Brooks Instrument 5866M User Manual

Installation and Operation Manual

X-PR-5866E-5866M-eng
PN 541-C-005-AAA
April, 2008

Brooks® Compact Pressure Controller

Model 5866

Model 5866

Section 1
Introduction

Section 2
Installation

Contents

Contents

Page

Purpose.......................................................................................1-1

Description..................................................................................1-1

Principle of Operation..................................................................1-1

Specifications..............................................................................1-6

Controller Specifications..............................................................1-7

Receipt of Equipment..................................................................2-1

Recommended Storage Practice................................................2-1

General........................................................................................2-1

Gas Connections.........................................................................2-1

Installation...................................................................................2-2

In-Line Filter................................................................................2-3

Electrical Interface.......................................................................2-3

Remote Setpoint (Command) Input............................................2-3

Valve Override.............................................................................2-5

Precision 5V Reference...............................................................2-5

Remote Transducer Input............................................................2-5

Valve Test Point...........................................................................2-5

Optional Valve Return..................................................................2-6

C
O
N
T
E
N
T
S

Section 3
Operation

Section 4
Maintenance

Section 5
Troubleshooting

Operation.....................................................................................3-1

Proportional Band and Integration Time Constant Adjustment...3-1

General........................................................................................4-1

General........................................................................................5-1

Troubleshooting...........................................................................5-1

Disassembly................................................................................5-2

Assembly.....................................................................................5-5

Adjusting the Control Valve..........................................................5-6

Orifice Sizing..............................................................................5-12

i

Brooks Instrument Model 5866 Mass Flow Controller

Section 6
Calibration

Calibration Procedure..................................................................6-1

Gas Conversion Factors..............................................................6-2

Section 7
Parts List

General........................................................................................7-1

Appendix A
CE Certification

CE Certification for Mass Flow Equipment................................A-1

Figures

1-1 Model 5866 Pressure Transducer.................................1-2

1-2 Model 5866 Silicon Chip Configuration.........................1-2

1-3 Model 5866 System Block Diagram..............................1-2

1-4 Model 5866 Dimensions...............................................1-3

1-5 Model 5866 Upstream Controller..................................1-4

1-6 Model 5866 Downstream Controller.............................1-4

1-7 Typical Application of Downstream Controller...............1-5

1-8 Typical Application of Upstream Controller...................1-6

2-1 Customer Connections and Settings............................2-4

3-1 Error Signal Step Response.........................................3-1

3-2 Proportional Control......................................................3-3

3-3 Integral Control.............................................................3-3

3-4 P.I. Control.....................................................................3-4

5-1 Torque Sequence for the Valve Retainer Plate.............5-6

5-2 Adjustment Test Setup..................................................5-7

5-3 Valve Adjusting Spacer Locations.................................5-9

5-4 Valve Adjusting Spacer Locations, Normally Open

(N.O.) Valve..................................................................5-11

5-5 Application Configuration.............................................5-12

5-6 Example Application of Orifice Sizing Procedure........5-14

7-1 Model 5866E Parts Drawing.........................................7-2

7-2 Model 5866M Parts Drawing.........................................7-4

Page

Tables

ii

2-1 D-Connector Pin Arrangement......................................2-5

5-1 Bench Troubleshooting..................................................5-3

5-2 Sensor Troubleshooting.................................................5-3

5-3 Minimum Flow Values..................................................5-10

5-4 Model 5866 Orifice Selection.......................................5-14

6-1 Conversion Factors.......................................................6-4

7-1 Model 5866E Parts List.................................................7-3

7-2 Troubleshooting Aids and Spare Parts Kit for

Model 5866...................................................................7-3

7-3 Model 5866M Parts List................................................7-5

Introduction

1-1 Purpose

1-2 Description

Introduction

Section

1

This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks® Model
5866 Pressure Controller. This manual is organiz ed into seven sections:

Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Troubleshooting and Repair
Section 6 - Calibration
Section 7 - Spare Parts

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5866.

The Brooks Model 5866 Pressure Controller accurately measures and
controls upstream or downstream pressures. The heart of the system is a
solid state pressure transducer which produces an electrical output
proportional to pressure. The electronics use this signal to operate the
control valve and to pro vide an output signal.

1-3 Principle of Operation

The pressure to be measured acts on a stainless steel diaphragm. Via
silicone oil, this pressure is transmitted to the actual sensing element, a
silicon chip (refer to Figure 1-1). The chip consists of an anisotropically
etched diaphragm with four piezo resistiv e resistors , configured in a
Wheatstone bridge, etched into its surface (refer to Figure 1-2). The
mechanical deformation of this diaphragm results in an imbalance of the
resistors which is proportional to pressure. An amplifier provides output to
the control circuit as well as the electrical output signal.

In addition to the pressure transducer the Model 5866 has an integral
control valve and control circuitry. A difference between the pressure and
setpoint signals will cause the electronics to modulate the control valve to
maintain the desired pressure. A system block diagram is shown in Figure
1-3.

The integration of pressure transducer , control electronics and control
valve into one unit results in a compact siz e . The mounting dimensions are
comparable to a mass flow controller. Refer to Figure 1-4.

The “upstream pressure regulation mode” shown in Figure 1-5 places the
pressure controller at the outlet of the pressure vessel. The pressure in the
process upstream of the controller will be constant independent of
downstream variation. Pressure measurement and control takes place at
the outlet side of the pressure vessel.

1-1

Brooks Instrument Model 5866 Pressure Controller

Figure 1-1. Model 5866 Pressure
Transducer .

Figure 1-2. Model 5866 Silicon Chip
Configuration.

Figure 1-3. Model 5866 System Block Diagram (Downstream version).

REMOTE

TRANSDUCER

INPUT

COMMAND

INPUT

COMMAND

POT

PRESSURE

TRANSDUCER

COMPARISON

AMPLIFIER

VALVE

OVERRIDE

LOGIC

5 VOL T

REFERENCE

VALVE
DRIVE

VALVE

OVERRIDE

®

Model 5866

CONTROL

VALVE

= OPTIONAL

1-2

Introduction

.75

(19.0)

9/16 - 18 UNF
(Both Ends)

Integral

Adjustment

Upstream Inlet

(Downstream Outlet)

"A"

0.50

(12.7)

1.50

(38.0)

5.23

(133.0)

3.00

(76.2)

15 Pin Male
D-Connector

Upstream Outlet

(Downstream Inlet)

Proportional
Adjustment

P
I

Upstream/Downstream
Flow Indicator Label

Valve Height w/

Downstream Adapter

.14

(3.6)

.39

(10.0)

.71

(18.0)

2.58

(65.4)

8 - 32 UNC - 2B x 1/4 Deep
(2 Mounting Holes)

1.50

(38.0)

15 Position Male
D-Connector

.71

(18.0)

"Z"

8-32-UNC x 1/4 Deep,
(2 Mounting Holes)

.39

(9.9)

.28

(7.0)

2.07

(52.6)

NOTE:

1. 1/4 VCR Fitting Shown.

1.48

(37.7)

"X"

5.18

(131.5)

"Y"

(See Note)

Inlet

FLOW

.50

(12.7)

.74

(18.7)

Outlet
(See Note)

1.48

(37.7)

Figure 1-4. Model 5866
Dimensions.

Model 5866E

Connection "A" Dim.

1/4" (M) VCR 4.88/124.0
1/4" (M) VCO 4.56/115.8
1/8" Compression 4.84/122.9
1/4" Compression 5.02/127.5
3/8" Compression 5.14/130.6
6 mm Compression 5.02/127.5
10 mm Compression 5.16/131.1
3/8" or 1/2" (M) VCR 5.18/131.6
3/8" or 1/2" (M) VCO 5.00/125.0
1/4" (F) NPT 5.36/136.1

Model 5866M

Connection "X" Dim. "Y" Dim. "Z" Dim.
1/4" Tube VCR 4.88/124.8 3.22/81.8 1.11/28.2

1-3

Brooks Instrument Model 5866 Pressure Controller

When the pressure controller is used in the “downstream pressure
regulation” mode as shown in Figure 1-6, the pressure in the process
vessel will be constant independent of upstream variation, provided the
upstream pressure does not fall below the do wnstream setting. Pressure
measurement and control takes place at the inlet side of the pressure
vessel.

The most common application of the pressure controller is in conjunction
with a mass flow controller (refer to Figure 1-7). Mass flow controllers
accurately measure and control the required quantity of process gas flows.
In this figure, the mass flow controllers will supply the desired quantity and
mixture of process gas while the pressure controller will maintain the
desired reactor pressure by varying the gas outflow. This system allows
the process reactants to be varied while maintaining a constant reaction
pressure.

The Model 5866 Pressure Controller has proportional and integral control
action. The reset or integral control is combined with the proportional
control action (normally referred to as P.I. control). Both proportional band
(0.5% to 100%) and integration time (0.05 to 5 seconds) are customer
adjustable. Tuning of the pressure controller to perform as a stable
optimum for each application is perf ormed in-process by adjusting easily
accessible P.I. action potentiometers (refer to Figure 1-4).

Figure 1-5. Model 5866 Upstream
Controller.

Figure 1-6. Model 5866
Downstream Controller .

Note: The Controller Mode and valve type are determined at the time of
order. Mechanical parts must be changed to convert modes or valve types.

Model 5866E

Vessel

Pressure Controller

1-4

Model 5866

Pressure Controller

Vessel

Introduction

Upstream Controller Mode sets the controller to maintain the upstream

process pressure constant, independent of downstream pressure or flow
variations (ref. Fig. 1-5). For jumper positions on the PC board see Figure
2-1.

Downstream Controller Mode sets the controller to maintain the
downstream process pressure constant, independent of upstream
pressure or flow variations. For jumper positions on the PC board, see
Figure 2-1.

Normally Open/Normally Closed Control Valve - Both Normally Open
(N.O.) and Normally Closed (N.C.) configurations are a v ailable. Normally
Closed is the standard valve type . The Normally Open valve may be
specified when Safety, Operation or Process considerations warrant this
type of valve .

Remote Pressure Sensor Input allows the use of the integral control
electronics and the valve to regulate the process pressure in response to
the remote pressure transducer signal (refer to Section 2-11).

Voltage and Current Inputs/Outputs - Jumpers are provided on the PC
board to allow 0-5 V, 0-10 V, 0-20 mA or 4-20 mA input/output. 0-5 V input/
output is the standard configuration. F or maxim um accur acy, the Model
5866 should be calibrated with the input/output configuration it will
ultimately use. Controllers will be configured at the factory if requested at
the time of ordering.

Figure 1-7. Typical Application of Downstream Controller.

®

®

Reactor

®

®

Model 5866E

Mass Flow

Controllers

Vacuum Pump

1-5

Brooks Instrument Model 5866 Pressure Controller

V alve Override permits the user to fully open and close the valve

independent of the command setting (refer to Section 2-9).
Precision +5 Volt Ref erence is pro vided to be used in conjunction with a

user supplied command potentiometer to generate a 0-5 V command
signal.

