E163E 07.1.CF.1
CNC Video Measuring System iNEXIV
model
VMA-2520
Instructions
(Hardware)
Thank you for purchasing the Nikon products.
This instruction manual is written for the users of the Nikon CNC Video Measuring System
iNEXIV “model VMA-2520”.
To ensure correct usage, read this manual carefully before operating the instrument.
It is prohibited to reproduce or transmit this manual in part or whole without Nikon’s expressed
•
permission.
The contents of this manual are subject to change without notice.
•
Some of the products described in this manual may not be included in the set you have
•
purchased.
Although every effort has been made to ensure the accuracy of this manual, if you note any
•
points that are unclear or incorrect, contact your nearest Nikon representative.
Also refer to the instruction manuals for any other system that you may be using in conjunction
•
with this product (such as a personal computer, display, etc.).
Warning Symbol Used in This Manual
Although Nikon products are designed to provide you with the utmost safety during use,
incorrect usage or disregard of the instructions can cause personal injury or property damage
as well as voiding the terms of warranty. For your safety, read the instruction manual carefully
and thoroughly before using the instrument. Do not discard this manual but keep it near the
product for easy reference.
In this manual, safety instructions are indicated with the symbols shown below. Be sure to
follow the instructions indicated with these symbols to ensure correct and safe operation.
Symbol Meaning
WARNING
CAUTION
Disregarding instructions marked with this symbol may lead to death
or serious injury.
Disregarding instructions marked with this symbol may lead to injury
or property damage.
- i -
Meaning of Symbols on the Product
Symbol Explanation
Symbol Explanation
WARNING
Maximum permissible mass
15kg
on stage:
Overconcentration of mass
may break stage glass .
Caution! Moving Parts!
This symbol on the stage reminds you of the following cautions:
• Do not touch the main body or the stage while the equipment is in
motion. Your hands or fingers could be caught in the machinery.
• Do not place your hands or fingers within the movement range of the
stage in the X and Y directions or under the components that move in
the Z direction. Your hands or fingers could be caught in the
machinery.
• When working on the stage, such as placing a workpiece on the
stage, never move the movable components.
Maximum permissible mass on stage: 15 kg
This label on the stage reminds you of the following cautions:
• The maximum mass that can be placed on the stage is 15 kg.
• Never exceed the maximum permissible mass, taking into
consideration not only the mass of the workpiece but also the mass of
the clamps, etc.
• Exceeding the maximum permissible mass could cause the stage
glass to break.
Symbol Explanation
CAUTION
This part moves up .
Keep clear of the upper side .
Caution! Moving Component in Rising Operation!
This label, attached to the top part of the main body, draws your
attention to the following cautions:
• The top section of the main body is a moving component and it rises
and lowers together with the vertical mover.
• Do not bring your hand or face close to the moving component when
the system is in operation.
• Provide sufficient space above the equipment for the movement of the
component, and make sure that this movement is not impeded by any
interfering object.
- ii -
Symbol Explanation
CLASS 1 LASER PRODUCT
When the optional “Laser Auto Focus” is installed, the entire system is
classified as a Class 1 Laser product, and this label is visible on the front
side of the lower head section. This label reminds you of the following
cautions:
• Do not look directly at the laser beam (red light) intentionally for an
extended period of time. Doing so can damage your eyes.
• Be sure to read the instruction manual for the “VMA-LAF35 for iNEXIV
VMA Series” carefully before using the system. The instruction manual
contains important safety information.
- iii -
WARNING
1. Purpose of system
This system is a precision optical measuring system. Do not use it for any purpose other
than measurement and observation. The controller for this system was developed
specifically for this system; do not use it for any other purpose.
2. Do not disassemble the system
Never attempt to disassemble this system except as specifically instructed in this instruction
manual. Attempting to disassemble the system could harm the performance of the system,
and also carries a risk of electric shock and injury.
The zoom head, guide, and scale are adjusted at the factory with extreme precision, so
never attempt to disassemble them. If you notice a problem, contact your nearest Nikon
representative.
3. Turn off the power when connecting or disconnecting cables
When connecting or disconnecting any of the cables, always turning off the power and
unplug the power cord first to prevent any possible electric shock.
Before turning off the power, be sure to first close any programs that may be running.
4. Emergency stop
In a case of emergency, press the yellow STOP switch located on the top right of the joystick
box. The system stops immediately.
To recover from an emergency stop, turn the power off, clear the condition that necessitated
the emergency stop, and then restart the system.
5. Mass of the workpiece
The maximum mass that may be placed on the stage is 15 kg. Never exceed the maximum
permissible mass, taking into consideration not only the mass of the workpiece but also the
mass of the clamps, etc. Exceeding the maximum permissible mass could cause the stage
glass to break, which could result in serious injury or a major accident.
6. System Setup
Moving the system creates a risk that the system may tip over and cause injuries. Always
contact your Nikon representative before moving the system. Otherwise, Nikon shall not bear
responsibility for any accidents or damage that occur while the system is being moved.
(However, you can move the system if there is no ridge or slope in level along the path over
which the system is to be moved. Be certain that you have read page 7 and understand all of
the warnings and cautions described therein before attempting to move the system.)
