Brooks Instrument 5850E User Manual

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Model 5850E
Mass Flow Controller

Brooks® Model 5850E

Model 5850E

Mass Flow Controller

with Card Edge Connector

Model 5850E

Mass Flow Controller

with D-Connector

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

Brooks® Model 5850E

September, 2009

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5850E

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 1
Introduction

Section 2
Installation

Contents

Brooks® Model 5850E

Paragraph
Number Page

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-3

2-1 Receipt of Equipment........................................................ 2-1

2-2 Recommended S torage Practice ...................................... 2-1

2-3 Return Shipment ............................................................... 2-2

2-4 Gas Connections............................................................... 2-2

2-5 Installation ......................................................................... 2-3

2-6 In-Line Filter ...................................................................... 2-6

2-7 Soft S tart............................................................................ 2-7

2-8 Remote Setpoint (Command) Input................................... 2-7

2-9 V alve Override................................................................... 2-8

2-10 Remote Transducer Input.................................................. 2-8

2-1 1 Valve Test Point/Purge ...................................................... 2-8

2-12 Valve Off............................................................................ 2-9

2-13 Five Volt Reference Output/Valve Drive Configuration...... 2-9

Section 3
Operation

Section 4
Maintenance &
Troubleshooting

3-1 Theory of Operation .......................................................... 3-1

3-2 Operating Procedure......................................................... 3-3

3-3 Zero Adjustment ................................................................ 3-3

3-4 Calibration Procedure........................................................ 3-6

3-5 Response ......................................................................... 3-10

4-1 General ............................................................................. 4-1

4-2 Troubleshooting................................................................. 4-2

4-3 Sensor Tube...................................................................... 4-6

4-4 Disassembly and Assembly............................................... 4-6

4-5 Gas Conversion Factors .................................................. 4-13

4-6 Orifice Sizing .................................................................... 4-17

4-7 Restrictor Sizing ............................................................... 4-21

i

Contents

Brooks® Model 5850E

Section 5
Parts List

Section A
CE Certification

Figures

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

5-1 General ............................................................................. 5-1

CE Certification of Mass Flow Equipment ................................... A-1

Warranty, Sales/Service Contact Information ......................Back Cover

Figure
Number Page

1-1 Command Steps, Sof t Start Disabled ................................ 1-2

1-2 0-100% Command S tep, Soft S t art Enabled ..................... 1-2

2-1 Model 5850E Dimensions ................................................. 2-3

2-2 Model 5850E Card Edge Connector Comparison Guide... 2-4

2-3 Model 5850E Card Edge Connector Hookup Diagram...... 2-5

2-4 D-T ype Connector Pin Arrangement ................................. 2-5

3-1 Flow Sensor Operational Diagram .................................... 3-2

3-2 Flow Control System Block Diagram................................. 3-3

3-3 Card Edge PC Board Jumper Location & Function ........... 3-4

3-4 D-Connector PC Board Jumper Location & Function........ 3-5

3-5 Model 5850E Calibration Connections .............................. 3-6

3-6 Adjustment Potentiometer Location .................................. 3-9

3-7 Fast Response Adjustment .............................................. 3-11

4-1 Torque Sequence for the V alve Ret ainer Plate.................. 4-7

4-2a V alve Adjusting Sp acer Locations (N.C.).......................... 4-11

4-2b V alve Adjusting Spacer Locations (N.O.).......................... 4-12

4-3 Voltmeter Connections for Valve Adjustment ................... 4-14

4-4 Example Nomograph ....................................................... 4-18

5-1 Model 5850E Parts Drawing.............................................. 5-1

ii

Tables

Table
Number Page

2-1 Recommended Filter Size ................................................. 2-6

4-1 Bench Troubleshooting...................................................... 4-4

4-2 Sensor Troubleshooting .................................................... 4-5

4-3 Conversion Factors (Nitrogen Base) ................................ 4-15

4-4 Model 5850E Orifice Sizing Nomograph .......................... 4-19

4-5 Model 5850E Standard Restrictors................................... 4-23

5-1 Model 5850E Replacement Parts List ............................... 5-2

5-2 Tool and Sp are Part Kits for 5850E Series ........................ 5-4

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

1-1 Purpose

1-2 Description

Section 1 Introduction

Brooks® Model 5850E

The Brooks® Model 5850E Flow Controller is a mass flow measurement
device designed for accurately measuring and rapidly controlling flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 5850E
Mass Flow Controller. This manual is organized into five sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance & T roubleshooting

Section 5 Replacement Parts

Back Cover Warranty , Local Sales/Service Cont act Information

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5850E.

The Brooks Model 5850E Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850E consists of
three basic units: a flow sensor , a control valve and an integral electronic
control system. This combination produces a stable gas flow , which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:

Fast Response Control permits rapid gas settling times with little or no

over/undershoot. (Refer to Figure 1-1.)

Soft Start provides a flow ramping function which slows down the

introduction of the process gas for those processes which cannot

tolerate rapid flow transition. (Refer to Section 2-6 and Figure 1-2.)

Valve Override permits the user to fully open and close the control valve

independent of the command setting. (Refer to Section 2-8.)

Setpoint (Command) permits the user to program the mass flow controller

with an external 0-5 Vdc command potentiometer.

(Refer to Section 2-7.)

Low Command Valve Inhibit (Auto Shut-of f) prevents the valve from

opening whenever the set-point is less than 2% of full scale.

Removable Cleanable Sensor permits the user to clean or replace the

sensor. (Refer to Section 4-4.)

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to +6.8 Vdc and -0.7 Vdc.

1-1

Section 1 Introduction

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 1-1 Command Steps, Soft Start Disabled

Figure 1-2 0 - 100% Command Step, Soft Start Enabled.

1-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

1-3 Specifications

Section 1 Introduction

Brooks® Model 5850E

Valve Off accessed via terminal J on the Card Edge or Pin 4 on the D-

Connector version. This feature allows the user to close the control

valve independently of the command signal by supplying a TTL level

low signal to the proper terminal. This function is useful when

performing repetitive flow operations or as a safety shutdown.

(Refer to Section 2-1 1.)

Valve Test Point/Purge accessed via terminal D on the Card Edge or Pin

7 on the D-Connector version. This feature allows the user to monitor

the control valve voltage during operation. Shorting the valve test point

pin to power supply common will cause the valve to open regardless of

command input voltage. (Refer to Section 2-10.)

Remote Transducer Input accessed via Terminal 5 on the Card Edge or

Pin 15 on the D-connector version. This feature allows the use of the

integral control electronics and valve to regulate flow in response to the

signal from an external 0-5 Vdc signal. The mass flow signal from the

Model 5850E is still available for process monitoring.

(Refer to Section 2-9.)

Standard Ranges:

3 sccm to 30 slpm* (Nitrogen equivalent)

*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C
and 101.3 kPa (760 T orr).

Accuracy:

±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.

Repeatability:

0.25% of rate

Response Time:

Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.

Power Requirements (NC Valve):

+15 Vdc ±5%, 35 mA

-15 Vdc ±5%, 180 mA

3.5 watts power consumption

1-3

Section 1 Introduction

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Power Requirements (NO Valve):

+15 Vdc ±5%, 215 mA

-15 Vdc ±5%, 180 mA
1 1.85 watt s power consumption

Ambient T emperature Limit s:

Operating: 40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212°F (-25°C to 100°C)

Working Pressure:

1500 psi (10.342 mPa) maximum

Differential Pressure:

5 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.

Output Signal:

0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.

