Page 1
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Model 5851E
Mass Flow Meter
Brooks® Model 5851E
Model 5851E
Mass Flow Controller
with Card Edge Connector
Model 5851E
Mass Flow Controller
with D-Connector
Page 2
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
Brooks® Model 5851E
November , 2008
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international
standards. Because these instruments are sophisticated technical products, you must properly install, use and
maintain them to ensure they continue to operate within their normal specifications. The following instructions
must be adhered to and integrated into your safety program when installing, using and maintaining Brooks
Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not
the correct manual, telephone 888-554-FLOW or 215-362-3700 and the requested manual will be provided.
Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for
clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and
per applicable local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain
the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by
Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the
safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or
improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance
is being performed by qualified persons, to prevent electrical shock and personal injury.
CAUTION
This instrument contains electronic components that are susceptible
to damage by static electricity. Proper handling procedures must be
observed during the removal, installation or other handling of internal
circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or
other internal device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive bag or other conductive container. Boards must not be
removed from protective enclosure until immediately before installation. Removed boards must immediately be
placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern
electronic designs contain components that utilize metal oxide technology (NMOS, CMOS, etc.). Experience has
proven that even small amounts of static electricity can damage or destroy these devices. Damaged components,
even though they appear to function properly , exhibit early failure.
Page 3
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Y ours sincerely ,
Brooks Instrument
Brooks® Model 5851E
Page 4
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
THIS PAGE WAS
INTENTIONALLY
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Page 5
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 200 8
Section 1
Introduction
Paragraph Page
Number Number
Purpose ............................................................................................1-1
Description........................................................................................1-1
Specifications.................................................................................... 1-3
Section 2
Installation
Receipt of Equipment .......................................................................2-1
Recommended Storage Practice ...................................................... 2-1
Gas Connections ..............................................................................2-1
Installation ........................................................................................2-1
In-Line Filter......................................................................................2-2
Soft S tart...........................................................................................2-6
Remote Set Point (Command) Input.................................................2-6
Valve Override ..................................................................................2-7
Remote Transducer Input (Factory Installed Option) ........................2-7
V alve T est Point ................................................................................2-7
Valve Off ...........................................................................................2-8
V olt Reference Output/V alve Drive Configuration..............................2-8
Brooks® Model 5851E
Section 3
Operation
Section 4
Maintenance
Section 5
Parts List
Appendix A
CE Certification
Theory of Operation..........................................................................3-1
Operating Procedure ........................................................................3-3
Zero Adjustment ...............................................................................3-3
Calibration Procedure .......................................................................3-6
Response .........................................................................................3-9
General.............................................................................................4-1
Troubleshooting ................................................................................ 4-1
Sensor Tube .....................................................................................4-5
Disassembly and Assembly ..............................................................4-5
Gas Conversion Factors ..................................................................4-11
Orifice Sizing ...................................................................................4-14
Restrictor Sizing...............................................................................4-18
General.............................................................................................5-1
Page
CE Certification of Mass Flow Equipment.........................................A-1
Figures
i
Page 6
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure Page
Number Number
1-1 Command Step s, Sof t Start Disabled ............................1-2
1-2 100% Command Step, Sof t Start Enabled ..................... 1-2
2-1 Model 5851E Dimensions..............................................2-3
2-2 Model 5851E Card Edge Connector Comparison Guide 2-4
2-3 Model 5851E Card Edge Connector Hookup Diagram .. 2-5
2-4 D-Connector Pin Arrangement ......................................2-5
3-1 Flow Sensor Operational Diagram.................................3-2
3-2 Flow Control System Block Diagram .............................3-3
3-3 Card Edge PC Board Jumper Location & Function........3-4
3-4 D-Connector PC Board Jumper Location & Function ....3-5
3-5 Model 5851E Calibration Connections...........................3-7
3-6 Adjustment Potentiometer Location...............................3-8
3-7 Fast Response Adjustment .......................................... 3-11
4-1 Torque Sequence for the Valve Retainer Plate ..............4-7
4-2 Valve Adjusting Sp acer Locations ..................................4-9
4-3 Voltmeter Connections for V alve Adjustment................4-10
4-4 Example Nomograph....................................................4-17
4-5 Restrictor Element Assembly........................................4-20
4-6 Restrictor Element Orientation in Controller Body.........4-20
5-1 Model 5851E Parts Drawing .......................................... 5-2
Tables
Table Page
Number Number
2-1 Recommended Filter Size .............................................2-6
4-1 Bench Troubleshooting.................................................. 4-3
4-2 Sensor Troubleshooting.................................................4-4
4-3 Conversion Factors (Nitrogen Base) ............................4-12
4-4 Orifice Sizing Nomograph.............................................4-15
4-5 Restrictor Selection Guide............................................4-19
5-1 Model 5851E Replacement Parts List............................5-3
5-2 Tools and Spare Part Kits for Model 5851E ...................5-4
ii
Page 7
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
1-1 Purpose
1-2 Description
Section 1 Introduction
Brooks® Model 5851E
The Brooks® Model 5851E Flow Controller is a mass flow measurement
device designed for accurately measuring and rapidly controlling flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Model 5851E
Mass Flow Controller. This manual is organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Replacement Parts
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5851E.
The Brooks Model 5851E Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5851E consists of
three basic units: a flow sensor, a control valve and an integral electronic
control system. This combination produces a stable gas flow , which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:
-FAST RESPONSE CONTROL permits rapid gas settling times with little or
no over/undershoot. Refer to Figure 1-1.
-SOFT START provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot tolerate
rapid flow transition. Refer to Section 2-6 and Figure 1-2.
-VALVE OVERRIDE permits the user to fully open and close the control
valve independent of the command setting. Refer to Section 2-8.
-SETPOINT (Command) permits the user to program the mass flow
controller with an external 0-5 Vdc command voltage in lieu of a command
potentiometer . Refer to Section 2-7.
-LOW COMMAND V ALVE INHIBIT (Auto Shut-off) typically prevent s the
valve from opening whenever the set-point is less than 2% of full scale.
-REMOV ABLE CLEANABLE SENSOR permit s the user to clean or replace
the sensor . Refer to Section 4-4.
-OUTPUT LIMITING prevents possible damage to data acquisition devices
by limiting the output to +6.8 Vdc and -0.7 Vdc.
-VALVE OFF accessed via Terminal J on the Card Edge or Pin 4 on the
D-Connector version. This feature allows the user to close the control
valve independently of the command signal by supplying a TTL level low
signal to the proper terminal. This function is useful when performing
repetitive flow operations or as a safety shutdown. Refer to Section 2-11.
1-1
Page 8
Section 1 Introduction
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 1-1 Command Steps, Soft Start Disabled
Figure 1-2 0 — 100% Command Step, Soft Start Enabled
-VALVE TEST POINT accessed via Terminal D on the Card Edge or Pin 7
on the D-Connector version. This feature allows the user to monitor the
control valve voltage during operation. Refer to Section 2-10.
1-2
-REMOTE TRANSDUCER INPUT accessed via Terminal 5 on the Card
Edge or Pin 15 on the D-Connector version. This features allows the use of
the integral control electronics and valve to regulate flow in response to the
signal from an external 0-5 Vdc signal. The mass flow signal from the
Model 5851E is still available for process monitoring.
Page 9
Installation and Operation Manual
WARNING
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
1-33 Specifications
Section 1 Introduction
Brooks® Model 5851E
Do not operate this instrument in excess of the specifications listed
below. Failure to heed this warning can result in serious personal
injury and/or damage to the equipment.
Standard Ranges
Any full scale flowrate from 10 slpm to 100 slpm* (Nitrogen equivalent), up
to 200 slpm Hydrogen.
*Standard temperature and pressure in accordance with SEMI (Semiconductor
Equipment and Materials International) standard: 0° C and 101.3 kPa (760 Torr).
Accuracy
±1% full scale including linearity at calibration conditions
Repeatability
0.25% of rate
Response Time
Less than 3 seconds response to within 2% of full scale final value with a
0 to 100% command step.
Power Requirements
+15 Vdc ±5%, 350 mA
-15 Vdc ±5%, 350 mA
10.5 watts power consumption
Class III Equipment: The dc Mains input shall be supplied from a SEL V
(Separated Extra-Low V oltage) source.
Ambient T emperature Limit s
Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to +212°F (-25°C to +100°C)
Working Pressure
1500 psi (10.342 MPa) maximum
Differential Pressure
10 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.
Output Signal
0-5 Vdc into 1000 ohms or greater. Maximum ripple 3 mV
5 V olt Reference Output
5 Volt s ±0.2%. Maximum load 1 k ohms
T emperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Sp an: Less than ±1.0% F.S. shift over 10-50° C range
Power Supply Sensitivity
±0.09% full scale per % power supply voltage variation
1-3
Page 10
Section 1 Introduction
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Mounting Attitude Sensitivity
±0.5% maximum full scale deviation after re-zeroing
Command Input
0-5 Vdc. Input resistance 200 k ohm
Leak Integrity
1 x 10-9 Atm. scc/sec Helium
Control Range
50 to 1
Mechanical Connection
Refer to Figure 2-1
Electrical Connection
Card Edge, 20 terminals, gold over low stress nickel plated copper .
