Brooks Instrument 5850E User Manual

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Model 5850E
Mass Flow Controller

Brooks® Model 5850E

Model 5850E

Mass Flow Controller

with Card Edge Connector

Model 5850E

Mass Flow Controller

with D-Connector

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

Brooks® Model 5850E

September, 2009

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September , 2009

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model 5850E

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 1
Introduction

Section 2
Installation

Contents

Brooks® Model 5850E

Paragraph
Number Page

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-3

2-1 Receipt of Equipment........................................................ 2-1

2-2 Recommended S torage Practice ...................................... 2-1

2-3 Return Shipment ............................................................... 2-2

2-4 Gas Connections............................................................... 2-2

2-5 Installation ......................................................................... 2-3

2-6 In-Line Filter ...................................................................... 2-6

2-7 Soft S tart............................................................................ 2-7

2-8 Remote Setpoint (Command) Input................................... 2-7

2-9 V alve Override................................................................... 2-8

2-10 Remote Transducer Input.................................................. 2-8

2-1 1 Valve Test Point/Purge ...................................................... 2-8

2-12 Valve Off............................................................................ 2-9

2-13 Five Volt Reference Output/Valve Drive Configuration...... 2-9

Section 3
Operation

Section 4
Maintenance &
Troubleshooting

3-1 Theory of Operation .......................................................... 3-1

3-2 Operating Procedure......................................................... 3-3

3-3 Zero Adjustment ................................................................ 3-3

3-4 Calibration Procedure........................................................ 3-6

3-5 Response ......................................................................... 3-10

4-1 General ............................................................................. 4-1

4-2 Troubleshooting................................................................. 4-2

4-3 Sensor Tube...................................................................... 4-6

4-4 Disassembly and Assembly............................................... 4-6

4-5 Gas Conversion Factors .................................................. 4-13

4-6 Orifice Sizing .................................................................... 4-17

4-7 Restrictor Sizing ............................................................... 4-21

i

Contents

Brooks® Model 5850E

Section 5
Parts List

Section A
CE Certification

Figures

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

5-1 General ............................................................................. 5-1

CE Certification of Mass Flow Equipment ................................... A-1

Warranty, Sales/Service Contact Information ......................Back Cover

Figure
Number Page

1-1 Command Steps, Sof t Start Disabled ................................ 1-2

1-2 0-100% Command S tep, Soft S t art Enabled ..................... 1-2

2-1 Model 5850E Dimensions ................................................. 2-3

2-2 Model 5850E Card Edge Connector Comparison Guide... 2-4

2-3 Model 5850E Card Edge Connector Hookup Diagram...... 2-5

2-4 D-T ype Connector Pin Arrangement ................................. 2-5

3-1 Flow Sensor Operational Diagram .................................... 3-2

3-2 Flow Control System Block Diagram................................. 3-3

3-3 Card Edge PC Board Jumper Location & Function ........... 3-4

3-4 D-Connector PC Board Jumper Location & Function........ 3-5

3-5 Model 5850E Calibration Connections .............................. 3-6

3-6 Adjustment Potentiometer Location .................................. 3-9

3-7 Fast Response Adjustment .............................................. 3-11

4-1 Torque Sequence for the V alve Ret ainer Plate.................. 4-7

4-2a V alve Adjusting Sp acer Locations (N.C.).......................... 4-11

4-2b V alve Adjusting Spacer Locations (N.O.).......................... 4-12

4-3 Voltmeter Connections for Valve Adjustment ................... 4-14

4-4 Example Nomograph ....................................................... 4-18

5-1 Model 5850E Parts Drawing.............................................. 5-1

ii

Tables

Table
Number Page

2-1 Recommended Filter Size ................................................. 2-6

4-1 Bench Troubleshooting...................................................... 4-4

4-2 Sensor Troubleshooting .................................................... 4-5