- iv -
CAUTION
1. Confirm the input voltage
• Before plugging in the power cord, confirm that the input voltage indications on the host
computer and the display (located on labels near the power receptacles) match the supply
voltage that is being used.
If the input voltage is not identical to the supply voltage, do not attempt to connect the
power but contact your nearest Nikon representative. Using the incorrect supply voltage
could cause a malfunction, fire, or electric shock.
• The input voltage for the VMA-2520 automatically switches within 100 - 240 V~, 50/60Hz.
The power supply receptacle is located on the rear of the controller.
• Always plug the power cords for this system (including the VMA-2520, the computer, and
the computer display) into a grounded three-conductor outlet. Improper grounding can
result in electric shock or abnormal operation.
• Always be sure to turn OFF all of the power switches before plugging in the power cords.
2. Do not touch moving parts
Do not touch any moving parts, as these parts can trap your hands or fingers.
3. Cautions concerning heat from the controller
Note that the internal parts of the controller are extremely hot during and immediately after
equipment operation.
• Do not bring highly flammable materials (gasoline, benzene, paint thinner, alcohol, etc.),
cloth or paper near the controller. Doing so could start a fire.
• There are ventilation openings for a cooling fan on the rear of the controller. In order to
allow the adequate dissipation of heat, install the controller so that there is an open space
of at least 20 cm between the rear panel of the controller and the nearest wall. Do not
obstruct the ventilation openings on the front of the controller.
- v -
Cautions Concerning Use
1. Installation Location
To avoid mis-operation and to peform safe and precise measurement, be sure to observe the
following points when installing this system. Be especially careful not to pinch your fingers, etc.,
when installing the system.
• Install the system in a clean environment. Dust and oily vapors can have a clear and adverse
impact on the performance of the system. Dirt and corrosion on the guide surfaces of the stage
in particular can cause a deterioration in the precision of the system.
• Install the system in a location where the temperature ranges from 10 to 35 °C and where the
humidity is less than 70%. Installation in a hot, humid location can result in condensation and
malfunctions.
• Install the system in a controlled temperature environment (i.e., an environment that is not
subject to rapid changes in temperature). Temperature changes can cause measurement errors.
• Before selecting the installation location, study the requirements described on page 17.
• Install the system in a location with little vibration.
• Install the system in a location that is not subject to sudden voltage fluctuations or electronic
noise.
• If the ventilation holes for the cooling fan in the controller are blocked, a malfunction or fire
could result.
• Install the controller so that there is an open space of at least 20 cm between the rear panel of
the controller and the nearest wall. Do not obstruct the ventilation openings on the front of the
controller.
• Make sure that the main body and the side of the measurement stand are at least 20 cm away
from the nearest wall. When setting up a personal computer rack or other equipment next to
the main body or the side of the measurement stand, also provide a space of at least 20 cm.
Failure to follow this instruction may lead to the risk of collision between the stage and a wall or
object.
2. Handle carefully
This system is a precision instrument that requires careful handling. Striking the system or
operating it in a reckless manner could damage the system.
3. Measurement and temperature
Generally, the dimensions of a workpiece will change according to the temperature. (The amount
of change depends on a coefficient that is inherent to the material.) The operation of this system
is guaranteed over a wide temperature range, but in order to obtain stable and reproducible
measurement results, the system should be used in an adequately controlled temperature
environment with less temperature change. In addition, when using this system for the first time,
be sure that you have allowed the system to become fully adjusted to the temperature
environment. (Usually, this simply requires leaving the system in that temperature environment for
about 24 hours.)
4. Measurement stand
The main body comes with a special measurement stand. If the special measurement stand is not
used, be sure to use a stand with sufficient strength and rigidity. If a general-purpose working
table is used, make sure it can withstand 1,000 kg of uniformly distributed load or more.
- vi -
5. Z-axis motion prat
Do not let the optical head or the LEDs collide with the workpiece or the clamps. If there is a
collision, press the STOP switch, turn off the power, and then remove the cause of the collision.
After restarting the system, even if it appears that everything is operating normally, be sure to
“calibrate the optical head” and “check the Laser Autofocus focal position offset”. We also
recommend that you have your nearest Nikon representative to inspect the system.
6. USB and IEEE1394 setting
Do not connect the supplied USB cable and IEEE1394 cable before the iNEXIV software is
installed. If the cable is connected before the installation of the software, the device driver may not
be set correctly.
The iNEXIV software can be used only when the appropriate driver is detected and installed when
the cable is connected for the first time according to the instructions provided during the software
installation.
7. Cleaning finished surfaces and plastic components
We recommend using a silicone cloth to clean finished surfaces and plastic components. If a
surface is especially dirty, wipe it with a dilute, mild detergent. Do not use solvents (such as paint
thinner, alcohol, or ether).
8. Isolation from the power supply
The weak electric power is running through the system even when its power switch is turned off.
In the following conditions, be sure to unplug the power cord from the power outlet.
• When the system is not used for a long period of time.
• When you wish to isolate the system from the power source.
• In case of malfunction.
- vii -
Contents
Warning Symbol Used in This Manual ......................................................................................................i
Meaning of Symbols on the Product ........................................................................................................ii
WARNING ....................................................................................................................................... iv
CAUTION .........................................................................................................................................v
Cautions Concerning Use........................................................................................................................vi
Chapter I.