5 V olt Reference Output:

5 Volt s ±0.2%. Maximum load 1 k ohms.

T emperature Sensitivity:

Zero: less than ±0.075% F.S. per degree C.
Sp an: less than ±1.0% F.S. shift over 10-50°C range

Power Supply Sensitivity:

±0.09% full scale per % power supply voltage variation

Mounting Attitude Sensitivity:

±0.5% maximum full scale deviation after re-zeroing

Command Input:

0-5 Vdc. Input resistance 200 k ohm

Leak Integrity:

-9

1 x 10

Atm. cc/sec Helium

Control Range:

50 to 1

Mechanical Connection:

Compatible with most popular mass flow controllers. Refer to Figure 2-1.

1-4

Electrical Connection:

Card edge, 20 terminals, gold over low stress nickel plated copper . 15-pin
D-Connector (DA-15P)

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5850E

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should immediately be notified regarding his
liability. A report should be submitted to the Product Service Department,
Brooks Instrument, 407 West Vine Street, Hatfield, Pennsylvania 19440.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

2-2 Recommended Storage Practice

Remove the envelope containing the packing list. Outside of your clean
area, carefully remove the equipment from the packing case. Make sure
spare parts are not discarded with the p acking material. Inspect for
damaged or missing parts.

If intermediate or long-term storage is required for equipment, as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area, with the following conditions.

1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum
and 7°C (45°F) minimum.

2. Relative humidity 45% nominal, 60% maximum and 25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify the condition of the equipment is "as received". If the
equipment has been in storage for an excess of ten (10) months or
in conditions in excess of those recommended, all pressure bound­ary seals should be replaced and the device subjected to a pneu­matic pressure test in accordance with applicable vessel codes.

2-1

Section 2 Installation

Brooks® Model 5850E

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5850E are
1/4" compression fittings for flow rates up to 10 slpm, and 3/8"
compression fittings for higher flow rates.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figs. 2-1 through 2-4)

2-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 2 Installation

Brooks® Model 5850E

Figure 2-1 Model 5850E Dimensions

Recommended installation procedures:

a. The Model 5850E should be located in a clean, dry atmosphere rela-

tively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

d. The Model 5850E Mass Flow Controller can be installed in any position.

However, mounting in orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.

2-3

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Terminal

Designation

Unit Tylan Tylan Brooks Card Brooks Tylan Tylan Unit

UFC-1000 FC-280 FC-260 5850E Edge 5850E FC-260 FC-280 UFC-1000

Chassis Chassis Chassis Chassis Command Command Command Command

Ground Ground Ground Ground 1 A Input Input Input Input

Supply Signal Signal Signal 2 B Command Command Command Command

Common Common Common Common Common Common Common Common

0-5 Volt 0-5 Volt 0-5 Volt 0-5 Volt Supply Supply

Signal Signal Signal Signal 3 C Voltage Voltage Return Common

Output Output Output Output Common Common

+ 15 Vdc + 15 Vdc + 15 Vdc + 15 Vdc 4 D Valve Test Valve Test Valve Test

Supply Supply Supply Supply Point/Purge Point Not Used Point/Purge

Not Used Not Used Not Used Transducer 5 E Not Used Not Used Test Not Used

Not Used Test Test Not Used 6 F Supply Supply Supply Supply

Slot Slot Slot Slot 7 H* Slot Slot Slot Slot (G)

Not Used Not Used Not Used Not Used 8 J* Not Used Not Used Not Used Not Used (H)

Not Used Not Used Not Used Valve Override 9 K* Not Used Not Used Valve Not Used (I)

Common Not Used Not Used Valve Return 10 L* Valve Not Used Not Used Valve Off (J)

* Unit designates Pins H, J, K, & L as G, H, I, & J
** Jumper Selectable
*** Factory Activated Option

0-5 Volt 0-5 Volt 0-5 Volt Signal &

Remote Valve

Input*** Point

Zener Zener - 15 Vdc - 15 Vdc - 15 Vdc - 15 Vdc

Open/Close

+ 5V Ref. *** or

or Not Used Off Off

Figure 2-2 Model 5850E Card Edge Connector Comparison Guide

2-4

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 2 Installation

Brooks® Model 5850E

Figure 2-3 Model 5850E Card Edge Connector Hookup Diagram

PIN NO. FUNCTION COLOR CODE

1 Command Common (Potentiometer Pin "CCW") Black
2 0-5 Volt Signal Output White

3 Not Used Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point Wht/Blk
8 Command Input (Potentiometer Pin "S") Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Potentiometer Pin "CW") Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input* Blu/Wht

*Jumper Selectable

Figure 2-4. D-Connector Pin Arrangement

Notes:

1. Cable shield tied to chassis ground
in meter connector. Make no
connection on customer end.

2. All power leads must be connected
to power supply.

2-5

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

e. When installing controllers with full scale flow rates of 10 slpm or

greater , be aware that sharp, abrupt angles in the system piping directly
upstream of the controller may cause a small shift in accuracy. If
possible, have at least ten pipe diameters of straight tubing upstream of
the Model 5850E Mass Flow Controller .

Note: The control valve in the Model 5850E provides precision control
and is not designed for positive shut-off. If positive shut-of f is required,
it is recommended that a separate shut-off valve be inst alled in-line.

2-6 In-Line Filter

Table 2-1 Recommended Filter Size.

2-6

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.

Electrical Interfacing

To insure proper operation, the Model 5850E must be connected per
Figures 2-3 and 2-4, and configured according to Sections 2-6 to 2-13.

As a minimum the following connections must be made for new
installations:

Chassis Ground
0-5 V olt Signal Common
0-5 V olt Signal Output
+15 Vdc Supply

-15 Vdc Supply
Command Input
Command Common
Supply V oltage Common
Valve Return (Refer to Section 2-12 for jumper configuration)

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-7 Soft Start

Section 2 Installation

Brooks® Model 5850E

For installations which replace Unit Instruments UFC-1000's, (Card Edge
version) Pin 10 is frequently grounded. In these situations the 5 Volt
reference output must be disabled. Refer to Section 2-12.

For installations which will be connected to Brooks secondary electronics,
the Card Edge version must have the 5 Volt reference enabled on Pin 10
and the D-Connector version should be configured for external valve
return. Refer to Section 2-12. If the Model 5850E was shipped as a
system with Brooks secondary electronics then the electronics will already
be configured properly .

Note: To obtain access to the jumpers for the following options the
electronics cover can must be removed. Remove the can by removing the
three screws and the valve connector. The can must be replaced before
returning the unit to service.

2-8 Remote Setpoint (Command) Input

2-9 V alve Override

Refer to Figures 3-3 and 3-4. To enable soft start, place the red jumper on
the controller printed circuit board at J2 in the (ss) position.

To disable soft start, place the red jumper on the controller printed circuit
board at J2 in the (n) position.

If the mass flow controller is to be commanded by an external 0-5 Vdc
signal, the command potentiometer is not used.

The command input hookup is as follows:

a. Card Edge Connector

Connect the external command voltage to Terminal A and external
command return to Terminal B. Refer to Figures 2-2 and 2-3.

b. D-Connector

Connect the external command voltage to Terminal 8 and external
command return to Terminal 1. Refer to Figure 2-4.

The valve override function allows full opening and closing of the valve
independent of the command setting. The unique command reset feature
prevents flow overshoot when the controller goes from valve override
closed to normal control. The valve override for the mass flow controller is
as follows:

a. To open the valve, apply +15 Vdc to the valve override terminal.
b. To close the valve, apply -15 Vdc to the valve override terminal.

2-7

Section 2 Installation

Brooks® Model 5850E

2-10 Remote Transducer Input

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

c. Isolating the valve override terminal returns the controller to normal

operation.

1. Card Edge
The valve override function can be accessed from Terminal 9. Refer
to Figure 2-3.
Note: For normal operation, Terminal 9 must be left open (floating).

