Brooks Instrument CMX160 User Manual

Installation and Operation Manual

X-VAC-CMX-eng Part Number: 541B154AAG January, 2011

Brooks®CMX Series

Heated Digital Capacitance Manometers

Brooks® CMX Series

Heated Digital

Capacitance Manometer

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

Brooks® CMX Series

January, 2011

Essential Instructions

Read before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must

be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

European Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

European Electromagnetic Compatibility (EMC)

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (2004/108/EC (EMC directive 89/336/EEC)). Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification. If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield. “D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping. The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees. The shield should be terminated to an earth ground. Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification. The shield should be terminated to an earth ground. For pin configuration : Please refer to the enclosed Instruction Manual.

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation or other handling of internal circuit boards or devices. Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual

X-VAC-CMX-eng Part Number: 541B154AAG January, 2011

Dear Customer, We appreciate this opportunity to service your measurement and control requirements with a Brooks Instrument

device. Every day , flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com

Y ours sincerely , Brooks Instrument

Brooks® CMX Series

Installation and Operation Manual

X-VAC-CMX-eng

Part Number: 541B154AAG

January, 2011

THIS PAGE WAS INTENTIONALLY

LEFT BLANK

_CONTENTS

CONTENTS

_1.0 SAFETY NOTICES 1

_1.1 SAFETY SYMBOLS 1 _1.2 GROUNDING 1 _1.3 EXPLOSIVE ATMOSPHERE 1 _1.4 PART SUBSTITUTIONS AND MODIFICATIONS 1 _1.5 GENERAL SAFETY GUIDELINES 1

_1.5.1Unsafe acts 2 _1.5.2Recommended practices 2

_2.0 DESCRIPTION 3

_2.1 BASIC DESIGN 3 _2.2 HISTORICAL DESIGN 4 _2.3 BROOKS CMX DESIGN 4 _2.4 DESIGN OVERVIEW 5 _2.5 RELAYS 6 _2.6 ZERO OUTPUT BIAS CONTROL 7 _2.7 CMX OPERATING TEMPERATURES 8 _2.8 PRESSURE RANGE SELECTION CRITERIA 9 _2.9 PRODUCT SPECIFICATIONS 10 _2.10 ORDERING SPECIFICATIONS 11

_3.0 INSTALLATION 19

_3.1 CMX MOUNTING CONSIDERATIONS 19 _3.2 PLUMBING SIZE 19 _3.3 USE OF AN ISOLATION VALVE 19 _3.4 MATERIAL EXPOSURE 19 _3.5 MECHANICAL CONNECTION 20 _3.6 ELECTRICAL CONNECTIONS 20 _3.7 DEVICENET CONNECTION 21 _3.8 ELECTRICAL SIGNAL DESCRIPTION 24

_4.0 OPERATION 25

_4.1 OPERATING PRECAUTIONS 25 _4.2 POWER THE CMX 25 _4.3 LED INITIALIZATION SEQUENCE 25 _4.4 DEVICE WARM-UP 26 _4.5 HEATER/TEMPERATURE 26 _4.6 ZEROING THE CMX 27

_5.0 MAINTENANCE and TROUBLESHOOTING 28

_5.1 CALIBRATION 28 _5.2 TROUBLESHOOTING 28 _5.3 CLEANING 28 _5.1 REMOVAL OF CMX 29

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_CONTENTS

_6.0 MODELS WITH DEVICENET 30

_6.1 DeviceNet Power Up Sequence 30 _6.2 DEVICENET AND NETWORKING ISSUES AND SOLUTIONS 30

_6.2.1Power-up LED Sequence Fails 31 _6.2.2Sequence Passes, Module LED Turns Red _6.2.3Sequence Passes, Module LED is Green, Net LED is Red 31 _6.2.4Sequence Passes, Module LED is Green, Net LED is Off 31 _6.2.5Sequence Passes, Module LED is Green, Net LED is

Flashing Green 31

_7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY 32

_7.1 CMX WITH EXTENDED RANGE 32 _7.1 EXTENDED RANGE ACCURACY SPECIFICATION 32 _7.2 CMX EXTENDED RANGE CONNECTOR PIN-OUT 32

_8.0 SERVICE and RETURN 34

_8.1 SERVICE INSTRUCTIONS 34 _8.2 RETURN INSTRUCTIONS 34

WARRANTY LOCAL SALES/SERVICE CONTACT INFORMATION

BACK COVER

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CAUTION

WARNING

DANGER

WARNING

CAUTION

_INTRODUCTION

1.0

1.0 SAFETY NOTICES

This manual provides information for the installation and operation of the Brooks CMX Series Heated Digital Capacitance Manometer s (CMs). It is imperative that this manual be reviewed prior to installation and operation of the device. Failure to comply with the warnings, cautions, and hazard notes will void the product’s warranty. Use of these instruments in a manner other than those specified by Brooks may result in injury or death and will void the product’s warranty. Brooks assumes no liability for any damage resulting from the improper use of its products.