4-3 Conversion Factors (Nitrogen Base) ................................ 4-15

4-4 Model 5850E Orifice Sizing Nomograph .......................... 4-19

4-5 Model 5850E Standard Restrictors................................... 4-23

5-1 Model 5850E Replacement Parts List ............................... 5-2

5-2 Tool and Sp are Part Kits for 5850E Series ........................ 5-4

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

1-1 Purpose

1-2 Description

Section 1 Introduction

Brooks® Model 5850E

The Brooks® Model 5850E Flow Controller is a mass flow measurement
device designed for accurately measuring and rapidly controlling flows of
gases. This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 5850E
Mass Flow Controller. This manual is organized into five sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance & T roubleshooting

Section 5 Replacement Parts

Back Cover Warranty , Local Sales/Service Cont act Information

It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5850E.

The Brooks Model 5850E Mass Flow Controller is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5850E consists of
three basic units: a flow sensor , a control valve and an integral electronic
control system. This combination produces a stable gas flow , which
eliminates the need to continuously monitor and readjust gas pressures.
Standard features include:

Fast Response Control permits rapid gas settling times with little or no

over/undershoot. (Refer to Figure 1-1.)

Soft Start provides a flow ramping function which slows down the

introduction of the process gas for those processes which cannot

tolerate rapid flow transition. (Refer to Section 2-6 and Figure 1-2.)

Valve Override permits the user to fully open and close the control valve

independent of the command setting. (Refer to Section 2-8.)

Setpoint (Command) permits the user to program the mass flow controller

with an external 0-5 Vdc command potentiometer.

(Refer to Section 2-7.)

Low Command Valve Inhibit (Auto Shut-of f) prevents the valve from

opening whenever the set-point is less than 2% of full scale.

Removable Cleanable Sensor permits the user to clean or replace the

sensor. (Refer to Section 4-4.)

Output Limiting prevents possible damage to delicate data acquisition

devices by limiting the output to +6.8 Vdc and -0.7 Vdc.

1-1

Section 1 Introduction

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Figure 1-1 Command Steps, Soft Start Disabled

Figure 1-2 0 - 100% Command Step, Soft Start Enabled.

1-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

1-3 Specifications

Section 1 Introduction

Brooks® Model 5850E

Valve Off accessed via terminal J on the Card Edge or Pin 4 on the D-

Connector version. This feature allows the user to close the control

valve independently of the command signal by supplying a TTL level

low signal to the proper terminal. This function is useful when

performing repetitive flow operations or as a safety shutdown.

(Refer to Section 2-1 1.)

Valve Test Point/Purge accessed via terminal D on the Card Edge or Pin

7 on the D-Connector version. This feature allows the user to monitor

the control valve voltage during operation. Shorting the valve test point

pin to power supply common will cause the valve to open regardless of

command input voltage. (Refer to Section 2-10.)

Remote Transducer Input accessed via Terminal 5 on the Card Edge or

Pin 15 on the D-connector version. This feature allows the use of the

integral control electronics and valve to regulate flow in response to the

signal from an external 0-5 Vdc signal. The mass flow signal from the

Model 5850E is still available for process monitoring.

(Refer to Section 2-9.)

Standard Ranges:

3 sccm to 30 slpm* (Nitrogen equivalent)

*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard: 0°C
and 101.3 kPa (760 T orr).

Accuracy:

±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.

Repeatability:

0.25% of rate

Response Time:

Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.

Power Requirements (NC Valve):

+15 Vdc ±5%, 35 mA

-15 Vdc ±5%, 180 mA

3.5 watts power consumption

1-3

Section 1 Introduction

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Power Requirements (NO Valve):

+15 Vdc ±5%, 215 mA

-15 Vdc ±5%, 180 mA
1 1.85 watt s power consumption

Ambient T emperature Limit s:

Operating: 40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212°F (-25°C to 100°C)

Working Pressure:

1500 psi (10.342 mPa) maximum

Differential Pressure:

5 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.

Output Signal:

0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.

