Brooks Instrument GF101, GF121, GF126 Specifications

GF High Flow Series

DS-TMF-GF101-Series-MFC-eng

July, 2019

Data Sheet

GF Series

Thermal Mass Flow

High Purity/Ultra-High Purity

High Flow

Digital Mass Flow Devices

Overview

Designed for semiconductor, MOCVD, and other gas ow control applications that
require a high purity all-metal ow path, the Brooks GF Series mass ow control­lers deliver outstanding performance, reliability, and exibility. The GF101/121/126
extends the GF family to support ow rates up to 300 slpm N2 equivalent. The
high ow design utilizes the proven GF sensor design and electronics. This high
ow product provides excellent ow stability for purge lines in CVD, LPCVD, Diffu­sion, Epi processes, semiconductor chamber clean processes and MOCVD purge
ows.

Product Description

Designed for high-ow applications like purge, the GF101/121/126 has all of the
features/benets of the GF100/120/125, but with extended performance for ow
rates up to 300 slpm. Compared with competitive products offering a similar ow
rate, the compact footprint of the GF101/121/126 allows users to design smaller,
more efcient systems. It also provides better actual process gas accuracy over devices
that use traditional single point conversion factors when switching to a new gas. The
GF101/121/126 Series features an all metal seal ow path for durability and high leak
integrity, precise, stable ow control with fast Sub-1 second settling times and 1% of
reading accuracy to ensure reliable ow measurement or control in demanding gas ow
applications. The GF101/121/126 achieves excellent internal to external leak integrity. A
wide range of digital and analog I/O options offers the broadest range of communication
protocols making the GF101/121/126 an ideal upgrade for existing MFCs.

Built on a common platform and interface, this series now enables an entire system to use
one product platform:

• GF101/121/126 based on the same technology and design as the low ow GFs

- Same sensor

- Same electronics

- Same low power support

• Smaller footprint than competitive MFCs

• Handles ow rates up to 300 slpm

• Metal seal for durability and high leak integrity

• Proprietary sensor technology

• Precise ow control with fast sub-1 second settling time

• 1% of reading accuracy

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Product Description (continued)

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Ultra Fast Response

By combining Brooks’ patented ow sensor technology with
a high speed ARM processor and fast acting diaphragm free
valve assembly, the GF101/GF121/GF126 Series delivers up to
2 times faster response and settling time compared to other
mass ow controllers, enabling:

• Reduced diverted gas consumption and associated

abatement costs

• For processes requiring a slow ramped gas turn-on or time

critical transitions between ow rates. A user programmable
ramp function is provided

• Improved gas blending and dilution in MOCVD

Pressure Tolerant Flow Control

The GF High-Flow’s hydraulically balanced valve is inherently
less sensitive to line pressure disturbances caused by regulator
droop and popping that can drive the traditional (valve) MFC’s
to over compensate and ring, resulting in ow disturbance
that can impact the process, trip excess ow alarms or stir up
particles.

Advanced Thermal Flow Measurement Sensor
Brooks’ proprietary sensor technology combines:

• Improved signal to noise performance for improved

accuracy at low setpoints

• Improved reproducibility at elevated temperatures through

new isothermal packaging, onboard conditioning
electronics with ambient temperature sensing and
compensation

• Improved long-term stability through enhanced sensor

manufacturing and burn in process

• Highly corrosion resistant Hastelloy C-22 sensor tube

• Optimized temperature prole for gases prone to thermal

decomposition

• Unique orthogonal sensor mounting orientation

-Eliminates sensor drift caused by valve heating effects

-Eliminates thermal siphoning effects for the most common

mounting orientations

Time (sec)

High Purity Flow Path

All metal, corrosion resistant ow path with reduced surface
area and un-swept volumes for faster dry-down during purge
steps:

• SEMI F-20 compliant wetted ow path

• 5 µ inch Ra max surface nish standard (10 µ inch Ra on

GF101)

