Brooks Instrument GF100, GF120, GF125 Operating Manual

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

GF100 Series

Brooks® GF100 Series High Purity/Ultra-High Purity Digital Thermal Mass Flow Devices

Model GF125 Analog I/O Model GF125 Digital I/O

Model GF135 Analog I/O Model GF121 Analog I/O

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

Essential Instructions

Read before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

European Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

European Electromagnetic Compatibility (EMC)

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU). Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification. If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield. “D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping. The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees. The shield should be terminated to an earth ground. Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification. The shield should be terminated to an earth ground. For pin configuration : Please refer to the enclosed Instruction Manual.

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices. Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Dear Customer , We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user . It is designed with the ever changing process conditions, accuracy requirement s and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Of fice listed on the back cover of this manual or visit www .BrooksInstrument.com.

Y ours sincerely , Brooks Instrument

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017GF100 Series

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LEFT BLANK

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Paragraph Page Number Number

Section 1 General Information

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ...............................................................................................................1-1

1-3 Product Support References.................................................................................................. .......1-2

1-4 Notice and Caution Statements..................................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF100 Series Device...........................................................................................1-2

1-7 Industry Standard References....................................................................................................... 1-2

1-8 GF100 Series Gas Table ...............................................................................................................1-2

1-9 Glossary of Terms and Acronyms .................................................................................................1-2

1-10 Description .................................................................................................................................... 1-5

1-11 Specifications for GF100 Series Devices...................................................................................... 1-8

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended S torage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage ..................................................................................................................2-2

2-7 Gas Connections........................................................................................................................... 2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation.................................................................................................................. 2-2

2-10 Flow Controller Inst allation Arrangement ......................................................................................2-3

2-11 Purge the Gas Supply Line Before GF100 Series Installation....................................................... 2-4

2-12 Position and Mount the GF100 Series .......................................................................................... 2-5

2-13 Perform a Leak Test ......................................................................................................................2-7

2-14 Zeroing Setup Process..................................................................................................................2-7

2-15 Zeroing the GF100 Series............................................................................................................. 2-7

2-15-1 Zeroing the GF100 Series Pressure T ransducer from the LCD Display Panel ............................. 2-8

2-15-2 Zeroing GF100 Series Flow from LCD Display Panel ................................................................... 2-9

2-16 Performance Checks .................................................................................................................... 2-9

2-17 Introduction to the MultiFloTM Configurator ...................................................................................2-10

2-18 Using the MultiFlo Configurator.................................................................................................... 2-10

2-19 Electrical Connections.................................................................................................................. 2-12

2-19-1 DeviceNet Connections................................................................................................................2-12

2-19-2 Analog/RS485 Connections ......................................................................................................... 2-13

2-19-3 EtherCat Connections.................................................................................................................. 2-14

2-20 GF135 Inlet V alve Installation....................................................................................................... 2-16

2-21 GF135 Commissioning................................................................................................................. 2-17

GF100 Series

Contents

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Flow Measurement ................................................................................. 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................4-1

4-2 Maintenance.................................................................................................................................. 4-1

4-3 Troubleshooting............................................................................................................................. 4-3

4-4 Troubleshooting Checklist ............................................................................................................. 4-3

4-5 GF100 Series Troubleshooting Guide...........................................................................................4-4

Section 5 Product Description Code

5-1 Overview .......................................................................................................................................5-1

Appendix A: GF100 Series Gas T able

A-1 Overview .......................................................................................................................................A-1

Appendix B: GF100 Series Patents

B-1 Overview .......................................................................................................................................B-1

Appendix C: Essential Instructions

C-1 Overview .......................................................................................................................................C-1

Warranty , Local Sales/Service Contact Information....................................................................... Back Cover

Contents

GF100 Series

Figure Page Number Number

1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital.................................... 1-1

1-2 LCD Display ..................................................................................................................................1-7

1-3 Dimensions - GF100/GF120/GF125 Series ................................................................................. 1-15

1-4 Dimensions - GF135, DeviceNet.................................................................................................. 1-16

1-5 Dimensions - GF135, RS485 ....................................................................................................... 1-17

1-6 Dimensions - GF101/GF121/GF126 ............................................................................................ 1-18

1-8 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications1-19

2-1 T ypical Gas Supply Arrangement with Non-PTI MFC.................................................................... 2-4

2-2 T ypical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4

2-3 GF100 Series Mounting Attitude Positions.................................................................................... 2-5

2-4 GF100 Series Mounted to K1 Series Substrate Blocks................................................................. 2-6

2-5 Mounting Screws Torque Pattern .................................................................................................. 2-6

2-6 Display with PSI Reading .............................................................................................................. 2-8

2-7 Display Reading Zero PSI .............................................................................................................2-8

2-8 Display Set to %FS ...................................................................................................................... 2-10

2-9 % Flow Display Set to Zero ..........................................................................................................2-10

2-10 MultiFlo Cable Adapter................................................................................................................. 2-11

2-1 1 USB-RS485 Converter (214F027AAA) ........................................................................................ 2-11

2-12 Diagnostic Port Locations ............................................................................................................ 2-11

2-13 GF100 Series DeviceNet Connection ..........................................................................................2-12

2-14 GF100 Series with 9-Pin Analog Connector................................................................................. 2-15

2-15 Analog 9-Pin Connector (M)......................................................................................................... 2-15

2-16 GF100 with EtherCat Communications, M8 Power Connector Location...................................... 2-14

2-17 M8 Power Connector Drawing .....................................................................................................2-14

2-18 GF100 Series Electrical Interface Options ...................................................................................2-15