5 V olt Reference Output:

5 Volt s ±0.2%. Maximum load 1 k ohms.

T emperature Sensitivity:

Zero: less than ±0.075% F.S. per degree C.
Sp an: less than ±1.0% F.S. shift over 10-50°C range

Power Supply Sensitivity:

±0.09% full scale per % power supply voltage variation

Mounting Attitude Sensitivity:

±0.5% maximum full scale deviation after re-zeroing

Command Input:

0-5 Vdc. Input resistance 200 k ohm

Leak Integrity:

-9

1 x 10

Atm. cc/sec Helium

Control Range:

50 to 1

Mechanical Connection:

Compatible with most popular mass flow controllers. Refer to Figure 2-1.

1-4

Electrical Connection:

Card edge, 20 terminals, gold over low stress nickel plated copper . 15-pin
D-Connector (DA-15P)

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-1 Receipt of Equipment

Section 2 Installation

Brooks® Model 5850E

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should immediately be notified regarding his
liability. A report should be submitted to the Product Service Department,
Brooks Instrument, 407 West Vine Street, Hatfield, Pennsylvania 19440.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

2-2 Recommended Storage Practice

Remove the envelope containing the packing list. Outside of your clean
area, carefully remove the equipment from the packing case. Make sure
spare parts are not discarded with the p acking material. Inspect for
damaged or missing parts.

If intermediate or long-term storage is required for equipment, as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. Within the original shipping container.
b. Store in a sheltered area, with the following conditions.

1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum
and 7°C (45°F) minimum.

2. Relative humidity 45% nominal, 60% maximum and 25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify the condition of the equipment is "as received". If the
equipment has been in storage for an excess of ten (10) months or
in conditions in excess of those recommended, all pressure bound­ary seals should be replaced and the device subjected to a pneu­matic pressure test in accordance with applicable vessel codes.

2-1

Section 2 Installation

Brooks® Model 5850E

2-3 Return Shipment

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Prior to returning any Brooks equipment to the factory , cont act the factory ­for a Return Materials Authorization Number (RMA#). This can be obt ained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440-0903, or call toll free 1-888-554-FLOW (3569).

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.

2-4 Gas Connections

Standard inlet and outlet connections supplied on the Model 5850E are
1/4" compression fittings for flow rates up to 10 slpm, and 3/8"
compression fittings for higher flow rates.

Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.

2-5 Installation (Refer to Figs. 2-1 through 2-4)

2-2

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 2 Installation

Brooks® Model 5850E

Figure 2-1 Model 5850E Dimensions

Recommended installation procedures:

a. The Model 5850E should be located in a clean, dry atmosphere rela-

tively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument

requires cleaning.

d. The Model 5850E Mass Flow Controller can be installed in any position.

However, mounting in orientations other than the original factory

calibration (see data sheet) will result in a ±0.5% maximum full scale

shift after re-zeroing.

2-3

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

Terminal

Designation

Unit Tylan Tylan Brooks Card Brooks Tylan Tylan Unit

UFC-1000 FC-280 FC-260 5850E Edge 5850E FC-260 FC-280 UFC-1000

Chassis Chassis Chassis Chassis Command Command Command Command

Ground Ground Ground Ground 1 A Input Input Input Input

Supply Signal Signal Signal 2 B Command Command Command Command

Common Common Common Common Common Common Common Common

0-5 Volt 0-5 Volt 0-5 Volt 0-5 Volt Supply Supply

Signal Signal Signal Signal 3 C Voltage Voltage Return Common

Output Output Output Output Common Common

+ 15 Vdc + 15 Vdc + 15 Vdc + 15 Vdc 4 D Valve Test Valve Test Valve Test

Supply Supply Supply Supply Point/Purge Point Not Used Point/Purge

Not Used Not Used Not Used Transducer 5 E Not Used Not Used Test Not Used

Not Used Test Test Not Used 6 F Supply Supply Supply Supply

Slot Slot Slot Slot 7 H* Slot Slot Slot Slot (G)

Not Used Not Used Not Used Not Used 8 J* Not Used Not Used Not Used Not Used (H)

Not Used Not Used Not Used Valve Override 9 K* Not Used Not Used Valve Not Used (I)

