Pfeiffer Hipace 300 M User Manual

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OPERATING INSTRUCTIONS

HIPACE 300 M

Turbopump

Translation of the original instructions

PT 0330 BEN/E (1711)

Table of contents

1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.1 Safety instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.3 Instructions in the text . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.4 Abbreviations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

1.2.5 Symbols used . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.1 Pump types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.2 Pump features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.1.3 Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.1 Cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.2 Rotor bearing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.2.3 Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

5.1 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2.1 Earthquake safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

5.2.2 Use of a splinter shield or protection screen . . . . . . . . . . . . . . . . . 14

5.2.3 Vibration damper . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.3 Mounting orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

5.4 Connecting the high vacuum side. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

5.4.1 Installation of ISO-K flange with ISO-K flange . . . . . . . . . . . . . . . 16

5.4.2 Installation of ISO-K flange with ISO-F flange. . . . . . . . . . . . . . . . 17

5.4.3 Installation of ISO-F with ISO-F flange . . . . . . . . . . . . . . . . . . . . . 18

5.4.4 Installation of CF- flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.5 Connecting the fore-vacuum side . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

5.6 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.1 Electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.2 Earthing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.6.3 Power and electrical supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

5.7 Accessory connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

5.7.1 Venting valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

5.7.2 Air cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

5.7.3 Sealing gas connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.7.4 Heating jacket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

5.7.5 Water cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

Table of contents

6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.1.1 Magnetic bearing calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.1 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.2 Operation with DCU or HPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.3.3 Operation via fieldbus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4.1 Temperature monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

6.4.2 Operation display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.4.3 Safety bearing stress . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.4.4 Balance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.1 Switching off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.2 Electrical brake . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.3 Emergency power supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

6.5.4 Venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 31

7.2 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

7.2.1 Magnetic bearing calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

7.2.2 Rotation speed set value. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

11 Spare parts HiPace 300 M. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36

12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.2 Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39

13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

About this manual

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.

Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacuum.com.

1.1.1 Applicable documents

HiPace 300 M, depending on the model Operating instructions

Operating instructions "Electronic drive unit TM 700", standard PT 0329 BN* Operating instructions "Electronic drive unit TM 700 PB", Profibus PT 0354 BN* Operating instructions "Electronic drive unit TM 700 E74", acc. Semi E74 PT 0355 BN* Operating instructions "Electronic drive unit TM 700 DN", DeviceNet PT 0356 BN* Operating instructions "Electronic drive unit TM 700 EC", EtherCAT PT 0503 BN* Declaration of conformity Part of this document

*also available via www.pfeiffer-vacuum.com

1.2 Conventions

1.2.1 Safety instructions

The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:

DANGER

Imminent danger

Indicates an imminent hazardous situation that will result in death or serious injury.

WARNING

Possibly imminent danger

Indicates an imminent hazardous situation that can result in death or serious injury.

CAUTION

Possibly imminent danger

Indicates an imminent hazardous situation that can result in minor or moderate injury.

NOTICE

Command or note

Command to perform an action or information about properties, the disregarding of which may result in damage to the product.

1.2.2 Pictographs

1.2.3 Instructions in the text

About this manual

Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents

Warning of a displayed source of danger in connection with operation of the unit or equipment

Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents

Important information about the product or this document

1.2.4 Abbreviations

1.2.5 Symbols used

 Work instruction: here you have to do something.

DCU: Display Control Unit HPU: Handheld Programming Unit TM: Electronic drive unit and magnetic bearing controller for turbopump TPS: Mains pack

The following symbols are used consistently throughout the diagrams:

High vacuum flange

Fore-vacuum flange

Vacuum flange of the backing pump

Exhaust flange of the backing pump

Electrical connection

Sealing gas connection

Venting connection

Cooling water connection

Safety

2Safety

2.1 Safety precautions

Duty to inform

Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.

 The operator is obligated to make operating personnel aware of dangers originating

from the vacuum pump, the pumped medium and the entire system.

Installation and operation of accessories

Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

 For information on order numbers of components, see "Accessories".  Use original accessory parts only.

Checking the safety system against excess rotation speed

To provide the functioning of the integrated safety system for avoiding excess rotation speed, the pump must run-up from the standstill at least once a year.

 Switch off the pump and await the complete standstill (rotation speed = 0 Hz).  Run-up the pump according to this operating instructions.

NOTICE

WARNING

Danger of unsafe electrical installation

Safe operation after installation is the responsibility of the operator.

 Do not independently modify or change the pump and electrical equipment.  Make sure that the system is integrated in an emergency off safety circuit.  Consult Pfeiffer Vacuum for special requirements.

WARNING

Danger due to lack of power disconnection device

Pump and electronic drive unit are not equipped with a power disconnection device. Installation of a user-supplied power disconnection device in accordance with SEMI-S2.

 Fit a circuit breaker with an interruption rating of min. 10,000 A.

WARNING

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so that you can disconnect it at

any time.

● Do not expose any body parts to the vacuum.

● Observe all safety and accident prevention regulations.

● Regularly check the proper observance of all safety measures.

● Power supply: The turbopump power supply must apply to the requirements of dou-

ble insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.

● A safe connection to the protective earthing conductor (PE) is recommended (protection class III).

● Do not loosen any plug connection during operations.

● Wait for the rotor to reach standstill before peforming work on the high vacuum flange.

● Keep leads and cables well away from hot surfaces (> 70 °C).

● Never fill or operate turbopump with cleaning agent.

● Do not operate the turbopump with open high vacuum flange.

● Do not carry out any unauthorized modifications or conversions to the pump.

● When returning the turbopump observe the shipping instructions.

2.2 Protective equipment

Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment. The owner, respectively the employer are obligated to provide an adequate equipment to any operating persons.

Danger to health by hazardous substances during maintenance or installation

Depending on the process vacuum pumps, components or operating fluids can be contaminated by toxic, reactive or radioactive substances.

 Wear adequate protective equipment during maintenance and repairs or in case of

reinstallation.

Safety

DANGER

WARNING

Risk of injury through falling objects

When transporting vacuum pumps by hand, there is a danger through loads slipping and falling down.

 Carry small and mid-size vacuum pumps two-handed.  Carry vacuum pumps > 20 kg by a suitable lifting device.  Wear safety shoes with steel toe cap according to directive EN 347.

CAUTION

Risk of injury through hot surfaces

Vacuum pumps can become hot during operation.

 Allow the pump to cool before maintenance and repairs.  If necessary wear protective gloves according to EN 420.

CAUTION

Risk of injury through sharp edges

Rotor and stator disks of turbopumps have very sharp edges.

 Before any working wait for the complete standstill of the pump.  Do not reach in the high vacuum flange.  If necessary wear protective gloves according to EN 420.

2.3 Proper use

NOTICE

EC conformity

The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.

 Following installation into a plant and before commissioning, the operator must check

the entire system for compliance with the valid EU directives and reassess it accordingly.

Safety

warranty seal

2.4 Improper use

● The vacuum pump may only be used to generate a vacuum.

● Only operate the turbopump with an approved backing pump.

Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially:

● installation of the pump with unspecified mounting material

● pumping of corrosive or explosive media

● pumping of condensing vapors

● pumping of liquids

● pumping of dusts

● operation with improper high gas throughput

● operation with improper high fore-vacuum pressures

● operation with improper gas mode

● operation with improper high levels of insulated heat input

● operation in improper high magnetic fields

● venting with improper high venting rates

● use of the vacuum pump to generate pressure

● operation of the devices in areas with ionizing radiation

● operation in potentially explosive areas

● use of the devices in systems in which impact-like stress and vibrations or periodic

forces affect the devices

● use of accessories or spare parts, which are not named in this manual

Closure seal

The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.

 Do not open the product within its warranty period!  For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-

um Service.

3 Transport and storage

3.1 Transport

 Reuse the transport container of the vacuum pump.

– Transport or ship vacuum pumps in the original packing preferably.

 Only remove the protective covers from the high vacuum and the fore-vacuum side

immediately before connection.

 Keep the original protective covers.  Always transport the turbopump in its upright position.

