Pfeiffer Hicube ECO User Manual

OPERATING INSTRUCTIONS

EN

HICUBE ECO

Turbo pumping stations

Translation of the Original

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbo pumping station is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service. With this expertise, we have acquired a multitude of skills contributing to an efficient and secure implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our product offers you the solution that supports you in the effective and trouble-free execution of your individual application.

Please read these operating instructions before putting your product into operation for the first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer- vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your product may not be equipped with all features described in this document. Pfeiffer Vacuum constantly adapts its products to the latest state of the art without prior notice. Please take into account that online operating instructions can deviate from the printed operating instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from the use of the product that contradicts its proper use or is explicitly defined as foreseeable misuse.

Copyright

This document is the intellectual property of Pfeiffer Vacuum and all contents of this document are protected by copyright. They may not be copied, altered, reproduced or published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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List of tables

Tbl. 1: Stickers on the product...............................................................................................8

Tbl. 2: Abbreviations used in the document.......................................................................... 9

Tbl. 3: Limits of use for turbopump stations.........................................................................14

Tbl. 4: Pumping station component combination options....................................................16

Tbl. 5: Requirements for on-site high vacuum connection.................................................. 22

Tbl. 6: Changing pumping speed with splinter shield or protective screen..........................22

Tbl. 7: Factory setting of key parameters on delivery..........................................................33

Tbl. 8: Description of the key functions of the DCU.............................................................33

Tbl. 9: LED display and meaning at the DCU......................................................................35

Tbl. 10: Factory settings for delayed venting of turbopumps.................................................36

Tbl. 11: Preset accessory connections..................................................................................38

Tbl. 12: Troubleshooting........................................................................................................43

Tbl. 13: Warning and error messages when using the DCU................................................. 43

Tbl. 14: Error and warning messages for turbopump electronic drive unit............................ 45

Tbl. 15: Error and warning messages for MVP 015 diaphragm pump electronic drive unit...46

Tbl. 16: Conversion table: Pressure units..............................................................................50

Tbl. 17: Conversion table: Units for gas throughput.............................................................. 50

Tbl. 18: Technical data HiCube 30 Eco, DN 40 ISO-KF........................................................51

Tbl. 19: Technical data HiCube 30 Eco, DN 63 CF-F............................................................51

Tbl. 20: Technical data HiCube 30 Eco, DN 63 ISO-K.......................................................... 52

Tbl. 21: Technical data HiCube 80 Eco, DN 40 ISO-KF........................................................52

Tbl. 22: Technical data HiCube 80 Eco, DN 63 CF-F............................................................53

Tbl. 23: Technical data HiCube 80 Eco, DN 63 ISO-K.......................................................... 53

Tbl. 24: Technical data HiCube 300 Eco, DN 100 CF-F........................................................54

Tbl. 25: Technical data HiCube 300 Eco, DN 100 ISO-K...................................................... 55

List of tables

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List of figures

Fig. 1: Position of the labels on the product.......................................................................... 9

Fig. 2: Overview: Turbo and backing pump combinations...................................................15

Fig. 3: Example combinations product overview................................................................. 16

Fig. 4: DCU control panel.................................................................................................... 17

Fig. 5: Transporting the turbo pumping station manually.................................................... 18

Fig. 6: Secure HiCube 300 Eco with lashing straps............................................................ 21

Fig. 7: Flange connection ISO-KF to ISO-KF...................................................................... 23

Fig. 8: Flange connection ISO-K to ISO-F, bracket screws.................................................24

Fig. 9: Flange connection CF-F, hexagon head screw and through hole............................26

Fig. 10: Flange connection CF-F, stud screw and tapped hole............................................. 26

Fig. 11: Flange connection CF-F, stud screw and through hole............................................27

Fig. 12: Example backing pump exhaust connection............................................................ 27

Fig. 13: Remove DCU from pumping station.........................................................................28

Fig. 14: DCU connection as remote control...........................................................................29

Fig. 15: Backing pump transport lock.................................................................................... 30

Fig. 16: Example: Connecting the grounding cable...............................................................30

Fig. 17: Power supply connector and master switch on HiCube Eco.................................... 31

Fig. 18: Example: DCU display for second parameter set.....................................................34

Fig. 19: Replace main fuses..................................................................................................38

Fig. 20: Electrical connections...............................................................................................39

Fig. 21: Dismantling the turbopump.......................................................................................39

Fig. 22: Dimensions of HiCube 30 Eco, DN 40 ISO-KF........................................................ 55

Fig. 23: Dimensions of HiCube 30 Eco, DN 63 CF-F............................................................ 56

Fig. 24: Dimensions of HiCube 30 Eco, DN 63 ISO-K...........................................................56

Fig. 25: Dimensions of HiCube 80 Eco, DN 40 ISO-KF........................................................ 56

Fig. 26: Dimensions of HiCube 80 Eco, DN 63 CF-F............................................................ 56

Fig. 27: Dimensions of HiCube 80 Eco, DN 63 ISO-K...........................................................57

Fig. 28: Dimensions of HiCube 300 Eco, DN 100 CF-F........................................................ 57

Fig. 29: Dimensions of HiCube 300 Eco, DN 100 ISO-K.......................................................57

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the designated product and provide the most important information for safe usage of the product. The descriptions comply with applicable directives. All information provided in these operating instructions refer to the current development status of the product. The documentation remains valid as long as the customer does not modify the product in any way.

1.1.1 Applicable documents

HiCube Eco Operating instructions

Declaration of conformity A component of these instructions

Operating instructions for the individual components see product description

About this manual

1.1.2 Variants

This manual applies to HiCube Eco ling turbopump stations:

●

HiCube 30 Eco

●

HiCube 80 Eco

●

HiCube 300 Eco

1.2 Target group

This operating instructions are aimed at all persons performing the following activities on the product:

●

transport,

●

setup (installation),

●

usage and operation,

●

decommissioning,

●

maintenance and cleaning,

●

storage or disposal.

The work described in this document is only permitted to be performed by persons with the appropriate technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vacuum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required action is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►

This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1.

Step 1

2.

Step 2

3.

...

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C

US

TÜV Rheinland

Fuse

S/N

Mod.

HiCube 80 Eco PM S74 100 00

- - - - - - - -

P/N

Input Mass

D-35614 Asslar

Made in Germany 2018/06

T 2 A H 250 VAC 100-240 V +/-10 % 2.00 A 50/60 Hz

12.5 kg

VOR INBETRIEBNAHME TRANSPORTSICHERUNG LÖSEN BEFORE USE UNFASTEN THE TRANSPORT PROTECTION

warranty seal

About this manual

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

Rating plate

The rating plate is located on the back of the pumping station housing.

Transport protection

This sticker indicates that the backing pump transport lock must be released prior to commissioning.

Tbl. 1: Stickers on the product

Closure seal

The product is sealed ex-factory. Damaging or removing a closure seal results in loss of the warranty.

Protection class

The sticker describes protection class 1 for the product. The positioning indicates the position for the ground connection.

Electrical voltage warning

The sticker warns of the risk of electric shock when working with the housing open.

Mandatory: disconnect mains plug

The sticker indicates that the mains plug is to be disconnected from the device prior to installation and maintenance work.

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1 2,3 4

5

6

7

About this manual

Fig. 1: Position of the labels on the product

1 Transport lock sticker 5 Transport lock sticker

2 Closure seal (vacuum pump) 6 Rating plate

3 Ground connection sticker (vacuum pump) 7 Mandatory disconnect mains plug sign

4 Electrical voltage (power supply pack) warning sign

1.3.4 Abbreviations

Abbreviation Meaning in the document

CF flange: Metal-sealed connector conforming to ISO 3669

d Measurement of the diameter (in mm)

DCU Display Control Unit (display and control unit from Pfeiffer Vacuum).

DN Nominal diameter as size description

f Measurement of the rotation speed of a vacuum pump (frequency, in rpm or Hz)

HV High vacuum flange, high vacuum side

ISO flange: Connector conforming to ISO 1609 and ISO 2861

LC Display: Liquid crystal display (LCD)

LED Light-emitting diode

MVP Diaphragm vacuum pump

PE Earthed conductor (protective earth)

[P:xxx] Control parameters of the electronic drive unit. Printed in bold as a three-digit num-

T Temperature (in °C)

TC Turbopump electronic drive unit (turbo controller)

TPS Power supply (turbo power supply)

X3 15-pole D-Sub connecting socket on the electronic drive unit of the turbopump

ber in square brackets. Frequently displayed in combination with a short designation.

Example: [P:312] Software version

Tbl. 2: Abbreviations used in the document

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Safety

2 Safety

2.1 General safety instructions

This document includes the following four risk levels and one information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►

Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►

Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►

Instructions on avoiding the hazardous situation

Danger of property damage

Notice is used to address practices not related to physical injury.

►

Instructions on avoiding property damage

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applicable, all life cycle phases of the product were taken into account.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►

Take particular care and pay special attention when transporting products manually.

►

Do not stack the products.

►

Wear protective equipment, e.g. safety shoes.

NOTICE

Notes, tips or examples indicate important information on the product or on this document.

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Risks during installation

WARNING

Danger to life from electric shock in the event of a fault

In the event of a fault, devices connected to the mains may be live. There is a danger to life from electric shock when making contact with live components.

►

Always keep the mains connection freely accessible so you can disconnect it at any time.

Safety

WARNING

Danger to life from electric shock due to improperly performed installation

The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal situations arise due to unsafe or incorrectly installation when reaching into the device.

►

Ensure that the system is safely integrated into an emergency off safety circuit.

►

Do not carry out any unauthorized modifications or changes to the device.

WARNING

Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange

With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g. fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the turbopump during subsequent operation.

►

Only remove the original protective covers immediately prior to connecting the high vacuum flange.

►

Do not reach into the high vacuum connection.

►

Wear protective gloves during installation.

►

Do not start the turbopump with open vacuum connections.

►

Always carry out the mechanical installation before electrical connection.