Common Not Used Not Used Valve Return 10 L* Valve Not Used Not Used Valve Off (J)

* Unit designates Pins H, J, K, & L as G, H, I, & J
** Jumper Selectable
*** Factory Activated Option

0-5 Volt 0-5 Volt 0-5 Volt Signal &

Remote Valve

Input*** Point

Zener Zener - 15 Vdc - 15 Vdc - 15 Vdc - 15 Vdc

Open/Close

+ 5V Ref. *** or

or Not Used Off Off

Figure 2-2 Model 5850E Card Edge Connector Comparison Guide

2-4

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

Section 2 Installation

Brooks® Model 5850E

Figure 2-3 Model 5850E Card Edge Connector Hookup Diagram

PIN NO. FUNCTION COLOR CODE

1 Command Common (Potentiometer Pin "CCW") Black
2 0-5 Volt Signal Output White

3 Not Used Red
4 Valve Off Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point Wht/Blk
8 Command Input (Potentiometer Pin "S") Red/Blk

9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Potentiometer Pin "CW") Blu/Blk
12 Valve Override Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input* Blu/Wht

*Jumper Selectable

Figure 2-4. D-Connector Pin Arrangement

Notes:

1. Cable shield tied to chassis ground
in meter connector. Make no
connection on customer end.

2. All power leads must be connected
to power supply.

2-5

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

e. When installing controllers with full scale flow rates of 10 slpm or

greater , be aware that sharp, abrupt angles in the system piping directly
upstream of the controller may cause a small shift in accuracy. If
possible, have at least ten pipe diameters of straight tubing upstream of
the Model 5850E Mass Flow Controller .

Note: The control valve in the Model 5850E provides precision control
and is not designed for positive shut-off. If positive shut-of f is required,
it is recommended that a separate shut-off valve be inst alled in-line.

2-6 In-Line Filter

Table 2-1 Recommended Filter Size.

2-6

It is recommended that an in-line filter be installed upstream from the
controller to prevent the possibility of any foreign material entering the flow
sensor or control valve. The filtering element should be replaced
periodically or ultrasonically cleaned.

Maximum Flow Rate Recommended Filter Size

100 sccm 1 micron
500 sccm 2 micron

1 to 5 slpm 7 micron

10 to 30 slpm 15 micron

Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.

Electrical Interfacing

To insure proper operation, the Model 5850E must be connected per
Figures 2-3 and 2-4, and configured according to Sections 2-6 to 2-13.

As a minimum the following connections must be made for new
installations:

Chassis Ground
0-5 V olt Signal Common
0-5 V olt Signal Output
+15 Vdc Supply

-15 Vdc Supply
Command Input
Command Common
Supply V oltage Common
Valve Return (Refer to Section 2-12 for jumper configuration)

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-7 Soft Start

Section 2 Installation

Brooks® Model 5850E

For installations which replace Unit Instruments UFC-1000's, (Card Edge
version) Pin 10 is frequently grounded. In these situations the 5 Volt
reference output must be disabled. Refer to Section 2-12.

For installations which will be connected to Brooks secondary electronics,
the Card Edge version must have the 5 Volt reference enabled on Pin 10
and the D-Connector version should be configured for external valve
return. Refer to Section 2-12. If the Model 5850E was shipped as a
system with Brooks secondary electronics then the electronics will already
be configured properly .

Note: To obtain access to the jumpers for the following options the
electronics cover can must be removed. Remove the can by removing the
three screws and the valve connector. The can must be replaced before
returning the unit to service.

2-8 Remote Setpoint (Command) Input

2-9 V alve Override

Refer to Figures 3-3 and 3-4. To enable soft start, place the red jumper on
the controller printed circuit board at J2 in the (ss) position.

To disable soft start, place the red jumper on the controller printed circuit
board at J2 in the (n) position.

If the mass flow controller is to be commanded by an external 0-5 Vdc
signal, the command potentiometer is not used.

