Pfeiffer Hipace 2300 User Manual

Translation of the original instructions
PT 0243 BEN/E (1207)
HiPace 2300
Turbopump
Operating Instructions
EN
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
7 Maintenance / replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
11 Spare parts HiPace 2300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
12 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.4 Filling up the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
5.5 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
6.1 Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
6.2 Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.3 Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
6.4 Monitoring of the operation conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.5 Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
7.1 Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . 27
7.2 Changing the operating fluid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
7.3 Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
13.2 HiPace 2300 / HiPace 2300 U . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
13.3 HiPace 2300 C / HiPace 2300 U C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
13.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
2

1 About this manual

1.1 Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documen­tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vacu­um.com.
Applicable docu­ments

1.2 Conventions

HiPace 2300 Operating instructions
Operating instructions "Electronic drive unit TC 1200" PT 0239 BN* Declaration of conformity Part of this document
*also available via www.pfeiffer-vacuum.com
About this manual
Safety instructions The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan­dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of which may result in damage to the product.
3
About this manual
SG
Pictograph definitions
Instructions in the
Work instruction: here you have to do something.
Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of the unit or equipment
Command to perform an action or task associated with a source of dan­ger, the disregarding of which may result in serious accidents
Important information about the product or this document
text
Abbreviations used DCU: Display and control unit
HPU: Handheld programming unit TC: Electronic drive unit for turbopump PB: Profibus version DN: DeviceNet version
Symbols used The following symbols are used consistently throughout the diagrams:
H
High vacuum flange
Fore-vacuum flange
Electric connection
Cooling water connection
F
Venting connection
Sealing gas connection
4

2 Safety

2.1 Safety precautions

Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating
from the vacuum pump, the pumped medium and the entire system.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in­stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".Use original accessory parts only.
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).Run-up the pump according to this operating instructions.
Safety
NOTICE
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.Make sure that the system is integrated in an emergency off safety circuit.Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger due to lack of power disconnection device as defined in SEMI-S2
Pump and electronic drive unit are not equipped with a power disconnection device. In­stallation of a user-supplied power disconnection device in accordance with SEMI-S2.
Fit a circuit breaker with an interruption rating of min. 10,000 A.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
Do not expose any body parts to the vacuum.
Observe all safety and accident prevention regulations.
Regularly check the proper observance off all safety measures.
Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
Do not loosen any plug connection during operations.
Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
Keep leads and cables well away from hot surfaces (> 70 °C).
Never fill or operate turbopump with cleaning agent.
Do not operate the turbopump with open high vacuum flange.
5
Safety
kg
Do not carry out any unauthorized modifications or conversions to the pump.
When returning the turbopump observe the shipping instructions.

2.2 Protective equipment

Determined situations concerning the handling of vacuum pumps require wearing of per­sonal protective equipment. The owner, respectively the employer are obligated to pro­vide adequate equipment to any operating persons.
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be con­taminated by toxic, reactive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of
reinstallation.
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and falling down.
Carry small and mid-size vacuum pumps two-handed.Carry vacuum pumps > 20 kg by a suitable lifting device.Wear safety shoes with steel toe cap according to directive EN 347.
DANGER
WARNING

2.3 Proper use

CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.Do not reach in the high vacuum flange.If necessary wear protective gloves according directive EN 420.
NOTICE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accor­dingly.
The vacuum pump may only be used to generate a vacuum.
Only operate the turbopump with an approved backing pump.
6

2.4 Improper use

Safety
Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially:
transport, installation or operation of the pump in invalid orientation
pumping of corrosive gases (exception: pumps in C version)
pumping of corrosive gases without sealing gas (only pumps in C version)
pumping of explosive media
pumping of condensing vapors
operation with improper high gas throughput
operation with improper high fore-vacuum pressures
operation with improper gas mode.
operation with improper high levels of insulated heat input
venting with improper high venting rates
operation of the devices in areas with ionizing radiation
operation in potentially explosive areas
operation of the devices in systems where the turbopumps are subjected to impact-
like stress and vibrations or the effect of periodically occurring forces
use of accessories or spare parts, which are not named in this manual
fixing the pump at its bottom part
warranty seal
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.
Do not open the product within its warranty period!For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
7
Transport and storage
60°
max

3 Transport and storage

3.1 Transport

Two pieces of eye bolts are srewed with the pump on delivery.
Observe type-specific mounting orientations!
Incorrect mounting orientations result in contamination of the process vacuum or dama­ge to the pump.
Pay attention to the properties after the model designation on the name plate!Observe the pictographs on the pump housing!Do not transport or tilt the pump filled with operating fluid!
NOTICE
60°
max

3.2 Storage

Fig. 1: Transport of HiPace 2300 Fig. 2: Transport of HiPace 2300 U
WARNING
Danger from falling and swinging loads!
When lifting the pump there is a danger of falling parts.
Make sure that there are no persons under the suspended load.Close off and supervise the area under the pump.
Only transport the turbopump in the valid orientation and with vertical rotor axis.
Fix a suitable lifting device on both eye bolts.
– Observe the approved fixing (e.g. maximum opening angle towards the longitudinal
axis of the pump).
– Do not lift any additional weights (e.g. vacuum chamber).
Lift the pump perpendicularly out of the packing.Reuse the transport container. Vacuum pumps should be transported or shipped in the
original packing only.
Only remove the protective covers from the high vacuum and the fore-vacuum side
immediately before connection.
Keep the original protective covers.After the transport the eye bolts can be removed.
Close the flange openings by using the original protective covers.Close further connection ports by using the corresponding protective covers.Store the pump only indoors at temperatures between -25 °C and +55 °C. In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.
8
Product description

4 Product description

4.1 Product identification

Variants The product designation consists of a family designation (1), the size (2), which is orient-
ed on the pumping speed, and if applicable the additional properties (3) of the pump.
HiPace
(1)
2300
(2)
U C
(3)
1. Family designation 2. Model designation 3. Property designation
HiPace 2300 = Model designation of
the pump related to its pump­ing speed class
none = Standard version U = Upside-down installation orientation C = Corrosive gas version P = Process M = Active magnetic bearing T = Temperature management system
HiPace 2300
HiPace 2300 C, corrosive gas version
HiPace 2300 U, for upside-down installation orientation
HiPace 2300 U C, for upside-down installation orientation and corrosive gases
Pump features
This product has been tested to the requirements of CAN/CSA-C22.2 No. 61010-1, sec­ond edition, including Amendment 1, or a later version of the same standard incorporat­ing the same level of testing requirements.
For information about other certifications, if applicable, please see the signet on the prod­uct or:
www.tuvdotcom.com
TUVdotCOM-ID 0000021320
Characteristics HiPace 2300
HV flange DN 250 ISO-K DN 250 ISO-F DN 250 CF-F
Flange material Aluminium Aluminium Stainless steel
To correctly identify the product when communicating with Pfeiffer Vacuum, always have the information from the rating plate available.
D-35614 Asslar
Mod.:
HiPace 300 DN 100 ISO-K, 3P
M.-No.:
PM P03 900
Ser. -No.:
Fig. 3: Example for a rating plate
---
Oil:
):
S(N
260 l/s
2
60000 1/min, 1000 Hz
n,f:
6.7 kg
Weig ht:
Made in Germany
Scope of delivery Turbopump with electronic drive unit and integrated power supply
Protective cover for the high vacuum flange and the fore-vacuum flange
Mating plug for the connection "remote"on the TC 1200 (type dependent)
Mating plug for the connection "E74" on the TC 1200 (type dependent)
HAN3A socket for mains power supply
Sealing gas valve
Operating fluid (50 ml) with filling syringe
Screw-in nozzle (2x) with seal ring for cooling water connection
Eye bolts
Operating instructions
9
Product description
2
13
8
43
415
4a
13h
410
421
F
F
H
H
SG