Chapter II. System Setup.......................................................................................................................7
Chapter III. Operation ...........................................................................................................................14
Names of Parts and Their Functions ...................................................................................1
1.1 General ......................................................................................................................1
1.2 Main Body/Measurement Stand ................................................................................2
1.3 Top View of Stage......................................................................................................3
1.4 System Layout ...........................................................................................................4
1.5 Controller ...................................................................................................................5
1.6 Joystick Box...............................................................................................................6
2.1 Warnings....................................................................................................................7
2.2 Required Tools ...........................................................................................................7
2.3 Setup Procedures ......................................................................................................8
3.1 Turning the Power On and Off.................................................................................14
3.2 Cleaning...................................................................................................................14
3.3 Lubricating the System ............................................................................................14
Chapter IV. Performance and Specifications ........................................................................................15
4.1 Style .........................................................................................................................15
4.2 Digital Read Out ......................................................................................................15
4.3 Motion Control .........................................................................................................15
4.4 Sections ...................................................................................................................16
4.5 Measurement Accuracy...........................................................................................17
4.6 Operating Conditions ...............................................................................................17
4.7 Electrical Standards.................................................................................................18
4.8 Applicable Electrical Safety Standards ....................................................................18
- viii -
Chapter I. Names of Parts and Their Functions
1.1 General
Display
Joystick box
Main body and
stage section
Rubber
vibration
isolator
Measurement
stand
Controller
Host computer
- 1 -
1.2 Main Body/Measurement Stand
(Distance between stroke-end sensors)
WARNING
Maximum permissible mass
on stage:
15kg
Overconcentration of mass
may break stage glass.
(To the stroke-end sensors)
- 2 -
1.3 Top View of Stage
)
Measurement area
200 (Measurement area)
250 (Measurement area
20-M6 Depth:10
20-M610
Maximum permissible mass: 15 kg
The weight of clamps used for securing the
workpiece should be taken into consideration.
- 3 -
1.4 System Layout
t
Host computer (rack)
Outline of
measurement stand
Outline of
main uni
Leg position
(leg diameter: 60)
- 4 -
1.5 Controller
j
A
Fan motor
MOTOR connector
Connect to the MOTOR
connector on the main body
with the provided cable.
Power receptacle
Connect to the AC power supply
with the provided cable.
CASE terminal
Buzzer volume
djusts the sound level of the
buzzer.
Power switch
Turns on and off the power
of the main unit.
| : ON
○
: OFF
Status indicator LEDs
Indicate the status of the controller.
HEAD connector
Connect to the HEAD connector on
PME
the main body with the provided
cable.
ENCODER connector
MOTOR
HE AD E NC OD ER
Connect to the ENCODER connector on
the main body with the provided cable.
J/S connector
Connect to the connector on the
oystick unit with the provided cable.
ETHERNET connector
AC IN
CASE
J/S
BZ V
D C AMERA IEE E13 94
Not used in normal use.
CAMERA connector
Connect the CAMERA cable from
the main body to this connector.
BOOT ROM switch
This switch is used when writing
firmware.
RS-232CUS B( D)BootEthern et
USB connector
Connect to the USB connector on
the host PC with the provided cable.
RS232C connector
Not used in normal use.
IEEE1394 connector
Connect to the IEEE1394
connector on the host PC with
the provided cable.
- 5 -
1.6 Joystick Box
J/S connector
Connects to the J/S connector on the
controller with the provided cable.
STOP switch
Press this switch to stop all moving
components. To resume operation,
restart the system.
VMA-J S
STOP
S1 S2 S3
Joystick
Use the joystick to move the
workpiece in the X and Y directions
or to move the vertical mover in the
Z direction for focusing. The drive
speed changes according to the
tilting angle of the joystick and the
rotating angle of the knob.
Soft keys
Each soft key can be set with a
function from the host computer.
The soft keys can be set with the
following functions:
• Joystick slow drive mode
• Clamping of each axis
• Zoom factor
- 6 -
Chapter II. System Setup
WARNING
Moving the system creates a risk that the system may tip over and cause injuries. This
chapter describes the procedures for moving the system when there is no ridge or slope
on the path over which the system is to be moved and the main unit does not need to be
separated from the measurement stand.
If the system is to be moved to another location from its original installation site, follow the
procedures described below, provided that no ridge or slope lies along the path of
movement. Before moving the system, be sure to attach the retaining fixtures.
If there is a ridge or slope along the path over which the system is to be moved or if a
truck or similar transport equipment is to be used, contact your Nikon representative in
advance. Otherwise, Nikon shall not bear responsibility for any accidents or damage that
occur while the system is being moved.
2.1 Warnings
WARNING
1) The system may tip over if it is tilted to an angle of 15° or more. Be sure to keep the
system level while it is being moved.
2) Be sure to use the provided retaining fixtures to secure the stage and vertical mover
in place when moving or transporting the system.
3) If there is a ridge or slope on the path along which the system is to be moved,
separate the main unit from the measurement stand and place them in pallet boxes
to move them.
4) When the system is transported on a truck, the pallet boxes must be used.
5) Do not allow condensation to form on the system during transportation. Should
condensation form on the system, do not supply power until the system has air dried.
Never use a dryer or heater to dry the system; doing so may lead to equipment
malfunction or degrade system accuracy.
