Nikon L200A User Manual

Automated IC Inspection Microscope

Automated IC Inspection Microscope L200A

The next generation in automated

IC inspection microscopy

The Eclipse L200A has scored major
advances in the standardization of
inspection and safeguards against
contamination. In a new design that
combines motorized control with
automated operation, observation
conditions can be programmed for
each individual objective or for each
substrate to be inspected. Focus position,
objective magnification, illumination control
and other microscope methods are fully
programmable and can be recalled instantly.
This eliminates deviation in inspection
results that might occur due to different
settings made by multiple users.

To minimize the chance of
contamination, the L200A's aperture
control and other major operations
are now motorized, enabling remote
control for use on unattended IC
production lines. Like other Eclipse-

series microscopes from Nikon, the
L200A features industry-acclaimed CFI60
infinity optics.
Include an ergonomic design for comfortable
viewing, a rigid, vibration resistant
construction, and you have a microscope
unsurpassed to meet the stringent
requirements of the latest semiconductor fabs.
The L200A is the next step upward in
automated IC inspection microscopy.

Standardized, contamination-free inspections

Cursor keys

LCD screen

DIC adjustment

knob*

Aperture keys

Darkfield key

Brightfield key

Option keys

Objective

selection keys

Enter key

Menu key

Focus dial

Focus Coarse/Fine
changeover key

AF-MF changeover key*
Focus fine adjustment knob*
(When AF is ON)

Lamp intensity Auto/
Manual changeover key

Lamp intensity control knob

Motorized, remote control minimizes
the chance of contamination, while
enhancing productivity

Frequently used operations such as aperture control, focusing, brightfield­darkfield changeover, nosepiece rotation, lamp intensity control, and DIC
setting (option) are all motorized and can be controlled by the remote
controller or a PC. In addition, there is virtually no operation that requires
manual adjustment above the sample, therefore preventing particle
contamination introduced from the operator.

Free from deviations in
inspection results, due to
human errors and differences in
microscope settings

Optimum observation conditions including focus position,
aperture, light intensity, as well as DIC prism and polarizer
position can be preset objective-by-objective and recalled
simply by selecting the objective. This eliminates the need
to configure these settings each time the microscope is
used, providing standardized observation regardless of
who operates the microscope.

3

*Active when the respective optional module is attached.

Remote Controller

Easy configuration into an automated inspection system

Programmed settings

As an inspection process varies depending on substrate,
layer, and even the operator, it has been necessary to re­adjust settings for each inspection process.
The L200A's programming feature eliminates this process.
You just select the settings-such as observation method,
objective magnification, point to be checked, focus
position, aperture, and light intensity-and save them by
attaching appropriate file names. All you need do to begin
your inspection is just to specify the file name.

DART software (option)

AF

RS232C (Binary)

Local

Local

Scanning

stage
(ISS)

Wafer

Loader

NWL860

Local

PC
(DART Software)
(Other Software)

Other Euipment

Local

Local

RS232C
(Binary)

RS232C (Binary)

RS232C (SECS)

L200A

DIC

Confocal

DUV

Filing

System

Host

Computer

Auto In­spection

Machine

4 5

In combination with
wafer loaders

Of course, the L200A can be configured with
Nikon's NWL-860 series of wafer loaders and
manual or motorized scanning stages to
create a wafer inspection system at a
minimum cost.

DART Software is an integrated software package
that can fully automate the inspection process.
DART combined with an NWL860 wafer loader,
ISS200 Motorized Stage and a L200A Auto Focus
offers a complete automated wafer inspection
station. DART software modules allow further
upgrades with options such as image archiving,
defect review, post probe review and online
communications.

Communication System Diagram

L200A configured with NWL-860 INX

Top-notch basic performance facilitates inspections Accessories to enhance performance

High-contrast darkfield images

A new illumination
system produces a
Signal to Background
(S/B) ratio that is
nearly three times
greater than former
models. This
improves sensitivity
during darkfield
observations, enabling the detection of minute scratches
and surface irregularities within the sample, and provides
exceptionally high contrast.

