Brooks Instrument 5850i User Manual

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Model 5850i

Mass Flow Controller

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

Brooks® Model 5850i

December, 2008

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5850i

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X -TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Section 1
Introduction

Section 2
Installation

Contents

Brooks® Model 5850i

Paragraph Page
Number Number

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-3

2-1 Receipt of Equipment........................................................ 2-1

2-2 Recommended S torage Practice ...................................... 2-1

2-3 Return Shipment ............................................................... 2-2

2-4 Gas Connections............................................................... 2-2

2-5 Installation ......................................................................... 2-3

2-6 In-Line Filter ...................................................................... 2-4

2-7 Electrical Interfacing.......................................................... 2-5

2-8 Configuring the PC Board ................................................. 2-8

Section 3
Operation

Section 4
Maintenance

Section 5
Parts List

3-1 Theory of Operation .......................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-3

3-4 Calibration Procedure........................................................ 3-4

3-5 Response .......................................................................... 3-8

4-1 General ............................................................................. 4-1

4-2 Troubleshooting................................................................. 4-1

4-3 Sensor Tube...................................................................... 4-6

4-4 Disassembly and Assembly............................................... 4-6

4-5 Use of the Conversion Tables .......................................... 4-10

4-6 Use of Orifice Sizing Nomograph..................................... 4-11

4-7 Restrictor Sizing ............................................................... 4-15

5-1 General ............................................................................. 5-1

Section A
CE Certification

CE Certification of Mass Flow Equipment ......................... A-1

i

Contents

Brooks® Model 5850i

Figures

Installation and Operation Manual

X -TMF-5850i-MFC-eng

Part Number:541B108AAG

December, 2008

Figure Page

Number Number

1-1 Command Steps, Sof t Start Disabled................................ 1-2

1-2 0-100% Command S tep, Soft S t art Enabled ..................... 1-2

2-1 Model 5850i Dimensions ................................................... 2-3

2-2 "D" Type Connector Pin Arrangement ............................... 2-4

2-3 Maximum Allowable Loop Resistance ............................... 2-5

2-4 Common Electrical Hook-Ups ........................................... 2-6

2-5 Recommended I/O Wiring Configuration for Current Signals

(Non-Isolated Power Supply)............................................. 2-7

2-6 Recommended I/O Wiring Configuration for Current Signals

(Isolated Power Supply) .................................................... 2-8

3-1 Flow Sensor Operational Diagram .................................... 3-2

3-2 Flow Control System Block Diagram................................. 3-3

3-3 Model 5850i Calibration Connections................................ 3-6

3-4 Adjustment Potentiometer Location .................................. 3-6

3-5 PC Board Jumper Location & Function ............................. 3-7

3-6 Fast Response Adjustment ............................................... 3-9

4-1 Torque Sequence for the Valve Retainer Plate.................. 4-3

4-2a Valve Adjusting S p acer Locations(Normally Closed Valve N.C.)

.......................................................................................... 4-5

4-2b Valve Adjusting S p acer Locations(Normally Open Valve N.O.)

.......................................................................................... 4-6

4-3 V oltmeter Connections for V alve Adjustment .................... 4-8

4-4 Example Nomograph ....................................................... 4-18

5-1 Model 5850i Parts Drawing ............................................... 5-1

Tables

ii

Table Page

Number Number

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting...................................................... 4-2

4-2 Sensor Troubleshooting .................................................... 4-4

4-3 Conversion Factors (Nitrogen Base) ................................ 4-12

4-4 Model 5850i Orifice Sizing Nomograph............................ 4-16

4-5 Model 5850i St andard Restrictors .................................... 4-19

5-1 Model 5850i Replacement Parts List................................. 5-2

5-2 Tool and S pare Part Kits for 5850i Series.......................... 5-3

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

1-1 Purpose

Section 1 Introduction

Brooks® Model 5850i

The Brooks® Model 5850i Mass Flow Controller is a mass flow
measurement device designed for accurately measuring and rapidly
controlling flows of gases. This instruction manual is intended to provide
the user with all the information necessary to install, operate and maintain
the Brooks 5850i Mass Flow Controller. This manual is organized into five
sections:

Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance
Section 5 Parts List

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5850i.

1-2 Description

The Brooks Model 5850i Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850i consists of
three basic units: a flow sensor , a control valve and an integral electronic
control system. This combination produces a stable gas flow , which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:

Fast Response Control permits rapid gas settling times with little or no
over/undershoot. Refer to Figure 1-1.

Soft Start provides a flow ramping function which slows down the
introduction of the process gas for those processes which cannot tolerate
rapid flow transition. Refer to Section 2-7 and Figure 1-2.

Valve Override permits the user to fully open and close the control valve
independent of the setpoint (command) setting. Refer to Section 2-6.

Setpoint (Command) permits the user to program the mass flow controller
with an external 0-5 Vdc or 4-20 mAdc signal. Refer to Section 2-6.

Low Command Valve Inhibit (Auto Shutof f) prevent s the valve from
opening whenever the setpoint is less than 2% of full scale.

Removable Cleanable Sensor permits the user to clean or replace the
sensor. Refer to Section 4-4.

Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to -0.7 Vdc and +6.8 Vdc on the voltage
signal output and 0 to 26 mA on the current output.

1-1

Section 1 Introduction

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Figure 1-1 Command Steps, Soft Start Disabled

Figure 1-2 0 - 100% Command Step, Soft Start Enabled

1-2

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

1-3 Specifications

Section 1 Introduction

Brooks® Model 5850i

Standard Ranges

3 sccm to slpm* (nitrogen equivalent)

Accuracy

±1% full scale including linearity at calibrated conditions
±1.5% full scale including linearity for flow ranges greater than 20 slpm.

Repeatability

0.25% of rate

Response Time

Less than 6 seconds to within 2% of full scale final value with a 0 to 100%

command step.

Power Requirements

+15 to +28 Vdc — 245 mA @ +15 Vdc to 370 mA @ +28 Vdc

Ambient T emperature Limit s

Operating: 5 to 65°C (40 to 150°F)
Non-Operating: -25 to 100°C (-13 to +212°F)

Working Pressure

1500 psi (10.342 MPa) maximum

Allowable Differential Pressure

5 psi minimum, 50 psi maximum. Higher differential pressures are allow-

able depending on gas and range. Consult factory for details.

Output Signal

0-5 Vdc into 2,000 ohms or greater . Maximum ripple 3 mV.
Jumper selectable 4-20 mAdc or 0-20 mAdc.
Refer to Fig. 2-3 for maximum total loop resistance.

5 V olt Reference Output

5 Volt s ±0.2%. Maximum load 1k ohms.

1-3

Section 1 Introduction

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

T emperature Sensitivity

Zero: Less than ±0.075% full scale per degree C.
Sp an: Less than ±1.0% full scale shif t over 10-50°C range.

Mounting Attitude Sensitivity

±0.5% maximum full scale deviation after re-zeroing.

Command Input

Jumper Selectable: 0-5 Vdc, Input resistance 200k ohm or 4-20 mAdc,

Input resistance 75 ohm.

Leak Integrity

1 x 10-9 Atm. scc/sec Helium

Control Range

50 to 1

Mechanical Connection

Interchangeable with most popular mass flow controllers.
Refer to Figur e 2 -1.