1-4 Specifications

Do not operate this instrument in excess of the specifications listed
below. Failure to heed this warning can result in serious personal
injury and/or damage to the equipment.

Pressure Ranges

7.25 psia to 1450 psia full scale (Elastomer Seals)

7.25 psia to 72.5 psia full scale (Metal Seals)

WARNING

Figure 1-8. Typical Application of Upstream Controller.

®

®

1-6

®

Mass Flow

Controllers

®

Model 5866E

Reactor

Introduction

Flow Rates

0-30,000 sccm* (Nitrogen Equivalent).

*Standard pressure and temperature in accordance with SEMI (Semiconductor
Equipment and Materials Institute) standard: 32°F (0°C) and 101 kPa (760 Torr). Other
reference conditions available upon request.

Accuracy

±1.00% full scale including linearity and hysteresis

Repeatability

±0.1% full scale

Control Range

20:1

Zero Stability

0.001% full scale per 30 days

T emperature Range (ambient and gas)

32°F to 150°F (0°C to 65°C)

T emperature Coefficient

0.1% full scale/° C

Maximum T ransducer Pressure

21.75 psia for 0-14.5 psia range

108.5 psia for 14.5-72.5 psia range
435 psia for 72.5-290 psia range
1,450 psia for 290-1,450 psia range

Maximum Design Pressure

1,450 psig

1-5 Controller Specifications

Input/Output Offset

< 0.2% full scale (voltage), < 1.5% full scale (current)

Proportional Gain

Adjustable, 1 to 200%

Integration Time

Adjustable, 0.05 to 5 seconds

Control Action

Upstream or downstream pressure control

Valve Type

Standard: Normally Closed
Optional: Normally Open

Materials of Construction

Model 5866 Model 5866M
Wetted P arts 316 SS 316L V ar SS
Seals/V alve Seats Viton

®

Options Buna-N

®

Teflon

®

Kalrez

Metal

N/A

1-7

Brooks Instrument Model 5866 Pressure Controller

Power Requirements

N.C. 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
N.O. 10.5 watts, ±15 Vdc (±5%) @ 350 mA
Class III Equipment: The dc Mains input shall be supplied from a SELV
(Separated Extra-Low Voltage) source.

Output Signals

Standard: 0-5 Vdc min load resistance 1 k ohm
Optional: 0-10 Vdc min load resistance 2 k ohm, 0 or 4-20 mA into
maximum 500 ohm

5 Volt Reference Output

5 Volts ±0.2% min Load 1 k ohms.

Pressure Setpoint Signals

Standard: 0-5 Vdc input (impedance 1M ohm)
Optional: 0-10 Vdc input (impedance 1M ohm), 0 or 4-20 mA input
(impedance 250 ohm)

Remote Pressure Sensor Input

Standard: 0-5 Vdc input (impedance 1M ohm)
Optional: 0-10 Vdc input (impedance 1M ohm)

Dimensions

Refer to Figure 1-4

Valve Type

Standard: Normally Closed
Optional: Normally Open

Process Connections

Standard: 1/4" stainless steel compression fittings
Optional: 1/4" VCR

TM

, 1/4" VCOTM, 1/8" compression

Electrical Connection

15 pin D-Connector (DA-15P)

Environmental Conditions

Installation Category: “I”
Pollution Degree: 2
Humidity: 50-80% Relative Humidity
Meter Altitude: 6562 feet (2,000 meters)
For Indoor Use ONLY
Mains supply voltage fluctuations not to exceed ±10% of the nominal voltage

Environmental Effects

EMC Effects Meets the requirement of the EMC directive

(89/336/EEC) EN 61000-4-2 thru 4-8

PED Sound Engineering Practice (SEP)

1-8

Area classifcation and certification

Area Certified for use in hazardous areas in Europe

II 3 G EEx nA II T4
KEMA 03ATEX1532 X
Per EN 60079-15:2003

The modules shall be installed in a suitable enclosure providing a degree of
protection of at least IP54 according to EN 60529, taking into account the
environmental conditions under which the equipment will be used.

Installation

Installation

2-1 Receipt of Equipment

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
A report should be submitted to the Product Service Department, Brooks
Instrument, 407 West Vine Street, Hatfield, Pennsylv ania 19440.

Remove the en v elope containing the packing list. Carefully remov e the
equipment from the packing case. Make sure spare parts are not
discarded with the packing material. Inspect for damaged or missing parts.

2-2 Recommended Storage Practice

If intermediate or long term storage is required for the equipment, as
supplied be Brooks Instrument, it is recommended that said equipment be
stored in accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 70°F (21°C) nominal, 90°F (32°C) maximum/
45°F (7°C) minimum

2. Relative humidity 45% nominal, 60% maximum 25% minimum.

Section

2

2-3 General

2-4 Gas Connections

Upon removal from storage , a visual inspection should be conducted to
verify the condition of the equipment is “as receiv ed". If the equipment has
been in storage for an e xcess of ten (10) months or under conditions in
excess of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

A pressure controller system can be built in upstream or downstream
control configurations (refer to Figures 1-7 and 1-8). When the controller is
placed downstream (upstream pressure controller) of the pressure vessel,
the flow is usually determined by MFC(s) in the line upstream of the
vessel.

With the pressure controller upstream of the vessel (downstream pressure
controller), the most likely application is controlling a subatmospheric
pressure in the vessel. The inlet of the pressure controller can be at
atmospheric gas pressure or at vapor pressure of a liquid source. The flow
in this situation is usually determined by the characteristics of a vacuum
pump.

Standard inlet and outlet connections on the Model 5866 and 1/4"
compression fittings. Optional VCOTM and V CRTM connections are availab le
upon request.

2-1

Brooks Instrument Model 5866 Pressure Controller

Prior to installation, insure that all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troub leshooting.

2-5 Installation

Do not operate this instrument in excess of specifications. Failure
to heed this warning can result in serious personal injury and/or
damage to the equipment.

When installing the instrument, insure that no f oreign materials enter
the inlet or outlet of the meter. Do not remove the protective end
caps until time of installation.

Any Brooks Instrument mass flo w meter or flow contr oller with a 15
pin D-Connector PC Board bearing the "CE Mark" must use a 100%
shielded cable and metal shell mating connectors. The shield is tied
over 360 degrees to the shell at both ends. This is mandatory to be in
compliance with the EMC Directive (89/336/EEC). Refer to
Appendix A.

WARNING

CAUTION

CAUTION

Recommended Installation Procedures

a. The Model 5866 should be located in a clean, dry atmosphere relatively

free from shock and vibration.
b. Leav e sufficient room f or access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

CAUTION

When used with a reactive (sometimes toxic) gas, contamination
or corrosion may occur as a result of plumbing leaks or impr oper
purging. Plumbing should be checked carefully for leaks and the
controller purged with dry nitrogen before use. See Brooks’
Te chnical Bulletin T-086 for further information.

d. The Model 5866 pressure controller may be installed in an y position.
Note: The control valve in the Model 5866 provides precision control and is

not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line .

2-2

2-6 In-Line Filter

Installation

CAUTION

Since the Model 5866 Control Valve is not a positive shut-off, a
separate solenoid valve may have been installed f or that purpose.
It should be noted that a small amount of gas may be trapped
between the downstream side of the pressure controller and the
solenoid, resulting in a sur ge upon opening of the solenoid v alve.
This surge can be reduced in magnitude by locating the controller
and solenoid valve close together or by mo ving the solenoid v alve
upstream of the controller.

It is recommended that an in-line filter, such as the Brooks Model 5848, be
installed upstream from the controller to prev ent the possibility of any
foreign material entering the meter. The filter porosity should be
approximately ten times smaller than the orifice used in the installation,
however, it is recommended that the minimum porosity that does not
restrict the flow rate being used. The filtering element should be
periodically replaced or cleaned.

2-7 Electrical Interface

To insure proper operation, the Model 5866 must be connected per Figure
2-1. As a minim um, the following connections must be made for new
installations.

Pin Number Description

1 Command Common

2 or 4 Signal Output

5 +15 Vdc Supply
6 -15 Vdc Supply
8 Command Input

9 Supply V oltage Common
10 V oltage Signal Common
13 +15 Vdc Supply (Current I/O)

Note: The Command Return is internally connected to Signal Return and Supply
Voltage Common.

2-8 Remote Setpoint (Command) Input

If the pressure controller will be commanded by an external voltage or
current signal, the command potentiometer is not used.

The command hookup is as follows:
a. Voltage Signal: Connect the external command signal to Terminal 8 and

the external command return to Terminal 1. Refer to Figure 2-1 and
Table 2-1.

b. Current Signal: Connect the command signal to Terminal 8 and the

command return to Terminal 1. Jumper J4 should be ON. Refer to
Figure 2-1 and Table 2-1.

Note: The command return is internally connected to signal return and
power supply common. Current supplied by the device providing the set
point will not be returned on the current loop.

2-3

Brooks Instrument Model 5866 Pressure Controller

Figure 2-1. Customer Connections and Settings.

2-4

Table 2-1. D-Connector Pin Arrangement.

Installation

PIN NO. FUNCTION COLOR CODE

1 Command Common (Command Pot "CCW") Black
2 Voltage Signal Output White
3 Remote Valve Return Red
4 Current Output Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Voltage Out/External Valve Control Wht/Blk
8 Command Input (Command Pot "S") Red/Blk

9 Supply Voltage Common Grn/Blk
10 Voltage Signal Common Org/Blk
11 +5 Volt Reference (Command Pot "CW") Blu/Blk
12 Valve Override Blk/Wht
13 +15 Vdc Supply (1) Red/Wht
14 Chassis Ground (2) Grn/Wht
15 External Sensor Input Blu/Wht

2-9 V alve Override

The valve o v erride function allows full opening and closing of the v alv e
independent of the command setting.

The valve o v erride f or the pressure controller is as follows:
a. To open the valve, apply +15 Vdc to the valve override terminal.
b. To close the valve, apply -15 Vdc to the valve override terminal.

1

9

NOTES:

1. Pin 13 does not have to be
connected if current I/O is
not used.

2. Cable shield tied to chassis
ground in meter connector.

8

15

The valve o v erride function is accessed from Terminal 12 (refer to Figure
2-1 and Table 2-1).

Note: F or normal operation, Terminal 12 may be left open (floating) or
grounded.

2-10 Precision 5V Reference

The Model 5866 is equipped with a precision 5 Vdc reference. The
reference is used internally for precise zero adjustment and is also
availab le as a buffered output for use in conjunction with a 1 to 10 k ohm
potentiometer to provide 0-5 Vdc set-point. The 5 Vdc reference is
availab le at Terminal 11 (refer to Figure 2-1 and Table 2-1).

