MTI Proforma 300i, Proforma 300GI, Proforma 300EMI User Manual

MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

Proforma™ 300i Series

Measurement for Semi Conducting, Semi Insulating, and Photo Voltaic Wafers

Users Manual

MTI Instruments Incorpor a t e d

325 Washington Avenue Extension, Albany, New York 12205 USA

█ Phone [phone] or 800-342-2203 (USA Only) █ Fax [phone]
█ Web www.mtiinstruments.com █ Email [e-mail]

This page was intentionally left blank

MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

Revision History

Rev 1.0 .............. Initial Release.

i

MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

WARRANTY

Seller warrants to the Purchaser that equipment to be delivered hereunder which is of Seller's own
manufacture will be free from defects in material or workmanship and will be of the kind and quality
designed or specif ied in the contract. An y parts of the equipm ent which have been purc hased by Seller
are warranted only to the extent of the original manufacturer's warranty.

This warranty shall apply only to defects ap pearing within 1 year from the date of s hipment by Seller. If
the equipment delivered hereunder does not meet the above warranty, and if the Purchaser promptly
notifies Seller, Seller shall thereupon correct any defect, including nonconformance with the
specifications, either, at its option, by repairing an y defective or damaged parts of the equipment, or by
making available at S el ler' s plant necessar y repa ired or replacement part s. N o al lo wance will be made for
repairs or alterations made by others without Seller's written consent or approval. Seller assumes no
responsibility for dam age caus ed b y improper ins tallati on or b y operation in violat ion of its rated opera ting
condition, intention al or otherwise, or b y improper handling or m aintenance. The liability of Seller under
this warranty (except as to titl e), or for an y loss or dam age to the equi pment, whether t he claim is bas ed
on contract or negligenc e, shall not in a ny case excee d the cos t of c orrec ting def ects in the equipm ent as
herein provided and upon the expirat ion of the warran ty period of all such a liability shall terminate. The
foregoing shall constitute the exclusive remedy of the purchaser and the exclusive liability of the Seller.

The foregoing warr ant y is ex clusive and in lieu of a ll warranti es, whether written, oral, im plied or statut ory
(except as to title). There are no warranties which extend beyond those expressly stated in this contract.

FCC NOTICES

This equipment generat es, uses, and c an rad iate radio frequenc y energy and, if not inst alled and us ed in
accordance with the manufac turer’s instructio n manual, m ay cause interference with radio and tele vision
reception. This equipm ent has been designed as a Cl ass A digital device of the FCC rules. These limits
are designed to provide reas onable protection against harmful inter ference in a commercial installation .
However, there is no guara ntee that interference will n ot occ ur in a part ic ular i nst a llatio n. If t his equ ipment
does cause harmful int erference, which c an be determ ined by turning the equi pment off and on, you are
encouraged to try to correct the interference by one or more of the following measures:

• Relocate the instrument with respect to the other device.

• Plug the instrument into a differ ent outlet so that the instrum ent and the other device are o n different

branch circuits.

If necessary, consult a representative of MTI Instruments. You may find the following booklet helpful: FCC
Interference Handbook, 1986, available from the U.S. Government Printing Office, Washington, D.C.
20402, Stock No. 004-000-00450-7.

Information in this manual is subject to change without notice.

© 2013 MTI Instruments

ii

MTI Instruments Technical Manual 7001-0005

T3.15A, 250V
100-240V, 50/60Hz, 50W

PROFORMA 300i SERIES
NON CONTACT THICKNESS MEASUREMENT SYSTEM
MTI Instruments Inc.
325 Washington Ave Ext
Albany NY 12065, USA

Shipping

Shipping Shipping

SHOCK HAZARD: AC MAINS AREA

SHOCK HAZARD: DO NOT INSERT FOREIGN OBJECTS

Electrical Shock/Electrocution Hazard.

DISCLAIMER: EU LANGUAGE REQUIREMENTS

manual is written in an official language of the Member State. Contact MTI
Instruments for the availability of translated manuals.

WARNING: ELECTRICAL SHOCK/ELECTR OCUTION HAZARD
This equipment is connected to AC mains power. There are no user
serviceable parts within the controller box. Do not attempt to open the
controller box or insert foreign objects into the box vent openings.

DISCLAIMER: USE OTHER THAN INTENDED PURPOSE

Revision 1.0 November 5, 2013

SAFETY WARNINGS

Warning Symbol Definitions

DISCLAIMERS

Language Requirements

This is the Original Instructions version of the User Manual. It is illegal to
operate this equipment in a European Union (EU) Member State unless the

Use Requirements

Using this product in a manner or a purpose other than the manne r or purpose
specified by the manufacturer may impair the safety features of this product.

Electrical Shock Hazard Areas

iii

MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

TABLE OF CONTENTS

WARRANTY .................................................................................................................................................. ii

FCC NOTICES .............................................................................................................................................. ii

SAFETY WARNINGS ................................................................................................................................... iii

Warning Symbol Definitions ...................................................................................................................... iii

DISCLAIMERS .............................................................................................................................................. iii

TABLE OF CONTENTS ............................................................................................................................... iv

LIST OF FIGURES ........................................................................................................................................ v

1 INTRODUCTION ................................................................................................................................... 1

1.1 Proforma™ 300i Series System Description .................................................................................. 1

1.2 Proforma™ 300i Series Specif icatio ns ........................................................................................... 1

1.3 Receiving Inspection Procedure ..................................................................................................... 1

2 INSTALLATION INSTRUCTIONS ......................................................................................................... 3