1.1 SAFETY SYMBOLS

The following safety symbols are used throughout the system documentation:

Procedure could cause equipment damage/failure or procedure malfu nction if not followed.

Not following the procedure or adhering to advice could result in severe equipment damage and or environmental damage.

Severe injury or injury resulting in death could result if stated or local procedures are not followed.

1.2 GROUNDING

SHOCK HAZARD. All devices must be properly grounded.

All devices must be properly grounded to reduce the risk of an electrical shock.

1.3 EXPLOSIVE ATMOSPHERE

Do not use equipment in an explosive atmosphere.

The CMX family of products are NOT intended for use in explosive atmospheres.

1.4 PART SUBSTITUTIONS AND MODIFICATIONS

Do not substitute parts or modify equipment.

Modifying an instrument in any way not only voids the warranty but could cause a safety hazard and should be avoided. Repair work should be done at the factory or by a factory-authorized service center.

1.5 GENERAL SAFETY GUIDELINES

Always follow established industrial safety practices when operating any production equipment.

Safety is designed into every product. When followed, these minimum guidelines provide an acceptable level of safety for operating and maintaining your system.

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CAUTION

_INTRODUCTION

1.0

They are not, however, a substitute for determining your own internal safety procedures.

Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards. Always follow established industrial safety practices when operating production equipment.

1.5.1 Unsafe acts

• NEVER defeat a safety interlock unless you are certified to perform the procedure and have been specifically directed to defeat the interlock.

• NEVER operate or service this system without a thorough knowledge of the dangers involved and the precautions to be followed for safe and efficient operation.

• NEVER disregard instructions to lockout/tagout the system.

• NEVER permit unauthorized or untrained personnel to use the system.

• NEVER ST AND IN WATER OR ON A WET SURFACE WHILE OPERATING ANY ELECTRICALLY POWERED EQUIPMENT.

• NEVER place your hands near moving parts or energized parts or subsystems. Components can move rapidly.

• NEVER remove a warning label from the equipment.

• NEVER operate damaged equipment.

• NEVER permit unauthorized or untrained personnel access to the system.

1.5.2 Recommended practices

• USE THE BUDDY SYSTEM: ALWAYS perform maintenance procedures in teams of two or more people; one to monitor the controls and indicators, and one to watch the system operation.

• ALWAYS observe all warning labels.

• ALWAYS avoid all unsafe acts.

Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards

The safety procedures described in this manual are minimum guidelines. It is believed that these guidelines will provide an acceptable level of safety. These guidelines, however, should not be considered a substitute for determining your own internal safety procedures in consultation with a competent safety professional.

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NOTICE!

From this point forward, the CMX Series Heated Digital Capacitance Manometers will be referred to in general terms as the CMX or CM.

_DESCRIPTION

2.0

2.0 DESCRIPTION

2.1 BASIC DESIGN

The CMX (also referred to as a capacitance manometer (CM)) is a pressure measuring instrument that senses a change in process pressure. It does this by measuring the change in capacitance caused by a change in deflection of a tensioned diaphragm.

The basic design of the CMX sensor is shown in Figure 1. A thin metal diaphragm is welded into a sealed sensor assembly where it is maintained at a fixed distance from an electrode. The area behind the diaphragm, including the electrode, is known as the reference side of the sensor. It may be kept at an ultrahigh vacuum for an absolute gauge, or it may be connected to another source of pressure or vacuum to function as a differential gauge. The front side of the diaphragm is exposed to the process. The difference pressure between the process and the reference side

Figure 1: Basic Capacitance Manometer Sensor

causes the diaphragm to deflect slightly. This deflection causes a change in capacitance between the electrode and the diaphragm. The result is a cap acitive imbalance, which is measured by a circuit, and then converted to an output signal. This output is directly proportional to the pressure (or vacuum) in the process chamber.

