Motorola MPX2300D Datasheet

1
Motorola Sensor Device Data
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Motorola has developed a low cost, high volume, miniature pressure sensor package which is ideal as a sub–module component or a disposable unit. The unique concept of the Chip Pak allows great flexibility in system design while allowing an economic solution for the designer. This new chip carrier package uses Motorola’ s unique sensor die with its patented, piezoresistive implant technology, along with the added feature of on–chip, thin–film temperature compensation and calibration.
Features:
Low Cost
Patented piezoresistive strain gauge implant, temperature compensation
and calibration all integrated on a single, monolithic sensor die.
Pressure Range Available: 0–300 mmHg
Polysulfone (Mindell S–1000) Case Material (Medical, Class VI Approved)
Motorola is offering the Chip Pak option package. Applica­tion–specific parts will have an “SPX” prefix, followed by a four digit number, unique to the specific customer. Devices will be shipped in a tape and reel packaging.
NOTE: The die and wire bonds are exposed on the front
side of the Chip Pak (pressure is applied to the backside of the d evice). Front s ide die a nd wire p rotection must be provided i n the customer’s h ousing. Use caution w hen handling the devices during all processes.
Pin Number, Style 1
1 2 3 4
V
S
S+ S– Ground
MAXIMUM RATINGS
Rating Symbol Value Unit
Overpressure (Backside) P
max
125 PSI
Burst Pressure P
burst
1000 kPa
Supply Voltage V
Smax
10 Vdc
Storage Temperature T
stg
85 °C
Operating Temperature T
A
+15 to +40 °C
Motorola’s MPX2300D Pressure Sensors. Motorola’s MPX2300D pressure sensor has been designed for medical usage by combining the performance of Motorola’s shear stress pressure sensor design and the use of biomedically approved materials. Materials with a proven history in medical situations have been chosen to provide a sensor that can be used with confidence in applications, such as invasive blood pressure monitoring. It can be sterilized using ethylene oxide. The portions of the pressure sensor that are required to be biomedically approved are the rigid housing and the gel coating.
The rigid housing is molded from a white, medical grade polysulfone that has passed extensive biological t esting including: tissue culture test, rabbit implant, hemolysis, intracutaneous test in rabbits, and system toxicity, USP.
A silicone dielectric gel that has been used extensively in implants covers the silicon piezoresistive sensing element. The gel is a nontoxic, nonallergenic polymer system which passes pyrogen testing, as well as meeting all USP XX Bio­logical Testing Class VI requirements. The properties of the gel allow it to transmit pressure uniformly to the diaphragm surface, while isolating the internal electrical connections from the corrosive effects of fluids, such as saline solution. The gel provides electrical isolation sufficient to withstand defibrillation testing, as specified in the proposed Association for the Advancement of Medical Instrumentation (AAMI) Standard for blood pressure transducers. A biomedically ap­proved opaque filler in the gel prevents bright operating room lights from affecting the performance of the sensor.
Order this document
by MPX2300D/D
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SEMICONDUCTOR TECHNICAL DATA
Motorola, Inc. 1995

PRESSURE SENSORS
CHIP PAK ELEMENT
CASE 423–03
Style 1
REV 1
MPX2300D
2
Motorola Sensor Device Data
OPERATING CHARACTERISTICS
(VS = 6 Vdc, TA = 25°C unless otherwise noted)
Characteristics
Symbol Min Typ Max Unit
Pressure Range P
OP
0 300 mmHg
Supply Voltage
(8)
V
S
6.0 10 Vdc
Supply Current I
o
1.0 mAdc
Zero Pressure Offset V
off
–0.75 0.75 mV Sensitivity 4.95 5.0 5.05 µV/V/mmHg Full Scale Span
(1)
V
FSS
2.976 3.006 3.036 mV Linearity + Hysteresis – 2.0 2.0 Temperature Effect on Sensitivity TCS –0.1 +0.1 %/°C Temperature Effect on Full Scale Span TCV
FSS
–0.1 +0.1 %/°C
Temperature Effect on Offset
(4)
TCV
off
–9.0 +9.0 µV/°C
Input Impedance Z
in
1800 4500
Output Impedance Z
out
270 330
R
CAL
(150 k)
(9)
R
CAL
97 100 103 mmHg
Response Time
(5)
(10% to 90%)
t
R
1.0 ms
Temperature Error Band 0 85 °C Stability
(6)
±0.5 %V
FSS
MECHANICAL CHARACTERISTICS
Characteristics Symbol Min Typ Max Unit
Weight (Case 423) 170 mg Warm–Up 15 Sec
NOTES:
1. Measured at 6.0 Vdc excitation for 100 mmHg pressure differential. V
FSS
and FSS are like terms representing the algebraic difference be-
tween full scale output and zero pressure offset.
2. Maximum deviation from end–point straight line fit at 0 and 300 mmHg.
3. Slope of end–point straight line fit to full scale span at 0°C and +85°C relative to +25°C.
4. Slope of end–point straight line fit to zero pressure offset at 0°C and +85°C relative to +25°C.
5. For a 0 to 300 mmHg pressure step change.
6. Stability is defined as the maximum difference in output at any pressure within POP and temperature within +10°C to +85°C after: a. 1000 temperature cycles, –40°C to +125°C. b. 1.5 million pressure cycles, 0 to 300 mmHg.
7. Operating characteristics based on positive pressure differential relative to the vacuum side (gauge/differential).
8. Recommended voltage supply: 6 V ± 0.2 V , regulated. Sensor output is ratiometric to the voltage supply . Supply voltages above +10 V may induce additional error due to device self–heating.
9. Offset measurement with respect to the measured sensitivity when a 150k ohm resistor is connected to VS and S+ output.
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