3.2 Storage

 Close the flange openings by using the original protective covers.  Close further connection ports by using the corresponding protective covers.  Store the pump only indoors at temperatures between -25 °C and +55 °C.  In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-

wrapped in a plastic bag together with a bag of desiccant.

Transport and storage

Product description

4 Product description

4.1 Product identification

4.1.1 Pump types

The product designation consists of a family designation (1), the size (2), which is oriented on the pumping speed, and if applicable the additional properties (3) of the pump.

(1)

HiPace

300

(2)M(3)

1. Family designation 2. Model designation 3. Property designation

HiPace 300 = Model designation of

the pump related to its pumping speed class

none = Standard version U = Upside-down installation orientation C = Corrosive gas version P = Process M = Active magnetic bearing T = Temperature management system E = High Efficiency H = High Compression I = Ion implantation

4.1.2 Pump features

4.1.3 Scope of delivery

Characteristics HiPace 300 M

HV flange DN 100 ISO-K DN 100 ISO-F DN 100 CF-F

Flange material Aluminium Aluminium Stainless steel

To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.

D-35614 Asslar

Mod.:

HiPace 300 DN 100 ISO-K, 3P

M.-No.:

PM P03 900

Ser. -No.:

Fig. 1: Example for a rating plate

---

Oil:

S(N

260 l/s

6000 0 1/min, 1000 Hz

n,f:

6.7 kg

Weig ht:

Made in Germany

● HiPace 300 M with TM 700 and 48 V DC

● Venting valve PM Z01 291

● Protective cover for the high vacuum flange and the fore-vacuum flange

● Operating instructions

4.2 Function

23 833 81 15.5

244

Product description

The turbopump HiPace 300 M forms a complete unit together with the electronic drive and magnetic bearing unit TM 700 (in the following just: "electronic drive unit"). For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS, OPS or DCU).

4.2.1 Cooling

4.2.2 Rotor bearing

Fig. 2: View of HiPace 300 M with TM 700

3 Pump lower part 3e Earthing connection 4 Pump casing

5 Intermediate piece

15.5 Cooling water connection 23 Electronic drive unit TM 700

24 Venting valve 81 Sealing gas connection 83 Fore-vacuum connection

● Water cooling

● Convection cooling

● Air cooling (optional)

In the case of excess temperature the electronic drive unit reduces the drive power automatically. Depending on the application and the HiPace different cooling variants are selectable.

Active-magnetic bearing turbopump

● High vacuum side: electromagnetic radial bearings

● Fore-vacuum side: electromagnetic radial and axial bearings

Active magnetic bearings offer largely wear-free operation and permit lubricant-free vacuum processes. Dry-running safety bearings are installed to avoid contact between the rotor and stator.

4.2.3 Drive

Electronic drive unit TM 700

Product description

4.3 Range of application

The pump HiPace 300 M must be installed and operated under the following ambient conditions:

Installation location weather protected (indoors) Protection category IP 54 Protection class III Ambient temperature +5 °C to +30 °C with convection cooling without gas throughput

Relative humidity max. 80 %, at T  31 °C, up to max. 50 % at T  40 °C Atmospheric pressure 750 hPa - 1060 hPa Installation altitude 5000 m max. Degree of pollution 2 Permissible surr. magnetic field 5 mT Overvoltage category II Connection voltage TM 700 48 V DC

Remarks to ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible fore-vacuum pressure or at maximum gas throughput depending on the cooling method. The turbopump is intrinsically safe by a redundant temperature monitoring.

● By reducing the fore-vacuum pressure or gas throughput, the turbopump can be operated at higher ambient temperatures.

● If the maximum permissible operating temperature of the turbopump is exceeded, the electronic drive unit reduces drive power first and switches off then, if necessary.

+5 °C to +35 °C with air cooling +5 °C to +40 °C with water cooling

5 Installation

Installation

WARNING

Danger to life by the turbopump ripping off in case of malfunctions

Rapid shutdown of the rotor generates destructive torques in case of burst up to

3000 Nm according to ISO 27892. If it is not properly fixed, the turbopump rips off. The

energy released thereby can throw the entire pump or pieces from its interior through the room. There is a danger of severest, possibly fatal, injuries as well as serious property damage.

 Carefully follow the installation instructions in this handbook.  Only use approved original parts from Pfeiffer Vacuum (Accessories) for the installa-

tion.

Installation and operation of accessories

 For information on order numbers of components, see "Accessories".  Use original accessory parts only.

5.1 Preparatory work

When installing the pump, observe the following conditions:

● the ambient conditions specified for the range of application

● When using a casing heating and a water cooling unit the temperature of the connect-

ed flange of the vacuum chamber must not exceed 120 °C.

● It is not allowed to operate the device in systems where impact-like stresses and vibrations or periodically forces occur.

 Ensure sufficient cooling for the turbopump.  Where magnetic fields > 5 mT are involved, a suitable shielding must be used. Check

installation location and consult Pfeiffer Vacuum if needed!

 The maximum permissible rotor temperature for the turbopump is 110 °C. If high tem-

peratures arise for process reasons, the radiated heat input must not exceed 2.4 W. Install suitable screening sheets, if necessary (design information on request).

5.2 Set-up

Danger due to external vibrations

External pump vibrations may cause magnet bearing overload and therefore safety bearing stress.

 Avoid lateral and tilting pump movements.  Configure the system appropriately to compensate for external vibration, e.g. due to

high-vacuum valves.

 Secure the vacuum chamber provided by the customer against moving and tilting.

NOTICE

5.2.1 Earthquake safety

● Ensure the greatest possible cleanliness when installing any high vacuum parts. Unclean components prolong the pump-down time.

● All flange components must be grease-free, dust-free and dry at installation.

An earthquake can result in contact with the safety bearings. All forces occuring hereby are safely absorbed by the properly installed flange connections.

Installation

 Secure the vacuum chamber against shifting and tipping on customers side.

VACUUM CHAMBER

Fig. 3: Example: How to secure against shifting and tipping by external tremors

= Safety connection, implementation each by the customer

5.2.2 Use of a splinter shield or protection screen

Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vacuum flange protect the turbopump against foreign bodies coming from the chamber. Thus, the pumping speed of the pump is reduced.

Reduced pumping speed in %

Splinter shield DN 100 4 7 20 22

Protection screen DN 100 1 2 6 6

5.2.3 Vibration damper

Danger from the turbopump and vibration damper being torn-off

In case of sudden blocking of the rotor, an applied vibration damper cannot compensate any of the occurring forces. There is a danger of the turbopump being torn-off and thereby resulting severest injuries and property damages. Applicable safeguards must be taken to compensate possible occurring torques.

 Definitely consult with Pfeiffer Vacuum.  Do not exceed the max. permissible temperature at the vibration damper (100 °C).

He N

WARNING

5.3 Mounting orientation

25° max

When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for installation in any orientation.

 Support pipes in front of the vacuum pump or remove them. No force from the pipe

system may be exerted on the fixed pump.

 To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps

the fore-vacuum flange should always point vertically downward (± 25°).

Fig. 4: Recommended orientation of the fore-vacuum flange

The maximum axial loading capacity of the high vacuum flange is 500 N (equals 50 kg). A one-sided load on the high vacuum flange is not permitted.

Installation

5.4 Connecting the high vacuum side

If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must be absorbed. Only the components listed in the following can be used to fasten the turbopumps to the high vacuum flange. The installation elements for turbopumps are special designs by Pfeiffer Vacuum. In all operating conditions, the tensile strength of the flange material must be at least 170 N/mm

 Secure the vacuum chamber against shifting and tipping on customers side.

Danger to life - impermissible fastening

Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the fastening of pumps on a vacuum chamber with different flange variants.

 Use only the correct mounting kit from Pfeiffer Vacuum.  Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis-

sible fastening.

Observe shape tolerances for the counter flange

Unevennesses of the customer supplied counter flange can lead to warping of the pump casing despite proper fastening. Leakiness and negative running characteristics can be the result.

 Do not exceed an evenness of max. 0.05 mm for the whole surface.