The CM reading is not affected by changes or differences in gas composition and therefore overcomes disadvantages of specific gas calibration (due to thermodynamic and electrical property). Typically, in other vacuum gauges such as cold cathode ionization, Pirani, and thermocouple, each instrument must be calibrated for each specific process gas.

Capacitance manometers measure absolute pressure (force per unit area). They can measure to extremely precise levels and usually have quoted accuracies of 0.25% error of reading (versus typically 10% of reading with other indirect vacuum measurement technologies).

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_DESCRIPTION

2.0

2.2 HISTORICAL DESIGN

Unfortunately the simple sensor design described previously, has a number of drawbacks.

• The single large diaphragm is more sensitive to shock and vibration.

• A single electrode cannot distinguish between a true pressure change and capacitance change due to thermal expansion or contraction of the sensor housing.

• The diaphragm is exposed directly to the process environme nt, where thermal radiation (from RF power) and condensable by-products (from the process) contaminate it. This may even physically damage the diaphragm, chang ing its characteristics of deflection.

• Internal frictional and stress forces (as an example: due to therma l exp ansion and vibrations) can distort the pressure readings.

2.3 BROOKS CMX DESIGN

Brooks has created several patented solutions to remedy the above mentioned drawbacks of the simple design described previously: (refer to Figure 2)

1. Use of a diaphragm that is smaller in diameter than in conventional CMs. A smaller diaphragm has less mass, which makes it less sensitive to shock and vibration.

Figure 2: Brooks CMX

2. Brooks uses a dual electrode system which incorporates a reference electrode into the design. Pressure is determined by a change in the measurement electrode relative to a change in the reference electrode. If the spacing between the diaphragm and electrode changes due to therma l expansion of the sensor’s chassis, both capacitances will change equally, thus false capacitance changes brought about by ther mal effects can be distinguished from true pressure readings.

3. Brooks places a Plasma Shield in front of the diaphragm to protect the diaphragm from the process environment. It is an Inconel

plate that covers

the entire front face of the diaphragm that traps condensable materials before

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_DESCRIPTION

2.0

they can deposit onto the diaphragm. This shield also pro tect s the diap hrag m from thermal radiation.

4. Brooks uses a Guard Volume, which is an annular vacuum surrounding the sensor. This acts as a thermal insulator shielding the sensor from ambient temperature variations and also as a “trash collector” for condensable and deposited process residual matter.

5. Electrodes can behave as antennae for RF radiation and strong magnetic fields. Brooks places Electrode Guards on th e elec tr o des as pr otection against these interferences.

6. Ruby Rollers have been added to reduce the frictional forces, thermal expansion stress and vibration effects on the measurement electrode which can cause shifts and distortions in the indicated pressure readings.

7. Brooks creates a consistent stable thermal environment for the sensor by use of heaters. This increases stability (especially in lower ranges), reduces condensation on sensing diaphragm through heating the sensor to a slightly greater temperature than the process. When using a heated manometer, Brooks recommends use of an isolation valve to prevent loss of he at when the chamber (and thus the manometer) is vented to atmosphere.

2.4 DESIGN OVERVIEW

Brooks CMXs are typically used in conjunction with pressure controllers (such as the Brooks’s ACX and Intellisys™ Series) or digital displays to display the measured pressure. The use of heated CMX may require a power supply booster to provide the additional power necessary to operate the heater.

Figure 3 shows a typical configuration using the Brooks CMX.

Figure 3: Typical System

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_DESCRIPTION

2.0

2.5 RELAYS

Two electromechanical relays are provided in CMX configured with the 15-Pin D-Sub connector option (see Ordering Code on page 11). The relays are UL recognized components

rated for 100,000 cycles at 1A, 30V DC, Resistive.

Associated LED indicators located on top of the device illuminate when the coil of the associated relay is energized. Each relay has a normally open (NO) and a normally closed (NC) contact with a common connection (Single Pole Double Throw). The contacts are accessed through the 15-Pin connector. (refer to Figure 21, CMX RS-485 Port (2.5mm Jack), on Page 20)

The relays are digitally programmed (with use of the CMX User Software) individually for the following properties:

(Refer to the CMX Software Manual for procedures to set the relays)

• Direction of Relay Actuation: Above Setpoint (ascending pressure): Relay is energized above the setpoint.

Below Setpoint (descending pressure): Relay is energize d be low the setp oint.

• Setpoint Pressure: Pressure value, in percent of full-scale (0-100%) at which the relay actuates.