2-11 Remote Transducer Input

To allow the Model 5866 control circuitry and valve to be used with an
external transducer signal such as a capacitance manometer , J umper J2
“C” or “D” must be moved to the Position B. Jumper J2, "A" can be in either
P osition a or b depending on v alve/controller type. The external sensor
signal (0-5 or 0-10 Vdc) must be connected to Terminals 15 and 10 (refer
to Figure 2-1 and Table 2-1).

2-12 V alve T est Point

The valve voltage may be monitored on Terminal 7 of the D-Connector.

2-5

Brooks Instrument Model 5866 Pressure Controller

2-13 Optional Valve Return

Units manufactured after J anuary, 1992 with a Normally Closed valve can
be configured so the valve current can be returned to the power supply on
a separate line. This is recommended if the power supply lines are longer
than 10 feet. The feature is enab led b y connecting Pin 3 of the D-Connector
to power supply common with a separate lead and moving J umper J3 to
the Position a.

2-6

Operation

Operation

Section

3-1 Operation

a. Purge the system with dry nitrogen for at least thirty minutes prior to

start-up to prevent the formation of deposits if reactive gas is to be
used.

b. In unpressurized piping, apply power to the controller and allow

approximately fifteen minutes f or it to w arm up and stabilize its

temperature.
c. Slowly apply gas pressure to the system.
d. Set the command for the desired pressure to assume normal operation.

3-2 Proportional Band and Integration Time Constant Adjustment

The Model 5866 Pressure Controller has proportional and integral control
action. The reset, or integral, control is combined with the proportional
control actions, commonly referred to as P.I. control. Both proportional
band and integration time are user adjustable. Refer to Figure 1-4 for P
and I adjustment potentiometer locations. The dynamic behavior of the
control system is influenced by flow range , pressure range , fluid type,
orifice size and system volume. Therefore, Model 5866 may have to be
adjusted in the field to achiev e the best dynamic response.

3

Figure 3-1. Error Signal Step
Response.

The factory settings are typically: proportional band minimum, 0.5%,
potentiometer fully counterclockwise (c.c.w .) and integ ration time
minimum, 0.05 seconds, potentiometer fully clockwise (c.w.). This
combination of adjustments usually results in stable control. For most
systems the dynamic response is adequate with the factory settings.
Improved response can be had b y final tuning the P and I potentiometers
in the system by the user. The tuning of the P and I constants does not
affect the calibration of the instrument.

Definitions

Both proportional and integral control actions are defined with respect to a
step response error signal. Refer to Figure 3-1.

3-1

Brooks Instrument Model 5866 Pressure Controller

Proportional Control

Proportional control is a basic continuous control mode in which the
controller output is proportional to the error input signal to the controller.
Refer to Figure 3-2. It provides very rapid response and is relatively stable.
Used alone, proportional control has one major disadvantage: at steady
state it exhibits an offset. That is there is a difference betw een the desired
value, or setpoint and the actual v alue of the controlled variable. An
integral action added to the proportional mode eliminates offset.

Integral Control

Integral or reset action is an integration of the input error signal ov er time.
Refer to Figure 3-3. This means that with integral action the v alue of the
manipulated variable changes at a rate proportional to the error . With
integral action present there can be no offset at steady state since the
manipulated variable will continue to change as long as an error is present.

Characteristics of P.I. Control

By using both proportional and integral control actions, rapid control can
be achiev ed with out a steady state offset. Refer to Figure 3-4. Typically
there is a slight decrease in system stability due to the presence of the
integral mode. The dynamic response of the system is better than the
response would be with integral alone. Because the two controller modes
are interactive the P.I. controller is somewhat more difficult to tune.

Tuning the P.I. control

Turning the P potentiometer clockwise (c.w .) will increase the proportional
band thus increasing the offset and system response time. If the
proportional band is too low, the system ma y o v ershoot the command, or
oscillate. Turning the I potentiometer counterclockwise (c.c.w.) will increase
the integration time, making the system respond slower, but more stable.

Adjust the P and I potentiometers until the optimum response is achiev ed.
Check the adjustment in the system ov er the expected range of pressures
and flows.

Fastest controller response to set point changes are obtained with the P
potentiometer fully counterclockwise and the I potentiometer fully
clockwise.

3-2

Figure 3-2. Proportional Control.

Operation

Figure 3-3. Integral Control.

3-3

Brooks Instrument Model 5866 Pressure Controller

Figure 3-4. P.I. Control.

3-4

Maintenance

4-1 General

Maintenance

Section

4

No routine external maintenance is required for Brooks thermal mass flow
controller. If an in-line filter is used for the Model 5866, the filtering element
should periodically be replaced or cleaned.

4-1

Brooks Instrument Model 5866 Pressure Controller

4-2

Troubleshooting

5-1 General

Troubleshooting

Section

5

CAUTION

It is important that this controller be serviced only by properly
trained and qualified personnel.

A.System Checks

The Model 5866 is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary down time. If possible,
make the following system checks before removing a suspected defective
pressure controller for bench troubleshooting or return to the factory,
especially if the system is new.

1.Verify a low resistance common connection and that the correct power

supply voltage and signals are reaching and leaving the controller. The

Break-out Board (P/N S-273-Z-649-AAA) will make this job much

easier.

2.Verify that the process gas connections have been correctly terminated

and leak checked.

3.If the pressure controller appears to be functioning but cannot achieve

set-point, verify that sufficient inlet pressure and pressure drop are

available at the controller to provide the required flow.

4.Verify that all user selectable jumpers are in their desired positions

(refer to Figure 2-1).

5-2 Troubleshooting

WARNING

If it becomes necessary to remove the controller from the system
after exposure to toxic, pyrophoric, flammable or corrosive gas,
purge the controller thoroughly with a dry inert gas such as nitrogen
before disconnecting the gas connections. Failure to correctly purge
the controller could result in fire, explosion or death. Corrosion or
contamination of the pressure controller upon exposure to air may
also occur.

A. Bench Troubleshooting (Table 5-1)

1.Connect the pressure controller to a ±15 Vdc power supply, and a

command voltage source. Connect an output signal readout device (a

4-1/2 digit voltmeter is recommended) to Terminals 2 and 10 (refer to

Table 2-1).

2.Apply power to the controller, close the valve using the valve override

closed input and allow it to warm up for fifteen minutes. Do not connect

the controller to a gas source at this time.

5-1

Brooks Instrument Model 5866 Pressure Controller

3. Observe the output signal and, if necessary, perform the zero

adjustment procedure, Section 6.

4. If the output signal will not zero properly, troubleshoot the sensor using

the procedures given in Section 5-2B. If the sensor is electrically

functional, the printed circuit board is defective and will require

replacement.

5. Connect the controller to a source of the gas it is calibrated for.

Command 100% pressure and adjust the inlet and outlet pressures to

the calibration conditions. Verify that the output signal reaches and

stabilizes at 5.00 Volts.

6. Vary the command voltage ov er the 5 to 100% r ange and v erify the

output signal follows the set-point.

B. T ransducer T roubleshooting (Table 5-2)

1. Troubleshoot the transducer using the steps given in Table 5-2. If any of

the steps do not give the e xpected result, the transducer assembly is

defective and m ust be replaced.

2. If the transducer is defective, refer to Sections 5-3 and 5-4 for the

disassembly and assembly procedures f or replacing the transducer.
Note: Do not attempt to disassemb le the tr ansducer.

5-3 Disassembly

The Model 5866 pressure controller may be disassembled in the field b y
the user for cleaning, re-ranging or servicing. The disassembly procedures
below detail the upstream control version of the Model 5866 with a
Normally Closed control valve. The procedures f or the upstream control
version and the Normally Open control valve are substantially the same .
Disassemble the controller as follo ws:

Note: The controller should be disassembled in a clean environment to
prevent contamination.

CAUTION

Do not attempt to disassemble the controller until pressure has
been removed and purging has been perf ormed.

A. Disassembl y Pr ocedure [numbers in ( ) refer to Figure 7-1]

1. Remove the jam n ut (1) on top of the v alve assembly.

2. Unplug the valv e connector from the electronics cover and remove the

coil assembly (2).

3. Remove the hex socket screws (3) securing the valve retaining plate (4)

attaching the valve stem assemb ly (6).

5-2

CAUTION

When performing the following pr ocedure, the v alve stem m ust be
removed without cocking it to pre vent damage to the valve spring.

4. Carefully remove the v alve stem assembly (6).

5. Remove the plunger assemb ly (7, 8, 9 and 11).

6. Remove and note the position of the valve spring spacers (10). Spacers

may be used abov e and/or below the lower valve springs (8).

7. Unscrew the orifice (12) from the flow controller body (25).

Troubleshooting

Table 5-1. Bench Troubleshooting.

Trouble Possible Cause Check/Corrective Action

Output stays at zero Volts regardless of com- Defective Sensor Replace sensor. Refer to Section 5-3 and Table 5-2.
mand and there is pressure on the controller.

Output stays at zero Volts regardless of Clogged Control Valve Check Pin 7 if the voltage is more than +11 V. Disassemble and repair the control valve.
command and there is no flow through the Refer to Sections 5-3 and 5-4.
controller.

Output signal stays at +14 V. regardless of Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 5-5.
command and there is flow through the
controller. +15 Vdc applied to the valve override input. Check the valve override terminal. Refer to Figure 2-2 for terminal assignments.

Output signal follows setpoint at higher Leaky control valve. Disassemble and repair valve. Refer to Sections 5-3 and 5-4.
commands but will not go to zero.

Output signal follows setpoint at lower Insufficient inlet pressure or pressure drop Adjust pressures, check calibration. Refer to Section 5-1.
commands but does not reach full scale.

Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

-15 V applied to the valve override input. Check valve override input. Refer to Figure 2-2 for terminal assignments.
Defective printed circuit board. Replace printed circuit board. Refer to Sections 5-3 and 5-4.

Defective printed circuit board Replace printed circuit board. Refer to Sections 5-3 and 5-4.

Command input floating. Connect command signal. Refer to Figures 2-1 and 2-2 for terminal assignments.

Excessive resistance in valve voltage return Reduce wiring resistance
line.

Partially clogged valve. Disassemble and repair control valve. Refer to Sections 5-3 and 5-4.
Valve out of adjustment. Adjust valve. Refer to Section 5-5.
Valve guide spring failure. Controller oscillates (see below)

Oversized orifice Check orifice size. Refer to Section 5-6 and Table 5-4.
Valve out of adjustment. Adjust valve. Refer to Section 5-5.
P/I adjustment not correct. Adjust P/I potentiometers. Refer to Section 3-2.
Faulty pressure regulator. Check regulator output.
Defective printed circuit board Replace printed circuit board. Refer to Sections 5-3 and 5-4.

Table 5-2. Sensor Troubleshooting.