2

High Purity Flow Path

Product Description (continued)

Extensive Mechanical Conguration Support

GF101/GF121/GF126 Series supports all metal seal / UHP
industry gas connection interface standards for full OEM and
process coverage

• 114 mm, C Seal on 1.5” body

• 134.2 mm, 1/2” VCR male on 1.5” body

• 150.4 mm, 1/2” VCR on 1.5 body

• 166 mm, 1/2” VCR on 1.5” body

• 168.6 mm, 1/2” VCR on 1.5” body

Accessories

318Z137BNA: 1/2” VCR adapter to extend 134.2 mm lay
length to 177 mm lay length
318Z138BNA: 1/2” VCR adapter to extend 134.2 mm lay
length to 192.4 mm lay length

Enhanced Diagnostics

The mass ow controller remains the most complex and critical
component in gas delivery systems. When dealing with UHP gas
distribution or highly toxic or corrosive gases, removing the
mass ow controller to determine if it is faulty should be
the last resort. In response to this, Brooks pioneered smarter
mass ow controllers with embedded self test routines and
introduced an independent diagnostic/service port to provide
the user with a simple interface, for troubleshooting without

disturbing ow controller operation.

User Interface

The user interface has a high visibility LCD display that provides
a local indication of Flow (%), Temperature (°C), Pressure
(PSIA/KPa) and Network Address, selectable through the Display
button. A Zero button provides a simple means to re-zero the
mass ow controller as part of scheduled maintenance. The
display is rotatable with a push button to enable improved
readability based on how the MFC is mounted.

Communication Interface

The GF101/GF121/GF126 Series supports analog 0-5 Vdc,
RS485, and DeviceNet™ communication protocols. A range of
low prole adapter cables facilitate replacing older mass ow
controllers with the GF101/GF121/GF126 Series eliminating
the need to carry mass ow controllers of same gas/range but
different electrical connectors.

MFC on Gas Box

Communication Interface

Features and Benets

Features Benets

Metal Seal High leak integrity. No periodic replacement of aging seals necessary

Adaptable Mechanical Congurations Compact footprint enables easy retrot to existing systems

Metrology Measurement accuracy is traceable to international standards

User Accessible Service Port with Advanced Convenient interface to diagnostics for maximum uptime. Ensures device is operating within user
Diagnostics with User-Friendly Interface specied limits for high yield and maximum uptime

Corrosion Resistant Hastelloy T-Rise Sensor Provides unmatched long-term sensor stability ensuring maximum yield and throughput

Pressure Transient Insensitivity (PTI) Tighter process control

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Product Specications

GF101 GF121 GF126

Performance

Full Scale Flow Range (N2 Eq.) 55 to 300 slm

Flow Accuracy +1% S.P. > 35-100%, +0.35% F.S. 2-35%

Repeatability & Reproducibility < + 0.15% S.P.

Linearity ±0.5% F.S. (included in accuracy)

Response Time (Settling Time)
Normally Closed Valve < 1 sec

Pressure Transducer Ability to measure inlet pressure

Control Range 5-100% (Normally Closed Valve)

MultiFlo Standard (All typical high ow rate process gases & mixtures supported)

# of Bins 4 Bins

Control Range 5-100% (Normally Closed Valve)

Valve Shut Down (N.C. Valve) < 2% of F.S. @ 30 N2 psig/atm out

Zero Stability < + 0.5% F.S. per year

Temperature Coefcient Span: 0.05% S.P. per oC, Zero: 0.005% F.S. per oC

Ratings

Operating Temperature Range 10-50oC

Differential Pressure Range 30-90 psid

Maximum Operating Pressure Controller: 75 psig / Meter: 150 psig

Leak Integrity (external) 1x10

Proof Pressure 700 psia 700 psia 140 psia

Design Pressure 800 psia 700 psia 170 psia

Burst Pressure 3000 psia 3000 psia 500 psia

-10

atm. cc/sec He

Mechanical

Valve Type Normally Closed
Meter (no valve)

