Shimadzu TMP-3203MC, TMP-3203LM, TMP-3403LMC, TMP-3203M, TMP-3203LMC Instruction Manual

263-13236E

Magnetically Levitated Turbo Molecular Pump

Model:TMP-3203M （Air cooled type）
Model:TMP-3203MC （Air cooled chemical type）
Model:TMP-3203LM （Wide range type）
Model:TMP-3203LMC （Wide range chemical type）
Model:TMP-3403LMC （Wide range chemical type）

INSTRUCTION MANUAL

Read the instruction manual thoroughly before you use the product.

Keep this instruction manual for future reference.

Semiconductor Equipment Division

Introduction

Thank you for choosing the turbo molecular pump made by Shimadzu Corporation.

(hereafter referred to as "turbo molecular pump").

Please read the instruction manual carefully in conjuction with the instruction manual of

"Power Supply Unit" before using turbo molecular pump, and save the instruction manual for

future reference.

Copyrights and Disclaimers

This document is copyrighted by Shimadzu Corporation. Please refrain from reproducing

or copying part or all of this document without permission from Shimadzu.

In an effort to improve the product, this document may be revised in the future without

notice.

Every effort has been made to prepare an accurate and complete manual, but if an error

or omission should be discovered, revisions might not be possible immediately.

Shimadzu does not take responsibility for any effects that may result from the use of this

manual.

Copyright 2003-2006 Shimadzu Corporation.All rights reserved.

©

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

i

Precautions for Safe Operation

The instruction manual's nomenclature for warnings and precautions complies with

the following safety warning symbols.

WARNING

CAUTION

NOTICE

Indicates a potentially hazardous situation whitch, if not avoided, could result

in serious injuly or possibly death.

Indicates a potentially hazardous situation whitch, if not avoided, may result in

minor to moderate injuly or equipment damage.

Emphasizes additional information that is provided to ensure the proper use of

this product.

WARNING

Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by Shimadzu may do service of
products.

WARNING

Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper.

WARNING

Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary.The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.

ii

263-13236

WARNING

・Fix the pump to the device according to 5.1.2.1 and 5.1.2.2. The method to fix the pump is

different depending on the pump model and the size of inlet flange of the pump.

・The device should be fixed to the floor so as not to move. The device should be designed to

endure the torque 1.5 times the rapid shutdown torque to take the safety margin in
preparation for an emergency accident.

・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown

torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.

WARNING

Do not remove the turbo molecular pump, before safety has been confirmed.

Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by Shimadzu. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular pump
with an inert gas and/or apparel are recommended when the turbo molecular pump has been
used in applications that required the use of corrosive, reactive, stimulative, or toxic gases.

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

iii

CAUTION

After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid erosion trouble of the pump internals.

CAUTION

Avoid to install the pump at the following places.

(1) Place where the pump is inevitably exposed to significant vibration and impact.

(2) Unstable place.

(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.

The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation.This pump is not connected to grand. Please provide
PE(Protective earth) connection to the chassis of pump in final application.

CAUTION

The following "CAUTIONS" are to prevent operation anomalies.

1.This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).

2.Protect the pump from any and all types of impact during operation.

3.Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces electro­magnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecular
pumping system (pump, power supply, cables, etc).

4.Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.

5.Do not connect or disconnect the turbo molecular pump control cable during the time the
power supply is "ON".

6.Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or fluorine.

7.Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.

8.When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.

iv

263-13236

○ Explanation of label

CAUTION

！

HOT SURFACE

Risk of burn. Avoid contact.

やけどのおそれがあります。 触らないで下さい。

高温注意

警　　告

ポンプが装置から外れ，人体を傷つける
恐れがあります。取扱説明書に従い確実
にポンプを固定してください。

WARNING

CAN CAUSE INJURY BY DROPED
PUMP, INSTALL PUMP SECURELY
ACCORDING TO INSTRUCTION
MANUAL.

263-16180

(1) HOT SURFACE label

Risk of burn. Keep off from touching surface of the

pump as it is heated.

