Versatile,
Low-Frequency
•
25-125kHz or 90-460kHz
Frequency Range
•
Forward & Load
R F Power
Sources For
Plasma
Applications
Power Leveling
•
Forced-Air Cooling
Solid State Reliability
•
•
Variable Frequency Control
•
Built-In
Matching Transformer
PL-2HF Front Panel
S-p-e-cifi
r
he Plasmaloc Series of RF Generators is designed to
1
.
provide dependable RF power for low-frequency
1
T
power leveling, variable frequency control, thermal and
mismatch protection, forced-air cooling, and fail-soft
capability, the Plasmaloc Series has set the standard for solid
state quality, versatility; and reliability.
plasma applications. Featuring forward and load
Versatile Operation
The Plasmaloc Series consists of six generators: three PL
models which cover the frequency range of 25-125kHz; and
three PL-HF models which cover the range of 90-460kHz.
The optimum frequency for a specific plasma reaction is
easily selected with the front panel variable frequency control.
Maximum forward power output ranges from 750 to 3,200
Watts, depending on the model. The front panel power meter
displays either the forward power leaving the generator or the
load power absorbed by the plasma.
FREQUENCY STABILITY:
0.1 % from 0° to 45° C ambient after 5-minute
warm-up.
POWER LEVELING:
(
Plasma), Switch Selectable
Forward or Load
PLASMA MATCHING:
7-position step transformer for plasma
i
mpedances between 50 and 600 ohms.
THERMAL PROTECTION:
automatic shutdown if transistors overheat
due to mismatch or cooling system failure.
Better than
Built-in variable
Provides
CONTROL INTERFACE:
Type D, 9-pin connector
RF OUTPUT IMPEDANCE:
50-600 ohms
Precise Power Control
Precise power control is provided by a sampling of the
output power, using a directional coupler. Both forward and
load power leveling are provided and may be set from either
the front panel or by a process computer through the
accessory input. Setability of the plasma power is better than
±0.4% of the maximum rated power, and absolute accuracy
is better than ±1.5% of the maximum rated power.
To eliminate the need for an external impedance
matching network, each Plasmaloc generator includes an
internal variable seven-position step transformer, designed for
plasma impedances between 50 and
front panel plasma impedance control knob and observing the
increase in load power, an optimum match can easily be
achieved.
A high degree of operational reliability is assured through
the use of conservatively rated solid state components. ENI's
hybrid combining of power amplifier modules couples the
output of a number of transistors to achieve the total generator
By adjusting the
600 ohms.
Quality-... Rehab
a tions
PL-2HF Rear- Panel
RF OUTPUT CONNECTOR:
RACK MOUNTING:
provided;
kits optional.
PL2-01/PL3-01
COOLING SYSTEM:
operating temperature range of 0-45°C.
19" adaptors
rack mount slide
Forced air;
Type C
REAR PANEL CONTROLS
& INDICATORS:
Remote Start, Control Interface Connector,
I
nternal/External Power Adjust, Frequency
Counter (Type BNC)
RF Output (Type C),
FRONT PANEL CONTROLS
& INDICATORS:
Forward/Load Meter Switch, Power Level,
Remote On/Off, Overload/Push to Reset
AC On, Power Meter,
output, and effectively prevents a total loss of power. In the
event that any individual transistor should fail to operate, th
generator will continue to function at reduced power.
Advanced Protection
ENI Plasmaloc Generators are protected from damage
due to any external load impedance, from an open to a short
circuit. Protection is also provided from excessive internal
voltage and current conditions, as well as overheating due to
high ambient temperatures or lack of air cooling.
and service are facilitated by the use of plug-in modules, full
socketed transistors, and integrated
potentials normally associated with vacuum tube design
been completely eliminated. Both the integral power supply
and forced-air cooling system are conservatively rated to
permit operation over a wide range of temperatures and AC
line conditions. ENI Plasmaloc Generators may be mounted
a standard 19-inch relay rack or used as free-standing units.
circuits. The hazardous
Maintenani
havi
Extensive use of RFI/EMI filtering and/or shielding, as
well as the relatively low operating frequencies of the
generators, minimizes the possibility of RF interference
problems associated with plasma reactor pressure measuring,
flow controller, or computer circuits. High voltage regulators
eliminate spikes and noise present on industrial power lines,
and prevent interference from reaching the AC line.
Additional Options
Optional Plasmaloc accessories include the PC-1 and
PC-2 Plasma Convertors, which permit the simultaneous
combination of RF and DC power for maximum flexibility
and versatility. The optional LK-I External Transformer, for
use with the PL- I and PL-2, raises the maximum output
i
mpedance of the matched plasma load to
Each PL and PL-HF Generator is. backed by ENI's oneyear warranty and worldwide network of service and technica
support. Plasmaloc Series
commitment to provide versatile, reliable solid state RF
solutions for modem plasma applications.
Generators
135052.
represent ENI's ongoing
PC-1/PC-2 Plasma Convertors
The PC-1 and PC-2 Plasma Convertors are add-on networks which, when inserted between the output of any lowfrequency ENI plasma generator and any parallel plate plasma reactor, enable the simultaneous combination of radio
frequency and DC power for added flexibility. These units prevent the generator's output power from flowing back
into the external DC power supply, permitting the use of any laboratory DC power supply and eliminating the
possibility of interference with its regulatory circuitry.
The combination of radio frequency and DC voltage in the plasma chamber enhances the plasma sheath for
processes such as reactive ion etching. The PC-1 and PC-2 come complete with a five-foot output coaxial cable for
direct connection to the plasma chamber.
LK-1 External Transformer
The LK-1 External Transformer raises the maximum output impedance of the matched plasma load to 1350 ohms.
use with difficult-to-ionize gases and/or low pressures; for PL-1 and PL-2 only.
For
PL-201 Rack Mount Slide Kit
The PL-201 Rack Mount Slide Kit installs into a standard 19-inch rack and provides slide-out capability for the PL-2
and PL-2HF.
PL-301 Rack Mount Slide Kit
The PL-301 Rack Mount Slide Kit installs into a standard 19-inch rack and provides slide-out capability for the PL-3
and PL-3HF.
PL-202 Coaxial Cable
PL-202 RG-8/U Coaxial Cable is cut to length and fitted with Type C male connections between the generator and
the plasma reactor.
All specifications subject to change without notice. Printed in the USA 3/90
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