CFI LU/L Plan series objectives

Illumination systems

•12V-100W halogen lamphouse

•100W mercury lamphouse

•150W metal halide
lamphouse

•75W xenon lamphouse

Stages and wafer
holders

•8x8 Stage

•8-inch (200mm) wafer holder

•6-inch (150mm) wafer holder

•6-inch (150mm) mask holder

•5-inch (125mm) mask holder

•4-inch (100mm) mask holder

DXM1200 digital camera

The DXM1200 Digital Camera achieves ultra­high-quality digital images equivalent to
approximately 12 million output pixels, plus
has a low-noise design for clear, low-light
image capture. The camera's software can be
set to automatically categorize the images
taken, sort them and save them, all
automatically—a powerful feature when you
take a large number of photomicrographs.

SEMI S2-93A, S8-95 compliant
design

Centerable motorized
nosepiece

The sextuple motorized
nosepiece not only has
the same encoded
positioning system
offered on the Eclipse
L200, but it also offers
three adjustable objective
positions that improve
par-centricity even more.

Safeguards against
contamination

The body of this microscope is finished with electrostatic
discharge (ESD) coatings to prevent foreign particles from
adhering to it. Furthermore, the motorized nosepiece uses
a shielded center-motor that traps foreign particles inside,
preventing them from falling onto the sample.

Vibration-isolation design

Thanks to Computer-Aided
Engineering, the L200A is three
times less susceptible to
floor vibrations when
compared with conventional
models in this class. This
reduces the chance of
unwanted blur or image
shifts even during high­magnification
observations.

6 7

Nikon's renowned CFI60 optics are the fusion of CF design
and infinity optics. These new optics feature longer working
distances and high N.A.'s. They also produce brighter
images with more contrast and reduced flare.

Optical System

A tilting trinocular eyepiece tube with a lower eyepoint
designed to be closer to the operator allows you to sit in a
more natural erect position. Microscope controls located
comfortably up-front in the microscope base minimize
hand movement, allowing you to concentrate on the
inspection process.

System Diagram

ECLIPSE L200A Conventional model

Type Magnifi- N.A. W.D.

cation (mm)
CFI L Plan Epi* 2.5X 0.075 8.80
CFI LU Plan Epi* 5X 0.15 23.50

10X 0.30 17.30

20X 0.45 4.50

50X 0.80 1.00

100X 0.90 1.00
CFI LU Plan Epi ELWD* 20X 0.40 13.00

50X 0.55 10.10

100X 0.80 3.50
CFI L Plan Epi SLWD* 20X 0.35 24.00

50X 0.45 17.00

100X 0.70 6.50
CFI LU Plan Apo Epi* 150X 0.95 0.30
CFI L Plan Apo Epi WI* 150X 1.25 0.25
CFI LU Plan BD 5X 0.15 18.00

10X 0.30 15.00

20X 0.45 4.50

50X 0.80 1.00

100X 0.90 1.00
CFI LU Plan BD ELWD 20X 0.40 13.00

50X 0.55 9.80

100X 0.80 3.50
CFI LU Plan Apo BD 150X 0.90 0.42

* A nosepiece adapter is needed to use these objectives.

Photomicrographic System

CF Projection Lenses
PLI 2X, 2.5X, 4X, 5X

V-T Photo Adapter

Illumination
Systems

HMX-3
Lamphouse
Adapter

Epi
Collector
Lens

Fiber
Guide
Adapter

FX-III Series

Mercury
Lampsocket
100W

Xenon
Lampsocket 75W

Metal Halide Starter

12V-100W Halogen
Lamphouse

C-Mount/ENG-Mount TV

Zooming Adapter

Confocal Unit

(Under development)