2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines...........................................2-16

3-1 GF100 Series Operating Principles............................................................................................... 3-2

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Table Page Number Number

1-1 Industry S tandard References.......................................................................................................1-3

1-2 Terms and Acronyms .................................................................................................................... 1-4

1-3 S pecifications for S t andard GF100/GF120/GF125 Series............................................................. 1-9

1-4 Specifications for Safe Delivery System (SDS) GF120 Series..................................................... 1-10

1-3 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications ....................... 1-11

1-6 Specifications for GF135 Series................................................................................................... 1-12

1-7 S pecifications for GF101/GF121/GF126 Series........................................................................... 1-13

1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications ....................... 1-14

2-1 K1 Series Fasteners......................................................................................................................2-7

2-2 K1 Substrate Torque Data............................................................................................................. 2-7

2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ...................................................2-10

4-1 Environmental Factors .................................................................................................................. 4-3

4-2 GF100 Series T roubleshooting Guide........................................................................................... 4-4

5-1 GF100, GF120 & GF125 Series Product Description Code.......................................................... 5-1

5-2 GF100, GF120 & GF125 Series with EtherCAT Communications Product Description Code ...... 5-3

5-3 Model GF135 Product Description Code....................................................................................... 5-4

5-4 GF101, GF121 & GF126 Series Product Description Code.......................................................... 5-5

5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code ...... 5-6

A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50 ......................................................A-1

A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50 ..................................................A-2

A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50 ................................................A-2

B-1 GF100 Series Patents...................................................................................................................B-1

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

1-1 Introduction

Section 1 Introduction

GF100 Series

Designed for semiconductor, MOCVD , and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF100 Series mass flow controllers and meters deliver outstanding performance, reliability, and flexibility. Process throughput and yield are maximized while process costs are reduced by the GF100 Series featuring:

• Ultra fast settling time for quick start up and very rapid process steps

• MultiFlo™ gas and range configurability enabling reconfiguration without removing device from the gas line

• An independent diagnostic/service port to troubleshoot or change flow conditions without removing the mass flow controller from service

• Long-term stability due to extremely low wetted surface area, and corrosion resistant Hastelloy® sensor and valve seat

Optional model variations including—pressure transient insensitivity (PTI) and Safe Delivery System (SDS)

1-2 How to Use This Manual

Figure 1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital

This manual is intended to provide the user with all the information necessary to install, operate, troubleshoot and maintain these thermal mass flow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A GF100 Series Gas Table

Appendix B GF100 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting to operate or repair these devices.

1-1

Section 1 Introduction

GF100 Series

1-3 Product Support References

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF100 Series. Those documents include:

1-4 Notice and Caution Statement s

1-5 Product Warranty

- Brooks MultiFlo

X-SW-MultiFlo-Config-QS-eng. part Number 541B167AAG

Configurator Quick Start Manual:

- Brooks GF100 Series data sheets:

DS-TMF-GF100-Series-MFC-eng DS-TMF-GF135-Series-MFC-eng DS-TMF-GF121-Series-MFC-eng DS-DPT-EtherCAT-GF100-Series-eng

Warning, caution and notice statements are located throughout this manual in the ANSI format. A WARNING statement indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. A CAUTION statement indicates a potentially hazardous situation which, if not avoided, MAY result in minor or moderate injury. It may also be used to alert against unsafe practices. A NOTICE statement describes specific information that requires special attention.

1-6 How to Order a GF100 Series Device

1-7 Industry Standard References

1-8 GF100 Series Gas T able

1-9 Glossary of T erms and Acronyms

1-2

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers, and applicable warranty periods according to product group.

Refer to Section 5.

Refer to Table 1-1.

Refer to Appendix A.

Refer to Table 1-2

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement SEMI E12 Standard temperature and pressure SEMI E16 Guideline for determining and describing MFC leak rates SEMI E17 Guideline for MFC transient characteristics tests SEMI E18 Guideline for temperature specifications of the MFC SEMI E27 Standard for MFC and MFM linearity SEMI E28 Guideline for pressure specifications for the MFC SEMI E52 Practice for referencing gases used in digital MFCs SEMI E54 Sensor actuator network connections for DeviceNet SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs SEMI E66 Test method for determining particle contribution by MFCs SEMI E67 Test method for determining reliabilty of MFCs SEMI E68 Test method for determining warm-up time of MFCs SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs SEMI E80 Test method for determining attitude sensitivity of MFCs SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates SEMI F19 Specification for the finish of the wetted surface of electro polished

216L stainless steel components SEMI F20 Specifications for 316L stainless steel bar, extruded shapes, plate, and

investment castings for components used in ultra-high purity semi

manufacturing applications SEMI F36 Guide for dimensions and connections of gas distribution components SEMI F37 Method for determination of surface roughness parameters for gas

distribution system components SEMI F44 Guideline for standardization of machined stainless steel weld fittings SEMI F45 Guideline for standardization of machined stainless steel reducing fittings SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity SEMI S2 Environmental, Health and Safety Guidelines SEMI S9 Dielectric testing SEMI S10 Risk assessment SEMI S12 Decontamination of fielded products ETG.1000.2 Physical Layer service definition and protocol specification ETG.1000.3 Data Link Layer service definition ETG.1000.4 Data Link Layer protocol specification ETG.1000.5 Application Layer service definition ETG.1000.6 Application layer protocol specification ETG.1020 EtherCAT Protocol Enhancements ETG.2000 EtherCAT Slave Information ETG.5001.1 Modular Device Profile - Part 1: General MDP Device Model ETG.5003.1 Semiconductor Device profile - Part 1: Common Device Profile (CDP) ETG.5003.2020 Specific Device Profile: Enhanced Mass Flow Controller ETG.5003.2021 Specific Device Profile: Mass Flow Controller ETG.5003.2022 Specific Device Profile: Mass Flow Meter ETG.5003.2023 Specific Device Profile: Enhanced Mass Flow Meter

GF100 Series

1-3

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Table 1-2 Terms and Acronyms

Term or Acronym Definition

CSR Customer Special Requirement

CVD Chemical Vapor Deposition

DeviceNet A 5-wire local network I/O communication device

that employs a command/response communication protocol

DSP Digital Signal Processor

EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a bare wafer, enabling a high-purity starting point for building the semiconductor device.