►

Prevent access to the high vacuum connection of the turbopump from the operator side (e.g. open vacuum chamber).

WARNING

Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction

Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. When using a vibration compensator, this will probably lead to the turbopump being sheared off in use. The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive property damage.

►

Take suitable safety precautions on-site for the compensation of the occurring torques.

►

Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.

CAUTION

Risk of injury from bursting due to high pressure in the exhaust line

Faulty or insufficient exhaust lines cause hazardous situations, e.g. increase in exhaust pressure. There is a risk of bursting. It is not possible to rule out the risk of injuries due to broken pieces flying around, high escaping pressure and damage to the equipment.

►

Lay the exhaust line without shut-off units.

►

Observe the permissible pressures and pressure differentials of the product.

►

Check the exhaust line regularly for correct function.

Risks during operation

WARNING

Danger of death from poisoning due to toxic gases being expelled without an exhaust line

Exhaust gases and vapors are released from the turbo pumping station unhindered during normal usage. In the case of processes with toxic media, there is a risk of injury and danger of death due to poisoning.

►

Note the corresponding regulations for handling toxic substances.

►

Toxic process gases should be safely conveyed away via an exhaust line.

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Safety

CAUTION

Risk of injury from bursting due to high pressure in the exhaust line

Faulty or insufficient exhaust lines cause hazardous situations, e.g. increase in exhaust pressure. There is a risk of bursting. It is not possible to rule out the risk of injuries due to broken pieces flying around, high escaping pressure and damage to the equipment.

►

Lay the exhaust line without shut-off units.

►

Observe the permissible pressures and pressure differentials of the product.

►

Check the exhaust line regularly for correct function.

Risks during maintenance

WARNING

Danger to life from electric shock during maintenance and service work

The device is only completely de-energized when the mains plug has been disconnected and the turbopump is at a standstill. There is a danger to life from electric shock when making contact with live components.

►

Before performing all work, switch off the main switch.

►

Wait until the turbopump comes to a standstill (rotation speed =0).

►

Remove the mains plug from the device.

►

Secure the device against unintentional restarting.

WARNING

Health hazard through poisoning from toxic contaminated components or devices

Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic substances causes environmental damage.

►

Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.

►

Decontaminate affected parts before carrying out maintenance work.

►

Wear protective equipment.

Risks during disposal

WARNING

Health hazard through poisoning from toxic contaminated components or devices

Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic substances causes environmental damage.

►

Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.

►

Decontaminate affected parts before carrying out maintenance work.

►

Wear protective equipment.

Risks in the event of malfunctions

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WARNING

Danger to life from the turbopump breaking away in the event of a fault

Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the turbopump is not properly secured, it will tear off. The energy released in this way can propel the entire turbopump or shattered pieces from its interior through the surrounding area. Potentially dangerous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equipment damage.

►

Follow the installation instructions for this turbopump.

►

Observe the requirements regarding stability and design of the counter flange.

►

Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.

WARNING

Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction

Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. When using a vibration compensator, this will probably lead to the turbopump being sheared off in use. The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive property damage.

►

Take suitable safety precautions on-site for the compensation of the occurring torques.

►

Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.

2.3 Safety precautions

Safety

Duty to provide information on potential dangers

The product holder or user is obliged to make all operating personnel aware of dangers posed by this product.

Every person who is involved in the installation, operation or maintenance of the product must read, understand, and adhere to the safety-related parts of this document.

Infringement of conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator changes the original product or installs additional equipment.

●

Following installation into a system, the operator is required to check and reevaluate as necessary the conformity of the overall system in the context of the relevant european Directives before commissioning that system.

General safety precautions when handling the product

►

Observe all applicable safety and accident prevention regulations.

►

Check that all safety measures are observed at regular intervals.

►

Do not expose body parts to the vacuum.

►

Always ensure a secure connection to the earthed conductor (PE).

►

Never disconnect plug connections during operation.

►

Observe the above shutdown procedures.

►

Before working on the high vacuum connection, wait until the rotor has stopped completely (rotation speed f = 0).

►

Never put the device into operation with the high vacuum connection open.

►

Keep lines and cables away from hot surfaces (> 70°C).

►

Never fill or operate the unit with cleaning agents or cleaning agent residues.

►

Do not carry out your own conversions or modifications on the unit.

►

Observe the unit protection class prior to installation or operation in other environments.

2.4 Limits of use of the product

Parameter Limit value

Installation location weatherproof (internal space)

Air pressure 750 hPa to 1060 hPa

Installation altitude max. 2000 m

Rel. air humidity max. 80%, at T < 31 °C

up to max. 50% at T < 40 °C

Protection class I

Excess voltage category II

Permissible protection class IP20

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Safety

Parameter Limit value

Degree of contamination 2

Ambient temperature 5°C to 35°C with air cooling

5°C to 40°C with water cooling

Permissible surrounding magnetic field depending on turbopump used

Maximum irradiated thermal output depending on turbopump used

Maximum permissible rotor temperature of the turbopump 90 °C

Tbl. 3: Limits of use for turbopump stations

Notes on ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at maximum permissible backing pressure or at maximum gas throughput, depending on the cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitoring.

●

The reduction in backing pressure or gas throughput permits operation of the turbopump at higher ambient temperatures as well.

●

If the maximum permissible operating temperature of the turbopump is exceeded, the electronic drive unit first reduces the drive output and switches it off where necessary.

2.5 Proper use

●

The turbo pumping station is only used to generate the vacuum.

●

The turbo pumping station is only used to extract dry and inert gases.

●

The turbo pumping station is only intended for use in enclosed interior spaces.

●

The turbo pumping station is intended for use as a table-top unit.

2.6 Foreseeable improper use

Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:

●

Establishing the voltage supply without correct installation

●

Installation with non-specified fastening material

●

Pumping explosive media

●

Pumping of corrosive media

●

Pumping of condensing vapors

●

Pumping of fluids

●

Pumping of dust

●

Operation with impermissible high gas throughput

●

Operation with impermissible high fore-vacuum pressure

●

Operation with excessively high irradiated heat output

●

Operation in impermissible high magnetic fields

●

Operation in an incorrect gas mode

●

Venting with impermissible high venting rates

●

Use for pressure generation

●

Use in areas with ionizing radiation

●

Operation in explosion-hazard areas

●

Use in systems in which sporadic loads and vibrations or periodic forces act on the device

●

The causing of hazardous operating conditions by a presetting on the electronic drive unit that is contrary to the process

●

Use of accessories or spare parts that are not listed in these instructions

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3 Product description

HiPace 300 HiPace 80 HiPace 30

MVP 030-3MVP 015-4MVP 015-2

3.1 Identifying the product

►

To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always keep all of the information on the rating plate to hand.

►

Learn about certifications through test seals on the product or at www.tuvdotcom.com with company ID no. 000021320.

Product description

Fig. 2: Overview: Turbo and backing pump combinations

Feature HiCube Eco Operating in-

HV flange size DN 40/DN 63 DN 100

HiPace 30 PT 0510 BN

Turbopump

Electronic drive unit

Diaphragm Pump

Current supply TPS onboard,

Control unit DCU 002 DCU 002 DCU 002 PT 0250 BN

Air cooling yes yes yes PT 0500 BN

Venting valve optional optional optional PT 0228 BN

Housing heater 1)not available Optional, with CF

TC 110 TC 110 TC 110 PT 0204 BN

MVP 015‑2

MVP 015‑4

MVP 030‑3

24 V DC

HiPace 80 PT 0208 BN

MVP 015‑2

MVP 015‑4

MVP 030‑3

TPS onboard, 24 V DC

flange only

structions

HiPace 300 PT 0202 BN

HiPace 300 H PT 0509 BN

(MVP 015‑2)

MVP 015‑4

MVP 030‑3

TPS onboard, 24 V DC

Optional, with CF flange only

PU 0070 BN

PU 0065 BN

PT 0233 BN

1) Water cooling required

15/60

1 2

3

4

5

6

7

89

10

11

12

13

14

15

Product description

Tbl. 4: Pumping station component combination options

3.2 Scope of delivery

●

HiCube Eco turbo pumping station

●

Protective cover for the high vacuum flange

●

Extension cable M12 on M12, 3 m

●

Power supply cable, country-specific

●

Operating instructions for the turbo pumping station and individual components

3.3 Function

Turbo pumping stations are fully automatic pump units ready for connection. A turbo pumping station consists of a portable or mobile vacuum pump unit, with a turbopump and a specially matched backing pump.

3.3.1 Control interface

Fig. 3: Example combinations product overview

1 Housing 9 DCU 002 display and control unit

2 HiPace 80 turbopump, DN 63 ISO-K 10 Attachment hooks (HiCube 300 Eco only)

3 Electronic drive unit TC 110 11 Transport protection

4 Connection cable 12 MVP 030-3 diaphragm pump backing pump

5 Ground terminal 13 Recessed handle

6 MVP 015-2 diaphragm pump backing pump 14 HiPace 300 turbopump, DN 100 CF-F

7 Master switch 15 Air cooling

8 Mains supply plug

The integrated DCU 002 display and control unit serves to control and monitor the turbo pumping station. The DCU is optionally used as a remote control when removing the housing and using an extension cable.

16/60

DCU

1

2

3

4

3.3.2 Drive

Fig. 4: DCU control panel

1 LC display, illuminated 3 LED operating display

2 Status icons 4 Control keys

●

Electronic drive unit of the turbopump

●

Electronic drive unit of the backing pump

Product description

3.3.3 Cooling

●

Air cooling

●

Water cooling (optional)

At excessively high temperatures, the electronic drive unit automatically reduces the drive power.

17/60

1

3

2

Transportation and Storage

4 Transportation and Storage

4.1 Transporting the pumping station

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►

Take particular care and pay special attention when transporting products manually.

►

Do not stack the products.

►

Wear protective equipment, e.g. safety shoes.

Packing

We recommend keeping the transport packaging and original protective cover.

Instructions for safe transport

►

Observe the weight specified on packaging.

–

Use a transport aid if necessary (trolley, lift truck).