2.1 Handling .......................................................................................................................................... 3

2.2 Environmental Considerations ........................................................................................................ 3

2.3 System Setup ................................................................................................................................. 4

2.3.1 Proforma™ 300i and Proforma™ 300Gi Setup ....................................................................... 4

2.3.4 Proforma™ 300OEMi Controller Setup ................................................................................... 6

2.3.5 Proforma™ 300OEMi Initial Probe Setup ............................................................................... 7

2.3.6 Electrical Connections ............................................................................................................. 8

2.3.7 Power Up ................................................................................................................................. 8

3 OPERATIONAL INSTRUCTIONS ......................................................................................................... 9

3.1 Proforma™ 300i and Proforma™ 300Gi ........................................................................................ 9

3.1.1 Menu Structure Proforma™ 300i........................................................................................... 10

3.1.2 Menu Structure Proforma™ 300Gi ........................................................................................ 11

3.1.3 Keypad Functions .................................................................................................................. 12

3.1.3.2 Units ................................................................................................................................... 12

3.1.3.3 Zero .................................................................................................................................... 12

3.1.3.4 Menu .................................................................................................................................. 12

3.1.3.5 Back () ............................................................................................................................ 12

3.1.3.6 Left (), Right (), Up (), Down () Arrows .................................................................. 12

3.1.3.7 Select () ........................................................................................................................... 12

3.1.4 Menu Items ............................................................................................................................ 12

3.1.4.1 Mode .................................................................................................................................. 12

3.1.4.1.1 Continuous ......................................................................................................................... 12

3.1.4.1.2 5 Point ................................................................................................................................ 12

3.1.4.1.3 Bow .................................................................................................................................... 12

3.1.4.2 Calibrate ............................................................................................................................. 13

3.1.4.3 Limits .................................................................................................................................. 13

3.1.4.4 Rounding ............................................................................................................................ 13

3.1.4.5 Setup .................................................................................................................................. 13

3.1.4.5.2 Ethernet ............................................................................................................................. 13

3.1.4.5.3 Export ................................................................................................................................. 13

3.1.4.5.4 Export to ............................................................................................................................. 13

3.1.4.5.5 Lamps (Profoma™ 300Gi only) ......................................................................................... 13

3.1.4.5.6 Raw Volts ........................................................................................................................... 14

3.1.4.5.7 Resolution .......................................................................................................................... 14

3.1.4.5.8 RS-232 ............................................................................................................................... 14

3.1.4.5.9 Factory ............................................................................................................................... 14

3.1.4.5.10 Update ............................................................................................................................ 14

3.1.4.5.11 Version ........................................................................................................................... 14

3.1.5 Calibration Procedure ............................................................................................................ 15

3.1.6 Operational Modes ................................................................................................................ 16

3.1.6.1 Continuous ......................................................................................................................... 16

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

3.1.6.2 5-Point Mode...................................................................................................................... 17

3.1.6.3 Bow Mode .......................................................................................................................... 18

3.1.7 Functions ............................................................................................................................... 19

3.1.7.1 Zero .................................................................................................................................... 19

3.1.7.2 Keyboard Lock ................................................................................................................... 19

3.1.8 Adjusting the Top Probe ........................................................................................................ 20

3.2 Proforma™ 300OEMi ................................................................................................................... 21

3.2.1 Setting the final probe gap on the Proforma™ 300OEMi. ..................................................... 21

4 MAINTENANCE ................................................................................................................................... 22

4.1 Cleaning ........................................................................................................................................ 22

4.1.1 Product Surfaces. .................................................................................................................. 22

4.1.2 Probes ................................................................................................................................... 22

Do not use water to clean the probe surfaces. If the probe surfaces become contaminated,

isopropyl alcohol with a lint free cloth may be used. ........................................................................... 22

4.1.3 Display ................................................................................................................................... 22

4.2 Probe/Amplifier Calibration ........................................................................................................... 22

LIST OF FIGURES

Figure 1:Rear Panel ...................................................................................................................................... 4

Figure 2:Table Features ................................................................................................................................ 5

Figure 3: Drill Diagram for Proforma™ 300OEMi ......................................................................................... 6

Figure 4:OEM Probe Dimensions ................................................................................................................. 7

Figure 5:Proforma™ 300i and 300Gi Front Panel Keyboard ........................................................................ 9

Figure 6:Proforma™ 300i and 300Gi Display ............................................................................................... 9

Figure 7:Proforma™ 300i Menu Structure .................................................................................................. 10

Figure 8:Proforma™ 300Gi Menu Structure ............................................................................................... 11

Figure 9:Profoma™ 300i and 300Gi Display in Menu Mode ...................................................................... 12

Figure 10:Adjusting the Top Probe ............................................................................................................. 20

Figure 11:Proform a™ 300i Data Logger Pr ogram ...................................................................................... 21

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MTI Instruments Technical Manual 7001-0005

CAUTION

CAUTION

Revision 1.0 November 5, 2013

1 INTRODUCTION

1.1 Proforma™ 300i Series System Description

Proforma 300i utili zes MTI’s Push-Pul l Capacitance technol ogy to accuratel y and reliably measure Semi
Conducting, Semi Insulating, and Photovoltaic Wafers up to 300mm.

The Proforma™ Series products are sensitive to Electrostatic Discharge (ESD). Use proper ESD
techniques when handling this product.

Do not move the Proforma™ 300i or Proforma™ 300Gi by grasping the display housing or the upper
probe arm.

