Brooks Instrument GF100, GF120, GF125 Specifications

GF100 Series

DS-TMF-GF100-Series-MFC-eng

May, 2019

Data Sheet

GF Series

Thermal Mass Flow

High Purity/Ultra-High Purity

Digital Thermal Mass Flow Devices

Overview

Designed for semiconductor, MOCVD, and other gas ow control applications that require
a high purity all-metal ow path, the Brooks® GF100 Series mass ow controllers and
meters deliver outstanding performance, reliability, and exibility. Highlights of the GF
Series industry-leading features include: ultra fast 300 millisecond settling time, Multi­Flo™ gas and range programmability, optional pressure transient insensitivity (PTI), local
display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube
and valve seat. The GF100 Series has been marathon tested to over three times the semi­conductor industry standard for reliability, ensuring repeatable low-drift performance over
time. An independent diagnostic/service port permits users to troubleshoot or change ow
conditions without removing the mass ow controller from service.

The agship GF125 is a second generation multi-variable, pressure transient insensitive
mass ow controller. This product builds upon Brooks’ leadership position in pressure
transient insensitive (PTI) mass ow controller technology, minimizing process gas ow
variation due to pressure and temperature uctuations. The GF125 enables customers to
simplify and reduce the size and cost of gas panels by eliminating the need for point of
use pressure regulators, pressure transducers, and associated hardware.

MultiFlo™ gas and range programmability, a patented technology developed and rened
by Brooks over the last 10 years, has changed the mass ow controller industry by oer­ing customers the ability to select new gas calibrations and full scale ranges without the
trouble and cost of removing the mass ow controller from the gas line. The GF Series
fourth generation MultiFlo technology continues to lead the market with the most accu­rate and broadest range performance through extensive renement and physical valida­tion on critical process gases.

Product Description

The GF100 Series is a highly congurable platform based on a novel modular
architecture. Already widely adopted by semiconductor, vacuum thin lm, solar, and
related customers, the GF100 Series feature set was carefully selected to enable drop-in
replacement and upgrade of most brands of metal-seal mass ow controllers, including
the former Celerity, UNIT, Tylan, and Mykrolis brands. With the wide range of options
and features available, the GF100 Series provides users with a path to simplication and
standardization, greatly reducing spares inventory and support costs.

1

Features and Benets

Convenient Service Port

• Easy diagnostics and troubleshooting

• Independent of tool communication

Pressure Sensor

• Stable ow control
regardless of upsets or
uctuations in delivery
pressure

User Interface

• Easy installation, start-up, and operation

Magnetically Coupled Valve

• Corrosion resistant all metal valve

• Diaphragm free design, unaected by
dierential pressure

• High purge rate capability

• Tested for over seven million cycles
with no failures

Second Generation T-Rise Sensor

• Excellent long-term stability
(<+0.5% F.S/yr.)

• Improved signal to noise ratio

• High purge rate capability

• Lower temperature operation for gases
prone to thermal decomposition

Temperature Sensor

• Accurate ow and temperature measurement over
full temperature range

• Real-time compensation for ambient temperature
ucuations enable precise gas chemistry control

Features Benets

MultiFlo Gas and Range Congurability Ability to recongure the mass ow controller for new gas calibrations and full scale ranges without
the time and costs of removing the device from the gas line.

User Accessible Service Port with Advanced Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user
Diagnostics with User-Friendly Interface specied limits for high yield and maximum uptime.

Corrosion Resistant Hastelloy T-Rise Sensor Provides unmatched long-term sensor stability ensuring maximum yield and throughput.

Pressure Transient Insensitivity (PTI), and Improves yield. Reduces overall gas panel costs.
Safe Delivery System (SDS) Options

2

Product Description

-20

0

20

40

60

80

100

120

01234 5

Set-Point(%FS) Brooks GF125 Competitor A

Competitor B

Time in Seconds

Set Point(%of Full Scale)

...