4.2 Function

The turbopumps HiPace 2300 form a complete unit together with the electronic drive unit. The voltage is supplied via the integrated power supply pack.
Fig. 4: HiPace 2300 mit TC 1200
2 High vacuum flange 4a Sealing gas connection 8 Operating fluid pump
13 Electronic drive unit TC 1200 13h Mains connection "AC in" 43 Venting screw
410 Cooling water connection 415 Fore-vacuum flange 421 Earthing connection
Cooling ● Water cooling
In the case of excess temperature the electronic drive unit reduces the drive power au­tomatically.
Rotor bearing Hybrid bearing turbopump
High vacuum side: maintenance-free permanent magnetic bearing
Fore-vacuum side: ceramic ball bearing
Drive Electronic drive unit TC 1200
10

4.3 Range of application

The pump HiPace 2300 must be installed and operated under the following ambient con­ditions:
Installation location weather protected (indoors) Protection class IP 54 Temperature +5 °C to +40 °C Relative humidity max. 80 %, at T 31 °C, to max. 50% at T 40 °C Atmospheric pressure 75 kPa - 106 kPa Installation altitude 2000 m max. Degree of pollution 2 Permissible surrounding magnetic field 7 mT Overvoltage category II Connection voltage 100-120/200-240 (± 10%) V AC
Remarks to ambient conditions
The denoted permissible ambient temperatures apply to operation of the turbopump at maximum permissible fore-vacuum pressure or gas throughput depending on the coo­ling method. The turbopump is intrinsically safe by a redundant temperature monitoring.
By reducing the fore-vacuum pressure or gas throughput, the turbopump can be ope­rated at higher ambient temperatures.
If the maximum permissible operating temperature of the turbopump is exceeded, it reduces drive power first and switches off then, if necessary.
Product description
11
Installation

5Installation

Risk of the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 16000 Nm can occur, which can lead with incorrect attachment to tearing the turbopump off. The energy released there­by can hurl the entire pump or fragments from their inside around the area. This can cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.Only use Pfeiffer Vacuum original components (accessories) for installation.
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in­stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".Use original accessory parts only.
Operating fluid filling
The pump is delivered without operating fluid filling. The operating fluid is part of the de­livery consignment.
Do not fill the pump with operating fluid until the installation is done on site!
WARNING

5.1 Set-up

When installing the pump, observe the following conditions:
the ambient conditions specified for the range of application
The attachment of the pump at its bottom part is not permitted.
It is not allowed to operate the device in systems where impact-like stresses and vi-

5.2 Preparatory work

Ensure sufficient cooling for the turbopump.Where magnetic fields > 7 mT are involved, a suitable shielding must be used. Check
The maximum permissible rotor temperature for the turbopump is 120 °C. If high tem-

5.3 Assembly

Ensure the greatest possible cleanliness when installing any high vacuum parts. Un-
All flange components must be grease-free, dust-free and dry at installation.
brations or periodically forces occur.
installation location and consult Pfeiffer Vacuum if needed!
peratures arise for process reasons, the radiated heat input must not exceed 24 W. Install suitable screening sheets, if necessary (design information on request).
clean components prolong the pump-down time.
12
Installation
SC
SC
SC
SC
SC
SC = Safety Connection
Vacuum chamber
Earthquake safety An earthquake can result in contact with the safety bearings. All forces occuring hereby
are safely absorbed by the properly installed flange connections.
The vacuum chamber must be secured by the customer against shifting and tipping.
Fig. 5: Example: How to secure against shifting and tipping by external tremors
Use of a splinter shield or protection screen
Vibration damper
Mounting orientation
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection screen in the high vacuum flange protects the turbopump against foreign bodies coming from the chamber. The pumping speed is reduced.
Volume flow rate reduction in %
H
2
Splinter shield DN 250 7 11 23 25
Protection screen DN 250 2 3 6 7
He N
2
Ar
WARNING
Danger from the turbopump and vibration damper being torn-off
In case of sudden blocking of the rotor, an applied vibration damper cannot compensate any of the occurring forces. There is a danger of the turbopump being torn-off and the­reby resulting severest injuries and property damages. Applicable safeguards must be taken to compensate possible occurring torques.
Definitely consult with Pfeiffer Vacuum.Do not exceed the max. permissible temperature at the vibration damper (100° C).
NOTICE
Observe type-specific mounting orientations!
Incorrect mounting orientations result in contamination of the process vacuum or dama­ge to the pump.
Pay attention to the properties after the model designation on the name plate!Observe the pictographs on the pump housing!Do not transport or tilt the pump filled with operating fluid!
13
Installation
H
VV
H
VV
90°
8.06
8.06
VV
90°
H
H
VV
Fig. 6: Standard and C-versions Fig. 7: U- and U C-versions
Simple recognition of the valid mounting orientation
The valid mounting orientation of a turbopump can be deduced by the orientation of its operating fluid pump:
Horizontal longitudinal axis of the operating fluid pump
Vertical longitudinal axis with the sight glass 8.06 pointing downwards.
Installing the high vacuum flange
Horizontal mounting orientation
H
VV
VV VV
25° max
For horizontal installation, the fore-vacuum flange must point vertically downward (±
25°), since otherwise the turbopump can be contaminated.
Support pipes in front of the vacuum pump or remove them. No force from the pipe
system may be exerted on the fixed pump.
The maximum axial loading capacity of the high vacuum flange is 2000 N (equals 200 kg). A one-sided load on the high vacuum flange is not permitted.
In the case the rotor suddenly blocks, the torques arising from the system and the high vacuum flange must be absorbed. Only the components listed in the following can be used to fasten the turbopumps to the high vacuum flange. The components for installing the turbopumps are special designs of Pfeiffer Vacuum. Observe the minimum strength of 170 N/mm
2
for the flange material.
14
DANGER
Danger to life - impermissible fastening
Twisting or tearing-off is possible in case the rotor is suddenly blocked due to the faste­ning of pumps on a vacuum chamber with different flange variants.
The combination of different flange types is impermissible in any case.Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis-
sible fastening.
Installation
1.5d
2.5d
NOTICE
Observe shape tolerances for the counter flange!
Unevennesses of the customer supplied counter flange can lead to warping of the pump casing despite proper fastening. Leakiness and negative running characteristics can be the result.
Do not exceed an evenness of max. 0.05 mm for the whole surface.
Mounting of ISO flanges
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.
The tightness of the high vacuum flange is not at risk thereby.
Installation of ISO-K flange with ISO-K flange
Installation of ISO-F with ISO-F flange
For the installation of the flange connections the following components are available:
the valid mounting kit of the Pfeiffer Vacuum accessories programme
protection screen or splinter shield are optionally
Mind that the sealing surfaces are not damaged.Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 22 claw clamps.
Tighten the claw clamps crosswise in three steps. Tightening torque: 5, 15, 25 ±2 Nm
The connection types for installation of ISO-F to ISO-F flange are "hex screw and blind hole", "stud screw and blind hole" as well as "stud screw and through hole". The following elements are required:
the valid mounting kit of the Pfeiffer Vacuum accessories programme
protection screen or splinter shield are optionally
Hexagon screw and blind hole
Mind that the sealing surfaces are not damaged.Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 hex screws with washer.
2
For a flange material with a strength of > 270 N/mm
screw in the hex screw 1.5 d into
the blind hole.
Tighten the hex screws crosswise in three steps. Tightening torque DN 250: 10, 20, 38 ± 3 Nm
Stud screw and blind hole
Mind that the sealing surfaces are not damaged.Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 stud screws and nuts.
2
For a flange material with a strength of 170 - 270 N/mm
screw in the hex screw 2.5 d
into the blind hole.
Tighten the nuts crosswise in three steps. Tightening torque DN 250: 10, 20, 38 ± 3 Nm
15
Installation
Installation of CF­flanges
Stud screw and through hole
Mind that the sealing surfaces are not damaged.Connect the flanges according to the drawing and with the component parts of the
mounting kit.
Use the required number of 12 stud screws and nuts.
Tighten the nuts crosswise in three steps. Tightening torque DN 250: 10, 20, 38 ± 3 Nm
NOTICE
Preservation of sealing capacity
Observe the following to preserve sealing capacity:
Touch seals only with gloves.Make sure sealing lips are undamaged.
The connection types for installation of CF to CF flange are "stud screw and blind hole" as well as "hex screw and through hole". The following elements are required:
the valid mounting kit of the Pfeiffer Vacuum accessories programme
A copper seal
protection screen or splinter shield are optionally
Stud screw and blind hole
If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 32 stud screws (M8) with washers and nuts and tighten cir-
cularly with a torque of 22 ±2 Nm. After this, check the torque, since flowing of the sealing material may make it necessary to tighten the screws.
Hexagon screw and through hole
If used: Insert protective screen or splinter shield with the clamping lugs downward
into the high vacuum flange of the turbopump.
Place the seal exactly in the hollow.
Connect the flange using 32 hex screws (M8) with washers and nuts and tighten cir-
cularly with a torque of 22 ±2 Nm. After this, check the torque, since flowing of the sealing material may make it necessary to tighten the screws.