• Hysteresis: The amount by which the pressure must return past the setpoint value before

the relay will be de-actuated (adjustable from 0-20% of full-scale).

The following graphs provide an example of the relay behavior:

Figure 4: Direction of Relay Actuation: Above Setpoint

Figure 5: Direction of Relay Actuation: Below Setpoint

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_DESCRIPTION

2.0

Programming is accomplished through a sepa rate control and monitori ng device plugged into the RS-485/2.5 mm serial Diagnos tics port (DIAG) connection located on the top of the CMX (See Figure 6). The 2.5 mm serial po rt connection communicates through a proprietary Brooks communication protocol at 9600 baud. The following information can be read from the CMX for each relay:

• Setpoint value

• Hysteresis value

• Direction of operation

• Relay status (actuated, de-actuated)

Figure 6: Typical CMX User Software Connection

The programmable configuration is stored internally in non-volatile memory and restored to working memory upon application of power or reset of the CMX.

2.6 ZERO OUTPUT BIAS CONTROL

NOTE: The following method for setting the Output Bias is based on using the CMX User Software Graphical User Interface (GUI). If the Software is not available, call a Brooks Technical Service representative for assistance.

In some applications, the process tool is not able to achieve a base pressure low enough to correctly zero the gauge. Typically, CMXs should be zeroed at a base pressure five decades below the gauge full-scale range. As an example, a 10T

-4

CMX should be zeroed at a chamber pressure of 1x10

Torr.

If the chamber cannot be pumped down to the appropriate base pressure, use the Bias Adjust Control to set the desired output pressure signal.

The Zero Output Bias Control allows you to add or subtract a bias vo lt age to the pressure output signal as shown in Figure 7. The units for the Output Bias adjustment are in mV and have a maximum adjustment capability of ±250 mV.

Procedure for Using the CMX Output Bias Adjustment:

1. Pump the chamber down to the minimum achievable pressure.

2. Determine the actual chamber pressure using an appropriate method.

3. DO NOT press the Zero Button on the gauge. (Doing so will cause the CMX to attempt to zero the gauge. If the chamber pressure is too high, the automatic

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_DESCRIPTION

2.0

zero adjust operation will fail anyway. If the chamber pressure is within the adjustment range, the CMX will zero to that pressure, which is not the actual pressure in the chamber. That is, the CMX will output a zero signal at a non-zero chamber pressure.)

4. Connect CMX GUI to CMX and verify communication. (Refer to the CMX User Software manual, page 37.) Set Bias Adjust Control value, in units of mV, to achieve the desired analog output voltage. Using the actual chamber pressure from Step “2” above, adjust the Zero Bias Adjust Control until the analog output voltage matches the known chambe r pressure or desired of fset signal.

Figure 7: CMX Bias Adjustment Control Block Diagram

2.7 CMX OPERATING TEMPERATURES

A CMX is heated to a constant temperature to prevent ambi ent temperature fluctuations from affecting the sensor output signal, and preven t the formation of condensable deposits in the measurement chamber and on the diaphragm of the sensor.

Table 2 is a general guideline for selecting the most suitable CMX for an application. For further information contact Brooks for specific recommendations. This manual provides information to install and operate the following CMX models.

Table 1: CMX Model Description

Model Description

CMX45 Digital CM, heated to 45°C

CMX100 D igital CM, heated to 100°C

CMX160 D igital CM, heated to 160°C

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Control Range

Measurement Range

Full-Scale DeviceRange (Torr)

1000

100

2 1

0.1

1000

100 10 2 1

0.1

Process Pressure(Torr)

10 10 10 10 10 1 10 100 1000

-5 -4 -3 -2 -1

_DESCRIPTION

2.0

Table 2: CMX Model Application

MODEL

APPLICATION PROCESS CMX45 CMX100 CMX160

Metal NR R OK

Oxide R OK OK

Etch Silicon/

CVD Silicon/Poly-

PVD R OK NR

R = RECOMMEND OK = ACCEPTABLE NR = NOT

Polysilicon

Dielectric OK R NR

Photoresist R OK OK

Metal NR OK R

OxideOKROK

silicon

Dielectric NR OK R

ROKOK

OKROK

RECOM-

MENDED

2.8 PRESSURE RANGE SELECTION CRITERIA

When selecting a capacitance manometer, the measurement range of the instrument should be considered especially if the CMX is part of a closed loop pressure control system. In general, CMX measures over 4 decades (from their full scale range) and can be used in closed loop pre ssure control systems over a maximum of 3 decades.