D-Connector, 15 pin (DA-15P)
Environmental Conditions:
Installation Category: "I"
Pollution Degree: 2
Humidity: 50-80% Relative Humidity
Meter Altitude: 2,000 meters (6,562 feet)
For Indoor Use ONL Y
Mains supply voltage fluctuations not to exceed ±10% of the nominal
voltage
1-4
Page 11
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
2-1 Receipt of Equipment
Section 2 Installation
Brooks® Model 5851E
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.
Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
2-2 Recommended Storage Practice
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands Fax 011-81-3-5633-7101
Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com
Fax 31-318-549-309
E-mail: BrooksEu@BrooksInstrument.com
If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:
a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal.
2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condi-tion is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.
2-1
Page 12
Section 2 Installation
Brooks® Model 5851E
2-3 Return Shipment
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Prior to returning any Brooks equipment to the factory , cont act the factory for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands Fax 011-81-3-5633-7101
Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com
Fax 31-318-549-309
E-mail: BrooksEu@BrooksInstrument.com
Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.
2-4 Gas Connections
Standard inlet and outlet connections supplied on the Model 5850i are 1/4"
compression fittings.
Optional 1/8" compression, VCOTM and VCRTM connections are available
upon request. Prior to installation, make certain all piping is clean and free
of obstructions. Install the piping in such a manner that permits easy
removal if the instrument is to be removed for cleaning or test bench
troubleshooting.
2-5 Installation (Refer to Figures 2-1 through 2-4)
2-2
Page 13
Installation and Operation Manual
CAUTION
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 2 Installation
Brooks® Model 5851E
Recommended installation procedures:
a. The Model 5850E should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5850E Mass Flow Controller can be installed in any
position. However, mounting orient ations other than the original
factory calibration (see data sheet) will result in a ±0.5% maximum
full scale shift after re-zeroing.
e. When installing controllers with full scale flow rates of 10 slpm or
greater, be aware that sharp abrupt angles in the system piping
directly upstream of the controller may cause a small shift in accuracy. If possible, have at least ten pipe diameters of straight tubing
upstream of the 5850E MFC.
Note: The control valve in the Model 5851E provides precision control
and is not designed for positive shut-off. If positive shut-off is required,
it is recommended that a separate shut-off valve be installed in-line.
Since the Model 5851E control valve is not a positive shut-off, a
separate solenoid valve may have been installed for that purpose.
It should be noted that a small amount of gas may be trapped
between the downstream side of the mass flow controller and the
solenoid resulting in a surge upon actuation of the controller. This
surge can be reduced in magnitude by locating the controller and
solenoid valve close together or by moving the solenoid valve
upstream of the controller.
2-3
Page 14
Section 2 Installation
A
Brooks® Model 5851E
2-6 In-Line Filter
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be periodically
replaced or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
10 to 30 slpm 15 Micron
bove 30 slpm 30 Micron
Note: The above table lists the maximum recommended porosity for each
flow range. It is recommended that the minimum micron porosity that does
not limit the full scale flowrate be used.
Electrical Interfacing
To ensure proper operation the Model 5851E must be connected per
Figures 2-3 and 2-4, and configured according to Sections 2-6 and 2-12.
At a minimum the following connections must be made for new
installations.
Chassis Ground
0-5 V olt Signal Common
0-5 V olt Signal Output
+15 Vdc Supply
-15 Vdc Supply
Command Input
Command Common
Supply V oltage Common
For installations which replace Unit Instruments UFC-1000's, (Card
Edge version) Pin 10 is frequently grounded. In these situations the 5 Volt
reference output must be disabled. Refer to Section 2-12.
For installations which will be connected to Brooks secondary electronics,
the Card Edge version must have the 5 Volt reference enabled on Pin 10.
Refer to Section 2-12. If the Model 5851E was shipped as a system with
Brooks secondary electronics then the electronics will already be
configured properly .
Note: To obtain access to the jumpers for the following options the
electronics cover can must be removed. Remove the can by removing the
three screws and the valve connector. The can must be replaced before
returning the unit to service.
2-4
Page 15
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 2 Installation
Brooks® Model 5851E
Inches/
Millimeters
Figure 2-1 Model 5851E Dimensions
2-5
Page 16
Section 2 Installation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 2-2 Model 5851E Card Edge Connector Comparison Guide
2-6
Page 17
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 2 Installation
Brooks® Model 5851E
Figure 2-3 Model 5851E Card Edge Connector Hookup Diagram
PIN NO. FUNCTION COLOR CODE
1 Cmd. Common (Command Pot "CCW") Black
2 0-5 Volt Signal Output White
3 N/C Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point Wht/Blk
8 Cmd. Input or Cmd. Pot "S" Red/Blk
9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Command Pot "CW") Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input* Blu/Wht
*Jumper Selectable
Figure 2-4. D-Connector Pin Arrangement.
1
9
Notes:
1. Cable shield tied to chassis ground
in meter connector. Make no
connection on customer end.
2. All power leads must be connected
to power supply.
8
15
2-7
Page 18
Section 2 Installation
Brooks® Model 5851E
2-7 Soft Start
Refer to Figures 3-3, 3-4. To enable soft start, place the jumper on the
controller printed circuit board at J2 in the right hand (ss) position.
To disable soft start, place the jumper on the controller printed circuit board
at J2 in the left hand (n) position.
2-8 Remote Set-Point (Command) Input
If the mass flow controller is to be commanded by an external 0-5 Vdc
signal, the command potentiometer is not used.
The command input hookup is as follows:
A. Card Edge Connector
B. D-Connector
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Connect the external command voltage to Terminal A, and external
command return to Terminal B. Refer to Figures 2-2 and 2-3.
Connect the external command voltage to Terminal 8 and external
command return to Terminal 1. Refer to Figure 2-4.
2-9 V alve Override
2-10 Remote Transducer Input
The valve override function allows full opening and closing of the valve
independent of the command setting. The unique command reset feature
prevents flow overshoot when the controller goes from valve override
closed to normal control.
The valve override for the mass flow controller is as follows:
a. To open the valve apply +15 Vdc to the valve override terminal.
b. To close the valve apply -15 Vdc to the valve override terminal.
c. Isolating the valve override terminal returns the controller to normal
operation.
A. Card Edge
The valve override function can be accessed from Terminal 9. Refer to
Figure 2-3.
Note: For normal operation Terminal 9 must be left open (floating).
B. D-Connector
The valve override function is accessed from Terminal 12. Refer to
Figure 2-4.
2-8
Refer to Figures 3-3 and 3-4. To allow the Model 5851E control circuitry
and valve to be used with an 0-5 Vdc external transducer signal, the
jumper at J7 is moved to the lower two pins (R). With this feature enabled
a 0-5 Vdc signal may be applied to the external transducer input terminal.
The Model 5851E controller circuitry will modulate the valve position to
increase or decrease the flow rate to maintain the transducer output at the
Page 19
Installation and Operation Manual
CAUTION
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
2-11 Valve Test Point
2-12 Valve Off
Section 2 Installation
Brooks® Model 5851E
desired set point. The control circuitry is reverse acting, e.g. for an
increase in transducer output the flow will correspondingly be decreased.
Refer to Figures 2-2, 2-3, and 2-4. The valve voltage can be monitored on
Pin D of the Card Edge version and Pin 7 of the D-Connector version. This
voltage relative to circuit common is approximately proportional to the valve
voltage per the following equation when using 15 V valve drive:
V alve Voltage = 1.95 x TP3 + 33.4 V
The Model 5851E does not have a purge feature. Do not ground Pin D of
the Card Edge version or Pin 7 of the D-Connector version.
Refer to Figures 2-2, 2-3, and 2-4. The control valve can be forced closed
regardless of command input signal by applying a TTL level low (<0.4 Vdc)
to Terminal L of the Card Edge version or Pin 4 of the T erminal L of the
Card Edge version or Pin 4 of the D-Connector version. A TTL level high or
floating at this pin has no effect.
2-13 Five V olt Reference Out/Valve Drive Configuration
A. Card Edge
Refer to Figures 2-3 and 3-3. Terminal 10 can be jumper selected
as 5 Volt reference output or "not used". The 5 Volt reference output is
required by older Brooks secondary electronics (Ex. Model 5896), or if
a potentiometer is to be used to generate the command signal. To
enable the 5 Volt reference output on Terminal 10 place the Jumper J8
in the D-E position. To disable the 5 Volt reference output place Jumper
J8 in the E-F position.
Do not ground Terminal 10 when 5 Volt reference output is enabled.
Irreparable damage to the PC Board may result.
To enable the Model 5851E to operate satisfactorily with the larger
orifice size used for higher flow rates, the P.C. board must be jumper
configured for a high voltage valve drive. For Model 5851E, Jumper J3,
must be in the A-B (left most) position.