5.4 Filling up the operating fluid

Toxic vapours!
Danger of poisoning when igniting and heating synthetic operating fluids (e.g. F3) above 300°C.
Observe the application instructions.Do not allow operating fluid to make contact with tobacco products; observe safety
precautions when handling chemicals.
16
WARNING
Installation
109
109
8
8
110
8.23a / 8.35
8.23a / 8.35
50 ml
40
ml
NOTICE
Danger of the pump being destroyed
The pump can be destroyed by missing or deficient operating fluid supply.
Before starting up for the first time, fill the pump with the adequate amount of opera-
ting fluid.
For type and amount of the operating fluid please refer to the rating plate.
NOTICE
Danger of the pump being destroyed
The filling capacity of operating fluid depends on the orientation of the mounted vacuum pump.
Only fill in the operating fluid, when the vacuum pump is mounted.The operating fluid capacity for a vertically mounted pump is 40 ml.The operating fluid capacity for a horizontally mounted pump must be 50 ml !
Fig. 8: Removing the protective cover of the operating fluid pump at standard and U-versions
8 Operating fluid pump 109 Protective cover 110 Allen head screw
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Screw out the allen head screws (2x) of the operating fluid pump and remove the pro-
tective cover.
Design of the operating fluid pump
The operating fluid pump is as far as possible mirror symmetric. Screws for filling the operating fluid are located at the sides of the operating fluid pump. Screws for draining the operating fluid are located at the front wall of the operating fluid pump.
So, dependantly of the orientation of the turbopump, you can use the respectively higher positioned screw for filling or the respectively lower positioned screw for drai­ning the operating fluid.
Fig. 9: Filling the operating fluid with vertical and horizontal installation orientation
8.23a Operating fluid filler screw 8.35 O-ring
Unsrew the respectively higher positioned filler screw 8.23a of the operating fluid
pump. – Observe the O-ring 8.35 !
17
Installation
Fill in the operating fluid (max. 50 ml) into the operating fluid pump by using the filling
syringe.
Lock the filler screw 8.23a again.
– Observe the O-ring 8.35 !