Electrical Connections

D-type, 15-pin connector (DA-15P). Mating connector supplied.

*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C and

101.3 kPa (760 Torr). The mass flow controller can be calibrated to other
reference standard conditions. Specify at time of ordering.

1-4

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5850i

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to the Product Service Dep artment, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.

Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-2 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal.

2. Relative humidity 45% nominal, 60% maximum/25% minimum.

Upon removal from storage, a visual inspection should be conducted
to verify its condi-tion is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-1

Section 2 Installation

Brooks® Model 5850i

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

2-4 Gas Connections

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

Standard inlet and outlet connections supplied on the Model 5850i are 1/4"
compression fittings.

Optional 1/8" compression, VCOTM and VCRTM connections are available
upon request. Prior to installation, make certain all piping is clean and free
of obstructions. Install the piping in such a manner that permits easy
removal if the instrument is to be removed for cleaning or test bench
troubleshooting.

2-2

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Connection "X" Dim.

1/8" Compression

Fitting 122.9

1/4" Compression

Fitting 127.5

1/4" Tube VCO

1/4" Tube VCR

3/8" Compression

Fitting 130.5

4.84

5.02

4.56

115.8

4.88

124.0

5.14

Section 2 Installation

Brooks® Model 5850i

Figure 2-1 Model 5850i Dimensions

2-5 Installation (Refer to Figures 2-1 through 2-4)

Recommended installation procedures:

a. The Model 5850i should be located in a clean dry atmosphere

relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

d. The Model 5850i Mass Flow Controller can be installed in any

position. However, mounting orient ations other than the original

factory calibration (see data sheet) will result in a ±0.5% maximum

full scale shift after re-zeroing.
e. When installing controllers with full scale flow rates of 10 slpm or

greater, be aware that sharp abrupt angles in the system piping

directly upstream of the controller may cause a small shift in accu-

racy. If possible, have at least ten pipe diameters of straight tubing

upstream of the 5850i MFC.

2-3

Section 2 Installation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

1 SETPOINT RETURN 9 SUPPLY COMMON

2 VOLTAGE SIGNAL OUTPUT 10 SIGNAL OUTPUT RETURN

3 NOT USED 11 5V REFERENCE OUTPUT

4 CURRENT SIGNAL OUTPUT 12 VALVE OVERRIDE INPUT

5 +15 TO +28 Vdc SUPPLY 13 NOT USED

6 NOT USED 14 CHASSIS GROUND

7 CURRENT SETPOINT INPUT 15 NOT USED

8 VOLTAGE SETPOINT INPUT

*JUMPER SELECTABLE

2-6 In-Line Filter

NOTE: Cable shield tied to chassis ground in connector. Make no
connection on customer end.

Figure 2-2 "D" Type Connector Pin Arrangement

Note: The control valve in the Model 5850i provides precision control and
is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

2-4

Table 2-1 Recommended Filter Size

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 microns

1 to 5 slpm 7 microns

10 to 30 slpm

15 microns

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 2 Installation

Brooks® Model 5850i

Figure 2-3 Maximum Allowable Loop Resistance

2-7 Electrical Interfacing

To insure proper operation, the 5850i must be connected per Figures 2-2,
2-3 and 2-4 and configured according to Section 2-7. As a minimum, the
following connections must be made for new installations:

Function

Chassis Ground
Signal Output Return
Volt age or Current Signal Output

22.5-28 Vdc Supply
Supply Common
Voltage or Current Setpoint Input
Setpoint Return

Electrical Hook-up
Setpoint (Command) Input

The 5850i Mass Flow Controller can be used with a current (4-20 mAdc)
or voltage (0-5 Vdc) setpoint. To use the current setpoint, connect the
setpoint (+) signal to pin 7 and the setpoint return (-) signal to pin 1 of the
D-connector and configure the PC Board per Section 2-7. To use the
voltage setpoint, connect the setpoint signal to pin 8 and the voltage
setpoint return to pin 1 of the D-connector and configure the PC Board per
Section 2-7.

(The Brook’s MFC acts as a current sink to a setpoint input signal.
The 0/4-20 mA setpoint signal should be “driven” into the MFC input by a
controlled current source. Reference Brook’s device specifications for the
setpoint input impedance.)

2-5

Section 2 Installation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Signal Output

The flow signal output can be measured as a voltage and a current
simultaneously on two different pins of the D-connector. Pin 2 indicates the
flowrate with a 0-5 Vdc signal proportional to the mass flow rate. Pin 4
indicates the flowrate with either a 0-20 mAdc or 4-20 mAdc current signal
as determined by jumpers on the pc board (refer to Section 2-7 for jumper
positions). Both the current and voltage signals are returned on pin 10 of
the D-connector .

(The Brook’s MFC acts as the current source when providing a 0/4-20 mA
output signal to the load. The output signal is “driven” by the MFC into the
customer load. Reference Brook’s device specifications for maximum load
capacity.)

Supply

The power for the mass flow controller is connected to pin 5 (+22.5 to +28
Vdc) and pin 9 (supply common) of the D-connector . Refer to Section 1-3
for the power requirements.

NOTE: The length of wire for the power supply connections (pins 5 & 9)
must be kept as short as possible to insure the minimum voltage (+15) is
available at the mass flow controller .

Figure 2-4 Common Electrical Hook-Ups, Voltage I/O version

2-6

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 2 Installation

Brooks® Model 5850i

Chassis Ground

Connect earth ground to pin 14 of the D-connector .

V alve Override (connection optional)
The valve override function allows full opening and closing of the valve

independent of the setpoint:

To open the valve, apply +15 to +28 Vdc to pin 12
To close the valve, connect pin 12 to ground.
Isolating pin 12 (no connection) returns the

controller to normal operation.

NOTE: For normal operation, pin 12 must be left open (floating).

Figure 2-5 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply)

2-7

Section 2 Installation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Figure 2-6 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)

2-8 Configuring the PC Board

NOTE: To obtain access to the jumpers, the electronics cover can must be
removed. Disconnect the power to the mass flow controller and any cables
to the D-connector and the valve coil connector. Remove the three screws at
the base of the can and remove the top jack post of the D-connector.
Remove the can. The can must be replaced before returning the unit to
service. Refer to Section 2-6 for the proper electrical hook-up. Refer to Figure
3-5 for pc board jumper locations and functions.

Setpoint (Command) Input

The mass flow controller can be configured for voltage or current setpoint
(command) input. Jumper J7 (green) must be in the right-hand position for
0-5 Vdc setpoint and in the left-hand position for a 4-20 mAdc setpoint
input.

Signal Output

A 0-5 Vdc flow signal output is always available. The current signal output
is jumper selectable for either 0-20 mAdc or 4-20 mAdc. Jumpers J3 and
J4 (blue) must be in the upper position for 0-20 mAdc output and in the
lower position for 4-20 mAdc output.

2-8

NOTE: Both J3 and J4 must be in the same position. Jumpers J3 and J4
do not affect the voltage output.

Soft Start

To enable soft start, place Jumper J2 (red) in the right-hand position (SS).
To disable soft start, place jumper J2 in the left-hand position (N).