HBD Horizontal Base Down

GF100 Series Integrated Flow Controller

F.S. Full Scale

LED Light Emitting Diode

MFC Mass Flow Controller

MultiFlo Configurator I/O communication software package that

configures gas and flow ranges

MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within a defined standard configuration

PID Proportional Integral Derivative Controller

PSIA Pounds per Square Inch Absolute

PSID Pounds per Square Inch Differential

PSIG Pounds per Square Inch Gauge

PTI Pressure Transient Insensitive. Reduces the

effect of pressure fluctuations in gas flow. Applicable to GF125 only.

ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.

HC Standard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases)

S.P. Setpoint

Step Technology Enables fast set point control through a high

speed DSP and low volume drive circuit

VIU Vertical mounting attitude with inlet side facing up

1-4

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

1-10 Description

Section 1 Introduction

GF100 Series

Ultra Fast Response

The Brooks GF Series patented flow sensor combined with a high speed ARM processor and fast acting diaphragm-free valve assembly enables:

• Faster response and settling time for improved wafer throughput

• Ultra-fast 1-2 second etch step processing

• Reduced diverted gas consumption and associated abatement costs

• Time sensitive gas delivery steps in Atomic Layer Deposition

• User programmable start-up function for processes requiring a slow ramped gas turn-on or time critical transitions between flow rates

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in process gas accuracy for linear and non-linear gases. This is achieved through advanced gas modeling and optimized through actual gas testing. Brooks MultiFlo another gas and/or flow range without sacrificing accuracy or rangability. Selecting a new gas automatically creates a new calibration curve, establishes optimized PID settings for dynamic control, automatically compensates for gas density effects, and ensures smooth overshoot-free transitions between flow rates with excellent steady-state stability. Brooks MultiFlo technology offers unparalleled flexibility. An extensive gas database is provided and a single device can be quickly programmed for thousands of different gas and flow range combinations. Process benefits achieved:

• Mass flow controller full scale full range can be rescaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications

• Optimum process and inventory flexibility resulting in dramatically reduced inventory costs

• Fewer configurations/bin sizes required to support many different processes

• Less down-time with rapid process recovery

MultiFloTM Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))

MultiFloTM Configurator Accessory Kit s: 778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 Converter with DB-9 female

A332295001 Power Supply MFC

A332297002 Cable, Power, 9-Pin

A332297001 Cable, Power, DeviceNet

* MultiFlo Configurator Software is available on the Brooks Instrument website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

allows the device to be quickly and easily configured for

*Software, MultiFlo Configurator

Adapter Cables *Software, MultiFlo Configurator

1-5

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Pressure Transient Insensitivity (PTI)— Included with all GF125 & GF135 models

Cost and space constraints are driving gas panel designers to remove point-of-use pressure regulators and pressure monitoring components from the process design and rely solely on the mass flow controller to accurately control the process under dynamic pressure conditions. The Brooks GF125 & GF135 (PTI) devices utilize a patented control algorithm that inverts the pressure signal, compares it to the pre-fluctuation signal and drives realtime valve position compensation to maintain stable flow. Enhanced pressure transient is achieved through faster sensing, quicker processing, and a reduction in internal dead-volume between the sensors and valve orifice.

GF101/121/126 based on the same technology and design as the low flow GF's (same sensor, same electronics, low power support)

• Smaller footprint than competitive MFC's

• Handles flow rates up to 300 slpm

• Metal seal for durability and high leak integrity

• Proprietary sensor technology

• Precise flow control with fast sub-1 second settling time

• 1% of reading accuracy

• Corrosion-resistant Hastelloy C-22 sensor tube

Optional Safe Delivery System (SDS)— GF120 model only

The Safe Delivery System (SDS) enhanced GF120 model is a state-of-theart low pressure drop devices for the delivery of sub atmospheric safe delivery system gases used in Implant and Etch processes. The Brooks GF120 SDS models are available in full scale flow ranges 4 sccm -1 slpm.

Advanced Thermal Flow Measurement Sensor

Brooks proprietary highly corrosion resistant Hastelloy C-22 sensor with an enhanced sensor manufacturing and burn in process incorporates a unique orthogonal sensor mounting orientation to eliminate sensor drift caused by valve heating effects and eliminates thermal siphoning effects. This unique sensor configuration includes an optimized temperature profile for gases prone to thermal decomposition. This design results in:

• Enhanced signal to noise performance for improved accuracy at low set points

• Superior reproducibility at elevated temperature through new isothermal packaging and onboard conditioning electronics with ambient temperature sensing and compensation

• Improved long-term stability

1-6

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Section 1 Introduction

GF100 Series

High Purity Flow Path

The Brooks GF Series has an all metal, corrosion resistant Semi F20 compliant wetted flow path with highly corrosion resistant Hastelloy C-22 valve seat and jet orifice. The GF120, GF125 & GF135 devices are constructed with a 4μ

constructed with a 10μ inch Ra.