5.5 Connections to the turbopump

Electronic drive unit Turbopumps with integrated electronic drive unit are designed for various applications.
Therefore different connection panels are available.
TC 1200 in standard version
TC 1200 PB for Profibus linking
TC 1200 E74 in dependence on specification SEMI E74
TC 1200 DN for DeviceNet linking
Detailed description for function, configuration and operation with the respective connec­tion panel are given in the specific operating instructions for the electronic drive unit.
Electrical connection
WARNING
Danger of unsafe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.Make sure that the system is integrated in an emergency off safety circuit.Consult Pfeiffer Vacuum for special requirements.
12
PE
Fig. 10: Pin assignment of the mains connection plug
Order the mains cable separately (see "accessories").Assemble mains cable for yourself using the supply socket (delivery) if necessary.
1 Phase L 2 Neutral conductor 3n.c.
3
PE Protective earth
Remote plug The shipment includes a mating plug for the 26-pin connection with the designation
"remote" on the TC 1200. The mating plug bridges the following connections with the
supply voltage (Pin 1), allowing the turbopump to operate without an additional operating unit or remote control:
Pin 2, Enable venting "on"
Pin 3, Motor pump "on"
Pin 4, Pumping station "on"
Pin 14, Remote access request
18
Place and fix the mating plug on the connection "remote" on the TC 1200.
CAUTION
Automatic start
After bridging the contacts Pin 1, 3, 4, 14 on the connection "remote" or using the mating plug supplied and setting up the supply voltage, the turbopump will run up immediately.
Switch on the mains supply on the turbopump immediately before operation.
Installation
12
12
Y-Connector
for Accessories
V
415b
415a
415.2
415.1
415
Accessory connec­tion
Connecting the fore­vacuum side
Up to 4 accessories can be connected to the electronic drive unit TC 1200. M12 sockets
with the designation "accessory" are available for this purpose. The accessory connec-
tions have been preconfigured at the factory. If the units listed below are connected with the preconfigured connection, they are immediately ready for operation according to the factory settings. It is possible to connect other accessories; to do so, settings must be made on the electronic drive unit.
To connect two units to one accessory connection, use the appropriate Y-Connector
from the Pfeiffer Vacuum range of accessories.
Connect the adapter to the appropriate red-coded connection on the TC 1200.
 Settings can be made via the interfaces of the TC 1200 (remote, RS-485, Profibus or
DeviceNet).
Accessory connection Connection with Y-connector Preset accessory unit
Accessory A1 Acc. A to Y-1 Sealing gas valve Accessory A2 Acc. A to Y-2 Backing pump Accessory B1 Acc. B to Y-1 Venting valve Accessory B2 Acc. B to Y-2 Casing heating unit
Overview of factory preset accessory connections on the TC 1200
Recommendation: As backing pump, use a dry-compressing vacuum pump or a rotary
vane pump from the Pfeiffer Vacuum programme. The backing pump must generate a vacuum pressure of ≤ 2 hPa.
WARNING
Damage to health due to poisonous gases
Process gases can damage health and contaminate the environment.
Safely lead away the gas emission from the backing pump!Observe all safety recommendations of the gas producer.
Fig. 11: Connecting the backing pump
415 Fore-vacuum connection 415a Backing pump
415b Backing pump relay box
415.1 Centering ring
415.2 Clamping ring
NOTICE
Design of the fore-vacuum connection regarding sudden twisting of the pump
If the rotor suddenly blocks the connection of high vacuum flanges of types ISO-KF or ISO-K can lead to twisting despite proper installation.
Keep masses small, which can be installed directly to the pump.First connect flexible line elements directly to the turbopump, if necessary.
With rigid pipe connections: Install bellows for attenuation of vibrations in the connec-
tion line.
19
Installation
Connect the fore-vacuum line with small-flange components or threaded hose cou-
plings. Do not narrow the free cross section of the fore-vacuum flange!
The backing pump is connected electrically via a relay box.Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 1200.
Default for the backing pump is "accessory A2".
Establish the mains supply for the relay box according to the accessory operating in-
structions. – Observe the valid supply voltage of the backing pump.
Make the settings and control via the interfaces of the electronic drive unit.
Venting valve The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or
power failure.
The permissible connection pressure is max. 150 kPa absolute.
17
43
43a
Fig. 12: Connecting the venting valve
17 Seal ring 43 Venting screw 43a Venting valve
Unscrew the venting screw with seal ring from the venting connection.Screw in the venting valve with seal ring.Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 1200.
Default for the venting valve is "accessory B1".
If neccessary install a venting gas supply (e.g. inert gas) to the intake (G 1/8") of the
solenoid valve.
Heating jacket The turbopump and vacuum chamber can be heated to reach the final pressure more
quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange in stainless steel design. The heating duration depends on the degree of contamination as well as the final pressure to be reached and should be at least 4 hours.
20
NOTICE
Dangerous excess temperatures
Process-related high temperatures can result in impermissible excess temperatures and thus damage to the turbopump.
Always use water cooling when a casing heating is used or when the pump is con-
nected to a heated vacuum chamber.
Installation
H
2a
2d (2x)
2b
2c
2
CAUTION
Risk of burns
High temperatures arise when the turbopump or vacuum chamber are baked out. As a result, there is a danger of burns from touching hot parts, even after the casing heating is switched off!
Thermally insulate heating jacket, pump housing and vacuum chamber, if possible
during installation.
Do not touch heating jacket, pump casing and vacuum chamber during bake out.
When using a casing heating and a water cooling unit the temperature of the connect­ed flange of the vacuum chamber must not exceed 120 °C.
The maximum permissible rotor temperature for the turbopump is 120 °C. If high tem­peratures arise for process reasons, the radiated heat input must not exceed 24 W. Install suitable screening sheets, if necessary (design information on request).
Fig. 13: Connecting the heating jacket
2 Pump casing 2a Heating jacket
2b Fixing screw 2c Heating relay box
2d Warning sticker
Bend open the outer heating jacket on the tensioning strap and place it sidewards on
to the cylindrical segment of the pump casing. – Do not bend the heating straps! – The heating jacket must seat completely on the casing segment.
Fix the heating jacket with the fixing screw on the casing.
– Observe the tightening torque for the fixing screw!
Fixing screw Tightening torque
in cold condition
M5 6 Nm 7 Nm 7 Nm M6 11 Nm 12 Nm 12 Nm
Tightening torques for fixing screws of heating jackets
Tightening torque during the heating-up
Singular retightening af­ter the cooling down
Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 1200.
Default for the casing heating is "accessory B2".
Establish the mains supply for the relay box according to the accessory operating in-
structions.
21
Installation
145a
18
17
Sealing gas connec­tion
The turbopump must be operated with sealing gas to protect it, such as in the case of unclean processes or high gas throughput. The supply is made via a sealing gas valve or alternatively via a sealing gas throttle without control. The activation of the control valve for the sealing gas connection is pre-installed in the electronic drive unit. The seal­ing gas valve is already part of the delivery consignment.
The permissible connection pressure is max. 150 kPa absolute.
When operating the pump with more than 50 % of the maximum gas throughput, seal­ing gas must be used to ensure rotor cooling.
The sealing gas flow rate amounts 17.5-20 sccm for the HiPace 2300.
Sealing gas supply with control valve
17
18
145
Fig. 14: Connecting the sealing gas valve
17 Seal ring 18 Locking screw 145 Sealing gas valve
Unscrew the locking screw with seal ring out of the sealing gas connection.Screw the sealing gas valve with seal ring into the sealing gas connection.Plug in and fix the accessory’s control lead to the corresponding accessory connection
port on the TC 1200.
Default for the sealing gas valve is "accessory A1".
Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet
side (G 1/8") of the control valve.
Sealing gas supply without control valve
Fig. 15: Connecting the sealing gas throttle
17 Seal ring 18 Locking screw 145a Sealing gas throttle
Unscrew the locking screw with seal ring out of the sealing gas connection.Screw the sealing gas throttle with sealing ring into the sealing gas connection.
22
Installation
403, G1/4”
403a
150
155
403b
Water cooling The turbopumps HiPace 2300 with TC 1200 have water cooling as standard equipment.
Cooling water requirements
Cooling water connection Hose nozzles G 1/4" Hose lines Internal diameter 7-8 mm with hose clamp
Cooling water quality filtrated, mechanically clean, optically
Oxygen content max. 4 mg/kg Chloride content max. 100 mg/kg Water hardness max. 10 °dH
Consumption of potassium permanganate max. 10 mg/kg Carbon dioxide content max. undetectable Ammonia content max. undetectable pH-value 7 - 9 Fore-line overpressure max. 600 kPa Cooling water temperature refer to "Technical Data" Cooling water consumption at max. gas throughput refer to "Technical Data"
clear, no turbidity, no sediments, chemical­ly neutral
12.53 °e
17.8 °fH 178 ppm CaC0
3
Connecting to a cooling water system
Fig. 16: Connectin g the cooling water
150 Screw-in nozzle 155 Seal ring
403 Cooling water connection 403a Fore-line
403b Return-line
Connect the cooling water connection alternatively:
– Direct connection on the pump with G1/4" internal thread. – Using screw-in nozzles with seal ring (2 pcs. each in the scope of delivery) for hose
internal diameters of 7 - 8 mm.
– Tightening torque: max. 15 Nm.
Recommendation: install dirt trap in the fore-line.
Connect the cooling water fore-line to the designated connector.Connect the cooling water return-line to the designated connector.
23
Operation

6 Operation

6.1 Commissioning

The following important settings are programmed in the electronic drive unit ex factory.
Parameter [P:027] Gas mode: 0 = heavy gases
Parameter [P:700] Set value max. run-up time monitoring: 8 min
Parameter [P:701] Rotation speed switchpoint: 80% of the nominal roation speed
Parameter [P:707] Set value rotation speed setting mode: 65 % % of the nominal ro-
Parameter [P:708] Set value power consumption: 100 %
Parameter [P:720] Venting rotation speed at delayed venting: 50% of the nominal ro-
Parameter [P:721] Venting time: 3600 s
When water cooling is used: Open cooling water supply and check the flow.When sealing gas is used: Open the sealing gas supply and check the flow.Switch on the pump by connecting the mains cable with the mains supply.
tation speed
tation speed
NOTICE
Connecting to the mains power supply
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de­struction of the pump.
Ensure the gas mode is correctly set.Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).
CAUTION
Automatic start
After bridging the contacts Pin 1, 3, 4, 14 on the connection "remote" or using the mating plug supplied and setting up the supply voltage, the turbopump will run up immediately.
Switch on the mains supply on the turbopump immediately before operation.
WARNING
Danger of electric shock
In case of defect, the parts connected to the mains supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
Insert the mains cable into the mains connection AC in.
Lock the mains cable with the mounting bracket.Connect the mains cable to the mains.Always ensure a safe connection to the protective earthing conductor (PE, protection
class I).
24
After the mains voltage is applied, the TC 1200 performs a self-test to check the supply voltage. The turbopump is set into operation.
Drive power reduction depending on the mains connection voltage
Mains connection voltage Drive power
100 - 120 V AC 700 - 930 W 200 - 240 V AC 1200 W
The power of the electronic drive unit depends on the provided mains voltage.

6.2 Operation modes

The following operation modes are available:
Operation without operating unit
Operation via "remote" connection
Operation via RS-485 and Pfeiffer Vacuum display and control units or PC
Operation via field bus

6.3 Function description

Danger due to open high vacuum flange
The rotor of the turbopump turns at high speed. If the high vacuum flange is open, there is a danger of cut injuries and that the pump can be destroyed by objects falling into it.
Never operate the pump with an open high vacuum flange.
Operation
WARNING
Operation without op­erating unit
Operation via "remote" connection
Operation with DCU or HPU
Operation via field bus
For operation without the control unit, the 26-pole D-Sub plug must be in the "remote"
connection on the TC 1200.
After operating voltage is applied, the TC 1200 performs a self-test to check the supply voltage. Once the self-test has been successfully completed on the TC 1200, the tur­bopump and the backing pump - if connected - begin to operate.
Remote control options are provided via the 26-pole D-sub connector with the designa-
tion ”remote“ on the electronic drive unit.
Consider the following manuals for the operation via remote control:
Operating instructions "Electronic drive unit TC 1200"
Consider the following manuals for the operation via Pfeiffer Vacuum display and con-
trol units:
Operating instructions "DCU"
Operating instructions "HPU"
Operating instructions "Electronic drive unit TC 1200"
Switch on the pump by connecting the mains cable with the mains supply.Settings are possible via the RS-485 by using DCU, HPU or PC.
Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible for electronic drive units with a corresponding field bus panel.
Consider the following manuals for the operation via field bus:
Operating instructions for the electronic drive unit with the respective connection
panel
25
Operation

6.4 Monitoring of the operation conditions

Operating mode dis­play via LED
LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for opera­tion with DCU or HPU.
Temperature monitor­ing
LED Symbol Steady OFF Flashing
(1/12 s active)
Green insufficient
power supply
Yellow no warning Warning
Red no malfunction Malfunction
Pumping station "OFF" Rotation speed ≤ 1Hz
The drive power is reduced in case of impermissible motor temperature or impermissibly high housing temperature. This can cause falling below the rotation speed switchpoint
Blinking (1/2 s active)
Pumping station "OFF" Rotation speed > 1 Hz
Steady ON
Pumping station "ON"
and so result in turning off the turbopump.

