Page 1
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Model 5851i
Mass Flow Controller
Brooks® Model 5851i
Page 2
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
Brooks® Model 5851i
September, 2009
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
ESD (Electrostatic Discharge)
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
Page 3
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Y ours sincerely ,
Brooks Instrument
Brooks® Model 5851i
Page 4
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
Page 5
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 1
Introduction
Section 2
Installation
Brooks® Model 5851i
Paragraph
Number Page
1-1 Purpose ............................................................................. 1-1
1-2 Description ........................................................................ 1-1
1-3 Specifications .................................................................... 1-3
2-1 Receipt of Equipment ........................................................ 2-1
2-2 Recommended Storage Practice....................................... 2-1
2-3 Return Shipment................................................................ 2-2
2-4 Gas Connections ............................................................... 2-2
2-5 Installation ......................................................................... 2-3
2-6 In-Line Filter....................................................................... 2-4
2-7 Electrical Interfacing .......................................................... 2-5
2-8 Configuring the PC Board.................................................. 2-8
Section 3
Operation
Section 4
Maintenance and
Troubleshooting
Section 5
Parts List
3-1 Theory of Operation........................................................... 3-1
3-2 Operating Procedure ......................................................... 3-2
3-3 Zero Adjustment ................................................................ 3-3
3-4 Calibration Procedure ........................................................ 3-4
3-5 Response .......................................................................... 3-6
4-1 General.............................................................................. 4-1
4-2 Troubleshooting................................................................. 4-1
4-3 Sensor Tube...................................................................... 4-6
4-4 Disassembly and Assembly ............................................... 4-6
4-5 Use of the Conversion Tables........................................... 4-10
4-6 Use of Orifice Sizing Nomograph ......................................4-11
4-7 Restrictor Sizing ............................................................... 4-15
5-1 General.............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment.......................... A-1
i
Page 6
Brooks® Model 5851i
Figures
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Figure Page
1-1 Command S tep s, Soft Start Disabled................................. 1-2
1-2 0-100% Command S tep, Sof t Start Enabled...................... 1-2
2-1 Model 5851i Dimensions ................................................... 2-3
2-2 D Connector Shielded Cable Hookup Diagram.................. 2-4
2-3 Maximum Allowable Loop Resistance ............................... 2-5
2-4 Common Electrical Hook-Ups, Voltage I/O V ersion ........... 2-6
2-5 Recommended I/O Wiring Configuration for Current Signals
(Non-Isolated Power Supply) ............................................. 2-7
2-6 Recommended I/O Wiring Configuration for Current Signals
(Isolated Power Supply)..................................................... 2-7
3-1 Flow Sensor Operational Diagram..................................... 3-2
3-2 Flow Control System Block Diagram ................................. 3-3
3-3 PC Board Jumper Location & Function.............................. 3-7
3-4 Model 5851i Calibration Connections ................................ 3-8
3-5 Adjustment Potentiometer Location................................... 3-8
3-6 Fast Response Adjustment................................................ 3-9
Tables
4-1 Torque Sequence for the V alve Ret ainer Plate .................. 4-3
4-2 V alve Adjusting Spacer Locations ...................................... 4-5
4-3 V oltmeter Connections for V alve Adjustment ..................... 4-7
4-4 Example Nomograph........................................................ 4-16
4-5 Model 5851i Orifice Sizing Nomograph............................. 4-17
4-6 Model 5851i Restrictor Element Assembly........................ 4-18
4-7 Model 5851i Restrictor Element Orientation in
Controller Body ................................................................. 4-18
5-1 Model 5851i Parts Drawing................................................ 5-2
Table Page
2-1 Recommended Filter Size ................................................. 2-4
4-1 Bench Troubleshooting...................................................... 4-2
4-2 Sensor Troubleshooting..................................................... 4-4
4-3 Conversion Factors (Nitrogen Base)................................. 4-12
5-1 Model 5851i Replacement Parts List ................................. 5-3
5-2 Tool and Spare Part Kits for 5850 Series ........................... 5-4
ii
Page 7
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
1-1 Purpose
1-2 Description
Section 1 Introduction
Brooks® Model 5851i
The Brooks® Model 5851i Flow Controller is a mass flow measurement
device designed for accurately measuring and rapidly controlling flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 5851i
Mass Flow Controller. This manual is organized into five sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and T roubleshooting
Section 5 Replacement Parts
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5851i.
The Brooks Model 5851i Mass Flow Controller is used where manual,
electronic or computer controlled gas handling occurs. The Model 5851i
consists of three basic units: a flow sensor, a control valve and an integral
electronic control system. This combination produces a stable gas flow ,
which eliminates the need to continuously monitor and re-adjust gas
pressures. Standard features include:
Fast Response Control permits rapid gas settling times with little or no
over/undershoot. Refer to Figure 1-1.
Soft St art provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot tolerate
rapid flow transition. Refer to Section 2-7 and Figure 1-2.
V alve Override permits the user to fully open and close the control valve
independent of the setpoint (command) setting. Refer to Section 2-6.
Setpoint (Command) permits the user to program the mass flow controller
with an external 0-5 Vdc or 4-20 mAdc signal. Refer to Section 2-6.
Low Command Valve Inhibit (Auto Shutof f) prevents the valve from
opening whenever the set-point is less than 2% of full scale.
Removable Cleanable Sensor permits the user to clean or replace the
sensor. Refer to Sections 4-2 & 4-4.
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to -0.7 Vdc and +6.8 Vdc on the voltage
signal output and 0 to 26 mA on the current output.
1-1
Page 8
Section 1 Introduction
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 1-1 Command Steps, Soft Start Disabled
Figure 1-2 0 - 100% Command Step, Soft Start Enabled
1-2
Page 9
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
1-3 Specifications
Section 1 Introduction
Brooks® Model 5851i
Standard Ranges
Any full scale flow rate from 10 slpm to 100 slpm (nitrogen equivalent); up
to 200 slpm hydrogen.
Accuracy
±1% full scale including linearity at calibration conditions
Repeatability
0.25% of rate
Response Time
Less than 6 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements
+22.5 to 28 Vdc — 370 mA @ +28 Vdc
Ambient T emperature Limit s
Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)
Working Pressure
1500 psi (10.342 MPa) maximum
Differential Pressure
10 to 50 psi. Higher differential pressures are allowable depending on gas
and range. Consult factory for details.
Output Signal
0-5 Vdc into 2,000 ohms or greater . Maximum ripple 3 mV. Jumper
selectable 4-20 mAdc or 0-20 mAdc. Refer to Fig. 2-3 for maximum
total loop resistance.
5 V olt Reference Output
5 Volt s ±0.2%. Maximum load 1k ohms.
Temperature Sensitivity
Zero: less than ±0.075% full scale per degree C.
Sp an: less than ±1.0% full scale shift over 10-50°C range
Mounting Attitude Sensitivity
±0.5% maximum full scale deviation after re-zeroing
Command Input
Jumper Selectable: 0-5 Vdc, Input resistance 200k ohm or 4-20 mAdc,
Input resistance 75 ohm
1-3
Page 10
Section 1 Introduction
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Leak Integrity
1 x 10-9 Atm. scc/sec Helium
Control Range
50 to 1
Mechanical Connection
Interchangeable with most popular mass flow controllers.
Refer to Figure 2-1.
Electrical Connection
D-Type, 15-pin connector (DA-15P). Mating connector supplied.
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and
101.3 kPa (760 Torr). The mass flow controller can be calibrated to other
reference standard conditions. Specify at time of ordering.
1-4
Page 11
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
2-1 Receipt of Equipment
Section 2 Installation
Brooks® Model 5851i
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.
Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
2-2 Recommended Storage Practice
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:
a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal.
2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condition is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.
2-1
Page 12
Section 2 Installation
Brooks® Model 5851i
2-3 Return Shipment
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Prior to returning any Brooks equipment to the factory , cont act the factory for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel +81 (0) 3 5633 7100
6710 BK Ede, Netherlands Fax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300 Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.