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

3-1 Theory of Operation

Section 3 Operation

Brooks® Model 5850i

The thermal mass flow sensing technique used in the 5850i works as
follows:

A precision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. (Refer to Figure
3-1) At zero or no flow conditions, the heat reaching each temperature
sensor (one upstream and one downstream of the heater) is equal.
Therefore, the temperatures T1 and T2 are equal. When gas flows through
the tube, the upstream sensor is cooled and the downstream sensor is
heated, producing a temperature difference. The temperature difference
T2-T1 is directly proportional to the gas mass flow.

The equation is: ΔT = A * P * Cp * m

Where,

ΔT = temperature difference T2 - T1 (°K)

C

P = heater power (kJ/s)
m = mass flow (kg/s)
A = constant of proportionality (S2-°K2/kJ2)

= specific heat of the gas at constant pressure

p

(kJ/kg-°K)

A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate. The flow restrictor shown in Figure 3-1 performs a ranging
function similar to a shunt resistor in an electrical ammeter. The restrictor
provides a pressure drop that is linear with flow rate. The sensor tube has
the same linear pressure drop/flow relationship. The ratio of the restrictor
flow to the sensor tube flow remains constant over the range of the meter .
Different restrictors have different pressure drop s and produce controllers
with different full scale flow rates. The span adjustment in the electronics
affects the fine adjustment of the controller's full scale flow.

In addition to the mass flow sensor , the Model 5850i Mass Flow Controller
has an integral control valve and control circuit, as shown in Figure 3-2.
The control circuit senses any difference between setpoint and the flow
sensor signal and adjusts the current in the modulating solenoid valve to
increase or decrease the flow .

The Model 5850i has the following features incorporated in the integral
control circuit:

Fast Response adjusted by the anticipate potentiometer. This circuit, when

properly adjusted, allows the high frequency information contained in
the sensor signal to be amplified to provide a faster responding flow
signal for remote indication and use by the control valve.

3-1

Section 3 Operation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

Figure 3-1 Flow Sensor Operational Diagram

3-2 Operating Procedure

3-2

Soft Start enabled by moving a jumper on the PC Board. This circuit

provides a slow injection of the gas as a protection to the process,
particularly those using a volatile or reactive gas. Full gas flow is
achieved in approximately 20 seconds. Refer to Section 2-7.

Precision 5 Volt Reference allows the direct connection of a setpoint

potentiometer to produce a 0-5 V olt command signal to the controller. A
precision ten-turn 2k ohm potentiometer with an integral turns counter
is recommended. This will permit repeatable adjustment s of setpoint to
1 part in 1,000.

Valve Override allows full opening and closing of the control valve indepen-

dent of the command setting. (Refer to Section 2-6)

a. Apply power to the controller and allow approximately 45 minutes for

the instrument to warm up and stabilize its temperature.

b. T urn on the gas supply.
c. Command 0% flow and observe the controller’s output signal. If the

output is not zero mVdc ±10 mVdc or 4 mAdc ±0.05 mAdc, check

for leaks and if none are found, refer to the re-zeroing procedure in

Sect. 3-3.

d. Set the command for the desired flow rate to assume normal operation.

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 3 Operation

Brooks® Model 5850i

Figure 3-2 Flow Control System Block Diagram

3-3 Zero Adjustment

Each 5850i is factory adjusted to provide a zero ±10 mVdc signal or a 4
mAdc ±0.05 mAdc signal at zero flow. The adjustment is made in our
calibration laboratory which is temperature controlled to 21.1°C (70°F
±2°F). After initial installation and warm-up in the gas system, the zero flow
indication may be other than the factory setting. This is primarily caused by
changes in temperature between our calibration laboratory and the final
installation. The zero flow reading can also be affected, to a small degree,
by changes in line pressure and mounting attitude.

To check zero, always mount the controller in its final configuration and
allow a minimum of twenty minutes for the temperature of the controller
and its environment to stabilize. Using a suitable voltmeter or current
meter , check the controller output signal. If it differs from the factory
setting, adjust it by removing the lower pot hole plug which is located
closest to the controller body . Adjust the zero potentiometer (refer to Figure
3-6) until the desired output signal is obtained.

NOTE: If the 0-20 mA output is used, adjust zero by monitoring the voltage
output signal. This is required because the current output cannot go
negative.

3-3

Section 3 Operation

Brooks® Model 5850i

3-4 Calibration Procedure

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

NOTE 1: If the valve has been disassembled and any of the following parts
have been replaced, the control valve adjusting procedure in Section 4-4c
must be performed before the Model 5850i is calibrated.

orifice
valve stem
plunger
lower guide spring
valve seat

NOTE 2: Calibration of the 5850i mass flow controller requires the use of a
digital voltmeter (DVM) and a precision flow standard calibrator such as the
Brooks Vol-U-Meter. It is recommended that the calibration be performed
only by trained and qualified service personnel.

NOTE 3: If the mass flow controller is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor. Size the
orifice for actual operating conditions (refer to Section 4-5).

a. With the controller installed in an unpressurized gas line, apply power

and allow approximately 45 minutes for warm-up. During the warm-

up, adjustment and calibration check procedures, do not allow the

control valve to open when gas flow is not present. This situation is

not a normal operating mode; it will cause the control valve to

abnormally heat up. A meter with an abnormally warm valve will be

difficult to calibrate. This situation can be prevented by the valve

override “closed” when there is no gas flow, or setting the setpoint to

less than 1%. Also avoid unnecessary periods with the valve over-

ride “open.”

b. Adjust the anticipate potentiometer fully clockwise (twenty turns).

Then adjust the anticipate potentiometer ten turns counterclockwise

to center the potentiometer . This will provide a rough adjustment of

this circuit and make the flow more stable for calibration.

c. Connect the DVM positive lead to the 0-5V signal output (pin 2) and

the negative lead to signal common (TP4). Adjust the zero potenti-

ometer for an output of 0mV ±2 mV.

d. Apply pressure to the system and insure that the zero signal repeat s

within 2 mV of the voltage set in step “c” above. If the zero does not

repeat, check for leakage.

NOTE: Controllers supplied with all-metal valve seats do not provide tight
shut-off. A 0-8% leak-through is typical. For metal seat controllers, close a
downstream shut-off valve and observe the zero signal.

3-4

e. Adjust the setpoint for 100% flow (5.000V or 20 mAdc). Connect the

DVM positive lead to TP2 (linearity voltage) and the negative lead to

TP4 (signal common). Adjust the linearity potentiometer for an

output of 0.0V (zero volts).

Installation and Operation Manual

X-TMF-5850i-MFC-eng
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Section 3 Operation

Brooks® Model 5850i

f. Connect the DVM positive lead to TP1 (100x sensor voltage) and

the negative lead to TP4 (circuit common). The setpoint should still

be set at 100% flow (5.000V). Measure the flow rate using suitable

volumetric calibration equipment. To adjust the controller to the

proper full scale flow , calculate a new TP1 volt age using the follow-

ing equation:

Adjust the span potentiometer until the voltage at TP1 is equal to the value
calculated above. Recheck the flow rate after the flow is stable (at least
two minutes). Repeat this check and adjustment procedure until the
measured flow rate is within 1% of the desired flow rate.

