di ricambio, il personale

specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument. Attività e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza. La sostituzione con pezzi di ricambio non originali può causare incendi, pericolo di scosse elettriche o funzionamento improprio.

x Tutti gli sportelli dell’impianto devono essere chiusi, le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni

personali, tranne quando il personale specializzato esegue lavori di manutenzione.

ATTENZIONE: In caso di apparecchiature in cui scorre un liquido, se per qualsiasi motivo bisogna chiudere le valvole d’entrata e d’uscita accanto all’apparecchiatura, allora si deve svuotare completamente l’apparecchiatura. L’inosservanza può causare la dilatazione termica del liquido che può danneggiare l’apparecchiatura e provocare lesioni alle persone.

Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell’ambito della Direttiva Europea relativa alle apparecchiature a pressione (PED).

x Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED. x I prodotti di misura descritti nel presente manuale sono conformi alla Direttiva UE 2014/34/EU. x Ogni flussimetro Brooks appartiene al gruppo di fluidi 1. x I prodotti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED.

I prodotti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice).

Direttiva europea relativa alla compatibilità elettromagnetica (EMC)

Direttiva europea relativa alle apparecchiature a pressione (PED)

Le apparecchiature (elet triche/elettroniche) Brooks Instrument disp ongono del marchio CE ed hanno superato positiv amente i test per i requisiti di compatibilità elettromagnetica (Diret tiva EMC 2014/30/EU).

In ogni caso bisogna prestar e particolare attenzione alla scelta dei cavi di segnale ut ilizzati per le apparecchiature con marchio CE.

Qualità dei cavi di segnale, dei pressacavi e dei connettori:

La Brooks Instrument offre ca vi d’alta qualità conformi ai requisiti della certificazione CE.

Qualora vengano utilizzati cavi di segnale propri, devono essere scelti con schermatura al 100% e interamente filtrati.

I connettori „D” o „rotondi” devono essere schermati con schermatura metallica. In caso di necessità b isogna utilizzare pressacavi metallici di collega mento per fissare la schermatura del cavo.

La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il cavo deve essere schermato su entrambi i la ti a 360°. La schermatura deve essere effettuata con messa a terra.

I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conformi alla marcatura CE.

La schermatura deve esser e effettuata con messa a terra.

Configurazione pin: Vedi Manuale d’uso allegato.

Scarica elettrostatica (ESD)

ATTENZIONE: Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricità statica. Bisogna rispettare le adeguate procedure durante la rimozione, l’installazione o altra manovra delle schede del circuito elettrico interno. Procedura di manovra:

1. Togliere alimentazione elettrica all’apparecchiatura.

2. La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare, togliere o impostare la scheda del circuito elettrico o altri dispositivi interni.

3. Le schede del circuito stampato devono essere spedite in contenitori conduttivi. Le schede devono essere tolte dal rivestimento protettivo esclusivamente prima dell’installazione. Le schede confezionate devono essere collocate immediatamente nell’imballaggio protettivo per la movimentazione, l’immagazzinamento o resa alla fabbrica.

Note:

È un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica (ESD). Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo-ossido (NMOS, SMOS, ecc.). Le esperienze dimostrano che l’elettrostaticità anche in piccola misura può danneggiare o rovinare gli strumenti. I componenti danneggiati, anche se all’apparenza funzionano correttamente, potrebbero manifestare il difetto rapidamente.

C-11

Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Latvian

SvarƯga instrukcija

Pirms turpinƗt izlasiet!

„

Brooks Instrument” projektƝ, ražo un pƗrbauda savus izstrƗdƗjumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj. UzstƗdot, lietojot „Brooks Instrument” izstrƗdƗjumus un veicot to apkopi, ir jƗievƝro šie norƗdƯjumi un jƗiekƺauj tie jǌsu drošƯbas programmƗ.

x Lai nodrošinƗtu pienƗcƯgu izstrƗdƗjuma sniegumu, izstrƗdƗjuma uzstƗdƯšanu, lietošanu, atjauninƗšanu, programmƝšanu un apkopi

uzticiet veikt tikai kvalificƝtam personƗlam.

x Pirms izstrƗdƗjuma uzstƗdƯšanas, lietošanas un apkalpošanas izlasiet visus norƗdƯjumus. Ja šƯ instrukciju rokasgrƗmata nav pareizƗ,

izstrƗdƗjumam atbilstošƗ rokasgrƗmata, lǌdzu skat. aizmugurƝjo vƗku, kur ir sniegta vietƝjƗ tirdzniecƯbas biroja kontaktinformƗcija.

BRƮDINƖJUMS! Nelietot instrumentu Ɨrpus Instrukciju un lietošanas rokasgrƗmatƗ norƗdƯtajiem parametriem. ŠƯ

brƯdinƗjuma neievƝrošanas rezultƗtƗ var rasties traumas un/vai aprƯkojuma bojƗjumi.

x Ja jǌs nesaprotat kƗdu no instrukcijƗm, sazinieties ar „Brooks Instrument” pƗrstƗvi un lǌdziet izskaidrot to. x IevƝrojiet visus brƯdinƗjumus, piesardzƯbas mƝrus un instrukcijas, kas norƗdƯti uz izstrƗdƗjuma vai piegƗdƗti kopƗ ar to.

BRƮDINƖJUMS. Pirms uzstƗdƯšanas pƗrliecinieties, ka šim instrumentam ir nepieciešamie apstiprinƗjuma novƝrtƝjumi, lai atbilstu vietƝjiem un valsts kodeksiem. ŠƯ brƯdinƗjuma neizlasƯšanas rezultƗtƗ var rasties nopietni personas savainojumi un/vai aprƯkojuma bojƗjumi.

x UzstƗdiet aprƯkojumu tƗ, kƗ tas norƗdƯts attiecƯgajƗ instrukciju rokasgrƗmatƗ iekƺautajƗ uzstƗdƯšanas instrukcijƗ un atbilstoši

piemƝrojamajƗm vietƝjƗm un nacionƗlajƗm normƗm. Pievienojiet visus izstrƗdƗjumus pareiziem elektriskajiem un spiediena avotiem.

x Lietošana: (1) LƝnƗm uzsƗciet plǌsmu sistƝmƗ. Lai izvairƯtos no straujiem plǌsmas kƗpumiem, lƝnƗm atveriet procesa vƗrstus. (2)

PƗrbaudiet, vai nav noplǌdes ap plǌsmas mƝrƯtƗja ieplǌdes un izplǌdes savienojumiem. Ja noplǌdes nav, uzstƗdiet sistƝmƗ darba spiedienu.

x PƗrliecinieties par to, lai pirms instrumenta tehniskƗs apkopes bǌtu likvidƝts procesa lƯnijas spiediens. Ja ir nepieciešams veikt kƗdu

daƺu nomaiƼu, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” norƗdƯtƗs daƺas un daƺu nomaiƼu veiktu kvalificƝts personƗls. Neatƺautu daƺu un procedǌru izmantošana var ietekmƝs izstrƗdƗjuma sniegumu un samazinƗt procesa drošƯbu. LƯdzƯgu, bet ne identisku daƺu nomaiƼas lietošana var izraisƯt ugunsgrƝka, elektrisko traucƝjumu riskus un nepareizu izstrƗdƗjuma darbƯbu.

x Nodrošiniet, lai bǌtu aizvƝrtas visas durvis un bǌtu pareizi uzstƗdƯti visi aizsargpƗrsegumi, tƗdƝjƗdi novƝršot elektrošoka un traumu

risku. IzƼƝmums ir gadƯjumi, kad kvalificƝts personƗls veic ražojuma apkopi.

BRƮDINƖJUMS! Ja šƷidrƗs plǌsmas ierƯþu tuvumƗ esošos ieplǌdes un izplǌdes vƗrstus kƗda iemesla dƝƺ ir jƗaizver, no ierƯcƝm ir jƗizlaiž viss šƷidrums. PretƝjƗ gadƯjumƗ šƷidrums var termiski izplesties, pƗrraut ierƯci un radƯt traumas.

Eiropas spiedieniekƗrtu direktƯva (PED)

Uz visƗm spiedieniekƗrtƗm, kuru iekšƝjais spriegums pƗrsniedz 0,5 bar (g) un ir lielƗkas par 25 mm jeb 1” (collu), attiecas Eiropas spiedieniekƗrtu direktƯva (PED).

x ŠƯs rokasgrƗmatas tehnisko parametru nodaƺƗ ir sniegtas a PED DirektƯvu saistƯtƗs instrukcijas. x ŠajƗ rokasgrƗmatƗ aprakstƯtie izstrƗdƗjumi atbilst EN DirektƯvas 2014/34/EU prasƯbƗm. x Visi „Brooks Instrument” plǌsmas mƝrƯtƗji ietilpst 1. šƷidrumu grupƗ. x Uz 25 mm jeb 1” (collu) maziem un mazƗkiem izstrƗdƗjumiem attiecas labas inženierijas prakse (SEP).