2.2 Required Tools
•
Phillips screwdriver
•
Hexagonal wrenches (3 mm, 4 mm)
•
Adjustable wrench
•
Level
•
Lifting bars provided with the system
- 7 -
2.3 Setup Procedures
1) Unpack the boxes.
Open the product boxes at a location as close to the system installation site as possible,
making sure that the area has no ridge and is not inclined. The boxes contain the main
unit, controller and accessories, measurement stand (when the special measurement
stand is used), host computer, etc.
2) Position the rubber vibration isolators.
Place the rubber vibration isolators (3 sheets) on the special measurement stand (or
working table to be used). Referring to the system layout, position a rubber vibration
isolator where each of the (3) adjustable legs of the main unit will be placed, and place
one supplied stainless steel plate on top of each rubber vibration isolator.
3) Place the main unit on the measurement stand.
Using the provided lifting bars, lift the main unit and place it onto the measurement stand
(working table). This task should be performed using a fork lift or by four or more persons.
In this step, adjust the positions of the rubber vibration isolators carefully so that the (3)
adjustable legs of the main unit are located exactly at the centers of the isolators.
After the main unit is positioned properly, detach the (4) lifting bars, and insert the
provided caps into the holes (installation of caps is not mandatory).
4) Move the system to the installation site.
Using the casters on the measurement stand, move the system to the installation site.
Push the measurement stand and move the system slowly. Do not push the main unit to
move the system.
5) Secure the measurement stand in place.
After the system has been moved to the installation site, turn the height adjustment nuts
on the adjustable legs of the measurement stand to set the measurement stand securely
on the floor. Make sure that all four casters are lifted off the floor.
Tighten the locking nuts on the adjustable legs after completing the procedure described
in step 8 (“Level the system”).
Locking nut
Height adjustment nut
Adjustable leg of the measurement stand
- 8 -
6) Detach the retaining fixtures from the stage (see the photo).
Using a hexagonal wrench (4 mm), remove the red retaining fixtures from the two
locations on the X axis and the location on the Y axis on the back side of the stage. Be
careful not to apply excessive force to the stage when removing the retaining fixtures.
Retaining
fixtures
7) Remove the retaining fixtures from the Z-axis vertical mover (see the photo).
Place an appropriate cover over the top surface of the stage so that it is not scratched or
otherwise damaged by any bolts or retaining fixtures that fall or are accidentally dropped.
Using a hexagonal wrench (3 mm), remove the red retaining fixture located on the
bottom section of the vertical mover. Be careful not to apply excessive force to the
vertical mover or surrounding areas when removing the retaining fixture.
Retaining
fixture
- 9 -
8) Level the system.
If there is a protective material (blue plate) on the top surface of the stage, remove it. If
the controller is to be set up on the shelf under the measurement stand, place the
controller in position at this time.
With the stage positioned near the center in both X and Y directions, place a level on the
stage glass and adjust the height adjustment nuts on the adjustable legs of the
measurement stand and main unit until the stage glass is level. Use the four adjustable
legs of the measurement stand for rough adjustment, and use the three adjustable legs
on the main unit for fine adjustment. After all adjustments have been completed, be sure
to tighten the locking nuts on all of the adjustable legs on the measurement stand and
the main unit.
In this process, make sure that all four adjustable legs of the measurement stand are in
secure contact with the floor and that the stand is stable.
Locking nut
Height adjustment nut
Adjustable leg of the main unit
9) Connect the cables between the main unit and controller.
Connect the cables between the main unit and the controller, referring to the illustration
on the following page.
* Note: Do not connect the USB cable or IEEE1394 cable to the host computer at this
time.
10) Connect the power cord.
Plug the power cord of the controller into a three-prong power outlet.
- 10 -
11) Operation check 1
After making sure that the above procedures have been completed properly, turn on the
power switch of the controller.
When the LED indicators for the soft keys on the joystick unit turn off, operate the
joystick and make sure that the stage and vertical mover respond appropriately.
* Note: If the stage and/or vertical mover move without the joystick being operated,
press the STOP switch immediately to turn off the power, unplug the power
cord, and contact your Nikon representative.
If the stage or vertical mover does not move when the joystick is operated, check the
following:
(1) Is the power cord plugged securely into the power outlet?
(2) Is the power supply capacity adequate?
(3) Are the cords (cables and power cord) connected to the controller properly?
(4) Is the power switch of the controller turned on?
If the system still does not operate correctly after confirming all of the above items, stop
using the system and contact your Nikon representative.
(Note that the Nikon representative may ask you to check the status indicator LEDs on
the rear panel of the controller.)
12) Connect the cables between the controller and host computer.
Turn off the power switch of the controller. Connect the USB cable and IEEE1394 cable
to the host computer, referring to the illustration on the following page.
* Note: Keep the power switch of the controller turned off until an instruction to turn on
the switch is given in the directions in the separate Startup Guide manual.
* Note: Descriptions of the connection and setup of the host computer and peripheral
devices (display, printer, etc.) are omitted in this manual. For the connection
and setup of those devices, follow the instructions in the manuals provided with
the respective products.
13) Install the iNEXIV software in the host computer.
Take out the floppy disk titled “Compensation Data Disk” which is provided with the
controller. Make sure that the label No. on the compensation data disk matches the serial
No. indicated on the front side of the stage of the main unit.
