Read this manual before installing, operating, or servicing equipment. Do not install
substitute parts, or perform any unauthorized modification of the product. Return the
product to Sigma Instruments for service and repair to ensure that safety features are
maintained.
Safety Symbols
WARNING: Calls attention to a procedure, practice, or condition that could
possibly cause bodily injury or death.
CAUTION: Calls attention to a procedure, practice, or condition that could
possibly cause damage to equipment or permanent loss of data.
Refer to all manual Warning or Caution information before using this product
to avoid personal injury or equipment damage.
Hazardous voltages may be present.
Earth ground symbol.
Chassis ground symbol.
Equipotential ground symbol.
Warranty Information
Hardware Warranty: This Sigma Instruments product is warranted against defects in
material and workmanship for a period of 2 years from the date of shipment, when used
in accordance with the instructions in this manual. During the warranty period, Sigma
will, at its option, either repair or replace products that prove to be defective.
Software Warranty: Sigma Instruments warrants that the media on which this software
is supplied will be free from defects for a period of 90 days from the date of shipment.
Sigma Instruments does not warrant that 1) the software and any updates will be free
from defects, 2) the software will satisfy all of your requirements, 3) the use of the
software will be uninterrupted or error free.
Limitation of Warranty
Defects from, or repairs necessitated by, misuse or alteration of the product, or any
cause other than defective materials or workmanship are not covered by this warranty.
NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED, INCLUDING BUT NOT
LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS
FOR A PARTICULAR PURPOSE. UNDER NO CIRCUMSTANCES SHALL SIGMA
INSTRUMENTS BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES
RESULTING FROM A BREACH OF THIS LIMITED WARRANTY, OR OTHERWISE.
Return Policy
The purchaser may return this product in new condition within 30 days after shipment
for any reason. In case of return, purchaser is liable and responsible for all freight
charges in both directions.
Sigma Instruments
120 Commerce Drive, Unit 1
Fort Collins, CO 80524 USA
970-416-9660
970-416-9330 (fax)
Software License Agreement
Sigma Instruments grants to you, the Licensee, a non-exclusive license to use this
software on any computer, as long as only one copy is used at a time. Sigma
Instruments retains ownership of the software. Licensee may transfer the software to
another party, so long as the party agrees to accept the terms of this agreement.
Licensee may terminate this license by destroying all copies of the software.
The SQM-242 Card is a powerful Thin Film Deposition Controller on a PCI card.
Significant features include:
• Measure four 1MHz to 10MHz quartz crystal sensors simultaneously.
• Controls two deposition source supplies simultaneously (co-deposition).
• Install multiple cards for up to 24 sensors and 12 control outputs!
• Measure four +/- 10V analog inputs with optional (SAM-242) piggyback card.
• Installs in any PC running Windows 98/2000/ME/XP.
• Interfaces to your program with Windows DLL and Active X interfaces.
• Sample Visual Basic and LabView programs with source code are included.
˝˝SQM-242 Deposition Control Card
The sample SQM-242 CoDep software included with SQM-242 card allows you to:
• Co-deposit up to six materials, using up to eight sensors.
• Use analog inputs to control heaters, gas flow, and other process variables.
• Use outputs for recording rate, thickness, power, or voltage.
• Save film setup parameters and deposition data to disk.
• Simulate deposition for developing and testing film setups.
The optional SQS-242 software allows multi-layer deposition recipes, graphics, flexible
PLC-based digital I/O and RS-232/Ethernet external control.
1-1
Chapter 1Installation
1.1 SQM-242 Card Installation
Jumper each SQM-242 card before installation as shown below:
Card 1Card 2Card 3Card 4Card 5Card 6
JP5JP5JP5JP5JP5JP5
If you are installing a SAM-242 Analog piggyback card, it must be connected to Card 1.
Set the Card 1 jumper as shown below when the optional SAM-242 card is used.