DANGER

NOTICE

Mounting of ISO flanges

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.

● The tightness of the high vacuum flange is not at risk thereby.

5.4.1 Installation of ISO-K flange with ISO-K flange

For the installation the following components are exclusively authorized:

● the valid mounting kit of the Pfeiffer Vacuum accessories programme

● mounting materials including protection screen or splinter shield are optionally avail-

able

 Mind that the sealing surfaces are not damaged.

 Connect the flanges according to the drawing and with the component parts of the

mounting kit.

 Use the required number of 10 claw clamps.

 Tighten the claw clamps crosswise in three steps.  Tightening torque: 5, 15, 25 ±2 Nm

5.4.2 Installation of ISO-K flange with ISO-F flange

1.5xd

2.5xd

The connection types for installation of ISO-K to ISO-F flange are "hex screw and threaded hole," "stud screw and threaded hole," and "stud screw and through hole".

For the installation the following components are exclusively authorized:

● the valid mounting kit of the Pfeiffer Vacuum accessories programme

● mounting materials including protection screen or splinter shield are optionally avail-

able

Hexagon screw and threaded hole

 Mind that the sealing surfaces are not damaged.

 Put the collar flange over the high vacuum flange of the turbopump.  Insert the retaining ring into the groove of the high vacuum flange.  Fasten the turbo pump with collar flange and centering ring to the counter flange as

shown in the graphic.

 Use the required number of 8 hex screws with washer.

 Screw hex screws 1.5 x d into the threaded holes.

– The tensile strength of the flange material must be at least 270 N/mm

ating conditions.

 Tighten the hex screws crosswise in three steps.  Tightening torque DN 100: 5, 10, 16 ± 1 Nm

Installation

in all oper-

Stud screw and threaded hole

 Mind that the sealing surfaces are not damaged.

 Use the required number of 8 stud screws and nuts.

 Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on

the counter flange.

shown in the graphic.

 Tighten the nuts crosswise in three steps.  Tightening torque DN 100: 5, 10, 16 ± 1 Nm

Stud screw and through hole

 Mind that the sealing surfaces are not damaged.

shown in the graphic.

 Use the required number of 8 stud screws and nuts.

 Tighten the nuts crosswise in three steps.  Tightening torque DN 100: 5, 10, 16 ± 1 Nm

Installation

1.5xd

2.5xd

5.4.3 Installation of ISO-F with ISO-F flange

The connection types for installation of ISO-F to ISO-F flange are "hex screw and threaded hole," "stud screw and threaded hole," and "stud screw and through hole".

For the installation the following components are exclusively authorized:

● the valid mounting kit of the Pfeiffer Vacuum accessories programme

● mounting materials including protection screen or splinter shield are optionally avail-

able

Hexagon screw and threaded hole

 Mind that the sealing surfaces are not damaged.

 Connect the flanges according to the drawing and with the component parts of the

mounting kit.

 Use the required number of 8 hex screws with washer.

 Screw hex screws 1.5 x d into the threaded holes.

– The tensile strength of the flange material must be at least 270 N/mm

ating conditions.

 Tighten the hex screws crosswise in three steps.  Tightening torque DN 100: 10, 20, 22 ± 2 Nm

in all oper-

Stud screw and threaded hole

 Mind that the sealing surfaces are not damaged.

 Use the required number of 8 stud screws and nuts.

 Screw in the stud screws with the shorter threaded end 2.5 x d in the bore holes on

the counter flange.

 Connect the flanges according to the drawing and with the component parts of the

mounting kit.

 Tighten the nuts crosswise in three steps.  Tightening torque DN 100: 10, 20, 22 ± 2 Nm

Stud screw and through hole

 Mind that the sealing surfaces are not damaged.

 Connect the flanges according to the drawing and with the component parts of the

mounting kit.

 Use the required number of 8 stud screws and nuts.

 Tighten the nuts crosswise in three steps.  Tightening torque DN 100: 10, 20, 22 ± 2 Nm

5.4.4 Installation of CF- flanges

Assembly of CF flanges!

Loss of sealing capability due to a lack of cleanliness when handling the sealing and CF flange.

 Assemble the sealing dry and oil-free.  Always wear gloves when handling the components.  Do not damage the surfaces and cutting edges.

The connection types for installation of CF to CF flange are "hexagon screw and through hole", "stud screw and threaded hole" as well as "stud screw and through hole".

● the valid mounting kit of the Pfeiffer Vacuum accessories programme

● A copper seal

● protection screen or splinter shield are optionally

Hexagon screw and through hole

 If used: Insert protective screen or splinter shield with the clamping lugs downward

into the high vacuum flange of the turbopump.

 Place the seal exactly in the hollow.

 Connect the flanges using 16 hexagon-head screws (M8) with washers and bolts.

 Tighten the screw connections circularly.  Tightening torque: 22 ± 2 Nm  After this, check the torque, since flowing of the sealing material may make it neces-

sary to tighten the screws again.

Installation

NOTICE

Stud screw and threaded hole

 Screw in the stud screws (16 pieces, M8) with the shorter threaded end into the

threaded holes of the counter flange.

 If used: Insert protective screen or splinter shield with the clamping lugs downward

into the high vacuum flange of the turbopump.

 Place the seal exactly in the hollow.  Connect the flanges using washers and nuts.  Tighten the screw connections circularly.  Tightening torque: 22 ± 2 Nm  After this, check the torque, since flowing of the sealing material may make it neces-

sary to tighten the screws again.

Stud screw and through hole

 If used: Insert protective screen or splinter shield with the clamping lugs downward

into the high vacuum flange of the turbopump.

 Place the seal exactly in the hollow.

 Connect the flanges using 16 hexagon-head screws (M8) with washers and bolts.

 Tighten the screw connections circularly.  Tightening torque: 22 ± 2 Nm  After this, check the torque, since flowing of the sealing material may make it neces-

sary to tighten the screws again.

Installation

83.1

83.2

83.3

83a

5.5 Connecting the fore-vacuum side

Recommendation: As backing pump, use a suitable vacuum pump from the Pfeiffer

Vacuum programme.

Damage to health due to poisonous gases

Process gases can damage health and contaminate the environment.

 Safely lead away the gas emission from the backing pump!  Observe all safety recommendations of the gas producer.

WARNING

Fig. 5: Connecting the backing pump

83 Fore-vacuum connection 83a Backing pump

83.1 Centering ring

83.2 Clamping ring

83.3 Vacuum components

NOTICE

Design of the fore-vacuum connection regarding sudden twisting of the pump

If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.

 Keep masses small, which can be installed directly to the pump.  Connect flexible line elements directly to the turbopump, if necessary.

 With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-

tion line.

 Connect the fore-vacuum line with small-flange components or threaded hose cou-

plings. Do not narrow the free cross section of the fore-vacuum flange!

 The backing pump is connected electrically via a relay box.  For connection and operation of the backing pump see its operating instructions.

Backing pump control

Backing pump control via electronic drive unit of the turbopump is possible using a relay box or respective connection cables of the accessory programme.

 Refer to the operating instructions of the respective accessory.

5.6 Connections to the turbopump

DC out

TPS / DCU Electronic-

drive unit

DC in

PM 061 352 -T

5.6.1 Electronic drive unit

Turbopumps with integrated electronic drive unit are designed for various applications. Therefore different connection panels are available.

● TM 700 in standard version

● TM 700 PB for Profibus linking

● TM 700 E74 in dependence on specification SEMI E74

● TM 700 DN for DeviceNet linking

● TM 700 EC for EtherCAT linking

Detailed description for function, configuration and operation with the respective connection panel are given in the specific operating instructions for the electronic drive unit.

5.6.2 Earthing

Pfeiffer Vacuum recommends to connect an appropriate earthing wire to derive applicative interferences.

Installation

Fig. 6: Installing the earthing connection

5.6.3 Power and electrical supply

For voltage supply of the electronic drive unit TM 700, only use original power supplies (e.g. TPS 400 or DCU 400). Use of other power supplies only after consultation with Pfeiffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum accessories.

Danger of electric shock

In case of defect, the parts connected to the mains supply are under voltage.