OHMMETER RESULT IF ELECTRICALLY

CONNECTION FUNCTIONAL

4 Sensor wires to body Open circuit on Ohmmeter.

(ground) If one of these is shorted,

(Pin 1 to 4 to body) an Ohmmeter reading will

be obtained.

Between the different Minimum 1 k Ohm

wires Maximum 4 k Ohm

Depending on sensor used

NOTE: Remove the sensor connector from the P.C. board

for this procedure.

5-3

Brooks Instrument Model 5866 Pressure Controller

8. Remove the three scre ws (29) and jack posts (32) attaching the

electronics cover. Remove the electronics cover (31).

Be careful not to stress the transducer lead wires to transducer
assembly junction when removing the sensor connector from the
printed circuit board. If the transducer lead wires are stressed, an
open in the transducer wiring could result.

9. Unplug the sensor connector from the printed circuit board. Remo ve the

two screws (29) securing the brack et (28) and printed circuit board (30).

Remove the brac k et and board.

Do not remove the transducer before reading the following
instructions. Failure to heed this warning can result in personal
injury.

10.Transducer removal should be avoided. The Model 5866 pressure

transducer is not serviceable and only needs to be removed when the

transducer is replaced or when the O-rings are replaced. Transducer

removal will require the use of compressed gas to f orce the transducer

from the body. This pressure may exceed the maximum withstand

pressure of the transducer , creating the need f or adjustment or

replacement. Be sure the tr ansducer needs to be remo ved before

proceeding.

11.Remove the two scre ws (3) from the base plate (27) then reinstall them

2-3 turns into the body. Reinstall the valv e stem (6), retaining plate (4)

using the four hex socket screws (3). Cap the outlet port.

CAUTION

W ARNING

WARNING

The screws (3) are to be reinstalled to prevent violent ejection of
the transducer when the pressure is applied. Personal injury can
result if the transducer is not captured by these loose screws.

12.Slowly pressurize the inlet port to force the transducer (26) from the

body (25) and against the loosened base plate (27). Remove the

pressure once the transducer (26) is against the base plate (27).

Remove the base plate (27), transducer (26) and v alve stem (6) from

the body (25.)

CAUTION

Do not scratch the transducer O-ring sealing surfaces or touch the
transducer diaphragm surface.

13.Remove the O-ring (5) from the transducer assemb ly (26). The Teflon

backup ring may remain in place.

Note: Steps 10, 11, 12 and 13 may be eliminated if the transducer is not

to be removed.

B. Cleaning Pr ocedures

Should the Model 5866 Pressure Controller require cleaning due to
contamination with foreign material, use the follo wing procedures:

5-4

Troubleshooting

1. Remove the unit from the system.

2. Refer to Section 5-3 to disassemble the controller.

CAUTION

Do not soak the pressure transducer assembly in a cleaning
solution. If solvent seeps into the transducer assembly, it may
damage the transducer or, at least, significantly alter its operating
characteristics.

3. Inspect the orifice for clogging by holding it in front of a light source and

looking for light through the bore. Clean by soaking in a suitable non-

residuous solvent and directing a stream of compressed dry nitrogen

through the bore.

4. Deposits of silicon dioxide ma y be remo v ed b y soaking the internal

parts in a solution of 5% hydrofluoric acid (5 parts hydrofluoric (HF), 95

parts water (H2O) followed b y Freon TFTM.

5. Blow all parts dry with dry nitrogen and reassemble. Ref er to Section 5-4

Assembly Procedure.

6. Purge the assembled controller with dry nitrogen.

7. P erform calibration procedure in Section 6 if needed.

8. When the controller is reinstalled in the system, the connections should

be leak-tested and the system should be purged with dry nitrogen or

argon for thirty minutes prior to start-up to prevent the formation of

deposits.

5-4 Assembly

The assembly procedures below detail the downstream control v ersion of
the Model 5866 with a Normally Closed control valve. The procedures for
the upstream control version and the Normally Open control valv e are
substantially the same.

CAUTION

Do not get halocarbon grease on the hands. This is a special inert
lubricant which is not easily removed.

Note: It is recommended that all O-rings be replaced during assembly. All
O-rings should be lightly lubricated with halocarbon lubricant prior to their
installation.

Note: Glo v es should be w orn to reduce the possibility of contaminating the
Model 5866 or process.

A. Assembly Procedure [numbers in ( ) refer to Fig. 7-1]

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Install the transducer O-ring (5) on the transducer assembly (26). The

O-ring (5) is placed below (process side) the Teflon backup ring on the

transducer .

3. Install the transducer (26) and base plate (27), securing it with two

screws (3) tightened to 15 in/lbs.

Note: The orifice can easily become clogged with skin or other foreign

matter during assembly. Do not touch the orifice with the bare hand

during installation. Use rubber gloves, finger cotts or pliers to start the

orifice in the body.

5-5

Brooks Instrument Model 5866 Pressure Controller

4. Install the orifice (12) and its O-ring (13) using a 3/8" nut driver. Insure

that the orifice is fully seated but do not overtighten.

5. Insert the valve preload spacers (10), if used, into the valve cavity in the

controller body (25). Use care to preserve the correct order.

6. Install the valve plunger assemb ly (7, 8, 9 and 11) on the preload

spacers (10). Install air gap spacers, if used, on top of the valve

springs.

7. Install the valv e stem assemb ly (6), secure with the valve retaining plate

(4) and four hex socket screws (3). When installing the screws, insure

that the plate makes full contact all the way around the stem. Torque the

screws, securing the retaining plate in a diagonal pattern (refer to

Figure 5-1) to 15 in-lbs.

8. Install the coil assembly (2) ov er the valve stem assembly (6) and

secure with jam nut (1).

9. Install the printed circuit board (30), secure with the bracket (28) and

two screws (29). Plug the connector from the sensor onto the printed

circuit board.

10.Install the electronics cover (31) on the controller, secure with three

screws (29) and two standoffs (33). Plug the connector from the valve

coil into the printed circuit board through the hole in the electronics

cover.

11.Prior to installation, leak and pressure test the controller to any

applicable pressure f or the transducer (refer to Section 4-1).

5-5 Adjusting the Control Valve [numbers in ( ) refer to Figure 7-1]

The Model 5866 control valve has been f actory adjusted to insure proper
operation. Adjustment is not normally required during the life of the
instrument. Readjustment ma y be required if an y of the f ollo wing parts
have been replaced:

Normally Closed Valve Normally Open Valve

Orifice (12) Orifice (12)
V alv e Stem (6) V alv e Stem (15)
Plunger (7) Plunger (16)
Lower Guide Spring(s) (8) Lower Guide Spring (8)
V alv e Seat (11) V alv e Seat (11)
Downstream Control Downstream Control

Adaptor (21) Adaptor (21)

Plunger Extension (18)
Spring Spacer (19)
Insert Sleeve (17)

Figure 5-1. Torque Sequence for
the Valve Retainer Plate.

5-6

Troubleshooting

The valve is adjusted in Brooks pressure controllers b y adding spacers (9
and 10) to the control valve to vary the initial position of the parts. The
proper initial position is required so the valve will ha ve the proper travel
and force available to insure reliable control. Scre w type adjustments are
not used in Brooks control valve since they can change with pressure and
vibration. Screw type adjustments also introduce a dynamic seal that is a
potential leak site and source for contamination.

The adjustment procedures below require the use of a variable v oltage
power supply, pressure regulator, pressure gage, voltmeter, flow meter and
a supply of nitrogen or air. The test set up is sho wn in Figure 5-2. The
power supply must be capab le of deliv ering 400 mA at 30 V. If the proper
equipment or facilities are not av ailab le to perf orm this procedure, please
return the instrument to the factory or an authorized repair station. Refer to
Figure 7-1 for the location of the parts. Section A describes the adjustment
of the Normally Closed control valve, Section B describes the adjustment
of the Normally Open control valve. Please refer to the proper section for
your valve type.

CAUTION

When testing upstream type pressure controllers, be certain not to
exceed the maximum overpressure specification for the pressure
transducer installed, as specified in Section 1-4. For the 0-1 bar
transducer this is only 7 psig!

Figure 5-2. Adjustment Test Setup.

+ -

Variable

Power Supply

Voltmeter

+ -

P

®

Nitrogen

or Air

Pressure

Regulator

Pressure

Gage

Model 5866

Flow Meter

5-7

Brooks Instrument Model 5866 Pressure Controller

The procedure described below requires the disassembly of the
control valve. Be certain to remove gas pressure prior to disassembly
to prevent injury.

A. Adjustment pr ocedure, Normally Closed (N.C.) control valve

Refer to Figure 5-3 f or spacer locations and nomenclature f or the Normally
Closed (N.C.) control valve. Refer to Section 7, spare parts for the spacer
part numbers and the spacer kit part number. The preload determines the
initial force required to raise the v alv e seat off the orifice and start gas flow.
If the preload is insufficient the valve will not fully close and gas will leak
through when the valve is closed. If preload is excessive the magnetic
force generated between the plunger and stem will be insufficient to raise
the plunger and the valve will not open.

1. Make the bench testing set up as shown in Figure 5-2. Disconnect the

valve connector from the side of the Model 5866 and connect it to the

variable pow er supply and voltmeter as shown. Polarity is not important.

2. Remove gas pressure. Disassemble the control valv e following the

procedure given in Section 5-3, abov e . Note the orifice size, which is

marked on the orifice face. Referring to Figure 5-3, note the number ,

location and thickness of all spacers (9 and 10).

3. Decrease the preload of the valv e b y .005" b y either remo ving a .005"

small (9) preload spacer or by adding a .005" large (10) preload spacer .

4. Reassemble the control valv e following the assembly procedure in

Section 5-4, above.

5. Apply 5 psig to the inlet of the Model 5866 if equipped with 0-1 bar

transducer. Apply 10 psig for instruments equipped with other

transducers.

6. Apply zero Volts to the control v alv e and observe the flo w.

7. If the valve leaks through, remo ve the gas pressure and increase the

preload by .005" and go to Step 8. If the valve does not leak through

repeat Steps 2 through 6.

8. Apply 5 psig to the inlet of the Model 5866 if equipped with 0-1 bar

transducer. Apply 10 psig for instruments equipped with other

transducers.

9. Apply 14.5 Volts to the valve using the variable power supply and

observe the flow .

10.Compare the flow with the minimum flow listed in Table 5-3. The

minimum flows hav e been listed with reference to both 0°C and 70°F for

convenience . Be sure to use the column that is correct for the flow

meter used in the set up. The outlet pressure at the controller must be

less than 0.4 psig (10 inches of water).

11.If the observed flow is greater than the flow listed in Table 5-3 go to

Step 13.

12.If the observed flow does not achiev e the minim um flow, then increase

the air gap by adding a large .005" air gap spacer (10) to increase the

valve tr avel. Repeat Steps 8, 9, 10 and 11.

13.Apply 11.5 Volts to the valve using the variable pow er supply. Observe

the flow and compare it to the minimum flow values listed in Table 5-3.