6.5 Switching off and venting

Switching off After the turbopump is switched off, it must be vented to avoid contamination due to par-
ticles streaming back from the fore-vacuum area.
Close the fore-vacuum line: Switch off the backing pump or close a fore-vacuum
valve.
Switch off the turbopump on the control unit or via remote control.Venting (possibilities, see below)Leave open the cooling water supply until the halt of the rotor (rotation speed < 1 Hz).
Venting Manually venting
Open the venting screw (included) in the venting connection of the turbopump about
one turn.
Venting with Pfeiffer Vacuum Venting Valve
Enable venting via the functions of the electronic drive unit.Settings are possible via the RS-485 by using DCU, HPU or PC.
Venting rotation speed Switch off the pumping station Mains power failure
50% of the nominal rotation speed
1)
When mains power is restored the venting procedure is aborted.
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions from Pfeiffer Vacuum.
Vent for 20 seconds at a rate of pressure rise of max. 15 hPa/s.
– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size
of the vacuum chamber.
– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.
Then vent with an additional venting valve of any desired size.
Venting valve opens for 3600 s (1 h, works setting)
1)
Venting valve opens for 3600 s (1 h, works setting)
26

7 Maintenance / replacement

Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
Toxic vapours!
Danger of poisoning when igniting and heating synthetic operating fluids (e.g. F3) above 300°C.
Observe the application instructions.Do not allow operating fluid to make contact with tobacco products; observe safety
precautions when handling chemicals.
Disclaimer of liability
Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or operating malfunctions due to improperly performed maintenance. The liability and war­ranty entitlement expires.
Maintenance / replacement
WARNING
WARNING
NOTICE

7.1 Maintenance intervals and responsibilities

Clean the turbopump externally with a lint-free cloth and little industrial alcohol.
Change the operating fluid yourself.
Change the operating fluid at least every 4 years.
Change the turbopump bearing at least every 4 years.
– Contact Pfeiffer Vacuum Service.
Clarify shorter maintenance intervals for extreme loads or impure processes with Pfei­ffer Vacuum Service.
For all other cleaning, maintenance or repair work, please contact your Pfeiffer Vacu­um service location.
27
Maintenance / replacement

7.2 Changing the operating fluid

Poisoning hazard through contact with materials that damage health.
Operating fluid and parts of the pump may contain toxic substances from the pumped media.
Dispose of operating fluid in accordance with the applicable regulations. Safety data
sheet on request or under www.pfeiffer-vacuum.com
Prevent health hazards or environmental damage due to contamination by means of
appropriate safety precautions.
Decontaminate affected parts before carrying out maintenance work.
WARNING
8
109
109
110
8
Fig. 17: Removing the protective cover of the operating fluid pump at standard and U-versions
8 Operating fluid pump 109 Protective cover 110 Allen head screw
Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Screw out the allen head screws (2x) of the operating fluid pump and remove the pro-
tective cover.
Design of the operating fluid pump
The operating fluid pump is as far as possible mirror symmetric. Screws for filling the operating fluid are located at the sides of the operating fluid pump. Screws for draining the operating fluid are located at the front wall of the operating fluid pump.
So, dependantly of the orientation of the turbopump, you can use the respectively higher positioned screw for filling or the respectively lower positioned screw for drai­ning the operating fluid.
28
8.23b / 8.35
8.23b / 8.35
Fig. 18: Draining the operating fluid with vertical and horizontal installation orientation
8.23b Operating fluid drain screw 8.35 O-ring
Unsrew the respectively lower positioned drain screw 8.23b of the operating fluid
pump. – Observe the O-ring 8.35 !
Drain the operating fluid in a suitable tank.Lock the drain screw 8.23b again.
– Observe the O-ring 8.35 !
40
ml
Maintenance / replacement
8.23a / 8.35
8.23a / 8.35
Fig. 19: Filling the operating fluid with vertical and horizontal installation orientation
8.23a Operating fluid filler screw 8.35 O-ring
Unsrew the respectively higher positioned filler screw 8.23a of the operating fluid
pump. – Observe the O-ring 8.35 !
Fill in the operating fluid (max. 50 ml) into the operating fluid pump by using the filling
syringe.
Lock the filler screw 8.23a again.
– Observe the O-ring 8.35 !

7.3 Replacing the electronic drive unit

Observe mounting orientations when replacing the electronic drive unitl
Electronic drive unit replacement can be carried out at the installed pump. When dis­mounting the pump from the system, observe:
Drain pump operating fluid before dismounting from the system.Pay attention to the properties after the model designation on the name plate!Observe the pictographs on the pump housing!Replace the electronic drive unit at the horizontally oriented pump with the fore-vacu-
um connection pointing downward (± 25°).
50 ml
NOTICE
NOTICE
Damages to the pump and drive
Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.
Never separate the electronic drive unit from the pump when the mains power is con-
nected or the rotor is running.
Operating parameters of the electronic drive unit
The factory operating parameters are always preset with replacement shipments.
The use of a HPU enables the storing and the reuse of an existing parameter record.Reset any individually changed application parameters.Refer to the manual "Electronic drive unit".
Do not exercise any mechanical load on the electronic drive unit.Turn off the vacuum pump, vent to atmospheric pressure and allow to cool, if neces-
sary.
Only separate the pump and the electronic drive unit from each other after disconnect-
ing the supply voltage and the complete standstill of the pump.
Remove the vacuum pump from the system, if necessary.
29
Maintenance / replacement
94 96
8713
4
94 96
Fig. 20: Disassembly of th e TC 1200
4 Pump bottom part 13 Electronic drive unit
87 O-ring 94 Allen head screw
96 Allen head screw
Unscrew Allen head screws (7x) from the electronic drive unit.Pull the electronic drive unit straight off the pump.
– Observe the plug connection! – Observe O-ring 87!
Don’t touch any electrostatic sensitive devices.
87
Fix the O-ring 87 in the groove of the pump bottom part, if necessary. Ensure correct
seating!
Set the new electronic drive unit 13 with the straight edge at the height of the operating
fluid pump and fold carefully to the pump bottom part. – Observe the plug connection!
Tighten the electronic drive unit 13 with allen head screws 94 (5x) and 96 (2x).
– Tightening torque 2.5 Nm.
30
Maintenance / replacement
NOTICE
Visual inspection - avoid malfunction!
Incorrect assembling of the electronic drive unit may lead to malfunctions!
The base plate of the electronic drive unit must be seated planar on the cooling plate
of the pump.
If necessary loosen and reassemble the electronic drive unit. Observe the O-ring!
Rotation speed set value
The typical nominal rotation speed of a turbopump is factory-set in the electronic drive unit. If the electronic drive unit is replaced or a different pump type is used, the reference set value of the nominal rotation speed must be confirmed. This procedure is part of a redundant safety system for avoiding excess rotation speeds.
HiPace Nominal rotation speed confirmation [P:777]
1200 / 1500 630 Hz 1800 / 2300 525 Hz
Adjust the parameter [P:777] according to the pump type.Alternatively: If no display and control unit is available, please use the "SpeedCon-
figurator" of the spare parts delivery.
31
Decommissioning