Mercury Lamphouse
HMX-3B

Xenon Lamphouse
HMX-4

Liquid Fiber Guide

C-Mount/ENG-Mount

CCD Camera

TV Adapter TV Adapter

L2-TT Trinocular Tilting
Eyepiece Tube

Double Port
(Under
development)

Stages

Auto Focus Module

Filter Sliders Pinhole Slider

8x8 Stage

Motorized Scanning
Stage ISS200

ISS200 Remote Controller

L Stage for NWL860
Wafer Loader

Digital Still Camera/

C-Mount CCD Camera

YM-TI Trinocular
Eyepiece Tube

8" Wafer

Holder

CFI LU/L Plan
Epi Objectives

4-6-inch

Wafer Holder

LU Nosepiece
Adapter

CFI UW 10X

CFI UW 10XM

CFI 10X

CFI 10XM

CFI 12.5X

CFI 15X

Adapter

Filar Micrometer

Motorized
DIC Module

Breadth Shield

L200A
Remote
Controller

4-6-inch

Mask Holder

Eyepieces

10XA

CFI LU Plan BD
Objectives

En

WARNING

TO ENSURE CORRECT USAGE, READ THE CORRESPONDING
MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

Specifications and equipment are subject to change without any notice or
obligation on the part of the manufacturer. September 2002.
DART software is developed by Nikon Inc.

NIKON CORPORATION

Yokohama Plant

NIKON CORPORATION

Instruments Company

ISO 9001

Accredited by the
Dutch Council for

Accreditation

ISO 14001

©2000-02 NIKON CORPORATION

160 (6.3)

180 (7.1)

360 (14.2)

189 (7.4)

473 (18.6) max.

653 (25.7) max.

798-816 (31.4-32.1)

175 (6.9) 373 (14.7)

649 (25.6)

324-342 (12.8-13.5)

798-816 (31.4-32.1)

244 (9.6)

429-544 (16.9-21.4)

E.P.

662 (26.1)

430 (16.9)

157 (6.2)

Specifications

Dimensional diagram

(When AF Module is mounted)

Printed in Japan (0209-03)T

Code No. 2CE-KWLH-1

This brochure is printed on recycled paper made from 40% used material.

Observation method Brightfield, darkfield, DIC, simple polarizing

Main body Episcopic stand, Power supply built-in

Focusing mechanism Stroke: 29mm, Coarse: 12.7mm per rotation

(torque adjustable, focusing stop mechanism
provided), Fine: 0.1mm per rotation (in 1µm
increments), Guide: 4-guide (two roller-race,
torque adjustable)

Episcopic illuminator Motorized aperture diaphragm (centerable,

pinhole slider incorporated )
Fixed field diaphragm (with focus target), Four
ø25mm filters (NCB11/ND4,16) can be mounted;
Polarizer, Analyzer

Light sources 100W halogen, 150W metal halide, 100W mercury,

75W Xenon

Eyepiece tube UW tilting trinocular eyepiece tube (tilt angle: 0˚-

30˚; erect images), F.O.V.: 25mm, Optical path
changeover: 2-way (Bino: Photo 100:0/0:100)

Nosepiece Fixed-motorized sextuple universal nosepiece

(centarable), Highly durable

Stage 8x8 Stage, Cross travel: 205 x 205 mm,

Coarse/fine-movement changeover: manual,
Wafer holders: 4-8 in., Mask holders: 4-6 in.

Control Front panel: Nosepiece rotation buttons,

Episcopic aperture diaphragm stop buttons, Light
intensity control knob
Remote control: LCD panel, Magnification
changeover, Motorized Z-axis, Episcopic aperture
diaphragm stop buttons, Light intensity control
knob, Motorized bright/darkfield changeover key,
DIC adjustment knob, Option keys

Eyepieces CFI eyepiece lens series

Objectives CFI LU/L Plan series

Auto focus unit Optional (LED)

Automated function Recipe Programming

Communication RS-232C

Weight Approx. 45kg (when 8x8 Stage and UW eyepiece

tube are used.)

Unit: mm (inch)

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