1.2 Proforma™ 300i Series Specifications

2

Accuracy
Repeatability

: ±0.25um ±0.25um ±0.25um

3

: ±0.25um ±0.25um ±0.25um
Resolution: 0.05um 0.05um 0.05um
Response Time: 60ms 60ms Custom
Supported Wafer Sizes: 50-300mm 50-300mm Custom
Wafer Thickness Range: 100-1000um 100-1000um Custom
Known Supported Materials
Weight: 12.3kg 12.4kg 5.9kg
Dimensions (LxWxH): 482x330x279mm 482x330x279mm 483x388x89mm
Temperature (Operational): 15-40ºC 15-40ºC 15-40ºC
Electrical Input (Voltage): 100-240VAC 100-240VAC 100-240VAC
Electrical Input (Frequency): 50-60Hz 50-60Hz 50-60Hz
Electrical Input (Power): 50Watts 50Watts 50Watts
Data Interfaces: LCD, RS232, LCD, RS232, RS232, Ethernet

1.3 Receiving Inspection Procedure

The Proforma™ 300i series products are shipped from MTII fully assembled and packed in a cardboard
carton with foam supports to guard against shipping damage. If a heavy duty shipping case was ordered,
the product will be in the heavy duty shipping case and the heavy duty shipping case will be packed in a
cardboard carton. Upon receipt, perform the following procedure before using the unit to perform
dimensional measurements:

300i 300Gi 300OEMi1

4

: Si, Ge, InP Si, Ge, GaAs, InP Si, Ge, InP

Ethernet, USB Ether net, US B

1) Inspect the exterior of the shipping carton. Note any obvious damage. If shipping damage is
evident, file a claim with the carrier.

2) Remove the product from the carton and inspect for damage. Do not lift the instrument by
grasping the LCD display or upper probe arm assembly.

3) If any problems were found contact MTII at 1-518-218-2550.

1

The OEM model consists of the acquisition system and probes only. As such, several parameters will
be dependant on the custom installation parameters. Contact MTI Instruments to discuss custom
applications and expected performance in these applications.

2

At constant 22ºC.

3

Within limits of repositioning.

4

The ability to measure can vary dependant on several factors (such as bulk resistivity).

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

Return Shipment Procedure

Contact MTI Instruments, Inc. at 1-518-218-2550 to receive return authorization prior to shipping the
instrument. Referenc e the instrument's name, model and serial num bers on all correspondence. Be sur e
to include a brief description of the reason for the return. Place the instrument in the original shipping
carton (if available) and forward prepaid to:
MTI Instruments, Inc.
Supervisor of Manufacturing
325 Washington Aven ue E xtens ion
Albany, NY 12205-5505
Mark "RMA" and the R MA number (if a number is issued) on the outside of the b o x . If the or ig inal pac king
materials are not available:

1) Replace the 3 rear panel s hipping screws. The suggested loc ation that these shou ld have been
stored in is the attached plastic bag that is used for the alignment pins. If they have been lost, the
correct type screw is 4-40x1/4” flat head.

2) Wrap the instrument in plastic or heavy paper.

3) Place packing material around all sides of the instrument and pack it in a cardboard carton.

4) Place instrument on a suitable carrier, such as a pallet.

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

2 INSTALLATION INS TRUCTIONS

2.1 Handling

Always grip and move the Proforma™ 300 i and Proform a™ 300Gi by grippin g the lower side p anels and
bottom of the product. The Prof orma™ 300i and Proform a™ 300Gi have an upp er probe arm which also
supports the display assembly. Do not move or lift the pr od uc t by the probe arm or the display. Doi ng so
may create a permanent misalignment which will result in a loss of accuracy.

2.2 Environmental Considerations

The performance of the Proforma™ Series products can be affected by temperature variations. For
maximum performance, the Proforma™ Series products should be installed in a location where
temperature variations are controlled to ±1ºC. The unit should not be placed directly in the path of
moving air that resu lts from heating an d cooling duct work/vents. A tool used in environments where the
temperature changes ±5ºC should be calibrated frequently.

Some materials, such as GaAs, have conductivity changes as a result of exposure to infrared light
(>700nm). When the Proform a™ 300Gi is to b e used to m easure mat erials that ar e sensitive to infrared
light, the unit should be plac ed away from light sour ces that produce s uch light. Sources of infrared light
include the sun (through glass), halogen lighting, certain LED diodes, and incandescent lamps.
Generally, fluorescent lighting is not a significant source of infrared light.

3

MTI Instruments Technical Manual 7001-0005

T3.15A, 250V
100-

240V

,

50/

60Hz

,

50W

Shipping

Shipping Shipping

PROFORMA

300

i SERIES
NON CONTACT THICKNESS MEASUREMENT SYSTEM
MTI Instruments Inc.
325

Washington Ave Ext

Albany NY

12065, USA

Revision 1.0 November 5, 2013

2.3 System Setup

2.3.1 Proforma™ 300i and Proforma™ 300Gi Setup

The Proforma™ 300i and Proform a™ 300Gi should be placed on a sturdy and rigid s urface that
is approximately level. T he surface should not vibrate or shake. Us ing the bubble level on the
top plate as a reference, adjust the 2 front leveling feet so that the table top is level.

Using a Phillips #1 screwdriver , rem ove the 3 shipping screws attached at the rea r of the unit and
place them in the plastic bag that contains the alignment pins.