NOTE: The voltage at TP1 is 100 times the output voltage of the sensor. This
voltage can range from 1.2 to 12 volts, however, it is recommended that this
voltage stays between 2.0 and 9.0 volts for proper operation. If the
recommended voltage range exceeds that desired, accuracy and/or signal
stability may not be achieved. If one of the limits is reached, check the orifice
and restrictor sizing procedures. Refer to Sections 4-6 and 4-7 respectively.

g. Adjust the setpoint fo r 0 % flow. Connect the DVM positive lead to

0-5V signal output (Pin 2) and the negative lead to TP4. Readjust

the zero potentiometer for an output of 0 mV ±2 mV as necessary.
h. Adjust the setpoint for 50% flow and measure the flow rate. Calculate

the error as a percentage of full scale.

i. Calculate the TP2 correction voltage: (error recorded in step “h”) x

0.450 volts

Example:
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 volts
New TP2 voltage = 0 volts + (-0.675) = -0.675 volts

j. Set the command potentiometer for 100% flow (5.000V). Connect the

DVM positive lead to TP2 and the negative lead to TP4.
k. Adjust the linearity potentiometer for an output equal to the new

calculated TP2 voltage.
l. Repeat steps f, g and h.

1. If the error recorded in step “h” is less than 0.5%, then the calibration

procedure is complete.

3-5

Section 3 Operation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

Figure 3-3 Model 5850i Calibration Connections

3-6

Figure 3-4 Adjustment Potentiometer Location

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 3 Operation

Brooks® Model 5850i

Figure 3-5 PC Board Jumper Location & Function

3-7

Section 3 Operation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

2. If the error is greater than 0.5% set the command potentiometer for
100% (5.000V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common). Calculate a
new TP2 voltage as follows:

Example:
Controller error = 0.7%
Measured TP2 volt age = -0.567 volts
TP2 correction = 0.7 x 0.450 = 0.315 volts
New TP2 correction = 0.315 + (-0.567) = -0.252 volts

Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat steps f, g and h.

NOTE: The voltage at TP2 can range from -10 to +3 volts, however, it is
recommended that this voltage stays between -2.5 and +2.5 volts for proper
operation. If the recommended voltage range is exceeded, the desired
accuracy and/or signal stability may not be achieved. If one of the limits is
reached, check the restrictor sizing. Refer to Section 4-7.

3-5 Response

Fast Response Adjustment

Two methods of adjusting the step response of the 5850i mass flow
controllers can be used.

Method Number 1 describes a procedure that will get the step response

close to optimum quickly and without any flow measuring equipment.
This method should be used when the response time of the flow
controller is not critical to overall system performance.

Method Number 2 describes a procedure that will allow adjustment of your

5850i mass flow controller to optimum step response performance.
This method is the preferred way to adjust the step response. Adjust­ment of the fast response circuit will not affect the accuracy of the flow
controller as adjusted in Section 3-4.

1. Fast response adjustment (six seconds response specification not
guaranteed)

NOTE: This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples per second or greater to monitor the
rate of change of the output signal.

3-8

a. Adjust the setpoint for 100% flow and wait about 45 seconds for the

flow output signal to stabilize.

b. S tep the command signal to 0% or activate valve override closed to

stop the flow. Observe the flow signal output as it decays.

c. The behavior of the flow signal during this transition between 100%

Installation and Operation Manual

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Part Number: 541B108AAG
December , 2008

Figure 3-6 Fast Response Adjustment

Section 3 Operation

Brooks® Model 5850i

and 0% flow indicates the adjustment required of the anticipate
potentiometer . Refer to Figure 3-6.

1. If the flow signal measured on pin 2 decays to -0.05 to -0.5V , then
rises to 0V , the anticip ate potentiometer is properly adjusted.

2. If the flow signal decays rapidly and goes below -0.5V before rising to
0 V, the anticipate potentiometer must be adjusted clockwise and
steps a and b repeated.

3. If the flow signal decays slowly and does not go below -0.05 V , the
anticipate potentiometer must be adjusted counterclockwise and
steps a and b repeated.

2. Fast response adjustment (six second response specification guaran­teed)

Adjustment of the anticipate potentiometer to obtain a flow rate
performance to be within 2% of flow rate commanded in less than six
seconds after setpoint change requires the use of a fast response
flowmeter (500 millisecond response to be within 0.2% of final value or
better) in series with the 5850i and a storage oscilloscope or recorder.

a. Allow the flow controller to stabilize at 0% setpoint for at least thirty

seconds. Make a step in setpoint to the controller from 0-100% of
full scale flow and record the output signal of the fast response
flowmeter.

b. If this signal shows more than 4% overshoot, adjust the anticipate

potentiometer one-half to one turn counterclockwise. If the signal
does not show overshoot but is not within 2% full scale of final value
after six seconds, adjust the anticipate potentiometer one-half to one
turn clockwise. Set command potentiometer for 0% of flow.

c. Repeat steps a and b until the fast response flowmeter output signal

meets the specified response requirements.

NOTE: With the equipment on the previous page (3-9), the anticipate
potentiometer can be adjusted to give optimum response characteristics for
any process.

3-9

Section 3 Operation

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

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3-10

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

4-1 General

4-2 Troubleshooting

Section 4 Maintenance

Brooks® Model 5850i

No routine maintenance is required on the Model 5850i other than an
occasional cleaning. If an in-line filter is used, the filtering element should
periodically be replaced or ultrasonically cleaned.

A. System Checks

The 5850i is generally used as a component in gas handling systems
which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow controller for bench troubleshooting or return, especially if the
system is new:

1. Verify low resist ance power supply connections and that the correct

power supply voltage and signals are reaching and leaving the
controller. The breakout board (P/N S-273-Z-668-AAA) listed in
Section 5 will make this job much easier .

2. Verify that the process gas connections have been correctly termi-

nated and leak checked.

3. If the mass flow controller appears to be functioning but cannot

achieve setpoint, verify that sufficient inlet pressure and pressure
drop are available at the controller to provide the required flow .

4. Verify that all user select able jumpers are in their desired positions.

Refer to Figure 3-5.

B. Bench T roubleshooting

1. Properly connect the mass flow controller to a +15-28 Vdc power

supply , setpoint source and connect an output signal readout device
(4-1/2 digit voltmeter recommended) to pins 2 and 10 of the D­connector (refer to Figure 2-2). Apply power, set the setpoint to zero
and allow the controller to warm up for 45 minutes. Do not connect
to a gas source at this time. Observe the output signal and, if
necessary, perform the zero adjustment procedure (Section 3-3). If

4-1

Section 4 Maintenance

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

Brooks® Model 5850i

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Actual flow overshoots setpoint by Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 .
more than 5% full scale.

Output stays at zero regardless Clogged Sensor. Refer to Section 4-4. Clean sensor. Refer to cleaning.
of setpoint and there is no flow
through the controller. Clogged Control Valve. Check TP3 with the setpoint at 100%. If the voltage is greater than 11V, disassemble

Valve override input is grounded. Check valve override input (Pin 12)

Defective PC Board. Replace PC Board. Refer to Section 4-4.

Output signal stays at +6.8V or 26 mA Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 4-4C.
regardless of command and there
is flow through the controller.

Output signal follows setpoint Leaky control valve. Disassemble and repair valve. Refer to Section 4-4C.
at higher setpoints but will not go
below 2% (8% for all-metal seat).