25 mm jeb 1” (collu) mazi vai mazƗki izstrƗdƗjumi atbilst PED kategorijai I, II vai III.

Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯva (EMS)

„Brooks Instrument” (elektriskƗs/elektroniskƗs) iekƗrtas ar CE zƯmi ir izturƝjušas pƗrbaudi un atzƯtas par atbilstošƗm Eiropas elektromagnƝtiskƗs savietojamƯbas direktƯvas (EMS) prasƯbƗm (EMS 2014/30/EU)

TomƝr, izvƝloties signƗlkabeli, kas tiks lietots kopƗ ar CE marƷƝjuma iekƗrtu, ir jƗievƝro Ưpaša uzmanƯba. SignƗlkabeƺa, kabeƺa blƯvslƝgu un savienotƗju kvalitƗte:

„Brooks Instrument” piegƗdƗ augstas kvalitƗtes kabeƺus, kas atbilst CE sertifikƗcijas tehniskajiem parametriem. Ja jǌs lietojat pats savu signƗlkabeli, tam ir jƗbǌt pilnƯbƗ, 100% ekranizƝtam. „D” un „apaƺƗ” tipa savienotƗjiem ir jƗbǌt aprƯkotiem ar metƗla ekranizƝjumu. Ja nepieciešams, ir jƗizmanto metƗla blƯvslƝgi ar kabeƺa ekranizƝjuma skavojumu. Kabeƺa ekranizƝjumam ir jƗbǌt savienotam ar metƗla apvalku un abƗs pusƝs aizsargƗtam 360 grƗdu diapazonƗ. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma. „Card Edge” savienotƗji standarta izpildƯjumƗ ir nemetƗla. Kabeƺiem ir jƗbǌt pƗrklƗtiem ar 100% ekranizƝjumu, lai tie atbilstu CE sertifikƗcijas prasƯbƗm. EkranizƝjumam ir jƗbeidzas pie iezemƝjuma.

AttiecƯbƗ uz tapu konfigurƗciju: skat. pievienoto instrukciju rokasgrƗmatu.

ESD (elektrostatiskƗ izlƗde)

IEVƜROT PIESARDZƮBU! Šis instruments satur elektriskos komponentus, kas ir jutƯgi pret statisko elektrƯbu. IzƼemot un

uzstƗdot iekšƝjƗs ƷƝdes plates un ierƯces vai kƗ citƗdi darbojoties ar tƗm, ir jƗievƝro noteikta darba kƗrtƯba.

Darba kƗrtƯba:

1. IekƗrta jƗatslƝdz no barošanas.

2. Pirms jebkƗdas drukƗtas shƝmas kartes vai citas iekšƝjƗs ierƯces uzstƗdƯšanas, izƼemšanas vai regulƝšanas personƗlam, kas veiks šos darbus, ir jƗbǌt iezemƝtam, piem., izmantojot aproces vai citus drošus, piemƝrotus lƯdzekƺus.

3. DrukƗtƗs shƝmas kartes ir jƗtransportƝ vadošƗ iepakojumƗ. PlƗksnes no aizsargkorpusa drƯkst izƼemt tikai tieši pirms uzstƗdƯšanas. TransportƝjot, uzglabƗjot vai atgriežot rǌpnƯcƗ, izƼemtƗs plƗksnes ir nekavƝjoties jƗievieto aizsargiepakojumƗ.

KomentƗri

Instruments nav unikƗls tajƗ aspektƗ, ka tas satur pret ESD (elektrostatisko izlƗdi) jutƯgus komponentus. VairƗkums mǌsdienu elektroiekƗrtu satur komponentus, kuru ražošanƗ izmantota metƗla oksƯdu tehnoloƧijas (NMOS, SMOS u.c.). Pieredze rƗda, ka pat neliels daudzums statiskƗs elektrƯbas var nodarƯt bojƗjumus šƗdƗm ierƯcƝm vai pilnƯbƗ sabojƗt tƗs. BojƗtie komponenti pat tad, ja tie šƷietami darbojas pareizi,

ir pakƺauti ƗtrƗkai atteicei

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Pagrindinơs instrukcijos

„Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bǌti tinkamai montuojami, eksploatuojami ir prižiǌrimi, kad ir toliau veiktǐ pagal jiems bǌdingus techninius parametrus. Toliau pateiktǐ nurodymǐ reikia laikytis ir Ƴtraukti juos Ƴ saugos programą montuojant, eksploatuojant ir prižiǌrint „Brooks Instrument“ gaminius.

x Siekiant užtikrinti tinkamą veikimą, montuoti, eksploatuoti, naujinti, programuoti ir prižiǌrơti gaminƳ turi tik kvalifikuoti darbuotojai. x Perskaitykite visus nurodymus prieš montuodami, eksploatuodami ir prižiǌrơdami gaminƳ. Jei gavote netinkamą instrukciją,

galiniame jos viršelyje ieškokite vietinơs prekybos atstovybơs kontaktinơs informacijos. Neišmeskite šios instrukcijos, jos gali prireikti ateityje.

ƲSPƠJIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis.

Nesilaikydami šio Ƴspơjimo galite sunkiai susižeisti ir (arba) sugadinti Ƴrangą.

x Jei nesuprantate kokiǐ nors nurodymǐ, kreipkitơs Ƴ „Brooks Instrument“ atstovą, kad paaiškintǐ. x Paisykite visǐ Ƴspơjimǐ, perspơjimǐ ir nurodymǐ, pažymơtǐ ant gaminio arba pateiktǐ su juo.

ƲSPƠJIMAS: prieš montuodami Ƴsitikinkite, kad ši Ƴranga atitinka vietinius ir nacionalinius teisơs aktus. Nepaisant šio

Ƴspơjimo gali bǌti sužeisti žmonơs ir (arba) pažeista Ƴranga.

x Ʋrangą montuokite taip, kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar

nacionaliniuose teisơs aktuose. Visus gaminius junkite prie tinkamǐ elektros ir slơgio šaltiniǐ.

x Naudojimas: (1) lơtai Ƴjunkite srautą Ƴ sistemą. Lơtai atidarykite proceso vožtuvus, kad išvengtumơte srauto antplǌdžiǐ. (2)

Patikrinkite, ar nơra nuotơkiǐ aplink srauto matuoklio Ƴleidimo ir išleidimo jungtis. Jei nuotơkiǐ nơra, sukurkite sistemoje darbinƳ slơgƳ.

x Prieš atlikdami priežiǌros darbus bǌtinai pašalinkite slơgƳ proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti

darbuotojai naudotǐ „Brooks Instrument“ nurodytas pakaitines dalis. Naudojant netinkamas dalis ir netinkamai atliekant procedǌras, gali pablogơti gaminio veikimas ir gali kilti pavojus naudojimo proceso saugai. Naudojant tik panašiai atrodanþius pakaitalus gali kilti gaisro ar elektros smǌ

x Užtikrinkite, kad visos Ƴrangos durelơs bǌtǐ uždarytos, o apsauginiai dangþiai uždơti, kad išvengtumơte elektros smǌgio ir

sužeidimǐ, išskyrus, kai kvalifikuoti darbuotojai atlieka priežiǌros darbus.

ƲSPƠJIMAS: naudojant skysto srauto Ƴrenginius, jei dơl kokios nors priežasties prireikia uždaryti šalia Ƴrenginio esanþius

Ƴleidimo ir išleidimo vožtuvus, iš Ƴrenginio reikia išleisti visą skystƳ. To nepadarius galimas šiluminis skysþio plơtimasis, galintis sugadinti ƳrenginƳ ir sužeisti žmonơs.

gio pavojus arba gaminys gali veikti netinkamai.

Europos slơginơs Ƴrangos direktyva (PED)

Perskaitykite prieš tĊsdami!

Visa slơginơ Ƴranga, kurios vidinis slơgis didesnis nei 0,5 bar (g), o dydis didesnis nei 25 mm arba 1 col., yra reglamentuojama Slơginơs Ƴrangos direktyvos (PED).

x Šios instrukcijos dalyje „Techniniai duomenys“ pateikiami nurodymai, susijĊ su PED direktyva. x Šioje instrukcijoje aprašyti gaminiai atitinka Europos Sąjungos direktyvą 2014/34/EU. x Visi „Brooks Instrument“ srauto matuokliai priklauso 1 skysþiǐ grupei. x Didesni nei 25 mm arba 1 col. gaminiai atitinka PED I, II arba III kategoriją.