B. D-Connector
Refer to Figures 2-4 and 3-4. The 5 Volt reference is always available
on Pin 1 1.
To enable the Model 5851E to operate satisfactorily with the larger
orifice size used for higher flow rates, the P.C. board must be jumper
configured for a high voltage valve drive. For the Model 5851E Jumper
J3 must be in the A-B (left most) position.
2-9
Page 20
Section 2 Installation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
2-10
Page 21
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
3-1 Theory of Operation
Section 3 Operation
Brooks® Model 5851E
The thermal mass flow sensing technique used in the Model 5851E works
as follows:A precision power supply provides a const ant power heat input
(P) to the heater, which is located at the mid point of the sensor tube. Refer
to Figure 3-1. At zero, or no flow conditions the heat reaching each
temperature sensor is equal. When gas flows through the tube the
upstream sensor is cooled and the downstream sensor is heated,
producing a temperature difference. The temperature difference T2 - T1, is
directly proportional to the gas mass flow .
The equation is:
ΔT = A * P * Cp * m
Where,
ΔT = Temperature difference T2 - T1 (°K)
Cp = Specific heat of the gas at constant
pressure (kJ/kg-°K)
P = Heater power (kJ/s)
m = Mass flow (kg/s)
A = Constant of proportionality
2
(S
-°K2/kJ2)
A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.
The flow restrictor shown in Figure 3-1 performs a ranging function similar
to a shunt resistor in an electrical ammeter . The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter.
Different restrictors have different pressure drop s and produce meters with
different full scale flow rates. The span adjustment in the electronics
affects the fine adjustment of the meters full scale flow.
In addition to the mass flow sensor the Model 5851E Mass Flow Controller
has an integral control valve and control circuit, as shown in Figure 3-2.
The control circuit senses any difference between the flow sensor signal
and adjusts the current in the modulating solenoid valve to increase or
decrease the flow.
The Model 5851E has the following features incorporated in the integral
control circuit:
•Fast Response
Adjusted by the anticipate potentiometer , this circuit, when properly
adjusted, allows the high frequency information contained in the sensor
signal to be amplified to provide a faster responding flow signal for remote
indication and use by the control valve.
3-1
Page 22
Section 3 Operation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 3-1 Flow Sensor Operational Diagram
• Soft Start
Enabled by moving a jumper on the PC board. Provides a slow injection of
gas as a protection to the process, particularly those using a volatile or
reactive gas. Full gas flow is achieved in approximately 15 seconds. Refer
to Section 2-6.
• Precision 5 Volt Reference
Allows the direct connection of a command potentiometer to a 0-5 Volt
command signal to the controller . A precision 10-turn 2 k ohm
potentiometer with an integral turns counter is recommended, this will
permit repeatable adjustments of command to 1 p art in 1000. Refer to
Section 2-12 for activation.
• V alve Override
Allows full opening and closing of the control valve independent of the
command setting. Refer to Section 2-8.
• Valve Off
Accessed via Terminal J on the Card Edge or Pin 4 on the
D-Connector version. This feature allows the user to close the control
valve independently of the command signal by supplying a TTL Level low
signal to the proper terminal. This function is useful when performing
repetitive flow operations or as a safety shutdown. Refer to Section 2-11.
3-2
• V alve Test Point
Accessed via Terminal D on the Card Edge or Pin 7 on the D-Connector
version of the Model 5850E only . This feature allows the user to monitor
the control valve voltage during operation. Refer to Section 2-10.
Page 23
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 3 Operation
Brooks® Model 5851E
Figure 3-2 Flow Control System Block Diagram
• Remote Transducer Input
Accessed via Terminal 5 on the Card Edge or Pin 15 on the D-Connector
version. This feature allows the use of the integral control electronics and
valve with the signal from an external 0-5 Vdc signal. The mass flow signal
from the Model 5851E is still available for process monitoring. This function
is jumper selectable. Refer to Section 2-9.
3-2 Operating Procedure
a. Apply power to the controller and allow approximately 45 minutes for
b. Turn on the gas supply .
c. Command 0% flow and observe the controllers output signal. If the
d. Set the command for the desired flow rate to assume normal operation.
3-3 Zero Adjustment
Each Model 5851E is factory adjusted to provide a 0 ±10 mVdc signal at
zero flow . The adjustment is made in our calibration laboratory which is
temperature controlled to 21.1°C (70°F ±2°F). Af ter initial installation and
warm-up in the gas system the zero flow indication may be other than the
factory setting. This is primarily caused by changes in temperature
between our calibration laboratory and the final installation. The zero flow
reading can also be affected to a small degree by changes in line pressure
and mounting attitude.
the instrument to warm-up and stabilize its temperature.
output is not 0 mVdc (±10 mVdc), check for leaks and if none are found
refer to the zero adjustment procedure in Section 3-3.
3-3
Page 24
Section 3 Operation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 3-3 Card Edge PC Board Jumper Location & Function
3-4
Page 25
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 3 Operation
Brooks® Model 5851E
Figure 3-4 D-Connector PC Board Jumper Location & Function
3-5
Page 26
Section 3 Operation
CAUTION
Brooks® Model 5851E
3-4 Calibration Procedure
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
To check zero always mount the controller in its final configuration and
allow a minimum of 20 minutes for the temperature of the controller and its
environment to stabilize. Using a suitable voltmeter check the controller
output signal. If it differs from the factory setting adjust it by removing the
lower pot hold plug, which is located closest to the controller body . Adjust
the zero potentiometer (refer to Figure 3-6) until the desired output signal is
obtained.
Note 1: If the valve has been disassembled and any of the following parts
have been replaced the control valve adjusting procedure in Section 4-4C
must be performed before the Model 5851E is calibrated.
orifice
valve stem
plunger
lower guide spring
valve seat
3-6
Note 2: Calibration of the Model 5851E mass flow controller requires the
use of a digital voltmeter (DVM) and a precision flow standard calibrator
such as the Brooks Vol-U-Meter®. It is recommended that the calibration be
performed only by trained and qualified service personnel.
Note 3: If the mass flow controller is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor. Size the
orifice for actual operating conditions.
For the card edge model do not ground Pin 10 with the 5 Volt reference
enabled. Irreparable damage to the PC board may result.
Note 4: If Brooks secondary electronics are being used as a power supply
during the calibration the 5 V reference must be enabled on the Card Edge
version for proper operation, see Section 2-12. Remember to deactivate
the 5 V reference before installing the calibrated mass flow controller in the
system where Terminal 10 is grounded.
a. With the controller installed in an unpressurized gas line, apply power
and allow approximately 45 minutes for warm-up. During the warm-up,
adjustment and calibration check procedures do not allow the control
valve to open when gas flow is not present. This situation is not a
normal operating mode, it will cause the control valve to heat up
abnormally. A meter with an abnormally warm valve will be difficult to
calibrate. This situation can be prevented by switching the valve
override "closed" when there is no gas flow , or setting the command to
less than 1%. Also avoid unnecessary periods with the valve override
"open".
b. Adjust the anticipate potentiometer fully clockwise (20 turns). Then
adjust the anticipate potentiometer 10 turns counterclockwise to center
the potentiometer . This will provide a rough adjustment of this circuit
and make the flow more stable for calibration.
Page 27
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 3 Operation
Brooks® Model 5851E
Figure 3-5 Model 5851E Calibration Connections
c. Connect the DVM positive lead to the 0-5 V signal output (Terminal 3
Card Edge, Pin 2 D-Connector) and the negative lead to signal common (TP4). Adjust the zero potentiometer for an output of 0 mV ±2 mV.
d. Apply pressure to the system and insure that the zero signal repeats
within 2 mV of the voltage set in S tep c above. If the zero does not
repeat, check for leakage.
Note: Controllers supplied with all-metal valve seats do not provide tight
shut-off. A 0 to 3% leak through is typical. For metal seat controllers
close a downstream shut-off valve and observe the zero signal.
e. Set the command potentiometer (connected to Terminals A, B and 10
of the Card Edge connector and Terminals 8, 1 and 1 1 of the D-Connector for 100% of flow (5.000 V). Connect the DVM positive lead to
TP2 (linearity voltage) and the negative lead to TP4 (signal common).
Adjust the linearity potentiometer for an output of 0.0 V (zero Volts).
f. Connect the DVM positive lead to TP1 (-100x sensor voltage) and the
negative lead to TP4 (circuit common). The command potentiometer
should still be set at 100% flow (5.000 V). Measure the flow rate using
suitable volumetric calibration equipment. To adjust the controller to the
proper full scale flow, calculate a new TP1 volt age using the following
equation.
measured TP1 voltage
New TP1 voltage= x desired flow rate
measured flow rate
3-7
Page 28
Section 3 Operation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
TP4
3-8
Figure 3-6 Adjustment Potentiometer Location
Adjust the span potentiometer until the voltage at TP1 is equal to the value
calculated above. Recheck the flow rate after the flow is stable (at least
2 minutes). Repeat this check and adjustment procedure until the
measured flow rate is within 1% of the desired flow rate.