Measurement Range = 4 decades Control Range = 3 decades

Figure 8: Measurement and Control Ranges of CMX

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_DESCRIPTION

2.0

2.9 PRODUCT SPECIFICA TIONS

Table 3: Digital CM Specifications

GAUGE OPERATING TEMPERATURE

45°C 100°C 160°C

Range 0.1, 1, 2, 10, 100, 1000 Torr 1, 2, 10, 100, 1000

Accuracy

1000 Torr

100 Torr 20 Torr 10 Torr 2 Torr 1 Torr

<1 Torr

Measurement Range 4 Decades Temperature Effects on Zero

(TCZO) Temperature Effects on Span

(TCFSO) Ambient Operating

Temperature Exposed Materials Volume 17cc Approximate Shipping Weight 1.40 lbs (726 grams) Overpressure Limit 17 PSIA or 125% of Full Scale, whichever is greater Power Input

Initial Warm-up Analog (Typical)

Steady State Analog (Typical)

3,4

Initial Warm-up -

15°C to 35°C 15°C to 45°C 15°C to 35°C

270mA @ 15 VDC (±5%) 620mA @±15 VDC (±5%) 620mA @±15 VDC (±5%)

175mA @ 15 VDC (±5%) 350mA @±15 VDC (±5%) 550mA @±15 VDC (±5%)

400mA @ 24 VDC 900mA @ 24 VDC 950mA @ 24 VDC

DeviceNet® (Typical)

Steady State -

300mA @ 24 VDC 600mA @ 24 VDC 600mA @ 24 VDC

DeviceNet (Typical)

Output 0 - 10 VDC (5k load) minimum Relay Contact Rating

(available on 15 Pin Male DSub Interface)

Electrical Connector Type

Analog RS-485 DeviceNet

Certification Fully CE Compliant to EMC Directive 89/336/EEC

Includes hysteresis, linearity, and repeatability within the calibrated range at 21°C.

Ambient Operating Temperature with 50 linear feet of airflo w = 15-45°C.

15 Pin Male D-Sub Model requires an additional 60mA to power the internal relays (if energized).

Process relays are UL® recognized components rated for 100,000 cycles at 1A, 30V DC, Resistive.

All specifications subject to change without notice.

9-pin D-sub male or 15-pin D-sub male

2.5 mm mini jack for RS-485 Communications Port 5-pin eurofast

± 0.25% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.25% of reading

± 0.002% of FS/°C

± 0.02% of FS/°C

Inconel

and/or AISI 316L Stainless Steel

1A @ 30 VDC / 0.3A @ 125 VDC

(DeviceNet) w/9-pin D-sub Female (Analog)

± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.35% of reading ± 0.35% of reading

N/A

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*Contact Brooks Technical Support for other options

Calibration Orientation

H = Horizontal - Standard

Calibration Orientation

V = Vertical (for 1 Torr and all

mTorr Ranges)

Reserved for Brooks Use

CMX456789101112

Copy Model Number Here

123456789101112

CMX

Code

0= 1= 2= 3= 4= 5= 6= 7= 8= 9= A= B= C=

D= E=

N= R= T=

U= V= F=

8 UJR (1/2") female

Right angle 8 UJR (1/2") female 30mm +/- 2mm

Short KF16 flange, (A' dimension = 18mm (7.08")

4 VCR (1/4") female

Reserved

KF16 flange with pre-filter assy (A33355-4001)

Wrapped tube with KF16 flange

Short 8 VCR (1/2") male

Reseved

Long 8 VCR (1/2") measues 2-5/8" +1/16" from base plate to toroid of gland

KF16 - right angle

Short 8 VCR (1/2") female

8 VCR (1/2") female - right angle

2.750" CF

1" additional to tube stub

KF 25 flange

8 VCR (1/2") female

Mini CF

8 VCO (1/2") female (non-standard length)

Fitting Type

0.5" od tube stub (no fitting)

KF 10 flange

KF 16 flange

Code

1 = 2 = 3 = 4 =

5 =

8 =

L = R =

Note:

1" additional to tube stub

15-Pin w/Fine/Coarse Compatible Zero Switches, Pin 13 & Pin 14 configured as Inputs for Unique Remote Zero Functionality. Indy Standard Firmware

1,2 and 3 are available on CMX45 and CMX100. 1, 3, 4 and 5 are available on CMX160

