Brooks Instrument CMC User Manual
Installation and Operation Manual
X-V AC-CMC-eng
Part Number: 541B153AAG
November, 2011
Brooks® CMC Series
Brooks
CMC Series
Capacitance Manometers
®
CMC Series
Sub D 9-Pin
Capacitance Manometer
Installation and Operation Manual
X-V AC-CMC-eng
Part Number: 541B153AAG
Brooks® CMC Series
November , 201 1
Essential Instructions
Read before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must
be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal
injury.
European Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive
(PED).
• The Specifications Section of this manual contains instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
European Electromagnetic Compatibility (EMC)
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (2004/108/EC (EMC directive 89/336/EEC)).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen
clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures
must be observed during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Installation and Operation Manual
X-V AC-CMC-eng
Part Number: 541B153AAG
November, 2011
Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Y ours sincerely ,
Brooks Instrument
Brooks® CMC Series
Brooks® CMC Series
Installation and Operation Manual
X-V AC-CMC-eng
Part Number: 541B153AAG
November , 201 1
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_CONTENTS
_1.0 INTRODUCTION 1
_2.0 INSTALLATION 2
_2.1 MECHANICAL INSTALLATION 2
_2.2 ELECTRICAL INSTALLATION 3
_3.0 OPERATION 6
_3.1 OPERATING SPECIFICATIONS 7
_3.2 CHECKING AND ZERO ADJUSTMENT 7
_3.3 SPAN (FULL SCALE) ADJUST & CALIBRATE 7
_3.4 CALIBRATION SERVICES 7
_4.0 MAINTENANCE AND TROUBLESHOOTING 8
_4.1 RETURNING THE CMX/CMC SERIES FOR REPAIR 8
_4.2 RETURN INSTRUCTIONS 8
_5.0 ESSENTIAL INSTRUCTIONS 9
WARRANTY SALES/SERVICE Back Cover
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_INTRODUCTION
1.0
1.0 INTRODUCTION
The Brooks CMC Series Capacitance Manometer is a temperature compensated, absolute pressure transducer designed for accurate and repeatable vacuum measurements. Various full scale ranges are available from 10 Torr up to
1000 Torr. The units of measurement may be specified in Torr (mmHg), mBar, or
kPa.
The CMC Series operates from a 12-30 VDC power supply and provides a 0 to
10 VDC signal output that is linear with pressure and independent o f gas composition. The CMC Series is pin for pin compatible with other competitive capacitance manometers. Superior EMI/RFI performance is achieved by the use of a
metal case in conjunction with surge a nd ESD suppression compone nts and RFI
filtering on the inputs and outputs. The CMC Series has easy access to multiturn potentiometers for fine Zero and Span adjustments. Inconel
®
is used for all
wetted materials for compatibility with corrosive gases. A wide range of pressure/vacuum fittings are available.
The high accuracy pressure sensing element used in the CMC Series is a patented variable capacitance sensor. A centrally located feed through assembly
supports a circular electrode in close proximity to the back surface of the diaphragm. Together, the electrode and diaph ra gm fo rm a varia ble capacitor within
a small reference vacuum chamber. As the pressure increases, the diaphragm
deflects and the gap between the electrode and diaphragm red uces, causing an
increase in the capacitance. This change in capacitance is detected and converted to a highly accurate linear DC electronic signal by a unique custom integrated circuit utilizing a patented charge balance principle.
Excellent zero stability and barometric insensitivity is achieved through the patented sensor design. The CMC Series sensor contains no fragile or complex
parts found in ceramic based capacitance manometers. The all-welded construction eliminates stability issues inherent in other designs due to frictional
contact between dissimilar materials.
p.1
Fitting Type Code Dim A
0.5" OD Tube
0
23.95 mm [0.94"]
KF-16 Flange
2
27.68 mm [1.09"]
KF-25 Flange
3
27.68 mm [1.09"]
8 VCR
®
Female
4
42.82 mm [1.69"]
_INSTALLATION
2.0
2.0 INSTALLATION
2.1 Mechanical Installation
Remove all packaging material, the protective flange cover and visually check
the CMC Series. If the CMC Series appears damaged, notify Brooks Instrument
immediately. Retain packaging materials for inspection. Do not use if damaged.
If the CMC Series is not going to be used immediately, then replace the protective flange cover and store in an area where the temperature range is controlled
between -50°C to +125°C.
CMC Series can be mounted in any orientation on the vacuum system. To avoid
the build-up of debris or condensable material in the measurement cavity of the
CMC Series (which may cause measurement errors), it is recommended that
you install the CMC Series vertically with the tube facing down. Outline drawings
showing the external dimensions are shown in Figure 1, Figure 2, and Figure 5.
To connect the CMC Series to your system, use the appropriate hardware for the
type of fitting:
• Use a Cajon
®
Ultra Torr type of compression coupling to connect to the 0.5”
OD tube.
• Use an O-ring/centering ring and clamp to connect to the KF-16 and 25 flange
options.
NOTE: A stepped O-ring may be used to connect the KF-16 flange to an KF-10 flange on
the system.
Use a Male VCR® style face seal fitting and sealing gasket to connect the VCR®
female fitting.