 Always keep the mains connection freely accessible so that you can disconnect it at

any time.

 Make sure that the voltage of the turbopump is valid.

WARNING

Installation

Y-Connector

for Accessories

 Switch off switch S1 on the power pack (position "0").  Insert the connection cable with the socket in the connection "DC in" on the electronic

drive unit and close the bayonet lock.

 Insert the connection cable with the plug in the connection "DC out" on the power sup-

ply and close the bayonet lock.

5.7 Accessory connection

Up to 4 accessories can be connected to the electronic drive unit TM 700. M12 sockets

with the designation "accessory" are available for this purpose. The accessory connec-

tions have been preconfigured at the factory. If the units listed below are connected with the preconfigured connection, they are immediately ready for operation according to the factory settings. It is possible to connect other accessories; to do so, settings must be made on the electronic drive unit.

 To connect two units to one accessory connection, use the appropriate Y-Connector

from the Pfeiffer Vacuum range of accessories.

 Connect the adapter to the appropriate red-coded connection on the TM 700.  Make the settings and control via the interfaces of the electronic drive unit.

Accessory connection Connection with Y-connector Preset accessory

Accessory A Acc. A to Y-1 Air cooling unit Accessory A Acc. A to Y-2 Backing pump Accessory B Acc. B to Y-1 Venting valve Accessory B Acc. B to Y-2 Casing heating unit

Table 1: Overview of factory preset accessory connections on the TM 700

5.7.1 Venting valve

Installation

The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or power failure.

The permissible connection pressure is max. 1500 hPa absolute.

Fig. 7: Connecting the venting valve

24 Venting valve (mounted and connected ex factory)

 Default for the venting valve is "accessory B1".

 If neccessary install a venting gas supply (e.g. inert gas) to the intake (G 1/8") of the

solenoid valve.

5.7.2 Air cooling

As an option, turbopumps with the electronic drive unit TM 700 may be operated with air cooling up to an ambient temperature of +35 °C.

Fig. 8: Connecting the air cooling

3 Pump lower part 3a Air cooling unit

3b Allen head screw 3c Counter sunk screw

3d Threaded adapter

 Insert the threaded adapter into the designated borehole of the pump lower part.  Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump and the threaded

adapter using two screws.

 Plug in and fix the accessory’s control lead to the corresponding accessory connection

port on the electronic drive unit.

 Default for air cooling is "accessory A1".

Installation

5.7.3 Sealing gas connection

The turbopump must be operated with sealing gas to protect it, such as in the case of unclean processes or high gas throughput. The supply is made via a sealing gas valve or alternatively via a sealing gas throttle without control. The activation of the control valve for the sealing gas connection is not pre-installed in the electronic drive unit and has to be configured via their interfaces.

The permissible connection pressure is max. 1500 hPa absolute.

● When operating the pump with more than 50 % of the maximum gas throughput, sealing gas must be used to ensure rotor cooling.

● The sealing gas flow rate amounts 12-15 sccm for the HiPace 300 M.

Sealing gas supply with control valve

24g

5.7.4 Heating jacket

24g

Fig. 9: Connecting the sealing gas valve

24g Seal ring 81 Locking screw 81a Sealing gas valve

 Unscrew the locking screw with seal ring out of the sealing gas connection.  Screw the sealing gas valve with seal ring into the sealing gas connection.  Insert the control cable of the accessory into a free accessory connector on the TM

700 and tighten.

 Make the settings and control via the interfaces of the electronic drive unit.  Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet

side (G 1/8") of the control valve.

81a

Sealing gas supply without control valve

 Unscrew the locking screw with seal ring out of the sealing gas connection.  Screw the sealing gas throttle with sealing ring into the sealing gas connection.

The turbopump and vacuum chamber can be heated to reach the ultimate pressure more quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange in stainless steel design. The heating duration depends on the degree of contamination as well as the ultimate pressure to be reached and should be at least 4 hours.

NOTICE

Dangerous excess temperatures

Process-related high temperatures can result in impermissible excess temperatures and thus damage to the turbopump.

 Water cooling must be used when employing a casing heating or during operation

with heated vacuum chambers.

 Do not introduce any additional energy into the pump.

Installation

23.1

CAUTION

Risk of burns

High temperatures arise when the turbopump or vacuum chamber are baked out. As a result, there is a danger of burns from touching hot parts, even after the casing heating is switched off!

 Thermally insulate heating jacket, pump housing and vacuum chamber, if possible

during installation.

 Do not touch heating jacket, pump casing and vacuum chamber during bake out.

● When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 °C.

● The maximum permissible rotor temperature for the turbopump is 110 °C. If high temperatures arise for process reasons, the radiated heat input must not exceed 2.4 W. Install suitable screening sheets, if necessary (design information on request).

Fig. 10: Connecting the heating jacket

4 Pump casing 4a Heating jacket

4b Fixing screw 4c Heating relay box

4d Warning sticker

23.1 Y-Connector for accessories

 Bend open the outer heating jacket on the tensioning strap and place it sidewards on

to the cylindrical segment of the pump casing. – Do not bend the heating straps! – The heating jacket must seat completely on the casing segment.

 Fix the heating jacket with the fixing screw on the casing.

– Observe the tightening torque for the fixing screw!

Fixing screw Tightening torque

M5 6 Nm 7 Nm 7 Nm M6 11 Nm 12 Nm 12 Nm

Table 2: Tightening torques for fixing screws of heating jackets

in cold condition

Tightening torque during the heating-up

Singular retightening after the cooling down

 Plug in and fix the accessory’s control lead to the corresponding accessory connection

port on the electronic drive unit. – In case of double assignment (e.g. by venting valve) use a Y-Connector of the ac-

cessories program.

 Default for the casing heating is "accessory B2".

 Establish the mains supply for the relay box according to the accessory operating in-

structions. – Make sure the supply voltage for the backing pump is valid.

Installation

15.5c

15.5

15.5a

15.5b

5.7.5 Water cooling

The turbopumps HiPace 300 M with TM 700 have water cooling as standard equipment.

● In case of increased backing pressure (> 0.1 hPa) and/or operation with high gas throughputs, either air or water cooling may be used.

● Generally use water cooling if the ambient temperature is > +35 °C.

Cooling water requirements

Cooling water connection Swiveling screw-fitting with plug and socket connection Hose lines External diameter 8 mm

Internal diameter 6 mm

Parameter Cooling water

Appearance filtrated, mechanically clear, optically clear, no tur-

bidity, no sediments, free of grease and oil pH value 7 to 9 Carbonate hardness max. 10 °dH

12.53 °e

17.8 °fH

178 ppm CaC0 Chloride content max. 100 mg/l Sulphate content max. 240 mg/l Carbon dioxide content max. undetectable Ammonia content max. undetectable Electrical conductivity max. 500 µS/cm Particle size max. 150 µm Cooling water temperature refer to "Technical Data" Cooling water consumption refer to "Technical Data" Fore-line overpressure max. 6000 hPa

Connecting to a cooling water system

Fig. 11: Connecting the cooling water

15.5 Cooling water connection

15.5a Fore-line

15.5b Return line

15.5c Dirt trap

 Insert hoses for the water cooling fore- and return-line as far as they will go in one

cooling water connection each.

 Recommendation: install dirt trap in the fore-line.  Torque of the banjo fitting: 3-3.5 Nm.

6Operation

Low-maintenance operation

Safety bearings prevent contact between the rotor and stator in the event of magnetic bearing overload, making them subject to wear. Extend safety bearing service life by:

 Not subjecting running pumps to knocks, vibrations or position changes, particularly

 Avoiding sudden pressure fluctuations on the high-vacuum or pre-vacuum side dur-

 Observing the maximum rate of pressure rise.  Only aerating the pump via the venting valve supplied.  Not switching off the pump by disconnecting the mains power supply.

6.1 Commissioning

The following important settings are programmed in the electronic drive unit ex factory.