2. D-Connector
The valve override function is accessed from Terminal 12. Refer to
Figure 2-4.

Refer to Figures 3-3 and 3-4. To allow the Model 5850E control circuitry
and valve to be used with a 0-5 Vdc external transducer signal, a green
jumper is moved to the lower two pins at J7. With this feature enabled, a 0­5 Vdc signal may be applied to the external transducer input terminal. The
Model 5850E controller circuitry will modulate the valve position to increase
or decrease the flow rate to maintain the transducer output at the desired
set-point. The control circuitry is reverse acting, e.g., for an increase in
transducer output, the flow will correspondingly be decreased.

2-11 Valve T est Point/Purge

2-12 Valve Off

Refer to Figures 2-2, 2-3 and 2-4. The valve voltage can be monitored on
Pin D of the Card Edge version and Pin 7 of the D-Connector version. This
voltage relative to circuit common is proportional to the valve voltage per
the following equation:

Valve V oltage= (1.53 x TP3) + 20.7
( Note: The valve voltage calculation is an approximate value.)

Shorting the valve test point pin to power supply common will cause the
valve to open regardless of command input voltage.

Refer to Figures 2-2, 2-3 and 2-4. The control valve can be forced closed
regardless of command input signal by applying a TTL level low (< .4 Vdc)
to Terminal L of the Card Edge version or Pin 4 of the D-Connector
version. A TTL level high or floating at this pin has no effect.

2-8

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-13 Five-V olt Reference Output/Valve Drive Configuration

a. Card Edge

Refer to Figures 2-3 and 3-3. Terminal 10 can be jumper selected as 5 Volt
reference output, external valve return or “not used.” The 5 V olt reference
output is required if a potentiometer is to be used to generate the
command signal. To enable the 5 Volt reference output on Terminal 10,
place the yellow jumper at J1 in the D-E position. To disable the 5 V olt
reference output, place the yellow jumper at J1 in the E-F position.

To minimize the effect of resistance in the connection wiring, a separate
“external valve return” can be accessed on Pin 10. To enable this feature,
place the black jumper at J1 in the B-D position and connect Terminal 10 to
power supply common. If the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: If the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

Section 2 Installation

Brooks® Model 5850E

b. D-Connector

Refer to Figures 2-4 and 3-4. The 5 V olt reference is always available on
Pin 1 1.

To minimize the effect of resistance in the connection wiring, a separate
“external valve return” can be accessed on Pin 3. To enable this feature,
place the black jumper at J1 in the B-D position and connect Pin 3 to
power supply common. If the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: If the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

2-9

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

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2-10

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Part Number: 541B102AHG
September , 2009

3-1 Theory of Operation

Section 3 Operation

Brooks® Model 5850E

The thermal mass flow sensing technique used in the Model 5850E works
as follows:

A precision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. Refer to Figure
3-1. At zero, or no flow conditions, the heat reaching each temperature
sensor is equal. The temperatures T1 and T2, therefore, are equal. When
gas flows through the tube, the upstream sensor is cooled and the
downstream sensor is heated which produces a temperature difference.
The temperature difference T2-T1 is directly proportional to the gas mass
flow. The equation is:

DT = A * P * Cp * m
Where:
DT = T emperature difference T2 - T1 (°K)
Cp = Specific heat of the gas at constant pressure (kJ/kg-°K)
P = Heater power (kJ/s)
m = Mass flow (kg/s)
A = Constant of proportionality (S2-°K2/kJ2)

A bridge circuit interprets the temperature dif ference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.

The flow restrictor shown in Figure 3-1 performs a ranging function similar
to a shunt resistor in an electrical ammeter . The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter . Dif ferent
restrictors have different pressure drops and produce controllers with
different full scale flow rates. The sp an adjustment, in the electronics,
affects the fine adjustment of the controller’s full scale flow.

In addition to the mass flow sensor, the Model 5850E Mass Flow Controller
has an integral control valve and control circuit as shown in Figure 3-2. The
control circuit senses any difference between the flow sensor signal and
adjusts the current in the modulating solenoid valve to increase or
decrease the flow . The Model 5850E has the following features
incorporated in the integral control circuit:

Fast Response

Adjusted by the anticipate potentiometer , this circuit, when properly
adjusted, allows the high frequency information contained in the sensor
signal to be amplified. This provides a faster responding flow signal for
remote indication and use by the control valve.

Soft Start

This is enabled by moving a jumper on the printed circuit board. This circuit
provides a slow injection of the gas as a protection to the process,
particularly those using a volatile or reactive gas. Full gas flow is achieved
in approximately 15 seconds. Refer to Section 2-6.

3-1

Section 3 Operation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 3-1 Flow Sensor Operational Diagram

3-2

Precision 5 V olt Reference

This allows direct connection of a command potentiometer to provide a 0-5
V olt command signal to the controller. A precision ten-turn 2K ohm
potentiometer, with an integral turn counter, is recommended as this will
permit repeatable adjustments of command to one part in 1,000. Refer to
Section 2-13 for activation.

V alve Override

Allows, independent of the command setting, full opening and closing of
the control valve. Refer to Section 2-8.

Valve Off

Accessed via Terminal L on the Card Edge or Pin 4 on the D-Connector
version, this feature allows the user to close, independently of the
command signal, the control valve by supplying a TTL level low signal to
the proper terminal. This function is useful when performing repetitive flow
operations or as a safety shutdown. Refer to Section 2-1 1.

V alve Test Point/Purge

Accessed via terminal D on the Card Edge or Pin 7 on the D-Connector
version of the Model 5850E only . This feature allows the user to monitor

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AHG
September , 2009

Section 3 Operation

Brooks® Model 5850E

Figure 3-2 Flow Control System Block Diagram

the control valve voltage during operation, also grounding this terminal will
cause the control valve to open independent of the command signal. Refer
to Section 2-1 1.

Remote Transducer Input

Accessed via terminal 5 on the Card Edge or Pin 15 on the D-Connector
version. This feature allows the use of the integral control electronics and
valve with the signal from an external 0-5 Vdc signal. The mass flow signal
from the Model 5850E is still available for process monitoring. Refer to
Section 2-9.

3-2 Operating Procedure

a. Apply power to the controller and allow approximately 45 minutes for
b. Turn on the gas supply .

c. Command 0% flow and observe the controllers output signal. If the

d. Set the command for the desired flow rate to assume normal operation.

3-3 Zero Adjustment

the instrument to warm-up and stabilize its temperature.

output is not 0 mVdc (±10 mVdc), check for leaks and if none are
found, refer to the re-zeroing procedure in Section 3-3.

Each Model 5850E is factory adjusted to provide a zero ±10 mVdc signal
at zero flow. The adjustment is made in our calibration laboratory which is
temperature controlled to 21.1°C (70°F ±2°F). Af ter initial installation and
warm-up in the gas system, the zero flow indication may be other than the

3-3

Section 3 Operation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 3-3 Card Edge PC Board Jumper Location and Function

3-4

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AHG
September , 2009

Section 3 Operation

Brooks® Model 5850E

Figure 3-4 D-Connector PC Board Jumper Location and Function

3-5

Section 3 Operation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

3-4 Calibration Procedure

Figure 3-5 Model 5850E Calibration Connections

factory setting. This is primarily caused by changes in temperature
between the calibration laboratory and the final installation. The zero flow
reading can also be affected, to a small degree, by changes in line
pressure and mounting attitude.

To check zero, always mount the controller in its final configuration and
allow a minimum of twenty minutes for the temperature of the controller
and its environment to stabilize. Using a suitable voltmeter, check the
controller output signal. If it differs from the factory setting, adjust it by
removing the lower pot hole plug which is located closest to the controller
body . Adjust the zero potentiometer (refer to Figure 3-6) until the desired
output signal is obtained.