8 Decommissioning

8.1 Shutting down for longer periods

Contamination of parts and operating fluid by pumped media is possible.
Poisoning hazard through contact with materials that damage health.
In the case of contamination, carry out appropriate safety precautions in order to pre-
vent danger to health through dangerous substances.
Decontaminate affected parts before carrying out maintenance work.
If the turbopump should be shut down for longer than a year:
Remove the vacuum pump from the system, if necessary.Drain the operating fluid.Close the high vacuum flange of the turbopump.Evacuate turbopump via the fore-vacuum flange.Vent turbopump via the venting connection with oil-free, dry air or inert gas.Close the flange openings by using the original protective covers.Close further connection ports by using the corresponding protective covers.Store the pump only indoors at temperatures between -25 °C and +55 °C. In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-
wrapped in a plastic bag together with a bag of desiccant.
WARNING

8.2 Re-starting

8.3 Disposal

NOTICE
Re-starting
The serviceability of the operating fluid without operation is a maximum of 4 years. Be-
fore restarting after a shut-down of 4 years or longer, carry out the following work.
Replace the operating fluid.Replace bearings.Follow the maintenance instructions and inform Pfeiffer Vacuum.
Check turbopump for contamination and moisture.Clean the turbopump externally with a lint-free cloth and little industrial alcohol.If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.If necessary, have the bearings replaced. Take into account the total running time.Installation and commissioning in accordance with the operating instructions.
Products or parts thereof (mechanical and electrical components, operating fluids, etc.) may cause environmental burden.
Safely dispose of the materials according to the locally applicable regulations.
32
Malfunctions

9 Malfunctions

If malfunctions on the pump occur, you will find possible causes and instructions for re­pair in the following table.

9.1 Rectifying malfunctions

Problem Possible causes Remedy
Pump will not start; none of the built-in LEDs on the TC 1200 lights up
Pump will not start; green LED on the TC 1200 is flashing
Pump does not attain the final rotational speed within the specified run-up time
Pump does not attain the ultimate pres­sure
Unusual noises during operation ● Bearing damage Contact the Pfeiffer Vacuum Service
Red LED on the TC 1200 is on Collective fault Reset by switching the mains OFF/ON
Electrical supply interrupted Check plug contacts on the power supply
Operating voltage incorrect Apply correct operating voltage
No operating voltage applied Apply operating voltage
TC 1200 defective Request an exchange of the TC 1200
At operation without control panel: Pins 1-
3, 1-4 or 1-14 are not connected on the "remote" connection
At operation via RS-485: Bridge at Pin 1­14 prevents control commands
At operation via RS-485 (without counter plug): Parameters of the electronic drive unit not set
Fore-vacuum pressure too high Ensure function and suitability of the backing
Leak Perform leak detection
Gas load too high Reduce process gas supply
Rotor runs hard, bearing defective Check the bearing for noises
Setpoint for run-up time to low Extend the run-up time via DCU, HPU or PC
Thermal overload:
– Lack of air ventilation – Water flow too low – Fore-vacuum pressure too high – Ambient temperature too high
Pump is dirty Bake out the pump
Vacuum chamber, pipes or pump are
leaky
Rotor damage Contact the Pfeiffer Vacuum Service
Splinter shield or protective screen are
loose
1)
If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Service.
Check supply lines on the power supply
Observe the rating plate
Contact the Pfeiffer Vacuum ServiceConnect the pins 1-3, 1-4 or 1-14 on the "re-
mote" connection
Install the mating plug (scope of delivery) to the
"remote" connection.
Remove the bridge at the "remote" connectionRemove the mating plug from the "remote" con-
nection.
Set parameters [P: 010] and [P: 023] "ON" via
interface RS-485.
Please refer to operating instructions of the
electronic drive unit.
pump
Check sealings and flange fasteningsEliminate leaks
Contact the Pfeiffer Vacuum Service
Reduce thermal loads
– Ensure adequate cooling – Ensure the cooling water flow – Lower the fore-vacuum pressure – Adjust ambient conditions
Cleaning in case of heavy contamination
– Contact the Pfeiffer Vacuum Service
Leak detection starting from the vacuum cham-
ber
Eliminate leaks
Correct the seat of the splinter shield or the pro-
tective screen
Observe the installation notes
Reset via pin 13 on the "REMOTE" connectionDifferentiated malfunction display is possible via
"RS 485"
Contact the Pfeiffer Vacuum Service
1)
33
Service

10 Service

Pfeiffer Vacuum offers first-class service!
Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService
Maintenance / repair in the nearby ServiceCenter or ServicePoint
Fast replacement with exchange products in mint condition
Advice on the most cost-efficient and quickest solution
Detailed information, addresses and forms at: www.pfeiffer-vacuum.com (Service).
Maintenance and repair in the Pfeiffer Vacuum ServiceCenter
The following steps are necessary to ensure a fast, smooth servicing process:
Download the forms "Service Request" and "Declaration on Contamination".Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum
service address.
Include the confirmation on the service request from Pfeiffer Vacuum with your ship-
ment.
Fill out the declaration on contamination and include it in the shipment (required!).Dismantle all accessories.Drain the operating fluid (applies for turbopumps with pumping speed > 700 l/s).Leave electronic drive on the pump.Close the flange openings by using the original protective covers.If possible, send pump or unit in the original packaging.
1)
Sending of contaminated pumps or devices
No units will be accepted if they are contaminated with micro-biological, explosive or ra­dioactive substances. “Hazardous substances” are substances and compounds in ac­cordance with the hazardous goods directive (current version). If pumps are contaminat­ed or the declaration on contamination is missing, Pfeiffer Vacuum performs decontamination at the shipper's expense.
Neutralise the pump by flushing it with nitrogen or dry air.Close all openings airtight.Seal the pump or unit in suitable protective film.Return the pump/unit only in a suitable and sturdy transport container and send it in
while following applicable transport conditions.
Exchange unit
The factory operating parameters are always preset with exchange units. If you use changed parameters for your application, you have to set these again.
Service orders
All service orders are carried out exclusively according to our repair conditions for vacu­um units and components.
34
1)
Forms under www.pfeiffer-vacuum.com
Spare parts HiPace 2300
150
155
142
143
145
146
144
13

11 Spare parts HiPace 2300

Item Designation Size Order number Notes Pieces Order
qty.
13 Electronic drive unit TC 1200 according to the rating plate depends on the connection panel 1 142 Syringe 50 ml PM 006 915 -U 1 143 Operating fluid F3 50 ml PM 006 336 -T other quantities on request 1
Mating plug "remote" PM 061 378 -X with bridges 1 145 Sealing gas valve 17.5 - 20 sccm PM Z01 313 1 146 Mains connection socket HAN 3 PM 061 200 -T 1 150 Screw-in nozzle G 1/4" P 0998 067 for hose internal Ø of 7-8 mm 2 155 Seal ring P 3529 145 -A for screw-in nozzle 2
Please also specify model number of the the rating plate when ordering accessories or spare parts.
35
Accessories