25 mm arba 1 col. ar mažesni gaminiai atitinka tinkamą inžinerijos praktiką (SEP).

Europoje taikomi elektromagnetinio suderinamumo (EMS) reikalavimai

CE ženklu pažymơta „Brooks Instrument“ (elektrinơ / elektroninơ) Ƴranga buvo sơkmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMS direktyvą 2014/30/EU). Taþiau ypaþ atidžiai reikia rinktis signalizavimo kabelƳ, kuris bus naudojamas su CE ženklu pažymơta Ƴranga.

Signalizavimo kabelio, kabeliǐ riebokšliǐ ir jungþiǐ kokybơ:

„Brooks Instrument“ tiekia kokybiškus kabelius, kurie atitinka CE sertifikavimo specifikacijas. Jei naudojate savo signalizavimo kabelƳ, jis turi bǌti visiškai ir visas ekranuotas 100 % ekranu. Naudojamos „D“ arba „apskrito“ tipo jungtys turi bǌti ekranuotos metaliniu ekranu. Jei taikoma, reikia naudoti metalinius kabeliǐ riebokšlius, užtikrinanþius kabelio ekrano suspaudimą. Kabelio ekraną reikia jungti prie metalinio apvalkalo ar riebokšlio ir ekranuoti abiejuose galuose 360 laipsniǐ. Ekranas turi užsibaigti Ƴžeminimu. Standartinơs kraštinơs jungtys yra nemetalinơs. Naudojami kabeliai turi bǌti ekranuoti 100 % ekranu, kad atitiktǐ CE sertifikavimą. Ekranas turi užsibaigti Ƴžeminimu. Keturiǐ kontaktǐ konfigǌracija: žr. pridơtą instrukciją.

ESD (elektrostatinis išlydis)

PERSPƠJIMAS: šiame prietaise yra elektroniniǐ komponentǐ, kuriuos gali sugadinti statinơ elektra. Išimant ar Ƴdedant vidines spausdintines plokštes ar Ƴrenginius, arba atliekant su jomis kitus darbus, reikia laikytis tinkamǐ darbo procedǌrǐ. Darbo procedǌra:

1. Atjunkite Ƴrenginio maitinimą.

2. Darbuotojai turi pasirǌpinti Ƴžeminimu naudodami riešo juostelĊ ar kitas saugias tinkamas priemones prieš Ƴdơdami, išimdami ar

reguliuodami bet kokią spausdintinơs plokštơs kortelĊ ar kitą vidinƳ komponentą.

3. Spausdintinơs plokštơs korteles reikia transportuoti laidžiame konteineryje. Neleidžiama išimti plokštơs iš apsauginio dơklo, nebent

prieš pat Ƴdơjimą. Išimtas plokštes reikia nedelsiant Ƴdơti Ƴ apsauginƳ konteinerƳ, kuriame jos bus transportuojamos ar saugomos, arba grąžinti Ƴ gamyklą.

Pastabos

Šis instrumentas nơra unikalus dơl jame esanþiǐ ESD (elektrostatiniam išlydžiui) jautriǐ komponentǐ. Daugelyje šiuolaikini gaminiǐ yra komponentǐ, kuriuose naudojama metalo oksidǐ technologija (NMOS, SMOS ir pan.). Patirtis rodo, kad net ir mažas statinơs elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti. Sugadinti komponentai, net jei atrodo, kad jie veikia tinkamai,

greitai sugenda

ǐ elektroniniǐ

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NiezbĊdne zalecenia

Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych. Produkty te muszą byü poprawnie instalowane, obsáugiwane oraz konserwowane, aby zapewniü ich prawidáowe dziaáanie zgodnie ze specyfikacją techniczną. Podczas instalowania, obsáugiwania i konserwowania produktów firmy Brooks Instrument naleĪy przestrzegaü nastĊpujących zaleceĔ:

x Aby zapewniü wáaĞciwe dziaáanie sprzĊtu, instalacja, obsáuga, aktualizacje, programowanie i konserwacja powinny byü wykonywane przez

przeszkolony personel.

x Przed instalacją, obsáugą i czynnoĞciami serwisowymi naleĪy zapoznaü siĊ ze wszystkimi zaleceniami producenta. Aby uzyskaü instrukcjĊ

obsáugi odpowiednią dla danego sprzĊtu, naleĪy skontaktowaü siĊ z lokalnym przedstawicielem handlowym producenta. InstrukcjĊ obsáugi naleĪy zachowaü do póĨniejszego uĪycia.

OSTRZEĩENIE: Nie wolno przekraczaü podanych w instrukcji zakresów dziaáania urządzenia. Nieprzestrzeganie tego zalecenia

moĪe doprowadziü do powaĪnego zagroĪenia Īycia lub zdrowia personelu i / lub uszkodzenia sprzĊtu.

x JeĪeli jakieĞ zalecenia w instrukcji obsáugi urządzenia są niezrozumiaáe, prosimy o skontaktowanie siĊ z przedstawicielem firmy Brooks

Instrument, aby wyjaĞniü problem.

x NaleĪy przestrzegaü wszystkich ostrzeĪeĔ, uwag i zaleceĔ umieszczonych na produkcie lub do niego doáączonych

OSTRZEĩENIE: Przed rozpoczĊciem instalacji naleĪy sprawdziü, czy wymagana specyfikacja niniejszego urządzenia zgodna jest z miejscowymi i krajowymi normami. Zignorowanie tego ostrzeĪenia moĪe spowodowaü powaĪne obraĪenia ciaáa i/lub uszkodzenie sprzĊtu.

x InstalacjĊ urządzenia naleĪy przeprowadziü zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowiązującymi lokalnymi i narodowymi

oznaczeniami. Wszystkie urządzenia moĪna podáączaü wyáącznie do odpowiednich Ĩródeá energii elektrycznej oraz ciĞnienia.

x Pierwsze czynnoĞci obsáugowe: (1) NaleĪy powoli wáączyü przepáyw w instalacji. NastĊpnie powoli otworzyü zawory robocze tak, aby uniknąü

wahaĔ przepáywu. (2) NaleĪy teraz sprawdziü, czy nie wystĊpują nieszczelnoĞci przy podáączeniach wejĞciowym i wyjĞciowym miernika przep

x Przed przystąpieniem do czynnoĞci serwisowych naleĪy upewniü siĊ, Īe ciĞnienie robocze jest odáączone. JeĪeli konieczna jest wymiana czĊĞci

x NaleĪy upewniü siĊ

áywu. JeĪeli nie ma Īadnych nieszczelnoĞci, moĪna zwiĊkszyü ciĞnienie w instalacji do wartoĞci ciĞnienia roboczego.

zamiennych, naleĪy zawsze stosowaü czĊĞci zamienne specyfikowane przez firmĊ Brooks Instrument a czynnoĞci ich wymiany powinien w kaĪdym przypadku dokonywaü przeszkolony personel. Stosowanie nieautoryzowanych czĊĞci i procedur serwisowych moĪe niekorzystnie wpáynąü na dziaáanie produktu oraz zagroziü bezpieczeĔstwu instalacji. Korzystanie z podobnie wyglądających zamienników moĪe doprowadziü do poĪaru, poraĪenia prądem lub nieprawidáowego dziaáania urządzenia.

poraĪeniu prądem personelu. Zalecenie to nie dotyczy przeszkolonego pracownika wykonującego prace serwisowe lub konserwacyjne.

OSTRZEĩENIE: W przypadku mierników przepáywu cieczy, jeĪeli znajdujące siĊ na nich zawory wejĞciowe i wyjĞciowe mają byü z

jakiegoĞ powodu zamkniĊte, to urządzenie musi zostaü caákowicie opróĪnione z ciekáego medium. Niedopeánienie tego zalecenia moĪe doprowadziü do termicznego zwiĊkszenia objĊtoĞci cieczy, co z kolei moĪe spowodowaü uszkodzenie urządzenia i obraĪenia personelu.