(2) INSTALL PUMP label

Incidental accident will cause the pump to drop
out and to make a catastrophe if the pump is fixed
by insufficient method.

Fix the pump to the device according to 5.1.2　

「Installation of the Pump」.

(3) SECURITY seal

This label certificates that the product was made

or maintenanced by Shimadzu or by Shimadzu
authorized facility .

In case "this label is removed" or "there is a mark
　　　　　　　　　　　　　　　　　　　 showing once this label has been removed",
　　　　　　　　　　　　　　　　 　 Shimadzu warranty shall not be applied to the

　　　　　　　　　　　　　　 product.

○ Location of label

(1)

(3)

(2), (3)

(2)

(2)

(1)

(1)

(1)

Series of TMP-3203 and TMP-3403LMC

Label attachment phase

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

v

○ Installation Precautions

Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.

Abnormal loads may cause cable disconnection.

(1) Do not pull the turbo molecular pump control cable by the connector or plug.

(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.

240mm

(3) Do not twist the turbo molecular pump control cable during connection.

○ Part Replacement

The lifetime of parts are specified as below.

The request for changing parts exceeding the estimated lifetime should be made to Shimadzu
or an approved service company in order for safety and adequate performance of the pump and
power supply unit.

Tabl e 1　Estimated Part Life.

vi

263-13236

Parts List

Cooling fan 5 years

Estimated Part Life

○ Air Cooled Turbo Molecular Pump

For the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodically
because of the cooling fan collecting dust, debris, etc. Shimadzu recommends removal of the
cooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaning
debris, from accumulating in or on the turbo molecular pump. Please refer to Fig. 1 how to
change fan.

COOLING UNIT

FLOW

CONNECTOR

SCREW

PUMP

Pump model Parts name Parts Number
TMP-3203M

TMP-3203MC

Cooling unit

DV24V

262-76043-01

Fig. 1　How to Change the Cooling Fan Unit

○ Warranty period

12 months on new TMP's from the date of shipment from Shimadzu, or from any of its

worldwide sales offices.

○ Conditional warranty

During the warranty period and under normal operation, if the TMP fails to meet its product
specification due to defects in material and/or workmanship, Shimadzu will, at its discretion,
either repair it or exchange it with a new one for free.

○ Scope of the warranty

The warranty covers only TMPs, controllers and accessories sold by Shimadzu.

○ Warranty of repaired or replacement parts

In-warranty repaired or replacement parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the parts that have been repaired or replaced.

○ Exemption from the warranty

During the warranty period, Shimadzu will charge for repair or exchange in the following cases:

1) Failure caused by natural disasters or fire.

2) Failure or functional deterioration due to the following:
a) Pumping of special gases and materials
b) Ingestion of foreign objects through the TMP's protective net
c) TMP is operated differently than what is prescribed in the instruction manual

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

vii

d) When Shimadzu determines through failure analysis that the cause of failure was due to

abnormal operation or external circumstances. our engineers judge that the cause of the
trouble is an irregular operation

3) Warranty is voided if the "Security Seal" on the product has been removed, hampered with,
or altered.

○ Disposal of Products and Parts

Please contact Shimadzu for proper disposal of its products or parts. There is a possibility to
pollute the environment with the material of the parts, when you dispose this product in an inap­propriate way.

○ LIMITATION OF LIABILITY

EXCEPT AS STATED HEREIN, SHIMADZU MAKES NO WARRANTY, EXPRESSED OR

IMPLIED (EITHER IN FACT OR BY OPERATION OF LAW), STATUTORY OR OTHERWISE:
AND, EXCEPT AS STATED HEREIN, SHIMADZU SHALL HAVE NO LIABILITY FOR
SPECIAL OR CONSEQUENTIAL DAMAGES OF ANY KIND OR FROM ANY CAUSE ARISING
OUT OF THE SALE, INSTALLATION, OR USE OF ANY OF ITS PRODUCTS.