● Parameter [P:027] Gas mode: 0 = heavy gases

● Parameter [P:030] Vent mode: 2 = direct venting

● Parameter [P:700] Set value max. run-up time monitoring: 8 min

● Parameter [P:701] Rotation speed switchpoint: 80% of the nominal roation speed

● Parameter [P:707] Set value in rotation speed setting mode: 65 % of the nominal ro-

tation speed

● Parameter [P:708] Set value power consumption: 100 %

● Parameter [P:721] Venting time: 3600 s

Operation

NOTICE

tilting movements.

ing operation.

 When water cooling is used: Open cooling water supply and check the flow.  When sealing gas is used: Open the sealing gas supply and check the flow.  Establish the mains for the power supply.

Risk of destroying the pump by inputting too much energy

Simultaneous loading by means of high drive power (gas flow rate, fore-vacuum pressure), high heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and may destroy the pump.

 Reduced limit values apply when combining these loads.  If necessary consult with Pfeiffer Vacuum.

Danger of the pump being destroyed

Pumping of gases with a higher molecular mass in the wrong gas mode can lead to destruction of the pump.

 Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

6.1.1 Magnetic bearing calibration

In rare cases, the magnetic bearing sensors may trigger re-calibration on enabling of the drive electronics. This will result in regular metallic knocking noises, but is not connected to wear on the safety bearings.

NOTICE

Operation

6.2 Operation modes

The following operation modes are available:

● Operation via "remote" connection

● Operation via RS-485 and Pfeiffer Vacuum display and control units or PC

● Operation via field bus

6.3 Function description

Danger due to open high vacuum flange

The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there is a danger of cut injuries and that the pump can be destroyed by objects falling into it.

 Never operate the pump with an open high vacuum flange.

6.3.1 Operation via "remote" connection

Remote control is possible via the 26-pin D-sub connector labelled "remote" on the elec-

tronic drive unit. The accessible individual functions are mapped to "PLC levels".

WARNING

 Consider the following manuals for the operation via remote control:

● Operating instructions "Electronic drive unit TM 700"

6.3.2 Operation with DCU or HPU

 Consider the following manuals for the operation via Pfeiffer Vacuum display and con-

trol units:

● Operating instructions "DCU"

● Operating instructions "HPU"

● Operating instructions "Electronic drive unit TM 700"

 Switch on the supply voltage with switch S1 on the power supply or on the DCU 400.  Settings are possible via interface RS-485 by using DCU, HPU or PC.

After operating voltage is applied, the TM 700 performs a self-test to check the supply voltage. Once the self-test has been successfully completed on the TM 700, the turbopump and the backing pump - if connected - begin to operate.

6.3.3 Operation via fieldbus

Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible for electronic drive units with a corresponding field bus panel.

 Consider the following manuals for the operation via field bus:

● Operating instructions for the electronic drive unit with the respective connection panel

6.4 Monitoring of the operation conditions

6.4.1 Temperature monitoring

The drive power is reduced in case of impermissible motor temperature or impermissibly high housing temperature. This can cause falling below the rotation speed switchpoint and so result in turning off the turbopump.

6.4.2 Operation display via LED

LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for operation with DCU or HPU.

LED Symbol LED status Display Meaning

Green Off currentless

Yellow Off no warning

Red Off no malfunction

Fig. 12: Behaviour and meaning of LEDs on the electronic drive unit

Operation

On, flashing "Pumping Station OFF", rotation speed ≤ 60 min

On, invers flashing "Pumping Station ON", set rotation speed not at-

tained

On, constantly "Pumping Station ON", set rotation speed attained

On, blinking "Pumping Station OFF", rotation speed > 60 min

On, constantly Warning

On, constantly Malfunction

-1

6.4.3 Safety bearing stress

The level of stress on the safety bearings is linked to the severity of the disruptive influences on the running rotor. The stress on the safety bearings is expressed as a percentage of the overall possible stress due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.

6.4.4 Balance

The magnetic bearing sensorics permanently monitor the current rotor balance. The balance is expressed as a percentage of the maximum possible rotor imbalance due to the drive electronics and can be viewed via the RS-485 interface using the Pfeiffer Vacuum display and control unit or PC.

6.5 Switching off and venting

6.5.1 Switching off

After the turbopump is switched off, it must be vented to avoid contamination due to particles streaming back from the fore-vacuum area.

 Close the fore-vacuum: Switch off the backing pump or close a fore-vacuum valve.  Switch off the turbopump on the control unit or via remote control.  Venting (possibilities see below)  For water cooling: Shut off the water supply.

6.5.2 Electrical brake

The turbopump is equipped with an electric brake. It supports rapid deceleration of the rotor until standstill.

 Settings are possible via interface RS-485 by using DCU, HPU or PC.

Operation

6.5.3 Emergency power supply

Increased wear and damage due to incorrect operation

Active magnetic bearings require a constant power supply. The motor acts as a generator and supplies the drive electronics in the event of a power failure. Below a speed of approx. 6000 1/min, the kinetic energy of the rotor will no longer be sufficient to supply the magnetic bearings. The drive electronics will switch off completely. The rotor will run down audibly in the safety bearings.

 Do not switch off the pump by disconnecting the mains power supply.

● The green LED on the drive electronics shows the recent operating status.

● The yellow LED on the electronic drive unit lights (warning "undervoltage).

6.5.4 Venting

Clocked venting

The electronic drive unit controls the venting rate by clocking the venting valve. Thus the turbopump is always vented quickly and safely without magnetic bearing overload.

Venting with Pfeiffer Vacuum Venting Valve

NOTICE

Danger of wear or damage of the pump

Uncontrolled venting can lead to magnetic bearing overload and thus to safety bearing wear.

 Only vent the pump via the provided venting valve.  Do not replace the Pfeiffer Vacuum venting valve by other venting units.  It is recommended first to vent via the Pfeiffer Vacuum venting valve until a rotation

speed of 6000 rpm, before using additional venting units.

 Observe the maximum permissible venting flow rate.

 Vent turbopump via the venting connection with oil-free, dry air or inert gas.  Enable venting via the functions of the electronic drive unit.  Settings are possible via interface RS-485 by using DCU, HPU or PC.

Venting rotation speed Switch off the pumping station Mains power failure

100 % of the nominal rotation speed

When mains power is restored the venting procedure is aborted.

Venting valve opens for 3600 s (1 h, works setting)

Basic information for the rapid venting

Venting of the vacuum chamber in two steps. Ask for details on individual solutions from Pfeiffer Vacuum.

 Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.

– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size

of the vacuum chamber.

– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.

 Then vent with an additional venting valve of any desired size.

7 Maintenance / replacement

WARNING

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to pre-

vent danger to health through dangerous substances.

 Decontaminate affected parts before carrying out maintenance work.

NOTICE

Disclaimer of liability

Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or operating malfunctions due to improperly performed maintenance. The liability and warranty entitlement expires.

7.1 Maintenance intervals and responsibilities

● Clean the turbopump externally with a lint-free cloth and little industrial alcohol.

● Replace electronic drive unit yourself.

● For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacu-

um service location.

Maintenance / replacement

7.2 Replacing the electronic drive unit

Damages to the pump and drive

Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.

 Never separate the electronic drive unit from the pump when the mains power is con-

nected or the rotor is running.

Operating parameters of the electronic drive unit

The factory operating parameters are always preset with replacement shipments.

 The use of a HPU enables the storing and the reuse of an existing parameter record.  Reset any individually changed application parameters.  Refer to the manual "Electronic drive unit".

NOTICE

Fig. 13: Assembly / disassembly of the TM 700

23 Electronic drive unit 52 Allen head screw

 Do not exercise any mechanical load on the electronic drive unit.  Turn off the vacuum pump, vent to atmospheric pressure and allow to cool.

Maintenance / replacement

 Only separate the pump and the electronic drive unit from each other after disconnect-

ing the supply voltage and the complete standstill of the pump.

 Remove the vacuum pump from the system, if necessary.  Unscrew the venting valve control lead from the electronic drive unit.  Unscrew Allen head screws (3x) from the electronic drive unit.  Pull the electronic drive unit off the pump.  Don’t touch any electrostatic sensitive devices.  Screw on and connect new electronic drive unit to the turbopump.

– Tightening torque: 2.5 Nm.