Card 1 Jumper
with SAM-242 card installed.
JP5
The SAM-242 card can go on
either side of SQM-242 Card 1,
as long as the ribbon cable is
not twisted (red stripe on the top
or bottom of both cards).
Once each card is jumpered:
1. Turn off the computer, unplug the power cord, and remove the computer cover.
Card 1 with SAM-242
Ribbon Cable installed.
2. Locate an empty PCI slot and remove the screw holding the blank bracket for the
slot. Remove the blank bracket.
3. With the card’s gold contacts down, place it above the PCI slot with the BNC
connectors on the card extending through the back of the computer. Press down firmly
on the card to seat it into the connector. Repeat with each card.
4. Replace the screw at the top of the card bracket to secure the card. Replace the
cover on the computer and plug in the power cord.
1-2
Chapter 1Installation
1.2 SQM-242 Driver Installation
1. Turn on the computer and start Windows. Windows should find New Hardware and
prompt to Install Device Drivers.
2. If you are prompted for the location of the Device Drivers, insert the Sigma CD-ROM
and direct Windows to D:\SQM242 Card\Drivers (assuming D is your CD drive).
3. When driver installation is complete, you may be prompted to restart your computer.
4. Check the README file in the \SQM242 Card\Drivers folder of the Sigma CD-ROM
for additional steps that are specific to your version of Windows.
5. Verify that the card was installed properly in Device Manager. Right-click on My
Computer, then left-clicking on Properties. Click on the Device Manager tab (Hardware
tab in Windows 2000 or XP, then Device Manager). You should see Sigma Instruments
listed, with the SQM-242 cards in the sub folder.
If the card is not listed (or has a red x or yellow exclamation point), repeat the
installation procedures above carefully.
Note: Occasionally it may be necessary to completely uninstall and reinstall a card.
Highlight the improperly installed card in Device Manager and press <Delete>. Next,
run the “Clean” program in the \SQM242 Card\Drivers folder of the Sigma CD-ROM.
Reboot the computer, then follow the steps in this section carefully.
1.3 CoDep Software Installation
SQM-242 Card programs are also on the Sigma CD-ROM. Insert the CD-ROM, click
the Windows Start button, and then select Run. Enter D:\SQM242 Card\Setup.exe and
click OK.
Accept the default installation prompts. When installation completes, you may be
prompted to restart your computer.
To run the SQM-242 CoDep program, click Start, then Program, then Sigma
Instruments and select the SQM-242 CoDep program.
To verify the SQM-242 cards are properly installed, start SQM-242 CoDep. Select the
View menu, then Card Setup. If the card revision for each installed card is greater than
0.00, then it is installed properly.
Note: If the version is shown as 0.00, then reinstall the Windows drivers as explained in
section 1.2. Pay particular attention to any Windows version specific instructions in the
README file.
1-3
Chapter 1Installation
p
1.4 SQM-242 Card Connections
The control output and sensor input connectors to the SQM-242 card are shown below.
Refer to this drawing in the subsequent hookup instructions.
Sensor
932-000
Computer
In-Vac Cable
User Supplied
Control Cable
Evaporation
Power Supply
Control Input
Output
Chassis Ground
902-014
Feedthrough
930-000
10' BNC Cable
902-012
6" BNC Cable
902-011
Oscillator
900-010
Source
Shutter
Sensor Connections
Power Supply
A BNC cable connects the SQM-242 sensor input to the "instrument"
connector on the remote oscillator. The maximum length is 50 feet (15
meters).
To ensure proper operation of the SQM-242, use oscillators manufactured
Control Out
Sensor 1
Sensor 2
Sensor 3
Sensor 4
by Sigma Instruments [PN 900-010]. Oscillators made by Sycon and
Maxtek should also work. The SQM-242 will not work with Inficon
ModeLock oscillators.