2-4 Gas Connections
Standard inlet and outlet connections supplied on the Model 5851i are 3/8"
compression fittings.
Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.
2-5 Installation (Refer to Figures 2-1 through 2-4)
2-2
Page 13
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Connection "X" Dim.
1/4" Compression
Fitting 145
1/4" Tube VCO
1/4" Tube VCR
3/8" Compression
Fitting 148
1/2" Tube VCO
1/2" Tube VCR
5.70
5.22
133
5.56
141
5.82
5.48
139
5.86
149
Section 2 Installation
Brooks® Model 5851i
Figure 2-1 Model 5851i Dimensions
Recommended installation procedures:
a. The Model 5851i should be located in a clean dry atmosphere rela-
tively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5851i Mass Flow Controller can be inst alled in any
position. However, mounting orient ations other than the original
factory calibration (see data sheet) will result in a ±0.5% maximum
full scale shift after re-zeroing.
e. When installing controllers, be aware that sharp abrupt angles in the
system piping directly upstream of the controller may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of
straight tubing upstream of the 5851i mass flow controller.
NOTE: The control valve in the Model 5851i provides precision control
and is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.
2-3
Page 14
Section 2 Installation
A
(4)
)
A
(4)
)
(1)
)
V
A
A
Brooks® Model 5851i
15 PIN MALE
D-CONNECTOR
*BROOKS READ OUT MFC / MFM FUNCTION WIRE
SIDE SUB D (15 PIN) PIN COLOR
61
10 2
93
24
13 5
14 6
37
58
12 9
810
411
712
113
11 14
15 15
Setpoint
Flow Signal
N
Flow Signal
Power Supply
N
Setpoint
Setpoint
Power Supply
Flow Signal
Reference
alve Override
N
Chassis Ground
N
Installation and Operation Manual
, Com mon Inp u t (-)
, 0(1)-5 volt , Output (+)
-20 mA, Out put (+
, 0
, +15 Vdc to +28 Vdc ORANGE
-20 mA, Input (+
, 0
-5 volt, Input (+
, 0
, Common (-)
, Common, Output (-)
, +5 Vdc, Output (+)
, Input
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
BLACK
WHITE
RED
GREEN
BLUE
WHT/BLK
RED/BLK
GRN/BLK
ORG/BLK
BLU/BLK
BLK/WHT
RED/WHT
GRN/WHT
BLU/WHT
* Brooks Read O ut Mod els 0151, 0152, 0154, 0254
Figure 2-2 D Connector Shielded Cable Hookup Diagram
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
Above 30 slpm 30 micron
10 to 30 slpm 15 micron
NOTE: The above lists the maximum recommended porosity for each flow range. It is
recommended that the minimum micron porosity that does not limit the full scale
flowrate be used.
2-4
Page 15
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 2 Installation
Brooks® Model 5851i
Figure 2-3 Maximum Allowable Loop Resistance
2-7 Electrical Interfacing
To insure proper operation, the 5851i must be connected per Figures 2-2,
2-3 and 2-4 and configured according to Section 2-7. As a minimum, the
following connections must be made for new installations:
Function
Chassis Ground
Signal Output Return
Volt age or Current Signal Output
22.5-28 Vdc Supply
Supply Common
Volt age or Current Setpoint Input
Setpoint Return
Electrical Hook-up
Setpoint (Command) Input
The 5851i Mass Flow Controller can be used with a current (4-20 mAdc)
or voltage (0-5 Vdc) setpoint. To use the current setpoint, connect the
setpoint (+) signal to pin 7 and the setpoint return (-) signal to pin 1 of the
D-connector and configure the PC Board per Section 2-7. To use the
voltage setpoint, connect the setpoint signal to pin 8 and the voltage
setpoint return to pin 1 of the D-connector and configure the PC Board per
Section 2-7.
(The Brook’s MFC acts as a current sink to a setpoint input signal. The 0/420 mA setpoint signal should be “driven” into the MFC input by a controlled
current source. Reference Brook’s device specifications for the setpoint
input impedance.)
2-5
Page 16
Section 2 Installation
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 2-4 Common Electrical Hook-Ups, Voltage I/O Version
Signal Output
The flow signal output can be measured as a voltage and a current
simultaneously on two different pins of the D-connector. Pin 2 indicates the
flowrate with a 0-5 Vdc signal proportional to the mass flow rate. Pin 4
indicates the flowrate with either a 0-20 mAdc or 4-20 mAdc current signal
as determined by jumpers on the PC Board (refer to Section 2-7 for jumper
positions). Both the current and voltage signals are returned on pin 10 of
the D-connector .
(The Brook’s MFC acts as the current source when providing a 0/4-20 mA
output signal to the load. The output signal is “driven” by the MFC into the
customer load. Reference Brook’s device specifications for maximum load
capacity.)
Supply
The power for the mass flow controller is connected to pin 5 (+22.5 to +28
Vdc) and pin 9 (supply common) of the D-connector . Refer to Section 1-3
for the power requirements.
2-6
Page 17
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 2 Installation
Brooks® Model 5851i
Figure 2-5 Recommended I/O Wiring Configuration for Current Sugnals (Non-Isolated Power Supply)
Figure 2-6 Recommended I/O Wiring Configuration for Current Sugnals (Isolated Power Supply)
2-7
Page 18
Section 2 Installation
Brooks® Model 5851i
2-8 Configuring the PC Board
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Chassis Ground
Connect earth ground to pin 14 of the D-connector .
V alve Override (connection optional)
The valve override function allows full opening and closing of the valve
independent of the setpoint:
To open the valve, apply +22.5 to +28 Vdc to pin 12
To close the valve, connect pin 12 to ground.
Isolating pin 12 (no connection) returns the controller to normal
operation.
NOTE: For normal operation, pin 12 must be left open (floating)
NOTE: To obtain access to the jumpers, the electronics cover can must be
removed. Disconnect the power to the mass flow controller and any cables
to the D-connector and the valve coil connector. Remove the three screws
at the base of the can and remove the top jack post of the D-connector.
Remove the can. The can must be replaced before returning the unit to
service. Refer to Section 2-6 for the proper electrical hook-up. Refer to
Figure 3-3 for PC Board jumper locations and functions.
Setpoint (Command) Input
The mass flow controller can be configured for voltage or current setpoint
(command) input. Jumper J7 (green) must be in the right-hand position for
0-5 Vdc setpoint and in the left-hand position for a 4-20 mAdc setpoint
input.
Signal Output
A 0-5 Vdc flow signal output is always available. The current signal output
is jumper selectable for either 0-20 mAdc or 4-20 mAdc. Jumpers J3 and
J4 (blue) must be in the upper position for 0-20 mAdc output and in the
lower position for 4-20 mAdc output.
NOTE: Both J3 and J4 must be in the same position. Jumpers J3 and J4
do not affect the voltage output.
Soft Start
To enable soft start, place Jumper J2 (red) in the right-hand position (SS).
To disable soft start, place jumper J2 in the left-hand position (N).
2-8
Page 19
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
3-1 Theory of Operation
Section 3 Operation
Brooks® Model 5851i
The thermal mass flow sensing technique used in the 5851i works as
follows:
A precision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. (Refer to Figure
3-1) At zero or no flow conditions, the heat reaching each temperature
sensor (one upstream and one downstream of the heater) is equal.
Therefore, the temperatures T1 and T2 are equal. When gas flows through
the tube, the upstream sensor is cooled and the downstream sensor is
heated, producing a temperature difference. The temperature difference
T2-T1 is directly proportional to the gas mass flow.