14.If the observed flow is greater than the flow listed in Table 5-3 the valve

adjustment is complete.

15.If the observed flow is less than the flow listed in Table 5-3 decrease the

air gap by adding a small 0.005" air gap spacer (9). Repeat Steps 13 and 14.

CAUTION

5-8

Figure 5-3. Valve Adjusting Spacer Locations.

Troubleshooting

5-9

Brooks Instrument Model 5866 Pressure Controller

B. Adjustment pr ocedure, Normally Open (N.O.) control valve

Refer to Figure 5-4 f or spacer locations and nomenclature f or the Normally
Open (N.O.) type control v alve. Ref er to Section 7, spare parts for the
spacer part numbers and the spacer kit part number. The v alve clearance
determines the maximum space between the orifice (12) and the valve
seat (11). If the valve clearance is too small the controller will not achieve
full flow. If the valv e clearance is too large , the control valve will not close
properly.

The air gap is the space between the plunger (16) and insert (17) in the
control valve. The air gap determines the magnetic force a vailable to
operate the valve . If the air gap is too large the magnetic force will be
insufficient and the valve will not close . If the air gap is too small the valve
will have insufficient tr a v el and the v alv e will not close.

1. Make the bench testing set up as shown in Figure 5-2. Disconnect the

valve connector from the side of the Model 5866 and connect it to the

variable power supply and v olt meter as shown. Polarity is not important.

2. Remove gas pressure. Disassemble the control valv e following the

procedure given in Section 5-3, abov e . Note the orifice size, which is

marked on the orifice face. Referring to Figure 5-4, note the number ,

location and thickness of all spacers (9 and 10).

3. Reassemble the valv e and set the variable voltage power supply to zero

V olts .

4. Apply 5 psig to the inlet of the Model 5866 if equipped with 0-1 bar

transducer. Apply 10 psig for instruments equipped with other

transducers.

5. Observe the flow and compare it to the values listed in Table 5-3.

6. If the observed flow is greater that the listed value for the orifice size

that is installed then go to Step 8.

7. If the flow is less than the minimum flow increase the v alv e clearance

by adding a large 0.005" spacer (10) abov e the spring spacer (19) and

repeat Steps 5 and 6.

8. Apply 18 Volts to the valve using the variable pow er supply and observe

the flow .

Note: The maximum allowable leak through in controllers with an

elastomer valve seat is 2% of the v alues listed in Table 5-3, (multiply by

0.02). The maximum allowable leak through for controllers with a metal

or Teflon valve seat is 8% of the values listed in Table 5-3, (multiply by

0.08).

Table 5-3. Minimum Flow Values.

5-10

Orifice Minimum Flow Minimum Flow

Size with 10 psig pressure with 5 psig pressure

(inches) sccm (0°C) sccm (70°F) sccm (0°C) sccm (70°F)

.001 5.3 5.7 3.9 4.0
.002 12.5 13.5 8.8 9.5
.003 39.2 42.2 27.7 29.8
.004 82.5 88.9 58.5 62.9
.007 374 403 264 285
.010 748 806 529 570
.014 1,364 1,470 964 1,039
.020 2,673 2,879 1,890 2,040
.032 6,490 7,000 4,590 4,940
.048 13,000 14,000 9,180 9,890
.062 22,000 23,700 15,500 16,800
.078 31,900 34,400 22,500 24,300
.093 42,500 45,800 30,000 32,400
.120 69,300 74,700 49,000 52,800

Figure 5-4. V alve Adjusting Spacer Locations, Normally Open (N.O.) Valve.

Troubleshooting

5-11

Brooks Instrument Model 5866 Pressure Controller

9. If the flow shuts off, or is less than the maxim um allow able leak through

for the type of valv e seat installed the adjustment is complete .

10.If the leakage at 18 Volts is excessive add a large 0.005" spacer (10) to

decrease the air gap and repeat Steps 8 and 9.

5-6 Orifice Sizing

The Model 5866 Pressure Controller can be configured with the valve on
the outlet to control the pressure upstream of the instrument. This
configuration is called an upstream controller . The Model 5866 can also be
configured with the valve on the inlet to control the pressure do wnstream
of the instrument. This configuration is called a downstream controller.

The calibration or sensed pressure is the pressure that is controlled. This
is the upstream pressure for an upstream controller or downstream
pressure for a downstream controller. The reference pressure is the
pressure opposite the calibration pressure. The reference pressure would
be the downstream pressure for an upstream controller and the upstream
pressure for a downstream controller. The reference pressure is usually
relatively constant. The calibration pressure is the pressure to which the
electronics is calibrated to give 100% output signal. The calibration
pressure is the maximum sensed pressure. The abov e definitions are
shown in Figure 5-5.

Figure 5-5. Application Configuration.

To properly size the control valve orifice in the Model 5866 the f ollo wing
information must be known:

·Calibration Pressure, psia

·Reference Pressure, psia

·T = Gas Temperature (approximate) °R, (°R = °F + 460)

·Q

= Max. Flow, sccm, 0°C reference temperature

max

·SG = Gas Specific Gravity, reference Air @ 14.7 psia and

70°F=1.0

1. Determine the minimum pressure drop across the pressure controller.

· For an upstream controller this will be when the sensed (inlet) pressure

is 5% of the calibration pressure, or 1.5 psi, whichever is larger.

· For a downstream controller this will be the ref erence pressure min us

the calibration pressure.

2. Determine the P1 and P2 in psia.

· For an upstream controller P1 is the ref erence pressure plus the

minimum pressure drop. P2 is the reference pressure.

P1=P
P2=P

+ minimum pressure drop

Ref

Ref

5-12

P1

CALIBRATION

OR

P2 P1 P2

CALIBRATION

OR

Troubleshooting

· For a downstream controller P1 is the ref erence pressure . P2 is the

calibration pressure.

P1=P

Ref

P2=P

Cal

3. Determine the Cv for the application. The ratio between P1 and P2 will

determine the calculation to use:
Equation #1

P2 Q

If: > 0.5 use: C

v

=

max

SG * T

P1 800,000 (P1-P2) * P2

Equation #2

P2 Q

If: < 0.5 use: C

v

= SG * T

max

P1 397,000 * P1

4. Select the orifice size from Table 5-4 that has a C

just greater than the

v

Cv determined in Step 3.

5. Check to see if the maximum operating pressure drop is greater than

the maximum allowab le pressure drop for the orifice size selected. If the

pressure drop is too high for the orifice selected the instrument will not

be able to function correctly. This situation can be corrected by reducing

the pressure drop to the allowable level, or, reducing the maximum flow

so a smaller orifice will be selected.

An example Model 5866 application is shown in Figure 5-6 to illustrate

the orifice sizing procedure.

Given:

Controller Type: Upstream
Gas: 5/8 Nitrogen, 3/8 Hydrogen
Temperature; 70°F (530°R)
Maximum Flow: 800 sccm
Calibration Pressure: 100 psig (114.7 psia)
Reference Pressure; 1 atmosphere (14.7 psia)
Max Flow: 10 slpm (0°C ref. temp.)

Calculations:

SG Mixture = (3/8 x 0.070) + (5/8 x 0.964) = .629
Minimum Pressure Drop = 114.7 x .05 = 5.7 psi
Maximum Pressure Drop = 114.7 - 14.7 = 100 psi
P1 = 14.7 + 5.7 = 20.4 psia
P2 = 14.7 psia
P2/P1 = 14.7/20.4 = 0.721 which is

> 0.5 therefore use equation #1

800 0.629 x 530

C

= = 2.0 x 10

v

800,000 (20.4 - 14.7) x 14.7

-3

5-13

Brooks Instrument Model 5866 Pressure Controller

Since the Cv calculated is the same as listed for the .014" orifice the .020"
orifice should be selected. The last step is to check the maximum pressure
drop for the application. The maximum pressure drop for the .020 orifice is
300 psi, this is greater than the 100 psi pressure drop required for the
application so the .020" orifice is correct.

Table 5-4. Model 5866 Orifice Selection.

Figure 5-6. Example Application of Orifice Sizing Procedure.

®

N

2

Model 5850E
Mass Flow Controller
500 sccm, Full Scale

100 psig

Maximum

Desired

Pressure

C

v

5.0x10

2.0x10

5.0x10

1.1x10

4.0.x10

9.0x10

2.0x10

4.7x10

1.4x10

3.5x10

5.5x10

8.0x10

1.0x10

1.4x10

1.5x10

Orifice Maximum

-6

-5

-5

-4

-4

-4

-3

-3

-2

-2

-2

-2

-1

-1

-1

Size Pressure Drop (psi)

.001 1500
.002 1500
.003 1500
.004 1500
.007 1500
.010 750
.014 550
.020 300
.032 175
.048 85
.062 55
.078 50
.093 50
.116 50
.120 50

Vent to

®

Atmosphere

Model 5866

5-14

®

H

2

Model 5850E
Mass Flow Controller
300 sccm, Full Scale

Reactor

Calibration

6-1 Calibration Procedure

Calibration

Section

6

The calibration of the Model 5866 Pressure Controller can be divided into
three parts: Transducer Adjustment, Control Valve Adjustment and Control
Electronics Adjustment. The control valve adjustment and sizing
procedures are given in Sections 5-5 and 5-6 respectively. The
adjustment of the control electronics is best done in the actual system the
Model 5866 will be installed in and this procedure is covered in Section 3-2.
This section of the manual will cov er the calibration of the pressure
transducer. Please refer to the abov e sections of the manual if the control
valve or control electronics require adjustment.

Note: Calibr ation of the Model 5866 Pressure Controller requires the use
of a precision pressure and vacuum source, precision pressure indicators
and a digital voltmeter (DVM). The calibration may also involv e high
pressure. It is recommended the calibration procedure be performed by
qualified personnel.

CAUTION

Excessive pressure can damage the pressure transducer and make
it inoperative. Care must be taken not to allow the pressure
transducer to be exposed to more than the maximum over-range
pressure. The maxim um over -range pressure is specific to the range
of the pressure transducer. These pressures are listed in Section
1-4 of this manual.

Refer to Figures 1-9 and 1-10 f or locations for the adjustment
potentiometers, jumpers and D-Connector pins.

1. Connect power to the instrument and allow it to warm up for

approximately 15 minutes.

2. Connect the D VM positiv e lead to the +5 V olt ref erence output (Pin 11)

and the D VM negative lead to signal ground (Pin 10). Adjust the +5 Volt

reference output to 5.000 V using P1.

3. Connect the D VM positiv e lead to the pressure signal output (Pin 2) and

the negative lead to signal ground (Pin 10). Connect the transducer

side of the Model 5866 to a vacuum source capable of achieving an

absolute pressure less than 0.02 psia (1 Torr). Put a cap or some

suitable plug on valv e side inlet. Attaching the transducer side of the

Model 5866 to a mass spectrometer type helium leak detector is a good

way to achieve a suitable vacuum. Adjust the signal output to 0.000 V

using zero potentiometer, P4.