Note: The voltage at TPl is -100 times the output voltage of the sensor.
This voltage can range from -1.2 to -12 V olt s, however it is recommended that this voltage stays between -2.0 and -9.0 V olt s for proper
operation. If the recommended voltage range exceeds the desired
accuracy signal stability may not be achieved. If one of the limits is
reached check the orifice and restrictor sizing procedures. Refer to
Sections 4-6 and 4-7 respectively .
g. Set the command potentiometer for 0% of flow. Connect the DVM
positive lead to flow signal output (Terminal 3 Card Edge, Pin 2
D-Connector) and the negative lead to TP4. Readjust the zero potentiometer for an output of 0 mV ±2 mV as necessary .
h. Set the command potentiometer for 50% of flow (2.500 V) and measure
the flow rate. Calculate the error as a percentage of full scale.
Measured - Desired Flow
Flow Rate Rate
Full Scale Error = 100% x
Full Scale Flow Rate
Page 29
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 3 Operation
Brooks® Model 5851E
Example;
What is the percent of full scale error when full scale is equal to 100
slpm?
Measured flow rate = 48.5 slpm
Desired flow rate = 50.0 slpm
(48.5 - 50)
Full scale error = 100 = -1.5%
100
i. Calculate the TP2 correction voltage:
(error recorded in Step h) x 0.450 Volts
Example:
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 V olts
New TP2 voltage = 0 Volts + (-0.675) = -0.675 Volts
j. Set the command potentiometer for 100% flow (5.000 V). Connect the
DVM positive lead to TP2 and the negative lead to TP4.
k. Adjust the linearity potentiometer for an output equal to the new calcu-
lated TP2 voltage.
l. Repeat Steps f, g and h.
1. If the error recorded in Step h is less than 0.5%, then the calibration
procedure is complete.
2. If the error is greater than 0.5% set the command potentiometer for
100% (5.000 V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common). Calculate a
new TP2 voltage as follows:
3-5 Response
error measured
New TP2 voltage = recorded in x 0.450 V + TP2
Step i voltage
Example:
Controller error = 0.7%
Measured TP2 voltage = -0.567 V olt s
TP2 correction = 0.7 x 0.450 = 0.315 V olts
New TP2 correction = 0.315 + (-0.567) = 0.252 V olt s
Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat Steps f, g and h.
Note: The voltage at TP2 can range from -10 to +3 Volts, however, it
is recommended that this voltage stay between -2.5 and +2.5 V olt s
for proper operation. If the recommended voltage range is exceeded
the desired accuracy and/or signal stability may not be achieved. If
one of the limits is reached, check the restrictor sizing. Refer to
section 4-7.
Fast Response Adjustment
Two methods of adjusting the step response of the Model 5851E mass
flow controllers can be used. No. 1 describes a method that will get the
step response close to optimum quickly and without any flow measuring
equipment. This method should be used when the response time of the
3-9
Page 30
Section 3 Operation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
flow controller is not critical to overall system performance. No. 2 describes
a method that will allow adjustment of your Model 5851E mass flow
controller to optimum step response performance. This method is the
preferred way to adjust the step response. Adjustment of the fast response
circuit will not affect the accuracy of the flow controller as adjusted in
Section 3-4.
1. Fast response adjustment (3 seconds response specification not
guaranteed)
Note: This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples per second or greater to monitor
the rate of change of the output signal.
a. Set the command potentiometer for 100% of flow (5.00 V) and wait
about 45 seconds for the flow output signal to stabilize.
b. S tep the command signal to 0% or activate valve override closed to
stop the flow. Observe the flow signal output as it decays.
c. The behavior of the flow signal during this transition between 100%
and 0% flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-7.
1. If the flow signal decays to -.05 to -.5 V then rises to 0 V the
anticipate potentiometer is properly adjusted.
2. If the flow signal decays rapidly and goes below -.5 V before
rising to 0 V the anticipate potentiometer must be adjusted
clockwise and Step s a and b repeated.
3. If the flow signal decays slowly and does not go below -.05 V the
anticipate potentiometer must be adjusted counterclockwise and
Step s a and b repeated.
3-10
2. Fast response adjustment (3 second response specification guaranteed)
Adjustment of the anticipate potentiometer to obtain a flow rate performance to be within 2% of flow rate commanded in less than 3 seconds
after set-point change requires the use of a fast response flowmeter
(500 millisecond response to be within 0.2% of final value or better) in
series with the Model 5851E and a storage oscilloscope or recorder .
a. Make a step in command to the controller from 0 to 100% of full
scale flow and record the output signal of the fast response flowmeter.
b. If this signal shows more than 4% overshoot, adjust the anticipate
potentiometer 1/2 to 1 turn counterclockwise. If the signal does not
show overshoot, but is not within 2% full scale of final value after 3
seconds, adjust the anticipate potentiometer 1/2 to 1 turn clockwise.
Set command potentiometer for 0% of flow .
c. Repeat Steps a and b until the fast response flowmeter output signal
meets the specified response requirements.
Note: With the above equipment, the anticipate potentiometer can
be adjusted to give optimum response characteristics for any
process.
Page 31
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Figure 3-7 Fast Response Adjustment
Section 3 Operation
Brooks® Model 5851E
3-11
Page 32
Section 3 Operation
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
3-12
Page 33
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
4-1 General
4-2 Troubleshooting
Section 4 Maintenance
Brooks® Model 5851E
No routine maintenance is required on the Model 5851E. If an in-line filter
is used, the filtering element should periodically be replaced or
ultrasonically cleaned.
CAUTION
The end block screws (31) and the valve screws (3) are not
interchangeable. The end block screws are stronger and are needed
to achieve the pressure rating. The end block screws are darker in
color and can be attracted by a magnet.
A. System Checks
The Model 5851E is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow controller for bench troubleshooting or return, especially if the
system is new .
1. Verify a low resist ance common connection, correct power supply
voltage and that signals are reaching and leaving the controller. The
breakout board, P/N S273Z649AAA Card Edge version or P/N
S273Z668AAA D-Connector version listed in Section 5, will make this
job much easier.
4-1
Page 34
Section 4 Maintenance
CAUTION
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
2. Verify that the process gas connections have been correctly terminated
and leak-checked.
3. If the mass flow controller appears to be functioning but cannot achieve
setpoint, verify that sufficient inlet pressure and pressure drop are
available at the controller to provide the required flow .
4. Verify that all user selectable jumpers are in their desired positions
(refer to Figs. 3-3 and 3-4).
Any Brooks Instrument mass flow meter or flow controller with a 15
pin D-Connector PC Board bearing the "CE Mark" must use a 100%
shielded cable and metal shell mating connectors. The shield is
tied over 360 degrees to the shell at both ends. This is mandatory
to be in compliance with the EMC Directive (89/336/EEC). Refer to
Appendix A.
B. Bench Troubleshooting
1. Properly connect the mass flow controller to a ±15 Vdc power supply
command voltage source and connect an output signal readout device
(4-1/2 digit voltmeter recommended) to Terminals 2 and 3 or D-Connector Pins 2 and 10 (refer to Figs. 2-2 and 2-3). Apply power, set the
command voltage to zero and allow the controller to warm-up for 15
minutes. Do not connect to a gas source at this time.
Observe the output signal and, if necessary, perform the zero adjustment procedure (Section 3-3). If the output signal will not zero properly,
refer to the sensor troubleshooting section and check the sensor. If the
sensor is electrically functional, the printed circuit board is defective and
will require replacement.
4-2
2. Connect the controller to a source of the gas on which it was originally
calibrated. Command 100% flow and adjust the inlet and outlet pressures to the calibration conditions. Verify that the output signal reaches
and stabilizes at 5.000 V olts. Vary the command voltage over the 2 to
100% range and verify that the output signal follows the setpoint.
Apply +15 V olt s to the valve override input (refer to Figs. 2-3 and 2-4 for
terminal assignments) and verify that the output exceeds 5.000 Volts.
Apply -15 V olts to the valve override terminal and verify that the output
signal falls below 0.100 V olts. If possible, connect a flow measurement
device in series with the mass flow controller to observe the actual flow
behavior and verify the accuracy of the mass flow controller . If the mass
flow controller functions as described above, it is functioning properly
and the problem is most likely elsewhere. Table 4-1 lists possible
malfunctions which may be encountered during bench troubleshooting.
C. Sensor T roubleshooting
If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce expected results, the
sensor assembly is defective and must be replaced. Refer to Section 4-4
for the disassembly and assembly procedures to use when replacing the
sensor.
Page 35
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 4-1 Bench Troubleshooting
Section 4 Maintenance
Brooks® Model 5851E
Note: Do not attempt to disassemble the sensor.
D. Cleaning
No routine external cleaning is required for Brooks Thermal Mass Flow
Controller. Should the Model 5851E require cleaning due to deposition, use
the following procedures:
1. Remove the unit from the system.
2. Refer to Section 4-4 to disassemble the controller.
4-3
Page 36
Section 4 Maintenance
CAUTION
Brooks® Model 5851E
Table 4-2 Sensor Troubleshooting
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
4-4
Do not ground Terminal 10 when 5 Volt reference output is enabled.