►

Transport the product in its original packaging.

►

Always move the product upright, and over the flattest possible surface.

►

Always place the product on an adequately sized, level surface.

Fig. 5: Transporting the turbo pumping station manually

1 Protective cover 3 Footprint

2 Recessed handle

Instructions for safe transport without packaging

For transport without packaging, HiCube Eco turbo pumping stations are equipped with recessed handles on the side of the housing frame.

1.

Observe weight specified on the rating plate.

2.

Lift the turbo pumping station with your hands on the two recessed handles.

3.

Always transport the turbo pumping station upright, with its standing surface downwards.

4.

Always place turbo pumping station securely on an adequately sized, level surface.

4.2 Transport protection

Backing pumps in HiCube line turbo pumping stations are secured against damage during transport.

Handling the transport lock

1.

Release the bucking pump transport lock, only directly prior to commissioning at the installation location.

2.

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Observe the installation instructions (see chapter “Removing transport lock”, page 29).

4.3 Storing the pumping station

Packing

We recommend storing the product in its original packaging.

1.

Close all flange openings with the original protective caps.

2.

Close all other connections (e.g. exhaust) with the corresponding protective caps.

3.

Only store the turbo pumping station within the specified limits.

4.

In rooms with humid or aggressive atmospheres: Hermetically seal the turbo pumping station, together with a drying agent, in a plastic bag.

Transportation and Storage

19/60

Installation

5 Installation

The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbopump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic energy released acts on the housing and on the anchoring of the turbopump within fractions of a second.

Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump both against crashes (destruction of the rotor blade) and against bursting (breakage of the rotor shaft). The experimental and theoretical results are expressed in safety measures and recommendations for the correct and safe fastening of the turbopump.

5.1 Preparing for set-up

WARNING

Danger to life from electric shock in the event of a fault

In the event of a fault, devices connected to the mains may be live. There is a danger to life from electric shock when making contact with live components.

►

Always keep the mains connection freely accessible so you can disconnect it at any time.

General notes for the installation of vacuum components

►

Choose an installation location that permits access to the product and to supply lines at all times.

►

Observe the ambient conditions given for the area of use.

►

Provide the highest possible level of cleanliness during assembly.

►

Ensure that flange components during installation are grease-free, dust-free and dry.

5.2 Setting up the pumping station

WARNING

Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange

With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g. fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the turbopump during subsequent operation.

►

Only remove the original protective covers immediately prior to connecting the high vacuum flange.

►

Do not reach into the high vacuum connection.

►

Wear protective gloves during installation.

►

Do not start the turbopump with open vacuum connections.

►

Always carry out the mechanical installation before electrical connection.

►

Prevent access to the high vacuum connection of the turbopump from the operator side (e.g. open vacuum chamber).

Procedure

1.

Maintain a minimum distance of 50 cm to lateral boundaries or adjacent devices.

2.

Maintain a minimum distance of 10 cm to exposed table edges.

3.

Make sure that there are sufficient cooling options for the pumping station.

4.

Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.

5.

If you use housing heating and water cooling, make sure that the temperature at the vacuum chamber connection flange does not exceed 120 °C.

6.

Install suitable shielding so that the irradiated thermal output does not exceed the permissible values when high temperatures occur due to the process.

5.3 Anchoring pumping station

(applies to HiCube 300 Eco only)

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1 2

Installation

In the case of a sudden jam of the turbopump rotor, the resulting torque must be taken up via the pumping station frame by the fixture provided by customer. To secure the HiCube 300 Eco pumping station and connected systems, it is essential to anchor the pumping station.

Fig. 6: Secure HiCube 300 Eco with lashing straps

1 Lashing strap 2 Mounting hooks

Required aids

●

2 x lashing straps of adequate length and loading capacity; approximately 3 cm wide

●

On-site attachment points to retain the lashing straps

Secure HiCube 300 Eco against twisting

1.

Always attach the HiCube 300 Eco pumping station to the two mounting hooks with lashing straps.

2.

Affix the lashing straps perpendicularly to the mounting hooks opening, i.e., against the turbopump rotation direction.

3.

Make sure that the belts are fitted and tensioned correctly. Make sure that the belt loop is in the hollow of the mounting hook.

4.

Attach the lashing straps at the customer site so that they are able to withstand loads of up to 2000 N per attachment point.

5.4 Connecting the high vacuum side

5.4.1 Designing the counter flange

If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must be absorbed. The installation elements for turbo pumps are special designs by Pfeiffer Vacuum.

NOTICE

Risk of damage due to incorrect counter flange design

Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing, even when properly attached. This can produce leakage or negative changes in running characteristics.

►

Adhere to the shape tolerances for the counter flange.

►

Observe the maximum flatness deviations over the entire surface.

Superstructural parts

Installing vertical superstructural parts to the high vacuum connection is the responsibility of the operating company. The loading capacity of the high vacuum flange is specific for the turbopump used. The total weight of superstructural parts must not exceed the maximum values specified.

21/60

Installation

Turbo pumping station

HiCube 30 Eco 500 Nm 50 kg ± 0.05 mm

Applied tor-

2)

que

Superstructural

3)

parts

Flatness Tensile

strength

170 N/mm

4)

2

depth

2.5 x d 3.0 mT 1.2 W

Screw in

5)

Magnetic

6)

field

Heat input

HiCube 80 Eco 620 Nm 3.3 mT 0.9 W

HiCube 300 Eco 2000 Nm 5.5 mT 2.4 W

270 N/mm

2

1.5 x d

Tbl. 5: Requirements for on-site high vacuum connection

►

Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the turbopump.

5.4.2 Using accessories for the high vacuum connection

Installation and operation of accessories

Pfeiffer Vacuum offers a series of special, compatible accessories for its products.

●

Information and ordering options for approved accessories can be found online.

●

The following accessories are not included in the scope of supply.

Using a splinter shield or protective screen

Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange protect the turbopump against foreign bodies from the vacuum chamber. The volume flow rate of the pump reduces according to the flow conductance values and the size of the high vacuum flange.

7)

Flange size

H

2

He N

2

Ar

Splinter shield DN 40 6 9 17 18

Splinter shield DN 63 3 6 15 16

Protective screen DN 63 1 1 4 4

Splinter shield DN 100 5 7 24 24

Protective screen DN 100 2 2 10 8

Tbl. 6: Changing pumping speed with splinter shield or protective screen

Reduced pumping speed in % for the gas type

►

With ISO flanges, use centering rings with a protective screen or splinter shield.

►

With CF flanges, always insert the protective screen or splinter shield into the high vacuum flange with the clamping lugs pointing towards the rotor.

Using vibration dampers

Pfeiffer Vacuum vibration dampers are suitable for use on plants sensitive to vibration.

Maximum torque applied in the event of a burst: The theoretically calculated torque in the

2) event of a burst (rotor shaft breakage) according to ISO 27892 was not reached in any experimental test.

3) Permissible total weight of superstructural parts on the pumping station

4) Tensile strength of counter flange material in all operating conditions, according to screw in depth

5) Screw in depth of fixing screws in counter flange

6) Maximum permissible magnetic field surrounding pumping station

7) Maximum permissible heat absorption in pumping station

22/60

WARNING

Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction

Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. When using a vibration compensator, this will probably lead to the turbopump being sheared off in use. The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive property damage.

1.

Take suitable safety precautions on-site for the compensation of the occurring torques.

2.

Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.

1.

Only install a vibration damper with a vertical passage.

2.

Take account of the flow resistance.

3.

Secure the turbo pump to the high vacuum flange in addition.

4.

Observe the fastening of the ISO-K flanges (see chapter “Attaching ISO-K flange onto ISO-

K”, page 24) and (see chapter “Installation of ISO-K flange onto ISO-F”, page 24).

5.4.3 Connecting the turbopump externally

Depending on the configuration, the turbopump can be operated independently from the pumping station.

Installation

Dismantling the turbopump

Please see the descriptions for removing a turbopump from the pumping station

(see chapter “Removing components for maintenance”, page 38).

Procedure

1.

Follow the installation instructions for the turbopump in the associated operating instructions for the individual components.

2.

Use cable kit PM 071 477 -T (3 m) from the Pfeiffer Vacuum accessories range.

–

Other lengths available on request.

3.

Extend the fore-vacuum line and the control cable.

5.4.4 Installation of ISO-KF flange

ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the event of sudden blockage of the rotor, despite correct installation.

●

Leak-tightness of the flange connection, however, is not jeopardized in this regard.

Required tools

●

Allen key

●

Calibrated torque wrench (Tightening factor ≤ 1.6)

Fig. 7: Flange connection ISO-KF to ISO-KF

Using of clamping ring

1.

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

2.

Fasten the high vacuum connection on the turbopump and the clamping ring to the counter flange.

3.

Utilize all prescribed components for the turbopump.

4.

Tighten the clamping ring screws evenly.

23/60

Installation

–

Tightening torque: 3,7 Nm.

5.4.5 Attaching ISO-K flange onto ISO-K

ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the event of sudden blockage of the rotor, despite correct installation.

●

Leak-tightness of the flange connection, however, is not jeopardized in this regard.

Required tools

●

Wrench, WAF 15

●

Calibrated torque wrench (Tightening factor ≤ 1.6)

Fig. 8: Flange connection ISO-K to ISO-F, bracket screws

Connection with bracket screw

1.

For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.

2.

Connect the flange with the components of the mounting kit according to the figure.

3.

Use for all prescribed components for the turbopump.

4.

Tighten the bracket screws cross-wise in 3 steps.

–

Tightening torque: 5, 15, 25 ± 2 Nm

5.4.6 Installation of ISO-K flange onto ISO-F

The connection types for the installation of ISO-K with ISO-F flange are:

●

"Claw and tapped hole"

●

"Hexagon head set screw and tapped hole"

●

"Stud screw and tapped hole"

●

"Stud screw and through-bore"

ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the event of sudden blockage of the rotor, despite correct installation.

●

Leak-tightness of the flange connection, however, is not jeopardized in this regard.