6-1

Brooks Instrument Model 5866 Pressure Controller

Note: If a vacuum pump is not available and the atmospheric pressure

is accurately known the zero pressure signal output can be adjusted

using the following f ormula:

Output at Output at 100% Atmospheric

Atmospheric Pressure = x Pressure

(Vdc) Pressure at 100% (psia)

The above f ormula will be most accurate with high pressure

transducers where the output at atmospheric pressure is a small

fraction of the full scale pressure.

4. Apply the desired full scale pressure to the transducer side of the Model

5866 and adjust the span potentiometer (P3) so the Model 5866 output

agrees with the output of the precision pressure indicator . If the output

cannot be adjusted to the correct value with the span potentiometer

change the course gain setting by moving jumper (J1).

5. Apply a vacuum to the transducer side of the Model 5866 and chec k

zero pressure output. If the zero pressure output is correct, the

calibration is complete. If zero pressure output is not correct, repeat

Steps 3 and 4. Readjustment will probably only be required if the

atmospheric pressure method of adjustment was used to set zero.

(Vdc)

(psia)

6-2 Gas Conversion Factors

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor. A list of sensor conversion factors is given in Table 6-1.
To change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas by the gas factor for the calibration gas used.

Actual Gas Flow Rate = Output Reading x

Example:
The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.773 = 57.98 sccm

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Sensor Conversion Factor

Mixture

=

P

1

Sensor

Conversion

Factor

1

Factor of the New Gas

Factor of the Calibr ation Gas

100

P

+ +

2

Sensor

Conversion

Factor

2

P

3

Sensor

Conversion

Factor

3

6-2

Calibration

Where,
P

= percentage (%) of gas 1 (by volume)

1

P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)

Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Mixture Factor = = 0.945

20

1.386

100

+

80

0.876

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation

is only accurate to ±5%. The sensor conversion factors given in Table 6-1
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However, gas conditions that vary widely from
these reference conditions ma y cause an additional error due to the
change in specific heat caused by pressure and/or temperature.

6-3

Brooks Instrument Model 5866 Pressure Controller

Table 6-1. Conversion Factors (Nitrogen Base).

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH

Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C
Butane C
1-Butene C
CIS-2-Butene C
Trans-2-Butene C

Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C
Chlorotrifluoroethylene C
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C
Cyclopropane C3H

Deuterium D
Diborane B
Diboromodifluoromethane f-12B2 CBr
1,2-Dibromotetrafluoroethane f-114B2 C
Dichlorodifluoromethane f-12 CCL
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH
1,2-Dichloroethane C
1,2-Dichlorotetrafluoroethane f-114 C
2,2 Dichloro C
1,1-Difluoro-1-Chloroethane C
1,1-Difluoroethane CH
1,1-Difluoroethylene CH
Diethylsilane C
Difluoromethane f-32 CF
Dimethylamine (CH
Dimethylether (CH
2,2-Dimethylpropane C(CH
Disilane Si

Ethane C
Ethanol C
Ethylacetylene C
Ethyl Chloride C
Ethylene C
Ethylene Oxide C

Fluorine F
Fluoroform f-23 CHF

Germane GeH
Germanium Tetrachloride GeCl

Halothane (R-123B1) C
Helium He 1.386 0.378 0.178
Hexafluoroacetone F
Hexaflorobenzine C
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C
Hexamethyldisilane (HMDS) (CH
Hexane C

2H2

3H4

3

3
3

3

5
3

BrF

2

3

3
4H6
4H10
4H8
4H8
4H8

2

2

4

4

2

2

2

3

Cl 0.234 1.818 4.134

4H9

2

3

CLF

2

5

CLF

2

3

3

2

4H8

6

2

2H6

2F2

2Br2F4

2F2

2CL2
2H4Cl2
2CL2F4
2HC12F3

CLF

2H3

2

CHF

3

2

:CF

2

2

Si 0.183 1.775 3.940

4H12

2H2

NH 0.370 1.269 2.013

3)2

O 0.392 1.281 2.055

3)2

3)4

2H6

2H6

O 0.394 1.282 2.057

2H6
4H6

CL 0.408 1.516 2.879

2H5
2H4

O 0.589 1.254 1.965

2H4

2

3
4

4

HBrClF

2

3

CCOCF

3

3
6F6
2F6
3F6

2)6Si2

6H14

FACTOR FACTOR (kg/m

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.773 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

3

)

Ref. No. J-836D508
gasdata.doc Vsn. 8.6

6-4

Table 6-1. Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645

2

Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
Hydrogen Sulfide H

Iodine Pentafluoride IF
Isobutane C
Isobutene C
Isopentane C

Krypton Kr 1.382 1.729 3.708
Methane CH

Methylacetylene C
Methyl Bromide CH
3-Methyl-1-butene C
Methyl Chloride CH
Methyl Fluoride CH
Methyl Mercaptan CH
Methyl Silane CH
Methyl Trichlorosilane (MTS) CH
Methyl Vinyl Ether C
Monoethanolamine C
Monoethylamine C
Monomethylamine CH

Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N

Octofluorocyclobutane C
Oxygen O
Oxygen Difluoride OF
Ozone O

Pentafluorethane f-125 C
Pentane (n-Pentane) C
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C
Perfluoro-2-Butene C
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C
Pentane (n-Pentane) C
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluor ide PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C

Rhenium Hexafluoride ReF
Silane SiH

Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride S F
Sulfur Tetrafluor ide SF
Sulfur Tri oxide SO
Sulfuryl Fluoride SO

Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C
Tetrafluorohydrazine N
Trichlorofluoromethane f-11 CCL
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C
Trimethylamine (CH
Tungsten Hexafluoride WF

Uranimum Hexafluoride UF
Vinyl Bromide C

Vinyl Chloride C
Vinyl Fluoride C

Water Vapor H
Xenon Xe 1.383 2.180 5.851

Se 0.837 1.695 3.613

2

S 0.850 1.108 1.539

2

5
4H10
4H8
5H12

4

3H4

Br 0.646 1.834 4.236

3

5H10

CL 0.687 1.347 2.308

3

F 0.761 1.102 1.518

3

S 0.588 1.313 2.146

4

Si 0.393 1.283 2.061

6

Si 0.267 2.310 6.675

3Cl3

O 0.377 1.435 2.567

3H6

NO 0.305 1.477 2.728

2H7
2HH5NH2

3NH2

4

2

2

3

2O3

O 0.752 1.259 1.964

2
4F8

2

2

3
2HF5

5H12

4F10
4F8

3F8
5H12

2
3
5
3

3H8
3H6

6

4

4
4
2

6
4

3
2F2

4

2F4
2F4

F 0.374 2.244 6.281

3

3

3

2CL3F3

N 0.316 1.467 2.639

3)3

6

6

Br 0.524 1.985 4.772

2H3

CL 0.542 1.492 2.788

2H3

F 0.576 1.281 2.046

2H3

O 0.861 0.802 0.804

2

F ACTOR FACTOR (kg/m

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

Calibration

3

)

Ref. No. J-836D508
gasdata.doc Vsn. 8.6

6-5

Brooks Instrument Model 5866 Pressure Controller

6-6

Parts List

7-1 General

Parts List

Section

7

Replacement parts for the Model 5866 are readily available worldwide
through the factories and customer service facilities listed on the back
cover of this manual. Parts can also be ordered through authorized repair
stations and sales agents. When ordering replacement parts please
specify: Brooks serial number, model number, part description, part
number and quantity.

Refer to Figure 7-1 and Table 7-1 for Model 5866E parts drawing and list
and Figure 7-2 and Table 7-3 for Model 5866M parts drawing and list. Table
7-2 lists tools and parts that are useful for troubleshooting and repair .

7-1

Brooks Instrument Model 5866 Pressure Controller

Figure 7-1. Model 5866E Parts Drawing.

7-2

Table 7-1. Model 5866E Parts List.

Item

No. Qty. Description Part Number

1 1 Jam Nut 573-B-027-ACK
2 1 Coil Assembly S-185-Z-271-AAA
3 6 Valve/Transducer Screw 751-C-322-AWA
4 1 Retaining Plate 715-Z-169-CZ%
5 2 or 3 O-ring, Valve Stem, 375-B-016-***

Transducer, Size 016

6 1 Valve Stem, N.C. 949-Z-203-QOA
6A 1 Valve Plug, (w/o valve) 953-Z-068-BMT
6B 1 Backing Ring, (w/o valve) 763-Z-064-QTA

7 1 Plunger Assy, N.C. S-622-Z-165-AAA

8 1 or 2 Lower Guide Spring 820-Z-083-BMA

9 AR Small Valve Spacer, .005" TK 810-A-362-BMA

AR Small Valve Spacer, .010" TK 810-A-363-BMA

10 AR Large Valve Spacer, .005" TK 810-A-368-BMA

AR Large Valve Spacer, .010" TK 810-A-361-BMA

11 1 Valve Seat w/Viton Insert S-715-Z-051-AAG

Valve Seat w/Buna Insert S-715-Z-050-AAG
Valve Seat w/Kalrez Insert S-715-Z-163-AAA
Valve Seat w/Teflon Insert S-715-Z-049-AAA
Valve Seat, Stainless Steel 715-Z-181-BNT

12 1 Orifice Stainless Hastelloy

ID 0.0013" 577-Z-375-BMT 577-Z-404-CVA
ID 0.002" 577-Z-376-BMT 577-Z-405-CVA
ID 0.003" 577-Z-377-BMT 577-Z-406-CVA

ID 0.004" 577-Z-378-BMT 577-Z-407-CVA
(Refer ID 0.007" 577-Z-381-BMT 577-Z-410-CVA
to ID 0.010" 577-Z-383-BMT 577-Z-412-CVA
Section ID 0.014" 577-Z-385-BMT 577-Z-414-CVA
5-6 ID 0.020" 577-Z-387-BMT 577-Z-416-CVA
for ID 0.032" 577-Z-391-BMT 577-Z-420-CVA
Sizing) ID 0.048" 577-Z-393-BMT 577-Z-422-CVA

ID 0.062" 577-Z-395-BMT 577-Z-424-CVA

ID 0.078" 577-Z-397-BMT 577-Z-426-CVA

ID 0.093" 577-Z-398-BMT 577-Z-427-CVA

ID 0.116" 577-Z-399-BMT 577-Z-428-CVA

ID 0.120" 577-Z-400-BMT 577-Z-429-CVA

Parts List

Item

No. Qty. Description Part Number

13 1 or 2 O-ring, Orifice, Size 008 375-B-008-***
14 1 Spacer, Nut, N.O. Valve BV-810-A-326-CEA
15 1 Valve Stem, N.O. Valve BV-839-Z-042-BMT
16 1 Plunger Assembly, N.O. Valve BV-622-Z-118-AAA
17 1 Insert, Sleeve, N.O. Valve BV-456-C-179-CEA
18 1 Plunger Ext., N.O. Valve BV-622-Z-117-BMT
19 1 Spacer, Spring, N.O. Valve BV-810-A-327-BMT
20 4 Screw, Downstream Control 751-C-343-ACZ