7.2.1 Magnetic bearing calibration

7.2.2 Rotation speed set value

The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.

HiPace Nominal rotati on speed confirmation [P:777]

300 1000 Hz 400 / 700 / 800 820 Hz

 Adjust the parameter [P:777] according to the pump type.  Alternatively: If no display and control unit is available, please use the "SpeedCon-

figurator" of the spare parts delivery.

8 Decommissioning

8.1 Shutting down for longer periods

Contamination of parts and operating fluid by pumped media is possible.

Poisoning hazard through contact with materials that damage health.

 In the case of contamination, carry out appropriate safety precautions in order to pre-

vent danger to health through dangerous substances.

 Decontaminate affected parts before carrying out maintenance work.

If the turbopump should be shut down for longer than a year:

 Remove the vacuum pump from the system, if necessary.  Close the high vacuum flange of the turbopump.  Evacuate turbopump via the fore-vacuum connection.  Vent turbopump via the venting connection with oil-free, dry air or inert gas.  Close the flange openings by using the original protective covers.  Close further connection ports by using the corresponding protective covers.  Place pump upright on rubber feet.  Store the pump only indoors at temperatures between -25 °C and +55 °C.  In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-

wrapped in a plastic bag together with a bag of desiccant.

Decommissioning

WARNING

8.2 Re-starting

8.3 Disposal

 Check turbopump for contamination and moisture.  Clean the turbopump externally with a lint-free cloth and little industrial alcohol.  If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.  Installation and commissioning in accordance with the operating instructions.

Products or parts thereof (mechanical and electrical components, operating fluids, etc.) may cause environmental burden.

 Safely dispose of the materials according to the locally applicable regulations.

Malfunctions

9 Malfunctions

If malfunctions on the pump occur, you will find possible causes and instructions for repair in the following table.

9.1 Rectifying malfunctions

Problem Pos si bl e c au s es Remedy

Pump will not start; none of the built-in LEDs on the TM 700 lights up

Pump will not start; green LED on the TM 700 is flashing

Pump does not attain the final rotational speed within the specified run-up time

Pump does not attain the ultimate pressure

Red LED on the TM 700 is on ● Collective fault  Reset by switching the mains OFF/ON

● Electrical supply interrupted  Check plug contacts on the power supply

● Operating voltage incorrect  Apply correct operating voltage

● No operating voltage applied  Apply operating voltage

● TM 700 defective  Exchange the TM 700

● At operation without control panel:

Pins 1-3, 1-4 or 1-14 are not connected on

the "remote" connection

● At operation via RS-485: Bridge at Pin 1-14 prevents control commands

● At operation via RS-485 (without counter plug): Parameters of the electronic drive unit not set

● Voltage drop in the cable too high  Use a suitable cable

● Fore-vacuum pressure too high  Ensure function and suitability of the backing

● Leak  Perform leak detection

● Gas throughput too high  Reduce process gas supply

● Rotor runs hard, bearing defective  Check the bearing for noises

● Setpoint for run-up time to low  Extend the run-up time via connection

● Thermal overload:

– Lack of air ventilation – Water flow too low – Fore-vacuum pressure too high – Ambient temperature too high

● Pump is dirty  Bake out the pump

● Vacuum chamber, pipes or pump are

leaky

If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Service.

 Check supply lines on the power supply  Check the output voltage (48 V DC) on the con-

nection "DC out" of the power supply

 Check the plug contacts on the TM 700

 Observe the rating plate

 Contact the Pfeiffer Vacuum Service

 Connect the pins 1-3, 1-4 or 1-14 on the "remote"

connection

 Remove the bridge at the "remote" connection

 Remove the mating plug from the "remote" con-

nection.

 Set parameters [P: 010] and [P: 023] "ON" via

interface RS-485.

 Please refer to operating instructions of the elec-

tronic drive unit.

pump

 Check sealings and flange fastenings  Eliminate leaks

 Check safety bearing stress via "RS 485"

 Contact the Pfeiffer Vacuum Service

"RS 485"

 Reduce thermal loads

– Ensure adequate cooling – Ensure the cooling water flow – Lower the fore-vacuum pressure – Adjust ambient conditions

 Cleaning in case of heavy contamination

– Contact the Pfeiffer Vacuum Service

 Leak detection starting from the vacuum cham-

ber

 Eliminate leaks

 Reset via pin 13 on the "remote" connection

 Differentiated malfunction display is possible via

"RS 485"

 Contact the Pfeiffer Vacuum Service

10 Service

Service

Pfeiffer Vacuum offers first-class service!

● Maintenance / repair in the nearby ServiceCenter or ServicePoint

● Fast replacement with exchange products in mint condition

● Advice on the most cost-efficient and quickest solution

Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service).

Maintenance and repair in the Pfeiffer Vacuum ServiceCenter

The following steps are necessary to ensure a fast, smooth servicing process:

 Download the forms "Service Request" and "Declaration on Contamination".  Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum

service address.

 Include the confirmation on the service request from Pfeiffer Vacuum with your ship-

ment.

 Fill out the declaration on contamination and include it in the shipment (required!).  Dismantle all accessories.  Leave electronic drive on the pump.  Close the flange openings by using the original protective covers.  If possible, send pump or unit in the original packaging.

Sending of contaminated pumps or devices

No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. “Hazardous substances” are substances and compounds in accordance with the hazardous goods directive (current version). If pumps are contaminated or the declaration on contamination is missing, Pfeiffer Vacuum performs decontamination at the shipper's expense.

 Neutralise the pump by flushing it with nitrogen or dry air.  Close all openings airtight.  Seal the pump or unit in suitable protective film.  Return the pump/unit only in a suitable and sturdy transport container and send it in

while following applicable transport conditions.

Exchange unit

The factory operating parameters are always preset with exchange units. If you use changed parameters for your application, you have to set these again.

Service orders

All service orders are carried out exclusively according to our repair conditions for vacuum units and components.

Forms under www.pfeiffer-vacuum.com

Spare parts HiPace 300 M

15.5

11 Spare parts HiPace 300 M

Item Designation Size Order number Notes Pieces Order qty.

15.5 Swiveling screw-fitting P 4131 007 E water cooling unit 2 23 Electronic drive unit TM 700 according to the rating plate depends on the connection panel 1 24 Venting valve PM Z01 291 incl. seal ring 1

Please also specify model number of the the rating plate when ordering accessories or spare parts.

Accessories

12 Accessories

Designation DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

Mounting kit for HiPace 300 M, DN 100 ISO-K, including coated centering ring, bracket screws

Mounting kit for HiPace 300 M, DN 100 ISO-K, including coated centering ring with protective screen, bracket screws

Mounting kit for HiPace 300 M, DN 100 ISO-K, including coated centering ring, splinter shield and bracket screws

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with splinter shield, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with protection screen, hexagon bolts

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring, stud screws

Mounting kit for DN 100 ISo-K to ISO-F, with collar flange, coated centering ring with splinter shield, stud screws

Mounting kit for DN 100 ISO-K to ISO-F, with collar flange, coated centering ring with protection screen, stud screws

Mounting kit for DN 100 ISO-F, including coated centering ring, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, protective screen, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, splinter shield, hexagon screws

Mounting kit for DN 100 ISO-F, including coated centering ring, stud screws

Mounting kit for DN 100 ISO-F, including coated centering ring, protection screen, stud screws

Mounting kit for DN 100 ISO-F, including coated centering ring, splinter shield, stud screws

Centering ring with multifunction coating, DN 100 ISO-K/-F PM 016 210 -U PM 016 210 -U Centering ring with multifunction coating and integrated protection

screen, DN 100 ISO-K/-F Centering ring with multifunction coating and integrated splinter shield,