Figure 1:Rear Panel

4

MTI Instruments Technical Manual 7001-0005

76mm

100

mm

125

mm

150

mm

200

mm

300mm

Alignment Pin

Locations

:

Pin Storage

Bubble
Level

Revision 1.0 November 5, 2013

2.3.2 Proforma™ 300i and Proforma™ 300Gi Tabletop

2.3.3 The Proforma™ 300i and Proform a™ 300G i are des k top units with an integrated table. The table
is specially ground flat and is constr ucted of ano dized aluminum . Integrated into the table are a
bubble level that aids in leveling the produc t. In addition, holes ha ve been drilled in the table to
accommodate the supp lied alignment p ins. When placed i n their proper hol es, these alignm ent
pins will center a round wafer between the probes. When not in use, the pins can be stored in the
holes located on the right rear of the table.

Figure 2:Table Features

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MTI Instruments Technical Manual 7001-0005

388.62 (15.3)

482.6 (19.0)

57.15 (2.25)

368.3 (14.5)

6.35 (0.25) 6.35 (0.25)

M6 (¼) x4

mm(inches)

Revision 1.0 November 5, 2013

2.3.4 Proforma™ 300OEMi Controller Setup

The Proforma™ OEMi control unit should be mounted to a sturdy, vibration free location. The
suggested orientatio n is to hav e th e mounting flange at the b ottom of the unit. The un it shou ld b e
placed such that th e mounted probe wires can easily reach the controller unit. Care should be
taken to guarantee air flow around the unit. Be advised that the unit generates heat and that
mounting the unit inside an enc losur e could resul t in a build up of heat which wil l adver sel y affect
results.

Figure 3: Drill Diagram for Proforma™ 300OEMi

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MTI Instruments Technical Manual 7001-0005

14.86±0.03mm

33.78

±0.

3mm

Minimum Bend Radius = 18mm

Revision 1.0 November 5, 2013

2.3.5 Proforma™ 300OEMi Initial Probe Setup

MTI recommends a dedicated probe holder which is machined from a material that has a low
coefficient of therm al expansion (such as Invar). MTI also recommends us ing the split cylinder
approach to clamping the probes. The standard “D” style push-pull probe used with the
Proforma™ 300OEMi has a diam eter of 14.86±.0.03 (0.585±0.001”) and a length of 33.78±0.3
(1.33±0.01”). The end user m ust also account for the two exiting cables from the probe which
have a minimum bend radius of 18mm (0.7”). The probe holders should guarantee that the
probes can be position ed diametrically opposed to each oth er. Mount the probes in the probe
holder such that the witn ess line on the first probe is aligned to the witness mark on the second
probe.

Figure 4:OEM Probe Dimensions

As an initial setting, m ount the probes so that the y are approximately at the max imum standoff
distance from the m easured surface. Note that t he initial probe adjus tment will be finali zed with
the system running. Route the probe wires s uch that they do not com e in contact with, nor run
parallel to any other electrical wires or field sources.

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MTI Instruments Technical Manual 7001-0005
Revision 1.0 November 5, 2013

2.3.6 Electrical Connections

2.3.6.1 AC Mains Connections

The Proforma™ Series pr oducts require mains input v oltage of 100 to 240VAC, 50 to 60 Hz.
The power inlet receptacle is a standard IEC 320 C14 connector. Included in the box with the
Proforma™ Series of products is a power cord that has an IEC 320 C13 connector at one
end and a connector that i s consistent with the local power requirem ents of the initial ship
destination of the product.

2.3.6.2 Serial Port (RS232) Connection

The rear panel has a standard DB9 m ale serial port connector (RS232). The Proforma™
Series products operate as DTE (Data Terminal Equipment) devices. As a result, when
connecting to another d evice such as a PC, a s erial cros sover cable is requ ired. Included in
the box with the Profor ma™ Series products is a s eri al n ul l modem crossover. T he baud rate
and the mode configuration is addressed in the software support manual.

2.3.6.3 Ethernet Connection

The Proforma™ Series pr oducts c an be directl y connected to a Loc al Area Net work (LAN) or
to local PC via an Ethernet connection. The rear panel has a stan dard RJ45 Ethernet port.
The product software sup ports both D HCP (Autom atic IP as signment) or a Static connec tion.
When connecting to a LAN, a standard Cat 5 or better cable is recommended. When
connecting directl y to a PC, the Cat 5 c able m us t be a crossover ( null) t ype cable. T he direct
PC connection will be configured statically. Configuring for an Ethernet connection is
addressed in the software support manual.

2.3.6.4 VGA Port

The rear panel VGA port is provided for diagnostic and factory purposes only. Do not
connect a monitor to this product unless instructed to do so by MTI personnel or their
representatives.

2.3.6.5 USB Port (Proforma™ 300i and Proforma™ 300Gi)

The Proforma™ 300i and the Prof orma™ 300Gi have a single USB port located on the f ront
panel. This port is used with a standard USB f lash drive to provide a c onvenient method to
transport measurement data and export the on board manual. This port is also used to
import Firmware upgrades.

2.3.6.6 Probe Input Connectors (Proforma™ 300OEMi)

The front panel of the Proforma™ 300OEMi has 4 BNC connectors which connect to the
probes. Each one of the probe branc hes will be l abeled (1A,1 B for the top prob e and 2A,2B
for the bottom probe). Sim ply match up the prob e branches wit h the label on th e front panel
and make the connect ion. Note that f ailing to con nect the branc hes to the cor rect inputs wil l
cause poor performance.

2.3.6.7 Ground Lug (Proforma™ 300OEMi)

The front panel of the Proforma™ 300OEMi has a s ingle ground lug. Connect this to the
probe holder frame using 7/0.2, 30/0. 1 (24AWG) or larger wir e. The tota l resis tanc e between
the probe holder frame to this ground lug must be less than 0.5Ω. When making the
resistance measurem ent, the use of a 4 point probe or other means to compensate for the
resistance probe cables is recommended.