Wszystkie urządzenia ciĞnieniowe pracujące przy ciĞnieniu wewnĊtrznym wzglĊdnym wiĊkszym niĪ 0,5 bara i wielkoĞci powyĪej 25 mm lub 1 cala podlegają dyrektywie europejskiej dotyczącej urządzeĔ ciĞnieniowych (PED).

x Rozdziaá „Specyfikacja techniczna” niniejszej instrukcji zawiera zalecenia dotyczące dyrektywy PED. x Produkty opisane w tej instrukcji są zgodne z dyrektywą EN 2014/34/EU. x Wszystkie mierniki przepáywu firmy Brooks Instrument naleĪą do 1. grupy cieczy. x Produkty o wielkoĞci powyĪej 25 mm lub 1 cala naleĪą do kategorii I, II lub III dyrektywy PED.

Produkty o wielkoĞci 25 mm lub 1 cala lub mniejsze podlegają zaleceniom „Uznanej Praktyki InĪynierskiej” (SEP).

Europejska dyrektywa dotycząca kompatybilnoĞci elektromagnetycznej (EMC)

Urządzenia elektryczne / elektroniczne firmy Brooks Instrument posiadające oznaczenie CE, przeszáy pozytywnie testy pod kątem speániania przez nich wymogów kompatybilnoĞci elektromagnetycznej (Dyrektywa EMC 2014/30/EU). JednakĪe szczególną uwagĊ naleĪy poĞwiĊciü przy doborze przewodów sygnaáowych, które mają byü stosowane z urządzeniami ze znakiem CE.

JakoĞü przewodu sygnaáowego, dáawic oraz záączy przewodu:

Firma Brooks Instrument dostarcza wysokiej jakoĞci przewody, które speániają wymagania zawarte w specyfikacji dla certyfikatu CE. JeĪeli stosuje siĊ wáasne przewody sygnaáowe, to powinny one byü w caáoĞci w peáni ekranowane. Záącza typu „D” lub okrągáe powinny zawieraü metalowy ekran. JeĞli to moĪliwe, naleĪy stosowaü metalowe dáawice przewodu zapewniające mocowanie jego ekranu. Ekran przewodu powinien byü poáączony z metalową osáoną lub dáawicą zapewniając caákowite, dookólne ekranowanie na obu koĔcach przewodu. Ekran przewodu powinien byü uziemiony. Záącza krawĊdziowe są standardowo niemetaliczne. Stosowane przewody muszą byü w peáni ekranowane zgodnie z certyfikatem CE. Ekran przewodu powinien byü uziemiony. Konfiguracja styków jest podana w niniejszej instrukcji obsáugi.

UWAGA: Urządzenie zawiera czĊĞci elektroniczne podatne na uszkodzenia spowodowane áadunkami elektrostatycznymi. Przy

obchodzeniu siĊ z wewnĊtrznymi podzespoáami i czĊĞciami elektronicznymi naleĪy przestrzegaü nastĊpujących zasad postĊpowania:

1. NaleĪy odáączyü zasilanie od urządzenia.

2. Osoba wykonująca czynnoĞci musi zostaü uziemiona za pomocą opaski na przegubie dáoni lub w inny, bezpieczny sposób, zanim przystąpi do instalacji, wyjĊcia lub regulacji obwodów drukowanych lub innych wewnĊtrznych podzespoáów elektronicznych urządzenia.

3. Obwody drukowane naleĪy transportowaü w przewodzącym pojemniku. Páytki drukowane naleĪy wyjmowaü z opakowania ochronnego bezpoĞrednio przed ich montaĪem. Wymontowane páytki naleĪy niezwáocznie umieĞciü w opakowaniu ochronnym sáuĪącym do transportowania, skáadowania lub odsyáania do producenta.

Uwagi:

Fakt, Īe urządzenie zawiera czĊĞ komponenty wykonane w technologii tlenków metali (NMOS, SMOS itp.). Jak pokazuje praktyka, nawet niewielkie wyáadowanie elektrostatyczne moĪe uszkodziü lub zniszczyü takie urządzenie. Uszkodzone czĊĞci, nawet jeĪeli na pozór dziaáają poprawnie, szybko doprowadzają do nieprawidáowej pracy urządzenia.

Prosimy przeczytaü przed rozpoczĊciem uĪytkowania!

, Īe wszystkie otwory urządzenia są zamkniĊte a osáony umocowane na swoich miejscach, aby zapobiec obraĪeniom ciaáa lub

Europejska dyrektywa dotycząca urządzeĔ ciĞnieniowych (PED)

Wyáadowania elektrostatyczne (ESD)

ci nieodporne na wyáadowania elektrostatyczne (ESD) jest rzeczą normalną. WiĊkszoĞü nowoczesnych urządzeĔ elektronicznych zawiera

April, 2017

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Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Portuguese

Instruções Básicas

A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de protecção e segurança no trabalho.

x Para assegurar o desempenho adequado, a instalação, exploração, actualização e/ou manutenção do equipamento deve ser realizada,

exclusivamente, por pessoal qualificado.

x Antes de instalar, utilizar e/ou executar operações de manutenção devem ser lidas todas as instruções do equipamento. No caso do presente

manual não ser apropriado procure, na capa traseira, o distribuidor mais próximo e contacte-o para obter informações adicionais. Guarde este manual para futura referência.

ATENÇÃO: não sujeite o equipamento a condições fora das gamas de serviços indicadas. Ao não respeitar esta advertência poderá

provocar avarias no equipamento e/ou danos pessoais.

x Se as instruções deste manual não estiverem suficientemente claras, contacte o representante Brooks Instrument para esclarecer as suas

dúvidas.

x Tenha sempre presente todas as advertências, apelos e instruções indicadas no equipamento e/ou fornecidas junto com o mesmo.

AVISO: Antes de proceder à instalação, certifique-se de que este instrumento está em conformidade com as categorias de homologação

exigidas pelas regulamentações locais e nacionais. O incumprimento pode resultar em lesões pessoais graves e/ou danos no equipamento.

x A instalação do equipamento deverá ser efectuada cumprindo todas as instruções indicadas no manual assim como as normas e regulamentos

locais e nacionais vigentes. Ligue o equipamento exclusivamente a fontes de energia eléctrica e/ou pneumática adequadas.

x Procedimento: (1) Pressurize lentamente o sistema. Abra lentamente as válvulas para evitar variações bruscas de caudal. (2) Verifique se há

fugas nas ligações de entrada e saída do medidor de caudal. Se não detectar fugas, poderá colocar o sistema à pressão de trabalho.

x Antes de efectuar qualquer operação de manutenção verifique sempre a possibilidade do equipamento estar sob pressão. No caso de ser

preciso substituir peças, estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituição deverá ser efectuado por técnicos qualificados. Procedimentos e peças não conformes poderão alterar o desempenho do equipamento, danificá-lo ou colocar em risco a sua segurança ou de outros. Substituir peças por outras não originais, meramente semelhantes, poderá originar choques eléctricos, fogo ou em funcionamento inadequado.

x Deverá manter o equipamento intacto e fechado, verificando se as coberturas de protecção estão nos seus lugares devidos, de forma a evitar

choques eléctricos e/ou danos pessoais, excepto no caso de se tratar de um técnico qualificado e se estiver a executar trabalhos de manutenção.

ATENÇÃO: Se por qualquer razão for necessário fechar as válvulas a montante e jusante do equipamento, tenha em atenção que o mesmo deverá ser previamente esvaziado do fluído que o atravessa. Esta obrigação surge do facto de existir a possibilidade de ocorrer dilatação térmica do líquido, no interior do aparelho, podendo provocar danos pessoais ou materiais graves.

Ler antes de proceder!

Todos os equipamentos sujeitos a pressão interior superior a 0,5 bar (g) e com calibre superior a 25 mm (1 polegada) estão sob a vigência da directiva europeia de equipamentos sob pressão (PED).

x O capítulo "Dados técnicos" do manual contém instruções relativas à Directiva PED. x O produto objecto deste manual satisfaz a directiva 2014/34/EU da UE. x Os caudalímetros Brooks pertencem ao grupo 1 de fluidos. x Os produtos com calibre superior a 25 mm (1 polegada) pertencem às categorias PED I, II, ou III.

Os produtos de 25 mm (1 polegada) ou menores seguem as “Boas regras de engenharia” (SEP).

Directiva Europeia sobre Compatibilidade electromagnética (EMC)

Directiva Europeia para equipamentos sob pressão (PED)

Os equipamentos (eléctricos/electrónicos) da Brooks Instrument que têm a marcação CE passaram os testes comprovativos dos requisitos de compatibilidade electromagnética (Directiva EMC número 2014/30/EU). Todavia, ao utilizar os aparelhos compete-lhe a escolha dos cabos de sinal adequados para os equipamentos com marcação CE.