Output signal follows setpoint Insufficient inlet pressure or pressure drop. Adjust pressure, inspect the filters and clean/replace as necessary.
at lower setpoints but does not reach
full scale. Partially clogged sensor. Check calibration. Refer to Section 3-4.

Controller grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.
Flow is higher than desired.

Controller grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than desired.

Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

+15V -28Vdc applied to the valve override input. Check the valve override terminal. (Pin 12)

Defective PC Board. Replace PC Board. Refer to Section 4-4.

Partially clogged valve. Disassemble and repair control valve. Refer to Section 4-4.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Valve guide spring failure. Controller oscillates (see below).

Oversized orifice. Check orifice size. Refer to Section 4-6.

Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5.

Faulty pressure regulator. Check regulator output.

Defective PC Board. Replace PC Board. Refer to Section 4-4.

and repair the control valve. Refer to Sections 4-4c and 2-10.

December, 2008

4-2

the output signal will not zero properly , refer to the sensor trouble­shooting section and check the sensor. If the sensor is electrically
functional, the printed circuit board is defective and will require
replacement.

2. Connect the controller to a source of the gas on which it was origi­nally calibrated. Command 100% flow and adjust the inlet and outlet
pressures to the calibration conditions. V erify that the output signal
reaches and stabilizes at 5.00 volts or 20mA. Vary the setpoint over
the 2 to 100% range and verify that the output signal follows the
setpoint. Apply +15-28 volts to the valve override input (pin 12) and
verify that the output exceeds 100%. Connect the valve override pin
to ground and verify that the output signal falls below 2%. If possible,
connect a flow measurement device in series with the mass flow
controller to observe the actual flow behavior and verify the accuracy
of the mass flow controller. If the mass flow controller functions as
described above, it is functioning properly and the problem may lie
elsewhere.

Table 4-1 lists possible malfunctions which may be encountered during
bench troubleshooting.

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 4 Maintenance

Brooks® Model 5850i

Figure 4-1 Torque Sequence for the Valve Retainer Plate

Sensor T roubleshooting

If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce the expected results ,
the sensor assembly is defective and must be replaced. Refer to Section
4-4 for the disassembly and assembly procedures to use when replacing
the sensor.

NOTE: Do not attempt to disassemble the sensor.

Cleaning Procedures

Should the Model 5850i Mass Flow Controller require cleaning due to
deposition, use the following procedures:

1. Remove the unit from the system.

2. Refer to Section 4-4 to disassemble the controller.

3. Use a hemostat or tweezers to push a 0.007" diameter piano wire
through the flow sensor tube to remove any contamination. For best
results, push the wire into the downstream opening of the sensor
tube (end closest to the control valve). The sensor tube can be
flushed with a non-residuous solvent (Freon TF** recommended). A
hypodermic needle filled with solvent is a convenient means to
accomplish this.

An alternate method for flushing out the sensor is to replace the restrictor
element with a low flow plug restrictor. This plug forces all the flow through
the sensor and may dislodge any obstructions. With the valve orifice
removed, subject the flow controller to a high differential pressure.
Pressurizing the outlet of the MFC higher than the inlet may help force the
obstruction upstream and out of the sensor tube.

4-3

Section 4 Maintenance

Brooks® Model 5850i

Table 4-2 Sensor Troubleshooting

Installation and Operation Manual

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Part Number: 541B108AAG

December, 2008

4-4

4. Inspect the orifice for clogging by holding it in front of a light source
and looking for light through the bore. Clean by soaking in a suitable
non-residuous solvent and directing a stream of compressed dry
nitrogen through the bore.

5. Deposits of silicon dioxide may be removed by soaking the internal
parts in a solution of 5 part s hydrofluoric acid (HF) and 95 p arts
water (H2O) followed by Freon TF.

6. Restrictor elements can be cleaned in an ultrasonic bath. Refer to
Section 4-7 for the correct restrictor to use.

7. Blow all p arts dry with dry nitrogen and reassemble. Refer to Section
4-4b (assembly).

8. Purge the assembled controller with dry nitrogen.

9. Perform the calibration procedure in Section 3-4.

10. When the controller is re-installed in the system, the connections
should be leak-tested and the system should be purged with dry
nitrogen for 30 minutes prior to start-up to prevent the formation of
deposits.

Installation and Operation Manual

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Section 4 Maintenance

Brooks® Model 5850i

Figure 4-2a Valve Adjusting Spacer Locations (Normally Closed Valve N.C.)

4-5

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

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Part Number: 541B108AAG

December, 2008

4-6

Figure 4-2b Valve Adjusting Spacer Locations (Normally Open Valve N.O.)

Installation and Operation Manual

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Part Number: 541B108AAG
December , 2008

4-3 Sensor T ube

4-4 Disassembly and Assembly

Section 4 Maintenance

Brooks® Model 5850i

The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.

The Model 5850i Mass Flow Controller may be disassembled in the field by
the user for cleaning, re-ranging or servicing. Disassemble and assemble
the controller as follows: (for normally open valves N.O.)

Figure 3-5 shows the location and function of jumpers. The jumpers J4 and
J1 (blue) must be in the position indicated for a normally open valve.

Figures (labeled 4-2a and 4-2b) shows the location and function of valve
adjustment spacers for normally closed and normally open valves.V alve
adjustment is not required for normal installation and operation of the mass
flow controller. If adjustment is required, consult the factory for information.

Figure (labeled 5-1) shows an exploded view of the controller and specific
parts to the (normally closed NC and normally open NO valve.)

Note: The Model 5850i Mass Flow Controller should be disassembled and
assembled in a clean environment to prevent particulate contamination.

A. Disassembly (Normally Closed)

The numbers in () refer to the spare parts exploded view in Figure 5-1.

1. Remove the jam nut (1) on top of the valve assembly.

2. Unplug the valve connector from the electronics cover and remove the
coil assembly (2).

3. Remove the hex socket screws (3) securing the valve retaining plate
(4) attaching the valve stem assembly (6)(NC valve - Normally Closed)
or (34) (NO V alve - Normally Open).

4. Carefully remove the valve stem assembly (6)(NC V alve) or
(34)(NO V alve).

5. Remove the plunger assembly (7,8,9,1 1)(NC Valve) or
(35,31,32,8,9,11)(NO Valve).

4-7

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Figure 4-3 Voltmeter Connections for Valve Adjustment

4-8

6. Remove and note the position of the valve spring spacers (10), which

may be located above and/or below the lower guide spring (8). Remove
the preload spacer spring (33)(NO Valve).

7. Unscrew the orifice (12) from the flow controller body(14).

8. Carefully unscrew the valve seat (1 1) from the plunger assembly (7)(NC

V alve) or the plunger assembly (31,32,35)(NO Valve).
Note the position and number of spacers (9) that are stacked on the
threaded end of the valve seat.

9. Remove the three screws (20) attaching the electronics cover . Remove

the electronics cover (23).

Installation and Operation Manual

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Section 4 Maintenance

Brooks® Model 5850i

10.Unplug the sensor connector from the PC Board. Remove the two

screws securing the bracket (24) and PC Board (15). Remove the
bracket and PC Board.

1 1.Remove the two screws (18) and washers (19) securing the sensor

assembly (16). Remove the sensor assembly .