2.3.7 Power Up

Double check all electrica l connections. Once the connecti on check is complete, use the s witch
on the rear panel to tur n the unit on. Typically, the unit will require 30minutes to warm up to
operating temperature. If the unit was s tored in an area wher e the space temper ature change is
significantly different, it may take more than 30 minutes for the mass of the unit to thermally
acclimate to the new envir onment. In order to maintain its constant operating temperature, the
unit should remain powered at all times.

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MTI Instruments Technical Manual 7001-0005

MODE

:Cont.

626.3um

CAL:383.1

Revision 1.0 November 5, 2013

3 OPERATIONAL INSTRUCTI O NS

3.1 Proforma™ 300i and Prof o rma™ 300Gi

For the Proforma™ 300 i and the Proforma™ 300Gi, all oper ating parameters are available through the
front panel display and interface. T he Menu is access ed by pressing th e Menu button on t he front panel
keyboard.

Figure 5:Proforma™ 300i and 300Gi Front Panel Keyboard

Figure 6:Proforma™ 300i and 300Gi Display

9

MTI Instruments Technical Manual 7001-0005

Mode

Calibrate

Limits

Rounding

Setup

Continuous

5-Point

Bow

Cal STD

Hi Limit

Lo Limit

On
Off

Contrast

Ethernet

Export

Export to

Raw Volts

Resolution

RS-232

Factory

Update

Version

More
Less

Enter Value

Enter Value

Enter Value

Show Address

Set Address

DHCP

Manual

Tables

CFG Files

Boot Log

On
Off

USB Disk

RS-232

On
Off

Up

Down

Baud

Format

300
1200
2400
4800
9600

19200
38400
57600

115200

N,8,1
E

,8,1

O,8

,1
E,7,1
O,7

,1
Reset

Defaults

No

Yes

Firmware

Manual

Tables

Web Files

On
Off

IP Address

Mask

Gateway

Enter Value
Enter Value
Enter Value

Revision 1.0 November 5, 2013

3.1.1 Menu Structure Proforma™ 300i

Figure 7:Proforma™ 300i Menu Structure

10

MTI Instruments Technical Manual 7001-0005

Mode

Calibrate

Limits

Rounding

Setup

Continuous

5-Point

Bow

Cal STD

Hi Limit

Lo Limit

On
Off

Contrast

Ethernet

Export

Export to

Raw Volts

Lamps

Resolution

RS-232

Factory

Update

Version

More
Less

Enter Value

Enter Value

Enter Value

Show Address

Set Address

DHCP

Manual

Tables

CFG Files

Boot Log

On
Off

USB Disk

RS-232

On
Off

Always Off

Auto

Always On

Up

Down

Baud

Format

300
1200
2400
4800
9600

19200
38400
57600

115200

N,8,1
E,8,1
O,8,1
E,7,1
O,7,1

Reset

Defaults

No

Yes

Firmware

Manual

Tables

Web Files

On
Off

IP Address

Mask

Gateway

Enter Value
Enter Value
Enter Value

Revision 1.0 November 5, 2013

3.1.2 Menu Structure Proforma™ 300Gi

Figure 8:Proforma™ 300Gi Menu Structure

11

MTI Instruments Technical Manual 7001-0005

Main Menu
Mode

Calibrate
Limits
Roundin
Setu

g

p

MODE:Cont.

626

.3

CAL:383.1

Revision 1.0 November 5, 2013

Figure 9:Profoma™ 300i and 300Gi Display in Menu Mode

3.1.3 Keypad Functions

3.1.3.1 Save

When this button is pressed, data is saved to the location specif ied in the SetupExport to
Menu.

3.1.3.2 Units

Default: µm

This button toggles between µm (microns or micrometers) or mils (thous andths of an inch).
When the display values are changed, all other setting values are converted as well.

3.1.3.3 Zero

Default: Zero Off

When this is selec ted, the current m easured value is subtracted f rom all subsequent values.
This is also known as a Tare function.

3.1.3.4 Menu

This button opens up the top level menu.

3.1.3.5 Back ()
This button will navigate back one level on the menu tree.

3.1.3.6 Left (), Right (), Up (), Down () Arrows

These buttons are for navigati on on the menu tree. They are a lso used to enter va lues, with
the left and right arrows navigating significance and the up and down arrows toggling values.

3.1.3.7 Select ()
Use this key to select or confirm an entry.

3.1.4 Menu Items

3.1.4.1 Mode

Default: Continuous

3.1.4.1.1 Continuous

Measurements are tak en continuously and disp layed on the s creen. This mode is often us ed
to scan for surface irregularities. It is also used in conjunction with the alignment pins to
provide accurate measurements of the center of a wafer.

3.1.4.1.2 5 Point

5 point is commonly used to take a measurement at the center of the wafer (using the
alignment pins) and 4 other points on the ed ge of the wafer located at 90º f rom each other. 5
point will toggle to the nex t r eading wh en the  is pressed. At the en d of the 5 po int reading,
pressing the  will cause the statistics for the readings to be displayed (AVeraGe,
MAXimum, MINimum, TotalThicknessVariation, standardDEViation). Pressing the  key
anywhere during the 5 point operation will return the Proforma™ back to the start of the 5
point measurement process.