Note 1: If the valve has been disassembled and any of the following parts
have been replaced, the control valve adjusting procedure in Section 4-4c
must be performed before the Model 5850E is calibrated.

orifice
valve stem
plunger
lower guide spring
valve seat

3-6

Note 2: Calibration of the Model 5850E mass flow controller requires the
use of a digital voltmeter (DVM) and a precision flow standard calibrator
such as the Brooks Instrument's Vol-U-Meter®. It is recommended that the
calibration be performed only by trained and qualified service personnel.

Note 3: If the mass flow controller is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor. Size the

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AHG
September , 2009

Section 3 Operation

Brooks® Model 5850E

orifice for actual operating conditions.

Note 4: If Brooks’ secondary electronics are being used as a power supply
during the calibration, the 5 Volt reference must be enabled on the Card
Edge version for proper operation (see Section 2-13). Remember to
deactivate the 5 V olt reference before installing the calibrated mass flow
controller in the system where Terminal 10 is grounded.

a. With the controller installed in an unpressurized gas line, apply power

and allow approximately 45 minutes for warm-up. During the warm-up,
adjustment and calibration check procedures do not allow the control
valve to open when gas flow is not present. This situation is not a
normal operating mode and will cause abnormal heat-up of the control
valve. With this abnormally warm valve, the meter will be difficult to
calibrate. This situation can be prevented by switching the valve
override “closed” when there is no gas flow or by setting the command
to less than one percent (1%). Also, avoid unnecessary periods with the
valve override “open.”

b. Adjust the anticipate potentiometer with 20 clockwise full turns. Next,

adjust the anticipate potentiometer with 10 counterclockwise turns to
center the potentiometer. This will provide a rough adjustment of this
circuit and make the flow more stable for calibration.

c. Connect the DVM positive lead to the 0-5 Volt signal output (Terminal 3

Card Edge, Pin 2 D-Connector) and the negative lead to signal com­mon (TP4). Adjust the zero potentiometer for an output of zero mV ±2
mV.

d. Apply pressure to the system and insure that the zero signal repeats

within 2 mV of the voltage set in S tep “c” above. If the zero does not
repeat, check for leakage.
Note: Controllers supplied with all metal or Teflon valve seats do not
provide tight shut-off. A 0-8% leak-through is typical. For metal or Teflon
seat controllers, close a downstream shut-off valve and observe the
zero signal.

e. Set the command potentiometer (connected to terminals A, B and 10 of

the Card Edge connector and Terminals 1, 8 and 11 of the D-Connec­tor) for 100% of flow (5.000V). Connect the DVM positive lead to TP2
(linearity voltage) and the negative lead to TP4 (signal common). Adjust
the linearity potentiometer for an output of 0.0V (zero volts).

f. Connect the DVM positive lead to TP1 (-100x sensor voltage) and the

negative lead to TP4 (circuit common). The command potentiometer
should still be set at 100% flow (5.000V). Measure the flow rate using
suitable volumetric calibration equipment. To adjust the controller to the
proper full scale flow, calculate a new TP1 volt age using the following
equation:

3-7

Section 3 Operation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Adjust the span potentiometer until the voltage at TP1 is equal to the
value calculated above. Recheck the flow rate after the flow is stable (at
least two minutes). Repeat this check and adjustment procedure until
the measured flow rate is within 1% of the desired flow rate.
Note: The voltage at TP1 is -100 times the output volt age (+100 times
for Current I/O Version) of the sensor. This voltage can range from -1.2
to -12 V olt s, however , it is recommended that this voltage stay between

-2.0 and -9.0 V olts for proper operation. If the recommended volt ag e
range exceeds the desired range, accuracy and/or signal stability may
not be achieved. If one of the limits is reached, check the restrictor and
orifice sizing procedures. Refer to Sections 4-6 and 4-7 respectively.

g. Set the command potentiometer for zero percent of flow. Connect the

DVM positive lead to flow signal output (Terminal 3 Card Edge, Pin 2 D­Connector) and the negative lead to TP4. Readjust the zero potentiom­eter for an output of zero mV ±2 mV as necessary.

h. Set the command potentiometer for 50% of flow (2.500V) and measure

the flow rate. Calculate the error as a percentage of full scale.

Example:

What is the percent of full scale error when full scale is equal to 100

sccm?

Measured flow rate = 48.5 sccm, Desired flow rate = 50.0 sccm

i. Calculate the TP2 correction voltage:
(error recorded in Step “h”) x 0.450 Volts

Example:
Error = -1.5%
TP2 correction voltage = -1.5 x 0.450 = -0.675 Volts
New TP2 volt age = zero volts + (-0.675) = -0.675 Volts

j. Set the command potentiometer for 100% flow (5.000V). Connect the

DVM positive lead to TP2 and the negative lead to TP4.

k. Adjust the linearity potentiometer for an output equal to the new calcu-

lated TP2 voltage.

l. Repeat Steps “f, g and h.”

1. If the error recorded in Step “h” is less than 0.5%, then the calibra­tion procedure is complete.

2. If the error is greater than 0.5%, set the command potentiometer for
100% (5.000V). Connect the DVM positive lead to TP2 (linearity
voltage) and the negative lead to TP4 (circuit common). Calculate a
new TP2 voltage as follows:

3-8

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AHG
September , 2009

Section 3 Operation

Brooks® Model 5850E

Figure 3-6 Adjustment Potentiometer Location

Example:
Controller error = 0.7%
Measured TP2 voltage = -0.567 V olts
TP2 correction = 0.7 x 0.450 = 0.315 Volt s
New TP2 correction = 0.315 + (-0.567) = -0.252 Volt s

Adjust the linearity potentiometer for an output equal to the new TP2
voltage and then repeat S tep s “f,” “g” and “h.”

Note: The voltage at TP2 can range from -10 to +3 Volts. It is recom­mended, however, that this volt age stay between -2.5 and +2.5 V olt s for
proper operation. If the recommended voltage range is exceeded, the
desired accuracy and/or signal stability may not be achieved. If one of
the limits is reached, check the restrictor sizing (refer to Section 4-7).

3-9

Section 3 Operation

Brooks® Model 5850E

3-5 Response

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Fast Response Adjustment

Two methods of adjusting the step response of the Model 5850E mass
flow controllers can be used. No. 1 describes a method that will get the
step response close to optimum quickly and without any flow measuring
equipment. This method should be used when the response time of the
flow controller is not critical to overall system performance. No. 2 describes
a method that will allow adjustment of the Model 5850E mass flow
controller to optimum step response. Adjustment of the fast response
circuit will not affect the accuracy of the flow controller as adjusted in
Section 3-4.

1. Fast response adjustment (3 seconds response specification not
guaranteed)
Note: This procedure requires an oscilloscope, chart recorder or a DVM
with a sample speed of three samples per second or greater to monitor
the rate of change of the output signal.
a. Set the command potentiometer for 100% of flow (5.000V) and wait

about 45 seconds for the flow output signal to stabilize.

b. S tep the command signal to 0% or activate valve override closed to

stop the flow. Observe the flow signal output as it decays.

c. The behavior of the flow signal during this transition between 100%

and zero percent flow indicates the adjustment required of the
anticipate potentiometer . Refer to Figure 3-7.

1. If the flow signal decays to -.05 to -.5 Volt, then rises to zero
V olts, the anticipate potentiometer is properly adjusted.

2. If the flow signal decays rapidly and goes below -.5 Volt before
rising to zero V olt, the anticip ate potentiometer must be adjusted
clockwise and S teps “a” and “b” repeated.