Adaptor
21 1 Downstream Control Adaptor BV-019-Z-235-BMF
22 2 8-32 Mounting Screw 753-A-322-AWA
23 2 Fittings:

1/8" Compression, Swagelok 320-B-182-BMA
1/4" Compression, Swagelok 320-B-136-BMA
3/8" Compression, Swagelok 320-B-150-BMA
6mm Compression, Swagelok 320-Z-101-BMA
1/4" VCR 315-Z-036-BMA
3/8 or 1/2" VCR 315-Z-034-BMA
1/4" VCO 315-Z-035-BMA

TM

24 2 O-ring, Fitting 375-B-906-***
25 1 Controller Body BV-092-B-095-BMT
26 1 Pressure Transducer, 0-1 Bar BV-774-Z-001-GDE

27 1 Base Plate BV-613-H-106-BMF
28 1 PC Board Mounting Bracket 079-Z-135-EAA
29 5 Screw, PC Board, Cover 753-L-056-AWZ
30 1 PC Board Assembly, 5866 097-B-190-ZZZ
31 1 Electronics Cover Can 219-Z-256-EAD
32 2 Pot Hole Plug 620-Z-434-SXA
33 2 Jack Post 760-Z-037-ACS

*** QTA= Viton, SUA= Buna, TTA= Kalrez

3/8 or 1/2" VCO 315-Z-033-BMA

Pressure Transducer, 0-5 Bar BV-774-Z-002-GDE
Pressure Transducer, 0-20 Bar BV-774-Z-003-GDE
Pressure Transducer, 0-100 Bar BV-774-Z-004-GDE

Table 7-2. Troubleshooting Aids and Spare Parts Kit for Model 5866E.

5850 Break Out Board Assembly 5850 Valve Shim Kit
P/N S-273-Z-668-AAA P/N S-810-A-372-BMA

Installs directly between mass flow controller and interconnecting Contains:
cable. Allows convenient access to all signals for easy 1- .010" Large Spacer
troubleshooting of system. 2- .005" Large Spacers

1- .010" Small Spacer

Contains: 2- .005" Small Spacers

1- Break Out PC Board
1- 5 Foot Extension Cable
1- Terminal PC Board

7-3

Brooks Instrument Model 5866 Pressure Controller

Figure 7-2. Model 5866M Parts Drawing.

7-4

Table 7-3. Model 5866M Parts List.

Parts List

7-5

Brooks Instrument Model 5866 Pressure Controller

7-6

Installation and Operation Manual

а

а

а

-

е

с

о

о

о

t

541-C-005-AAA Rev D/ DRAFT

Section A, CE Certification of

Mass Flow Equipment

April, 2007

Bulgarian

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Български

Всички снабдени с означението СЕ оборудвания Brooks (електрически/електронни) с
преминали успешно през тестове съответно изискванията на електромагнитнат
съвместимост. (предписание на EMC 89/336/EEC).
Обаче на избирането на сигнални кабели за снабдените с означението СЕ оборудвания,
трябва да се обръща особено внимание.

Качество на сигналните кабели, кабелните салници и присъединителните елементи:

Brooks осигурява кабелна инсталация с отлично качество, която отговаря на изискваният
на директивите на СЕ.
Ако обаче искате да използвате свой сигнален кабел, изберете сигнален кабел с поне 100%
во покритие, който е напълно екраниран.

Който и да е използван „D” или коаксиален присъединителен елемент, трябва да бъд
екраниран с метална броня. Ако е приложимо, покритието на кабелите трябва да се стегне
метални кабелни салници. Покритието на кабелите трябва да се присъедини към металнот
защитно покритие или салника, и и на двата си края трябва да осигурява 360 0 -в
екраниране.
Покритието трябва да се свърже към една заземяваща клема.

Напечатаните на платката присъединителни елементи са неметални, по стандарт.
Използваните кабели, за да отговарят на директивите на СЕ, трябва да имат 100 % -в
екраниране.

Model 5866

Czech

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Český jazyk

Všechny (elektrické/elektronické) přístroje Brooks, které jsou označeny značkou CE,
byly úspěšně testovány na elektromagnetickou kompatibilitu (předpis EMC 89/336/EEC).
Při výběru signalizačních kabelů, které chcete u přístrojů se značkou CE použít je třeba věnova
zvýšenou pozornost.

Kvalita signalizačních kabelů, kabelových průchodek a připojovacích svorek:

Brooks zabezpečuje spolehlivou kabeláž, která vyhovuje požadavkům směrnic CE. Chcete-li
použít vlastní signalizační kabel, volte kabel s krytím nejméně 100 %, s úplným stíněním.

Jakákoliv použitá koaxiální přípojovací svorka nebo „D” svorka musí být stíněná kovovým pláštěm.
Je-li to řešitelné, krytí kabelů je nutné zabezpečit kovovou kabelovou průchodkou. Stínění kabelu
je třeba propojit s kovovým ochranným krytem nebo kovovou kabelovou průchodkou a na obou
dvou koncích kabelu musí být zajištěno stínění 360
Kovový kryt se musí propojit s uzemňovací svorkou.

Připojovací svorky, nalisované na kartu nejsou kovové, jako je ve standardech, stínění použitých
kabelů musí být minimálně 100 %, aby vyhověly CE směrnicím.

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Model 5866

Dansk

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk
støj (EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal
enten være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med
100% dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Deutsch

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Subjekt : Nachtrag zur Bedienungsanleitung.
Referenz: CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit
(EMC Richtlinie 89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang
von 360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der
CE-Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-2

Installation and Operation Manual

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Mass Flow Equipment

April, 2007

Model 5866

English

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the
Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be
used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with
CE certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Eesti

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Brooksi kogu CE-märki kandev (elektriline ja elektrooniline) seadmestik on edukalt läbinud katsed vastavalt
elektromagnetilise ühilduvuse eeskirjadele (elektromagnetilise ühilduvuse direktiiv 89/336/EMÜ). Signaalikaablite
valimisel kasutamiseks koos CE-vastavusmärki omavate seadmetega tuleb siiski järgida spetsiaalseid nõudeid.

Signaalikaablite, läbiviiktihendite ja pistikühenduste kvaliteet:

Brooks valmistab kvaliteetkaableid, mis vastavad CE-sertifitseerimise spetsifikatsioonidele.
Kui te aga soovite kasutada oma signaalikaablit, peaksite valima täielikult varjestatud kaabli vähemalt 100%
varjestusega.

Kasutatavad poolümar- või ümarühendused tuleb varjestada metallekraaniga. Võimaluse korral tuleb kaablivarje
kinnitamiseks kasutada metallist kaablihoidikuid.
Kaabliekraan tuleb ühendada metallkesta või -tihendiga ning varustada mõlemas otsas varjestusega 360° ulatuses.
Varjestus tuleb ühendada maandusklemmiga.

Plaadi külgühendused on tavaliselt mittemetalsest materjalist. CE-sertifitseerimisnõuetele vastamiseks peavad
kasutatavad kaablid olema varustatud 100% varjestusega.

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Section A, CE Certification of
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Model 5866

Español

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Asunto : Addendum al Manual de Instrucciones.
Referencia: Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las
pruebas referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar
un equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto
con un apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea
posible, se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos
completamente en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con
un apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

Français

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de
la Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le
signal d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour
satisfaire à la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

A-4

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Greek

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Section A, CE Certification of

Mass Flow Equipment

Model 5866

A-5

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

541-C-005-AAA Rev D/ DRAFT

April, 2007

Model 5866

Italiano

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato
con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta
a marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per
entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del
100% per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

Latviski

Neonstraat 3
6718 WX Ede
The Netherlands

Latviski

Visas Brooks (elektriskās/elektroniskās) iekārtas ar CE marķējumu ir veiksmīgi pārbaudītas saskaņā ar noteikumiem

par elektromagnētisko saderību (EMC direktīva 86/336/EEK).
Taču īpaša uzmanība ir jāpievērš, izvēloties signāla kabeļus, kas tiks lietoti kopā ar iekārtām, kam piešķirts CE
marķējums.

Signāla kabeļu, kabeļu uzgaļu un savienotāju kvalitāte:

Brooks piedāvā augstas kvalitātes kabeļus, kas atbilst CE marķēšanas noteikumiem.
Taču, ja vēlaties izmantot savu signāla kabeli, izvēlieties pilnībā ekranētu kabeli, kura ekrāna laukums ir vismaz
100%.

Visi izmantotie D tipa vai apaļas formas savienotāji jāekranē, izmantojot metāla ekrānu. Nepieciešamības gadījumā,

lai iespīlētu kabeļa ekranējumu, jāizmanto kabeļu uzgaļi.
Kabeļa ekranējums jāsavieno ar metāla čaulu vai uzgali, un ekranējumam abos kabeļa galos jābūt 360°.
Ekranējums jāsavieno ar zemējuma spaili.

Parasti drukāto shēmas plašu savienotāji nav izgatavoti no metāla. Lai atbilstu CE marķējuma prasībām,
izmantotajiem kabeļiem jābūt ekranētiem, izmantojot ekrānu ar 100% laukumu.

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Mass Flow Equipment

April, 2007

Lietuviškai

Neonstraat 3
6718 WX Ede
The Netherlands

Visi „CE“ ženklu pažymėti „Brooks“ (elektros/elektroniniai) prietaisai sėkmingai testuoti pagal
Elektromagnetinio suderinamumo reikalavimus (EMC direktyva 89/336/EEC).
Tačiau reikia skirti ypatingą dėmesį, parenkant „CE” ženklu pažymėtiems gaminiams naudojamus
duomenų kabelius.

Duomenų kabelių, kabelių riebokšlių ir kištukų kokybė:

„Brooks” užtikrina puikios kokybės duomenų siuntimą kabeliu, atitinkantį „CE” direktyvų
reikalavimus.
Jei, nepaisant to, Jūs pageidaujate naudoti savo duomenų kabelį, rinkitės mažiausiai 100%
padengtą, pilnai ekranuotą duomenų kabelį.

Jis turi būti ekranuotas bet kokiu panaudotu „D” arba koaksialiniu jungiamuoju metalo šarvu. Jei
įmanoma, kabelio dangą reikia suveržti metaliniais kabelio riebokšliais. Kabelio dangą reikia
prisegti prie metalinės apsauginės dangos arba riebokšlio, ir abiejuose galuose turi būti užtikrintas

0

ekranavimas.