3.1.4.1.3 Bow

The Proforma™ 300i and the Proform a™ 300Gi products are capable of m easuring wafer
bow in compliance with AS TM Specific ation F534 Sta ndard Metho d for Bow of Silicon Slices .
Bow measurements require the use of a 3 point waf er fixture (bow ring), which is available
from MTI Instruments.

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MTI Instruments Technical Manual 7001-0005
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3.1.4.2 Calibrate

Default STD: +500.000µm

This adjustment cor rects for certain environmental fa ctors which may affect accurac y. It is
suggested that the unit be calibrated no less than onc e daily using a known NIST traceable
(or other known standard wafer). NIST traceable calibration standards are available from
MTI Instruments. As shown in figur e x, the displacem ent for the top an d bottom probes will
be added to the k nown thick ness of the wafer to calcu late and stor e a new probe gap value.
Details of performing a calibration are located in section 3.1.5.

3.1.4.3 Limits

Default Hi: +999.999
Default Lo: -999.999

High and Low limits can be set. If the wafer thicknes s is above the hig h limit, a warning will
be displayed. If the wafer thickness is below the low limit, a warning will be displayed.
While operating with the ZERO function set, it is possible to get negative thicknesses.
Therefore, the limits are signed values.
Note that if the diagnostic screen “RawVolts” is set “ON”, the warning will not be displayed.

3.1.4.4 Rounding

Default: On

By default, the Prof orma™ series products wil l round the least significant d igit to the left of
the decimal place to the nearest 0 or 5. Turning R ounding off displays the l east significant
digit in its raw form.

3.1.4.5 Setup

3.1.4.5.1 Contrast

The Proforma™ Series pr oduct display has been fac tory set to a contr ast value to s atisfy
most applications. In some ambient lighting conditions, the contrast may need to be
adjusted for maximum viewability.

3.1.4.5.2 Ethernet

Default DHCP: Off
Default IP Address: 192.168.168.252
Default Subnet Mask: 255.255.255.000
Default Gateway: 000.000.000.000
Default Show Address: Off

The Proforma™ Series products support connection to the Ethernet. By default, this
address is staticall y assign ed. The s tatic ad dress , subnet m ask , and gate wa y can be set
thru the user interface. Alternatively, the unit can automatically fetch its network
parameters from a network that s upports DHC P. The user can deter m ine the I P addres s
by turning on the “Show Address” option.

Normally, the Proforma™ 300i will connect to an external laptop or PC through an
Ethernet network. It is pos sible to create a direct connec tion to a laptop or PC without
using a network , but the user will need to pro vide an Ethernet c rossover (nu ll) cable and
manually configure a static network connection on the PC.

3.1.4.5.3 Export

The Proforma™ series products store several files on internal, non-volatile memory.
These include the user manua l, calibration tables, configuration files, and the boot log.
These files can be helpful in diagnosing prob lems on the system . The export location is
defined by the “Export to” s etting. Note that some files may not be export able thru the
RS-232 interface.

3.1.4.5.4 Export to

Default: USB Disk

The Export to setting defines where files are written to during an export or save
operation. For most applications, the best location to save files is the USB Disk.

3.1.4.5.5 Lamps (Profoma™ 300Gi only)

Default: Auto

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The Proforma™ 300Gi can be used to measure wafers that do not require infrared
excitation (such as Silicon). When measuring wafers that do not require infrared
excitation, it is advantage ous to turn off the lam ps. Turning off the lamps when they are
not needed will increase the expected lifespan of the lamps. Note that the lamps
generate a large amount of heat and that turning the lamps on or off may initially aff ect
the accuracy of the read ing. To guarantee the hi ghest possible accur acy, it is advisable
to allow the system to acclimate of ½ hour after the lamp state has changed and to
perform a recalibration after acclimation.

3.1.4.5.6 Raw Volts

Default: Off

Raw Volts is provided as a dia gnostic mode. The raw voltage signal does not have a
linearization table applied and therefore is not proportionally accurate to displacement.
The most common occ asion that this setting will be used is when setting the position of
the top probe.

3.1.4.5.7 Resolution

Default:5 Significant Digits

Resolution sets the maximum number of digits that will be displayed on screen.

3.1.4.5.8 RS-232

Default Baud Rate: 57600
Default Format: N,8,1

The Proforma™ Series products support an RS-232 connection to a host computer.
Note that the Proforma™ Series products are DTE terminals and will require a null
modem connection to att ach to a host computer. T he RS-232 menu allows the user to
both check and set the RS-232 Baud Rate and Format.

3.1.4.5.9 Factory

The Factory setting a llows a user reset to th e factory default settings. All user settings
will be reset, including m ode, calibration standard, lim its, contrast, IP address, Ethernet
Mode, Export to location, Lamp operation (Proform™ 300Gi only), Raw Volts display,
Resolution Settings , RS-232 Settings, and Version Dis play. 2 levels of confirmation are
needed to perform a reset to factory defau lt. Once res et to factory defau lt has occ urred,
the user will be instructe d to reset the unit so that the values can be applied. A ny user
settings will be unrecoverable.

3.1.4.5.10 Update

Via the front panel USB p ort, the Proform a™ Series products suppor t field reflash of the
internal Firmware, updating the internally stored manual, restoring the factory linear
tables, or updating the web server files. After the file t ransfer has occurred, the u ser will
be instructed to res et the unit so that the updated f iles can be applied. Once the f iles
have been loaded into the system, the previous version of the files cannot be recovered.

3.1.4.5.11 Version

Activating the version function will place the firmware version number on the screen.

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MTI Instruments Technical Manual 7001-0005

MODE:Cont. CAL:500.0

um

MODE

:

Cont

.