The command input hookup is as follows:

a. Card Edge Connector

Connect the external command voltage to Terminal A and external
command return to Terminal B. Refer to Figures 2-2 and 2-3.

b. D-Connector

Connect the external command voltage to Terminal 8 and external
command return to Terminal 1. Refer to Figure 2-4.

The valve override function allows full opening and closing of the valve
independent of the command setting. The unique command reset feature
prevents flow overshoot when the controller goes from valve override
closed to normal control. The valve override for the mass flow controller is
as follows:

a. To open the valve, apply +15 Vdc to the valve override terminal.
b. To close the valve, apply -15 Vdc to the valve override terminal.

2-7

Section 2 Installation

Brooks® Model 5850E

2-10 Remote Transducer Input

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

c. Isolating the valve override terminal returns the controller to normal

operation.

1. Card Edge
The valve override function can be accessed from Terminal 9. Refer
to Figure 2-3.
Note: For normal operation, Terminal 9 must be left open (floating).

2. D-Connector
The valve override function is accessed from Terminal 12. Refer to
Figure 2-4.

Refer to Figures 3-3 and 3-4. To allow the Model 5850E control circuitry
and valve to be used with a 0-5 Vdc external transducer signal, a green
jumper is moved to the lower two pins at J7. With this feature enabled, a 0­5 Vdc signal may be applied to the external transducer input terminal. The
Model 5850E controller circuitry will modulate the valve position to increase
or decrease the flow rate to maintain the transducer output at the desired
set-point. The control circuitry is reverse acting, e.g., for an increase in
transducer output, the flow will correspondingly be decreased.

2-11 Valve T est Point/Purge

2-12 Valve Off

Refer to Figures 2-2, 2-3 and 2-4. The valve voltage can be monitored on
Pin D of the Card Edge version and Pin 7 of the D-Connector version. This
voltage relative to circuit common is proportional to the valve voltage per
the following equation:

Valve V oltage= (1.53 x TP3) + 20.7
( Note: The valve voltage calculation is an approximate value.)

Shorting the valve test point pin to power supply common will cause the
valve to open regardless of command input voltage.

Refer to Figures 2-2, 2-3 and 2-4. The control valve can be forced closed
regardless of command input signal by applying a TTL level low (< .4 Vdc)
to Terminal L of the Card Edge version or Pin 4 of the D-Connector
version. A TTL level high or floating at this pin has no effect.

2-8

Installation and Operation Manual

X-TMF-5850E-MFC-eng
Part Number: 541B102AAG
September, 2009

2-13 Five-V olt Reference Output/Valve Drive Configuration

a. Card Edge

Refer to Figures 2-3 and 3-3. Terminal 10 can be jumper selected as 5 Volt
reference output, external valve return or “not used.” The 5 V olt reference
output is required if a potentiometer is to be used to generate the
command signal. To enable the 5 Volt reference output on Terminal 10,
place the yellow jumper at J1 in the D-E position. To disable the 5 V olt
reference output, place the yellow jumper at J1 in the E-F position.

To minimize the effect of resistance in the connection wiring, a separate
“external valve return” can be accessed on Pin 10. To enable this feature,
place the black jumper at J1 in the B-D position and connect Terminal 10 to
power supply common. If the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: If the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

Section 2 Installation

Brooks® Model 5850E

b. D-Connector

Refer to Figures 2-4 and 3-4. The 5 V olt reference is always available on
Pin 1 1.

To minimize the effect of resistance in the connection wiring, a separate
“external valve return” can be accessed on Pin 3. To enable this feature,
place the black jumper at J1 in the B-D position and connect Pin 3 to
power supply common. If the “external valve return” is not enabled, place
the black jumper at J1 in the B-C position.

Note: If the “external valve return” feature is not enabled, the valve voltage
is returned internally on the printed circuit board and the connection wiring
resistance must be less than 0.2 ohms.

2-9

Section 2 Installation

Brooks® Model 5850E

Installation and Operation Manual

X-TMF-5850E-MFC-eng

Part Number: 541B102AAG

September, 2009

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