The equation is: ΔT = A * P * Cp * m
Where,
ΔT = temperature difference T2 - T1 (K)
C
P = heater power (kJ/s)
m = mass flow (kg/s)
A = constant of proportionality (S2 - K2/kJ2)
= specific heat of the gas at constant pressure
p
(kJ/kg-K)
A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate. The flow restrictor shown in Figure 3-1 performs a ranging
function similar to a shunt resistor in an electrical ammeter. The restrictor
provides a pressure drop that is linear with flow rate. The sensor tube has
the same linear pressure drop/flow relationship. The ratio of the restrictor
flow to the sensor tube flow remains constant over the range of the meter .
Different restrictors have different pressure drop s and produce controllers
with different full scale flow rates. The span adjustment in the electronics
affects the fine adjustment of the controller's full scale flow.
In addition to the mass flow sensor, the Model 5851i Mass Flow Controller
has an integral control valve and control circuit, as shown in Figure 3-2.
The control circuit senses any difference between setpoint and the flow
sensor signal and adjusts the current in the modulating solenoid valve to
increase or decrease the flow .
The Model 5851i has the following features incorporated in the integral
control circuit:
Fast Response adjusted by the anticipate potentiometer. This circuit, when
properly adjusted, allows the high frequency information contained in
the sensor signal to be amplified to provide a faster responding flow
signal for remote indication and use by the control valve.
3-1
Page 20
Section 3 Operation
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 3-1 Flow Sensor Operational Diagram
3-2 Operating Procedure
3-2
Soft Start enabled by moving a jumper on the PC Board. This circuit
provides a slow injection of the gas as a protection to the process,
particularly those using a volatile or reactive gas. Full gas flow is
achieved in approximately 20 seconds. Refer to Section 2-7.
Precision 5 Volt Reference allows the direct connection of a setpoint
potentiometer to produce a 0-5 V olt command signal to the controller. A
precision ten-turn 2k ohm potentiometer with an integral turns counter
is recommended. This will permit repeatable adjustment s of setpoint to
1 part in 1,000.
V alve Override allows full opening and closing of the control valve
independent of the command setting. (Refer to Section 2-6)
a. Apply power to the controller and allow approximately 45 minutes for
the instrument to warm up and stabilize its temperature.
b. T urn on the gas supply.
c. Command 0% flow and observe the controller’s output signal. If the
output is not zero mVdc ±10 mVdc or 4 mAdc ±0.05 mAdc, check
for leaks and if none are found, refer to the re-zeroing procedure in
Sect. 3-3.
d. Set the command for the desired flow rate to assume normal
operation.
Page 21
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 3 Operation
Brooks® Model 5851i
Figure 3-2 Flow Control System Block Diagram
3-3 Zero Adjustment
Each 5851i is factory adjusted to provide a zero ±10 mVdc signal or a 4
mAdc ±0.05 mAdc signal at zero flow. The adjustment is made in our
calibration laboratory which is temperature controlled to 21.1°C (70°F
±2°F). After initial installation and warm-up in the gas system, the zero flow
indication may be other than the factory setting. This is primarily caused by
changes in temperature between our calibration laboratory and the final
installation. The zero flow reading can also be affected, to a small degree,
by changes in line pressure and mounting attitude.
To check zero, always mount the controller in its final configuration and
allow a minimum of twenty minutes for the temperature of the controller
and its environment to stabilize. Using a suitable voltmeter or current
meter , check the controller output signal. If it differs from the factory
setting, adjust it by removing the lower pot hole plug which is located
closest to the controller body . Adjust the zero potentiometer (refer to Figure
3-5) until the desired output signal is obtained.
NOTE: If the 0-20 mA output is used, adjust zero by monitoring the voltag e
output signal. This is required because the current output cannot go
negative.
3-3
Page 22
Section 3 Operation
Brooks® Model 5851i
3-4 Calibration Procedure
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
NOTE 1: If the valve has been disassembled and any of the following parts
have been replaced, the control valve adjusting procedure in Section 4-4c
must be performed before the Model 5851i is calibrated.
orifice
valve stem
plunger
lower guide spring
valve seat
NOTE 2: Calibration of the 5851i mass flow controller requires the use of a
digital voltmeter (DVM) and a precision flow standard calibrator such as the
Brooks Vol-U-Meter. It is recommended that the calibration be performed
only by trained and qualified service personnel.
NOTE 3: If the mass flow controller is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor (refer to
Section 4-5). Size the orifice for actual operating conditions (refer to
Section 4-6).
a. With the controller installed in an unpressurized gas line, apply power
and allow approximately 45 minutes for warm-up. During the warm-
up, adjustment and calibration check procedures, do not allow the
control valve to open when gas flow is not present. This situation is
not a normal operating mode; it will cause the control valve to
abnormally heat up. A meter with an abnormally warm valve will be
difficult to calibrate. This situation can be prevented by the valve
override “closed” when there is no gas flow, or setting the setpoint to
less than 1%. Also avoid unnecessary periods with the valve
override “open.”
b. Adjust the anticipate potentiometer fully clockwise (twenty turns).
Then adjust the anticipate potentiometer ten turns counterclockwise
to center the potentiometer . This will provide a rough adjustment of
this circuit and make the flow more stable for calibration.
c. Connect the DVM positive lead to the 0-5V signal output (pin 2) and
the negative lead to signal common (TP4). Adjust the zero
potentiometer for an output of 0mV ±2 mV.
d. Apply pressure to the system and insure that the zero signal repeat s
within 2 mV of the voltage set in step “c” above. If the zero does not
repeat, check for leakage.
NOTE: Controllers supplied with all-metal valve seats do not provide tight
shut-off. A 0-8% leak-through is typical. For metal seat controllers, close a
downstream shut-off valve and observe the zero signal.
3-4
e. Adjust the setpoint for 100% flow (5.000V or 20 mAdc). Connect the
DVM positive lead to TP2 (linearity voltage) and the negative lead to
TP4 (signal common). Adjust the linearity potentiometer for an
output of 0.0V (zero volts).
Page 23
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 3 Operation
Brooks® Model 5851i
f. Connect the DVM positive lead to TP1 (100x sensor voltage) and the
negative lead to TP4 (circuit common). The setpoint should still be
set at 100% flow (5.000V). Measure the flow rate using suitable
volumetric calibration equipment. To adjust the controller to the
proper full scale flow , calculate a new TP1 voltage using the following
equation:
Adjust the span potentiometer until the voltage at TP1 is equal to the value
calculated above. Recheck the flow rate after the flow is stable (at least
two minutes). Repeat this check and adjustment procedure until the
measured flow rate is within 1% of the desired flow rate.
NOTE: The voltage at TP1 is 100 times the output volt age of the sensor.
This voltage can range from 1.2 to 12 volts, however, it is recommended
that this voltage stays between 2.0 and 9.0 volts for proper operation. If the
recommended voltage range exceeds that desired, accuracy and/or signal
stability may not be achieved. If one of the limits is reached, check the
orifice and restrictor sizing procedures. Refer to Sections 4-6 and 4-7
respectively.
g. Adjust the command potentiometer for 0% flow. Connect the DVM
positive lead to 0-5V signal output ( Pin 2) and the negative lead to
TP4. Readjust the zero potentiometer for an output of 0 mV ±2 mV
as necessary .
h. Set the command potentiometer for 50% flow (2.500V) and measure
the flow rate. Calculate the error as a percentage of full scale.
Example:
What is the percent of full scale error when full scale is equal to 100
sccm?
Measured flow rate = 48.5 sccm
Desired flow rate = 50.0 sccm
i. Calculate the TP2 correction voltage: (error recorded in step "h") x
0.450 volts.
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 volt s
New TP2 voltage = 0 volts + (-0.675) = -0.675 volts
3-5
Page 24
Section 3 Operation
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
j. Set the command potentiometer for 100% flow (5.000V). Connect the
DVM positive lead to TP2 and the negative lead to TP4.
k. Adjust the linearity potentiometer for an output equal to the new
calculated TP2 voltage.
l. Repeat steps f, g and h.
1. If the error recorded in step “h” is less than 0.5%, then the calibration
procedure is complete.
2. If the error is greater than 0.5% set the command potentiometer for
100% (5.000V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common).