Connector/Interface

9-Pin "D" Male Connector

15-Pin "D" Male Connector with Process relays

15-Pin w/Fine/Coarse Compatible Zero Switches, Pin 13 & Pin 14 configured as Outputs. Indy Standard Firmware

DeviceNet w/Analog 9-Pin "D" Female Connector

15-Pin "D" Sub Connector with 2 Process Relays and a Temperature in Control Relay

15-Pin "D" Sub Connector with 1 Process Relay, 1 Temperature in Control Relay, and an Overheat Indicator Relay

Range

100 m Torr 250 m Torr 500 m Torr

1 Torr 2 Torr

5 Torr 10 Torr 20 Torr 50 Torr

100 Torr 500 Torr

1000 Torr

1.33 mbar 2 mbar 5 mbar

10 mbar 100 mbar 500 mbar

1000 mbar

13.33 Pa

33.32 Pa

66.65 Pa

133.3 Pa

266.6 Pa

666.6 Pa

1.333 kPa P11

2.666 kPa P12

13.33 kPa P21

66.66 kPa P25

133.3 kPa P31

Code

M11

M25

M50

T01

T02

T05

T11

T12

T15

T21

T25

T31

C01

C02

C05

C11

C21

C25

PX1

PX2

PX5

P01

Conversion

100 m Torr

5 Torr

100 m Torr

250 m Torr

500 m Torr

1 Torr

1000 Torr

C31

100 Torr

500 Torr

10 Torr

20 Torr

P02

2 Torr

P05

Operating Temperature

1 = CMX45 (45°C) 2 = CMX100 (100°C) 3 = CMX160 (160°C)

Figure 9: Ordering Specifications

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2.10 ORDERING SPECIFICATIONS

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_DESCRIPTION

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2.11 PHYSICAL DIMENSIONS

“A” DIMENSION* “B” DIMENSION

FITTING TYPE FITTING

.05” OD Tube 0 26.3mm [1.04”] 141.70mm [5.58”] KF-10 Flange 1 39.0mm [1.54”] 154.40mm [6.08”] KF-16 Flange 2 39.0mm [1.54”] 154.40mm [6.08”] KF-25 Flange 3 30.1mm [1.19”] 145.50mm [5.73”] 8 VCR Female 4 52.24mm [2.06”] 167.64mm [6.60”] Mini CF 5 27.56mm [1.09”] 142.96mm [5.63”]

*See Figure 14:, Dimensions With Connectors. For other fittings and flanges call Brooks Technical Support.

CODE

CMX45 / CMX100 OVERALL LENGTH

Figure 10: CMX45 and CMX100 Dimensions of Body and Tube with Analog Interface

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_DESCRIPTION

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“A” DIMENSION “B” DIMENSION

FITTING TYPE FITTING

.05” OD Tube 0 26.30mm [1.04”] 154.30mm [6.08”] KF-10 Flange 1 39.00mm [1.54”] 167.00mm [6.58”] KF-16 Flange 2 39.00mm [1.54”] 167.00mm [6.58”] KF-25 Flange 3 30.1mm [1.19”] 158.10mm [6.23”] 8 VCR Female 4 52.24mm [2.06”] 180.24mm [7.10”] Mini CF 5 27.56mm [1.09”] 155.56mm [6.13”] *See Figure 14:, Dimensions With Connectors. For other fittings and flanges, call Brooks Techni-

cal Support.

CODE

CMX45 / CMX100 OVERALL LENGTH

Figure 11: CMX45/CMX100 Dimensions of Body and Tube with Devic eNet Interface

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_DESCRIPTION

2.0

“A” DIMENSION “B” DIMENSION

FITTING TYPE FITTING

CODE

.05” OD Tube 0 26.30mm [1.04”] 159.30mm [6.28”] KF-10 Flange 1 39.00mm [1.54”] 172.00mm [6.78”] KF-16 Flange 2 39.00mm [1.54”] 172.00mm [6.78”] KF-25 Flange 3 30.1mm [1.19”] 163.10mm [6.33”] 8 VCR Female 4 52.24mm [2.06”] 185.40mm [7.30”] Mini CF 5 27.56mm [1.09”] 160.56mm [6.43”]

* See Figure 14:, Dimensions With Connectors. For other fittings and flanges call Brooks Technical Support.

CMX160 OVERALL LENGTH

Figure 12: CMX 160°C Dimensions of Body and Tube with DeviceNet Interface

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