Qualidade dos cabos de sinal, bucins e conectores:

A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marcação CE. No caso de utilizar os seus próprios cabos de sinal, assegure uma blindagem a 100%. Os conectores do tipo “D” ou "circular" têm que ser blindados por uma malha metálica. Se precisar de usar bucins, estes têm que permitir a crimpagem da malha/blindagem do cabo. A blindagem do cabo deve ser ligada ao corpo metálico ou bocal e assegurando a blindagem em 360°. A blindagem deve terminar numa ligação à terra. Os conectores ligados a cartões serão, em geral, não-metálicos. Os cabos utilizados devem ter fita de blindagem a 100% para satisfazer a marcação CE. A blindagem, deverá terminar numa ligação à terra.

Atribuição de pinos: Veja as instruções de operação anexas.

Descarga Electrostática (ESD)

ATENÇÃO: Alguns componentes deste equipamento são susceptíveis à acção da electricidade estática, podendo ficar danificados. Ao remover, colocar ou manipular placas de circuitos electrónicos deverá ter em atenção os seguintes procedimentos:

1. Desligar o equipamento da rede.

2. O utilizador, antes de qualquer intervenção que envolva os cartões de circuitos ou outros dispositivos internos, terá que se ligar à terra por meio

duma bracelete de pulso ou outro dispositivo adequado.

3. Os circuitos impressos deverão ser transportados numa embalagem condutiva. Os cartões só deverão ser retirados da embalagem protectora

imediatamente antes da sua inserção. O cartão retirado deverá ser recolocado imediatamente na embalagem protectora que servirá para o seu transporte, armazenagem ou retorno a fábrica.

Observações:

Tenha presente que este equipamento poderá não ser o único objecto capaz de ser portador de peças sensíveis a descargas electrostáticas (ESD). Na maioria dos dispositivos electrónicos Brooks encontram-se peças de tecnologia de óxidos metálicos (NMOS, SMOS, etc.). A experiência mostra que até pequenas quantidades de electricidade estática são capazes de danificar ou destruir esses dispositivos. Os componentes danificados, embora inicialmente funcionem aparentemente bem, acabam por ter falhas prematuramente.

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Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Romanian

IndicaĠii de referinĠă

Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale. Aceste instalaĠii trebuie amplasate, exploatate úi întreĠinute corespunzător, pentru ca în toate situaĠiile, domeniul lor de lucru să corespundă operării normale. În ceea ce priveúte instalarea, operarea úi întreĠinerea produselor Brooks Instrument, indicaĠiile de mai jos trebuie respectate úi trebuie introduse in programul de protecĠia muncii.

x Pentru garantarea prestaĠiei corecte, instalarea, operarea, actualizarea, programarea úi întreĠinerea produsului poate fi realizată doar de către

personal calificat.

x InstrucĠiunile de instalare ale produsului trebuie citite integral, înainte de punerea în serviciu úi exploatarea sa. În măsura în care ediĠia acestui

manual nu este cea adecvată, identificaĠi pe ultima copertă coordonatele distribuitorului local úi pentru lămuriri suplimentare adresaĠi-vă acestuia. PăstraĠi acest manual pentru referinĠe ulterioare.

ATENğIE: Nu utilizaĠi instalaĠia în afara intervalului de funcĠionare indicat în instrucĠiunile de operare. Nerespectarea acestui lucru se poate solda cu răniri grave de persoane sau defectarea instalaĠiei.

x În măsura în care indicaĠiile cărĠii maúinii nu sunt suficient de lămuritoare, luaĠi legătura cu reprezentantul Brooks Instrument pentru clarificarea

problemei.

x PăstraĠi toate avertismentele, avizele úi instrucĠiunile livrate odată cu instalaĠia sau inscripĠionate pe aceasta.

AVERTISMENT: Înainte de instalare, asiguraĠi-vă că valorile nominale ale acestui instrument respectă codurile naĠionale. Nerespectarea

acestui avertisment poate avea drept rezultat răniri personale grave úi/sau defectarea echipamentelor.

x EfectuaĠi instalarea echipamentului în conformitate cu indicaĠiile de instalare corespunzătoare, respectiv cu respectarea prevederilor naĠionale.

Echipamentul se conectează exclusiv la surse de energie electrică úi de presiune corespunzătoare.

x Succesiune: (1) PresurizaĠi lent instalaĠia. DeschideĠi încetul cu încetul supapa de funcĠionare pentru evitarea fluctuaĠiilor de flux. (2) ControlaĠi

dacă nu sunt prelingeri la intrarea sau ieúirea debitmetrului de branúare. Dacă nu sunt scurgeri, presurizaĠi instalaĠia la presiunea de lucru.

x Înaintea exploatării/ întreĠinerii, verificaĠi neapărat dacă conducta uzinală nu este sub presiune. În măsura în care este nevoie de piese de

schimb, este neapărat necesar ca manevrarea pieselor de schimb să fie făcută de personal cu calificare profesională agreat de Brooks Instrument. Utilizarea altor piese de schimb decât cele originale úi licenĠiate poate avea efecte asupra performanĠelor instalaĠiei ú siguranĠei sale în exploatare. Utilizarea de piese asemănătoare de substituire poate avea ca rezultat pericol de incendiu úi electrocutare.

x În toate cazurile toate uúile instalaĠiei trebuie să fie închise, cuútile de protecĠie să fie puse la locurile lor, pentru evitarea electrocutării úi rănirii de

persoane, exceptând situaĠiile când un specialist efectuează lucrări de întreĠinere.

ATENğIE: În cazul instalaĠiilor cu flux de fluide, dacă din orice motiv este necesară închiderea valvelor de intrare úi ieúire, limitrofe instalaĠiei, instalaĠia trebuie complet golită. Neglijarea acestui lucru poate avea ca efect dilatarea termică a fluidului, care poate defecta instalaĠia úi poate produce răniri de persoane.

Directiva europeană pentru instalaĠiile sub presiune (PED)

Toate instalaĠiile úi sistemele presurizate ce se află sub presiuni interne ce depăúesc 0,5 mbar (g) úi au mai mult de 25 mm sau 1 Ġol, cad sub incidenĠa normei europene corespunzătoare (PED).

x La capitolul "Date tehnice" din cartea maúinii se găsesc indicaĠiile corespunzătoare directivei PED. x Produsele menĠionate în cartea maúinii corespund directivei 2014/34/EU EU. x Toate debitmetrele Brooks corespund clasei 1 de fluide. x Produsele mai mari de 25 mm sau 1 Ġol corespund categoriei PED I, II sau III.

Produsele mai mici de 25 mm sau 1 Ġol se conformează practicii inginereúti acceptate (SEP).

Directiva europeană privitoare la compatibilitatea electromagnetică (EMC).

InstalaĠiile (electrice /electronice) ce poartă marca Brooks Instrument CE îndeplinesc cu succes cerinĠele testelor de verificare ale compatibilităĠii electromagnetice (Cf. directivelor europene EMC cu nr. 2014/30/EU). În acelaúi timp trebuie acordată o atenĠie deosebită la alegerea cablurilor de semnalizare utilizate pentru instalaĠiile ce poartă marcajul CE.

Calitatea cablurilor de semnalizare, a legăturilor prin cablu úi a conectoarelor:

Brooks Instrument oferă cabluri de calitate ridicată, care corespund cerinĠelor calitative ale CE. În măsura în care folosiĠi cabluri proprii, trebuie alese acelea care sunt 100% ecranate úi prevăzute cu filtre. Conectoarele „D” sau cele „circulare” trebuie sa dispună de ecrane metalice. În caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu. Filtrul de cablu trebuie conectat la carcasa metalică sau manúon úi în ambele cazuri trebuie asigurată ecranarea la 360°. Ecranarea trebuie terminată cu o legare la pământ. Conform standardului, conectoarele aparĠinând plăcilor electronice nu sunt metalice. Cablurile folosite trebuie să fie 100% ecranate úi prevăzute cu filtre pentru a corespunde clasificării CE. Ecranarea trebuie terminată cu o legare la pământ. ConfiguraĠie de contact: Vezi instrucĠiunile de operare ataúate.

ATENğIE: InstalaĠia include piese care sunt predispuse la defectare sub influenĠa electricităĠii statice. Trebuie respectate metodele

corespunzătoare de extragere, instalare sau alte manipulări ale circuitelor electronice. Procedură de manipulare:

1. InstalaĠia trebuie scoasă de sub tensiune.

2. Înaintea de inserarea, scoaterea sau reglarea vreunei cartele electronice, sau a altui dispozitiv intern, persoana trebuie să se lege la pământ cu banda pentru articulaĠia mâinii sau alte dispozitive de siguranĠă disponibile pentru acest scop.