• Overall reduced surface area and un-swept volumes for faster dry-down during purge steps

• Long-term sensor and device stability for maximum yield and throughput

Extensive Mechanical Configurations

GF Series supports all metal seal/UHP industry gas connection interface standards for full OEM and process coverage.

• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2" bodies

• 124mm 4 VCR on 1-1/2" body

inch Ra max surface finish while the GF100 is

Figure 1-2 LCD Display

Enhanced Diagnostics and User Interface

The mass flow controller is one of the most complex and critical components in gas delivery systems. When dealing with ultra-high-purity gas distribution or highly toxic or corrosive gases, removing the mass flow controller to assess functionality should be the last resort. Brooks GF Series devices provide for in-line device evaluation and instantaneous troubleshooting through:

• Embedded self test routines and independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local indication of Flow (%), Temperature (oC), Pressure (PSIA/kPa) and Network Address

• Zero button to easily re-zero the device during scheduled maintenance

• Rotatable display with a push button to enable improved readability based on how the MFC is mounted. Simply hold button down for at least 3 seconds to rotate display. This featue is standard for GF135 and GF101/ GF121/GF126 and available for GF100/GF120/GF125.

This combination of features results in limiting service interruption and reduced downtime.

1-7

Section 1 Introduction

GF100 Series

Communication Interfaces

The GF100 Series supports analog 0-5 Vdc, RS485, DeviceNet™ and EtherCAT via the DeviceNet or RS485 or Analog only connector options. DeviceNet and RS485 are multi-drop connections that allow a maximum of 64 devices for DeviceNet and 32 devices for RS485 to be connected on the same network. Brooks Instrument’s DeviceNet profile has been certified by the ODVA™ (Open DeviceNet Vendor’s Association). EtherCAT is an Ethernet based communications system know for its high cycle time and cost efficient cabling and master application solutions. The EtherCAT GF100 Series devices conform to the ETG.5003 Semiconductor Device Profile specification. A range of low profile adapter cables facilitate replacing previously installed devices eliminating the need to carry multiple devices of the same gas/range but different electrical connectors.

1-11 Specifications for GF100 Series Devices

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

communication protocols. Analog connections can be accessed

1-8

See Table 1-3 for specifications for standard GF100 Series.

See Table 1-4 for specifications for the Safe Delivery System (SDS) GF120 Series.

See Table 1-5 for specifications for standard GF100 Series-EtherCAT

See Table 1-6 for specifications for the GF135 Series.

See Table 1-7 for specifications for the GF121 Series.

See Table 1-8 for specifications for the GF121 Series-EtherCAT

See Figure 1-3 for dimensions for the GF100 Series.

See Figures 1-4 & 1-5 for dimensions for the GF135 Series.

See Figure 1-6 for dimensions for the GF121 Series.

See Figure 1-7 for dimensions for the GF100/GF121 Series-EtherCAT

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-3 Specifications for Standard GF100/GF120/GF125 Series

GF100GF100

GF100

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

LinearityLinearity

Linearity

LinearityLinearity

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time) 300ms (3-860 sccm N2 Eq.)

Response Time (Settling Time)Response Time (Settling Time) Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec 700ms 400ms (861-7200 sccm N2 Eq.)

Normally Closed ValveNormally Closed Valve

Normally Open ValveNormally Open Valve

Normally Open Valve <1.5 sec

Normally Open ValveNormally Open Valve

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 11 bins

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 1% of F.S.

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve) Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S.

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Span: 0.05% S.P. per

Temperature CoefficientTemperature Coefficient

Eq.) Eq.)

Eq.) 3 sccm to 55 slm

Eq.) Eq.)

GF100GF100

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

+ 0.5% F.S. (included in accuracy)

GF120GF120

GF120

GF120GF120

+ 0.15% S.P.

< 5% SP up to 5 psi/sec upstream press. spike

standard

+ 0.5% F.S. per year

C, Zero: 0.005% F.S. per oC

GF125GF125

GF125

GF125GF125

500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)

GF100 Series

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range

Operating Temperature RangeOperating Temperature Range

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid

Differential Pressure Range*Differential Pressure Range*

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external)

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 4μ inch Ra (0.1 μm Ra)

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

Units Displayed / ResolutionUnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Electrical Connection Electrical Connection

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication Digital Communication

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Diagnostic /Service Port Diagnostic /Service Port

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc

Power Supply/Consumption Power Supply/Consumption

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

500 psia max 100 psia max

1x10

GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Control Valve Output, Network Interruption

10 feet

RS485/Analog: 6 Watts max @

C), Pressure (psia, kPa) /

+15Vdc. (+10%) or +24 Vdc (±10%)

0.1 (unit)

10-50

-10

atm. cc/sec He

Normally Open

Meter (no valve)

via 5-Pin “M12” connector

Compliance Compliance

Compliance

Compliance Compliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications

REACH Directive EC 1907/2006

1-9

Section 1 Introduction

GF100 Series

Table 1-4 Specifications for Safe Delivery System (SDS) GF120 Series

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N Gases SupportedGases Supported

Gases Supported AsH

Gases SupportedGases Supported

MultiFlo ProgrammableMultiFlo Programmable

MultiFlo Programmable Not Configurable

MultiFlo ProgrammableMultiFlo Programmable Flow AccuracyFlow Accuracy

Flow Accuracy +/-1% S.P.

Flow AccuracyFlow Accuracy Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <+/- 0.15% S.P.