Connection of claw and tapped hole

24/60

1.

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

2.

Connect the flange according to the diagram using the components in the mounting kit.

3.

Utilize all prescribed components for the turbopump.

4.

Tighten the claws in 3 stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

Connection of hexagon head set screw and tapped hole

1.5 × d

2.5 × d

1.

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

2.

Place the collar flange over the high vacuum flange on the turbopump.

3.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

4.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

5.

Utilize all prescribed components for the turbopump.

6.

Screw the hexagon head set screws into the tapped holes.

–

Observe the minimum tensile strength of the flange material and the screw-in depth.

7.

Tighten the hexagon head set screws in 3 stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

Connection of stud screw and tapped hole

Installation

1.

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

2.

Screw the required number of stud screws with the shorter screw-in end into the holes in the counter flange.

–

Observe the minimum tensile strength of the flange material and the screw-in depth.

3.

Place the collar flange over the high vacuum flange on the turbopump.

4.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

5.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

6.

Utilize all prescribed components for the turbopump.

7.

Tighten the nuts in 3 stages in opposite pairs.

–

Tightening torque: 5, 10, 16 ± 1 Nm

Connection of stud screw and through-bore

1.

Only use the approved mounting kits from Pfeiffer Vacuum for the connection.

2.

Place the collar flange over the high vacuum flange on the turbopump.

3.

Insert the snap ring into the side groove on the high vacuum flange of the turbopump.

4.

Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange, snap ring and centering ring.

5.

Utilize all prescribed components for the turbopump.

6.

Tighten the nuts in 3 stages in opposite pairs.

7.

Tightening torque: 5, 10, 16 ± 1 Nm

25/60

Installation

5.4.7 Fastening CF flange to CF-F

The connection types for CF installation with CF flange are:

●

"Hexagon head screw and through hole"

●

"Stud screw with tapped hole"

●

"Stud screw with through hole"

Leaks may occur due to the incorrect installation of CF flanges

Inadequate cleanliness when handling CF flanges and copper gaskets results in leaks and may cause process damage.

►

Always wear suitable gloves before touching or fitting any components.

►

Fit seals only if dry and free of grease.

►

Take care of damaged surfaces and cut edges.

►

Replace the damaged components.

Required tools

●

Hexagonal wrench (13 WAF)

●

Calibrated torque wrench (tightening factor ≤ 1.6)

NOTICE

Fig. 9: Flange connection CF-F, hexagon head screw and through hole

Connection of the hexagon head screw and through holes

1.

For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.

2.

If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbopump high vacuum flange.

3.

Place the seal exactly in the hollow.

4.

Connect the flange with the components of the mounting kit according to the figure.

5.

Tighten the screw couplings all the way around.

–

Tightening torque: 22 ± 2 Nm

6.

Then check the torque, since flowing of the sealing material may make it necessary to re-tighten the screws.

Fig. 10: Flange connection CF-F, stud screw and tapped hole

Connection of the stud screw and tapped hole

1.

For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.

2.

Screw in the required number of stud screws with the shorter end in the holes on the counter flange.

3.

If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbopump high vacuum flange.

4.

Place the seal exactly in the hollow.

5.

Connect the flange with the components of the mounting kit according to the figure.

6.

Tighten the screw couplings all the way around.

26/60

–

1

2 (G1/8”)

Tightening torque: 22 ± 2 Nm

7.

Then check the torque, since flowing of the sealing material may make it necessary to re-tighten the screws.

Fig. 11: Flange connection CF-F, stud screw and through hole

Connection of the stud screw and through hole

1.

For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.

2.

If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbopump high vacuum flange.

3.

Place the seal exactly in the hollow.

4.

Connect the flange with the components of the mounting kit according to the figure.

5.

Tighten the screw couplings all the way around.

–

Tightening torque: 22 ± 2 Nm

6.

Then check the torque, since flowing of the sealing material may make it necessary to re-tighten the screws.

Installation

5.5 Connecting the exhaust side

WARNING

Danger of death from poisoning due to toxic gases being expelled without an exhaust line

Exhaust gases and vapors are released from the turbo pumping station unhindered during normal usage. In the case of processes with toxic media, there is a risk of injury and danger of death due to poisoning.

►

Note the corresponding regulations for handling toxic substances.

►

Toxic process gases should be safely conveyed away via an exhaust line.

CAUTION

Risk of injury from bursting due to high pressure in the exhaust line

Faulty or insufficient exhaust lines cause hazardous situations, e.g. increase in exhaust pressure. There is a risk of bursting. It is not possible to rule out the risk of injuries due to broken pieces flying around, high escaping pressure and damage to the equipment.

►

Lay the exhaust line without shut-off units.

►

Observe the permissible pressures and pressure differentials of the product.

►

Check the exhaust line regularly for correct function.

Fig. 12: Example backing pump exhaust connection

1 Diaphragm pump 2 Exhaust silencer (included in the delivery)

27/60

1

2

3

Installation

Procedure

1.

Choose a minimum exhaust line cross section equal to the size of the exhaust connection.

2.

Unscrew the exhaust silencer from the backing pump.

3.

Route the piping downwards from the pump, to prevent condensate return.

Condensate separator

We recommend installing a condensate separator, with condensate drain at the lowest point of the exhaust line.

5.6 Modifying the DCU for remote operation

If required, the display and control unit can be used as a remote control, after modification.

Before carrying out any work, safely disconnect device from mains

1.

Shut down the device.

2.

Wait until all components are at a complete standstill.

3.

Switch off the master switch.

4.

Disconnect the mains cable from the device.

Fig. 13: Remove DCU from pumping station

1 Collar screw with attachment nipple 3 Control cable with M12 connecting plug

2 DCU 002 display and control unit

Remove DCU

1.

Release the 4 collar screws from the corners of the DCU screen.

2.

Safely store the attachment nipple.

3.

Remove DCU from pumping station housing.

–

Note control cable length.

4.

Unscrew M12 control cable connecting plug from DCU.

Cable included in shipment

Other cable lengths are available on request from the Pfeiffer Vacuum accessories.

28/60

2

1

PM 061 270 -X

RS-485

Fig. 14: DCU connection as remote control

1 Extension cable 2 Control cable with M12 connecting plug

Connect DCU as remote control

1.

Screw interface cable supplied in shipment into DCU RS-485 connection.

2.

Use the PM 061 270 -X coupling.

3.

Connect the interface cable to the coupling, and to the control cable from the pumping station.

Installation

5.7 Connecting accessories for the pumping station

Installation and operation of accessories

Pfeiffer Vacuum offers a series of special, compatible accessories for its products.

●

Information and ordering options for approved accessories can be found online.

●

The following accessories are not included in the scope of supply.

Accessory connection for TC 110 electronic drive unit

●

The use of Pfeiffer Vacuum accessories via the TC 110 electronic drive unit is only possible using the corresponding connection cable and/or adapter on the X3 multi-functional connection.

●

Configuration of the required accessory output via RS-485 using Pfeiffer Vacuum display and control units or PC.

●

Detailed instructions can also be found in the "TC | 110 electronic drive unit" operating instructions.

Factory settings

All turbopump accessory connections are preconfigured at the factory. Any confusion will cause malfunctions or operational failure.

1.

Please note the initial product configuration.

2.

Note the cable connections and parameter settings, before making changes.

Use additional accessories

1.

Note the present configuration of existing connections and control cables.

2.

Use the Pfeiffer Vacuum display and control unit DCU 002.

5.8 Removing transport lock

All HiCube Eco line turbo pumping stations are equipped with a transport lock for the backing pumps. The backing pump is affixed diagonally to the pumping station baseplate, with cheesehead screws and nuts, on 2 spring-loaded rails.

29/60

1

Installation

Fig. 15: Backing pump transport lock

1 Transport lock hexagon nut

Required tool

●

Hexagonal wrench (13 WAF)

Procedure

1.

Rotate the transport lock hexagon nut upwards to the stop.

2.

Also release the transport lock on the opposite side.

5.9 Grounding the pumping station

Fig. 16: Example: Connecting the grounding cable

Required aids

●

Screw M4 × 8

●

Shake proof washer M4, if required

●

Suitable grounding cable with M4 cable lug

Procedure

1.

Use a suitable grounding cable to divert applicative interferences.

2.

Route the connection in accordance with locally applicable provisions.

3.

Use the turbopump ground terminal (M4 female thread).

5.10 Establishing the mains connection

WARNING

Danger to life from electric shock due to improperly performed installation

The device uses voltage that is dangerous on contact as the electrical power supply. Potentially fatal situations arise due to unsafe or incorrectly installation when reaching into the device.

►

Ensure that the system is safely integrated into an emergency off safety circuit.

►

Do not carry out any unauthorized modifications or changes to the device.

30/60

Installation

WARNING

Danger to life from electric shock in the event of a fault

In the event of a fault, devices connected to the mains may be live. There is a danger to life from electric shock when making contact with live components.

►

Always keep the mains connection freely accessible so you can disconnect it at any time.

Fig. 17: Power supply connector and master switch on HiCube Eco

1 Mains plug 2 Country-specific power supply cable (in shipment)

Establish mains power supply for HiCube Eco

1.

Make sure that the master switch is off before connecting.

2.

Always ensure a secure connection to the earthed conductor (PE).

3.

Plug the mains cable supplied in the shipment into the connecting plug on the side of the pumping station housing.

4.

Connect the mains cable to the mains power supply on the customer-side.

31/60

Operation

6 Operation

6.1 Commissioning

Important settings and function-related variables are factory-programmed into the vacuum pumps electronic drive units as parameters. Each parameter has a three-digit number and a description. Parameters can be used via Pfeiffer Vacuum display and control panels or externally via RS-485, using the Pfeiffer Vacuum protocol.

For both parameter sets, the DCU acts as the user interface. HiCube Eco controls two independent parameter sets, for the turbopump and backing pump. The backing pump parameters are shown hierarchi-

cally in the display, and marked with a symbol.