3. If the flow signal decays slowly and does not go below -.5 Volt,
the anticipate potentiometer must be adjusted counterclockwise
and S teps “a” and “b” repeated.

3-10

Fast response adjustment (3 second response specification
guaranteed)

Adjustment of the anticipate potentiometer to obtain a flow rate
performance to be within 2% of flow rate commanded in less than three
seconds (six seconds for Current I/O Version) af ter command change
requires the use of a fast response flowmeter (500 millisecond response to
be within 0.2% of final value or better) in series with the Model 5850E and

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AHG
September , 2009

Figure 3-7 Fast Response Adjustment

Section 3 Operation

Brooks® Model 5850E

a storage oscilloscope or recorder .

a. Make a step change in command to the controller from zero to 100% of

full scale flow and record the output signal of the fast response flowme­ter.

b. If this signal shows more than 4% overshoot, adjust the anticipate

potentiometer one-half to one turn counterclockwise. If the signal does
not show overshoot, but is not within 2% full scale of final value after
three seconds (six seconds for Current I/O Version), adjust the antici­pate potentiometer one-half to one turn clockwise. Set the command
potentiometer for zero percent of flow.

c. Repeat Steps “a” and “b” until the fast response flowmeter output signal

meets the specified response requirements.

Note: With the above equipment, the anticipate potentiometer can be
adjusted to give optimum response characteristics for any process.

3-11

Section 3 Operation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

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3-12

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

4-1 General

No routine maintenance is required on the Model 5850E. If an in-line filter
is used, the filtering element should periodically be replaced or
ultrasonically cleaned.

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

4-1

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

4-2 Troubleshooting

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

A. System Checks

The Model 5850E is generally used as a component in gas handling
systems which can be quite complex. This can make the task of isolating a
malfunction in the system a difficult one. An incorrectly diagnosed
malfunction can cause many hours of unnecessary downtime. If possible,
make the following system checks before removing a suspected defective
mass flow controller for bench troubleshooting or return, especially if the
system is new .

1. Verify a low resist ance common connection, correct power supply
voltage and that signals are reaching and leaving the controller . The
breakout board, P/N S273Z649AAA - Card Edge version or P/N
S273Z668AAA - D-Connector version listed in Section 5, will make this
job much easier .

2. Verify that the process gas connections have been correctly terminated
and leak-checked.

3. If the mass flow controller appears to be functioning but cannot achieve
set-point, verify that sufficient inlet pressure and pressure drop are
available at the controller to provide the required flow .

4. Verify that all user selectable jumpers are in their desired positions
(refer to Figures 3-3 and 3-4).

B. Bench Troubleshooting

1. Properly connect the mass flow controller to a ±15 Vdc power supply
command voltage source and connect an output signal readout device
(4-1/2 digit voltmeter recommended) to Terminals 2 and 3 or D-Connec­tor Pins 2 and 10 (refer to Figures 2-2 and 2-3). Apply power, set the
command voltage to zero and allow the controller to warm-up for 45
minutes. Do not connect to a gas source at this time.

4-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Observe the output signal and, if necessary , perform the zero adjust­ment procedure (Section 3-3). If the output signal will not zero properly ,
refer to the sensor troubleshooting section and check the sensor. If the
sensor is electrically functional, the printed circuit board is defective and
will require replacement.

2. Connect the controller to a source of the gas on which it was originally

calibrated. Command 100% flow and adjust the inlet and outlet pres­sures to the calibration conditions. Verify that the output signal reaches
and stabilizes at 5.000 Volt s. Vary the command voltage over the 2 to
100% range and verify that the output signal follows the set-point.

Apply +15 Volt s to the valve override input (refer to Figures 2-3 and 2-4
for terminal assignments) and verify that the output exceeds 5.000
Volts.

Apply -15 Volt s to the valve override terminal and verify that the output
signal falls below 0.100 Volts. If possible, connect a flow measurement
device in series with the mass flow controller to observe the actual flow
behavior and verify the accuracy of the mass flow controller. If the mass
flow controller functions as described above, it is functioning properly
and the problem is most likely elsewhere. Table 4-1 lists possible
malfunctions which may be encountered during bench troubleshooting.

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

C. Sensor T roubleshooting

If it is believed the sensor coils are either open or shorted, troubleshoot
using Table 4-2. If any of the steps do not produce expected results, the
sensor assembly is defective and must be replaced. Refer to Section 4-4
for the disassembly and assembly procedures to use when replacing the
sensor.

Note: Do not attempt to disassemble the sensor.

D. Cleaning

Should the Model 5850E Mass Flow Controller require cleaning due to
deposition, use the following procedures:

1. Remove the unit from the system.

2. Refer to Section 4-4 to disassemble the controller.

3. Use a hemostat or tweezers to push a 0.007" dia. piano wire through

the flow sensor tube to remove any contamination. For best results
push the wire into downstream opening of the sensor tube (end closest
to the control valve). The sensor tube can be flushed with a non­residuous solvent (Freon TFTM recommended). A hypodermic needle
filled with solvent is a convenient means to accomplish this.

4-3

Section 4 Maitenance &
Troubleshooting

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

Brooks® Model 5850E

Table 4-1 Bench Troubleshooting

Trouble Possible Cause Check/Corrective Action

Actual flow overshoots setpoint by Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 .
more than 5% full scale.

Output stays at 0 Volts regardless Clogged Sensor. Refer to Section 4-4. Clean sensor. Refer to cleaning.
of command and there is no flow
through the controller.

Output stays at 0 Volts regardless of Clogged Control Valve Check TP3 with the command valve at 100%. If the voltage is more negative than
command and there is no flow through -11V for NC Valve or +11V for NO Valve, disassemble and repair the control valve.
the controller. Refer to Section 4-4C and 2-10.

Card Edge Version internal reference Refer to Section 2-12.

is being used as the command source and
the yellow jumper is in the E-F position.

-15 Volts applied to the valve override input Check valve override input. Refer to Figures 2-3 & 2-4 for terminal assignments.

Defective printed circuit board Replace printed circuit board. Refer to Section 4-4.

Valve voltage not returned, pin L at common. Check jumper for external valve return. Refer to Section 2-12.
"Valve-off" pin grounded. Check "Valve-off" input. Refer to Figures 2-3 and 2-4 for terminal assignments.

Output signal stays at +6.8V regardless Valve stuck open or leaky. Clean and/or adjust control valve. Refer to cleaning procedure and/or Section 4-4C.
of command and there is flow
through the controller.

Output signal follows setpoint Leaky control valve Disassemble and repair valve. Refer to Section 4-4C.
at higher commands but will not go
to zero.

Output signal follows setpoint Insufficient inlet pressure or pressure drop. Adjust pressure, inspect the filters and clear/replace as necessary.
at lower commands but does not reach
full scale.

Partially clogged valve. Disassemble and repair control valve. Refer
Valve out of adjustment. Adjust valve. Refer to Section 4-4.

Valve guide spring failure. Controller oscillates (see below).
Controller grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.

Flow is higher than desired.
Controller grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.

Flow is lower than desired.
Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

+15V applied to the valve override input. Check the valve override terminal. Refer to Figures 2-3 & 2-4 for terminal assignments.
Detective printed circuit board. Replace printed circuit board. Refer to Section 4-4.
Command input floating. Connect command signal. Refer to Figures 2-3 and 2-4 for terminal assignments.
Pin D connected to common. Remove Pin D from common.

Excessive resistance in valve voltage Reduce wiring resistance or re-configure controller for "External Valve Return:.

Partially clogged sensor. Check calibration. Refer to Section 3-4.
to Section 4-4.