=

GF Series

MFC

MultiFlo technology allows one GF Series to be programmed

for thousands of different gases and flow ranges

TM

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

MFC

2.6L CO

2.1L HBr

2.6L N2

1.6L C12

1.8L H2Se

2.0L NH3

1.9L PH3

1.7L COS

1.5L SiH4

1.3L NF3

1.5L COF2

3.6L He 3.6L Ar

1.6L Xe 2.6L H2

By combining Brooks’ patented ow sensor technology with
a high speed ARM processor and fast acting diaphragm free
valve assembly, the GF100 Series delivers up to 3 times faster
response and settling time compared to other mass ow
controllers, enabling:

• Improved wafer throughput by reducing nonproductive ow

settling steps

• Critical Etch processes requiring ultrafast 1-2 second etch

steps

• Reduced diverted gas consumption and associated

abatement costs

• Time-sensitive gas delivery steps in Atomic Layer Deposition

• For processes requiring a slow ramped gas turn-on or time

critical transitions between ow rates. A user programmable
ramp function is provided

MultiFlo™ Gas and Range Congurability

A major advancement over traditional single point gas
conversion factors, Brooks MultiFlo technology delivers up to
a three-times improvement in process gas accuracy. This is
achieved through advanced gas modeling optimized through
actual gas testing providing compensation for non-linear
gases. MultiFlo also allows the device to be quickly and easily
congured for another gas and/or ow range without sacricing
accuracy or rangability. Selecting a new gas automatically
creates a new calibration curve, establishes optimized PID
settings for dynamic control, automatically compensates for gas
density eects, and ensures smooth, overshoot-free transitions
between ow rates with excellent steady-state stability.

Comparison of GF vs Competitors response time

to ascending & decending setpoints

Brooks MultiFlo technology oers unparalleled exibility; a
single device can be programmed for thousands of dierent gas
and ow range congurations.

Re-programming is simple and fast; a new gas and range can
be programmed in under 30 seconds. Brooks provides a full gas
database to ensure the true value of MultiFlo is realized:

• Dramatically reduces inventory costs

• Mass ow controller full scale ow range can re-scaled down

typically by a factor of 3:1 with no impact on accuracy,
turndown or leak by specications, for optimum process and
inventory exibility

• Up to 40% fewer congurations required to support typical

etch and CVD processes verses our closest competitor

• Widest process gas coverage through extensive gas library

• Mass ow controllers can be replaced in only a few minutes

• O-the shelf spares programmability enables rapid process

recovery

• Maximum exibility for research applications

#of

Platforms

The Brooks Advantage! Less platforms means more process
flexibility and lower cost of spares.

GF1xx Series
Range

13-1010 1-5
211-30 17.5 6-14
331-923015-27
493-280 55 28-38
5 281-860 100 39-71
6 861-2,600 175 72-103
72,601 -7,200 300 104-192
87,201-15,000 550 193-279

9 15,001-30,000 1,000 280-754
10 30,001-40,000 1,750 755-2,037
11 40,001-55,000 3,000 2,038-5,500
12 5,500 5,501-11,000
13 10,000 11,001-30,000
14 22,000 30,001-50,000
15 30,000
16 50,000

Competito rA
2 Model s
Range

Competito rB
4 Model s
Range

3

Product Description

MultiFloTM Congurator Accessory Kits:
778Z010ZZZ Basic MultiFlo Congurator Kit
*Software, MultiFlo Congurator
124Y211AAA Best/Multio Cable - USB to RS485

778Z011ZZZ Basic MultiFlo Congurator Kit
w/Power Supply and Adapter Cables
*Software, MultiFlo Congurator
124Y211AAA Best/Multio Cable - USB to RS485
A332295001 Power Supply MFC
A332297002 Cable, Power, 9-Pin
A332297001 Cable, Power, DeviceNet

* MultiFlo Congurator Software is available on the Brooks
Instrument website at: www.BrooksInstrument.com/MultiFlo

Pressure Transient Insensitivity (PTI) (GF125 only)
Cost and space constraints are driving gas panel designers
to remove point of use pressure regulators and pressure
monitoring components, placing more burden on the mass
ow controller to control accurately under dynamic pressure
conditions. Conventional mass ow controllers react strongly
to small inlet pressure uctuations resulting in unstable
performance and unpredictable accuracy (see Non-Pressure
Insensitive MFC). This drove Brooks to develop Pressure
Transient Insensitive mass ow controller technology (PTI-MFC).

The GF125 PTI-MFC is a second generation PTI-MFC utilizing
a patented control algorithm that inverts the pressure signal,
compares it to the pre-uctuation signal and drives real-time
valve position compensation to maintain stable ow. Enhanced
pressure transient insensitivity is achieved through faster
sensing, faster processing, and a reduction in internal dead­volume between the sensors and valve orice.