CAL

:

500.

0

Main Menu

Mode

Calibrate

Limits
Roundin
Setu

g

p

Revision 1.0 November 5, 2013

3.1.5 Calibration Procedure

3.1.5.1 If the system is not in Continuous Mo de, press the MENU button on the front
keypad and select Mode. Press the

 key.

the

 key. Select Continuous and press

3.1.5.2 Press the MENU button on the f ront keyboard and select Calibrate. Press

 key.

the

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MTI Instruments Technical Manual 7001-0005

MODE:Cont. CAL:500.0

Calibrate
Cal STD

MODE:Cont. CAL:500.0

Cal STD

+702.202

MODE:Cont. CAL:702.2

702.2um

MODE:Cont. CAL:500.0

um

Revision 1.0 November 5, 2013

3.1.5.3 The Cal STD selection will be highlighted. Press the  key.

3.1.5.4 Using the arrow ke ys, enter the thick ness of the cal st andard. Note that the
previous value is located at the top center of the screen whereas the new
value is the editable number on the right side of the screen.

3.1.5.5 Place the cal standard bet ween the pr obes . The pos itioning pi ns whic h were
supplied with the Proforma™ 300i and Proforma™ 300Gi may be used to
accurately center a standard size wafer. Press the
moments, the system will calibrate to the known standard.

3.1.6 Operational Modes

3.1.6.1 Continuous

While in Continuous Mode, the measurements and the display are
continuously being updated. For maximum accuracy, thickness readings
should be taken with the wafer steady and hands not contacting the wafer.
To enter Continuous Mode:

3.1.6.1.1 Press the MENU button on the front panel keypad..

3.1.6.1.2 Select Mode and press the  key.

3.1.6.1.3 Select Continuous and press the  key. The screen will display
MODE:Cont. in the upper left hand corner.

 key. After a few

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MTI Instruments Technical Manual 7001-0005

MODE:5-Point CAL:500.0

um

SELECT To Measure Point #1

MODE:5-Point CAL:500.0

um

SELECT To Measure Point #2

505.2

505.2

MODE:5-

Point CAL:500.0

um

SELECT To View Statistics

505.2

505.7

505.7505.8

504.9

505

.1

MODE:5-Point CAL:500.0

um

SELECT To Measure Point #1

Average 505.3

505.7

TTV: 0.1

MAX:505.8
MIN:504.9

DEV: 0.4

Revision 1.0 November 5, 2013

3.1.6.2 5-Point Mode

5-Point Mode is a special operational mode that is usually used to take
measurements at 5 distinc t points on a wafer. Typically, these poi nts are at
the center, then 0º, 90º, 180º, an d 270º. For maximum accurac y, thickness
readings should be tak en with the wafer s tead y and hands not contac ting the
wafer.
To enter 5-Point Mode:

3.1.6.2.1 Press the MENU button on the front panel keypad..

3.1.6.2.2 Select Mode and press the  key.

3.1.6.2.3 Select 5-Point and press the  key. The screen will display MODE:5-

Point in the upper left hand corner. The lower left corner will display
ENTER to Measure Point #1.

3.1.6.2.4 Place the wafer between the probe at position 1 and press the  key.

3.1.6.2.5 Continue this process unt il all 5 points are meas ured. At the end of the
fifth measurement,
measurements. Pres sing the BACK k ey will return the display to t he 5
measurements. Pressing
set of 5-Point measurements.

 can be pressed to provide statistics on the

 from the statistics screen will begin a new

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MTI Instruments Technical Manual 7001-0005

MODE:Bow CAL:500.0

um

SELECT To Measure Side #1

705.2

MODE:Bow CAL:500.0

um

SELECT To Measure Side #2

0.0

S1:926.3

MODE:Bow CAL:500.0

um

SELECT To Start Bow Measurement

0.4

S1:926.3

S1:926.7

Revision 1.0 November 5, 2013

3.1.6.3 Bow Mode

The Proforma™ 300i and the Proforma™ 300Gi products are capable of
measuring wafer bo w in com pliance with AST M Specif ication F534 Standard
Method for Bow of S ilicon Slices. Bow meas urements require the use of a 3
point wafer fixture (bow ring). To perform a BOW measurement:

3.1.6.3.1 Place the wafer in the 3 point wafer fixtur e, aligning the m ajor flat parallel
to the opening in the wafer fixture.

3.1.6.3.2 Slide the fixture with the aligned wafer until the center of the wafer is
under the top probe.

3.1.6.3.3 Press the MENU button on the front panel keypad..

3.1.6.3.4 Select Mode and press the  key.

3.1.6.3.5 Select Bow and pres s the  key. The screen wi ll display MODE:Bow in
the upper left hand corner.

3.1.6.3.6 Press the  key once. The display will now display 0.00µm.

3.1.6.3.7 Remove the fixture and wafer from the probes.

3.1.6.3.8 Turn the wafer over and align the flat in the 3 point wafer fixture
identically to the alignment which was used on the first side.

3.1.6.3.9 Slide the 3 point wafer fixture with t he wafer under th e probe and center
the wafer on the probe and press the

 key.