Install and set up the iNEXIV software and device driver according to the directions in the
separate Startup Guide manual.
* Note: During the installation process, you will be requested to insert the correction
data disk into the floppy disk drive.
(5) Have all of the retaining fixtures been removed?
- 11 -
t
VMA Main Body
HEAD
ENCO DER
MOTOR
CASE
MO TO R
To AC power supply
AC
VMA Controller
MOTOR
AC IN
CASE
HE AD E NC OD E R
BZ V
DCAMERA
IEEE1394
C
A
M
E
R
A
L
IN
K
PME
HEAD
EN CODER
J/S
J/S
RS -2 32CUSB(D)BootEthernet
IEEE1394
IEEE1394
USB
VMA -J S
STOP
S1 S2 S3
USB
Host PC
Joystick Uni
- 12 -
14) Operation check 2
After confirming that all the procedures described above have been completed properly,
start up the entire system and check system operation.
Operation using the joystick
•
Zoom magnification adjustment operation
•
On, off, and intensity adjustment of all lights
•
CNC operation (destination coordinates can be specified by double-clicking the
counter window.)
•
Edge detection, image auto focus operation
•
Operation of Laser Auto Focus (option)
•
Confirmation of error message of output window
If the system does not operate properly, check the following:
(1) Is the power cord plugged securely into the power outlet?
(2) Is the power supply capacity adequate?
(3) Is the power switch of the controller turned on?
(4) Are the cables connected properly?
(5) Are the cables for the host computer connected properly?
(6) Are all four adjustable legs of the measurement stand in firm contact with the floor
and is the stand stable?
(7) Is the main unit level?
(8) In the case the special measurement stand is not used, is the table used strong
enough?
(It is recommended that a table capable of withstanding weight of 1,000 kg or more
be used.)
(9) Are the floor strength and floor vibration parameters within the specified ranges?
(10) Are the special rubber vibration isolators used? Is each adjustable leg positioned
accurately at the center of a rubber vibration isolator?
If the system still does not operate correctly after confirming all of the above items, stop
using the system and contact your Nikon representative.
15) Calibrate the optical head.
Before conducting measurement, perform calibrations (1) through (3) described below. It
is recommended that these calibrations be performed regularly (about once a month).
* Note: Failure to calibrate the optical head will result in significant measurement errors.
(1) Magnification compensation
(2) Optical axis compensation
(3) Camera rotation compensation
- 13 -
Chapter III. Operation
Basically, this system is operated through the host computer. For details on making measurements,
refer to the instruction manual for the “VMA Automeasure.” This chapter explains how to turn the
system on and off, how to clean the system, and how to lubricate.
3.1 Turning the Power On and Off
Power ON:
Power OFF:
Turn on the power switch on the front of the controller.
Turn on the power switch on the host computer.
Close all of the applications that are currently running, including iNEXIV.
Shut down Windows, which will shut off the host computer.
Turn off the power switch on the front of the controller.
3.2 Cleaning
Use this system in as clean an environment as possible in order to prevent dust and grease
from accumulating on the system. In particular, clean the guide faces of the stage regularly to
make sure they remain clean at all times.
3.3 Lubricating the System
Supply Sukuwaral M-1 grease manufactured by Riken to the guide faces of the stage to clean
and lubricate the surfaces.
It is not necessary to lubricate the vertical-motion lead screw frequently. If it produces a
squeaking noise, however, apply an appropriate amount of Epnoc Grease AP0 manufactured
by Nippon Oil Corp. (ENEOS). Note that applying an excessive amount of grease may cause
the grease to spatter during operation. Using a small brush, apply a small amount of grease
at a time and operate the unit so that it moves up and down; repeat this process to spread
the grease evenly.