Parameter Name Designation Option

[P:001] Heating Heating no heating

with heating 1 1

[P:012] EnableVent Enable vents 1 1 1

[P:019] Cfg DO2 Output DO2 config-

uration

[P:023] MotorPump Motor pump 1 1 1

[P:024] Cfg DO1 Output DO1 config-

uration

[P:025] OpMode Backing pump op-

erating mode

[P:035] Cfg Acc A1 Connection A1 ac-

cessories configuration

[P:036] Cfg Acc B1 Connection B1 ac-

cessories configuration

[P:708] PwrSVal Default power con-

sumption

[P:710] Swoff BKP Backing pump off

threshold in interval mode

[P:711] SwOn BKP Backing pump on

threshold in interval mode

[P:794] Param set Parameter set 1 = advanced 1 = advanced 1 = advanced

[P:795] Servicelin Service row view 309 = Actual

[P: 030]

[P: 717]

ValveMode Gas ballast configu-

ration

StdbySVal Default rotation

speed in standby

Air cooling 4 = Fan (tem-

Water cooling

for MVP 015-2

for MVP 015-4

for MVP 030 100 % 100 % 100 %

for MVP 015 0 = auto 0 = auto 0 = auto

for MVP 015 66 % 66 % 66 %

30 Eco 80 Eco 300 Eco

not available

22 = Backing pump standby

15 = Pump state 15 = Pump

1 = Interval mode

perature controlled)

2 = heating 2 = heating 2 = heating

1 = Venting valve, normally closed

90 % 90 % 90 %

100 % 100 % 100 %

25 W 25 W 45 W | MVP 015

40 W 40 W 55 W | MVP 015

speed

HiCube pumping station

0 0

22 = Backing pump standby

state

1 = Interval mode

4 = Fan (temperature controlled)

1 = Venting valve, normally closed

309 = Actual speed

22 = Backing pump standby

15 = Pump state

1 = Interval mode

4 = Fan (temperature controlled)

1 = Venting valve, normally closed

52 W | MVP 030

62 W | MVP 030

309 = Actual speed

32/60

Tbl. 7: Factory setting of key parameters on delivery

NOTICE

Turbopump destruction due to gases with too high molecular masses

The pumping of gases with impermissible high molecular masses leads to the destruction of the turbopump.

►

Make sure that the gas mode is set correctly by [P:027] in the electronic drive unit.

►

Consult Pfeiffer Vacuum before you use gases with higher molecular masses (> 80).

Commissioning the turbo pumping station

1.

Make sure that the transport lock has been released.

2.

Where applicable, ensure cooling water supply and flow rate.

3.

Where applicable, ensure sealing gas supply and flow rate.

4.

Provide the current supply for the product.

6.2 Switching on the turbo pumping station

Switching on the current supply

►

Switch off the power supply at the main switch.

After being switched on, the DCU runs a self-test and a check of the connected instruments. The duration of the self-test is approx. 20 seconds and is visualized on the display with a progress bar.

Putting the pumping station into operation

►

Switch on the turbo pumping station.

Operation

6.3 Normal operation

Operating the DCU

►

When working with the DCU 002 Pfeiffer Vacuum display and control unit, please see the associated operating instructions supplied in the shipment.

Key Parameter | use Description

Tbl. 8: Description of the key functions of the DCU

corresponds to

[010] = 0 or 1

[308] --> [309] Scroll forwards through the parameter set

[309] --> [308] Scroll back through the parameter set

Press simultaneously Editing mode: Allows the setting of parameter options

Press simultaneously

again

Pumping station ON/OFF: All components are put into/out of operation according to their configuration

Error acknowledgement (Reset): Resets active malfunction messages in case the cause is eliminated.

The arrow - - - > designates the option selection in the display

Selection mode: Accepts the selection made ("change confirmed" is displayed)

6.4 Operation with gas ballast (applies to MVP 015-2 only)

Steam or moisture from pumped media condensing in the backing pump will impact throughput. Injecting gas ballast improves (reduces) condensate quantity. The pumping station reaches the specified final vacuum more quickly.

33/60

Operation

●

The MVP 015-4 and MVP 030-3 backing pumps have a sufficiently high water vapor tolerance, and are not equipped with gas ballast valve.

●

The MVP 015-2 backing pump is equipped with an electronic gas ballast valve.

●

The parameters for automatic gas ballast valve operation of the are factory-set for normal application.

Gas ballast

The HiCube Eco turbo pumping station, with MVP 015-2 diaphragm pump as backing pump, is equipped with an automatic gas ballast function. If however run-up time delays still occur, as a result of condensate in the fore-vacuum area, we recommend opening the gas ballast valve manually.

Manual gas ballast valve operation in this case involves control via the DCU function keys.

Fig. 18: Example: DCU display for second parameter set

Open gas ballast valve manually

1.

Open advanced parameter set, if necessary (see chapter “Normal operation”, page 33).

2. Shut down the turbo pumping station.

3. Scroll through the entire first parameter set, and the second parameter set directly following

it, to parameter [030]: ValveMode.

4.

Press both keys simultaneously: this opens Edit mode.

5. Select option "2" = open.

6.

Press both keys simultaneously: this confirms your selection, and exits Edit mode.

Inject gas ballast

1. Switch on the turbo pumping station.

2.

Operate the turbo pumping station with gas ballast valve open.

–

Operating time: approximately 15 to 30 minutes.

Set gas ballast function to automatic

1. Shut down the turbo pumping station.

2. Scroll through the entire first parameter set, and the second parameter set directly following

34/60

it, to parameter [030]: ValveMode.

3.

Press both keys simultaneously: this opens Edit mode.

4. Select option "0" = auto.

5.

Press both keys simultaneously: this confirms your selection, and exits Edit mode.

6. Switch on the turbo pumping station.

6.5 Operation monitoring

6.5.1 Operating mode display via LED

The LEDs on the front panel of the DCU display basic operating statuses.

LED Symbol LED status Display Meaning

Off without current

Green

Red

On, flashing "Pumping station OFF", rotation speed ≤ 60 rpm

On, inverse flashing "Pumping station ON", set rotation speed not reached

On, constant "Pumping station ON", set rotation speed reached

On, flashing "Pumping station OFF", rotation speed > 60 rpm

Off no error, no warning

On, flashing Warning

On, constant Defect

Operation

Tbl. 9: LED display and meaning at the DCU

6.5.2 Temperature monitoring

If threshold values are exceeded, output signals from temperature sensors allow the vacuum pumps to be brought to a safe condition. Depending on pump type, temperature threshold values for warnings and malfunction messages are saved unchanged in the electronic drive unit. For information purposes, various status queries are prepared in the parameter set.

●

The drive power of the turbopump is reduced in case of impermissible motor temperature or nonpermissibly high housing temperature. This can cause the motor to fall below the set rotation speed switchpoint and so result in switching off of the turbopump.

●

At a non-permissibly high temperature (> 75 °C) of the backing pump, the motor rotation speed is reduced to nominal rotation speed to prevent overheating. After cooling down (< 72° C) the backing pump runs at set rotation speed again.

6.6 Switching off and venting

We recommend

Vent the turbopump after shutdown. By doing so, you prevent particles flowing back into the vacuum system from the fore-vacuum area.

6.6.1 Shutting down the turbo pumping station

Procedure

►

Shut down the turbo pumping station.

–

The components shut down according to their configuration. The pumping station remains ready for operation.

►

Shut off the entire current supply at the master switch.

35/60

Operation

6.6.2 Venting

NOTICE

Damage to the turbopump due to non-permissibly fast pressure rise during venting

Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bearing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump, there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump, including potential failure.

►

Observe the prescribed maximum pressure rise speed of 15 hPa/s.

►

Avoid manual and uncontrolled venting of very low volumes.

►

Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.

Manual venting

Manual venting describes the standard process for venting the turbo pumping station.

1.

Ensure that the vacuum system is shut down.

2.

Open the black venting screw on the turbopump by one revolution maximum.

3.

Wait for pressure equalization to atmospheric pressure in the vacuum system.

4.

Close the venting screw again.

Use a Pfeiffer Vacuum venting valve

The Pfeiffer Vacuum venting valve is an optional accessory for installation on the turbopump.

The venting valve is normally closed. Control is via the turbopump electronic drive unit, and configuration of parameters [P:012] and [P:030]. In the event of a power failure, the turbopump continues to deliver sufficient energy during its run-down period to initiate a proper venting process. When power is restored, the venting process is interrupted.

►

Switch off the turbopump.

–

The venting process starts automatically.

Venting speed [P:720] Venting duration [P:721] Venting duration in the event of a power

failure

50 % of rated speed 3600 s 3600 s

Tbl. 10: Factory settings for delayed venting of turbopumps

General information for fast venting

We recommend fast venting of larger volumes in 4 steps.

1.

Use a Pfeiffer Vacuum venting valve for the turbopump, or match the valve cross-section to the size of the recipient and maximum venting rate.

2.

Vent the vacuum system with a maximum rate of pressure rise of 15 hPa/s for a duration of 20 seconds.

3.

Then vent the system with a second venting valve of any size, for example directly at the vacuum chamber.

4.

Wait for pressure equalization to atmospheric pressure in the vacuum system.

36/60

7 Maintenance

7.1 General maintenance information

WARNING

Danger to life from electric shock during maintenance and service work

The device is only completely de-energized when the mains plug has been disconnected and the turbopump is at a standstill. There is a danger to life from electric shock when making contact with live components.

►

Before performing all work, switch off the main switch.

►

Wait until the turbopump comes to a standstill (rotation speed =0).

►

Remove the mains plug from the device.

►

Secure the device against unintentional restarting.

WARNING

Health hazard through poisoning from toxic contaminated components or devices

Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic substances causes environmental damage.

►

Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.

►

Decontaminate affected parts before carrying out maintenance work.

►

Wear protective equipment.

Maintenance

7.2 Maintenance intervals and responsibilities

Instructions for carrying out maintenance

1.

Carry out the required maintenance on the pumping station components, in accordance with the instructions in the individual operating instructions.