Calculate a new TP2 voltage as follows:
Example:
Controller error = 0.7%
Measured TP2 volt age = -0.567 volts
TP2 correction = 0.7 x 0.450 = 0.315 volts
New TP2 correction = 0.315 + (-0.567) = -0.252 volts
3-5 Response
Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat steps f, g and h.
NOTE: The voltage at TP2 can range from -10 to +3 volts, however, it is
recommended that this voltage stays between -2.5 and +2.5 volts for
proper operation. If the recommended voltage range is exceeded, the
desired accuracy and/or signal stability may not be achieved. If one of the
limits is reached, check the restrictor sizing. Refer to Section 4-7.
Fast Response Adjustment
Two methods of adjusting the step response of the 5851i mass flow
controllers can be used.
Method Number 1 describes a procedure that will get the step response
close to optimum quickly and without any flow measuring equipment.
This method should be used when the response time of the flow
controller is not critical to overall system performance.
Method Number 2 describes a procedure that will allow adjustment of your
5851i mass flow controller to optimum step response performance.
This method is the preferred way to adjust the step response.
Adjustment of the fast response circuit will not affect the accuracy of
the flow controller as adjusted in Section 3-4.
3-6
1. Fast response adjustment (six seconds response specification not
guaranteed)
NOTE: This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples per second or greater to monitor the
rate of change of the output signal.
Page 25
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 3 Operation
Brooks® Model 5851i
Figure 3-3 PC Board Jumper Location & Function
3-7
Page 26
Section 3 Operation
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 3-4 Model 5851i Calibration Connections
3-8
Figure 3-5 Adjustment Potentiometer Location
Page 27
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Figure 3-6 Fast Response Adjustment
Section 3 Operation
Brooks® Model 5851i
a. Set the command potentiometer for 100% flow (5.00V) and wait
about 45 seconds for the flow output signal to stabilize.
b. Step the command signal to 0% or activate valve override closed to
stop the flow. Observe the flow signal output as it decays.
c. The behavior of the flow signal during this transition between 100%
and 0% flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-6.
d. If the flow signal measured on pin 2 decays to -0.05 to -0.5V, then
rises to 0V , the anticip ate potentiometer is properly adjusted.
e. If the flow signal decays rapidly and goes below -0.5V before rising to
0 V, the anticipate potentiometer must be adjusted clockwise and
steps a and b repeated.
f. If the flow signal decays slowly and does not go below -0.05 V , the
anticipate potentiometer must be adjusted counterclockwise and
steps a and b repeated.
2. Fast response adjustment (six second response specification
guaranteed)
Adjustment of the anticipate potentiometer to obtain a flow rate
performance to be within 2% of flow rate commanded in less than six
seconds after setpoint change requires the use of a fast response
flowmeter (500 millisecond response to be within 0.2% of final value or
better) in series with the 5851i and a storage oscilloscope or recorder.
a. Allow the flow controller to stabilize at 0% setpoint for at least thirty
seconds. Make a step in setpoint to the controller from 0-100% of
full scale flow and record the output signal of the fast response
flowmeter.
b. If this signal shows more than 4% overshoot, adjust the anticipate
potentiometer one-half to one turn counterclockwise. If the signal
does not show overshoot but is not within 2% full scale of final value
after six seconds, adjust the anticipate potentiometer one-half to one
turn clockwise. Set command potentiometer for 0% of flow.
c. Repeat steps a and b until the fast response flowmeter output signal
meets the specified response requirements.
NOTE: With the above equipment, the anticipate potentiometer can be
adjusted to give optimum response characteristics for any process.
3-9
Page 28
Section 3 Operation
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
3-10
Page 29
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
4-1 General
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
No routine maintenance is required on the Model 5851i other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.
4-2 Troubleshooting
4-1
Page 30
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
A. System Checks
The 5851i is generally used as a component in gas handling systems
which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow controller for bench troubleshooting or return, especially if the
system is new:
1. Verify low resistance power supply connections and that the correct
power supply voltage and signals are reaching and leaving the
controller. The breakout board (P/N S273Z668AAA) listed in Section
5 will make this job much easier.
2. Verify that the process gas connections have been correctly
terminated and leak checked.
3. If the mass flow controller appears to be functioning but cannot
achieve setpoint, verify that sufficient inlet pressure and pressure
drop are available at the controller to provide the required flow.
4. V erify that all user select able jumpers are in their desired positions.
Refer to Figure 3-3.
4-2
Page 31
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Section 4 Maintenance
& Troubleshooting
Part Number: 541B109AAG
September , 2009
Table 4-1 Bench Troubleshooting
Trouble Possible Cause Check/Corrective Action
Actual flow overshoots setpoint by Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 .
more than 5% full scale.
Output stays at zero regardless Clogged Sensor. Refer to Section 4-4. Clean sensor. Refer to cleaning.
of setpoint and there is no flow
through the controller. Clogged Control Valve. Check TP3 with the setpoint at 100%. If the voltage is greater than 11V, disassemble
Valve override input is grounded. Check valve override input (Pin 12)
Defective PC Board. Replace PC Board. Refer to Section 4-4.
Output signal stays at +6.8V or 26 mA Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 4-4C.
regardless of command and there
is flow through the controller.
Output signal follows setpoint Leaky control valve. Disassemble and repair valve. Refer to Section 4-4C.
at higher setpoints but will not go
below 2% (8% for all-metal seat).
Output signal follows setpoint Insufficient inlet pressure or pressure drop. Adjust pressure, inspect the filters and clean/replace as necessary.
at lower setpoints but does not reach
full scale. Partially clogged sensor. Check calibration. Refer to Section 3-4.
Controller grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.
Flow is higher than desired.
Controller grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than desired.
Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.
+22.5V -28Vdc applied to the valve override input. Check the valve override terminal. (Pin 12)
Defective PC Board. Replace PC Board. Refer to Section 4-4.
Partially clogged valve. Disassemble and repair control valve. Refer to Section 4-4.
Valve out of adjustment. Adjust valve. Refer to Section 4-4.
Valve guide spring failure. Controller oscillates (see below).
Oversized orifice. Check orifice size. Refer to Section 4-6.
Valve out of adjustment. Adjust valve. Refer to Section 4-4.
Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5.
Faulty pressure regulator. Check regulator output.
Defective PC Board. Replace PC Board. Refer to Section 4-4.
and repair the control valve. Refer to Sections 4-4c and 2-10.
Brooks® Model 5851i
B. Bench T roubleshooting
1. Properly connect the mass flow controller to a +22.5-28 Vdc power
supply , setpoint source and connect an output signal readout device
(4-1/2 digit voltmeter recommended) to pins 2 and 10 of the Dconnector (refer to Figure 2-2). Apply power, set the setpoint to zero
and allow the controller to warm up for 45 minutes. Do not connect
to a gas source at this time. Observe the output signal and, if
necessary, perform the zero adjustment procedure (Section 3-3). If
the output signal will not zero properly , refer to the sensor
troubleshooting section and check the sensor . If the sensor is
electrically functional, the printed circuit board is defective and will
require replacement.
2. Connect the controller to a source of the gas on which it was
originally calibrated. Command 100% flow and adjust the inlet and
outlet pressures to the calibration conditions. V erify that the output
signal reaches and stabilizes at 5.00 volts or 20mA. Vary the
setpoint over the 2 to 100% range and verify that the output signal
follows the setpoint. Apply +22.5-28 volt s to the valve override input
(pin 12) and verify that the output exceeds 100%. Connect the valve
override pin to ground and verify that the output signal falls below
2%. If possible, connect a flow measurement device in series with
the mass flow controller to observe the actual flow behavior and
verify the accuracy of the mass flow controller . If the mass flow
controller functions as describ e d abov e, it is functio ning properly and the
pr o blem m ay li e elsewhere.
4-3
Page 32
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 4-1 Torque Sequence for the Valve Retainer Plate
Table 4-1 lists possible malfunctions which may be encountered during
bench troubleshooting.