- 14 -
Chapter IV. Performance and Specifications
4.1 Style
•
Type: Single-column X-Y stage type
•
Dimensions (W × D × H)
Main body: 565 × 690 × 740 mm (in clamped condition)
Controller: 145 × 400 × 390 mm
Joystick box: 100 × 177 × 98 mm
Special measurement table: 650 × 700 × 600 mm
•
Mass
Main body (including head): 72 kg
Controller: 13 kg
Joystick unit: 1 kg
4.2 Digital Read Out
•
Measurement range: 255 × 205 × 155 mm (X × Y × Z)
•
Measurement method: Diascopic linear encoder
•
Minimum resolution: 0.1 µm
4.3 Motion Control
•
Drive method: All-axis DC servo motor
•
Maximum drive speed: X,Y: 100 mm/s
Z: 50 mm/s
•
Positioning accuracy: 1.0 µm (for X, Y, Z)
- 15 -
4.4 Sections
•
X-Y stage section
Effective stroke: 250 × 200 mm
Size of stage: 500 × 400 mm
Size of stage glass: 280 × 230 mm
Workpiece mass for which precision is guaranteed: 5 kg
Workpiece mass for load bearing capacity is guaranteed: 15 kg
Maximum permissible mass on stage glass: 15 kg
•
Z-axis motion section
Effective stroke: 200 mm
•
Optical zoom head section
Zoom factor: 10 ×
Magnification range: 0.35 to 3.5 ×
N.A.: 0.027 to 0.11
Zoom position: 0.35 / 0.6 / 1 / 1.8 / 3.5 ×
Viewfield on workpiece: 13.3 × 10 to 1.33 × 1 mm
W.D.: 73.5 mm (63 mm when Laser Auto Focus is used)
•
Illumination
Diascopic: White LED, diffused light
Vertical episcopic: White LED, telecentric
Ring: White LED, 8 segments, average incidence angle at 18°
•
Camera
Size: Type 1/3
Output signal: Camera Link
Effective pixels: 640 × 480
•
Laser Auto Focus (option)
System: Light spot deviation detection system
Laser class: Class 1 Laser product (IEC60825-1 1993/Amd.2:2001)
WD: 63 mm
(incidence angle = detection angle = 35°)
- 16 -
4.5 Measurement Accuracy
•
Total accuracy (X, Y axes)
When a traceable standard scale or a conforming evaporation pattern is placed on the
stage glass and is measured with a fixed zoom position, at the center of the viewfield (“L”
represents any measured length in mm)
Repeatability (when magnification is 3.5 ×): 1 µm (2σ)
Maximum permissible indication error for single-axis
measurement MPE
(when magnification is 3.5 ×): 2 + 8L/1000 µm
E1
Maximum permissible indication error for dual-axis
measurement MPE
•
Total accuracy (Z axis)
(when magnification is 3.5 ×): 3 + 8L/1000 µm
E2
Indication error for measurement using a laser scale
Maximum permissible indication error for single-axis
measurement MPE
: 3 + L/50µm
E1
4.6 Operating Conditions
•
Operating environment
Temperature: 10 °C to 35 °C
Humidity: 70% max.
Altitude: 2000 m max.
Pollution: Degree 2
Indoor use only
•
Environment in which accuracy is guaranteed
Temperature: 20 °C ± 0.5 K
•
Floor strength
Average load bearing capacity: Must be able to bear the mass on the total floor surface,
Collapsing load: Greater than the total mass of main body with parts and
•
Permissible floor vibration
Vibration frequency of 10 Hz or less: Amplitude of 3 µm
Vibration frequency of 10 to 1000 Hz: Vibration acceleration of 0.012 m/s
including the maximum mass of the system (main body
with parts and components assembled: 140 kg;
miscellaneous: 50 kg)
components assembled
max.
P-P
2
(1.2 gal) max.
- 17 -
4.7 Electrical Standards
•
Input ratings (controller)
Input supply voltage: 100 to 240 V AC (automatic switching)
Input supply voltage: 50/60 Hz
Current consumption: 5A to 2.5A
Supply voltage fluctuation: within ± 10%
•
Electric shock protection class: Class 1 (grounded connection type)
•
Installation category: Category 2
•
Power cord: Use only the power cord described below. Using the
wrong power cord could lead to fire or other dangerous
conditions.
Because this product belongs to electric shock
protection class 1, this product must be grounded.
In Japan:
Use only a PSE-marked detachable three-conductor
power cord set.
125 V AC, 7A minimum.
In a 100 V, 120 V region:
Use only a UL-certified detachable three-conductor
power cord set with a ground prong.
3-conductor grounding type SVT, No. 18 AWG, 3 m
long maximum, rated at 125 V AC minimum.
In a 220 V, 230 V, 240 V region:
Use only a EU/EN-certified three-conductor power
cord.
3-conductor grounding type H05VV-F, 3 m long
maximum, rated at 250 V AC minimum.
4.8 Applicable Electrical Safety Standards
•
In a 100 V, 120 V region:
This product meets FCC 15B Class A requirements.
This equipment has been tested and found to comply with the limits for a Class A digital
device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide
reasonable protection against harmful interference when the equipment is operated in a
commercial environment. This equipment generates, uses, and can radiate radio
frequency energy and, if not installed and used in accordance with the instruction manual,
may cause harmful interference to radio communications. Operation of this equipment in
a residential area is likely to cause harmful interference in which case the user will be
required to correct the interference at his own expense.
This class A digital apparatus meets all requirements of the Canadian InterferenceCausing Equipment Regulations.
Cet appareil numérique de la Class A respecte toutes les exigences du Règlement sur le
matériel brouilleur du Canada.
•
In a 220 V, 230 V, 240 V region:
This product satisfies the EU’s low voltage directive.
This product satisfies the EU’s EMC directive.
- 18 -
Symbol for separate collection applicable in European countries
En
This symbol indicates that this product is to be collected separately.
The following apply only to users in European countries.
• This product is designated for separate collection at an appropriate
collection point. Do not dispose of as household waste.
• For more information, contact the retailer or the local authorities in
charge of waste management.
Symbol for kildesortering i europeiske land
No
Dette symbolet indikerer at produktet skal kildesorteres.
De nedenstående punktene gjelder for alle europeiske brukere.
• Dette produktet skal kildesorteres og innleveres til dedikerte innsamlingspunkter. Må ikke kastes med normalt husholdningsavfall.
• For mer informasjon, ta kontakt med din forhandler eller lokale myndigheter.
Symbol für getrennte Wertstoff-/Schadstoffsammlung in europäischen Ländern
De
Symbole pour la collecte sélective applicable aux pays européens
Fr
Símbolo para recogida separada aplicable en países Europeos
Es
Symbol for special bortskaffelse af denne type produkter i de europæiske lande
Dk
Dieses Symbol zeigt an, dass dieses Produkt separat entsorgt werden
muss.