Repeatability & ReproducibilityRepeatability & Reproducibility Zero StabilityZero Stability

Zero Stability <=0.6% F.S. per year

Zero StabilityZero Stability

Settling Time (to within Settling Time (to within

Settling Time (to within

Settling Time (to within Settling Time (to within

Warm Up TimeWarm Up Time

Warm Up Time minimum of 30 minutes

Warm Up TimeWarm Up Time Leak IntegrityLeak Integrity

Leak Integrity 1X10

Leak IntegrityLeak Integrity

Valve Shut Down (Leaky by)Valve Shut Down (Leaky by)

Valve Shut Down (Leaky by) <1% F.S.

Valve Shut Down (Leaky by)Valve Shut Down (Leaky by)

Operating ConditionsOperating Conditions

Operating Conditions

Operating ConditionsOperating Conditions

Minimum Operating Inlet Pressure*Minimum Operating Inlet Pressure*

Minimum Operating Inlet Pressure* 4 to 20 sccm

Minimum Operating Inlet Pressure*Minimum Operating Inlet Pressure*

Maximum PressureMaximum Pressure

Maximum Pressure 500 psia max

Maximum PressureMaximum Pressure Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity

Pressure InsensitivityPressure Insensitivity DifferentialPressure**DifferentialPressure**

DifferentialPressure** 10 Torr-30 psid typical (1.33-207 kPa typical)

DifferentialPressure**DifferentialPressure** Valve ConfigurationValve Configuration

Valve Configuration Normally Closed

Valve ConfigurationValve Configuration Ambient Temperature RangeAmbient Temperature Range

Ambient Temperature Range 10

Ambient Temperature RangeAmbient Temperature Range Zero Temperature CoefficientZero Temperature Coefficient

Zero Temperature Coefficient Span:

Zero Temperature CoefficientZero Temperature Coefficient

Eq.) Eq.)

Eq.) 4 - 25 sccm >25 to 1 slpm

Eq.) Eq.)

2% F.S.)2% F.S.)

2% F.S.) < 3 sec

2% F.S.)2% F.S.)

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

, PH3, BF3, SiF4, Ar, Xe, N2O, N2, GeF4, AsF5, PF3,

H2Se, HMDSO, HMDSN, H2O***

>35% F.S. +/-0.35% F.S. <35% F.S.

-11

atm. cc/sec He

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

< 10 Torr >20 to 50 sccm >50 sccm to 1 slpm < 50 Torr

Not Available

0.05% SP per

C, Zero:

< 20 Torr

C-50OC

0.005% F.S. per OC

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

*Performance at minimum inlet pressure will be gas and flow range dependent. Consult Technical Support for details. **Typical pressure drop. Actual pressure drop will be gas and flow dependent. Consult Technical Support for details. ***Consult factory for other gases.

1-10

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 3 sccm to 55 slm 4 sccm to 25 sccm >25 sccm to 1 slpm

Full Scale Flow RangeFull Scale Flow Range

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

Flow Settling Time (NC Valve)Flow Settling Time (NC Valve)

Flow Settling Time (NC Valve)

Flow Settling Time (NC Valve)Flow Settling Time (NC Valve)

Flow Settling Time (NO Valve)Flow Settling Time (NO Valve)

Flow Settling Time (NO Valve) <1.5 sec ----------

Flow Settling Time (NO Valve)Flow Settling Time (NO Valve)

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable < 1% S.P. up to 5 psi/sec ----------

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 2-100% (Normally Closed Valve) 2-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 11 bins ----------

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) 0.15% of F.S. <1% of F.S.

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Valve Shut Down (N.O. Valve) 2% of F.S. ----------

Valve Shut Down (N.O. Valve)Valve Shut Down (N.O. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

Temperature CoefficientTemperature Coefficient

GF100GF100

GF100

GF100GF100

+1% S.P. > 20-100%; +0.2% F.S. 2-20% ±1% S.P. 35-100%; ±0.35% F.S. 2-35%

< 1 sec 700ms

-100% (Normally Open Valve)

GF120GF120

GF120

GF120GF120

<700ms (30001-55000 sccm N2 Eq.)

Standard ----------

+ 0.15% F.S. per year < + 0.6% F.S. per year

C Zero 0.005% of F.S. per °C

GF125GF125

GF125

GF125GF125

+ 0.15% S.P.

300ms (3-860 sccm N2 Eq.)

400ms (861-7200 sccm N2 Eq.)

500ms (7201-30000 sccm N2 Eq.)

upstream press. spike

GF120XSLGF120XSL

GF120XSL

GF120XSLGF120XSL

GF100 Series

GF120XSDGF120XSD

GF120XSD

GF120XSDGF120XSD

< 3 sec

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure Range*Differential Pressure Range*

Differential Pressure Range* 3-860 sccm = 7-45 psid 10 Torr - 30 psid typical

Differential Pressure Range*Differential Pressure Range*

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra 5μ inch Ra

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

nits Displayed / Resolutionnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Electrical ConnectionElectrical Connection

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Digital CommunicationDigital Communication

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Diagnostic /Service PortDiagnostic /Service Port

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption

Power Supply/ConsumptionPower Supply/Consumption

500 psia max 100 psia max up to 500 psia max

320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

861- 7200 sccm = 10-45 psid For more details

7201-55000 sccm = 15-45 psid consult factory

Normally Open

Meter (no valve)

Rotatable /

-10

atm. cc/sec He

10 feet

C), Pressure (psia, kPa) /

0.1 (unit)

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on

outlet (example SiCl4). Contact Brooks Technical Support for more information.

