Brooks Instrument GF101, GF121, GF126 Specifications

GF High Flow Series

DS-TMF-GF101-Series-MFC-eng

July, 2019

Data Sheet

GF Series

Thermal Mass Flow

High Purity/Ultra-High Purity

High Flow

Digital Mass Flow Devices

Overview

Designed for semiconductor, MOCVD, and other gas ow control applications that
require a high purity all-metal ow path, the Brooks GF Series mass ow control­lers deliver outstanding performance, reliability, and exibility. The GF101/121/126
extends the GF family to support ow rates up to 300 slpm N2 equivalent. The
high ow design utilizes the proven GF sensor design and electronics. This high
ow product provides excellent ow stability for purge lines in CVD, LPCVD, Diffu­sion, Epi processes, semiconductor chamber clean processes and MOCVD purge
ows.

Product Description

Designed for high-ow applications like purge, the GF101/121/126 has all of the
features/benets of the GF100/120/125, but with extended performance for ow
rates up to 300 slpm. Compared with competitive products offering a similar ow
rate, the compact footprint of the GF101/121/126 allows users to design smaller,
more efcient systems. It also provides better actual process gas accuracy over devices
that use traditional single point conversion factors when switching to a new gas. The
GF101/121/126 Series features an all metal seal ow path for durability and high leak
integrity, precise, stable ow control with fast Sub-1 second settling times and 1% of
reading accuracy to ensure reliable ow measurement or control in demanding gas ow
applications. The GF101/121/126 achieves excellent internal to external leak integrity. A
wide range of digital and analog I/O options offers the broadest range of communication
protocols making the GF101/121/126 an ideal upgrade for existing MFCs.

Built on a common platform and interface, this series now enables an entire system to use
one product platform:

• GF101/121/126 based on the same technology and design as the low ow GFs

- Same sensor

- Same electronics

- Same low power support

• Smaller footprint than competitive MFCs

• Handles ow rates up to 300 slpm

• Metal seal for durability and high leak integrity

• Proprietary sensor technology

• Precise ow control with fast sub-1 second settling time

• 1% of reading accuracy

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Product Description (continued)

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Ultra Fast Response

By combining Brooks’ patented ow sensor technology with
a high speed ARM processor and fast acting diaphragm free
valve assembly, the GF101/GF121/GF126 Series delivers up to
2 times faster response and settling time compared to other
mass ow controllers, enabling:

• Reduced diverted gas consumption and associated

abatement costs

• For processes requiring a slow ramped gas turn-on or time

critical transitions between ow rates. A user programmable
ramp function is provided

• Improved gas blending and dilution in MOCVD

Pressure Tolerant Flow Control

The GF High-Flow’s hydraulically balanced valve is inherently
less sensitive to line pressure disturbances caused by regulator
droop and popping that can drive the traditional (valve) MFC’s
to over compensate and ring, resulting in ow disturbance
that can impact the process, trip excess ow alarms or stir up
particles.

Advanced Thermal Flow Measurement Sensor
Brooks’ proprietary sensor technology combines:

• Improved signal to noise performance for improved

accuracy at low setpoints

• Improved reproducibility at elevated temperatures through

new isothermal packaging, onboard conditioning
electronics with ambient temperature sensing and
compensation

• Improved long-term stability through enhanced sensor

manufacturing and burn in process

• Highly corrosion resistant Hastelloy C-22 sensor tube

• Optimized temperature prole for gases prone to thermal

decomposition

• Unique orthogonal sensor mounting orientation

-Eliminates sensor drift caused by valve heating effects

-Eliminates thermal siphoning effects for the most common

mounting orientations

Time (sec)

High Purity Flow Path

All metal, corrosion resistant ow path with reduced surface
area and un-swept volumes for faster dry-down during purge
steps:

• SEMI F-20 compliant wetted ow path

• 5 µ inch Ra max surface nish standard (10 µ inch Ra on

GF101)

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High Purity Flow Path

Product Description (continued)

Extensive Mechanical Conguration Support

GF101/GF121/GF126 Series supports all metal seal / UHP
industry gas connection interface standards for full OEM and
process coverage

• 114 mm, C Seal on 1.5” body

• 134.2 mm, 1/2” VCR male on 1.5” body

• 150.4 mm, 1/2” VCR on 1.5 body

• 166 mm, 1/2” VCR on 1.5” body

• 168.6 mm, 1/2” VCR on 1.5” body

Accessories

318Z137BNA: 1/2” VCR adapter to extend 134.2 mm lay
length to 177 mm lay length
318Z138BNA: 1/2” VCR adapter to extend 134.2 mm lay
length to 192.4 mm lay length

Enhanced Diagnostics

The mass ow controller remains the most complex and critical
component in gas delivery systems. When dealing with UHP gas
distribution or highly toxic or corrosive gases, removing the
mass ow controller to determine if it is faulty should be
the last resort. In response to this, Brooks pioneered smarter
mass ow controllers with embedded self test routines and
introduced an independent diagnostic/service port to provide
the user with a simple interface, for troubleshooting without

disturbing ow controller operation.

User Interface

The user interface has a high visibility LCD display that provides
a local indication of Flow (%), Temperature (°C), Pressure
(PSIA/KPa) and Network Address, selectable through the Display
button. A Zero button provides a simple means to re-zero the
mass ow controller as part of scheduled maintenance. The
display is rotatable with a push button to enable improved
readability based on how the MFC is mounted.

Communication Interface

The GF101/GF121/GF126 Series supports analog 0-5 Vdc,
RS485, and DeviceNet™ communication protocols. A range of
low prole adapter cables facilitate replacing older mass ow
controllers with the GF101/GF121/GF126 Series eliminating
the need to carry mass ow controllers of same gas/range but
different electrical connectors.

MFC on Gas Box

Communication Interface

Features and Benets

Features Benets

Metal Seal High leak integrity. No periodic replacement of aging seals necessary

Adaptable Mechanical Congurations Compact footprint enables easy retrot to existing systems

Metrology Measurement accuracy is traceable to international standards

User Accessible Service Port with Advanced Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user
Diagnostics with User-Friendly Interface specied limits for high yield and maximum uptime

Corrosion Resistant Hastelloy T-Rise Sensor Provides unmatched long-term sensor stability ensuring maximum yield and throughput

Pressure Transient Insensitivity (PTI) Tighter process control

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