Advanced Thermal Flow Measurement Sensor
Brooks’ proprietary sensor technology combines:

• Improved signal to noise performance for improved accuracy

at low setpoints

• Improved reproducibility at elevated temperatures through

new isothermal packaging, onboard conditioning
electronics with ambient temperature sensing and
compensation

• Improved long-term stability through enhanced sensor

manufacturing and burn in process

• Highly corrosion resistant Hastelloy C-22 sensor tube

• Optimized temperature prole for gases prone to thermal

decomposition

• Unique orthogonal sensor mounting orientation

-Eliminates sensor drift caused by valve heating eects

-Eliminates thermal siphoning eects for the most common
mounting orientations

Pressure Flucuations in Non-Pressure Transient Insensitivty MFC

Stable Pressure with Pressure Transient Insensitivty GF Device

4

Product Description

High Purity Flow Path

All metal, corrosion resistant ow path with reduced surface area
and un-swept volumes for faster dry-down during purge steps:

• SEMI F-20 compliant wetted ow path

• 4 µ inch Ra max surface nish standard (10 µ inch Ra on

GF100)

• Highly corrosion resistant Hastelloy C-22 valve seat and jet

orice

Extensive Mechanical Conguration Support

GF100 Series supports all metal seal / UHP industry gas
connection interface standards for full OEM and process coverage

• Downport 80mm and 92mm C-seal and W-Seal, on 1.125” and

1.5” bodies

• Downport 80mm CS seal on 1.5” body

• 124 mm 1/4” VCR Male on 1.5” body

Enhanced Diagnostics

The mass ow controller remains the most complex and critical
component in gas delivery systems. When dealing with UHP gas
distribution or highly toxic or corrosive gases, removing the mass
ow controller to determine if it is faulty should be the last resort.
In response to this, Brooks pioneered smarter mass ow
controllers with embedded self test routines and introduced an
independent diagnostic/service port to provide the user with a
simple interface, for troubleshooting without disturbing ow
controller operation.

High Purity Flow Path

User Interface

The user interface has a high visibility LCD display that provides
a local indication of Flow (%), Temperature (°C), Pressure (PSIA/
KPa) and Network Address, selectable through the Display button.
A Zero button provides a simple means to re-zero the mass ow
controller as part of scheduled maintenance.

Communication Interface

The GF100 Series supports analog 0-5 Vdc, RS485, and
DeviceNet™ communication protocols. A range of low prole
adapter cables facilitate replacing older mass ow controllers
with the GF100 Series eliminating the need to carry mass ow
controllers of same gas/range but dierent electrical connectors.

MFC on Gas Box

Communication Interface

5

Product Specications (Standard GF Series)

Performance

Full Scale Flow Range (N2 Eq.) 3 sccm to 55 slm

Flow Accuracy +1% S.P. > 35-100%, +0.35% F.S. 2-35%

Repeatability & Reproducibility < + 0.15% S.P.

Linearity + 0.5% F.S. (included in accuracy)

Response Time (Settling Time) 300ms (3-860 sccm N2 Eq.)
Normally Closed Valve < 1 sec 700ms 400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
Normally Open Valve <1.5 sec

Pressure Insensitivity Not Applicable < 5% SP up to 5 psi/sec upstream press. spike

Control Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)

MultiFlo standard

#of Bins 11 bins

Valve Shut Down (N.C. Valve) < 1% of F.S.
Valve Shut Down (N.O. Valve) 2% of F.S.

Zero Stability < + 0.5% F.S. per year

Temperature Coecient Span: 0.05% S.P. per oC, Zero: 0.005% F.S. per oC

GF100 GF120 GF125

Ratings

Operating Temperature Range 10-50oC

Dierential Pressure Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid
*Argon gas applications require an additional 10 psid dierential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.

Maximum Operating Pressure 500 psia max 100 psia max

Proof Pressure 700 psia max 140 psia max

Design Pressure 800 psia max 170 psia max

Burst Pressure 3000 psia max 500 psia max

Leak Integrity (external) 1x10

-10

atm. cc/sec He

Mechanical

Valve Type Normally Closed
Normally Open
Meter (no valve)

Wetted Materials GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel,KM-45

Surface Finish 10µ inch Ra 4µ inch Ra (0.1 µm Ra)

Diagnostics & Display

Status Lights MFC Health, Network Status

Alarms Control Valve Output, Network Interruption

Display Type Top Mount Integrated LCD
Viewing Angle / Viewing Distance Fixed / 10 feet
Units Displayed / Resolution Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit)

Electrical

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Digital Communication RS485+ (model specic), DeviceNet (model specic), RS485 Diagnostic Port (all models)

Diagnostic /Service Port RS485 via 2.5mm jack

Power Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc
RS485/Analog: 6 Watts max @ +15Vdc. (+10%) or +24 Vdc (±10%)

TM

via 5-Pin “M12” connector

Compliance

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
NOTE: See the following Safe Delivery System (SDS) section for optional detailed specications

6

Product Description GF120 Safe Delivery System (SDS

The GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low
pressure drop mass ow controller for the delivery of sub atmospheric
safe delivery system (SDS) gases used in Implant and Etch processes. The
Brooks GF120 (SDS) models are available in full scale ow ranges 4-25
sccm (option GF120XSL) or >25 sccm to 1 slpm (option GF120XSD).