Oversized orifice. Check orifice size. Refer to Section 4-6.
Valve out of adjustment. Adjust valve. Refer to Section 4-4.
Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5.
Faulty pressure regulator. Check regulator output.
Defective printed circuit board. Replace printed circuit board. Refer to Section 4-4.

Refer to Section 2-12.

September, 2009

4-4

An alternate method for flushing out the sensor is to replace the
restrictor element with a low flow plug restrictor . This plug forces all the
flow through the sensor and may dislodge any obstructions. With the
valve orifice removed, subject the flow controller to a high differential
pressure. Pressurizing the outlet of the MFC higher than the inlet may
help force the obstruction upstream and out of the sensor tube.

4. Inspect the orifice for clogging by holding it in front of a light source and
looking for light through the bore. Clean by soaking in a suitable non­residuous solvent and directing a stream of compressed clean, dry
Nitrogen through the bore.

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Table 4-2 Sensor Troubleshooting

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

5. Deposits of silicon dioxide may be removed by soaking the internal

parts in solution of 5% hydrofluoric acid (5 part s hydrofluoric acid and
95 parts water (H2O)) followed by Freon TF.

6. Sintered type restrictor elements should be replaced as it is not pos-

sible to adequately remove deposits from them. Wire mesh and
A.C.L.F.E. type restrictor elements can be cleaned in an ultrasonic bath.
Refer to Section 4-7 for the correct restrictor to use.

7. Blow all parts dry with clean, dry Nitrogen and reassemble Refer to

Section 4-4b, (assembly).

8. Purge the assembled controller with clean, dry Nitrogen.

9. Perform the calibration procedure in Section 3-4.

10.When the controller is reinstalled in the system, the connections should

be leak-tested and the system purged with clean, dry Nitrogen for 30
minutes prior to start-up to prevent the formation of deposits.

4-5

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

4-3 Sensor T ube

4-4 Disassembly and Assembly

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

The sensor tube is part of a calibrated flow divider that is designed to
operate within a preset gas flow range. The sensor assembly may be
removed or replaced by referring to Section 4-4, Disassembly and
Assembly . If the sensor assembly is cleaned and reinst alled, a calibration
check should be performed. Refer to Section 3-4.

The Model 5850E Mass Flow Controller may be disassembled in the field
by the user for cleaning, re-ranging or servicing. Disassemble and
assemble the controller as follows: (for normally open valves N.O.)

Figures 3-3 and 3-4 show the location and function of jumpers. The
jumpers J4 and J1 (blue) must be in the position indicated for a normally
open valve.

Figure (labeled 4-2) showing the location and function of valve adjustment
spacers. Valve adjustment is not required for normal installation and
operation of the mass flow controller . If adjustment is required, consult the
factory for information.

Figure (labeled 5-1) showing an exploded view of the controller and
specific parts to the normally open N.O. valve.

Note: The Model 5850E Mass Flow Controller should be disassembled and
assembled in a clean environment to prevent particulate contamination.

A. Disassembly

The numbers in () refer to the spare parts exploded view in Figure 5-1.

1. Remove the jam nut (1) on top of the valve assembly.

2. Unplug the valve connector from the electronics cover and remove the
coil assembly (2).

3. Remove the hex socket screws (3) securing the valve retaining plate
(4) attaching the valve stem assembly (6)(NC valve - Normally Closed)
or (34) (NO Valve - Normally Open).

4-6

4. Carefully remove the valve stem assembly (6)(NC Valve) or
(34)(NO V alve).

5. Remove the plunger assembly (7,8,9,11)(NC Valve) or
(35,31,32,8,9,1 1)(NO V alve).

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

6. Remove and note the position of the valve spring spacers (10), which

may be located above and/or below the lower guide spring (8). Remove
the preload spacer spring (33)(NO V alve).

7. Unscrew the orifice (12) from the flow controller body(14).

8. Carefully unscrew the valve seat (11) from the plunger assembly (7)(NC

V alve) or the plunger assembly (31,32,35)(NO Valve).
Note the position and number of spacers (9) that are stacked on the
threaded end of the valve seat.

9. Remove the three screws (20) attaching the electronics cover. Remove

the electronics cover (23).

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

10.Unplug the sensor connector from the PC Board. Remove the two

screws securing the bracket (24) and PC Board (15). Remove the

bracket and PC Board.

1 1.Remove the two screws (18) and washers (19) securing the sensor

assembly (16). Remove the sensor assembly .

Figure 4-1 Torque Sequence for the Valve Retainer Plate

4-7

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Note: Do not attempt to disassemble the sensor assembly .

12.Remove the sensor assembly O-rings (17) from the flow controller body

(14). Using the Brooks O-ring removal tool will help prevent scratching
the sealing surface.

13.Remove the adapter fittings (27) from the flow controller body (14).

14.Remove the restrictor assembly (21) from the inlet side of the flow

controller body (14) using the restrictor tool (part of service tool kit listed
in Section 5, Table 5-2).

B. ASSEMBLY

4-8

Note: It is recommended that all O-rings be replaced during controller
assembly . All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.

1. Examine all parts for signs of wear or damage, replace as necessary.

2. Place the restrictor O-ring (22) on the restrictor assembly. Screw the

restrictor assembly (21) into the inlet side of the flow controller body
using the restrictor tool, tighten hand tight.

3. Press the lubricated sensor O-rings (17) into the flow controller body

(14). Install the sensor assembly and secure with two screws (18) and
washers (19) tightened to 15 in/lbs.

4. Install the orifice (12) and its O-ring (13), using a 3/8 nut driver . Insure

that the orifice is fully seated but do not overtighten.

5. Insert the valve preload spacers (10)(NC V alve) or (33)(NO Valve), if

used, into the valve cavity in the flow controller body (14). Use care to
preserve the correct order.

6. Place the spacers (9) and spring (8) on the valve seat (1 1) in the same

order as noted in step 8 of the disassembly. Screw the valve seat (11)
into the plunger assembly (7)(NC V alve) or (35,31,32)(NO Valve).
Tighten the assembly until there is no looseness, but do not over­tighten.

7. Install the valve plunger assembly (7, 8, 9 and 1 1)(NC Valve) or

(35,31,32,8,9,1 1)(NO Valve) on the preload spacers (10). Install air gap
spacers (10), if used on top of the valve spring.

8. Install the valve stem assembly (6), secure with the valve retaining plate

(4) and four hex socket screws (3). When installing the screws they
should first make light contact with the plate, which should be checked
to insure that it makes full contact around the stem assembly. Torque

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

the screws securing the valve retaining plate in diagonal pattern

(Refer to Figure 4-1) to 17 in/lbs.

9. Install the coil assembly (2) over the valve stem assembly (6)(NC

V alve) or (34)(NO Valve) install extension spacer nut (3)(NO Valve) and

secure with jam nut (1).

10.Install the printed circuit (PC) Board (15), secure with the bracket (24)

and two screws. Plug the connector from the sensor assembly onto the

PC Board. The flow arrow on the connector should be pointing toward

the valve assembly.
1 1.Install the electronics cover (23) on the controller, secure with three

screws (20). Plug the connector from the valve coil into the PC Board

through the hole in the electronics cover.

12.Prior to installation leak and pressure test to any applicable pressure

vessel codes.

C. Control Valve Adjustment

The Model 5850E control valve has been factory adjusted to insure proper
operation. Readjustment is only required if any of the following parts have
been replaced:

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

orifice (12)

valve stem (6)

plunger (7)

lower guide spring (8)

valve seat (1 1)

The valve is adjusted in Brooks' mass flow controllers by adding spacers (9
and 10) to the control valve assembly to vary the air gap and initial preload.
Sp acers are used to af fect the proper adjustment because they provide a
reliable and repeatable means for adjustment. Screw type adjustment
mechanisms can change with pressure or vibration and introduce an
additional dynamic seal that is a potential leak site and source for
contamination. Refer to Fig. 4-2 for spacer locations.