NOTE: Tighten threaded fittings in accordance with the manufacturer’s specifications.
38.10 mm
Ø
[ 1.50"]
55.42 mm
[2.18"]
Ø
52.37 mm
[2.06"]
Dim A
SPAN
ZERO
Figure 1: CMC Series 9-Pin Dimensions
p.2
Fitting Type Code Dim A
0.5" OD Tube
0
23.95 mm [0.94"]
KF-16 Flange
2
27.68 mm [1.09"]
KF-25 Flange
3
27.68 mm [1.09"]
8 VCR
®
Female
4
42.82 mm [1.69"]
Pin Function
1
+ Signal Output
2, 3, 5, 6,
& 7
Not Used
4
Power Supply + VDC
8
Signal Output Common
9
Power Supply Common
_INSTALLATION
2.0
Ø1.50"
[Ø38.10mm]
Ø
38.10 mm
[ 1.50"]
mm
[in]
52.58 mm
[2.42"]
Ø
52.37 mm
[2.06"]
Dim A
PIN 1
ZEROSPAN
17.53mm
[0.69"]
MATING CONNECTOR
Figure 2: CMC Series 5-Pin Terminal Strip Dimensions
2.2 Electrical Installation
CMC Series operates from a 12-30 VDC regulated power supply. The pin outs
for the 5-Pin terminal strip, D-Sub 9-Pin male connector, and D-Sub 9-Pin male
connector with 7 inch Pig Tail are shown in Figure 3, Figure 4 and Figure 5.
NOTE: The ground of any external power supply and readout system should be the
same as the transducer ground (chassis ground) to minimize any possible ground
loops, which may effect the performance and stability of the transducer.
NOTE: The CMC Series meets CE mark requirements and complies with EMC Directive
89/336/EEC. To ensure compliance when installed, an overall metal braided
shielded cable (and Metal shielded connectors for the D-Sub connector option)
connected to chassis ground at both ends is required.
Ø1.50"
[Ø38.10mm]
0.12"
PIN 1
ZEROSPAN
[3.05mm]
Figure 3: D-Sub 9-Pin Male Connector Pinout
p.3
Pin Function
1
Power Supply Common
2
Signal Output Common
3
+ Signal Output
4
Case Ground
5
Power Supply + VDC
Fitting Type Code Dim A
0.5" OD Tube
0
23.95 mm [0.94"]
KF-16 Flange
2
27.68 mm [1.09"]
KF-25 Flange
3
27.68 mm [1.09"]
8 VCR
®
Female
4
42.82 mm [1.69"]
_INSTALLATION
2.0
Ø1.50"
[Ø38.10mm]
PIN 1
TERMINAL STRIP
0.120"
[3.05mm]
SPAN
ZERO
Figure 4: Terminal Strip Pinout
38.10 mm
Ø
[ 1.50"]
mm
[in]
Ø
52.37 mm
[2.06"]
Dim A
ZEROSPAN
152.4mm
[6.0"]
Pin 2 - Pressure Output
Pin 1
Pin 12 - Signal Common
Pin 5 - Power Return
Pin 7 - +12 to 30 Vdc Supply
Pin 15 - Case Ground
Figure 5: 6 Inch Pig Tail with 15-Pin D-Sub Male Connector
p.4
_OPERATION
3.0
3.0 OPERATION
For most accurate pressure measurement, allow the CMC Series to warm up for
at least 15 minutes. After installation, periodically check the zero output reading
to verify correct output. Adjust the zero potentiometer, if incorrect (See Calibration and Adjustment Section for Zero adjustment instructions).
Table 1 indicates the lowest pressures available for reading and pressure control
for each range of the CMC Series. The lowest suggested pressure available for
reading is limited by the resolution and the accuracy of the CMC Series. This is
directly related to the electrical noise on the signal output and can be significantly effected by incorrect electrical ground connection, or connection to an
electronically noisy power supply or readout instrument. Improved results may
be obtained if the transducer is operated in an environment with stable temperature and air flow. The lowest recommended pressure used for control applications, such as a closed loop downstream pressure control system is based on a
signal output of 50 mV.
Table 1: Recommended Lowest Pressures Available for Reading &
Pressure Control
Full scale Range
10 Torr 0.005 Torr 0.05 Torr
20 Torr 0.010 Torr 0.10 Torr
100 Torr 0.050 Torr 0.50 Torr
1000 Torr 0.500 Torr 5.00 Torr
10 mbar 0.005 mbar 0.05 mbar
100 mbar 0.05 mbar 0.5 mbar
1000 mbar 0.5 mbar 5 mbar
1.333 kPa 0.0006 kPa 0.0066 kPa
13.333 kPa 0.0066 kPa 0.0666 kPa
133.32 kPa 0.0666 kPa 0.6666 kPa
Recommended Lowest
Pressure Reading
Recommended Lowest
Pressure for Control
Application Matrix
Pressure Measurement
Upstream Pressure Control
Back Side Wafer Cooling
Downstream pressure Control
R = Recommended
A = Acceptable
Table 2: Applications
Full Scale Pressure Range
(Torr)
10 20 100 200 1000
RRRRR
RRRRR
AARRR
RRRRR
p.5
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