3. Cartelele cu cablaje electronice imprimate trebuie transportate în ambalaje anti-electrostatice (conductoare). Cartelele se pot scoate din ambalaj, doar nemijlocit înaintea amplasării lor. Cartela demontată trebuie pusă neîntârziat în ambalajul de protecĠie în vederea transportării, a depozitării sau returnării la producător.

ObservaĠii:

În echipamente se găsesc adesea componente sensibile la descărcare electrostatică (ESD). Majoritatea echipamentelor moderne includ componente electronice realizate în tehnologie metal-oxid semiconductor (NMOS, SMOS, etc.) ExperienĠa a dovedit că acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slabă intensitate. Componentele defectate, cu toate că în aparenĠă sunt funcĠionale, duc în timp la defecĠiuni incipiente.

CitiĠi-le întâi pe acestea!

i asupra

Descărcare electrostatică (ESD)

April, 2017

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Installation and Operation Manual

Appendeix C Essential Instructions

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Slovak

Základné príkazy

Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu. Nižšie uvedené príkazy je potrebné dodržiavaĢ a zaþleniĢ do programu bezpeþnostných predpisov v priebehu inštalácie, prevádzky a údržby výrobkov Brooks Instruments.

• V záujme zabezpeþenia vyhovujúceho výkonu inštaláciu, prevádzku, programovanie, aktualizáciu a údržbu zariadení má vykonávaĢ výluþne odborne kvalifikovaný personál.

• Pred inštaláciou, prevádzkou a servisu zariadení je potrebné preþítaĢ všetky príkazy. Ak táto príruþka nie je správna, tak na zadnej strane treba nájsĢ miestneho distribútora, kontaktovaĢ ho pre ćalšie informácie. Pre neskoršie informácie uschovajte príruþku.

UPOZORNENIE: NeprevádzkovaĢ zariadenie v rozsahu mimo rozsahu uvedenom v prevádzkovej príruþke. Porušenie tohto oznámenia

môže maĢ za následok Ģažkú ujmu na zdraví a vedie k poškodeniu zariadenia.

x Ak príkazy v návode nie sú jednoznaþné, kontaktujte zástupcu Brooks Instrument na objasnenie problémov. x Dodržujte všetky upozornenia, príkazy a usmernenia uvedené na zariadení, alebo s ním dodané.

VAROVANIE: pred montážou sa uistite, že toto zariadenie disponuje potrebnými klasifikáciami povolení, ktoré spĎĖajú miestne a národné

predpisy. Nedodržanie tohto varovania môže maĢ za následok vážne zranenia osôb alebo poškodenie zariadenia.

x Zariadenia inštalujte podĐa návodu uvedeného v príkaze na inštaláciu, v súlade s miestnymi a národnými predpismi. Zariadenie pripojte výluþne

len na vyhovujúci elektrický a tlakový zdroj

x Postup: (1) Pomaly natlakujte systém. Prevádzkový ventil otvorte pomaly na zamedzenie kolísania prietoku. (2) Prekontrolujte tesnosĢ vstupného

a výstupného zapojenia prietokomeru. Keć nie je presakovanie, spoje sú tesné, naplniĢ systém na prevádzkový tlak.

x Pred vykonávaním servisných prác kontrolovaĢ, þi systém nie je pod tlakom. V prípade, že je potrebná výmena súþiastky, výmenu dielov,

urþených Brooks Instrument musí vykonaĢ kvalifikovaná osoba. Použitie nepovolených dielov a vykonávanie nepovolených aktivít ohrozujú bezpeþnosĢ prevádzvky a majú negatívny vplyv na výkon zariadenia. Nahradenie súþiastok len podobnými komponentmi môže maĢ za následok požiar, úraz elektrickým prúdom alebo nedostatoþnú funkciu zariadenia

x Všetky ochranné kryty, dvierka zariadenia majú byĢ zatvorené na zabezpeþenie ochrany proti úrazu elektrickým prúdom a proti poraneniam

obsluhy. Výnimku tvorí vykonávanie údržby kvalifikovaným odborníkom.

UPOZORNENIE: Pri zariadeniach s prietokom kvapalín, keć z akéhokoĐvek dôvodu je nutné uzavrieĢ vstupné a výstupné ventily, zariadenie je potrebné úplne vyprázdniĢ. Zanedbanie vypúšĢania má za následok poškodenie zariadenia s možnosĢou zranenia obsluhy z dôvodu tepelnej rozĢažnosti náplne.

Európska smernica vzĢahujúca sa na tlakové zariadenia (PED)

x Všetky zariadenia s vyšším vnútorným pretlakom ako 0,5 bar (g), a väþšieho rozmeru ako 25 mm alebo 1 anglický palec, podliehajú pod

Európsku smernicu vzĢahujúcu sa na tlakové nádoby (PED).

x Kapitola "Technické údaje" návodu na obsluhu obsahuje príkazy vzĢahujúce sa na smernicu PED. x Produkty uvedené v návode na obsluhu vyhovujú smernici 2014/34/EU EÚ. x Všetky prietokomery Brooks patria do 1. skupiny kvapalín. x Produkty presahujúce rozmery 25 mm alebo 1 " spĎĖajú I., II., alebo III. kategóriu PED.

Produkty menšie alebo rovné ako 25 mm alebo 1 " zodpovedajú zaužívanej meracej praxi (SEP).

Európska smernica vzĢahujúca sa na elektromagnetickú kompatibilitu (EMC)

Elektrické / elektronické zariadenia Brooks Instrument, ktoré si zaslúžili znaþku CE, úspešne splnili skúšobné testy požiadaviek elektromagnetickej kompatibility (smernica EMC þ. 2014/30/EU). Pritom treba venovaĢ zvláštnu starostlivosĢ na výber signálnych káblov zariadenia, s oznaþením CE. Kvalita signálnych káblov, káblových spojov a prípojov: Brooks Instrument ponúka vysoko kvalitné káble, ktoré spĎĖajú požiadavky kvalitatívneho zaradenia CE. Ak použijete vlastné signálne káble, majú maĢ 100%-né tienenie, s plným filtrovaním. Prípojky "kruhové" alebo tvaru "D" majú maĢ kovové tienenie. V prípade potreby treba použiĢ kovové káblové spojky k upevneniu káblového filtra. Káblový filter treba pripojiĢ ku kovovému telesu alebo k puzdru, na oboch stranách zabezpeþiĢ tienenie v kruhu 360 °. Tienenie má byĢ ukonþené uzemnením. Prípojky vedúce ku kartám podĐa noriem sú nekovové. Použité káble, pre vyhovenie predpisom CE musia maĢ 100%-né filtrovanie tienením. Tienenie má byĢ ukonþené uzemnením. Konfigurácia kontaktov: Vić priložený návod na obsluhu. .

UPOZORNENIE: Prístroj obsahuje súþiastky, ktoré môžu byĢ poškodené od elektrostatických nábojov. Pri montáži, odstraĖovaní alebo

inej údržby vnútorných obvodových kariet je potrebné dodržiavaĢ príslušné postupy. Postup ošetrovania:

1. Zariadenie odpojiĢ od napájania.

2. Osoba vykonávajúca údržbu má byĢ uzemnená uzemĖujúcim náramkom, alebo iným, na túto prácu vyhovujúcim spôsobom pred vykonávaním inštalácie, demontáže a nastavenia obvodových kariet alebo iného vnútorného prostriedku.

3. Karty obvodov sa musia prepravovaĢ v elektricky vodivom balení. Karty sa môžu vyberaĢ z ochranného obalu výluþne len tesne pred montážou, zasunutím! Vybranú kartu okamžite treba umiestniĢ do ochranného obalu, urþeného pre dopravu, skladovanie, alebo pre spätnú prepravu do výrobného závodu.

Poznámky:

Existencia prvkov, ktoré sú citlivé na elektrostatické výboje (ESD) v prístroji je þastým javom. U väþšiny moderných elektronických prostriedkov sú použité prvky s technológiou oxidu kovov (NMOS, SMOS, atć.). Skúsenosti dokazujú, že aj nepatrné elektrostatické výboje poškodzujú, zniþia tieto prostriedky. Poškodené súþiastky, aj keć zdanlivo pracujú bez chyby, odkazujú na vznikajúce poruchy.

PreþítaĢ pred inštaláciou!