2.

Clean the turbopump station exterior with a lint-free cloth and a little isopropanol.

3.

Consult Pfeiffer Vacuum Service about shorter maintenance intervals for extreme loads or impure processes.

4.

For all other cleaning, maintenance or repair work, contact the appropriate Pfeiffer Vacuum Service location.

7.3 Replacing mains fuses

WARNING

Danger to life from electric shock during maintenance and service work

The device is only completely de-energized when the mains plug has been disconnected and the turbopump is at a standstill. There is a danger to life from electric shock when making contact with live components.

►

Before performing all work, switch off the main switch.

►

Wait until the turbopump comes to a standstill (rotation speed =0).

►

Remove the mains plug from the device.

►

Secure the device against unintentional restarting.

Device or system problem

Generally, a faulty fuse is an indication of a problem in the device or system. If the new fuse is again faulty after replacement, contact your nearest Pfeiffer Vacuum Service Center.

37/60

1

2

3

4

Maintenance

Fig. 19: Replace main fuses

1 Master switch 3 Fuses

2 Fuse holder 4 Mains plug

Replacing faulty fuses

Spare parts required

●

2 x fuses, 5 x 20 (T 2 A H 250 V AC)

1.

Shut down the pumping station.

2.

Disconnect mains cable from the mains plug.

3.

Open the fuse holder above the mains plug.

4.

Replace faulty fuses.

5.

Close fuse holder.

6.

Recommission the pumping station.

7.4 Removing components for maintenance

Customer maintenance on pumping station components may require removal from the pumping station frame.

NOTICE

Malfunction due to changing the connection configuration

The pumping station connections are pre-configured at the factory. If the control lines on the connector are mixed up, this causes the pumping station to malfunction or fail.

►

When removing components, note their original layout for subsequent re-assembly.

►

Make a note of the accessories configuration and important setting values from the DCU before disassembly of the pumping station or components.

Connection to X3 Preset accessory

Acc. A1 Air cooling

Acc. B1 Venting valve

DO1 Backing pump (MVP 30-3 only)

Tbl. 11: Preset accessory connections

38/60

7.4.1 Removing the electrical connections

4

5

1

2

3

4

3

2

5

1

Before carrying out any work, safely disconnect device from mains

1.

Shut down the device.

2.

Wait until all components are at a complete standstill.

3.

Switch off the master switch.

4.

Disconnect the mains cable from the device.

Maintenance

Fig. 20: Electrical connections

1 Multifunction connection "X3" 4 Mains cable

2 Connection cable connecting plug 5 Master switch

3 Control cable accessory

Procedure

1.

Disconnect the connection plug from the multi-function connection on the turbopump electronic drive unit.

2.

Disconnect and remove the accessory control lines from the connecting plug.

7.4.2 Dismantling the turbopump from the pumping station

Fig. 21: Dismantling the turbopump

1 Turbopump, complete 4 Fore-vacuum line

2 Fixing screw with washer 5 Mounting plate

3 Fore-vacuum connection

39/60

Maintenance

Required tools

●

Allen key

●

Calibrated torque wrench (tightening factor ≤ 1.6)

Procedure

1.

Loosen and remove the fore-vacuum line from the turbopump.

2.

Make sure not to kink or damage the fore-vacuum hose.

3.

Unscrew all 4 fixing screws and washers from the mounting plate.

–

Fixing screw tightening torque for subsequent reassembly: 10 Nm.

4.

Remove the entire turbopump and mounting plate from frame.

Service turbopump

The opening in the mounting plate makes it easy for customers to perform maintenance work on the turbo pump (e.g. change the lubricant reservoir).

40/60

8 Decommissioning

8.1 Shutting down for longer periods

Procedure

1.

Remove the pumping station from the vacuum system if necessary.

2.

Change the operating fluid reservoir of the turbopump if necessary.

3.

Close all flange openings with the original protective caps.

4.

Store the pumping station indoors only, at temperatures between -10 °C and +40 °C.

5.

In rooms with humid or aggressive atmospheres: Hermetically seal the pumping station together with a drying agent in a plastic bag.

8.2 Recommissioning

Risk of damage to the turbopump as a result of operating fluid aging after recommissioning

The shelf life of the operating fluid of the turbopump is limited. Aging of the operating fluid may lead to the failure of the ball bearing and cause damage to the turbopump.

►

Pay attention to when the operating fluid must be changed:

●

after maximum 2 years without operation,

●

after maximum 4 years combined operation and downtimes.

►

Observe the maintenance instructions and inform Pfeiffer Vacuum Service.

Decommissioning

NOTICE

Procedure for recommissioning the pumping station

1.

Check the pumping station for impurities and moisture.

2.

Clean the turbopump station exterior with a lint-free cloth and a little isopropanol.

3.

If necessary, arrange for Pfeiffer Vacuum Service to fully clean the pumping station.

4.

If necessary, arrange for Pfeiffer Vacuum Service to fully clean the pumping station components.

5.

Install the pumping station according to these instructions (see chapter “Installation”, page 20).

6.

Recommission the pumping station according to these instructions (see chapter “Commission-

ing”, page 32).

8.3 Disposing of the vacuum pump

WARNING

Health hazard through poisoning from toxic contaminated components or devices

Toxic process media result in contamination of devices or parts of them. During maintenance work, there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic substances causes environmental damage.

►

Take suitable safety precautions and prevent health hazards or environmental pollution by toxic process media.

►

Decontaminate affected parts before carrying out maintenance work.

►

Wear protective equipment.

Procedure

►

Dispose of all substances safely according to local regulations.

41/60

Malfunctions

9 Malfunctions

9.1 General

WARNING

Danger to life from the turbopump breaking away in the event of a fault

Sudden blocking of the rotor generates high destructive torques in accordance with ISO 27892. If the turbopump is not properly secured, it will tear off. The energy released in this way can propel the entire turbopump or shattered pieces from its interior through the surrounding area. Potentially dangerous gases may escape. There is a risk of serious injury, potentially even fatal, and significant equipment damage.

►

Follow the installation instructions for this turbopump.

►

Observe the requirements regarding stability and design of the counter flange.

►

Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.

WARNING

Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction

Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. When using a vibration compensator, this will probably lead to the turbopump being sheared off in use. The energy that this would release could throw the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive property damage.

►

Take suitable safety precautions on-site for the compensation of the occurring torques.

►

Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.

Malfunctions on the pumping station are usually caused by faults on individual components. LEDs on the turbopump and backing pump indicate the operation statuses for the respective device.

●

The DCU display and control unit indicates basic pumping station operating statuses (see chap-

ter “Operating mode display via LED”, page 35).

●

The DCU indicates system malfunctions by outputting an error code to the display.

9.2 Troubleshooting

Problem Possible causes Remedy

Pumping station will not start up. None of the LEDs on the DCU illuminate.

●

Current supply interrupted

●

Incorrect operating voltage

●

No operating voltage present

●

Electronic drive unit defective

1.

Check supply lines to pumping station.

2.

Check the 24 V DC output voltage at the “DC out” connection of the built-in power supply pack.

3.

Check the plug contacts on the power supply pack.

4.

Check connection cable between power supply pack, backing pump, and turbopump.

1.

Note rating plate specifications.

2.

Supply the correct operating voltage.

1.

Connect operating voltage

1.

Replace electronic drive unit according to turbopump operating instructions.

2.

Contact Pfeiffer Vacuum Service.

42/60

Problem Possible causes Remedy

Pumping station not reaching final pressure.

Tbl. 12: Troubleshooting

9.3 Error codes

Error (** Error E––– **) always result in the shutdown of the connected peripheral devices.

Warnings (* Warning F––– *) are only displayed and do not result in the shutdown of components.

Handling of error messages on the HiCube Eco

1.

2.

●

Condensate in the backing pump

●

Gas ballast valve open

First eliminate the cause of the error.

Reset the error message by pressing the key.

1.

Malfunctions

MVP 015-2 only: open the backing pump gas ballast valve (see chapter “Operation with gas

ballast (applies to MVP 015-2 only)”, page 33).

MVP 015-2 only: close the backing pump gas ballast valve (see chapter “Operation with gas

ballast (applies to MVP 015-2 only)”, page 33).

Display in DCU Problem Possible causes Remedy

* Warning F110 * Pressure gauge

** Error E040 ** Hardware error

** Error E042 ** Hardware error

** Error E043 ** Hardware error

** Error E090 ** Internal device

error

** Error E698 ** Communication

error

Tbl. 13: Warning and error messages when using the DCU

Display Problem Possible causes Remedy

E001 Excessive speed

E002 Overvoltage

E006 Run-up fault

E007 Operating fluid low

●

Pressure gauge faulty

●

Connection to the pressure gauge disconnected during operation

●

external RAM faulty

●

EPROM checksum incorrect

2

●

EPROM write error

●

RAM not large enough

●

DCU is connected to incorrect electronic drive unit

●

Electronic drive unit is not responding

●

Incorrect power supply pack used

●

Run-up time threshold set too low

●

Gas flow in recipient through leaks or open valves

●

Still below speed-control switch point run-up time expires

●

Operating fluid low

●

Check the cable connection

●

Carry out a restart with pressure gauge connected

●

Replace the pressure gauge completely

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

●

Connect the DCU to the correct electronic drive unit

●

Contact Pfeiffer Vacuum Service.