C. Sensor T roubleshooting
The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.
NOTE: Do not attempt to disassemble the sensor .
D. Cleaning Procedures
Should the Model 5851i Mass Flow Controller require cleaning due to
deposition, use the following procedures:
1. Remove the unit from the system.
2. Refer to Section 4-4 to disassemble the controller.
4-4
3. Use a hemostat or tweezers to push a 0.007" diameter piano wire
through the flow sensor tube to remove any contamination. For best
results, push the wire into the downstream opening of the sensor tube
(end closest to the control valve). The sensor tube can be flushed with
a non-residuous solvent or DI water . A hypodermic needle filled with
solvent is a convenient means to accomplish this.
Page 33
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Table 4-2 Sensor Troubleshooting
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
An alternate method for flushing out the sensor is to replace the restrictor
element with a low flow plug restrictor. This plug forces all the flow through
the sensor and may dislodge any obstructions. With the valve orifice
removed, subject the flow controller to a high differential pressure.
Pressurizing the outlet of the MFC higher than the inlet may help force the
obstruction upstream and out of the sensor tube.
4. Inspect the orifice for clogging by holding it in front of a light source and
looking for light through the bore. Clean by soaking in a suitable nonresiduous solvent and directing a stream of compressed dry nitrogen
through the bore.
5. Deposits of silicon dioxide may be removed by soaking the internal p arts
in a solution of 5 parts hydrofluoric acid (HF) and 95 part s water (H2O)
followed by a non-residuous solvent or DI water.
6. Restrictor elements can be cleaned in an ultrasonic bath or replaced.
Refer to Section 4-7 for the correct restrictor to use.
7. Blow all part s dry with dry nitrogen and reassemble. Refer to Section
4-4b (assembly).
4-5
Page 34
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 4-2 Valve Adjusting Spacer Locations
4-6
Page 35
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
4-3 Sensor T ube
4-4 Disassembly and Assembly
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
8. Purge the assembled controller with dry nitrogen.
9. Perform the calibration procedure in Section 3-4.
10. When the controller is re-installed in the system, the connections
should be leak-tested and the system should be purged with dry
nitrogen for 30 minutes prior to start-up to prevent the formation of
deposits.
The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.
The Model 5851i Mass Flow Controller may be disassembled in the field
by the user for cleaning, reranging or servicing. Disassemble and
assemble the controller as follows:
NOTE: The 5851i Mass Flow Controller should be disassembled and
assembled in a clean environment to prevent particulate contamination.
A. Disassembly
The numbers in parentheses refer to the spare parts exploded view in
Figure 5-1.
1. Remove the jam nut (1) on top of the valve assembly.
2. Unplug the valve connector from the electronics cover and remove the
coil assembly (2).
3. Remove the hex socket screws (3) securing the valve retaining plate
(4) attaching the valve stem assembly (6).
4. Carefully remove the valve stem assembly (6).
5. Remove the plunger assembly (7, 8, 9 and 11).
4-7
Page 36
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 4-3 Voltmeter Connections for Valve Adjustment
6. Remove and note the position of the valve spring spacers (10) which
may be located above and/or below the lower valve springs (8).
7. Unscrew the orifice (12) from the flow controller body (14) using the
orifice removal tool. (See Section 5, Table 5-2.)
8. Remove the three screws (20) attaching the electronics cover. Remove
the upper j ack post on the D-connector. Remove the e lectronics cover
(23).
9. Unplug the sensor connector from the PC Board. Remove the two
screws (20) securing the bracket (24) and PC Board (15). Remove the
bracket and PC Board.
10. Remove the two hex head screws (18) using a 1/8" hex wrench, and
washers (19) securing the sensor assembly (16). Remove the sensor
assembly.
NOTE: Do not attempt to disassemble the sensor assembly.
4-8
11. Remove the sensor assembly O-rings (17) from the flow controller
body (14). Using the Brooks O-ring removal tool will help prevent
scratching the sealing surface.
Page 37
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
12. Remove the adapter fittings and O-rings (27) from the flow controller
body (14).
13. Remove the four screws (29) from the end block (28) and carefully
remove the end block.
14. Remove the restrictor assembly (21) from the inlet side of the flow
controller body (14) using the header removal tool (Section 5, Table 5-
2). Note the rotational position of the restrictor assembly . (Refer to
Section 4-7)
B. ASSEMBLY
NOTE: It is recommended that all O-rings be replaced during controller
assembly . All O-rings should be lightly lubricated with Fomblin lubricant
(part of O-ring kit, Section 5) prior to their installation.
1. Examine all parts for signs of wear or damage, replace as necessary.
2. See Section 4-7 Restrictor Sizing, Assembly Procedures, Steps 1
through 3 on Page 22.
3. Place the end block O-ring in position and install the end block with
the four hex socket screws. Tighten these screws to 49 inch-lbs. Do not
overtighten.
4. Press the lubricated sensor O-rings (17) into the flow controller body
(14). Install the sensor assembly and secure with two screws (18) and
washers (19) and tighten to 15 in./lbs.
5. Install the orifice (12) and its O-ring (13) using a 3/8 nut driver. Insure
that the orifice is fully seated but do not overtighten.
6. Insert the valve preload spacers (10), if used, into the valve cavity in the
flow controller body (14). Use care to preserve the correct order.
7. Install the valve plunger assembly (7, 8, 9 and 11) on the preload
spac ers (10). Install air gap spacers (10), if used , on top of the valve springs.
8. Install the valve stem assembly (6), secure with the valve retaining plate
(4) and four hex socket screws (3). When installing the screws, they
should first make light contact with the plate which should be checked
to insure that it makes full contact around the stem assembly. Torque
the screws securing the valve retaining plate in a diagonal pattern
(Refer to Figure 4-1) to 15 in./lbs.
4-9
Page 38
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
9. Install the coil assembly (2) over the valve stem assembly (6) and
secure with a jam nut (1).
10. Install the PC Board (15), secure with the bracket (24) and two screws.
Plug the connector from the sensor assembly onto the PC Board. The
flow arrow on the connector should be po inting toward the valve
assembly.
1 1. Inst all the electronics cover (23) on the controller, secure with three
screws (20). Plug the connector from the valve coil into the PC Board
through the hole in the electronics cover .
12. Prior to installation, leak and pressure test to any applicable pressure
requirements.
C. Adjusting the Control V alve
The 5851i control valve has been factory adjusted to insure proper
operation. Readjustment is only required if any of the following parts have
been replaced:
orifice (12)
valve stem (6)
plunger (7)
lower guide springs (8)
valve seat (1 1)
The valve is adjusted in Brooks Mass Flow Controllers by adding spacers
(9 and 10) to the control valve assembly to vary the air gap and initial
preload. Sp acers are used to af fect the proper adjustment because they
provide a reliable and repeatable means for adjustment. Screw type
adjustment mechanisms can change with pressure or vibration and
introduce an additional dynamic seal that is a potential leak site and source
for contamination. Refer to Figure 4-2 for spacer locations.
The preload determines the initial force that is required to raise the valve
seat off the orifice and start gas flow. If the preload is insufficient, the valve
will not fully close and gas will leak through. If the preload is excessive, the
magnetic force generated between the plunger and stem will be insufficient
to raise the plunger and the valve will not open.
The air gap is the space between the top of the plunger and stem. The air
gap determines the force between the plunger and stem at a given voltage
and the total travel of the valve. If the air gap is too small, the plunger travel
may be insufficient to fully open the valve. Also, the magnetic force may be
too high for a given valve coil voltage. If the air gap is too large, the
magnetic force will be insufficient to raise the plunger and the valve will not
open.
NOTE: Prior to starting the valve adjustment procedure, check to insure
that the orifice is properly seated and that the valve parts are not bent or
damaged.