Irreparable damage to the PC Board may result.
3. Use a hemostat or tweezers to push a 0.007" dia. piano wire through
the flow sensor tube to remove any contamination. For best results
push the wire into the downstream end of the sensor tube (end closest
to the control valve). The sensor tube can be flushed with a nonresiduous solvent (Freon TFTM recommended). A hypodermic needle
filled with solvent is a convenient means to accomplish this.
An alternate method for flushing out the sensor is to replace the
restrictor element with a low flow plug restrictor . This plug forces all the
flow through the sensor and may dislodge any obstructions. With the
valve orifice removed, subject the flow controller to a high differential
pressure. Pressurizing the outlet of the MFC higher than the inlet may
help force the obstruction upstream and out of the sensor tube.
Page 37
Installation and Operation Manual
WARNING
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
4. Inspect the orifice for clogging by holding it in front of a light source and
looking for light through the bore. Clean by soaking in a suitable nonresiduous solvent and directing a stream of compressed clean, dry
Nitrogen through the bore.
5. Deposits of silicon dioxide may be removed by soaking the internal
parts in solution of 5% hydrofluoric acid (5 part s hydrofluoric acid and
95 parts water (H2O)) followed by Freon TF.
6. Sintered type restrictor elements should be replaced as it is not possible to adequately remove deposits from them. Wire mesh and
A.C.L.F.E. type restrictor elements can be cleaned in an ultrasonic bath.
Refer to Section 4-7 for the correct restrictor to use.
7. Blow all parts dry with clean, dry Nitrogen and reassemble Refer to
Section 4-4b, (assembly).
8. Purge the assembled controller with clean, dry Nitrogen.
9. Perform the calibration procedure in Section 3-4.
10.When the controller is reinstalled in the system, the connections should
be leak-tested and the system purged with clean, dry Nitrogen for 30
minutes prior to start-up to prevent the formation of deposits.
4-3 Sensor T ube
4-4 Disassembly and Assembly
The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. the sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. refer to Section 3-4.
Note: The Model 5851E Mass Flow Controller should be disassembled and
assembled in a clean environment to prevent particulate contamination.
A. DISASSEMBL Y
The numbers in ( ) refer to the spare parts exploded view in Figure 5-1.
If it becomes necessary to remove the controller from the system
after exposure to toxic, pyrophoric, flammable, or corrosive gas,
purge the controller thoroughly with a dry inert gas such as nitrogen,
before disconnecting the gas connections. Failure to correctly purge
the controller could result in fire, explosion, or death. Corrosion or
contamination of the mass flow controller upon exposure to air may
also occur.
1. Remove the jam nut (1) on top of the valve assembly .
2. Unplug the valve connector from the electronics cover and remove the
coil assembly (2).
3. Remove the hex socket screws (3) securing the valve retaining plate
(4) attaching the valve stem assembly (6).
4-5
Page 38
Section 4 Maintenance
CAUTION
CAUTION
CAUTION
CAUTION
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
When performing the following procedure the valve stem must be
removed without cocking it to prevent damage to the valve spring.
4. Carefully remove the valve stem assembly (6).
5. Remove the plunger assembly (7, 8, 9, 1 1).
6. Remove and note the position of the valve spring spacers (10), which
may be located above and/or below the lower valve spring (8).
7. Unscrew the orifice (12) from the flow controller body (14) using the
orifice removal tool (See Section 5, Table 5-2).
8. Remove the three screws (20) attaching the electronics cover. Remove
the electronics cover (23).
Be careful not to stress the sensor lead wire to sensor assembly
junction when removing the sensor connector from the PC Board.
If the sensor lead wires are stressed an open in the sensor wiring
could result.
9. Unplug the sensor connector from the PC Board. Remove the two
screws securing the bracket (24) and PC Board (15). Remove the
bracket and PC Board.
10.Remove the two allen nuts using an 1/8" allen wrench (18) and washers
(19) securing the sensor assembly (16). Remove the sensor assembly.
Note: Do not attempt to disassemble the sensor assembly .
Do not scratch the O-ring sealing surface.
1 1.Remove the sensor assembly O-rings (17) from the flow controller body
(14). Using the Brooks O-ring removal tool will help prevent scratching
the sealing surface.
12.Remove the adapter fittings (27) from the flow controller body (14).
13.Remove the 4 screws (31) from the end block (30) and carefully
remove the end block.
14.Remove the restrictor assembly (21) from the inlet side of the flow
controller body (14) using the header removal tool (Section 5, Table 5-
2). Note the rotational position of the restrictor assembly. (Refer to
Section 4-7).
B. ASSEMBLY
4-6
Do not get Halocarbon lubricant on the restrictor element (21) or
hands. Rubber gloves are recommended. This is a special inert
lubricant which is not easily removed.
Page 39
Installation and Operation Manual
CAUTION
CAUTION
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
Figure 4-1 Torque Sequence for the Valve Retainer Plate
Note: It is recommended that all O-rings be replaced during controller
assembly . All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.
1. Examine all parts for signs of wear or damage, replace as necessary.
2. Place the restrictor O-ring on the restrictor assembly. Screw the
restrictor assembly (21) into the inlet side of the flow controller body
using the restrictor took, tighten hand tight.
The following steps must be performed as written. Placing the Orings on the sensor before it is installed will result in damage to
the O-rings causing a leak.
3. Place the end block O-ring in position and install the end block with the
4 hex socket screws. Tighten these screws to 49 inch-lbs. Do not over
tighten.
The end block screws (31) and the valve screws (3) are not
interchangeable. The end block screws are stronger and are needed
for the pressure rating. The end block screws are darker in color
and can be attracted by a magnet.
4. Press the lubricated sensor O-rings (17) into the flow controller body
(14). Install the sensor assembly and secure with two screws (18) and
washers (19) tightened to 15 in/lbs.
5. Install the orifice (12) and its O-ring (13), using a 3/8 nut driver . Insure
that the orifice is fully seated but do not overtighten.
6. Insert the valve preload spacers (10), if used, into the valve cavity in the
flow controller body (14). Use care to preserve the correct order.
7. Install the valve plunger assembly (7, 8, 9 and 1 1) on the preload
spacers (10). Install air gap spacers (10), if used, on top of the valve
springs.
8. Install the valve stem assembly (6), secure with the valve retaining plate
(4) and four hex socket screws (3). When installing the screws they
should first make light contact with the plate, which should be checked
to insure that it makes full contact around the stem assembly. Torque
the screws securing the valve retaining plate in a diagonal pattern
(Refer to Figure 4-1) to 15 in/lbs.
4-7
Page 40
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
9. Install the coil assembly (2) over the valve stem assembly (6) and
secure with jam nut (1).
10.Install the printed circuit (PC) board (15), secure with the bracket (24)
and two screws. Plug the connector from the sensor assembly onto the
PC Board. The flow arrow on the connector should be pointing toward
the valve assembly .
1 1.Install the electronics cover (23) on the controller, secure with three
screws (20). Plug the connector from the valve coil into the PC Board
through the hole in electronics cover.
12.Prior to installation leak and pressure test to any applicable pressure
vessel codes.
C. ADJUSTING THE CONTROL VALV E
The Model 5851E control valve has been factory adjusted to insure proper
operation. Readjustment is only required if any of the following parts have
been replaced:
Orifice (12)
valve stem (6)
plunger (7)
lower guide springs (8)
valve seat (1 1)
4-8
The valve is adjusted in Brooks mass flow controllers by adding spacers (9
and 10) to the control valve assembly to vary the air gap and initial preload.
Sp acers are used to af fect the proper adjustment because they provide a
reliable and repeatable means for adjustment. Screw type adjustment
mechanisms can change with pressure or vibration and introduce an
additional dynamic seal that is a potential leak site and source for
contamination. Refer to Figure 4-2 for spacer locations.
The preload determines the initial force that is required to raise the valve
seat off the orifice and start gas flow. If the preload is insufficient the valve
will not fully close and gas will leak through. If the preload is excessive the
magnetic force generated between the plunger and stem will be insufficient
to raise the plunger and the valve will not open.
The airgap is the space between the top of the plunger and stem. The
airgap determines the force between the plunger and stem at a given
voltage and the total travel of the valve. If the airgap is too small the
plunger travel may be insufficient to fully open the valve, also the magnetic
force may be too high for a given valve coil voltage. If the airgap is too
large the magnetic force will be insufficient to raise the plunger and the
valve will not open.
Note: Prior to starting the valve adjustment procedure check to insure that
the orifice is properly seated and that the valve parts are not bent or
damaged.