DN 100 ISO-K/-F Vibration damper for HiPace 300/400, DN 100 ISO-K/F PM 006 459 -X PM 006 459 -X Protection screen for DN 100 CF-F PM 016 336 Splinter shield for turbopumps, DN 100 CF-F PM 016 315 Vibration damper for HiPace 300/400, DN 100 CF-F PM 006 488 -X TPS 400, power supply 48 V DC, for wall/standard rail fitting PM 061 343 -T PM 061 343 -T PM 061 343 -T Wall rail fitting for TPS 110/180/310/400 PM 061 392 -T PM 061 392 -T PM 061 392 -T TPS 401, power supply 48 V DC, 19" partial plug-in 3HU PM 061 347 -T PM 061 347 -T PM 061 347 -T Front panel kit for TPS 401 PM 061 396 -T PM 061 396 -T PM 061 396 -T DCU 400, Display control unit incl. power supply PM C01 823 PM C01 823 PM C01 823 DCU 002, Display Control Unit PM 061 348 -T PM 061 348 -T PM 061 348 -T HPU 001, Handheld Programming Unit PM 051 510 -T PM 051 510 -T PM 051 510 -T Accessories package for HPU 001/PC PM 061 005 -T PM 061 005 -T PM 061 005 -T Mains cable 208 V AC, NEMA 6-15 to C13, 3 m P 4564 309 ZF P 4564 309 ZF P 4564 309 ZF Mains cable 115 V AC, NEMA 5-15 to C13, 3 m P 4564 309 ZE P 4564 309 ZE P 4564 309 ZE Mains cable 230 V AC, CEE 7/7 to C13, 3 m P 4564 309 ZA P 4564 309 ZA P 4564 309 ZA Connection cable for HiPace with TC 400/TM 700 to power supply TPS/

DCU 310/311/400/401 HiPace - ACP connection cable PM 071 142 -X PM 071 142 -X PM 071 142 -X Control cable for pumping stations 0.7 m PM 061 675 AT PM 061 675 AT PM 061 675 AT Extension cable M12 on M12 PM 061 747 -T PM 061 747 -T PM 061 747 -T Y-connector, shielded, M12 for accessories P 4723 013 P 4723 013 P 4723 013 Y-Connector M12 to RS-485 P 4723 010 P 4723 010 P 4723 010 Mains power socket, angled, for TC 400/TM 700 P 4723 101 P 4723 101 P 4723 101 Mains power socket TC 400/TM 700, straight P 4723 100 P 4723 100 P 4723 100 Remote adapter for RS-485 PM 061 649 -X PM 061 649 -X PM 061 649 -X Termination resistor for RS-485 PT 348 105 -T PT 348 105 -T PT 348 105 -T

PM 016 775 -T

PM 016 777 -T

PM 016 776 -T

PM 016 940 -T

PM 016 941 -T

PM 016 942 -T

PM 016 945 -T

PM 016 946 -T

PM 016 947 -T

PM 016 450 -T

PM 016 452 -T

PM 016 451 -T

PM 016 455 -T

PM 016 457 -T

PM 016 456 -T

PM 016 212 -U PM 016 212 -U

PM 016 211 -U PM 016 211 -U

PM 061 352 -T PM 061 352 -T PM 061 352 -T

Accessories

Designation DN 100 ISO-K DN 100 CF-F DN 100 ISO-F

Power separator for RS-485 PT 348 132 -T PT 348 132 -T PT 348 132 -T USB converter to RS-485 interface PM 061 207 -T PM 061 207 -T PM 061 207 -T Connector M12 to RS-485 PM 061 270 -X PM 061 270 -X PM 061 270 -X TIC 001, Interface converter RS-232/RS-485 PM 051 054 -T PM 051 054 -T PM 051 054 -T RJ 45 interface cable on M12 for HiPace PM 051 726 -T PM 051 726 -T PM 051 726 -T Interface cable, M12 m straight/M12 m straight, 3 m PM 061 283 -T PM 061 283 -T PM 061 283 -T Interface cable, M12 m straight/ M12 m angled 0.7 m PM 061 791 -T PM 061 791 -T PM 061 791 -T Backing pump relay box, single phase 20 A, for TC 400 and TCP 350,

M12 plug Relay box, shielded, for backing pumps, 1-phase 7 A for TC 400/1200,

TM 700 and TCP 350, M12 TVV 001 fore-vacuum safety valve, 230 V AC PM Z01 205 PM Z01 205 PM Z01 205 TVV 001 fore-vacuum safety valve, 115 V AC PM Z01 206 PM Z01 206 PM Z01 206 Heating jacket, shielded, for HiPace 300 with TC 400 PB/TM 700, 230

V AC, with safety plug Heating jacket, shielded, for HiPace 300 with TC 400 PB/TM 700, 208

V AC, UL plug Heating jacket, shielded, for HiPace 300 with TC 400 PB/TM 700, 115

V AC, with UL plug Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 400/

1200 and TM 700 Venting valve, shielded, 24 V DC, G 1/8", for connecting to TC

400,1200 and TM 700 with twisted plug 270° Power failure venting valve, shielded, 24 V DC, G 1/8" for connection to

TC 400, TM 700 and TC 1200 TTV 001, dryer for venting turbopumps PM Z00 121 PM Z00 121 PM Z00 121 Screw-in flange, DN 10 ISO-KF, G 1/8" PM 033 737 -T PM 033 737 -T PM 033 737 -T Screw-on flange, DN 16 ISO-KF, G 1/8" PM 016 780 -T PM 016 780 -T PM 016 780 -T Push-in fitting for 6 mm hose, G 1/8" PM 016 781 -T PM 016 781 -T PM 016 781 -T Push-in fitting for 8 mm hose, G 1/8" PM 016 782 -T PM 016 782 -T PM 016 782 -T Hose nozzle for 9 mm hose, G 1/8" PM 016 783 -T PM 016 783 -T PM 016 783 -T Banjo fitting PM 016 787 -T PM 016 787 -T PM 016 787 -T Banjo fitting, small PM 143 877 -T PM 143 877 -T PM 143 877 -T Air cooling, shielded, for HiPace 400/700/800 and 300700/800 M with

TC 400 PB/TM 700 Sealing gas valve, shielded for HiPace 300 with TC 400 and TM 700,

TCP 350 Sealing gas throttle for HiPace 300 PM Z01 317 PM Z01 317 PM Z01 317 TIC 010, Adapter for two sensors PT R70 000 PT R70 000 PT R70 000 IKT 010, Digital Cold Cathode Sensor, low current PTR 72 100 PTR 72 100 PTR 72 100 IKT 011, Digital Cold Cathode Sensor, high current PT R73 100 PT R73 100 PT R73 100 RPT 010, Digital Piezo/Pirani Sensor PT R71 100 PT R71 100 PT R71 100

PM 061 375 -T PM 061 375 -T PM 061 375 -T

PM 071 284 -X PM 071 284 -X PM 071 284 -X

PM 071 266 -T

PM 071 267 -T

PM 071 268 -T

PM Z01 291 PM Z01 291 PM Z01 291

PM Z01 292 PM Z01 292 PM Z01 292

PM Z01 331 PM Z01 331 PM Z01 331

PM Z01 363 PM Z01 363 PM Z01 363

PM Z01 312 PM Z01 312 PM Z01 312

13 Technical data and dimensions

13.1 General

Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:

Maximum values refer exclusively to the input as a single load.