Adjustment Procedure
(Refer to Section 5, Sp are Parts for Spacer Kit)
4-10
a. Remove the electronics cover (23) from the controller. Insure that the
connector from the coil assembly (2) is properly reconnected to the PC
Board after the electronics cover is removed.
b. Perform the electrical and gas connections to the controller following
the instructions in Section 2 of this manual. Use a clean dry inert gas,
such as nitrogen, for this procedure. Do not apply gas pressure to the
controller at this time.
Page 39
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
c. Disassemble the control valve following the procedure given in Section
4-4A above. Note the number, locations and thicknesses of all spacers
(9 and 10).
d. Decrease the preload of the valve by 0.005 inches by either removing a
0.005-inch small preload spacer or by adding a 0.005-inch large
preload spacer . Refer to Figure 4-2.
e. Reassemble the valve fo llowing the assembly procedure i n Section 4-4a.
f. Adjust setpoint for zero percent flow, apply normal operating pressure
and check for valve leak-through by observing the output signal.
g. If the valve leaks through, increase the preload by 0.005" and go to
Step h. If the valve does not leak through, repeat Steps d, e, f and g.
h. Apply normal operating gas pressure and adjust setpoint for 100% flow
(5.000 Volt s on terminal A, Pin 2).
Note: Due to possible heat capacity and density differences between the
test gas and actual process gas for which the MFC was sized, it may be
necessary to increase the inlet pressure to obtain proper control at 1 0 0% flow .
4-5 Use of the Conversion T ables
i. Measure the valve voltage by connecting a voltmeter between test point
3 (TP3) and test point 4 (TP4). Refer to Figure 4-3.
j1. If the flow controller output signal is 100% and the valve voltage is less
than 1 1.5 V, the valve adjustment is complete.
j2. If the flow controller output signal is 100% and the valve voltage is
greater than 1 1.5 V, decrease the air gap with a small 0.005 inch air
gap spacer. Refer to Figure 4-2. Repeat Steps h and i.
j3. If the flow controller output signal is less than 100% and the valve
voltage is greater than 11.5 V, this condition indicates that the inlet
pressure is too low and/or the orifice size is too small. First check
Section 4-6 to insure that the orifice size is correct.
k. Proceed to Section 3 and perform “3-4 C alibration Procedure,” if
required.
If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . Table 4-3 has a list of sensor conversion factors. To
change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas by the gas factor for the calibration gas used.
Actual gas = Output x factor of the new gas
flow rate reading factor of the calibrated gas
4-11
Page 40
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Example:
The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide.
The output reading is 75 sccm when Carbon Dioxide is flowing.
Then 75 x 0.778 = 58.35 sccm
In order to calculate the conversion factor for a gas mixture, the following
formula should be used:
Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine
(Cl) by volume. The desired full scale flow rate of the mixture is 20
slpm. Sensor conversion factor for the mixture is:
4-6 Use of Orifice Sizing Nomograph
Nitrogen equivalent flow = 20/.901 = 22.20 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure- and/
or temperature-dependent. However , gas conditions that vary widely, from
these reference conditions, may cause an additional error due to the
change in specific heat caused by temperature and/or pressure.
The Orifice Sizing Nomograph, Figure 4-5, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:
gas
operating pressure (inlet and outlet)
flow range
The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined in the following paragraphs.
4-12
Example: Determine the orifice size for the following conditions:
Gas: Hydrogen
Page 41
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Section 4 Maintenance
& Troubleshooting
Part Number: 541B109AAG
September , 2009
Table 4-3. Conversion Factors (Nitrogen Base).
GAS NAME FORMULA SENSOR ORIFICE DENSITY
Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C3H
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C
1-Butene C
CIS-2-Butene C4H
Trans-2-Butene C4H
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H
Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013
2
4
3
3
3
3
5
3
3
3
6
4H10
4H8
8
8
2
2
4
4
2
2
2
3
2
3
5
3
3
2
8
6
2
6
2
4
2
2
2
4
3
2
2
2
2
Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H
Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879
Ethylene C2H
Ethylene Oxide C2H4O 0.589 1.254 1.965
Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C2F
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H
4
6
6
6
4
2
3
4
4
3
3
6
6
6
2
14
FACTOR FACTOR (kg/m
0.615 0.970 1.173
0.478 1.199 1.787
0.786 0.781 0.771
0.754 1.661 3.478
0.443 2.044 5.227
0.579 1.569 3.025
0.287 2.502 7.806
0.439 2.214 6.108
0.326 2.397 7.165
0.412 2.303 6.615
0.354 1.413 2.491
0.257 1.467 2.593
0.294 1.435 2.503
0.320 1.435 2.503
0.291 1.435 2.503
0.740 1.255 1.977
0.638 1.650 3.393
0.344 2.345 6.860
0.440 1.770 3.926
0.567 1.555 2.045
0.876 1.598 3.214
0.693 1.554 3.011
0.433 1.812 4.125
0.505 1.770 3.906
0.442 2.066 5.340
0.243 2.397 7.165
0.337 2.044 5.208
0.430 1.985 4.912
0.498 1.366 2.322
0.387 1.413 2.491
0.505 1.224 1.877
0.995 0.379 0.177
0.448 1.000 1.235
0.363 2.652 8.768
0.215 2.905 10.53
0.390 2.099 5.492
0.442 1.897 4.506
0.382 1.879 4.419
0.231 2.449 7.479
0.259 2.336 6.829
0.341 1.957 4.776
0.415 1.536 2.940
0.458 1.512 2.860
0.627 1.360 2.411
0.247 1.613 3.244
0.332 1.493 2.779
0.490 1.038 1.357
0.365 1.384 2.388
0.619 1.000 1.261
0.924 1.163 1.695
0.529 1.584 3.127
0.649 1.653 3.418
0.268 2.766 9.574
0.257 2.654 8.814
0.219 2.434 7.414
0.632 2.577 8.309
0.255 2.219 6.139
0.249 2.312 6.663
0.139 2.404 7.208
0.204 1.757 3.847
Brooks® Model 5851i
3
)
4-13
Page 42
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Table 4-3. Conversion Factors (Nitrogen Base) Continued.
GAS NAME FORMULA SENSOR ORIFICE DENSITY
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539
Iodine Pentafluoride IF
Isobutane C
Isobutene C
Isopentane C5H
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308
Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C3H
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-11 3 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF
Uranimum Hexafluoride UF
Vinyl Bromide C2H3Br 0.524 1.985 4.772
4-14
Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046
Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851
4H10
4H8
3H8
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
FACTOR FACTOR (kg/m
2
5
1.008 0.269 0.090
0.283 2.819 9.907
0.260 1.440 2.593
0.289 1.435 2.503
12
4
4
10
2
2
4
2
2
3
3
8
2
2
3
5
12
10
8
8
12
2
3
5
3
6
6
4
4
4
2
6
4
3
2
4
4
4
3
3
3
6
6
0.211 1.605 3.222
0.763 0.763 0.717
0.473 1.196 1.782
0.252 1.584 3.127
0.359 1.269 2.013
0.565 1.067 1.420
0.212 2.371 7.008
1.000 1.000 1.251
0.758 1.713 2.052
0.501 1.598 3.168
0.443 1.649 3.389
0.169 2.672 8.933
0.988 1.067 1.429
0.672 1.388 2.402
0.738 1.310 2.138
0.287 2.070 5.360
0.212 1.605 3.222
0.738 2.918 10.61
0.268 2.672 8.933
0.179 2.591 8.396
0.212 1.605 3.222
0.504 1.881 4.418
0.783 1.100 1.517
0.346 2.109 5.620
0.495 1.770 3.906
0.343 1.274 2.008
0.401 1.234 1.875
0.230 3.279 13.41
0.625 1.070 1.440
0.310 2.465 7.579
0.395 1.931 4.648
0.728 1.529 2.858
0.270 2.348 6.516
0.353 1.957 4.776
0.535 1.691 3.575
0.423 1.931 4.648
0.344 2.345 6.858
0.361 1.905 4.526
0.367 1.926 4.624
0.329 2.201 6.038
0.300 1.929 4.638
0.231 2.520 7.920
0.227 3.264 13.28
0.220 3.548 15.70
3
)
Page 43
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Flow Rate: 100 slpm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig
1. Determine Nitrogen equivalent flow rate (refer to Table 4-3).
Q
Q
D
D
Nitrogen
gas
Nitrogen
gas
= Nitrogen equivalent flow rate (sccm)
= Desired flow rate of the gas (sccm)
= Density of Nitrogen at 70°F
= Density of the gas (taken at customer
temperature)
SG
gas
= Specific gravity of the gas (taken at customer
temperature)
Refer to Table 4-3 for specific gravities.