viii

263-13236

TABLE OF CONTENTS

Introduction

Copyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i

Precautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii

○ Explanation of label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v

○ Location of label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v

○ Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi

○ Part Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi

○ Air Cooled Turbo Molecular Pump. . . . . . . . . . . . . . . . . . . . . . . . vii

○ Warranty period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

Table of contents

○ Conditional warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

○ Scope of the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

○ Warranty of repaired or replacement parts . . . . . . . . . . . . . . . . . vii

○ Exemption from the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

○ Disposal of Products and Parts . . . . . . . . . . . . . . . . . . . . . . . . . viii

○ LIMITATION OF LIABILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . viii

TABLE OF CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix

Section 1 OUTLINE AND DESCRIPTIONS

1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2

1.2 Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.2.1 Outside drawing of Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . 3

1.2.1.1 Outside drawing of series of TMP-3203 . . . . . . . . . . . . . . . 3

1.2.1.2 Outside drawing of TMP-3403LMC . . . . . . . . . . . . . . . . . . 5

1.2.2 Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

Section 2 IDENTIFICATION AND FUNCTION

2.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

ix

Table of contents

Section 3 CONSTRUCTION AND PRINCIPLE

3.1 Pump Construction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

3.2 Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . 10

Section 4 SPECIFICATIONS

4.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.1.1 Specification of series of TMP-3203 . . . . . . . . . . . . . . . . . . . . . . . 14

4.1.2 Specification of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

4.2 Standards Fulfilled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Section 5 INSTALLATION

5.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

5.1.1 Pump Mounting Direction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

5.1.2 Installation of the Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.1.2.1 Installation of series of TMP-3203 . . . . . . . . . . . . . . . . . . 21

5.1.2.2 Installation of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . . 23

5.1.3 Example of piping connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.1.4 Center of gravity of the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

5.2 Connection of the Pump to the Power Supply Unit . . . . . . . . 26

5.3 Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . 27

Section 6 OPERATION

6.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

6.1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

6.2 Start-up Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.2.1 Start-up Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.3 Start-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.3.1 Start-up Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

6.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

6.5 Baking Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

x

263-13236

Table of contents

Section 7 GAS PURGE

Section 8 TURBO MOLECULAR PUMP RECONDITION

8.1 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . 40

8.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . 41

8.3 Touch-Down Bearing Replacement . . . . . . . . . . . . . . . . . . . . 41

8.4 Check of the rotor blades. . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

Section 9 TROUBLESHOOTING

9.1 Vacuum Pressure Rise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

9.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . 44

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

xi

Table of contents

This page is intentionally left blank.

xii

263-13236

1OUTLINE AND

DESCRIPTIONS

1

1.1　Outline

1.2　Descriptions

1.2.1　Outside drawing of Pump Main Unit

　1.2.1.1　Outside drawing of series of TMP-3203

　1.2.1.2　Outside drawing of TMP-3403LMC

1.2.2　Standard Accessories

SECTION 1　OUTLINE AND DESCRIPTIONS

1

1.1 Outline

The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a

backing vacuum pump to create a high vacuum in a vacuum chamber.

Typical Applications ; Semiconductor equipments,

Industrial equipments,
R&D applications,
The other ultra high vacuum applications.

The turbo molecular pump (one standard set) consists of the following items.

・Pump 1
・Power Supply Unit 1
・Control Cable 1
・Motor Cable 1
・Standard Accessories 1 Set

This instruction manual explains the operation of the pump unit. For more detailed instructions

regarding the power supply unit, please refer to the Power Supply Unit Instruction Manual.