These expensive, hazardous gases are adsorbed onto a solid medium
within the gas cylinder, remaining below atmospheric pressure despite
containing up to 15 times more dopant than conventional pressurized
sources.

The amount of gas that can be extracted from the SDS controlled
cylinder is highly dependent upon the nal cylinder pressure. This is
illustrated in SDS desorption species information in the SDS Gas Use Rate
Eciency Curve. Most of the gas is released at pressures below 100 Torr.
The minimum cylinder pressure that can be reached is limited by the
conductance of the mass ow controller regulating the ow. Most mass
ow controllers require a 50 Torr dierential pressure at ow rates of 5
sccm. At this 50 Torr limit, only ~65% of the dopant can be extracted
from the adsorbent medium at normal operating temperatures. The
GF120 (SDS) low pressure operation enables a further 30% of the
dopant to be extracted, driving signicant cost savings in SDS gases
and equipment OEE.

) Option

Product Specications (GF120XSD and GF120XSL) Options

Performance

Full Scale Flow Range (N2 Eq.) 4 - 25 sccm >25 to 1 slpm
Gases Supported AsH3, PH3, BF3, SiF4, Ar, Xe, N2O, N2, GeF4, AsF5, PF3,
H2Se, HMDSO, HMDSN, H2O***
MultiFlo Programmable Not Congurable
Flow Accuracy +/-1% S.P. >35% F.S. +/-0.35% F.S. <35% F.S.

Repeatability & Reproducibility <+/- 0.15% S.P.
Zero Stability <=0.6% F.S. per year

Settling Time (to within +2% F.S.) < 3 sec

Warm Up Time minimum of 30 minutes

Leak Integrity 1X10

Valve Shut Down (Leaky by) <1% F.S.

Operating Conditions****

Minimum Operating Inlet Pressure* 4 to 20 sccm < 10 Torr
>20 to 50 sccm < 20 Torr
>50 sccm to 1 slpm < 50 Torr

Maximum Pressure 500 psia max

Pressure Insensitivity Not Available

DierentialPressure** 10 Torr-30 psid typical (1.33-207 kPa typical)

Valve Conguration Normally Closed

Ambient Temperature Range 10OC-50OC

Zero Temperature Coecient Span: 0.05% SP per OC, Zero: 0.005% F.S. per OC

GF120XSL GF120XSD

-11

atm. cc/sec He

GF120XSD GF120XSL

*Performance at minimum inlet pressure will be gas and ow range dependent. Consult Technical Support for details.
**Typical pressure drop. Actual pressure drop will be gas and ow dependent. Consult Technical Support for details.
***Consult factory for other gases.
****GF120 Pressure ratings apply to SDS congurations.

7

Product SpecicationsElectrical Interface Options

123

123

Base I/O Options

PDC Ordering Code G1
Description: Industry standard
Analog / RS485 interface

PDC Ordering Code GX
Description: OEM specic
Analog / RS485 interface.
Display and top plate
re-oriented 180

PDC Ordering Code DX
Description: Industry standard
ODVA compliant DeviceNet
interface

PDC Ordering Code TX
Description: Industry standard
Analog only interface

o

I/O Options Using Base Model and Adapter Cable

A range of low prole adapter cables have been developed to support
replacing older generation MFC’s with dierent pinout congurations. The
base MFC will be either a G1, TX or SX conguration, depending on the
product being replaced.