Wetted Materials GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel,KM-45

Surface Finish 10µ inch Ra 5µ inch Ra (0.1 µm Ra)

Diagnostics & Display

Status Lights MFC Health, Network Status

Alarms Control Valve Output, Network Interruption

Display Type Top Mount Integrated LCD
Viewing Angle / Viewing Distance Fixed / 10 feet
Units Displayed / Resolution Flow (%), Temp. (oC), Pressure (psia, kPa) / 0.1 (unit)

Electrical

Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet

Digital Communication RS485+ (model specic), DeviceNet (model specic), RS485 Diagnostic Port (all models)

Diagnostic /Service Port RS485 via 2.5mm jack

Power Supply/Consumption DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions)

TM

via 5-Pin “M12” connector

Compliance

EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

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Product SpecicationsElectrical Interface Options

123

Base I/O Options

PDC Ordering Code G1
Description: Industry standard

Analog / RS485 interface

PDC Ordering Code DX
Description: Industry standard

ODVA compliant DeviceNet

interface

All Base I/O options include: Diagnostic port communication RS485 via 2.5mm jack

I/O Options Using Base Model and Adapter Cable

A range of low prole adapter cables have been developed to support replacing older
generation MFC’s with different pinout congurations. The base MFC will be either a
G1 or SX conguration, depending on the product being replaced.

PDC Ordering Code UX Descrip-

tion: SX base I/O with 7003550
adapter for compatability with
Unit UDU15

PDC Ordering Code SX
Description: Industry standard
Analog 9-Pin Sub D connector

and dual RJ11 RS485 ports

PDC Ordering Code: FX / JX
Description: SX base I/O with
7003069 (FX)/7001814 (JX)
adapter for compatability with
Unit UDF9/UDJ9

PDC Ordering Code: EX
Description: G1 base I/O with
7003083 adapter for

compatability with Unit “E”, IN
“L”, “R”

PDC Ordering Code: BX
Description: G1 base I/O with
7003590 adapter for
compatability with Brooks 15­Pin D

PDC Ordering Code: KX
Description: G1 base I/O with
7003298 adapter for
compatability with Unit UDK15

Other adapter options are available for the GF Series. Please contact Brooks Customer Service for more information.

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Product Dimensions

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Model Code

Code Description Code Option Option Description
I. Base Model Code GF High Purity/Ultra High Purity Digital Mass Flow Controllers

II. Package / Finish Specications 101 Flow range 55 - 300 slm N2 Eq.; 10 Ra HP wetted ow path
121 Flow range 55 - 300 slm N2 Eq.; 5 Ra UHP wetted ow path
126 Flow range 55 - 300 slm N2 Eq.; 5 Ra UHP wetted ow path & integrated pressure measurement

III. Congurability C MultiFlo capable
X Not congurable

IV. Special Application XX Standard
V. Valve Conguration C Normally Closed valve

M Meter (No Valve)
VI. Gas or SH MultiFlo Bin XXXX XXXX Specic Gas Code & Range, i.e. “0004” = Argon and “100L” = 100 slpm

SH51 055L Standard Conguration #51, 55,001 sccm N2 Equivalent (0°C Reference)
Special Bin for low density gases, e.g. 73,002-120,000 He, 100,002-170,000 H2
SH52 100L Standard Conguration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
SH53 200L Standard Conguration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
SH54 300L Standard Conguration #54, 200,001-300,000 N2 Equivalent (0°C Reference)

VII. Fitting V1 1-1/2” body width, 134mm 1/2” VCR male
V2 1-1/2” body width, 150.4mm 1/2” VCR male
V3 1-1/2” body width, 166mm 1/2” VCR male
V4 1-1/2” body width, 168.6mm 1/2” VCR male
Order V1 + 1-1/2” body width, 177mm 1/2” VCR male
318Z137BNA
Order V1 + 1-1/2” body width, 192.4mm 1/2” VCR male
318Z138BNA
C2 1-1/2” body width, 114mm 3/8” C Seal