1. Adjustment Procedure (Refer to Section 5, Sp are Parts for spacer kit)
a. Remove the electronics cover (23) from the controller. Insure that
the connector from the coil assembly (2) is properly reconnected to
the PC Board after the electronics cover is removed.
b. Perform the electrical and gas connections to the controller following
the instructions in Section 2 of this manual. Use a clean dry inert
gas, such as nitrogen for this procedure. Do not apply gas pressure
to the controller at this time.
c. Disassemble the control valve following the procedure given in
Page 41
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
Figure 4-2 Valve Adjusting Spacer Locations
4-9
Page 42
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
Section 4-4A. Note the number , locations and thickness of all
spacers (9 and 10).
d. Decrease the preload of the valve by 0.005 inches by either remov-
ing a 0.005 inches small preload spacer or by adding a 0.005 inches
large preload spacer . Refer to Figure 4-2.
e. Reassemble the valve following the assembly procedure in Section
4-4A.
f. Command 0% flow, apply normal operating gas pressure and check
for valve leak-thru by observing the output signal.
g. If the valve leaks-thru increase the preload by 0.005" and go to Step
h. If the valve does not leak-thru repeat Step s d, e, f and g.
h. Apply the normal operating gas pressure and command 100% flow
(5.000 V olt s on Terminal A, Pin 2).
1.95 x TP3 + 33.4
4-10
Figure 4-3 Voltmeter Connections for Valve Adjustment
Page 43
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
Note: Due to possible heat capacity and density differences between
the test gas and actual process gas for which the MFC was sized, it
may be necessary to increase the inlet pressure to obtain proper
control at 100% flow.
i. Measure the valve voltage by connecting a voltmeter between Test
Point 3 (TP3) and Test Point 4 (TP4). Refer to Figure 4-3.
Valve Voltage = 1.95 x TP3 + 33.4
j1. If the flow controller output signal is 100% (5.0 V) and the valve
voltage is less than 18 V, the valve adjustment is complete.
j2. If the flow controller output signal is 100% (5.0 V) and the valve
voltage is greater than 18 V, decrease the air gap with a small
0.005 in. air gap spacer. Refer to Figure 4-2. Repeat Steps h and i.
j3. If the flow controller output signal is less than 100% (5.0 V) and the
valve voltage is greater than 18 V, first check Section 4-6 to insure
that the orifice size is correct.
k. Proceed to Section 3-4 and perform calibration procedure, if re-
quired.
4-5 Gas Conversion Factors
If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in Table 4-3.
To change to a new gas, multiply the output reading by the ratio of the gas
sensor factor for the desired gas by the gas sensor factor for the
calibration gas used.
Actual Gas Flow Rate = Output Reading x
Sensor Factor of the New Gas
Sensor Factor of the Calibration Gas
Example:
The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.773 = 57.98 sccm
In order to calculate the conversion factor for a gas mixture, the following
formula should be used:
Sensor Conversion Factor Mixture =
P
1
Sensor
Conversion
Factor
1
100
P
+ +
2
Sensor
Conversion
Factor
2
P
3
Sensor
Conversion
Factor
3
Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
4-11
Page 44
Section 4 Maintenance
Brooks® Model 5851E
Table 4-3 Conversion Factors (Nitrogen Base)
GAS NAME FORMULA SENSOR ORIFICE DENSITY
Acetylene C
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C
Butane C
1-Butene C
CIS-2-Butene C
Trans-2-Butene C
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C
Chlorotrifluoroethylene C
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C
Cyclopropane C
Deuterium D
Diborane B
Diboromodifluoromethane f-12B2 CBr
1,2-Dibromotetrafluoroethane f-114B2 C
Dichlorodifluoromethane f-12 CCL
Dichlorofluoromethane f-21 CHCL
Dichlorosilane SiH
1,2-Dichloroethane C
1,2-Dichlorotetrafluoroethane f-114 C
2,2 Dichloro C
1,1-Difluoro-1-Chloroethane C
1,1-Difluoroethane CH
1,1-Difluoroethylene CH
Diethylsilane C
Difluoromethane f-32 CF
Dimethylamine (CH
Dimethylether (CH
2,2-Dimethylpropane C(CH
Disilane Si
Ethane C
Ethanol C
Ethylacetylene C
Ethyl Chloride C
Ethylene C
Ethylene Oxide C
Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C
Helium He 1.386 0.378 0.178
Hexafluoroacetone F
Hexaflorobenzine C
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C
Hexamethyldisilane (HMDS) (CH
4-12
Hexane C
Installation and Operation Manual
FACTOR FACTOR (kg/m
2H2
3H4
3
3
3
3
5
3
BrF
2
3
3
4H6
4H10
4H8
4H8
4H8
2
2
4
4
2
2
2
3
Cl 0.234 1.818 4.134
4H9
2
3
CLF
2
5
CLF
2
3
3
2
4H8
3H6
2
2H6
2F2
2Br2F4
2F2
F 0.456 1.985 4.912
2
2CL2
2H4Cl2
2CL2F4
2HC12F3
CLF
2H3
2
CHF
3
2
:CF
2
2
Si 0.183 1.775 3.940
4H12
2H2
NH 0.370 1.269 2.013
3)2
O 0.392 1.281 2.055
3)2
3)4
2H6
2H6
O 0.394 1.282 2.057
2H6
4H6
CL 0.408 1.516 2.879
2H5
2H4
O 0.589 1.254 1.965
2H4
2
3
4
4
HBrClF
2
3
CCOCF
3
3
6F6
2F6
3F6
2)6Si2
6H14
0.615 0.970 1.173
0.478 1.199 1.787
0.786 0.781 0.771
0.754 1.661 3.478
0.443 2.044 5.227
0.579 1.569 3.025
0.287 2.502 7.806
0.439 2.214 6.108
0.326 2.397 7.165
0.412 2.303 6.615
0.354 1.413 2.491
0.257 1.467 2.593
0.294 1.435 2.503
0.320 1.435 2.503
0.291 1.435 2.503
0.773 1.255 1.977
0.638 1.650 3.393
0.344 2.345 6.860
0.440 1.770 3.926
0.567 1.555 2.045
0.876 1.598 3.214
0.693 1.554 3.011
0.433 1.812 4.125
0.505 1.770 3.906
0.442 2.066 5.340
0.243 2.397 7.165
0.337 2.044 5.208
0.430 1.985 4.912
0.498 1.366 2.322
0.387 1.413 2.491
0.505 1.224 1.877
0.995 0.379 0.177
0.448 1.000 1.235
0.363 2.652 8.768
0.215 2.905 10.53
0.390 2.099 5.492
0.442 1.897 4.506
0.382 1.879 4.419
0.231 2.449 7.479
0.259 2.336 6.829
0.341 1.957 4.776
0.415 1.536 2.940
0.458 1.512 2.860
0.627 1.360 2.411
0.247 1.613 3.244
0.332 1.493 2.779
0.490 1.038 1.357
0.365 1.384 2.388
0.619 1.000 1.261
0.924 1.163 1.695
0.529 1.584 3.127
0.649 1.653 3.418
0.268 2.766 9.574
0.257 2.654 8.814
0.219 2.434 7.414
0.632 2.577 8.309
0.255 2.219 6.139
0.249 2.312 6.663
0.139 2.404 7.208
0.204 1.757 3.847
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
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Page 45
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 4-3 Conversion Factors (Nitrogen Base) (continued)
GAS NAME FORMULA SENSOR ORIFICE DENSITY
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
Hydrogen Sulfide H
Iodine Pentafluoride IF
Isobutane C
Isobutene C
Isopentane C
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C
Methyl Bromide CH
3-Methyl-1-butene C
Methyl Chloride CH
Methyl Fluoride CH
Methyl Mercaptan CH
Methyl Silane CH
Methyl Trichlorosilane (MTS) CH
Methyl Vinyl Ether C
Monoethanolamine C
Monoethylamine C
Monomethylamine CH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N
Octofluorocyclobutane C
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C
Pentane (n-Pentane) C
Perchloryl Fluoride CLO
Perfluorobutane C
Perfluoro-2-Butene C
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C
Pentane (n-Pentane) C
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH
Propylene (Propene) C
)C
3CH2CH3
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C
Tetrafluorohydrazine N
Trichlorofluoromethane f-11 CCL
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C
Trimethylamine (CH
Tungsten Hexafluoride WF
Uranimum Hexafluoride UF
Vinyl Bromide C
Vinyl Chloride C
Vinyl Fluoride C
Water Vapor H
Xenon Xe 1.383 2.180 5.851
2
Se 0.837 1.695 3.613
2
S 0.850 1.108 1.539
2
5
4H10
4H8
5H12
4
3H4
Br 0.646 1.834 4.236
3
5H10
CL 0.687 1.347 2.308
3
F 0.761 1.102 1.518
3
S 0.588 1.313 2.146
4
Si 0.393 1.283 2.061
6
Si 0.267 2.310 6.675
3Cl3
O 0.377 1.435 2.567
3H6
NO 0.305 1.477 2.728
2H7
2HH5NH2
3NH2
4
2
2
3
2O3
O 0.752 1.259 1.964
2
4F8
2
2
3
2HF5
5H12
F 0.448 1.905 4.571
3
4F10
4F8
3F8
5H12
2
3
5
3
3H8
3H6
6
4
4
4
2
6
4
3
2F2
4
2F4
2F4
F 0.374 2.244 6.281
3
3
3)3
2CL3F3
N 0.316 1.467 2.639
3)3
6
6
Br 0.524 1.985 4.772
2H3
CL 0.542 1.492 2.788
2H3
F 0.576 1.281 2.046
2H3
O 0.861 0.802 0.804
2
FACTOR FACTOR (kg/m
1.008 0.269 0.090
0.283 2.819 9.907
0.260 1.440 2.593
0.289 1.435 2.503
0.211 1.605 3.222
0.763 0.763 0.717
0.473 1.196 1.782
0.252 1.584 3.127
0.359 1.269 2.013
0.565 1.067 1.420
0.212 2.371 7.008
1.000 1.000 1.251
0.758 1.713 2.052
0.501 1.598 3.168
0.443 1.649 3.389
0.169 2.672 8.933
0.988 1.067 1.429
0.672 1.388 2.402
0.738 1.310 2.138
0.287 2.070 5.360
0.212 1.605 3.222
0.738 2.918 10.61
0.268 2.672 8.933
0.179 2.591 8.396
0.212 1.605 3.222
0.504 1.881 4.418
0.783 1.100 1.517
0.346 2.109 5.620
0.495 1.770 3.906
0.343 1.274 2.008
0.401 1.234 1.875
0.230 3.279 13.41
0.625 1.070 1.440
0.310 2.465 7.579
0.395 1.931 4.648
0.728 1.529 2.858
0.270 2.348 6.516
0.353 1.957 4.776
0.535 1.691 3.575
0.423 1.931 4.648
0.344 2.345 6.858
0.361 1.905 4.526
0.367 1.926 4.624
0.329 2.201 6.038
0.300 1.929 4.638
0.231 2.520 7.920
0.227 3.264 13.28
0.220 3.548 15.70
Section 4 Maintenance
Brooks® Model 5851E
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Page 46
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
4-6 Orifice Sizing
Mixture Factor = = 0.945
20
1.386
100
+
80
0.876
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However , gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.