REACH Directive EC (1907/2006)

1-11

Section 1 Introduction

GF100 Series

Table 1-6 Specifications for GF135 Series

erformanceerformance

erformance

erformanceerformance

Full Scale Flow Range:Full Scale Flow Range:

Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)

Full Scale Flow Range:Full Scale Flow Range:

Gasses Supported:Gasses Supported:

Gasses Supported: N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),

Gasses Supported:Gasses Supported:

Flow Flow

AccurAccur

Flow

Flow Flow

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

Repeatability & ReprRepeatability & Repr

Linearity:Linearity:

Linearity: Included in accuracy

Linearity:Linearity:

Settling Settling

Settling

Settling Settling

PrPr

ConCon

Con

ConCon

alve Shut Down:alve Shut Down:

alve Shut Down: < 0.5% of F.S. N2

alve Shut Down:alve Shut Down:

erer

emperemper

emper

emperemper

Rate-of-Decay PRate-of-Decay P

Rate-of-Decay P

Rate-of-Decay PRate-of-Decay P

Flow Rate:Flow Rate:

Flow Rate: Maximum flow rate for which an ROD measurement can be obtained is 800 sccm

Flow Rate:Flow Rate:

emperemper

emper

emperemper

PrPr

Minimum Detectable ChangeMinimum Detectable Change

Minimum Detectable Change Zero Drift: +/- 0.02% F.S.

Minimum Detectable ChangeMinimum Detectable Change frfr

frfr

RatingsRatings

Ratings

RatingsRatings

OperOper

Oper

OperOper

DifferDiffer

Differ

DifferDiffer

Maximum OperMaximum Oper

Maximum Oper

Maximum OperMaximum Oper

Pneumatic Pneumatic

Pneumatic

Pneumatic Pneumatic

Leak InLeak In

Leak In

Leak InLeak In

MecMec

hanicalhanical

Mec

hanical

MecMec

hanicalhanical

alve alve

alve

alve alve

Surface Finish:Surface Finish:

Surface Finish: 4μ inch Ra (0.1 μm Ra)

Surface Finish:Surface Finish:

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Status Lights:Status Lights:

Alarms:Alarms:

Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,

Alarms:Alarms:

Display Display

Display

Display Display

Viewing Distance:Viewing Distance:

Viewing Distance: Fixed / 10 feet

Viewing Distance:Viewing Distance:

Units Displayed / Resolution:Units Displayed / Resolution:

Units Displayed / Resolution: Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)

Units Displayed / Resolution:Units Displayed / Resolution:

ElectricalElectrical

Electrical

ElectricalElectrical

Electrical Connection:Electrical Connection:

Electrical Connection: Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector

Electrical Connection:Electrical Connection:

Digital Communication:Digital Communication:

Digital Communication: RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication:Digital Communication:

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

Diagnostic / Service PDiagnostic / Service P

ower Supply/Consumption:ower Supply/Consumption:

ower Supply/Consumption: DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,

ower Supply/Consumption:ower Supply/Consumption:

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC EnEn

EnEn

1-12

acy:acy:

Accur

acy: +/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.)

AccurAccur

acy:acy:

oducibility:oducibility:

oducibility: < +/- 0.15% S.P.

oducibility:oducibility:

Time (to within +/-2% FS):Time (to within +/-2% FS):

Time (to within +/-2% FS): <300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)

Time (to within +/-2% FS):Time (to within +/-2% FS):

essuressur

e Insensitivity:e Insensitivity:

essur

e Insensitivity: < 1% S.P. up to 5 psi/sec upstream press. spike

essuressur

e Insensitivity:e Insensitivity:

trtr

ol Range:ol Range:

ol Range: 1-100%

trtr

ol Range:ol Range:

o Stability:o Stability:

o Stability: < +/- 0.5% F.S. per year

o Stability:o Stability:

aturatur

e Coefficiene Coefficien

atur

e Coefficien

aturatur

e Coefficiene Coefficien

aturatur

e Sensitivity:e Sensitivity:

atur

e Sensitivity: +/- 0.04% S.P./Deg C

aturatur

e Sensitivity:e Sensitivity:

essuressur

e Sensitivity:e Sensitivity:

essur

e Sensitivity: +/- 0.04% F.S./psi

essuressur

e Sensitivity:e Sensitivity:

om Commissioning Baseline:om Commissioning Baseline:

om Commissioning Baseline: Valve Leak: +0.1% F.S.

om Commissioning Baseline:om Commissioning Baseline:

ating ating

emperemper

ating

emper

ating ating

emperemper

enen

tial Prtial Pr

tial Pr

enen

tial Prtial Pr

alve Operalve Oper

alve Oper

alve Operalve Oper

tegrity (external):tegrity (external):

tegrity (external): 1x10-10 atm. cc/sec He

tegrity (external):tegrity (external):

ype:ype:

ype: Normally Closed

ype:ype:

etted Materials:etted Materials:

etted Materials: SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45

etted Materials:etted Materials:

ype:ype:

ype: Top Mount Electronically Rotatable Integrated LCD

ype:ype:

virvir

onmenonmen

vir

virvir

tal Compliancetal Compliance

onmen

tal Compliance RoHS Directive 2011/65/2006

onmenonmen

tal Compliancetal Compliance

t:t:

t: Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C

t:t:

erformance:erformance:

erformance: (ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned)

erformance:erformance:

aturatur

e Range:e Range:

atur

e Range: 10-50°C

aturatur

e Range:e Range:

essuressur

e Range**:e Range**:

essur

e Range**: 3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid

essuressur

e Range**:e Range**:

ating Prating Pr

essuressur

ating Pr

ating Prating Pr

e:e:

essur

e: 100 psia max

essuressur

e:e:

ating Prating Pr

essuressur

ating Pr

essur

ating Prating Pr

essuressur

ort:ort:

ort: RS485 via 2.5 mm jack

ort:ort:

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He

Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow)

**Typical pressure drop. Actual pressure drop will be gas and flow dependent. Argon gas applications require higher differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet (example SiCl4). Contact Brooks Technical Support for more information.

e:e:

e: 43.5 psia - 72.5 psia

e:e:

Sensor Drift, Flow Error, Valve Leak

Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%

Reach Directive EC 1907/2006

Part Number: 541B137AAG

April, 2017

Installation and Operation Manual

Section 1 Introduction

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Table 1-7 Specifications for GF101/GF121/GF126 Series

GF101GF101

GF101

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

Full Scale Flow Range (NFull Scale Flow Range (N

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

LinearityLinearity

Linearity

LinearityLinearity

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time)

Response Time (Settling Time)Response Time (Settling Time) Normally Closed ValveNormally Closed Valve

Normally Closed Valve < 1 sec

Normally Closed ValveNormally Closed Valve

Pressure TransducerPressure Transducer

Pressure Transducer Ability to measure inlet pressure

Pressure TransducerPressure Transducer

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo Standard (All typical high flow rate process gases & mixtures supported)

MultiFloMultiFlo

# of Bins# of Bins

# of Bins 4 Bins

# of Bins# of Bins

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) < 2% of F.S. @ 30 N2 psig/atm out

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient

Temperature CoefficientTemperature Coefficient

Eq.) Eq.)

Eq.) 55 to 300 slm

Eq.) Eq.)

GF101GF101

+1% S.P. > 35-100%, +0.35% F.S. 2-35%

+ 0.5% F.S. (included in accuracy)

Span: 0.05% S.P. per

GF121GF121

GF121

GF121GF121

+ 0.15% S.P.

+ 0.5% F.S. per year

C, Zero: 0.005% F.S. per oC

GF100 Series

GF126GF126

GF126

GF126GF126

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Differential Pressure RangeDifferential Pressure Range

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig / Meter: 150 psig

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10

Leak Integrity (external)Leak Integrity (external)

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra (0.1 μm Ra)

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights MFC Health, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms Control Valve Output, Network Interruption

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance

Viewing Angle / Viewing Distance Fixed /

Viewing Angle / Viewing DistanceViewing Angle / Viewing Distance Units Displayed / ResolutionUnits Displayed / Resolution

Units Displayed / Resolution Flow (%), Temp. (

Units Displayed / ResolutionUnits Displayed / Resolution

ElectricalElectrical

Electrical

ElectricalElectrical

Electrical Connection Electrical Connection

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Electrical Connection Electrical Connection

Digital Communication Digital Communication

Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)

Digital Communication Digital Communication

Diagnostic /Service Port Diagnostic /Service Port

Diagnostic /Service Port RS485 via 2.5mm jack

Diagnostic /Service Port Diagnostic /Service Port

Power Supply/Consumption Power Supply/Consumption

Power Supply/Consumption DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)

Power Supply/Consumption Power Supply/Consumption

Meter (no valve)

GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

10 feet

RS485/Analog: 6 Watts max @

C), Pressure (psia, kPa) /

+15 Vdc. (+10%) (Under typical operating conditions)

0.1 (unit)

-10

atm. cc/sec He

via 5-Pin “M12” connector

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

REACH Directive EC 1907/2006

1-13

Section 1 Introduction

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

GF100 Series

Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications

PerformancePerformance

Performance

PerformancePerformance

Full Scale Flow RangeFull Scale Flow Range

Full Scale Flow Range 55 slm to 300 slm

Full Scale Flow RangeFull Scale Flow Range

Flow AccuracyFlow Accuracy

Flow Accuracy

Flow AccuracyFlow Accuracy

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

Repeatability & ReproducibilityRepeatability & Reproducibility

Response Time/Settling TimeResponse Time/Settling Time

Response Time/Settling Time < 1 sec

Response Time/Settling TimeResponse Time/Settling Time (NC Valve)(NC Valve)

(NC Valve)

(NC Valve)(NC Valve)

Pressure InsensitivityPressure Insensitivity

Pressure Insensitivity Not Applicable Ability to measure inlet presssure

Pressure InsensitivityPressure Insensitivity

Control RangeControl Range

Control Range 5-100% (Normally Closed Valve)

Control RangeControl Range

MultiFloMultiFlo

MultiFlo

MultiFloMultiFlo

#of Bins#of Bins

#of Bins 4 bins

#of Bins#of Bins

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Valve Shut Down (N.C. Valve) <2% of F.S. @30 N2 psig/atm out

Valve Shut Down (N.C. Valve)Valve Shut Down (N.C. Valve)

Zero StabilityZero Stability

Zero Stability <

Zero StabilityZero Stability

Temperature CoefficientTemperature Coefficient

Temperature Coefficient Zero: 0.005% F.S. per

Temperature CoefficientTemperature Coefficient

RatingsRatings

Ratings

RatingsRatings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 10-50

Operating Temperature RangeOperating Temperature Range

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 30-90 psid

Differential Pressure RangeDifferential Pressure Range

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure Controller: 75 psig

Maximum Operating PressureMaximum Operating Pressure

Leak Integrity (external)Leak Integrity (external)

Leak Integrity (external) 1x10^

Leak Integrity (external)Leak Integrity (external)

GF101GF101

GF101

GF101GF101

GF121GF121

GF121

GF121GF121

+1% S.P. > 35-100%; +0.35% F.S. 2-35%

+ 0.15% S.P.