2

263-13236

1.2　Descriptions

1.2 Descriptions

1.2.1 Outside drawing of Pump Main Unit

1.2.1.1 Outside drawing of series of TMP-3203

1

INLET

FLANGE

VG350 P/N 262-78430-62 P/N 262-78430-72 287 294 289 375 420 22

ISO320B

Special

VG300 P/N 262-78430-67 P/N 262-78430-77 307 314 309 395 440 18.5

VG250 P/N 262-78430-68 P/N 262-78430-78 331 338 333 419 464 18.5

TMP-3203M TMP-3203MC

P/N 262-78430-63 P/N 262-78430-73 287 294 289 375 420 22.5

Parts number

Fig.1-1

ABCEF G φH φJn-φd

　TMP-3203M and TMP-3203MC

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

φ450 φ420 12-φ15

φ425 φ395 12-φ13

φ400 φ370 12-φ13
φ350 φ320 12-φ13

3

SECTION 1　OUTLINE AND DESCRIPTIONS

1

INLET

FLANGE

VG350 P/N 262-78430-42 P/N 262-78430-52 287 294 289 270 375 420 22

ISO320B

Special

VG300 P/N 262-78430-47 P/N 262-78430-57 307 314 309 290 375 440 18.5

VG250 P/N 262-78430-48 P/N 262-78430-58 331 338 333 314 419 464 18.5

TMP-3203LM TMP-3203LMC

P/N 262-78430-43 P/N 262-78430-53 287 294 289 270 375 420 22.5

Parts number

ABCDEF G

Fig.1-2　TMP-3203LM and TMP-3203LMC

φH φJ

φ450 φ420 12-φ15

φ425 φ395 12-φ13

φ400 φ370 12-φ13
φ350 φ320 12-φ13

n-φd

4

263-13236

1.2.1.2 Outside drawing of TMP-3403LMC

1.2　Descriptions

1

F

INLET

FLANGE

VG350 P/N 262-78503-52 287 294 270 375 420 22

ISO320B

Special

VG300 P/N 262-78503-57 307 314 290 395 440 18.5

VG250 P/N 262-78503-58 331 338 314 419 464 18.5

Parts number ABCDE F

P/N 262-78503-53 287 294 270 375 420 22.5

Fig.1-3

　TMP-3403LMC

φG

φ450

φ425

φ400

φ350

K

φHn-φd

360

φ420 12-φ15

360

φ395 12-φ13

380

φ370 12-φ13

404

φ320 12-φ13

Magnetically Levitated Turbo Molecular Pump

INSTRUCTION MANUAL

5

SECTION 1　OUTLINE AND DESCRIPTIONS

1.2.2 Standard Accessories

1

Series of TMP-3203

Description Q'ty Notes Parts number

O-ring gasket for VG350

Gasket for inlet flange

1

(Note)

Bolt set for inlet flange

2

(Note)

3 Centering with O-ring 1
4Clamp 1
5 Instruction manual 1 English

1

1

O-ring gasket for VG300
O-ring gasket for ISO320B Special
O-ring gasket for VG250

VG350：Hex Head, M12 × 40, 12PC
(A2-70)

VG300：Hex Head, M12 × 35, 12PC
(12.9)

ISO320B Special： Hex Head,
M12 × 40, 12PC (12.9)
VG250：Stud Bolt, M12 × 47, 12PC

(12.9)
KF40
KF40

036-13516
036-13515
036-15554-55
036-13514

─

035-06004-14
035-06004-03
263-13236

TMP-3403LMC

Description Q'ty Notes Parts number

O-ring gasket for VG350

Gasket for inlet flange

1

(Note)

Bolt set for inlet flange

2

(Note)

3 Centering with O-ring 1
4Clamp 1

5 Instruction manual 1 English

(Note) One of followings.

1

1

O-ring gasket for VG300
O-ring gasket for ISO320B Special
O-ring gasket for VG250

VG350：Hex Head, M12 × 40, 12PC
　　　　(12.9)
VG300：Hex Head, M12 × 35, 12PC
　　　　(12.9)
ISO320B Special： Hex Head,
M12 × 40, 12PC (12.9)
VG250：Stud Bolt, M12 × 47, 12PC
　　　　(12.9)

KF40
KF40

036-13516
036-13515
036-15554-55
036-13514

─

035-06004-14
035-06004-03

263-13236

6

263-13236