The Orifice Sizing Nomograph, Table 4-4, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:
gas
operating pressure (inlet and outlet)
flow range
The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined in the following paragraphs.
Example: Determine the orifice size for the following conditions:
Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig
1. Determine Nitrogen equivalent flow rate (refer to Table 4-3).
GAS
NITROGEN
Q
NITROGEN
Q
x
GAS
=
OR
SG
GAS
NITROGEN
Q
NITROGEN
Q
x
GAS
=SG
4-14
Page 47
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 4-4 Orifice Sizing Nomograph
Section 4 Maintenance
Brooks® Model 5851E
4-15
Page 48
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
Where:
Q
NITROGEN
Q
GAS
NITROGEN
GAS
SG
GAS
= Nitrogen equivalent flow rate (sccm)
= Desired flow rate of the gas (sccm)
= Density of Nitrogen at 70°F
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (taken at customer
temperature)
Refer to Table 4-3 for densities.
Example:
Q
= 2,000 sccm
gas
= .269
gas
Q
Nitrogen
Q
Nitrogen
=
GAS
x
= 2,000 x .269
= 538 sccm Nitrogen
gas
Nitrogen
In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:
P
Conversion
1
Orifice
Factor 1
+ P
2
Orifice
Conversion
Factor 2
+ P
n
Orifice
Conversion
Factor n
Orifice
Conversion =
Factor
Mixture
100
Where P
P
P
= percentage by volume of gas 1
1
= percentage by volume of gas 2
2
= percentage by volume of gas n
n
Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and
80% Chlorine gas mixture.
Orifice
Conversion = 20(.378) + 80(1.598)
Factor 100
Mixture
Q
Nitrogen
=Q
(orifice conversion factor)
gas
= 20 x 1.439
4-16
= 28.78 slpm Nitrogen
2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7
to convert to absolute pressure (psia).
Page 49
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia
3. Determine Critical Pressure Drop
Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or
P outlet < P inlet
2
If these conditions exist, the pressure drop (Δp) should be calculated as
follows:
P
Δp=
Δp = Pressure drop (psi)
Pin= Inlet pressure (psia)
If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.
in
2
64.7 psia
Is 44.7 psia < ? — No.
2
Then Δp = 64.7 - 44.7 = 20psi
4. Using the nomograph, locate the pressure drop (psi) on the vertical line
marked "Δp" (Point A).
Figure 4-4 Example Nomograph
4-17
Page 50
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical
line marked "Q
Nitrogen
" (Point B).
4-7 Restrictor Sizing
6. Draw a line connecting Δp and Q
and extend it to the baseline.
Nitrogen
Mark this point (Point C).
7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).
8. Draw a line connecting P
(Point D) and baseline (Point C) and then
in
extend this line to the vertical line marked Do (orifice diameter, inches)
(Point E).
9. This point on the line is the minimum orifice size for the given
conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow . If the orifice selected falls
below .0013, choose .0013 size orifice.
For the example in Figure 4-4, the .007 size orifice would be selected.
The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow, however the
total flow through each restrictor is different. Different restrictors (micron
porosity and active area) have different pressure drops and produce
controllers with different full scale flow rates. For a discussion of the
interaction of the various parts of the meter , you are urged to review
Section 3-1 (Theory of Operation).
4-18
If the restrictor assembly has been contaminated with foreign matter , the
pressure drop vs. flow characteristics will be altered and it must be cleaned
or replaced. It may also be necessary to replace the restrictor assembly
when the mass flow controller is to be calibrated to a new flow rate.
Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:
Appropriate size wrench for the removal of the inlet process connection
Restrictor removal tool (Refer to Table 5-2)
Restrictor O-ring, refer to the spare parts Section 5, for the correct part
number.
The Model 5851E Mass Flow Controller utilizes porous metal restrictor
assemblies for all full scale flow rates. Restrictor elements with porosities
of 40 and 60 microns are used in different combinations. Up to 3 restrictor
elements can be placed in one assembly. These restrictors are assembled
by pressing the porous metal elements into the header plate.
When sizing a restrictor assembly for gases other than Nitrogen, the
sensor conversion factor must be included as the restrictor is used to divert
a portion of the process flow through the sensor. Use the following
equation to obtain the desired output in air equivalent units. Refer to Table
4-3 for the conversion factor list.
Page 51
Installation and Operation Manual
CAUTION
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section 4 Maintenance
Brooks® Model 5851E
Example:
The desired gas is Silane (SiH4)
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.625 from Table 4-3.
Nitrogen equivalent flow = 200/0.625 = 320 sccm Nitrogen
In the example above, the restrictor should be sized for a 320 sccm flow
rate.
If a restrictor assembly is being replaced because the original has become
contaminated, the original may be used as a guide to select the
replacement assembly . The porosity of the original element or element s is
marked on the calibration sheet which was shipped with the flow controller.
The replacement assembly should be replaced in the same orientation as
the original restrictor.
Assembly Procedure
1. Select the proper restrictor element combination.
2. When handling restrictor elements use care to insure that they are not
contaminated with dirt, grease, oil, etc. The use of rubber gloves is
recommended.
3. Put a lightly O-ring onto the header plate. The restrictor assembly can
then be installed in the MFC body (restrictor element(s) go in first). It is
important that the restrictor assembly is put into the body in the correct
orientation (Refer to Figure 4-6). Push this assembly in with your
fingers. Do not use an arbor press or hammer to install the restrictor
assembly . The restrictor assembly should be pushed in until it bottoms
out. Do not force it beyond this point.
4. Place the end block O-ring in position and install the end block with the
4 hex socket screws. Tighten these screws to 49 inch-lbs. Do not over
tighten.
The end block screws (31) and the valve screws (3) are not
interchangeable. The end block screws are stronger and are needed
to achieve the pressure rating. The end block screws are darker in
color and can be attracted by a magnet.
5. Install the inlet adaptor fitting.
Table 4-5 Restrictor Selection Guide
Range slpm Restrictor Element Part Number
Nitrogen Equivalent Flow* Combination
4.6 to 15 1-40 micron (1 inch) S613E604BMT
15 to 26 1-40 micron S613E636BMT
26 to 42 2-40 micron S613E523BMT
42 to 60 3-40 micron S613E526BMT
60 to 79 2-40 micron/1-60 micron S613E528BMT
79 to 93 1-40 micron/2-60 micron S613E529BMT
93 to 130** 3-60 micron S613E527BMT
*Based on 0°C Standard Reference Temperature
**For Hydrogen from 130 slpm to 200 slpm use 3-60 micron restrictor elements.
Note: If the air equivalent flow is between two sizes, choose the larger size.
4-19
Page 52
Section 4 Maintenance
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
Figure 4-5 Restrictor Element Assembly
Figure 4-6 Restrictor Element Orientation in Controller Body
4-20
Page 53
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
4-1 General
Section 5 Parts List
Brooks® Model 5851E
When ordering parts, please specify: Brooks serial number, model number,
part description, part number, and quantity. (Refer to Figure 5-1 and Table
5-1 and 5-2).