12 Accessories

Designation DN 250 ISO-K DN 250 ISO-F DN 250 CF-F
DCU 002, Display control unit PM 061 348 -T PM 061 348 -T PM 061 348 -T HPU 001, handheld programming unit PM 051 510 -T PM 051 510 -T PM 051 510 -T Accessories package for HPU - Power supply, software and PC cable PM 061 005 -T PM 061 005 -T PM 061 005 -T Mains cable 230 V AC with Euro-style safety plug, VII-HAN 3A, 3 m P4 564 309 HA P4 564 309 HA P4 564 309 HA Mains cable with UL-plug (115 V AC), 3 m PM 061 187 -X PM 061 187 -X PM 061 187 -X Mains cable 208 V AC with UL plug, NEMA-HAN 3A, 3 m P4 564 309 HB P4 564 309 HB P4 564 309 HB Venting valve screened, 24 V DC, G 1/8", for connection to TC 400/1200 and TM
700 TTV 001, air drier for venting turbopumps PM Z00 121 PM Z00 121 PM Z00 121 Venting flange, DN 10 KF, G 1/8" PM 033 737 -T PM 033 737 -T PM 033 737 -T Heating jacket for HiPace 1800/2300 with TC 1200, 230 V AC, Euro-style safety
plug Heating jacket for HiPace 1800/2300 with TC 1200, 208 V AC, UL plug PM 061 564 -T Heating jacket for HiPace 1800/2300 with TC 1200, 115 V AC, UL plug PM 061 565 -T Backing pump relay box, single phase 5 A, for TC 400/1200 and TM 3000 PM 061 374-T PM 061 374-T PM 061 374-T Backing pump relay box, single phase 20 A, for TC 400/1200, TCP 350 and TM
3000 TVV 001 fore-vacuum safety valve, 230 V AC PM Z01 205 PM Z01 205 PM Z01 205 TVV 001 fore-vacuum safety valve, 115 V AC PM Z01 206 PM Z01 206 PM Z01 206 Sealing gas valve, screened, for HiPace 1200-2300 with TC 1200 PM Z01 313 PM Z01 313 PM Z01 313 Sealing gas throttle for HiPace 1200-2300 PM Z01 318 PM Z01 318 PM Z01 318 Centering ring, with multifunction coating, DN 250 ISO-K/-F PM 016 225-U PM 016 225-U Centering ring, with multifunction coating and integrated protection screen, DN
250 ISO-K/-F Centering ring, with multifunction coating and integrated splinter shield, DN 250
ISO-K/-F Protection screen for turbopumps, DN 250 CF-F PM 016 345 Splinter screen for turbopumps, DN 250 CF-F PM 016 324 Vibration damper for HiPace 1500 and HiPace 2300, DN 250 ISO-K PM 006 670 -X PM 006 670 -X Vibration damper for HiPace 1500 and HiPace 2300, DN 250 CF-F PM 006 671 -X USB converter to RS-485 interface PM 061 207 -T PM 061 207 -T PM 061 207 -T Interface cable, M12m/M12, 3 m PM 061 283 -T PM 061 283 -T PM 061 283 -T Interface cable, 3 m, M12, straight, 90° PM 061 791 -T PM 061 791 -T PM 061 791 -T Y-Connector M12 to RS-485 P 4723 010 P 4723 010 P 4723 010 Y-Connector M12 for accessories P 4723 012 P 4723 012 P 4723 012 Remote plug for TC 400/1200, with bridges PM 061 378 -X PM 061 378 -X PM 061 378 -X Remote adapter for RS-485 PM 061 649 -T PM 061 649 -T PM 061 649 -T Connection cable, plug M12, RJ 45, 3 m PM 051 726 -T PM 051 726 -T PM 051 726 -T Mains supply socket PM 061 200 -T PM 061 200 -T PM 061 200 -T Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring,
bracket screws Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring,
protection screen, bracket screws Mounting kit for HiPace 2300, DN 250 ISO-K, including coated centering ring,
splinter shield, bracket screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, protection screen, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, splinter shield, hexagon screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, stud screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, protection screen, stud screws Mounting kit for HiPace 1500, HiPace 2300 and HiPace 2400 MC, DN 250 ISO-
F, including coated centering ring, splinter shield, stud screws Set of hexagon screws for trough hole, DN 250 CF-F PM 016 694 -T Set of stud screws for trough hole, DN 250 CF-F PM 016 695-T Set of stud screws for trough hole, DN 250 CF-F PM 016 737-T
PM Z01 291 PM Z01 291 PM Z01 291
PM 061 563 -T
PM 061 375 -T PM 061 375 -T PM 061 375 -T
PM 016 227 -U PM 016 227 -U
PM 016 226 -U PM 016 226 -U
PM 016 415 -T
PM 016 417 -T
PM 016 416-T
PM 016 480 -T
PM 016 482 -T
PM 016 481 -T
PM 016 485 -T
PM 016 487 -T
PM 016 486 -T
36
Technical data and dimensions

13 Technical data and dimensions

13.1 General

Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps:
Recommendations of PNEUROP committee PN5
ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum-
pump performance - General description"
ISO 5302; 2003: "Vacuum technology - Turbomolecular pumps - Measurement of per­formance characteristics"
Ultimate pressure: using a test dome and a 48 hrs. period of baking out
Gas throughput: water cooling; backing pump = rotary vane pump (120 m
Cooling water consumption: at max. gas throughput, cooling water temp. 25 °C
Integral leak rate: using a Helium concentration of 100 %, period 10 s
Sound pressure level: Distance 1 m to the pump

13.2 HiPace 2300 / HiPace 2300 U

Parameter HiPaceTM 2300 / U HiPaceTM 2300 / U HiPaceTM 2300 / U
Flange (in) DN 250 ISO-K DN 250 ISO-F DN 250 CF-F Flange (out) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF Pumping speed for Ar 1850 l/s 1850 l/s 1850 l/s Pumping speed for CF Pumping speed for H
4
2
Pumping speed for He 2050 l/s 2050 l/s 2050 l/s Pumping speed for N
2
Compression ratio for Ar > 1 · 10 Compression ratio for CF Compression ratio for H
4
2
Compression ratio for He 3 · 10 Compression ratio for N
2
Gas throughput at full rotational speed for Ar 16 hPa l/s 16 hPa l/s 16 hPa l/s Gas throughput at full rotational speed for CF
4
Gas throughput at full rotational speed for He 20 hPa l/s 20 hPa l/s 20 hPa l/s Gas throughput at full rotational speed for H Gas throughput at full rotational speed for N
2
2
Fore-vacuum max. for Ar 2.4 hPa 2.4 hPa 2.4 hPa Fore-vacuum max. for CF Fore-vacuum max. for H
4
2
Fore-vacuum max. for He 1 hPa 1 hPa 1 hPa Fore-vacuum max. for N
2
Run-up time 4 min 4 min 4 min Ultimate pressure with OnTool
TM
DryPump < 1 · 10-7hPa < 1 · 10-7hPa < 5 · 10 Rotation speed ± 2 % 31500 rpm 31500 rpm 31500 rpm Rotation speed: variable 50-100 % 50-100 % 50-100 % Power characteristic line in gas mode 1, vertex A 750/31500 W/rpm 750/31500 W/rpm 575/31500 W/rpm Power characteristic line in gas mode 1, vertex B 750/31500 W/rpm 750/31500 W/rpm 619/11340 W/rpm Power characteristic line in gas mode 0, vertex C 750/31500 W/rpm 750/31500 W/rpm 518/31500 W/rpm Power characteristic line in gas mode 0, vertex D 750/31500 W/rpm 750/31500 W/rpm 584/10560 W/rpm Sound pressure level 50 dB (A) 50 dB (A) 50 dB (A) Relative humidity of air 5-85, non- condensing % 5-85, non- condensing % 5-85, non- condensing % Protection category IP 54 IP 54 IP 54 Connection pressure max. for venting/sealing gas valve 150 kPa 150 kPa 150 kPa Integral leak rate < 2 · 10 Power consumption max. 1350 VA 1350 VA 1350 VA Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz Mains requirement: voltage (range) 100-120/200-240 V AC 100-120/200-240 V AC 100-120/200-240 V AC Current consumption max. 10 A 10 A 10 A
1450 l/s 1450 l/s 1450 l/s 1850 l/s 1850 l/s 1850 l/s
1900 l/s 1900 l/s 1900 l/s
> 1 · 10 2 · 10
> 1 · 10
8
8
4
5
8
> 1 · 10 > 1 · 10 2 · 10 3 · 10 > 1 · 10
8
8
4
5
8
> 1 · 10 > 1 · 10 2 · 10 3 · 10 > 1 · 10
14 hPa l/s 14 hPa l/s 14 hPa l/s
> 30 hPa l/s > 30 hPa l/s > 30 hPa l/s 20 hPa l/s 20 hPa l/s 20 hPa l/s
2.8hPa 2.8hPa 2.8hPa
0.55 hPa 0.55 hPa 0.55 hPa
1.8hPa 1.8hPa 1.8hPa
-8
hPa l/s < 2 · 10-8hPa l/s < 2 · 10-8hPa l/s
3
/h)
8
8
4
5
8
-10
hPa
37
Technical data and dimensions
Parameter HiPaceTM 2300 / U HiPaceTM 2300 / U HiPaceTM 2300 / U
Mounting orientation Standard (0°-90°) Standard (0°-90°) Standard (0°-90°) Venting connection G 1/8" G 1/8" G 1/8" Weight 34 kg 35 kg 47 kg Cooling method, standard Water Water Water Cooling water temperature 15-35 °C 15-35 °C 15-35 °C Cooling water consumption 100 l/h 100 l/h 100 l/h Permissible magnetic field max. 7 mT 7 mT 7 mT Interfaces RS-485, Remote RS-485, Remote RS-485, Remote