Standard

+ 0.15% F.S. per year

Meter: 150 psig

-10

atm. cc/sec He

GF126GF126

GF126

GF126GF126

April, 2017

MechanicalMechanical

Mechanical

MechanicalMechanical

Valve TypeValve Type

Valve Type Normally Closed

Valve TypeValve Type

Wetted MaterialsWetted Materials

Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45

Wetted MaterialsWetted Materials

Surface FinishSurface Finish

Surface Finish 10μ inch Ra 5μ inch Ra

Surface FinishSurface Finish

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Diagnostics & DisplayDiagnostics & Display

Status LightsStatus Lights

Status Lights Run, Error, Power, Network Status

Status LightsStatus Lights

AlarmsAlarms

Alarms

Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag

AlarmsAlarms

Display TypeDisplay Type

Display Type Top Mount Integrated LCD

Display TypeDisplay Type

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

iewing Angle / Viewing Distance

iewing Angle / Viewing Distanceiewing Angle / Viewing Distance

nits Displayed / Resolutionnits Displayed / Resolution

nits Displayed / Resolution Flow (%), Temp. (

nits Displayed / Resolutionnits Displayed / Resolution

Electrical Electrical

Electrical

Electrical Electrical

Electrical ConnectionElectrical Connection

Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks

Electrical ConnectionElectrical Connection

Digital CommunicationDigital Communication

Digital Communication EtherCAT

Digital CommunicationDigital Communication

Diagnostic /Service PortDiagnostic /Service Port

Diagnostic /Service Port Micro-USB

Diagnostic /Service PortDiagnostic /Service Port

Power Supply/ConsumptionPower Supply/Consumption

Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)

Power Supply/ConsumptionPower Supply/Consumption

ComplianceCompliance

Compliance

ComplianceCompliance

EMCEMC

EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013

EMCEMC Environmental ComplianceEnvironmental Compliance

Environmental Compliance RoHS Directive (2011/65/EU)

Environmental ComplianceEnvironmental Compliance

REACH Directive EC (1907/2006)

Meter (no valve)

Rotatable /

10 feet

C), Pressure (psia, kPa) /

0.1 (unit)

1-14

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Downport Configurations

Section 1 Introduction

GF100 Series

Electrical Connector

G1/GX/TX Specic Dimensions

5.09in

129mm

VCR Configurations

Electrical Connector DX/BB Specic Dimensions

4.45in

113mm

3.67in

93mm

Electrical Connector

SX Specic Dimensions

3.29in

84mm

.98in

25mm

3.75in

95mm

Fitting Option Code

Seal Type

C-SEAL

W-SEAL

C-SEAL

W-SEAL

C-SEAL

W-SEAL

C-SEAL

Dim A

92mm [3.62in]

79.8mm[3.14in]

92mm [3.62in]

79.8mm[3.14in]

92mm [3.62in]

Dim B Dim C

105mm [4.13in]

93mm [3.66in] 30mm [1.18in] 39mm [1.53in]

105mm [4.13in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in]

105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

30mm [1.18in] 39mm [1.53in]

22mm [0.86in] 28mm [1.12in]

Dim D

Dim E

83mm [3.28in]

72mm [2.82in]

83mm [3.28in]

72mm [2.82in] 25mm [1.00in]

83mm [3.28in] 25mm [1.00in]

Dim F

25mm [1.00in]

Dim G

127mm [5.00in]

Figure 1-3 Dimensions - GF100/GF120/GF125 Series

1-15

Section 1 Introduction

GF100 Series

Model GF135, DeviceNet, C-Seal Connections

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

Model GF135, DeviceNet, VCR Connections

1-16

Figure 1-4 Dimensions - GF135, DeviceNet

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

Model GF135, RS485, C-Seal Connections

Section 1 Introduction

GF100 Series

Model GF135, RS485, VCR Connections

Figure 1-5 Dimensions - GF135 Series, RS485

1-17

Section 1 Introduction

GF100 Series

C-Seal Configurations

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

VCR Configurations

1-18

Figure 1-6 Dimensions - GF101/GF121/GF126

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

EtherCAT, Downport Configurations

Section 1 Introduction

GF100 Series

EtherCAT, VCR Configurations

Figure 1-7 Dimensions - GF100/GF120/GF125, GF101/GF121/GF126 Series with EtherCAT Communications

1-19

Section 1 Introduction

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

April, 2017

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

1-20

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng Part Number: 541B137AAG April, 2017

2-1 General

2-2 Receipt of Equipment

Section 2 Installation

GF100 Series

This section provides installation instructions for the Brooks GF100 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.

When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability . A report should be submitted to the nearest Brooks Instrument location listed on the Global Service Network page on our website: BrooksInstrument.com/GlobalSupportCenters This device has been assembled, calibrated, and double-vacuum bagged in a Class 100 clean room. In your semi-clean area, remove the outer bag only . Pass the device into your clean area. Remove the second clean room compatible bag only when the device is ready to be tested and/or installed in your clean system.

2-3 Recommended Storage Practice

2-4 Return Shipment

If intermediate or long-term storage of the device is required, it is recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

Prior to returning any instrument to the factory for any reason, visit our website for instructions on how to obtain a Return Materials Authorization Number (RMA #) and complete a Decont amination Statement to accompany it: BrooksInstrument.com/Service. All instrument s returned to Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure to provide this information will delay processing of the instrument. Instrument must have been purged in accordance with the following:

2-1

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