In April 1989 a new valve stem and plunger combination was incorporated
into the Model 5850E to improve the performance of the valve. These part s
can be used as replacements in any Model 5850E, but the stem and
plunger must be replaced at the same time.

The new style parts can be identified by a slightly curved surface on the
bottom surface of the valve stem and two small groves in the plunger. The
old style parts have a flat surface on the bottom of the stem and one or no
groove in the plunger . Please refer to Figure 4-2 for an illustration of the
difference.

V alves incorporating the old style part s may or may not have a small
diameter air gap spacer , and always use two lower guide springs. The new
style parts always include a .010" thick small diameter air gap spacer. For
devices with an orifice diameter of 0.020" and less the 0.025" thick lower
guide spring is used. For devices with an orifice diameter of 0.032" and
larger the 0.020" lower guide spring is used. Although the newer valve
parts are assembled slightly dif ferently than the old part s, the adjustment
procedure that follows is the same for both types of parts.

4-9

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

The preload determines the initial force that is required to raise the valve
seat off the orifice and start gas flow. If the preload is insufficient, the valve
will not fully close and gas will leak through. If the preload is excessive, the
magnetic force generated between the plunger and stem will not be
sufficient to raise the plunger and the valve will not open.

The airgap is the space between the top of the plunger and stem. The
airgap determines the force between the plunger and stem at a given
voltage and the total travel of the valve. If the airgap is too small, the
plunger travel may not be sufficient to fully open the valve. Also, the
magnetic force may be too high for a given valve coil voltage. If the airgap
is too large, the magnetic force will not be sufficient to raise the plunger
and the valve will not open.

Note: Prior to starting the valve adjustment procedure, check to insure that
the orifice is properly seated and that the valve parts are not bent or
damaged.

1. Adjustment Procedure (Refer to Section 5, Spare Part s, for the spacer

kit)

a. Remove the electronics cover (23) from the controller. Insure that

the connector from the coil assembly (2) is properly reconnected to
the PC Board after the electronics cover is removed.

b. Perform the electrical and gas connections to the controller following

the instructions in Section 2 of this manual. Use a clean, dry inert
gas, such as Nitrogen, for this procedure. Do not apply gas pressure
to the controller at this time.

c. Disassemble the control valve following the procedure given in

Section 4-4a, above. Note the number , locations and thicknesses of
all the spacers (9 and 10).

d. Decrease the preload of the valve by 0.005 inches either by remov-

ing a 0.005" small preload spacer or by adding a 0.005" large
preload spacer . Refer to Fig.4-2.

e. Reassemble the valve following the assembly procedure in Section

4-4a.

f. Command 0% flow, apply normal operating pressure and check for

valve leak-through by observing the output signal.

g. If the valve leaks-through, increase the preload by 0.005" and go to

S tep h. If the valve does not leak-through, repeat Steps d, e, f and g.

h. Apply the normal operating gas pressure and command 100% flow

(5.000 V olt s on Terminal A, Pin 2).

4-10

Note: Due to possible heat capacity and density differences between
the test gas and actual process gas for which the mass flow control­ler was sized, it may be necessary to increase the inlet pressure to
obtain proper control at 100% flow .

i. Measure the valve voltage by connecting a voltmeter between Test

Point 3 (TP3) and Test Point 4 (TP4). Refer to Figure 4-3.
V alve V olt age = (1.53 x TP3) + 20.7

j1. If the flow controller output signal is 100% (5.0V) and the valve

voltage is less than 11.5 Volts, the valve adjustment is complete.

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

Figure 4-2a Valve Adjusting Spacer Locations (Normally Closed valve N.C.)

4-11

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 4-2b Valve Adjusting Spacer Locations (Normally Open valve N.O.)

4-12

Installation and Operation Manual

Section 4 Maintenance &

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

j2. If the flow controller output signal is 100% (5.0V) and the valve

voltage is greater than 11.5 Volts, decrease the air gap with a small

0.005 inch air gap spacer. Refer to Figure 4-2. Repeat Steps h and i.

j3. If the flow controller output signal is less than 100% (5.0V) and the

valve voltage is greater than 1 1.5V. This condition indicates that the
inlet pressure is too low and or the orifice size is too small. First
check Section 4-6 to insure that the orifice size is correct.

k. Proceed to Section 3 and perform 3-4 Calibration Procedure, if

required.

4-5 Gas Conversion Factors

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in Table 4-3.
To change to a new gas, multiply the output reading by the ratio of the gas
factor for the desired gas by the gas factor for the calibration gas.

Troubleshooting

®

Model 5850E

Actual Gas Flow Rate = Output Reading x

Factor of the New Gas

Factor of the Calibration Gas

Example:

The controller is calibrated for nitrogen.
The desired gas is carbon dioxide
The output reading is 75 sccm when carbon dioxide is flowing

Then 75 x 0.773 = 57.98 sccm

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

Sensor Conversion Factor

Mixture

=

P

1

Sensor

Conversion

Factor

1

100

P

+ +

2

Sensor

Conversion

Factor

2

P

3

Sensor

Conversion

Factor

3

Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by

volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

4-13

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 4-3 Voltmeter Connections for Valve Adjustment

4-14

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

Table 4-3 Conversion Factors (Nitrogen Base)

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C3H
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH
Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C
1-Butene C
CIS-2-Butene C4H
Trans-2-Butene C4H
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H
Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

BrF

4H10

4H8

2

4

3

3
3

3

5

3

3

3

6

8

8
2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H
Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879
Ethylene C2H
Ethylene Oxide C2H4O 0.589 1.254 1.965
Fluorine F
Fluoroform f-23 CH F
Germane GeH
Germanium Tetrachloride GeCl
Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C2F
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H

4

6

6

6

4

2

3
4

4

3

3

6

6

6

2

14

FACTOR FACTOR (kg/m

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.740 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

3

4-15

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Table 4-3 Conversion Factors (Nitrogen Base) Continued

GAS NAME FORMULA SENSOR ORIFICE DENSITY

Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645
Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
Hydrogen Sulfide H
Iodine Pentafluoride IF
Isobutane C4H
Isobutene C
Isopentane C
Krypton Kr 1.382 1.729 3.708
Methane CH
Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C
Methyl Chloride CH
Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH
Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913
Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F
Oxygen O
Oxygen Difluoride OF
Ozone O
Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131
Perfluoropropane C3F
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C3H
Rhenium Hexafluoride ReF
Silane SiH
Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F
Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF
Uranimum Hexafluoride UF
Vinyl Bromide C2H3Br 0.524 1.985 4.772
Vinyl Chloride C2H3CL 0.542 1.492 2.788

4-16

Vinyl Fluoride C2H3F 0.576 1.281 2.046
Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

FACTOR FACTOR (kg/m

2

Se 0.837 1.695 3.613

2

S 0.850 1.108 1.539

2

5

10

4H8

5H12

4

4

5H10

CL 0.687 1.347 2.308

3

2

2

4

2

2

3

3

8

2

2

3

5

12

10

8

8

12

2

3

5

3

3H8

6

6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

3

)

Installation and Operation Manual

Section 4 Maintenance &

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Troubleshooting

®

Model 5850E

4-6 Orifice Sizing

Mixture Factor = = 0.945

20

1.386

100

+

80

0.876

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen

It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-4
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However , gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.

The Orifice Sizing Nomograph, Figure 4-4, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:

gas
operating pressure (inlet and outlet)
flow range

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors,
calculate the new orifice size by following the procedure and example
outlined in the following paragraphs.