Example:
In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:
Where P1 = percentage by volume of gas 1
P2 = percentage by volume of gas 2
Pn = percentage by volume of gas n
Example: Find the Nitrogen equivalent flow for 20 slpm of a 20%
Helium and 80% Chlorine gas mixture.
4-15
Page 44
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Q
=Q
Nitrogen
(orifice conversion factor)
gas
= 20 x 1.439
= 28.34 slpm Nitrogen
2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7
to convert to absolute pressure (psia).
Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia
3. Determine Critical Pressure Drop
Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or
P outlet < P inlet
2
If these conditions exist, the pressure drop (Δp) should be calculated as
follows:
4-16
If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.
Then Δp = 64.7 - 44.7 = 20 psi
4. Using the nomograph, locate the pressure drop (psi) on the vertical line
marked "Dp" (Point A).
5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical
line marked "Q
6. Draw a line connecting Dp and Q
Nitrogen
" (Point B).
and extend it to the baseline.
Nitrogen
Mark this point (Point C).
7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).
8. Draw a line connecting P
(Point D) and baseline (Point C) and then
in
extend this line to the vertical line marked Do (orifice diameter, inches)
(Point E).
9. This point on the line is the minimum orifice size for the given
conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow . If the orifice selected falls
below .0013, choose .0013 size orifice.
For the example in Figure 4-4, the .007 size orifice would be selected.
Page 45
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Figure 4-4 Example Nomograph
Table 4-4 5851i Restrictor Selection Guide.
Range Restrictor
slpm Nitrogen Element
Equivalent Flow* Combination Part Number
4.6 to 15 1-40 micron (1 inch) S-613-E-604-BMT
15 to 26 1-40 micron S-613-E-636-BMT
26 to 42 2-40 micron S-613-E-523-BMT
42 to 60 3-40 micron S-613-E-526-BMT
60 to 79 2-40 micron/1-60 micron S-613-E-528-BMT
79 to 93 1-40 micron/2-60 micron S-613-E-529-BMT
93 to 130** 3-60 micron S-613-E-527-BMT
* Based on 0°C Standard Reference Temperature
** For Hydrogen from 130 slpm to 200 slpm use 3-60 micron restrictor
elements.
NOTE: If the nitrogen equivalent flow is between two sizes, select the
larger size.
4-17
Page 46
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Table 4-5 Model 5851i Orifice Sizing Nomograph
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
4-18
Page 47
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Figure 4-6 Model 5851i Restrictor Element Assembly
Figure 4-7 Model 5851i Restrictor Element Orientation in Controller Body
4-19
Page 48
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
4-7 Restrictor Sizing
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow , however, the
total flow through each restrictor is different. Different restrictors have
different pressure drops and produce controllers with dif ferent full scale
flow rates. For a discussion of the interaction of the various parts o f th e
controller, you are urged to review Section 3-1 “Theory of Operation.”
If the restrictor assembly has been contaminated with foreign matter , the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate.
Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:
Appropriate size hex wrench for the removal of the inlet block.
Restrictor removal tool may be required (contained in Service Tool Kit
P/N S778D017AAA)
Restrictor O-ring, refer to the spare parts Section 5 for the correct part
number.
The 5851i Mass Flow Controller utilizes porous metal restrictor assemblies
for all full scale flow rates. Restrictor elements with porosities of 40 and 60
microns are used in different combinations. Up to three restrictor elements
can be placed in one assembly . These restrictors are assembled by
pressing the porous metal elements into the header plate.
When sizing a restrictor assembly for gases other than nitrogen, the
sensor conversion factor must be included as the restrictor is used to divert
a portion of the process flow through the sensor. Use the following
equation to obtain the desired output in nitrogen equivalent units. Refer to
Table 4-3 for the conversion factor list.
Example:
The desired gas is cyanogen (C2N2).
The desired full scale flow rate is 30 slpm.
Sensor conversion factor is 0.499 from Table 4-3.
Nitrogen equivalent flow = 30/0.499 = 60.1 slpm Nitrogen.
4-20
In the example above, the restrictor should be sized for a 60.1 slpm flow
rate (P/N S613E528BMT).
If a restrictor assembly is being replaced because the original has become
contaminated, the original may be used as a guide to select the
replacement assembly . The porosity of the original element or element s is
marked on the calibration sheet which was shipped with the flow controller.
The replacement assembly should be replaced in the same orientation as
the original restrictor.
Page 49
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Assembly Procedures
1. Select the proper restrictor element combination.
2. When handling restrictor elements, use care to insure that they are not
contaminated with dirt, grease, oil, etc. The use of rubber gloves is
recommended.
3. Put a lightly lubricated O-ring onto the header plate. The restrictor
assembly can then be installed in the mass flow controller body
(restrictor element(s) go in first). It is important that the restrictor
assembly is put into the body in the correct orientation (Refer to Figure
4-7). Push this assembly in with your fingers. Do not use an arbor press
or hammer to install the restrictor assembly . The restrictor assembly
should be pushed in until it bottoms out. Do not force it beyond this point.
4. Place the end block O-ring in position and install the end block with the
four hex socket screws. Tighten these screws to 49 in./lbs. Do not overtighten.
5. Install the inlet adaptor fitting and O-ring.
6. Calibrate the mass flow controller (Refer to Section 3-4). If the TP2
voltage as calculated in the calibration procedure, Section 3-4, step f, is
below 1.2 volts, the flow rate will be greater than desired. If this occurs,
the restrictor assembly should be replaced with the next lower flow rate
assembly . If the TP1 procedure, Section 3-4 step f is greater than 4.5
volts, the flow through the controller will be less than desired. If this
occurs, the restrictor assembly should be replaced with the next higher
flow rate assembly.
4-21
Page 50
Section 4 Maintenance
& Troubleshooting
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
4-22
Page 51
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
5-1 General
Section 5 Parts List
Brooks® Model 5851i
When ordering parts, please specify:
Brooks Serial Number
Model Number
Part Description
Part Number
Quantity
(Refer to Figure 5-1 and Tables 5-1 and 5-2).