PDC Ordering Code
UX Description: SX base

I/O with 7003550 adapter for
compatibility with Unit UDU15

PDC Ordering Code: FX / JX
Description: SX base I/O with
7003069 (FX)/7001814 (JX)
adapter for compatibility with
Unit UDF9/UDJ9

PDC Ordering Code: T1
Description: TX base I/O with
7003551 adapter for compatibility
with IFlow DB15 & TN 15 pin

PDC Ordering Code: EX
Description: GX base I/O with
7003083 adapter for compatibility
with Unit “E”, IN “L”, “R”

PDC Ordering Code SX
Description: Industry standard
Analog 9-Pin Sub D connector
and dual RJ11 RS485 ports

PDC Ordering Code BB
Description: Industry standard
ODVA compliant DeviceNet
interface, Plus a separate
Analog 0-5 Vdc Connector

All Base I/O options include:

Diagnostic port communication RS485 via 2.5mm jack

PDC Ordering Code: KX
Description: G1 base I/O with
7003298 adapter for compatibility
with Unit UDK15

Other adapter options are available for the GF Series. Please contact Brooks Customer

Service for more information.

PDC Ordering Code: BX
Description: G1 base I/O with
7003590 adapter for
compatibility with Brooks 15-Pin D

8

Product Dimensions

3.67in
93mm

4.45in

113mm

.98in

25mm

3.75in
95mm

A

B

D

C

F

G

5.09in

129mm

E

3.29in

84mm

Downport Congurations

DX/BB Specic Dimensions

G1/GX/TX Specic Dimensions

SX Specic Dimensions

Fitting Option Code

Seal Type

Dim A

Dim BDim C

Dim D

Dim E

Dim F

Dim G

CX

C-SEAL

92mm [3.62in]

105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

83mm [3.28in]

25mm [1.00in]

127mm [5.00in]

EX

W-SEAL

79.8mm[3.14in]

93mm [3.66in] 30mm [1.18in] 39mm [1.53in]

72mm [2.82in]

25mm [1.00in]

127mm [5.00in]

WX

W-SEAL

92mm [3.62in]

105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

83mm [3.28in]

25mm [1.00in]

127mm [5.00in]

DX

C-SEAL

79.8mm[3.14in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in]

72mm [2.82in] 25mm [1.00in]

127mm [5.00in]

YX

W-SEAL

79.8mm[3.14in]

93mm [3.66in] 22mm [0.86in] 28mm [1.12in]

72mm [2.82in] 25mm [1.00in]

127mm [5.00in]

AX

C-SEAL

92mm [3.62in]

105mm [4.13in]

30mm [1.18in] 39mm [1.53in]

83mm [3.28in] 25mm [1.00in]

127mm [5.00in]

BX

W-SEAL

92mm [3.62in]

105mm [4.13in]

30mm [1.18in] 39mm [1.53in]

83mm [3.28in] 25mm [1.00in]

127mm [5.00in]

LX

C-SEAL

92mm [3.62in]

105mm [4.13in]

22mm [0.86in] 28mm [1.12in]

83mm [3.28in] 25mm [1.00in]

127mm [5.00in]

Electrical Connector

Electrical Connector

Electrical Connector

Downport Congurations

VCR Congurations

9

Model Code

Code Description Code Option Option Description
I. Base Model Code GF High Purity/Ultra High Purity Digital Mass Flow Controllers

II. Package / Finish Specications 100 Flow range 3 sccm -55 slpm N2 Eq.; + 1.0% SP Accuracy; 1 sec Response; 10 Ra
120 Flow range 3 sccm -55 slpm N2 Eq.; + 1.0% SP Accuracy; 700 msec Response; 4 Ra
125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N2 Eq.; + 1.0% SP Accuracy;

300-700 msec Response; 4 Ra

III. Congurability C MultiFlo capable. Standard bins or specic gas/range may be selected.
X Not MultiFlo capable. Specic gas/range required. (must select w/ SD, SL or HA special application)

IV. Special Application XX Standard
SL Safe Delivery System (GF120 Only) Full scale ow range; 4 to 25 sccm, Nitrogen Equivalent
SD Safe Delivery System (GF120 Only) Full scale ow range; >25 sccm to 1 slpm, Nitrogen Equivalent

V. Valve Conguration O Normally Open valve (not available with SD, SL or HA options)
C Normally Closed valve (must select with SD, SL or HA special application)
M Meter (No Valve)

VI. Gas or SH MultiFlo Bin XXXX XXXX Specic Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm (must select w/ SD, SL or