Folgendes gilt für Verbraucher in europäischen Ländern:
• Dieses Produkt darf nur separat an einer geeigneten Sammelstelle
entsorgt werden. Eine Entsorgung im Hausmüll ist unzulässig.
• Wenden Sie sich für nähere Informationen bitte an Ihren Händler oder
die örtlich für Abfallentsorgung zuständigen Behörden.
Ce symbole indique que ce produit doit être collecté séparément.
Les mesures suivantes concernent uniquement les utilisateurs européens.
• Ce produit doit être jeté séparément dans un point de collecte approprié. Ne jetez pas ce produit dans une poubelle réservée aux ordures
ménagères.
• Pour plus d’information, contactez le détaillant ou les autorités locales
responsables de la gestion des ordures.
Este símbolo indica que este producto se recogerá por separado.
Lo siguiente sólo se aplicará en países Europeos.
• Este producto ha sido designado para su recogida en un punto de almacenamiento apropiado. No lo tire como un deshecho doméstico.
• Para más información, contacte con el vendedor o autoridades locales
al cargo de la gestión de residuos.
Dette symbol angiver, at dette produkt skal bortskaffes specielt.
Det efterfølgende er kun til forbrugere i de europæiske lande.
• Dette produkt skal bortskaffes på fx en genbrugsplads el .lign. Det
må ikke smides væk som normalt husholdningsaffald.
• For yderligere information kontakt din forhandler eller de lokale
myndigheder, som fx teknisk forvaltning.
Symbol för separat upphämtning i euopeiska länder
Se
Erillisen keräyksen merkki Euroopan maissa
Fi
Символ сортировки мусора, использующийся в европейских странах
Ru
Σύμβολο για την ξεχωριστή αποκομιδή απορριμμάτων στις Ευρωπαϊκές χώρες
Gr
Den här symbolen anger att produkten måste hämtas separat.
Följande gäller bara användare i europeiska länder.
• Den här produkten är avsedd för separat upphämtning vid ett lämpligt
uppsamlingsställe. Produkten får inte kastas i hushållsavfall.
• För mer information, kontakta återförsäljaren eller de lokala myndigheter som ansvarar för avfallshantering.
Tämä merkki osoittaa, että tuote kerätään erikseen.
Seuraavat maininnat koskevat vain eurooppalaisia käyttäjiä.
• Tämä tuote kerätään erikseen asianmukaisista keräyspisteistä. Älä
hävitä tuotetta talousjätteiden mukana.
•
Lisätietoja saat jälleenmyyjältä tai paikallisilta jätehuoltoviranomaisilta.
Данный символ означает, что этот продукт должен
утилизироваться отдельно от других.
Приведенная ниже информация касается только пользователей
из стран Европы.
• Данный продукт должен утилизироваться отдельно от других в
соответствующих приемных пунктах. Не выбрасывайте данный
продукт вместе с бытовым мусором.
• Дополнительную информацию Вы можете получить у продавца
или у местных властей, отвечающих за утилизацию мусора.
Αυτ το σύμβολο υποδηλώνει τι η αποκομιδή αυτού του προϊντος
πρέπει να γίνει ξεχωριστά.
Τα κάτωθι απευθύνονται μνο σε Ευρωπαίους χρήστες.
• Αυτ το προϊν είναι σχεδιασμένο έτσι ώστε να γίνεται η
αποκομιδή του σε ειδικά σημεία. Μην το πετάτε μαζί με τα
υπλοιπα απορρίμματα.
• Για περισστερες πληροφορίες, επικοινωνήστε με τον διανομέα
του προϊντος ή με τις υπεύθυνες τοπικές αρχές για θέματα
διαχείρισης απορριμμάτων.
Symbool voor gescheiden inzameling zoals dat wordt gebruikt in Europese landen
Nl
Símbolo para recolha de resíduos em separado utilizado nos países Europeus
Pt
Simbolo per la raccolta differenziata applicabile nei paesi europei
It
Dit symbool betekent dat dit product apart moet worden ingezameld.
Het volgende is alleen van toepassing op gebruikers in Europa
• Dit product dient gescheiden ingezameld te worden op een daartoe
bestemd inzamelpunt. Niet wegwerpen bij het normale huisvuil.
• Neem voor meer informatie contact op met het verkooppunt, of met
de lokale instantie die verantwoordelijk is voor het verwerken van
afval.
Este símbolo indica que este produto é para ser recolhido separadamente.
Esta norma aplica-se só para os utilizadores nos países Europeus.
•
Este produto está designado para recolha de resíduos em separado num
recipiente apropriado. Não deitar no caixote do lixo doméstico.
• Para mais informações, contactar o revendedor ou as autoridades
locais responsáveis pela gestão dos resíduos.
Questo simbolo indica che il prodotto va smaltito separatamente.
La normativa che segue si applica soltanto agli utenti dei paesi europei.
• Il prodotto è designato per lo smaltimento separato negli appositi
punti di raccolta. Non gettare insieme ai rifi uti domestici.
• Per maggiori informazioni, consultare il rivenditore o gli enti locali
incaricati della gestione dei rifi uti.
This symbol is provided for use in the People’s Republic of China,
for environmental protection in the fi elds of electronic information
products.