Note: Do not attempt to disassemble the sensor assembly .

12.Remove the sensor assembly O-rings (17) from the flow controller body

(14). Using the Brooks O-ring removal tool will help prevent scratching
the sealing surface.

13.Remove the adapter fittings (27) from the flow controller body (14).

14.Remove the restrictor assembly (21) from the inlet side of the flow

controller body (14) using the restrictor tool (part of service tool kit listed
in Section 5, Table 5-2).

B. ASSEMBLY (Normally Closed)

Note: It is recommended that all O-rings be replaced during controller
assembly . All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Place the restrictor O-ring (22) on the restrictor assembly . Screw the

restrictor assembly (21) into the inlet side of the flow controller body
using the restrictor tool, tighten hand tight.

3. Press the lubricated sensor O-rings (17) into the flow controller body

(14). Install the sensor assembly and secure with two screws (18) and
washers (19) tightened to 15 in/lbs.

4. Install the orifice (12) and its O-ring (13), using a 3/8 nut driver. Insure

that the orifice is fully seated but do not overtighten.

5. Insert the valve preload spacers (10)(NC Valve) or (33)(NO Valve), if

used, into the valve cavity in the flow controller body (14). Use care to
preserve the correct order.

6. Place the spacers (9) and spring (8) on the valve seat (11) in the same

order as noted in step 8 of the disassembly . Screw the valve seat (11)
into the plunger assembly (7)(NC Valve) or (35,31,32)(NO Valve).

4-9

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

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Part Number: 541B108AAG

December, 2008

Tighten the assembly until there is no looseness, but do not over-

tighten.

7. Install the valve plunger assembly (7, 8, 9 and 11)(NC V alve) or

(35,31,32,8,9,1 1)(NO Valve) on the preload sp acers (10). Install air gap

spacers (10), if used on top of the valve spring.

8. Install the valve stem assembly (6), secure with the valve retaining plate

(4) and four hex socket screws (3). When installing the screws they

should first make light contact with the plate, which should be checked

to insure that it makes full contact around the stem assembly. Torque

the screws securing the valve retaining plate in diagonal pattern (Refer

to Figure 4-1) to 17 in/lbs.

9. Install the coil assembly (2) over the valve stem assembly (6)(NC

Valve) or (34)(NO V alve) inst all extension sp acer nut (3)(NO Valve) and

secure with jam nut (1).

10.Install the printed circuit (PC) Board (15), secure with the bracket (24)

and two screws. Plug the connector from the sensor assembly onto the

PC Board. The flow arrow on the connector should be pointing toward

the valve assembly .
1 1.Install the electronics cover (23) on the controller, secure with three

screws (20). Plug the connector from the valve coil into the PC Board

through the hole in the electronics cover .

12.Prior to installation leak and pressure test to any applicable pressure

vessel codes.

C. Adjusting the Control V alve

The 5850i control valve has been factory adjusted to insure proper
operation. Readjustment is only required if any of the following parts have
been replaced:

orifice (12)

valve stem (6)

plunger (7)

lower guide springs (8)

valve seat (1 1)

The valve is adjusted in Brooks Mass Flow Controllers by adding spacers
(9 and 10) to the control valve assembly to vary the air gap and initial
preload. Sp acers are used to af fect the proper adjustment because they
provide a reliable and repeatable means for adjustment. Screw type
adjustment mechanisms can change with pressure or vibration and
introduce an additional dynamic seal that is a potential leak site and source
for contamination. Refer to Figure 4-2 for spacer locations.

The preload determines the initial force that is required to raise the valve
seat off the orifice and start gas flow. If the preload is insufficient, the valve
will not fully close and gas will leak through. If the preload is excessive, the
magnetic force generated between the plunger and stem will be insufficient
to raise the plunger and the valve will not open.

4-10

The air gap is the space between the top of the plunger and stem. The air
gap determines the force between the plunger and stem at a given voltage

Installation and Operation Manual

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Part Number: 541B108AAG
December , 2008

Section 4 Maintenance

Brooks® Model 5850i

and the total travel of the valve. If the air gap is too small, the plunger travel
may be insufficient to fully open the valve. Also, the magnetic force may be
too high for a given valve coil voltage. If the air gap is too large, the
magnetic force will be insufficient to raise the plunger and the valve will not
open.

NOTE: Prior to starting the valve adjustment procedure, check to insure that
the orifice is properly seated and that the valve parts are not bent or
damaged.

D. Adjustment Procedure

(Refer to Section 5, Sp are Parts for Spacer Kit)

a. Remove the electronics cover (23) from the controller. Insure that the

connector from the coil assembly (2) is properly reconnected to the
PC Board after the electronics cover is removed.

b. Perform the electrical and gas connections to the controller following

the instructions in Section 2 of this manual. Use a clean dry inert
gas, such as nitrogen, for this procedure. Do not apply gas pressure
to the controller at this time.

c. Disassemble the control valve following the procedure given in

Section 4-4A above. Note the number, locations and thicknesses of
all spacers (9 and 10).

d. Decrease the preload of the valve by 0.005 inches by either remov-

ing a 0.005-inch small preload spacer or by adding a 0.005-inch
large preload spacer . Refer to Figure 4-2.

e. Reassemble the valve following the assembly procedure in S ection 4-

4a.

f. Adjust setpoint for zero percent flow, apply normal operating pressure

and check for valve leak-through by observing the output signal.

g. If the valve leaks through, increase the preload by 0.005" and go to

S tep h. If the valve does not leak through, repeat Steps d, e, f and g.

h. Apply normal operating gas pressure and adjust setpoint for 100%

flow.

Note: Due to possible heat capacity and density dif fer ences between the
test gas and actual process gas for which the MFC was sized, it may be
necessary to increase the inlet pressure to obtain proper control at 100%
flow.

i. Measure the valve voltage by connecting a voltmeter between test

point 3 (TP3) and test point 4 (TP4). Refer to Figure 4-3.

j1. If the flow controller output signal is 100% and the valve voltage is

less than 11.5 V , the valve adjustment is complete.

j2. If the flow controller output signal is 100% and the valve voltage is

greater than 1 1.5 V, decrease the air gap with a small 0.005 inch air
gap spacer . Refer to Figure 4-2. Repeat Steps h and i.

j3. If the flow controller output signal is less than 100% and the valve

voltage is greater than 11.5 V, this condition indicates that the inlet
pressure is too low and/or the orifice size is too small. First check
Section 4-6 to insure that the orifice size is correct.

k. Proceed to Section 3 and perform “3-4 Calibration Procedure,” if

required.

4-11

Section 4 Maintenance

Brooks® Model 5850i

4-5 Use of the Conversion T ables

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in Table 4-3.
To change eo a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas to the gas factor for the calibration gas.

Actual gas = Output x factor of the new gas

flow rate reading factor of the calibrated gas

Example:

The controller is calibrated for Nitrogen.

The desired gas is Carbon Dioxide.

The output reading is 75 sccm when Carbon Dioxide is flowing.

Then 75 x 0.78 = 58.50 sccm

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine
(Cl) by volume. The desired full scale flow rate of the mixture is 20
slpm. Sensor conversion factor for the mixture is:

Air equivalent flow = 20/.903 = 22.15 slpm air

It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure- and/
or temperature-dependent. However , gas conditions that vary widely, from
these reference conditions, may cause an additional error due to the
change in specific heat caused by temperature and/or pressure.