360
Dangą reikia prijungti prie įžeminimo apkabos.

Ant kortelės spausdinti kištukai nemetaliniai, atitinka standartus. Tam, kad jie atitiktų „CE”
direktyvas, panaudoti kabeliai turi būti 100% ekranuoti.

Model 5866

Magyar

Brooks Instrument

Neonstraat 3
6718 WX Ede
The Netherlands

Valamennyi CE jellel ellátott Brooks (elektromos/elektronikus) berendezést sikeresen teszteltek a
elektromágneses összeférhetőség követelményeinek megfelelően (EMC előírás 89/336/EEC).
Azonban a CE jellel ellátott berendezésekhez használandó jelkábelek kiválasztására különö
figyelmet kell szentelni.

A jelkábelek, kábel tömszelencék és csatlakozók minősége:

A Brooks kitűnő minőségű kábelezést biztosít, ami eleget tesz a CE irányelvek követelményeinek.

Ha azonban saját jelkábelét szeretné használni, egy legalább 100 %-ban burkolt, teljesen
árnyékolt jelkábelt válasszon.

Bármelyik felhasznált „D” vagy koaxiális csatlakozó fémvértezettel kell legyen árnyékolva. H
alkalmazható, a kábelburkolást fém kábeltömszelencékkel kell összefogni. A kábelburkolást a fém
védőburkolathoz vagy tömszelencéhez kell kapcsolni, és mindkét végén 360
kell biztosítson.
A burkolást egy földelőkapocshoz kell csatlakoztatni.

A kártyára nyomtatott csatlakozók nemfémesek, mint szabványok. A felhasznált kábelek, ahhoz,
hogy megfeleljenek a CE irányelveknek 100 % -os árnyékoltsággal kell rendelkezzenek.

0

–os árnyékoltságo

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Section A, CE Certification of
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Installation and Operation Manual

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Model 5866

Nederlands

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen
aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde
produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels
worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te
klemmen.
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met
een bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.

Norsk

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996
Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i
EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske
utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for
jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over
360°, tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100%
skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

A-8

Installation and Operation Manual

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541-C-005-AAA Rev D/ DRAFT

Section A, CE Certification of

Mass Flow Equipment

April, 2007

Polski

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Wszystkie urządzenia (elektryczne/elektroniczne) typu Brooks oznaczone znakiem CE był
pomyślnie kontrolowane pod względem wymagań zgodności elektromagnetycznej (przepisy EMC
89/336/EEC).
Natomiast szczególną uwagę należy poświęcić na wybranie odpowiednej kabli instalacyjnej d
urządzeń oznaczonych znakiem CE.

Jakość kabli instalacyjnych, dławnic kablowych i złącz:

Brooks zapewnia okablowanie o wybitnej jakości, co odpowiada wymaganiom wytycznych CE.

Aczkolwiek Państwo zamierzacie stosować własny kabel instalacyjny, to należy wybra
odpowiedny kabel ekranowy, przykryty oplotem minimum w 100%.
Wszystkie stosowane złącze typu „D” lub kable koncentryczne powinne być przykryte oplotem
drutów miedzianych. Jeżeli da się zastosować, to należy osłony kablowe zgromadzić dławnicami

kablowymi. Osłony kablowe należy podłączyć do dławnic lub do metalowych pokryw ochronnych,

które na obydwuch końcach muszą być zatłumione w 360%.

Pokrywy muszą być podłączone do złącz uziemnionych.

Drukowane do kart złącze są niemetalowe, jako normy. Stosowane kable ekranowe mają by
przykryte oplotem w 100%, ponieważ wymagania CE to przepisują, którym kable musz
odpowiadać.

Model 5866

Português

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve
utilizarse buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com
blindagem a 100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

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Românã

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Fiecare aparat Brooks (electric/electronic), pevăzut cu inscripţia CE a fost testat cu succes potrivi
cerinţelor compatibilităţii electromagnetice (standardul EMC 89/366/EEC).
Însă o atenţie deosebită trebuie acordată la alegerea cablurilor de semnal pentru aparatur
prevăzută cu inscripţia CE.

Calitatea cablurilor de semnal, a glandelor şi a conexiunilor:

Brooks asigură a cablare de calitate excelentă, care satiface cerinţele standardelor CE.
Însă, în cazul în care doriţi să utililiza
semnal izolat în proporţie de cel puţin 100%, având o ecranare integrală.

Orice conexiune de tip „D” sau coaxială utilizată trebuie să fie ecranată cu armătură metalică. În
cazul în care acesta este utilizabilă, învelişul cablului trebuie strâns cu glande metalice. Est
necesară fixarea invelişului cablului la invelişul metalic sau la glande, în aşa fel încât la ambel
capete ale cablului să asigure o ecranare de 3600.
Învelişul trebuie conectat la o clemă de pământare.

Conform standardelor, conexiunile imprimate pe cartele nu sunt considerate conexiuni metalice. În
vederea conformării standardelor CE, cablurile utilizate trebuie să asigure o ecranare de 100%.

i un cablu de semnal propriu, trebuie să alegeţi un cablu d

April, 2007

Slovensko

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Vse (električne/elekronske) naprave Brooks z zaznamovanjem CE so uspešno testirane primern
zahtevam elektromagnetne kompatibilnosti (EMC predpis 89/336/EEC).
Medtem ko mora se posvetiti posebna pozornost za izbiro signalnih kabl, ki se uporabijo naprave
zaznamovanjem CE.

Kakovost signalnih kabl, kabelskih tulcev in priključkov:

Brooks zavaruje kabliranje odlične kakovosti, kar zadoščuje zahtevam CE direktiv.
Če medtem ko želite uporabiti svoj signalni kabel, izbirajte signalni kabel, ki je vsaj v 100 % zavit in

popolnoma zasenčeni signalni kabel.

Kateri koli „D” ali koaks priključek mora bit zasenčen s kovinsko opremo. Če je uporabivo,
kabelsko oblogo je potrebno zajemati skupaj s kovinskimi tulci za kable. Kabelsko oblogo j
potrebno povezovati s kovinsko zaščitno oblogo ali s tulci in na obeh koncih je potrebno d
zavaruje senco od 360 °.
Oblogo je treba spojiti z ozemljitvijo.

Priključki tiskani na kartico so nekovinski, kot standardi, da ustrezajo direktivam CE, uporabljeni
kabli morajo razpolagati s senco od 100 %.

A-10

Installation and Operation Manual

a

ý

k

é

541-C-005-AAA Rev D/ DRAFT

Section A, CE Certification of

Mass Flow Equipment

April, 2007

Model 5866

Slovensky

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Všetky zariadenia (elektrické/elektronické) Brooks vybavené so značením CE boli úspešne testované podľ
požiadaviek elektromagnetickej zhody (EMC predpis 89/336/EEC).
Avšak pri voľbe signálových káblov k prístrojom vybaveným značkou CE sa musí zaobchádzať s veľkou
opatrnosťou.

Kvalita signálových káblov, káblových izolačných krabíc a prípojok:

Brooks zabezpečuje vynikajúcu kábeláž, ktoré vyhovujú požiadavkám smernice CE.

Ale ak by ste chceli používať vlastné signálové káble, vyberte si aspoň do 100 % pokrytý úplne tienen
signálový kábel.

Ktorákoľvek použitá „D” prípojka alebo koaxiálna prípojka musí byť tienená kovovým krytom. Ak je možné,

káblové pokrytie sa musí združiť izolovanými krabicami pre káblov. Pokrytie káblov sa musia pripojiť
ochrannému krytiu alebo izolačnými krabicami, a na oboch koncoch sa musí zabezpečiť 360°-ové tienenie.

Krytie sa musí pripojiť uzemňovaciemu uzlu.

Prípojky tlačené na karty sú drahé kovy, podľa noriem. Aby vyhoveli požiadavkám smernice CE, použit
káble musia disponovať s 100 %-ným tienením.

Suomi

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin
itse,
olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne
olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

A-11

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

541-C-005-AAA Rev D/ DRAFT

April, 2007

Model 5866

Svensk

Brooks Instrument
Neonstraat 3
6718 WX Ede
The Netherlands

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma
med CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-12

Addendum

April 5, 2004
Attach to the following publications:

X-5850EM, December 1998, Issue 3
X-5964, dated April 1996, Issue 2
X-5866, dated April 1998, Issue 2
X-5866RT, dated May 1998, Issue 2

Brooks® TMF Common Body Dimensions

Brooks® Thermal Mass Flow
Common Body Dimensions

Issue

Dimensional drawings appearing in the above listed instruction manuals do not depict current body fitting configurations
being offered.

Action

The latest revision VCR body fitting configurations offer a modified mounting configuration adding the SEMI
standard mounting hole configuration and only one (1) of the legacy Brooks mounting holes.
When specifying any of the models listed below, please refer to the attached Figures A-1 thru A-2 for mounting
holes and Downport configuration information:
5850EMF
5964D
5866
5866RT

Brooks® TMF Common Body Dimensions

Addendum

April 5, 2004

Attach to the following publications:

X-5850EM, December 1998, Issue 3

X-5964, dated April 1996, Issue 2
X-5866, dated April 1998, Issue 2

X-5866RT, dated May 1998, Issue 2

Figure A-1 Typical MFC/MFM Dimensional Drawing with VCR Fittings for Models 5850EMF, 5964D, 5866 and 5866RT.

2

Addendum

April 5, 2004
Attach to the following publications:

X-5850EM, December 1998, Issue 3
X-5964, dated April 1996, Issue 2
X-5866, dated April 1998, Issue 2
X-5866RT, dated May 1998, Issue 2

Brooks® TMF Common Body Dimensions

Figure A-2 Typical Downport MFC/MFM Dimensional Drawing Fittings for Models 5850EMF, 5964D, 5866 and 5866RT.

3

Model 5866

Installation and Operation Manual

X-PR-5866E-5866M-eng

PN 541-C-005-AAA

April, 2008

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal
use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty
extended by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault
of Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS LOCAL AND WORLDWIDE SUPPORT

Brooks Instrument provides sales and service facilities around the world, ensuring quick delivery from local stock, timely
repairs and local based sales and service facilities.
Our dedicated flow experts provide consultation and support, assuring successful applications of the Brooks flow
measurement and control products.
Calibration facilities are available in local sales and service offices. The primary standard calibration equipment to calibrate
our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant international
standards.

START-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or
(re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results
will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance
persons. Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe
Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to
change without notice.

TRADEMARKS

Brooks ................................. ...............................Brooks Instrument, LLC

Freon TF ..................................................... E.I. DuPont de Nemours & Co.

Hastelloy ..................................................................Haynes International

Kalrez ................................................................... DuPont Dow Elastomers

Teflon .................................................................... E.I. DuPont de Nemours & Co.

Viton ............................................................... DuPont Performance Elastomers

1-888-554-FLOW
+(31) 318 549 290 Within Netherlands 0318 549 290
+011-81-3-5633-7100