13.3 HiPace 2300 C / HiPace 2300 U C

Parameter HiPaceTM 2300 C / U C HiPaceTM 2300 C / U C HiPaceTM 2300 C / U C
Flange (in) DN 250 ISO-K DN 250 ISO-F DN 250 CF-F Flange (out) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF Pumping speed for Ar 1850 l/s 1850 l/s 1850 l/s Pumping speed for CF Pumping speed for H
4
2
Pumping speed for He 2050 l/s 2050 l/s 2050 l/s Pumping speed for N
2
Compression ratio for Ar > 1 · 10 Compression ratio for CF Compression ratio for H
4
2
Compression ratio for He 3 · 10 Compression ratio for N
2
Gas throughput at full rotational speed for Ar 16 hPa l/s 16 hPa l/s 16 hPa l/s Gas throughput at full rotational speed for CF
4
Gas throughput at full rotational speed for He 20 hPa l/s 20 hPa l/s 20 hPa l/s Gas throughput at full rotational speed for H Gas throughput at full rotational speed for N
2
2
Fore-vacuum max. for Ar 2.4 hPa 2.4 hPa 2.4 hPa Fore-vacuum max. for CF Fore-vacuum max. for H
4
2
Fore-vacuum max. for He 1hPa 1hPa 1hPa Fore-vacuum max. for N
2
Run-up time 4 min 4 min 4 min
TM
Ultimate pressure with OnTool
DryPump < 1 · 10-7hPa < 1 · 10-7hPa < 1 · 10-8hPa Rotation speed ± 2 % 31500 rpm 31500 rpm 31500 rpm Rotation speed: variable 50-100 % 50-100 % 50-100 % Power characteristic line in gas mode 1, vertex A 750/31500 W/rpm 750/31500 W/rpm 575/31500 W/rpm Power characteristic line in gas mode 1, vertex B 750/31500 W/rpm 750/31500 W/rpm 619/11340 W/rpm Power characteristic line in gas mode 0, vertex C 750/31500 W/rpm 750/31500 W/rpm 518/31500 W/rpm Power characteristic line in gas mode 0, vertex D 750/31500 W/rpm 750/31500 W/rpm 584/10560 W/rpm Sound pressure level 50 dB (A) 50 dB (A) 50 dB (A) Relative humidity of air 5-85, non- condensing % 5-85, non- condensing % 5-85, non- condensing % Protection category IP 54 IP 54 IP 54 Connection pressure max. for venting/sealing gas valve 150 kPa 150 kPa 150 kPa Integral leak rate < 2 · 10 Power consumption max. 1350 VA 1350 VA 1350 VA Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz Mains requirement: voltage (range) 100-120/200-240 V AC 100-120/200-240 V AC 100-120/200-240 V AC Current consumption max. 10 A 10 A 10 A Venting connection G 1/8" G 1/8" G 1/8" Weight 34 kg 35 kg 47 kg Cooling method, standard Water Water Water Cooling water temperature 15-35 °C 15-35 °C 15-35 °C Cooling water consumption 100 l/h 100 l/h 100 l/h Permissible magnetic field max. 7 mT 7 mT 7 mT Interfaces RS-485, Remote RS-485, Remote RS-485, Remote
1450 l/s 1450 l/s 1450 l/s 1850 l/s 1850 l/s 1850 l/s
1900 l/s 1900 l/s 1900 l/s
> 1 · 10 2 · 10
> 1 · 10
8
8
4
5
8
> 1 · 10 > 1 · 10 2 · 10 3 · 10 > 1 · 10
8
8
4
5
8
> 1 · 10 > 1 · 10 2 · 10 3 · 10 > 1 · 10
8
8
4
5
8
14 hPa l/s 14 hPa l/s 14 hPa l/s
> 30 hPa l/s > 30 hPa l/s > 30 hPa l/s 20 hPa l/s 20 hPa l/s 20 hPa l/s
2.8 hPa 2.8 hPa 2.8 hPa
0.55 hPa 0.55 hPa 0.55 hPa
1.8 hPa 1.8 hPa 1.8 hPa
-8
hPa l/s < 2 · 10-8hPa l/s < 2 · 10-8hPa l/s
38

13.4 Dimensions

1
0
°
1
6
1
.
5
151.1
4
0
°
4
3
°
2
5
0
.
5
1
4
2
G1/8
DN 40 ISO-KF
2
2
8
.
5
3
9
1
.
5
2
2
1
.
4
1
6
6
.
5
DN 250 ISO-K
G1/4
1
5
°
4
0
°
G1/8
Ø311
Ø290
3
1
8
4
8
°
F
F F
SG
SG
H
H
1
0
°
1
6
1
.
5
151.1
4
0
°
4
3
°
2
5
8
.
5
1
5
0
DN 40 ISO-KF
2
3
6
.
5
3
9
9
.
5
2
2
9
.
4
1
6
6
.
5
G 1/4
1
5
°
4
0
°
G 1/8
G 1/8
3
2
6
4
8
°
DN 250 ISO-F
Ø311
335Ø
F
F
F
SG
SG
H H
Technical data and dimensions
Fig. 21: HiPace 2300, DN 250 ISO-K
Fig. 22: HiPace 2300, DN 250 ISO-K
DN 250 CF-F
H
1
6
1
°
5
G 1/4
1
F
°
3
°
4
0
4
SG
151.1
167.5
40°
.
5
4
.
5
4
.
4
1
2
5 2
° 0 1
F
Fig. 23: HiPace 2300, DN 250 CF-F
5
. 4 1 4
1 4 3
5
. 3 7 2
G 1/8
DN 40 ISO-KF
H
8
. 0 7
G 1/8
SG
1
F
39

Declaration of conformity

according to the EC directive:
Machinery 2006/42/EC (Annex II, no. 1 A)
We hereby declare that the product cited below satisfies all relevant provisions of EC
directive "Machinery" 2006/42/EC.
In addition, the product cited below satisfies all relevant provisions of EC directive "Elec-
tromagnetic Compatibility" 2004/108/EC .
The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.
HiPace 2300
Guidelines, harmonised standards and national standards and specifications which have been applied:
Signatures:
(M.Bender) Managing Director
DIN EN ISO 12100 : 2011-03
DIN EN 1012-2 : 1996
DIN EN 61010-1 : 2002
(Dr. M. Wiemer) Managing Director
Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany
CE/2011
Leading. Dependable. Customer Friendly
Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide. For German engineering art, competent advice and reliable services.
Ever since the invention of the turbopump, we´ve been setting standards in our industry. And this claim to leadership will continue to drive us in the future.
You are looking for a perfect vacuum solution? Please contact us:
Pfeiffer Vacuum GmbH
Headquarters • Germany T +49 6441 802-0 info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.com
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