Atec ENI-PL User Manual

Versatile,

Low-Frequency

•

25-125kHz or 90-460kHz

Frequency Range

•

Forward & Load

R F Power

Sources For

Plasma

Applications

Power Leveling

•

Forced-Air Cooling

Solid State Reliability

•

•

Variable Frequency Control

•

Built-In

Matching Transformer



PL-2HF Front Panel

S-p-e-cifi

r

he Plasmaloc Series of RF Generators is designed to

1

.

provide dependable RF power for low-frequency

1

T

power leveling, variable frequency control, thermal and
mismatch protection, forced-air cooling, and fail-soft

capability, the Plasmaloc Series has set the standard for solid
state quality, versatility; and reliability.

plasma applications. Featuring forward and load

Versatile Operation

The Plasmaloc Series consists of six generators: three PL

models which cover the frequency range of 25-125kHz; and
three PL-HF models which cover the range of 90-460kHz.

The optimum frequency for a specific plasma reaction is

easily selected with the front panel variable frequency control.
Maximum forward power output ranges from 750 to 3,200

Watts, depending on the model. The front panel power meter
displays either the forward power leaving the generator or the
load power absorbed by the plasma.

FREQUENCY STABILITY:

0.1 % from 0° to 45° C ambient after 5-minute

warm-up.

POWER LEVELING:

(

Plasma), Switch Selectable

Forward or Load

PLASMA MATCHING:

7-position step transformer for plasma

i

mpedances between 50 and 600 ohms.

THERMAL PROTECTION:

automatic shutdown if transistors overheat
due to mismatch or cooling system failure.

Better than

Built-in variable

Provides

CONTROL INTERFACE:

Type D, 9-pin connector

RF OUTPUT IMPEDANCE:

50-600 ohms

Precise Power Control

Precise power control is provided by a sampling of the
output power, using a directional coupler. Both forward and
load power leveling are provided and may be set from either

the front panel or by a process computer through the
accessory input. Setability of the plasma power is better than
±0.4% of the maximum rated power, and absolute accuracy
is better than ±1.5% of the maximum rated power.

To eliminate the need for an external impedance
matching network, each Plasmaloc generator includes an
internal variable seven-position step transformer, designed for

plasma impedances between 50 and
front panel plasma impedance control knob and observing the
increase in load power, an optimum match can easily be
achieved.

A high degree of operational reliability is assured through
the use of conservatively rated solid state components. ENI's

hybrid combining of power amplifier modules couples the
output of a number of transistors to achieve the total generator

By adjusting the

600 ohms.

Quality-... Rehab