Elektrostatický výboj (ESD)

C-17

Appendix C Essential Instructions

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

April, 2017

Slovene

Osnovna navodila

Brooks Instrument oblikuje, proizvaja in preskuša svoje izdelke tako, da ustrezajo številnim nacionalnim in mednarodnim standardom. Te izdelke je treba ustrezno namestiti, jih uporabljati in vzdrževati, saj bodo le tako še naprej delovali v skladu s svojimi obiþajnimi tehniþnimi podatki. Upoštevajte spodnja navodila in jih vkljuþite v svoj varnostni program pri namestitvi, uporabi in vzdržavanju izdelkov družbe Brooks Instrument.

x ýe želite zagotoviti ustrezno delovanje, zagotovite, da bo izdelek namestilo, uporabljalo, posodabljalo, programiralo in vzdrževalo usposobljeno

osebje.

x Pred namestitvijo, uporabo in servisiranjem izdelka preberite vsa navodila. ýe ta priroþnik ni ustrezen priroþnik, na hrbtni strani poišþite podatke

za stik z lokalnim prodajnim mestom. Ta priroþnik shranite za poznejšo uporabo.

OPOMBA: To napravo lahko uporabljate samo v okviru tehniþnih podatkov, ki so navedeni v priroþniku z navodili za uporabo. ýe tega

opozorila ne upoštevate, lahko pride do hudih telesnih poškodb in/ali poškodb opreme.

x ýe katerih koli navodil ne razumete, se za pojasnilo obrnite na svojega zastopnika družbe Brooks Instrument. x Upoštevajte vsa opozorila, svarila in navodila, ki so navedena na izdelku ali so mu priložena.

OPOZORILO: Pred namestitvijo se prepriþajte, da ima ta naprava zahtevane ocene odobritve, ki izpolnjujejo lokalne in nacionalne

zakone. ýe tega opozorila ne upoštevate, lahko pride do hudih telesnih poškodb in/ali poškodb opreme.

x Opremo namestite v skladu z navodili za namestitev, ki so navedena v ustreznem uporabniškem priroþniku, ter v skladu z veljavnimi lokalnimi in

nacionalnimi zakoni Vse izdelke prikljuþite na ustrezne elektriþne vire in vire tlaka.

x Postopek: (1) V sistemu poþasi zaženite pretok. Poþasi odprite procesne ventile, da prepreþite nihanja pretoka. (2) Preverite, ali prihaja do

pušþanj okrog vhodnih in izhodnih prikljuþkov merilnika pretoka. ýe ne prihaja do pušþanj, vzpostavite delovni tlak v sistemu.

x Pred servisom morate odstraniti tlak v obdelovalni liniji. ýe potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne

dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na uþinkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka. Rezervni deli, ki so podobni samo na videz, lahko povzroþijo požar, nevarnost elektiþnega udara ali nepravilno delovanje.

x Prepriþajte se, da so vrata vrata naprave zaprta in da so zašþitni pokrovi namešþeni, da prepreþite elektriþni udar in telesne poškodbe, razen

kadar usposobljeno osebje izvaja vzdrževalna dela.

OPOMBA: ýe je pri napravah za pretok tekoþine vhodne in izhodne ventile ob napravi treba iz kakršnega koli razloga zapreti, je treba naprave popolnoma izprazniti. ýe tega ne naredite, lahko pride do toplotnega raztezanja tekoþine, zaradi katerega se lahko naprava prelomi in povrzoþi telesne poškodbe.

Vsa tlaþna oprema z notranjim tlakom, ki je veþji od 0,5 bara (g), in velikostjo, ki je veþja od od 25 mm ali 1 palca, spada v direktivo o tlaþni opremi (PED).

x V poglavju »Tehniþni podatki« v tem priroþniku najdete navodila, ki se nanašajo na direktivo PED. x Izdelki, opisani v tem priroþniku, so skladni z direktivo EN 2014/34/EU. x Vsi merilniki pretoka družbe Brooks Instrument spadajo v skupino tekoþin 1. x Izdelki, veþji od 25 mm ali 1 palca, so skladni s kategrijo I, II, ali III direktive PED.

Izdelki, katerih velikost je 25 mm ali 1 palec ali manjši izdelki, so skladni z dobro inženirsko prakso (SEP).

Evropska direktiva o elektromagnetni združljivosti (EMC)

Naprave družbe Brooks Instrument (elektriþne/elektronske) z oznako CE so bile uspešno preskušene v sklþadu s predpisi direktive o elektromangnetni združljivosti (Direktiva o elektromagnetni združljivosti 2014/30/EU). Posebno pozornost morate nameniti izbiri signalnega kabla, ki jih uporabljate za naprave z oznako CE.

Kakaovost signalnih kablov, kabelskih tesnilk in prikljuþkov:

Brooks Insturment ponuja kable visoke kakovosti, ki ustrezajo tehniþnim podatkov za pridobitev oznake CE. ýe uporabljate svoj signalni kabel, morate uporabiti kabel, ki je na splošno popolnoma oklopljen s 100 % zašþito.

Prikljuþki tipa »D« ali »krožni« prikljuþki morajo biti zašþiteni s kovinskim šþitom. Po potrebi je treba uporabiti kovinske kabelske tesnilke, ki zagotavljajo vpenjala za zaslon kabla. Zaslon kabla je treba prikljuþiti na kovinsko ohišje ali tesnilko in ga na obeh koncih popolnoma zašþititi. Zašþito je treba prekiniti pri ozemljitvi. Robni prikljuþki obiþajno niso kovinski. Kable je treba zašþititi s 100 % zašþito, da ustrezajo oznaki CE. Zašþito je treba prekiniti pri ozemljitvi. Navodila z konfiguraciju nožic najdete v priloženem uporabniškem priroþniku.

OPOZORILO: Naprava vsebuje elektronske komponente, ki so obþutljive na poškodbe zaradi statiþne elektrike. Pri odstranitvi,

namestitvi ali drugih postopkih uporabe notranjega tiskanega vezja ali naprav morate upoštevati ustrezne postopke. Postopek ravnanja:

1. Izklopite napravo.

2. Osebje je treba pred namestitvijo, odstranitvijo ali prilagajanjem katare koli kartice tiskanega vezja ali druge notranje naprave ozemljiti z zapestnim pašþkom ali drugimi varnostnimi in primernimi sredstvi.

3. Kartice s tiskanim vezjem je treba prevažati v prevodnem vsebniku. Plošþe lahko iz zašþitne embalaže odstranite šele tik pred namestitvijo. Odstranjene plošþe je treba takoj shraniti v zašþitno embalažo za prevoz, shranjevanje ali vraþilo v tovarno.

Opombe:

Ta naprava ni edinstvena z vidika komponent, ki so obþutljive na elektrostatiþno razelektritev. Veþina sodobnih elektronskih naprav vsebuje komponente, ki uporabljajo oksidno tehnologijo (NMOS, SMOS itd.). Izkušnje dokazujejo, da lahko celo majhne koliþine statiþne elektrike poškodujejo ali uniþijo te naprave. Poškodovane komponente se predþasno okvarijo, þeprav navidez delujejo pravilno.

Preberite jih pred nadaljevanjem.

Evropska direktiva o tlaþni opreni (PED)

Elektrostatiþna razelektritev (ESD)

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Spanish

Instrucciones básicas

¡Léalos primero!

El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando, operando y mantenimiento los productos Brooks Instrument.

x Para asegurar el adecuado rendimiento, para instalar, operar, actualizar, programar y mantener tiene que realizarse exclusivamente por una persona

calificada.

x Antes de la instalación, operación y servicio del producto leer todas las respectivas instrucciones. Si el presente manual no es la adecuada

publicación, busque al distribuidor local que figura en la contraportada y póngase en contacto con él para obtener informaciones. Guarde el presente manual para tener informaciones también en el futuro.

ATENCIÓN: No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento. El incumplimiento de estas

últimas puede conducir a graves daños personales o a la avería del equipo.

x Si las instrucciones del manual no son evidentes, póngase en contacto con el representante de Brooks Instrument para aclarar el problema x Observar todas las alertas, advertencias e instrucciones indicadas en el equipo o suministradas con el mismo.