Example: Determine the orifice size for the following conditions:

Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

1. Determine Nitrogen equivalent flow rate (refer to Table 4-3).
P

GAS
NITROGEN

Q

NITROGEN

Q

x

GAS

=P

OR

SG

GAS
NITROGEN

Q

NITROGEN

Q

x

GAS

=SG

Where:

Q

NITROGEN

= Nitrogen equivalent flow rate (sccm)

4-17

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Q

GAS

P

NITROGEN

P

GAS

SG

GAS

= Desired flow rate of the gas (sccm)

= Density of Nitrogen at 70°F

= Density of the gas (taken at customer temperature)

= Specific gravity of the gas (taken at customer

temperature)

Refer to Table 4-4 for specific gravities.

Example:

Q

= 2,000 sccm

gas

SG

= .269

gas

SG

Nitrogen

SG

Q

x

Q

Nitrogen

=

GAS

SGNitrogen

= 2,000 x .269

gas

= 538 sccm Nitrogen

In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:

P

Conversion

1

Orifice

Factor 1

+ P

2

Orifice

Conversion

Factor 2

+ P

n

Orifice

Conversion

Factor n

Orifice

Conversion =

Factor

Mixture

100

Where P

Q

x

GAS

= percentage by volume of gas 1

1

P
P

= percentage by volume of gas 2

2

= percentage by volume of gas n

n

Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and
80% Chlorine gas mixture.

Orifice
Conversion = 20(.378) + 80(1.598)
Factor 100
Mixture

4-18

Q

Nitrogen

=Q

(orifice conversion factor)

gas

= 20 x 1.439

= 28.78 slpm Nitrogen

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Table 4-4 Model 5850E Orifice Sizing Nomograph

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

4-19

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 4-4 Example Nomograph

2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7

to convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia

3. Determine Critical Pressure Drop

Critical pressure drop occurs when the outlet pressure (psia) is less
than half the inlet pressure (psia) or

P outlet < P inlet

2

If these conditions exist, the pressure drop (Dp) should be calculated
as follows:

P

in

Dp =

2

Dp = Pressure drop (psi)
Pin= Inlet pressure (psia)

4-20

If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.

Installation and Operation Manual

Section 4 Maintenance &

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Then Dp = 64.7 - 44.7 = 20psi

4. Using the nomograph, locate the pressure drop (psi) on the vertical line

marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical

line marked "Q

Nitrogen

" (Point B).

Troubleshooting

®

Model 5850E

4-7 Restrictor Sizing

6. Draw a line connecting Dp and Q

and extend it to the baseline.

Nitrogen

Mark this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "P

8. Draw a line connecting P

(Point D) and baseline (Point C) and then

in

" (Point D).

in

extend this line to the vertical line marked Do (orifice diameter , inches)
(Point E).

9. This point on the line is the minimum orifice size for the given

conditions. If this point is between two orifice sizes, select the next
largest size orifice to ensure adequate flow. If the orifice selected falls
below .0013, choose .0013 size orifice.

For the example in Figure 4-5, the .007 size orifice would be selected.

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains the ratio of sensor flow to restrictor flow , however the
total flow through each restrictor is different. Different restrictors (micron
porosity and active area) have different pressure drops and produce
controllers with different full scale flow rates. For a discussion of the
interaction of the various parts of the controller, you are urged to review
Section 3-1 (Theory of Operation).

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop vs. flow characteristics will be altered and it must be cleaned
or replaced. It may also be necessary to replace the restrictor assembly
when the mass flow controller is to be calibrated to a new flow rate.

Restrictor assembly replacement should be performed only by trained
personnel. The tools required for the removal/replacement procedure are
as follows:

Appropriate size wrench for the removal of the inlet process connection
Restrictor removal tool (contained in service tool kit P/N S-778-D-017-

AAA)
Restrictor O-ring, refer to the spare parts Section 5, for the correct part

number.

4-21

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Restrictors

The Model 5850E Series Mass Flow Controllers use three types of
restrictor assemblies depending on full scale flowrate and expected service
conditions.

1. Porous sintered metal for air equivalent flow rates up to and including

9.5 slpm. The porosity ranges from 1-40 microns. This type of assem­bly is least expensive and should be used when the gas stream will not
contain any particulate matter .

2. Sintered wire mesh for air equivalent flow rates above 3.5 slpm. These

restrictor assemblies are made from a cylinder of sintered wire mesh
and are easily cleaned if they become contaminated in service.

3. Anti-Clog Laminar Flow Element (ACLFE). This type of restrictor

assembly is used for air equivalent flow rates less than 3.4 slpm. The
ACLFE is much more tolerant to particulate contamination than the
sintered metal assembly. This is especially important when handling
semiconductor gases that tend to precipitate particles. The ACLFE will
also improve accuracy when operating at very low pressures.

Sizing

All Model 5850E Series Restrictor Assemblies are factory adjusted to
provide a 1 15 mm water column pressure drop for a specific flow rate. This
corresponds to the desired full scale flow rate. A list of restrictor
assemblies used in the Model 5850E Series Mass Flow Controllers is
shown in Table 4-5.

Example:

The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.625 from Table 4-4.
Nitrogen equivalent flow = 200/0.625 = 320 sccm Nitrogen.

In the example above a size P restrictor would be selected. Both the
sintered metal and ACLFE are available for this size. Either type will work
however, since Silane is known to precipit ate silicon dioxide particles when
contaminated an anti-clog laminar flow element should be selected for this
application.

Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

If a mixture of two or more gases are being used the restrictor selection
must be based on the Nitrogen equivalent flow rate of the mixture.

4-22

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm.
Sensor conversion factor for the mixture is:

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG

September , 2009 Brooks

Section 4 Maintenance &

Troubleshooting

®

Model 5850E

Table 4-5 Model 5850E Standard Restrictors

Mixture Factor = = 0.945

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.

20

1.386

100

+

80

0.876

4-23

Section 4 Maitenance &
Troubleshooting

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

4-24

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Section A CE Certification

Brooks® Model 5850E

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).

Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten

være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%

dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.

Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von

360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-

Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A CE Certification

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September , 2009

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used

providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE

certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).

Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un

apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,

se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente en

los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un

apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

A-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Section A CE Certification

Brooks® Model 5850E

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la

Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal

d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à

chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à la

réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Greek

A-3

Section A CE Certification

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September , 2009

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con successo
le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).

E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio
CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare
propri cavi, questi devono possedere una schermatura del 100%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico
e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%

per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de

wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is afgeschermd

met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen

Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.

A-4

Hoogachtend,

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Section A CE Certification

Brooks® Model 5850E

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som
beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det
måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for
jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°,
tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjer­ming som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).

Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção
especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve

utilizar-se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a

100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A CE Certification

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September , 2009

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi
hankittava 100%:sti suojattu kaapeli.

“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä
kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne olisivat

CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk
kompabilitet (EMC direktiv 89/336/EEC).

Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.

“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med CE-

certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Installation and Operation Manual

X-TMF-SLA5800-MFC-eng
Part Number: 541B102AAG
September, 2009

Brooks® Model 5850E

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

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Part Number: 541B102AAG

Brooks® Model 5850E

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

September , 2009

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe [phone]
Asia [phone]

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks..........................................................Brooks Instrument, LLC

Freon TF .......................................... E. I. DuPont deNemours & Co.

Kalrez..........................................................DuPont Dow Elastomers

VCO ......................................................................... Cajon Company

VCR ......................................................................... Cajon Company

Viton..............................................DuPont Performance Elastomers

Vol-U-Meter .................................................Brooks Instrument, LLC

1 888 554 FLOW