Contact Pfeiffer Vacuum Service. Acknowledge only at rotation speed f = 0

Check the power supply pack type Check the mains voltage

Adjust the run-up time to the process conditions Check vacuum chamber for leakage and closed valves Adjust the rotation speed switch point

Check the operating fluid Acknowledge only at rotation speed f = 0

43/60

Malfunctions

Display Problem Possible causes Remedy

E008 Connection, electronic drive

unit - pump faulty

E010 Internal device error

E021 Electronic drive unit does

not detect the pump

E043 Internal configuration error

E044 Excess temperature, elec-

tronics

E045 Excess temperature, motor

E046 Internal initialization error

E091 Internal device error

E092 Unknown connection panel

E093 Motor temperature evalua-

tion faulty

E094 Electronics temperature

evaluation faulty

E098 Internal communication er-

ror

E107 Final stage group error

E108 Rotation speed measure-

ment faulty

E109 Software not released

E110 Operating fluid evaluation

faulty

E111 Operating fluid pump com-

munication error

E112 Operating fluid pump group

error

E114 Final stage temperature

evaluation faulty

E117 Excess temperature, pump

lower part

E118 Excess temperature, final

stage

E119 Excess temperature, bear-

ing

E143 Operating fluid pump ex-

cess temperature

E777 Nominal rotation speed not

confirmed

F001 TMS heat-up time expired

●

Connection to the pump faulty

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Nominal rotation speed not confirmed after replacing the electronic drive unit

●

Internal timer for heatup monitoring exceeded

●

Check connections Acknowledge only at rotation speed f = 0

Contact Pfeiffer Vacuum Service. Acknowledge only at rotation speed f = 0

Contact Pfeiffer Vacuum Service.

Improve the cooling Check the operating conditions

Contact Pfeiffer Vacuum Service.

Contact Pfeiffer Vacuum Service. Acknowledge only at rotation speed f = 0

Contact Pfeiffer Vacuum Service.

Contact Pfeiffer Vacuum Service. Acknowledge only at rotation speed f = 0

Contact Pfeiffer Vacuum Service.

Improve the cooling Check the operating conditions

Improve the cooling Check the operating conditions Acknowledge only at rotation speed f = 0

Confirm the nominal rotation speed with [P:

777]

Acknowledge only at rotation speed f = 0

Check the operating conditions

44/60

Display Problem Possible causes Remedy

F003 TMS heating circuit temper-

ature sensor

F007 Undervoltage/power failure

F018 Operating supremacy con-

flict

F021 Blocking signal invalid

F034 Sealing gas flow low

F045 Motor high temperature

F076 Electronics high tempera-

ture

F097 Invalid pump information

F098 Incomplete pump informa-

tion

F100 Rotation speed raised to

minimum value

F115 Pump lower part tempera-

ture evaluation faulty

F116 Bearing temperature evalu-

ation faulty

F117 Pump lower part high tem-

perature

F118 Final stage high tempera-

ture

F119 Bearing high temperature

F143 High operating fluid pump

temperature

F168 High delay

●

TMS temperature not in the permissible range between +5 °C and 85 °C

●

Mains failure

●

Pumping station switched on with [P:010] while E74 input "start/stop" is off (opened)

●

Signal of the blocking signal monitoring outside the valid range

●

Signal of the sealing gas monitoring valid but below the set threshold

[P:791]

●

Faulty cooling

●

Faulty cooling

●

Data of the pump faulty

●

Connection to the pump faulty

●

Permissible specifications for rotation speed operation or stand-by incorrect

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Faulty cooling

●

Rate of pressure rise too high, venting rate too high

●

Check the operating conditions

●

Contact Pfeiffer Vacuum Service.

●

Check the mains supply

●

Switch on the pumping station via E74

●

Switch the pumping station off via [P:010].

●

Check the connections of the sealing gas monitoring

●

Check the parameter options of the accessory outputs

●

Check and improve the sealing gas supply

●

Check the operating conditions

●

Improve the cooling

●

Check the operating conditions

●

Improve the cooling

●

Check the operating conditions

●

Acknowledging restores factory setting

●

Contact Pfeiffer Vacuum Service.

●

Check [P:707] or [P:717]

●

Obtain the valid rotation speed range from the technical data of the Turbopump

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

●

Improve the cooling

●

Check the operating conditions

●

Contact Pfeiffer Vacuum Service.

●

Check the operating conditions

●

Improve the cooling

●

Check the operating conditions

●

Improve the cooling

●

Check the operating conditions

●

Check and adapt pump-specific venting rate

Malfunctions

Tbl. 14: Error and warning messages for turbopump electronic drive unit

Display Problem Possible causes Remedy

E042 Inconsistent software Checksum errors

E091 Unknown hardware

E098 Internal communication error between interface

board and drive

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

●

Contact Pfeiffer Vacuum Service.

45/60

Malfunctions

Display Problem Possible causes Remedy

E117 Excess temperature pump

E173 Pump overflow

E174 Pump blocked

Tbl. 15: Error and warning messages for MVP 015 diaphragm pump electronic drive unit

●

Faulty cooling

●

Improve the cooling Check the operating conditions

Contact Pfeiffer Vacuum Service.

46/60

ANFORDERUNG SERVICE

ERKLÄRUNG KONTAMINIERUNG

Service solutions from Pfeiffer Vacuum

10 Service solutions from Pfeiffer Vacuum

We offer first class service

Long vacuum component service life, coupled with low downtimes, are clear expectations that you have of us. We satisfy your needs with capable products and outstanding service.

We are consistently striving to perfect our core competence, service for vacuum components. And our service is far from over once you’ve purchased a product from Pfeiffer Vacuum. It often enough really just begins then. In proven Pfeiffer Vacuum quality, of course.

Our professional sales engineers and service technicians stand ready to provide hands-on support to you worldwide. Pfeiffer Vacuum offers a complete portfolio of service offerings, ranging from genuine

spare parts right through to service agreements.

Take advantage of Pfeiffer Vacuum Service

Whether for preventative on-site service from our field service, fast replacement with as-new replacement products or repair in a Service Center close to you; you have various options for upholding your equipment availability. Detailed information and addresses can be found on our website in the Pfeiff-

er Vacuum Service section.

Advice on the optimum solution is available from your Pfeiffer Vacuum contact partner.

For quick and smooth handling of the service process, we recommend the following steps:

1. Download the current form templates.

─ Declaration of Service Request ─ Service Request ─ Declaration of Contamination

a. Dismantle all accessories and keep them (all external mounted parts as valve, inlet

screen, etc.).

b. Drain the operating fluid/lubricant as necessary.

c. Drain the cooling medium as necessary.

2. Fill out the service request and the declaration of contamination.

3. Send the forms via email, fax or post to your local Service Center.

4. You will receive a response from Pfeiffer Vacuum.

Sending of contaminated products

No units will be accepted if they are contaminated with micro-biological, explosive or radioactive substances. If products are contaminated or if the declaration of contamination is missing, Pfeiffer Vacuum will contact the customer before starting maintenance. In addition, depending on the product and the level of contamination additional decontamination costs may be required.

47/60

ERKLÄRUNG KONTAMINIERUNG

Service solutions from Pfeiffer Vacuum

5. Prepare the product for transport in accordance with the details in the declaration of contamination.

a) Neutralize the product with nitrogen or dry air.

b) Close all openings with airtight blank flanges.

c) Seal the product in appropriate protective film.

d) Only pack the product in suitable, stable transport containers.

e) Observe the applicable transport conditions.

6 Affix the declaration of contamination to the outside of the packaging.

7 Then send your product to your local Service Center.

8 You will receive a confirmation message/a quotation from Pfeiffer Vacuum.

For all service orders, our General Terms and Conditions of Sales and Supply and General Terms and

Conditions of Repair and Maintenance apply to vacuum equipment and components.

48/60

11 Accessories

Accessories

We recommend

Please refer to the accessories list for the individual components in their respective operating instructions or online at pfeiffer-vacuum.de.

49/60

Technical data and dimensions

12 Technical data and dimensions

12.1 General

This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.

Technical data

Maximum values refer exclusively to the input as a single load.

●

Specifications according to PNEUROP committee PN5

●

ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown torque"

●

ISO 21360 2012: “Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1: General description”

●

ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 4: Turbomolecular vacuum pumps"

●

Ultimate pressure with test dome after 48 h bake out duration

●

Gas throughput with water cooling; backing pump = rotary vane pump (10 m3/h)

●

Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C

●

Integral leakage rate with 100 % helium concentration, 10 s measurement duration

●

Sound pressure level at distance to vacuum pump = 1 m

mbar bar Pa hPa kPa Torr | mm Hg

mbar 1

bar 1000 1

Pa 0.01

hPa 1

1 · 10

-3

-5

-3

100 1 0.1 0.75

5

1 · 10

1 0.01

1000 100 750

-3

1 · 10

7.5 · 10

100 1 0.1 0.75

kPa 10 0.01 1000 10 1 7.5

Torr | mm Hg 1.33

1.33 · 10

-3

1 Pa = 1 N/m

133.32 1.33 0.133 1

2

Tbl. 16: Conversion table: Pressure units

mbar l/s

Pa m3/s

sccm Torr l/s

atm cm3/s

mbar l/s 1 0.1 59.2 0.75 0.987

Pa m3/s

sccm

10 1 592 7.5 9.87

1.69 · 10

-2

1.69 · 10

-3

1

1.27 · 10

-2

1.67 · 10

Torr l/s 1.33 0.133 78.9 1 1.32

atm cm3/s

1.01 0.101 59.8 0.76 1

Tbl. 17: Conversion table: Units for gas throughput

-3

-2

12.2 Technical data

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

50/60

Technical data and dimensions

Ultimate pressure

Pumping speed for N

2

< 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10-7 hPa

22 l/s 22 l/s 22 l/s

Pumping speed backing pump at 50 Hz1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 84 s 15 s

size 1 l

Pump-down time for vacuum chamber

560 s 836 s 145 s

size 10 l

Pump-down time for vacuum chamber

5595 s 8358 s 1451 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 11.7 kg 13.4 kg 13.3 kg

Tbl. 18: Technical data HiCube 30 Eco, DN 40 ISO-KF

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

2

< 1 · 10-8 hPa < 1 · 10-8 hPa < 1 · 10-8 hPa

32 l/s 32 l/s 32 l/s

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 84 s 15 s

size 1 l

Pump-down time for vacuum chamber

560 s 836 s 145 s

size 10 l

Pump-down time for vacuum chamber

5595 s 8358 s 1451 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 12.9 kg 14.6 kg 14.5 kg