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MTI Instruments Technical Manual 7001-0005

MODE

:Cont

. CAL:500.0

um

0.0

HI:0.0 LO:0.0

ZERO:505.7

Revision 1.0 November 5, 2013

3.1.7 Functions

3.1.7.1 Zero

The Zero function will calculate the off set necessary to force one point to a
thickness of zero, and t hen will apply this off set to all subsequent readings.
This function can be used in Contin uous and 5 Point mode, but not in Bow
mode. To utilize this function:

3.1.7.1.1 Place the wafer between the probes.

3.1.7.1.2 Press the ZERO key. The Zero offset value will be d isplayed a long with
HI and LO fields.

The ZERO field represent s the amount of off set that is being subtracte d
from the current reading (the offset calculated when ZERO was
pressed).
The HI and LO readings i ndicate the maximum and minimum deviat ion
from the initial (zero) value. The HI and LO functio ns will only update
when the reading is stab le ( appr oximately 1 second). As a r esult, quic kly
moving the wafer will not result in change in the HI or LO readings.

To exit ZERO mode, press the ZERO button again

3.1.7.2 Keyboard Lock

To prevent inadvertent use, the front panel k eyboard of the Prof orma™ 300i
and Proforma™ 300Gi can be disabled. Within a 3 second windo w, pr ess ,
,  (LEFT, BACK, UP). The screen will display Keyboard Locked. To
unlock, enter the same key sequence.

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MTI Instruments Technical Manual 7001-0005

MODE:Cont. CAL:500.0

VOLTS: TOP=10.00 BOTTOM=10.00

um

Cover Screw

Probe Holder

Cover

Phillips Head Screws

(Do not loosen or remove)

Probe Clamp Screw

3/16" Hex

Revision 1.0 November 5, 2013

3.1.8 Adjusting the Top Prob e

The Proforma™ 300i or Pr oforma™ 300Gi was shipped with nom inal probe spacing
to measure wafers bet ween 100 µm and 1000µm. By adjusting the top probe, it is
possible to measure thicknesses in excess of 1000µm.

3.1.8.1 Remove the single Phillips screw holding the top probe cover.

3.1.8.2 Slide the top cov er out. Note that the rear of the cover is engaged b y two
guide pins.

3.1.8.3 Enter raw volts mode (Setu pRaw VoltsOn). The display will now displ ay
the voltage reported by the amplif ier cards

3.1.8.4 Using a 3/32” hex wrench, loosen the clamp screw, on th e right hand side,
which secures the top prob e. Do not loosen or rem ove the 3 Phillips heads
screws on the side bar.

3.1.8.5 Gently grasp the probe wires and lift the probe so that a median surface
calibration sta ndard or median surface gau ge block can be placed between
the probes.

3.1.8.6 Note that the witness m ark on the top probe should fa ce the front panel (i. e.
towards the operator). With the median surface between the probes,
carefully move the top probe into a position so that the top probe voltage
reads 5V±1V.

3.1.8.7 Verify the witness m ark on the probe is in th e cor rect l ocation an d tighte n th e
clamp screw.

3.1.8.8 Replace the top probe cover.

3.1.8.9 Recalibrate (CalibrateCal STD)

Figure 10:Adjusting the Top Probe

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MTI Instruments Technical Manual 7001-0005
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3.2 Proforma™ 300OEMi

The Proforma™ 300O EMi relies on customer suppl ied software to control its f unctionality. Refer to the
software manual for more information on how to create software that interfaces with this product.

3.2.1 Setting the final probe gap on the Proforma™ 300OEMi.

As the Proforma™ 300OE Mi do es not h av e a disp lay or user interface, it is n eces s ar y to inter f ace
the controller unit t o a P C and a djus t the pr obe gaps via a virtua l int erfac e. Refer to the s oft ware
manual for more information on connecting a Proforma™ 300OEMi to a PC and installing the
provided basic support software.

In section 2.3.5, the pr obes were set to in itial conditions. To m ove them to their final positions,
the Proforma™ 300i Data Logger Program will be used.

3.2.1.1 Start the Proforma™ 300i Data Logger Program and connect to the
Proforma™ 300OEMi. F or hel p with ins talling, r unning, and connec tion, ref er
to Software Manual.

3.2.1.2 Make sure the VOLTS radio button is selected.

3.2.1.3 Insert a sample, calibration wafer, or gauge block which is repres entative of
the median thickness that will be measured. The sample used must be
larger than the probe and the face of the probes must be covered by the
sample.

3.2.1.4 Using whatever adjus tment mechanis m that the end user provided, carefully
move each of the probes, one at a time, to achieve a voltage reading of
5±1V. Make sure that the top and bottom probe witness marks are aligned.

3.2.1.5 Lock down the probe.

3.2.1.6 Calibrate the system. For the Proforma™ 300OEMi, calibration can be
achieved by either utilizing the CALIBRATION function on the Proforma™
300i Data Logger Program or can be done thru the c ommand interf ace using
user provided software.

Figure 11:Proforma™ 300i Data L o g g er Program

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MTI Instruments Technical Manual 7001-0005
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4 MAINTENANCE

4.1 Cleaning

4.1.1 Product Surfaces.

The surfaces of the Proforma™ 300i series produc ts can be c l ean ed us ing a d a mp, lint free cloth.
To prevent electrical shoc ks, the unit should be turn ed off when it is being clean ed. Do not use
harsh solvents or detergents to clean the equipment.

4.1.2 Probes

Do not use water to clean the probe surfaces. If the probe surfaces become contaminated,
isopropyl alcohol with a lint free cloth may be used.

4.1.3 Display

Clean the display with a clean, dry cloth.

4.2 Probe/Amplifier Calibration

The Probe/Amplifier c ombination is calibrated at t he factory. Do not attem pt to adjust the amplifier
calibration. Annual factory calibration services can be provided by MTI Instruments. Contact MTI
Instruments or their representatives for more details.

22

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