5-1
Page 54
Section 5 Parts List
Brooks® Model 5851E
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November , 2008
Figure 5-1 Model 5851E Parts Drawing
5-2
Page 55
Installation and Operation Manual
Section 5 Parts List
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 5-1 Model 5851E Replacement Parts List
Item Qty. Description Part Number
No.
1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169CZ%
5 1 O-ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem, High Flow S949Z203QOA
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-ring 375B016***
7 1 Valve Plunger Assy., High Flow S622Z165AAA
8 1 Lower Guide Spring 820Z083BMA
9 AR Small Valve Spacer, 0.005" Thick 810A362BMA
9 AR Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
10 AR Large Valve Spacer, 0.010" Thick 810A361BMA
Valve Seat with Viton Insert S715Z051AAG
11 1 Valve Seat with Buna Insert S715Z050AAG
Valve Seat with Kalrez Insert S715Z163AAA
Valve Seat Solid 316 Stainless Steel 715Z181BNT
ID 0.0040 577Z275BMT
ID 0.0067 577Z277BMT
ID 0.0091 577Z280BMT
ID 0.0120 577Z283BMT
ID 0.0160 577Z286BMT
ID 0.0210 577Z289BMT
12 1 Orifice ID 0.0260 577Z293BMT
ID 0.0310 577Z296BMT
ID 0.0360 577Z300BMT
ID 0.0410 577Z305BMT
ID 0.0465 577Z308BMT
ID 0.0550 577Z310BMT
(Refer to Section 4-6 ID 0.0635 577Z312BMT
for sizing) ID 0.0700 577Z314BMT
ID 0.0760 577Z316BMT
ID 0.0820 577Z319BMT
ID 0.0935 577Z322BMT
ID 0.1065 577Z328BMT
ID 0.1200 577Z333BMT
ID 0.1405 577C336BMT
13 1 O-ring, Orifice, Size 011 375B011***
14 1 Controller Body w/ Weld Studs S854Z157BMA
15 1 PC Board Assembly (Card Edge) S097Y824AAA
(D-Connector) S097Y847AAA
16 1 Sensor Assembly S774Z607AAA
17 2 O-ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 573Q103ACZ
19 2 Lock Washer, Sensor 962D005AWA
20 5 Screw, Sensor-PC Board-Cover 753L056AWZ
21 1 Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
22 1 O-ring, Restrictor, Size 026 375B026***
23 1 Electronics Cover Can (Card Edge) 219Z389EA%
(D-Connector) 219Z390EA%
23A 1 Cover Plate (D-Con. Version Only) 852Z209EA%
24 1 PC Board Mounting Bracket 079Z135EAA
25 1 Centrating Ring (Card Edge Only) 106D073MDQ
26 2 Pot Hole Plug 620Z434SXA
***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown
Brooks® Model 5851E
Stainless
106D072MDQ
5-3
Page 56
Section 5 Parts List
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
Brooks® Model 5851E
Table 5-1 Model 5851E Replacement Parts List (Continued)
Item Qty. Description Part Number
No.
Fittings:
1/4" Compression, Swagelok 320B136BMA
1/4" Male VCR, Cajon 315Z036BMA
NS 2 1/4" Male VCO, Cajon 315Z035BMA
3/8" Compression Fitting 320B150BMA
3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA
3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA
27 2 O-ring, Fitting, Size 906 375B906***
NS 2 O-ring, Fitting, Size 010 375B010***
NS 1 O-ring, End Block, Size 029 375B029***
Interconnecting Cables: Length Card Edge D-Connector
Connector on one end 5 Feet S124Z469AAA S124Z361AAA
with no termination 10 Feet S124Z470AAA S124Z362AAA
NS on other end 25 Feet S124Z471AAA S124Z363AAA
1 50 Feet S124Z472AAA S124Z435AAA
Card Edge D-Connector
Connector on one end 5 Feet S124Z669AAA S124Z576AAA
NS with Connector for Model 5870 10 Feet S124Z539AAA S124Z577AAA
Series Secondary 25 Feet S124Z562AAA S124Z578AAA
Electronics on other end 50 Feet S124Z670AAA S124Z579AAA
NS 2 8-32 Mounting Screw Customer Supplied
28 1 End-block with integral inlet screen S079Z200AAA
29 4 Screw, End-block 751Z105AA0
***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown
November , 2008
Table 5-2. Tool and Spare Kits for Model 5851E.
5850 Series Service Tool Kit Model 5851 Header Removal Tool
P/N S778D017AAA P/N S817Z036AAA
Permits the complete disassembly of the 5850E Series Model 0550/5851 Orifice Removal Tool
for servicing P/N S908Z049AAA
Contains:
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool
1 - Ball Point Allen Wrench
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
5850 Series Break Out Board Assembly 5850 Series Valve Shim Kit
P/N S273Z649AAA for Card Edge version P/N S810A372BMA
S273Z668AAA for D-Connector version
Installs directly between mass flow controller and Contains:
interconnecting cable. Allows convenient access to 1 - .010" Large Spacer
all signals for easy troubleshooting of system 2 - .005" Large Spacers
1 - .010" Small Spacer
Contains: 2 - .005" Small Spacers
1 - Break Out PC Board
1 - 5 foot Extension Cable
1 - Terminal PC Board
***QTA = Viton, SUA = Buna, TTA = Kalrez
Note: Refer to Brooks publication DS-5800 for additional accessories.
Additional publications available: MFC Contamination Control & Valve Application Guide/Service Manual
5-4
Page 57
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om
elektrisk støj (EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger
skal enten være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender , til stikkets met alhus eller PG-forskruningen og have forbindelse over
360 grader .
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm
med 100% dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Section A CE Certification
Brooks® Model 5851E
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.
Nach erfolgreichen Tests enstprechend den V orschif ten der Elektromagnetischen Verträglichkeit (EMC Richtlinie
89/336/EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der V erbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der S pezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet
werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen
Umfang von 360 ° anzuschließen.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Platinen-Steckverbindunger sind st andardmäßige keine metallgeschirmten V erbindungen. Um die
Anforderungen der CE-Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu
verwenden.
Die Abschirmung ist mit dem Erd potential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Page 58
Section A CE Certification
Brooks® Model 5851E
English
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations
of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a
100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands
must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to
comply with CE certification.
The shield should be terminated to a earth ground. For pin configuration : Please refer to the enclosed
Instruction Manual.
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
A-2
Español
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las
pruebas referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a
utilizar un equipo con marca CE
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su
conjunto con un apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando
sea posible, se deberán utilizar prensaestopas metálicos provistos de abrazadera para la p ant alla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos
completamente en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser
protegidos con un apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor , consultar Manual de Instrucciones adjunto.
Page 59
Installation and Operation Manual
Section A CE Certification
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Français
Brooks® Model 5851E
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les
règles de la Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour
véhiculer le signal d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du
câble, et à chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100%
pour satisfaire à la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Greek
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440 U.S.A.
A-3
Page 60
Section A CE Certification
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
Brooks® Model 5851E
Italiano
November, 2008
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggett a a marcatura CE, ha
superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/
EEC).
E’ richiesta comunque una speciale attenzione nella scelt a dei cavi di segnale da usarsi con la strumentazione
soggetta a marchio CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente
intende usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve
essere metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per
entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura
del 100% per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en
voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen word t voor gebruik met CE gemarkeerde
produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE
certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien
kabelwartels worden toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het
kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn
met een bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
A-4
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
Page 61
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Section A CE Certification
Brooks® Model 5851E
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av ut styr for massestrømsmåling og regulering
Dato : Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i
metall for jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i
begge ender over 360°, tilkoblet elektrisk jord.
• Kort-kantkontakter er normalt utført i kunst stof f. De tilhørende flatkabler må være utført med fullstendig, 100%
skjerming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.For tilkobling av
medleverte plugger, vennligst se håndboken som hører til utstyret.Vennlig hilsen
Português
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento
da Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário
ter uma atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário,
deve utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com
blindagem a 100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
A-5
Page 62
Section A CE Certification
Brooks® Model 5851E
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : T ammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan
signaalikaapelin itse, olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää met allisia
kaapeliliittimiä kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja
jotta ne olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, P A 19440
U.S.A.
Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt
utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall
alternativt med metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kont akternas metallkåpor eller genomföringar med 360
graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att
överensstämma med CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
A-6
Page 63
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Brooks® Model 5851E
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Page 64
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
Brooks® Model 5851E
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and
reliability for repairs and recalibration. The primary standard calibration equipment to calibrate our flow products is
certified by our local Weights and Measures Authorities and traceable to the relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
November, 2008
ST ART-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290
Asia
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.
TRADEMARKS
Brooks.......................................................... Brooks Instrument, LLC
Freon TF .......................................... E. I. DuPont deNemours & Co.
Kalrez..........................................................DuPont Dow Elastomers
VCO, VCR ............................................................... Cajon Company
Viton.............................................. DuPont Performance Elastomers
Vol-U-Meter ................................................. Brooks Instrument, LLC
1-888-554-FLOW
+011-81-3-5633-7100
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