VIII. Downstream Condition A Atmosphere

V Vacuum

IX. Sensor O Default Sensor Orientation
X. Connector BX Cable adapter to 15 pin D Brooks (Unit “B”,”N”); adapts G1 base

EX Cable adapter to card edge (w/out VTP), RS485 through RJ11 jacks (Unit”E”; IN “L”, “R”); adapts G1 base
FX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”F”,”O”); adapts SX base
G1 9-Pin D with RS485 (Unit”G”)
JX Cable adapter with 9 pin STEC pin-out & jack screws (w/VTP) (Unit”J”,”W”); adapts SX base
KX Cable adapter to MKS 15-Pin D (Unit “K”); adapts G1 base
SX 9 pin D with STEC pin-out (w/VTP) (Unit”S”,”Q”)
UX Cable adapter to 15 pin D (w/VTP) (Unit & TN “U”); adapts SX base

DeviceNet Standard Conguration Parameters

Poll IO Poll IO Poll IO External
Power On Full Scale Full Scale Full Scale Instance Instance State Baud
I/O Connector State Setting Setting Setting Producer Consumer Transition Rate

D0 DeviceNet 5 Pin Micro Idle Count Integer 6000h 2 7 Executing 500KB

D1 DeviceNet 5 Pin Micro Idle Count Integer 6000h 21 7 Executing 500KB

D2 DeviceNet 5 Pin Micro Idle SCCM Float 7FFFh 13 19 Executing 500KB
D3 DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 7 Executing 500KB

D4 DeviceNet 5 Pin Micro Executing Count Integer 6000h 22 8 Executing 500KB

D5 DeviceNet 5 Pin Micro Idle Count Integer 6000h 6 8 Executing 500KB
D6 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Executing 500KB
D7 DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 6 8 Executing 500KB
D8 DeviceNet 5 Pin Micro Idle Count Integer 6000h 3 7 Executing 500KB
D9 DeviceNet 5 Pin Micro Executing Count Integer 6000h 2 7 Executing 500KB
DA DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 22 7 Executing 500KB
DB DeviceNet 5 Pin Micro Idle Count Integer 6000h 22 8 Executing 500KB

DC DeviceNet 5 Pin Micro Idle Count Integer 7FFFh 3 7 Idle 500KB
DD DeviceNet 5 Pin Micro Executing Count Integer 7FFFh 22 8 Executing 500KB
DE DeviceNet 5 Pin Micro Executing SCCM Float 6000h 15 19 Executing 500KB

DX DeviceNet 5 Pin Micro To be dened by CSR

XI. Customer Special Request XXXX Customer Special Request Number
XII. Auto Shut-Off A Auto Shut-Off (Included)

X Auto Shut-Off (Not Included) (Must be selected for meter)
XIII. Auto Zero A Auto Zero (Included)

X Auto Zero (Not Included)

XIV. Reference Temperature 000 0oC Reference Calibration (Standard) - Default Setting

Sample Standard Model Code
I II III IV V VI VII VIII IX X XI XII XIII XIV
GF 101 C XX C - SH52 100L - V1 A 0 G1 - XXXX A X - 000

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Service and Support

Brooks is committed to assuring all of our customers receive the ideal ow solution for their application, along with outstanding ser­vice and support to back it up. We operate rst class repair facilities located around the world to provide rapid response and support.
Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration and is
certied by our local Weights and Measures Authorities and traceable to the relevant International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-9001

Quality Certication is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service
can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance persons.

Please contact your nearest sales representative for more details.

Due to Brooks Instrument’s commitment to continuous improvement of our products, all specications are subject to change without notice.

TRADEMARKS

Brooks, MultiFlo .......................................Brooks Instrument, LLC

All other trademarks are the property of their respective owners.

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2019