HA special application).
SH40 010C Standard Conguration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference)
SH41 030C Standard Conguration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference)
SH42 092C Standard Conguration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)
SH43 280C Standard Conguration #43,93-280 sccm Nitrogen Equivalent (0° C Reference)
SH44 860C Standard Conguration #44, 281-860 sccm Nitrogen Equivalent (0° C Reference)
SH45 2.6L Standard Conguration #45, 861-2600 sccm Nitrogen Equivalent (0° C Reference)
SH46 7.2L Standard Conguration #46, 2601-7200 sccm Nitrogen Equivalent (0° C Reference)
SH47 015L Standard Conguration #47, 7201-15000 sccm Nitrogen Equivalent (0° C Reference)
SH48 030L Standard Conguration #48, 15001-30000 sccm Nitrogen Equivalent (0° C Reference)
SH49 040L Standard Conguration #49, 30001-40000 sccm Nitrogen Equivalent (0° C Reference)
SH50 055L Standard Conguration #50, 40001-55000 sccm Nitrogen Equivalent (0° C Reference)

VII. Fitting VX 1-1/2” body width, 124mm 1/4” VCR male
VS 1-1/8” body width, 124mm 1/4” VCR male
CX 1-1/8” body width, 92mm C Seal
DX 1-1/8” body width, 79.8mm C Seal
EX 1-1/2” body width, 79.8mm W Seal
WX 1-1/8” body width, 92mm W Seal
YX 1-1/8” body width, 79.8mm W Seal
AX 1-1/2” body width, 92mm C Seal
BX 1-1/2” body width, 92mm W Seal
LX 1-1/8” body width, 92mm C Seal w/Poke Yoke
AS 1-1/2” body width, 92mm 0.440” large bore C Seal (only for bins SH45-SH50)

VIII. Downstream Condition A Atmosphere
V Vacuum; Default for SD, SL and HA special application

IX. Sensor O Default Sensor Orientation

Model Code continued on next page.

10

Model Code (continued)

Code Description Code Option Option Description

X. Connector BX Cable adapter to 15 pin D Brooks (Unit “B”,”N”) adapts G1 base
EX Cable adapter to Card Edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”) adapts GX base

(Not Available on 79.8mm tting DX, YX, EX)
FX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”F”,”O”) adapts SX base
GX 9-Pin D with RS485 (Unit”G”); display and overlay 180o orientation
G1 9-Pin D with RS485 (Unit”G”) (Not Available on 79.8mm tting DX, YX, EX)
JX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”J”,”W”) adapts SX base
KX Cable adapter to MKS 15-Pin D (Unit “K”) adapts G1 base
SX 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
TX 9 pin D with UDT9 pin-out (UDT9) (Not Available on 79.8mm tting DX, YX, EX)
T1 Cable adapter to 15 pin D (IFlow DB15 & TN 15 pin) adapts TX base (Not Available on 79.8mm tting DX, YX, EX)
UX Cable adapter to 15 pin D (w/VTP) (Unit & TN “U”) adapts SX base
BB DeviceNetTM Analog (Not Available on 79.8mm tting DX, YX, EX)

DeviceNet Standard Conguration Parameters

Poll IO Poll IO Poll IO External
Power On Full Scale Full Scale Full Scale Instance Instance State Baud
I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB
D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB
D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB
D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB
D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB
D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB
D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB
D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB
D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB
D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB
DA DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB
DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB
DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB
DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB
DE DeviceNet 5 Pin Micro Executing Sccm Float 6000h 15 19 Executing 500KB
DX DeviceNet 5 Pin Micro To be dened by CSR

Code Description Code Option Option Description
XI. Customer Special Request XXXX Customer Special Request Number; required with “DX, BB” Conn. Option to dene DNet settings

XII. Auto Shut-O A Auto Shut-O (Included) Default for SD and SL special application
X Auto Shut-O (Not Included) (Must be selected for meter)

XIII. Auto Zero X Auto Zero (Not Included)

XIV. Reference Temperature 000 0oC Reference Calibration (Standard) - Default Setting

Sample Standard Model Code
I II III IV V VI VII VIII IX X XI XII XIII XIV
GF 100 C XX M - SH40010C - VX A O GX - XXXX A X - 000

Sample Safe Delivery System (SDS) Model Code
I II III IV V VI VII VIII IX X XI XII XIII XIV
GF 120 X SD C - XXXXXXXX - EX V O SX - XXXX A X - 000

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Service and Support

Brooks is committed to assuring all of our customers receive the ideal ow solution for their application, along with outstanding ser­vice and support to back it up. We operate rst class repair facilities located around the world to provide rapid response and support.
Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is
certied by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001
Quality Certication is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.

Please contact your nearest sales representative for more details.

Due to Brooks Instrument’s commitment to continuous improvement of our products, all specications are subject to change
without notice.

TRADEMARKS
Brooks is a trademark of Brooks Instrument, LLC
All other trademarks are the property of their respective owners.

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2019