Tbl. 19: Technical data HiCube 30 Eco, DN 63 CF-F

Classification HiCube 30 Eco HiCube 30 Eco HiCube 30 Eco

Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 30 HiPace 30 HiPace 30

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

51/60

Technical data and dimensions

Ultimate pressure

Pumping speed for N

2

< 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10-7 hPa

32 l/s 32 l/s 32 l/s

Pumping speed backing pump at 50 Hz1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 84 s 15 s

size 1 l

Pump-down time for vacuum chamber

560 s 836 s 145 s

size 10 l

Pump-down time for vacuum chamber

5595 s 8358 s 1451 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 11.7 kg 13.4 kg 13.3 kg

Tbl. 20: Technical data HiCube 30 Eco, DN 63 ISO-K

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 40 ISO-KF DN 40 ISO-KF DN 40 ISO-KF

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

2

< 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10-7 hPa

35 l/s 35 l/s 35 l/s

Pumping speed backing pump at 50 Hz1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 83 s 14 s

size 1 l

Pump-down time for vacuum chamber

557 s 834 s 143 s

size 10 l

Pump-down time for vacuum chamber

5572 s 8335 s 1428 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 12.1 kg 13.8 kg 13.7 kg

Tbl. 21: Technical data HiCube 80 Eco, DN 40 ISO-KF

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 63 CF-F DN 63 CF-F DN 63 CF-F

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

52/60

Technical data and dimensions

Ultimate pressure

Pumping speed for N

2

< 1 · 10-8 hPa < 1 · 10-8 hPa < 1 · 10-8 hPa

67 l/s 67 l/s 67 l/s

Pumping speed backing pump at 50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 83 s 14 s

size 1 l

Pump-down time for vacuum chamber

557 s 834 s 143 s

size 10 l

Pump-down time for vacuum chamber

5572 s 8335 s 1428 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 13.5 kg 15.2 kg 15.1 kg

Tbl. 22: Technical data HiCube 80 Eco, DN 63 CF-F

Classification HiCube 80 Eco HiCube 80 Eco HiCube 80 Eco

Flange (in) DN 63 ISO-K DN 63 ISO-K DN 63 ISO-K

Flange (out) Silencer, G 1/8" Silencer, G 1/8" Silencer, G 1/8"

Turbopump HiPace 80 HiPace 80 HiPace 80

Backing pump MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

Pumping speed for N

2

< 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10-7 hPa

67 l/s 67 l/s 67 l/s

Pumping speed backing pump at 50 Hz1 m³/h 0.75 m³/h 1.8 m³/h

Pump-down time for vacuum chamber

56 s 83 s 14 s

size 1 l

Pump-down time for vacuum chamber

557 s 834 s 143 s

size 10 l

Pump-down time for vacuum chamber

5572 s 8335 s 1428 s

size 100 l

Mains requirement: voltage 100 – 240 V 100 – 240 V 100 – 240 V

Mains requirement: frequency (range) 50/60 Hz 50/60 Hz 50/60 Hz

Cooling method, standard Air Air Air

Relative humidity of air 5 – 85 %, not condens-

ing

5 – 85 %, not condensing

Weight 12.1 kg 13.8 kg 13.7 kg

Tbl. 23: Technical data HiCube 80 Eco, DN 63 ISO-K

Classification HiCube 300

Eco

HiCube 300 Eco

Flange (in) DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F DN 100 CF-F

Flange (out) Silencer,

G 1/8"

Silencer, G 1/8"

Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H

53/60

Technical data and dimensions

Backing pump MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3

Ultimate pressure

< 1 · 10-8 hPa < 1 · 10-8 hPa < 1 · 10-8 hPa < 1 · 10

-10

< 1 · 10

hPa

Pumping speed for N

2

Pumping speed

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h backing pump at 50 Hz

Pump-down time for

55 s 83 s 14 s 55 s 83 s 14 s vacuum chamber size 1 l

Pump-down time for

553 s 830 s 138 s 553 s 830 s 138 s vacuum chamber size 10 l

Pump-down time for

5532 s 8295 s 1382 s 5532 s 8295 s 1382 s vacuum chamber size 100 l

Mains requirement:

100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V voltage

Mains requirement:

50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz frequency (range)

Cooling method,

Air Air Air Air Air Air standard

Relative humidity of air

5 – 85 %, not

condensing

5 – 85 %, not condensing

Weight 17.9 kg 19.6 kg 19.5 kg 17.9 kg 19.6 kg 19.5 kg

-10

hPa < 1 · 10

hPa

5 – 85 %, not condensing

-10

Tbl. 24: Technical data HiCube 300 Eco, DN 100 CF-F

Classification HiCube 300

Eco

HiCube 300 Eco

Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K

Flange (out) Silencer,

G 1/8"

Silencer, G 1/8"

Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H

Backing

MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3

pump

Ultimate

< 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10-7 hPa < 1 · 10

-10

hPa < 1 · 10

-10

hPa < 1 · 10

-10

hPa

pressure

Pumping speed for N

Pumping

260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s

2

1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h speed backing pump at 50 Hz

Pump-down

55 s 83 s 14 s 55 s 83 s 14 s time for vacuum chamber size 1 l

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Technical data and dimensions

Pump-down time for vacuum chamber size 10 l

Pump-down time for vacuum chamber size 100 l

Mains requirement: voltage

Mains requirement: frequency (range)

Cooling method, standard

Relative humidity of air

Weight 15.9 kg 17.6 kg 17.5 kg 15.9 kg 17.6 kg 17.5 kg

553 s 830 s 138 s 553 s 830 s 138 s

5532 s 8295 s 1382 s 5532 s 8295 s 1382 s

100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V

50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz

Air Air Air Air Air Air

5 – 85 %, not

condensing

Tbl. 25: Technical data HiCube 300 Eco, DN 100 ISO-K

5 – 85 %, not condensing

12.3 Dimensioned drawings

All dimensions given in mm

Fig. 22: Dimensions of HiCube 30 Eco, DN 40 ISO-KF

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Technical data and dimensions

Fig. 23: Dimensions of HiCube 30 Eco, DN 63 CF-F

Fig. 24: Dimensions of HiCube 30 Eco, DN 63 ISO-K

Fig. 25: Dimensions of HiCube 80 Eco, DN 40 ISO-KF

Fig. 26: Dimensions of HiCube 80 Eco, DN 63 CF-F

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Fig. 27: Dimensions of HiCube 80 Eco, DN 63 ISO-K

Technical data and dimensions

Fig. 28: Dimensions of HiCube 300 Eco, DN 100 CF-F

Fig. 29: Dimensions of HiCube 300 Eco, DN 100 ISO-K

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Declaration of Conformity

We hereby declare that the product cited below satisfies all relevant provisions of the following EU Directives:

●

Machinery 006/42/EC (Appendix II, No. 1 A)

●

Electro-magnetic Compatibility 2014/30/EU

●

Restrictions on the Use of Specific Hazardous Substances 2011/65/EU

Authority for compiling the technical documents rests with Mr. Helmut Bernhardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

Turbo pumping station

HiCube Eco

Harmonized standards and national standards and specifications which have been applied:

DIN EN ISO 12100:2011

DIN EN 1012-2:2011

DIN EN 61000-3-2:2014

DIN EN 61000-3-3:2014

DIN EN 61010-1:2010

DIN EN 61326-1:2013

DIN EN 62061:2013

Signature:

(Dr. Ulrich von Hülsen)

Managing director

Pfeiffer Vacuum GmbH

Berliner Straße 43

35614 Asslar

Germany

Asslar, 2016-09-10

59/60

ed. D - Date 1901 - P/N:PT0553BEN

*PT0553*

Pfeiffer Hicube ECO User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of contents

List of tables

List of figures

1 About this manual

1.1 Validity

1.1.1 Applicable documents

1.1.2 Variants

1.2 Target group

1.3 Conventions

1.3.1 Instructions in the text

1.3.2 Pictographs

1.3.3 Stickers on the product

1.3.4 Abbreviations

2 Safety

2.1 General safety instructions

2.2 Safety instructions

2.3 Safety precautions

2.4 Limits of use of the product

2.5 Proper use

2.6 Foreseeable improper use

3 Product description

3.1 Identifying the product

3.2 Scope of delivery

3.3 Function

3.3.1 Control interface

3.3.2 Drive

3.3.3 Cooling

4 Transportation and Storage

4.1 Transporting the pumping station

4.2 Transport protection

4.3 Storing the pumping station

5 Installation

5.1 Preparing for set-up

5.2 Setting up the pumping station

5.3 Anchoring pumping station

5.4 Connecting the high vacuum side

5.4.1 Designing the counter flange

5.4.2 Using accessories for the high vacuum connection

5.4.3 Connecting the turbopump externally

5.4.4 Installation of ISO-KF flange

5.4.5 Attaching ISO-K flange onto ISO-K

5.4.6 Installation of ISO-K flange onto ISO-F

5.4.7 Fastening CF flange to CF-F

5.5 Connecting the exhaust side

5.6 Modifying the DCU for remote operation

5.7 Connecting accessories for the pumping station

5.8 Removing transport lock

5.9 Grounding the pumping station

5.10 Establishing the mains connection

6 Operation

6.1 Commissioning

6.2 Switching on the turbo pumping station

6.3 Normal operation

6.4 Operation with gas ballast (applies to MVP 015-2 only)

6.5 Operation monitoring

6.5.1 Operating mode display via LED

6.5.2 Temperature monitoring

6.6 Switching off and venting

6.6.1 Shutting down the turbo pumping station

6.6.2 Venting

7 Maintenance

7.1 General maintenance information

7.2 Maintenance intervals and responsibilities

7.3 Replacing mains fuses

7.4 Removing components for maintenance

7.4.1 Removing the electrical connections

7.4.2 Dismantling the turbopump from the pumping station

8 Decommissioning

8.1 Shutting down for longer periods

8.2 Recommissioning

8.3 Disposing of the vacuum pump

9 Malfunctions

9.1 General

9.2 Troubleshooting

9.3 Error codes

10 Service solutions from Pfeiffer Vacuum