4-12

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Table 4-3 Conversion Factors (Nitrogen Base)

Section 4 Maintenance

Brooks® Model 5850i

GAS NAME FORMULA SENSOR ORIFICE DENSITY

FACTOR FACTOR (kg/m

Acetylene C
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C
1-Butene C
CIS-2-Butene C4H
Trans-2-Butene C4H
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H
Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

2H2

3H4

BrF

4H10

4H8

3

3
3

3

5

3

3

3

6

8

8
2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.740 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H
Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879
Ethylene C2H
Ethylene Oxide C2H4O 0.589 1.254 1.965
Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C2F
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H

4

6

6

6

4

2

3
4

4

3

3

6

6

6

2

14

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

3

)

4-13

Section 4 Maintenance

Brooks® Model 5850i

Table 4-3 Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539
Iodine Pentafluoride IF
Isobutane C4H
Isobutene C4H
Isopentane C5H
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308
Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C3H
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF
Uranimum Hexafluoride UF
Vinyl Bromide C2H3Br 0.524 1.985 4.772

4-14

Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046
Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

3H4

3H8

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

3

FACTOR FACTOR (kg/m

2

5

10

8

12

4

10

2

2

4

2

2

3

3

8

2

2

3

5

12

10

8

8

12

2

3

5

3

6
6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

)

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

4-6 Use of Orifice Sizing Nomograph

Section 4 Maintenance

Brooks® Model 5850i

The Orifice and Restrictor Sizes for 5850i should be sized using the
"Brooks Thermal Mass Flowmeter Sizing Selection Program" Revision 8.6

or later . A copy can be requested through your local Brooks Sales
Representive or through the Brooks Customer Service Department.

The Orifice Sizing Nomograph, Table 4-4, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration.

gas
operating pressure (inlet and outlet)
flow range

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined below.

Example: Determine the orifice size for the following conditions:

Gas: Hydrogen
Flow Rate: 2000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

1. Determine air equivalent flow rate (refer to Table 4-3).

where SG

Q

Air

Q

gas

= Air equivalent flow rate (sccm)
= Desired flow rate of the gas (sccm)

= 1.00

AIR

(Based on 0°C Standard temperature)
D
D
SG

Air

gas

= Density of Air at 70°F
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (t aken at customer

gas

temperature)

Refer to Table 4-3 for specific gravities.

4-15

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Example: What is the air equivalent flow rate of 2000 sccm Hydrogen?

In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:

Where P1 = percentage by volume of gas 1

P2 = percentage by volume of gas 2

Pn = percentage by volume of gas n

Example: Find the Air equivalent flow for 20 slpm of a 20% Helium
and 80% Chlorine gas mixture.

Q

=Q

AIR

(orifice conversion factor)

gas

= 20 x 1.417
= 28.34 slpm air

2. If inlet and outlet pressures are given in gauge pressure (psig)
add14.7 to convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia

4-16

3. Determine Critical Pressure Drop
Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or

P outlet < P inlet

2

If these conditions exist, the pressure drop (Δp) should be calculated as
follows:

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Table 4-4 Model 5850i Orifice Sizing Nomograph

Section 4 Maintenance

Brooks® Model 5850i

4-17

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

4-18

Figure 4-4 Example Nomograph

If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.

Then Δp = 64.7 - 44.7 = 20 psi

Using the nomograph, locate the pressure drop (psi) on the vertical line
marked "Δp" (Point A).

4. Using the nomograph, locate the pressure drop (psi) on the vertical
line marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the
vertical line marked "Q

Nitrogen

" (Point B).

6. Draw a line connecting Dp and QNitrogen and extend it to the
baseline. Mark this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).

8. Draw a line connection Pin (Point D) and baseline (Point C) and then
extend this line to the vertical line marked Do (orifice diameter,
inches). (Point E).

9. This point on the line is the minimum orifice size for the given

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

4-7 Restrictor Sizing

Section 4 Maintenance

Brooks® Model 5850i

conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow. If the orifice selected
falls below .0013, choose .0013 size orifice.

For this example the .007 size orifice would be selected.

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow , however the
total flow through each restrictor is different. Different restrictors (micron
porosity and active area) have different pressure drops and produce
controllers with different full scale flow rates. For a discussion of the
interaction of the various parts of the controller, you are urged to review
Section 3-1 (Theory of Operation).

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop vs. flow characteristics will be altered and it must be cleaned
or replaced. It may also be necessary to replace the restrictor assembly
when the mass flow controller is to be calibrated to a new flow rate.

Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:

Appropriate size wrench for the removal of the inlet process connection
Restrictor removal tool

(contained in service tool kit P/N S-778-D-017-AAA)

Restrictor O-ring, refer to the spare parts Section 5, for the correct

part number .

Restrictors

The 5850 Series Mass Flow Controllers use two types of restrictor
assemblies depending upon full scale flowrate.

1. Anti-Clog Laminar Flow Element (ACLFE). This type of restrictor
assembly is used for air equivalent flow rates less than 3.4 slpm.

2. Sintered wire mesh for air equivalent flow rates above 3.5 slpm.
These restrictor assemblies are made from a cylinder of sintered
wire mesh and are easily cleaned if they become contaminated in
service.

Sizing

All 5850 Series Restrictor Assemblies are factory adjusted to provide a 115
mm water column pressure drop for a specific flow rate. This corresponds
to the desired full scale flow rate. A list of restrictor assemblies used in the
5850 Series Mass Flow Controllers is shown in Table 4-5.

4-19

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Table 4-5 Model 5850i Standard Restrictors

4-20

Example:
The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm
Sensor conversion factor is 0.68 from Table 4-3.
Air equivalent flow = 200/0.68 = 294.1 sccm air .

In the example above, a size P restrictor would be selected.

NOTE: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

If a mixture of two or more gases are being used, the restrictor selection
must be based on the air equivalent flow rate of the mixture.

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (CI2) by volume.
The desired full scale flow rate of the mixture is 20 slpm.

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section 4 Maintenance

Brooks® Model 5850i

Sensor conversion factor for the mixture is:

Air equivalent flow = 20/.903 = 22.15 slpm air.

In this example, a size 4 wire mesh assembly would be selected.
Materials: BMT = 316 S tainless Steel (ACLFE only)

BMA = Sintered 316 Stainless Steel (wire mesh only)

NOTE: For flow rates less than 8 sccm use the low flow plug,
P/N 618K019BMT in place of a restrictor assembly and install a low flow

filler ring P/N 724Z363BMT in the valve cavity after the orifice is installed.

4-21

Section 4 Maintenance

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

4-22

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

5-1 General

Section 5 Parts List

Brooks® Model 5850i

When ordering parts, please specify:

Brooks Serial Number
Model Number
Part Description
Part Number
Quantity

(Refer to Figure 5-1 and Tables 5-1 and 5-2).

Figure 5-1 Model 5850i Parts Drawing

5-1

Section 5 Parts List

Installation and Operation Manual

Part Number: 541B108AAG

Brooks® Model 5850i

Table 5-1 Model 5850i Replacement Parts List

Item Qty. Description Part Number

No.