● Recommendations of PNEUROP committee PN5

● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-

pump performance - General description"

● ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics"

● Ultimate pressure: using a test dome and a 48 hrs. period of baking out

● Gas throughput: at water cooling, cooling water temp. 25 °C; backing pump = rotary

vane pump (10 m

● Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C

● Integral leak rate: using a Helium concentration of 100 %, period 10 s

● Sound pressure level: Distance 1 m to the pump

Conversion table: pressure units

/h)

Technical data and dimensions

mbar bar Pa hPa kPa Torr

mbar 1 1 · 10

bar 1000 1 1 · 10

Pa 0.01 1 · 10

hPa 1 1 · 10

-3

-5

-3

100 1 0.1 0.75

1 0.01 1 · 10

1000 100 750

-3

100 1 0.1 0.75 kPa 10 0.01 1000 10 1 7.5 Tor r

1.33 1.33 · 10

-3

133.32 1.33 0.133 1

mm Hg

1 Pa = 1 N/m

Conversion table: gas throughput units

mbar·l/s Pa·m3/s sccm Torr·l/s atm·cm3/s

mbar·l/s 1 0.1 59.2 0.75 0.987

Pa·m

/s 10 1 592 7.5 9.87

sccm 1.69 · 10

-2

1.69 · 10

-3

1 1.27 · 10

-2

1.67 · 10

Torr·l/s 1.33 0.133 78.9 1 1.32

atm·cm

/s 1.01 0.101 59.8 0.76 1

13.2 Technical data

Parameter HiPace® 300 M HiPace® 300 M HiPace® 300 M

Flange (in) DN 100 ISO-K DN 100 CF-F DN 100 ISO-F Flange (out) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF Pumping speed for Ar 250 l/s 250 l/s 250 l/s Pumping speed for H

Pumping speed for He 215 l/s 215 l/s 215 l/s Pumping speed for N

Compression ratio for Ar > 1 · 10 Compression ratio for H

Compression ratio for He > 1 · 10 Compression ratio for N

Gas throughput at full rotational speed for Ar 13 hPa l/s 13 hPa l/s 13 hPa l/s Gas throughput at full rotational speed for N

Fore-vacuum max. for Ar 20 hPa 20 hPa 20 hPa Fore-vacuum max. for H

Fore-vacuum max. for He 19 hPa 19 hPa 19 hPa

170 l/s 170 l/s 170 l/s

255 l/s 255 l/s 255 l/s

5 · 10

> 1 · 10

> 1 · 10 5 · 10 > 1 · 10 > 1 · 10

28 hPa l/s 28 hPa l/s 28 hPa l/s

8 hPa 8 hPa 8 hPa

mm Hg

7.5 · 10

-3

-2

Technical data and dimensions

Parameter HiPace® 300 M HiPace® 300 M HiPace® 300 M

Fore-vacuum max. for N

Run-up time < 2 min < 2 min < 2 min Ultimate pressure according to PNEUROP < 1 · 10 Rotation speed ± 2 % 60000 min Rotation speed variable 20-100 % 20-100 % 20-100 % Sound pressure level  45 dB (A)  45 dB (A)  45 dB (A) Relative humidity of air 5-85, non-condensing % 5-85, non-condensing % 5-85, non-condensing % Protection category IP 54 IP 54 IP 54 Connection pressure max. for venting/sealing gas valve 1500 hPa 1500 hPa 1500 hPa Operating voltage 48 V DC 48 V DC 48 V DC Operating voltage power supply 90-265 V AC 90-265 V AC 90-265 V AC Braking time with/without venting < 1 / 3.5 min < 1 / 3.5 min < 1 / 3.5 min Integral leak rate < 1 · 10 Power consumption max. 300 W 300 W 300 W Current consumption max. 7.5 A 7.5 A 7.5 A Shipping and storage temperature -25-+55 °C -25-+55 °C -25-+55 °C Mounting orientation in any orientation in any orientation in any orientation Venting connection G 1/8" G 1/8" G 1/8" Weight 13.1 kg 17.2 kg 13.4 kg Cooling method, standard Water Water Water Cooling method, optional Air, convection Air, convection Air, convection Cooling water temperature 15-35 °C 15-35 °C 15-35 °C Cooling water consumption 80 l/h 80 l/h 80 l/h Permissible irradiated thermal power max. 2.4 W 2.4 W 2.4 W Permissible magnetic field max. 5 mT 5 mT 5 mT Interfaces RS-485, Remote RS-485, Remote RS-485, Remote

20 hPa 20 hPa 20 hPa

-7

hPa < 5 · 10

-1

-8

Pa m3/s < 1 · 10-8Pa m3/s < 1 · 10-8Pa m3/s

-10

60000 min

hPa < 1 · 10-7hPa

-1

60000 min

-1

13.3 Dimensions

Technical data and dimensions

180

Ø150

12.5°

90°

Ø150

DN 16 ISO-KF / G1/4"

45°

12°

G1/8"

Ø8 / G1/4" (2x)

M8 (6x)

45°

4x45°(=180°)

Fig. 14: HiPace 300 M, DN 100 ISO-K

DN 16 ISO-KF / G1/4"

45°

12°

G1/8"

131

145

Ø162

DN 100 ISO-K

DN 100 ISO-F

164

197

243

256

180

12.5°

90°

Ø150

12.5°

90°

Ø8 / G1/4" (2x)

M8 (6x)

45°

4x45°(=180°)

Fig. 15: HiPace 300 M, DN 100 ISO-F

DN 16 ISO-KF / G1/4"

45°

12°

G1/8"

Ø8 / G1/4" (2x)

M8 (6x)

45°

4x45°(=180°)

131

145

Ø162

DN 100 CF-F

102

176

208

254

268

Fig. 16: HiPace 300 M, DN 100 CF-F

Declaration of conformity

We hereby declare that the product cited below satisfies all relevant provisions accord-

ing to the following EC directives:

● Machinery 2006/42/EC (Annex II, no. 1 A)

● Electromagnetic Compatibility 2014/30/EU

● Restriction of the use of certain Hazardous Substances 2011/65/EU

The agent responsible for compiling the technical documentation is Mr. Helmut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

HiPace 300 M

Harmonised standards and national standards and specifications which have been applied:

DIN EN ISO 12100 : 2011

DIN EN 1012-2 : 2011

DIN EN 50581 : 2013

DIN EN 61000-3-2 : 2014

DIN EN 61000-3-3 : 2013

DIN EN 61010-1 : 2010

DIN EN 61326-1 : 2013

DIN EN 62061 : 2013

Signature:

(Dr. Ulrich von Hülsen) Managing Director

Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany

Asslar, 2017-11-10

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Headquarters • Germany T +49 6441 802-0 info@pfeiffer-vacuum.de

Pfeiffer Hipace 300 M User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of contents

1 About this manual

1.1 Validity

1.1.1 Applicable documents

1.2 Conventions

1.2.1 Safety instructions

1.2.2 Pictographs

1.2.3 Instructions in the text

1.2.4 Abbreviations

1.2.5 Symbols used

2Safety

2.1 Safety precautions

2.2 Protective equipment

2.3 Proper use

2.4 Improper use

3 Transport and storage

3.1 Transport

3.2 Storage

4 Product description

4.1 Product identification

4.1.1 Pump types

4.1.2 Pump features

4.1.3 Scope of delivery

4.2 Function

4.2.1 Cooling

4.2.2 Rotor bearing

4.2.3 Drive

4.3 Range of application

5 Installation

5.1 Preparatory work

5.2 Set-up

5.2.1 Earthquake safety

5.2.2 Use of a splinter shield or protection screen

5.2.3 Vibration damper

5.3 Mounting orientation

5.4 Connecting the high vacuum side

5.4.1 Installation of ISO-K flange with ISO-K flange

5.4.2 Installation of ISO-K flange with ISO-F flange

5.4.3 Installation of ISO-F with ISO-F flange

5.4.4 Installation of CF- flanges

5.5 Connecting the fore-vacuum side

5.6 Connections to the turbopump

5.6.1 Electronic drive unit

5.6.2 Earthing

5.6.3 Power and electrical supply

5.7 Accessory connection

5.7.1 Venting valve

5.7.2 Air cooling

5.7.3 Sealing gas connection

5.7.4 Heating jacket

5.7.5 Water cooling

6Operation

6.1 Commissioning

6.1.1 Magnetic bearing calibration

6.2 Operation modes

6.3 Function description

6.3.1 Operation via "remote" connection

6.3.2 Operation with DCU or HPU

6.3.3 Operation via fieldbus

6.4 Monitoring of the operation conditions

6.4.1 Temperature monitoring

6.4.2 Operation display via LED

6.4.3 Safety bearing stress

6.4.4 Balance

6.5 Switching off and venting

6.5.1 Switching off

6.5.2 Electrical brake

6.5.3 Emergency power supply

6.5.4 Venting

7 Maintenance / replacement

7.1 Maintenance intervals and responsibilities

7.2 Replacing the electronic drive unit

7.2.1 Magnetic bearing calibration

7.2.2 Rotation speed set value

8 Decommissioning

8.1 Shutting down for longer periods