ADVERTENCIA: Antes de la instalación, asegúrese de que el instrumento ofrece las características de aprobación necesarias para satisfacer

los requisitos normativos locales y nacionales. En caso contrario, se pueden producir lesiones personales y/o daños en el equipo.

x Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalación y con las pautas de las normas

vigentes locales e internacionales. Conectar el producto exclusivamente a la adecuada fuente eléctrica y presión.

x Proceso: (1) Colocar lentamente flujo en el sistema. Abrir lentamente las válvulas de proceso para evitar oscilación del flujo. (2) Verificar si hay fuga

alrededor de las conexiones de entrada y salida del flujómetro, Si no hay, llenar el sistema con la presión de operación.

x Antes de efectuar el servicio, verificar si hay presión o no en la tubería de la red. Si se requiere realizar un recambio de piezas, solamente el personal

calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro. El recambio realizado con piezas sólo similares pueden traer como consecuencias incendios, choques eléctricos o funcionamiento bajo.

x Todas las puertas de la instalación deben estar cerradas, las cubiertas de protección tienen que hallarse en el debido sitio con el fin de evitar los

daños personales y los choques eléctricos, salvo cuando un especialista efectúa el mantenimiento.

ADVERTENCIA: En caso de instalaciones que circulen líquido, si por cualquier razón se hubiera de cerrar las válvulas de entrada y salida situadas al lado del equipo, dichas instalaciones deberán ser completamente vaciadas. La omisión de esto último puede provocar la dilatación térmica del líquido, lo que puede dañar al equipo y conducir a daños personales.

Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión (PED).

x El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED x Los instrumentos de medición indicados en el Manual responden a las EN directivas 2014/34/EU. x Todos los caudalímetros Brooks pertenecen a la categoría 1 del grupo de fluidos. x Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED

Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP).

Directriz Europea respecto a la Compatibilidad Electromagnética (EMC)

Directriz Europea de los Equipos de Presión (PED)

Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC 2014/30/EU). Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE.

Calidad de los cables de señal, piezas de unión de cable y conectores:

El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE. Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%. Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable. Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°. El blindaje debe terminar en tierra. Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE. El blindaje debe terminarse en tierra. Configuración de contacto: Véase Instrucciones de operación adjuntas.

Descarga Electroestática (ESD)

PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática. Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos Proceso de operación:

1. Desconectar la fuente eléctrica de la unidad.

2. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o ajustar el circuito impreso eléctrico u otro medio interno.

3. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica.

Notas:

Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial.

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Appendix C Essential Instructions

Installation and Operation Manual

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Part Number: 541B137AAG

GF100 Series

April, 2017

Swedish

Väsentliga anvisningar.

Läs detta innan du fortsätter!

Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.

x För att garantera angiven funktion, använd kvalificerad personal till att installera, handha, uppgradera, programmera och serva produkten. x Läs alla instruktioner innan produkten installeras, startas upp och underhålls. Om du finner att denna instruktionshandbok inte är den rätta

instruktionsboken, titta på i slutet av pärmen för information om hur man kan kontakta lokala representanter. Spara denna instruktions manual för senare behov.

VARNING: Kör inte detta instrument utanför dess specifikationer som är angiven i Instruktionsboken. Undvikande att ta denna varning

kan leda till allvarliga personliga skador och / eller skada utrustningen.

x Om du inte förstår någon av dessa instruktioner, kontakta din representant för Brooks Instrument för klarläggande. x Följ alla varningar och instruktioner som följer med leveransen av denna produkt.

VARNING: Säkerställ före installation att detta instrument har alla nödvändiga godkännanden för att uppfylla lokala och nationella regler.

Underlåtenhet att följa denna varning kan leda till personskador och/eller skador på utrustningen.

x Installera din utrustning på sättet som anges i den gällande handbokens installationsanvisningar och enligt tillämpliga lokala och nationella

föreskrifter. Koppla varje produkt till föreskriven ström- och tryckkällan.

x Igångsättning: (1) Koppla långsamt på flöde i systemet. Öppna processventiler sakta för att undvika för höga flöden. (2) Kontrollera läckor vid

mätarens anslutningar för in- och utlopp. Om inget läckage förekommer, kör systemet upp till drifttrycket.

x Kontrollera att processledningens tryck är bortkopplat före service. I fall det behöves kompletteras med nya delar, se till att komponenter

föreskrivna av Brooks Instrument används. Samt att kvalificerad personal utför arbetet. Ej rekommenderade komponenter och åtgärder kan påverka produktens prestanda och sätta din driftsäkerhet på spel. ”Felaktiga” ersättningar kan orsaka eld, elektriska skador samt felaktig funktion.

x Se till att anordningens kåpor och skyddslock ligger på sin plats med syfte att förebygga elektriska kontakt och personliga skador; det enda

undantag gäller när underhållsarbete utförs av kvalificerad personal.

VARNING: I fall av - flödesmätare / regulatorer för vätskor: Ifall ventiler före och efter skall stängas av, måste alla ledningar tömmas på all vätska. Att ej tömma ledningar alt koppla bort trycket kan göra så att vätskans värmeutvidgning kan spräcka / skada utrustningen och orsaka personliga skador.

European Pressure Equipment Directive (PED) - (Rådets Direktiv 99/36/EG av den 29 april

1999[1] om transportabla tryckbärande anordningar)

Alla utrustning för tryck med ett tryck över 0.5 Bar(g) bar och större demensioner än 25 mm eller 1" (inch) faller under Tryck direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar - PED.

x Den här Instruktionsbokens Sektion ” Specifikation” innehåller anvisningar gällande PED Direktivet. x Mätare som beskrivs i denna Instruktionsbok är i överensstämmelse med EN Direktivet 2014/34/EU. x Brooks Instruments alla flödesmätare faller under flödesgrupp nr. I. x Mätare som är större än 25 mm eller 1" (inch) överensstämmer med PED kategorier I, II eller III.

x Mätare på 25mm eller 1" (inch) eller mindre faller under Sound Engineering Practice (SEP) (God Teknisk Praxis).

European Electromagnetic Compatibility (EMC) - Elektromagnetisk kompatibilitet

Brooks Instrument (elektriska/elektroniska) CE-märkta anordningar har redan genomgått ett framgångsrikt prov enligt regleringar under Electromagnetic Compatibility (EMC directive 2014/30/EU). Man måstre dock ägna särskild uppmärksamhet till valet av signalkabeln som skall används för CE-märkta anordningar.

Signalkablars, packboxars och kontakdons kvalitet:

Brooks Instrument levererar högkvalitativa kablar som överensstämmer med specifikation för CE-intygade produkter. Om man använder sin egen signalkabel, då bör man använda en kabel som är fullständigt skärmad med en 100% avskärmning. “D” eller “Cirkelformiga” kontakdon skall vara skärmade med metalliska avskärmningar. Om det är användbart, bör metallpackboxar som ger en bra fastspänning för kabelskärmar användas. Kabelavsärmningen måste kopplas till den metalliska skärmande anordningen eller packboxen och skärmas vid båda ändar runt omkring. Avskärmningens avspänning måste jordas. Card Edge Kontaktdon är icke metalliska. För att överensstämma med krav på CE-intyg, skall de kablarna som används vara skärmade med 100% skärmning. Skärmningen måste jordas. Vad gäller stiftkonfigurationen: Se den bifogade Instruktionshandboken.

ESD (Elektrostatiska urladdningar)

OBS: Denna utrustning innehåller elektroniska komponenter som är lättpåverkade av skada orsakad av statisk elektricitet. Lämplig

hanteringsprocedur måste följas när man tar bort, installerar eller på något annat sätt hanterar inre kretskort eller andra anordningar.

1. Ström till enheten måste kopplas från.

2. Personalen måste jordas med hjälp av ett armband eller något annat säkert medel innan något kretskort eller andra inre anordningar installerras, tas bort eller justeras.

3. Kretskort måste transporteras i en speciell förpackning för elektronik. Kort skall ej tas bort från deras skydsskåpa innan man skall installera dem. De borttagna korten bör omedelbart läggas i speciell förpackning för transport, lagring eller återlämnande till fabriken.

Anmärkningar:

Dessa instrument är ej unika vad gäller dess ESD (Elektrostatiska urladdningar) - känsliga komponenter. De flesta samtida konstruktioner innehåller komponenter som utnyttjar metalloxid teknologi (NMOS, SMOS, o.s.v.). Erfarenhet har visat att även små mängder av statisk elektricitet kan skada eller förstöra dess komponenter. Skadade komponenter - även om de annars verkar fungera ordentligt – har ofta en kortare livslängd.

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Installation and Operation Manual

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Installation and Operation Manual

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Part Number: 541B137AAG

GF100 Series

LIMITED WARRANTY

Visit

www.BrooksInstrument.com for the terms and conditions of our limited warranty.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

April, 2017

Please contact your nearest sales representative for more details.

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice.

TRADEMARKS Brooks and MultiFlo are trademarks of Brooks Instrument, LLC All other trademarks are the property of their respective owners.

Brooks Instrument GF100, GF120, GF125 Operating Manual

Specifications and Main Features

Frequently Asked Questions

User Manual