1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169AH%
5 1 O-ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem: Normally Closed Valve 949Z194QOT

Valve Stem: Normally Open Valve 949Z215BMT
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-ring 375B016***

7 1 Valve Plunger Assy: Normally Closed Valve S622Z165AAA

Normally Open Valve S622Z203QOT
31 1 Insert Sleeve Normally Open Valve 456Z071QOT
32 1 Plunger Extension Normally Open Valve 622Z200BMT

8 1 Lower Guide Spring,unit with NO ORIFICE 820Z109DR%

Normally Closed Valve .001-.014 orifice 820Z109DR%

Normally Closed Valve .020-.120 orifice 820Z110DR%

Normally Open Valve all orifice sizes 820Z110DR%

9 AR Small Valve Spacer, 0.005" Thick 810A362BMA

9 AR Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
10 AR Large Valve Spacer, 0.010" Thick 810A361BMA
33 1 Preload Spacer, Spring Normally Open valve 810A388BMT

Valve Seat with Viton Insert S715Z051AAG

11 1 Valve Seat with Buna Insert S715Z050AAG

Valve seat w/Kalrez insert (<or=200 psig) S715Z297AAG
Valve Seat with Kalrez Insert (>200 psig) S715Z163AAA
Valve Seat Solid 316 Stainless Steel 715Z181BNT

Stainless

ID 0.0013" 577Z375BMT

ID 0.002" 577Z376BMT
ID 0.003" 577Z377BMT
ID 0.004" 577Z378BMT
ID 0.007" 577Z381BMT
ID 0.010" 577Z383BMT

12 1 Orifice ID 0.014" 577Z385BMT

ID 0.020" 577Z387BMT
ID 0.032" 577Z391BMT
ID 0.048" 577Z393BMT
ID 0.062" 577Z395BMT

ID 0.078" 577Z397BMT
(Refer to Section 4-6 ID 0.093" 577Z398BMT
for sizing) ID 0.116" 577Z399BMT

ID 0.120" 577Z400BMT

13 1 O-ring, Orifice, Size 008 375B008***
14 1 Controller Body 092Z768BI%
15 1 PC Board Assembly (D-Connector) S097Y249AAA
16 1 Sensor Assembly S774Z508AAA
17 2 O-ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 753B269AWA
19 2 Lock Washer, Sensor 962D006AWA
20 5 Screw, Sensor-PC Board-Cover 753L056AWZ
21 1 Restrictor Assembly and Components

(Refer to Section 4-7 for sizing)

22 1 O-ring, Restrictor, Size 109 375B109***
23 1 Electronics Cover Can (D-Connector) 219Z432EA%

X-TMF-5850i-MFC-eng

December , 2008

***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=NS Not Shown

5-2

Installation and Operation Manual

Section 5 Parts List

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Table 5-1 Model 5850i Replacement Parts List (continued)

Item

No. Quantity Description Part Number

NS 2 Fitting, 1/4" Compression, Swagelok 320B136BMA

Fitting, 1/4" Male VCR, Cajon 315Z036BMA
Fitting, 1/4" Male VCO, Cajon 315Z035BMA
Fitting, 3/8" Compression 320B150BMA
Fitting, 3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA
Fitting, 3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA

27 2 O-Ring, Fitting, Size 906 375B906***
NS 2 O-Ring, VCO Gland, Size 010 375B010***
NS 1 O-Ring, End Block, Size 029 375B029***
NS 1 Interconnecting Cables Length D-Connector

D-Connector on one end with no 5 Feet S124Z361AAA
termination on the other end 10 Feet S124Z362AAA

25 Feet S124Z363AAA
50 Feet S124Z435AAA

NS 2 8-32 Mounting Screw Customer Supplied

28 1 End Block with Integral Inlet Screen S079Z200AAA

29 4 Screw, End Block 751Z105AAO

*** QTA = Viton, SUA = Buna, TTA = Kalrez
AR As required, NS Not Shown

Brooks® Model 5850i

Table 5-2 Tool and Spare Part Kits for 5850 Series

5850/5851 Series Service Tool Kit 5851 Header Removal Tool
P/N S778D017AAA P/N S817Z036AAA

Permits the complete disassembly of the 5850i for servicing 0550/5851 Orifice Removal Tool

Contains:

1 — O-Ring Removal Tool 5850/5851 Series Calibration Cover - "D" Connector
1 — Potentiometer Adjustment Tool P/N 909Z017EAD
1 — Ball Point Allen Wrench
1 — Phillips Screw Driver
1 — Nut Driver for Orifice
1 — Restrictor Removal Tool
1 — Common Screw Driver

5850/5851 Series Break Out Board Assembly( Not for S Series! ) 5850/5851 Series Valve Shim Kit
P/N S273Z668AAA P/N S810A372BMA

Installs directly between mass flow controller and interconnecting Contains:
cable. Allows convenient access to all signals for easy trouble- 1 — .010" Large Spacer
shooting of system. 2 — .005" Large Spacers

Contains: 2 — .005" Small Spacers

1 — Break Out PC Board
1 — 5 Foot Extension Cable
1 — Terminal PC Board

*** QTA = Viton, SUA = Buna, TTA = Kalrez

P/N S908Z049AAA

1 — .010" Small Spacer

NOTE: Additional publication available:

T-086 Mass Flow Controller Contamination Control

5-3

Section 5 Parts List

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

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5-4

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section A CE Certifiction

Brooks® Model 5850i

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).

Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten

være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%

dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.

Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von

360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-

Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A CE Certifiction

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used

providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE

certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).

Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un

apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,

se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente en

los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un

apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Section A CE Certifiction

Brooks® Model 5850i

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la

Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal

d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à

chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à la

réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Greek

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

1996

A-3

Section A CE Certifiction

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con successo
le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).

E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio
CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare
propri cavi, questi devono possedere una schermatura del 100%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico
e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%

per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de

wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd

met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen

Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.

A-4

Hoogachtend,

Installation and Operation Manual

Section A CE Certifiction

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December , 2008

Brooks® Model 5850i

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for
jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°,
tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjer-

ming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética
(directiva CEM 89/336/EEC).

Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-se buchas metálicas de cabo

para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a 100% nos termos da Certificação

CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A CE Certifiction

Brooks® Model 5850i

Installation and Operation Manual

X-TMF-5850i-MFC-eng

Part Number: 541B108AAG

December , 2008

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi
hankittava 100%:sti suojattu kaapeli.

“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä
kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne olisivat

CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk
kompabilitet (EMC direktiv 89/336/EEC).

Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.

“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med CE-

certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008

Brooks® Model 5850i

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Installation and Operation Manual

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Part Number: 541B108AAG

Brooks® Model 5850i

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer ’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

December , 2008

ST ART-UP SERVICE AND IN-SITU CALIBRA TION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290

Asia

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks.......................................................... Brooks Instrument, LLC

Freon TF .......................................... E. I. DuPont deNemours & Co.

Kalrez..........................................................DuPont Dow Elastomers

VCO ......................................................................... Cajon Company

VCR ......................................................................... Cajon Company

Viton.............................................. DuPont Performance Elastomers

Vol-U-Meter .................................................Brooks Instrument, LLC

1-888-554-FLOW

+011-81-3-5633-7100