䛙䛴䝢䞀䜳䛵䚮 ୯ᅗ䛴䛐ᐂᵕ䛱ྡྷ䛗䛥䜈䛴䛭䚮 㞹Ꮔሒ⿿ဗฦ㔕䛱
䛐䛗䜑⎌ሾಕ㆜䜘┘Ⓩ䛮䛝䛬䛊䜄䛟䚯
Symbol oznaczający segregowanie odpadów, stosowany w krajach Europy
Pl
Európai országokban érvénes “Elkülönített hulladékgyűjtés” jelzése
Hu
Symbol pro oddělený sběr odpadu platný v evropských zemích
Cz
Jp
䝬䞀䝱䝇䝕䛱䛐䛗䜑ᗣᲘ∸ืᅂ䛴䜻䝷䝠䝯䝢䞀䜳
Ten symbol oznacza, że produkt musi być wyrzucany oddzielnie.
Poniższe uwagi mają zastosowanie tylko dla użytkowników z Europy.
• Ten produkt jest przeznaczony do oddzielnej utylizacji i powinien być
dostarczony do odpowiedniego punktu zbierającego odpady. Nie
należy go wyrzucać z odpadami gospodarstwa domowego.
• Aby uzyskać więcej informacji, należy skontaktować się z
przedstawicielem przedsiębiorstwa lub lokalnymi władzami
odpowiedzialnymi za zarządzanie odpadami.
Ez a jelzés azt jelenti, hogy ezt a terméket elkülönítve kell gyűjteni.
Az alábbiak csak az európai országokban élő felhasználókra érvényes.
• Ezt a terméket a megfelelő hulladékgyűjtőhelyen, elkülönítve kell
gyűjteni. Ne dobja ki háztartási hulladékként.
• További információkért forduljon a forgalmazóhoz, vagy a helyi
hatóság hulladékgyűjtésért felelős részlegéhez.
Tento symbol znamená, že tento produkt se má odkládat odděleně.
Následující pokyny platí pro uživatele z evropských zemí.
• Tento produkt se má odkládat na místě sběru k tomuto účelu určeném.
Neodhazujte spolu s domácím odpadem.
• Více informací o způsobu zacházení s nebezpečným odpadem vám
podá příslušná místní instituce.
䛙䛴䜻䝷䝠䝯䝢䞀䜳䛵ᮇ⿿ဗ䛒ื䛱ᅂ䛛䜒䛰䛗䜒䛶䛰䜏䛰䛊䛙䛮䜘
♟䛝䛬䛊䜄䛟䚯
ḗ㡧䛵ᮇ⿿ဗ䜘䝬䞀䝱䝇䝕 䟺㻨㻸䟻 䛭⏕䛟䜑ሔྙ䛱䛴䜅㐲⏕䛛䜒䜄䛟䚯
•
㻃 ᮇ⿿ဗ䛵ᣞᏽ䛛䜒䛥㞗ሔᡜ䛭ื䛱ᅂ䛛䜒䜑䜎䛌䛱ᏽ䜇䜏䜒䛬
䛊䜄䛟䚯 ᐓᗖ䜸䝣䛮䛝䛬ᗣᲘ䛝䛰䛊䛭䛕䛦䛛䛊䚯
•
㻃 リ⣵䛱䛪䛊䛬䛵㈅⌦ᗉ䜄䛥䛵ᆀᇡ䛴ᗣᲘ∸ฌ⌦ᶭ㛭䛱䛚㏻⤙
䛕䛦䛛䛊䚯
社
所
所
〒100-8331 東京都千代田区丸ノ内 3-2-3（富士ビル）
インストルメンツカンパニー バイオサイエンス統括部 営業部
インストルメンツカンパニー 産業機器統括部 営業部
〒210-0005 川崎市川崎区東田町 8 番地（パレール三井ビル 14 階） 電話（044）223-2170（測定検査機器）
●日本国内の測定検査機器以外の製品については、㈱ニコンインステックにお問い合わせください。
本
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電話（044）223-2165（バイオ）／（044）223-2164（バイオ・カスタマーセンター）
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電話（092）611-1111（バイオ・産業）
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〒460-0002 名古屋市中区丸の内 3-20-17（中外東京海上ビル）
電話（052）954-0165（バイオ・産業）
NIKON CORPORATION
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331, Japan
Sales Dept., Bio Science Division, Instruments Company
Parale-Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku, Kawasaki, Kanagawa, 210-0005 Japan
Tel: +81-44-223-2167 Fax: +81-44-223-2182
Sales Dept., Industrial Instruments Division, Instruments Company
Parale-Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku, Kawasaki, Kanagawa, 210-0005 Japan
Tel: +81-44-223-2175 Fax: +81-44-223-2182
NIKON INSTRUMENTS INC.
1300 Walt Whitman Road, Melville, NY 11747-3064, U.S.A.
Tel: +1-631-547-8500 Fax: +1-631-547-0306
Semiconductor Inspection Technologies Division
1430 W. Auto Drive, Suite 101, Tempe, AZ 85284, U.S.A.
Tel: +1-480-403-4100 Fax: +1-480-403-4199
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Schipholweg 321, P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands
Tel: +31-20-44-96-222 Fax: +31-20-44-96-298
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