The connection from the remote oscillator "feedthru" connector to the vacuum chamber
feedthrough is made using a short 6 inch (15 cm) cable with BNC male to female
connectors [PN 902-011]. Inside the vacuum chamber, your in-vac cable must be no
longer than 30 inches (75 cm). It connects from the feed-through to the crystal sensor.
Note: Sigma Instruments offers a Sensor Kit [PN 934-003 (single sensor) or 934-004
(dual sensor)] that includes crystals, oscillators, and all of the cables needed to
complete the SQM242 sensor inputs to crystal head connections.
uts
1-4
Chapter 1Installation
Output Connections
Note: If you are using the SQM-242 as a monitor only, no output connection is needed.
The SQM-242 output connection is via a ¼” Stereo Phone Jack. A standard ¼” Stereo
Phone Plug is shown below (with outer collar removed to show the contacts). Output 1
is on the ring, Output 2 is on the tip, and a common ground is on the sleeve.
Chan. 1 (Ring)
SLEEVE
Ground
(Sleeve)
Connect the SQM-242 output to your evaporation power supply, recorder, or other
equipment as described in the equipment’s User Manual.
CAUTION: Special care must be taken in connecting the SQM-242 card output to the
input connector of your equipment. Failure to understand and follow the equipment
manufacturer’s instructions can result in damage to the equipment and/or SQM-242
card.
Chan. 2 (Tip)
The SQM-242 output is 0 to ± 10 VDC. See section 3 of this manual for instructions on
setting the SQM-242 output Full Scale level to match your power supply. If your
equipment needs a 4-20 mA control signal, you must obtain a voltage-to-current
converter.
Ground Connection
The chassis of all control components should be tied to a common earth ground using a
low resistance cable. This is particularly important in high noise Ebeam systems.
1-5
Chapter 1Installation
1.5 SAM-242 Card Connections
The input and output and connectors on the SAM-242 card are identical to those on the
SQM-242 card.
Input Connections
BNC cables connect the SAM-242 input to the signals to be measured. The SAM-242
accepts input voltages within +/- 10VDC.
CAUTION: The BNC connector shield of each SAM-242 input is connected to a common
analog ground. Input signals to the SAM-242 must be within +/-10V DC and share a
common ground. Failure to observe this constraint can result in damage to your
equipment and/or the SAM-242 card,
Output Connection
The SAM-242 outputs are identical to the SQM-242. See the previous section for
hookup instructions.
1.6 Digital I/O
The SQM-242 card and SQM-242 CoDep software do not support the digital I/O
required to automatically open and close shutters, rotate source pockets, etc.
Sigma's optional SQS-242 CoDeposition software adds this capability to the SQM-242
card. Using an inexpensive PLC, the SQS-242 software provides virtually unlimited
digital I/O capabilities.
Contact Sigma Instruments for more information on interfacing the SQM-242 card to
your system's digital I/O.
1-6
Chapter 2SQM-242 CoDep
2.0 Introduction
The SQM-242 CoDep program illustrates most of the capabilities of the SQM-242 card.
It is intended as a learning tool for new users, and a programming example for
interfacing to user applications. However, it is also a deceptively powerful, deposition
monitor and controller.
2.1 Main Screen
With no cards installed (or with two SQM-242 cards and an SAM-242 card installed) you
will see the display below. The number of “output frames” shown on the display will
change depending on the number of cards installed in your system. For example, with
only one SQM-242 card installed, the main display shows only two output frames.
Each output frame corresponds to a physical output on an SQM-242 card. On the
screen above, the first three outputs are each configured to use quartz sensors to
measure rate and thickness.
The frame labeled “Gas Flow” is a little different. This output uses an analog input on
the SAM-242 card to control backfill gas. The SAM-242 card can use any analog
voltage for control. More about this feature later.
Output A1 above is turned off, while Output A2 is used as a recorder output.
The output labels are easily edited to provide descriptive names. Displays within in
each output frame will change, depending on the function of that output.
2-1
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