5-1
Page 52
Section 5 Parts List
Brooks® Model 5851i
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Figure 5-1 Model 5851i Parts Drawing
5-2
Page 53
Installation and Operation Manual
Section 5 Parts List
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Table 5-1 Model 5851i Replacement Parts List (Continued on next page)
Item
No. Quantity Description Part Number
1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169CZ%
5 1 O-Ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem, High Flow 949Z203QOA
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-Ring 375B016***
7 1 Valve Plunger Assembly, High Flow S622Z165AAA
8 1 Lower Guide Spring 820Z083BMA
9 AR Small Valve Spacer, 0.005" Thick 810A362BMA
Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
Large Valve Spacer, 0.010" Thick 810A361BMA
11 1 Valve Seat with VitonTM Insert S715Z051AAG
Valve Seat with Buna Insert S715Z050AAG
Valve Seat with Kalrez
Valve Seat Solid 316 Stainless Steel 715Z181BNT
12 1 Orifice, Stainless Steel ID 0.0040" 577Z275BMT
(Refer to Section 4-6 ID 0.0635" 577Z312BMT
for sizing) ID 0.0700" 577Z314BMT
13 1 O-Ring, Orifice, Size 0011 375B011***
14 1 Controller Body S854Z157BMA
15 1 PC Board Assembly (D-Connector) S097Y901AAA
16 1 Sensor Assembly S774Z607AAA
17 2 O-Ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 753Q103ACZ
19 2 Lock Washer, Sensor 962D005AWA
20 5 Screw, Sensor-PC, Board-Cover 753 L056A WZ
21 1 Restrictor Assembly and Components (Refer to Section 4-7 for sizing)
22 1 O-Ring, Restrictor, Size 026 375B026***
23 1 Electronics Cover Can (D-Connector) 219Z431EA%
23A 1 Cover Plate (D-Connector) 852Z209EA%
24 1 PC Board Mounting Bracket 079Z135EAA
26 2 Pot Hole Plug 620Z434SXA
TM
Insert S715Z163AAA
ID 0.0067" 577Z277BMT
ID 0.0091" 577Z280BMT
ID 0.0120" 577Z283BMT
ID 0.0160" 577Z286BMT
ID 0.0210" 577Z289BMT
ID 0.0260" 577Z293BMT
ID 0.0310" 577Z296BMT
ID 0.0360" 577Z300BMT
ID 0.0410" 577Z305BMT
ID 0.0465" 577Z308BMT
ID 0.0550" 577Z310BMT
ID 0.0760" 577Z316BMT
ID 0.0820" 577Z319BMT
ID 0.0935" 577Z322BMT
ID 0.1065" 577Z328BMT
ID 0.1200" 577Z333BMT
ID 0.1405" 577C336BMT
Brooks® Model 5851i
*** QTA = VitonTM, SUA = Buna, TTA = Kalrez
AR As required, NS Not Shown
TM
5-3
Page 54
Section 5 Parts List
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
Brooks® Model 5851i
Table 5-1 Model 5851i Replacement Parts List (Continued)
Item
No. Quantity Description Part Number
NS 2 Fitting, 1/4" Compression, Swagelok 320B136BMA
Fitting, 1/4" Male VCR, Cajon 315Z036BMA
Fitting, 1/4" Male VCO, Cajon 315Z035BMA
Fitting, 3/8" Compression 320B150BMA
Fitting, 3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA
Fitting, 3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA
27 2 O-Ring, Fitting, Size 906 375B906***
NS 2 O-Ring, VCO Gland, Size 010 375B010***
NS 1 O-Ring, End Block, Size 029 375B029***
NS 1 Interconnecting Cables Length D-Connector
D-Connector on one end with no 5 Feet S124Z361AAA
termination on the other end 10 Feet S124Z362AAA
25 Feet S124Z363AAA
50 Feet S124Z435AAA
NS 2 8-32 Mounting Screw Customer Supplied
28 1 End Block with Integral Inlet Screen S079Z200AAA
29 4 Screw, End Block 751Z105AAO
*** QTA = Viton, SUA = Buna, TTA = Kalrez
AR As required, NS Not Shown
September, 2009
Table 5-2 Tool and Spare Part Kits for 5850 Series
5850/5851 Series Service Tool Kit 5851 Header Removal Tool
P/N S778D017AAA P/N S817Z036AAA
Permits the complete disassembly of the 5850i for servicing 0550/5851 Orifice Removal Tool
Contains:
1 — O-Ring Removal Tool
1 — Potentiometer Adjustment Tool
1 — Ball Point Allen Wrench
1 — Phillips Screw Driver
1 — Nut Driver for Orifice
1 — Restrictor Removal Tool
1 — Common Screw Driver
5850/5851 Series Break Out Board Assembly 5850/5851 Series Valve Shim Kit
P/N S273Z668AAA P/N S810A372BMA
Installs directly between mass flow controller and interconnecting Contains:
cable. Allows convenient access to all signals for easy trouble- 1 — .010" Large Spacer
shooting of system. 2— .005" Large Spacers
Contains: 2 — .005" Small Spacers
1 — Break Out PC Board
1 — 5 Foot Extension Cable
1 — Terminal PC Board
*** QTA = Viton, SUA = Buna, TTA = Kalrez
P/N S908Z049AAA
1 — .010" Small Spacer
5-4
NOTE: Refer to Brooks' publication DS-5800 for additional
accessories.
Additional publications available:
T-086 MFC Cont amination Control in Semiconductor Processing
Equipment V alve Application Guide/Service Manual
Page 55
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om
elektrisk støj (EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger
skal enten være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender , til stikkets met alhus eller PG-forskruningen og have forbindelse over
360 grader .
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm
med 100% dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Section A CE Certification
Brooks® Model 5851i
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.
Nach erfolgreichen Tests enstprechend den Vorschif ten der Elektromagnetischen V erträglichkeit (EMC Richtlinie
89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der V erbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der S pezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet
werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen
Umfang von 360 ° anzuschließen.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Platinen-Steckverbindunger sind st andardmäßige keine metallgeschirmten V erbindungen. Um die
Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu
verwenden.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Page 56
Section A CE Certification
Brooks® Model 5851i
English
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations
of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
S pecial attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a
100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands
must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to
comply with CE certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Español
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las
pruebas referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a
utilizar un equipo con marca CE
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su
conjunto con un apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pant alla metálica. Cuando
sea posible, se deberán utilizar prensaestopas metálicos provistos de abrazadera para la p ant alla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos
completamente en los 360 Grados.
La pantalla deberá conect arse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser
protegidos con un apantallamiento del 100% p ara cumplir con la certificación CE.
La pantalla deberá conect arse a tierra.
Para ver la configuración de los pines: Por favor , consultar Manual de Instrucciones adjunto.
A-2
Page 57
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Français
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les
règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour
véhiculer le signal d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du
câble, et à chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100%
pour satisfaire à la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Section A CE Certification
Brooks® Model 5851i
Greek
A-3
Page 58
Section A CE Certification
Brooks® Model 5851i
Italiano
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggett a a marcatura CE, ha
superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/
336/EEC).
E’ richiesta comunque una speciale attenzione nella scelt a dei cavi di segnale da usarsi con la strumentazione
soggetta a marchio CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente
intende usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso
deve essere metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per
entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una
schermatura del 100% per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello
strumento.
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en
voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
S peciale aandacht is echter vereist wanneer de signaalkabel gekozen word t voor gebruik met CE gemarkeerde
produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE
certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien
kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het
kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn
met een bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
A-4
V oor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
Page 59
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i
metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i
begge ender over 360°, tilkoblet elektrisk jord.
• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100%
skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
medleverte plugger, vennligst se håndboken som hører til ut styret.
V ennlig hilsen
Section A CE Certification
Brooks® Model 5851i
For tilkobling av
Português
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento
da Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário
ter uma atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário,
deve utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com
blindagem a 100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
A-5
Page 60
Section A CE Certification
Brooks® Model 5851i
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : T ammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan
signaalikaapelin itse, olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää met allisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja
jotta ne olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September, 2009
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt
utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall
alternativt med metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kont akternas metallkåpor eller genomföringar med 360
graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att
överensstämma med CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
A-6
Page 61
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
September , 2009
Brooks® Model 5851i
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
Page 62
Installation and Operation Manual
X-TMF-5851i-MFC-eng
Part Number: 541B109AAG
Brooks® Model 5851i
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer ’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and
reliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the
relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
September , 2009
ST ART-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
Americas
1 888 554 FLOW
Europe +31 (0) 318 549 290
Asia +81 (0) 3 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.
TRADEMARKS
Brooks.......................................................... Brooks Instrument, LLC
Fomblin .............................................................................. Ausimont
Freon............................................... E. I. DuPont de Nemours & Co.
Hastelloy ........................................................... Haynes International
Kalrez..........................................................DuPont Dow Elastomers
Monel .................................................... Inco Alloys International Inc.
VCO ......................................................................... Cajon Company
VCR ......................................................................... Cajon Company
Viton............................................. DuPont Performance Elastomers
Vol-U-Meter .................................................Brooks Instrument, LLC
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